JPH06349727A - Method for applying photosensitive layer - Google Patents

Abstract

PURPOSE:To obtain a laminated photosensitive substrate having uniform sensitivity, resolution, etc., over the entire area of a sheet substrate by carrying a belt-like substrate having a photosensitive layer at a fixed speed regardless of whether the sheet substrate is held and thermocompression bonded. CONSTITUTION:A sheet substrate is timely extruded into the space between thermocompression bonding rollers 7 and 8 synchronously to a belt-like substrate 1 having a photosensitive layer carried at a fixed speed so that the stripping off section of the photosensitive layer can come to a prescribed position on the sheet substrate. The holding of the end of the substrate 1 by means of a belt 15 with suction is temporarily performed when the substrate 2 is continuously extruded into the space between the rollers 7 and 8 and, when the lamination is continuously performed by continuously extruding the substrate 2, the suction of the belt 15 is turned off and the substrate 1 is carried together with the substrate 2 in a state where the substrate 1 is stuck to the substrate 2. Therefore, the formation of creases and mixing of bubbles are eliminated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for laminating a photosensitive layer on a sheet substrate by thermocompression bonding a belt-shaped support with a photosensitive layer onto the sheet substrate.

[0002]

2. Description of the Related Art A conventional method for laminating photosensitive layers is disclosed in Japanese Patent Application No. 4-1.
As described in JP-A-52073, after the sheet substrate is preheated, before the photosensitive layers in the non-stackable portions of the leading edge portion and the trailing edge portion of the sheet substrate with the photosensitive layer-attached belt support enter the thermocompression bonding roller. The sheet substrate and the belt-shaped support with a photosensitive layer are sent together between the thermocompression-bonding rollers in the inactive state, and the thermocompression-bonding roller is operated to advance while sandwiching the thermocompression-bonding, then This is a method of laminating the photosensitive layer on the sheet substrate by cooling the thermocompression-bonded sheet substrate and peeling only the strip-shaped support from the sheet substrate together with the photosensitive layer not laminated on the sheet substrate.

[0003]

However, when the sheet substrate and the belt-shaped support with the photosensitive layer are fed between the opposing thermocompression-bonding rollers and the thermocompression-bonding roller is switched from the inoperative state to the operating state in this way, Excessive stress is momentarily applied to the layer, and wrinkles and air bubbles are mixed in.The heating state of the photosensitive layer does not reach a steady temperature at the start of operation, and there is a difference in sensitivity and resolution between the front and rear ends of the sheet substrate. It has the drawback of occurring. A first object of the present invention is to improve such a defect and to obtain a photosensitive layer laminated substrate which is free from wrinkles and air bubbles and has uniform sensitivity and resolution over the entire surface of the sheet substrate.

When cutting or peeling the photosensitive layer at the front end side and rear end side of the sheet substrate of the belt-like support with the photosensitive layer before entering the thermocompression bonding roller, the photosensitive layer is cut and peeled. Occasionally, chips of the photosensitive layer are generated, and the chips are scattered and adhere to the surface of the photosensitive layer or the sheet substrate,
The chips that have been thermocompression-bonded between the sheet substrate and the photosensitive layer as they are are disadvantageous in that they become foreign matter, resulting in a decrease in adhesion and defects such as uncuring during exposure.

Further, when the sheet substrate on which the belt-shaped support with the photosensitive layer is thermocompression bonded is cooled and only the belt-shaped support is peeled off from the laminated substrate, the photosensitive layer is exposed immediately after thermocompression bonding. There is a defect that foreign matter such as dust adheres to the surface of the photosensitive layer to cause a defect, or the surface of the photosensitive layer may be dried or swelled depending on the environment, resulting in changes in sensitivity and resolution.

A second object of the present invention is to improve such defects, prevent foreign substances from being caught or attached, and prevent the change in film quality of the photosensitive layer, thereby obtaining a photosensitive layer laminated substrate having few defects.

[0007]

The first object of the present invention is achieved, firstly, by conveying a belt-shaped support with a photosensitive layer at a constant speed regardless of the presence or absence of sandwich thermocompression bonding of the sheet substrate. To be done. Secondly, it is achieved by the opposing thermocompression bonding rollers holding a gap equal to or less than the thickness of the sheet substrate when the sheet substrate is not sandwiched by thermocompression. Thirdly, it is achieved by providing a means for contacting the belt-like support with the photosensitive layer with the thermocompression-bonding roller at a constant tension after the thermocompression-bonding roller. Examples of such means include a method of providing a device for holding the tip end or both ends of the belt-shaped support with a photosensitive layer while moving at a conveying speed after the thermocompression bonding roller. Fourthly, it is achieved by, after the thermocompression-bonding roller, a means for keeping the belt-shaped support with a photosensitive layer in contact with the thermocompression-bonding roller at a constant tension at all times when the sheet substrate is sandwiched by thermocompression. It

The second object of the present invention is first achieved by thermocompression-bonding a photosensitive layer to a sheet substrate and then cutting the strip-shaped support between the sheet substrates to separate the sheet substrates. . Secondly, it is achieved by turning the sheet substrate over during or after preheating. Third, a mechanism for removing unnecessary portions of the photosensitive layer provided on the belt-shaped support with the photosensitive layer (usually, making a cut around the photosensitive layer in the unnecessary portion and peeling off) is located on the leeward side of the sheet substrate transporting position. It is achieved by being located.

[0009]

First, the belt-shaped support with the photosensitive layer is conveyed at a constant speed regardless of the presence / absence of thermocompression sandwiching the sheet substrate, thereby switching from the inactive state to the operating state. Excessive stress is not applied and wrinkles and air bubbles are prevented from occurring. In addition, the time during which the belt-shaped support with the photosensitive layer is in contact with the thermocompression bonding roller is always constant, and thermocompression bonding is performed under uniform heating conditions within the sheet substrate surface.

Second, when the sheet substrate is not sandwiched and thermocompression-bonded, the pair of opposing thermocompression-bonding rollers holds a gap equal to or smaller than the thickness of the sheet substrate, so that when the sheet substrate is inserted. Since there is little change in the clamping pressure of the thermocompression bonding roller, thermocompression bonding is performed under uniform pressure conditions within the surface of the sheet substrate.

Thirdly, by providing a means for contacting the belt-like support with the photosensitive layer with the thermocompression-bonding roller at a constant tension after the thermocompression-bonding roller, the belt-like support with the photosensitive layer is provided with a means for contacting the thermocompression-bonding roller. The heat is evenly distributed, wrinkling of the belt-shaped support with the photosensitive layer is reduced, and wrinkles and air bubbles can be prevented.

Fourthly, the means for keeping the belt-like support with the photosensitive layer in contact with the thermocompression-bonding roller at a constant tension is kept inactive when sandwiching and thermocompression-bonding the sheet-base so that the sheet-base is heat-treated. In addition to the rotation force of the pressure roller, no extra tension is applied and thermocompression bonding is performed with a constant forward drive force.
Wrinkles and air bubbles can be prevented.

Fifth, after the photosensitive layer is thermocompression-bonded to the sheet substrate, the strip-shaped supports between the sheet substrates are cut and separated for each sheet substrate. By playing a role and peeling the strip-shaped support immediately before exposure, dust adhesion and alteration on the surface of the photosensitive layer are prevented.

[0014] Sixth, by reversing the front and back of the sheet substrate during preheating or after preheating, it is possible to prevent dust that has fallen or convected on the sheet substrate from becoming a defect.

Seventh, since the cutting and peeling mechanism of the portion of the photosensitive layer which does not need to be laminated provided on the belt-shaped support with the photosensitive layer is located on the lee side from the sheet substrate transporting position, chips of the photosensitive layer are generated. Since dust and dirt are driven downstream by the flow of air, it is improved that the defects get on the sheet substrate.

[0016]

EXAMPLE FIG. 1 is a schematic view of a photosensitive layer laminating apparatus used for carrying out the photosensitive layer laminating method of the present invention. The photosensitive layer laminating apparatus includes a sheet substrate upside-down section, a sheet substrate heating section,
It is composed of a photosensitive layer cut peeling section, a photosensitive layer thermocompression bonding section, a strip-shaped support cutting section, and a sheet substrate turnover section.

At the sheet substrate upside-down portion, the sheet substrate 2 sent by the transport roller 3 from left to right in FIG.
The thermocompression bonding surface of the sheet substrate 2 is directed downward by holding the flip-up arm 5 from below, lifting it, rotating the arm, turning it over, and placing it on the transport roller 3. There are vacuum suction, mechanical hand, etc. for holding the substrate of the inside-out arm 5, but the back side or the end face of the sheet substrate is always held and the surface is not in contact.
The transport roller 3 may be roller transport, belt transport, carrier transport, robot transport, or the like. Backside contact conveyance may be performed until the sheet substrate 2 is turned upside down, but after turning over, the sheet substrate 2 is conveyed at the edge contact so that the conveyance roller 3 does not contact the lower surface.

In the sheet substrate heating section, the heater 4 heats the sheet substrate 2 to a temperature of about 50 to 110 ° C. The heater 4 includes a far infrared heater, a nichrome wire heater, a hot air heater, and the like. The heater 4 is the seat substrate 2
May be provided above or below or both. Examples of the sheet substrate 2 include a copper clad glass epoxy resin substrate for a printed circuit board and a glass substrate.

On the other hand, the belt-shaped support 1 with the photosensitive layer is unwound from the belt-shaped support roll 13 with the photosensitive layer, and the protective film 2 is formed.
After peeling off 2 and collecting on the protective film collecting roll 14,
At the photosensitive layer cut / peeling portion, the portion of the photosensitive layer on the belt-shaped support with the photosensitive layer that does not need to be stacked is cut and peeled.

The photosensitive layer cutting and peeling portion is a belt-like support fixing base 9 with a photosensitive layer, which is capable of fixing and holding the belt-like support 1 with a photosensitive layer and being movable in the conveying direction of the belt-like support with a photosensitive layer, and the belt-like support with a photosensitive layer. It comprises a slide base 10 on which a cutter blade 11 and an adhesive tape 12 are fixed to a body fixing base which moves in a direction perpendicular to the conveying direction of the belt-shaped support 1 with a photosensitive layer, that is, in the photosensitive layer cutting direction.

The strip-shaped support fixing base 9 with the photosensitive layer is fixed and held at the time of peeling the photosensitive layer and is moved at the same speed as the conveying speed of the strip-shaped support 1 with the photosensitive layer to cut the photosensitive layer. When the peeling is completed, the fixing is released and the belt-shaped support 1 with the photosensitive layer is released to return to the start position.

On the slide base 10, a cutter blade 11 oriented perpendicular to the flow direction of the belt-shaped support 1 with a photosensitive layer is provided.
Two sheets are positioned in accordance with the width of peeling the photosensitive layer, and are fixed so as to hit the photosensitive layer with an adjustable constant blade pressure such as a cylinder or a spring. Further, the adhesive tape 12 is located between the two cutter blades, and the adhesive tape supply bobbin is attached to the surface of the photosensitive layer while being unwound when the photosensitive layer is cut, and the photosensitive layer while adhering and peeling the photosensitive layer. The recovery bobbin to be wound together is fixed.

In the photosensitive layer cutting and peeling operation, first, the belt-like support fixing base 9 with the photosensitive layer holds the belt-like support 1 with the photosensitive layer and moves at the same speed as the conveying speed of the belt-like support 1 with the photosensitive layer, The cutter blade 11 and the adhesive tape holder of the slide base 10 are pressed against the belt-shaped support fixing base 9 with the photosensitive layer and moved in the cutting direction. The cutter blade 11 cuts only the photosensitive layer on the belt-shaped support 1 with the photosensitive layer, and at the same time, while the adhesive tape 12 is unwound, it is pasted in the area between the two cutter blades 11 cut, this slide When the cutter blade 11 and the adhesive tape 12 of the table 10 move to at least the end of the belt-shaped support 1 with the photosensitive layer, the cutter blade 11 and the adhesive tape retainer are retracted. Then slide stand 1
When 0 returns to the starting position, the adhesive tape 12 is wound together with the photosensitive layer while peeling off the photosensitive layer and is collected by the collecting bobbin.

In the photosensitive layer cut and peeling operation, the belt-like support with photosensitive layer fixing base 9 is moved in synchronization with the conveyance of the belt-shaped support 1 with a photosensitive layer. Even when the body is moving, it can be cut and peeled at right angles to the width direction of the belt-shaped support 1 with a photosensitive layer.

The sticking length of the adhesive tape 12 is longer than the width of the belt-shaped support 1 with a photosensitive layer, sticks out to the belt-shaped support fixing base 9 with a photosensitive layer and sticks, and the protruding portion is peeled off. The peeling of the photosensitive layer can be facilitated by continuously peeling the photosensitive layer. Also,
At the peeling start end of the photosensitive layer, the peeling start end of the photosensitive layer can be surely peeled off by decreasing the adhesive tape collecting speed or the slide table moving speed.

At the time of peeling off the photosensitive layer, dust such as chips from the photosensitive layer increases. Therefore, an electrostatic removal blow process is performed on the cut peeling portion to suck dust generated by vacuum, or by using down-flow clean air. If clean measures such as spilling dust particles to the downstream where there is no problem of contamination are taken, dust generation is reduced and defects are reduced. Further, in order to improve the sharpness of the cutter blade 11 and to reduce the generation of chips of the photosensitive layer, the cutter blade 11, the belt-shaped support fixing base 9 with the photosensitive layer, and the belt-shaped support 1 with the photosensitive layer are set to 40 to 40 mm.
You may heat to 70 degreeC.

In the thermocompression-bonding roller portion, a pair of thermocompression-bonding rollers are provided at positions where an upper thermocompression-bonding roller 8 and a lower thermocompression-bonding roller 7 face each other above and below the sheet substrate, respectively. Both ends of 8 are structured such that a pressure is applied downward by a cylinder or the like. The upper and lower thermocompression bonding rollers cooperate with each other to perform thermocompression bonding of the sheet substrate together with the belt-shaped support with a photosensitive layer and to support and convey the sheet substrate. The upper and lower thermocompression bonding rollers are positioned in a non-contact state with a gap smaller than the thickness of the sheet substrate when the sheet substrate is not sandwiched. Thermocompression bonding rollers 8 and 7
Is a roller made of stainless steel or the like whose roller surface is covered with an elastic material such as silicone rubber, and an induction heating element or a sheath heater installed inside the roller is about 100 to about 150.
It is heated to ℃.

The belt-shaped support 1 with a photosensitive layer is wound around the lower thermocompression-bonding roller 7, and its end is held by the suction belt 15 on the exit side of the thermocompression-bonding roller. The belt 15 with suction moves at the same conveying speed as that of the belt-shaped support 1 with the photosensitive layer, and the suction 16 holds the end of the belt-shaped support 1 with the photosensitive layer from the lower side of the conveyor belt with holes by vacuum suction. When the sheet substrate 2 is not continuous, the thermocompression-bonding rollers 7 and 8 and the belt 15 with suction are synchronized with the conveyance speed of the belt-shaped support 1 with the photosensitive layer while holding the belt-shaped support 1 with the photosensitive layer. It's spinning.

Sheet substrate 2 preheated and turned inside out
When comes from the left, the sheet substrate pushing mechanism stops and waits. The edge of the photosensitive layer peeling portion of the belt-shaped support 1 with the photosensitive layer is sensed by a sensor by a change in reflectance or transmittance, and a constant speed is applied so that the edge of the photosensitive layer peeling portion comes to a predetermined position of the sheet substrate 2. The sheet substrate 2 is pushed out into the gap between the thermocompression-bonding rollers 7 and 8 by the pushing-out mechanism 6 in synchronization with the belt-shaped support 1 with a photosensitive layer that is conveyed by. At the same time as the sheet substrate 2 enters and is rolled into the gap, pressure is applied from above by the upper thermocompression bonding roller 8 to thermocompress the belt-shaped support 1 with the photosensitive layer and the sheet substrate 2. When the belt-shaped support 1 with the photosensitive layer is thermocompression bonded to the rear end position of the sheet substrate 2, the pressure of the upper thermocompression-bonding roller 8 is released, and the non-contact state is maintained with a gap smaller than the thickness of the sheet substrate.

On the other hand, in the meantime, the next sheet substrate is preheated and turned upside down, and is standing by in the sheet substrate pushing mechanism section, and the edge of the photosensitive layer peeling portion of the next belt-shaped support 1 with a photosensitive layer is sensed. The thermocompression-bonding rollers 7 and 8 are synchronized with the belt-shaped support 1 with the photosensitive layer conveyed at a constant speed so that the end of the photosensitive layer peeling portion comes to a predetermined position of the sheet substrate and the sheet substrate is pushed out at a timely timing by a pushing mechanism. Push it into the gap. In this way, the belt-shaped support 1 with the belt-shaped photosensitive layer is continuously supplied without stopping the conveyance of the belt-shaped support 1 with the photosensitive layer.
Then, the sheet substrate 2 is thermocompression bonded.

Further, at this time, the holding of the end of the belt-shaped support 1 with the photosensitive layer by the belt 15 with suction is a temporary holding when the sheet substrate 2 is not continuously fed to the thermocompression bonding rollers 7 and 8. When the sheet substrate 2 is loaded and the lamination is continuously performed, the suction of the belt 15 with suction is cut off, and the belt-shaped support 1 with a photosensitive layer is attached to the sheet substrate 2 to form a sheet. It is transported together with the substrate 2.

Next, at the cutting section of the belt-shaped support, a fixed blade 18 and a rotary blade 17 are installed below the conveyance level of the sheet substrate 2 with the belt-shaped support 1 with the photosensitive layer, and between the sheet substrates. When the photosensitive layer-equipped strip-shaped support portion having no photosensitive layer is conveyed to that position, the portion where the photosensitive layer is peeled off between the sheet substrates not laminated to the sheet substrate is cut to separate the sheet substrate.

In addition, in the strip-shaped support cutting portion, the sheet substrate 2
Even when the belt does not continue, the thermocompression-bonding rollers 7 and 8 and the belt 15 with suction are rotated in synchronization with the conveyance speed of the belt-shaped support with photosensitive layer 1 while holding the belt-shaped support with photosensitive layer 1. Since the belt-shaped support 1 with a photosensitive layer is always conveyed, the end of the belt-shaped support 1 with a photosensitive layer is cut off by the rotary cutter 17 and is dropped and collected in the collecting box below.

The detached sheet substrate 2 after the thermocompression bonding of the belt-shaped support 1 with a photosensitive layer is conveyed to the sheet substrate turnover portion with the belt-shaped support protruding from the edge, and the sheet substrate 1 is fed from above. The back surface is held by the turn-up arm 19, lifted, and the board turn-up arm 19 is rotated and turned over to be placed on the transport roller 3, so that the thermocompression bonding surface of the sheet substrate 2 faces upward, and the sheet substrate cassette is moved to the next step or sheet substrate cassette. Be recovered.

FIG. 2 is a sectional view of an example of the belt-shaped support 1 with a photosensitive layer used in the embodiment of the present invention. A photosensitive layer 21 is provided on the belt-shaped support 20, and a protective film 22 for protecting the photosensitive layer 21 is further provided on the photosensitive layer 21. As the belt-shaped support 20, a film (generally having a thickness of 10 to 200 μm) made of polyethylene terephthalate, polypropylene or other polymer can be used. The photosensitive layer 21 is formed of a photopolymerizable resist, and generally has a layer thickness of 1 to 3 μm. The photopolymerizable resist is not particularly limited, and any material may be used. An intermediate layer may be inserted between the belt-shaped support 20 and the photosensitive layer 21 in order to improve thermocompression bonding. The intermediate layer is, for example, a layer of polyvinyl alcohol or the like and generally has a layer thickness of 10 to 50 μm.

FIG. 3 is an explanatory view showing an example of a substrate patterning process using the photosensitive layer laminating method of the present invention. First, the belt-shaped support 1 with a photosensitive layer is thermocompression-bonded to the sheet substrate 2 using the photosensitive layer laminating method of the present invention. Next, only the strip-shaped support 20 is peeled off, and the photosensitive layer 21 is laminated on the sheet substrate 2. Next, it is exposed to ultraviolet rays through the pattern mask 23 to print a pattern on the photosensitive layer 21. During the development, the photosensitive layer 21 which is not exposed to light is dissolved in the developing solution, and only the portion of the photosensitive layer 21 exposed to the light remains, and a patterned photosensitive layer is formed on the sheet substrate. After that, a functional image is formed on the patterned photosensitive layer, or the substrate is etched using the photosensitive layer as a resist.

[0037]

According to the present invention, the belt-like support with the photosensitive layer is conveyed at a constant speed regardless of whether the sheet substrate is sandwiched by thermocompression bonding, when the sheet substrate is not sandwiched by thermocompression bonding. The thermocompression bonding roller holds a gap equal to or less than the thickness of the sheet substrate, and, after the thermocompression bonding roller, has a means for contacting the belt-shaped support with a photosensitive layer with the thermocompression bonding roller at a constant tension. Furthermore, this means has the effect of obtaining a photosensitive layer laminated substrate in which wrinkles and air bubbles are not mixed and sensitivity and resolution are uniform in the plane by a method such as deactivating when sandwiching and thermocompressing the sheet substrate. is there.

Further, after the belt-shaped support with the photosensitive layer is thermocompression bonded to the sheet substrate, the belt-shaped support between the sheet substrates is cut to separate each sheet substrate, the sheet substrates are turned upside down before thermocompression bonding, or , A photosensitive layer with less defects by preventing entrapment or adhesion of foreign matter by a method such as arranging a cut and peeling mechanism of a portion of the photosensitive layer provided on the belt-like support with a photosensitive layer on the leeward side of the sheet substrate conveying position. There is an effect of obtaining a laminated substrate.

[Brief description of drawings]

FIG. 1 is a schematic view of an example of a photosensitive layer laminating apparatus used for carrying out the photosensitive layer laminating method of the present invention.

FIG. 2 is a sectional view of an example of a belt-shaped support 1 with a photosensitive layer used in the present invention.

FIG. 3 is an explanatory view showing an example of a substrate patterning process using the photosensitive layer laminating method of the present invention.

[Explanation of symbols]

 1 Belt-shaped support with photosensitive layer 2 Sheet substrate 3 Conveying roller 4 Heater 5 Substrate flipping arm 6 Substrate pushing out mechanism 7 Lower thermocompression bonding roller 8 Thermocompression bonding roller 9 Upper strip-shaped support fixing base with photosensitive layer 10 Sliding base 11 Cutter Blade 12 Adhesive Tape 13 Strip Support Roll with Photosensitive Layer 14 Protective Film Recovery Roll 15 Belt with Suction 16 Suction 17 Rotary Cutter Blade 18 Fixed Blade 19 Substrate Reversing Arm 20 Strip Support 21 Photosensitive Layer 22 Protective Film 23 Mask

Claims (8)

[Claims] 1. The sheet substrate is preheated, and then the photosensitive layer in a portion not requiring lamination is sent between the thermocompression-bonding rollers facing each other together with the belt-shaped support with a photosensitive layer removed in advance so that the photosensitive layer adheres to the sheet substrate. In a method for laminating a photosensitive layer on a sheet substrate by advancing while advancing the attached belt-like support and the sheet substrate while sandwiching the sheet substrate, a belt-shaped support with a photosensitive layer is provided regardless of whether the sheet substrate is sandwiched by the thermocompression bonding. A method for laminating a photosensitive layer, characterized in that the photosensitive layer is conveyed at a constant speed. 2. The photosensitive layer laminating method according to claim 1, wherein the thermocompression-bonding rollers facing each other hold a gap equal to or less than the thickness of the sheet substrate when the sheet substrate is not sandwiched. 3. The method for laminating a photosensitive layer according to claim 1, further comprising a means for bringing the belt-shaped support with a photosensitive layer into contact with the thermocompression bonding roller at a constant tension after the thermocompression bonding roller. 4. The means for contacting the belt-like support with the photosensitive layer to the thermocompression-bonding roller at a constant tension at all times, while moving at a conveying speed while holding the end of the belt-like support with the photosensitive layer. A method for laminating a photosensitive layer, which is a device. 5. The means for contacting the belt-shaped support with a photosensitive layer with the thermocompression-bonding roller at a constant tension at all times according to claim 3 or 4, wherein the means is in a non-operating state at the time of sandwich thermocompression bonding of the sheet substrate. And a method for laminating a photosensitive layer. 6. The method for laminating photosensitive layers according to claim 1, wherein after the photosensitive layers are thermocompression bonded to the sheet substrates, the belt-shaped support between the sheet substrates is cut to separate the sheet substrates. 7. The photosensitive layer laminating method according to claim 1, wherein the sheet substrate is turned upside down during or after preheating. 8. The method for laminating a photosensitive layer according to claim 1, wherein the mechanism for removing the unnecessary portion of the photosensitive layer on the belt-shaped support with the photosensitive layer is located on the lee side of the sheet substrate transporting position.