WO2023216439A1 - Dispositif de changement de plateau automatique pour puce - Google Patents

Dispositif de changement de plateau automatique pour puce Download PDF

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Publication number
WO2023216439A1
WO2023216439A1 PCT/CN2022/110888 CN2022110888W WO2023216439A1 WO 2023216439 A1 WO2023216439 A1 WO 2023216439A1 CN 2022110888 W CN2022110888 W CN 2022110888W WO 2023216439 A1 WO2023216439 A1 WO 2023216439A1
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WO
WIPO (PCT)
Prior art keywords
tray
chip
linear motor
production line
line
Prior art date
Application number
PCT/CN2022/110888
Other languages
English (en)
Chinese (zh)
Inventor
林海涛
赵凯
梁猛
倪海铨
陈玉林
杨滨炜
Original Assignee
上海世禹精密机械有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海世禹精密机械有限公司 filed Critical 上海世禹精密机械有限公司
Publication of WO2023216439A1 publication Critical patent/WO2023216439A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36—Sorting apparatus characterised by the means used for distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G59/00—De-stacking of articles
    • B65G59/06—De-stacking from the bottom of the stack
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention belongs to chip production line equipment, and specifically relates to an automatic chip changing equipment.
  • the production line material trays usually used for production and the packaging materials trays used for product delivery are different in arrangement and structure. For this reason, how to transfer the production line materials
  • the chip on the tray (JDtray) is automatically converted to the packaging tray (SPtray), which is a problem that needs to be solved at present.
  • the technical problem to be solved by the present invention is to provide an automatic chip tray changing device that can automatically switch the chips on the production line tray to the packaging tray.
  • the present invention adopts the following technical solutions:
  • An automatic chip tray changing equipment including at least one production line tray conveyor line and a packaging tray conveyor line in parallel, at least one chip transplanting device transversely erected on the two conveyor lines, the production line, and the packaging tray conveyor
  • Both ends of the line are respectively equipped with loading and unloading areas, and a linear motor module is arranged between the loading area and the corresponding unloading area, and a tray carrier is driven by the linear motor module to and from the two areas.
  • Each loading and unloading area includes a silo, a tray clamping mechanism located at the bottom of the silo for forking the tray, and a tray lifting mechanism for lifting the tray.
  • the tray carrier is located on the The clamping claw mechanism is below the bin and lower than the material tray, and there is a whole tray mechanism on the material tray platform, including several clamping blocks driven by respective cylinders and pushing to clamp the corresponding sides of the material tray.
  • the packaging tray conveyor line has a pair of tray carriers and linear motor modules, and the carrier surfaces of the two tray carriers can be arranged alternately up and down through their respective lifting mechanisms.
  • the two linear motor modules are respectively located on their respective sides. outside of the tray carrier, and alternately drive the tray carrier back and forth.
  • the tray conveyor line of the production line has one tray carrier and a linear motor module, and the tray carrier is located on the linear motor module.
  • the material tray clamping jaw mechanism includes a clamping jaw that matches the notch on the same side of the material tray and a cylinder that drives the clamping jaw to expand and contract.
  • a chip visual detection device is also provided between the loading area of the production line's material tray conveyor line and the chip transplanting device.
  • the chip transplanting device includes a transplanting head composed of several suction cups that can be lifted and lowered, and a linear motor module that drives the transplanting head to move laterally between the production line and the packaging tray conveyor line.
  • An NG material area is also arranged on one side of the production line's tray conveyor line, including a tray carrier for placing NG chip trays and a linear motor module that controls the parallel movement of the tray carrier and the production line's tray conveyor line. Group.
  • Figure 1 is a top view of an automatic chip changing device according to an embodiment of the present invention.
  • Figure 2 is a schematic structural diagram of three loading areas according to an embodiment of the present invention.
  • Figure 3 is a top view of Figure 2;
  • Figure 4 is a perspective view of the tray conveyor line of the production line according to one embodiment of the present invention.
  • Figure 5 is a side view of the tray conveyor line of the production line according to one embodiment of the present invention.
  • Figure 6 is a perspective view of a packaging tray conveyor line according to one embodiment of the present invention.
  • Figure 7 is a perspective view of the material tray supporting mechanism according to one embodiment of the present invention.
  • Figure 8 is a perspective view of a tray carrier of the packaging tray conveyor line according to one embodiment of the present invention.
  • Figure 9 is a schematic structural diagram of a chip transplanting device according to an embodiment of the present invention.
  • Figure 10 is a schematic structural diagram of a transplanting head according to an embodiment of the present invention.
  • the automatic chip tray changing equipment includes at least one parallel production line tray conveying line 1 and one packaging tray conveying line 2, and at least one horizontally erected on the two conveying lines.
  • Chip transplanting device 3 in order to effectively improve production efficiency, as shown in Figure 1, a production line tray conveyor line 1 can be set up on both sides of a packaging tray conveyor line 2, and a pair of chip transplanters can be set horizontally Device 3, and both ends of the production line and the packaging tray conveyor line 1 and 2 are respectively provided with a loading area 4 and an unloading area 5, and a linear motor module is arranged between the loading area 4 and the corresponding unloading area 5 6a and the material tray carrier 7 driven by the linear motor module 6a to and from the two areas.
  • Each loading and unloading area 4 and 5 includes a silo 8 and is separately located in the silo 8.
  • the bottom of the tray clamping mechanism 9 is used to fork the tray 100 and the tray lifting mechanism 10 is used to lift the tray 100.
  • the tray clamping mechanism 9 includes a notch on the same side as the tray 100.
  • Adaptable clamping jaws and cylinders that drive the clamping jaws to telescope.
  • the clamping jaws and cylinders shown in Figure 3 have two sets on each side.
  • the clamping jaws extend to hold the material tray 100 of the corresponding layer.
  • the material tray is supported by The mechanism 10 can lift or lower the material tray 100 from below through its lifting mechanism 101 such as an electric cylinder or a lifting motor, and can change the material tray 100 clamped by the material tray clamping mechanism 9 to the material tray below.
  • the tray carriers 7 of the production line and packaging tray conveyor lines 1 and 2 are located below the bin 8 and lower than the tray clamping mechanism 9, and the tray carrier 7 is provided with a whole tray mechanism 11, including the respective
  • the cylinder drives and pushes several clamping blocks on the corresponding sides (or corners) of the clamping tray 100. By pushing and clamping the clamping blocks, the position of the tray 100 on the tray carrier can be adjusted, thus playing the role of integrating the tray. , and maintain positioning without slipping during transportation.
  • the tray conveyor line 1 of the production line has one tray carrier 7 and a linear motor module 6a, and the tray carrier 7 is located on the linear motor module 6a.
  • the tray lifting mechanism 9 is placed on both sides of the tray carrier 7 and can be lifted up and down from the notches 12 on both sides of the tray carrier 7 to lift the tray 100 on both sides.
  • the tray carrier 7 and the linear motor module 6a group of the packaging tray conveyor line 2 located in the middle are designed with A pair, and the platform surfaces of the two tray carriers 7 can be driven by their respective lifting mechanisms 102 such as electric cylinders to form an alternating arrangement of up and down lifting.
  • the two linear motor module components 6a are located outside the respective tray carriers 7 , and alternately drive the respective material tray carriers 7 to carry out the round trip between the loading and unloading areas 5.
  • the platform can be designed as a hollow structure, and the tray supporting mechanism 10 is as shown in Figure 7. It can be located under the middle of the tray 7, and can be lifted and lowered in the hollow through the middle of the tray 100. Lift.
  • Each chip transplanting device 3 includes a transplanting head 32 composed of several suction cups 31 that can be lifted and lowered.
  • the transplanting head 32 is driven to move laterally between the production line and the packaging tray conveyor line 1 and 2.
  • the linear motor module 6b can suck the chips in the material tray 100 of the production line through the vertical lifting of the transplanting head 32 and then place them in the packaging material tray 100 through transverse movement.
  • the suction cup 31 can also be adjusted along the track 33 spacing.
  • a chip visual inspection device 13 is also provided between the loading area 4 of the production line tray conveyor line 1 and the chip transplanting device 3 to detect the movement of the tray carrier of the production line tray conveyor line 1 from the loading area 4 The chips in the tray 100 moved there are visually inspected.
  • the outside of the production line tray conveyor line 1 (opposite side of the packaging tray conveyor line 2) is also equipped with an NG material area, including a tray carrier for placing the NG chip tray 200 and a control tray carrier and product.
  • the linear motor module 6c (see Figure 4) that moves the wire tray conveyor line 1 in parallel can adjust the position of the NG chip tray through the linear motor module.
  • the NG chip When the NG chip is detected by the visual inspection device, it will be transplanted by the chip.
  • the device 3 is transplanted to the NG chip tray 200.
  • a complete stack of production line trays with chips is fed into the bins 8 of the loading area 4 of the two production line tray conveyor lines 1, and the materials in the loading area 4 of the packaging tray conveyor line 2 are
  • a whole stack of packaging trays without chips is fed into warehouse 8, and the bottom trays are held by the clamping claws of its tray clamping mechanism 9; taking the tray conveying line 1 of the left production line as an example, first The tray lifting mechanism 10 in the feeding area 4 rises and holds the tray, and then the clamping claw is retracted to transfer the tray to the tray pushing mechanism 10, and then the tray pushing mechanism 10 descends one level and The clamping jaws hold the penultimate layer of material tray, and finally the material tray supporting mechanism 10 descends until the bottom layer of material tray falls onto the material tray carrier 7, and the tray is positioned by the whole tray mechanism 11 to realize loading; after completion After loading, the linear motor module 6a drives the tray carrier 7 to be transported to the bottom of the chip visual inspection device 13.
  • the bottom packaging tray in the loading area 4 of the packaging tray conveyor line 2 is loaded in the same way.
  • the material is transported to a tray carrier 7 located above and transported to the middle of the packaging tray conveyor line 2 (i.e., the tray changing station, part A in Figure 1); when the chips that have passed the visual inspection are transferred to the chip transplanting device 3
  • the transplanting head 32 is transplanted to the packaging tray located on the tray changing station, and the chips that have not passed are transplanted by the transplanting head 32 to the NG chip tray 200 located outside; when the production line tray After the chips are emptied, they will continue to be transported to the unloading area 5, and will be held in the bin 8 by the clamping claws of the unloading area 5 through the opposite steps to the loading area, and the tray carrier will return to the loading area 4 again.
  • the production line tray conveyor line 1 on the right also transports the production line trays to the inspection station and tray changing station in sequence, and then the transplanting head 32 transplants the chips accordingly. If the packaging tray is full of chips Then it is transported to its unloading area 5 for the same unloading, and the next empty packaging tray has already fallen onto the raised another tray carrier 7 and is transported to the tray changing station, so that such uninterrupted Orderly round-trip chip changing operation.
  • the production line tray conveyor line and the packaging tray conveyor line the production line trays equipped with chips and the packaging trays to be loaded with chips are transported to the chip transplanting device position in the loading area respectively, and the chip transplanting device will The chips on the production line material tray are transplanted to the packaging material tray in sequence, and then transported to the unloading area respectively to realize automatic chip tray changing;
  • the chips on the production line material tray can be detected through the chip visual inspection device, and the NG chips can be transplanted to the NG material area on the other side through the chip transplanting device;
  • the position of the tray on the tray carrier can be adjusted through the whole tray mechanism, and the positioning can be maintained without slipping during the transportation process.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

Est divulgué dans la présente invention, un dispositif de changement de plateau automatique pour une puce, comprenant au moins une ligne de transport de plateau de chaîne de production et une ligne de transport de plateau d'emballage qui sont en parallèle, et au moins un appareil de transfert de puce érigé transversalement sur les deux lignes de transport. Une zone d'alimentation et une zone d'évacuation sont disposées aux deux extrémités de la ligne de transport de disque de plateau de chaîne de production et de la ligne de transport de disque de plateau d'emballage, respectivement, et un module de moteur linéaire et une plateforme de support de plateau entraînée par le module de moteur linéaire pour se déplacer en va-et-vient entre la zone d'alimentation et la zone d'évacuation correspondante sont disposés entre les deux zones. Chacune des zones d'alimentation et d'évacuation comprend un bac de stockage, des mécanismes de mâchoire de serrage de plateau disposés séparément au fond du bac de stockage et utilisés pour faire bifurquer et supporter un plateau, et un mécanisme de levage de plateau utilisé pour lever le plateau ; la plateforme de transport de plateau est située au-dessous du bac de stockage et plus bas que les mécanismes de mâchoire de serrage de plateau ; et un mécanisme d'agencement de plateau est disposé sur la plateforme de support de plateau et comprend une pluralité de blocs de serrage qui sont entraînés par des cylindres respectifs et qui poussent et serrent des parties latérales correspondantes du plateau.
PCT/CN2022/110888 2022-05-13 2022-08-08 Dispositif de changement de plateau automatique pour puce WO2023216439A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202221153938.3 2022-05-13
CN202221153938.3U CN217229420U (zh) 2022-05-13 2022-05-13 一种芯片自动换盘设备

Publications (1)

Publication Number Publication Date
WO2023216439A1 true WO2023216439A1 (fr) 2023-11-16

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PCT/CN2022/110888 WO2023216439A1 (fr) 2022-05-13 2022-08-08 Dispositif de changement de plateau automatique pour puce

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CN (1) CN217229420U (fr)
WO (1) WO2023216439A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117361126A (zh) * 2023-11-22 2024-01-09 佛山市南海区理工职业技术学校 一种生产线工序自动切换装置
CN117594706A (zh) * 2024-01-18 2024-02-23 深圳市韵腾激光科技有限公司 一种光伏硅片全自动在线激光辅助烧结机

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118083601B (zh) * 2024-04-23 2024-07-05 苏州矽微电子科技有限公司 物料换盘设备及换盘方法

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Publication number Priority date Publication date Assignee Title
US20020166801A1 (en) * 2001-05-10 2002-11-14 Herbert Tsai System for integrated circuit (IC) transporting of IC test device and the method thereof
CN101666814A (zh) * 2008-09-02 2010-03-10 京元电子股份有限公司 自动转换盘装置
CN212856708U (zh) * 2020-08-13 2021-04-02 技感半导体设备(南通)有限公司 一种测试分选装置
CN216250671U (zh) * 2021-07-09 2022-04-08 技感半导体设备(南通)有限公司 一种将芯片从托盘转移至载具的双站式系统
CN216335174U (zh) * 2021-09-14 2022-04-19 深圳市浦洛电子科技有限公司 一种料盘包装转换设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020166801A1 (en) * 2001-05-10 2002-11-14 Herbert Tsai System for integrated circuit (IC) transporting of IC test device and the method thereof
CN101666814A (zh) * 2008-09-02 2010-03-10 京元电子股份有限公司 自动转换盘装置
CN212856708U (zh) * 2020-08-13 2021-04-02 技感半导体设备(南通)有限公司 一种测试分选装置
CN216250671U (zh) * 2021-07-09 2022-04-08 技感半导体设备(南通)有限公司 一种将芯片从托盘转移至载具的双站式系统
CN216335174U (zh) * 2021-09-14 2022-04-19 深圳市浦洛电子科技有限公司 一种料盘包装转换设备

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117361126A (zh) * 2023-11-22 2024-01-09 佛山市南海区理工职业技术学校 一种生产线工序自动切换装置
CN117361126B (zh) * 2023-11-22 2024-02-13 佛山市南海区理工职业技术学校 一种生产线工序自动切换装置
CN117594706A (zh) * 2024-01-18 2024-02-23 深圳市韵腾激光科技有限公司 一种光伏硅片全自动在线激光辅助烧结机
CN117594706B (zh) * 2024-01-18 2024-04-09 深圳市韵腾激光科技有限公司 一种光伏硅片全自动在线激光辅助烧结机

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