WO2023175995A1 - Machine de montage de composants, procédé de déplacement d'élément de secours et procédé de fabrication de substrat de montage - Google Patents

Machine de montage de composants, procédé de déplacement d'élément de secours et procédé de fabrication de substrat de montage Download PDF

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Publication number
WO2023175995A1
WO2023175995A1 PCT/JP2022/012925 JP2022012925W WO2023175995A1 WO 2023175995 A1 WO2023175995 A1 WO 2023175995A1 JP 2022012925 W JP2022012925 W JP 2022012925W WO 2023175995 A1 WO2023175995 A1 WO 2023175995A1
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WO
WIPO (PCT)
Prior art keywords
backup
backup member
conveyor
movable
rail
Prior art date
Application number
PCT/JP2022/012925
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English (en)
Japanese (ja)
Inventor
健二 中井
正良 森山
英矢 黒田
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to PCT/JP2022/012925 priority Critical patent/WO2023175995A1/fr
Publication of WO2023175995A1 publication Critical patent/WO2023175995A1/fr

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components

Definitions

  • the present specification relates to a component mounting machine, a method for moving a backup member, and a method for manufacturing a mounting board.
  • Patent Document 1 discloses a backup jig that can be switched between a holding state in which a plurality of backup pins (backup members) are held and a release state in which a plurality of backup pins (backup members) are released;
  • a component mounting machine is disclosed that includes a backup plate and a switching mechanism that switches between a close state in which a backup jig and a backup plate face each other and close to each other and a separated state in which they are separated from each other.
  • the backup jig is a plate-shaped member, and has a plurality of through holes formed therein. The upper end of the backup pin can be inserted into each through hole of the backup jig from the back surface of the backup jig.
  • the backup jig When the backup jig holds the backup pin, the upper end of the backup pin is inserted into the through hole, and the lower end of the backup pin is in contact with the back surface of the backup jig. According to this, the arrangement of the backup pin (backup member) can be easily changed.
  • this specification discloses a component mounting machine, a method for moving a backup member, and a method for manufacturing a mounting board that can more efficiently use and arrange backup members.
  • the present specification provides a substrate transport device including at least one conveyor having a movable conveyor rail that transports a board on which a component can be attached along a transport direction and is movable along the width direction of the board;
  • a backup device including a backup member capable of supporting a back surface of a substrate, a backup plate having an installation surface on which the backup member can be installed, and a storage table capable of storing and movable the backup member.
  • a backup member moving device that moves the backup member between the storage table and the backup plate; and in the conveyor, when the backup member is moved by the backup member moving device, the movable conveyor rail and the storage
  • a component mounting machine is disclosed that includes a control unit that moves one of the stands relative to the other.
  • backup members can be used and arranged more efficiently in a component mounting machine.
  • FIG. 1 is a schematic configuration diagram of a component mounting machine 10 according to the present disclosure.
  • 1 is a block diagram showing a component mounting machine 10.
  • FIG. 2 is a schematic configuration diagram of a substrate transfer device 20 and a backup device 30.
  • FIG. 3 is a schematic configuration diagram of a backup pin 35.
  • FIG. 3 is a schematic configuration diagram of a head 50.
  • FIG. 5 is a schematic configuration diagram of a suction nozzle 56.
  • FIG. 6 is a schematic configuration diagram of a picker nozzle 60.
  • FIG. 2 is a schematic configuration diagram of a substrate transfer device 20 and a backup device 30.
  • FIG. 3 is a schematic configuration diagram of a backup pin 35.
  • FIG. 3 is a schematic configuration diagram of a head 50.
  • FIG. 5 is
  • FIG. 3 is a flowchart representing a program (first lane pin installation (movement) process) executed by the control device 90 shown in FIG. 2.
  • FIG. 3 is a flowchart representing a program (second lane pin installation (movement) process) executed by the control device 90 shown in FIG. 2.
  • FIG. 3 is a schematic plan view showing the positions of the subordinate rail 22a and the reference rail 21b before movement.
  • FIG. 7 is a schematic plan view showing the position where the dependent rail 22a and the reference rail 21b have been moved to the second lane 20b side.
  • FIG. 7 is a schematic plan view showing a state in which the support backup pin 35a has been moved to the first lane 20a.
  • FIG. 3 is a schematic plan view showing a state in which the dependent rail 22a and the reference rail 21b have been returned to their pre-movement positions.
  • FIG. 3 is a schematic plan view showing the position where the dependent rail 22a and the reference rail 21b have been moved to the first lane 20a side.
  • FIG. 7 is a schematic plan view showing a state in which the support backup pin 35a has been moved to the second lane 20b.
  • FIG. 7 is a schematic plan view showing a state in which the dependent rail 22a and the reference rail 21b are adjusted to the board width.
  • FIG. 7 is a schematic plan view of a component mounter 10 according to a modification.
  • FIG. 3 is a flowchart representing a program (first lane pin installation (movement) process) according to a modification example executed by the control device 90 shown in FIG. 2.
  • FIG. 3 is a flowchart representing a program (second lane pin installation (movement) process) according to a modification example executed by the control device 90 shown in FIG. 2.
  • FIG. 3 is a flowchart representing a program (first lane pin installation (movement) process) according to a modification example executed by the control device 90 shown in FIG. 2.
  • the component mounting machine 10 includes a feeder 16, a substrate transport device 20, a backup device 30, first and second backup pin stockers 40a and 40b, a head 50, a head moving device 70, a nozzle stocker 81, and parts. It includes a camera 82, a mark camera 83, and a control device 90 (see FIG. 2).
  • the feeder 16 is removably attached to a feeder stand (not shown) installed at the front of the component mounter 10.
  • the feeder 16 is, for example, a tape feeder, and includes a carrier tape in which components are housed in a plurality of cavities formed at predetermined intervals, a reel on which the carrier tape is wound, and an unwinding of the carrier tape from the reel. and a tape feeding device for feeding the tape.
  • the substrate conveyance device 20 is a belt conveyor device, and has two lanes arranged in parallel to each other (provided side by side) each conveying a substrate S (see FIG. 1) from left to right. It is configured as a dual lane type conveyance device including (first and second lanes 20a, 20b). Note that the lane can also be referred to as a conveyor that transports the substrate S on which the component P can be mounted along the transport direction. Further, in the present embodiment, the substrate transport device 20 includes two conveyors, but the present invention is not limited to this, and the substrate transfer device only needs to include at least one conveyor. Three or more conveyors may be provided.
  • the first lane 20a includes a long fixed conveyor rail 21a (hereinafter sometimes referred to as reference rail 21a) extending along the conveying direction, and a long fixed conveyor rail 21a extending along the conveying direction. and a long movable conveyor rail 22a (hereinafter sometimes referred to as dependent rail 22a) that is movable along the board width direction.
  • the fixed conveyor rail 21a and the movable conveyor rail 22a both include a side plate 23, a pair of rollers 24 provided at both left and right ends of opposing sides of the side plate 23, and a conveyor belt 25 that spans the pair of rollers 24. , a belt drive device 26 (see FIG. 2) that rotates the conveyor belt 25, and two support columns 27 that support both left and right ends of the side plate 23.
  • the two support columns 27 of the fixed conveyor rail 21a are fixed to one end (the front end in FIG. 3) of a pair of left and right support stands 29 extending along the board width direction, and the two support columns 27 of the movable conveyor rail 22a are
  • the support column 27 is installed on a guide rail 29g provided on the support stand 29 so as to extend along the board width direction from one end to the other end.
  • the movable conveyor rail 22a further includes a rail moving device 28 (see FIG. 2), and is driven by the rail moving device 28 to move along the guide rail 29g in the substrate width direction.
  • the first lane 20a transports multiple types of substrates S of different sizes by moving the movable conveyor rail 22a according to the width of the substrate S and adjusting the interval between the fixed conveyor rail 21a and the movable conveyor rail 22a. be able to.
  • the second lane 20b is a long movable conveyor rail that is installed adjacent to the movable conveyor rail 22a of the first lane 20a, extends along the conveyance direction, and is movable along the substrate width direction.
  • the conveyor rail 21b (hereinafter sometimes referred to as reference rail 21b) is installed on the opposite side of the movable conveyor rail 22a of the movable conveyor rail 21b, extends along the conveyance direction, and moves along the board width direction. It has a movable conveyor rail 22b (hereinafter sometimes referred to as dependent rail 22b) that can be as long as possible.
  • the movable conveyor rails 21b and 22b each include a side plate 23, a pair of rollers 24 provided at both left and right ends of opposing sides of the side plate 23, a conveyor belt 25 spanning the pair of rollers 24, and a conveyor belt 25 that spans the pair of rollers 24. It includes a belt drive device 26 (see FIG. 2) that rotates the belt 25 and two support columns 27 that support both left and right ends of the side plate 23.
  • the two support columns 27 of the movable conveyor rails 21b and 22b are installed on a guide rail 29g that is common to the first lane 20a.
  • the movable conveyor rails 21b and 22b are further provided with a rail moving device 28 (see FIG. 2), and are moved along the guide rail 29g in the substrate width direction by being driven by the rail moving device 28.
  • the second lane 20b can accommodate multiple types of substrates of different sizes by moving one or both of the movable conveyor rails 21b and 22b according to the width of the substrate S (width in the substrate width direction) and adjusting the interval between them. S can be transported.
  • the backup device 30 supports the substrates S transported by the first and second lanes 20a and 20b from the back side.
  • the backup device 30 includes a backup plate 31, a plate lifting device 32 (see FIG. 2) that raises and lowers the backup plate 31, and a plurality of backup pins 35 placed on the backup plate 31.
  • the backup plate 31 is a flat plate member made of a magnetic material, extending along the substrate width direction, and having a mounting surface (installation surface) on the upper surface 31u on which the backup pin 35 can be mounted (installed).
  • the substrate transfer device 20 has two (plural) lanes (first and second lanes 20a, 20b), and the backup plate 31 is located at both ends in the substrate width direction. extends across multiple lanes.
  • support backup pins 35a necessary for supporting the substrate S on one backup plate 31, it is possible to transport the substrates in each of the two lanes.
  • the substrate S to be used can be backed up.
  • one backup plate may be provided for each lane, and each backup plate may be configured to be raised and lowered independently by separate plate raising and lowering devices.
  • a through-hole portion 31hb and a through-hole portion 31ha having a plurality of through-holes 31h penetrating vertically, respectively, are formed in the center of the left and right ends of the backup plate 31.
  • the plurality of through holes 31h are arranged at predetermined intervals in the front-rear direction (board width direction) and have an inner diameter large enough to allow one backup pin 35 to be inserted therethrough.
  • the intervals between some of the through holes 31h among the plurality of through holes 31h are formed to allow the backup pins 35 to be installed therebetween.
  • the through hole 31h may have an opening with an inner diameter larger than the inner diameter that allows one backup pin 35 to be inserted therethrough.
  • the plate elevating device 32 is composed of a ball screw device or an air cylinder device, and is located at a position where the back surface of the substrate S and the tip of the backup pin 35 come into contact with the back surface of the substrate S with the backup pin 35 placed on the top surface of the backup plate 31.
  • the backup plate 31 is raised and lowered between a position where both are separated.
  • the backup pin 35 is a backup member that can support the back surface of the board S, which has a surface on which components can be attached.
  • the backup pins 35 include a supporting backup pin (supporting backup member) 35a that is used when mounting components on the board S, and an unused backup pin (unused backup member) that is not used when mounting the component on the board S. 35b exists.
  • the support backup pins 35a are basically used in locations where there are no pre-attached components or solder printing, where the board S is likely to warp, where vibrations occur during mounting, or where there are relatively large components on the surface. Placed in a predetermined support location, such as where it will be mounted.
  • the backup pin 35 includes a pin body 36 that extends vertically in an upright state and whose tip end has a smaller diameter than its base end, and a flat support surface formed at the tip of the pin body 36. 37, and a permanent magnet 38 embedded in the bottom of the pin body 36.
  • the backup plate 31 is made of a magnetic material as described above, and when the backup pin 35 is placed on the backup plate 31, it is fixed to the backup plate 31 in an upright state by the magnetic attraction force of the permanent magnet 38. Ru.
  • a plurality (three) of engaging portions 39 (three) that protrude in the radial direction are provided at predetermined angular intervals (for example, 120°) in the circumferential direction.
  • a protrusion is formed.
  • the backup pin 35 is employed as a backup member, but the present invention is not limited to this, and other members that support the substrate S may be employed.
  • the backup pin 35 is detachably installed on the backup plate 31 using magnetic force, the present invention is not limited to this, and the backup pin 35 may be installed using other methods (adhesive (adhesive) member that can be repeatedly attached and detached). .
  • the head 50 is, for example, a rotary head, and includes a head body 51 in which a plurality of holders 52 are arranged in the circumferential direction, and an R-axis actuator 53 that rotates the head body 51 (revolutions the holder 52). , a ⁇ -axis actuator 54 that rotates (rotates) the holder 52, and a Z-axis actuator 55 that moves the holder 52 up and down.
  • a suction nozzle 56 and a picker nozzle 60 are replaceably attached to the tip of the holder 52.
  • the head moving device 70 includes a pair of left and right Y-axis guide rails 73 provided in the upper part of the housing 12 so as to extend along the board width direction, and a pair of Y-axis guide rails. 73, an X-axis guide rail 71 provided to extend along the transport direction on the Y-axis slider 74, and an X-axis slider 72 attached to the X-axis guide rail 71. and.
  • the X-axis slider 72 is driven by an X-axis actuator 75 (see FIG. 2)
  • the Y-axis slider 74 is driven by a Y-axis actuator 76 (see FIG. 2).
  • the head 50 is attached to an X-axis slider 72, and is moved in the horizontal direction by driving an X-axis actuator 75 and a Y-axis actuator 76.
  • the head moving device 70 is a backup member moving device that moves the backup pin 35 between the storage tables 41a, 41b, 141a, 141b and the backup plate 31.
  • the suction nozzle 56 includes a mounting part 57 provided on the proximal end side and inserted into and attached to the holder 52, and a sampling part 58 provided on the distal end side for collecting parts.
  • the collecting section 58 is a cylindrical member, and receives negative pressure from a negative pressure source (not shown) to suck and collect the parts.
  • the picker nozzle 60 is a nozzle that can collect (pick up) the backup pin 35, and as shown in FIG. and a collecting section 62 that is provided in the main body and collects the backup pin 35.
  • the sampling portion 62 has a plurality of (three) engaged portions 63 that engage with each of the engaging portions 39 (projections) of the backup pin 35, respectively.
  • the plurality of engaged portions 63 are hook-shaped members including a hook tip portion 64 and a hook recess 65. Each engaged portion 63 is formed at predetermined angular intervals (for example, 120°) in the circumferential direction so that the hook tip portions 64 face the same direction (one circumferential direction).
  • the picker nozzle 60 is constructed by inserting the engaging part 39 (protruding part) of the backup pin 35 into the gap 66 between the engaged parts 63 (hook parts) in the circumferential direction and hooking it into the hook recess 65. Collect 35.
  • the nozzle stocker 81 is installed between the first lane 20a and the feeder 16 and accommodates a plurality of replacement nozzles.
  • the nozzle stocker 81 accommodates a plurality of types of suction nozzles 56 of different sizes, and also accommodates the picker nozzle 60 described above.
  • the nozzles attached to the holder 52 are automatically replaced as necessary based on the movement of the head 50 by the head moving device 70 and the elevation and lowering of the holder 52 by the Z-axis actuator 55 with respect to the nozzle stocker 81 .
  • the first and second backup pin stockers 40a and 40b accommodate a plurality of backup pins 35.
  • the first backup pin stocker 40a is disposed below a through-hole portion 31ha (a plurality of through-holes 31h) formed at the center of the right end of the backup plate 31, and is located in the first lane of the backup plate 31.
  • a backup pin 35 is housed within the second lane 20a (between the fixed conveyor rail 21a and the movable conveyor rail 22a) and within the second lane 20b (between the movable conveyor rail 21b and the movable conveyor rail 22b).
  • the second backup pin stocker 40b is disposed below the through-hole portion 31hb (the plurality of through-holes 31h) formed at the center of the left end of the backup plate 31, and is located within the first lane 20a and the second lane 20b. It accommodates the backup pin 35 to be installed.
  • the feeder 16 can be moved closer to the substrate transfer device 20 than the one installed outside the backup device 30. can be approached. Thereby, the moving distance of the head 50 when picking up components from the feeder 16 and mounting them on the substrate S can be shortened, and the mounting time can be shortened.
  • both the first and second backup pin stockers 40a and 40b are connected to an accommodation stand 41 (hereinafter, the accommodation stand of the first backup pin stocker 40a is referred to as 41a, and the accommodation stand of the second backup pin stocker 40b is referred to as 41a).
  • the storage table may be referred to as 41b.
  • a storage table lifting device 43 that raises and lowers the storage table 41.
  • a plurality of accommodation protrusions 42 are provided on the upper surface of the accommodation table 41, each located directly below the corresponding through hole 31h.
  • the housing protrusion 42 is made of a magnetic material.
  • the storage table elevating device 43 is configured by an air cylinder device or a ball screw device, and raises and lowers the storage table 41 between a position where the top surface of the storage table 41 contacts the bottom surface of the backup plate 31 and a position where both are separated.
  • the accommodation protrusion 42 has a height that is approximately the same as the thickness of the backup plate 31, and the backup pin 35 placed on the accommodation protrusion 42 is lifted up by the accommodation table 41 to the rising end.
  • the bottom surface of the backup plate 31 rises to approximately the same height as the top surface of the backup plate 31. Further, the backup pin 35 placed on the accommodation protrusion 42 is lowered until a part or all of the backup pin 35 is located below the backup plate 31 as the accommodation table 41 is lowered to the lower end.
  • the storage table 41a is arranged to be movable up and down at a predetermined position.
  • the predetermined position is set at a central portion of the backup plate 31 in the board width direction, that is, a position corresponding to the through hole portion 31ha.
  • the storage table 41b is also arranged to be movable up and down at a predetermined position. Note that the predetermined position is set at the center of the backup plate 31 in the board width direction, that is, at a position corresponding to the through hole portion 31hb.
  • the movable conveyor rails 22a and 21b are movably arranged above the storage tables 41a and 41b located at positions (predetermined positions) corresponding to the through-hole portions 31ha and 31hb. At this time, the storage tables 41a and 41b are preferably in the lowered position, but the moving movable conveyor rails 22a and 21b do not come into contact with the backup pins 35 placed on the storage tables 41a and 41b. , it may be in the raised position.
  • the control device 90 controls one of the movable conveyor rails 22a, 21b and the storage tables 41a, 41b (or 141a, 141b). Move one side relative to the other (control unit).
  • the control device 90 includes a CPU 91, a ROM 92, a RAM 93, a storage device 94, and an input/output interface 95. These are electrically connected via a bus 96.
  • the control device 90 includes an X-axis position sensor that detects the position of the X-axis slider 72, a Y-axis position sensor that detects the position of the Y-axis slider 74, a Z-axis position sensor that detects the vertical position of the holder 52, and a parts camera.
  • Various signals from 82, mark camera 83, etc. are inputted via an input/output interface 95.
  • control device 90 the feeder 16, belt drive device 26, rail moving device 28, plate lifting device 32, storage platform lifting device 43, X-axis actuator 75, Y-axis actuator 76, R-axis actuator 53, ⁇ -axis
  • Various control signals to the actuator 54, Z-axis actuator 55, parts camera 82, mark camera 83, etc. are outputted via an input/output interface 95.
  • the control device 90 is communicably connected to a management computer (not shown), receives a job (production program) from the management computer, and produces a product in which parts are mounted on a board S according to the received job.
  • the parts camera 82 is installed between the first lane 20a and the feeder 16, images the parts picked up by the suction nozzle 56 from below, and transmits the image to the control device 90.
  • the control device 90 recognizes suction errors and suction deviations by processing the captured images.
  • the mark camera 83 is installed on the head 50 or the X-axis slider 72, and images the reference mark attached to the substrate S from above or the backup pin 35 on the backup plate 31 from above. Send the image to the control device 90.
  • the control device 90 recognizes the position of the substrate S and the position of the backup pin 35 by processing the captured image.
  • step S102 the control device 90 reads (obtains) a production program (job) from the management computer.
  • the production program is a program for producing a mounted board in which the component P is mounted on the board S, and includes information on the size of the board S, board information on the offset of the position where the board is stopped during mounting (board stop position), and support information.
  • the arrangement position of the backup pin 35a (hereinafter sometimes referred to as a support location; these position coordinates), the range of the backup plate 31, the component mounting position (coordinates) on the back surface of the board S, and/or the solder printing location ( Contains information on the back side of the board related to the placement position (coordinates) of the solder printing position.
  • the size information of the substrate S includes the size in the transport direction (X-axis direction) and the size in the substrate width direction (Y-axis direction).
  • the offset of the board stop position is an offset with respect to the reference point of the component mounter 10.
  • the component mounting position on the back side of the board S is the mounting position of already mounted components (pre-installed components), and the placement position of the solder printing location is the position where solder has already been printed (solder is not printed). (including certain printable locations), and includes, for example, the layout positions of the lands of the pattern.
  • the control device 90 installs the supporting backup pins 35a on the backup plate 31 before starting production of the mounting board.
  • step S104 the control device 90 executes a process of installing (moving) the supporting backup pin 35a in the first lane 20a (first lane pin installation (moving) process), and in step S106, the process of installing (moving) the support backup pin 35a in the second lane 20b is performed. Then, a process of installing (moving) the support backup pin 35a (second lane pin installation (movement) process) is performed.
  • the first lane pin installation (movement) process will be described in detail along the flowchart shown in FIG.
  • the control device 90 drives the head moving device 70 to move the head 50 above the nozzle stocker 81, and replaces the nozzle attached to the holder 52 with the picker nozzle 60 ( Step S202).
  • the control device 90 acquires width information of the substrate S to be transported on the first lane 20a and layout information of the supporting backup pins 35a of the first lane 20a from the management computer (step S204).
  • control device 90 executes a pin movement preparation process of moving one of the movable conveyor rail and the storage table relative to the other (control unit). . That is, before moving the support backup pin 35a to the placement target conveyor, the control device 90 moves one of the movable conveyor rail and the storage table relative to the other.
  • step S206 the control device 90 drives the accommodating table lifting device 43 to lower the first accommodating table 41a and the second accommodating table 41b. Further, in step S208, the control device 90 drives the rail moving device 28 to move the subordinate rail 22a of the first lane 20a, which is a movable conveyor rail, and the reference rail 21b of the second lane 20b to the second lane 20b side. (See Figure 11B).
  • the movement destinations of the subordinate rail 22a and the reference rail 21b are preferably positions other than directly above the first storage stand 41a and the second storage stand 41b (through-hole portions 31ha, 31hb), and the first storage stand 41a and the A position closer to the second lane 20b than the second storage stand 41b (through-hole portions 31ha, 31hb) is preferable.
  • the control device 90 moves the supporting back-up pin 35a to the subordinate rail, which is a movable conveyor rail. 22a and the reference rail 21b, and one of the first storage stand 41a and the second storage stand 41b is moved relative to the other (relative movement step).
  • the control device 90 drives the head 50 to move the backup pins 35 placed on the first accommodating table 41a and the second accommodating table 41b to a predetermined support location of the backup plate 31 (first lane 20a).
  • the backup pin arrangement range 31a1 is a range in which the supporting backup pins 35a can be arranged, and is a range set to be slightly narrower than the external dimensions of the substrate S, taking into consideration the movable range of the head 50, etc. is preferred. Also, on the second lane 20b, a backup pin placement possible range 31a2 (see FIG. 11A) is set, similar to the first lane 20a.
  • step S210 the control device 90 drives the accommodating table lifting device 43 to raise the accommodating table 41a of the first backup pin stocker 40a and the accommodating table 41b of the second backup pin stocker 40b. Further, in step S212, the control device 90 images the entire range of the backup plate 31 (including the through holes 31ha and 31hb) using the mark camera 83. Note that if the storage tables 41a and 41b do not overlap the backup plate 31 in the vertical direction, the imaging range is the sum of the entire range of the backup plate 31 and the total range of the storage tables 41a and 41b. That is, both the backup plate 31 and the accommodating tables 41a and 41b are within the imageable range.
  • the control device 90 moves the backup pin 35 (supporting backup pin 35a) to the placement target lane (backup member movement (processing) step). That is, in step S214, the control device 90 processes the captured image to recognize the positions of the backup pins 35 placed on the storage tables 41a and 41b and the backup pins 35 placed on the backup plate 31, and then processes the captured images in step S204.
  • the supporting backup pin 35a is moved according to the layout information received in (see FIG. 11C). Specifically, the control device 90 drives the head moving device 70 to move the picker nozzle 60 directly above the backup pin 35 to be moved.
  • control device 90 drives the head 50 to fit the engaging portion 39 (protruding portion) into the hook recess 65 of the picker nozzle 60, thereby causing the picker nozzle 60 to pick up the backup pin 35. Then, the control device 90 drives the head moving device 70 to move and place the collected support backup pin 35a to a predetermined support location.
  • the backup pin 35 is manually inserted and placed in the placement location of the storage table 41, which is also the initial placement location, by the operator. Further, the placement at the initial loading location may not be done manually but may be automatically loaded using the head 50. Furthermore, the initial loading location may be a location other than the storage table 41, and even if it is on the backup plate 31 or outside the range of the backup plate 31, it may be inside the component mounter 10 and the picker nozzle 60 by the head 50. It can be set as long as it is within the range that can be collected.
  • step S216 the control device 90 determines whether the installation (placing) of all the support backup pins 35a in the first lane 20a is completed each time the support backup pins 35a are moved. If the control device 90 determines that the installation of all the support backup pins 35a scheduled to be placed on the first lane 20a has not been completed (“NO” in step S216), the control device 90 returns to step S214 and updates the layout information. Accordingly, the supporting backup pin 35a to be moved next is moved.
  • control device 90 determines that the installation of all the supporting backup pins 35a scheduled to be placed on the first lane 20a has been completed (determined as "YES” in step S216)
  • the control device 90 places the support pins 35a on the first lane 20a. It is determined whether there are any extra backup pins 35 (sometimes referred to as unused backup pins 35b in this specification) that are not used to support the board S during mounting (step S218).
  • step S218 When the control device 90 determines in step S218 that there is an unused backup pin 35b on the backup plate 31 (particularly on the first lane 20a) (determined as "YES" in step S218), the controller 90 removes the unused backup pin 35b. 35b to storage tables 41a and 41b, which are predetermined storage locations (step S220).
  • the availability of the storage tables 41a and 41b is checked based on the captured image obtained in step S212 and the movement information (position information) of the support backup pins 35a moved from the storage tables 41a and 41b, and the backup This is done by collecting the unused backup pins 35b to be moved on the plate 31 and placing them in vacant storage locations on the storage tables 41a and 41b.
  • step S218 determines in step S218 that there is no unused backup pin 35b on the backup plate 31 (particularly on the first lane 20a) (determines "NO" in step S218)
  • step S222 the storage table lifting device 43 is driven to lower the storage table 41a of the first backup pin stocker 40a and the storage table 41b of the second backup pin stocker 40b.
  • step S224 the control device 90 drives the rail moving device 28 to move the dependent rail 22a of the first lane 20a and the reference rail 21b of the second lane 20b, which are movable conveyor rails, toward the first lane 20a. , the dependent rail 22a and the reference rail 21b are moved to the center of the backup plate 31 in the board width direction (see FIG. 11D). Then, the control device 90 ends the first lane pin installation (movement) process.
  • the backup member movement process for moving the supporting backup pin 35a was performed after the pin movement preparation process, but the pin movement preparation process and the backup member movement The processes may be performed simultaneously.
  • the process in step S206 lowering the storage platform 41
  • the process in step S208 moving the movable rails 22a, 21b
  • the process in step S214 moving the supporting backup pin 35a. It can be carried out within (transfer).
  • the control device 90 controls the support backup pin 35a that can be moved without moving the movable rails 22a, 21b (the support backup pin 35a is located on the first lane 20a side from the movable rails 22a, 21b before movement).
  • the support backup pin 35a (the movable rail before movement) cannot be moved unless the movable rails 22a, 21b are moved to the second lane 20b side, and the movable rails 22a, 21b are moved to the second lane 20b side.
  • the supporting backup pin 35a) located closer to the second lane 20b than 22a and 21b is moved.
  • examplement the pin movement preparation process includes “Implement the pin movement preparation process before the backup member movement process” and “Implement the pin movement preparation process at the same time as the backup member movement process”. It includes both meanings. The same applies to the second lane pin installation (movement) process.
  • the control device 90 acquires the width information of the substrate S to be transported in the second lane 20b and the layout information of the supporting backup pins 35a of the second lane 20b from the management computer. (Step S304).
  • control device 90 executes the pin movement preparation process described above. Specifically, in step S306, the control device 90 drives the accommodating table lifting device 43 to lower the first accommodating table 41a and the second accommodating table 41b. Further, in step S308, the control device 90 drives the rail moving device 28 to move the dependent rail 22a of the first lane 20a, which is a movable conveyor rail, and the reference rail 21b of the second lane 20b to the first lane 20a side. (See Figure 11E).
  • the movement destinations of the subordinate rail 22a and the reference rail 21b are preferably positions other than directly above the first storage stand 41a and the second storage stand 41b (through-hole portions 31ha, 31hb), and the first storage stand 41a and the A position closer to the first lane 20a than the second storage stand 41b (through-hole portions 31ha, 31hb) is preferable.
  • control device 90 moves the supporting backup pin 35a to the second lane 20b, which is the lane to be arranged and which is the lane in which the backup pin 35 is arranged, in the same manner as in steps S206 and 208 described above.
  • one of the subordinate rail 22a and the reference rail 21b, which are movable conveyor rails, and the first storage platform 41a and the second storage platform 41b is moved relative to the other (relative movement step).
  • step S310 the control device 90 drives the accommodating table lifting device 43 to raise the accommodating table 41a of the first backup pin stocker 40a and the accommodating table 41b of the second backup pin stocker 40b. Furthermore, in step S312, the control device 90 images the entire range of the backup plate 31 (including the through holes 31ha and 31hb) using the mark camera 83, similarly to step S212 described above.
  • the control device 90 moves the backup pin 35 (supporting backup pin 35a) to the placement target lane (backup member movement (processing) step). That is, in step S314, similarly to step S214 described above, the control device 90 processes the captured image and displays the backup pins 35 placed on the storage tables 41a and 41b and the backup pins 35 placed on the backup plate 31.
  • the supporting backup pin 35a is moved according to the layout information received in step S304 (see FIG. 11F).
  • step S316 the control device 90 determines whether the installation (placing) of all the support backup pins 35a in the second lane 20b is completed each time the support backup pins 35a are moved. If the control device 90 determines that the installation of all the support backup pins 35a scheduled to be placed on the second lane 20b has not been completed (determined as "NO" in step S316), the control device 90 returns to step S314 and updates the layout information. Accordingly, the supporting backup pin 35a to be moved next is moved.
  • control device 90 determines that the installation of all the supporting backup pins 35a scheduled to be placed on the second lane 20b has been completed (determined as "YES” in step S316), the control device 90 places the following on the second lane 20b. It is determined whether there are any extra backup pins 35 (sometimes referred to as unused backup pins 35b in this specification) that are not used to support the board S during mounting (step S318).
  • step S318 When the control device 90 determines in step S318 that there is an unused backup pin 35b on the backup plate 31 (particularly on the second lane 20b) (determined as "YES" in step S318), the controller 90 removes the unused backup pin 35b. 35b to storage tables 41a and 41b, which are predetermined storage locations (step S320). This process checks the availability of the storage tables 41a and 41b based on the captured image obtained in step S312 and the movement information (including position information) of the supporting backup pins 35a moved from the storage tables 41a and 41b. This is done by collecting the unused backup pins 35b to be moved on the backup plate 31 and placing them in vacant storage locations on the storage tables 41a and 41b.
  • step S318 determines that there is no unused backup pin 35b on the backup plate 31 (particularly on the second lane 20b) (determines "NO" in step S318)
  • step S322 the storage table lifting device 43 is driven to lower the storage table 41a of the first backup pin stocker 40a and the storage table 41b of the second backup pin stocker 40b.
  • step S324 the control device 90 adjusts the interval between each conveyor of the first lane 20a and the second lane 20b to the substrate width of the substrate S to be transported.
  • the control device 90 drives the rail moving device 28 based on the acquired width information of the substrate S to move the movable conveyor rail 21b located on the first lane 20a side.
  • the substrate is moved to the second lane 20b side, and the distance between the movable conveyor rail 21b and the movable conveyor rail 22b of the second lane 20b is adjusted to the substrate width in the substrate width direction of the substrate S (see FIG. 11G).
  • the control device 90 drives the rail moving device 28 based on the acquired width information of the substrate S to move the movable conveyor rail 22a located on the first lane 20a side to the second lane.
  • control device 90 ends the second lane pin installation (movement) process.
  • the backup member movement process for moving the supporting backup pin 35a was performed after the pin movement preparation process, but the pin movement preparation process and the backup member movement The processes may be performed simultaneously.
  • the process in step S306 lowering the storage platform 41
  • the process in step S308 moving the movable rails 22a, 21b
  • the process in step S314 moving the supporting backup pin 35a. It can be carried out within (transfer).
  • step S314 the control device 90 controls the support backup pin 35a that can be moved without moving the movable rails 22a, 21b (the support backup pin 35a is located on the second lane 20b side from the movable rails 22a, 21b before movement).
  • the supporting backup pin 35a (the movable rail before movement) cannot be moved unless the movable rails 22a, 21b are moved to the first lane 20a side, and then the movable rails 22a, 21b are moved.
  • the support backup pin 35a) located closer to the first lane 20a than 22a and 21b is moved.
  • step S108 the control device 90 performs a mounting process of picking up the component P from the feeder 16 and mounting it on the board S to manufacture a mounting board. Specifically, the control device 90 first controls the substrate transport device 20 (first lane 20a or second lane 20b) to carry the substrate S into the machine. Subsequently, the control device 90 drives the plate lifting device 32 to raise the backup plate 31 and supports the loaded substrate S by the supporting backup pins 35a installed on the backup plate 31.
  • the control device 90 drives the head moving device 70 to move the head 50 above the component supply position of the feeder 16, and causes the Z-axis actuator 55 to lower the suction nozzle 56 to supply the component to the component supply position. Collect part P.
  • the control device 90 drives the head moving device 70 to move the picked part P above the parts camera 82, and the parts camera 82 images the part P.
  • control device 90 processes the captured image, measures the adsorption deviation of the component P, and corrects the mounting position of the component P on the board S. Then, the control device 90 drives the head moving device 70 to move the sampled component P above the corrected mounting position, and drives the Z-axis actuator 55 to lower the suction nozzle 56 to move the component P onto the substrate. Implement it in S.
  • the first and second backup pin stockers 40a and 40b are disposed under the backup plate 31 so as to be movable up and down, but as shown in FIG. 140a and 140b may be configured to be movable in the horizontal and vertical directions.
  • the first backup pin stocker 140a mainly includes, as shown in FIG. 12, a storage table 141a formed similarly to the storage table 41a, and a storage table moving device 143a that moves the storage table 141a along the horizontal direction and raises and lowers it. , has.
  • a plurality of accommodation protrusions 42 are provided on the upper surface of the accommodation table 141a.
  • the storage table moving device 143a includes a Y-axis drive unit 44a that moves the storage table 141a along the Y-axis direction (machine front-back direction), and an X-axis drive that moves the storage table 141a along the X-axis direction (left-right direction). 45a, and a storage table lifting device 43 (described above) that raises and lowers the storage table 141a.
  • the Y-axis drive unit 44a moves the Y-axis slider 44a1 along the Y-axis direction.
  • the Y-axis drive unit 44a includes a Y-axis slider 44a1, a Y-axis guide unit 44a2 that guides and moves the Y-axis slider 44a1, and a Y-axis drive unit that moves and drives the Y-axis slider 44a1.
  • a drive device (not shown) is provided.
  • the Y-axis slider 44a1 can mount the X-axis drive section 45a, the storage table lifting device 43, and the storage table 141a, and is a Y-axis guide section extending along the vertical direction (Y-axis direction) in FIG. 12. 44a2 to reciprocate (directly move) along the Y-axis direction.
  • the Y-axis guide portion 44a2 is provided on the base 11 (see FIG. 3).
  • the Y-axis drive device is provided on the base 11, the housing 12 (see FIG. 1), or the Y-axis slider 44a1.
  • the X-axis drive unit 45a moves the X-axis slider 45a1 (equipped with the storage table elevating device 43 and the storage table 141a), which is slidably attached to the Y-axis slider 44a1, along the X-axis direction.
  • the X-axis drive section 45a includes an X-axis slider 45a1, an X-axis guide section 45a2 that guides and moves the X-axis slider 45a1, and an X-axis drive section that moves and drives the X-axis slider 45a1.
  • a drive device (not shown) is provided.
  • the X-axis slider 45a1 can be loaded with the storage table lifting device 43 and the storage table 141a, and extends along the left-right direction (X-axis direction) in FIG. 12, and is guided by the X-axis guide section 45a2. It is reciprocated (directly moved) along the X-axis direction.
  • the X-axis guide portion 45a2 is provided on the Y-axis slider 44a1.
  • the X-axis drive device is provided on the X-axis guide section 45a2 or the X-axis slider 45a1. Note that the storage table lifting device 43 raises and lowers the storage table 141a similarly to the embodiment described above.
  • the second backup pin stocker 140b mainly includes a storage table 141b and a storage table moving device 143b that moves the storage table 141b along the horizontal direction and raises and lowers it, as shown in FIG. and has.
  • the storage table moving device 143b includes a Y-axis drive section 44b that moves the storage table 141b along the Y-axis direction, an X-axis drive section 45b that moves the storage table 141b along the X-axis direction, and a system that moves the storage table 141b up and down. It has a storage table elevating device 43 for raising and lowering the storage table.
  • the Y-axis drive section 44b includes a Y-axis slider 44b1, a Y-axis guide section 44b2 that guides and moves the Y-axis slider 44b1, and a Y-axis drive device (not shown) that moves and drives the Y-axis slider 44b1.
  • the X-axis drive section 45b includes an X-axis slider 45b1, an X-axis guide section 45b2 that guides and moves the X-axis slider 45b1, and an X-axis drive device (not shown) that moves and drives the X-axis slider 45b1.
  • the storage table moving device is configured with an orthogonal robot having three orthogonal slide axes, but it can also be configured with an articulated robot having four or more drive axes. Good too.
  • step S406 the control device 90 drives the storage table moving device 143a and the storage table movement device 143b to move the first storage table 141a and the second storage table 141b to the first lane 20a side. It is moved to a predetermined position (indicated by a solid line in FIG. 12).
  • step S406 the control device 90 advances the program to step S212.
  • the control device 90 controls the subordinate rail 22a, which is a movable conveyor rail, to One of the reference rail 21b, the first accommodating table 141a, and the second accommodating table 141b can be moved relative to the other (relative movement step).
  • the control device 90 drives the head 50 to move the backup pins 35 placed on the first accommodating table 141a and the second accommodating table 141b to a predetermined support location of the backup plate 31 and place them thereon. Since there is no need to overcome obstacles such as conveyor rails during movement, all the backup pins 35 on the first storage table 141a and the second storage table 141b can be used as support backup pins 35a. It becomes possible.
  • step S218 determines that there is no unused backup pin 35b on the backup plate 31 (particularly on the first lane 20a) (determines "NO" in step S218), in step S424. , the distance between the fixed conveyor rail 21a and the movable conveyor rail 22a of the first lane 20a is adjusted to the substrate width of the substrate S in the substrate width direction. Then, the control device 90 ends the first lane pin installation (movement) process.
  • step S506 the control device 90 drives the storage table moving device 143a and the storage table movement device 143b to move the first storage table 141a located at a predetermined position on the first lane 20a side. Then, the second storage table 141b is moved to a predetermined position on the second lane 20b side (indicated by a broken line in FIG. 12).
  • the first accommodating table 141a and the second accommodating table 141b are moved passing outside the dependent rail 22a and the reference rail 21b, which are movable conveyor rails. Further, the dependent rail 22a and the reference rail 21b may be moved to the first lane 20a side, or the dependent rail 22a and the reference rail 21b, which are movable conveyor rails, may not be moved. Note that after the processing in step S506, the control device 90 advances the program to step S312.
  • the control device 90 controls the subordinate rail 22a, which is a movable conveyor rail, to One of the reference rail 21b, the first accommodating table 141a, and the second accommodating table 141b can be moved relative to the other (relative movement step).
  • the control device 90 drives the head 50 to move the backup pins 35 placed on the first accommodating table 141a and the second accommodating table 141b to a predetermined support location of the backup plate 31 and place them thereon. Since there is no need to overcome obstacles such as conveyor rails during movement, all the backup pins 35 on the first storage table 141a and the second storage table 141b can be used as support backup pins 35a. It becomes possible.
  • step S318 determines that there is no unused backup pin 35b on the backup plate 31 (particularly on the second lane 20b) (determines "NO" in step S318), in step S524. , the distance between the movable conveyor rail 21b and the movable conveyor rail 22b of the second lane 20b is adjusted to the substrate width of the substrate S in the substrate width direction. Then, the control device 90 ends the second lane pin installation (movement) process.
  • the component mounting machine 10 has at least one movable conveyor rail 21b, 22a that transports the board S on which the component P can be mounted along the transport direction and is movable along the board width direction.
  • a substrate transfer device 20 including two lanes 20a or 20b (conveyor), a backup pin 35 (backup member) capable of supporting the back surface of the substrate S, and a backup plate 31 having an installation surface on which the backup pin 35 can be installed.
  • a backup device 30 having a backup pin 35, storage tables 41a, 41b, 141a, 141b that can store and move the backup pin 35;
  • the movable conveyor rails 21b, 22a and It includes a control device 90 (control unit; steps S206, 208, 306, 308, 406, 506) that moves one of the storage tables 41a, 41b, 141a, and 141b relative to the other.
  • the control device 90 moves the backup pin 35 using the head moving device 70 in the lane 20a or 20b (one conveyor).
  • the control device 90 moves the backup pin 35 using the head moving device 70 in the lane 20a or 20b (one conveyor).
  • the control device 90 moves the backup pin 35 using the head moving device 70 in the lane 20a or 20b (one conveyor).
  • the backup pins 35 of the storage tables 41a, 41b, 141a, 141b can be easily arranged on the backup plate 31 of a desired conveyor.
  • the backup pins 35 can be used and arranged more efficiently.
  • the substrate transport device 20 includes a plurality of lanes 20a, 20b
  • the control device 90 controls the movement of the movable conveyor when the head moving device 70 moves the backup pin 35 on one of the plurality of conveyors 20a and 20b.
  • One of the rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b is moved relative to the other. According to this, the backup pins 35 can be used and arranged more efficiently in a component mounting machine having the board transport device 20 including a plurality of conveyors.
  • control device 90 controls the movable conveyor rails 21b, 22a and One of the storage tables 41a, 41b, 141a, and 141b is moved relative to the other. According to this, in one conveyor among the plurality of lanes 20a, 20b, before the backup pin 35 is moved by the head moving device 70, one of the movable conveyor rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b is moved. It becomes possible to move one relative to the other.
  • the storage tables 41a and 41b are arranged to be movable up and down at predetermined positions, and the movable conveyor rails 21b and 22a are movable above the storage tables 41a and 41b located at the predetermined positions. Placed. According to this, it becomes possible to reliably move one of the movable conveyor rails 21b, 22a and the storage tables 41a, 41b relative to the other.
  • the predetermined position is set at the center of the backup plate 31 in the substrate width direction. According to this, by setting the accommodating tables 41a and 41b at the center of the backup plate 31 in the board width direction, it becomes possible to efficiently move the backup pin 35 by the head moving device 70.
  • the storage tables 141a, 141b are placed on one side of the movable conveyor rails 21b, 22a at the predetermined stop position and on the other side. It is arranged so that it can be moved between positions. According to this, it becomes possible to reliably move one of the movable conveyor rails 21b, 22a and the storage tables 141a, 141b relative to the other.
  • the backup pin 35 which can support the back surface of the board S on which the component P can be mounted, is moved along the transport direction and in the board width direction.
  • a conveyor to be placed which is a lane 20a or 20b (one conveyor; one conveyor among a plurality of conveyors) having movable conveyor rails 21b, 22a that can be moved along, and is a conveyor on which a backup pin 35 is placed.
  • the backup pin 35 is moved by the head moving device 70 on one conveyor or one of the plurality of lanes 20a, 20b. It becomes possible to move one of the movable conveyor rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b relative to the other before moving the conveyor rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b. Therefore, the backup pins 35 of the storage tables 41a, 41b, 141a, 141b can be easily arranged on the backup plate 31 of a desired conveyor. As a result, in the method of moving the backup pins 35, the backup pins 35 can be arranged more efficiently.
  • the backup pin 35 capable of supporting the back surface of the board S on which the component P can be mounted is moved along the board width direction while transporting the board S along the transport direction.
  • a lane 20a or 20b one conveyor; one conveyor among a plurality of conveyors
  • movable conveyor rails 21b, 22a that can be moved by the conveyor on which the backup pin 35 is to be placed.
  • a relative movement step in which one of the movable storage tables 41a, 41b, 141a, 141b is moved relative to the other.
  • Steps S206, 208, 306, 308, 406, 506), and a backup member moving step (Steps S214, 314) of moving the backup pin 35 to the placement target conveyor after the relative movement.
  • the backup pin 35 is moved by the head moving device 70 on one conveyor or one of the plurality of lanes 20a, 20b. It becomes possible to move one of the movable conveyor rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b relative to the other before moving the conveyor rails 21b, 22a and the storage tables 41a, 41b, 141a, 141b. Therefore, the backup pins 35 of the storage tables 41a, 41b, 141a, 141b can be easily arranged on the backup plate 31 of a desired conveyor. As a result, the backup pins 35 can be arranged more efficiently in the mounting board manufacturing method.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

L'invention concerne une machine de montage de composants comprenant : un dispositif de transport de substrat pourvu d'au moins un transporteur pour transporter un substrat, sur lequel des composants peuvent être montés, le long d'une direction de transport, le ou les transporteurs ayant un rail de transporteur mobile qui peut se déplacer le long de la direction de la largeur du substrat ; un dispositif de secours ayant un élément de secours qui peut supporter la surface arrière du substrat et une plaque de secours ayant une surface d'installation sur laquelle l'élément de secours peut être installé ; une plateforme de réception qui peut recevoir l'élément de secours et peut se déplacer ; un dispositif de déplacement d'élément de secours pour déplacer l'élément de secours entre la plateforme de réception et la plaque de secours ; et une unité de commande pour amener l'un du rail de transporteur mobile et de la plateforme de réception à se déplacer par rapport à l'autre lorsque l'élément de secours est déplacé dans le transporteur à l'aide du dispositif de déplacement d'élément de secours.
PCT/JP2022/012925 2022-03-18 2022-03-18 Machine de montage de composants, procédé de déplacement d'élément de secours et procédé de fabrication de substrat de montage WO2023175995A1 (fr)

Priority Applications (1)

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PCT/JP2022/012925 WO2023175995A1 (fr) 2022-03-18 2022-03-18 Machine de montage de composants, procédé de déplacement d'élément de secours et procédé de fabrication de substrat de montage

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PCT/JP2022/012925 WO2023175995A1 (fr) 2022-03-18 2022-03-18 Machine de montage de composants, procédé de déplacement d'élément de secours et procédé de fabrication de substrat de montage

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0324800A (ja) * 1989-06-22 1991-02-01 Sanyo Electric Co Ltd プリント基板組立装置
JP2015084367A (ja) * 2013-10-25 2015-04-30 富士機械製造株式会社 ピン配置機構および基板処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0324800A (ja) * 1989-06-22 1991-02-01 Sanyo Electric Co Ltd プリント基板組立装置
JP2015084367A (ja) * 2013-10-25 2015-04-30 富士機械製造株式会社 ピン配置機構および基板処理装置

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