CN114408650B - Film releasing and transferring mechanism for wafer splinter - Google Patents
Film releasing and transferring mechanism for wafer splinter Download PDFInfo
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- CN114408650B CN114408650B CN202210105492.5A CN202210105492A CN114408650B CN 114408650 B CN114408650 B CN 114408650B CN 202210105492 A CN202210105492 A CN 202210105492A CN 114408650 B CN114408650 B CN 114408650B
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- roller
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- 230000007246 mechanism Effects 0.000 title claims abstract description 128
- 206010041662 Splinter Diseases 0.000 title description 2
- 239000002131 composite material Substances 0.000 claims abstract description 99
- 238000001179 sorption measurement Methods 0.000 claims abstract description 89
- 238000005520 cutting process Methods 0.000 claims abstract description 28
- 238000003825 pressing Methods 0.000 claims abstract description 24
- 239000012528 membrane Substances 0.000 claims description 27
- 230000006835 compression Effects 0.000 claims description 21
- 238000007906 compression Methods 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 14
- 230000005484 gravity Effects 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims description 2
- 239000012634 fragment Substances 0.000 claims 1
- 238000005096 rolling process Methods 0.000 abstract description 32
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 13
- 230000009471 action Effects 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 25
- 239000000463 material Substances 0.000 description 15
- 238000007599 discharging Methods 0.000 description 8
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 241000252254 Catostomidae Species 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/06—Registering, tensioning, smoothing or guiding webs longitudinally by retarding devices, e.g. acting on web-roll spindle
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H20/00—Advancing webs
- B65H20/16—Advancing webs by web-gripping means, e.g. grippers, clips
- B65H20/18—Advancing webs by web-gripping means, e.g. grippers, clips to effect step-by-step advancement of web
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/16—Registering, tensioning, smoothing or guiding webs longitudinally by weighted or spring-pressed movable bars or rollers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H23/00—Registering, tensioning, smoothing or guiding webs
- B65H23/04—Registering, tensioning, smoothing or guiding webs longitudinally
- B65H23/26—Registering, tensioning, smoothing or guiding webs longitudinally by transverse stationary or adjustable bars or rollers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H35/00—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers
- B65H35/04—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators
- B65H35/06—Delivering articles from cutting or line-perforating machines; Article or web delivery apparatus incorporating cutting or line-perforating devices, e.g. adhesive tape dispensers from or with transverse cutters or perforators from or with blade, e.g. shear-blade, cutters or perforators
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a wafer splitting film releasing and moving mechanism, which is characterized in that under the combined action of an antistatic driving roller and an electromagnetic brake connected with an air expansion shaft, a composite film is always in a tensioning state in the film releasing mechanism, and when the film moving mechanism works, the composite film is always controlled by an upper adsorption device or a lower moving sucker in the moving process, a pressing mechanism is driven in the film releasing mechanism, and the composite film between the film releasing mechanism and the film moving mechanism can be regulated to be always in the tensioning state. The film moving mechanism ensures that the composite film is always in a tensioning state in the conveying process, and a rodless cylinder and a guide rail cylinder in the cutting mechanism can control a cutting knife to accurately cut the composite film. The PE film after cutting is pasted on the wafer by the film pasting mechanism, and the PE film can be pasted more firmly by the rolling mechanism in the film pasting mechanism.
Description
Technical Field
The invention belongs to the technical field of silicon carbide wafer splitting, and particularly relates to a wafer splitting film releasing and moving mechanism.
Background
The silicon carbide wafer is subjected to laser hidden cutting processing, laser beams are focused inside the wafer, the wafer at the focal point is instantly high in temperature, a series of criss-cross damage layers are formed inside the wafer, the silicon carbide wafer is high in hardness and cannot be cracked in a film expansion mode, equipment needs to be suitable for cracking along a wafer cutting path one by one, the surfaces of chips are sensitive to chips, a PE film is attached to the surfaces of the wafers in the splitting process, a chopper of a splitting mechanism is prevented from being in direct contact with the surfaces of the wafers, and chips generated in the splitting process are prevented from being splashed and polluting the chips.
The composite film is required to be in a tensioning state all the time in the conveying process, so that the conveying precision is kept. At present, after a wafer film releasing mechanism releases a film, the film is directly paved on the wafer, a PE film is paved by utilizing a rolling carrier roller, and the PE film is easily influenced by other factors during paving.
Disclosure of Invention
In order to solve the technical problems, the invention provides a wafer splitting film releasing and moving mechanism capable of ensuring that a composite film is always in a tensioning state during film releasing and conveying.
The specific scheme is as follows:
the wafer splitting film placing and moving mechanism comprises a film placing mechanism and a film moving mechanism, and the film placing mechanism and the film moving mechanism jointly control the composite film to enable the composite film to be in a tensioning state.
The wafer film releasing mechanism comprises a film releasing roller system arranged on a film releasing fixing frame, wherein the film releasing roller system comprises an antistatic driving roller, an air expansion shaft and an electromagnetic brake connected with the air expansion shaft; the air expansion shaft is used for fixing the composite film roll, the antistatic driving roller drives the composite film to be conveyed, and the antistatic driving roller and an electromagnetic brake connected with the air expansion shaft are mutually matched to tighten the composite film.
The setting is put membrane rod system on membrane mount and is according to PE membrane direction of movement respectively, and the air-expanding axle is used for fixed complex film roll, and air-expanding axle head is connected with electromagnetic braking ware, and first driven switching-over roller is with the first switching-over of complex film, and antistatic driving roller drive PE membrane removes, and tensioning compression roller is used for tensioning complex film for complex film and antistatic driving roller contact, and second driven switching-over roller is with complex film output to lower removal sucking disc.
The tensioning press roller is controlled by a driving press mechanism, and the driving press mechanism comprises a press cylinder seat, a driving press cylinder, a tensioning press plate, a guide rail, a tensioning press roller door-shaped fixing seat and a tensioning press roller; the lower pressure cylinder seat is fixed at the top of the film placing fixing frame; the driving lower air cylinder is fixed at the top of the lower air cylinder seat, and a piston rod of the driving lower air cylinder penetrates through the lower air cylinder seat and enters the inside of the film placing fixing frame; the guide rail is fixed on the side wall of the fixing frame, and the direction of the guide rail is consistent with the direction of a piston rod of the driving down-pressing cylinder; the tensioning compression roller door-shaped fixing seat is fixed at the tail end of a piston rod of the driving lower compression cylinder and slides in the guide rail; the tensioning press roller is rotationally connected to the tensioning press roller door-shaped fixing seat.
The wafer film moving mechanism comprises an upper adsorption device which moves up and down and a lower moving sucker which moves horizontally, and the lower moving sucker reciprocates along the moving direction of the composite film, so that the lower moving sucker moves along with the PE film. The upper adsorption device and the lower movable sucker can continuously control the movement of the composite membrane.
The upper adsorption device drives the vertical servo module to move up and down through the pressure-adjustable movable seat, the lower movable sucker drives the composite membrane to move to a membrane cutting position, the upper adsorption device moves down, the upper adsorption device and the lower movable sucker adsorb the composite membrane simultaneously, after membrane cutting is completed, the upper adsorption device moves up, the lower movable sucker resets, the upper adsorption device moves down, and the upper adsorption device and the lower movable sucker adsorb the composite membrane again simultaneously.
The upper adsorption device comprises: the suction linear bearing comprises a suction linear bearing sleeve and a suction linear bearing shaft, the suction linear bearing sleeve is fixed at the top of the adjustable pressure type movable seat, the suction linear bearing shaft penetrates through the suction linear bearing sleeve, a suction linear bearing shaft limiting block is arranged at the top of the suction linear bearing shaft, and the direction of the suction linear bearing is consistent with the moving direction of the adjustable pressure type movable seat; the bottom is provided with the floating mounting plate of sucking disc, is provided with the spring between the floating mounting plate of sucking disc and the adjustable pressure formula removes the seat, and fixed position sucking disc is connected in the floating mounting plate bottom of sucking disc, and fixed position sucking disc passes through the upper airway and is connected with last negative pressure source.
Go up adsorption equipment and still including removing the adsorption roll-in mechanism, remove the adsorption roll-in mechanism and include: the device comprises a floating press roller cylinder, a floating plate, a floating press roller door-type fixing seat, a floating linear bearing and a floating press roller; the floating compression roller cylinder is fixedly connected to the adjustable pressure type movable seat, the floating plate is fixed to the tail end of a piston rod of the floating compression roller cylinder, the moving direction is consistent with that of the adjustable pressure type movable seat, floating linear bearings are arranged on two sides of the floating plate and comprise floating linear bearing sleeves and floating linear bearing shafts, the floating linear bearing sleeves are fixed to the floating plate, the floating linear bearing shafts penetrate through the floating linear bearing sleeves, a floating linear bearing shaft limiting block is arranged at the top of the floating linear bearing shaft, the bottom of the floating linear bearing shaft limiting block is connected with a floating compression roller door-type fixed seat, and the floating compression roller is rotatably connected to the floating compression roller door-type fixed seat. The floating cylinder controls the floating plate to move up and down, and the limiting block of the floating linear bearing shaft drives the whole floating press roller door-shaped seat and the floating press roller to move up and down, and the pressure of the floating press roller on the composite film is the gravity of the floating press roller door-shaped fixing seat and the floating press roller.
The lower movable sucker is characterized in that a lower negative pressure source is arranged in the lower movable sucker, the top part of the lower movable sucker is provided with a material discharging position and a material taking position, air holes are uniformly distributed at the tops of the material discharging position and the material taking position, the air holes are connected with the lower negative pressure source through a lower adsorption air passage, and the air holes of the material discharging position and the material taking position are connected with different lower negative pressure sources.
The invention discloses a wafer splitting film placing and moving mechanism, which comprises a film placing mechanism and a film moving mechanism, wherein the film placing mechanism and the film moving mechanism jointly control a composite film to enable the composite film to be in a tensioning state. Under the combined action of the anti-static driving roller and the electromagnetic brake connected with the air expansion shaft, the composite film is always in a tensioned state in the film releasing mechanism, and the film moving mechanism is operated to ensure that the composite film is always controlled by the upper adsorption device or the lower movable sucker in the moving process, and the driving pressing mechanism in the film releasing mechanism can adjust the composite film between the film releasing mechanism and the film moving mechanism to be always in the tensioned state.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic structural view of the unreeling mechanism;
FIG. 3 is a top view of the unwind mechanism;
FIG. 4 is a schematic view of a structure of a driving hold-down mechanism;
FIG. 5 is a side view of the drive-down mechanism;
FIG. 6 is a schematic structural view of a film transfer mechanism;
FIG. 7 is a side view of a film transfer mechanism;
FIG. 8 is a schematic view of the structure of the upper adsorption apparatus;
FIG. 9 is a side view of the upper adsorption apparatus;
FIG. 10 is a bottom view of the first embodiment of the upper suction apparatus;
FIG. 11 is a bottom view of a second embodiment of an upper suction apparatus;
FIG. 12 is a top view of an embodiment of a lower mobile suction cup;
FIG. 13 is a top plan view of a second embodiment of a lower mobile suction cup;
FIG. 14 is a schematic structural view of a film sticking mechanism;
100. the film releasing mechanism, 110, a film releasing fixing frame, 120, a film releasing roller system, 121, an antistatic driving roller, 121, an air expansion shaft, 122, a first driven reversing roller, 123, a second driven reversing roller, 130, a driving pressing mechanism, 131, a pressing cylinder seat, 132, a driving pressing cylinder, 133, a tensioning pressing plate, 134, a guide rail, 135, a tensioning pressing roller door type fixing seat, 136, a tensioning pressing roller, 200, a vertical servo module, 300, a horizontal servo module, 400, a film moving mechanism, 410, an upper adsorption device, 411, an adjustable pressure type moving seat, 412, an upper negative pressure source, 413, an adsorption linear bearing, 4131, an adsorption linear bearing sleeve, 4132, an adsorption linear bearing shaft, 414, a fixed position sucker, 415 and an adsorption linear bearing shaft limiting block, 420, lower movable sucker 421, discharging position 422, material taking position 431, floating press roller cylinder 431, floating plate 433, floating press roller door type fixing seat 434, floating linear bearing 435, floating press roller 500, film pasting mechanism 510, movable servo module 511, movable horizontal servo module 512, movable vertical servo module 520, movable adsorption base 530, movable adsorption device 531, movable adsorption linear bearing 532, movable adsorption fixed position sucker 533, movable adsorption limiting block 540, rolling mechanism 541, rolling cylinder 542, rolling floating plate 543, rolling linear bearing 544, rolling roller door type seat 545, rolling roller 600, frame 700, film cutting mechanism 800, air floating carrier.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. It will be apparent to those skilled in the art that the described embodiments are only a part, but not all, of the implementations of the invention, and that all other embodiments, based on which those skilled in the art will come to lie within the scope of the invention without making any inventive effort.
As shown in fig. 1 to 14, a wafer sliver depositing and transferring mechanism is disclosed, which comprises a depositing mechanism 100, a transferring mechanism 400, a film cutting mechanism 700 and a film pasting mechanism 500, and is characterized in that a composite film is in a controlled state in the depositing mechanism 100, the transferring mechanism 400, the film cutting mechanism 700 and the film pasting mechanism 500 and is kept in constant tension. After the composite film roll is uncoiled by the film uncoiling mechanism 100, the film moving mechanism 400 is conveyed to a cutter position, the PE film is cut by the film cutting mechanism 700, and the PE film is adhered to the surface of a wafer by the film adhering mechanism 500. A release film refers to a film having a surface energy of the film that is distinguishable, and has no tackiness, or slight tackiness, after contacting a specific material under limited conditions. One side of the PE film with glue contacts with the release film, so that the release film and the PE film have adhesive force, and the release film and the PE film cannot be separated when the composite film is transported on the film placing mechanism and the film moving mechanism. After the PE film is cut, the film pasting mechanism is guaranteed to be capable of adsorbing the PE film, so that the cut PE film is separated from the release film. The release film is moved by the film moving mechanism 400 into a leakage groove on the frame 600.
The film pasting mechanism 500 comprises a film placing roller system 120 arranged on a film placing fixing frame 110, wherein the film placing roller system 120 comprises an antistatic driving roller 121, an air expansion shaft 124 and an electromagnetic brake connected with the air expansion shaft 124; the inflatable shaft 124 is used for fixing the composite film roll, the antistatic driving roller 121 drives the composite film to be conveyed, and the antistatic driving roller 121 and an electromagnetic brake connected with the inflatable shaft 124 are matched with each other to tighten the composite film. The film releasing roller system 120 conveys the composite film out of the film sticking mechanism 500, and in order to avoid the phenomenon that the composite film is wrinkled and coiled in the conveying process, the composite film is controlled to be always in a tensioning state through the antistatic driving roller 121 and the electromagnetic brake.
The film releasing roller systems 120 on the film releasing fixing frame 110 are respectively provided with an air expansion shaft 124 for fixing the composite film roll according to the moving direction of the composite film, an electromagnetic brake is connected to the end part of the air expansion shaft 124, the first driven reversing roller 122 is used for reversing the composite film for the first time, the antistatic driving roller 121 is used for driving the composite film to move, the tensioning pressing roller 136 is used for tensioning the composite film, the composite film is in contact with the antistatic driving roller 121, and the second driven reversing roller 123 is used for outputting the composite film to the lower moving sucker 420.
The tensioning press roller 136 is controlled by a driving press-down mechanism 130, and the driving press-down mechanism 130 comprises a press-down cylinder seat 131, a driving press-down cylinder 132, a tensioning press-down plate 133, a guide rail, a door-shaped fixing seat of the tensioning press roller 136 and the tensioning press roller 136; the lower pressure cylinder block 131 is fixed on the top of the film placing fixing frame 110; the driving lower air cylinder 132 is fixed at the top of the lower air cylinder seat 131, and a piston rod of the driving lower air cylinder 132 penetrates through the lower air cylinder seat 131 and enters the inside of the film placing fixing frame 110; the guide rail 134 is fixed on the side wall of the fixed frame, and the direction of the guide rail 134 is consistent with the direction of a piston rod driving the pressing cylinder 132; the tensioning compression roller door-shaped fixing seat 135 is fixed at the tail end of a piston rod of the driving pressing cylinder 132 and slides in the guide rail 134; the tension roller 136 is rotatably connected to the tension roller door type fixing base 135. Driving the hold-down mechanism 130 can further control a state of the composite film in the unwind mechanism.
The wafer film moving mechanism 400 includes an upper suction device 410 that moves up and down and a lower moving suction cup 420 that moves horizontally, and the lower moving suction cup 420 reciprocates along the moving direction of the composite film, so that the lower moving suction cup 420 moves with the composite film. The upper suction means 410 and the lower moving suction cup 420 control the movement of the composite film without interruption. The lower moving sucker 420 receives the composite film transferred by the film pasting mechanism 500, and the composite film is absorbed by the lower moving sucker 420 and is continuously conveyed along the moving direction of the composite film. The pressing mechanism 130 is driven to adjust the composite film between the film placing mechanism 100 and the film moving mechanism 400, so that the composite film still maintains a controlled state between the film placing mechanism 100 and the film moving mechanism 400, and the composite film is always in a tensioned state.
The upper adsorption device 410 is driven to move up and down by the vertical servo module 200 through the adjustable pressure type movable seat 411, the lower movable sucker 420 drives the composite membrane to move to a membrane cutting position, the upper adsorption device 410 moves down, the upper adsorption device 410 and the lower movable sucker 420 adsorb the composite membrane at the same time, after membrane cutting is completed, the upper adsorption device 410 moves up, the lower movable sucker 420 resets, the upper adsorption device 410 moves down, and the upper adsorption device 410 and the lower movable sucker 420 adsorb the composite membrane again at the same time. The interaction between the lower movable sucker 420 and the upper suction device 410 allows the composite film to be always controlled during the conveying process, so that the composite film always maintains a tensioned state.
The upper adsorption apparatus 410 includes: the upper negative pressure source 412, the adsorption linear bearing 413 and the fixed-position sucker, wherein the upper negative pressure source 412 is arranged on the adjustable pressure type movable seat 411, the adsorption linear bearing 413 comprises an adsorption linear bearing sleeve and an adsorption linear bearing shaft, the adsorption linear bearing sleeve is fixed at the top of the adjustable pressure type movable seat 411, the adsorption linear bearing shaft penetrates through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limiting block 415 is arranged at the top of the adsorption linear bearing shaft, and the direction of the adsorption linear bearing 413 is consistent with the moving direction of the adjustable pressure type movable seat 411; the bottom is provided with the floating mounting plate of sucking disc, is provided with the spring between the floating mounting plate of sucking disc and the adjustable pressure formula removes seat 411, and fixed position sucking disc 414 is connected in the floating mounting plate bottom of sucking disc, and fixed position sucking disc 414 is connected with last negative pressure source 412 through the upper airway.
In one embodiment, the fixture suction cup 414 may be a plate-mounted structure that is larger than the width of the composite membrane, so that the upper suction device 410 can ensure that the composite membrane is uniformly stressed when the composite membrane is sucked.
In another embodiment, the fixed-position sucker 414 may be a small circular sucker, a plurality of fixed-position suckers 414 and suction linear bearings 413 may be disposed, and the suction linear bearings 413 are uniformly distributed at the edge of the adjustable pressure type movable seat 411, so that the upper suction device 410 can ensure that the stress of the composite film is uniform when the composite film is sucked.
The end part of the adjustable pressure type movable seat 411 is connected with a film cutting mechanism 700, the film cutting mechanism 700 comprises a rodless cylinder, a guide rod cylinder and a cutting knife, the rodless cylinder is arranged at the end part of the adjustable pressure type movable seat 411, the guide rod direction of the rodless cylinder is perpendicular to the running direction of the composite film, the guide rod is connected with the guide rod cylinder in a sliding manner, and the output end of the guide rod cylinder is connected with the cutting knife; after the lower moving sucker 420 moves in place along the moving direction of the composite film, the PE film is cut off by the cutting knife through the guide rod cylinder; the upper suction device 410 moves upward, the upper suction device 410 and the lower suction cup 420 are connected, the lower suction cup 420 is reset, and the initial state is returned. The film moving mechanism 400 can accurately cut PE films and keep release films through a cutting knife controlled by a rodless cylinder and a guide rod cylinder when conveying the composite films to a film cutting position. The release film is removed from the lower moving sucker 420 by the lower moving sucker 420 when the film is moved in the next cycle.
The upper adsorption apparatus 410 further includes a moving adsorption roll-in mechanism including: a floating press roller cylinder 431, a floating plate 432, a floating press roller door type fixing seat 433, a floating linear bearing 434 and a floating press roller 435; the floating compression roller cylinder 431 is fixedly connected to the adjustable pressure type movable seat 411, the floating plate 432 is fixed to the tail end of a piston rod of the floating compression roller cylinder 431, the moving direction is consistent with that of the adjustable pressure type movable seat 411, floating linear bearings 434 are arranged on two sides of the floating plate 432, each floating linear bearing 434 comprises a floating linear bearing sleeve and a floating linear bearing shaft, the floating linear bearing sleeve is fixed to the floating plate 432, the floating linear bearing shaft penetrates through the floating linear bearing sleeve, a floating linear bearing shaft limiting block is arranged at the top of the floating linear bearing shaft, the bottom of the floating linear bearing shaft is connected with a floating compression roller door-shaped fixed seat 433, and the floating compression roller 435 is rotatably connected to the floating compression roller door-shaped fixed seat 433. The floating press roller cylinder 431 controls the floating plate 432 to move up and down, and the limiting block of the floating linear bearing shaft drives the whole floating press roller door-shaped seat 433 and the floating press roller 435 to move up and down, so that the pressure of the floating press roller 435 on the composite film is the gravity of the floating press roller door-shaped fixed seat 433 and the floating press roller 435. When the end part of the composite film is conveyed by the lower moving sucker 420, a certain included angle exists between the composite film and the lower moving sucker 420, and the floating press roller 435 presses the composite film to the lower moving sucker 420 by means of self gravity, so that air between the composite film and the lower moving sucker 420 is discharged, and no fold occurs when the composite film is adsorbed by the lower moving sucker 420.
The lower suction cup 420 is provided with a lower negative pressure source, the top part of the lower suction cup 420 is provided with a discharging position 421 and a material taking position 422, air holes are uniformly distributed at the tops of the discharging position 421 and the material taking position 422, the air holes are connected with the lower negative pressure source through a lower suction air passage, and the air holes of the discharging position 421 and the material taking position 422 are connected with different lower negative pressure sources.
In one embodiment, the air holes at the top of the lower sucker are uniformly distributed in the material receiving position, and the adjacent part of the material receiving position 422 and the material discharging position 421 is also provided with air holes, and a lower negative pressure source is arranged at the moment. During film transfer, the composite film on the discharge position 421 and the take-out position 422 is always adsorbed.
The film sticking mechanism 500 includes: the movable servo module 510, the movable adsorption base 520 and the movable adsorption device 530 which are installed on the rack 600, the movable adsorption base 520 is installed in a component of the movable servo module 510 which moves up and down, the movable adsorption device 530 is installed on the movable adsorption base 520, the movable adsorption device 530 comprises a movable adsorption linear bearing 531, a movable adsorption negative pressure source and a movable adsorption fixed position sucker 532, the movable adsorption linear bearing 531 comprises a movable adsorption linear bearing sleeve and a movable adsorption linear bearing shaft, the movable adsorption linear bearing sleeve is fixed on the movable adsorption base 520, the movable adsorption linear bearing shaft penetrates through the movable adsorption linear bearing sleeve, the movable adsorption limiting block 533 is arranged at the top of the movable adsorption linear bearing shaft, the movable adsorption fixed position sucker 532 is connected at the bottom of the movable adsorption linear bearing shaft, and the movable adsorption negative pressure source is connected with the movable adsorption fixed position sucker 532 through a movable adsorption air passage. When the PE film at the material taking position 422 is absorbed by the movable absorbing fixed position sucker 532, the PE film can be completely separated from the lower moving mechanism, and then the film is attached as the movable servo module 510 is moved onto the air bearing platform 800. Throughout the process, the PE film is completely adsorbed under the movable adsorption fixing position chuck 532, and no phenomenon of wrinkling or curling occurs.
The moving servo module 510 includes a moving vertical servo module 512 and a moving horizontal servo module 511, the moving horizontal servo module 511 is mounted on the frame 600, the moving vertical servo module 512 is slidably connected to the moving horizontal servo module 511, and the moving adsorption base 520 is slidably connected to the moving vertical servo module 512.
The rolling mechanism 540 is arranged on the movable adsorption base 520, the rolling mechanism 540 comprises a rolling cylinder 541, a rolling floating plate 542, a rolling linear bearing 543, a rolling shaft door type seat 544 and a rolling shaft 545, the rolling cylinder 541 is fixed on the movable adsorption base 520, and the rolling floating plate 542 is connected to the tail end of a piston rod of the rolling cylinder 541; the rolling linear bearing 543 comprises a rolling linear bearing sleeve and a rolling linear bearing shaft, the rolling linear bearing sleeve is fixed at the top of the rolling floating plate 542, the rolling linear bearing shaft penetrates through the rolling linear bearing sleeve, the rolling linear bearing shaft is provided with a rolling limiting block at the top, the bottom is connected with a roller seat, and the roller is rotatably connected in a roller door-shaped seat 544; the rolling cylinder 541 controls the rolling floating plate 542 to move up and down, and the rolling limiting block of the rolling linear bearing shaft drives the whole roller door-shaped seat 544 and the roller 545 to move up and down, so that the pressure of the roller 545 on the PE film is the gravity of the roller door-shaped seat 544 and the roller 545. When the film sticking mechanism 500 is reset, the roller 545 can apply pressure to the PE film stuck on the surface of the wafer by means of self gravity, so that the PE film can be stuck more firmly. Preventing detachment.
The working process comprises the following steps: the whole roll of the composite film is installed on the inflatable shaft 124, the end part of the composite film passes through the upper part of the antistatic driving roller 121 from the lower part of the first driven reversing roller 122, then passes through the lower part of the tensioning pressing roller 136, passes out of the upper part of the second driven reversing roller 123, enters the film moving mechanism 400, the lower moving sucker 420 moves the adsorption composite film, in the moving process, the moving adsorption rolling mechanism can tightly contact the composite film with the lower moving sucker 420, the lower moving sucker 420 moves the adsorption composite film to a film cutting position, and the film cutting mechanism 700 can accurately cut the PE film through a cutting knife controlled by a rodless cylinder and a guide rod cylinder and retains the release film. The release film is moved out of the lower moving sucker 420 and enters the leakage groove when the lower moving sucker 420 moves the film in the next period. After the film pasting mechanism 500 removes the cut PE film, the upper adsorption device 410 moves the composite film upwards, the lower moving sucker 420 resets, then the upper adsorption device 410 drives the composite film to move downwards, the sucker 420 approaches, and the lower moving sucker 420 adsorbs the composite film again. The film sticking mechanism 500 sticks a square PE film to the wafer surface, and when the film sticking mechanism resets, the roll pressing mechanism 540 sticks the square PE film to the wafer surface.
Under the combined action of the anti-static driving roller 121 and the electromagnetic brake connected with the air expansion shaft 124, the composite film is always in a tensioned state in the film releasing mechanism 100, and the film moving mechanism 400 is operated to ensure that the composite film is always controlled by the upper adsorption device 410 or the lower movable sucker 420 in the moving process, and the pressing mechanism 130 is driven in the film releasing mechanism 100, so that the composite film between the film releasing mechanism 100 and the film moving mechanism 400 can be adjusted to be always in the tensioned state. The film moving mechanism 400 ensures that the composite film is always in a tensioning state in the conveying process, and a rodless cylinder and a guide rail cylinder in the cutting mechanism can control a cutting knife to accurately cut the composite film. The film attaching mechanism 500 attaches the PE film after cutting to the wafer, and the roll pressing mechanism 540 in the film attaching mechanism 500 can attach the PE film more firmly.
The technical means disclosed by the scheme of the invention is not limited to the technical means disclosed by the embodiment, and also comprises the technical scheme formed by any combination of the technical features. It should be noted that modifications and adaptations to the invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (7)
1. The wafer splitting film placing and moving mechanism comprises a film placing mechanism and a film moving mechanism and is characterized in that the film placing mechanism and the film moving mechanism jointly control the composite film to enable the composite film to be in a tensioning state; the film moving mechanism comprises an upper adsorption device which moves up and down and a lower moving sucker which moves horizontally, and the lower moving sucker reciprocates along the moving direction of the composite film, so that the lower moving sucker moves along with the PE film; the upper adsorption device and the lower movable sucker continuously control the movement of the composite membrane; the upper adsorption device is driven by the vertical servo module to move up and down through the adjustable pressure type movable seat, the lower movable sucker drives the composite membrane to move to a membrane cutting position, the upper adsorption device moves down, the upper adsorption device and the lower movable sucker adsorb the composite membrane at the same time, the membrane cutting mechanism cuts the PE membrane above, the release membrane below is reserved, and when the release membrane is moved by the lower movable sucker to move the membrane in the next period, the lower movable sucker is moved out and enters the leakage groove; after the cut PE film is removed by the film pasting mechanism, the upper adsorption device moves upwards, the lower moving sucker resets, and then the upper adsorption device drives the composite film to move downwards to approach the sucker, so that the upper adsorption device and the lower moving sucker adsorb the composite film again and simultaneously.
2. The wafer sliver depositing and moving mechanism of claim 1, wherein the depositing mechanism comprises a depositing roller system arranged on a depositing fixing frame, and the depositing roller system comprises an antistatic driving roller, an air expansion shaft and an electromagnetic brake connected with the air expansion shaft; the air expansion shaft is used for fixing the composite film roll, the antistatic driving roller drives the composite film to be conveyed, and the antistatic driving roller and an electromagnetic brake connected with the air expansion shaft are mutually matched to tighten the composite film.
3. The film releasing and moving mechanism for wafer sliver releasing as set forth in claim 2, wherein the film releasing roller system set on the film releasing fixing frame is respectively a pneumatic shaft for fixing the composite film roll according to the moving direction of the PE film, an electromagnetic brake is connected to the end of the pneumatic shaft, the first driven reversing roller reverses the composite film for the first time, the antistatic driving roller drives the PE film to move, the tensioning pressing roller is used for tensioning the composite film so that the composite film contacts with the antistatic driving roller, and the second driven reversing roller outputs the composite film to the lower moving sucker.
4. The wafer sliver depositing and moving mechanism of claim 3, wherein the tensioning press roller is controlled by a driving pressing mechanism, the driving pressing mechanism comprises a pressing cylinder seat, a driving pressing cylinder, a tensioning pressing plate, a guide rail, a tensioning press roller door type fixing seat and a tensioning press roller; the lower pressure cylinder seat is fixed at the top of the film placing fixing frame; the driving lower air cylinder is fixed at the top of the lower air cylinder seat, and a piston rod of the driving lower air cylinder penetrates through the lower air cylinder seat and enters the inside of the film placing fixing frame; the guide rail is fixed on the side wall of the fixing frame, and the direction of the guide rail is consistent with the direction of a piston rod of the driving down-pressing cylinder; the tensioning compression roller door-shaped fixing seat is fixed at the tail end of a piston rod of the driving lower compression cylinder and slides in the guide rail; the tensioning press roller is rotationally connected to the tensioning press roller door-shaped fixing seat.
5. The wafer fragment film releasing and moving mechanism of claim 1, wherein the upper adsorption device comprises: the suction linear bearing comprises a suction linear bearing sleeve and a suction linear bearing shaft, the suction linear bearing sleeve is fixed at the top of the adjustable pressure type movable seat, the suction linear bearing shaft penetrates through the suction linear bearing sleeve, a suction linear bearing shaft limiting block is arranged at the top of the suction linear bearing shaft, and the direction of the suction linear bearing is consistent with the moving direction of the adjustable pressure type movable seat; the bottom is provided with the floating mounting plate of sucking disc, is provided with the spring between the floating mounting plate of sucking disc and the adjustable pressure formula removes the seat, and fixed position sucking disc is connected in the floating mounting plate bottom of sucking disc, and fixed position sucking disc passes through the upper airway and is connected with last negative pressure source.
6. The wafer sliver depositing and moving mechanism of claim 5, wherein the upper suction device further comprises a moving suction roll mechanism comprising: the device comprises a floating press roller cylinder, a floating plate, a floating press roller door-type fixing seat, a floating linear bearing and a floating press roller; the floating compression roller cylinder is fixedly connected to the adjustable pressure type movable seat, the floating plate is fixed at the tail end of a piston rod of the floating compression roller cylinder, the moving direction is consistent with that of the adjustable pressure type movable seat, floating linear bearings are arranged on two sides of the floating plate, each floating linear bearing comprises a floating linear bearing sleeve and a floating linear bearing shaft, each floating linear bearing sleeve is fixed on the floating plate, each floating linear bearing shaft penetrates through each floating linear bearing sleeve, a floating linear bearing shaft limiting block is arranged at the top of each floating linear bearing shaft, the bottom of each floating linear bearing shaft is connected with a floating compression roller door-type fixed seat, and each floating compression roller is rotatably connected to the corresponding floating compression roller door-type fixed seat; the floating cylinder controls the floating plate to move up and down, and the limiting block of the floating linear bearing shaft drives the whole floating press roller door-shaped seat and the floating press roller to move up and down, and the pressure of the floating press roller on the composite film is the gravity of the floating press roller door-shaped fixing seat and the floating press roller.
7. The wafer sliver depositing and moving mechanism as set forth in claim 5, wherein a lower negative pressure source is disposed in the lower moving sucker, the top of the lower moving sucker is a depositing position and a dispensing position, air holes are uniformly distributed at the tops of the depositing position and the dispensing position, the air holes are connected with the lower negative pressure source through a lower adsorption air passage, and the air holes of the depositing position and the dispensing position are connected with different lower negative pressure sources.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105492.5A CN114408650B (en) | 2022-01-28 | 2022-01-28 | Film releasing and transferring mechanism for wafer splinter |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105492.5A CN114408650B (en) | 2022-01-28 | 2022-01-28 | Film releasing and transferring mechanism for wafer splinter |
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| CN114408650A CN114408650A (en) | 2022-04-29 |
| CN114408650B true CN114408650B (en) | 2024-03-01 |
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| JP2006159488A (en) * | 2004-12-03 | 2006-06-22 | Daiichi Seiko Kk | Film pasting apparatus and film pasting method |
| CN102148177A (en) * | 2010-12-21 | 2011-08-10 | 上海技美电子科技有限公司 | Film adhesion device for film active release |
| CN202205803U (en) * | 2011-08-04 | 2012-04-25 | 厦门市弘瀚电子科技有限公司 | Full-automatic film and chip mounter |
| CN102463727A (en) * | 2010-11-17 | 2012-05-23 | 深圳市策维科技有限公司 | Fully automatic film sticking machine |
| TWM457288U (en) * | 2013-02-05 | 2013-07-11 | Shi Qi Technology Co Ltd | Wafer film pasting device and pulled film cutting mechanism thereof |
| CN209747463U (en) * | 2019-03-18 | 2019-12-06 | 广东思沃精密机械有限公司 | Film feeding device |
| CN210558648U (en) * | 2019-06-19 | 2020-05-19 | 杭州华滤膜科技有限公司 | Domestic RO membrane drop feed mechanism |
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2022
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006159488A (en) * | 2004-12-03 | 2006-06-22 | Daiichi Seiko Kk | Film pasting apparatus and film pasting method |
| CN102463727A (en) * | 2010-11-17 | 2012-05-23 | 深圳市策维科技有限公司 | Fully automatic film sticking machine |
| CN102148177A (en) * | 2010-12-21 | 2011-08-10 | 上海技美电子科技有限公司 | Film adhesion device for film active release |
| CN202205803U (en) * | 2011-08-04 | 2012-04-25 | 厦门市弘瀚电子科技有限公司 | Full-automatic film and chip mounter |
| TWM457288U (en) * | 2013-02-05 | 2013-07-11 | Shi Qi Technology Co Ltd | Wafer film pasting device and pulled film cutting mechanism thereof |
| CN209747463U (en) * | 2019-03-18 | 2019-12-06 | 广东思沃精密机械有限公司 | Film feeding device |
| CN210558648U (en) * | 2019-06-19 | 2020-05-19 | 杭州华滤膜科技有限公司 | Domestic RO membrane drop feed mechanism |
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| Publication number | Publication date |
|---|---|
| CN114408650A (en) | 2022-04-29 |
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