ATE127097T1 - Vorrichtung und verfahren zur reinigung von wasserstofffluorid. - Google Patents

Vorrichtung und verfahren zur reinigung von wasserstofffluorid.

Info

Publication number
ATE127097T1
ATE127097T1 AT89906949T AT89906949T ATE127097T1 AT E127097 T1 ATE127097 T1 AT E127097T1 AT 89906949 T AT89906949 T AT 89906949T AT 89906949 T AT89906949 T AT 89906949T AT E127097 T1 ATE127097 T1 AT E127097T1
Authority
AT
Austria
Prior art keywords
acid
exchange material
anionic
cationic
predetermined level
Prior art date
Application number
AT89906949T
Other languages
English (en)
Inventor
John B Davison
Chung-Tseng Hsu
Original Assignee
Athens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Athens Corp filed Critical Athens Corp
Application granted granted Critical
Publication of ATE127097T1 publication Critical patent/ATE127097T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/197—Separation; Purification by adsorption
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • C01B7/197—Separation; Purification by adsorption
    • C01B7/198—Separation; Purification by adsorption by solid ion-exchangers
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G49/00—Compounds of iron
    • C01G49/02—Oxides; Hydroxides
    • C01G49/08—Ferroso-ferric oxide [Fe3O4]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S210/00—Liquid purification or separation
    • Y10S210/902—Materials removed
    • Y10S210/915—Fluorine containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S423/00—Chemistry of inorganic compounds
    • Y10S423/09—Reaction techniques
    • Y10S423/14—Ion exchange; chelation or liquid/liquid ion extraction

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Glass Compositions (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
AT89906949T 1988-05-20 1989-05-09 Vorrichtung und verfahren zur reinigung von wasserstofffluorid. ATE127097T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/196,327 US4952386A (en) 1988-05-20 1988-05-20 Method and apparatus for purifying hydrogen fluoride

Publications (1)

Publication Number Publication Date
ATE127097T1 true ATE127097T1 (de) 1995-09-15

Family

ID=22724944

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89906949T ATE127097T1 (de) 1988-05-20 1989-05-09 Vorrichtung und verfahren zur reinigung von wasserstofffluorid.

Country Status (6)

Country Link
US (1) US4952386A (de)
EP (1) EP0417194B1 (de)
JP (1) JPH03504374A (de)
AT (1) ATE127097T1 (de)
DE (1) DE68924065T2 (de)
WO (1) WO1989011321A1 (de)

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KR101243509B1 (ko) 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. 펌프에서의 압력 보상을 위한 시스템 및 방법
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TWI434725B (zh) * 2011-03-08 2014-04-21 Asia Union Electronical Chemical Corp 利用氫氧基化合物和離子交換樹脂吸附以純化氟酸系蝕刻液的處理方法
MX357878B (es) 2014-12-18 2018-07-27 Mexichem Fluor Sa De Capital Variable Proceso para la purificación del ácido fluorhídrico incluyendo la obtención del subproducto ácido arsenioso.
KR101701172B1 (ko) * 2015-02-17 2017-02-13 한국화학연구원 불화수소 흡착제 및 이를 이용한 불화수소의 선택적 제거방법
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CN111701397B (zh) * 2020-07-03 2021-12-21 攀钢集团攀枝花钢铁研究院有限公司 脱除有机胺脱硫溶液中硫酸根离子和氯离子及减少有机胺溶液损失的工艺
KR20230094339A (ko) * 2021-12-21 2023-06-28 삼성전자주식회사 필터 오염 측정 장치, 이를 포함하는 필터 어셈블리 및 이를 이용한 필터 오염 측정 방법
CN116161621B (zh) * 2023-04-23 2023-07-04 联仕(昆山)化学材料有限公司 一种电子级盐酸的提纯装置及其提纯工艺

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Also Published As

Publication number Publication date
EP0417194A4 (en) 1991-07-03
DE68924065D1 (de) 1995-10-05
EP0417194A1 (de) 1991-03-20
EP0417194B1 (de) 1995-08-30
WO1989011321A1 (en) 1989-11-30
DE68924065T2 (de) 1996-05-02
JPH03504374A (ja) 1991-09-26
US4952386A (en) 1990-08-28

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Legal Events

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