ZA200702229B - Brittle material scribing method and scribing apparatus - Google Patents

Brittle material scribing method and scribing apparatus

Info

Publication number
ZA200702229B
ZA200702229B ZA200702229A ZA200702229A ZA200702229B ZA 200702229 B ZA200702229 B ZA 200702229B ZA 200702229 A ZA200702229 A ZA 200702229A ZA 200702229 A ZA200702229 A ZA 200702229A ZA 200702229 B ZA200702229 B ZA 200702229B
Authority
ZA
South Africa
Prior art keywords
scribing
brittle material
scribing apparatus
scribing method
material scribing
Prior art date
Application number
ZA200702229A
Other languages
English (en)
Inventor
Fujii Masahiro
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of ZA200702229B publication Critical patent/ZA200702229B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • C03B33/093—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam using two or more focussed radiation beams
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/09—Severing cooled glass by thermal shock
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Thermal Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Laser Beam Processing (AREA)
ZA200702229A 2004-10-01 2007-03-16 Brittle material scribing method and scribing apparatus ZA200702229B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004317170 2004-10-01

Publications (1)

Publication Number Publication Date
ZA200702229B true ZA200702229B (en) 2008-08-27

Family

ID=36142639

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA200702229A ZA200702229B (en) 2004-10-01 2007-03-16 Brittle material scribing method and scribing apparatus

Country Status (10)

Country Link
US (1) US20080061043A1 (zh)
EP (1) EP1803538A1 (zh)
JP (1) JPWO2006038565A1 (zh)
KR (1) KR100849696B1 (zh)
CN (1) CN101043992B (zh)
BR (1) BRPI0515667A (zh)
MX (1) MX2007003742A (zh)
RU (1) RU2354616C2 (zh)
WO (1) WO2006038565A1 (zh)
ZA (1) ZA200702229B (zh)

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US7723212B2 (en) * 2004-07-30 2010-05-25 Mitsuboshi Diamond Industrial Co., Ltd Method for forming median crack in substrate and apparatus for forming median crack in substrate
PL2131994T3 (pl) * 2007-02-28 2014-03-31 Ceram Gmbh Sposób wytwarzania elementu konstrukcyjnego z zastosowaniem asymetrycznego wprowadzania energii wzdłuż linii podziału lub linii żądanego przerwania
US7982162B2 (en) * 2007-05-15 2011-07-19 Corning Incorporated Method and apparatus for scoring and separating a brittle material with a single beam of radiation
TWI409122B (zh) * 2007-07-13 2013-09-21 Mitsuboshi Diamond Ind Co Ltd A method for processing a brittle material substrate and a crack forming apparatus for the method
JP5011048B2 (ja) * 2007-09-27 2012-08-29 三星ダイヤモンド工業株式会社 脆性材料基板の加工方法
WO2009047990A1 (ja) * 2007-10-11 2009-04-16 Mitsuboshi Diamond Industrial Co., Ltd. 脆性材料基板、および、脆性材料基板のレーザスクライブ方法、レーザスクライブ装置
JP5187556B2 (ja) * 2007-10-19 2013-04-24 澁谷工業株式会社 レーザ割断装置
DE102008007632A1 (de) 2008-02-04 2009-08-06 Limo Patentverwaltung Gmbh & Co. Kg Verfahren zum Laserschneiden eines nichtmetallischen Werkstücks
CN101513692B (zh) * 2008-02-21 2011-09-07 富士迈半导体精密工业（上海）有限公司 激光切割脆性材料的方法及装置
JP2010090010A (ja) * 2008-10-10 2010-04-22 Mitsuboshi Diamond Industrial Co Ltd 脆性材料基板の割断方法及び割断装置
JP5562254B2 (ja) * 2008-12-16 2014-07-30 株式会社レミ 脆性材料の分割装置および割断方法
KR20120004456A (ko) * 2009-03-20 2012-01-12 코닝 인코포레이티드 정밀 레이저 스코어링
KR20100107253A (ko) * 2009-03-25 2010-10-05 삼성모바일디스플레이주식회사 기판 절단 장치 및 이를 이용한 기판 절단 방법
KR101041137B1 (ko) * 2009-03-25 2011-06-13 삼성모바일디스플레이주식회사 기판 절단 장치 및 이를 이용한 기판 절단 방법
WO2011025908A1 (en) * 2009-08-28 2011-03-03 Corning Incorporated Methods for laser cutting articles from chemically strengthened glass substrates
US8946590B2 (en) * 2009-11-30 2015-02-03 Corning Incorporated Methods for laser scribing and separating glass substrates
RU2459691C2 (ru) * 2010-11-29 2012-08-27 Юрий Георгиевич Шретер Способ отделения поверхностного слоя полупроводникового кристалла (варианты)
WO2013016823A1 (en) * 2011-07-29 2013-02-07 Ats Automation Tooling Systems Inc. Systems and methods for producing silicon slim rods
US9212081B2 (en) * 2012-11-21 2015-12-15 Corning Incorporated Methods of cutting a laminate strengthened glass substrate
WO2014157245A1 (ja) * 2013-03-26 2014-10-02 旭硝子株式会社 ガラス板の加工方法、およびガラス板の加工装置
JP6341279B2 (ja) * 2014-07-03 2018-06-13 新日鐵住金株式会社 レーザ加工装置
LT3206829T (lt) * 2014-10-13 2019-03-12 Evana Technologies, Uab Lazerinio apdorojimo būdas perskelti arba perpjauti ruošinį, formuojant "adatos" formos pažeidimus
LT6428B (lt) * 2015-10-02 2017-07-25 Uab "Altechna R&D" Skaidrių medžiagų lazerinis apdirbimo būdas ir įrenginys
CN107962305A (zh) * 2017-12-21 2018-04-27 英诺激光科技股份有限公司 一种高折射率、低硬度透明材料激光切割装置及切割方法
US11075496B2 (en) * 2018-06-28 2021-07-27 Samsung Electronics Co., Ltd. Laser dicing device, method of laser beam modulation, and method of dicing a substrate
KR102617346B1 (ko) * 2018-06-28 2023-12-26 삼성전자주식회사 산란 억제를 위한 절단용 레이저 장치
JP7466829B2 (ja) 2020-02-06 2024-04-15 日本電気硝子株式会社 ガラス板の製造方法
CN112894164A (zh) * 2021-01-19 2021-06-04 嘉兴艾可镭光电科技有限公司 一种用于玻璃的激光加工设备

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US3701880A (en) * 1968-11-29 1972-10-31 Westinghouse Electric Corp Method for sculpturing an indicia or decorative design in the surface of an article with a beam of corpuscular energy
GB1405663A (en) 1972-09-20 1975-09-10 Pilkington Brothers Ltd Cutting glass
US4468534A (en) * 1982-09-30 1984-08-28 Boddicker Franc W Method and device for cutting glass
FR2610316B1 (fr) 1987-01-29 1992-11-13 Saint Gobain Vitrage Volumes de verre trempes par contact avec contraintes de bord renforcees
US5385786A (en) 1993-02-09 1995-01-31 Glasstech, Inc. Apparatus and method for controlling stresses in laminated automotive glass
JP3153682B2 (ja) * 1993-08-26 2001-04-09 松下電工株式会社 回路板の製造方法
JP3414205B2 (ja) * 1997-06-27 2003-06-09 日本板硝子株式会社 合わせガラス
US5910235A (en) * 1997-09-12 1999-06-08 Western Digital Corporation Etching and pipelined texturing of a substrate in a stationary vacuum deposition machine
JP4390937B2 (ja) * 1999-11-25 2009-12-24 三星ダイヤモンド工業株式会社 ガラス板分割方法及び装置
TW592868B (en) * 2001-07-18 2004-06-21 Mitsuboshi Diamond Ind Co Ltd Device and method for scribing fragile material substrate

Also Published As

Publication number Publication date
US20080061043A1 (en) 2008-03-13
RU2354616C2 (ru) 2009-05-10
KR100849696B1 (ko) 2008-07-31
WO2006038565A1 (ja) 2006-04-13
EP1803538A1 (en) 2007-07-04
MX2007003742A (es) 2007-06-05
CN101043992B (zh) 2011-03-23
JPWO2006038565A1 (ja) 2008-05-15
RU2007116167A (ru) 2008-11-10
CN101043992A (zh) 2007-09-26
KR20070088588A (ko) 2007-08-29
BRPI0515667A (pt) 2008-07-29

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