WO2023238390A1 - Wiring device - Google Patents

Wiring device Download PDF

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Publication number
WO2023238390A1
WO2023238390A1 PCT/JP2022/023469 JP2022023469W WO2023238390A1 WO 2023238390 A1 WO2023238390 A1 WO 2023238390A1 JP 2022023469 W JP2022023469 W JP 2022023469W WO 2023238390 A1 WO2023238390 A1 WO 2023238390A1
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WO
WIPO (PCT)
Prior art keywords
wire
wire guide
capillary
wiring device
coated
Prior art date
Application number
PCT/JP2022/023469
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French (fr)
Japanese (ja)
Inventor
晃一 佐藤
墾基 松岡
Original Assignee
株式会社カイジョー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社カイジョー filed Critical 株式会社カイジョー
Priority to CN202280018184.7A priority Critical patent/CN117597771A/en
Priority to JP2022570553A priority patent/JP7263633B1/en
Priority to PCT/JP2022/023469 priority patent/WO2023238390A1/en
Priority to TW112116344A priority patent/TW202350065A/en
Publication of WO2023238390A1 publication Critical patent/WO2023238390A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation

Definitions

  • the present invention relates to a wiring device.
  • a wire or coated wire drawn out from the tip of a capillary held by an ultrasonic horn is passed through one of the holes.
  • the covered wire is drawn under the substrate, the capillary is raised while the covered wire is let out, the substrate is moved horizontally, and the capillary is lowered to join the other end of the wire or the covered wire to the substrate.
  • the wire or coated wire is cut, the capillary is raised, the substrate is moved horizontally, the capillary is positioned above one of the plurality of holes, and the wire is let out from the tip of the capillary while lowering the capillary.
  • the other end of the wire or coated wire is joined to the substrate by passing the coated wire through the hole, drawing the wire or coated wire under the substrate, and performing the same operation as above.
  • a wire or coated wire is passed through each of two or more rows of holes, and the other end of each wire or coated wire is bonded to the substrate.
  • the wiring is assembled in this way.
  • the other end of the wire or coated wire is bonded to the substrate, but as shown in FIG.
  • a substrate on which a base (base with some thickness) 18 is arranged, and an electrode (not shown) provided on the substrate base 18 corresponds to the other end of the wire or coated wire.
  • the ultrasonic horn 22 and the substrate base 18 interfere as shown in FIG.
  • the wire 11 or coated wire is inserted into one of the plurality of holes 17. Therefore, if there is resistance between the hole 17 of the substrate 16 and the wire 11 or the coated wire when inserting the wire 11 or the coated wire, the wire 11 or the coated wire may be bent and inserted into the hole 17 (Fig. 9 reference).
  • the tip of the wire 11 or the covered wire may shake due to vibration of the device or surrounding airflow, so the wire 11 or the covered wire may Sometimes it doesn't fit.
  • An object of one aspect of the present invention is to provide a wiring device that can accurately insert a wire or a coated wire into a hole provided in a substrate.
  • a wiring device comprising:
  • the wire guide has a groove, and the suction port is provided on the inner surface of the groove,
  • a lifting mechanism that lifts and lowers the capillary and the wire guide held by the horn; a control unit; The control unit is configured to cause the wire or the coated wire drawn out from the capillary to be attracted to the suction port of the wire guide, and to lower the capillary and the wire guide using the elevating mechanism so as to insert the wire or the coated wire into the hole.
  • the wiring device according to [1] or [2] above, wherein the wiring device is controlled to insert the covered wire.
  • the control unit removes the suction of the wire or the coated wire from the suction port and raises the capillary and the wire guide using the lifting mechanism. and controlling the wire guide moving mechanism to move the wire guide in a direction that moves the wire or the coated wire away from the suction port.
  • connection point is an electrode, and the wire or the covered wire drawn out from the capillary is bonded to the electrode.
  • the elevating mechanism has a slide member that can be raised and lowered, The horn is attached to the slide member via a connecting member, The wiring device according to [3] above, wherein the wire guide moving mechanism is attached to the slide member.
  • the wire guide moving mechanism is a mechanism for moving the wire guide within a plane that includes the axis of the wire or the coated wire attracted to the suction port and the axis of the horn.
  • a wiring device that can accurately insert a wire or a coated wire into a hole provided in a substrate.
  • FIG. 1 is a cross-sectional view for explaining a wiring device including a vacuum suction wire guide according to one embodiment of the present invention.
  • 2 is a perspective view schematically showing the entire wiring device shown in FIG. 1.
  • FIG. FIG. 2 is a perspective view of the entire wiring device shown in FIG. 1 viewed from a different direction from FIG. 2, and a partially enlarged perspective view of a vacuum suction wire guide.
  • (A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the covered wire.
  • (A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the covered wire.
  • FIG. 2 is a perspective view showing how each of a plurality of holes in a substrate and each of a plurality of connection points provided on a substrate base arranged on a substrate are wired with wires or coated wires.
  • FIG. 2 is a perspective view showing how each of a plurality of holes in a substrate and each of a plurality of connection points provided on a substrate base arranged on a substrate are wired with wires or coated wires.
  • (A) is a top view showing the board 16, the board base 18, and the board 39 excluding the wiring device shown in FIGS. 6 and 7, and
  • (B) is a cross-sectional view of (A). It is a sectional view showing an example where insertion of a wire or a coated wire into a hole provided in a board failed.
  • FIG. 3 is a cross-sectional view showing an example in which a wire or a covered wire fails to be inserted into a hole provided in a substrate.
  • FIG. 1 is a cross-sectional view for explaining a wiring device equipped with a vacuum suction wire guide according to one embodiment of the present invention.
  • FIG. 2 is a perspective view schematically showing the entire wiring device shown in FIG. 3 is a perspective view of the entire wiring device shown in FIG. 1 viewed from a different direction from FIG. 2, and a perspective view in which a part of the vacuum suction wire guide is enlarged.
  • the vacuum suction wire guide 10 guides a wire 11 (which may be a coated wire).
  • the vacuum suction wire guide 10 has a wire guide 12, this wire guide 12 has a groove 12a, and an inner surface 12b of the groove 12a has a first suction port 13a and a second suction port. 13b and a third suction port 13c are provided.
  • the first to third suction ports 13a to 13c are suction ports for vacuum suctioning the wire 11 or the coated wire.
  • the cross section of the groove preferably has a V-shape or a U-shape. In this case, it is preferable to provide the first to third suction ports 13a to 13c at the bottom of the groove 12a.
  • the first to third suction ports 13a to 13c are connected to an exhaust path 14, and this exhaust path 14 is provided inside the wire guide 12.
  • the exhaust path 14 is connected to a vacuum exhaust mechanism 15. That is, the first to third suction ports 13a to 13c are connected to the vacuum exhaust mechanism 15 via the exhaust path 14, and by evacuating the exhaust path 14 by the vacuum exhaust mechanism 15, the first to third suction ports 13a to 13c are The wire 11 or the covered wire is attracted to the suction ports 13a to 13c.
  • the evacuation mechanism 15 is constituted by, for example, a vacuum pump or the like.
  • the first suction port 13a, the second suction port 13b, and the third suction port 13c are provided on the inner surface 12b of the groove 12a, and the first to third suction ports
  • the wire 11 or the covered wire is attracted to 13a to 13c. Therefore, the wire 11 or the coated wire can be securely fixed with good positional accuracy.
  • the wire 11 can be placed at the bottom of the groove 12a with better positioning accuracy. It becomes possible to fix it.
  • the wiring device 100 has a hole 17 provided in a substrate 16 and a connection point 19 on the substrate 16 located a predetermined distance away from the hole 17 (see FIGS. 5C and 5D).
  • This is a device for wiring with wire 11 or coated wire.
  • the connection point 19 is provided on a substrate base 18 arranged on the substrate 16.
  • the wiring device 100 includes the vacuum suction wire guide 10 described above. Further, the wiring device 100 has a capillary 21 for feeding out the wire 11 or the coated wire, and this capillary 21 is held by an ultrasonic horn 22. Further, the wiring device 100 moves the wire guide 12 in a direction 61 in which the first to third suction ports 13a to 13c are brought closer to the wire 11 or the coated wire fed out from the capillary 21 and in a direction 62 in which the first to third suction ports 13a are moved away from the wire 11 or the coated wire as shown in FIGS. 2 and 3. It has a wire guide moving mechanism 30 shown in (see FIGS. 4(A) and 5(B)). The wiring device 100 also includes a lifting mechanism (Z-axis moving mechanism) 40 that moves the capillary 21 and wire guide 12 held by the ultrasonic horn 22 up and down.
  • a lifting mechanism Z-axis moving mechanism
  • the wiring device 100 has an XY stage 26 on which a substrate 16 is placed. It has an X-axis moving mechanism 29 that moves the XY stage 26 in the X direction 27.
  • the wiring device 100 also includes a Y-axis moving mechanism 33 that moves the XY stage 26 in the Y direction 28.
  • the wiring device 100 has a control section 50.
  • This control unit 50 controls the on/off operation of the evacuation mechanism 15 shown in FIG. 1, the capillary 21, the ultrasonic horn 22, the wire guide movement mechanism 30 shown in FIG. 2, the Z-axis movement mechanism 40, and the It controls the mechanism 29 and the Y-axis moving mechanism 33.
  • the wire guide moving mechanism 30 moves the wire 11 or the coated wire vacuum-adsorbed to the first to third suction ports 13a to 13c into a plane parallel to the longitudinal direction, and an ultrasonic horn 22.
  • This is a mechanism for moving the wire guide 12 within a plane 70 that overlaps with a plane parallel to the longitudinal direction (see FIGS. 5(A) and 5(B)).
  • the wire guide moving mechanism 30 has a surface that includes the axis of the wire 11 or the coated wire vacuum-adsorbed to the first to third suction ports 13a to 13c and the axis of the ultrasonic horn 22. This is a mechanism for moving the wire guide 12 within the wire guide 70.
  • the Z-axis moving mechanism 40 includes a slide member 41 that can be moved up and down.
  • a wire guide moving mechanism 30 is attached to this slide member 41.
  • the wire guide moving mechanism 30 has a rotation mechanism 32, and this rotation mechanism 32 can use, for example, a motor, a rotary actuator, or the like.
  • the rotation mechanism 32 rotates the rotation shaft 31, and the rotation shaft 31 is attached to the wire guide 12.
  • the ultrasonic horn 22 is attached to the slide member 41 via a connecting member 42, and the rotation mechanism 32 is also attached.
  • the slide member 41 moves up and down in the direction of the arrow 43, thereby making it possible to move up and down the ultrasonic horn 22 and the wire guide 12 to which the capillary 21 is attached.
  • the slide member 41 and the connecting member 42 may be integrally formed.
  • the control unit 50 shown in FIG. The wire 11 or the coated wire may be inserted into the hole 17 by lowering the wire guide 21 and the wire guide 12.
  • the control unit 50 removes the vacuum suction of the wire 11 or the coated wire from the first to third suction ports 13a to 13c, and moves the wire 11 or the coated wire by the Z-axis moving mechanism 40. Even if the capillary 21 and the wire guide 12 are raised and the wire guide moving mechanism 30 is controlled to move the wire guide 12 in a direction 62 that moves the wire 11 or the coated wire away from the first to third suction ports 13a to 13c. good.
  • FIG. 5(A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the coated wire.
  • the wire 11 or the coated wire is fixed to the first to third suction ports 13a to 13c of the wire guide 12. move to position.
  • the wire 11 or the coated wire is let out from the capillary 21, and then the evacuation mechanism 15 shown in FIG. 1 connected to the evacuation path 14 of the wire guide 12 is turned on.
  • the wire 11 or the coated wire is vacuum-adsorbed and fixed to the first to third suction ports 13a to 13c.
  • the wire guide 12 With the wire 11 or the coated wire fixed to the wire guide 12, the wire guide 12, capillary 21, and ultrasonic horn are moved by the Z-axis moving mechanism 40 shown in FIGS. 2 and 3. 22 is lowered, the tip of the wire 11 or coated wire is inserted into the hole 17 of the substrate 16, and the wire or coated wire is pulled under the substrate 16.
  • the wire guide 12 is moved in a direction 62 that moves the first to third suction ports 13a to 13c away from the wire 11 or the coated wire, thereby retracting the wire guide 12. .
  • the rotation shaft 31 is rotated by the rotation mechanism 32 of the wire guide moving mechanism 30 shown in FIGS. 2 and 3, and the wire guide 12 is retracted.
  • the substrate 16 is moved in the X direction 27. Specifically, the substrate 16 is moved in the X direction 27 by moving the XY stage 26 on which the substrate 16 is placed in the X direction 27 by the X-axis moving mechanism 29 shown in FIG. At this time, since the wire guide 12 is retracted in the step shown in FIG. 5(B), the wire guide 12 does not interfere with the substrate base 18. Thereafter, the wire guide 12, the capillary 21, and the ultrasonic horn 22 are lowered as shown by the arrow 36, and the wire 11 or the coated wire is wired to the connection point 19 provided on the substrate base 18 at the tip of the capillary 21. Note that when the connection point 19 is, for example, the electrode 37 shown in FIG. 6, the wire 11 or the covered wire may be bonded to the electrode 37.
  • the wire 11 or the coated wire is cut, and the wire guide 12, capillary 21, and ultrasonic horn 22 are moved in the direction of the arrow 38 by the Z-axis moving mechanism 40 shown in FIGS. to rise in the direction.
  • connection point 19 is provided directly on the substrate base 18, but the connection point 19 is not limited to this, and the connection point 19 as shown in FIGS. It may be. That is, the connection point 19 may be a connection point on the substrate 39 disposed on the substrate base 18. This connection point may be an electrode.
  • FIG. 8(A) is a top view showing the board 16, board base 18, and board 39 excluding the wiring device shown in FIGS. 6 and 7, and FIG. FIG.
  • the wire 11 or the coated wire drawn out from the capillary 21 is fixed by vacuum suction by the wire guide 12, and then the capillary 21 is lowered and the wire 11 or the coated wire is guided by the wire guide 12. while inserting it into the hole 17 of the board 16. Therefore, it is possible to prevent the wire 11 or the covered wire from being bent and inserted into the hole 17, and when the wire 11 or the covered wire is inserted, the tip of the wire 11 or the covered wire swings, so that the wire 11 or the covered wire is inserted into the hole 17. You can prevent it from entering. Therefore, it becomes possible to insert the wire 11 or the coated wire into the hole 17 of the substrate 16 with high accuracy and stability.

Abstract

[Problem] Provided is a vacuum suction wire guide that is used in order to highly accurately insert a wire or coated line into a hole provided in a substrate. [Solution] An embodiment of the present invention pertains to a wiring device 100 for wiring, using a wire 11 or a coated line, a hole 17 provided in a substrate 16 and a connection point on the substrate located apart from the hole by a predetermined distance. The wiring device 100 has: a capillary 21 for sending out the wire or coated line; a wire guide 12 including suction openings 13a-13c for suctioning the wire or coated line; a horn 22 that holds the capillary and the wire guide; and a wire guide movement machine that moves the wire guide in a direction for moving the wire or coated line sent out from the capillary toward or away from the suction openings.

Description

配線装置wiring device
 本発明は、配線装置に関する。 The present invention relates to a wiring device.
 基板に設けられた複数の穴が並んだ列が2列以上あり、それら複数の穴の一つに超音波ホーンに保持されたキャピラリの先端から繰り出されたワイヤ又は被覆線を通し、そのワイヤ又は被覆線を基板下に引き込み、被覆線を繰り出しながらキャピラリを上昇させ、基板が水平移動し、キャピラリを下降させることで、ワイヤ又は被覆線の他端を基板に接合する。その後、そのワイヤ又は被覆線を切断し、キャピラリを上昇させ、基板を水平移動させてキャピラリを上記の複数の穴の一つの上方に位置させ、キャピラリを下降させつつキャピラリの先端から繰り出されたワイヤ又は被覆線を穴に通し、そのワイヤ又は被覆線を基板下に引き込み、上記と同様の操作をすることで、ワイヤ又は被覆線の他端を基板に接合する。これらを繰り返すことで、複数の穴が並んだ2列以上の各々の穴にワイヤ又は被覆線を通し、その各々のワイヤ又は被覆線の他端を基板に接合する。このようにして配線が組み立てられる。 There are two or more rows of holes provided in the substrate, and a wire or coated wire drawn out from the tip of a capillary held by an ultrasonic horn is passed through one of the holes. The covered wire is drawn under the substrate, the capillary is raised while the covered wire is let out, the substrate is moved horizontally, and the capillary is lowered to join the other end of the wire or the covered wire to the substrate. Thereafter, the wire or coated wire is cut, the capillary is raised, the substrate is moved horizontally, the capillary is positioned above one of the plurality of holes, and the wire is let out from the tip of the capillary while lowering the capillary. Alternatively, the other end of the wire or coated wire is joined to the substrate by passing the coated wire through the hole, drawing the wire or coated wire under the substrate, and performing the same operation as above. By repeating these steps, a wire or coated wire is passed through each of two or more rows of holes, and the other end of each wire or coated wire is bonded to the substrate. The wiring is assembled in this way.
 ところで、上述したようにワイヤ又は被覆線の他端を基板に接合しているが、図9に示すように基板16に設けられた2列以上の穴17から所定距離離れた基板17上に基板ベース(ある程度厚みのある土台)18が配置され、その基板ベース18上に設けられた電極(図示せず)が上記のワイヤ又は被覆線の他端に相当するような基板がある。 By the way, as described above, the other end of the wire or coated wire is bonded to the substrate, but as shown in FIG. There is a substrate on which a base (base with some thickness) 18 is arranged, and an electrode (not shown) provided on the substrate base 18 corresponds to the other end of the wire or coated wire.
 このような基板16の場合、図9に示すように超音波ホーン22と基板ベース18が干渉するため、キャピラリ21の先端と基板16を十分に近づけることができない状態で、キャピラリ21の先端から繰り出されたワイヤ11又は被覆線を複数の穴17の一つに挿入することになる。そのため、ワイヤ11又は被覆線の挿入時に基板16の穴17とワイヤ11又は被覆線との間に抵抗がある場合、ワイヤ11又は被覆線が曲がって穴17へ挿入されることがある(図9参照)。 In the case of such a substrate 16, the ultrasonic horn 22 and the substrate base 18 interfere as shown in FIG. The wire 11 or coated wire is inserted into one of the plurality of holes 17. Therefore, if there is resistance between the hole 17 of the substrate 16 and the wire 11 or the coated wire when inserting the wire 11 or the coated wire, the wire 11 or the coated wire may be bent and inserted into the hole 17 (Fig. 9 reference).
 また、図10に示すように、ワイヤ11又は被覆線の挿入時にワイヤ11又は被覆線の先端が装置の振動や周囲の気流の流れ等で揺れることがあるため、ワイヤ11又は被覆線が穴17に入らないこともある。 Further, as shown in FIG. 10, when the wire 11 or the covered wire is inserted, the tip of the wire 11 or the covered wire may shake due to vibration of the device or surrounding airflow, so the wire 11 or the covered wire may Sometimes it doesn't fit.
 上述したようなワイヤ11又は被覆線の穴17への挿入の失敗を防止することが必要である。 It is necessary to prevent failure in inserting the wire 11 or the covered wire into the hole 17 as described above.
 本発明の一態様は、ワイヤ又は被覆線を基板に設けられた穴に精度よく挿入できる配線装置を提供することを課題とする。 An object of one aspect of the present invention is to provide a wiring device that can accurately insert a wire or a coated wire into a hole provided in a substrate.
 以下に本発明の種々の態様について説明する。
[1]基板に設けられた穴と、前記穴から所定距離離れた前記基板上の接続点とをワイヤ又は被覆線により布線する配線装置であって、
 前記ワイヤ又は前記被覆線を繰り出すキャピラリと、
 前記ワイヤ又は前記被覆線を吸着する吸着口を備えたワイヤガイドと、
 前記キャピラリ及び前記ワイヤガイドを保持するホーンと、
 前記キャピラリから繰り出された前記ワイヤ又は前記被覆線に前記吸着口を近づける方向及び遠ざける方向に前記ワイヤガイドを移動させるワイヤガイド移動機と、
を有することを特徴とする配線装置。
Various aspects of the present invention will be explained below.
[1] A wiring device for wiring a hole provided in a substrate and a connection point on the substrate at a predetermined distance from the hole using a wire or a covered wire,
a capillary for feeding out the wire or the coated wire;
a wire guide equipped with a suction port that suctions the wire or the covered wire;
a horn that holds the capillary and the wire guide;
a wire guide moving machine that moves the wire guide in a direction in which the suction port approaches and in a direction in which the suction port moves away from the wire or the coated wire fed out from the capillary;
A wiring device comprising:
[2]前記ワイヤガイドは溝を有しており、前記吸着口は前記溝の内面に設けられており、
 前記溝の内面の断面は、V字形状又はU字形状を有することを特徴とする上記[1]に記載の配線装置。
[2] The wire guide has a groove, and the suction port is provided on the inner surface of the groove,
The wiring device according to item [1] above, wherein a cross section of the inner surface of the groove has a V-shape or a U-shape.
[3]前記ホーンに保持された前記キャピラリ及び前記ワイヤガイドを昇降させる昇降機構と、
 制御部と、を有し、
 前記制御部は、前記キャピラリから繰り出された前記ワイヤ又は前記被覆線を前記ワイヤガイドの前記吸着口に吸着させ、前記昇降機構により前記キャピラリ及び前記ワイヤガイドを下降させることにより前記穴に前記ワイヤ又は前記被覆線を挿入するように制御することを特徴とする上記[1]又は[2]に記載の配線装置。
[3] a lifting mechanism that lifts and lowers the capillary and the wire guide held by the horn;
a control unit;
The control unit is configured to cause the wire or the coated wire drawn out from the capillary to be attracted to the suction port of the wire guide, and to lower the capillary and the wire guide using the elevating mechanism so as to insert the wire or the coated wire into the hole. The wiring device according to [1] or [2] above, wherein the wiring device is controlled to insert the covered wire.
[4]前記制御部は、前記穴に前記ワイヤ又は前記被覆線が挿入された後、前記吸着口から前記ワイヤ又は前記被覆線の吸着を外し、前記昇降機構により前記キャピラリ及び前記ワイヤガイドを上昇させ、前記ワイヤガイド移動機構により前記ワイヤ又は前記被覆線を前記吸着口から遠ざける方向に前記ワイヤガイドを移動させるように制御することを特徴とする上記[3]に記載の配線装置。 [4] After the wire or the coated wire is inserted into the hole, the control unit removes the suction of the wire or the coated wire from the suction port and raises the capillary and the wire guide using the lifting mechanism. and controlling the wire guide moving mechanism to move the wire guide in a direction that moves the wire or the coated wire away from the suction port.
[5]前記基板を載置するXYステージを有し、
 前記XYステージをX方向に移動させるX軸移動機構を有し、
 前記XYステージをY方向に移動させるY軸移動機構を有し、
 前記接続点が電極であり、前記キャピラリから繰り出された前記ワイヤ又は前記被覆線が前記電極にボンディングされることを特徴とする上記[1]又は[2]に記載の配線装置。
[5] It has an XY stage on which the substrate is placed,
an X-axis moving mechanism for moving the XY stage in the X direction;
a Y-axis moving mechanism for moving the XY stage in the Y direction;
The wiring device according to [1] or [2] above, wherein the connection point is an electrode, and the wire or the covered wire drawn out from the capillary is bonded to the electrode.
[6]前記昇降機構は、昇降可能なスライド部材を有し、
 前記ホーンは、接続部材を介して前記スライド部材に取り付けられており、
 前記ワイヤガイド移動機構は、前記スライド部材に取り付けられていることを特徴とする上記[3]に記載の配線装置。
[6] The elevating mechanism has a slide member that can be raised and lowered,
The horn is attached to the slide member via a connecting member,
The wiring device according to [3] above, wherein the wire guide moving mechanism is attached to the slide member.
[7]前記ワイヤガイド移動機構は、前記吸着口に吸着された前記ワイヤ又は前記被覆線の軸心と、前記ホーンの軸心とが含まれる面内で前記ワイヤガイドを移動させる機構であることを特徴とする上記[1]又は[2]に記載の配線装置。 [7] The wire guide moving mechanism is a mechanism for moving the wire guide within a plane that includes the axis of the wire or the coated wire attracted to the suction port and the axis of the horn. The wiring device according to [1] or [2] above, characterized by:
[8]前記ワイヤガイド移動機構は、前記ワイヤガイドに取り付けられた回転軸と、前記回転軸を回転させる回転機構と、を有することを特徴とする上記[1]又は[2]に記載の配線装置。 [8] The wiring according to [1] or [2] above, wherein the wire guide moving mechanism includes a rotating shaft attached to the wire guide and a rotating mechanism that rotates the rotating shaft. Device.
 本発明の種々の態様によれば、ワイヤ又は被覆線を基板に設けられた穴に精度よく挿入できる配線装置を提供することができる。 According to various aspects of the present invention, it is possible to provide a wiring device that can accurately insert a wire or a coated wire into a hole provided in a substrate.
本発明の一態様に係る真空吸着ワイヤガイドを備えた配線装置を説明するための断面図である。FIG. 1 is a cross-sectional view for explaining a wiring device including a vacuum suction wire guide according to one embodiment of the present invention. 図1に示す配線装置の全体を模式的に示す斜視図である。2 is a perspective view schematically showing the entire wiring device shown in FIG. 1. FIG. 図1に示す配線装置の全体を図2とは異なる方向から視た斜視図及び真空吸着ワイヤガイドの一部を拡大した斜視図である。FIG. 2 is a perspective view of the entire wiring device shown in FIG. 1 viewed from a different direction from FIG. 2, and a partially enlarged perspective view of a vacuum suction wire guide. (A)~(D)は、ワイヤ11又は被覆線の布線方法を説明するための断面図である。(A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the covered wire. (A)~(D)は、ワイヤ11又は被覆線の布線方法を説明するための断面図である。(A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the covered wire. 基板の複数の穴のそれぞれと、基板上に配置された基板ベース上に設けられた複数の接続点のそれぞれとをワイヤ又は被覆線により布線する様子を示す斜視図である。FIG. 2 is a perspective view showing how each of a plurality of holes in a substrate and each of a plurality of connection points provided on a substrate base arranged on a substrate are wired with wires or coated wires. 基板の複数の穴のそれぞれと、基板上に配置された基板ベース上に設けられた複数の接続点のそれぞれとをワイヤ又は被覆線により布線する様子を示す斜視図である。FIG. 2 is a perspective view showing how each of a plurality of holes in a substrate and each of a plurality of connection points provided on a substrate base arranged on a substrate are wired with wires or coated wires. (A)は、図6及び図7に示す配線装置を除いた基板16、基板ベース18及び基板39を示す上面図、(B)は、(A)の断面図である。(A) is a top view showing the board 16, the board base 18, and the board 39 excluding the wiring device shown in FIGS. 6 and 7, and (B) is a cross-sectional view of (A). 基板に設けられた穴にワイヤ又は被覆線を挿入するのに失敗した例を示す断面図である。It is a sectional view showing an example where insertion of a wire or a coated wire into a hole provided in a board failed. 基板に設けられた穴にワイヤ又は被覆線を挿入するのに失敗する例を示す断面図である。FIG. 3 is a cross-sectional view showing an example in which a wire or a covered wire fails to be inserted into a hole provided in a substrate.
 以下では、本発明の実施の形態について図面を用いて詳細に説明する。ただし、本発明は以下の説明に限定されず、本発明の趣旨及びその範囲から逸脱することなくその形態及び詳細を様々に変更し得ることは、当業者であれば容易に理解される。従って、本発明は以下に示す実施の形態の記載内容に限定して解釈されるものではない。 Hereinafter, embodiments of the present invention will be described in detail using the drawings. However, those skilled in the art will easily understand that the present invention is not limited to the following description, and that the form and details thereof can be changed in various ways without departing from the spirit and scope of the present invention. Therefore, the present invention should not be interpreted as being limited to the contents described in the embodiments shown below.
 図1は、本発明の一態様に係る真空吸着ワイヤガイドを備えた配線装置を説明するための断面図である。図2は、図1に示す配線装置の全体を模式的に示す斜視図である。図3は、図1に示す配線装置の全体を図2とは異なる方向から視た斜視図及び真空吸着ワイヤガイドの一部を拡大した斜視図である。 FIG. 1 is a cross-sectional view for explaining a wiring device equipped with a vacuum suction wire guide according to one embodiment of the present invention. FIG. 2 is a perspective view schematically showing the entire wiring device shown in FIG. 3 is a perspective view of the entire wiring device shown in FIG. 1 viewed from a different direction from FIG. 2, and a perspective view in which a part of the vacuum suction wire guide is enlarged.
 <真空吸着ワイヤガイド10>
 まず真空吸着ワイヤガイド10について説明する。
 図1に示すように、真空吸着ワイヤガイド10は、ワイヤ11(被覆線であってもよい)をガイドするものである。図3に示すように、真空吸着ワイヤガイド10はワイヤガイド12を有し、このワイヤガイド12は溝12aを有し、溝12aの内面12bには第1の吸着口13a、第2の吸着口13b及び第3の吸着口13cが設けられている。第1~第3の吸着口13a~13cはワイヤ11又は被覆線を真空吸着する吸着口である。
 溝の断面は、V字形状又はU字形状を有することが好ましい。この場合は、溝12aの底部に第1~第3の吸着口13a~13cを設けることが好ましい。
<Vacuum suction wire guide 10>
First, the vacuum suction wire guide 10 will be explained.
As shown in FIG. 1, the vacuum suction wire guide 10 guides a wire 11 (which may be a coated wire). As shown in FIG. 3, the vacuum suction wire guide 10 has a wire guide 12, this wire guide 12 has a groove 12a, and an inner surface 12b of the groove 12a has a first suction port 13a and a second suction port. 13b and a third suction port 13c are provided. The first to third suction ports 13a to 13c are suction ports for vacuum suctioning the wire 11 or the coated wire.
The cross section of the groove preferably has a V-shape or a U-shape. In this case, it is preferable to provide the first to third suction ports 13a to 13c at the bottom of the groove 12a.
 図1に示すように、第1~第3の吸着口13a~13cは排気経路14と接続されており、この排気経路14はワイヤガイド12の内部に設けられている。排気経路14は真空排気機構15に接続されている。つまり、第1~第3の吸着口13a~13cは、排気経路14を介して真空排気機構15に接続されており、真空排気機構15によって排気経路14を排気することで第1~第3の吸着口13a~13cにワイヤ11又は被覆線が吸着される。なお、真空排気機構15は、例えば真空ポンプ等によって構成されている。 As shown in FIG. 1, the first to third suction ports 13a to 13c are connected to an exhaust path 14, and this exhaust path 14 is provided inside the wire guide 12. The exhaust path 14 is connected to a vacuum exhaust mechanism 15. That is, the first to third suction ports 13a to 13c are connected to the vacuum exhaust mechanism 15 via the exhaust path 14, and by evacuating the exhaust path 14 by the vacuum exhaust mechanism 15, the first to third suction ports 13a to 13c are The wire 11 or the covered wire is attracted to the suction ports 13a to 13c. Note that the evacuation mechanism 15 is constituted by, for example, a vacuum pump or the like.
 本実施形態による真空吸着ワイヤガイド10によれば、溝12aの内面12bに第1の吸着口13a、第2の吸着口13b及び第3の吸着口13cを設け、第1~第3の吸着口13a~13cにワイヤ11又は被覆線を吸着する。そのため、ワイヤ11又は被覆線を位置精度よく確実に固定することができる。
 また、溝12aの断面形状をV字形状又はU字形状とし、溝12aの底部に第1~第3の吸着口13a~13cを設けることで、溝12aの底部にワイヤ11をより位置精度よく固定することが可能となる。
According to the vacuum suction wire guide 10 according to the present embodiment, the first suction port 13a, the second suction port 13b, and the third suction port 13c are provided on the inner surface 12b of the groove 12a, and the first to third suction ports The wire 11 or the covered wire is attracted to 13a to 13c. Therefore, the wire 11 or the coated wire can be securely fixed with good positional accuracy.
Furthermore, by making the cross-sectional shape of the groove 12a V-shaped or U-shaped and providing the first to third suction ports 13a to 13c at the bottom of the groove 12a, the wire 11 can be placed at the bottom of the groove 12a with better positioning accuracy. It becomes possible to fix it.
 <配線装置>
 図1に示すように、配線装置100は、基板16に設けられた穴17と、この穴17から所定距離離れた基板16上の接続点19(図5(C),(D)参照)とをワイヤ11又は被覆線により布線する装置である。詳細には、接続点19は、基板16上に配置された基板ベース18上に設けられている。
<Wiring device>
As shown in FIG. 1, the wiring device 100 has a hole 17 provided in a substrate 16 and a connection point 19 on the substrate 16 located a predetermined distance away from the hole 17 (see FIGS. 5C and 5D). This is a device for wiring with wire 11 or coated wire. In detail, the connection point 19 is provided on a substrate base 18 arranged on the substrate 16.
 詳細には、図1~図3に示すように、配線装置100は前述した真空吸着ワイヤガイド10を備えている。また配線装置100は、ワイヤ11又は被覆線を繰り出すキャピラリ21を有し、このキャピラリ21は超音波ホーン22に保持されている。また、配線装置100は、キャピラリ21から繰り出されたワイヤ11又は被覆線に第1~第3の吸着口13a~13cを近づける方向61及び遠ざける方向62にワイヤガイド12を移動させる図2及び図3に示すワイヤガイド移動機構30を有している(図4(A)及び図5(B)参照)。また配線装置100は、超音波ホーン22に保持されたキャピラリ21及びワイヤガイド12を昇降させる昇降機構(Z軸移動機構)40を有している。 Specifically, as shown in FIGS. 1 to 3, the wiring device 100 includes the vacuum suction wire guide 10 described above. Further, the wiring device 100 has a capillary 21 for feeding out the wire 11 or the coated wire, and this capillary 21 is held by an ultrasonic horn 22. Further, the wiring device 100 moves the wire guide 12 in a direction 61 in which the first to third suction ports 13a to 13c are brought closer to the wire 11 or the coated wire fed out from the capillary 21 and in a direction 62 in which the first to third suction ports 13a are moved away from the wire 11 or the coated wire as shown in FIGS. 2 and 3. It has a wire guide moving mechanism 30 shown in (see FIGS. 4(A) and 5(B)). The wiring device 100 also includes a lifting mechanism (Z-axis moving mechanism) 40 that moves the capillary 21 and wire guide 12 held by the ultrasonic horn 22 up and down.
 図1に示すように、配線装置100は、基板16を載置するXYステージ26を有している。XYステージ26をX方向27に移動させるX軸移動機構29を有する。また、配線装置100は、XYステージ26をY方向28に移動させるY軸移動機構33を有する。 As shown in FIG. 1, the wiring device 100 has an XY stage 26 on which a substrate 16 is placed. It has an X-axis moving mechanism 29 that moves the XY stage 26 in the X direction 27. The wiring device 100 also includes a Y-axis moving mechanism 33 that moves the XY stage 26 in the Y direction 28.
 図2に示すように、配線装置100は制御部50を有している。この制御部50は、図1に示す真空排気機構15のオン・オフ、キャピラリ21、超音波ホーン22、図2に示すワイヤガイド移動機構30、Z軸移動機構40、図1に示すX軸移動機構29及びY軸移動機構33を制御するものである。 As shown in FIG. 2, the wiring device 100 has a control section 50. This control unit 50 controls the on/off operation of the evacuation mechanism 15 shown in FIG. 1, the capillary 21, the ultrasonic horn 22, the wire guide movement mechanism 30 shown in FIG. 2, the Z-axis movement mechanism 40, and the It controls the mechanism 29 and the Y-axis moving mechanism 33.
 図1及び図3に示すように、ワイヤガイド移動機構30は、第1~第3の吸着口13a~13cに真空吸着されたワイヤ11又は被覆線の長手方向に対する平行面と、超音波ホーン22の長手方向に対する平行面とが重なる面70内でワイヤガイド12を移動させる機構である(図5(A)、(B)参照)。別言すれば、ワイヤガイド移動機構30は、第1~第3の吸着口13a~13cに真空吸着されたワイヤ11又は被覆線の軸心と、超音波ホーン22の軸心とが含まれる面70内でワイヤガイド12を移動させる機構である。 As shown in FIGS. 1 and 3, the wire guide moving mechanism 30 moves the wire 11 or the coated wire vacuum-adsorbed to the first to third suction ports 13a to 13c into a plane parallel to the longitudinal direction, and an ultrasonic horn 22. This is a mechanism for moving the wire guide 12 within a plane 70 that overlaps with a plane parallel to the longitudinal direction (see FIGS. 5(A) and 5(B)). In other words, the wire guide moving mechanism 30 has a surface that includes the axis of the wire 11 or the coated wire vacuum-adsorbed to the first to third suction ports 13a to 13c and the axis of the ultrasonic horn 22. This is a mechanism for moving the wire guide 12 within the wire guide 70.
 また、図2及び図3に示すように、Z軸移動機構40は、昇降可能なスライド部材41を有している。このスライド部材41にはワイヤガイド移動機構30が取り付けられている。 Furthermore, as shown in FIGS. 2 and 3, the Z-axis moving mechanism 40 includes a slide member 41 that can be moved up and down. A wire guide moving mechanism 30 is attached to this slide member 41.
 詳細に説明すると、ワイヤガイド移動機構30は回転機構32を有しており、この回転機構32は例えばモーターやロータリーアクチュエータ等を用いることができる。回転機構32は回転軸31を回転させるものであり、回転軸31はワイヤガイド12に取り付けられている。スライド部材41には、接続部材42を介して超音波ホーン22が取り付けられているとともに回転機構32が取り付けられている。これにより、スライド部材41が矢印43のように昇降することで、キャピラリ21が取り付けられた超音波ホーン22及びワイヤガイド12を昇降させることが可能となる。なお、スライド部材41と接続部材42は一体的に形成されていてもよい。 To explain in detail, the wire guide moving mechanism 30 has a rotation mechanism 32, and this rotation mechanism 32 can use, for example, a motor, a rotary actuator, or the like. The rotation mechanism 32 rotates the rotation shaft 31, and the rotation shaft 31 is attached to the wire guide 12. The ultrasonic horn 22 is attached to the slide member 41 via a connecting member 42, and the rotation mechanism 32 is also attached. As a result, the slide member 41 moves up and down in the direction of the arrow 43, thereby making it possible to move up and down the ultrasonic horn 22 and the wire guide 12 to which the capillary 21 is attached. Note that the slide member 41 and the connecting member 42 may be integrally formed.
 上記の図2に示す制御部50は、キャピラリ21から繰り出されたワイヤ11又は被覆線をワイヤガイド12の第1~第3の吸着口13a~13cに真空吸着させ、Z軸移動機構40によりキャピラリ21及びワイヤガイド12を下降させることにより穴17にワイヤ11又は被覆線を挿入するように制御してもよい。 The control unit 50 shown in FIG. The wire 11 or the coated wire may be inserted into the hole 17 by lowering the wire guide 21 and the wire guide 12.
 また、制御部50は、穴17にワイヤ11又は被覆線が挿入された後、第1~第3の吸着口13a~13cからワイヤ11又は被覆線の真空吸着を外し、Z軸移動機構40によりキャピラリ21及びワイヤガイド12を上昇させ、ワイヤガイド移動機構30によりワイヤ11又は被覆線を第1~第3の吸着口13a~13cから遠ざける方向62にワイヤガイド12を移動させるように制御してもよい。 Further, after the wire 11 or the coated wire is inserted into the hole 17, the control unit 50 removes the vacuum suction of the wire 11 or the coated wire from the first to third suction ports 13a to 13c, and moves the wire 11 or the coated wire by the Z-axis moving mechanism 40. Even if the capillary 21 and the wire guide 12 are raised and the wire guide moving mechanism 30 is controlled to move the wire guide 12 in a direction 62 that moves the wire 11 or the coated wire away from the first to third suction ports 13a to 13c. good.
 <ワイヤ11又は被覆線の布線方法>
 図4(A)~(D)及び図5(A)~(D)は、ワイヤ11又は被覆線の布線方法を説明するための断面図である。
<Wiring method of wire 11 or coated wire>
4(A) to (D) and FIG. 5(A) to (D) are cross-sectional views for explaining the wiring method of the wire 11 or the coated wire.
 まず、図4(A)に示すように、ワイヤガイド12を矢印61のように移動させることで、ワイヤガイド12の第1~第3の吸着口13a~13cをワイヤ11又は被覆線を固定する位置に移動させる。 First, as shown in FIG. 4A, by moving the wire guide 12 in the direction of the arrow 61, the wire 11 or the coated wire is fixed to the first to third suction ports 13a to 13c of the wire guide 12. move to position.
 次に、図4(B)に示すように、キャピラリ21からワイヤ11又は被覆線を繰り出し、その後にワイヤガイド12の排気経路14に接続された図1に示す真空排気機構15をオンすることで、第1~第3の吸着口13a~13cにワイヤ11又は被覆線を真空吸着して固定する。 Next, as shown in FIG. 4(B), the wire 11 or the coated wire is let out from the capillary 21, and then the evacuation mechanism 15 shown in FIG. 1 connected to the evacuation path 14 of the wire guide 12 is turned on. The wire 11 or the coated wire is vacuum-adsorbed and fixed to the first to third suction ports 13a to 13c.
 次いで、図4(C)に示すように、ワイヤ11又は被覆線をワイヤガイド12に固定した状態で、図2及び図3に示すZ軸移動機構40によりワイヤガイド12、キャピラリ21及び超音波ホーン22を下降させ、ワイヤ11又は被覆線の先端を基板16の穴17に挿入し、そのワイヤ又は被覆線を基板16下に引き込む。 Next, as shown in FIG. 4(C), with the wire 11 or the coated wire fixed to the wire guide 12, the wire guide 12, capillary 21, and ultrasonic horn are moved by the Z-axis moving mechanism 40 shown in FIGS. 2 and 3. 22 is lowered, the tip of the wire 11 or coated wire is inserted into the hole 17 of the substrate 16, and the wire or coated wire is pulled under the substrate 16.
 次に、図4(D)に示すように、排気経路14に接続された図1に示す真空排気機構15をオフすることで、ワイヤガイド12の第1~第3の吸着口13a~13cからワイヤ11又は被覆線の真空吸着を外し、ワイヤガイド12を仮退避させる。 Next, as shown in FIG. 4(D), by turning off the vacuum evacuation mechanism 15 shown in FIG. The vacuum suction of the wire 11 or the coated wire is removed, and the wire guide 12 is temporarily retracted.
 次いで、図5(A)に示すように、キャピラリ21からワイヤ11又は被覆線を繰り出しながら図2及び図3に示すZ軸移動機構40によりワイヤガイド12、キャピラリ21及び超音波ホーン22を矢印25の方向に上昇させる。 Next, as shown in FIG. 5A, while feeding out the wire 11 or the coated wire from the capillary 21, the wire guide 12, capillary 21, and ultrasonic horn 22 are moved by the arrow 25 using the Z-axis moving mechanism 40 shown in FIGS. raise it in the direction of
 次に、図5(B)に示すように、ワイヤ11又は被覆線から第1~第3の吸着口13a~13cを遠ざける方向62にワイヤガイド12を移動させることで、ワイヤガイド12を退避させる。詳細には、図2及び図3に示すワイヤガイド移動機構30の回転機構32によって回転軸31を回転させ、ワイヤガイド12を退避させる。 Next, as shown in FIG. 5(B), the wire guide 12 is moved in a direction 62 that moves the first to third suction ports 13a to 13c away from the wire 11 or the coated wire, thereby retracting the wire guide 12. . Specifically, the rotation shaft 31 is rotated by the rotation mechanism 32 of the wire guide moving mechanism 30 shown in FIGS. 2 and 3, and the wire guide 12 is retracted.
 次いで、図5(C)に示すように、基板16をX方向27に移動させる。詳細には、図1に示すX軸移動機構29により基板16が載置されたXYステージ26をX方向27に移動させることで、基板16がX方向27に移動される。この際、図5(B)に示す工程でワイヤガイド12を退避させているため、ワイヤガイド12が基板ベース18に干渉することがない。この後に、ワイヤガイド12、キャピラリ21及び超音波ホーン22を矢印36のように下降させ、キャピラリ21先端で基板ベース18上に設けられた接続点19にワイヤ11又は被覆線を布線する。なお、接続点19が例えば図6に示す電極37である場合は、その電極37にワイヤ11又は被覆線がボンディング接合されてもよい。 Next, as shown in FIG. 5(C), the substrate 16 is moved in the X direction 27. Specifically, the substrate 16 is moved in the X direction 27 by moving the XY stage 26 on which the substrate 16 is placed in the X direction 27 by the X-axis moving mechanism 29 shown in FIG. At this time, since the wire guide 12 is retracted in the step shown in FIG. 5(B), the wire guide 12 does not interfere with the substrate base 18. Thereafter, the wire guide 12, the capillary 21, and the ultrasonic horn 22 are lowered as shown by the arrow 36, and the wire 11 or the coated wire is wired to the connection point 19 provided on the substrate base 18 at the tip of the capillary 21. Note that when the connection point 19 is, for example, the electrode 37 shown in FIG. 6, the wire 11 or the covered wire may be bonded to the electrode 37.
 次に、図5(D)に示すように、ワイヤ11又は被覆線がカットされてワイヤガイド12、キャピラリ21及び超音波ホーン22が図2及び図3に示すZ軸移動機構40により矢印38の方向に上昇させる。 Next, as shown in FIG. 5(D), the wire 11 or the coated wire is cut, and the wire guide 12, capillary 21, and ultrasonic horn 22 are moved in the direction of the arrow 38 by the Z-axis moving mechanism 40 shown in FIGS. to rise in the direction.
 上記の図4(A)から図5(D)までの配線装置の動作は図2に示す制御部50により制御される。 The operations of the wiring devices shown in FIGS. 4(A) to 5(D) above are controlled by the control unit 50 shown in FIG. 2.
 また、上記の図4(A)から図5(D)までの工程を繰り返すことで、図6、図7及び図8に示すような基板16に複数の列状に設けられた複数の穴17のそれぞれと、複数の穴17から所定距離離れた基板16上に配置された基板ベース18上に設けられた複数の接続点19のそれぞれとをワイヤ11又は被覆線により布線することができる。なお、図5(D)に示す実施形態では、接続点19は基板ベース18上に直接設けられているが、これに限定されるものではなく、図6~図8に示すような接続点19であってもよい。つまり、接続点19は、基板ベース18上に配置された基板39上の接続点であってもよい。この接続点が電極であってもよい。なお、図8(A)は、図6及び図7に示す配線装置を除いた基板16、基板ベース18及び基板39を示す上面図であり、図8(B)は、図8(A)の断面図である。 Further, by repeating the steps from FIG. 4A to FIG. and each of the plurality of connection points 19 provided on the substrate base 18 disposed on the substrate 16 at a predetermined distance from the plurality of holes 17 can be wired with the wires 11 or coated wires. Note that in the embodiment shown in FIG. 5(D), the connection point 19 is provided directly on the substrate base 18, but the connection point 19 is not limited to this, and the connection point 19 as shown in FIGS. It may be. That is, the connection point 19 may be a connection point on the substrate 39 disposed on the substrate base 18. This connection point may be an electrode. Note that FIG. 8(A) is a top view showing the board 16, board base 18, and board 39 excluding the wiring device shown in FIGS. 6 and 7, and FIG. FIG.
 本実施形態によれば、キャピラリ21から繰り出されたワイヤ11又は被覆線をワイヤガイド12により真空吸着して固定した状態で、キャピラリ21を下降させてワイヤガイド12によってワイヤ11又は被覆線をガイドしつつ基板16の穴17に挿入する。このため、ワイヤ11又は被覆線が曲がって穴17へ挿入されることを防止でき、ワイヤ11又は被覆線の挿入時にワイヤ11又は被覆線の先端が揺れることで、ワイヤ11又は被覆線が穴17に入らないことを防止できる。従って、ワイヤ11又は被覆線を基板16の穴17に精度よく安定して挿入することが可能となる。 According to this embodiment, the wire 11 or the coated wire drawn out from the capillary 21 is fixed by vacuum suction by the wire guide 12, and then the capillary 21 is lowered and the wire 11 or the coated wire is guided by the wire guide 12. while inserting it into the hole 17 of the board 16. Therefore, it is possible to prevent the wire 11 or the covered wire from being bent and inserted into the hole 17, and when the wire 11 or the covered wire is inserted, the tip of the wire 11 or the covered wire swings, so that the wire 11 or the covered wire is inserted into the hole 17. You can prevent it from entering. Therefore, it becomes possible to insert the wire 11 or the coated wire into the hole 17 of the substrate 16 with high accuracy and stability.
 10…真空吸着ワイヤガイド
 11…ワイヤ
 12…ワイヤガイド
 12a…溝
 12b…内面
 13a…第1の吸着口
 13b…第2の吸着口
 13c…第3の吸着口
 14…排気経路
 15…真空排気機構
 16…基板
 17…穴
 18…基板ベース
 19…接続点
 21…キャピラリ
 22…超音波ホーン
 26…XYステージ
 27…X方向
 28…Y方向
 29…X軸移動機構
 30…ワイヤガイド移動機構
 31…回転軸
 32…回転機構(モーター)
 33…Y軸移動機構
 40…昇降機構(Z軸移動機構)
 41…スライド部材
 42…接続部材
 50…制御部
100…配線装置
10... Vacuum suction wire guide 11... Wire 12... Wire guide 12a... Groove 12b... Inner surface 13a... First suction port 13b... Second suction port 13c... Third suction port 14... Exhaust route 15... Vacuum exhaust mechanism 16 ... Substrate 17 ... Hole 18 ... Substrate base 19 ... Connection point 21 ... Capillary 22 ... Ultrasonic horn 26 ... XY stage 27 ... X direction 28 ... Y direction 29 ... X-axis movement mechanism 30 ... Wire guide movement mechanism 31 ... Rotation axis 32 …Rotation mechanism (motor)
33...Y-axis movement mechanism 40...Elevating mechanism (Z-axis movement mechanism)
41...Sliding member 42...Connection member 50...Control unit 100...Wiring device

Claims (8)

  1.  基板に設けられた穴と、前記穴から所定距離離れた前記基板上の接続点とをワイヤ又は被覆線により布線する配線装置であって、
     前記ワイヤ又は前記被覆線を繰り出すキャピラリと、
     前記ワイヤ又は前記被覆線を吸着する吸着口を備えたワイヤガイドと、
     前記キャピラリ及び前記ワイヤガイドを保持するホーンと、
     前記キャピラリから繰り出された前記ワイヤ又は前記被覆線に前記吸着口を近づける方向及び遠ざける方向に前記ワイヤガイドを移動させるワイヤガイド移動機と、
    を有することを特徴とする配線装置。
    A wiring device for wiring a hole provided in a substrate and a connection point on the substrate at a predetermined distance from the hole using a wire or a coated wire,
    a capillary for feeding out the wire or the coated wire;
    a wire guide equipped with a suction port that suctions the wire or the covered wire;
    a horn that holds the capillary and the wire guide;
    a wire guide moving machine that moves the wire guide in a direction in which the suction port approaches and in a direction in which the suction port moves away from the wire or the coated wire fed out from the capillary;
    A wiring device comprising:
  2.  前記ワイヤガイドは溝を有しており、前記吸着口は前記溝の内面に設けられており、
     前記溝の内面の断面は、V字形状又はU字形状を有することを特徴とする請求項1に記載の配線装置。
    The wire guide has a groove, the suction port is provided on the inner surface of the groove,
    The wiring device according to claim 1, wherein a cross section of the inner surface of the groove has a V-shape or a U-shape.
  3.  前記ホーンに保持された前記キャピラリ及び前記ワイヤガイドを昇降させる昇降機構と、
     制御部と、を有し、
     前記制御部は、前記キャピラリから繰り出された前記ワイヤ又は前記被覆線を前記ワイヤガイドの前記吸着口に吸着させ、前記昇降機構により前記キャピラリ及び前記ワイヤガイドを下降させることにより前記穴に前記ワイヤ又は前記被覆線を挿入するように制御することを特徴とする請求項1又は2に記載の配線装置。
    a lifting mechanism that lifts and lowers the capillary and the wire guide held by the horn;
    a control unit;
    The control unit is configured to cause the wire or the coated wire drawn out from the capillary to be attracted to the suction port of the wire guide, and to lower the capillary and the wire guide using the elevating mechanism so as to insert the wire or the coated wire into the hole. The wiring device according to claim 1 or 2, wherein the wiring device is controlled to insert the covered wire.
  4.  前記制御部は、前記穴に前記ワイヤ又は前記被覆線が挿入された後、前記吸着口から前記ワイヤ又は前記被覆線の吸着を外し、前記昇降機構により前記キャピラリ及び前記ワイヤガイドを上昇させ、前記ワイヤガイド移動機構により前記ワイヤ又は前記被覆線を前記吸着口から遠ざける方向に前記ワイヤガイドを移動させるように制御することを特徴とする請求項3に記載の配線装置。 After the wire or the coated wire is inserted into the hole, the controller removes the suction of the wire or the coated wire from the suction port, raises the capillary and the wire guide by the elevating mechanism, and 4. The wiring device according to claim 3, wherein the wire guide is controlled by a wire guide moving mechanism to move the wire guide in a direction that moves the wire or the covered wire away from the suction port.
  5.  前記基板を載置するXYステージを有し、
     前記XYステージをX方向に移動させるX軸移動機構を有し、
     前記XYステージをY方向に移動させるY軸移動機構を有し、
     前記接続点が電極であり、前記キャピラリから繰り出された前記ワイヤ又は前記被覆線が前記電極にボンディングされることを特徴とする請求項1又は2に記載の配線装置。
    an XY stage on which the substrate is placed;
    an X-axis moving mechanism for moving the XY stage in the X direction;
    a Y-axis moving mechanism for moving the XY stage in the Y direction;
    3. The wiring device according to claim 1, wherein the connection point is an electrode, and the wire or the covered wire drawn out from the capillary is bonded to the electrode.
  6.  前記昇降機構は、昇降可能なスライド部材を有し、
     前記ホーンは、接続部材を介して前記スライド部材に取り付けられており、
     前記ワイヤガイド移動機構は、前記スライド部材に取り付けられていることを特徴とする請求項3に記載の配線装置。
    The elevating mechanism has a slide member that can be moved up and down,
    The horn is attached to the slide member via a connecting member,
    The wiring device according to claim 3, wherein the wire guide moving mechanism is attached to the slide member.
  7.  前記ワイヤガイド移動機構は、前記吸着口に吸着された前記ワイヤ又は前記被覆線の軸心と、前記ホーンの軸心とが含まれる面内で前記ワイヤガイドを移動させる機構であることを特徴とする請求項1又は2に記載の配線装置。 The wire guide moving mechanism is a mechanism for moving the wire guide within a plane that includes the axis of the wire or the coated wire attracted to the suction port and the axis of the horn. The wiring device according to claim 1 or 2.
  8.  前記ワイヤガイド移動機構は、前記ワイヤガイドに取り付けられた回転軸と、前記回転軸を回転させる回転機構と、を有することを特徴とする請求項1又は2に記載の配線装置。 The wiring device according to claim 1 or 2, wherein the wire guide moving mechanism includes a rotating shaft attached to the wire guide and a rotating mechanism that rotates the rotating shaft.
PCT/JP2022/023469 2022-06-10 2022-06-10 Wiring device WO2023238390A1 (en)

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PCT/JP2022/023469 WO2023238390A1 (en) 2022-06-10 2022-06-10 Wiring device
TW112116344A TW202350065A (en) 2022-06-10 2023-05-02 Wiring device

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Citations (6)

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Publication number Priority date Publication date Assignee Title
JPS59112630A (en) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd Wire bonding device
JPH04214644A (en) * 1990-12-12 1992-08-05 Nec Kyushu Ltd Wire bonding device
JPH10256299A (en) * 1997-03-13 1998-09-25 Toshiba Corp Wire-bonding method and device thereof
JPH10308408A (en) * 1997-05-08 1998-11-17 Toshiba Corp Semiconductor manufacturing equipment
US20130299983A1 (en) * 2005-12-07 2013-11-14 Micron Technology Inc. Through Wire Interconnect (TWI) For Semiconductor Components Having Wire In Via And Bonded Connection With Substrate Contact
JP2018107195A (en) * 2016-12-22 2018-07-05 ハイソル株式会社 Adsorption conveying method

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112630A (en) * 1982-12-17 1984-06-29 Matsushita Electric Ind Co Ltd Wire bonding device
JPH04214644A (en) * 1990-12-12 1992-08-05 Nec Kyushu Ltd Wire bonding device
JPH10256299A (en) * 1997-03-13 1998-09-25 Toshiba Corp Wire-bonding method and device thereof
JPH10308408A (en) * 1997-05-08 1998-11-17 Toshiba Corp Semiconductor manufacturing equipment
US20130299983A1 (en) * 2005-12-07 2013-11-14 Micron Technology Inc. Through Wire Interconnect (TWI) For Semiconductor Components Having Wire In Via And Bonded Connection With Substrate Contact
JP2018107195A (en) * 2016-12-22 2018-07-05 ハイソル株式会社 Adsorption conveying method

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