WO2023178853A1

WO2023178853A1 - Blind hole bubble elimination apparatus and method

Info

Publication number: WO2023178853A1
Application number: PCT/CN2022/099874
Authority: WO
Inventors: 袁继旺; 刘梦茹; 张志远; 杜红兵; 余锦玉
Original assignee: 生益电子股份有限公司
Priority date: 2022-03-25
Filing date: 2022-06-20
Publication date: 2023-09-28
Also published as: CN114727491A

Abstract

Disclosed in the present application are a blind hole bubble elimination apparatus and method. The blind hole bubble elimination apparatus of the present application comprises a first liquid storage container and a negative pressure bubble elimination device, wherein the first liquid storage container is configured to store medicinal liquid; and the negative pressure bubble elimination device comprises a negative pressure generator and a plurality of suction members, the suction members are arranged in the first liquid storage container and located on one side or two opposite sides of a board immersion path, the suction members are connected to the negative pressure generator, and a liquid suction port is provided in the side of each suction member facing the board immersion path.

Description

Blind hole bubble elimination equipment and elimination method

This application claims priority to the Chinese patent application with application number 202210302744.3, which was submitted to the China Patent Office on March 25, 2022. The entire content of this application is incorporated into this application by reference.

Technical field

This application relates to the field of PCB processing technology, such as a blind hole bubble elimination equipment and elimination method.

Background technique

With the development of communication technology, the density of PCB design is getting higher and higher. In addition to the higher and higher number of PCB layers, the line width and spacing are getting smaller and smaller, and the diameter of the through hole is getting smaller and smaller. The diameter of the via hole has changed from the original reduced from 0.3mm to 0.1mm; in order to ensure the integrity of high-speed signal transmission and solve the crosstalk problem caused by via holes, back drilling technology is widely used in high-speed products, but because back drilling takes up a certain amount of space, and With the existence of back-drilled STUB, deep micro-blind holes are increasingly used. In particular, high-end routers, servers and other products are increasingly used. However, it is difficult to wet deep micro-blind holes, and it is easy to cause abnormal plating at the bottom of the blind holes due to bubble problems, which seriously affects product reliability and electrical performance.

Contents of the invention

This application can solve at least one of the technical problems existing in the related art. To this end, this application proposes a blind hole bubble elimination device and elimination method, which can achieve defoaming of blind holes and improve the wetting effect of blind holes, thereby improving the quality of electroplating.

A blind hole bubble elimination device according to the first embodiment of the present application includes a first liquid storage container and a negative pressure defoaming device; the first liquid storage container is configured to store medical liquid; the negative pressure defoaming device includes a negative pressure defoaming device. A pressure generator and a plurality of suction parts, the suction part is arranged in the first liquid storage container and is located on one side or opposite sides of the plate immersion path, the suction part is connected to the negative pressure generator, and the suction part faces the plate immersion A liquid suction port is provided on one side of the path.

In the blind hole bubble elimination device according to the embodiment of the present application, since the suction member is disposed in the first liquid storage container, sufficient medical liquid can be injected into the first liquid storage container so that the liquid can overflow the suction member, and the plate can be moved along the The liquid immersion path of the plate member is immersed in the medicinal solution of the first liquid storage container. Since the suction member is arranged on one side of the plate member immersion path, and the liquid suction port of the suction member is disposed toward the plate member immersion path, the plate member is connected to the liquid immersion path of the plate member. When the surface of the piece with blind holes faces the suction piece and is gradually immersed in the liquid along the immersion path of the plate, the suction piece will absorb the liquid around the surface of the plate, so that the surface of the plate corresponds to the location of the suction piece. Negative pressure is generated around the position, so that when the blind hole on the plate passes the position corresponding to the suction piece, the pressure inside the blind hole is greater than the pressure outside the blind hole, so that the bubbles in the blind hole can escape from the blind hole and follow. The absorbed liquid enters the suction part and the negative pressure generator. When the blind hole leaves the corresponding position of the suction part, since the bubbles have escaped from the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole. pressure, thereby allowing the chemical liquid to quickly reach the inside of the blind hole for infiltration; therefore, the blind hole bubble elimination device of this embodiment can perform negative pressure defoaming treatment on the board through the suction member, which is beneficial to improving the electroplating quality of the board.

According to some embodiments of the present application, the blind hole bubble elimination equipment further includes a panel spray device. The panel spray device includes a spray member and a second pump body. The spray member is disposed in the first liquid storage container and is located on the plate. The spray member is connected to the liquid outlet of the second pump body on one side or opposite sides of the plate immersion path, and a spray port is provided on the side of the spray member facing the plate member immersion path, and the spray member is arranged below the suction member.

According to some embodiments of the present application, the blind hole bubble elimination device further includes a vibration device. The vibration device is disposed in the first liquid storage container. The vibration device is located below the ejection member. The vibration device is configured to make the liquid enter the first liquid storage container. The plates inside the container vibrate.

According to some embodiments of the present application, two groups of suction members and two groups of ejection members are provided. The two groups of suction members and the two groups of ejection members are spaced apart, so that the two groups of suction members and the two groups of ejection members are spaced apart. A liquid immersion path is formed between the plates.

According to some embodiments of the present application, the blind hole bubble elimination device further includes a third liquid storage container, the liquid inlet of the second pump body is connected to the third liquid storage container, and the third liquid storage container is connected with the first liquid storage container.

According to some embodiments of the present application, the spray member is a nozzle. The nozzle includes a second pipe body part and a nozzle part. The nozzle part is disposed on the peripheral side of the second pipe body part, and the spray port is disposed on the nozzle part. The second pipe body part is connected to the second pump body through a second pipeline.

According to some embodiments of the present application, the blind hole bubble elimination device further includes a second liquid storage container, the negative pressure generator includes a first pump body and a filter device, the suction member is connected to the liquid suction port of the first pump body, and the filter device The liquid inlet is connected to the liquid outlet of the first pump body, the liquid outlet of the filter device is connected to the second liquid storage container, and the filter device is configured to filter the medical liquid to separate the air in the medical liquid, and the second liquid storage container Connected to the first liquid storage container.

According to some embodiments of the present application, the suction member is a suction knife. The suction knife includes a first tube body part and a suction nozzle part. The suction nozzle part is disposed on the peripheral side of the first tube body part, and the suction port is disposed on the suction port. The mouth part and the first pipe body part are connected to the first pump body through the first pipeline.

A method for eliminating blind hole bubbles according to the second embodiment of the present application includes:

Immerse the plate into the chemical solution and absorb the liquid on the surface of the plate below the liquid level to create negative pressure on the surface of the plate.

The method for eliminating bubbles in blind holes according to the second embodiment of the present application can generate negative pressure on the surface of the plate by immersing the plate in the medicinal liquid and sucking the medicinal liquid on the surface of the plate below the liquid level, and causing the inside of the blind hole to The pressure is greater than the pressure outside the blind hole, so that the bubbles in the blind hole can escape from the blind hole. After absorbing the liquid, since the bubbles have escaped from the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole. , which in turn allows the chemical solution to quickly reach the inside of the blind hole for infiltration, thereby eliminating blind hole bubbles and improving the blind hole wetting effect, which is beneficial to improving the electroplating quality of the board.

According to some embodiments of the present application, immersing the plate in the medical solution and sucking the medical solution on the surface of the plate below the liquid level includes: gradually immersing the plate in the medical solution, and during the immersion process, the plate is provided with The surface of the blind hole gradually passes through the area below the liquid level where the chemical solution is absorbed.

According to some embodiments of the present application, the blind hole bubble elimination method further includes: spraying the medical liquid onto the surface of the plate provided with the blind holes below the area where the medical liquid is sucked.

According to some embodiments of the present application, the blind hole bubble elimination method further includes: vibrating the plate immersed in the chemical solution.

Description of the drawings

The above and additional aspects and advantages of the present application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

Figure 1 is a schematic diagram of the overall structure of the blind hole bubble elimination device according to the first embodiment of the present application;

Figure 2 is a side view of the suction member shown in Figure 1;

Figure 3 is a front view of the suction member shown in Figure 1;

Figure 4 is a side view of the spray member shown in Figure 1;

Figure 5 is a front view of the injection member shown in Figure 1;

Figure 6 is a flow chart of a blind hole bubble elimination method according to the second embodiment of the present application.

Picture description:

Plate 100; first liquid storage container 210, second liquid storage container 220, third liquid storage container 230; first pump body 310, first main pipe 320, first branch pipe 330, suction member 340, first pipe body part 341. Suction nozzle part 342, liquid suction port 343, filter device 350; second pump body 410, second main pipe 420, second branch pipe 430, injection part 450, second pipe body part 451, nozzle part 452, injection hole 453 ; Vibration device 500.

Detailed ways

The embodiments of the present application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present application.

In the description of this application, it should be understood that the orientation descriptions, such as up, down, left, right, front, back, etc., are based on the orientation or position relationships shown in the drawings and are only In order to facilitate the description of this application and to simplify the description, no indication or implication is made that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation.

In the description of this application, if there is a description of first and second, it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number or implicit indication of the indicated technical features. The sequence relationship of the indicated technical features.

In the description of this application, unless otherwise explicitly limited, words such as setting, installation, and connection should be understood in a broad sense. Those skilled in the art can reasonably determine the meaning of the above words in this application based on the actual content.

The following describes the blind hole bubble elimination device according to the first embodiment of the present application with reference to FIGS. 1 to 5 .

Referring to Figures 1 to 5, the blind hole bubble elimination device of this embodiment includes a first liquid storage container 210 and a negative pressure defoaming device.

The first liquid storage container 210 is configured to store medical liquid. The negative pressure defoaming device includes a negative pressure generator and a plurality of suction members 340. The suction members 340 are disposed in the first liquid storage container 210, so as to transfer the liquid to the first storage container 210. When enough medical liquid is injected into the liquid container 210 , the medical liquid can cover the suction member 340 .

Moreover, the suction part 340 can be disposed on one side or opposite sides of the plate immersion path according to the actual situation. For example, when only one side surface of the plate 100 is provided with a blind hole, the suction part 340 can be disposed on the plate immersion path. One side of the path, and when blind holes are provided on the opposite sides of the surface of the plate 100, the suction members 340 can be disposed on opposite sides of the liquid immersion path of the plate.

The suction part 340 is connected to the negative pressure generator, and a suction port 343 is provided on the side of the suction part 340 facing the plate immersion path, so that when the negative pressure generator is working, the suction port 343 can generate negative pressure to absorb the liquid. Liquid located in the immersion path of the plate.

During the defoaming operation, the panel 100 can be immersed in the chemical liquid along the panel immersion path with the surface provided with blind holes facing the suction member 340. The suction member 340 will absorb the medicine around the surface of the panel 100. liquid to generate negative pressure around the position corresponding to the suction part 340 on the surface of the plate 100, so that when the blind hole on the plate 100 passes through the position corresponding to the suction part 340, the pressure inside the blind hole is greater than the pressure outside the blind hole. , so that the bubbles in the blind hole can escape from the blind hole and enter the suction part 340 and the negative pressure generator along with the sucked medicinal liquid. When the blind hole leaves the corresponding position of the suction part 340, due to the bubble Having escaped from the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, thereby allowing the chemical liquid to quickly reach the inside of the blind hole to achieve infiltration; therefore, this embodiment can use the suction member 340 to apply negative pressure to the plate 100 Defoaming treatment is beneficial to improving the electroplating quality of panels.

It can be understood that before electroplating the plate 100 , the plate 100 needs to be pre-processed, such as degreasing and pickling, and the deep micro-blind holes in the plate 100 are not sufficiently moistened and The bubble problem mainly occurs in pre-treatment processes such as oil removal and pickling. Therefore, optionally, the chemical solution can be selectively configured according to the different pre-treatment processes required.

It can be understood that the plate immersion path is the path through which the plate 100 enters the medical solution. In this embodiment, the plate immersion path is set as a vertical path from top to bottom. Of course, in other embodiments , the plate immersion path can also be set as an inclined path from top to bottom.

Moreover, in order to allow the plate 100 to enter the medical solution along the set plate immersion path, in some embodiments, a specific limiting structure may be provided in the first liquid storage container 210 to limit the plate. For example, a slot parallel to the liquid immersion path of the plate can be provided in the first liquid storage container 210, and then the edge of the plate 100 can be slidably engaged in the slot, so that the plate 100 moves along the slot. sliding; or, in some other embodiments, the plate member 100 can be restricted by an existing structure provided in the first liquid storage container 210 , for example, the suction member 340 or the like provided oppositely in the first liquid storage container 210 can be used. on the limiting plate 100, and the plate immersion path is formed between structures such as the suction member 340; or, in other embodiments, the plate 100 is connected to the driving end of a driving element such as a cylinder through a clamp, etc. Then, the plate 100 is driven into the chemical liquid accurately along the set plate immersion path through driving elements such as cylinders. It should be understood that, in order to simplify the structure, in this embodiment, the above-mentioned second implementation mode is selected to limit the movement of the plate 100 along the plate immersion path, and will be described in detail below.

Referring to Figure 1, it can be understood that the blind hole bubble elimination equipment also includes a panel spray device. The panel spray device includes a spray member 450 and a second pump body 410. The spray member 450 is connected to the second pump body 410. A liquid outlet, and the spray member 450 is provided with a spray port, so that the spray member 450 can spray the medical liquid pumped by the second pump body 410 through the spray port; the spray member 450 is disposed in the first liquid storage container 210, and Located below the suction part 340; depending on the arrangement of the blind hole on the plate 100, similar to the suction part 340, the spray part 450 can be selectively disposed on one side or opposite sides of the plate immersion path, and the injection port is disposed on The spray member 450 faces the side of the plate immersion path, so that the medical liquid sprayed out through the injection port can be sprayed onto the plate 100 immersed in the medical liquid along the plate immersion path; because the medical liquid may also be There are bubbles, so after the negative pressure defoaming process of the suction part 340, there may be bubbles flowing into the blind holes together with the liquid, or there may still be some bubbles in some blind holes that have not been processed by the negative pressure defoaming process. After the negative pressure defoaming treatment, the remaining bubbles will be completely eliminated and the wettability in the blind holes will increase, and the volume and tension of the bubbles will become smaller. The 100mm board surface and the inside and outside of the blind holes generate strong turbulence, which allows the liquid to be quickly exchanged inside and outside the blind holes, easily drives out the bubbles, and improves the wettability inside the blind holes, especially at the bottom, so that the plating solution can be used for the next step of electroplating. Can easily enter the bottom of blind holes.

Referring to Figure 1, it can be understood that the blind hole bubble elimination equipment also includes a vibration device 500. The vibration device 500 is disposed in the first liquid storage container 210. The vibration device 500 is located below the spray member 450 and is disposed on the plate immersion surface. The end of the liquid path, so that the plate 100 immersed in the liquid will finally come to the vibration device 500, and the vibration device 500 is configured to vibrate the plate 100 entering the first liquid storage container 210, thereby passing the vibration Allowing bubbles to overflow into deep micro blind holes. Therefore, in this embodiment, the suction member 340, the spray member 450 and the vibration device 500 are sequentially arranged along the plate immersion path, so that the plate 100 immersed in the medical solution along the plate immersion path can achieve negative effects in sequence. Triple defoaming of pressure, high-pressure jet and vibration, thereby greatly improving the defoaming and wetting effects of deep micro-blind holes.

Referring to Figure 1, it can be understood that in this embodiment, two groups of suction members 340 and spray members 450 are provided, and each group of suction members 340 includes a plurality of suction members 340 arranged vertically in the up and down direction. Each group of spray members 450 includes a plurality of spray members 450 arranged vertically in the up and down direction, and the two groups of suction members 340 and the two groups of spray members 450 are spaced apart so that between the two groups of suction members 340 A plate immersion path is formed between the two groups of spray parts 450, so that when the plate 100 is immersed in the chemical liquid along the plate immersion path, the suction parts 340 or spray parts located on both sides of the plate 100 can be 450 to limit the position of the plate 100 so that the plate 100 can be gradually immersed in the chemical liquid along the plate immersion path.

Referring to Figure 1, it can be understood that the blind hole bubble elimination device also includes a second liquid storage container 220, the negative pressure generator includes a first pump body 310 and a filter device 350, and the suction member 340 is connected to the first pump body 310. The liquid suction port 343, the liquid inlet of the filter device 350 are connected to the liquid outlet of the first pump body 310, the liquid outlet of the filter device 350 is connected to the second liquid storage container 220, and the filter device 350 is configured to filter the medicinal liquid to To separate the air in the medical liquid, the second liquid storage container 220 is connected to the first liquid storage container 210, and the second liquid storage container 220 is also configured to store the medical liquid; the medical liquid and bubbles sucked through the suction member 340 will enter the filter In the device 350, the filtering device 350 will filter out the bubbles in the medicinal liquid, and discharge the filtered medicinal liquid into the second liquid storage container 220 through the liquid outlet, and the second liquid storage container 220 is in turn connected with the first liquid storage container. The liquid container 210 is connected, so that the medical liquid in the second liquid storage container 220 can flow back into the first liquid storage container 210 to achieve a circular flow of the medical liquid.

Referring to Figures 2 and 3, it can be understood that in order to better suck the chemical liquid on the surface of the plate 100, the suction part 340 is a suction knife, and the suction knife includes a first tube body part 341 and a suction nozzle part 342. The suction nozzle part 342 is provided on the peripheral side of the first tube body part 341, and the liquid suction port 343 is provided on the suction nozzle part 342. The first tube body part 341 is connected to the first pump body 310 through the first pipeline, so that the first The adsorption force generated when the pump body 310 is working will generate a negative pressure in the first tube body part 341 and allow the medicinal liquid to be sucked into the suction member 340 from the liquid suction port 343.

Referring to Figures 2 and 3, it can be understood that the suction nozzle portion 342 extends along the axial direction of the first tube body portion 341, and the cross-sectional profile of the suction nozzle portion 342 is trapezoidal, and the closer to the plate immersion path The smaller the width of the suction nozzle part 342 on one side is, the more concentrated the negative pressure adsorption force generated by the liquid suction port 343 is, thereby enhancing the negative pressure defoaming effect. It can be understood that the width of the liquid suction port 343 should not be too large. The width of the liquid suction port 343 is selected to be set between 0.5mm and 5mm, and the opening width of the end of the suction nozzle 342 connected to the first tube body 341 is larger than the width of the liquid suction port. The width of the mouth 343, the width of the opening of the end of the suction mouth 342 connected to the first tube body 341 can be set to 5-20 times the width of the liquid suction mouth 343; optionally, in this embodiment, the width of the liquid suction mouth 343 The width is set to 2 mm, the width of the opening of the end of the suction nozzle part 342 connected to the first tube body part 341 is set to 20 mm, and the inner diameter of the first tube part 341 is set to 100 mm.

Referring to Figure 1, it can be understood that the first pipeline includes a first main pipe 320 and a plurality of first branch pipes 330. The first main pipe 320 is connected to the liquid outlet of the first pump body 310, and one end of the first branch pipe 330 is connected to the liquid outlet of the first pump body 310. It is connected to the first main pipe 320, and the other end is connected to the first pipe body part 341 in a one-to-one correspondence. Moreover, in this embodiment, optionally, the blind hole bubble elimination device can be provided with two sets of first pipelines, a first pump body 310, a filter device 350 and a set of second liquid storage containers 220, and each set of suction members 340 is configured with a set of first pipelines, first pump body 310, filter device 350 and second liquid storage container 220, that is, each set of suction parts 340 can work independently, thereby opening blind holes on the opposite sides of the surface. The plate 100 can use two sets of suction parts 340 to work simultaneously to achieve negative pressure defoaming. For a plate 100 with blind holes only on one side surface, only one set of suction parts 340 can be activated to perform negative pressure defoaming. Soak homework.

Of course, it should be understood that in other embodiments, the blind hole bubble elimination device can also be configured with a set of first pipelines, first pump body 310, filter device 350 and second liquid storage container 220 to connect two sets of suction members at the same time 340.

Alternatively, in other embodiments, the blind hole bubble elimination device can also be provided with two sets of first pipelines, a first pump body 310 and a filter device 350, and a set of second liquid storage containers 220, so that each set of suction members 340 A set of first pipelines, a first pump body 310 and a filter device 350 are configured, and the liquid outlets of the two filter devices 350 are connected to the same second liquid storage container 220; and multiple blind hole bubbles are provided in the production line. In the case of elimination devices, multiple blind hole bubble elimination devices can also share the same second liquid storage container 220 .

Referring to Figure 1, it can be understood that the blind hole bubble elimination device also includes a third liquid storage container 230. The liquid inlet of the second pump body 410 is connected to the third liquid storage container 230. The third liquid storage container 230 is connected to the first liquid storage container 230. The liquid storage container 210 is connected, and the third liquid storage container 230 is also configured to store the medical liquid, so that the second pump body 410 can suck the medical liquid from the third liquid storage container 230 and spray it through the spray member 450 to the liquid immersed in the liquid. on the plate 100 in the medical liquid, and the third liquid storage container 230 is connected to the first liquid storage container 210, so that the medical liquid in the first liquid storage container 210 can flow back to the third liquid storage container 230, so that The medical liquid may circulate between the first liquid storage container 210 and the third liquid storage container 230 .

Referring to Figures 4 and 5, it can be understood that, in order to better spray chemical liquid on the plate 100, the spray member 450 is a nozzle. The nozzle includes a second tube body 451 and a nozzle 452. The nozzle 452 is a nozzle. 452 is provided on the peripheral side of the second tube body part 451, and the injection port is provided on the nozzle part 452. The second tube body part 451 is connected to the second pump body 410 through the second pipeline, so that the second pump body 410 pumps The chemical liquid can be pumped to the second tube body part 451 through the second pipeline, and ejected through the injection port of the nozzle part 452; optionally, the injection port is a plurality of fine injection holes 453 distributed in a rectangular array, so that The water jet from the jet port can more easily enter the blind hole to drive out the bubbles. It can be understood that the diameter of the injection holes 453 can be optionally set between 0.1-1 mm, and the spacing between the injection holes 453 can be optionally set between 1-10 mm; in this embodiment, optionally, the second The inner diameter of the tube body part 451 is set to 100mm, the width of the nozzle part 452 is set to 20mm, the diameter of the injection hole 453 is set to 0.5mm, and the interval between the injection holes 453 is set to 5mm; the length of the nozzle part 452 can be set to The width of the plate 100 is adapted to ensure that the surface of the plate 100 can be sprayed with chemical liquid over the entire width, thereby improving the overall effect of high-pressure spray defoaming.

Referring to Figure 1, it can be understood that the second pipeline includes a second main pipe 420 and a plurality of second branch pipes 430, wherein the second main pipe 420 is connected to the liquid outlet of the second pump body 410, and the second branch pipes 430 have one end. It is connected to the second main pipe 420, and the other end is connected to the second pipe body part 451 in a one-to-one correspondence. Moreover, in this embodiment, optionally, the blind hole bubble elimination device can be provided with two sets of second pipelines, a second pump body 410 and a third liquid storage container 230, and each set of injection parts 450 is configured with a set of second The pipeline, the second pump body 410 and the third liquid storage container 230, that is, each set of injection parts 450 can work independently, so that the plate 100 with blind holes on the opposite sides of the surface can pass through the two sets of injection parts. 450 work at the same time to achieve high-pressure spray defoaming. For a plate 100 with blind holes only on one side surface, only one set of the spray parts 450 can be activated to perform high-pressure spray defoaming operations.

Of course, it should be understood that in some other embodiments, the blind hole bubble elimination device can also be equipped with a set of second pipelines, a second pump body 410 and a third liquid storage container 230 to connect two sets of injection members 450 at the same time.

Alternatively, in some other embodiments, the blind hole bubble elimination device can also be provided with two sets of second pipelines and second pump bodies 410, and a set of third liquid storage containers 230, so that each set of injection parts 450 is configured with a set of third liquid storage containers 230. The two pipelines and the second pump body 410 are connected to the same third liquid storage container 230 , and the liquid inlets of the two second pump bodies 410 are connected. Furthermore, when multiple blind hole bubble elimination devices are provided in the production line, the plurality of blind hole bubble elimination devices may share the same third liquid storage container 230 .

It can be understood that the first liquid storage container 210 , the second liquid storage container 220 and the third liquid storage container 230 may optionally adopt containers such as tanks or cylinders. Moreover, it should be understood that when the volume is large enough, the second liquid storage container 220 and the third liquid storage container 230 can be provided as the same container, or even the first liquid storage container 210, the second liquid storage container 220 and the third liquid storage container 230 can be configured as the same container. The liquid container 230 may be provided as the same container.

The following describes a blind hole bubble elimination method according to the second embodiment of the present application with reference to FIG. 6 .

Referring to Figure 6, the method for eliminating blind hole bubbles in this embodiment includes the following steps:

S100. Immerse the plate 100 in the chemical liquid and suck the chemical liquid on the surface of the plate 100 below the liquid level to generate negative pressure on the surface of the plate 100.

It should be noted that by immersing the plate 100 in the chemical liquid and sucking the chemical liquid on the surface of the plate 100 below the liquid level, negative pressure can be generated on the surface of the plate 100 and the pressure inside the blind hole can be greater than outside the blind hole. pressure, so that the bubbles in the blind hole can escape from the blind hole. After absorbing the medical solution, since the bubbles have escaped from the blind hole, the pressure inside the blind hole will be less than the pressure outside the blind hole, allowing the medical solution to Quickly reaching the inside of the blind hole to achieve infiltration, thereby eliminating bubbles in the blind hole and improving the wetting effect of the blind hole, which is beneficial to improving the electroplating quality of the board 100 .

It can be understood that in order to absorb the chemical liquid on the surface of the plate 100 below the liquid level, the negative pressure defoaming device mentioned in the first embodiment can be used, and the suction member 340 can be used to complete the plate alignment. Absorption of liquid medicine on the surface of piece 100. It should be understood that in other embodiments, other devices may be used to absorb the medical liquid from the surface of the plate 100 below the liquid level, as long as negative pressure can be generated on the surface of the plate 100 .

It should be understood that the above step S100 may include the following steps:

The plate 100 is gradually immersed in the medical solution, and during the immersion process, the surface of the plate 100 provided with blind holes gradually passes through the area below the liquid level of the medical solution where the medical solution is absorbed.

It should be noted that the plate 100 can be immersed in the medical solution along a preset plate immersion path, and the plate immersion path is set to pass through the liquid below the liquid surface of the medical solution to be absorbed. area, so that when the board 100 is immersed in the medicinal solution, the surface of the board 100 provided with blind holes gradually passes through the area where the medicinal solution is absorbed, so that during the process of the board 100 being immersed in the medicinal solution, the board 100 can be immersed in the medicinal solution. 100 negative pressure defoaming from bottom to top.

It can be understood that when the negative pressure defoaming device mentioned in the first embodiment is used, the area where the chemical liquid below the liquid level is sucked is the area opposite to the suction member 340 in the plate immersion path. Therefore, when the bottom of the board 100 to the top of the board 100 passes through the position of the suction member 340 in sequence, the overall negative pressure defoaming of the board 100 from bottom to top can be achieved.

Referring to Figure 6, it can be understood that the method for eliminating blind hole bubbles in this embodiment may also include the following steps:

S200. Spray the chemical liquid onto the surface of the plate 100 provided with blind holes below the area where the chemical liquid is sucked.

It should be noted that by spraying the chemical liquid onto the surface of the plate 100 with blind holes below the area where the liquid is sucked, the part of the plate 100 that has undergone negative pressure defoaming can be defoamed by high-pressure spraying again. Thereby eliminating blind hole bubbles and improving blind hole wetting effect.

It can be understood that the panel spray device mentioned in the first embodiment can be used to implement the above step S200, and spray the chemical liquid to the panel 100 through the spray member 450; of course, it should be understood that, In some other embodiments, other devices may be used to complete the spraying of chemical liquid on the surface of the plate 100 , as long as the sprayed water flow can enter the deep micro-blind holes below the liquid surface to drive away air bubbles.

S300. Vibrate the plate 100 immersed in the chemical solution.

It should be noted that after the plate 100 undergoes the negative pressure defoaming in the above-mentioned step S100 and the high-pressure spray defoaming in the above-mentioned step S200, the plate 100 that is immersed in the liquid can be vibrated again to promote the foaming still remaining on the plate. The bubbles in the blind hole of piece 100 escape from the blind hole.

It can be understood that the vibration device 500 mentioned in the above-mentioned first aspect embodiment can be selected to implement the above-mentioned step S300. Moreover, optionally, the vibration device 500 can be a mechanical vibration device driven by an eccentric motor or the like, or an ultrasonic wave generating device that can emit ultrasonic waves to vibrate the plate 100 .

Claims

A blind hole bubble elimination device, including:

The first liquid storage container is configured to store medical liquid;

A negative pressure defoaming device includes a negative pressure generator and a plurality of suction parts. The suction parts are arranged in the first liquid storage container and located on one side or opposite sides of the plate immersion path. The suction parts The component is connected to the negative pressure generator, and the suction component is provided with a liquid suction port on one side facing the plate immersion path.
A blind hole bubble elimination equipment according to claim 1, further comprising: a panel spray device, the panel spray device includes a spray member and a second pump body, the spray member is disposed on the third pump body. In a liquid storage container and located on one side or opposite sides of the plate immersion path, the spray member is connected to the liquid outlet of the second pump body, and the spray member faces the end of the plate immersion path. An injection port is provided on one side, and the injection part is arranged below the suction part.
A blind hole bubble elimination device according to claim 2, further comprising a vibration device, the vibration device is arranged in the first liquid storage container, the vibration device is located below the spray member, the vibration device It is configured to vibrate the plate that enters the first liquid storage container.
A blind hole bubble elimination device according to claim 2, wherein the suction part and the ejection part are each provided with two groups, and there are two groups between the two groups of suction parts and between the two groups of ejection parts. They are arranged at intervals to form the plate member liquid immersion path between the two groups of suction members and between the two groups of spray members.
A blind hole bubble elimination device according to claim 2, further comprising a third liquid storage container, the liquid inlet of the second pump body is connected to the third liquid storage container, and the third liquid storage container Communicated with the first liquid storage container.
A blind hole bubble elimination device according to claim 2, wherein the spray member is a nozzle, the nozzle includes a second pipe body part and a nozzle part, the nozzle part is disposed on the second On the peripheral side of the tube body part, the injection port is provided on the nozzle part, and the second tube body part is connected to the liquid inlet of the second pump body through a second pipeline.
A blind hole bubble elimination device according to any one of claims 1 to 6, further comprising a second liquid storage container, the negative pressure generator including a first pump body and a filter device, the suction member connected The liquid suction port of the first pump body, the liquid inlet of the filter device are connected to the liquid outlet of the first pump body, the liquid outlet of the filter device is connected to the second liquid storage container, and the The filtering device is configured to filter the medical liquid to separate air in the medical liquid, and the second liquid storage container is connected to the first liquid storage container.
A blind hole bubble elimination device according to claim 7, wherein the suction member is a suction knife, the suction knife includes a first tube body part and a suction nozzle part, the suction nozzle part is arranged on the On the peripheral side of the first tube body part, and the liquid suction port is provided on the suction nozzle part, the first tube body part is connected to the first pump body through a first pipeline.
A method for eliminating blind hole bubbles, including:

The plate is immersed in the medicinal solution and the medicinal solution on the surface of the plate is sucked below the surface of the medicinal solution to generate negative pressure on the surface of the plate.
A method for eliminating blind hole bubbles according to claim 9, wherein said immersing the plate in the medical solution and sucking the medical solution on the surface of the plate below the liquid level includes:

The plate is gradually immersed in the medical solution, and during the immersion process, the surface of the plate provided with blind holes gradually passes through the area below the liquid level of the medical solution where the medical solution is absorbed.
A method for eliminating blind hole bubbles according to claim 10, further comprising:

Under the area where the chemical liquid is sucked, the chemical liquid is sprayed onto the surface of the plate provided with blind holes.
A method for eliminating blind hole bubbles according to claim 9 or 10, further comprising:

The plate immersed in the chemical solution is vibrated.