WO2023017700A1 - Bonding apparatus and bonding method - Google Patents

Abstract

[Problem] To bond a functional layer to a substrate with an excellent quality. [Solution] A bonding apparatus 1A comprises: a table 5 on which a substrate 100 is placed; a storage part 40 for storing a sheet 200 in which a base film, a functional layer, and a cover film are laminated in the stated order; a conveyance part 60A for conveying the sheet 200 from the storage part 40 to the table 5; and a cover film separation part 70 for separating the cover film of the sheet 200. The conveyance part 60A conveys the sheet 200 from which the cover film has been separated by the cover film separation part 70, and bonds the sheet 200, on which the functional layer is exposed, to the substrate 100 on the table 5.

Description

Sticking device and sticking method

TECHNICAL FIELD The present invention relates to a sticking device and a sticking method.
This application claims priority based on Japanese Patent Application No. 2021-131249 filed in Japan on August 11, 2021, the contents of which are incorporated herein.

For example, in the process of forming a circuit pattern on a substrate, a method using a dry film is sometimes used when forming a resist film made of a photosensitive material on the substrate. As such a dry film, a structure in which a functional layer (photosensitive layer) is formed on a base film (support film) and a cover film (protective film) is laminated thereon has been proposed (see, for example, Patent Documents 1).

Japanese Patent Application Laid-Open No. 2003-195491

As for the dry film as described above, a dry film roll is used in which a belt-shaped strip having a predetermined width is wound into a roll. To form the functional layer on the substrate, a belt-shaped dry film is fed out from the dry film roll, the cover film is peeled off, and the functional layer is attached to the substrate. By the way, in the case of a dry film roll, since the dry film is wound in a roll shape, there is a possibility that the quality will be affected, such as the occurrence of wrinkles in the base film and cover film that constitute the dry film, and the winding misalignment. A variety of problems are likely to occur. In recent years, as the density of various chips has increased, the height of Cu pillars and through-mold vias has increased, and along with this, the thickness of functional layers for forming Cu pillars and through-mold vias has also increased. I'm doing it. For this reason, the problem caused by increasing the thickness of the roll-shaped dry film has become more conspicuous.

An object of the present invention is to provide a sticking device and a sticking method capable of sticking a functional layer to a substrate with good quality.

In the first aspect of the present invention, a table on which a substrate is placed, a storage section for storing a sheet in which a base film, a functional layer, and a cover film are laminated in this order, and the sheet is transferred from the storage section to the table. and a cover film peeling unit for peeling off the cover film of the sheet, wherein the conveying unit conveys the sheet from which the cover film is peeled by the cover film peeling unit, A sticking device is provided for sticking the sheet with the exposed functional layer onto the substrate on the table.

In the second aspect of the present invention, the substrate is placed on a table, and the sheet is placed on the table from the storage section that stores the sheet in which the base film, the functional layer, and the cover film are laminated in this order. transporting onto a substrate, peeling the cover film from the sheet during transportation, and peeling the cover film and attaching the sheet with the functional layer exposed to the substrate, An application method is provided.

According to the present invention, the sheet stored in the storage unit is conveyed to the table and attached to the substrate. Since the cover film of the sheet is peeled off during transportation, the sheet with the functional layer exposed is attached to the substrate on the table. In this way, a functional layer can be easily formed on the substrate. A sheet in which the base film, the functional layer, and the cover film are laminated in this order is in the shape of a sheet, not in the shape of a roll. For this reason, it is possible to suppress problems that may affect the quality of the film, such as the occurrence of wrinkles in the film and winding misalignment, as in the case of roll-shaped films. As a result, the functional layer can be attached to the substrate with good quality.

It is a top view showing an example of a sticking device concerning an embodiment. It is a block diagram which shows the functional structure of the control apparatus of the sticking apparatus which concerns on embodiment. It is a figure which shows the state which mounts a board|substrate on the table of the sticking apparatus which concerns on embodiment. FIG. 4 is a plan view showing a sheet to be stuck by the sticking device according to the embodiment; FIG. 4 is a cross-sectional view showing a sheet to be stuck by the sticking device according to the embodiment; It is an elevation view which shows the structure of the storage part of embodiment. It is a sectional view showing the composition of a part of transportation part of an embodiment. FIG. 4 is a cross-sectional view showing the configuration of a cover film peeling portion according to the embodiment; It is a sectional view showing composition of a precut part concerning an embodiment. FIG. 4 is a cross-sectional view showing the configuration of a resection sheet collecting section according to the embodiment; It is a sectional view showing composition of a table concerning an embodiment. 4 is a cross-sectional view showing the configuration of a base film peeling portion according to the embodiment; FIG. FIG. 4 is a cross-sectional view showing a state in which the base film is peeled off by the base film peeling portion according to the embodiment; It is a flowchart which shows the flow of the sticking method which concerns on embodiment. It is a top view showing an example of a sticking device concerning other embodiments. It is a top view showing an example of a sticking device concerning other embodiments. It is a top view showing an example of a sticking device concerning other embodiments. It is a top view showing an example of a sticking device concerning other embodiments. It is a flowchart which shows the flow of the sticking method which concerns on other embodiment. It is a top view which shows an example of the sticking apparatus used with the sticking method which concerns on other embodiment. FIG. 5 is a cross-sectional view showing the configuration of a precut portion according to another embodiment; It is a flowchart which shows the flow of the sticking method which concerns on other embodiment. It is a top view which shows an example of the sticking apparatus used with the sticking method which concerns on other embodiment. It is an elevation view which shows the structure of the storage part of other embodiment. It is an elevation view which shows the structure of the storage part of other embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the embodiments described below. In addition, in the drawings, in order to make each configuration of the embodiment easier to understand, a part is enlarged or emphasized, or a part is simplified, and the actual structure, shape, scale, etc. may differ. .

<Applying device>
FIG. 1 is a plan view showing an example of a sticking device according to an embodiment. The sticking apparatus 1A shown in FIG. 1 mainly includes a substrate supply section 3, a sheet supply section 4A, a table 5, and a control device 500. The substrate supply unit 3 supplies the substrates 100 to the table 5 one by one. The sheet supply unit 4A supplies the sheets 200 to the table 5 one by one. The sticking apparatus 1</b>A sticks the sheet 200 to the substrate 100 on the table 5 . The control device 500 controls the operation of each part of the sticking device 1A. At least the substrate supply unit 3 and the table 5 of the sticking device 1A are provided on a base 10 installed on the installation surface F. As shown in FIG. A chamber 12 covering at least the table 5 is provided on the base 10 . In this embodiment, the chamber 12 covers the table 5, the substrate supply section 3, and part of the sheet supply section 4A from above. Note that the chamber 12 may be provided so as to cover only the portion of the table 5 where the substrate 100 and the sheet 200 are attached.

The substrate supply unit 3 supplies substrates 100 supplied from the outside of the attaching apparatus 1A to the table 5 one by one. The substrate 100 is formed in a predetermined shape such as a disk shape or a rectangular plate shape, and has an outer diameter dimension. In this embodiment, the substrate 100 is a silicon wafer, and is formed in a disc shape, for example. When the substrate 100 is disk-shaped, for example, it has an outer diameter of about 100 to 300 mm and a thickness of about 100 to 800 μm. The substrate supply section 3 includes a substrate storage section 31 , a substrate supply section 32 , a positioning stage 33 and a substrate transfer section 34 . The substrate storage unit 31 stores a plurality of substrates 100 supplied from the outside. The substrate storage section 31 is arranged at a predetermined position on the base 10 . The substrate storage unit 31 stores a plurality of substrates 100 stacked one above the other. The substrate supply unit 32 takes out the substrates 100 one by one from the substrate storage unit 31 . The substrate supply unit 32 supplies the substrates 100 to the positioning stage 33 one by one.

The substrate supply unit 32 includes a first substrate holder 321 and an arm 322. The first substrate holder 321 holds the substrate 100 . The first substrate holder 321 holds the upper surface of the substrate 100 by suction, for example. The first substrate holder 321 may, for example, suck the outer peripheral portion of the substrate 100 . The first substrate holder 321 is provided at the tip of the arm 322 . The arm 322 moves the first substrate holder 321 between the substrate storage section 31 and the positioning stage 33 by performing pivoting motion, telescopic motion, and vertical motion about the base end. After sucking and holding the substrate 100 stored in the substrate cassette 311 with the first substrate holder 321 , the substrate supply unit 32 operates the arm 322 to move the first substrate holder 321 onto the positioning stage 33 . After placing the substrate 100 held by the first substrate holder 321 on the positioning stage 33 , the substrate supply unit 32 transfers the substrate 100 onto the positioning stage 33 by canceling the adsorption of the substrate 100 .

The positioning stage 33 positions the mounted substrate 100 with a predetermined positional accuracy using an appropriate positioning mechanism. The positioning stage 33 positions the substrate 100 by, for example, clamping the outer peripheral portion of the mounted substrate 100 with a plurality of claws or the like from the radially outer side. The substrate transfer section 34 transfers the substrate 100 positioned on the positioning stage 33 to the table 5 . The substrate transfer section 34 includes a second substrate holder 341 and a holder moving mechanism 342 . A second substrate holder 341 holds the substrate 100 . The second substrate holder 341 holds the upper surface of the substrate 100 by suction, for example. The second substrate holder 341 sucks the outside of the region where the functional layer 202 is formed, for example, in the outer peripheral portion of the substrate 100 .

A holder moving mechanism 342 moves the second substrate holder 341 between the positioning stage 33 and the table 5 . The holder moving mechanism 342 includes an arm 343 and guide rails 344 . A second substrate holder 341 is attached to the tip of the arm 343 . A guide rail 344 moves the arm 343 horizontally between the positioning stage 33 and the table 5 . The arm 343 or the second substrate holder 341 attached to the arm 343 is vertically moved by a cylinder 345 (see FIG. 3).

FIG. 2 is a block diagram showing the functional configuration of the control device of the sticking device according to the embodiment. As shown in FIG. 2 , the control device 500 includes a substrate supply control section 501 that controls the operation of the substrate supply section 3 . The substrate supply unit 3 supplies the substrate 100 to the table 5 under the control of the substrate supply control unit 501 .

FIG. 3 is a diagram showing a state in which a substrate is placed on the table of the sticking device according to the embodiment. Specifically, first, the second substrate holder 341 shown in FIG. 1 sucks and holds the substrate 100 on the positioning stage 33 . Next, as shown in FIG. 3, the holder moving mechanism 342 is operated to move the second substrate holder 341 above the table 5 . The substrate 100 is placed on the table 5 by lowering the second substrate holder 341 with the cylinder 345 . After that, the second substrate holder 341 releases the adsorption of the substrate 100 . Then, the substrate 100 is transferred onto the table 5 . A substrate 100 is placed along the upper surface of the table 5 .

FIG. 4 is a plan view showing a sheet to be stuck by the sticking device according to the embodiment. FIG. 5 is a cross-sectional view showing a sheet to be stuck by the sticking device according to the embodiment. The sheet supply section 4A supplies the sheet 200 to the table 5. As shown in FIG. As shown in FIGS. 4 and 5, each sheet 200 is formed in a sheet-like, planar, rectangular or circular shape, for example. In other words, the sheet 200 is not fed out from a roll and continuous in a belt shape. Each sheet 200 has approximately the same size as the substrate 100 or larger external dimensions than the substrate 100 in plan view. For example, when each sheet 200 is rectangular in plan view, the vertical and horizontal dimensions X and Y are 100 to 350 mm, respectively, and when circular in plan view, the diameter is 100 to 350 mm. In this embodiment, the sheet 200 has a rectangular shape in plan view.

As shown in FIG. 5, the sheet 200 has a base film 201, a functional layer 202, and a cover film 203 laminated in this order. A base film 201 is provided as a base material of the sheet 200 . Examples of materials forming the base film 201 include polyester films, polyethylene films, polypropylene films, polytetrafluoroethylene (PTFE) films, and the like. The thickness T1 of the base film 201 is preferably 10-100 μm, for example. The functional layer 202 is formed on the base film 201 and has a predetermined function as will be detailed later. In this embodiment, the functional layer 202 has a thickness T2 of, for example, 20-1000 μm. The functional layer 202 may be formed on the entire surface of the base film 201 or may be formed on a portion of the base film 201 in a range slightly smaller than the outer diameter of the substrate 100 .

The cover film 203 is provided so as to cover at least the entire functional layer 202 . When the functional layer 202 is formed on part of the base film 201 , the cover film 203 may be provided so as to cover the entire base film 201 . Thereby, the functional layer 202 is sandwiched between the base film 201 and the cover film 203 . The cover film 203 may be made of a light shielding material. Examples of materials forming the cover film 203 include polyester films, polyethylene films, polypropylene films, PTFE films, and the like. The thickness T3 of the cover film 203 is preferably 10-100 μm, for example.

In this embodiment, the functional layer 202 is, for example, a photosensitive resin layer and functions as a photoresist for forming a predetermined pattern on the substrate 100 by photolithography. The functional layer 202 may be either a positive or negative photosensitive resin layer. Note that the functional layer 202 is not limited to a photosensitive resin layer, and may be formed of a material having other functions. When the functional layer 202 is a photosensitive resin layer, the functional layer 202 is made of, for example, a photosensitive resin composition. As the photosensitive resin composition, for example, a varnish-like photosensitive resin composition may be used. A varnish-like photosensitive resin composition is applied on the base film 201 to a predetermined film thickness. As the photosensitive resin composition that forms the functional layer 202, a known composition can be appropriately adopted. The photosensitive resin composition may contain, for example, a film property imparting polymer, a photopolymerizable compound having an ethylenically unsaturated group, and a photopolymerization initiator. The photosensitive resin layer may be, for example, a chemically amplified positive or negative photosensitive composition containing a photoacid generator.

Film-imparting polymers include, for example, acrylic acid or methacrylic acid, methyl acrylate, methyl methacrylate, ethyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, n-propyl acrylate, n-methacrylate, propyl, iso-propyl acrylate, iso-propyl methacrylate, n-butyl acrylate, n-butyl methacrylate, iso-butyl acrylate, iso-butyl methacrylate, sec-butyl acrylate, sec-butyl methacrylate, tert-butyl acrylate, tert-butyl methacrylate, pentyl acrylate, pentyl methacrylate, hexyl acrylate, hexyl methacrylate, heptyl acrylate, heptyl methacrylate, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, etc. A vinyl copolymer obtained by copolymerizing one or more of alkyl methacrylate or alkyl acrylate with a monomer copolymerizable therewith may be mentioned.

Examples of the photopolymerizable compound having an ethylenically unsaturated group include compounds obtained by adding an α,β-unsaturated carboxylic acid to a polyhydric alcohol (tetraethylene glycol diacrylate, pentapropylene glycol diacrylate, trimethylol propane diacrylate, trimethylol triacrylate, tetramethylol methane triacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, etc.), compounds obtained by adding α,β-unsaturated carboxylic acids to glycyldyl group-containing compounds ( Trimethylolpropane triglycidyl ether triacrylate, bisphenol A diglycidyl ether diacrylate, etc.), polyvalent carboxylic acid (phthalic anhydride, etc.) and a compound having a hydroxyl group and an ethylenically unsaturated group (β-hydroxyethyl acrylate, etc.) Ester compounds, alkyl esters of acrylic acid (methyl acrylate, ethyl acrylate, butyl acrylate, 2-ethylhexyl acrylate, etc.), obtained by reacting trimethylhexamethylene isocyanate with dihydric alcohol and dihydric acrylic acid monoester 2,2-bis(4-(acryloxyethoxy)phenyl)propane, 2,2-bis(4-(acryloxydiethoxy)phenyl)propane, 2,2-bis(4-( Examples thereof include 2,2-bis(4-(acryloxypolyethoxy)phenyl)propane such as acryloxypentaethoxy)phenyl)propane, and methacrylic acid derivatives corresponding to the above acrylic acid derivatives.

Examples of photopolymerization initiators include benzophenone, N,N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), N,N'-tetramethyl-4,4'-diaminobenzophenone, 4-methoxy- Aromatic ketones such as 4′-dimethylaminobenzophenone, 2-ethylanthraquinone and phenanthrenequinone; benzoin ethers such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether; benzoins such as methylbenzoin and ethylbenzoin; benzyl derivative, 2-(o-chlorophenyl)-4,5-diimidazole dimer, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole dimer, 2-(o- fluorophenyl)-4,5-diphenylimidazole dimer, 2-(o-methoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer 2,4-di(p-methoxyphenyl)-5-phenylimidazole dimer, 2-(2,4-dimethoxyphenyl)-4,5-diphenylimidazole dimer, 2-(p-methylmercapto 2,4,5-triarylimidazole dimers such as phenyl)-4,5-diphenylimidazole dimers; acridine derivatives such as 9-phenylacridine and 1,7-bis(9-acridinyl)heptane; , can be used alone or in combination of two or more.

As shown in FIG. 1, the sheet supply section 4A includes a storage section 40, a transport section 60A, a cover film peeling section 70, and a precut section 80. Storage unit 40 stores a plurality of sheets 200 . The transport unit 60A transports the sheets 200 from the storage unit 40 to the table 5 one by one. The cover film peeling unit 70 peels off the cover film 203 of the sheet 200 prior to attaching the sheet 200 to the substrate 100 placed on the table 5 . The precut section 80 cuts the sheet 200 according to the outer shape of the substrate 100 before supplying the sheet 200 to the table 5 . In the present embodiment, the storage section 40, the cover film peeling section 70, and the precut section 80 are arranged linearly (in series) with the table 5 in the first direction D1 along the horizontal plane in plan view. In this embodiment, the cover film peeling portion 70 and the pre-cut portion 80 are separately arranged side by side. However, the configuration is not limited to this. The cover film peeling portion 70 and the precut portion 80 may be provided at the same place. For example, the constituent members (functions) of the pre-cut portion 80 may be added with the constituent members (functions) of the cover film peeling portion 70 . In this case, the sheet 200 is cut according to the outer shape of the substrate 100 and the cover film 203 of the sheet 200 is peeled off at the same place. Note that the cover film peeling portion 70 and the pre-cut portion 80 may be provided at the same location, which is the same for other embodiments (modifications) described below.

FIG. 6 is an elevational view showing the configuration of the storage section of the embodiment. As shown in FIG. 6, the storage unit 40 includes a cassette table 41 installed on the installation surface F, a cassette 42 placed on the cassette table 41, and a cassette holder 43. As shown in FIG. The storage unit 40 (cassette table 41 ) is preferably provided outside the base 10 and the chamber 12 . Heat is generated in the chamber 12 when the functional layer 202 of the sheet 200 is attached to the substrate 100 on the table 5 . By providing the storage section 40 outside the chamber 12 , it is possible to suppress the influence of the heat inside the chamber 12 on the functional layers 202 of the plurality of sheets 200 stored in the cassette 42 .

The cassette 42 accommodates a plurality of sheets 200 stacked vertically. In this embodiment, the cassette 42 accommodates the base film 201 of each sheet 200 facing upward. The cassette 42 includes a bottom plate 42a and side plates 42b. The cassette 42 opens at least upward. The bottom plate 42 a is arranged along the upper surface of the cassette base 41 . The bottom plate 42a is, for example, rectangular in plan view. A plurality of side plates 42b are provided in the circumferential direction on the outer peripheral portion of the bottom plate 42a. A plurality of side plates 42b may be provided on the outer peripheral portion of the bottom plate 42a at intervals in the circumferential direction. The side plate 42b extends vertically upward from the outer peripheral portion of the bottom plate 42a.

As shown in FIGS. 1 and 6, the cassette holding portion 43 detachably holds the cassette 42 placed on the upper surface of the cassette table 41 . The cassette holding portion 43 includes, for example, a pair of holding claws 43a and a cassette stopper 43b. A pair of holding claws 43a and a cassette stopper 43b protrude upward from the upper surface of the cassette table 41. As shown in FIG. A pair of holding claws 43 a sandwich the lower end of the cassette 42 . For example, the pair of holding claws 43a sandwiches the lower end of the cassette 42 from both sides in a second direction D2 perpendicular to the first direction D1 in the horizontal plane. The cassette stopper 43b, for example, restricts movement of the cassette 42 to one side in the first direction D1. The cassette holding portion 43 holds (fixes) the cassette 42 by sandwiching the cassette 42 from both sides with the pair of holding claws 43a while the cassette 42 is abutted against the cassette stopper 43b. The cassette holding portion 43 releases the fixation of the cassette 42 to the cassette base 41 by opening the pair of holding claws 43a. The configuration of the cassette holding portion 43 is not limited to that described above, and can be changed to another configuration as appropriate.

A plurality of cassettes 42 are prepared. A plurality of cassettes 42 are sequentially placed on the cassette table 41 . For this reason, a suitable cassette changing device is provided in which the cassette 42 containing the plurality of sheets 200 is set on the cassette table 41 and the empty cassette 42 from which the plurality of sheets 200 have been taken out is removed from the cassette table 41. (not shown).

FIG. 7 is a cross-sectional view showing the configuration of part of the transport section of the embodiment. As shown in FIG. 1, the transport section 60A transports the sheet 200 between the cassette 42 of the storage section 40, the cover film peeling section 70, the precut section 80, and the table 5. As shown in FIG. As shown in FIG. 7 , the conveying section 60A includes a suction section 61 that holds the sheet 200 , a lid section 62 , and a moving mechanism 63 that moves the suction section 61 and the lid section 62 .

The suction part 61 is plate-shaped and has a plurality of suction holes (not shown) for sucking the sheet 200 on its lower surface. The suction unit 61 sucks the sheet 200 with a plurality of suction holes by a negative pressure source such as a vacuum pump (not shown). The adsorption portion 61 adsorbs the upper surface of the sheet 200 . In this embodiment, the suction unit 61 suctions the base film 201 of the sheet 200 . For example, the plurality of suction holes of the suction portion 61 may be provided in the entire area of the sheet 200 or may be provided only in a part of the sheet 200 , such as the central portion of the sheet 200 or the annular area of the outer peripheral portion.

The lid portion 62 is provided above the adsorption portion 61 . The lid portion 62 integrally has an upper plate 62a covering the upper side of the adsorption portion 61 and an upper peripheral wall 62b extending downward from the outer peripheral portion of the upper plate 62a. A support member 62c that supports the adsorption portion 61 is provided on the lower surface of the upper plate 62a. The upper peripheral wall 62 b is continuously formed in the circumferential direction along the outer peripheral portion of the upper plate 62 a so as to surround the outer peripheral portion of the adsorption portion 61 .

The moving mechanism 63 includes a slide rail 63a, a support arm 63b, and an elevating cylinder 63c provided on the support arm 63b. As shown in FIG. 1 , the slide rail 63 a is arranged laterally of the storage section 40 , the pre-cut section 80 , the cover film peeling section 70 and the table 5 . The slide rail 63a linearly extends in the first direction D1 in which the storage section 40, the precut section 80, the cover film peeling section 70, and the table 5 are arranged. As shown in FIG. 6, the end of the slide rail 63a on the other side in the first direction D1 protrudes outward from the chamber 12 through an opening 12h formed in the chamber 12. As shown in FIG. The support arm 63b is provided movably in the first direction D1 along the slide rail 63a. As shown in FIG. 7, the elevating cylinder 63c is provided at the tip of the support arm 63b. The elevating cylinder 63c supports the lid portion 62 from above. The lifting cylinder 63c moves the lid portion 62 and the suction portion 61 up and down.

As shown in FIG. 2, the control device 500 includes a conveyance control section 502 that controls the operation of the conveyance section 60A of the sheet supply section 4A. The conveying unit 60A shown in FIG. 1 conveys the sheet 200 under the control of the conveying control unit 502. As shown in FIG. As shown in FIG. 6, the conveying section 60A conveys the uppermost sheet 200 among the plurality of sheets 200 accommodated in the cassette 42. As shown in FIG. Specifically, first, the support arm 63b of the moving mechanism 63 moves along the slide rail 63a to dispose the suction portion 61 above the cassette 42 .

Next, the lifting cylinder 63c lowers the suction portion 61, and the lower surface of the suction portion 61 is pressed against the upper surface of the uppermost sheet 200 stored in the cassette 42, as indicated by the two-dot chain line in FIG. In this state, the adsorption portion 61 adsorbs the sheet 200 and holds the sheet 200 . Subsequently, the lifting cylinder 63c lifts the suction portion 61 holding the sheet 200. As shown in FIG. As a result, one sheet 200 at the top of the cassette 42 is taken out. The conveying unit 60A moves the support arm 63b along the slide rail 63a while adsorbing the taken out sheet 200, thereby transferring the sheet 200 through the opening 12h to the cover film peeling unit 70 and the pre-cutting unit 80 in the chamber 12. , to the table 5 in sequence.

By the way, when the sheets 200 are taken out from the cassette 42 as described above, the height of the uppermost sheet 200 in the cassette 42 gradually decreases. For this reason, the sticking apparatus 1A may include a height detection section 47 that detects the height of the uppermost sheet 200 among the plurality of sheets 200 stored in the cassette 42 . For example, an optical sensor can be used as the height detector 47 .

The transport control unit 502 controls the transport unit 60A so that the uppermost sheet 200 stored in the cassette 42 is taken out from the cassette 42 based on the detection result of the height detection unit 47 . Specifically, from the state in which the adsorption portion 61 is arranged above the cassette 42 , the adsorption portion 61 is lowered by the elevating cylinder 63 c so that the lower surface of the adsorption portion 61 is moved to the uppermost sheet 200 accommodated in the cassette 42 . , the height of the uppermost sheet 200 detected by the height detection unit 47 is adjusted. Note that the height detection unit 47 does not necessarily directly detect the height of the uppermost sheet 200 with an optical sensor or the like. , the dimension for lowering the suction portion 61 may be adjusted according to the number of times.

FIG. 8 is a cross-sectional view showing the configuration of the cover film peeling portion according to the embodiment. The cover film peeling unit 70 peels off the cover film 203 of the sheet 200 before supplying the sheet 200 to the table 5 . The cover film peeling section 70 is arranged, for example, between the storage section 40 and the precut section 80 . As shown in FIG. 8, the cover film peeling section 70 includes a suction rod 71 and a rod operating mechanism (not shown).

The suction rod 71 sucks the cover film 203 of the sheet 200 held by the suction portion 61 from below. The suction rod 71 sucks the cover film 203 with a negative pressure from a negative pressure source (not shown) in a state in which the tip portion is abutted against the lower surface of the cover film 203 . A rod actuating mechanism (not shown) moves the suction rod 71 . A rod operating mechanism (not shown) moves the suction rod 71 by an appropriate mechanism such that the suction rod 71 attracts, for example, the outer peripheral portion of the cover film 203 . A rod operating mechanism (not shown) moves the suction rod 71 sucking the cover film 203 , for example, downward and toward the opposite side of the sheet 200 in the radial direction. As a result, the cover film 203 sucked by the sucking rod 71 is peeled off from the sheet 200 . By sucking the outer peripheral portion of the cover film 203, the cover film 203 is easily peeled off from the sheet 200. - 特許庁The conveying section 60</b>A conveys the sheet 200 from which the cover film 203 has been peeled off by the cover film peeling section 70 to the table 5 .

As shown in FIG. 1 , the cover film peeling section 70 may include a cover film recovery section 75 . The cover film collecting unit 75 sucks the cover film 203 with the suction rod 71 and peels it off. The cover film collection unit 75 is provided outside the base 10, for example. The adsorption rod 71 that has adsorbed the peeled cover film 203 is moved above the cover film recovery section 75 by a rod operating mechanism (not shown), and the adsorption by the adsorption rod 71 is released. Then, the cover film 203 drops and is recovered by the cover film recovery section 75 .

FIG. 9 is a cross-sectional view showing the configuration of the precut portion according to the embodiment. As shown in FIG. 9 , the precut section 80 cuts the sheet 200 according to the outer shape of the substrate 100 . The pre-cutting section 80 cuts the sheet 200 into a circular shape having, for example, the same diameter as the substrate 100 which is circular in plan view, or a slightly smaller diameter than the substrate 100 . The pre-cutting section 80 is arranged on the conveying path of the sheet 200 from the storage section 40 to the table 5 by the conveying section 60A. In this embodiment, the precut section 80 is arranged, for example, between the cover film peeling section 70 and the table 5 .

The precut section 80 includes a plate 81 and a cutter mechanism 82. A plate 81 is supported on the base 10 . The plate 81 has a circular hole 81h in plan view. The cutter mechanism 82 includes a cutter 82a, a cutter support member 82b, and a rotating shaft 82c. The cutter 82a is arranged radially inside the hole 81h. The cutter 82 a is provided so as to protrude upward from the upper surface of the plate 81 . The cutter support member 82b supports the cutter 82a. The cutter support member 82b is provided so as to be vertically movable, thereby raising and lowering the cutter 82a. The rotating shaft 82c is connected to the cutter support member 82b. The rotating shaft 82c rotates the cutter support member 82b about a vertical axis by a motor (not shown).

In the pre-cutting section 80, the sheet 200 held by the suction section 61 of the conveying section 60A is cut by the cutter mechanism 82. The transport unit 60</b>A moves the sheet 200 above the plate 81 under the control of the transport control unit 502 . The conveying portion 60A lowers the suction portion 61 and supports the outer peripheral portion of the sheet 200 held by the suction portion 61 on the upper surface of the plate 81 radially outside the hole 81h. In the pre-cutting section 80, the rotary shaft 82c is rotated by a motor while the cutter 82a is protruding above the upper surface of the plate 81. As shown in FIG. Then, the cutter support member 82b rotates around the vertical axis, and the cutter 82a supported by the cutter support member 82b rotates along the inner peripheral portion of the hole 81h in a circular trajectory in plan view. With this configuration, the sheet 200 is cut into a circular shape in plan view. After precutting by the precutting section 80 is completed, the conveying section 60</b>A conveys the sheet 200 sucked by the sucking section 61 toward the table 5 .

FIG. 10 is a cross-sectional view showing the configuration of the resection sheet recovery section according to the embodiment. As shown in FIG. 10, on the plate 81 of the precut portion 80, the outer peripheral portion of the cut sheet 200 (hereinafter referred to as cut sheet 200z) remains. It is preferable that the pre-cut section 80 includes an appropriately configured excision sheet collecting mechanism 85 in order to collect the excision sheet 200z. The resection sheet collection mechanism 85 includes a suction rod 86 that sucks the resection sheet 200z from above, a rod operating mechanism (not shown) that operates the suction rod 86, and a resection sheet collection section 88.

The suction rod 86 sucks the cutting sheet 200z with a negative pressure from a negative pressure source (not shown) while its tip is abutted against the upper surface of the cutting sheet 200z. A rod actuation mechanism (not shown) moves the suction rod 86 . As a result, the cut sheet 200z sucked by the sucking rod 86 is collected. The collected cut sheet 200z is appropriately collected in the external cut sheet collection unit 88 (see FIG. 1).

FIG. 11 is a cross-sectional view showing the configuration of the table according to the embodiment. As shown in FIG. 11 , the table 5 holds the substrates 100 supplied one by one by the substrate supply unit 3 . The table 5 is supported on the base 10 via a table lifting mechanism 51 . The table lifting mechanism 51 lifts and lowers the table 5 in the vertical direction. The table 5 may fix the placed substrate 100 by suction or by an appropriate fixing mechanism.

The transport unit 60A transports the sheet 200 from which the cover film 203 has been peeled off to the table 5. The transport unit 60A attaches the sheet 200 to the substrate 100 placed on the table 5 . The transport unit 60A attaches the sheet 200 to the substrate 100 with the functional layer 202 of the sheet 200 facing downward. Specifically, in the transport unit 60A, the support arm 63b of the moving mechanism 63 moves along the slide rail 63a under the control of the transport control unit 502, and the adsorption unit 61 holding the sheet 200 moves above the table 5. Move to position. Next, the lifting cylinder 63 c lowers the adsorption portion 61 and affixes the held sheet 200 to the substrate 100 placed on the table 5 . At this time, at least one of the lifting cylinder 63c and the table lifting mechanism 51 may press the substrate 100 and the functional layer 202 of the sheet 200 from above and below with a predetermined pressure. The table 5 may incorporate a heater (not shown) or the like for heating the substrate 100 and the functional layer 202 of the sheet 200 attached to the substrate 100 .

The table 5 includes a cup portion 55. The cup portion 55 integrally has a lower plate 55a and a lower peripheral wall 55b. The lower plate 55a is arranged below the table 5 with a space therebetween. The lower plate 55a is provided to cover the table 5 from below. The lower peripheral wall 55b rises upward from the outer peripheral portion of the lower plate 55a. The lower peripheral wall 55 b is continuously formed in the circumferential direction along the outer peripheral portion of the lower plate 55 a so as to surround the outer peripheral portion of the table 5 . The cup portion 55 surrounds the table 5 and opens upward.

In the cup portion 55, the lower end of the upper peripheral wall 62b of the lid portion 62 provided in the transport portion 60A contacts the upper end of the lower peripheral wall 55b in a state where the sheet 200 is attached to the substrate 100 on the table 5. Thereby, a closed space S is formed between the lid portion 62 and the cup portion 55 . The table 5 includes a vacuum pump 66 for reducing the pressure in the closed space S between the lid portion 62 and the cup portion 65 . As a result, the substrate 100 and the functional layer 202 of the sheet 200 are attached with good quality while the closed space S is in a reduced pressure atmosphere.

The sticking device 1A may further include a base film peeling section 90. The base film peeling section 90 peels off the base film 201 after the functional layer 202 of the sheet 200 is attached to the substrate 100 . The base film peeling unit 90 is arranged, for example, on the table 5 or in the vicinity thereof. The base film peeling unit 90 peels the base film 201 from the functional layer 202 attached to the substrate 100 on the table 5, for example.

FIG. 12 is a cross-sectional view showing the configuration of the base film peeling portion according to the embodiment. As shown in FIG. 12 , the base film peeling section 90 includes a suction rod 91 that sucks the base film 201 from above and a rod operating mechanism (not shown) that operates the suction rod 91 . The suction rod 91 sucks the base film 201 with a negative pressure from a negative pressure source (not shown) in a state in which the tip portion is abutted against the upper surface of the base film 201 . A rod operating mechanism (not shown) moves the suction rod 91 by an appropriate mechanism. A rod actuating mechanism (not shown) moves the suction rod 91 so that, for example, the tip of the suction rod 91 suctions the outer peripheral portion of the base film 201 .

FIG. 13 is a cross-sectional view showing a state in which the base film is peeled off by the base film peeling portion according to the embodiment. A rod operating mechanism (not shown) moves the suction rod 91 sucking the base film 201 , for example, upward and toward the opposite side of the sheet 200 in the radial direction. As a result, the base film 201 sucked by the sucking rod 91 is peeled off. As shown in FIG. 13, the substrate 100 to which the functional layer 202 of the sheet 200 is attached remains on the table 5 . 60 A of conveyance parts carry out the board|substrate 100 with which the functional layer 202 was affixed outside 1 A of sticking apparatuses.

The suction rod 91 sucks the outer peripheral portion of the base film 201, so that the base film 201 can be easily peeled off. Such a base film peeling section 90 can be provided near the table 5, for example. The base film peeling section 90 may be provided independently at a position other than the table 5 .

As shown in FIG. 1, the sticking device 1A may include a base film collecting section 95 that collects the base film 201 that has been sucked and peeled off by the suction rod 91 . The base film collecting section 95 is provided outside the base 10, for example. A rod operating mechanism (not shown) moves the suction rod 91 sucking the peeled base film 201 to above the base film collecting section 95 . In this state, the suction by the suction rod 91 is released, so that the base film 201 drops and is collected by the base film collecting section 95 .

<Affixing method>
The lamination method of the present embodiment includes placing the substrate 100 on the table 5, and storing the sheet 200 in which the base film 201, the functional layer 202, and the cover film 203 are laminated in this order. 200 is conveyed onto the substrate 100 on the table 5, the cover film 203 is peeled off from the sheet 200 during transportation, and the sheet 200 with the functional layer 202 exposed by peeling the cover film 203 is attached to the substrate 100. including attaching.

FIG. 14 is a flow chart showing the flow of the sticking method according to the embodiment. As shown in FIG. 14, the sticking method in this embodiment has the following steps S1 to S7. In step S<b>1 , the substrate 100 is placed on the table 5 . First, the first substrate holder 321 of the substrate supply section 32 sucks and holds the substrate 100 stored in the substrate cassette 311 . Subsequently, the substrate supply unit 32 moves the substrate 100 held by the first substrate holder 321 to the positioning stage 33 and positions the substrate 100 . After the positioning of the substrate 100 , the adsorption and holding of the substrate 100 by the first substrate holder 321 is released. Next, as shown in FIG. 3 , the second substrate holder 341 of the substrate supply section 32 sucks and holds the substrate 100 on the positioning stage 33 and moves the substrate 100 onto the table 5 .

In step S2, the sheets 200 are taken out one by one from the storage unit 40. For this purpose, first, as shown in FIG. 6, the adsorption section 61 of the transport section 60A is arranged above the cassette 42 by the moving mechanism 63. Then, as shown in FIG. Next, as shown in FIG. 7, the suction portion 61 is lowered by the lifting cylinder 63c, the sheet 200 is suctioned by the suction portion 61, and the sheet 200 is held. Subsequently, the suction unit 61 holding the sheet 200 is raised by the moving mechanism 63 . As a result, one sheet 200 at the top of the cassette 42 is taken out. Conveying section 60A conveys sheet 200 to cover film peeling section 70 while adsorbing sheet 200 taken out.

In step S3, the cover film 203 is peeled off from the sheet 200 while being conveyed to the table 5. First, as shown in FIG. 8, the tip of the adsorption rod 71 of the cover film peeling section 70 is abutted against the lower surface of the cover film 203 from below the sheet 200 adsorbed and held by the adsorption section 61 to remove the cover film. 203 is adsorbed.

Next, a rod operating mechanism (not shown) moves the adsorption rod 71 that has adsorbed the cover film 203 downward, for example, toward the opposite side of the sheet 200 in the radial direction. As a result, the cover film 203 sucked by the sucking rod 71 is peeled off from the sheet 200 . In this state, the functional layer 202 of the sheet 200 is exposed downward. The conveying section 60</b>A conveys the sheet 200 from which the cover film 203 has been peeled off by the cover film peeling section 70 to the precut section 80 . Also, the peeled cover film 203 is recovered by the cover film recovery unit 75 .

In step S4, the precut section 80 cuts the sheet 200 held by the suction section 61 of the transport section 60A. For this purpose, as shown in FIG. 9, the sheet 200 held by the suction portion 61 of the transport portion 60A is cut by the cutter mechanism 82. As shown in FIG. The conveying unit 60</b>A arranges the adsorption unit 61 holding the sheet 200 above the plate 81 by using the moving mechanism 63 . Next, the lifting cylinder 63c lowers the adsorption portion 61, and the outer peripheral portion of the held sheet 200 is placed on the plate 81. As shown in FIG. The pre-cut section 80 rotates the rotating shaft 82c in a state in which the cutter 82a protrudes above the upper surface of the plate 81, and rotates the cutter support member 82b around the vertical axis. As a result, the cutter 82a supported by the cutter support member 82b rotates along the outer peripheral portion of the plate 81 in a circular trajectory in plan view, and the sheet 200 is cut into a circular shape in plan view.

In step S5, the pre-cut sheet 200 is attached to the substrate 100. For this purpose, after the sheet 200 is cut by the pre-cutting section 80, the conveying section 60A moves the suction section 61 holding the sheet 200 cut into a circular shape in plan view above the table 5, as shown in FIG. . Next, the suction unit 61 is lowered, and the held sheet 200 is attached to the substrate 100 placed on the table 5 . At this time, the substrate 100 and the functional layer 202 of the sheet 200 are pressed against each other with a predetermined pressure between the suction unit 61 and the table 5 by at least one of the lifting cylinder 63c and the table lifting mechanism 51. FIG. Also, the lower end of the upper peripheral wall 62b of the lid portion 62 abuts the upper end of the lower peripheral wall 55b of the cup portion 55, and a closed space S is formed between the lid portion 62 and the cup portion 55. As shown in FIG. Subsequently, the closed space S is made into a reduced pressure atmosphere by the vacuum pump 66 . In this state, the functional layer 202 of the sheet 200 is attached to the substrate 100 .

In step S6, after attaching the functional layer 202 of the sheet 200 to the substrate 100, the base film 201 is peeled off. For this, as shown in FIG. 12, the base film 201 on the table 5 is sucked from above by the suction rod 91 of the base film peeling section 90 . Next, a rod operating mechanism (not shown) moves the adsorption rod 91 that has adsorbed the base film 201 , for example, upward and toward the opposite side of the sheet 200 in the radial direction. As a result, the base film 201 sucked by the sucking rod 91 is peeled off. The peeled base film 201 sucked by the suction rod 91 is recovered by the base film recovery section 95 . In addition, in this step S5, the peeling of the base film 201 may be performed manually (manually).

After peeling off the base film 201 in step S6, the process may return to step S2, sequentially supply a plurality of sheets 200 to the substrate 100, and laminate the plurality of functional layers 202 on the substrate 100.

In step S7, the substrate 100 with the functional layer 202 attached is carried out from the attaching apparatus 1A to a post-process and sent to a lithography process (exposure process) for forming a predetermined pattern. If the functional layer 202 is a positive photosensitive resin, the lithography process may be performed after the functional layer 202 is baked. Further, when the functional layer 202 is a negative photosensitive resin, the lithography process may be performed without peeling off the base film 201 in step S6 in order to prevent the influence of oxygen inhibition.

As described above, the sticking apparatus 1A according to the present embodiment includes the storage unit 40 that stores the sheet 200 and the transport unit 60A that transports the sheet 200 from the storage unit 40 to the table 5. The transport unit 60A The sheet 200 with the cover film 203 peeled off by the cover film peeling unit 70 is conveyed, and the sheet 200 with the functional layer 202 exposed is attached to the substrate 100 on the table 5 . A sheet 200 in which the base film 201, the functional layer 202, and the cover film 203 are laminated in this order is in the shape of a sheet, not in the shape of a roll. Therefore, it is possible to suppress problems that may affect the quality, such as the occurrence of wrinkles in the film forming the sheet 200 and the winding misalignment. Therefore, it is possible to attach the functional layer 202 to the substrate 100 with good quality.

The pasting method according to the present embodiment includes placing the substrate 100 on the table 5, conveying the sheet 200 from the storage unit 40 that stores the sheet 200 onto the substrate 100 on the table 5, and It includes peeling the cover film 203 from the sheet 200 and attaching the sheet 200 with the functional layer 202 exposed by peeling the cover film 203 to the substrate 100 . With this configuration, the sheet 200 is in the shape of a sheet and not in the shape of a roll. Therefore, it is possible to attach the functional layer 202 to the substrate 100 with good quality.

<Other Forms of Applicator>
In the above-described embodiment, the storage section 40 of the sticking apparatus 1A is arranged outside the chamber 12, and the conveying section 60A takes out the sheet 200 from the storage section 40 and conveys it. Not limited. 15 to 18 are plan views showing sticking devices according to other embodiments, respectively. In the following description of another embodiment shown in FIGS. 15 to 18, the same or equivalent components as those in the above-described pasting apparatus 1A are denoted by the same reference numerals, and their description will be omitted or simplified.

FIG. 15 is a plan view showing an example of a sticking device according to another embodiment. As shown in FIG. 15, the sticking apparatus 1B mainly includes a substrate supply section 3, a sheet supply section 4B, a table 5, and a control device 500. As shown in FIG. A storage unit 40 (cassette table 41 ) of the sheet supply unit 4B is arranged outside the chamber 12 . The transport section 60B of the sheet supply section 4B includes a sheet take-out section 610 and a sheet transport section 620 . The sheet take-out unit 610 takes out the sheets 200 one by one from the cassette 42 of the storage unit 40 and conveys them to the cover film peeling unit 70 . The sheet conveying section 620 sequentially conveys the sheet 200 taken out by the sheet taking-out section 610 from the cover film peeling section 70 to the pre-cutting section 80 and the table 5 .

The sheet take-out part 610 is arranged outside the chamber 12 . The sheet take-out section 610 is adjacent to the storage section 40 in a second direction D2 that intersects the first direction D1 in which the storage section 40, the precut section 80, the cover film peeling section 70, and the table 5 are arranged in a plan view. placed. The sheet take-out portion 610 includes a pedestal portion 611 , an arm 612 and a sheet holding member 613 .

The pedestal part 611 is installed on the installation surface F. The arm 612 is provided on the base portion 611 . The arm 612 is configured so as to be capable of turning in a horizontal plane, swinging in a vertical plane, and expanding and contracting in the extension direction of the arm 612 about the base end portion on the pedestal portion 611 side. The sheet holding member 613 is supported by the tip of the arm 612 . The sheet holding member 613 has a plate shape and has a plurality of suction holes (not shown) for sucking the sheet 200 on its lower surface. The sheet holding member 613 sucks the sheet 200 with a plurality of suction holes by a negative pressure source such as a vacuum pump (not shown). The sheet holding member 613 attracts the upper surface of the sheet 200 . The sheet take-out portion 610 sucks and takes out the uppermost sheet 200 among the plurality of sheets 200 stored in the cassette 42 . The sheet takeout section 610 moves the taken out sheet 200 to the cover film peeling section 70 .

The sheet conveying section 620 conveys the sheet 200 between the cover film peeling section 70 , the precut section 80 and the table 5 . The sheet conveying section 620 includes an adsorption section 61 that holds the sheet 200 , a lid section 62 , and a moving mechanism 63 that moves the adsorption section 61 and the lid section 62 . The sheet conveying unit 620 sucks and holds the sheet 200 from which the cover film 203 has been peeled off with the sucking unit 61 . The sheet conveying section 620 sequentially conveys the sheet to the precut section 80 and the table 5 by the operation of the moving mechanism 63 .

FIG. 16 is a plan view showing an example of a sticking device according to another embodiment. As shown in FIG. 16, a storage section 40C (cassette table 41) is arranged inside the chamber 12 in the sheet supply section 4C of the sticking apparatus 1C. The storage unit 40C is arranged on one side of the cover film peeling unit 70 in the second direction D2. The transport section 60C of the sheet supply section 4C includes a sheet take-out section 610C and a sheet transport section 620. As shown in FIG. The sheet takeout section 610C takes out the sheets 200 one by one from the cassette 42 of the storage section 40C provided in the chamber 12 . The sheet take-out portion 610C is arranged inside the chamber 12 . The sheet take-out portion 610C is arranged on the other side in the second direction D2 with respect to the storage portion 40C.

The sheet take-out portion 610C includes an arm 612C and a sheet holding member 613. Arm 612C is provided on base 10 . The arm 612C is configured to be appropriately capable of expanding and contracting in the second direction D2, swinging in the vertical plane, and the like, centering on the base end portion. The sheet holding member 613 is supported by the tip of the arm 612C. The sheet take-out portion 610</b>C sucks and takes out the uppermost sheet 200 among the plurality of sheets 200 stored in the cassette 42 . The sheet take-out portion 610C moves the taken-out sheet 200 in the second direction D2 to the cover film peeling portion 70 by the operation of the arm 612C.

FIG. 17 is a plan view showing an example of a sticking device according to another embodiment. As shown in FIG. 17, the sticking device 1D mainly includes a substrate supply section 3, a sheet supply section 4D, a table 5, and a control device 500. As shown in FIG. A storage section 40 (cassette table 41 ) of the sheet supply section 4</b>D is arranged outside the chamber 12 . In this embodiment, the sheet supply section 4D includes, as the storage section 40, a first storage section 40P and a second storage section 40Q. The first storage section 40P and the second storage section 40Q are arranged outside the chamber 12 . The first storage unit 40P is arranged on one side in the second direction D2. The second storage section 40Q is arranged on the other side in the second direction D2. The first storage unit 40P and the second storage unit 40Q each include a cassette table 41, a cassette 42 placed on the cassette table 41, and a cassette holder 43. As shown in FIG.

The transport section 60D of the sheet supply section 4D includes a sheet take-out section 610D and a sheet transport section 620. The sheet take-out portion 610D is arranged outside the chamber 12 . The sheet take-out portion 610D is arranged between the first storage portion 40P and the second storage portion 40Q in the second direction D2. The sheet take-out portion 610D includes a pedestal portion 611, a first arm 612A, a second arm 612B, a first sheet holding member 613A and a second sheet holding member 613B.

The first arm 612A and the second arm 612B are provided on the base portion 611. Each of the first arm 612A and the second arm 612B can appropriately perform operations such as turning in a horizontal plane, swinging in a vertical plane, and expansion and contraction in the extension direction, centering on the base end portion on the pedestal portion 611 side. is configured to The first sheet holding member 613A and the second sheet holding member 613B are supported by the tip portions of the first arm 612A and the second arm 612B.

The first sheet holding member 613A takes out the sheets 200 one by one from the cassette 42 of the first storage section 40P. The second sheet holding member 613B takes out the sheets 200 one by one from the cassette 42 of the second storage section 40Q. By alternately operating the first arm 612A and the second arm 612B so as not to interfere with each other, the sheets 200 can be taken out more quickly from the plurality of first storage units 40P and second storage units 40Q. .

In the configuration as described above, even if the transport section 60D arranged between the first storage section 40P and the second storage section 40Q is provided with only a pair of arms 612 and sheet holding members 613, good. In this case, the sheets 200 may be taken out one by one from the cassettes 42 of the first storage section 40P and the second storage section 40Q by a pair of arms 612 and sheet holding members 613. FIG.

Also, in the above embodiment, the sheets 200 are alternately taken out from the first storage section 40P and the second storage section 40Q, but this is not the only option. For example, in one of the first storage unit 40P and the second storage unit 40Q, while the plurality of sheets 200 are being taken out one by one from the cassette 42, the first storage unit 40P and the second storage unit 40Q On the other hand, an empty cassette 42 and a cassette 42 filled with a plurality of sheets 200 may be exchanged.

FIG. 18 is a plan view showing an example of a sticking device according to another embodiment. As shown in FIG. 18, the sticking device 1E includes a roll supply section 2 in addition to the structure of the sticking device 1A shown in FIG. The roll supply section 2 includes a feed roller 21 and a take-up roller 22 . The roll supply unit 2 uses a roll 400R obtained by winding a sheet material 400 continuous in a belt shape into a roll. The sheet laminated structure of the sheet material 400 is the same as that of the sheet material 200, in which a base film, a functional layer, and a cover film are laminated in this order.

The roll supply unit 2 attaches the roll 400R to the feed roller 21, and feeds out the sheet material 400 continuous in a belt shape from the roll 400R in the second direction D2. The delivered sheet material 400 is cut out in accordance with the shape of the substrate 100 by the precut section 80 . The conveying section 60A sequentially conveys the sheet material 400 cut out by the precut section 80 toward the table 5 in the same manner as the sheet 200 . The sheet material 400 that has been cut by the precut section 80 is wound up by the winding roller 22 .

The pasting device 1E selectively supplies the sheets 200 one by one from the sheet supply unit 4A and supplies the roll 400R fed out from the roll supply unit 2 by cutting the sheet material 400 with the precut unit 80. can be switched to In this case, the precut portion 80 and the cover film peeling portion 70 are arranged in the first direction D1 in a reversed order. That is, after the sheet material 400 is cut out from the roll 400R by the precut section 80 in a shape matching the substrate 100, the cover film 203 may be peeled off by the cover film peeling section .

<Other modes of attachment method>
In the above-described embodiment, the sticking method was described as an example, but the method is not limited to this. 19 to 23 are diagrams relating to a sticking method according to another embodiment. In the following description of another embodiment shown in FIGS. 19 to 23, the same or equivalent components as those in the embodiment relating to the pasting method described above are denoted by the same reference numerals, and the description thereof will be omitted or simplified.

FIG. 19 is a flow chart showing the flow of a sticking method according to another embodiment. FIG. 20 is a plan view showing an example of a sticking device used in a sticking method according to another embodiment. As shown in FIG. 19, the sticking method in this embodiment has steps S11 to S17 below. In step S11, the substrate 100 is placed on the table 5 as in step S1. At step S12, the conveying section 60A of the sticking apparatus 1F shown in FIG. The conveying unit 60A conveys the sheet 200 to the pre-cutting unit 80 while sucking the sheet 200 taken out.

FIG. 21 is a cross-sectional view showing the configuration of a precut portion according to another embodiment. In the present embodiment, the precut section 80 is arranged adjacent to the storage section 40 in the first direction D1. In step S13, the sheet 200 taken out from the storage section 40 is cut by the precut section 80, as shown in FIG. For this purpose, the cutter mechanism 82 cuts the outer peripheral portion of the sheet 200 held by the suction portion 61 of the conveying portion 60 . Here, in the precut portion 80 of the present embodiment, the sheet 200 is in a state where the cover film 203 is not peeled off.

In step S14, the cover film 203 is peeled off from the sheet 200 while being conveyed to the table 5, as shown in FIG. In step S14, the tip of the suction rod 71 of the cover film peeling section 70 is abutted against the lower surface of the cover film 203 from below the sheet 200 that has passed through the pre-cutting section 80 and is held by the suction section 61, thereby removing the cover film 203. Adsorb. Next, a rod operating mechanism (not shown) moves the adsorption rod 71 that has adsorbed the cover film 203 downward, for example, toward the opposite side of the sheet 200 in the radial direction. As a result, the cover film 203 sucked by the sucking rod 71 is peeled off from the sheet 200 . The conveying section 60</b>A conveys the sheet 200 from which the cover film 203 has been peeled off by the cover film peeling section 70 to the table 5 . It is also collected by the cover film collecting unit 75 .

In step S15, the sheet 200 with the functional layer 202 exposed by peeling off the cover film 203 is attached to the substrate 100 in the same manner as in step S5. In step S16, after attaching the functional layer 202 of the sheet 200 to the substrate 100, the base film 201 is peeled off. In step S17, the substrate 100 to which the functional layer 202 is attached is carried out from the attaching apparatus 1A to an external post-process, and sent to a lithography process (exposure process) for forming a predetermined circuit pattern. In the above-described embodiment, the sheet 200 larger than the substrate 100 is precut in the precut section 80 to match the substrate 100, but the present invention is not limited to this. The sheet 200 may be preliminarily formed in a size matching the substrate 100 at the stage of being supplied to the storage unit 40 .

FIG. 22 is a flow chart showing the flow of a sticking method according to another embodiment. FIG. 23 is a plan view showing an example of a sticking device used in a sticking method according to another embodiment. As shown in FIG. 22, the sticking method in this embodiment has steps S21 to S26 below. In step S21, the substrate 100 is placed on the table 5 as in step S2. In step S22, the conveying section 60A of the sticking apparatus 1G shown in FIG. 23 takes out the sheets 200G from the storage section 40 one by one. In this embodiment, the sheets 200G stored in the cassette 42 of the storage unit 40 are formed in advance in a size and shape that match the substrate 100. As shown in FIG. The sticking apparatus 1G of the present embodiment does not include the pre-cut portion 80 because the sheet 200G has a size and a shape that match the substrate 100 in advance. The conveying unit 60A conveys the taken-out sheet 200G to the cover film peeling unit 70 while it is being adsorbed.

In step S23, the cover film 203 is peeled off from the sheet 200G while it is being conveyed to the table 5. In step S24, the cover film 203 is sucked by the suction rod 71 of the cover film peeling section 70 from below the sheet 200G that is taken out from the storage section 40 and held by the suction section 61, and the cover film 203 is removed. is peeled off from the sheet 200G.

In step S25, the cover film 203 is peeled off and the sheet 200G with the functional layer 202 exposed is attached to the substrate 100, as in FIG. At this time, it is preferable to align the position of the sheet 200G with the substrate on the table 5 by an appropriate alignment mechanism. In step S26, after attaching the functional layer 202 of the sheet 200G to the substrate 100, the base film 201 is peeled off. The substrate 100 to which the functional layer 202 is attached is carried out from the attaching apparatus 1A and sent to a lithography process (exposure process) for forming a predetermined circuit pattern.

The pre-cut portion 80 is not used in the pasting method as described above. In this case, in the pasting apparatus 1A provided with the pre-cut section 80 as shown in FIG.

<Other forms of the storage unit>
In the above-described embodiment, the height detection unit 47 detects the height of the uppermost sheet 200 contained in the cassette 42, and the conveying units 60A to 60D take out the uppermost sheet 200 in the cassette 42. was described as an example, but it is not limited to this. FIG. 24 is an elevational view showing the configuration of the storage section of another embodiment. As shown in FIG. 24, the storage unit 40H includes a cassette support member 44 that supports the cassette 42, an elevating mechanism 45 that elevates the cassette support member 44, and a sheet count detector that counts the number of sheets 200 stored in the cassette 42. a portion 48; The number detection unit 48 counts the number of times the conveying unit 60</b>A takes out the sheets 200 from the cassette 42 under the control of the control device 500 .

The control device 500 of the sticking device 1H further includes an elevation control section 505 that controls the elevation mechanism 45 . The elevation control section 505 raises and lowers the cassette 42 supported by the cassette support member 44 by the elevation mechanism 45 based on the detection result of the number detection section 48 . After taking out the uppermost sheet 200 in the cassette 42 , the elevation control unit 505 raises the cassette support member 44 by the thickness of one sheet 200 . As a result, the new uppermost sheet 200 in the cassette 42 is positioned at the same height as the uppermost sheet 200 before being taken out.

According to this configuration, the height of the uppermost sheet 200 in the cassette 42 is kept constant by sequentially raising the cassette 42 as the sheets 200 are taken out. In this case, compared to the case where the cassette 42 does not move up and down and the height of the uppermost sheet 200 in the cassette 42 gradually decreases, it is possible to suppress the movement stroke of the suction portion 61 from becoming large, thereby shortening the tact time. Prolongation can be suppressed.

In the above-described embodiment, the configuration for elevating the cassette 42 supported by the cassette support member 44 by the elevating mechanism 45 based on the detection result of the number detection unit 48 has been described as an example, but it is not limited to this. FIG. 25 is an elevational view showing the configuration of the storage section of another embodiment. As shown in FIG. 25, the storage section 40K includes a cassette support member 44 that supports the cassette 42, an elevating mechanism 45 that elevates the cassette support member 44, and a height detector 49. The height detection unit 49 detects the height of the uppermost sheet 200 among the plurality of sheets 200 accommodated in the cassette 42 .

The control device 500 of the sticking device 1K further includes an elevation control section 506 that controls the elevation mechanism 45 . The elevation control section 506 raises and lowers the cassette 42 supported by the cassette support member 44 by the elevation mechanism 45 based on the detection result of the height detection section 49 . After removing the uppermost sheet 200 from the cassette 42 , the elevation control unit 506 detects the height of the uppermost sheet 200 among the plurality of sheets 200 stored in the cassette 42 . The elevation control unit 506 raises the cassette support member 44 so that the height of the uppermost sheet 200 in the cassette 42 reaches a predetermined height. As a result, the new uppermost sheet 200 in the cassette 42 is positioned at the same height as the uppermost sheet 200 before being taken out.

Although the embodiment has been described above, the present invention is not limited to the above description, and various modifications are possible without departing from the gist of the present invention. For example, in the above-described embodiment, a configuration in which the sheet 200 is handled with the base film 201 side facing upward has been described as an example, but the present invention is not limited to this. For example, a configuration for turning the sheet 200 upside down may be provided between the storage section 40 and the table 5 .

In addition, in the above-described embodiment, the storage unit 40 takes out the sheets 200 one by one from the cassette 42 that stores a plurality of sheets 200 in a stacked manner, but the present invention is not limited to this. For example, the sheet 200 may be sequentially conveyed one by one from the pre-process side of the pasting apparatus 1A by a conveying mechanism such as a conveyor. In this case, the storage unit 40 temporarily stores the transported sheet 200 , and the transport unit 60 transports the sheet 200 from the storage unit 40 to the table 5 .

In addition, in the above-described embodiment, the configuration in which the cutter 82a cuts the sheet 200 in the pre-cutting section 80 has been described as an example, but the present invention is not limited to this. For example, the precut section 80 may be configured to cut the sheet 200 by other cutting means such as laser cutting.

1A to 1H, 1K Pasting device 5 Tables 40, 40C, 40H, 40K Storage section 42 Cassette 43 Cassette holding section 45 Lifting mechanism 47 Height Height detection unit 48 Number detection unit 55 Cup units 60, 60A, 60B, 60C, 60D Transport unit 62 Lid unit 65 Cup unit 66 Vacuum pump 70 Cover film peeling unit 75 Cover film collecting unit 80 Precut unit 90 Base film peeling unit 95 Base film collecting unit 100 Substrates 200, 200G Sheet 201 Base film 202 Functional layer 203 Cover film 502 Conveyance control unit 505 Elevation control unit S Closed space

Claims (18)

1. a table on which the substrate is placed;
   a storage section for storing sheets in which the base film, the functional layer, and the cover film are laminated in this order;
   a conveying unit that conveys the sheet from the storage unit to the table;
   a cover film peeling unit for peeling the cover film of the sheet,
   The conveying unit conveys the sheet from which the cover film has been peeled off by the cover film peeling unit, and affixes the sheet with the functional layer exposed to the substrate on the table.
2. The storage unit further includes a cassette that stores the plurality of sheets in a vertically stacked manner,
   The sticking device according to claim 1, wherein the conveying section conveys the sheets stored in the cassette one by one.
3. The sticking device according to claim 2, wherein the conveying section conveys the uppermost sheet among the plurality of sheets accommodated in the cassette.
4. The sticking device according to claim 3, wherein the cassette accommodates a plurality of the sheets with the base film facing upward.
5. a height detection unit that detects the height of the uppermost sheet among the plurality of sheets accommodated in the cassette;
   A transport control unit that controls the transport unit,
   5. The apparatus according to claim 3, wherein the transport control unit controls the transport unit so as to take out the uppermost sheet contained in the cassette from the cassette based on the detection result of the height detection unit. Applicator as described.
6. a lifting mechanism for lifting and lowering the cassette;
   a number detection unit that counts the number of sheets accommodated in the cassette;
   A lifting control unit that controls the lifting mechanism,
   5. The lift control unit lifts and lowers the cassette by the lift mechanism based on the detection result of the sheet number detection unit, and controls such that the uppermost sheet reaches a predetermined height. The sticking device according to .
7. a lifting mechanism for lifting and lowering the cassette;
   a height detection unit that detects the height of the uppermost sheet among the plurality of sheets accommodated in the cassette; and an elevation control unit that controls the elevation mechanism,
   3 or 4, wherein the elevation control section raises or lowers the cassette by the elevation mechanism based on the detection result of the height detection section so that the uppermost sheet reaches a predetermined height. 5. The sticking device according to 4.
8. The sticking device according to any one of claims 2 to 7, wherein the storage section includes a cassette holding section that detachably holds the cassette.
9. further comprising a chamber containing at least the table;
   The sticking device according to any one of claims 1 to 8, wherein the storage section is provided outside the chamber.
10. further comprising a cup portion surrounding the table and having an open top;
    When the conveying unit conveys the sheet to the table, a lid provided on the conveying unit contacts the upper end of the cup to form a closed space including the table. Item 10. The sticking device according to any one of Item 9.
11. The sticking device according to claim 10, comprising a vacuum pump for creating a reduced-pressure atmosphere in the closed space.
12. The sticking device according to any one of claims 1 to 11, further comprising a cover film recovery section that recovers the cover film peeled off by the cover film peeling section.
13. The sticking device according to any one of claims 1 to 12, further comprising a base film peeling section for peeling the base film from the sheet adhered to the substrate.
14. The sticking device according to claim 13, further comprising a base film recovery section that recovers the base film peeled off by the base film peeling section.
15. Further comprising a pre-cut section for cutting the sheet according to the outer shape of the substrate,
    The sticking device according to any one of claims 1 to 14, wherein the precut section is arranged on a transport path from the storage section to the table by the transport section.
16. The sticking device according to claim 15, wherein the precut section cuts the sheet while it is held by the conveying section.
17. The sticking device according to any one of claims 1 to 16, wherein the functional layer is a photosensitive resin layer.
18. placing the substrate on a table;
    conveying the sheet onto the substrate on the table from a storage section that stores the sheet in which a base film, a functional layer, and a cover film are laminated in this order;
    peeling the cover film from the sheet during transportation;
    and attaching the sheet with the functional layer exposed by peeling off the cover film to the substrate.
    

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