WO2024130624A1 - Cleaning apparatus, cleaning system and cleaning method - Google Patents

Abstract

A cleaning apparatus, a cleaning system and a cleaning method, belonging to the technical field of cleaning apparatuses. The cleaning apparatus comprises a box body (11), a movable carrier platform (12) and a cleaning pipeline group (13). The movable carrier platform (12) is mounted on the box body (11) and comprises a carrier (121) and a driving module (122), the carrier (121) being located in the box body (11), and the driving module (122) being connected to the carrier (121) and used for driving the carrier (121) to move linearly in the vertical direction. The cleaning pipeline group (13) comprises a plurality of cleaning pipelines; each cleaning pipeline is arranged in the box body (11) and comprises a pipeline body (13a) and a nozzle (13b); and the nozzles (13b) are connected to the pipeline bodies (13a) and are arranged to face the carrier (121). The cleaning apparatus can spray and clean chips placed on the carrier (121), thereby reducing damage to the chips and ensuring the service life of the chips.

Description

Cleaning equipment, cleaning system and cleaning method Technical Field

The present invention belongs to the technical field of cleaning equipment, and in particular to a cleaning equipment, a cleaning system and a cleaning method.

Background technique

In the prior art, chip cleaning is mainly performed by tank cleaning. The current tank cleaning method is to immerse the chip in a cleaning solution. A metal film is plated on the surface of the chip. After the chip is immersed for many times, it is easy to cause the metal film to fall off and oxidize, which has a great impact on the service life of the chip.

In view of this, the present invention is proposed.

Summary of the invention

The invention provides a cleaning device, a cleaning system and a cleaning method to solve the technical problem of immersing easily damaged chips in the prior art.

To solve the above problems, the present invention adopts the following solutions:

A cleaning device comprises a box, a mobile carrier platform and a cleaning pipeline group; the mobile carrier platform is installed in the box and comprises a carrier and a drive module, the carrier is located in the box, the drive module is connected to the carrier and is used to drive the carrier to move linearly in the up and down directions; the cleaning pipeline group comprises multiple cleaning pipelines, each of the cleaning pipelines is arranged in the box and comprises a pipeline body and a nozzle, the nozzle is connected to the pipeline body and is arranged to face the carrier.

In the cleaning equipment of this scheme, the mobile carrier platform and the cleaning pipeline group are installed in the box body, the mobile carrier platform includes a carrier and a driving module for driving the carrier to move, the carrier is used to place the workpiece, and the driving module drives the carrier to move linearly in the up and down directions. The cleaning pipeline group includes multiple cleaning pipelines composed of pipeline bodies and nozzles. The cleaning pipeline can allow fluid to flow and spray toward the carrier through the nozzle, thereby cleaning the workpiece placed on the carrier.

In a further optional solution, the carrier includes a support frame and a cover assembly, the support frame is provided with a plurality of loading stations; the cover assembly is pivotally connected to the support frame and is located above the loading stations, and the cover assembly is used to limit the workpiece loaded in the loading stations in the up and down directions. The cover assembly can pivot relative to the support frame to open and close the loading stations, and when the cover assembly opens the loading stations, the workpiece can be placed into the loading stations from above the loading stations, and then the cover assembly is rotated to close the loading stations, thereby limiting the up and down movement of the workpiece.

In a further optional solution, the support frame includes a carrier body, a base and a connecting side plate, wherein the base is arranged at the bottom of the carrier body; the connecting side plates are arranged at both ends of the base to clamp the carrier body and are pivotally connected to the cover assembly; wherein the loading station is located on the carrier body.

In a further optional solution, the support frame further comprises a baffle plate, which is connected to the connecting side plate to limit the pivoting movement of the cover plate assembly. The pivoting angle of the cover plate assembly is limited by the baffle plate.

In a further optional solution, the cover plate assembly includes a cover plate and a plurality of limiting components, the cover plate is pivotally connected to the support frame; the plurality of limiting components are connected to the cover plate and are arranged one by one in alignment with the plurality of loading stations. The limiting components can be pressed against the workpiece loaded in the loading station, thereby limiting the workpiece in the up and down directions.

In a further optional solution, the carrier further includes a locking structure, the locking structure is used to maintain the carrier in an open state, and when the carrier is in the open state, the cover assembly opens the loading station. The locking structure allows the cover assembly to maintain the state of opening the loading station, preventing the cover assembly from automatically pivoting and falling due to gravity.

In a further optional solution, one end of the pipeline body is an inlet end, and the other end is a closed arrangement, so that the fluid in the pipeline can only be sprayed outward through the nozzle.

In a further optional solution, the pipeline body includes a main pipeline and multiple branch pipelines, and the multiple branch pipelines are arranged at intervals along the extension direction of the pipeline body and connected to the main pipeline, and each branch pipeline is correspondingly provided with a nozzle. In the case of multiple nozzles, the cleaning pipeline can cover a wider cleaning range.

In a further optional solution, the cleaning pipeline groups are relatively arranged on both sides of the carrier. The cleaning pipeline groups located on both sides of the carrier can clean two positions of the workpiece at the same time to ensure the cleaning effect.

In a further optional solution, the plurality of cleaning pipelines are arranged at intervals in the up-down direction.

In a further optional solution, the mobile carrier platform further includes a sliding mechanism, the sliding mechanism is installed on the box, and the carrier is slidingly connected to the box through the sliding mechanism. The sliding mechanism realizes the sliding connection between the carrier and the box, which facilitates the driving module to drive the carrier to move.

In a further optional solution, the driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.

In a further optional solution, the cleaning device further comprises a fan module, which is mounted on the side wall of the box and is configured to draw air outward from the box. The fan module is used to draw out the volatilized gas in the box, thereby improving safety.

In a further optional solution, the number of the cleaning pipelines is three, and they are respectively an air blowing pipeline, a first spray pipeline and a second spray pipeline arranged from top to bottom. The cleaning equipment has three cleaning workstations for cleaning the workpieces placed on the carrier.

The present invention also provides a cleaning system, which comprises the above cleaning device.

In a further optional solution, the cleaning system further comprises an operating table assembly and a liquid storage tank group, wherein the liquid storage tank group is connected to the cleaning pipeline group, and the operating table assembly is used to control the operation of the cleaning equipment. The liquid storage tank group can store cleaning liquid and spray it through the cleaning pipeline group, and the operating table assembly can control the operation of the cleaning equipment.

In a further optional scheme, the operating table assembly includes a cabinet, a control module and a pump-valve assembly; the control module includes an input unit and a control unit, and the control unit is signal-connected to the input unit; the pump-valve assembly is arranged in the cabinet and connected to the liquid storage tank group; wherein the pump-valve assembly and the drive module are both signal-connected to the control unit.

In this solution, the operating table assembly mainly integrates a control module and a pump-valve assembly. The control module is used to control the drive module and the pump-valve assembly, so that the combined operation of the cleaning pipeline group and the mobile carrier platform can be controlled.

In a further optional solution, a liquid level sensor is provided at the bottom of the liquid storage tank group to monitor the liquid level in the liquid storage tank group.

In a further optional solution, the number of the cleaning pipelines is 3, and they are respectively an air blowing pipeline, a first spray pipeline, and a second spray pipeline arranged in a top-down direction;

The liquid storage tank group includes a first liquid storage tank and a second liquid storage tank, wherein the first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent, and the second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent. The first spray pipeline is used to spray the first cleaning agent, the second spray pipeline is used to spray the second cleaning agent, and the air blowing pipeline is used to blow dry the sprayed workpiece.

The present invention also provides a cleaning method, which is implemented by applying the above-mentioned cleaning system, wherein the first cleaning agent is water, and the cleaning method comprises:

Fixing the chip on the carrier;

applying a start signal to the input unit, the input unit transmitting the start signal to the control unit;

The control unit controls the carrier to reciprocate the chip between the spray area corresponding to the first spray pipeline and the spray area corresponding to the second spray pipeline, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, respectively, so that the first spray pipeline and the second spray pipeline alternately spray and clean the chip;

The control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline performs water spray cleaning on the chip;

The control unit controls the carrier to move the chip to the purge area corresponding to the air blowing pipeline to complete the purge of the chip;

The control unit controls the carrier to move the cleaned chips out of the cleaning area of the cleaning pipeline group.

In this solution, the cleaning method is applied in the cleaning system to realize an automated full-process chip cleaning operation.

Compared with the prior art, the present invention has the following beneficial effects:

In the cleaning equipment provided by the present invention, a mobile carrier platform and a cleaning pipeline group are installed on a box body, and the mobile carrier platform includes a carrier and a driving module for driving the carrier to move, the carrier is used to place the workpiece to be cleaned, and the driving module drives the carrier to move linearly in the up and down directions. The cleaning pipeline group includes multiple cleaning pipelines composed of pipeline bodies and nozzles, and the cleaning pipeline can allow fluid to flow and spray toward the carrier through the nozzle, thereby cleaning the workpiece to be cleaned placed on the carrier. In other words, the cleaning equipment can spray and clean the chip placed on the carrier, reduce damage to the chip, and ensure the service life of the chip.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technical personnel in this field, other drawings can be obtained based on these drawings without paying any creative work.

FIG1 is a schematic diagram of a cleaning device according to one embodiment of the present invention;

FIG2 is a second schematic diagram of a cleaning device provided according to one embodiment of the present invention;

FIG3 is a third schematic diagram of a cleaning device provided according to one embodiment of the present invention;

FIG4 is a fourth schematic diagram of a cleaning device provided according to one embodiment of the present invention;

FIG5 is a partial enlarged view of point A in FIG4 ;

FIG6 is a schematic diagram of a mobile carrier platform according to one embodiment of the present invention;

FIG7 is a partial enlarged view of point B in FIG6;

FIG8 is a schematic diagram of a cleaning system provided according to one embodiment of the present invention;

FIG9 is a schematic diagram of an operating table assembly provided according to one embodiment of the present invention;

FIG. 10 is a flow chart of a cleaning method according to one embodiment of the present invention.

In the above drawings, the components represented by the reference numerals are listed as follows:

1. Cleaning equipment; 11. Box body; 111. Cover; 112. Slide; 113. Liquid baffle; 114. Liquid outlet;

12. Mobile carrier platform; 121. Carrier; 1211. Carrier body; 1212. Base; 1213. Connecting side plate; 1214. Cover plate; 1215. Limiting component; 1216. Baffle plate; 1217. Support component; 1218. Baffle plate; 1219. Magnetic buckle; 121a. Magnetic buckle hole; 121b. Connecting column;

122, driving module; 1221, power component; 1222, lead screw; 1223, lead screw nut; 1224, second guide rail; 1225, second slider; 123, sliding mechanism; 1231, first guide rail; 1232, first slider; 124, first slider mounting plate; 125, second slider mounting plate; 126, slide rail connecting plate;

13. Cleaning pipeline group; 13a. Pipeline body; 13b. Spray head; 131. Air blowing pipeline; 132. First spray pipeline; 133. Second spray pipeline;

14. fan module; 141. fan mounting seat; 142. fan;

2. Operation table assembly; 21. Cabinet; 22. Control module; 221. Input unit; 222. Control unit; 23. Pump and valve assembly

3. Liquid storage tank group; 31. First liquid storage tank; 32. Second liquid storage tank; 33. Liquid level sensor;

4. Workpiece.

Detailed ways

In order to make the above and other features and advantages of the present invention more clear, the present invention is further described below in conjunction with the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explaining to those skilled in the art and are only exemplary and not restrictive.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

In the present invention, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

Please refer to Figures 1 to 4. A first aspect of the present invention provides a cleaning device, which includes a box 11, a mobile carrier platform 12, and a cleaning pipeline group 13. The mobile carrier platform 12 is installed in the box 11 and includes a carrier 121 and a drive module 122. The carrier 121 is located in the box 11. The drive module 122 is connected to the carrier 121 and is used to drive the carrier 121 to move linearly in the up and down directions. The cleaning pipeline group 13 includes multiple cleaning pipelines, each of which is arranged in the box 11 and includes a pipeline body 13a and a nozzle 13b. The nozzle 13b is connected to the pipeline body 13a and is arranged to face the carrier 121.

In this embodiment, the mobile carrier platform 12 and the cleaning pipeline group 13 are installed on the box 11. The mobile carrier platform 12 includes a carrier 121 and a driving module 122 for driving the carrier 121 to move. The carrier 121 is used to place the workpiece 4, and the driving module 122 drives the carrier 121 to move linearly in the up and down directions.

The cleaning pipeline group 13 includes multiple cleaning pipelines consisting of pipeline bodies 13 a and nozzles 13 b . The cleaning pipelines allow fluid to flow and spray toward the carrier 121 through the nozzles 13 b , thereby cleaning the workpiece placed on the carrier 121 .

It should be noted that the cleaning equipment is mainly used for cleaning semiconductor parts such as chips, but is not limited to this.

In an embodiment of the present invention, the carrier 121 includes a support frame and a cover assembly, the support frame is provided with a plurality of loading stations, the cover assembly is pivotally connected to the support frame and is located above the loading station, and the cover assembly is used to limit the workpiece 4 loaded in the loading station in the up and down direction. The cover assembly can pivot relative to the support frame to open and close the loading station, when the cover assembly opens the loading station, the workpiece 4 can be placed in the loading station from above the loading station, and then the cover assembly is rotated to close the loading station, thereby limiting the up and down movement of the workpiece.

Please refer to Figure 6. Further, the support frame includes a carrier body 1211, a base 1212 and a connecting side plate 1213. The base 1212 is arranged at the bottom of the carrier body 1211, and the connecting side plates 1213 are arranged at both ends of the base 1212 to clamp the carrier body 1211 and are pivotally connected to the cover assembly. Among them, the loading station is located on the carrier body 1211. The support frame is a frame structure assembled by the carrier body 1211, the base 1212 and the connecting side plates 1213. The connecting side plates 1213 are located at both ends of the base 1212 to clamp and fix the carrier body 1211, and the cover assembly is pivotally connected to the top of the connecting side plates 1213, so as to open and close the loading station located on the carrier body 1211.

Furthermore, the support frame further includes a baffle 1216, which is connected to the connecting side plate 1213 to limit the pivoting movement of the cover assembly. The baffle 1216 is arranged on the connecting side plate 1213. When the cover assembly is rotated to open the loading station, the cover assembly is rotated to a certain angle and abuts against the connecting side plate 1213, thereby limiting the rotation of the cover assembly, and the carrier 121 is in an open state. When the cover assembly is rotated to cover the loading station, the cover assembly is rotated to a certain angle and abuts against the top of the connecting side plate 1213, thereby limiting the rotation of the cover assembly, and the carrier 121 is in a closed state.

Please refer to FIG. 6 . In a specific application, the cover assembly is in a horizontal state, the cover assembly covers the loading station, and the carrier 121 is in a closed state; the cover assembly is pivoted upward to a vertical state, the cover assembly opens the loading station, and the carrier 121 is in an open state. It can be seen that, through the matching structure of the baffle 1216 and the connecting side plate 1213, the cover assembly has a 90° pivot angle, so that the carrier 121 can switch between the open state and the closed state. Of course, the installation position of the connecting side plate 1213 can be adjusted to adjust the pivot angle of the cover assembly. In this embodiment, no specific limitation is made, and it is sufficient to ensure that it does not affect the normal loading of the workpiece.

In an embodiment of the present invention, the cover plate assembly includes a cover plate 1214 and a plurality of limiting components 1215. The cover plate 1214 is pivotally connected to the support frame, and the plurality of limiting components are connected to the cover plate 1214 and are arranged one by one in alignment with the plurality of loading stations. When the carrier 121 is in a closed state, the cover plate assembly covers the loading station, and the limiting components 1215 can abut against the workpiece 4 loaded in the loading station, thereby limiting the workpiece 4 in the up and down directions.

Please refer to FIG. 6. In a specific application, the carrier body 1211 is provided with 4 loading stations, and the number of the limiting components 1215 is also 4 and aligned with the 4 loading stations. Each loading station is provided with a supporting component 1217 and a plurality of baffles 1218. When the carrier 121 is in the open state, the workpiece 4 is placed from the top of the loading station, and the workpiece 4 is clamped between the plurality of baffles 1218. The supporting component 1217 supports the bottom of the workpiece to limit the horizontal movement of the workpiece 4. The cover assembly is pivoted to switch the carrier 121 to the closed state, and the limiting component 1215 abuts against the top of the workpiece 4 to limit the up and down movement of the workpiece 4, so as to fix the workpiece 4 in the loading station. In an optional embodiment, the limiting component 1215 and the supporting component 1217 are both screws, but are not limited thereto, and may also include, for example, latches, etc., to ensure that the workpiece can be limited up and down.

In an embodiment of the present invention, the carrier 121 further includes a locking structure, which is used to maintain the open state of the carrier 121. The locking structure allows the cover assembly to maintain the state of opening the loading station, thereby preventing the cover assembly from automatically pivoting and falling due to gravity, or even covering the loading station.

Please refer to FIG. 7 . In a specific application, the locking structure includes a magnetic buckle 1219 and a magnetic buckle hole 121a provided on the baffle 1216. When the carrier 121 is in the open state, the magnetic buckle 1219 is located in the magnetic buckle hole 121a and adsorbs the baffle 1216, so that the cover assembly maintains the state of opening the loading station. Of course, the locking structure is not limited to this. In another specific application, the locking structure includes a spring latch and a latch hole. When the carrier 121 is in the open state, the spring latch can be inserted into the latch hole to keep the cover assembly in the state of opening the loading station.

In the embodiment of the present invention, one end of the pipeline body 13a is an inlet end, and the other end is a closed end. Fluid can enter from the inlet end, and because the other end is closed, the fluid in the pipeline can only be sprayed outward through the nozzle 13b.

Please refer to Figure 3. In an embodiment of the present invention, the pipeline body 13a includes a main pipeline and a plurality of branch pipelines. The plurality of branch pipelines are arranged at intervals along the extension direction of the pipeline body and are connected to the main pipeline. A nozzle 13b is correspondingly arranged for each branch pipeline. The pipeline body 13a is mainly composed of a main pipeline and a plurality of branch pipelines. The branch pipelines can play a diversion role and guide the fluid to different nozzles 13b. It can be understood that when a plurality of nozzles 13b are provided, the cleaning pipeline can cover a wider cleaning range. For example, when the carrier 121 includes a plurality of loading stations, each nozzle 13b corresponds to each loading station one by one, so as to achieve the purpose of cleaning multiple workpieces 4 at one time.

Please refer to FIG. 3 . In the embodiment of the present invention, the cleaning pipeline groups 13 are relatively arranged on both sides of the carrier 121. In a specific application, there are two cleaning pipeline groups 13, and the carrier 121 is located between the two cleaning pipeline groups 13. The carrier 121 can move within the spraying area defined by the two cleaning pipeline groups 13, so as to clean the workpiece 4 at two positions at the same time. Of course, the number of cleaning pipeline groups 13 is not limited to this, and it is sufficient to ensure that the workpiece 4 can be sprayed at two relative positions at the same time.

Please refer to Fig. 4, in the embodiment of the present invention, multiple cleaning pipelines are arranged at intervals in the vertical direction. Different cleaning fluids can flow into each cleaning pipeline, and each cleaning pipeline has different cleaning effects.

In a specific application, there are three cleaning pipelines, which are respectively arranged from top to bottom, namely, the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133. The cleaning pipeline group 13 includes the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133. When the carrier 121 moves in the up and down direction, the carrier 121 sequentially passes through the air blowing area of the air blowing pipeline 131, the spraying area of the first spraying pipeline 132, and the spraying area of the second spraying pipeline 133. In other words, the cleaning equipment has three cleaning workstations to clean the workpiece 4 placed on the carrier 121.

Please refer to Figures 2, 4 and 5. In an embodiment of the present invention, the mobile carrier platform 12 also includes a sliding mechanism 123, which is installed on the box body 11, and the carrier 121 is slidingly connected to the box body 11 through the sliding mechanism 123. It should be noted that the sliding mechanism 123 has the function of reducing friction. The sliding mechanism 123 is used to achieve a sliding connection between the carrier 121 and the box body 11, which is beneficial for the driving module 122 to drive the carrier 121 to move up and down. In the present disclosure, the number of sliding mechanisms 123 is 2 and they are respectively installed on the opposite side walls of the box body 11 to ensure the stability of the carrier 121 during movement.

As shown in FIG5 , in the illustrated embodiment, the sliding mechanism 123 includes a first guide rail 1231 and a first slider 1232. The first guide rail 1231 is installed on the box body 11, the first slider 1232 is slidably connected to the first guide rail 1231, and the carrier 121 is connected to the first slider 1232. The driving module 122 drives the first slider 1232 to slide on the first guide rail 1231, thereby driving the carrier 121 to move in the up and down direction. It can be seen that the sliding mechanism 123 in this embodiment is a first linear guide mechanism.

In another optional embodiment, the sliding mechanism 123 includes a sliding rod and a sleeve slidably connected to the sliding rod, and the carrier 121 is connected to the sleeve. The driving module 122 drives the sleeve to move on the sliding rod, thereby driving the carrier 121 to move in the up and down direction.

It can be seen that the sliding mechanism 123 is not limited to the illustrated embodiment, and it only needs to ensure that the mobile carrier platform 12 can move in the up and down directions on the box body 11, and no specific limitation is made here.

Furthermore, the driving module 122 includes a power component 1221 and a transmission mechanism. The transmission mechanism is connected to the sliding mechanism 123 . The power component 1221 is connected to the transmission mechanism. The power component 1221 is used to drive the transmission mechanism so that the sliding mechanism 123 drives the carrier 121 .

As shown in FIG5 , in the illustrated embodiment, the driving module 122 is a screw-type linear module and includes a motor, a ball screw mechanism, and a second linear guide mechanism. In the screw-type linear module, the power component 1221 is a motor, and the transmission mechanism is a combination of a ball screw mechanism and a second linear guide mechanism. The ball screw mechanism includes a screw 1222 and a screw nut 1223, and the second linear guide mechanism includes a second guide rail 1224 and a second slider 1225. The screw nut 1223 is connected to the second slider 1225. The power component 1221 drives the screw 1222 to rotate, so that the screw nut 1223 moves on the screw 1222, thereby driving the second slider 1225 to slide on the second guide rail 1224.

In a specific application, the mobile carrier platform 12 further includes a first slider mounting plate 124, a second slider mounting plate 125, and a slide rail connecting plate 126. The carrier 121 is connected to the first slider mounting plate 124, the first slider mounting plate 124 is mounted on the first slider 1232, the second slider mounting plate 125 is mounted on the second slider 1225, and the slide rail connecting plate 126 is connected between the first slider mounting plate 124 and the second slider mounting plate 125. During the sliding movement of the second slider 1225 on the second guide rail 1224, the second slider mounting plate 125 is driven to move, and the first slider mounting plate 124 mounted on the first slider 1232 is driven to move through the slide rail connecting plate 126, thereby driving the carrier 121 connected to the first slider mounting plate 124 to move.

In addition, it should be noted that, referring to FIG. 3 and FIG. 5 , in the illustrated embodiment, the connecting side plate 1213 is provided with a connecting column 121b, and the connecting column 121b passes through the side wall of the box body 11 and is connected to the second slider mounting plate 125. Since the carrier 121 can move in the up and down directions, a slide groove 112 is formed on the side wall for the connecting column 121b to move. During the cleaning process, the cleaning liquid can splash out from the slide groove 112. Therefore, in order to reduce the risk of liquid splashing, a liquid blocking plate 113 is provided on the side wall of the box body 11, and the liquid blocking plate 113 blocks the slide groove 112.

In another optional embodiment, the driving module 122 is a linear motor module, and the mover seat of the linear motor is connected to the first slider 1232 through a connecting plate, thereby driving the first slider 1232 to move and drive the carrier 121 to move.

It should be noted that the driving module 122 is not limited thereto, and may also include, for example, an electric push rod, an electric cylinder, etc., which can drive the sliding mechanism 123 to drive the carrier 121 to move, and no specific limitation is made here.

In the embodiment of the present invention, the cleaning device 1 further includes a fan module 14, which is mounted on the side wall of the box 11 and is configured to draw air from the inside of the box 11 to the outside. It should be noted that the fluid sprayed through the cleaning pipeline group 13 includes a volatile liquid. In order to improve safety, the volatilized gas in the box 11 is extracted through the fan module 14.

In a specific application, the fan module 14 is installed on the top side wall of the box body 11 and includes a fan mounting seat 141 and a plurality of fans 142, and the plurality of fans 142 are all installed on the fan mounting seat 141. As shown in FIG2 , in the illustrated embodiment, the number of fans 142 is 3, and of course the installation position of the fan module 14 and the number of fans 142 are not specifically limited here, as long as the fan module 14 can draw air outward.

In an optional embodiment, the box body 11 is provided with a cover 111, which is connected to the side wall of the box body 11 and covers the driving module 122 and the sliding mechanism 123. The driving module 122 and the sliding mechanism 123 are sealed by the cover 111 to avoid contamination of the transmission mechanism and the sliding mechanism 123, thereby extending the service life of the cleaning device. It can be understood that the cover 111 also covers the slide 112 and can also prevent liquid from splashing. In addition, please refer to Figure 4. A liquid outlet 114 is provided at the bottom of the box body 11, and the waste liquid after cleaning the workpiece 4 is discharged from the box body 11 through the liquid outlet 114.

In addition, the top of the box body 11 is open. When the carrier 121 is located at the top, the carrier 121 extends outward through the top opening of the box body 11, so that it is convenient for the staff to load the workpiece 4 to be cleaned.

Please refer to Fig. 8, the second aspect of the present invention provides a cleaning system, which includes the above-mentioned cleaning device 1. Obviously, the cleaning system has all the beneficial effects brought by the above-mentioned cleaning device 1, and no repeated description is given here.

Furthermore, the cleaning system further includes an operating table assembly 2 and a liquid storage tank group 3, the liquid storage tank group 3 is connected to the cleaning pipeline group 13, and the operating table assembly 2 is used to control the operation of the cleaning device 1. The liquid storage tank group 3 can store cleaning liquid and spray it through the cleaning pipeline group 13, and the operating table assembly 2 can control the operation of the cleaning device 1, for example, controlling the spraying time of the cleaning pipeline group 13, controlling the moving speed and direction of the carrier 121 in the mobile carrier platform 12, etc.

Furthermore, a liquid level sensor 33 is provided at the bottom of the liquid storage tank group 3. The liquid level sensor 33 is connected to the control unit 222 by signal, and the liquid level in the liquid storage tank group 3 can be monitored by the control unit.

Please refer to FIG. 7 , further, the operating table assembly 2 includes a cabinet 21, a control module 22 and a pump-valve assembly 23. The control module 22 includes an input unit 221 and a control unit 222, and the control unit 222 is connected to the input unit 221 by signal; the pump-valve assembly 23 is arranged in the cabinet 21 and connected to the liquid storage tank group 3; wherein the pump-valve assembly 23 and the driving module 122 are both connected to the control unit 222 by signal.

The operating table assembly 2 mainly integrates a control module 22 and a pump-valve assembly 23 . The control module 22 is used to control the driving module 122 and the pump-valve assembly 23 , so as to control the combined operation of the cleaning pipeline assembly 13 and the mobile carrier platform 12 .

It should be noted that the input unit 221 includes buttons, a touch screen, etc. The control unit 222 includes, but is not limited to: a general-purpose processor, a special-purpose processor, a conventional processor, a digital signal processor (DSP), multiple microprocessors, one or more microprocessors associated with a DSP core, a controller, a microcontroller, a single-chip microcomputer, an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA) circuit, any other type of integrated circuit (IC), and a state machine, etc.

It should also be noted that the pump-valve assembly 23 includes a pump and an electric control valve, the pump is used to pump liquid from the liquid storage tank group 3 to the cleaning pipeline group 13, and the electric control valve is used to control the on-off of the pipeline. Of course, the pump and the electric control valve are controlled by the control unit 222. It can be understood that the number of pump-valve assemblies 23 is determined according to the number of liquid storage tanks in the liquid storage tank group 3, and the number of liquid storage tanks in the liquid storage tank group 3 is determined by the number of cleaning pipelines in the cleaning pipeline group 13. The number of pump-valve assemblies 23 can be adaptively adjusted according to demand.

In a preferred embodiment, the number of cleaning pipelines is 3, and they are respectively arranged from top to bottom, namely, the air blowing pipeline 131, the first spraying pipeline 132, and the second spraying pipeline 133. The liquid storage tank group 3 includes a first liquid storage tank 31 and a second liquid storage tank 32. The first liquid storage tank 31 is connected to the first spraying pipeline 132 and is used to store the first cleaning agent. The second liquid storage tank 32 is connected to the second spraying pipeline 133 and is used to store the second cleaning agent. The first spraying pipeline 132 is used to spray the first cleaning agent, and the second spraying pipeline 133 is used to spray the second cleaning agent. Different cleaning effects can be achieved by spraying different cleaning agents. The air blowing pipeline 131 is used to dry the sprayed workpiece.

It should be noted that, in an optional embodiment, a filtering device, such as a filter net, may be further provided on the pipeline between the liquid storage tank group 3 and the cleaning pipeline group 13 to ensure the cleanliness of the cleaning liquid and avoid secondary contamination of the workpiece 4.

In addition, it should be noted that the box body 11, the mobile carrier platform 12, the cleaning pipeline group 13, the liquid storage tank group 3, etc. are all made of stainless steel and chemical-resistant materials to avoid corrosion by cleaning agents.

Please refer to FIG. 10 . The third aspect of the present invention further provides a cleaning method. The cleaning method is implemented by using the above-mentioned cleaning system. Specifically, the cleaning system can be applied to chip cleaning. The first cleaning agent is water. The cleaning method includes the following steps.

Step S1, fix the chip on the carrier 121;

Step S2, applying a start signal to the input unit 221, and the input unit 221 transmits the start signal to the control unit 222;

Step S3, the control unit 222 controls the carrier 121 to reciprocate the chip in the spray area corresponding to the first spray pipeline 132 and the spray area corresponding to the second spray pipeline 133, and the control unit 222 controls the pump valve assembly 23 to alternately pump liquid from the first liquid storage tank 31 and the second spray pipeline 133, so that the first spray pipeline 132 and the second spray pipeline 133 alternately spray and clean the chip;

Step S4, the control unit 222 controls the carrier 121 to move the chip again to the spray area corresponding to the first spray pipeline 132, and the control unit 222 controls the pump valve assembly 23 to pump liquid from the first liquid storage tank 31, so that the first spray pipeline 132 sprays the chip with water for cleaning;

Step S5, the control unit 222 controls the carrier 121 to move the chip to the purge area corresponding to the air blowing pipeline 131 to complete the purge of the chip;

In step S6 , the control unit 222 controls the carrier 121 to move the cleaned chips out of the cleaning area of the cleaning pipeline assembly 13 .

In step S2, the start signal includes, for example, a signal generated by a start button and operation parameters inputted through a touch screen, such as the number of alternate spraying times and the operation time corresponding to each cleaning pipeline.

In steps S3 to S5, the control unit 222 can control the combined operation of the mobile carrier platform 12 and the corresponding pump-valve assembly 23 according to the parameters input by the input unit 221. For example, when the carrier 121 moves into the spraying area of the first spraying pipeline 132 or the spraying area of the second spraying pipeline 133, the spraying time and spraying pressure of the spraying pipeline are controlled; or when the carrier 121 moves into the purge area of the blowing pipeline 131, the blowing time of the blowing pipeline 131 is controlled.

In step S4, the chip may be first moved to the spray area corresponding to the first spray line 132 and then start alternate cleaning, or the chip may be moved to the spray area corresponding to the second spray line 133 and then start alternate cleaning. The order of alternate cleaning is not limited.

It can be understood that in step S5, the air blowing pipeline 131 is connected to a gas source, and the gas source is connected to the air blowing pipeline 131 through a connecting gas pipe, and a solenoid valve connected to the control unit 222 signal can be provided on the connecting gas pipe, and the solenoid valve is used to open and close the gas pipe, thereby controlling the operation of the air blowing pipeline 131. It should be noted that the gas source is preferably an inert gas source, including, for example, nitrogen, helium, etc.

It should be noted that, in an optional embodiment, the start signal includes the number of alternating spraying times, the number of cyclic spraying times refers to the number of alternating spraying times in step S4, and the number of alternating spraying times can be adaptively adjusted according to actual conditions.

In addition, it should be noted that when the cleaning system is applied to chip cleaning, the last spray cleaning step is water spraying. The cleaning system is not limited to chip cleaning, and the type of cleaning agent and the spraying sequence can be adjusted according to the type of workpiece to be cleaned.

In an optional embodiment, a touch screen and buttons are provided on the operating table assembly 2, and the first cleaning agent and the second cleaning agent are water and isopropyl alcohol respectively. After placing the chip to be cleaned on the carrier 121, the cleaning program is selected on the touch screen and the start button is pressed, and the cleaning system will automatically operate according to the cleaning program.

For example, the carrier 121 first automatically moves the chip to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the spray area corresponding to the second spray pipeline 133, and sprays the isopropyl alcohol solution for 10 seconds. After repeating the above-mentioned alternating spraying process, the carrier 121 moves again to the spray area corresponding to the first spray pipeline 132, and sprays water for 10 seconds. Then, the carrier 121 moves the chip to the purge area corresponding to the air blowing pipeline 131, and the purge time is 20 seconds. Finally, the carrier 121 moves out of the cleaning area to complete the cleaning.

In summary, the cleaning device 1 provided by the present invention can spray clean the chip placed on the carrier 121, reduce damage to the chip, and ensure the service life of the chip. In addition, the present invention also provides a cleaning system with the above cleaning device 1, through which the cleaning system can realize the automatic full-process chip cleaning operation.

Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims (20)

1. A cleaning device, characterized in that the cleaning device comprises:

   Box;

   A mobile carrier platform, installed in the box and comprising a carrier and a driving module, wherein the carrier is located in the box, and the driving module is connected to the carrier and is used to drive the carrier to move linearly in an up-and-down direction; and

   The cleaning pipeline group includes multiple cleaning pipelines, each of which is arranged in the box and includes a pipeline body and a nozzle. The nozzle is connected to the pipeline body and is arranged to face the carrier.
2. The cleaning device according to claim 1, characterized in that the carrier comprises:

   a support frame having a plurality of loading stations; and

   A cover plate assembly is pivotally connected to the support frame and is located above the loading station. The cover plate assembly is used to limit the workpiece loaded in the loading station in the up and down directions.
3. The cleaning device according to claim 2, characterized in that the support frame comprises:

   Vehicle body;

   A base, disposed at the bottom of the carrier body; and

   Connecting side plates, disposed at both ends of the base to clamp the carrier body and pivotally connected to the cover assembly;

   Wherein, the loading station is located on the carrier body.
4. The cleaning device according to claim 3 is characterized in that the support frame also includes a baffle, which is connected to the connecting side plate to limit the pivotal movement of the cover assembly.
5. The cleaning device according to claim 2, characterized in that the cover plate assembly comprises:

   a cover plate pivotally connected to the support frame; and

   A plurality of limiting components are connected to the cover plate and are arranged in alignment with the plurality of loading stations.
6. The cleaning equipment according to claim 2 is characterized in that the carrier further comprises a locking structure, and the locking structure is used to maintain the carrier in an open state, and when the carrier 121 is in the open state, the cover assembly opens the loading station.
7. The cleaning device according to claim 1 is characterized in that one end of the pipeline body is an inlet end and the other end is a closed setting.
8. The cleaning equipment according to claim 1 is characterized in that the pipeline body includes a main pipeline and multiple branch pipelines, and the multiple branch pipelines are arranged in the main pipeline at intervals along the extension direction of the pipeline body and are connected to the main pipeline, and each branch pipeline is correspondingly provided with a nozzle.
9. The cleaning equipment according to claim 1 is characterized in that the cleaning pipeline groups are relatively arranged on two sides of the carrier.
10. The cleaning equipment according to claim 1 is characterized in that the multiple cleaning pipelines are arranged at intervals in the up and down directions.
11. The cleaning equipment according to claim 1 is characterized in that the mobile carrier platform also includes a sliding mechanism, the sliding mechanism is installed on the box, and the carrier is slidably connected to the box through the sliding mechanism.
12. The cleaning equipment according to claim 11 is characterized in that the driving module includes a power component and a transmission mechanism, the transmission mechanism is connected to the sliding mechanism, the power component is connected to the transmission mechanism, and the power component is used to drive the transmission mechanism so that the sliding mechanism drives the carrier.
13. The cleaning device according to claim 1 is characterized in that the cleaning device also includes a fan module, which is installed in the box and is configured to draw air outward from the box.
14. The cleaning equipment according to claim 8 is characterized in that the number of the cleaning pipelines is 3, and they are respectively an air blowing pipeline, a first spray pipeline and a second spray pipeline arranged from top to bottom.
15. A cleaning system, characterized in that the cleaning system comprises the cleaning device according to any one of claims 1 to 13.
16. The cleaning system according to claim 15 is characterized in that the cleaning system also includes an operating table assembly and a liquid storage tank group, the liquid storage tank group is connected to the cleaning pipeline group, and the operating table assembly is used to control the operation of the cleaning equipment.
17. The cleaning system according to claim 16, characterized in that the operating table assembly comprises:

    Cabinets;

    A control module, comprising an input unit and a control unit, wherein the control unit is signal-connected to the input unit; and

    A pump valve assembly is arranged in the cabinet and connected to the liquid storage tank assembly;

    Wherein, the pump valve assembly and the drive module are both connected to the control unit signal.
18. The cleaning system according to claim 16 is characterized in that a liquid level sensor is provided at the bottom of the liquid storage tank group.
19. The cleaning system according to claim 17, characterized in that

    The number of the cleaning pipelines is 3, and they are respectively arranged from top to bottom: an air blowing pipeline, a first spraying pipeline, and a second spraying pipeline;

    The liquid storage tank group includes a first liquid storage tank and a second liquid storage tank. The first liquid storage tank is connected to the first spray pipeline and is used to store a first cleaning agent. The second liquid storage tank is connected to the second spray pipeline and is used to store a second cleaning agent.
20. A cleaning method, characterized in that the cleaning method is implemented according to the cleaning system according to claim 19, the first cleaning agent is water, and the cleaning method comprises:

    Fixing the chip on the carrier;

    applying a start signal to the input unit, the input unit transmitting the start signal to the control unit;

    The control unit controls the carrier to reciprocate the chip between the spray area corresponding to the first spray pipeline and the spray area corresponding to the second spray pipeline, and the control unit controls the pump valve assembly to alternately pump liquid from the first liquid storage tank and the second liquid storage tank, so that the first spray pipeline and the second spray pipeline alternately spray and clean the chip;

    The control unit controls the carrier to move the chip again to the spray area corresponding to the first spray pipeline, and the control unit controls the pump valve assembly to pump liquid from the first liquid storage tank so that the first spray pipeline performs water spray cleaning on the chip;

    The control unit controls the carrier to move the chip to a purge area corresponding to the air blowing pipeline to complete the purge of the chip;

    The control unit controls the carrier to move the cleaned chips out of the cleaning area of the cleaning pipeline group.

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