WO2024000893A1 - 掩膜版及掩膜版的制作方法 - Google Patents

掩膜版及掩膜版的制作方法 Download PDF

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Publication number
WO2024000893A1
WO2024000893A1 PCT/CN2022/122498 CN2022122498W WO2024000893A1 WO 2024000893 A1 WO2024000893 A1 WO 2024000893A1 CN 2022122498 W CN2022122498 W CN 2022122498W WO 2024000893 A1 WO2024000893 A1 WO 2024000893A1
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WO
WIPO (PCT)
Prior art keywords
mask
shielding
strip
support
strips
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2022/122498
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English (en)
French (fr)
Inventor
邱岳
李伟丽
王水俊
韩冰
李文星
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunshan Govisionox Optoelectronics Co Ltd
Original Assignee
Kunshan Govisionox Optoelectronics Co Ltd
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Filing date
Publication date
Application filed by Kunshan Govisionox Optoelectronics Co Ltd filed Critical Kunshan Govisionox Optoelectronics Co Ltd
Publication of WO2024000893A1 publication Critical patent/WO2024000893A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask

Definitions

  • the present application relates to the technical field of display devices, and in particular to a mask and a method for making the mask.
  • OLED Organic LightEmitting Diode
  • OLED has various characteristics such as self-illumination, fast response, wide viewing angle, and can be produced on flexible substrates. It is increasingly used in high-performance display fields such as flexible display devices. .
  • the electroluminescent material is first sublimated through evaporation, and after passing through a mask, is deposited on the display panel to be evaporated that is attached to the mask, thereby forming an evaporation layer.
  • Embodiments of the present application provide a mask and a method for making the mask, which can reduce the risk of local wrinkles in the mask.
  • embodiments of the present application provide a mask, which includes a frame-shaped body, a plurality of first support bars, a plurality of shielding bars, and a plurality of masking bars.
  • the first support bars and the shielding bars are arranged to intersect and are arranged On the frame-type body, a plurality of first support bars and a plurality of blocking bars are enclosed to form a plurality of first openings;
  • the mask strip includes a second opening and frame areas respectively arranged on both sides of the second opening in the first direction, wherein the mask strip is connected to the frame body through the frame area, and the second opening is at the front of the frame body.
  • the projection covers the orthographic projection of the plurality of first openings arranged along the first direction on the frame body.
  • the single mask strip of the mask provided by the embodiment of the present application only needs to be provided with one second opening.
  • This design can reduce the risk of local wrinkles in the mask.
  • display panels with the same pixel arrangement but different shapes they can share the same mask strip and only need to replace the first support strip or shielding strip, thereby reducing the processing cost and therefore having a relatively high Strong versatility, suitable for many types of display panels.
  • the first support bar extends along the second direction, the plurality of first support bars are arranged along the first direction, the first support bar includes a plurality of overlapping portions in the second direction, and the plurality of first support bars At least part of the overlapping part of the strip overlaps with the second opening of the same mask strip, and the first direction intersects the second direction; wherein the thickness of the overlapping part is smaller than at least part of the thickness of the shielding strip.
  • the thickness of at least part of the first support strip is thinned, for example, the overlapped portion is thinned to make the thickness smaller than the thickness of the shielding strip.
  • the magnetic attraction effect of the first support strip is positively related to its own thickness. Therefore, thinning the overlapping portion can reduce the magnetic attraction effect of the overlapping portion, thereby reducing the problem that the mask strip cannot be deployed due to the excessive adsorption capacity of the first support strip. risk.
  • the first direction and the second direction are perpendicular.
  • the mask strip at least partially overlaps the shielding strip and is spaced apart from the overlap by the shielding strip. This embodiment of the application allows for gaps between the mask strips and the overlap.
  • the first support strip includes magnetic material.
  • the overlapping portion includes a body portion extending along the second direction, and a special-shaped portion protruding outward from the body portion toward the corresponding first opening.
  • the shape of the first opening in the embodiment of the present application matches the shape of the display area in the display panel to be evaporated.
  • the shapes of the display areas in different display panels are different.
  • display panels with special-shaped areas such as water droplets or bangs have emerged.
  • the special-shaped portion in this embodiment can correspond to the above-mentioned special-shaped area.
  • the thickness of the body part and the special-shaped part are the same, that is, the thickness remains uniform everywhere in the multiple overlapping parts. This embodiment can simplify the preparation process of the overlapping portion.
  • the shielding strip includes a first shielding part extending along the first direction, and second shielding parts located on both sides of the first shielding part along the second direction, and the thickness of the first shielding part is greater than that of the second shielding part. Thickness, the thickness of the second shielding part is the same as the thickness of the overlapping part.
  • the thickness of the second shielding part is set to be smaller than the thickness of the first shielding part, and is made the same as the thickness of the overlapping part, so that the mask strips are spaced apart from the second shielding part through the first shielding part, Reduces the risk of mask strip wrinkles.
  • the first support bar and the shielding bar are an integral structure. Simplify the preparation process of the first support strip and the shielding strip.
  • a second support strip is provided between at least part of the mask strip and the first support strip.
  • the second support strip extends along the second direction and intersects with the plurality of shielding strips.
  • the second support strip includes a receiving groove. , at least part of the shielding strip is located in the receiving groove.
  • a second support bar is additionally added.
  • the second support bar is installed on the first support bar, and the first support bar and the second support bar can jointly support the mask bar; and
  • the second support strip can be detached from the first support strip and only rely on the first support strip to achieve the supporting function.
  • the second support strip includes non-magnetic material.
  • the second support strip is made of non-magnetic material, thereby avoiding the magnetic attraction effect of the second support strip on the mask strip, thereby reducing the risk of wrinkles in the mask strip.
  • the non-magnetic material includes non-magnetic steel.
  • the mask is used to evaporate the display panel to be evaporated; wherein the display panel to be evaporated includes a display area and a non-display area, and the first opening is equal to the size of the display area of the display panel to be evaporated. Shape to match.
  • embodiments of the present application provide a method for making a mask, including:
  • the initial substrate is patterned to form a mask strip according to the pixel arrangement structure of the display panel to be evaporated, and the mask strip includes a second opening and frame areas provided on both sides of the second opening;
  • the first support bars and shielding bars are arranged on the frame body according to the size and shape of the display area of the display panel to be evaporated, and a plurality of first support bars and a plurality of shielding bars are enclosed to form a plurality of first openings;
  • the mask strip is disposed on a side of the first support strip away from the frame body, and the orthographic projection of the second opening on the frame body covers the orthographic projection of the plurality of first openings arranged along the first direction on the frame body.
  • the step before the step of arranging the first support bar and the shielding bar on the frame body according to the size and shape of the display area of the display panel to be evaporated, the step further includes:
  • the plate structure is patterned to form a plurality of first support bars and a plurality of shielding bars.
  • the first support bars include a plurality of overlapping portions in the second direction.
  • the first direction intersects the second direction, and the thickness of the overlapping portions is less than The thickness of at least part of the barrier strip;
  • Embodiments of the present application provide a mask and a method for making the mask.
  • the mask includes a frame body, a plurality of first support bars, a plurality of shielding bars and a plurality of masking bars.
  • the first support bars and the shielding bars are The strips are intersected and arranged on the frame body.
  • a plurality of first support strips and a plurality of shielding strips are enclosed to form a plurality of first openings; the mask strips include a second opening and are respectively arranged on the second opening in the first direction.
  • a single mask strip in the embodiment of the present application only needs to be provided with one second opening. This design can reduce the risk of local wrinkles in the mask, improve evaporation accuracy, and thereby improve the performance of the display panel. At the same time, for display panels with the same pixel arrangement but different shapes, they can share the same mask strip and only need to replace the first support strip or shielding strip, thereby reducing processing costs and therefore having strong versatility. It is suitable for many types of display panels.
  • Figure 1 is a schematic diagram of the cooperation structure of a frame-type main body of a mask and a plurality of first support bars and a plurality of shielding bars provided by an embodiment of the present application;
  • Figure 2 is a schematic structural diagram of a mask strip in a mask provided by an embodiment of the present application.
  • Figure 3 is a schematic structural diagram of a mask provided by an embodiment of the present application.
  • Figure 4 is a schematic cross-sectional structural diagram of A-A in Figure 3;
  • Figure 5 is a schematic diagram of the cooperation structure of another frame-type main body of the mask and a plurality of first support bars and a plurality of shielding bars provided by the embodiment of the present application;
  • Figure 6 is a schematic structural diagram of another mask strip in a mask provided by an embodiment of the present application.
  • Figure 7 is a partial enlarged view of area Q in Figure 5;
  • Figure 8 is a schematic cross-sectional structural diagram of B-B in Figure 5;
  • Figure 9 is a schematic diagram of the cooperation structure of another frame-type main body of the mask and a plurality of first support bars and a plurality of shielding bars provided by the embodiment of the present application;
  • Figure 10 is a schematic cross-sectional structural diagram of C-C in Figure 9;
  • Figure 11 is a flow chart of a mask production method provided by an embodiment of the present application.
  • FIG. 12 is a flow chart of yet another mask production method provided by an embodiment of the present application.
  • First support bar 211. Overlapping portion; 211a. Body portion; 2111. Arc-shaped transition area; 211b. Special-shaped portion; 22. Shielding strip; 221. First shielding portion; 222. Second shielding portion; 23 , the first opening; 24. the second support bar; 241. the receiving groove;
  • X first direction
  • Y second direction
  • E edge
  • the mask plate includes a framed body and a mask strip provided on the framed body.
  • the mask strip needs to be divided into different areas corresponding to different positions of the display panel. For example, corresponding to the display area of the organic light-emitting display panel, the mask strip needs to be provided with a corresponding display opening area for evaporating the light-emitting unit in the display area; and corresponding to the non-display area of the organic light-emitting display panel, the mask strip needs to be provided with a corresponding display opening area for evaporating the light-emitting unit in the display area.
  • the film strip needs to be provided with corresponding shielding areas to avoid evaporating patterns at corresponding positions in the non-display area of the organic light-emitting display panel, and a mask strip includes multiple display opening areas and shielding areas.
  • the mask strip is easily wrinkled during the process of stretching the net or evaporating the display panel. This leads to poor adhesion or adsorption between the mask and the display panel to be evaporated during the evaporation process, affecting the evaporation accuracy and thus affecting the yield rate of the organic light-emitting display panel.
  • An embodiment of the present application provides a mask, which includes a frame body 1, a plurality of first support bars 21, a plurality of shielding bars 22 and multiple A mask strip 3 is provided.
  • the first support strip 21 and the shielding strip 22 are intersecting and arranged on the frame body 1 .
  • a plurality of first support strips 21 and a plurality of shielding strips 22 are enclosed to form a plurality of first openings 23 .
  • the mask strip 3 includes a second opening 31 and frame areas 32 respectively provided on both sides of the second opening 31 in the first direction
  • the orthographic projection of the opening 31 on the frame body 1 covers the orthographic projection of the plurality of first openings 23 arranged along the first direction X on the frame body 1 .
  • the frame body 1 is mainly used to support the first support bar 21, the shielding bar 22 and the mask strip 3 located on the first support bar 21.
  • the frame body 1 can be made of metal material.
  • the frame body 1 has a larger-sized through hole in its thickness direction.
  • a plurality of first support bars 21 and a plurality of shielding bars 22 are welded and fixed on the frame body 1 and are enclosed within the through hole to form a plurality of first support bars 21 and a plurality of shielding bars 22 .
  • An opening 23 For example, the frame body 1 has a supporting surface facing the mask strip 3 , the first supporting strip 21 and the shielding strip 22 are fixed on the supporting surface, and the through hole penetrates the supporting surface.
  • the first support strips 21 and the shielding strips 22 are intersected and distributed.
  • the first support strips 21 can play a role in supporting the mask strips 3
  • the shielding strips 22 can be used to cover the gaps between adjacent mask strips 3 , to prevent evaporation materials from depositing on the display panel to be evaporated through the gaps and forming foreign matter.
  • the shielding strip 22 extends along the first direction X.
  • the mask strip 3 has a strip-shaped structure and includes a second opening 31 and frame areas 32 located on both sides of the second opening 31 .
  • the mask strip 3 is connected to the frame body 1 through the frame area 32 .
  • the second openings 31 extend along the first direction X, and the first direction X may be the row direction or the column direction of the plurality of first openings 23 .
  • the first direction The second openings 31 can cover all the first openings 23 located in one row.
  • the mask strip 3 in the embodiment of the present application only includes one second opening 31 .
  • This design can reduce the difficulty of preparing the mask strip 3, and at the same time make the structural strength of the mask strip 3 similar everywhere, thereby reducing the risk of local wrinkles in the mask strip 3 during the evaporation process or mask preparation process, and thus Improve evaporation accuracy and improve display panel performance.
  • the single mask strip 3 of the mask provided by the embodiment of the present application only needs to be provided with one second opening 31.
  • This design can reduce the risk of local wrinkles in the mask.
  • display panels with the same pixel arrangement but different shapes they can share the same mask strip 3 and only need to replace the first support strip 21 or the shielding strip 22, thereby reducing the processing cost. Therefore, it has strong versatility and is suitable for many types of display panels.
  • the mask is used to evaporate the pattern on the display panel to be evaporated through the first opening 23 .
  • the display panel to be evaporated includes a display area and a non-display area, and the size and shape of the first opening 23 match the size and shape of the display area of the display panel to be evaporated, that is, the first opening 23 in the embodiment of the present application.
  • the support bar 21 and the shielding bar 22 can be specially designed according to the display panel to be evaporated, so that the enclosed first opening 23 matches the display area of the display panel to be evaporated.
  • the second opening 31 of the mask strip 3 includes pixel openings 311 of a plurality of evaporated sub-pixels, which are used to evaporate each light-emitting unit in the display panel to be evaporated.
  • the size and arrangement of the pixel openings 311 can be Determined based on the size and arrangement of the corresponding light-emitting units.
  • the first support bars 21 extend along the second direction Y, a plurality of first support bars 21 are arranged along the first direction X, and the first support bars 21 extend in the second direction Y.
  • Y includes a plurality of overlapping portions 211, at least some of the overlapping portions 211 of the plurality of first support bars 21 overlap with the second openings 31 of the same mask strip 3, and the first direction X intersects the second direction Y;
  • the thickness of the overlapping portion 211 is at least partially smaller than the thickness of the shielding strip 22 .
  • the plurality of first support bars 21 respectively extend along the second direction Y and are spaced apart along the first direction X; the plurality of shielding bars 22 respectively extend along the first direction X and are spaced apart along the second direction Y.
  • the first direction X is perpendicular to the second direction Y, and the plurality of first support bars 21 and the plurality of shielding bars 22 are arranged side by side at a preset distance.
  • the first support strip 21 includes a plurality of overlapping portions 211 in the second direction Y.
  • a single mask strip 3 can cover a single overlapping portion 211 on a single first support strip 21 , that is, overlap in the first support strip 21
  • the portion 211 plays the main role of supporting the mask strip 3 . It can be understood that, except for the overlapping portion 211 , the remaining portion of the first support bar 21 can be overlapped with the shielding bar 22 .
  • the magnetic spacer is located on the side of the display panel to be evaporated away from the frame body 1. During the evaporation process, the magnetic spacer The magnetic force of the plate attracts the mask strip 3 and attaches it to the display panel to be evaporated, so that the evaporation material can be evaporated at a specific position of the display panel to be evaporated.
  • the first support bar 21 includes magnetic material. Under the action of the magnetic force of the magnetic partition, the first support strip 21 can play a certain adsorbing and supporting role on the mask strip 3 . During this process, if the adsorption effect of the first support strip 21 is too strong, the mask strip 3 will easily become wrinkled and unable to stretch, and will gather at the corresponding position of the first support strip 21 , affecting the evaporation effect.
  • the embodiment of the present application thins the thickness of at least part of the first support bar 21 , for example, the overlapping part 211 is thinned so that its thickness is at least partially smaller than that of the shielding bar 22 thickness of.
  • the magnetic attraction effect of the first support bar 21 is positively related to its own thickness. Therefore, thinning the overlapping portion 211 can reduce the magnetic attraction effect of the overlapping portion 211, thereby reducing the occurrence of masking due to the excessive adsorption capacity of the first support bar 21.
  • the mask strip 3 at least partially overlaps the shielding strip 22 and is spaced apart from the overlapping portion 211 by the shielding strip 22 .
  • the thickness of the overlapping portion 211 is smaller than at least part of the thickness of the shielding strip 22 , there is a height difference between the overlapping portion 211 and at least part of the shielding strip 22 , and the masking strip 3 at least partially overlaps the shielding strip 22 , so in In the thickness direction of the mask, there can be a gap between the surface of the overlapping portion 211 facing the mask strip 3 and the mask strip 3 .
  • This design can further reduce the adsorption effect of the first support strip 21 on the mask strip 3 and reduce the risk of wrinkles in the mask strip 3 .
  • the overlapping portion 211 includes a body portion 211 a extending along the second direction Y, and a special-shaped portion 211 b protruding outward from the body portion 211 a toward the corresponding first opening 23 .
  • first openings 23 of the body part 211a facing the corresponding first openings 23 may be the two first openings 23 adjacent to the body part 211 along the first direction A first opening 23 above the body part 211a and a first opening 23 below the body part 211a.
  • the overlapping portion 211 is the portion of the first support bar 21 that overlaps the mask strip 3. At the same time, the overlapping portion 211 is also used to enclose the first opening 23.
  • the shape of the overlapping portion 211 is different from that of the display panel to be evaporated.
  • the shape of the edge area in the display area matches, that is, at least part of the outer contour of the overlapping portion 211 matches the boundary line between the display area and the non-display area of the display panel to be evaporated.
  • the overlapping portion 211 includes a main body portion 211a and a special-shaped portion 211b. In FIG. 7, the interface between the main body portion 211a and the special-shaped portion 211b is indicated by a dotted line.
  • Multiple overlapping portions 211 are arranged side by side along the second direction Y and adjacent to the main body portion. 211a are connected to each other to form the first support bar 21 extending along the second direction Y.
  • the profiled portion 211b further includes an arc-shaped transition area 2111 and a convex area (not shown in the figure), and the arc-shaped transition area 2111 is connected to the shielding strip 22 .
  • an overlapping portion 211 includes four arc-shaped transition areas 2111 and one convex area in the second direction Y.
  • the four arc-shaped transition areas 2111 are respectively provided at the four corners of the overlapping portion 211, and the convex area is provided at In the middle of one side of the overlapping portion 211, the arc-shaped transition area 2111 is provided so that the first support bar 21 and the shielding bar 22 are connected to each other.
  • the arc-shaped transition area 2111 has an edge E facing the first opening 23 , and the edge E is convexly shaped and arc-shaped in a direction away from the first opening 23 .
  • the display area in the display panel to be evaporated includes four arc corners, and the four arc corners are distributed at the four corners of the display area to achieve a smooth transition between two adjacent edges in the display area.
  • the edge E of the arc-shaped transition area 2111 is set to an arc according to the four arc angles of the display area in the display panel, so that the first opening 23 can have an arc-shaped structure that matches the arc angle in the display area. .
  • the main body part 211a and the special-shaped part 211b have the same thickness, that is, the thickness remains uniform everywhere in the overlapping part 211.
  • the main body part 211a and the special-shaped part 211b can be half-etched at the same time to keep the thickness of the two parts the same.
  • the shape of the first opening 23 in the embodiment of the present application matches the shape of the display area in the display panel to be evaporated.
  • the shapes of the display areas in different display panels are different.
  • a specific area needs to be provided to accommodate the photosensitive element, so display panels with special-shaped areas such as water droplets or bangs have emerged.
  • the embodiment of the present application is provided with a special-shaped portion 211b on the overlapping portion 211, and the special-shaped portion 211b protrudes outward from the body portion 211a toward the corresponding first opening 23, At least part of the area of the special-shaped portion 211b, such as the raised area, can match the special-shaped area in the display panel for arranging the photosensitive element.
  • Different first openings 23 can be formed by changing the shape of the special-shaped portion 211b, thereby meeting the evaporation needs of different special-shaped display panels and having strong versatility.
  • the single overlapping portion 211 is used to enclose and form the two first openings 23 at the same time. Therefore, the single overlapping portion 211 can include two parts, one of which includes a part of the special-shaped part 211b and a part of the body part 211a. , used to form the edge area including the special-shaped area in the non-display area, that is, one side including the convex area; the other part includes a partial special-shaped portion 211b and a partial body portion 211a, used to form the non-display area opposite to the special-shaped area. edge area.
  • the first support bar 21 is integrally formed, and the overlapping portion 211 can be formed through a process such as half etching.
  • the shielding bar 22 includes a first shielding portion 221 extending along the first direction X, and a second shielding portion 221 located on both sides of the first shielding portion 221 along the second direction Y.
  • the thickness of the shielding portion 222 and the second shielding portion 222 is the same as the thickness of the overlapping portion 211 .
  • the first shielding part 221 extends along the first direction X, and the second shielding part 222 is located on both sides of the first shielding part 221 along the second direction Y.
  • the second shielding part 222 may also extend along the first direction
  • the thickness of the first shielding part 221 is greater than the thickness of the second shielding part 222 , and the thickness of the second shielding part 222 and the overlapping part 211 are the same.
  • the mask strip 3 can overlap the first shielding portion 221 , so that there is a gap between the mask strip 3 and the overlapping portion 211 in the thickness direction of the mask.
  • the first shielding part 221 extends along the first direction X. Specifically, the first shielding part 221 may extend along a straight line. In other embodiments, the first shielding part 221 may extend along a curve, which is not discussed here. limited.
  • the second shielding portion 222 extends along the first direction X. Specifically, the second shielding portion 222 can extend along a straight line. In other embodiments, the second shielding portion 222 can extend along a curve, which is not discussed here. limited.
  • the first shielding portion 221 is located in the very middle area, an area to the left of the middle area, or an area to the right of the middle area of the shielding bar 22 .
  • the two second shielding parts 222 located on both sides of the first shielding part 221 have the same size and shape. This can help simplify the preparation process of the shielding strip 22 .
  • the first shielding portion 221 extending along the first direction X has a uniform thickness
  • the second shielding portion 222 extending along the first direction X also has a uniform thickness
  • the width of the first shielding portion 221 accounts for 50%-95% of the entire width of the shielding strip 22 .
  • the width of the first shielding portion 221 accounts for 80%, 85%, 90% and 95% of the entire width of the shielding strip 22 .
  • the overlapping portion 211 is used to enclose the first opening 23
  • the shape of the overlapping portion 211 matches the shape of the edge area in the non-display area of the display panel to be evaporated.
  • the second shielding portion 222 on the shielding strip 22 is also used to enclose the first opening 23.
  • the shape of the second shielding portion 222 also matches the shape of the edge area in the non-display area of the display panel to be evaporated.
  • one of the overlapping portion 211 and the second shielding portion 222 corresponds to the long side area of the non-display area of the display panel to be evaporated, and the other corresponds to the short side area of the non-display area.
  • the embodiment of the present application uses the second The thickness of the shielding part 222 is set smaller than the thickness of the first shielding part 221 and is the same as the thickness of the overlapping part 211, so that the mask plate is spaced apart from the first shielding part 221 and the second shielding part 222, reducing the masking. There is a risk of wrinkles in the membrane strip 3.
  • the first support strip 21 and the shielding strip 22 are an integrated structure.
  • the first support strip 21 and the shielding strip 22 can be formed on the same plate structure through processes such as etching, thereby simplifying the manufacturing process and reducing the cost. Manufacturing difficulty.
  • the overlapping portion 211 on the first support strip 21 and the second shielding portion 222 on the shielding strip 22 can be formed through the same half-etching process, so that the thicknesses of the two are kept the same.
  • the thickness of the overlapping portion 211 on the first support bar 21 and the second blocking portion 222 on the blocking bar 22 can also be different, as long as the thickness of the overlapping portion 211 and the thickness of the second blocking portion 222 are equal. It only needs to be less than the thickness of the first shielding part 221, and there is no limitation here.
  • a second support bar 24 is provided between at least part of the mask bar 3 and the first support bar 21.
  • the second support bar 24 is along the second direction.
  • Y extends and intersects a plurality of shielding strips 22 .
  • the second support strip 24 includes a receiving groove 241 , and at least part of the shielding strips 22 is located in the receiving groove 241 .
  • the surface of the second support bar 24 is recessed inward toward the first support bar 21 to form the receiving groove 241 .
  • the embodiment of the present application in order to reduce the adsorption effect of the first support bar 21 on the mask strip 3, the embodiment of the present application thins the overlapping portion 211 of the first support bar 21, thereby reducing the magnetic field of the first support bar 21.
  • the suction effect reduces the risk of wrinkles in the mask strip 3.
  • the embodiment of the present application additionally adds a second support bar 24.
  • the second support bar 24 is installed on the first support bar 21.
  • the support bar 21 and the second support bar 24 can jointly support the mask bar 3; and for some lighter weight mask bars, the second support bar 24 can be removed from the first support bar 21 and only rely on the first support.
  • Article 21 achieves the supporting function.
  • the width of the second support bar 24 in the first direction X is no greater than the width of the first support bar 21 in the first direction X.
  • the embodiment of the present application is provided with a receiving groove 241 on the second support bar 24.
  • the second support bar 24 is clamped on the blocking bar 22 through the receiving groove 241.
  • the receiving groove 241 is configured as a second support. The installation of strip 24 plays a positioning role.
  • second support bars 24 may be provided between all first support bars 21 and the mask bars 3 , that is, each first support bar 21 is provided with a second support bar 24 .
  • This arrangement can effectively improve the support effect; it is also possible to provide a second support bar 24 between part of the first support bar 21 and the mask bar 3 , for example, one of the first support bars for every two adjacent first support bars 21 A second support bar 24 is provided on 21, which can save raw materials and simplify the preparation process of the mask.
  • the specific settings can be made according to the actual situation and are not limited here.
  • the second support strip 24 includes a non-magnetic material.
  • the second support strip 24 is mainly used to support the mask strip 3.
  • the mask strip 3 can be in direct contact with the second support strip 24.
  • the embodiment of the present application The second support strip 24 is made of non-magnetic material, thereby avoiding the magnetic attraction effect of the second support strip 24 on the mask strip 3 and thereby reducing the risk of wrinkles in the mask strip 3 .
  • the non-magnetic material includes non-magnetic steel.
  • the wrinkles of the mask plate are greatly reduced compared with the prior art. is small, and the maximum width of the non-uniform film thickness region formed is approximately 10 ⁇ m. After adding the second support bar 24, the wrinkles of the mask are further reduced, and the maximum width of the uneven film thickness area formed in the display area is 7-9 ⁇ m.
  • the wrinkles of the mask basically disappear.
  • embodiments of the present application provide a method for making a mask.
  • the mask can be the mask provided by any of the above-mentioned embodiments of the first aspect.
  • a method for making a mask include:
  • S100 Pattern the initial substrate according to the pixel arrangement structure of the display panel to be evaporated to form a mask strip.
  • the mask strip includes a second opening and frame areas provided on both sides of the second opening.
  • step S100 the shape of the second opening in the mask strip is different from the shape of the display area in the display panel to be evaporated, and the second opening includes a plurality of pixel openings, and the arrangement of the pixel openings is consistent with the display area to be evaporated.
  • the pixels in the panels are arranged the same. That is, the preparation of the mask strip only requires knowing the pixel arrangement structure in the display area of the display panel to be evaporated, and the shape of the second opening does not depend on the shape of the display area in the display panel to be evaporated.
  • S120 Arrange first support bars and shielding bars on the frame body according to the size and shape of the display area of the display panel to be evaporated, and multiple first support bars and multiple shielding bars enclose to form multiple first openings.
  • step S120 the frame body and the first support strip provided on the frame body are mainly used to support the mask strips, and the blocking strips are mainly used to block the gaps between adjacent mask strips.
  • the embodiment of the present application changes the size and shape of the first support bar and the shielding bar, so that the first opening formed by the first support bar and the shielding bar is The shape matches the size and shape of the display area in the display panel to be evaporated, so that the light-emitting unit and the like can be subsequently evaporated in the display area of the display panel to be evaporated.
  • the first support bar and the shielding bar may be an integral structure or may be independent structures, which is not limited in the embodiments of the present application.
  • the mask strips are arranged to cover the plurality of first openings, wherein the extension direction of the mask strips is the same as the extension direction of the shielding strips. For example, if the shielding strips extend in the row direction, the masking strips cover all the first openings in a row; if the shielding strips extend in the column direction, the masking strips cover all the first openings in a column.
  • the single mask strip in the mask provided by the embodiment of the present application only needs to be provided with one second opening. This design can reduce the risk of local wrinkles in the mask.
  • step S120 also includes:
  • the plate structure is patterned to form a plurality of first support bars and a plurality of shielding bars.
  • the first support bars include a plurality of overlapping portions in the second direction.
  • the first direction intersects with the second direction.
  • the overlapping portions The thickness is smaller than the thickness of at least part of the blocking strip.
  • the first support bar 21 and the shielding bar 22 may be an integrated structure, prepared and formed by patterning a single plate structure.
  • the patterning process includes performing a full etching process on the plate structure to form the first opening 23 of a corresponding shape; performing a half-etching process on the overlapping portion 211 of the first support bar 21 to reduce the thickness of the overlapping portion 211. Less than at least part of the thickness of the shielding strip 22 .
  • the thickness difference between the overlapping portion 211 and the shielding strip 22 is determined according to the evaporation needs of the display panel to be evaporated, and the embodiment of the present application does not limit this.
  • step S130 at least part of the overlapping portions 211 of the plurality of first support strips 21 overlap with the second openings 31 of the same mask strip 3 .
  • the thickness of the overlapping portion 211 in the first support bar 21 is thinned to make the thickness smaller than at least part of the thickness of the shielding bar 22 .
  • the first support bar 21 includes a magnetic attraction material.
  • the magnetic attraction effect of the overlapping portion 211 in the first support bar 21 is positively related to its own thickness. Therefore, the thinning process can reduce the magnetic attraction effect of the overlapping portion 211, thereby This reduces the risk that the mask strip 3 cannot be fully deployed due to the overly strong adsorption capacity of the overlapping portion 211 to the mask strip 3 .

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Abstract

本申请提供了一种掩膜版及掩膜版的制作方法，其中，掩膜版包括框式主体、多个第一支撑条、多个遮挡条以及多个掩膜条，第一支撑条和遮挡条相交设置且设置于框式主体，多个第一支撑条和多个遮挡条围合构成多个第一开口；掩膜条包括一个第二开口以及在第一方向上分别设置于第二开口两侧的边框区，其中，掩膜条通过边框区连接于框式主体，第二开口在框式主体上的正投影覆盖沿第一方向设置的多个第一开口在框式主体上的正投影。本申请实施例能够降低掩膜版发生局部褶皱的风险，提高蒸镀精度，进而改善显示面板的性能。

Description

掩膜版及掩膜版的制作方法
本申请要求于2022年06月30日提交中国专利局、申请号为202210758162.6、申请名称为“掩膜版及掩膜版的制作方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及显示设备技术领域，尤其涉及一种掩膜版及掩膜版的制作方法。
背景技术
有机发光显示面板(Organic LightEmitting Diode，简称OLED)具有自发光、快速响应、宽视角和可制作在柔性基板上等多种特点，越来越多地被应用于高性能显示领域如柔性显示装置中。
目前，制作有机发光显示面板的发光层时，通过蒸镀的方式使电致发光材料先升华，经过掩膜版后，在与掩膜版贴合的待蒸镀显示面板上沉积，进而形成蒸镀图案，以达到发光的目的。因此，掩膜版的性能直接关系到有机发光显示面板的质量。
发明内容
本申请实施例提供了一种掩膜版及掩膜版的制作方法，能够降低掩膜版发生局部褶皱的风险。
第一方面，本申请实施例提供了一种掩膜版，包括框式主体、多个第一支撑条、多个遮挡条以及多个掩膜条，第一支撑条和遮挡条相交设置且设置于框式主体，多个第一支撑条和多个遮挡条围合构成多个第一开口；
掩膜条包括一个第二开口以及在第一方向上分别设置于第二开口两侧的边框区，其中，掩膜条通过边框区连接于框式主体，第二开口在框式主体上的正投影覆盖沿第一方向设置的多个第一开口在框式主体上的正投影。
本申请实施例提供的掩膜版的单个掩膜条仅需设置有一个第二开口，这样设计能够降低掩膜版发生局部褶皱的风险。同时进一步的，对于像素排布相同但形状不同的显示面板而言，可以共用同一种掩膜条，仅需对第一支撑条或遮挡条进行更换即可，从而能够降低加工成本，因此具备较强的通用性，适用于多种类型的显示面板。
在一些实施例中，第一支撑条沿第二方向延伸，多个第一支撑条沿第一方向排布，第一支撑条在第二方向上包括多个交叠部，多个第一支撑条的至少部分交叠部和同一掩膜条的第二开口交叠设置，第一方向与第二方向相交；其中，交叠部的厚度小于遮挡条至少部分的厚度。
本申请实施例对第一支撑条的至少部分区域的厚度进行减薄处理，例如对交叠部进行减薄处理，使其厚度小于遮挡条的厚度。第一支撑条的磁吸效果与其自身厚度呈正相关，因此减薄交叠部能够降低交叠部的磁吸效果，从而减小因第一支撑条吸附能力过强，出现掩膜条无法展开的风险。
在一些实施例中，第一方向和第二方向垂直。
在一些实施例中，掩膜条至少部分搭接于遮挡条，并通过遮挡条与交叠部间隔设置。本申请的此实施例可以使得掩膜条和交叠部之间具有间隙。
在一些实施例中，第一支撑条包括磁吸材料。
在一些实施例中，交叠部包括沿第二方向延伸的本体部，以及由本体部朝对应第一开口向外突出的异形部。
本申请实施例中的第一开口的形状与待蒸镀显示面板中显示区的形状相匹配，不同显示面板中的显示区的形状并不相同，同时对于需要设置有屏下摄像头以及红外传感器等的显示面板而言，需要设置有特定区域用于容纳感光元件，因此存在有水滴或刘海等异形区域的显示面板应运而生，本实施例中的异形部可对应上述的异形区域。
在一些实施例中，本体部与异形部的厚度相同，即多个交叠部中各处厚度保持均一。本实施例可便于简化交叠部的制备工艺。
在一些实施例中，遮挡条包括沿第一方向延伸的第一遮挡部，以及沿第二方向位于第一遮挡部两侧的第二遮挡部，第一遮挡部的厚度大于第二遮挡部的厚度，第二遮挡部的厚度与交叠部的厚度相同。
本申请实施例将第二遮挡部的厚度设置为小于第一遮挡部的厚度，并使其与交叠部的厚度相同，从而使得掩膜条通过第一遮挡部与第二遮挡部间隔设置，降低掩膜条发生褶皱的风险。
在一些实施例中，第一支撑条和遮挡条为一体结构。简化第一支撑条和遮挡条的制备工艺。
在一些实施例中，至少部分掩膜条与第一支撑条之间设置有第二支撑条，第二支撑条沿第二方向延伸并与多个遮挡条相交设置，第二支撑条包括容纳槽，至少部分遮挡条位于容纳槽内。
本申请实施例额外增设了第二支撑条，对于重量较大的掩膜条，第二支撑条安装在第一支撑条上，第一支撑条和第二支撑条能够共同支撑掩膜条；而对于一些重量较轻的掩膜条，可以将第二支撑条从第一支撑条上卸下，仅依靠第一支撑条实现支撑作用。
在一些实施例中，第二支撑条包括无磁材料。
本申请实施例将第二支撑条设置为无磁材料，从而避免第二支撑条对掩膜条产生磁吸影响，进而降低掩膜条发生褶皱的风险。
在一些实施例中，无磁材料包括无磁钢。
在一些实施例中，掩膜版用于对待蒸镀显示面板进行蒸镀；其中，待蒸镀显示面板包括显示区和非显示区，第一开口与待蒸镀显示面板的显示区的大小和形状相匹配。
第二方面，本申请实施例提供了一种掩膜版的制作方法，包括：
根据待蒸镀显示面板的像素排布结构对初始基板图案化处理形成掩膜条，掩膜条包括一个第二开口以及设置于第二开口两侧的边框区；
根据待蒸镀显示面板的显示区的大小和形状将第一支撑条和遮挡条设置于框式主体，多个第一支撑条和多个遮挡条围合构成多个第一开口；
将掩膜条设置于第一支撑条背离框式主体的一侧，第二开口在框式主体上的正投影覆盖沿第一方向设置的多个第一开口在框式主体上的正投影。
在一些实施例中，根据待蒸镀显示面板的显示区的大小和形状将第一支撑条和遮挡条设置在框式主体的步骤之前还包括：
对板材结构图案化处理形成多个第一支撑条和多个遮挡条，第一支撑条在第二方向上包括多个交叠部，第一方向与第二方向相交，交叠部的厚度小于遮挡条至少部分的厚度；
将掩膜条设置于第一支撑条背离框式主体的一侧的步骤中，多个第一支撑条的至少部分交叠部和同一掩膜条的第二开口交叠设置。
本申请实施例提供一种掩膜版及掩膜版的制作方法，掩膜版包括框式主体、多个第一支撑条、多个遮挡条以及多个掩膜条，第一支撑条和遮挡条相交设置且设置于框式主体，多个第一支撑条和多个遮挡条围合构成多个第一开口；掩膜条包括一个第二开口以及在第一方向上分别设置于第二开口两侧的边框区；其中，掩膜条通过边框区连接于框式主体，第二开口在框式主体上的正投影覆盖沿第一方向设置的多个第一开口在框式主体上的正投影。本申请实施例的单个掩膜条仅需设置有一个第二开口，这样设计能够降低掩膜版发生局部褶皱的风险，提高蒸镀精度，进而提高显示面板的性能。同时对于像素排布相同但形状不同的显示面板而言，可以共用同一种掩膜条，仅需对第一支撑条或遮挡条进行更换即可，从而能够降低加工成本，因此具备较强的通用性，适用于多种类型的显示面板。
附图说明
为了更清楚地说明本申请实施例的技术方案，下面将对本申请实施例中所需要使用的附图作简单的介绍，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本申请实施例提供的一种掩膜版中框式主体以及多个第一支撑条和多个遮挡条的配合结构示意图；
图2是本申请实施例提供的一种掩膜版中掩膜条的结构示意图；
图3是本申请实施例提供的一种掩膜版的结构示意图；
图4是图3中A-A的剖面结构示意图；
图5是本申请实施例提供的又一种掩膜版中框式主体以及多个第一支撑条和多个遮挡条的配合结构示意图；
图6是本申请实施例提供的又一种掩膜版中掩膜条的结构示意图；
图7是图5中区域Q的局部放大图；
图8是图5中B-B的剖面结构示意图；
图9是本申请实施例提供的又一种掩膜版中框式主体以及多个第一支撑条和多个遮挡条的配合结构示意图；
图10是图9中C-C的剖面结构示意图；
图11是本申请实施例提供的一种掩膜版的制作方法的流程图；
图12是本申请实施例提供的又一种掩膜版的制作方法的流程图。
标记说明：
1、框式主体；
21、第一支撑条；211、交叠部；211a、本体部；2111、弧形过渡区；211b、异形部；22、遮挡条；221、第一遮挡部；222、第二遮挡部；23、第一开口；24、第二支撑条；241、容纳槽；
3、掩膜条；31、第二开口；311、像素开口；32、边框区；
X、第一方向；Y、第二方向；E、边缘。
具体实施方式
下面将详细描述本申请的各个方面的特征和示例性实施例，为了使本申请的目的、技术方案及优点更加清楚明白，以下结合附图及具体实施例，对本申请进行进一步详细描述。应理解，此处所描述的具体实施例仅意在解释本申请，而不是限定本申请。对于本领域技术人员来说，本申请可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本申请的示例来提供对本申请更好的理解。
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
掩膜版包括有框式主体以及设置在框式主体上的掩膜条，通常情况下，掩膜条需要对应于显示面板的不同位置划分有不同区域。示例性地，对应于有机发光显示面板的显示区，掩膜条需要设置有对应的显示开口区，用于蒸镀显示区中的发光单元；而对应于有机发光显示面板的非显示区，掩膜条需要设置有对应的遮挡区，用于避免在有机发光显示面板的非显示区对应位置处蒸镀图案，而一个掩膜条包括多个显示开口区和遮挡区。经过发明人长期研究发现，由于掩膜条的显示开口区和遮挡区的结构强度不同，在张网或蒸镀显示面板的过程中，掩膜条极易产生褶皱。进而导致在蒸镀过程中，掩膜版与待蒸镀显示面板之间贴合或吸附不良，影响蒸镀精度，进而影响有机发光显示面板的良品率。
为了解决上述问题，第一方面，请参阅图1至图3，本申请实施例提供了一种掩膜版，包括框式主体1、多个第一支撑条21、多个遮挡条22以及多个掩膜条3，第一支撑条21和遮挡条22相交设置且设置于框式主体1，多个第一支撑条21和多个遮挡条22围合构成多个第一开口23。
可以理解的是，本申请中的附图只是示意性的展示出框式主体1、第一支撑条21、遮挡条22的配合结构，附图中的第一支撑条21、遮挡条22没有与框式主体1连接，并不以此为限。
掩膜条3包括一个第二开口31以及在第一方向X上分别设置于第二开口31两侧的边框区32；其中，掩膜条3通过边框区32连接于框式主体1，第二开口31在框式主体1上的正投影覆盖沿第一方向X设置的多个第一开口23在框式主体1上的正投影。
框式主体1主要用于支撑第一支撑条21、遮挡条22以及位于第一支撑条21上的掩膜条3，框式主体1可以采用金属材质制成。框式主体1在自身厚度方向具有一较大尺寸的通孔，多个第一支撑条21和多个遮挡条22焊接固定在框式主体1上，并在通孔内围合构成多个第一开口23。示例性地，框式主体1朝向掩膜条3具有一支撑面，第一支撑条21以及遮挡条22固定于该支撑面，且通孔贯穿该支撑面。
第一支撑条21与遮挡条22相交分布，可选的，第一支撑条21可以起到支撑掩膜条3的作用，而遮挡条22可以用于遮挡相邻掩膜条3之间的空隙，避免蒸镀材料通过空隙沉积在待蒸镀显示面板上而形成异物。
可选地，遮挡条22沿第一方向X延伸。
掩膜条3为条状结构，包括一个第二开口31以及位于第二开口31两侧的边框区32，掩膜条3通过边框区32连接在框式主体1上。
可选地，第二开口31沿第一方向X延伸，第一方向X可以为多个第一开口23的行方向，也可以为列方向。示例性地，第一方向X为多个第一开口23的列方向，单个掩膜条3的第二开口31能够覆盖沿第一方向X设置的全部第一开口23，即单个掩膜条3的第二开口31能够覆盖位于一列上的全部第一开口23。与传统的掩膜条3不同的是，传统的掩膜条3中包含有多个显示开口区，而本申请实施例中的掩膜条3仅包含有一个第二开口31。这种设计能够降低掩膜条3的制备难度，同时使得掩膜条3各处的结构强度相近，从而降低掩膜条3在蒸镀过程或掩膜版制备过程中发生局部褶皱的风险，进而提高蒸镀精度， 改善显示面板的性能。
本申请实施例提供的掩膜版的单个掩膜条3仅需设置有一个第二开口31，这样设计能够降低掩膜版发生局部褶皱的风险。同时进一步的，对于像素排布相同但形状不同的显示面板而言，可以共用同一种掩膜条3，仅需对第一支撑条21或遮挡条22进行更换即可，从而能够降低加工成本，因此具备较强的通用性，适用于多种类型的显示面板。
可以理解的是，掩膜版通过第一开口23在待蒸镀显示面板上进行蒸镀图案。可选的，待蒸镀显示面板包括显示区和非显示区，第一开口23的大小和形状与待蒸镀显示面板的显示区的大小和形状相匹配，即本申请实施例中的第一支撑条21以及遮挡条22可以根据待蒸镀显示面板进行特别设计，以使围合构成的第一开口23与待蒸镀显示面板的显示区相匹配。
可以理解的是，掩膜条3的第二开口31包括多个蒸镀子像素的像素开口311，用于蒸镀待蒸镀显示面板中的各个发光单元，像素开口311的尺寸以及排布可以根据对应发光单元的尺寸及排布决定。
在一些实施例中，请参阅图3和图4，第一支撑条21沿第二方向Y延伸，多个第一支撑条21沿第一方向X排布，第一支撑条21在第二方向Y上包括多个交叠部211，多个第一支撑条21的至少部分交叠部211和同一掩膜条3的第二开口31交叠设置，第一方向X与第二方向Y相交；其中，交叠部211的厚度小于遮挡条22至少部分的厚度。
多个第一支撑条21分别沿第二方向Y延伸，并沿第一方向X间隔设置；多个遮挡条22分别沿第一方向X延伸，并沿第二方向Y间隔设置。示例性地，第一方向X垂直于第二方向Y，多个第一支撑条21和多个遮挡条22均间隔预设距离并排设置。
第一支撑条21在第二方向Y上包括多个交叠部211，单个掩膜条3能够覆盖单个第一支撑条21上的单个交叠部211，即在第一支撑条21中交叠部211起到支撑掩膜条3的主要作用。可以理解的是，第一支撑条21除了包括有交叠部211外的剩下部分可以与遮挡条22重叠设置。
在蒸镀之前，还需要设置配合掩膜版的磁隔板(图中未示出)，磁隔板位于待蒸镀显示面板背离框式主体1的一侧，在蒸镀过程中，磁隔板的磁力作用将掩膜条3吸起并与待蒸镀显示面板贴合，从而使得蒸镀材料能够在待蒸镀显示面板的特定位置蒸镀。
可选地，第一支撑条21包括磁吸材料。在磁隔板的磁力作用下，第一支撑条21能够对掩膜条3起到一定的吸附支撑作用。在这个过程中，若第一支撑条21的吸附作用过强，则容易导致掩膜条3发生褶皱进而无法伸展，并在第一支撑条21对应位置处聚集，影响蒸镀效果。
为了降低这种问题产生的风险，本申请实施例对第一支撑条21的至少部分区域的厚度进行减薄处理，例如对交叠部211进行减薄处理，使其厚度小于遮挡条22至少部分的厚度。第一支撑条21的磁吸效果与其自身厚度呈正相关，因此减薄交叠部211能够降低交叠部211的磁吸效果，从而减小因第一支撑条21吸附能力过强，出现掩膜条3无法展开的风险。
在一些实施例中，掩膜条3至少部分搭接于遮挡条22，并通过遮挡条22与交叠部211间隔设置。
由于交叠部211的厚度小于遮挡条22至少部分的厚度，使得交叠部211与遮挡条22的至少部分存在有高度差，并且掩膜条3至少部分搭接于遮挡条22上，因此在掩膜版的厚度方向上，交叠部211朝向掩膜条3的表面能够与掩膜条3之间存在间隙。这种设计能够进一步降低第一支撑条21对掩膜条3的吸附作用，降低掩膜条3发生褶皱的风险。
在一些实施例中，请参阅图5至图7，交叠部211包括沿第二方向Y延伸的本体部211a，以及由本体部211a朝对应第一开口23向外突出的异形部211b。
可以理解的是，本体部211a朝对应的第一开口23中的第一开口23可以为，沿第一方向X，与本体部211相邻的两个第一开口23，即图7中位于本体部211a上方的一个第一开口23和位于本体部211a下方的一个第一开口23。
交叠部211为第一支撑条21中与掩膜条3重叠的部分，同时交叠部211也用于围合构成第一开口23，交叠部211的形状与待蒸镀显示面板的非显示区中边缘区域的形状相匹配，即交叠部211的至少部分外轮廓与待蒸镀显示面板的显示区和非显示区的交界线相匹配。交叠部211包括本体部211a和异形部211b，在图7中本体部211a和异形部211b的交界位置通过虚线表示，多个交叠部211沿第二方向Y并排设置，且相邻本体部211a之间相互连接，以形成沿第二方向Y延伸的第一支撑条21。
在一些实施例中，异形部211b进一步包括弧形过渡区2111和凸起区(图中未示出)，弧形过渡区2111与遮挡条22连接。具体的，一个交叠部211在第二方向Y上包括四个弧形过渡区2111和一个凸起区，四个弧形过渡区2111分别设置在交叠部211的四角，凸起区设置在交叠部211一侧的中部，弧形过渡区2111的设置使得第一支撑条21与遮挡条22实现相互连接。
在一些可选实施例中，弧形过渡区2111具有朝向第一开口23的边缘E，边缘E沿远离第一开口23的方向凸出成型且呈弧形。
通常情况下，待蒸镀显示面板中的显示区包括有四个弧角，四个弧角分配在显示区的四个角落，用于实现显示区中相邻两个边缘的圆滑过渡。本申请实施例根据显示面板中显示区的四个弧角，将弧形过渡区2111的边缘E设置为弧形，从而使得第一开口23能够存在与显示区中弧角相匹配的弧形结构。
本体部211a和异形部211b的厚度相同，即交叠部211中各处厚度保持均一。在制作本体部211a和异形部211b的过程中，可以同时对本体部211a和异形部211b进行半刻蚀处理，以使两者厚度保持相同。
本申请实施例中的第一开口23的形状与待蒸镀显示面板中显示区的形状相匹配，不同显示面板中的显示区的形状并不相同，同时对于需要设置有屏下摄像头以及红外传感器等的显示面板而言，需要设置有特定区域用于容纳感光元件，因此存在有水滴或刘海等异形区域的显示面板应运而生。在这个基础上，为了满足包括异形区域的显示面板的制备需要，本申请实施例在交叠部211上设置有异形部211b，异形部211b由本体部211a朝对应第一开口23向外突出，异形部211b的至少部分区域例如凸起区，可以与显示面板中用于设置感光元件的异形区域相匹配。通过改变异形部211b的形状能够形成不同的第一开口23，从而满足不同异形显示面板的蒸镀需要，具有较强通用性。
需要说明的是，单个交叠部211同时用于围合形成两个第一开口23，因此单个交叠部211可以包括有两个部分，其中一个部分包括有部分异形部211b以及部分本体部211a，用于形成非显示区中包括有异形区域的边缘区域，即包括凸起区的一侧；另一部分包括有部分异形部211b以及部分本体部211a，用于形成非显示区中与异形区域相对的边缘区域。
在一些实施例中，第一支撑条21为一体成型，交叠部211可以通过半刻蚀等工艺制备形成。
在一些实施例中，请参阅图6至图8所示，遮挡条22包括沿第一方向X延伸的第一遮挡部221，以及沿第二方向Y位于第一遮挡部221两侧的第二遮挡部222，第二遮挡部222的厚度与交叠部211的厚度相同。
第一遮挡部221沿第一方向X延伸成型，第二遮挡部222沿第二方向Y位于第一遮挡部221的两侧，其中，第二遮挡部222也可以沿第一方向X延伸，第一遮挡部221的厚度大于第二遮挡部222的厚度，第二遮挡部222与交叠部211的厚度相同。其中，掩膜条3可以搭接在第一遮挡部221上，从而实现在掩膜版的厚度方向上，掩膜条3与交叠部211之间具有间隙。
在一些实施例中，第一遮挡部221沿第一方向X延伸，具体的，第一遮挡部221可以沿直线延伸，在其他实施例中，第一遮挡部221可以沿曲线延伸，在此不作限定。
在一些实施例中，第二遮挡部222沿第一方向X延伸，具体的，第二遮挡部222可以沿直线延伸，在其他实施例中，第二遮挡部222可以沿曲线延伸，在此不作限定。
在一些实施例中，沿第二方向Y，第一遮挡部221位于遮挡条22的正中间区域或中间区域偏左的区域或中间区域偏右的区域。
在一些实施例中，位于第一遮挡部221的两侧的两个第二遮挡部222的大小、形状相同。可有利于简化遮挡条22的制备工艺。
在一些实施例中，沿第一方向X延伸的第一遮挡部221的厚度均匀设置，沿第一方向X延伸的第二遮挡部222的厚度也均匀设置。
在一些实施例中，沿第二方向Y，第一遮挡部221的宽度占遮挡条22整个宽度的50％-95％。优选地，第一遮挡部221的宽度占遮挡条22整个宽度的80％、85％、90％和95％。在避免掩膜条3褶皱的基础上，能够有效进行遮挡，避免蒸镀材料通过空隙沉积在待蒸镀显示面板上而形成异物。
由前述内容可知，交叠部211用于围合第一开口23，交叠部211的形状与待蒸镀显示面板的非显示区中边缘区域的形状相匹配。同样地，遮挡条22上的第二遮挡部222也用于围合第一开口23，第二遮挡部222的形状同样与待蒸镀显示面板的非显示区中边缘区域的形状相匹配。其中，交叠部211与第二遮挡部222中一者与待蒸镀显示面板的非显示区中长边区域对应，另一者与非显示区中短边区域对应。
进一步地，由于遮挡条22为磁性材料，为了避免在蒸镀过程中，遮挡条22对掩膜条3的吸附作用过强，导致掩膜版发生褶皱无法伸展，因此本申请实施例将第二遮挡部222的厚度设置为小于第一遮挡部221的厚度，并使其与交叠部211的厚度相同，从而使得掩膜版通过第一遮挡部221与第二遮挡部222间隔设置，降低掩膜条3发生褶皱的风险。
在一些可选实施例中，第一支撑条21和遮挡条22为一体结构，第一支撑条21和遮挡条22可以在同一板材结构上通过刻蚀等工艺制备形成，从而简化制作过程，降低制造难度。此外，第一支撑条21上的交叠部211与遮挡条22上的第二遮挡部222可以通过同一个半刻蚀处理过程形成，以使两者厚度保持相同。
可以理解的是，第一支撑条21上的交叠部211与遮挡条22上的第二遮挡部222的厚度也可以不同，只要满足交叠部211的厚度与第二遮挡部222的厚度均小于第一遮挡部221的厚度即可，在此不做限定。
在一些实施例中，请一并参阅图2、图9和图10，至少部分掩膜条3与第一支撑条21之间设置有第 二支撑条24，第二支撑条24沿第二方向Y延伸并与多个遮挡条22相交设置，第二支撑条24包括容纳槽241，至少部分遮挡条22位于容纳槽241内。
可以理解的是，第二支撑条24朝向第一支撑条21的表面向内凹陷构成容纳槽241。
由前述内容可知，为了降低第一支撑条21对掩膜条3的吸附效果，本申请实施例将第一支撑条21中交叠部211进行减薄处理，从而降低第一支撑条21的磁吸效果，降低掩膜条3发生褶皱的风险。在这种情况下，为了提高支撑能力，本申请实施例额外增设了第二支撑条24，对于重量较大的掩膜条3，第二支撑条24安装在第一支撑条21上，第一支撑条21和第二支撑条24能够共同支撑掩膜条3；而对于一些重量较轻的掩膜条，可以将第二支撑条24从第一支撑条21上卸下，仅依靠第一支撑条21实现支撑作用。
可选地，第二支撑条24在第一方向X上的宽度不大于第一支撑条21在第一方向X上的宽度。
此外，在第一支撑条21的延伸方向上，存在有部分与第一支撑条21相交的遮挡条22，并且遮挡条22至少部分的厚度大于第一支撑条21的厚度。因此为了避让遮挡条22，本申请实施例在第二支撑条24上设置有容纳槽241，第二支撑条24通过容纳槽241卡接在遮挡条22上，容纳槽241的设置为第二支撑条24的安装起到了定位作用。
可以理解的是，可以是所有的第一支撑条21与掩膜条3之间设置有第二支撑条24，即每个第一支撑条21上均设置有第二支撑条24，此种设置方式可有效提高支撑效果；也可以是部分的第一支撑条21与掩膜条3之间设置有第二支撑条24，例如每相邻两个第一支撑条21中其中一个第一支撑条21上设置有第二支撑条24，可节约原料，且简化掩膜版的制备工艺。具体可根据实际情况进行设置，在此不做限定。
在一些实施例中，第二支撑条24包括无磁材料。
第二支撑条24主要用于支撑掩膜条3，掩膜条3可以与第二支撑条24直接接触，同时为了降低第二支撑条24对掩膜条3的磁吸效果，本申请实施例将第二支撑条24设置为无磁材料，从而避免第二支撑条24对掩膜条3产生磁吸影响，进而降低掩膜条3发生褶皱的风险。可选地，无磁材料包括无磁钢。
申请人通过实验发现，与现有技术相比，采用本申请实施例中未设置有第二支撑条24的掩膜版进行蒸镀时，掩膜版的褶皱会大幅度减小，并且本申请实施例在设置有第二支撑条24的情况下，掩膜版的褶皱还会进一步的减小。
具体地说，在磁感应强度为300G的前提下，在采用本申请实施例中未设置有第二支撑条24的掩膜版进行蒸镀时，掩膜版的褶皱相比现有技术大幅度减小，并且形成的膜厚不均匀区的最大宽度大约为10μm。而增加第二支撑条24后，掩膜版的褶皱更进一步减小，并且显示区内形成的膜厚不均匀区的最大宽度为7-9μm。
在磁感应强度为200G的前提下，采用本申请实施例中设置有第二支撑条24的掩膜版进行蒸镀时，掩膜版的褶皱基本消失。
第二方面，本申请实施例提供了一种掩膜版的制作方法，掩膜版可以为上述任一第一方面实施例提供的掩膜版，如图11所示，掩膜版的制作方法包括：
S100：根据待蒸镀显示面板的像素排布结构对初始基板图案化处理形成掩膜条，掩膜条包括一个第二开口以及设置于第二开口两侧的边框区。
在步骤S100中，掩膜条中第二开口的形状与待蒸镀显示面板中显示区的形状不尽相同，而第二开口内包括多个像素开口，像素开口的排布与待蒸镀显示面板中的像素排布相同。即掩膜条的制备仅需知道待蒸镀显示面板中显示区内的像素排布结构，而第二开口的形状并不取决于待蒸镀显示面板中显示区的形状。
S120：根据待蒸镀显示面板的显示区的大小和形状将第一支撑条和遮挡条设置于框式主体，多个第一支撑条和多个遮挡条围合构成多个第一开口。
在步骤S120中，框式主体以及设置在框式主体上的第一支撑条主要用于支撑掩膜条，而遮挡条主要用于遮挡相邻掩膜条间的空隙。同时根据待蒸镀显示面板的显示区的大小和形状，本申请实施例将第一支撑条以及遮挡条的尺寸形状进行了改变，使得第一支撑条与遮挡条围合构成的第一开口的形状与待蒸镀显示面板中显示区的大小和形状相匹配，以便后续在待蒸镀显示面板的显示区内蒸镀发光单元等。其中，第一支撑条和遮挡条可以为一体结构，也可以为相互独立的结构，本申请实施例对此不作限制。
S130：将掩膜条设置于第一支撑条背离框式主体的一侧，第二开口在框式主体的正投影覆盖沿第一方向设置的多个第一开口在框式主体上的正投影。
在步骤S130，掩膜条覆盖多个第一开口设置，其中掩膜条的延伸方向与遮挡条的延伸方向相同。示例性地，若遮挡条沿行方向延伸，则掩膜条覆盖一行上的全部第一开口；若遮挡条沿列方向延伸，则掩膜条覆盖一列上的全部第一开口。
本申请实施例提供的掩膜版中的单个掩膜条仅需设置有一个第二开口，这样设计能够降低掩膜版发生局部褶皱的风险。
在一些实施例中，如图12所示，步骤S120之前还包括：
S110：对板材结构图案化处理形成多个第一支撑条和多个遮挡条，第一支撑条在第二方向上包括多个交叠部，第一方向与第二方向相交，交叠部的厚度小于遮挡条至少部分的厚度。
在步骤S110中，第一支撑条21与遮挡条22可以为一体式结构，通过对单一板材结构图案化处理制备形成。其中，图案化处理包括对板材结构进行全刻蚀处理，以形成对应形状的第一开口23；对第一支撑条21的交叠部211进行半刻蚀处理，以使交叠部211的厚度小于遮挡条22至少部分的厚度。对于交叠部211与遮挡条22间的厚度差，根据待蒸镀显示面板的蒸镀需要决定，本申请实施例对此不作限制。
在步骤S130中，多个第一支撑条21的至少部分交叠部211和同一掩膜条3的第二开口31交叠设置。
本申请实施例对第一支撑条21中交叠部211的厚度进行减薄处理，使其厚度小于遮挡条22至少部分的厚度。可选地，第一支撑条21包括磁吸材料，第一支撑条21中交叠部211的磁吸效果与其自身厚度呈正相关，因此减薄处理能够降低交叠部211的磁吸效果，从而减小因交叠部211对掩膜条3的吸附能力过强，出现掩膜条3无法完全展开的风险。
虽然本申请所公开的实施方式如上，但所述的内容只是为了便于理解本申请而采用的实施方式，并非用以限定本发明。任何本申请所属技术领域内的技术人员，在不脱离本申请所公开的精神和范围的前提下，可以在实施的形式上及细节上作任何的修改与变化，但本申请的保护范围，仍须以所附的权利要求书所界定的范围为准。
以上所述，仅为本申请的具体实施方式，所属领域的技术人员可以清楚地了解到，为了描述的方便和简洁，上述描述的其他连接方式的替换等，可以参考前述方法实施例中的对应过程，在此不再赘述。应理解，本申请的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本申请揭露的技术范围内，可轻易想到各种等效的修改或替换，这些修改或替换都应涵盖在本申请的保护范围之内。

Claims (10)

  1. 一种掩膜版，所述掩膜版包括：
    框式主体；
    多个第一支撑条和多个遮挡条，所述第一支撑条和所述遮挡条相交设置且设置于所述框式主体，多个所述第一支撑条和多个所述遮挡条围合构成多个第一开口；
    多个掩膜条，所述掩膜条包括一个第二开口以及在第一方向上分别设置于所述第二开口两侧的边框区；
    其中，所述掩膜条通过所述边框区连接于所述框式主体，所述第二开口在框式主体上的正投影覆盖沿所述第一方向设置的多个所述第一开口在框式主体上的正投影。
  2. 根据权利要求1所述的掩膜版，其中，所述第一支撑条沿第二方向延伸，多个所述第一支撑条沿所述第一方向排布，所述第一支撑条在所述第二方向上包括多个交叠部，多个所述第一支撑条的至少部分所述交叠部和同一所述掩膜条的所述第二开口交叠设置，所述第一方向与所述第二方向相交；
    其中，所述交叠部的厚度小于所述遮挡条至少部分的厚度；
    优选地，所述第一方向和所述第二方向垂直；
    优选地，所述掩膜条至少部分搭接于所述遮挡条，并通过所述遮挡条与所述交叠部间隔设置；
    优选地，所述第一支撑条包括磁吸材料。
  3. 根据权利要求2所述的掩膜版，其中，所述交叠部包括沿所述第二方向延伸的本体部，以及由所述本体部朝对应所述第一开口向外突出的异形部；
    优选地，所述本体部与所述异形部的厚度相同。
  4. 根据权利要求3所述的掩膜版，其中，所述遮挡条包括沿所述第一方向延伸的第一遮挡部，以及沿所述第二方向位于所述第一遮挡部两侧的第二遮挡部，所述第一遮挡部的厚度大于所述第二遮挡部的厚度，所述第二遮挡部的厚度与所述交叠部的厚度相同。
  5. 根据权利要求4所述的掩膜版，其中，所述第一支撑条和所述遮挡条为一体结构。
  6. 根据权利要求2至5任一项所述的掩膜版，其中，至少部分所述掩膜条与所述第一支撑条之间设置有第二支撑条，所述第二支撑条沿所述第二方向延伸并与多个所述遮挡条相交设置，所述第二支撑条包括容纳槽，至少部分所述遮挡条位于所述容纳槽内。
  7. 根据权利要求6所述的掩膜版，其中，所述第二支撑条包括无磁材料；
    优选地，所述无磁材料包括无磁钢。
  8. 根据权利要求1至7任一项所述的掩膜版，其中，所述掩膜版用于对待蒸镀显示面板进行蒸镀；
    其中，所述待蒸镀显示面板包括显示区和非显示区，所述第一开口与所述待蒸镀显示面板的显示区的大小和形状相匹配。
  9. 一种掩膜版的制作方法，其中，包括：
    根据待蒸镀显示面板的像素排布结构对初始基板图案化处理形成掩膜条，所述掩膜条包括一个第二开口以及设置于所述第二开口两侧的边框区；
    根据待蒸镀显示面板的显示区的大小和形状将第一支撑条和遮挡条设置于框式主体，多个所述第一支撑条和多个所述遮挡条围合构成多个第一开口；
    将所述掩膜条设置于所述第一支撑条背离所述框式主体的一侧，所述第二开口在框式主体上的正投影覆盖沿第一方向设置的多个所述第一开口在框式主体上的正投影。
  10. 根据权利要求9所述的制作方法，所述根据待蒸镀显示面板的显示区的大小和形状将第一支撑条和遮挡条设置在框式主体的步骤之前还包括：
    对板材结构图案化处理形成多个所述第一支撑条和多个所述遮挡条，所述第一支撑条在第二方向上包括多个交叠部，所述第一方向与所述第二方向相交，所述交叠部的厚度小于所述遮挡条至少部分的厚度；
    优选地，所述将所述掩膜条设置于所述第一支撑条背离所述框式主体的一侧的步骤中，多个所述第一支撑条的至少部分所述交叠部和同一所述掩膜条的所述第二开口交叠设置。
PCT/CN2022/122498 2022-06-30 2022-09-29 掩膜版及掩膜版的制作方法 Ceased WO2024000893A1 (zh)

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