CN218447822U

CN218447822U - Wafer splitting and film moving mechanism

Info

Publication number: CN218447822U
Application number: CN202220236943.4U
Authority: CN
Inventors: 闫兴; 陶为银; 巩铁建; 蔡正道; 乔赛赛; 张伟; 鲍占林; 王鹏; 杜磊
Original assignee: Henan General Intelligent Equipment Co Ltd
Current assignee: Jiangsu General Semiconductor Co.,Ltd.
Priority date: 2022-01-28
Filing date: 2022-01-28
Publication date: 2023-02-03
Anticipated expiration: 2032-01-28

Abstract

The utility model discloses a wafer lobe of a leaf moves membrane mechanism, the wafer moves membrane mechanism and moves the sucking disc including the last adsorption equipment that reciprocates and horizontal migration's lower, moves the sucking disc down along the moving direction reciprocating motion of complex film for it takes the PE membrane to move the sucking disc down. The upper adsorption device and the lower movable sucker uninterruptedly control the movement of the composite membrane. The utility model discloses a wafer lobe of a leaf moves membrane mechanism, the PE membrane that the pad pasting mechanism will cut after accomplishing through removing adsorption equipment pastes on the wafer to the roll squeezer mechanism in the pad pasting mechanism can be more firm with the PE membrane subsides.

Description

Wafer splitting and film moving mechanism

Technical Field

The utility model belongs to the technical field of carborundum wafer lobe of a leaf, especially, relate to a wafer lobe of a leaf moves membrane mechanism.

Background

The carborundum wafer is processed through laser stealth cutting, the laser beam focuses on the inside of the wafer, the wafer at the focus position forms instant high temperature, a series of criss-cross damage layers are formed inside the wafer, the carborundum wafer is high in hardness and cannot crack the wafer in a film expanding mode, equipment needs to be suitable for breaking one by one along a wafer cutting path, the surface of a chip is sensitive to chips, a layer of PE film is pasted on the surface of the wafer in the splitting process, the direct contact between a cleaver of a splitting mechanism and the surface of the wafer is prevented, and the chips generated in the splitting process are prevented from being splashed and polluted.

The composite membrane is required to be always in a tensioned state in the conveying process, only one side of the composite membrane depends on suction force in the conveying process at present, and the composite membrane cannot be guaranteed to be always in a controlled state in the conveying process.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a can be in the transportation, wafer lobe of a leaf moves membrane mechanism that controls the complex film all the time.

The specific scheme is as follows:

the wafer splitting and film moving mechanism comprises an upper adsorption device moving up and down and a lower moving sucker moving horizontally, and the lower moving sucker reciprocates along the moving direction of the composite film, so that the PE film is driven to move by the lower moving sucker. The upper adsorption device and the lower movable sucker uninterruptedly control the movement of the composite membrane.

The upper adsorption device is driven by the vertical servo module to move up and down through the pressure-adjustable type moving seat, the lower moving sucker drives the composite film to move to the film cutting position, the upper adsorption device moves down to enable the upper adsorption device and the lower moving sucker to simultaneously adsorb the composite film, after the film cutting is completed, the upper adsorption device moves up, the lower moving sucker resets, and the upper adsorption device moves down to enable the upper adsorption device and the lower moving sucker to simultaneously adsorb the composite film again.

The upper adsorption device comprises: the adsorption linear bearing sleeve is fixed at the top of the adjustable pressure type moving seat, the adsorption linear bearing shaft penetrates through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limiting block is arranged at the top of the adsorption linear bearing shaft, and the direction of adsorbing the linear bearing is consistent with the moving direction of the adjustable pressure type moving seat; the bottom is provided with the unsteady mounting panel of sucking disc, is provided with the spring between unsteady mounting panel of sucking disc and the adjustable pressure formula removal seat, and fixed position sucking disc is connected in the unsteady mounting panel bottom of sucking disc, and fixed position sucking disc passes through the air flue and is connected with last negative pressure source.

Go up adsorption equipment and still including removing the adsorption roller pressing mechanism, remove the adsorption roller pressing mechanism and include: the floating compression roller comprises a floating compression roller cylinder, a floating plate, a floating compression roller door-shaped fixed seat, a floating linear bearing and a floating compression roller; the floating compression roller cylinder is fixedly connected to the adjustable pressure type movable seat, the floating plate is fixed at the tail end of a piston rod of the floating compression roller cylinder, the moving direction is consistent with that of the adjustable pressure type movable seat, floating linear bearings are arranged on two sides of the floating plate and comprise floating linear bearing sleeves and floating linear bearing shafts, the floating linear bearing sleeves are fixed on the floating plate, the floating linear bearing shafts penetrate through the floating linear bearing sleeves, floating linear bearing shaft limiting blocks are arranged at the tops of the floating linear bearing shafts, the bottoms of the floating linear bearing shafts are connected with the floating compression roller door type fixed seat, and the floating compression rollers are rotatably connected to the floating compression roller door type fixed seat. The floating cylinder controls the floating plate to move up and down, the limiting block through the floating linear bearing shaft drives the whole floating compression roller door type seat to move up and down with the floating compression roller, and the pressure of the floating compression roller on the PE film is the gravity of the floating compression roller door type fixed seat and the floating compression roller.

The lower movable sucker is internally provided with a lower negative pressure source, the top of the lower movable sucker is divided into a material placing position and a material taking position, air holes are uniformly distributed at the tops of the material placing position and the material taking position, the air holes are connected with the lower negative pressure source through lower adsorption air passages, and the material placing position and the material taking position are connected with different lower negative pressure sources.

The utility model discloses a wafer lobe of a leaf moves membrane mechanism, the PE membrane that the pad pasting mechanism will cut after accomplishing through removing adsorption equipment pastes on the wafer to the roll squeezer mechanism in the pad pasting mechanism can be more firm with the PE membrane subsides.

Drawings

FIG. 1 is a schematic view of the present invention;

fig. 2 is a side view of the present invention;

FIG. 3 is a schematic structural diagram of an unwinding mechanism;

FIG. 4 is a top view of the unwinding mechanism;

FIG. 5 is a schematic view of the structure of the drive push-down mechanism;

FIG. 6 is a side view of the drive hold down mechanism;

FIG. 7 is a schematic structural diagram of a film moving mechanism;

FIG. 8 is a side view of the film transfer mechanism;

FIG. 9 is a schematic view of the structure of the upper adsorption device;

FIG. 10 is a side view of the upper adsorption unit;

FIG. 11 is a bottom view of a first embodiment of an upper adsorption device;

FIG. 12 is a bottom view of the second embodiment of the upper adsorption device;

FIG. 13 is a top view of an embodiment of the lower moving chuck;

FIG. 14 is a top view of the second embodiment of the lower moving chuck;

FIG. 15 is a schematic structural view of a film sticking mechanism;

FIG. 16 is a schematic structural view of the circle cutting mechanism;

FIG. 17 is an enlarged view A of FIG. 16;

fig. 18 is a top view of fig. 16.

100. A film releasing mechanism, 110, a film releasing fixing frame, 120, a film releasing roller system, 121, an anti-static driving roller, 1211, an electromagnetic brake, 122, a first driven reversing roller, 123, a second driven reversing roller, 124, an air expanding shaft, 130, a driving pressing mechanism, 131, a pressing cylinder seat, 132, a driving pressing cylinder, 133, a tensioning pressing plate, 134, a guide rail, 135, a tensioning pressing roller door type fixing seat, 136, a tensioning pressing roller, 200, a vertical servo module, 300, a horizontal servo module, 400, a film moving mechanism, 410, an upper adsorption device, 411, an adjustable pressure type moving seat, 412, an upper negative pressure source, 413, an adsorption linear bearing, 414, a fixing position suction cup, 415, an adsorption linear bearing shaft limiting block, 420, a lower moving suction cup, 421, a discharging position, 422, a material taking position, 430, a moving adsorption roller pressing mechanism, 431, a floating pressing cylinder, 432, a floating plate, 433, a floating pressing roller door type fixing seat, 434, a floating linear bearing, 435, a floating press roller, 500, a film sticking mechanism, 510, a moving servo module, 511, a moving horizontal servo module, 512, a moving vertical servo module, 520, a moving adsorption base, 530, a moving adsorption device, 531, a moving adsorption linear bearing, 532, a moving adsorption fixing position sucker, 533, a moving adsorption limiting block, 540, a rolling mechanism, 541, a rolling cylinder, 542, a rolling floating plate, 543, a rolling linear bearing, 544, a roller door type seat, 545, a rolling shaft, 600, a circular cutting mechanism, 610, a ball screw rod assembly, 611, a screw rod, 612 nuts, 620, a base, 630, a cutting frame, 640, a cylindrical gear, 650, a rotating arm, 660, a cutter wheel mounting seat, 670, a swinging device, 671, a swinging plate, 672, a swinging shaft, 673, an adjusting screw rod, 674, a butterfly nut, 675, a semicircular gasket, 676, an adjusting plate, 680. buffer 681, buffer base plate 682, buffer spring 683, buffer spacer 684, buffer limit shaft 685, linear guide 686, buffer baffle 690, movable plate 691, knife flywheel 700, recovery mechanism 710, recovery carrier roller 800, air flotation carrying platform 900 and frame.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the implementations of the present invention, and not all implementations, and all other embodiments obtained by those skilled in the art without any inventive work are included in the scope of the present invention.

As shown in fig. 1 to 18, the wafer splitting, conveying, transferring and cutting mechanism includes a film placing mechanism 100, a film transferring mechanism 400, a circular cutting mechanism 600, a recovering mechanism 700 and a film pasting mechanism 500, wherein a composite film is in a controlled state in the film placing mechanism 100, the film transferring mechanism 400 and the film pasting mechanism 500, the composite film is kept tensioned all the time, the film transferring mechanism 400 transfers the composite film to the lower side of the circular cutting mechanism 600, the PE film is subjected to circular cutting, and after the circular cutting, the film transferring mechanism 400 transfers the composite film to the film pasting mechanism 400; the film moving mechanism 400 pastes the circular film after circular cutting to the upper surface of the wafer; the composite membrane without the circular membrane enters the lower part of the rack 900 from a leak groove on the rack 900 and is recovered by the recovery mechanism 700. Before the film sticking of the film sticking mechanism 500, the PE film is cut into a circular film matched with the wafer, so that the wafer disc is conveniently placed back into the playback bin again.

Release films are films whose surface energy is differentiated, and release films are not sticky or slightly sticky after being contacted with a particular material under limited conditions. One side that the PE membrane has glue with from the contact of type membrane for there is the adhesion between type membrane and the PE membrane, make the complex film can put membrane mechanism and move the membrane mechanism on by the transportation, can not make from type membrane and PE membrane separation. After the PE film is subjected to circular cutting, the film sticking mechanism is enabled to adsorb the PE film, so that the cut PE film is separated from the release film.

The film sticking mechanism 500 comprises a film releasing roller system 120 arranged on the film releasing fixing frame 110, and the film releasing roller system 120 comprises an anti-static driving roller 121, an air expansion shaft 124 and an electromagnetic brake 1211 connected with the air expansion shaft 124; the inflatable shaft 124 is used for fixing the composite film roll, the anti-static driving roller 121 drives the composite film to be conveyed, and the anti-static driving roller 121 is matched with the electromagnetic brake 1211 connected with the inflatable shaft 124 to tighten the composite film. The film placing roller system 120 conveys the composite film out of the film sticking mechanism 500, and in the conveying process, in order to avoid the phenomenon that the composite film is wrinkled and wound, the composite film is always in a tensioned state under the control of the anti-static driving roller 121 and the electromagnetic brake 1211.

The film placing roller system 120 on the film placing fixing frame 110 is respectively arranged according to the moving direction of the composite film, the air expanding shaft 124 is used for fixing the composite film roll, the end part of the air expanding shaft 124 is connected with an electromagnetic brake 1211, the composite film is firstly reversed by the first driven reversing roller 122, the anti-static driving roller 121 drives the composite film to move, the tensioning pressing roller 135 is used for tensioning the composite film, so that the composite film is in contact with the anti-static driving roller 121, and the composite film is output to the lower moving sucker 420 by the second driven reversing roller 123.

The tensioning pressing roller 135 is controlled by a driving pressing mechanism 130, and the driving pressing mechanism 130 comprises a pressing cylinder seat 131, a driving pressing cylinder 132, a tensioning pressing plate 133, a guide rail, a tensioning pressing roller 135 door-shaped fixed seat and a tensioning pressing roller 135; the pressing cylinder seat 131 is fixed on the top of the film placing fixing frame 110; the lower pressing cylinder 132 is driven to be fixed at the top of the lower pressing cylinder seat 131, and a piston rod of the lower pressing cylinder 132 is driven to penetrate through the lower pressing cylinder seat 131 and enter the film releasing fixing frame 110; the guide rail 134 is fixed on the side wall of the fixed frame, and the direction of the guide rail 134 is consistent with the direction of the piston rod driving the downward pressing cylinder 132; the tension compression roller door type fixing seat 135 is fixed at the tail end of a piston rod of the driving compression roller 132 and slides in the guide rail 134; the tension roller 136 is rotatably connected to the tension roller gate type fixing base 135. Driving the push down mechanism 130 can further control a state of the composite film in the unwinding mechanism.

The wafer film transfer mechanism 400 includes an upper adsorption device 410 moving up and down and a lower moving chuck 420 moving horizontally, and the lower moving chuck 420 reciprocates along the moving direction of the composite film, so that the composite film is carried by the lower moving chuck 420. The upper adsorption means 410 and the lower movable chuck 420 control the movement of the composite membrane without interruption. The lower movable suction cup 420 receives the composite film transferred out by the film pasting mechanism 500, and the composite film is adsorbed by the lower movable suction cup 420 and is continuously transferred along the moving direction of the composite film. The driving of the pressing mechanism 130 can adjust the composite film between the film placing mechanism 100 and the film moving mechanism 400, so that the composite film still keeps a controlled state between the film placing mechanism 100 and the film moving mechanism 400, and the composite film is always in a tensioned state.

The upper adsorption device 410 is driven by the vertical servo module 200 to move up and down through the pressure-adjustable moving base 411, the lower moving suction cup 420 drives the composite membrane to move to the membrane cutting position, the upper adsorption device 410 moves down, so that the upper adsorption device 410 and the lower moving suction cup 420 can adsorb the composite membrane at the same time, after the membrane cutting is completed, the upper adsorption device 410 moves up, the lower moving suction cup 420 resets, the upper adsorption device 410 moves down, and the upper adsorption device 410 and the lower moving suction cup 420 can adsorb the composite membrane at the same time. The cooperation between the lower movable suction cup 420 and the upper suction device 410 enables the composite film to be always controlled in the process of being conveyed, so that the composite film always keeps a tensioned state.

The upper adsorption device 410 includes: the device comprises an upper negative pressure source 412, an adsorption linear bearing 413 and a fixed-position sucker, wherein the upper negative pressure source 412 is arranged on an adjustable-pressure type moving seat 411, the adsorption linear bearing 413 comprises an adsorption linear bearing sleeve and an adsorption linear bearing shaft, the adsorption linear bearing sleeve is fixed at the top of the adjustable-pressure type moving seat 411, the adsorption linear bearing shaft penetrates through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limiting block 415 is arranged at the top of the adsorption linear bearing shaft, and the direction of the adsorption linear bearing 413 is consistent with the moving direction of the adjustable-pressure type moving seat 411; the bottom is provided with the sucking disc mounting panel that floats, is provided with the spring between sucking disc mounting panel that floats and the adjustable pressure formula removal seat 411, and fixed position sucking disc 414 is connected in sucking disc mounting panel bottom that floats, and fixed position sucking disc 414 passes through the upper airway and is connected with last negative pressure source 412.

In one embodiment, the fixing suction cup 414 may be a plate-shaped structure with a width larger than that of the composite membrane, so that the upper suction device 410 can ensure that the composite membrane is uniformly stressed when absorbing the composite membrane.

In another embodiment, the fixed-position suction cup 414 may also be a small circular suction cup, a plurality of fixed-position suction cups 414 and adsorption linear bearings 413 may be disposed, and the adsorption linear bearings 413 are uniformly distributed at the edge of the pressure-adjustable movable base 411, so that the upper adsorption device 410 can ensure that the composite membrane is uniformly stressed when adsorbing the composite membrane.

The circular cutting mechanism 600 comprises a precision ball screw assembly 610, the lower part of the outer side of a nut 612 of the ball screw assembly 610 is rotationally fixed on a cutting frame 630 through a bearing, the cutting frame 630 is a door-shaped frame, the cutting frame 630 is fixed on a rack 900 through a base 620, the upper part of the outer side of the nut 612 of the ball screw is sleeved with a toothed ring, and the toothed ring is meshed with a first gear at the output end of a screw 611 moving servo motor fixed on the circular cutting frame; the cylindrical gear 640 is coaxially fixed at the upper end of the screw 611, the cylindrical gear 640 is meshed with a second gear fixed at the output end of a screw 611 rotating servo motor fixed on the circular cutting tool rest, so that the nut 612 of the ball screw assembly rotates, and when the screw moving servo motor and the screw rotating servo motor rotate simultaneously, the screw 611 rotates; a rotating arm 650 is radially fixed at the lower end of the screw 611, a knife wheel mounting seat 660 is fixed at the end of the rotating arm 650, and a knife wheel 691 is connected to the end of the knife wheel mounting seat 660 through a swinging device 670.

A U-shaped notch is formed in the end, far away from the screw 611, of the cutter wheel mounting seat 660; the swing device 670 includes a swing plate 671, a swing shaft 672, an adjusting plate 676, an adjusting lead screw 673, and a movable plate 690; the swinging plate 676 is arranged in the U-shaped notch through a swinging shaft, the swinging shaft 672 is fixed on the side wall of the U-shaped notch through a bearing, and a margin is reserved between the swinging plate 676 and the adjacent side wall of the U-shaped notch; adjusting plates 676 are fixed at the top and the bottom of the U-shaped notch, grooves corresponding to the U-shaped notch are formed in the bottoms of the adjusting plates 676, and adjusting holes are formed in the tops of the adjusting plates; the adjusting screw 673 penetrates through the adjusting hole and penetrates through the swinging plate, the radial area of the adjusting screw is smaller than that of the adjusting hole, the adjusting screw is in threaded connection with the swinging plate 671, and butterfly nuts 674 are in threaded connection with the end parts of the adjusting screw 673; the movable plate 690 is connected to the side wall of the swing plate 671 extending out of the U-shaped notch. Wherein, be provided with semicircle gasket 675 between butterfly nut 674 and regulating plate 676, and semicircle gasket 675 passes and adjusts lead screw 673, and the arc face of semicircle gasket 675 contacts with regulating plate 676. The swing mechanism 670 can adjust the angle of the knife wheel 691.

A buffer device 680 is connected between the movable plate 690 and the swing plate 671, and the buffer device 680 comprises a buffer substrate 681, a buffer spring 682, a buffer limit shaft 684, a linear guide 685 and a buffer baffle 686; the buffer baffle 686 is fixed on the top of the movable plate 690; the buffer base 681 is connected with the side wall of the swinging shaft 672 extending out of the U-shaped notch, the buffer base 681 is connected with the slider of the linear guide 685, and a guide rail in the linear guide 685 is fixed on the movable plate 690; the buffer limiting shaft 684 penetrates through the buffer baffle 686, one end of the buffer limiting shaft is connected with the movable substrate, the other end of the buffer limiting shaft is connected with a buffer gasket 683, and a buffer spring 682 is sleeved between the buffer gasket 683 and the buffer baffle 686.

A door-shaped knife flywheel fixing seat is fixed at the bottom of the movable plate 690; the knife flywheel is coaxially fixed with a knife flywheel bearing, is rotatably connected with a door-shaped knife flywheel fixing seat through a knife flywheel pin shaft and fixes the knife flywheel 691 through a knife flywheel clamp spring. The composite film is moved to the lower part of the circular cutting mechanism 600 by the film moving mechanism 400, the cutter wheel is enabled to accurately cut the PE film by controlling the screw 611, after cutting, the composite film is continuously transported under the action of the film moving mechanism 400, and the PE film with the circular shape is moved to the film pasting mechanism 500. Before the circular PE film is taken away by the film sticking mechanism 500, the composite film is in a stable state.

The upper suction device 410 further includes a movable suction rolling mechanism 430, and the movable suction rolling mechanism 430 includes: a floating press roll cylinder 431, a floating plate 432, a floating press roll gate type fixing seat 433, a floating linear bearing 434 and a floating press roll 435; the floating pressure roller cylinder 431 is fixedly connected to the adjustable pressure type moving seat 411, the floating plate 432 is fixed at the tail end of a piston rod of the floating pressure roller cylinder 431, the moving direction is consistent with that of the adjustable pressure type moving seat 411, floating linear bearings 434 are arranged on two sides of the floating plate 432, each floating linear bearing 434 comprises a floating linear bearing sleeve and a floating linear bearing shaft, each floating linear bearing sleeve is fixed on the floating plate 432, each floating linear bearing shaft penetrates through each floating linear bearing sleeve, a floating linear bearing shaft limiting block is arranged at the top of each floating linear bearing shaft, the bottom of each floating linear bearing shaft is connected with the floating pressure roller door type fixing seat 433, and the floating pressure rollers 435 are rotatably connected to the floating pressure roller door type fixing seats 433. The floating compression roller cylinder 431 controls the floating plate 432 to move up and down, the whole floating compression roller door type seat 433 and the floating compression roller 435 are driven to move up and down through a limiting block of the floating linear bearing shaft, and the pressure of the floating compression roller 435 on the composite film is the gravity of the floating compression roller door type fixed seat 433 and the floating compression roller 435. When the end of the composite film is transferred by the lower movable suction cup 420, a certain included angle exists between the composite film and the lower movable suction cup 420, the floating press roller 435 presses the composite film to the lower movable suction cup 420 by the gravity of itself, so that the air between the composite film and the lower movable suction cup 420 is discharged, and the composite film is not wrinkled when being adsorbed by the lower movable suction cup 420.

The lower movable sucker 420 is internally provided with a lower negative pressure source, the top of the lower movable sucker 420 is divided into a material placing position 421 and a material taking position 422, air holes are uniformly distributed at the tops of the material placing position 421 and the material taking position 422, the air holes are connected with the lower negative pressure source through lower adsorption air passages, and the material placing position 421 and the air holes of the material taking position 422 are connected with different lower negative pressure sources.

In one embodiment, the air holes on the top of the lower suction tray are uniformly distributed at the material receiving position, and the air holes are also formed at the positions of the material discharging position 421 and the material taking position 422, and a lower negative pressure source is arranged at the moment. When the membrane is transferred, the composite membrane on the material placing position 421 and the material taking position 422 is always adsorbed.

The film attaching mechanism 500 includes: the servo module 510 of removal of installing in frame 900, remove and adsorb base 520 and remove adsorption equipment 530, it installs in the subassembly that removes servo module 510 and reciprocate to remove to adsorb base 520, it installs on removing and adsorbs base 520 to remove adsorption equipment 530, remove adsorption equipment 530 including removing and adsorbing linear bearing 531, remove and adsorb negative pressure source and remove and adsorb fixed position sucking disc 532, remove and adsorb linear bearing 531 including removing and adsorbing the linear bearing cover and removing and adsorbing the linear bearing axle, it fixes on removing and adsorbing base 520 to remove to adsorb the linear bearing cover, it passes and removes and adsorbs the linear bearing cover to remove to adsorb the linear bearing axle, it is provided with removal absorption stopper 533 to remove to adsorb the linear bearing axle top, the bottom is connected with removes and adsorbs fixed position sucking disc 532, it adsorbs the negative pressure source and is connected with removing and adsorbing fixed position sucking disc 532 through removing the absorption air flue to remove to adsorb. When adsorbing the PE film of the material taking position 422, the movable adsorption fixing position suction disc 532 can completely separate the PE film from the lower moving mechanism, and then the film is pasted along with moving the movable servo module 510 onto the air flotation carrying table 800. In the whole process, the PE film is completely adsorbed below the movable adsorption fixing position sucking disc 532, and the phenomenon of folding and curling cannot occur.

The mobile servo module 510 comprises a mobile vertical servo module 512 and a mobile horizontal servo module 511, the mobile horizontal servo module 511 is installed on the rack 900, the mobile vertical servo module 512 is slidably connected to the mobile horizontal servo module 511, and the mobile absorption base 520 is slidably connected to the mobile vertical servo module 512.

The movable adsorption base 520 is provided with a rolling mechanism 540, the rolling mechanism 540 comprises a rolling cylinder 541, a rolling floating plate 542, a rolling linear bearing 543, a rolling shaft door-shaped seat 544 and a rolling shaft 545, the rolling cylinder 541 is fixed on the movable adsorption base 520, and the rolling floating plate 542 is connected to the tail end of a piston rod of the rolling cylinder 541; the rolling linear bearing 543 comprises a rolling linear bearing sleeve and a rolling linear bearing shaft, the rolling linear bearing sleeve is fixed at the top of the rolling floating plate 542, the rolling linear bearing shaft penetrates through the rolling linear bearing sleeve, the top of the rolling linear bearing shaft is provided with a rolling limiting block, the bottom of the rolling linear bearing shaft is connected with a roller shaft seat, and the roller shaft is rotatably connected in the roller shaft door-shaped seat 544; the rolling cylinder 541 controls the rolling floating plate 542 to move up and down, the rolling limiting block of the rolling linear bearing shaft drives the whole roller door-shaped seat 544 and the rolling shaft 545 to move up and down, and the pressure of the rolling shaft 545 on the PE film is the gravity of the roller door-shaped seat 544 and the rolling shaft 545. When the film attaching mechanism 500 is reset, the rolling shaft 545 can apply pressure to the PE film attached to the surface of the wafer by means of the gravity of the rolling shaft, so that the PE film can be more firmly attached. Preventing detachment.

The working process is as follows: the whole roll of the composite film is installed on the air expansion shaft 124, the end part of the composite film penetrates through the position below the first driven reversing roller 122 and enters the position above the anti-static driving roller 121, then penetrates through the position below the tensioning pressing roller 135 and penetrates out of the position above the second driven reversing roller 123 and enters the film moving mechanism 400, the lower moving sucker 420 moves the adsorption composite film, in the moving process, the movable adsorption rolling mechanism 430 can enable the composite film to be tightly contacted with the lower moving sucker 420 and move to the position below the circular cutting mechanism 600, the PE film is accurately cut through the control screw 611 and the precise telescopic rod 650, after cutting, the composite film is continuously transported under the action of the film moving mechanism 400, and the PE film with the circular shape is moved to the position of the film sticking mechanism 500. The film attaching mechanism 500 absorbs the cut circular PE film and moves the film to the top of the wafer through the moving servo module 510, and the film is attached to the top of the wafer through the moving servo module 510. The composite film with the round PE film removed is moved by the lower movable suction cup continuously along the moving direction of the composite film, passes through the leak of the frame 900, and the cut composite film is recovered by the recovery carrier roller 710.

In the film releasing mechanism 100, under the combined action of the anti-static driving roller 121 and the electromagnetic brake 1211 connected with the air inflation shaft 124, the composite film is always in a tensioned state in the film releasing mechanism 100, when the film moving mechanism 400 works, the composite film is ensured to be always controlled by the upper adsorption device 410 or the lower moving suction cup 420 in the moving process, and the composite film between the film attaching mechanism 500 and the film moving mechanism 400 can be adjusted to be always in a tensioned state by driving the pressing mechanism 130 in the film releasing mechanism 100. Move membrane mechanism 400 and guarantee that the complex film is in the tensioning state all the time in transportation process, circle cutting mechanism 600 cuts into the size that needs with the PE membrane, can guarantee that the wafer can not produce and block when putting back the feed bin, and the complex film after the cutting is accomplished still firm be in down on the removal sucking disc 420. Take away the back with circular PE membrane, remaining complex film is driven by lower movable suction cup 420 and continues to move forward for remaining complex film can do not retrieve mechanism 700 and carry out the rewinding, helps handling remaining complex film.

The technical means disclosed by the scheme of the present invention is not limited to the technical means disclosed by the above embodiments, but also includes the technical scheme formed by the arbitrary combination of the above technical features. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, several improvements and modifications can be made, and these improvements and modifications are also considered as the protection scope of the present invention.

Claims

1. The wafer splitting and film moving mechanism is characterized by comprising an upper adsorption device moving up and down and a lower moving sucker moving horizontally, wherein the lower moving sucker reciprocates along the moving direction of a composite film, so that the PE film is driven to move by the lower moving sucker, and the upper adsorption device and the lower moving sucker uninterruptedly control the movement of the composite film.

2. The wafer cracking and film-moving mechanism of claim 1, wherein the upper suction device is moved up and down by the vertical servo module via an adjustable pressure type moving base, the lower moving chuck moves the composite film to a film cutting position, the upper suction device moves down to allow the upper suction device and the lower moving chuck to simultaneously suck the composite film, and after the film cutting is completed, the upper suction device moves up, the lower moving chuck resets, and the upper suction device moves down to allow the upper suction device and the lower moving chuck to simultaneously suck the composite film again.

3. The wafer splinting film moving mechanism of claim 2 wherein the upper adsorption device comprises: the adsorption linear bearing sleeve is fixed at the top of the adjustable pressure type moving seat, the adsorption linear bearing shaft penetrates through the adsorption linear bearing sleeve, an adsorption linear bearing shaft limiting block is arranged at the top of the adsorption linear bearing shaft, and the direction of adsorbing the linear bearing is consistent with the moving direction of the adjustable pressure type moving seat; the bottom is provided with the sucking disc mounting panel that floats, is provided with the spring between sucking disc mounting panel that floats and the adjustable pressure formula removal seat, and fixed position sucking disc is connected in sucking disc mounting panel bottom that floats, and fixed position sucking disc passes through the air flue and is connected with last negative pressure source.

4. The wafer fragmentation film moving mechanism of claim 3, wherein the upper adsorption device further comprises a movable adsorption rolling mechanism, and the movable adsorption rolling mechanism comprises: the floating compression roller fixing device comprises a floating compression roller cylinder, a floating movable plate, a floating compression roller door type fixing seat, a floating linear bearing and a floating compression roller; the floating compression roller air cylinder is fixedly connected to the adjustable pressure type moving seat, the floating plate is fixed at the tail end of a piston rod of the floating compression roller air cylinder, the moving direction is consistent with that of the adjustable pressure type moving seat, floating linear bearings are arranged on two sides of the floating plate and comprise floating linear bearing sleeves and floating linear bearing shafts, the floating linear bearing sleeves are fixed on the floating plate, the floating linear bearing shafts penetrate through the floating linear bearing sleeves, floating linear bearing shaft limiting blocks are arranged at the tops of the floating linear bearing shafts, the bottoms of the floating linear bearing shafts are connected with the floating compression roller door type fixing seat, the floating compression rollers are rotatably connected to the floating compression roller door type fixing seat, the floating air cylinder controls the floating plate to move up and down, the whole floating compression roller door type seat and the floating compression rollers are driven to move up and down through the limiting blocks of the floating linear bearing shafts, and the pressure of the floating compression rollers on the PE film is the gravity of the floating compression roller door type fixing seat and the floating compression rollers.

5. The wafer fragment film-moving mechanism according to claim 4, wherein a lower negative pressure source is arranged in the lower moving sucker, the top of the lower moving sucker is divided into a material placing position and a material taking position, air holes are uniformly distributed on the tops of the material placing position and the material taking position, the air holes are connected with the lower negative pressure source through lower adsorption air passages, and the air holes of the material placing position and the material taking position are connected with different lower negative pressure sources.