WO2022262450A1 - 显示装置及其制作方法 - Google Patents
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- WO2022262450A1 WO2022262450A1 PCT/CN2022/090940 CN2022090940W WO2022262450A1 WO 2022262450 A1 WO2022262450 A1 WO 2022262450A1 CN 2022090940 W CN2022090940 W CN 2022090940W WO 2022262450 A1 WO2022262450 A1 WO 2022262450A1
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
Definitions
- the present invention relates to the field of display technology, and in particular to a display device and a manufacturing method thereof.
- foldable display devices With the maturity of flexible folding screen technology, foldable display devices will be a major trend in the development of mobile terminals in the future. This type of display device looks similar in size to a traditional mobile phone when folded and is easier to carry. When unfolded, its display screen can reach about twice the size of a traditional mobile phone screen, bringing a new dimension to users in the fields of reading, gaming and office work. Visual experience and convenience.
- the cover of the traditional non-folding display device is a glass cover, which can well resist the impact of external force and effectively protect the display screen from being cracked.
- the cover plate in the foldable display device is formed of flexible materials. When the screen of the display device is squeezed, bumped and other stress scenarios, the cover plate cannot effectively protect the display screen, resulting in the collapse of the foldable display device. , Falling balls, falling, etc. are less reliable.
- an embodiment of the present application provides a display device, including:
- an array substrate comprising a substrate and an array layer located on one side of the substrate;
- a cover plate the cover plate is located on the side of the array layer facing away from the substrate, the cover plate includes a first film layer and a second film layer, the first film layer is located on the back of the second film layer towards the substrate side;
- the first film layer is formed of a high modulus material
- the elastic modulus of the high modulus material is E1, 50Mpa ⁇ E1 ⁇ 5Gpa
- the second film layer is made of a viscous and shear thickening material Formation of modified energy-absorbing and impact-resistant materials.
- the modified energy-absorbing and impact-resistant material includes modified silica gel, modified thermoplastic polyurethane elastomer rubber, modified polyurethane or modified shear thickening material.
- the molecular structure of the modified energy-absorbing and impact-resistant material includes a bonded polymer molecular main chain and a modified polymer molecular main chain, wherein the modified polymer molecular main chain has hydrogen A bond or a coordinate bond, the coordinate bond includes a boron-oxygen bond, a metal-catechol or a metal-histidine.
- the elastic modulus of the second film layer is E2, 10Kpa ⁇ E2 ⁇ 500Mpa.
- the film thickness of the first film layer is smaller than the film thickness of the second film layer.
- the cover plate further includes a third film layer, the third film layer is located on the side of the second film layer facing the substrate, and the third film layer is made of high modulus material Formed, the elastic modulus of the high modulus material is E3, 50Mpa ⁇ E3 ⁇ 5Gpa.
- the cover plate further includes a fourth film layer, the fourth film layer is located on the side of the second film layer facing the substrate, and the fourth film layer is composed of adhesive and shear film layers.
- a modified energy-absorbing and impact-resistant material with thickening properties is provided.
- the array layer includes a protective layer, a semiconductor layer, a first gate insulating layer, a first gate layer, a second gate insulating layer, a second gate layer, an interlayer insulating layer and a source-drain layer, the inorganic insulating layer including the protective layer, the first gate insulating layer, the second gate insulating layer, and the interlayer insulating layer;
- the protective layer has a first hollow part, and in a direction perpendicular to the plane where the substrate is located, the first hollow part does not overlap with the semiconductor layer;
- the first gate insulating layer has a second hollow part, and in a direction perpendicular to the plane where the substrate is located, the second hollow part does not overlap with the first gate layer;
- the second gate insulating layer has a third hollow part, and in a direction perpendicular to the plane where the substrate is located, the third hollow part does not overlap with the second gate layer;
- the interlayer insulating layer has a fourth hollow part, the display device includes a display area, and in a direction perpendicular to the plane where the substrate is located, the fourth hollow part covers the display area.
- the display device further includes a protective film, and the protective film is located on a side of the cover plate facing away from the substrate;
- the protective film further includes a hard coat layer, the hard coat layer is located between the anti-reflection layer and the cover plate;
- the hardness of the hard coating is h, 1H ⁇ h ⁇ 2H, and/or, in the direction perpendicular to the plane where the substrate is located, the film thickness of the hard coating is D1, 5 ⁇ m ⁇ D1 ⁇ 8 ⁇ m, And/or, the elastic modulus of the hard coating is E4, 80Gpa ⁇ E4 ⁇ 100Gpa.
- the display device further includes an adhesive layer, the adhesive layer is located between the cover plate and the array layer, the glass transition temperature of the adhesive layer is Tg, and Tg ⁇ -40°C .
- the glue layer solution forming the glue layer is synthesized from materials including the following mass percentages: 40% to 66% of the first soft monomer, 2% to 8% of the second soft monomer, and 0.05% to 0.4% of the initiator , 0.05% to 0.5% of crosslinking agent, 2% to 10% of hard monomer, 30% to 50% of macromolecular polymer;
- the glass transition temperature of the first soft monomer and the second soft monomer is less than or equal to -40°C, and the glass transition temperature of the hard monomer is greater than or equal to 0°C.
- the hard monomer includes at least one of hydroxyl acrylate monomer, carboxyl acrylate monomer, amino acrylate monomer, and dicyclopentyl acrylate;
- the initiator includes a free radical photoinitiator
- the crosslinking agent includes a bifunctional acrylate active polymer, and the molecular weight of the crosslinking agent is greater than or equal to 200 g/mol and less than or equal to 5000 g/mol;
- the macromolecular polymer is formed by prepolymerization of the first soft monomer, the second soft monomer and the hard monomer, and the molecular weight of the macromolecular polymer is greater than or equal to 10 ⁇ 10 4 g /mol and less than or equal to 100 ⁇ 10 4 g/mol.
- the embodiment of the present application also provides a method for manufacturing a display device, including:
- the process of forming the cover plate includes: forming a second film layer on the side of the array layer facing away from the substrate, the second film layer is modified by a viscous and shear thickening Formed from an energy-absorbing and impact-resistant material; a first film layer is formed on the side of the second film layer facing away from the substrate, the first film layer is formed of a high-modulus material, and the elasticity formed by the high-modulus material
- the modulus is E1, 50Mpa ⁇ E1 ⁇ 5Gpa.
- the process of forming the cover plate before forming the second film layer, further includes: a third film layer on the side of the array layer facing away from the substrate, the third film layer
- the layer is formed of a high modulus material, and the elastic modulus of the high modulus material is E3, 50Mpa ⁇ E3 ⁇ 5Gpa.
- the process of forming the array layer includes:
- a protective layer, a semiconductor layer, a first gate insulating layer, a first gate layer, a second gate insulating layer, a second gate layer and an interlayer insulating layer are sequentially formed on the substrate, and the inorganic insulating layer including the protective layer, the first gate insulating layer, the second gate insulating layer and the interlayer insulating layer;
- the manufacturing method further includes forming a protective film including an anti-reflection layer;
- the process of forming the anti-reflection layer includes: forming inner core microspheres/microemulsions by self-assembly or surfactants, using sol-gel method to prepare silica shells on the surface of the inner core microspheres, and then repeatedly Washing and taking away the inner core microspheres to form hollow silica, the particle size of the hollow silica is r, 25nm ⁇ r ⁇ 30nm, and/or, the particle wall thickness of the hollow silica is k , 10nm ⁇ k ⁇ 12nm.
- the process of forming the protective film further includes forming a hard coat layer, the hardness of the hard coat layer is h, 1H ⁇ h ⁇ 2H; and/or, In the direction perpendicular to the plane where the substrate is located, the film thickness of the hard coating is d4, 5 ⁇ m ⁇ d4 ⁇ 8 ⁇ m; and/or, the elastic modulus of the hard coating is E4, 80Gpa ⁇ E4 ⁇ 100Gpa .
- the manufacturing method before forming the second film layer, the manufacturing method further includes forming an adhesive layer;
- the process of forming the adhesive layer includes: configuring an adhesive layer solution and preparing an adhesive layer using the configured adhesive layer solution, wherein the adhesive layer solution is synthesized from materials including the following mass percentages: the first soft monomer 40% to 66%, the second soft monomer 2% to 8% of the second soft monomer, 0.05% to 0.4% of the initiator, 0.05% to 0.5% of the crosslinking agent, 2% to 10% of the hard monomer, and 30% to 50% of the macromolecular polymer; the first The glass transition temperature of the soft monomer and the second soft monomer is less than or equal to -40°C, and the glass transition temperature of the hard monomer is greater than or equal to 0°C.
- the cover plate in the display device is a laminated structure formed by laminating at least the first film layer and the second film layer.
- the first film layer and the second film layer by designing the first film layer and the second film layer, It has different characteristics, and the mutual cooperation between the first film layer and the second film layer can be used to make the cover plate have good impact resistance, scratch resistance and bending performance, and improve the protection of the display device. ability.
- the elastic modulus of the first film layer is higher, and the hardness is correspondingly higher.
- the first film layer with higher hardness can not only improve the scratch resistance, prevent the screen of the display device from being scratched, but also effectively reduce the deformation under impact stress or extrusion stress, thereby Effectively reduce the strain of the film layer inside the display device, such as the inorganic layer.
- the second film layer can be used to further achieve the cushioning effect: on the one hand, the second film layer The layer can convert the mechanical energy generated by impact or extrusion into heat energy, and absorb the impact energy or extrusion energy. On the other hand, the second film layer has shear thickening properties. At low stress rates, the second film layer maintains The material is soft, and its bending performance is better. Under high stress rate, the elastic modulus of the second film layer increases, which can effectively block the external impact stress or extrusion stress, and protect the display device from damage.
- the second film layer is sticky, which improves the adhesion between the second film layer and the adjacent film layers on both sides.
- the display device When the display device is bent or subjected to external force, it can reduce the risk of the second film layer detaching, thereby improving the adhesion of the second film layer.
- FIG. 1 is a schematic structural view of a display device in the prior art
- FIG. 2 is another schematic structural view of a display device in the prior art
- FIG. 3 is a schematic structural view of a light emitting device layer in the prior art
- FIG. 4 is a schematic structural diagram of a display device provided by an embodiment of the present invention.
- Fig. 5 is a schematic diagram of the molecular structure of the modified energy-absorbing and impact-resistant material provided by the embodiment of the present invention.
- FIG. 6A is another schematic structural view of a display device provided by an embodiment of the present invention.
- FIG. 6B is another structural schematic diagram of a display device provided by an embodiment of the present invention.
- FIG. 7 is a schematic diagram of cracking of an inorganic insulating layer in the prior art
- Fig. 8 is an enlarged schematic view of area A in Fig. 7;
- FIG. 9 is a schematic diagram of a bending direction of a display device in the prior art.
- FIG. 10 is a schematic diagram of bending of a display device in the prior art
- Fig. 11 is a schematic diagram of the front of the display device being squeezed in the prior art
- FIG. 12 is another structural schematic diagram of a display device provided by an embodiment of the present invention.
- FIG. 13 is another structural schematic diagram of a display device provided by an embodiment of the present invention.
- Fig. 14 is a schematic diagram of the bending conditions provided by the embodiment of the present invention.
- Fig. 15 is a schematic diagram of the extrusion working conditions provided by the embodiment of the present invention.
- FIG. 16 is a top view of a display device provided by an embodiment of the present invention.
- Fig. 17 is a sectional view along the direction A1-A2 of Fig. 16;
- Fig. 18 is a schematic structural diagram of a protective film provided by an embodiment of the present invention.
- Fig. 19 is a schematic diagram of the protective film provided by the embodiment of the present invention being scratched
- Fig. 20 is a schematic diagram of the deformation of the protective film provided by the embodiment of the present invention.
- Fig. 22 is a simulation curve diagram of force and simulation time provided by the embodiment of the present invention.
- FIG. 23 is another structural schematic diagram of a display device provided by an embodiment of the present invention.
- Fig. 24 is a flow chart of the manufacturing method provided by the embodiment of the present invention.
- Fig. 25 is a structural flow chart of the fabrication method of the array layer provided by the embodiment of the present invention.
- Figure 26A is a schematic diagram of the molecular structure of the sulfonium salt provided by the embodiment of the present invention.
- Fig. 26B is a schematic diagram of the molecular structure of the ladder-shaped siloxane provided by the embodiment of the present invention.
- Fig. 26C is a schematic diagram of the molecular structure of the cage siloxane provided by the embodiment of the present invention.
- the present invention Before explaining the technical solution provided by the present invention, the present invention firstly describes the structure of the display device in detail, so as to have a deeper understanding of the display device:
- FIG. 1 is a schematic structural view of a display device in the prior art.
- the display device includes a stacked substrate 101, an array substrate 102, a light emitting device layer 103, an encapsulation layer 104, a polarizer 105, and a touch layer.
- the display device further includes a driving chip 108 bound on the array substrate 102 .
- FIG. 2 is another schematic structural view of a display device in the prior art.
- the substrate 101 may specifically include a steel sheet 109, and a transition layer 110 such as a base film and adhesive
- the array substrate 102 may specifically include a poly A substrate 111 formed of an imide (Polyimide, PI) material, and an array layer 112 located on one side of the substrate 111, the array layer 112 may specifically include semiconductor layers and metals for forming electronic devices (such as transistors and storage capacitors) layer, and multiple inorganic insulating layers.
- Fig. 3 is a schematic structural diagram of a light-emitting device layer in the prior art. As shown in Fig.
- the light-emitting device layer 103 may specifically include a stacked anode 113, a hole injection layer 114, a hole transport layer 115, a light-emitting layer 116, an electron
- the transport layer 117, the electron injection layer 118 and the cathode 119 when driving the display device to emit light, the electronic devices in the array layer 112 transmit the driving current to the anode 113, and the electrons and holes are respectively injected into the light emitting layer 116 to recombine and emit light.
- the encapsulation layer 104 may specifically include a first inorganic encapsulation layer 120, an organic encapsulation layer 121, and a second inorganic encapsulation layer 122 that are laminated. Light emitting devices and electronic devices are protected.
- the TPU film is made of rubber. Although the material is soft, it can absorb a certain amount of impact energy, but the surface is poor in scratch resistance and scratch resistance, and it is also not resistant to extrusion.
- the cover plate 107 in the existing display device it is difficult for the cover plate 107 in the existing display device to have good impact resistance, scratch resistance and bending performance, resulting in poor reliability of the display device.
- FIG. 4 is a schematic structural view of the display device provided by an embodiment of the present invention.
- the display device includes an array substrate 1, and the array substrate 1 includes a substrate 2 and the array layer 3 on one side of the substrate 2.
- the display device also includes a cover plate 4.
- the cover plate 4 is located on the side of the array layer 3 facing away from the substrate 2.
- the cover plate 4 includes a first film layer 5 and a second film layer 6.
- the first film layer 5 is located on the second film layer 6. facing away from the substrate 2 side.
- the first film layer 5 is formed by a high modulus material, and the elastic modulus of the high modulus material is E1, 50Mpa ⁇ E1 ⁇ 5Gpa.
- the first film layer 5 can be TPU, polyurethane (polyurethane, PU) Or polycarbonate (Polycarbonate, PC), PET, PI, polymethyl methacrylate (Polymethyl Methacrylate, PMMA) and other organic materials.
- the second film layer 6 is formed of a modified energy-absorbing impact-resistant material having viscous and shear thickening properties.
- the cover plate 4 in the display device is a laminated structure formed by laminating at least the first film layer 5 and the second film layer 6.
- the first film layer 5 and the second film layer 6 is designed to have different characteristics, and the mutual cooperation of the performance of the first film layer 5 and the second film layer 6 can be used to make the cover plate 4 have good impact resistance, scratch resistance and bending performance , improve the protection ability of the display device.
- the elastic modulus of the first film layer 5 is relatively high, and the hardness is relatively high.
- the first film layer 5 with higher hardness can not only improve the scratch resistance, prevent the screen of the display device from being scratched, but also effectively reduce the deformation under impact stress or extrusion stress. Variable, thereby effectively reducing the strain of the film layers inside the display device, such as the inorganic layer.
- the second film layer 6 can be used to further achieve the cushioning effect: on the one hand, The second film layer 6 can convert the mechanical energy generated by impact or extrusion into heat energy, and absorb the impact energy or extrusion energy. On the other hand, the second film layer 6 has shear thickening properties, and at low stress rates, The second film layer 6 keeps the material soft, and its bending performance is better.
- the elastic modulus of the second film layer 6 increases, effectively blocking external impact stress or extrusion stress, and protecting the display device from damage
- the second film layer 6 has viscosity, which improves the adhesion between the second film layer 6 and the film layers on both adjacent sides.
- the second film layer 6 can be lowered. The risk of detachment, thereby improving the reliability of the second film layer 6 for energy absorption and impact resistance.
- the impact resistance of the cover plate 4 with a laminated structure provided by the embodiment of the present invention can be improved by at least 100%.
- the modified energy-absorbing impact-resistant material used to form the second film layer 6 may specifically include modified silica gel, modified thermoplastic polyurethane elastomer rubber (Thermoplastic polyurethanes, TPU), modified polyurethane (polyurethane, PU) or modified shear thickening materials. This type of material is softer and deforms more, so the energy absorption effect is better. Further, the modified energy-absorbing and impact-resistant material can specifically be polyborosiloxane-modified silica gel.
- FIG. 5 is a schematic diagram of the molecular structure of the modified energy-absorbing and impact-resistant material provided by the embodiment of the present invention.
- the molecular structure of the modified energy-absorbing and impact-resistant material includes bonded polymeric Molecular main chain 71 and modified polymer molecular main chain 72, wherein the main chain of modified polymer molecule 72 has hydrogen bonds or coordination bonds, and the coordination bonds include boron-oxygen bonds, metal-catechol or metal- Histidine, a hydrogen bond or a coordinate bond is indicated by reference numeral 73 in FIG. 5 .
- the main chain of the above-mentioned polymer molecule is the main chain of the silica gel molecule
- the main chain of the modified polymer molecule is the main chain of the modified silica gel molecule
- the main chain of the above-mentioned polymer molecule is the main chain of the TPU molecule
- the main chain of the modified polymer molecule is is a modified TPU molecular main chain
- the above-mentioned polymer molecular main chain is a PU molecular main chain
- the modified polymer molecular main chain is a modified PU molecular main chain.
- the elastic modulus of the second film layer 6 by setting the elastic modulus of the second film layer 6 within the range of 10Kpa to 500Mpa, it can not only avoid the elastic modulus being too low, but also ensure that the second film layer 6 has a good energy-absorbing effect. Avoid excessively high elastic modulus, and reduce the risk of the second film layer 6 detaching under the action of external force.
- the display device when the display device is impacted or squeezed, when the stress acts on each film layer, it mainly manifests as a transverse shear force and a longitudinal extrusion force.
- the shear force When the stress acts on the first film layer 5, the shear force will As the vibration of the first film layer 5 spreads laterally to the surroundings, the extrusion force will continue to spread longitudinally to the second film layer 6 , and the second film layer 6 is used to absorb the extrusion force to a certain extent.
- the film thickness of the first film layer 5 is d1, 20 ⁇ m ⁇ d1 ⁇ 200 ⁇ m
- the film thickness of the second film layer 6 is d2, 20 ⁇ m ⁇ d2 ⁇ 200 ⁇ m.
- the film thickness of the first film layer 5 is smaller than the film thickness of the second film layer 6, for example, the film thickness of the first film layer 5 is 50 ⁇ m, and the film thickness of the second film layer 5 is 50 ⁇ m.
- the film thickness of the film layer 6 is 100 ⁇ m.
- FIG. 6A is another schematic structural view of a display device provided by an embodiment of the present invention.
- the cover 4 further includes a third film layer 12, and the third film layer 12 is located
- the second film layer 6 faces the side of the substrate 2, and the third film layer 12 is formed of high modulus material, and the elastic modulus of the high modulus material is E3, 50Mpa ⁇ E3 ⁇ 5Gpa.
- the third film layer 12 may be formed of organic materials such as TPU, PU, or PC, PET, PMMA, and PI.
- the hardness of the third film layer 12 is correspondingly higher, which can block the large deformation generated by the second film layer 6 and prevent the deformation from continuing. Accumulated inwardly, the film layer in the array layer 3 also undergoes greater deformation, so that the cover plate 4 has better impact resistance.
- the film thickness of the third film layer 12 is d3, 20 ⁇ m ⁇ d3 ⁇ 200 ⁇ m.
- the third film layer 12 can be made of the same material and film thickness as the first film layer 5 , or can be made of different materials and film thickness.
- the first film layer 5 is formed of PI material with a film thickness of 50 ⁇ m
- the second film layer 6 is formed of polyborosiloxane modified silica gel with a film thickness of 100 ⁇ m
- the third film layer 12 is formed of PET material. The film thickness was 50 ⁇ m.
- FIG. 6B is another schematic structural view of the display device provided by the embodiment of the present invention.
- the cover plate 4 further includes a fourth film layer 44 located on the first
- the second film layer 6 faces the side of the substrate 2
- the fourth film layer 44 is formed of a modified energy-absorbing and impact-resistant material with viscosity and shear thickening properties.
- the film thickness of the fourth film layer 44 is d4, 20 ⁇ m ⁇ d4 ⁇ 200 ⁇ m.
- the film layer structure of the display device includes multiple inorganic layers, for example, the array substrate includes multiple inorganic insulating layers, and the packaging layer includes multiple inorganic packaging layers.
- the array substrate includes multiple inorganic insulating layers
- the packaging layer includes multiple inorganic packaging layers.
- organic materials inorganic materials The bending resistance of the display device is poor, which makes it difficult to release the stress on the internal film layer of the display device.
- Figure 7 is a schematic diagram of cracking of the inorganic insulating layer in the prior art
- Figure 8 is an enlarged schematic diagram of area A in Figure 7, as shown in Figure 7 and Figure 8
- the array substrate 102 includes a plurality of inorganic insulating layers 123 and a plurality of metal layers 124.
- the inorganic insulating layer 123 will cause The cracking of the display device makes it difficult to ensure the impact resistance and bending reliability of the display device.
- the cracking of the inorganic insulating layer 123 will further cause the disconnection of the metal layer 124 adjacent to the inorganic insulating layer 123 , which will further cause defective display phenomena such as broken bright spots and bright lines in the display device.
- FIG. 9 is a schematic diagram of the bending direction of the display device in the prior art
- FIG. 10 is a schematic diagram of the bending direction of the display device in the prior art, as shown in FIG. 9 and FIG. 10
- the outer bending radius R becomes smaller
- the bending or extrusion stress on the array substrate 102 will increase, and the risk of cracks in the inorganic insulating layer 123 in the array substrate 102 will increase.
- the inorganic insulating layer 123 has a greater risk of fracture, which restricts the further development of the bending radius R.
- FIG. 11 is a schematic diagram of the front of the display device in the prior art when it is squeezed, wherein the bamboo book structure 125 shown in FIG. 11 is used to improve the bending performance.
- the cover plate 107 is a single-layer flexible film structure. When the front of the display device is squeezed, the cover plate 107 deforms greatly, and the corresponding deformation of the array substrate 102 is also relatively large, which causes the inorganic insulating layer 123 in the array substrate 102 to more prone to cracks.
- the inorganic insulating layer 123 in the existing display device also has a great influence on the reliability of the display device.
- FIG. 12 is another structural schematic diagram of the display device provided by the embodiment of the present invention.
- the array layer 3 includes an inorganic insulating layer 13, at least one inorganic insulating layer 13 has a hollow portion 14 filled with an organic portion 15 .
- the embodiment of the present invention provides a hollow part 14 in the inorganic insulating layer 13, and fills the organic material in the hollow part 14, so that the inorganic insulating layer 13 can be filled with an organic material.
- the concentrated stress is dispersed to prevent the stress from accumulating to the cracking threshold of the inorganic insulating layer 13, thereby effectively reducing the risk of fracture of the inorganic insulating layer 13 and the metal layer in the array substrate 1, and improving the extrusion resistance and bending resistance of the display device. It also avoids bad display phenomena such as broken bright spots and bright lines caused by disconnection of the metal layer.
- the display device includes a display area 16 .
- the array layer 3 includes a protection layer 17, a semiconductor layer 18, a first gate insulating layer 19, a first gate layer 20, a second gate insulating layer 21, and a second gate layer 22 stacked along the back side of the substrate 2. , an interlayer insulating layer 23 and a source-drain layer 24 , wherein the inorganic insulating layer 13 includes a protective layer 17 , a first gate insulating layer 19 , a second gate insulating layer 21 and an interlayer insulating layer 23 .
- the electronic devices in the array layer 3 include a transistor 25 and a storage capacitor 26.
- the transistor 25 includes an active layer 27 located in the semiconductor layer 18, a gate 28 located in the first gate layer 20, and a gate 28 located in the source and drain layers.
- the source 29 and the drain 30 of the storage capacitor 26 include a first plate 31 on the first gate layer 20 and a second plate 32 on the second gate layer 22 .
- the protective layer 17 has a first hollow part 33, and in the direction perpendicular to the plane where the substrate 2 is located, the first hollow part 33 does not overlap with the semiconductor layer 18, and the first gate insulating layer 19 has a second hollow part 34 , in the direction perpendicular to the plane where the substrate 2 is located, the second hollow part 34 does not overlap with the first gate layer 20, and the second gate insulating layer 21 has a third hollow part 35, In the direction of the plane, the third hollow part 35 does not overlap with the second gate layer 22, and the interlayer insulating layer 23 has a fourth hollow part 36. In the direction perpendicular to the plane where the substrate 2 is located, the fourth hollow part 36 Overlay display area 16.
- the protective layer 17, the first gate insulating layer 19, the second gate insulating layer 21 and the interlayer insulating layer 23 all have hollowed-out parts 14 in the inorganic insulating layers 13, and the filling in the The organic portion 15 in the hollow portion 14 improves the extrusion resistance and bending resistance of the display device.
- the hollowed-out parts 14 in the protection layer 17, the first gate insulating layer 19 and the second gate insulating layer 21 do not overlap with the metal layer or the semiconductor layer 18 on the side of the film layer facing away from the substrate 2 respectively, and also That is, the lower side of the metal layer or the semiconductor layer 18 is still adjacent to the inorganic material, so that the inorganic material can be used for better insulation.
- the capacitor dielectric layer of the storage capacitor 26 is still an inorganic layer. Since the dielectric constant of the inorganic material is high, the electronic characteristics of the storage capacitor 26 are better. .
- a planarization layer 56 for forming a flat surface is provided between the array layer 3 and the light emitting device layer 8, and the light emitting device layer 8 includes an anode 37 stacked along the back side of the substrate 2,
- the light-emitting device layer 8 also includes support pillars 45 located on the side of the pixel definition layer 43 facing away from the substrate 2, and the support pillars 45 are used to support a fine metal mask when the subsequent light-emitting layer 38 is evaporated. , FMM) role.
- the protection layer 17 may specifically include an isolation layer 46 and a buffer layer 47 located on the side of the isolation layer 46 facing away from the substrate 2.
- the isolation layer 46 and the buffer layer 47 can isolate the carrier Na+ and K+ in the glass, and the buffer layer 47 can also play an insulating role in the Excimer laser annealing (ELA) process.
- Fig. 13 is another schematic structural view of the display device provided by the embodiment of the present invention. As shown in Fig. 13, a layer of PI layer 48 may also be separated between the isolation layer 46 and the buffer layer 47.
- the buffer layer 47, the PI layer 48 and the isolation layer 46 can be patterned simultaneously by using the same patterning process, and then the buffer layer 47, the PI layer 48 and the isolation layer 46 are hollowed out.
- the organic portion 15 may be formed by filling the portion 14 with an organic material.
- FIG. 14 is a schematic diagram of the bending condition provided by the embodiment of the present invention. As shown in FIG. 14, the display device is bent When reaching the specific bending state defined by the dotted line in the figure, the maximum principal strain of the inorganic insulating layer in the existing structure, such as the buffer layer 47, is 4858ue, while in the structure of the embodiment of the present invention, the maximum principal strain of the buffer layer 47 is reduced to 4560ue, a 6.1% reduction.
- Fig. 15 is a schematic diagram of the extrusion working conditions provided by the embodiment of the present invention.
- the maximum principal strain of the buffer layer 47 in the existing structure is 5754ue, while In the structure of the embodiment of the present invention, the maximum principal strain of the buffer layer 47 is reduced to 5242ue, which is reduced by 8.7%.
- FIG. 16 is a top view of a display device provided by an embodiment of the present invention
- FIG. 17 is a cross-sectional view of FIG. 16 along the direction A1-A2.
- the display device includes a display area 16 and a non-display area 49
- the non-display area 49 includes a shift register circuit area 50 and a fan-shaped wiring area 51
- the display area 16 is provided with a pixel circuit
- the shift register circuit area 50 is provided with a scanning signal for outputting a scan signal to the pixel circuit or
- the hollowed out part 14 is located in the display area 16 and the shift register circuit area 50 , and in the direction perpendicular to the plane where the substrate 2 is located, the hollowed out part 14 does not overlap with the fan-shaped wiring area 51 .
- the wiring in the fan-shaped wiring area 51 needs to transmit a large current signal.
- the inorganic material in the fan-shaped wiring area 51 By retaining the inorganic material in the fan-shaped wiring area 51, only the display area 16 and the shift register circuit area 50 are patterned on the inorganic insulating layer 13, The metal traces in the fan-shaped trace area 51 can still be adjacent to the inorganic material, so as to prevent high current breakdown by utilizing the characteristics of the better dielectric constant of the inorganic material.
- FIG. 18 is a schematic structural view of the protective film provided by the embodiment of the present invention.
- the protective film 80 includes an anti-reflection layer 81 , a hard coat layer 52 on the side of the anti-reflection layer 81 facing the substrate 2 , a PET layer 53 and an optical glue 54 on the side of the hard coat layer 52 facing the substrate 2 .
- Figure 19 is a schematic diagram of the protective film provided by the embodiment of the present invention being scratched
- Figure 20 is a schematic diagram of the deformation of the protective film provided by the embodiment of the present invention, as shown in Figure 19 and Figure 20, when the protective film 80 is scratched , scratching will generate shear force in the z direction and extrusion force in the y direction, the accumulation of shear force will scratch the surface of the protective film 80, and the extrusion force will cause the protective film 80 to deform downwardly , when the protective film 80 is deformed, the deflection increment of the protective film 80
- E is the modulus of elasticity of the protective film 80
- F is the force generated by scratching
- L is the length of the protective film 80
- h is the film thickness of the protective film 80 in the direction perpendicular to the substrate 2
- B is the protective film 80 width.
- the deflection increment of the protective film 80 is inversely proportional to the elastic modulus of the protective film 80 , that is, the harder the protective film 80 is, the smaller the deflection increment of the protective film 80 is, and the lower the deformation degree of the downward depression is.
- the anti-reflection layer 81 includes hollow anti-reflection particles 60, the particle size of the anti-reflection particles 60 is r, 25nm ⁇ r ⁇ 30nm, and/or, the anti-reflection particles 60
- the particle wall thickness is k, 10nm ⁇ k ⁇ 12nm.
- the particle size refers to the distance from the center of the particle to the outer wall of the particle.
- the shear force first acts on the anti-reflection layer 81 .
- the particle size of the antireflection particles 60 in the antireflection layer 81 is between 35nm and 40nm, and the wall thickness of the particles is between 5nm and 7nm.
- Increasing the particle size and/or increasing the particle wall thickness of the anti-reflection particles 60 can improve the ability of the anti-reflection layer 81 to resist shearing force, disperse the shearing force more quickly, and avoid external forces from scratching the surface of the protective film 80 .
- Fig. 21 is a schematic diagram of the structural comparison of two anti-reflection layers provided by the embodiment of the present invention.
- the particle size r1 of the anti-reflection particles 60 in the anti-reflection layer A is 30nm
- the particle wall thickness is k1 is 10nm
- the particle size r2 of the antireflection particles 60 in the antireflection layer B is 40nm
- the particle wall thickness k2 is 6nm.
- the anti-reflection layer A corresponds to the linear fitting straight line of anti-reflection layer A and anti-reflection layer B respectively, as shown in Fig. 22, the anti-reflection layer A
- the maximum force in the z direction is about 5 ⁇ E 15 to 6 ⁇ E 15
- the maximum force in the z direction of the antireflection layer B is about 1 ⁇ E 15 to 3 ⁇ E 15 . It can be seen that the wear resistance of the antireflection layer A is the antireflection 2 to 3 times the wear resistance of layer B.
- the hardness of the hard coat layer 52 is h, 1H ⁇ h ⁇ 2H; and/or, in the direction perpendicular to the plane where the substrate 2 is located, the film thickness of the hard coat layer 52 is D1, 5 ⁇ m ⁇ D1 ⁇ 8 ⁇ m; and/or, the elastic modulus of the hard coat layer 52 is E4, 80Gpa ⁇ E4 ⁇ 100Gpa.
- the film thickness of the antireflection layer 81 is 200 nm
- the film thickness of the hard coat layer 52 is 5 ⁇ m
- the film thickness of the PET layer 53 is 50 ⁇ m
- the film thickness of the optical glue layer 54 is 25 ⁇ m.
- the hardness of the protective film 80 is mainly affected by the hardness of the hard coat layer 52.
- the hardness, film thickness and elastic modulus of the hard coat layer 52 within the above-mentioned range, the overall hardness of the protective film 80 can be increased and the protective film 80 can be reduced.
- the deflection increment ⁇ W of the film 80 improves the longitudinal (y-direction) deformation resistance of the protective film 80 , thereby further improving the scratch resistance of the protective film 80 and improving the protective effect of the protective film 80 on the display device.
- FIG. 23 is another schematic structural view of the display device provided by the embodiment of the present invention.
- the display device further includes an adhesive layer 55 located between the cover plate 4 and the array layer.
- the glass transition temperature of the adhesive layer 55 is Tg, Tg ⁇ -40°C, specifically, -50°C ⁇ Tg ⁇ -40°C.
- the glass transition temperature of the adhesive layer 55 is relatively low, so that the adhesive layer 55 has high viscoelastic properties in a relatively large temperature range, which improves the bending performance of the display device at low temperature and prolongs the service life.
- the glue layer solution forming the glue layer 55 is synthesized from materials including the following mass percentages: 40% to 66% of the first soft monomer, 2% to 8% of the second soft monomer, and 0.05% of the initiator ⁇ 0.4%, crosslinking agent 0.05% ⁇ 0.5%, hard monomer 2% ⁇ 10%, macromolecular polymer 30% ⁇ 50%; among them, the glass transition temperature of the first soft monomer and the second soft monomer Less than or equal to -40°C, the glass transition temperature of the hard monomer is greater than or equal to 0°C, so that the glass transition temperature of the adhesive layer 55 as a whole is lowered by using the first soft monomer and the second soft monomer, and the bonding interface is improved At the same time as the binding force, hard monomers and macromolecular polymers are used to improve the stability of the molecular structure of the adhesive layer 55 at high temperatures and reduce high temperature creep. It has been verified that the adhesive layer 55 formed by this adhesive layer solution can be bent 100,000 times at minus 20
- first soft monomer and the second soft monomer respectively include one or more of isooctyl acrylate, n-hexyl acrylate, hydroxybutyl acrylate, and n-butyl acrylate.
- the hard monomer includes at least one of hydroxy acrylate monomer, carboxy acrylate monomer, amino acrylate monomer and dicyclopentyl acrylate.
- Initiators include free radical photoinitiators.
- the crosslinking agent includes a bifunctional acrylate active polymer, and the molecular weight of the crosslinking agent is greater than or equal to 200 g/mol and less than or equal to 5000 g/mol.
- the film The thickness is D2, 15 ⁇ m ⁇ d5 ⁇ 100 ⁇ m; and/or, the elastic modulus of the adhesive layer 55 is E5, 5Kpa ⁇ E5 ⁇ 50Mpa.
- FIG. 24 is a flowchart of the manufacturing method provided by an embodiment of the present invention. As shown in FIG. Production methods include:
- Step S1 forming an array layer 3 on the substrate 2 .
- the substrate 2 and the array layer 3 constitute the array substrate 1 .
- Step S2 Form the cover plate 4.
- the process of forming the cover plate 4 includes: forming a second film layer 6 on the side of the array layer 3 facing away from the substrate 2, and the second film layer 6 is made of a modified film having viscosity and shear thickening properties.
- the first film layer 5 is formed on the side of the second film layer 6 facing away from the substrate 2, the first film layer 5 is formed of a high modulus material, and the elastic modulus of the high modulus material is E1, 50Mpa ⁇ E1 ⁇ 5Gpa.
- the cover plate 4 formed by the above manufacturing method is a laminated structure formed by laminating at least the first film layer 5 and the second film layer 6.
- the elastic modulus of the first film layer 5 is relatively high, and the hardness is correspondingly high.
- the first film layer 5 with higher hardness It can not only improve the scratch resistance and prevent the screen of the display device from being scratched, but also effectively reduce the deformation under impact stress or extrusion stress, thereby effectively reducing the strain of the film layers inside the display device, such as the inorganic layer.
- the second film layer 6 can be used to further achieve the cushioning effect: on the one hand, The second film layer 6 can convert the mechanical energy generated by impact or extrusion into heat energy, and absorb the impact energy or extrusion energy. On the other hand, the second film layer 6 has shear thickening properties, and at low stress rates, The second film layer 6 keeps the material soft, and its bending performance is better.
- the elastic modulus of the second film layer 6 increases, effectively blocking external impact stress or extrusion stress, and protecting the display device from damage
- the second film layer 6 has viscosity, which improves the adhesion between the second film layer 6 and the film layers on both adjacent sides.
- the second film layer 6 can be lowered. The risk of detachment, thereby improving the reliability of the second film layer 6 for energy absorption and impact resistance.
- the mutual cooperation of the performance of the first film layer 5 and the second film layer 6 can be used to improve the cover.
- the protective performance of the plate 4 on the display device enables the display device to have better impact resistance, scratch resistance and bending performance.
- first film layer 5 and the second film layer 6 have been described in the above-mentioned embodiments, and will not be repeated here.
- the process of forming the cover plate 4 further includes: a third film layer 12 on the side of the array layer 3 facing away from the substrate 2 , the third film layer 12 is made of high modulus material, and the elastic modulus of high modulus material is E3, 50Mpa ⁇ E3 ⁇ 5Gpa.
- the hardness of the third film layer 12 is correspondingly higher, which can block the large deformation generated by the second film layer 6 and prevent the deformation from continuing. Accumulated inwardly, the film layer in the array layer 3 also undergoes greater deformation, so that the cover plate 4 has better impact resistance.
- the cover plate 4 includes the first film layer 5, the second film layer 6 and the third film layer 12, the first film layer 5 is a CPI film, the second film layer 6 is a polyborosiloxane modified silica gel, and the second film layer 6 is a polyborosiloxane modified silica gel.
- the three film layers 12 are PET films as an example, and the process of forming the cover plate 4 may specifically include: forming a PET film (the third film layer 12), then dissolving polyborosiloxane modified silica gel in a solvent, and coating it Spread on the third film layer 12, dry the solvent with hot air, attach the CPI film (first film layer 5), and finally cure.
- the process of forming the cover plate 4 further includes: a fourth film layer 44 on the side of the array layer 3 facing away from the substrate 2 , the fourth film layer 44 is formed from a modified energy absorbing impact material with viscous and shear thickening properties.
- a fourth film layer 44 formed of a modified energy-absorbing and impact-resistant material inside the second film layer 6 not only can the fourth film layer 44 be used to further absorb impact energy or extrusion energy, to achieve a better cushioning effect, The viscosity and shear thickening properties of the fourth film layer 44 can also be used to make the cover plate 4 have better anti-extrusion performance.
- the process of forming the array layer 3 includes: forming an inorganic insulating layer 13, forming a hollow portion 14 in at least one inorganic insulating layer 13, and filling the hollow portion 14 with an organic material to The organic portion 15 is formed.
- the embodiment of the present invention provides a hollow part 14 in the inorganic insulating layer 13, and fills the organic material in the hollow part 14, so that the inorganic insulating layer 13 can be utilized by the organic material.
- the concentrated stress in the insulating layer 13 is dispersed to avoid stress accumulation to the cracking threshold of the inorganic insulating layer 13, thereby effectively reducing the risk of fracture of the inorganic insulating layer 13 and the metal layer in the array substrate 1, and improving the extrusion resistance of the display device Excellent performance and bending resistance, and also avoid bad display phenomena such as broken bright spots and bright lines caused by the disconnection of the metal layer.
- FIG. 25 is a structural flowchart of the method for fabricating the array layer provided by the embodiment of the present invention. As shown in FIG. 25 , the process of forming the array layer 3 includes:
- Step K1 sequentially forming the protective layer 17, the semiconductor layer 18, the first gate insulating layer 19, the first gate layer 20, the second gate insulating layer 21, the second gate layer 22 and the interlayer
- the insulating layer 23 , the inorganic insulating layer 13 includes a protective layer 17 , a first gate insulating layer 19 , a second gate insulating layer 21 and an interlayer insulating layer 23 .
- step K1 specifically includes:
- Step K11 coating and curing a PI material with a thickness of 9 ⁇ m ⁇ 11 ⁇ m on the cleaned glass substrate to form a substrate 2 .
- Step K12 Utilize plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition, PECVD) technique to deposit a 650nm thick isolation layer 46 and a 5nm thick amorphous silicon layer on the substrate 2, wherein the isolation layer 46 is used for Laser lift off (laser lift off, LLO) energy is absorbed during the subsequent ELA process on the amorphous silicon layer.
- PECVD plasma enhanced chemical vapor deposition
- Step K13 Deposit a buffer layer 47 using PECVD technology.
- the buffer layer 47 is a composite film layer of SiNx with a thickness of 200nm and SiO2 with a thickness of 350nm.
- the buffer layer 47 is used to provide heat preservation during the subsequent ELA process on the amorphous silicon layer . It should be noted that before depositing the buffer layer 47 , referring to FIG. 13 , a PI layer with a thickness of 9-11 ⁇ m may also be formed first.
- Step K14 Deposit an amorphous silicon layer using PECVD technology, and dehydrogenate the amorphous silicon layer (450°C, 2h), then perform an ELA process to realize the conversion of the amorphous silicon layer to a polysilicon layer, and perform a dehydrogenation treatment on the polysilicon layer Exposure, development, etching and other processes form the semiconductor layer 18 with a certain pattern.
- Step K15 using PECVD to deposit a first gate insulating layer 19 with a thickness of 120 nm, the first gate insulating layer 19 may be a SiO 2 layer.
- Step K17 Deposit a second gate insulating layer 21 with a thickness of 130 nm by using PECVD technology.
- the second gate insulating layer 21 can be a SiN x layer, and the second gate insulating layer 21 is used as a capacitor dielectric layer of the storage capacitor 26 .
- Step K18 Deposit a Mo metal layer with a thickness of 220nm using Sputter technology, and perform exposure, development and etching processes on the Mo metal layer to form a second gate layer 22 with a certain pattern, and the second gate layer 22 is used as a storage capacitor 26 of the second plate 32.
- Step K19 Utilize the PECVD technique to deposit the interlayer insulating layer 23, the interlayer insulating layer 23 is a composite film layer formed by a SiNx layer with a thickness of 300nm and a SiO2 layer with a thickness of 300nm below, followed by hydrogenation treatment (350 degrees Celsius, 2h ), repairing dangling bonds on polysilicon surfaces.
- Step K2 Etching the interlayer insulating layer 23 and the second gate insulating layer 21 to form a fourth hollow part 36 on the interlayer insulating layer 23 and a third hollow part on the second gate insulating layer 21 35 , and, in a direction perpendicular to the plane where the substrate 2 is located, the fourth hollow portion 36 covers the display area 16 of the display device, and the third hollow portion 35 does not overlap with the second gate layer 22 .
- Step K3 Etching the first gate insulating layer 19 and the protective layer 17 to form the second hollowed out portion 34 on the first gate insulating layer 19 and the first hollowed out portion 33 on the protective layer 17, and, In a direction perpendicular to the plane of the substrate 2 , the second hollow portion 34 and the first hollow portion 33 do not overlap the semiconductor layer 18 and the first gate layer 20 .
- the interlayer insulating layer 23 and the second gate insulating layer can be simultaneously processed in the first etching process. 21 for etching, and by adjusting the pattern of the mask plate of the second etching process, the first gate insulating layer 19 and the protective layer 17 are simultaneously etched in the second etching process to simplify process flow and reduce the number of masks required to be used.
- organic materials can also be filled in the first hollow part 33 , the second hollow part 34 , the third hollow part 35 , the fourth hollow part 36 , and the hollows in the bending area at the same time, so as to simplify the process flow.
- the source-drain layer 24 is a Ti-Al-Ti composite film layer, the thickness of the Ti-Al-Ti composite film layer is 50nm, 650nm and 50nm respectively, and after the deposition of the composite film layer is completed, processes such as exposure, development and etching are performed. A source-drain layer 24 with a certain pattern is formed.
- the source-drain layer 24 is used as the source 29 and drain 30 of the transistor 25 for transmitting data signals to the light-emitting device layer 8 and controlling the light-emitting brightness of the light-emitting device.
- the protective layer 17, the first gate insulating layer 19, the second gate insulating layer 21 and the interlayer insulating layer 23 all have hollowed-out parts 14 in the inorganic insulating layers 13, and the filling in the The organic portion 15 in the hollow portion 14 improves the extrusion resistance and bending resistance of the display device.
- the hollowed-out parts 14 in the protection layer 17, the first gate insulating layer 19 and the second gate insulating layer 21 do not overlap with the metal layer or the semiconductor layer 18 on the side of the film layer facing away from the substrate 2 respectively, and also That is, the lower side of the metal layer or the semiconductor layer 18 is still adjacent to the inorganic material, so that the inorganic material can be used for better insulation.
- the display device also includes film layers forming a planarization layer 56 , a light emitting device layer 8 , an encapsulation layer 9 , a polarizer 10 , and a touch layer 11 .
- film layers forming a planarization layer 56 , a light emitting device layer 8 , an encapsulation layer 9 , a polarizer 10 , and a touch layer 11 .
- the process of forming the planarization layer 56, the light emitting device layer 8, and the encapsulation layer 9 may specifically include:
- Step Q1 forming a planarization layer 56 with a thickness of 1.5 ⁇ m, and performing processes such as exposure, development and etching on the planarization layer 56 to form via holes on the planarization layer 56 .
- Step Q2 Deposit the ITO-Ag-ITO composite film layer, the thickness of the composite film layer is 10nm, 100nm and 7nm respectively, and perform exposure, development and etching processes on the composite film layer to complete the preparation of the anode 37 .
- Step Q3 forming a pixel definition layer 43 (pixel definition layer, PDL) with a thickness of 1.5 ⁇ m, and performing processes such as exposure, development and etching on the pixel definition layer 43 to form openings.
- pixel definition layer pixel definition layer, PDL
- Step Q5 Form a luminescent layer 38 with a thickness of 300nm and a cathode 39 with a thickness of 12nm, and vapor-deposit to form a coupling layer (coupling layer, CPL) and a LiF layer, wherein the CPL layer is an organic layer for adjusting the refractive index.
- CPL coupling layer
- LiF layer is an inorganic layer, used for electromagnetic shielding.
- the manufacturing method further includes forming a protective film 80 including an anti-reflection layer 81; wherein, the process of forming the anti-reflection layer 81 includes: through self-assembly or a surfactant Form core microspheres/microemulsions, use sol-gel method to prepare silica shells on the surface of core microspheres, and then repeatedly wash away the core microspheres with solvents to form hollow silica, which are anti-reflection particles 60.
- the particle size of the hollow silica is r, 25nm ⁇ r ⁇ 30nm, and/or the wall thickness of the hollow silica is k, 10nm ⁇ k ⁇ 12nm.
- the core microspheres/microemulsions are formed by self-assembly or surfactants, and the silica shell is prepared on the surface of the core microspheres using a sol-gel method, and then the core microspheres are repeatedly washed away by solvents to form a hollow silica shell.
- Silicon process specifics may include:
- Step H1 Disperse 0.3g-0.5g of polyacrylic acid into 15ml-20ml of ammonia water and stir until the polyacrylic acid is completely and uniformly dispersed in the ammonia water.
- Step H2 Pour the aqueous solution of ammonium polyacrylate into an anhydrous ethanol beaker, and after the aqueous solution of ammonia polyacrylate is evenly dispersed, slowly add 2ml-3ml of tetraethyl orthosilicate to the beaker while stirring the beaker magnetically.
- Step H3 After adding tetraethyl orthosilicate, the mixed solution was continuously stirred at room temperature for 10 h, and finally a transparent solution of hollow sphere silica sol was formed.
- Step H4 Hybridize the hollow sphere silica sol, first condense the silica nanoparticle sol at about 80° to remove the ammonia water in the solution, cool to room temperature, then add dilute hydrochloric acid to adjust the pH value, and finally adjust The pH value is around 2-3, and finally add 1-2ml tetraethyl orthosilicate to the solution, and stir for 1-2 hours;
- Step H5 Prepare an anti-reflection coating: solution coating is carried out on a PET substrate (or a PET substrate with an HC coating), and the final film thickness is controlled at 150nm- Between 200nm.
- Step H6 After the film coating is completed, immerse in about 30% hydrogen peroxide and heat to 80-100° to remove tetraethyl orthosilicate in the solution to form a dense hollow silicon oxide coating, that is, the anti-reflection layer 81 .
- the process of forming the protective film 80 further includes forming a hard coat layer 52, the hardness of the hard coat layer 52 is h, 1H ⁇ h ⁇ 2H; and/or , in the direction perpendicular to the plane of the substrate 2, the film thickness of the hard coat layer 52 is d4, 5 ⁇ m ⁇ d4 ⁇ 8 ⁇ m; and/or, the elastic modulus of the hard coat layer 52 is E4, 80Gpa ⁇ E4 ⁇ 100Gpa.
- the hardness of the protective film 80 is mainly affected by the hardness of the hard coat layer 52.
- the hardness, film thickness and elastic modulus of the hard coat layer 52 within the above-mentioned range, the overall hardness of the protective film 80 can be increased and the protective film 80 can be reduced.
- the deflection increment ⁇ W of the film 80 improves the longitudinal deformation resistance of the protective film 80 , thereby further improving the scratch resistance of the protective film 80 and improving the protective effect of the protective film 80 on the display device.
- the process of forming hard coating 52 includes:
- Step G1 Mix a cationic initiator, such as sulfonium salt, with methyl ladder silsesquioxane or cage silsesquioxane at a ratio of 3% and 97%, and then mix it with tetrahydrofuran at a ratio of 1:2 and stir well.
- a cationic initiator such as sulfonium salt
- methyl ladder silsesquioxane or cage silsesquioxane at a ratio of 3% and 97%
- tetrahydrofuran at a ratio of 1:2 and stir well.
- the molecular structure of sulfonium salt is shown in Figure 26A
- the analytical structure of methyl ladder silsesquioxane is shown in Figure 26B
- the molecular structure of cage silsesquioxane is shown in Figure 26C.
- Step G2 Coating the solution on the PET layer with a 5 ⁇ m wire rod at a coating speed of about 5-10 mm/s.
- Step G3 remove the solvent by heating in a vacuum environment, specifically, the heating temperature is between 25° C. and 80° C., and the heating time is 5 to 10 minutes.
- Step G4 UV curing for 15 to 20 minutes, the UV energy is 1-3j/cm2, the photoinitiator will generate a large amount of H during the curing process, and the epoxy group will be polymerized in the ACE (active-chain end) mode.
- the active center of the epoxy group gradually decreases, the polymerization reaction gradually stops, and the conversion rate reaches saturation.
- Step G5 Carry out damp heat annealing treatment, the condition is 60° C. and 90% humidity, and the time is 2 hours.
- the introduction of moisture annealing can make the R 3 O + on the epoxy group react with water molecules, generate -OH at the end and generate a H+, and the newly generated H+ reacts with the neutral epoxy group to produce active
- the secondary R 2 HO + makes the ACE reaction happen again and increases the polymerization until the film formation is completed to form a hard coat layer 52 .
- the manufacturing method before forming the second film layer 6 , the manufacturing method further includes forming a glue layer 55 .
- the process of forming the glue layer 55 includes: configuring the glue layer solution and preparing the glue layer 55 using the configured glue layer solution, wherein the glue layer solution is synthesized from materials including the following mass percentages: the first soft monomer 40% to 66%, the second Second soft monomer 2%-8%, initiator 0.05%-0.4%, cross-linking agent 0.05%-0.5%, hard monomer 2%-10%, macromolecular polymer 30%-50%; first soft single The glass transition temperature of the body and the second soft monomer is less than or equal to -40°C, and the glass transition temperature of the hard monomer is greater than or equal to 0°C. At this time, the glass transition temperature of the adhesive layer 55 is relatively low, so that the adhesive layer 55 has high viscoelastic properties in a relatively large temperature range, which improves the bending performance of the display device at low temperature and prolongs the service life.
- the glue layer solution is synthesized from materials including the following mass percentages: the first soft monomer 40% to 66%, the second Second soft monomer
- the process of configuring the glue layer solution includes:
- Step W1 use the first soft monomer (such as isooctyl acrylate) as a solution to dilute the initiator and the cross-linking agent, and prepare the initiator solution and the cross-linking agent solution with a concentration of 1%.
- first soft monomer such as isooctyl acrylate
- Step W2 Dissolving and diluting the first soft monomer (such as isooctyl acrylate) to dilute the macromolecular polymer (such as modified acrylate prepolymer) using a stirring paddle or a reactor according to the proportion.
- the first soft monomer such as isooctyl acrylate
- the macromolecular polymer such as modified acrylate prepolymer
- Step W3 According to the ratio, dilute the second soft monomer (such as hydroxybutyl acrylate), hard monomer (such as dicyclopentyl acrylate), and the first soft monomer (such as isooctyl acrylate)
- the initiator solution configures the glue solution according to the ratio. It should be noted that the actual mass of the added solution can be the value in Table 1 multiplied by 100 times.
- Step W4 irradiate the above-mentioned glue solution under an ultraviolet lamp with a wavelength of about 365nm, observe and measure its viscosity in real time, and stop the irradiation when the viscosity is about 4000-6000cps.
- the process of preparing adhesive layer 55 comprises:
- Step R2 Coat the prepared glue layer solution on the film materials such as release film or PET film by using a coating wire rod or a coating machine.
- Step R3 Attach release film or PET film and other film materials on the coated adhesive layer solution.
- Step R4 irradiate the adhesive layer under an ultraviolet lamp with a wavelength of 365 nm for 1 to 5 minutes until the adhesive layer is cured.
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Abstract
Description
Claims (24)
- 一种显示装置,其特征在于,包括:阵列基板,所述阵列基板包括衬底和位于所述衬底一侧的阵列层;盖板,所述盖板位于所述阵列层背向所述衬底一侧,所述盖板包括第一膜层和第二膜层,所述第一膜层位于所述第二膜层背向所述衬底一侧;其中,所述第一膜层由高模量材料形成,所述高模量材料的弹性模量为E1,50Mpa≤E1≤5Gpa,所述第二膜层由具有粘性和剪切增稠特性的改性吸能抗冲材料形成。
- 根据权利要求1所述的显示装置,其特征在于,所述改性吸能抗冲材料包括改性硅胶、改性热塑性聚氨酯弹性体橡胶、改性聚氨酯或改性剪切增稠材料。
- 根据权利要求1所述的显示装置,其特征在于,所述改性吸能抗冲材料的分子结构包括键合的聚合物分子主链和改性聚合物分子主链,其中,所述改性聚合物分子主链具有氢键或配位键,所述配位键包括硼氧键、金属-邻苯二酚或金属-组氨酸。
- 根据权利要求1所述的显示装置,其特征在于,所述第二膜层的弹性模量为E2,10Kpa≤E2≤500Mpa。
- 根据权利要求1所述的显示装置,其特征在于,在垂直于所述衬底所在平面的方向上,所述第一膜层的膜厚小于所述第二膜层的膜厚。
- 根据权利要求1所述的显示装置,其特征在于,所述盖板还包括第三膜层,所述第三膜层位于所述第二膜层朝向所述衬底一侧,所述第三膜层由高模量材料形成,所述高模量材料形成的弹性模量为E3,50Mpa≤E3≤5Gpa。
- 根据权利要求1所述的显示装置,其特征在于,所述盖板还包括第四膜层,所述第四膜层位于所述第二膜层朝向所述衬底一侧,所述第四膜层由具有粘性和剪切增稠特性的改性吸能抗冲材料形成。
- 根据权利要求1所述的显示装置,其特征在于,所述阵列层包括无机绝缘层,至少一层所述无机绝缘层具有镂空部,所述镂空部内填充有有机部。
- 根据权利要求8所述的显示装置,其特征在于,所述阵列层包括沿背向所述衬底层叠设置的防护层、半导体层、第一栅极绝缘层、第一栅极层、第二栅极绝缘层、第二栅极层、层间绝缘层和源漏极层,所述无机绝缘层包括所述防护层、所述第一栅极绝缘层、所述第二栅极绝缘层和所述层间绝缘层;其中,所述防护层具有第一镂空部,在垂直于所述衬底所在平面的方向上,所述第一镂空部与所述半导体层不交叠;所述第一栅极绝缘层具有第二镂空部,在垂直于所述衬底所在平面的方向上,所述第二镂空部与所述第一栅极层不交叠;所述第二栅极绝缘层具有第三镂空部,在垂直于所述衬底所在平面的方向上,所述第三镂空部与所述第二栅极层不交叠;所述层间绝缘层具有第四镂空部,所述显示装置包括显示区,在垂直于所述衬底所在平面的方向上,所述第四镂空部覆盖所述显示区。
- 根据权利要求8所述的显示装置,其特征在于,所述显示装置包括显示区和非显示区,所述非显示区包括移位寄存器电路区和扇形走线区,所述镂空部位于所述显示区和所述移位寄存器电路区,在垂直于所述衬底所在平面的方向上,所述镂空部与所述扇形走线区不交叠。
- 根据权利要求1所述的显示装置,其特征在于,所述显示装置还包括保护膜,所述保护膜位于所述盖板背向所述衬底一侧;所述保护膜包括抗反射层,所述抗反射层包括中空的减反粒子,所述减反粒子的颗粒粒径为r,25nm≤r≤30nm,和/或,所述减反粒子的颗粒壁厚为k,10nm≤k≤12nm。
- 根据权利要求11所述的显示装置,其特征在于,所述保护膜还包括硬涂层,所述硬涂层位于所述抗反射层与所述盖板之间;所述硬涂层的硬度为h,1H≤h≤2H,和/或,在垂直于所述衬底所在平面的方向上,所述硬涂层的膜厚为D1,5μm≤D1≤8μm,和/或,所述硬涂层的弹性模量为E4,80Gpa≤E4≤100Gpa。
- 根据权利要求1所述的显示装置,其特征在于,所述显示装置还包括胶层,所述胶层位于所述盖板与所述阵列层之间,所述胶层的玻璃化转变温度为Tg,Tg≤-40℃。
- 根据权利要求13所述的显示装置,其特征在于,形成所述胶层的胶层溶液由包括如下质量百分比的材料合成:第一软单体40%~66%,第二软单体2%~8%,引发剂0.05%~0.4%,交联剂0.05%~0.5%,硬单体2%~10%,大分子聚合物30%~50%;其中,所述第一软单体和所述第二软单体的玻璃化转变温度小于或等于-40℃,所述硬单体的玻璃化转变温度大于或等于0℃。
- 根据权利要求14所述的显示装置,其特征在于,所述第一软单体和所述第二软单体分别包括丙烯酸异辛酯、丙烯酸正己酯、丙烯酸羟丁酯、丙烯酸正丁酯中的一种或多种;所述硬单体包括羟基丙烯酸酯单体、羧基丙烯酸酯单体、胺基丙烯酸酯单体、丙烯酸二环戊基酯中的至少一种;所述引发剂包括自由基光引发剂;所述交联剂包括双官能度丙烯酸酯活性聚合物,且所述交联剂的分子量大于或等于200g/mol且小于或等于5000g/mol;所述大分子聚合物由所述第一软单体、所述第二软单体和所述硬单体预聚制备形成,且所述大分子聚合物的分子量大于或等于10×10 4g/mol且小于或等于100×10 4g/mol。
- 根据权利要求13所述的显示装置,其特征在于,在垂直于所述衬底所在平面的方向上,所述胶层的膜厚为D2,15μm≤D2≤100μm,和/或,所述胶层的弹性模量为E5,5Kpa≤E5≤50Mpa。
- 一种显示装置的制作方法,其特征在于,包括:在衬底上形成阵列层;形成盖板,形成所述盖板的过程包括:在所述阵列层背向所述衬底一侧形成第二膜层,所述第二膜层由具有粘性和剪切增稠特性的改性吸能抗冲材料形成;在所述第二膜层背向所述衬底一侧形成第一膜层,所述第一膜层由高模量材料形成,所述高模量材料形成的弹性模量为E1,50Mpa≤E1≤5Gpa。
- 根据权利要求17所述的制作方法,其特征在于,在形成所述第二膜层之前,形成所述盖板的过程还包括:在所述阵列层背向所述衬底一侧第三膜层,所述第三膜层由高模量材料形成,所述高模量材料形成的弹性模量为E3,50Mpa≤E3≤5Gpa。
- 根据权利要求17所述的制作方法,其特征在于,在形成所述第二膜层之前,形成所述盖板的过程还包括:在所述阵列层背向所述衬底一侧第四膜层,所述第四膜层由具有粘性和剪切增稠特性的改性吸能抗冲材料形成。
- 根据权利要求17所述的制作方法,其特征在于,形成所述阵列层的过程包括:形成无机绝缘层,且在至少一层所述无机绝缘层中形成镂空部,并在所述镂空部内填充有机材料以形成有机部。
- 根据权利要求20所述的制作方法,其特征在于,形成所述阵列层的过程包括:在所述衬底上依次形成防护层、半导体层、第一栅极绝缘层、第一栅极层、第二栅极绝缘层、第二栅极层和层间绝缘层,所述无机绝缘层包括所述防护层、所述第一栅极绝缘层、所述第二栅极绝缘层和所述层间绝缘层;对所述层间绝缘层和所述第二栅极绝缘层进行刻蚀,以在所述层间绝缘层上形成第四镂空部以及在所述第二栅极绝缘层上形成第三镂空部,并且,在垂直于所述衬底所在平面的方向上,所述第四镂空部覆盖显示装置的显示区,所述第三镂空部与所述第二栅极层不交叠;对所述第一栅极绝缘层和所述防护层进行刻蚀,以在所述第一栅极绝缘层上形成第二镂空部以及在所述防护层上形成第一镂空部,并且,在垂直于所述衬底所在平面的方向上,所述第二镂空部和所述第一镂空部与所述半导体层和所述第一栅极层不交叠;在所述第一镂空部、所述第二镂空部、所述第三镂空部和所述第四镂空部内填充有机材料;形成源漏极层。
- 根据权利要求17所述的制作方法,其特征在于,形成所述盖板之后,所述制作方法还包括形成包括抗反射层的保护膜;其中,形成所述抗反射层的过程包括:通过自组装或表面活性剂形成内核微球/微乳液,在所述内核微球表面使用溶胶凝胶法制备二氧化硅壳层,然后通过溶剂反复清洗带走所述内核微球以形成中空二氧化硅,所述中空二氧化硅的颗粒粒径为r,25nm≤r≤30nm,和/或,所述中空二氧化硅的颗粒壁厚为k,10nm≤k≤12nm。
- 根据权利要求22所述的制作方法,其特征在于,形成所述抗反射层之前,形成所述保护膜的过程还包括形成硬涂层,所述硬涂层的硬度为h,1H≤h≤2H;和/或,在垂直于所述衬底所在平面的方向上,所述硬涂层的膜厚为d4,5μm≤d4≤8μm;和/或,所述硬涂层的弹性模量为E4,80Gpa≤E4≤100Gpa。
- 根据权利要求17所述的制作方法,其特征在于,形成所述第二膜层之前,所述制作方法还包括形成胶层;形成所述胶层的过程包括:配置胶层溶液以及利用配置的胶层溶液制备胶层,其中,胶层溶液由包括如下质量百分比的材料合成:第一软单体40%~66%,第二软单体2%~8%,引发剂0.05%~0.4%,交联剂0.05%~0.5%,硬单体2%~10%,大分子聚合物30%~50%;所述第一软单体和所述第二软单体的玻璃化转变温度小于或等于-40℃,所述硬单体的玻璃化转变温度大于或等于0℃。
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