CN114727491A - Blind hole bubble eliminating equipment and method - Google Patents
Blind hole bubble eliminating equipment and method Download PDFInfo
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- CN114727491A CN114727491A CN202210302744.3A CN202210302744A CN114727491A CN 114727491 A CN114727491 A CN 114727491A CN 202210302744 A CN202210302744 A CN 202210302744A CN 114727491 A CN114727491 A CN 114727491A
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 283
- 239000003814 drug Substances 0.000 claims abstract description 113
- 238000003860 storage Methods 0.000 claims abstract description 58
- 238000007654 immersion Methods 0.000 claims abstract description 45
- 238000002347 injection Methods 0.000 claims description 41
- 239000007924 injection Substances 0.000 claims description 41
- 238000005507 spraying Methods 0.000 claims description 30
- 230000008030 elimination Effects 0.000 claims description 21
- 238000003379 elimination reaction Methods 0.000 claims description 21
- 238000001914 filtration Methods 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 239000011550 stock solution Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000005213 imbibition Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 10
- 238000009713 electroplating Methods 0.000 abstract description 6
- 238000009736 wetting Methods 0.000 abstract description 3
- 239000007921 spray Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 6
- 230000008595 infiltration Effects 0.000 description 5
- 238000001764 infiltration Methods 0.000 description 5
- 230000001737 promoting effect Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 238000005238 degreasing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
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- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention discloses a blind hole bubble eliminating device and a blind hole bubble eliminating method; the blind hole bubble eliminating equipment comprises a first liquid storage container and a negative pressure defoaming device, wherein the first liquid storage container is used for storing liquid medicine; the negative pressure defoaming device comprises a negative pressure generator and a plurality of sucking parts, the sucking parts are arranged in the first liquid storage container and located on one side or two opposite sides of the plate immersion liquid path, the sucking parts are connected with the negative pressure generator, and a liquid sucking port is formed in one side, facing the plate immersion liquid path, of each sucking part. The blind hole bubble eliminating method comprises the following steps: and immersing the plate into the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid level of the liquid medicine so as to generate negative pressure on the surface of the plate. The equipment and the method for eliminating the bubbles in the blind holes can realize defoaming of the blind holes and improve the wetting effect of the blind holes, thereby improving the electroplating quality.
Description
Technical Field
The invention relates to the technical field of PCB processing, in particular to a blind hole bubble eliminating device and a blind hole bubble eliminating method.
Background
With the development of communication technology, the density of PCB design is higher and higher, besides the number of PCB layers is higher and higher, the line width and the distance are smaller and smaller, the diameter of a through hole is smaller and smaller, and the diameter of the through hole is reduced from the original 0.3mm to 0.1 mm; in order to ensure the integrity of high-speed signal transmission and solve the problem of crosstalk caused by a via hole, a back drilling technology is widely adopted on high-speed products, but due to the fact that a back drilling hole occupies a certain space and the back drilling STUB exists, deep and micro blind holes are increasingly applied. Especially, products such as high-end routing, servers and the like are increasingly applied. However, the deep and micro blind holes are difficult to wet, and the plated coating at the bottom of the blind hole is easy to be abnormal due to the problem of bubbles, so that the reliability and the electrical property of a product are seriously influenced.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art. Therefore, the invention provides equipment and a method for eliminating bubbles in blind holes, which can realize defoaming of the blind holes and improve the wetting effect of the blind holes, thereby improving the electroplating quality.
According to the embodiment of the first aspect of the invention, the blind hole bubble eliminating equipment comprises a first liquid storage container and a negative pressure defoaming device; the first liquid storage container is used for storing liquid medicine; the negative pressure defoaming device comprises a negative pressure generator and a plurality of sucking parts, the sucking parts are arranged in the first liquid storage container and located on one side or two opposite sides of the plate immersion liquid path, the sucking parts are connected with the negative pressure generator, and a liquid sucking port is formed in one side, facing the plate immersion liquid path, of each sucking part.
The blind hole bubble eliminating equipment provided by the embodiment of the invention at least has the following beneficial effects: because the suction piece is arranged in the first liquid storage container, enough liquid medicine is injected into the first liquid storage container to enable the liquid medicine to overflow the suction piece, the plate can be immersed into the liquid medicine of the first liquid storage container along the plate immersion liquid path, the suction piece is arranged on one side of the plate immersion liquid path, and the liquid suction port of the suction piece is arranged towards the plate immersion liquid path, so that in the process that the surface of the plate with the blind hole faces the suction piece and is gradually immersed into the liquid medicine along the plate immersion liquid path, the suction piece can suck the liquid medicine around the surface of the plate to generate negative pressure around the position of the plate corresponding to the suction piece, and further when the blind hole on the plate passes through the position corresponding to the suction piece, the pressure in the blind hole is higher than the pressure outside of the blind hole, so that bubbles in the blind hole can escape out of the blind hole and enter the suction piece and the negative pressure generator along with the sucked liquid medicine, when the blind hole leaves the position corresponding to the suction piece, the pressure in the blind hole is smaller than the pressure outside the blind hole because the air bubbles have escaped out of the blind hole, so that the liquid medicine can quickly reach the inside of the blind hole to realize infiltration; consequently, the blind hole bubble elimination equipment of this embodiment can carry out the negative pressure defoaming through the piece of taking to the plate and handle, and then is favorable to promoting the electroplating quality of plate.
According to some embodiments of the invention, a blind hole bubble elimination apparatus
The plate immersion liquid spraying device comprises a first liquid storage container, a plate immersion liquid path and a second liquid storage container, and is characterized by further comprising a plate spraying device, wherein the plate spraying device comprises a spraying piece and a second pump body, the spraying piece is arranged in the first liquid storage container and located on one side or two opposite sides of the plate immersion liquid path, the spraying piece is connected with a liquid outlet of the second pump body, a jet opening is formed in one side, facing the plate immersion liquid path, of the spraying piece, and the spraying piece is arranged below the absorbing piece.
According to some embodiments of the invention, the blind hole bubble elimination equipment further comprises a vibration device, the vibration device is arranged in the first liquid storage container and is positioned below the injection piece, and the vibration device is used for generating vibration on the plate entering the first liquid storage container.
According to some embodiments of the present invention, two sets of the suction member and the ejection member are provided, and the two sets of the suction member and the two sets of the ejection member are spaced apart from each other, so that a plate-member immersion liquid path is formed between the two sets of the suction member and between the two sets of the ejection member.
According to some embodiments of the present invention, the blind hole bubble elimination apparatus further includes a third liquid storage container, the liquid inlet of the second pump body is connected to the third liquid storage container, and the third liquid storage container is communicated with the first liquid storage container.
According to some embodiments of the present invention, the injection member is a nozzle, the nozzle includes a second body portion and a nozzle portion, the nozzle portion is disposed on a peripheral side surface of the second body portion, and the injection port is disposed in the nozzle portion, and the second body portion is connected to the second pump body through a second pipe.
According to some embodiments of the present invention, the blind hole bubble eliminating apparatus further comprises a second liquid storage container, the negative pressure generator comprises a first pump body and a filtering device, the suction member is connected to the liquid suction port of the first pump body, the liquid inlet of the filtering device is connected to the liquid outlet of the first pump body, the liquid outlet of the filtering device is connected to the second liquid storage container, the filtering device is configured to filter the liquid medicine to separate air from the liquid medicine, and the second liquid storage container is communicated with the first liquid storage container.
According to some embodiments of the present invention, the suction member is a suction knife, the suction knife includes a first tube portion and a suction nozzle portion, the suction nozzle portion is disposed on a peripheral side surface of the first tube portion, the liquid suction port is disposed in the suction nozzle portion, and the first tube portion is connected to the first pump body through a first pipeline.
According to a second aspect of the invention, a method for eliminating bubbles in blind holes comprises the following steps:
the plate is immersed in the liquid medicine and the liquid medicine on the surface of the plate is sucked under the liquid level of the liquid medicine, so that negative pressure is generated on the surface of the plate.
The blind hole bubble elimination method according to the embodiment of the second aspect of the invention has at least the following beneficial effects:
through immersing the plate in the liquid medicine and absorbing the liquid medicine on plate surface below the liquid medicine liquid level, can make the plate surface produce the negative pressure, and make the pressure in the blind hole be greater than the pressure in the blind hole outside, thereby make the bubble in the blind hole can run out the blind hole, and after absorbing the liquid medicine, because the bubble has run out the blind hole, pressure in the blind hole will be less than the pressure in the blind hole outside, and then make the liquid medicine can reach the inside infiltration of realizing of blind hole fast, reach and play the effect of eliminating the blind hole bubble and promoting the moist effect of blind hole, and then be favorable to promoting the electroplating quality of plate.
According to some embodiments of the present invention, immersing the plate member in the liquid medicine and sucking the liquid medicine on the surface of the plate member below the liquid level of the liquid medicine comprises the steps of: gradually immersing the plate into the liquid medicine, and enabling the surface of the plate, which is provided with the blind hole, to gradually pass through a liquid medicine sucked area below the liquid level of the liquid medicine in the immersing process.
According to some embodiments of the invention, the blind hole bubble elimination method further comprises the steps of: and spraying the liquid medicine to the surface of the plate provided with the blind hole below the area where the liquid medicine is sucked.
According to some embodiments of the invention, the blind hole bubble elimination method further comprises the steps of: vibrating the plate immersed in the liquid medicine.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic diagram of the overall structure of a blind hole bubble elimination apparatus according to an embodiment of the first aspect of the present invention;
FIG. 2 is a side view of the suction piece shown in FIG. 1;
FIG. 3 is a front view of the suction piece shown in FIG. 1;
FIG. 4 is a side view of the spray member shown in FIG. 1;
FIG. 5 is a front view of the spray member shown in FIG. 1;
FIG. 6 is a flow chart of a blind hole bubble elimination method according to a second embodiment of the present invention.
Description of the drawings:
a plate member 100; a first reservoir 210, a second reservoir 220, a third reservoir 230; a first pump body 310, a first main pipe 320, a first branch pipe 330, a suction piece 340, a first pipe body portion 341, a suction nozzle portion 342, a liquid suction port 343, and a filter device 350; a second pump body 410, a second main pipe 420, a second branch pipe 430, an injection member 450, a second pipe body portion 451, a nozzle portion 452, and an injection hole 453; the vibration device 500.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, left, right, front, rear, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, if there are first and second described only for the purpose of distinguishing technical features, it is not understood that relative importance is indicated or implied or that the number of indicated technical features or the precedence of the indicated technical features is implicitly indicated or implied.
In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.
The blind hole bubble eliminating apparatus according to the embodiment of the first aspect of the present invention will be described below with reference to fig. 1 to 5.
Referring to fig. 1 to 5, the blind hole bubble removing apparatus of the present embodiment includes a first liquid storage container 210 and a negative pressure defoaming device.
First stock solution container 210 is used for storing the liquid medicine, and the negative pressure fire fighting equipment is including negative pressure generator and a plurality of piece 340 of drawing, draws the piece 340 and sets up in first stock solution container 210 to when pouring into sufficient liquid medicine into first stock solution container 210, can make the liquid medicine not cross the piece 340 of drawing.
Also, the suction member 340 may be selectively provided on one side or opposite sides of the plate member immersion liquid path according to actual conditions, for example, when only one side surface of the plate member 100 is provided with a blind hole, the suction member 340 may be provided on one side of the plate member immersion liquid path, and when both opposite side surfaces of the plate member 100 are provided with blind holes, the suction member 340 may be correspondingly provided on opposite sides of the plate member immersion liquid path.
The suction member 340 is connected to the negative pressure generator, and a liquid suction port 343 is provided on a side of the suction member 340 facing the plate immersion liquid path, so that when the negative pressure generator is operated, the liquid suction port 343 can be made to generate a negative pressure to suck the liquid in the plate immersion liquid path.
When defoaming operation is carried out, the plate 100 can be immersed into the liquid medicine along a plate immersion liquid path in a mode that the surface provided with the blind hole faces the suction piece 340, the suction piece 340 can suck the liquid medicine around the surface of the plate 100, negative pressure is generated around the position where the surface of the plate 100 corresponds to the suction piece 340, and then when the blind hole on the plate 100 passes through the position corresponding to the suction piece 340, the pressure in the blind hole is greater than the pressure outside the blind hole, so that bubbles in the blind hole can escape out of the blind hole and enter the suction piece 340 and a negative pressure generator along with the sucked liquid medicine, and when the blind hole leaves the position corresponding to the suction piece 340, the pressure in the blind hole is smaller than the pressure outside the blind hole due to the fact that the bubbles have escaped out of the blind hole, and then the liquid medicine can quickly reach the inside of the blind hole to achieve infiltration; therefore, the present embodiment can perform the negative pressure defoaming treatment on the plate 100 through the suction member 340, which is beneficial to improving the plating quality of the plate.
It is understood that the board 100 needs to be pretreated before the board 100 is electroplated, such as degreasing and pickling, and the problems of insufficient wetting and air bubbles in the deep blind holes of the board 100 mainly occur in the pretreatment processes such as degreasing and pickling, so that the chemical solution can be selectively disposed according to the pretreatment processes needed.
It is to be understood that the plate member immersion liquid path is a path through which the plate member 100 enters the chemical liquid, and in this embodiment, the plate member immersion liquid path is provided as a vertical path from top to bottom, although in other embodiments, the plate member immersion liquid path may be provided as an inclined path from top to bottom.
Also, in order to enable the plate 100 to enter the liquid medicine along the set plate immersion liquid path, in some embodiments, a specific limiting structure may be optionally provided in the first liquid storage container 210 to limit the plate 100, for example, a clamping groove parallel to the plate immersion liquid path may be provided in the first liquid storage container 210, and then the edge of the plate 100 is slidably clamped in the clamping groove, so that the plate 100 slides along the clamping groove; alternatively, in other embodiments, the plate member 100 may be restrained by an existing structure provided in the first reservoir 210, for example, the plate member 100 may be restrained by a suction member 340 or the like provided in the first reservoir 210 in opposition to the plate member immersion liquid path formed between the structures such as the suction member 340; alternatively, in some other embodiments, the plate member 100 is connected to a driving end of a driving element such as a cylinder by a clamp or the like, and the driving element such as the cylinder drives the plate member 100 to accurately enter the chemical solution along a predetermined plate member immersion path. It should be understood that, for the sake of simplicity, the second embodiment described above is selected in the present embodiment to limit the movement of the plate member 100 along the plate member immersion liquid path, and will be described in detail later.
Referring to fig. 1, it can be understood that the blind hole bubble removing apparatus further comprises a plate surface spraying device, the plate surface spraying device comprises an injection piece 450 and a second pump body 410, the injection piece 450 is connected with the liquid outlet of the second pump body 410, and the injection piece 450 is provided with a jet port, so that the injection piece 450 can spray the liquid medicine pumped by the second pump body 410 through the jet port; the injection member 450 is disposed in the first liquid storage container 210 and below the suction member 340; according to the arrangement of the blind holes in the plate member 100, the injection member 450 may be selectively arranged on one side or opposite sides of the plate member immersion liquid path, and the injection port may be arranged on the side of the injection member 450 facing the plate member immersion liquid path, similarly to the suction member 340, so that the chemical liquid injected through the injection port can be injected onto the plate member 100 immersed in the chemical liquid along the plate member immersion liquid path; because there may be bubbles in the liquid medicine, therefore after the negative pressure defoaming treatment of the sucking part 340, there may be bubbles that flow into the blind hole again together with the liquid medicine, or there are some remaining bubbles that have not completely eliminated after the negative pressure defoaming treatment in some blind holes yet, after the negative pressure defoaming treatment, the wettability in the blind hole increases, the volume and the tension of bubble diminish, spray the liquid medicine to the surface of the plate 100 through the injection part 450, will produce powerful vortex in the face of the plate 100 and inside and outside the blind hole, thereby make the liquid medicine exchange inside and outside the blind hole fast, catch up the bubble easily, and further improve the inside especially infiltration nature of bottom of blind hole, so that the plating bath can get into the blind hole bottom easily when carrying out the electroplating on next step.
Referring to fig. 1, it can be understood that the blind hole bubble removing apparatus further includes a vibration device 500, the vibration device 500 is disposed in the first reservoir 210, the vibration device 500 is located below the injection member 450 and is disposed at an end of the plate dipping path such that the plate 100 dipped in the liquid medicine will eventually reach the vibration device 500, and the vibration device 500 is used to vibrate the plate 100 entered into the first reservoir 210, thereby causing bubbles to overflow the deep blind holes by the vibration. Therefore, in this embodiment, through the suction piece 340, the injection piece 450 and the vibrating device 500 that set gradually along the plate immersion liquid path, can be so that the plate 100 that dips into the liquid medicine along the plate immersion liquid path realizes negative pressure, high-pressure injection and vibration triple defoaming in proper order to greatly promote defoaming and the wet effect of dark blind hole.
Referring to fig. 1, it can be understood that, in the present embodiment, two sets of the suction member 340 and the injection member 450 are provided, each set of the suction member 340 includes a plurality of suction members 340 vertically arranged in the up-down direction, each set of the injection member 450 includes a plurality of injection members 450 vertically arranged in the up-down direction, and the two sets of the suction members 340 and the two sets of the injection members 450 are arranged at intervals to form a plate immersion liquid path between the two sets of the suction members 340 and between the two sets of the injection members 450, so that during the plate immersion liquid path along which the plate 100 is immersed into the liquid medicine, the position of the plate 100 can be restricted by the suction members 340 or the injection members 450 located at both sides of the plate 100, and the plate 100 can be gradually immersed into the liquid medicine along the plate immersion liquid path.
Referring to fig. 1, it can be understood that the blind hole bubble elimination apparatus further includes a second liquid storage container 220, the negative pressure generator includes a first pump body 310 and a filtering device 350, the suction member 340 is connected to the liquid suction port 343 of the first pump body 310, the liquid inlet of the filtering device 350 is connected to the liquid outlet of the first pump body 310, the liquid outlet of the filtering device 350 is connected to the second liquid storage container 220, the filtering device 350 is used for filtering the liquid medicine to separate air in the liquid medicine, the second liquid storage container 220 is connected to the first liquid storage container 210, and the second liquid storage container 220 is also used for storing the liquid medicine; the liquid medicine and the bubbles sucked by the suction member 340 enter the filtering device 350, the filtering device 350 filters the bubbles in the liquid medicine, and discharges the filtered liquid medicine into the second liquid storage container 220 through the liquid outlet, and the second liquid storage container 220 is communicated with the first liquid storage container 210, so that the liquid medicine in the second liquid storage container 220 can flow back to the first liquid storage container 210 to realize the circular flow of the liquid medicine.
Referring to fig. 2 and 3, it can be understood that, in order to better suck the liquid medicine on the surface of the plate member 100, the suction member 340 is a suction knife, the suction knife includes a first tube portion 341 and a suction nozzle portion 342, the suction nozzle portion 342 is disposed on a peripheral side surface of the first tube portion 341, a liquid suction port 343 is disposed on the suction nozzle portion 342, and the first tube portion 341 is connected to the first pump body 310 through a first pipeline, so that a suction force generated when the first pump body 310 operates will generate a negative pressure in the first tube portion 341, and the liquid medicine can be sucked into the suction member 340 from the liquid suction port 343.
Referring to fig. 2 and 3, it can be understood that the nozzle portion 342 is provided to extend in the axial direction of the first body portion 341, and the cross-sectional profile of the nozzle portion 342 is trapezoidal, and the width of the nozzle portion 342 is smaller on the side closer to the plate immersion liquid path, so that the suction force of the negative pressure generated from the liquid suction port 343 can be more concentrated, thereby enhancing the negative pressure defoaming effect. It can be understood that the width of the liquid suction port 343 is not too large, the width of the liquid suction port 343 is selectively set between 0.5mm and 5mm, the opening width of the nozzle portion 342 at the end communicating with the first pipe portion 341 is larger than the width of the liquid suction port 343, and the opening width of the nozzle portion 342 at the end communicating with the first pipe portion 341 can be selectively set to be 5 to 20 times the width of the liquid suction port 343; specifically, in the present embodiment, the width of the liquid suction port 343 is set to 2mm, the opening width of the suction nozzle portion 342 at the end communicating with the first body portion 341 is set to 20mm, and the inner diameter of the first body portion is set to 100 mm.
Referring to fig. 1, it can be understood that the first pipeline includes a first main pipe 320 and a plurality of first branch pipes 330, wherein the first main pipe 320 is connected to the liquid outlet of the first pump body 310, one end of each of the first branch pipes 330 is connected to the first main pipe 320, and the other end is connected to the first pipe portions 341 in a one-to-one correspondence manner. Moreover, in this embodiment, specifically, the blind hole bubble removing apparatus may be provided with two sets of first pipelines, a first pump body 310, a filtering device 350, and a set of second liquid storage container 220, and each set of suction piece 340 is respectively configured with one set of first pipeline, the first pump body 310, the filtering device 350, and the second liquid storage container 220, that is, each set of suction piece 340 may work independently, so as to implement negative pressure defoaming on the plate 100 with blind holes on the surfaces of two opposite sides, and may implement negative pressure defoaming by simultaneously working the two sets of suction pieces 340, and for the plate 100 with blind holes only on one surface, only one set of suction piece 340 may be started to perform negative pressure defoaming operation.
It will of course be appreciated that in other embodiments, the blind bubble elimination apparatus may be provided with a set of first conduits, the first pump body 310, the filter arrangement 350 and the second reservoir 220 to connect the two sets of suckers 340 simultaneously.
Alternatively, in other embodiments, the blind bubble elimination apparatus may also include two sets of the first pipeline, the first pump body 310, the filtering device 350, and a set of the second liquid storage container 220, so that each set of the suction member 340 is provided with one set of the first pipeline, the first pump body 310, and the filtering device 350, and the liquid outlets of the two filtering devices 350 are communicated with the same second liquid storage container 220; moreover, in the case that a plurality of blind hole bubble elimination devices are disposed in the production line, the blind hole bubble elimination devices can share the same second liquid storage container 220.
Referring to fig. 1, it can be understood that the blind hole bubble elimination apparatus further includes a third liquid reservoir 230, the liquid inlet of the second pump body 410 is connected to the third liquid reservoir 230, the third liquid reservoir 230 is communicated with the first liquid reservoir 210, and the third liquid reservoir 230 is also used for storing the liquid medicine, so that the second pump body 410 can suck the liquid medicine from the third liquid reservoir 230 and spray the liquid medicine onto the plate 100 immersed in the liquid medicine through the spraying member 450, and the third liquid reservoir 230 is communicated with the first liquid reservoir 210, so that the liquid medicine in the first liquid reservoir 210 can flow back to the third liquid reservoir 230, so that the liquid medicine can circulate between the first liquid reservoir 210 and the third liquid reservoir 230.
Referring to fig. 4 and 5, it can be understood that, in order to better spray the liquid medicine to the plate member 100, the spraying member 450 is a spraying tube, the spraying tube includes a second tube body portion 451 and a nozzle portion 452, the nozzle portion 452 is disposed on a peripheral side surface of the second tube body portion 451, and a spraying port is disposed on the nozzle portion 452, the second tube body portion 451 is connected to the second pump body 410 through a second pipeline, so that the liquid medicine pumped by the second pump body 410 can be pumped to the second tube body portion 451 through the second pipeline and sprayed out through the spraying port of the nozzle portion 452; specifically, the jet port is a plurality of fine jet holes 453 distributed in a rectangular array, so that the water flow jetted from the jet port can more easily enter the blind hole to expel the bubbles. It is understood that the aperture of the injection holes 453 may be selectively set to be between 0.1 and 1mm, and the interval between the injection holes 453 may be selectively set to be between 1 and 10 mm; in the present embodiment, specifically, the inner diameter of the second body portion 451 is set to 100mm, the width of the nozzle portion 452 is set to 20mm, the diameter of the injection holes 453 is set to 0.5mm, and the interval between the injection holes 453 is set to 5 mm; the length of the nozzle 452 may be set to be adapted to the width of the plate 100, so as to ensure that the surface of the plate 100 can be sprayed with the liquid medicine over the entire width, thereby improving the overall effect of defoaming by high-pressure spraying.
Referring to fig. 1, it can be understood that the second pipeline includes a second main pipe 420 and a plurality of second branch pipes 430, wherein the second main pipe 420 is connected to the liquid outlet of the second pump body 410, one end of each of the second branch pipes 430 is connected to the second main pipe 420, and the other end of each of the second branch pipes 430 is connected to the second pipe body portion 451 in a one-to-one correspondence manner. Moreover, in this embodiment, specifically, the blind hole bubble removing apparatus may be provided with two sets of the second pipeline, the second pump body 410 and the third liquid storage container 230, and each set of the injection component 450 is respectively configured with one set of the second pipeline, the second pump body 410 and the third liquid storage container 230, that is, each set of the injection component 450 may work independently, so as to perform high pressure injection defoaming on the plate 100 having the blind holes on the two opposite side surfaces, and may perform high pressure injection defoaming on the plate 100 having the blind hole only on one side surface by simultaneously working the two sets of the injection components 450, and only one set of the injection component 450 may be started to perform high pressure injection defoaming operation on the plate 100 having the blind hole only on one side surface.
Of course, it should be understood that in other embodiments, the blind bubble elimination device may be configured with a set of the second conduit, the second pump body 410, and the third reservoir 230 to connect the two sets of ejectors 450 simultaneously.
Alternatively, in other embodiments, the blind bubble elimination apparatus may also include two sets of the second pipeline and the second pump body 410, and one set of the third liquid storage container 230, so that each set of the injection member 450 is provided with one set of the second pipeline and the second pump body 410, and the liquid inlets of the two second pump bodies 410 are communicated with the same third liquid storage container 230. Moreover, when a plurality of blind hole bubble removing devices are provided in the production line, the plurality of blind hole bubble removing devices may share the same third liquid storage container 230.
It is understood that the first reservoir 210, the second reservoir 220 and the third reservoir 230 may alternatively be a tank, a cylinder, or the like. Also, it should be understood that when the volume is sufficiently large, the second reservoir 220 and the third reservoir 230 may be provided as the same container, and even the first reservoir 210, the second reservoir 220, and the third reservoir 230 may be provided as the same container.
A blind hole bubble removing method according to an embodiment of the second aspect of the present invention will be described with reference to fig. 6.
Referring to fig. 6, the blind hole bubble eliminating method of the present embodiment includes the following steps:
s100, immersing the plate 100 into the liquid medicine and sucking the liquid medicine on the surface of the plate 100 below the liquid level of the liquid medicine so as to generate negative pressure on the surface of the plate 100.
It should be noted that, through immersing plate 100 into the liquid medicine and absorbing the liquid medicine on plate 100 surface below the liquid medicine liquid level, can make plate 100 surface produce the negative pressure, and make the pressure in the blind hole be greater than the pressure in the blind hole outside, thereby make the bubble in the blind hole can run out the blind hole, and after absorbing the liquid medicine, because the bubble has run out the blind hole, pressure in the blind hole will be less than the pressure in the blind hole outside, and then make the liquid medicine can reach the inside infiltration of realizing of blind hole fast, reach and play the effect of eliminating the blind hole bubble and promoting the wet effect of blind hole, and then be favorable to promoting plate 100's electroplating quality.
It is understood that, in order to suck the liquid medicine on the surface of the plate member 100 below the liquid level of the liquid medicine, the negative pressure defoaming device mentioned in the above first embodiment may be adopted, and the sucking of the liquid medicine on the surface of the plate member 100 is completed by the sucking member 340. It should be understood that in other embodiments, other devices may be alternatively used to suck the liquid medicine from the surface of the plate member 100 below the liquid medicine level, as long as the negative pressure can be generated on the surface of the plate member 100.
It should be understood that the step S100 may include the following steps:
the plate member 100 is gradually immersed in the liquid medicine, and the surface of the plate member 100 provided with the blind hole gradually passes through the region where the liquid medicine below the liquid level of the liquid medicine is sucked in the immersion process.
It should be noted that, can make the plate 100 along the preset plate immersion liquid route with the plate 100 soak in the liquid medicine to plate immersion liquid route sets to the region that the liquid medicine that passes the liquid medicine liquid level below was absorb, thereby in the in-process that the plate 100 immersed the liquid medicine, can realize that the surface that the plate 100 was provided with the blind hole passes through the region that the liquid medicine was absorbed gradually, thereby in the process that the plate 100 immersed the liquid medicine, realize plate 100 from supreme negative pressure defoaming down.
It is understood that, when the negative pressure defoaming device mentioned in the first embodiment is used, the region where the liquid medicine below the liquid surface is sucked is the region opposite to the sucking member 340 in the plate member immersion liquid path, so that when the liquid medicine passes through the position of the sucking member 340 from the bottom of the plate member 100 to the top of the plate member 100 in sequence, the whole negative pressure defoaming of the plate member 100 from bottom to top can be realized.
Referring to fig. 6, it can be understood that the blind hole bubble elimination method of the present embodiment may further include the following steps:
and S200, spraying the liquid medicine to the surface of the plate 100 provided with the blind hole below the area where the liquid medicine is sucked.
It should be noted that, below the region that the liquid medicine was absorbed, to the surface injection liquid medicine that plate 100 was provided with the blind hole, can be so that plate 100 through the part after the negative pressure defoaming, through the high-pressure injection defoaming once more to further eliminate the blind hole bubble and promote the wet effect of blind hole.
It is understood that the plate surface spraying device mentioned in the first embodiment may be selected to implement the step S200, and the spraying member 450 may spray the liquid medicine to the plate member 100; of course, it should be understood that in other embodiments, other devices may be alternatively used to perform the spraying of the liquid medicine on the surface of the plate member 100, as long as the sprayed water can enter the deep blind hole below the liquid surface to remove the air bubbles.
Referring to fig. 6, it can be understood that the blind hole bubble elimination method of the present embodiment may further include the following steps:
and S300, vibrating the plate 100 immersed in the liquid medicine.
It should be noted that after the plate 100 is subjected to the negative pressure defoaming in the step S100 and the high pressure jetting defoaming in the step S200 in sequence, the plate 100 immersed in the chemical solution is vibrated, so that the bubbles still remaining in the blind holes of the plate 100 can be caused to escape from the blind holes again.
It is understood that the vibration device 500 mentioned in the above first embodiment may be optionally adopted to implement the above step S300. Further, specifically, the vibration device 500 may be a mechanical vibration device driven by an eccentric motor or the like, or may alternatively be an ultrasonic wave generating device that can generate ultrasonic waves to vibrate the plate 100.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (12)
1. A blind hole bubble elimination apparatus, comprising:
the first liquid storage container is used for storing liquid medicine;
negative pressure fire fighting equipment, including negative pressure generator and a plurality of piece of drawing, draw the piece set up in just be located one side or the relative both sides in plate immersion fluid route in the first stock solution container, draw the piece and connect negative pressure generator, just draw the piece orientation one side in plate immersion fluid route is provided with the imbibition mouth.
2. The blind hole bubble eliminating equipment according to claim 1, further comprising a plate surface spraying device, wherein the plate surface spraying device comprises a spraying member and a second pump body, the spraying member is arranged in the first liquid storage container and is positioned on one side or two opposite sides of the plate immersion liquid path, the spraying member is connected with the liquid outlet of the second pump body, a jet port is arranged on one side of the spraying member facing the plate immersion liquid path, and the spraying member is arranged below the sucking member.
3. The blind hole bubble eliminating equipment according to claim 2, further comprising a vibration device, wherein the vibration device is arranged in the first liquid storage container, the vibration device is positioned below the injection member, and the vibration device is used for vibrating the plate entering the first liquid storage container.
4. The blind bubble removing apparatus according to claim 2, wherein said sucking member and said ejecting member are provided in two sets, and are spaced apart from each other between the two sets of sucking members and between the two sets of ejecting members, so as to form said plate-immersion liquid path between the two sets of sucking members and between the two sets of ejecting members.
5. The blind hole bubble eliminating equipment according to claim 2, further comprising a third liquid storage container, wherein the liquid inlet of the second pump body is connected with the third liquid storage container, and the third liquid storage container is communicated with the first liquid storage container.
6. The blind bubble elimination apparatus according to claim 2, wherein the injection member is a nozzle, the nozzle includes a second body portion and a nozzle portion, the nozzle portion is disposed on a peripheral side surface of the second body portion, and the injection port is disposed in the nozzle portion, and the second body portion is connected to the liquid inlet of the second pump body through a second pipeline.
7. The blind hole bubble eliminating equipment according to any one of claims 1 to 6, further comprising a second liquid storage container, wherein the negative pressure generator comprises a first pump body and a filtering device, the suction member is connected to the liquid suction port of the first pump body, the liquid inlet of the filtering device is connected to the liquid outlet of the first pump body, the liquid outlet of the filtering device is connected to the second liquid storage container, the filtering device is used for filtering the liquid medicine to separate air in the liquid medicine, and the second liquid storage container is communicated with the first liquid storage container.
8. The blind hole bubble eliminating apparatus according to claim 7, wherein the suction member is a suction knife, the suction knife includes a first tube portion and a suction nozzle portion, the suction nozzle portion is disposed on a peripheral side surface of the first tube portion, the liquid suction port is disposed in the suction nozzle portion, and the first tube portion is connected to the first pump body through a first pipeline.
9. A blind hole bubble eliminating method is characterized by comprising the following steps:
and immersing the plate into the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid level of the liquid medicine so as to generate negative pressure on the surface of the plate.
10. The method for eliminating bubbles in blind holes according to claim 9, wherein said steps of immersing the plate in the liquid medicine and sucking the liquid medicine on the surface of the plate below the liquid level of the liquid medicine comprise the steps of:
gradually immersing the plate into the liquid medicine, and enabling the surface of the plate provided with the blind hole to gradually pass through a liquid medicine sucked area below the liquid level of the liquid medicine in the immersing process.
11. The method for eliminating bubbles in blind holes according to claim 10, further comprising the steps of:
and spraying the liquid medicine to the surface of the plate provided with the blind hole below the area where the liquid medicine is sucked.
12. The method for eliminating bubbles in blind holes according to claim 9 or 10, further comprising the steps of:
vibrating the plate immersed in the liquid medicine.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210302744.3A CN114727491A (en) | 2022-03-25 | 2022-03-25 | Blind hole bubble eliminating equipment and method |
| PCT/CN2022/099874 WO2023178853A1 (en) | 2022-03-25 | 2022-06-20 | Blind hole bubble elimination apparatus and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210302744.3A CN114727491A (en) | 2022-03-25 | 2022-03-25 | Blind hole bubble eliminating equipment and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114727491A true CN114727491A (en) | 2022-07-08 |
Family
ID=82240714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210302744.3A Pending CN114727491A (en) | 2022-03-25 | 2022-03-25 | Blind hole bubble eliminating equipment and method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114727491A (en) |
| WO (1) | WO2023178853A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023178853A1 (en) * | 2022-03-25 | 2023-09-28 | 生益电子股份有限公司 | Blind hole bubble elimination apparatus and method |
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| KR102528900B1 (en) * | 2020-11-30 | 2023-05-04 | 주식회사 호진플라텍 | Plating apparatus including hybrid paddle that simultaneously circulates and stirs plating solution and removes air bubbles |
| CN114727491A (en) * | 2022-03-25 | 2022-07-08 | 生益电子股份有限公司 | Blind hole bubble eliminating equipment and method |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2023178853A1 (en) | 2023-09-28 |
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