WO2023019725A1 - Structure mobile de pressage de carte, machine d'exposition dotée de ladite structure, et procédé de pressage de carte de machine d'exposition - Google Patents

Structure mobile de pressage de carte, machine d'exposition dotée de ladite structure, et procédé de pressage de carte de machine d'exposition Download PDF

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Publication number
WO2023019725A1
WO2023019725A1 PCT/CN2021/125934 CN2021125934W WO2023019725A1 WO 2023019725 A1 WO2023019725 A1 WO 2023019725A1 CN 2021125934 W CN2021125934 W CN 2021125934W WO 2023019725 A1 WO2023019725 A1 WO 2023019725A1
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WO
WIPO (PCT)
Prior art keywords
assembly
pressing plate
exposure
screw mandrel
drive
Prior art date
Application number
PCT/CN2021/125934
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English (en)
Chinese (zh)
Inventor
周川
项铭
林垂真
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杭州新诺微电子有限公司
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Application filed by 杭州新诺微电子有限公司 filed Critical 杭州新诺微电子有限公司
Publication of WO2023019725A1 publication Critical patent/WO2023019725A1/fr

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process

Definitions

  • the invention belongs to the technical field of circuit board production, and in particular relates to a movable press plate structure, an exposure machine with the structure, and a press plate method for the exposure machine.
  • circuit boards are becoming more and more widely used in electronic equipment.
  • a circuit board exposure machine is usually used to perform light treatment on the circuit board.
  • the circuit board needs to be stably positioned before the exposure process.
  • the traditional positioning method is to manually add fasteners such as bolts or nuts to realize the locking and fixing of the circuit board.
  • the traditional positioning method not only has low work efficiency, but also cannot guarantee the stability of the positioning of the circuit board, thus affecting the exposure quality. .
  • a Chinese invention patent application discloses a PCB vacuum adsorption device, method and PCB exposure machine [application number: 201710312711.6].
  • the invention patent The application includes a vacuum suction plate with one or more vacuum absorption air holes for supporting the PCB, an adsorption shielding device for surrounding the four sides of the PCB, and cooperating with the PCB and the vacuum suction plate to form a suction space, and for passing Vacuum suction air holes are used to extract the air in the suction space to make the PCB attach to the suction device on the vacuum suction plate.
  • This invention application is provided with 4 moving pressure rods to press the four sides of the PCB board, the structure is very complicated, and it is extremely inconvenient to use.
  • the object of the present invention is to solve the above problems and provide a movable platen structure with simple structure and convenient use.
  • Another object of the present invention is to solve the above problems and provide an exposure machine with a simple and easy-to-use movable platen structure.
  • Another object of the present invention is to solve the above problems and provide a pressing plate method for an exposure machine realized by a movable platen structure with a simple structure and convenient use.
  • the present invention adopts the following technical solutions:
  • a movable platen structure comprising a mounting base and a platen assembly movably connected to the mounting base, the mounting base is also provided with a drive assembly whose drive path is in a straight line state, and the platen assembly is connected to the mounting base through the drive assembly , and the driving assembly can drive the platen assembly to reciprocate along the driving path.
  • the drive assembly includes a screw rod and a rotating sleeve fixedly connected to one end of the screw rod, the circumferentially fixed sliding sleeve of the screw rod is threadedly connected to the screw rod, and the pressure plate assembly is fixedly connected to the screw rod slip on;
  • the driving assembly includes a slide rail and a sliding block that are slidably connected, the driving cylinder is drivingly connected to the sliding block, and the pressing plate assembly is fixedly connected to the sliding block.
  • the drive assembly further includes a drive motor fixedly connected to the installation base, the output shaft of the drive motor is driven and connected to the rotating sleeve through a transmission belt;
  • the rotating sleeve is fixedly connected with a manual handle
  • the driving assembly also includes a locking knob and a locking rod fixedly connected to the locking knob. Turning the locking knob can make one end of the locking rod be pressed on the rotating sleeve or screw.
  • the pressing plate assembly includes a steering gear connected to the driving assembly and a pressing plate arranged at the front end of the steering gear, and the pressing plate is drivingly connected to the output end of the steering gear through a swing arm.
  • An exposure machine comprising a frame, the frame is provided with an exposure table, two adjacent sides of the exposure table are provided with fixed point pressure devices, and the upper surface of the exposure table has an exposure area for placing a PCB board , the above-mentioned movable platen structure is also provided on the exposure table, the surface of the exposure table is provided with a moving groove corresponding to the driving path, the driving assembly can drive the platen assembly to move along the moving groove, and make the platen One end of the component extends into the exposure area.
  • the driving assembly includes a screw rod located in the moving groove and a rotating sleeve fixedly connected to one end of the screw rod, the sliding sleeve of the screw rod is screwed to the screw rod, and the pressing plate assembly is fixedly connected to the screw rod
  • the side wall of the moving groove has a limiting guide groove recessed into the exposure table, and the two sides of the screw sliding sleeve extend into the limiting guiding groove and are slidably connected with the limiting guiding groove.
  • One end of the screw rod is rotatably connected to the screw rod mounting base through a bearing, and the screw rod mounting base is fixedly connected in a moving groove, and at least one position sensor for detecting the sliding position of the pressing plate assembly is arranged in the moving groove.
  • the platen structure is arranged on the side of the exposure table that is not provided with a fixed point press device, and at least one platen structure is provided on each side without a fixed point press device, and the exposure area There are also vacuum suction holes on the top; the moving grooves are set in one-to-one correspondence with the pressing plate structure, and the extending direction and total length between at least two moving grooves are different.
  • the minimum board short side and the minimum board long side perpendicular to each other are provided in the exposure area, and the minimum board short side, the minimum board long side and the exposure table are provided with two sides of a fixed point pressing device Enclosed to form the minimum board placement area, there are also several groups of mutually perpendicular short side lines and long side lines of the large board in the exposure area, and the short side lines of the large board, the long side lines of the large board and the exposure table of each group are provided with fixed The two sides of the point pressing device are enclosed to form a large board placement area, a moving groove runs through several short side lines of the large board and extends to the short side line of the smallest board, a moving groove runs through several long side lines of the large board and Extending to the long side of the smallest plate, the end of a moving groove extends to the long side of the large plate, the extension direction of the moving groove is not perpendicular to the short side and the long side, the pressing plate assembly includes a drive
  • a press plate method for an exposure machine realized by using the above-mentioned movable press plate structure comprising the following steps:
  • Step 1 Place the PCB board in the exposure area, and use the fixed point pressing device to press the two adjacent sides of the PCB board;
  • Step 2 move the movable platen structure so that one end of the movable platen structure extends into the exposure area, and press it on the two sides of the PCB board that are not pressed by the fixed point pressing device;
  • Step 3 After the exposure is over, loosen the fixed point pressure device, move the movable platen structure so that the movable platen structure leaves the surface of the PCB board and retracts to outside the exposure area, and takes out the PCB board.
  • the movable pressing plate structure includes a mounting base and a pressing plate assembly movably connected to the mounting base, and the mounting base is also provided with a driving assembly whose driving path is in a straight line state, and the pressing plate assembly Connected to the installation base through a drive assembly, the drive assembly includes a screw rod located in the moving groove and a rotating sleeve fixedly connected to one end of the screw rod, the screw sleeve is threadedly connected to the screw rod, and the pressing plate assembly is fixedly connected to the On the screw sliding sleeve, the side wall of the moving groove has a limiting guide groove recessed into the exposure table, and both sides of the screw sliding sleeve extend into the limiting guiding groove and are slidably connected with the limiting guiding groove.
  • the drive assembly also includes a drive motor fixedly connected to the mounting base.
  • the drive motor The output shaft is driven and connected to the rotating sleeve through a transmission belt.
  • the pressure plate assembly includes a steering gear connected to the screw sleeve and a pressure plate arranged at the front end of the steering gear. The pressure plate is driven and connected to the output end of the steering gear through a swing arm.
  • the drive motor drives the rotating sleeve to rotate, so that the screw rod rotates, the screw rod sliding sleeve moves along the axis of the screw rod, the screw rod sliding sleeve drives the steering gear to move, and the steering gear drives the swing arm so that the pressure plate is flipped and pressed.
  • the drive motor drives the rotating sleeve to rotate, so that the screw rod rotates, the screw rod sliding sleeve moves along the axis of the screw rod, the screw rod sliding sleeve drives the steering gear to move, and the steering gear drives the swing arm so that the pressure plate is flipped and pressed.
  • the present invention has the advantages of:
  • the present invention drives the pressing plate assembly to move along the driving path through the driving assembly to compress the side edge of the PCB board to be exposed, and has a simple structure and is easy to use.
  • the moving groove of the present invention runs through several short side lines and long side lines of the large board, and finally extends to the minimum short side line and the minimum long side line of the board, so that the drive assembly can drive the pressure plate assembly according to the size of different PCB boards Move to different positions for pressing, so that the exposure table can be easily applied to the exposure and pressing of PCB boards of different sizes.
  • the exposure machine provided by the present invention is provided with a movable platen structure on the side without a fixed point pressure device, which can keep the PCB board in good flatness, thereby improving the exposure accuracy during exposure.
  • Fig. 1 is a perspective view of an exposure machine
  • Fig. 2 is a structural schematic diagram of an exposure station
  • Figure 3 is a top view of the smallest PCB board placed on the exposure table
  • Figure 4 is a top view of a larger PCB board placed on the exposure table
  • FIG. 5 is a structural schematic diagram of a partial structure of the exposure table
  • Fig. 6 is a structural schematic diagram of a movable platen structure
  • Fig. 7 is a schematic structural view of the pressing plate assembly
  • Fig. 8 is a top view of an exposure table with a manually driven screw
  • installation base 1 pressure plate assembly 2, drive assembly 3, steering gear 21, pressure plate 22, swing arm 23, screw rod 31, rotating sleeve 32, screw rod sliding sleeve 33, driving motor 34, transmission belt 35, manual handle 36.
  • This embodiment provides a movable platen structure, as shown in Fig. 6 and Fig. 7, including a mounting base 1 and a pressing plate assembly 2 movably connected to the mounting base 1, and the mounting base 1 is also provided with a drive path in a straight line state of the driving assembly 3, the pressing plate assembly 2 is connected to the installation base 1 through the driving assembly 3, and the driving assembly 3 can drive the pressing plate assembly 2 to reciprocate along the driving path.
  • the driving assembly 3 drives the pressing plate assembly 2 to move, and by changing the position of the pressing plate assembly 2, the pressing plate assembly 2 is switched between the pressing plate state and the non-pressing plate state. Therefore, the present invention drives the pressing plate assembly 2 to move along the driving path through the driving assembly 3 to compress the side edge of the PCB board to be exposed, and has a simple structure and is convenient to use.
  • the driving assembly 3 can be realized through the cooperation of the screw mandrel sliding sleeve.
  • the driving assembly 3 includes a screw mandrel 31 and a rotating sleeve 32 fixedly connected to one end of the screw mandrel 31, and the circumferentially fixed screw mandrel sliding sleeve 33 and the screw mandrel 31 Threaded connection, the pressing plate assembly 2 is fixedly connected to the screw mandrel sliding sleeve 33 . In this manner, the direction in which the axis of the screw rod 31 extends is the driving path.
  • the drive assembly 3 includes slide rails and sliders that are slidably connected, the driving cylinder is drivingly connected to the slider, and the pressure plate assembly 2 is fixedly connected to the slider. In this way, the extending direction of the slide rail is the driving path.
  • the drive of the screw mandrel 31 can be driven automatically.
  • the drive assembly 3 also includes a drive motor 34 fixedly connected to the installation base 1, and the output shaft of the drive motor 34 passes through a transmission belt 35 It is driven and connected with the rotating sleeve 32.
  • Manual driving can also be used.
  • a manual handle 36 is fixedly connected to the rotating sleeve 32
  • the driving assembly 3 also includes a locking knob 37 and a locking knob fixedly connected to the locking knob 37 .
  • Rod, turning the locking knob 37 can make one end of the locking rod be pressed on the rotating sleeve 32 or the screw mandrel 31.
  • the pressing plate assembly 2 includes a steering gear 21 connected to the drive assembly 3 and a pressing plate 22 arranged at the front end of the steering gear 21 , and the pressing plate 22 is drivingly connected to the output end of the steering gear 21 through a swing arm 23 .
  • the working principle of this embodiment is: when in use, the driving motor 34 drives the transmission belt 35 through the output shaft, so that the rotating sleeve 32 and the screw mandrel 31 are rotated, and the screw mandrel sliding sleeve 33 is rotated along the axis of the screw mandrel 31 under the action of the thread.
  • the movement in the direction of the center line drives the steering gear 21 to move synchronously.
  • the steering gear 21 drives the swing arm 23 to make the steering gear 21 turn over, so that the steering gear 21 is pressed or separated from the surface of the PCB board 700, even if The switching of the pressing plate assembly 2 between the pressing plate state and the non-pressing plate state is obtained. Therefore, the present invention drives the pressing plate assembly 2 to move along the driving path through the driving assembly 3 to compress the side edge of the PCB board to be exposed, and has a simple structure and is convenient to use.
  • This embodiment provides an exposure machine, as shown in Figures 1-8, including a frame 600, an exposure table 100 is provided on the frame 600, and two adjacent sides of the exposure table 100 are provided with fixed points
  • the upper surface of the exposure table 100 has an exposure area 300 for placing the PCB board 700.
  • the movable platen structure described in Embodiment 1 is also provided on the exposure table 100.
  • the surface of the exposure table 100 is provided with a
  • the driving path corresponds to the moving groove 400 , the driving assembly 3 can drive the platen assembly 2 to move along the moving groove 400 , and make one end of the platen assembly 2 extend into the exposure area 300 .
  • PCB boards 700 are rectangular, so the adjacent two sides of the PCB board 700 can be pasted on the two sides provided with the fixed point pressing device 200, and the adjacent two sides of the PCB board 700 can be fixed by the fixed point pressing device 200. Press both sides together. The remaining sides are then compressed with the movable platen structure described in Embodiment 1.
  • the drive assembly 3 includes a screw rod 31 located in the moving groove 400 and a rotating sleeve 32 fixedly connected to one end of the screw rod 31 , the screw rod sliding sleeve 33 is threadedly connected with the screw rod 31 , and the pressing plate assembly 2 Fixedly connected to the screw sliding sleeve 33, the side wall of the moving groove 400 has a limiting guide groove 401 sunken into the exposure table 100, and both sides of the screw sliding sleeve 33 extend into the limiting guiding groove 401 And it is slidingly connected with the limit guide groove 401, the limit guide groove 401 guides the sliding direction of the screw mandrel sleeve 33, and can also fix the screw mandrel sleeve 33 in the circumferential direction at the same time to prevent the screw mandrel sleeve 33 from being blocked by the screw rod.
  • Screw rod 31 drives and rotates synchronously.
  • One end of the screw rod 31 is rotatably connected to the screw rod mounting base 38 through a bearing, and the screw rod mounting base 38 is fixedly connected in the moving groove 400, and at least one pressure plate for detecting the pressure plate is also arranged in the moving groove 400.
  • Position sensor for the sliding position of component 2. The position sensor can select the proximity switch in the prior art for use. The position sensor is used to indicate the position of the pressing plate assembly 2, so as to judge whether the pressing plate assembly 2 has moved to a predetermined position.
  • the platen structure is arranged on the side of the exposure table 100 that is not provided with the fixed point pressing device 200 , and at least one platen structure is provided on each side that is not provided with the fixed point pressing device 200 .
  • the exposure area 300 is also provided with a vacuum suction hole 500 .
  • the exposure machine provided by the present invention is provided with a movable platen structure on the side where the fixed point pressure device 200 is not installed, which can keep the PCB board 700 in good flatness, thereby improving the exposure accuracy during exposure.
  • the moving grooves 400 are provided in one-to-one correspondence with the pressing plate structure, and at least two moving grooves 400 have different extension directions and total lengths.
  • the exposure area 300 is provided with a minimum board short side 301 and a minimum board long side 302 perpendicular to each other, and the minimum board short side 301, the minimum board long side 302 and the exposure table 100 are provided with two fixed point pressing devices 200.
  • the minimum plate placement area is formed by surrounding two sides. In the exposure area 300, there are also several groups of mutually perpendicular short side lines 303 and long side lines 304 of the large plate.
  • the sideline 304 and the exposure table 100 are provided with the two sides of the fixed point pressing device 200 to form a large plate placement area, and a moving groove 400 runs through several short sidelines 303 of the large plate and extends to the smallest short sideline 301 of the plate.
  • a moving groove 400 runs through several large plate long side lines 304 and extends to the smallest plate long side line 302, the end of a moving groove 400 extends to the large plate long side line 304, the extension direction of the moving groove 400 It is not perpendicular to the short side lines 301, 303 and the long side lines 302, 304, that is, the moving groove 400 is arranged obliquely, so that regardless of the size of the PCB board 700, the pressure plate 22 of the final pressure plate assembly 2 can be pressed on the edge of the PCB board 700 close to The middle position ensures the reliability of the pressure plate.
  • the included angle between the moving groove 400 and the side lines 301, 302, 303, 304 is 60-80 degrees.
  • the pressing plate assembly 2 includes a steering gear 21 connected to the drive assembly 3 and a pressing plate 22 arranged at the front end of the steering gear 21.
  • the pressing plate 22 is driven and connected to the output end of the steering gear 21 through a swing arm 23, and is pressed on the short side line.
  • the pressing plates 22 on the 301, 303 and the pressing plates 22 arranged on the long sides 302, 304 are perpendicular to each other.
  • the moving groove 400 of the present invention runs through several large plate short sidelines 303 and large plate long sidelines 304, and finally extends to the minimum plate short sideline 301 and the minimum plate long sideline 302, so that the drive assembly 3 can drive
  • the pressing plate assembly 2 is moved to different positions for pressing according to the size of different PCB boards 700 , so that the exposure table 100 is conveniently suitable for exposure and pressing of PCB boards 700 of different sizes.
  • This embodiment provides a press plate method for an exposure machine realized by using the movable press plate structure described in Example 1, as shown in Figures 1-8, including the following steps:
  • Step 1 Place the PCB board 700 in the exposure area 300, and use the fixed point pressing device 200 to press the two adjacent sides of the PCB board 700;
  • Step 2 move the movable platen structure so that one end of the movable platen structure extends into the exposure area 300 , and press it on the two sides of the PCB 500 that are not pressed by the fixed point pressing device 200 ;
  • Step 3 After the exposure is over, loosen the fixed point pressing device 200 , move the movable platen structure so that the movable platen structure leaves the surface of the PCB 700 and retracts to outside the exposure area 300 , and takes out the PCB 700 .
  • the movable platen structure includes a mounting base 1 and a platen assembly 2 movably connected to the mounting base 1.
  • the mounting base 1 is also provided with a drive assembly 3 whose drive path is in a straight line state.
  • the platen assembly 2 is connected to the installation base 1 through the drive assembly 3,
  • the drive assembly 3 includes a screw rod 31 located in the moving groove 400 and a rotating sleeve 32 fixedly connected to one end of the screw rod 31, the screw rod sliding sleeve 33 and the screw rod 31 Threaded connection
  • the press plate assembly 2 is fixedly connected to the screw sleeve 33
  • the side wall of the moving groove 400 has a limit guide groove 401 sunken into the exposure table 100
  • the two sides of the screw sleeve 33 Extending into the limit guide groove 401 and slidingly connected with the limit guide groove 401
  • one end of the screw rod 31 is rotatably connected with the screw rod mounting base 38 through a bearing
  • the screw rod mounting base 38 is fixedly connected to the moving
  • the present invention can perform compression exposure on PCB boards 700 of different sizes.
  • the PCB board 700 is small, it is only necessary to drive one pressing plate 22 to press the short side of the PCB board 700 , and one pressing plate 22 to press the long side of the PCB board 700 .
  • the size of the PCB board 700 is large enough to a certain value, and the long side of the PCB board 700 cannot be stably compressed with a single pressing plate 22 due to its long length, another pressing plate 22 is driven to extend only to the length of the large plate along the end.
  • the moving groove 400 of the side line 304 moves to the edge attachment of the PCB board 700, and then supplementary compression is performed, that is, when the PCB board 700 is larger, the short side of the PCB board 700 is compressed with one pressing plate 22, and the long side can be compressed with two pressing plates 22 To compress.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

L'invention concerne une structure mobile de pressage de carte, une machine d'exposition et un procédé de pressage de carte de la machine d'exposition. La structure de pressage de carte de la machine d'exposition comprend une base de montage (1) et un ensemble de pressage de carte (2) relié de manière mobile à la base de montage (1) ; la base de montage (1) est en outre pourvue d'un ensemble d'entraînement (3) servant à ce qu'un trajet d'entraînement soit dans un état linéaire, l'ensemble de pressage de carte (2) est relié à la base de montage (1) au moyen de l'ensemble d'entraînement (3), et l'ensemble d'entraînement (3) peut entraîner l'ensemble de pressage de carte (2) à se déplacer en va-et-vient le long du trajet d'entraînement. L'ensemble d'entraînement (3) entraîne l'ensemble de pressage de carte (2) à se déplacer le long du trajet d'entraînement, de façon à presser fermement le bord latéral d'une carte de circuit imprimé à exposer. La structure mobile de pressage de carte présente une structure simple et est pratique à utiliser.
PCT/CN2021/125934 2021-08-19 2021-10-24 Structure mobile de pressage de carte, machine d'exposition dotée de ladite structure, et procédé de pressage de carte de machine d'exposition WO2023019725A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110954644.4A CN113777891B (zh) 2021-08-19 2021-08-19 可移动压板结构及具有该结构的曝光机及曝光机压板方法
CN202110954644.4 2021-08-19

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WO2023019725A1 true WO2023019725A1 (fr) 2023-02-23

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CN115356901B (zh) * 2022-09-23 2023-04-14 广东科视光学技术股份有限公司 一种用于光刻机的压紧装置

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CN212433578U (zh) * 2019-12-30 2021-01-29 苏州源卓光电科技有限公司 压板机构及曝光机
CN112130423A (zh) * 2020-09-15 2020-12-25 合肥芯碁微电子装备股份有限公司 直写式光刻机吸盘压板装置及其控制方法
CN113777890A (zh) * 2021-08-18 2021-12-10 杭州新诺微电子有限公司 伸缩式压板机构及具有该结构的曝光机及曝光机压板方法
CN215729276U (zh) * 2021-08-19 2022-02-01 杭州新诺微电子有限公司 可移动压板结构及具有该结构的曝光机

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