AT312054B - Verfahren zum Herstellen eines Silizium-Planartransistors - Google Patents

Verfahren zum Herstellen eines Silizium-Planartransistors

Info

Publication number
AT312054B
AT312054B AT203071A AT203071A AT312054B AT 312054 B AT312054 B AT 312054B AT 203071 A AT203071 A AT 203071A AT 203071 A AT203071 A AT 203071A AT 312054 B AT312054 B AT 312054B
Authority
AT
Austria
Prior art keywords
manufacturing
planar transistor
silicon planar
silicon
transistor
Prior art date
Application number
AT203071A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of AT312054B publication Critical patent/AT312054B/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
AT203071A 1970-03-19 1971-03-09 Verfahren zum Herstellen eines Silizium-Planartransistors AT312054B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702013220 DE2013220A1 (de) 1970-03-19 1970-03-19 Verfahren zum Herstellen einer Transistor anordnung aus Silicium

Publications (1)

Publication Number Publication Date
AT312054B true AT312054B (de) 1973-12-10

Family

ID=5765627

Family Applications (1)

Application Number Title Priority Date Filing Date
AT203071A AT312054B (de) 1970-03-19 1971-03-09 Verfahren zum Herstellen eines Silizium-Planartransistors

Country Status (8)

Country Link
US (1) US3754321A (de)
AT (1) AT312054B (de)
CH (1) CH522954A (de)
DE (1) DE2013220A1 (de)
FR (1) FR2083421B1 (de)
GB (1) GB1310806A (de)
NL (1) NL7103588A (de)
SE (1) SE378154B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4999318A (en) * 1986-11-12 1991-03-12 Hitachi, Ltd. Method for forming metal layer interconnects using stepped via walls

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523038A (en) * 1965-06-02 1970-08-04 Texas Instruments Inc Process for making ohmic contact to planar germanium semiconductor devices
US3571913A (en) * 1968-08-20 1971-03-23 Hewlett Packard Co Method of making ohmic contact to a shallow diffused transistor
ES374318A1 (es) * 1968-12-10 1972-03-16 Matsushita Electronics Corp Un metodo de fabricar un dispositivo semiconductor sensiblea la presion.

Also Published As

Publication number Publication date
DE2013220A1 (de) 1971-11-25
US3754321A (en) 1973-08-28
SE378154B (de) 1975-08-18
GB1310806A (en) 1973-03-21
NL7103588A (de) 1971-09-21
FR2083421B1 (de) 1977-01-21
CH522954A (de) 1972-05-15
FR2083421A1 (de) 1971-12-17

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee