WO2023008134A1 - 被覆工具および切削工具 - Google Patents

被覆工具および切削工具 Download PDF

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Publication number
WO2023008134A1
WO2023008134A1 PCT/JP2022/027013 JP2022027013W WO2023008134A1 WO 2023008134 A1 WO2023008134 A1 WO 2023008134A1 JP 2022027013 W JP2022027013 W JP 2022027013W WO 2023008134 A1 WO2023008134 A1 WO 2023008134A1
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Prior art keywords
content
atomic
coating layer
sample
layer
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PCT/JP2022/027013
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English (en)
French (fr)
Japanese (ja)
Inventor
啓 吉見
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京セラ株式会社
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Priority to JP2023538390A priority Critical patent/JPWO2023008134A1/ja
Priority to CN202280045205.4A priority patent/CN117545575A/zh
Publication of WO2023008134A1 publication Critical patent/WO2023008134A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material

Definitions

  • the present disclosure relates to coated tools and cutting tools.
  • a coated tool has a substrate and a coating layer located on the substrate.
  • the coating layer has a second coating layer comprising Ti, Si and N.
  • the total amount of Ti and Si in the metal elements contained in the second coating layer is 98 atomic % or more.
  • Ti, Si, and N are repeatedly increased and decreased in the thickness direction.
  • FIG. 1 is a perspective view showing an example of a coated tool according to an embodiment
  • FIG. FIG. 2 is a side cross-sectional view showing an example of the coated tool according to the embodiment.
  • FIG. 5 is a front view showing an example of the cutting tool according to the embodiment;
  • FIG. 6 shows sample no. 1 to No. 13 is a table showing the structure of the coating layer of No. 13.
  • FIG. FIG. 7 shows sample no. 1 to No. 13 is a table summarizing the results of cutting and peeling tests for No. 13;
  • the conventional technology described above has room for further improvement in terms of improving impact resistance.
  • ⁇ Coated tool> 1 is a perspective view showing an example of a coated tool according to an embodiment
  • FIG. 2 is a sectional side view which shows an example of the coated tool 1 which concerns on embodiment.
  • the coated tool 1 according to the embodiment has a tip body 2.
  • FIG. 1 shows a perspective view showing an example of a coated tool according to an embodiment
  • Chip body 2 has, for example, a hexahedral shape in which the upper and lower surfaces (surfaces intersecting the Z-axis shown in FIG. 1) are parallelograms.
  • the cutting edge has a first surface (eg, top surface) and a second surface (eg, side surface) contiguous with the first surface.
  • the first surface functions as a "rake surface” for scooping chips generated by cutting
  • the second surface functions as a "flank surface”.
  • a cutting edge is positioned on at least a part of the ridge line where the first surface and the second surface intersect, and the coated tool 1 cuts the work material by bringing the cutting edge into contact with the work material.
  • a through hole 5 penetrating vertically through the chip body 2 is located in the center of the chip body 2 .
  • a screw 75 for attaching the coated tool 1 to a holder 70, which will be described later, is inserted into the through hole 5 (see FIG. 5).
  • the chip body 2 has a substrate 10 and a coating layer 20. As shown in FIG. 2, the chip body 2 has a substrate 10 and a coating layer 20. As shown in FIG.
  • Substrate 10 is made of cemented carbide, for example.
  • Cemented carbide contains W (tungsten), specifically WC (tungsten carbide).
  • the cemented carbide may contain Ni (nickel) or Co (cobalt).
  • the substrate 10 is made of a WC-based cemented carbide containing WC particles as a hard phase component and Co as a main component of a binder phase.
  • the substrate 10 may be made of cermet.
  • the cermet contains, for example, Ti (titanium), specifically TiC (titanium carbide) or TiN (titanium nitride).
  • the cermet may contain Ni or Co.
  • the base 10 may be formed of a cubic boron nitride sintered body containing cubic boron nitride (cBN) particles.
  • Substrate 10 is not limited to cubic boron nitride (cBN) particles, but may contain particles such as hexagonal boron nitride (hBN), rhombohedral boron nitride (rBN), wurtzite boron nitride (wBN), and the like. .
  • the coating layer 20 is coated on the substrate 10 for the purpose of improving wear resistance, heat resistance, etc. of the substrate 10, for example.
  • the coating layer 20 covers the substrate 10 entirely.
  • the coating layer 20 may be positioned at least on the substrate 10 .
  • the first surface here, the upper surface
  • the first surface has high wear resistance and heat resistance.
  • the second surface here, side surface
  • FIG. 3 is a cross-sectional view showing an example of the coating layer 20 according to the embodiment.
  • FIG. 4 is a model enlarged view of the H section shown in FIG.
  • the covering layer 20 has a first covering layer 23 positioned on the intermediate layer 22 and a second covering layer 24 positioned on the first covering layer 23 .
  • the first coating layer 23 is selected from the group consisting of at least one element selected from the group consisting of Al, Group 5 elements, Group 6 elements and Group 4 elements excluding Ti, and C and N. It has at least one element, Si and Cr.
  • the first coating layer 23 contains Al, Cr, Si, and N. That is, the first coating layer 23 may be an AlCrSiN layer containing AlCrSiN, which is a nitride of Al, Cr and Si.
  • AlCrSiN means that Al, Cr, Si and N are present in an arbitrary ratio, and the ratio of Al, Cr, Si and N is not necessarily 1:1:1:1. It is not meant to exist.
  • the adhesion between the intermediate layer 22 and the covering layer 20 is high. This makes it difficult for the covering layer 20 to separate from the intermediate layer 22, so that the durability of the covering layer 20 is high.
  • the first covering layer 23 has a plurality of first layers 23a and a plurality of second layers 23b.
  • the first covering layer 23 has a striped structure in which first layers 23a and second layers 23b are alternately laminated in the thickness direction.
  • the first layer 23a is a layer in contact with the intermediate layer 22, and the second layer 23b is formed on the first layer 23a.
  • the thicknesses of the first layer 23a and the second layer 23b may each be 50 nm or less. Since the thin first layer 23a and the second layer 23b have a small residual stress and are less likely to be peeled off or cracked, the durability of the coating layer 20 is increased.
  • the second covering layer 24 is in contact with the second layer 23 b of the first covering layer 23 .
  • the second coating layer 24 may contain Ti, Si and N. That is, the second coating layer 24 may be a nitride layer (TiSiN layer) containing Ti and Si. Note that the expression “TiSiN layer” means that Ti, Si, and N are present in an arbitrary ratio, and that Ti, Si, and N are necessarily present in a ratio of 1:1:1. not something to do.
  • the adhesion resistance of the coated tool 1 can be improved.
  • the hardness of the second coating layer 24 is high, the wear resistance of the coated tool 1 can be improved.
  • the oxidation initiation temperature of the second coating layer 24 is high, the oxidation resistance of the coated tool 1 can be improved.
  • the second coating layer 24 may have a striped structure.
  • the second coating layer 24 has a Ti content (hereinafter referred to as “Ti content”), a Si content (hereinafter referred to as “Si content”), and an N content (hereinafter referred to as “Si content”). , “N content”) may repeat increase and decrease along the thickness direction of the second coating layer 24 .
  • Ti content a Ti content
  • Si content a Si content
  • Si content an N content
  • N content may repeat increase and decrease along the thickness direction of the second coating layer 24 .
  • the total of Ti and Si in the metal elements contained in the second coating layer 24 may be 98 atomic % or more.
  • the coated tool 1 having the second coating layer 24 having such a configuration has enhanced toughness of the coating layer and is excellent in impact resistance. Specifically, the coated tool 1 having the second coating layer 24 having such a configuration is excellent in fracture resistance and chipping resistance.
  • the second coating layer 24 may have a portion where the period of increase and decrease of the Ti content differs from the period of increase and decrease of the Si content.
  • the cycle of increase and decrease is, for example, the position where the Ti content (Si content) is maximized (or minimized) along the thickness direction of the second coating layer 24 and then the next maximum (or minimum). It is the distance to
  • the coated tool 1 having the second coating layer 24 having such a configuration maintains high hardness, improves toughness, and has excellent impact resistance.
  • the period of increase/decrease of the Ti content, the period of increase/decrease of the Si content, and the period of increase/decrease of the N content may be 1 nm or more and 15 nm or less.
  • the residual stress inside the coating layer is relaxed, the adhesion of the coating layer is improved, and the impact resistance is improved.
  • the ratio of Ti in the metal elements of the second coating layer 24 is 80 atomic % or more and 95 atomic % or less, and the ratio of Si in the metal elements of the second coating layer 24 is 5 atomic % or more and 20 atomic % or less. There may be.
  • the coated tool 1 having the second coating layer 24 having such a configuration has improved adhesion of the coating layer while maintaining high hardness, and furthermore has excellent toughness of the coating layer and exhibits high impact resistance.
  • the ratio of Ti to the metal elements of the second coating layer 24 may be 82 atomic % or more and 90 atomic % or less.
  • the coated tool 1 having the second coating layer 24 having such a configuration further improves toughness and exhibits high impact resistance.
  • An intermediate layer 22 may be positioned between the substrate 10 and the covering layer 20 . Specifically, the intermediate layer 22 is in contact with the upper surface of the substrate 10 on one surface (here, the lower surface) and on the lower surface of the coating layer 20 (the first coating layer 23) on the other surface (here, the upper surface). touch.
  • the intermediate layer 22 has higher adhesion to the substrate 10 than the coating layer 20 does.
  • metal elements having such properties include Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, and Ti.
  • the intermediate layer 22 contains at least one metal element among the above metal elements.
  • intermediate layer 22 may contain Ti.
  • Si is a metalloid element, metalloid elements are also included in metal elements in this specification.
  • the content of Ti in the intermediate layer 22 may be 1.5 atomic % or more.
  • the content of Ti in intermediate layer 22 may be 2.0 atomic % or more.
  • the intermediate layer 22 may contain components other than the above metal elements (Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Si, Y, Ti). However, from the viewpoint of adhesion to the substrate 10, the intermediate layer 22 may contain at least 95 atomic percent of the above metal elements in total. More preferably, the intermediate layer 22 may contain the above metal elements in a total amount of 98 atomic % or more.
  • the ratio of metal components in intermediate layer 22 can be identified by analysis using, for example, an EDS (energy dispersive X-ray spectroscope) attached to a STEM (scanning transmission electron microscope).
  • the substrate 10 and the coating layer 20 can be improved.
  • the intermediate layer 22 has high adhesion to the covering layer 20 , the covering layer 20 is less likely to separate from the intermediate layer 22 .
  • the thickness of the intermediate layer 22 may be, for example, 0.1 nm or more and less than 20.0 nm.
  • FIG. 5 is a front view showing an example of the cutting tool according to the embodiment.
  • the cutting tool 100 has a coated tool 1 and a holder 70 for fixing the coated tool 1.
  • the holder 70 is a rod-shaped member extending from a first end (upper end in FIG. 5) toward a second end (lower end in FIG. 5).
  • the holder 70 is made of steel or cast iron, for example. In particular, among these members, it is preferable to use steel with high toughness.
  • the holder 70 has a pocket 73 at the end on the first end side.
  • the pocket 73 is a portion to which the coated tool 1 is attached, and has a seating surface that intersects with the rotational direction of the work material and a restraining side surface that is inclined with respect to the seating surface.
  • the seating surface is provided with screw holes into which screws 75, which will be described later, are screwed.
  • the coated tool 1 is positioned in the pocket 73 of the holder 70 and attached to the holder 70 with screws 75 . That is, the screw 75 is inserted into the through hole 5 of the coated tool 1, and the tip of the screw 75 is inserted into the screw hole formed in the seating surface of the pocket 73 to screw the screw portions together. Thereby, the coated tool 1 is attached to the holder 70 so that the cutting edge portion protrudes outward from the holder 70 .
  • the embodiment exemplifies a cutting tool used for so-called turning.
  • Turning includes, for example, inner diameter machining, outer diameter machining, and grooving.
  • the cutting tools are not limited to those used for turning.
  • the coated tool 1 may be used as a cutting tool used for milling.
  • cutting tools used for milling include flat milling cutters, face milling cutters, side milling cutters, grooving milling cutters, single-blade end mills, multiple-blade end mills, tapered blade end mills, ball end mills, and other end mills. .
  • the coating layer may be formed, for example, by physical vapor deposition.
  • physical vapor deposition include ion plating and sputtering.
  • the coating layer when the coating layer is produced by the ion plating method, the coating layer can be produced by the following method.
  • metal targets of Cr, Si and Al, composite alloy targets, or sintered targets are prepared.
  • the target which is a metal source
  • a metal source is vaporized and ionized by arc discharge, glow discharge, or the like.
  • the ionized metal is reacted with a nitrogen source such as nitrogen (N 2 ) gas, etc., and deposited on the surface of the substrate.
  • a nitrogen source such as nitrogen (N 2 ) gas, etc.
  • An AlCrSiN layer can be formed by the above procedure.
  • the temperature of the substrate is set to 500 to 600° C.
  • the nitrogen gas pressure is set to 1.0 to 6.0 Pa
  • a DC bias voltage of ⁇ 50 to ⁇ 200 V is applied to the substrate
  • the arc discharge current is set to 100 to 100. It may be 200A.
  • the voltage and current values during arc discharge and glow discharge applied to an aluminum metal target, a chromium metal target, an aluminum-silicon composite alloy target, and a chromium-silicon composite alloy target are determined for each target. can be adjusted by controlling each independently.
  • the composition of the coating layer can also be adjusted by controlling the coating time and atmospheric gas pressure.
  • the amount of ionization of the target metal can be changed by changing the voltage/current values during arc discharge/glow discharge.
  • the ionization amount of the target metal can be changed periodically.
  • the ionization amount of the target metal can be changed periodically. Thereby, in the thickness direction of the coating layer, the content ratio of each metal element can be changed at each cycle.
  • the composition of Al, Si, and Cr is changed so that the amounts of Al and Si are reduced and the amounts of Cr are increased, and then the amounts of Al and Si are increased.
  • the composition of Al, Si, and Cr it is possible to produce a first coating layer having a first layer and a second layer, such that the amount of Cr is reduced.
  • the second coating layer which is a TiSiN layer
  • the second coating layer may be formed by physical vapor deposition.
  • a Ti metal target and a Ti—Si composite alloy target are prepared.
  • the second coating layer having a striped structure can be produced by independently controlling the voltage/current values applied to each prepared target during arc discharge/glow discharge for each target.
  • the temperature of the substrate is set to 500 to 600° C.
  • the nitrogen gas pressure is set to 1.0 to 6.0 Pa
  • a DC bias voltage of ⁇ 50 to ⁇ 200 V is applied to the substrate
  • the arc discharge current is set to 100 to 100. 200 A, and the arc current change period may be 0.01 to 0.5 min.
  • a coated tool was prepared by forming a second coating layer, which is a TiSiN layer, on a substrate made of WC. 1 to No. 12. Also, a coated tool was prepared by forming a first coating layer, which is an AlCrSiN layer, on a substrate made of WC, and forming a second coating layer, which is a TiSiN layer, on the first coating layer. 13. Sample no. The composition of the first coating layer 13 has is (Al 50 Cr 39 Si 11 )N. In addition, sample no. 1 to No. Sample No. 13 out of 13 2 to No. 11, No. 13 corresponds to an example of the present disclosure. Moreover, sample no. 1 to No. Sample No. 13 out of 13 1, No. 12 corresponds to a comparative example.
  • Fig. 6 shows sample No. 1 to No. 13 is a table showing the structure of the coating layer of No. 13.
  • FIG. As shown in FIG. In the second coating layer of 1, the Ti content and the Si content do not increase or decrease along the thickness direction.
  • Sample no. 1 has an average Ti content of 86 atomic % and an average Si content of 14 atomic % in the second coating layer. Moreover, sample no. 1 has a total value of Ti content and Si content of 100 atomic %.
  • the Ti content and the Si content increase or decrease along the thickness direction.
  • Sample No. 2 has a Ti content increase/decrease cycle of 5 nm, a Si content increase/decrease cycle of 5 nm, a maximum Ti content of 87 atomic %, a maximum Si content of 16 atomic %, and Ti
  • the minimum content is 84 atomic %
  • the minimum Si content is 13 atomic %
  • the average Ti content is 86 atomic %
  • the average Si content is 14 atomic %.
  • sample no. 2 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 3 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 87 atomic %, a maximum Si content of 16 atomic %, and Ti
  • the minimum content is 84 atomic %
  • the minimum Si content is 13 atomic %
  • the average Ti content is 86 atomic %
  • the average Si content is 14 atomic %.
  • sample no. 3 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 4 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 76 atomic %, a maximum Si content of 27 atomic %, Ti The minimum content is 73 atomic %, the minimum Si content is 24 atomic %, the average Ti content is 75 atomic %, and the average Si content is 25 atomic %. Moreover, sample no. 4 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 5 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 81 atomic%, a maximum Si content of 22 atomic%, and Ti
  • the minimum content is 78 atomic %
  • the minimum Si content is 19 atomic %
  • the average Ti content is 80 atomic %
  • the average Si content is 20 atomic %.
  • sample no. 5 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 6 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 91 atomic percent, a maximum Si content of 12 atomic percent, and Ti The minimum content is 88 atomic %, the minimum Si content is 9 atomic %, the average Ti content is 90 atomic %, and the average Si content is 10 atomic %. Moreover, sample no. 6 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 7 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 96 atomic %, a maximum Si content of 7 atomic %, and Ti
  • the minimum content is 93 atomic %
  • the minimum Si content is 4 atomic %
  • the average Ti content is 95 atomic %
  • the average Si content is 5 atomic %.
  • sample no. 7 has a total Ti content and Si content of 100 atomic %.
  • Sample No. 8 has a Ti content increase/decrease cycle of 15 nm, a Si content increase/decrease cycle of 15 nm, a maximum Ti content of 87 atomic %, a maximum Si content of 16 atomic %, Ti The minimum content is 84 atomic %, the minimum Si content is 13 atomic %, the average Ti content is 86 atomic %, and the average Si content is 14 atomic %. Moreover, sample no. 8 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 9 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 5 nm, a maximum Ti content of 87 atomic %, a maximum Si content of 16 atomic %, Ti The minimum content is 84 atomic %, the minimum Si content is 13 atomic %, the average Ti content is 86 atomic %, and the average Si content is 14 atomic %. Moreover, sample no. 9 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 10 has a Ti content increase/decrease cycle of 5 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 87 atomic %, a maximum Si content of 16 atomic %, Ti The minimum content is 84 atomic %, the minimum Si content is 13 atomic %, the average Ti content is 86 atomic %, and the average Si content is 14 atomic %. Moreover, sample no. The second coating layer 10 has a total value of Ti content and Si content of 100 atomic %.
  • Sample No. 11 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 85 atomic percent, a maximum Si content of 13 atomic percent, and Ti
  • the minimum content is 82 atomic %
  • the minimum Si content is 14 atomic %
  • the average Ti content is 84 atomic %
  • the average Si content is 14 atomic %.
  • sample no. 11 has a total Ti content and Si content of 98 atomic %.
  • Sample no. The balance other than Ti and Si in the second coating layer of 11 is Al.
  • Sample No. 12 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 82 atomic percent, a maximum Si content of 11 atomic percent, and Ti
  • the minimum content is 79 atomic %
  • the minimum Si content is 8 atomic %
  • the average Ti content is 81 atomic %
  • the average Si content is 9 atomic %.
  • sample no. 12 has a total Ti content and Si content of 90 atomic %.
  • Sample no. The balance other than Ti and Si in the second coating layer of 12 is Al.
  • Sample no. 13 has a Ti content increase/decrease cycle of 10 nm, a Si content increase/decrease cycle of 10 nm, a maximum Ti content of 87 atomic %, and a maximum Si content of 16 atomic %.
  • the minimum Ti content is 84 atomic %
  • the minimum Si content is 13 atomic %
  • the average Ti content is 86 atomic %
  • the average Si content is 14 atomic %.
  • sample no. 13 has an Al 50 Cr 39 Si 11 )N layer as the first covering layer.
  • Fig. 7 shows sample No. 1 to No. 13 is a table summarizing the results of cutting and peeling tests for No. 13;
  • the test conditions for the cutting test and peeling test are as follows.
  • the cutting test was carried out under the following conditions using a two-flute carbide ball end mill (model number: 2KMBL0200-0800-S4).
  • ⁇ Peeling test> A peel test was performed using a scratch tester. The load range was 20 to 150 N, and the load at which peeling occurred was evaluated.
  • the results of the cutting test were as follows. 1 is 59700 times, sample No. 2 for 74700 times, sample No. 3 for 99600 times, sample No. 4 64000 times, sample No. 5 is 69000 times, sample No. 6 for 74700 times, sample no. 7 for 64000 times, sample no. 8 is 81400 times, sample no. 9 89600 times, sample no. 10 is 64000 times, sample no. 11 is 64000 times, sample No. 12 is 59700 times, sample no. 13 was 128,000 times.
  • sample No. corresponding to the comparative example. 1, No. 12 the result of the cutting test was less than 60000 times
  • No. No. 13 has a cutting test result of 6000 times or more, and it can be seen that it has high impact resistance.
  • sample No. 2 is 75N
  • sample No. 3 is 80N
  • sample No. 4 is 70N
  • sample No. 5 is 75N
  • sample No. 6 is 80N
  • sample No. 7 is 90N
  • sample No. 8 is 77N
  • sample No. 9 is 78N
  • sample No. 10 is 75N
  • sample No. 11 is 78N
  • sample No. 12 is 70N
  • sample No. 13 was 100N.
  • the total of Ti and Si is 98 atomic % or more, Ti, Si, and N repeatedly increase and decrease in the thickness direction, and the ratio of Ti to the metal elements is 80 atoms. % or more and 95 atomic % or less, and the ratio of Si is 5 atomic % or more and 20 atomic % or less. 2 to No. 11 and sample no.
  • No. 13 had a load of 75 N or more when the coating layer was peeled off, indicating that it has high adhesion.
  • the coated tool according to the embodiment includes a base (base 10 as an example) and a coating layer (covering layer 20 as an example) located on the base. have.
  • the coating layer has a second coating layer (as an example, the second coating layer 24) having Ti, Si and N.
  • the total amount of Ti and Si in the metal elements contained in the second coating layer is 98 atomic % or more.
  • Ti, Si, and N are repeatedly increased and decreased in the thickness direction.
  • a coated tool according to the present disclosure includes a rod-shaped body having an axis of rotation and extending from a first end to a second end, a cutting edge located at the first end of the body, and a cutting edge extending from the cutting edge to the second end of the body. It may have a groove extending spirally toward the side.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
PCT/JP2022/027013 2021-07-30 2022-07-07 被覆工具および切削工具 WO2023008134A1 (ja)

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CN202280045205.4A CN117545575A (zh) 2021-07-30 2022-07-07 涂层刀具和切削刀具

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002331408A (ja) * 2001-05-11 2002-11-19 Hitachi Tool Engineering Ltd 耐摩耗皮膜被覆工具
JP2009167498A (ja) * 2008-01-18 2009-07-30 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及び硬質皮膜被覆部材の製造方法
JP2018202505A (ja) * 2017-05-31 2018-12-27 住友電気工業株式会社 表面被覆切削工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002331408A (ja) * 2001-05-11 2002-11-19 Hitachi Tool Engineering Ltd 耐摩耗皮膜被覆工具
JP2009167498A (ja) * 2008-01-18 2009-07-30 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及び硬質皮膜被覆部材の製造方法
JP2018202505A (ja) * 2017-05-31 2018-12-27 住友電気工業株式会社 表面被覆切削工具

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