WO2024130624A1 - Appareil de nettoyage, système de nettoyage et procédé de nettoyage - Google Patents

Appareil de nettoyage, système de nettoyage et procédé de nettoyage Download PDF

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Publication number
WO2024130624A1
WO2024130624A1 PCT/CN2022/140941 CN2022140941W WO2024130624A1 WO 2024130624 A1 WO2024130624 A1 WO 2024130624A1 CN 2022140941 W CN2022140941 W CN 2022140941W WO 2024130624 A1 WO2024130624 A1 WO 2024130624A1
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WIPO (PCT)
Prior art keywords
cleaning
carrier
pipeline
spray
storage tank
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PCT/CN2022/140941
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English (en)
Chinese (zh)
Inventor
张萌萌
要军磊
张宇宁
李闯
云全新
黎宇翔
董宇亮
章文蔚
Original Assignee
深圳华大生命科学研究院
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Application filed by 深圳华大生命科学研究院 filed Critical 深圳华大生命科学研究院
Priority to PCT/CN2022/140941 priority Critical patent/WO2024130624A1/fr
Publication of WO2024130624A1 publication Critical patent/WO2024130624A1/fr

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  • the present invention belongs to the technical field of cleaning equipment, and in particular to a cleaning equipment, a cleaning system and a cleaning method.
  • chip cleaning is mainly performed by tank cleaning.
  • the current tank cleaning method is to immerse the chip in a cleaning solution.
  • a metal film is plated on the surface of the chip. After the chip is immersed for many times, it is easy to cause the metal film to fall off and oxidize, which has a great impact on the service life of the chip.
  • the invention provides a cleaning device, a cleaning system and a cleaning method to solve the technical problem of immersing easily damaged chips in the prior art.
  • the present invention adopts the following solutions:
  • a cleaning device comprises a box, a mobile carrier platform and a cleaning pipeline group;
  • the mobile carrier platform is installed in the box and comprises a carrier and a drive module, the carrier is located in the box, the drive module is connected to the carrier and is used to drive the carrier to move linearly in the up and down directions;
  • the cleaning pipeline group comprises multiple cleaning pipelines, each of the cleaning pipelines is arranged in the box and comprises a pipeline body and a nozzle, the nozzle is connected to the pipeline body and is arranged to face the carrier.
  • the carrier includes a support frame and a cover assembly
  • the support frame is provided with a plurality of loading stations
  • the cover assembly is pivotally connected to the support frame and is located above the loading stations, and the cover assembly is used to limit the workpiece loaded in the loading stations in the up and down directions.
  • the cover assembly can pivot relative to the support frame to open and close the loading stations, and when the cover assembly opens the loading stations, the workpiece can be placed into the loading stations from above the loading stations, and then the cover assembly is rotated to close the loading stations, thereby limiting the up and down movement of the workpiece.
  • the support frame includes a carrier body, a base and a connecting side plate, wherein the base is arranged at the bottom of the carrier body; the connecting side plates are arranged at both ends of the base to clamp the carrier body and are pivotally connected to the cover assembly; wherein the loading station is located on the carrier body.
  • the support frame further comprises a baffle plate, which is connected to the connecting side plate to limit the pivoting movement of the cover plate assembly.
  • the pivoting angle of the cover plate assembly is limited by the baffle plate.
  • the cover plate assembly includes a cover plate and a plurality of limiting components, the cover plate is pivotally connected to the support frame; the plurality of limiting components are connected to the cover plate and are arranged one by one in alignment with the plurality of loading stations. The limiting components can be pressed against the workpiece loaded in the loading station, thereby limiting the workpiece in the up and down directions.
  • the carrier further includes a locking structure, the locking structure is used to maintain the carrier in an open state, and when the carrier is in the open state, the cover assembly opens the loading station.
  • the locking structure allows the cover assembly to maintain the state of opening the loading station, preventing the cover assembly from automatically pivoting and falling due to gravity.
  • one end of the pipeline body is an inlet end, and the other end is a closed arrangement, so that the fluid in the pipeline can only be sprayed outward through the nozzle.
  • the pipeline body includes a main pipeline and multiple branch pipelines, and the multiple branch pipelines are arranged at intervals along the extension direction of the pipeline body and connected to the main pipeline, and each branch pipeline is correspondingly provided with a nozzle.
  • the cleaning pipeline can cover a wider cleaning range.
  • the cleaning pipeline groups are relatively arranged on both sides of the carrier.
  • the cleaning pipeline groups located on both sides of the carrier can clean two positions of the workpiece at the same time to ensure the cleaning effect.
  • the plurality of cleaning pipelines are arranged at intervals in the up-down direction.
  • the mobile carrier platform further includes a sliding mechanism, the sliding mechanism is installed on the box, and the carrier is slidingly connected to the box through the sliding mechanism.
  • the sliding mechanism realizes the sliding connection between the carrier and the box, which facilitates the driving module to drive the carrier to move.
  • the driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.
  • the cleaning device further comprises a fan module, which is mounted on the side wall of the box and is configured to draw air outward from the box.
  • the fan module is used to draw out the volatilized gas in the box, thereby improving safety.
  • the number of the cleaning pipelines is three, and they are respectively an air blowing pipeline, a first spray pipeline and a second spray pipeline arranged from top to bottom.
  • the cleaning equipment has three cleaning workstations for cleaning the workpieces placed on the carrier.
  • the present invention also provides a cleaning system, which comprises the above cleaning device.
  • the cleaning system further comprises an operating table assembly and a liquid storage tank group, wherein the liquid storage tank group is connected to the cleaning pipeline group, and the operating table assembly is used to control the operation of the cleaning equipment.
  • the liquid storage tank group can store cleaning liquid and spray it through the cleaning pipeline group, and the operating table assembly can control the operation of the cleaning equipment.
  • the operating table assembly includes a cabinet, a control module and a pump-valve assembly;
  • the control module includes an input unit and a control unit, and the control unit is signal-connected to the input unit;
  • the pump-valve assembly is arranged in the cabinet and connected to the liquid storage tank group; wherein the pump-valve assembly and the drive module are both signal-connected to the control unit.
  • the operating table assembly mainly integrates a control module and a pump-valve assembly.
  • the control module is used to control the drive module and the pump-valve assembly, so that the combined operation of the cleaning pipeline group and the mobile carrier platform can be controlled.
  • a liquid level sensor is provided at the bottom of the liquid storage tank group to monitor the liquid level in the liquid storage tank group.
  • the number of the cleaning pipelines is 3, and they are respectively an air blowing pipeline, a first spray pipeline, and a second spray pipeline arranged in a top-down direction;
  • the liquid storage tank group includes a first liquid storage tank and a second liquid storage tank, wherein the first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent, and the second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent.
  • the first spray pipeline is used to spray the first cleaning agent
  • the second spray pipeline is used to spray the second cleaning agent
  • the air blowing pipeline is used to blow dry the sprayed workpiece.
  • the present invention also provides a cleaning method, which is implemented by applying the above-mentioned cleaning system, wherein the first cleaning agent is water, and the cleaning method comprises:
  • the control unit controls the carrier to reciprocate the chip between the spray area corresponding to the first spray pipeline and the spray area corresponding to the second spray pipeline, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, respectively, so that the first spray pipeline and the second spray pipeline alternately spray and clean the chip;
  • the control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline performs water spray cleaning on the chip;
  • the control unit controls the carrier to move the chip to the purge area corresponding to the air blowing pipeline to complete the purge of the chip;
  • the control unit controls the carrier to move the cleaned chips out of the cleaning area of the cleaning pipeline group.
  • the cleaning method is applied in the cleaning system to realize an automated full-process chip cleaning operation.
  • the present invention has the following beneficial effects:
  • a mobile carrier platform and a cleaning pipeline group are installed on a box body, and the mobile carrier platform includes a carrier and a driving module for driving the carrier to move, the carrier is used to place the workpiece to be cleaned, and the driving module drives the carrier to move linearly in the up and down directions.
  • the cleaning pipeline group includes multiple cleaning pipelines composed of pipeline bodies and nozzles, and the cleaning pipeline can allow fluid to flow and spray toward the carrier through the nozzle, thereby cleaning the workpiece to be cleaned placed on the carrier.
  • the cleaning equipment can spray and clean the chip placed on the carrier, reduce damage to the chip, and ensure the service life of the chip.
  • FIG1 is a schematic diagram of a cleaning device according to one embodiment of the present invention.
  • FIG2 is a second schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG3 is a third schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG4 is a fourth schematic diagram of a cleaning device provided according to one embodiment of the present invention.
  • FIG5 is a partial enlarged view of point A in FIG4 ;
  • FIG6 is a schematic diagram of a mobile carrier platform according to one embodiment of the present invention.
  • FIG7 is a partial enlarged view of point B in FIG6;
  • FIG8 is a schematic diagram of a cleaning system provided according to one embodiment of the present invention.
  • FIG9 is a schematic diagram of an operating table assembly provided according to one embodiment of the present invention.
  • FIG. 10 is a flow chart of a cleaning method according to one embodiment of the present invention.
  • Mobile carrier platform 121. Carrier; 1211. Carrier body; 1212. Base; 1213. Connecting side plate; 1214. Cover plate; 1215. Limiting component; 1216. Baffle plate; 1217. Support component; 1218. Baffle plate; 1219. Magnetic buckle; 121a. Magnetic buckle hole; 121b. Connecting column;
  • driving module 1221, power component; 1222, lead screw; 1223, lead screw nut; 1224, second guide rail; 1225, second slider; 123, sliding mechanism; 1231, first guide rail; 1232, first slider; 124, first slider mounting plate; 125, second slider mounting plate; 126, slide rail connecting plate;
  • Cleaning pipeline group 13a. Pipeline body; 13b. Spray head; 131. Air blowing pipeline; 132. First spray pipeline; 133. Second spray pipeline;
  • Liquid storage tank group 31. First liquid storage tank; 32. Second liquid storage tank; 33. Liquid level sensor;
  • first and second are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as “first” and “second” may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of “plurality” is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
  • the terms “installed”, “connected”, “connected”, “fixed” and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • installed can be a fixed connection, a detachable connection, or an integral connection
  • it can be a mechanical connection or an electrical connection
  • it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined.
  • the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • a first aspect of the present invention provides a cleaning device, which includes a box 11, a mobile carrier platform 12, and a cleaning pipeline group 13.
  • the mobile carrier platform 12 is installed in the box 11 and includes a carrier 121 and a drive module 122.
  • the carrier 121 is located in the box 11.
  • the drive module 122 is connected to the carrier 121 and is used to drive the carrier 121 to move linearly in the up and down directions.
  • the cleaning pipeline group 13 includes multiple cleaning pipelines, each of which is arranged in the box 11 and includes a pipeline body 13a and a nozzle 13b.
  • the nozzle 13b is connected to the pipeline body 13a and is arranged to face the carrier 121.
  • the mobile carrier platform 12 and the cleaning pipeline group 13 are installed on the box 11.
  • the mobile carrier platform 12 includes a carrier 121 and a driving module 122 for driving the carrier 121 to move.
  • the carrier 121 is used to place the workpiece 4, and the driving module 122 drives the carrier 121 to move linearly in the up and down directions.
  • the cleaning pipeline group 13 includes multiple cleaning pipelines consisting of pipeline bodies 13 a and nozzles 13 b .
  • the cleaning pipelines allow fluid to flow and spray toward the carrier 121 through the nozzles 13 b , thereby cleaning the workpiece placed on the carrier 121 .
  • the carrier 121 includes a support frame and a cover assembly
  • the support frame is provided with a plurality of loading stations
  • the cover assembly is pivotally connected to the support frame and is located above the loading station
  • the cover assembly is used to limit the workpiece 4 loaded in the loading station in the up and down direction.
  • the cover assembly can pivot relative to the support frame to open and close the loading station, when the cover assembly opens the loading station, the workpiece 4 can be placed in the loading station from above the loading station, and then the cover assembly is rotated to close the loading station, thereby limiting the up and down movement of the workpiece.
  • the support frame includes a carrier body 1211, a base 1212 and a connecting side plate 1213.
  • the base 1212 is arranged at the bottom of the carrier body 1211, and the connecting side plates 1213 are arranged at both ends of the base 1212 to clamp the carrier body 1211 and are pivotally connected to the cover assembly.
  • the loading station is located on the carrier body 1211.
  • the support frame is a frame structure assembled by the carrier body 1211, the base 1212 and the connecting side plates 1213.
  • the connecting side plates 1213 are located at both ends of the base 1212 to clamp and fix the carrier body 1211, and the cover assembly is pivotally connected to the top of the connecting side plates 1213, so as to open and close the loading station located on the carrier body 1211.
  • the support frame further includes a baffle 1216, which is connected to the connecting side plate 1213 to limit the pivoting movement of the cover assembly.
  • the baffle 1216 is arranged on the connecting side plate 1213.
  • the cover plate assembly includes a cover plate 1214 and a plurality of limiting components 1215.
  • the cover plate 1214 is pivotally connected to the support frame, and the plurality of limiting components are connected to the cover plate 1214 and are arranged one by one in alignment with the plurality of loading stations.
  • the cover plate assembly covers the loading station, and the limiting components 1215 can abut against the workpiece 4 loaded in the loading station, thereby limiting the workpiece 4 in the up and down directions.
  • the carrier body 1211 is provided with 4 loading stations, and the number of the limiting components 1215 is also 4 and aligned with the 4 loading stations.
  • Each loading station is provided with a supporting component 1217 and a plurality of baffles 1218.
  • the cover assembly is pivoted to switch the carrier 121 to the closed state, and the limiting component 1215 abuts against the top of the workpiece 4 to limit the up and down movement of the workpiece 4, so as to fix the workpiece 4 in the loading station.
  • the limiting component 1215 and the supporting component 1217 are both screws, but are not limited thereto, and may also include, for example, latches, etc., to ensure that the workpiece can be limited up and down.
  • the carrier 121 further includes a locking structure, which is used to maintain the open state of the carrier 121.
  • the locking structure allows the cover assembly to maintain the state of opening the loading station, thereby preventing the cover assembly from automatically pivoting and falling due to gravity, or even covering the loading station.
  • the locking structure includes a magnetic buckle 1219 and a magnetic buckle hole 121a provided on the baffle 1216.
  • the magnetic buckle 1219 is located in the magnetic buckle hole 121a and adsorbs the baffle 1216, so that the cover assembly maintains the state of opening the loading station.
  • the locking structure is not limited to this.
  • the locking structure includes a spring latch and a latch hole. When the carrier 121 is in the open state, the spring latch can be inserted into the latch hole to keep the cover assembly in the state of opening the loading station.
  • one end of the pipeline body 13a is an inlet end, and the other end is a closed end. Fluid can enter from the inlet end, and because the other end is closed, the fluid in the pipeline can only be sprayed outward through the nozzle 13b.
  • the pipeline body 13a includes a main pipeline and a plurality of branch pipelines.
  • the plurality of branch pipelines are arranged at intervals along the extension direction of the pipeline body and are connected to the main pipeline.
  • a nozzle 13b is correspondingly arranged for each branch pipeline.
  • the pipeline body 13a is mainly composed of a main pipeline and a plurality of branch pipelines.
  • the branch pipelines can play a diversion role and guide the fluid to different nozzles 13b. It can be understood that when a plurality of nozzles 13b are provided, the cleaning pipeline can cover a wider cleaning range.
  • each nozzle 13b corresponds to each loading station one by one, so as to achieve the purpose of cleaning multiple workpieces 4 at one time.
  • the cleaning pipeline groups 13 are relatively arranged on both sides of the carrier 121.
  • the carrier 121 can move within the spraying area defined by the two cleaning pipeline groups 13, so as to clean the workpiece 4 at two positions at the same time.
  • the number of cleaning pipeline groups 13 is not limited to this, and it is sufficient to ensure that the workpiece 4 can be sprayed at two relative positions at the same time.
  • Fig. 4 in the embodiment of the present invention, multiple cleaning pipelines are arranged at intervals in the vertical direction. Different cleaning fluids can flow into each cleaning pipeline, and each cleaning pipeline has different cleaning effects.
  • the cleaning pipeline group 13 includes the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133.
  • the carrier 121 moves in the up and down direction, the carrier 121 sequentially passes through the air blowing area of the air blowing pipeline 131, the spraying area of the first spraying pipeline 132, and the spraying area of the second spraying pipeline 133.
  • the cleaning equipment has three cleaning workstations to clean the workpiece 4 placed on the carrier 121.
  • the mobile carrier platform 12 also includes a sliding mechanism 123, which is installed on the box body 11, and the carrier 121 is slidingly connected to the box body 11 through the sliding mechanism 123.
  • the sliding mechanism 123 has the function of reducing friction.
  • the sliding mechanism 123 is used to achieve a sliding connection between the carrier 121 and the box body 11, which is beneficial for the driving module 122 to drive the carrier 121 to move up and down.
  • the number of sliding mechanisms 123 is 2 and they are respectively installed on the opposite side walls of the box body 11 to ensure the stability of the carrier 121 during movement.
  • the sliding mechanism 123 includes a first guide rail 1231 and a first slider 1232.
  • the first guide rail 1231 is installed on the box body 11, the first slider 1232 is slidably connected to the first guide rail 1231, and the carrier 121 is connected to the first slider 1232.
  • the driving module 122 drives the first slider 1232 to slide on the first guide rail 1231, thereby driving the carrier 121 to move in the up and down direction.
  • the sliding mechanism 123 in this embodiment is a first linear guide mechanism.
  • the sliding mechanism 123 includes a sliding rod and a sleeve slidably connected to the sliding rod, and the carrier 121 is connected to the sleeve.
  • the driving module 122 drives the sleeve to move on the sliding rod, thereby driving the carrier 121 to move in the up and down direction.
  • the sliding mechanism 123 is not limited to the illustrated embodiment, and it only needs to ensure that the mobile carrier platform 12 can move in the up and down directions on the box body 11, and no specific limitation is made here.
  • the driving module 122 includes a power component 1221 and a transmission mechanism.
  • the transmission mechanism is connected to the sliding mechanism 123 .
  • the power component 1221 is connected to the transmission mechanism.
  • the power component 1221 is used to drive the transmission mechanism so that the sliding mechanism 123 drives the carrier 121 .
  • the driving module 122 is a screw-type linear module and includes a motor, a ball screw mechanism, and a second linear guide mechanism.
  • the power component 1221 is a motor
  • the transmission mechanism is a combination of a ball screw mechanism and a second linear guide mechanism.
  • the ball screw mechanism includes a screw 1222 and a screw nut 1223
  • the second linear guide mechanism includes a second guide rail 1224 and a second slider 1225.
  • the screw nut 1223 is connected to the second slider 1225.
  • the power component 1221 drives the screw 1222 to rotate, so that the screw nut 1223 moves on the screw 1222, thereby driving the second slider 1225 to slide on the second guide rail 1224.
  • the mobile carrier platform 12 further includes a first slider mounting plate 124, a second slider mounting plate 125, and a slide rail connecting plate 126.
  • the carrier 121 is connected to the first slider mounting plate 124, the first slider mounting plate 124 is mounted on the first slider 1232, the second slider mounting plate 125 is mounted on the second slider 1225, and the slide rail connecting plate 126 is connected between the first slider mounting plate 124 and the second slider mounting plate 125.
  • the second slider mounting plate 125 is driven to move, and the first slider mounting plate 124 mounted on the first slider 1232 is driven to move through the slide rail connecting plate 126, thereby driving the carrier 121 connected to the first slider mounting plate 124 to move.
  • the connecting side plate 1213 is provided with a connecting column 121b, and the connecting column 121b passes through the side wall of the box body 11 and is connected to the second slider mounting plate 125. Since the carrier 121 can move in the up and down directions, a slide groove 112 is formed on the side wall for the connecting column 121b to move. During the cleaning process, the cleaning liquid can splash out from the slide groove 112. Therefore, in order to reduce the risk of liquid splashing, a liquid blocking plate 113 is provided on the side wall of the box body 11, and the liquid blocking plate 113 blocks the slide groove 112.
  • the driving module 122 is a linear motor module, and the mover seat of the linear motor is connected to the first slider 1232 through a connecting plate, thereby driving the first slider 1232 to move and drive the carrier 121 to move.
  • the driving module 122 is not limited thereto, and may also include, for example, an electric push rod, an electric cylinder, etc., which can drive the sliding mechanism 123 to drive the carrier 121 to move, and no specific limitation is made here.
  • the cleaning device 1 further includes a fan module 14, which is mounted on the side wall of the box 11 and is configured to draw air from the inside of the box 11 to the outside. It should be noted that the fluid sprayed through the cleaning pipeline group 13 includes a volatile liquid. In order to improve safety, the volatilized gas in the box 11 is extracted through the fan module 14.
  • the fan module 14 is installed on the top side wall of the box body 11 and includes a fan mounting seat 141 and a plurality of fans 142, and the plurality of fans 142 are all installed on the fan mounting seat 141.
  • the number of fans 142 is 3, and of course the installation position of the fan module 14 and the number of fans 142 are not specifically limited here, as long as the fan module 14 can draw air outward.
  • the box body 11 is provided with a cover 111, which is connected to the side wall of the box body 11 and covers the driving module 122 and the sliding mechanism 123.
  • the driving module 122 and the sliding mechanism 123 are sealed by the cover 111 to avoid contamination of the transmission mechanism and the sliding mechanism 123, thereby extending the service life of the cleaning device.
  • the cover 111 also covers the slide 112 and can also prevent liquid from splashing.
  • a liquid outlet 114 is provided at the bottom of the box body 11, and the waste liquid after cleaning the workpiece 4 is discharged from the box body 11 through the liquid outlet 114.
  • the top of the box body 11 is open.
  • the carrier 121 When the carrier 121 is located at the top, the carrier 121 extends outward through the top opening of the box body 11, so that it is convenient for the staff to load the workpiece 4 to be cleaned.
  • the second aspect of the present invention provides a cleaning system, which includes the above-mentioned cleaning device 1.
  • the cleaning system has all the beneficial effects brought by the above-mentioned cleaning device 1, and no repeated description is given here.
  • the cleaning system further includes an operating table assembly 2 and a liquid storage tank group 3, the liquid storage tank group 3 is connected to the cleaning pipeline group 13, and the operating table assembly 2 is used to control the operation of the cleaning device 1.
  • the liquid storage tank group 3 can store cleaning liquid and spray it through the cleaning pipeline group 13, and the operating table assembly 2 can control the operation of the cleaning device 1, for example, controlling the spraying time of the cleaning pipeline group 13, controlling the moving speed and direction of the carrier 121 in the mobile carrier platform 12, etc.
  • a liquid level sensor 33 is provided at the bottom of the liquid storage tank group 3.
  • the liquid level sensor 33 is connected to the control unit 222 by signal, and the liquid level in the liquid storage tank group 3 can be monitored by the control unit.
  • the operating table assembly 2 includes a cabinet 21, a control module 22 and a pump-valve assembly 23.
  • the control module 22 includes an input unit 221 and a control unit 222, and the control unit 222 is connected to the input unit 221 by signal;
  • the pump-valve assembly 23 is arranged in the cabinet 21 and connected to the liquid storage tank group 3; wherein the pump-valve assembly 23 and the driving module 122 are both connected to the control unit 222 by signal.
  • the operating table assembly 2 mainly integrates a control module 22 and a pump-valve assembly 23 .
  • the control module 22 is used to control the driving module 122 and the pump-valve assembly 23 , so as to control the combined operation of the cleaning pipeline assembly 13 and the mobile carrier platform 12 .
  • the input unit 221 includes buttons, a touch screen, etc.
  • the control unit 222 includes, but is not limited to: a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) circuit, any other type of integrated circuit (IC), and a state machine, etc.
  • DSP digital signal processor
  • ASIC application-specific integrated circuit
  • FPGA field programmable gate array
  • the pump-valve assembly 23 includes a pump and an electric control valve, the pump is used to pump liquid from the liquid storage tank group 3 to the cleaning pipeline group 13, and the electric control valve is used to control the on-off of the pipeline.
  • the pump and the electric control valve are controlled by the control unit 222.
  • the number of pump-valve assemblies 23 is determined according to the number of liquid storage tanks in the liquid storage tank group 3, and the number of liquid storage tanks in the liquid storage tank group 3 is determined by the number of cleaning pipelines in the cleaning pipeline group 13.
  • the number of pump-valve assemblies 23 can be adaptively adjusted according to demand.
  • the number of cleaning pipelines is 3, and they are respectively arranged from top to bottom, namely, the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133.
  • the liquid storage tank group 3 includes a first liquid storage tank 31 and a second liquid storage tank 32.
  • the first liquid storage tank 31 is connected to the first spraying pipeline 132 and is used to store the first cleaning agent.
  • the second liquid storage tank 32 is connected to the second spraying pipeline 133 and is used to store the second cleaning agent.
  • the first spraying pipeline 132 is used to spray the first cleaning agent
  • the second spraying pipeline 133 is used to spray the second cleaning agent. Different cleaning effects can be achieved by spraying different cleaning agents.
  • the air blowing pipeline 131 is used to dry the sprayed workpiece.
  • a filtering device such as a filter net, may be further provided on the pipeline between the liquid storage tank group 3 and the cleaning pipeline group 13 to ensure the cleanliness of the cleaning liquid and avoid secondary contamination of the workpiece 4.
  • box body 11, the mobile carrier platform 12, the cleaning pipeline group 13, the liquid storage tank group 3, etc. are all made of stainless steel and chemical-resistant materials to avoid corrosion by cleaning agents.
  • the third aspect of the present invention further provides a cleaning method.
  • the cleaning method is implemented by using the above-mentioned cleaning system. Specifically, the cleaning system can be applied to chip cleaning.
  • the first cleaning agent is water.
  • the cleaning method includes the following steps.
  • Step S1 fix the chip on the carrier 121
  • Step S2 applying a start signal to the input unit 221, and the input unit 221 transmits the start signal to the control unit 222;
  • Step S3 the control unit 222 controls the carrier 121 to reciprocate the chip in the spray area corresponding to the first spray pipeline 132 and the spray area corresponding to the second spray pipeline 133, and the control unit 222 controls the pump valve assembly 23 to alternately pump liquid from the first liquid storage tank 31 and the second spray pipeline 133, so that the first spray pipeline 132 and the second spray pipeline 133 alternately spray and clean the chip;
  • Step S4 the control unit 222 controls the carrier 121 to move the chip again to the spray area corresponding to the first spray pipeline 132, and the control unit 222 controls the pump valve assembly 23 to pump liquid from the first liquid storage tank 31, so that the first spray pipeline 132 sprays the chip with water for cleaning;
  • Step S5 the control unit 222 controls the carrier 121 to move the chip to the purge area corresponding to the air blowing pipeline 131 to complete the purge of the chip;
  • step S6 the control unit 222 controls the carrier 121 to move the cleaned chips out of the cleaning area of the cleaning pipeline assembly 13 .
  • the start signal includes, for example, a signal generated by a start button and operation parameters inputted through a touch screen, such as the number of alternate spraying times and the operation time corresponding to each cleaning pipeline.
  • the control unit 222 can control the combined operation of the mobile carrier platform 12 and the corresponding pump-valve assembly 23 according to the parameters input by the input unit 221. For example, when the carrier 121 moves into the spraying area of the first spraying pipeline 132 or the spraying area of the second spraying pipeline 133, the spraying time and spraying pressure of the spraying pipeline are controlled; or when the carrier 121 moves into the purge area of the blowing pipeline 131, the blowing time of the blowing pipeline 131 is controlled.
  • step S4 the chip may be first moved to the spray area corresponding to the first spray line 132 and then start alternate cleaning, or the chip may be moved to the spray area corresponding to the second spray line 133 and then start alternate cleaning.
  • the order of alternate cleaning is not limited.
  • step S5 the air blowing pipeline 131 is connected to a gas source, and the gas source is connected to the air blowing pipeline 131 through a connecting gas pipe, and a solenoid valve connected to the control unit 222 signal can be provided on the connecting gas pipe, and the solenoid valve is used to open and close the gas pipe, thereby controlling the operation of the air blowing pipeline 131.
  • the gas source is preferably an inert gas source, including, for example, nitrogen, helium, etc.
  • the start signal includes the number of alternating spraying times
  • the number of cyclic spraying times refers to the number of alternating spraying times in step S4
  • the number of alternating spraying times can be adaptively adjusted according to actual conditions.
  • the cleaning system when the cleaning system is applied to chip cleaning, the last spray cleaning step is water spraying.
  • the cleaning system is not limited to chip cleaning, and the type of cleaning agent and the spraying sequence can be adjusted according to the type of workpiece to be cleaned.
  • a touch screen and buttons are provided on the operating table assembly 2, and the first cleaning agent and the second cleaning agent are water and isopropyl alcohol respectively.
  • the carrier 121 first automatically moves the chip to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the spray area corresponding to the second spray pipeline 133, and sprays the isopropyl alcohol solution for 10 seconds. After repeating the above-mentioned alternating spraying process, the carrier 121 moves again to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the purge area corresponding to the air blowing pipeline 131, and the purge time is 20 seconds. Finally, the carrier 121 moves out of the cleaning area to complete the cleaning.
  • the cleaning device 1 provided by the present invention can spray clean the chip placed on the carrier 121, reduce damage to the chip, and ensure the service life of the chip.
  • the present invention also provides a cleaning system with the above cleaning device 1, through which the cleaning system can realize the automatic full-process chip cleaning operation.

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

La présente invention concerne un appareil de nettoyage, un système de nettoyage et un procédé de nettoyage, appartenant au domaine technique des appareils de nettoyage. L'appareil de nettoyage comprend un corps de boîte (11), une plateforme de support mobile (12) et un groupe de conduites de nettoyage (13). La plateforme de support mobile (12) est montée sur le corps de boîte (11) et comprend un support (121) et un module d'entraînement (122), le support (121) étant situé dans le corps de boîte (11), et le module d'entraînement (122) étant relié au support (121) et utilisé pour entraîner le support (121) à se déplacer linéairement dans la direction verticale. Le groupe de conduites de nettoyage (13) comprend une pluralité de conduites de nettoyage ; chaque conduite de nettoyage est disposée dans le corps de boîte (11) et comprend un corps de conduite (13a) et une buse (13b) ; et les buses (13b) sont reliées aux corps de conduite (13a) et sont agencées pour faire face au support (121). L'appareil de nettoyage peut pulvériser et nettoyer des copeaux placés sur le support (121), ce qui permet de réduire les dommages aux copeaux et d'assurer la durée de vie des copeaux.
PCT/CN2022/140941 2022-12-22 2022-12-22 Appareil de nettoyage, système de nettoyage et procédé de nettoyage WO2024130624A1 (fr)

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CN1388568A (zh) * 2001-05-30 2003-01-01 S.E.S.株式会社 叶片式基片清洗方法及其装置
CN107442491A (zh) * 2017-09-12 2017-12-08 苏州市吴通电子有限公司 一种接触式pcb板清洗装置
CN112317407A (zh) * 2020-10-21 2021-02-05 安徽晟东科技有限公司 一体式芯片生产用清洗烘干输送设备
CN114405072A (zh) * 2021-12-31 2022-04-29 至微半导体(上海)有限公司 一种适用于化学品蚀刻用的喷淋系统
CN217009129U (zh) * 2022-01-24 2022-07-19 北京北方华创微电子装备有限公司 半导体清洗设备
CN114850163A (zh) * 2022-04-24 2022-08-05 智程半导体设备科技(昆山)有限公司 一种槽式全自动清洗机用循环清洗装置
CN114985361A (zh) * 2022-08-08 2022-09-02 国机传感科技有限公司 一种mems芯片自动控制清洗装置及控制清洗方法
CN115301610A (zh) * 2022-08-02 2022-11-08 牧哲(上海)自动化科技有限公司 一种芯片全方位清洗拣选机及清洗方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6115867A (en) * 1997-08-18 2000-09-12 Tokyo Electron Limited Apparatus for cleaning both sides of substrate
CN1388568A (zh) * 2001-05-30 2003-01-01 S.E.S.株式会社 叶片式基片清洗方法及其装置
CN107442491A (zh) * 2017-09-12 2017-12-08 苏州市吴通电子有限公司 一种接触式pcb板清洗装置
CN112317407A (zh) * 2020-10-21 2021-02-05 安徽晟东科技有限公司 一体式芯片生产用清洗烘干输送设备
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CN114850163A (zh) * 2022-04-24 2022-08-05 智程半导体设备科技(昆山)有限公司 一种槽式全自动清洗机用循环清洗装置
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