WO2023054035A1 - 希土類磁石材料及び磁石 - Google Patents

希土類磁石材料及び磁石 Download PDF

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Publication number
WO2023054035A1
WO2023054035A1 PCT/JP2022/034824 JP2022034824W WO2023054035A1 WO 2023054035 A1 WO2023054035 A1 WO 2023054035A1 JP 2022034824 W JP2022034824 W JP 2022034824W WO 2023054035 A1 WO2023054035 A1 WO 2023054035A1
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atomic
content
rare earth
less
phase
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English (en)
French (fr)
Japanese (ja)
Inventor
貴司 山▲崎▼
聡 大賀
和樹 佐藤
和宏 ▲高▼山
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Priority to CN202280065389.0A priority Critical patent/CN118020119A/zh
Priority to EP22875906.4A priority patent/EP4411760A4/en
Publication of WO2023054035A1 publication Critical patent/WO2023054035A1/ja
Priority to US18/595,936 priority patent/US20240266095A1/en
Anticipated expiration legal-status Critical
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/005—Ferrous alloys, e.g. steel alloys containing rare earths, i.e. Sc, Y, Lanthanides
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/02—Ferrous alloys, e.g. steel alloys containing silicon
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/08—Ferrous alloys, e.g. steel alloys containing nickel
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/10—Ferrous alloys, e.g. steel alloys containing cobalt
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/12—Ferrous alloys, e.g. steel alloys containing tungsten, tantalum, molybdenum, vanadium, or niobium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/14—Ferrous alloys, e.g. steel alloys containing titanium or zirconium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/18—Ferrous alloys, e.g. steel alloys containing chromium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/0551—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/059—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and Va elements, e.g. Sm2Fe17N2
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/06—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys in the form of particles, e.g. powder
    • H01F1/08—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
    • H01F1/083—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together in a bonding agent

Definitions

  • the present invention relates to rare earth magnet materials and magnets.
  • a samarium-iron-nitrogen-based magnetic material containing samarium (Sm), iron (Fe), and nitrogen (N) is known as one of the rare earth magnetic materials.
  • Samarium-iron-nitrogen-based magnetic materials are used, for example, as raw materials for bonded magnets.
  • Patent Document 1 discloses SmxFe100 -xyNv , SmxFe100 -xyvM1yNv , or SmxFe100 -xzvM2zNv [ M1 is Hf or Zr , M2 is one or more selected from Si, Nb, Ti, Ga, Al, Ta and C, 7 ⁇ x ⁇ 12, 0.5 ⁇ v ⁇ 20, 0.1 ⁇ y ⁇ 1.5 , and 0.1 ⁇ z ⁇ 1.0].
  • Patent Document 2 7.0 to 12 atomic percent of Sm, 0.1 to 1.5 atomic percent of one or more elements selected from the group consisting of Hf, Zr, and Sc, and Si
  • Patent Document 1 describes the problem that the magnetic properties are improved by adding Zr or the like, but when the amount of Zr added is increased, a soft magnetic phase precipitates and the coercive force decreases (for example, , paragraph 0022).
  • the addition of C improves the residual magnetic flux density and compensates for the lack of deoxidation during the production of the raw material melt. is described (eg, Paragraph 0024 of Cited Document 1, Paragraph 0013 of Cited Document 2).
  • An object of the present invention is to provide a rare earth magnet material and a magnet that exhibit higher coercive force.
  • the first rare earth magnet material according to the present invention has a Sm content of 7.0 atomic % or more and 11.0 atomic % or less, M (from Zr, Ti, Hf, V, Nb, Ta, Cr, Mo, W at least one selected element) content is 1.6 atomic % or more and 5.0 atomic % or less, N content is 11.0 atomic % or more and 19.5 atomic % or less, Fe content is 69 0.5 atomic % or more and 82.0 atomic % or less, and C is included.
  • M from Zr, Ti, Hf, V, Nb, Ta, Cr, Mo, W at least one selected element
  • N content is 11.0 atomic % or more and 19.5 atomic % or less
  • Fe content is 69 0.5 atomic % or more and 82.0 atomic % or less
  • C is included.
  • the rare earth magnet material may contain a crystal phase (MC phase) containing M and C as main components.
  • MC phase crystal phase
  • the rare earth magnet material may further contain Co, and the Co content may be 5 atomic % or less.
  • a magnet according to the present invention comprises a binder and any of the rare earth magnet materials described above dispersed in the binder.
  • FIG. 1 shows observation images by transmission electron microscope (TEM) and elemental mapping images by energy dispersive X-ray analysis (EDX) of Example 2 and Comparative Example 1.
  • TEM transmission electron microscope
  • EDX energy dispersive X-ray analysis
  • the rare earth magnet material of the present invention contains samarium (Sm), iron (Fe) and nitrogen (N), and at least one selected from M (Zr, Ti, Hf, V, Nb, Ta, Cr, Mo, W type) and C.
  • the rare earth magnet material of the present embodiment can be obtained by depositing a crystal phase (MC phase) containing M and C as main components.
  • MC phase crystal phase
  • Precipitation of the non-magnetic MC phase having a low Fe concentration suppresses the precipitation of the M-Fe phase, which is a soft magnetic phase that occurs when M is added. This increases coercivity.
  • the precipitation of the MC phase, which is a non-magnetic phase suppresses the precipitation of the Sm--Fe--C phase, which has a low coercive force when C is added, and as a result, the coercive force of the magnet as a whole is improved.
  • the content of M can be 1.6 atomic % or more and 5.0 atomic % or less, and 2.0 atomic % or more and 3.5 atomic % or less It is more preferable that If the content of M is small, the MC phase cannot be precipitated, and if the content of M is large, the precipitation amount of the M-Fe phase, which is a soft magnetic phase, increases.
  • the content of C is not specified, for example, the content of C can be 0.2 atomic % or more and 2.0 atomic % or less, and 0.5 atomic % or more and 1.5 atomic % It is more preferable to: If the C content is low, MC phase precipitation may not occur, and if the C content is high, Sm-Fe-C phases may precipitate and the magnetic properties may deteriorate. If the C content is less than 0.5 atomic percent (for example, 0.1 atomic percent or more and less than 0.5 atomic percent), the MC phase may not precipitate, but in that case Even if there is, the coercive force will be high if M and C are added at the same time as described above.
  • the Sm content is, for example, 7.0 atomic % or more and 11.0 atomic % or less, preferably 9.0 atomic % or more and 10.0 atomic % or less.
  • the content of N can be, for example, 11.0 atomic % or more and 19.5 atomic % or less, preferably 12.0 atomic % or more and 13.0 atomic % or less.
  • the balance can be Fe, and the specific Fe content is, for example, 69.5 atomic % or more and 82.0 atomic % or less, which is preferable. can be 73 atomic % or more and 79 atomic % or less.
  • the rare earth magnet material of the present invention may contain any appropriate other element.
  • the rare earth magnet material of the present invention may contain Co, and the Co content may be 5.0 atomic % or less, preferably 1.0 atomic % or more and 3.0 atomic % or less. good.
  • the SmFeN-based magnetic powder contains Co
  • the melt viscosity can be lowered when a magnetic material is produced by a super-quenching method, which will be described later. It can be reduced to improve the yield (production efficiency).
  • Co can be present at the position of Fe to replace it, but the present embodiment is not limited to such an aspect.
  • the rare earth magnet material of the present invention may further contain one or more of Al and Si.
  • the Al content is, for example, preferably 0.0 atomic % or more and 10.0 atomic % or less, more preferably 0.1 atomic % or more and 5.0 atomic % or less.
  • the Si content is, for example, preferably 0.0 atomic % or more and 1.0 atomic % or less, more preferably 0.2 atomic % or more and 0.6 atomic % or less.
  • Al and Si are thought to be present at the position of Fe in place of Fe, but the present invention is not limited to this aspect.
  • Other elements that can be added include, for example, the group consisting of Nd, Pr, Dy, Tb, La, Ce, Pm, Eu, Gd, Ho, Er, Tm, Ym, Lu, Mn, Ga, Cu, Ni, etc. At least one selected from When such an element is present, its content (in the case of multiple elements, the total of each content) can be, for example, 2.0 atomic % or less, more specifically 1.8 atomic % or less. could be. In addition, when O is contained as an unavoidable impurity, its content may be 10.0 atomic weight % or less, more specifically 5.0 atomic weight % or less.
  • the total content of each element in the rare earth magnet material does not exceed 100 atomic %.
  • the total content of all elements that can be contained in the rare earth magnet material is theoretically 100 atomic %.
  • the content (atomic %) of each element in the rare earth magnet material can be measured by inductively coupled plasma analysis (ICP-AES). Moreover, the content of O and N can be measured by an inert gas fusion method.
  • ICP-AES inductively coupled plasma analysis
  • the rare earth magnet material of the present invention can have any suitable shape.
  • the magnetic powder can have a particle size of about 1 to 300 ⁇ m.
  • a bonded magnet of the rare earth magnet material can be obtained by mixing the rare earth magnet material with a binder such as resin or plastic and molding and solidifying the mixture into a predetermined shape.
  • the rare earth magnet material of the present invention can be produced, for example, by a super-quenching method.
  • the ultraquenching method can be carried out as follows. First, a mother alloy is prepared by mixing raw metals constituting a rare earth magnet material in a desired composition ratio. This master alloy is melted (as a molten state) in an argon atmosphere and jetted onto a rotating single roll (for example, a peripheral speed of 30 to 100 m/s), thereby being super-quenched to form an alloy. Obtain a thin strip (or ribbon). This ribbon is pulverized to obtain a powder (for example, a maximum particle size of 250 ⁇ m or less). The obtained powder is subjected to a heat treatment (for example, 650-850° C. for 1-120 minutes) at a temperature above the crystallization temperature in an argon atmosphere.
  • a heat treatment for example, 650-850° C. for 1-120 minutes
  • the powder after heat treatment is subjected to nitriding treatment.
  • the nitriding treatment can be performed by subjecting the powder after heat treatment to heat treatment (for example, at 350 to 600° C. for 120 to 960 minutes) in a nitrogen atmosphere.
  • the nitriding treatment can also be carried out under any suitable conditions using, for example, ammonia gas, mixtures of ammonia and hydrogen, mixtures of nitrogen and hydrogen, or other nitrogen sources.
  • the rare earth magnet material of the present invention is obtained as a powder after nitriding treatment.
  • the resulting rare earth magnet material can have a fine crystal structure.
  • the average grain size can be, for example, 10 nm to 1 ⁇ m, preferably 10 to 200 nm, but the invention is not limited to this embodiment.
  • the present invention is not limited to such an embodiment.
  • the obtained powder was subjected to heat treatment at 665-755°C for 10 minutes under an argon atmosphere. Then, the heat-treated powder was nitrided by heat treatment at 405 to 535° C. for 8 hours under nitrogen atmosphere. Samples of rare earth magnet materials according to Examples and Comparative Examples were obtained as powders after nitriding.
  • Examples 1 to 16 and Comparative Examples 2 to 5 contain C necessary for forming the MC phase, but Comparative Example 1 contains C necessary for forming the MC phase does not contain - In Examples 1 to 4, the Zr content was varied while the contents of other elements were the same.
  • - Examples 5 and 6 are obtained by increasing or decreasing the Sm content based on the composition of Example 2.
  • - Examples 7, 8, and 9 contain Nb, Ti, or Cr as the element M that forms the MC phase.
  • - Examples 10 and 11 are based on the composition of Example 3 with Co added.
  • - Examples 12 and 13 are based on the composition of Example 3 with Al added.
  • - Examples 14 and 15 are obtained by adding Si to the composition of Example 3.
  • ⁇ Example 16 is based on the composition of Example 4, but has an increased N content.
  • ⁇ Comparative Example 1 is based on the composition of Example 3 and does not contain the amount of C necessary to form the MC phase.
  • - Comparative Examples 2 and 3 are obtained by changing the Sm content based on the composition of Example 2.
  • - Comparative Examples 4 and 5 are obtained by changing the Zr content based on the composition of Example 2.
  • ⁇ Comparative Example 6 is based on the composition of Example 11, but has an increased Co content.
  • Example 1 contains M and C and contains C necessary for forming the MC phase, so it exhibits a higher coercive force than Comparative Example 1.
  • the Zr content was increased based on the composition of Example 1.
  • Example 2 has the highest coercive force.
  • Comparative Example 2 which has a Zr content lower than that of Example 1
  • Comparative Example 3 which has a Zr content higher than those of Examples 3 and 4 have lower coercive forces than those of Examples 1-4.
  • Example 5 in which the Sm content was higher than in Example 1, had a higher coercive force than in Example 1, and Example 6, in which the Sm content was reduced, had a lower coercive force than in Example 1.
  • Comparative Example 4 which has a smaller Sm content than Example 5
  • Examples 7 to 9 contain Nb, Ti or Cr as the element M that forms the MC phase, and all of them exhibit a higher coercive force than Comparative Example 1 that does not form the MC phase.
  • Examples 10 and 11 are based on the composition of Example 3 with Co added. When a small amount of Co was added, the coercive force increased in Example 10, but when the amount of Co added was increased as in Example 11, the coercive force decreased. Examples 12 to 15 have Al or Si added based on the composition of Example 3, and all show higher coercive force than Comparative Example 1.
  • Example 16 is based on the composition of Example 4 with an increased N content. Example 16 with an increased N content exhibits a higher coercive force than Comparative Example 1.
  • Example 1 to 16 and Comparative Examples 2 to 6 it was confirmed that a crystal phase containing Zr and C as main components was present. Moreover, in Example 7, it was confirmed that a crystal phase containing Nb and C as main components was precipitated. In Example 8, it was confirmed that a crystal phase containing Ti and C as main components was precipitated. In Example 9, it was confirmed that a crystal phase containing Cr and C as main components was precipitated. In addition, in Comparative Example 1, no such crystal phase was confirmed.
  • Example 2 As a representative example, for Example 2 and Comparative Example 1, the obtained powder was processed by a focused ion beam, and as shown in FIG. An elemental mapping image was obtained by (EDX).
  • Example 2 As shown in FIG. 1, when the EDX mapping images of Example 2 and Comparative Example 1 are compared, in Comparative Example 1, Zr-rich phases (white spots) are scattered. On the other hand, in Example 2, the positions of the high Zr-concentration phase and the high C-concentration phase (white areas) coincide, indicating that a compound containing Zr and C as main components is precipitated. That is, in Example 1, a compound containing Zr and C as main components and having a low Fe concentration is deposited. As a result, precipitation of a soft magnetic phase mainly composed of Zr and Fe as in Comparative Example 1 is suppressed. In addition, in Example 2, since Zr and C form a compound, precipitation of the Sm--Fe--C compound is not observed. It is believed that this is the reason why Example 2 has a high coercive force.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
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  • Inorganic Chemistry (AREA)
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PCT/JP2022/034824 2021-10-01 2022-09-16 希土類磁石材料及び磁石 Ceased WO2023054035A1 (ja)

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Application Number Priority Date Filing Date Title
CN202280065389.0A CN118020119A (zh) 2021-10-01 2022-09-16 稀土磁铁材料和磁铁
EP22875906.4A EP4411760A4 (en) 2021-10-01 2022-09-16 RARE EARTH MAGNET MATERIAL AND MAGNET
US18/595,936 US20240266095A1 (en) 2021-10-01 2024-03-05 Rare-earth magnet material and magnet

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JP2021163100A JP2023053819A (ja) 2021-10-01 2021-10-01 希土類磁石材料及び磁石
JP2021-163100 2021-10-01

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08316018A (ja) * 1994-07-12 1996-11-29 Tdk Corp 磁石およびボンディッド磁石
JP2002057017A (ja) 2000-05-29 2002-02-22 Daido Steel Co Ltd 等方性の粉末磁石材料、その製造方法およびボンド磁石
JP2018046221A (ja) 2016-09-16 2018-03-22 大同特殊鋼株式会社 Ｓｍ−Ｆｅ−Ｎ系磁石材料及びＳｍ−Ｆｅ−Ｎ系ボンド磁石
WO2021085521A1 (ja) * 2019-10-29 2021-05-06 Tdk株式会社 Ｓｍ－Ｆｅ－Ｎ系希土類磁石、その製造方法、及び、希土類磁石粉末
JP2022149639A (ja) * 2021-03-25 2022-10-07 Tdk株式会社 Ｓｍ－Ｆｅ－Ｎ系希土類磁石

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014190558A1 (zh) * 2013-05-31 2014-12-04 北京有色金属研究总院 稀土永磁粉、包括其的粘结磁体及应用该粘结磁体的器件
JP6813457B2 (ja) * 2017-08-30 2021-01-13 株式会社東芝 永久磁石、回転電機、及び車両

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08316018A (ja) * 1994-07-12 1996-11-29 Tdk Corp 磁石およびボンディッド磁石
JP2002057017A (ja) 2000-05-29 2002-02-22 Daido Steel Co Ltd 等方性の粉末磁石材料、その製造方法およびボンド磁石
JP2018046221A (ja) 2016-09-16 2018-03-22 大同特殊鋼株式会社 Ｓｍ−Ｆｅ−Ｎ系磁石材料及びＳｍ−Ｆｅ−Ｎ系ボンド磁石
WO2021085521A1 (ja) * 2019-10-29 2021-05-06 Tdk株式会社 Ｓｍ－Ｆｅ－Ｎ系希土類磁石、その製造方法、及び、希土類磁石粉末
JP2022149639A (ja) * 2021-03-25 2022-10-07 Tdk株式会社 Ｓｍ－Ｆｅ－Ｎ系希土類磁石

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP4411760A4

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US20240266095A1 (en) 2024-08-08
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EP4411760A4 (en) 2025-09-03
JP2023053819A (ja) 2023-04-13

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