DE3870116D1 - Feinregelungsvorrichtung eines einheitselements bezueglich eines referenzsystems und deren anwendung. - Google Patents

Feinregelungsvorrichtung eines einheitselements bezueglich eines referenzsystems und deren anwendung.

Info

Publication number
DE3870116D1
DE3870116D1 DE8888810580T DE3870116T DE3870116D1 DE 3870116 D1 DE3870116 D1 DE 3870116D1 DE 8888810580 T DE8888810580 T DE 8888810580T DE 3870116 T DE3870116 T DE 3870116T DE 3870116 D1 DE3870116 D1 DE 3870116D1
Authority
DE
Germany
Prior art keywords
components
control device
application
reference system
fine control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888810580T
Other languages
English (en)
Inventor
Hubert Choffat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Application granted granted Critical
Publication of DE3870116D1 publication Critical patent/DE3870116D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microscoopes, Condenser (AREA)
  • Vehicle Body Suspensions (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
  • Lens Barrels (AREA)
  • Feedback Control In General (AREA)
  • Electron Sources, Ion Sources (AREA)
DE8888810580T 1987-08-25 1988-08-23 Feinregelungsvorrichtung eines einheitselements bezueglich eines referenzsystems und deren anwendung. Expired - Fee Related DE3870116D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8711893A FR2619932B1 (fr) 1987-08-25 1987-08-25 Dispositif de reglage fin d'une unite par rapport a un systeme de reference et utilisation de ce dispositif

Publications (1)

Publication Number Publication Date
DE3870116D1 true DE3870116D1 (de) 1992-05-21

Family

ID=9354403

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888810580T Expired - Fee Related DE3870116D1 (de) 1987-08-25 1988-08-23 Feinregelungsvorrichtung eines einheitselements bezueglich eines referenzsystems und deren anwendung.

Country Status (5)

Country Link
EP (1) EP0307354B1 (de)
JP (1) JPS6470716A (de)
AT (1) ATE75056T1 (de)
DE (1) DE3870116D1 (de)
FR (1) FR2619932B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2500128B2 (ja) * 1991-09-27 1996-05-29 日立金属株式会社 微小伸長装置
DE19733193B4 (de) * 1997-08-01 2005-09-08 Carl Zeiss Jena Gmbh Mikroskop mit adaptiver Optik
JP4872169B2 (ja) * 2001-07-31 2012-02-08 シンフォニアテクノロジー株式会社 部品整送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2307280A1 (fr) * 1975-04-08 1976-11-05 Geometric Data Corp Ensemble de mise au point de precision
GB1593064A (en) * 1976-12-01 1981-07-15 Georges M P Automatic microscope specimen slide examination apparatus
JPS5560904A (en) * 1978-11-01 1980-05-08 Agency Of Ind Science & Technol Automatic focus adjusting device of microscope
DE3614996C1 (de) * 1986-05-02 1987-07-30 Leitz Ernst Gmbh Elektrisch steuerbare Antriebsvorrichtung

Also Published As

Publication number Publication date
EP0307354A1 (de) 1989-03-15
EP0307354B1 (de) 1992-04-15
FR2619932B1 (fr) 1991-08-30
FR2619932A1 (fr) 1989-03-03
ATE75056T1 (de) 1992-05-15
JPS6470716A (en) 1989-03-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee