WO2022191026A1 - レニウムタングステン線棒およびそれを用いた熱電対 - Google Patents
レニウムタングステン線棒およびそれを用いた熱電対 Download PDFInfo
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- WO2022191026A1 WO2022191026A1 PCT/JP2022/009116 JP2022009116W WO2022191026A1 WO 2022191026 A1 WO2022191026 A1 WO 2022191026A1 JP 2022009116 W JP2022009116 W JP 2022009116W WO 2022191026 A1 WO2022191026 A1 WO 2022191026A1
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- wire rod
- rhenium
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- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 229910052702 rhenium Inorganic materials 0.000 claims abstract description 13
- 238000005259 measurement Methods 0.000 claims abstract description 12
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910001080 W alloy Inorganic materials 0.000 claims abstract description 5
- 238000012764 semi-quantitative analysis Methods 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- 238000004453 electron probe microanalysis Methods 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 abstract description 31
- 238000012545 processing Methods 0.000 abstract description 31
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- 238000000034 method Methods 0.000 abstract description 24
- 239000000463 material Substances 0.000 abstract description 19
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- 239000000203 mixture Substances 0.000 abstract description 12
- 238000005245 sintering Methods 0.000 abstract description 12
- 238000009826 distribution Methods 0.000 abstract description 9
- 238000002156 mixing Methods 0.000 abstract description 4
- 239000007790 solid phase Substances 0.000 abstract description 2
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 16
- 239000004020 conductor Substances 0.000 description 12
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- 238000009529 body temperature measurement Methods 0.000 description 7
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- 239000000470 constituent Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
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- 238000001953 recrystallisation Methods 0.000 description 4
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- 229910052721 tungsten Inorganic materials 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
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- 150000002739 metals Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 description 2
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- 238000007670 refining Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- 230000005469 synchrotron radiation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/80—Constructional details
- H10N10/85—Thermoelectric active materials
- H10N10/851—Thermoelectric active materials comprising inorganic compositions
- H10N10/854—Thermoelectric active materials comprising inorganic compositions comprising only metals
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
Definitions
- the embodiments described later relate to a rhenium-tungsten wire rod and a thermocouple using the same.
- tungsten (W) wires have been used as cathode heaters for TV electron guns, filament materials for lighting automobile lamps and home electric appliances, high-temperature structural members, contact materials, and constituent materials for discharge electrodes.
- a tungsten alloy (Re-W) wire containing a predetermined amount of rhenium (Re) improves the electrical resistance characteristics and wear resistance of the W wire and is widely used for semiconductor inspection probe pins. It also improves the high-temperature strength and ductility of W wires after recrystallization, and is widely used in heaters for electron tubes, filament materials for anti-vibration lamps, and thermocouples.
- FIG. 1 schematically shows an example of temperature measurement with a thermocouple.
- a thermocouple is a temperature sensor that uses the thermoelectromotive force of a combination of two dissimilar metals.It has a simple structure and can be used in a wide temperature range from low temperature to high temperature by selecting the material. It has been the most widely used in the industry for many years due to its characteristics.
- FIG. 2 shows some examples of types of thermocouples according to the JIS standard (see JIS C1602).
- Thermocouples used for high temperatures include platinum/rhodium alloy B, S, and R thermocouples and Re-W system C thermocouples. Especially in a non-oxidizing atmosphere above about 1500°C, C thermocouples are often used.
- a mixture of raw material powder and wax as a binder is formed into a molded product, which is first heat-treated in a vacuum atmosphere at 1000°C or less to dewax. Subsequently, it is heat-treated and sintered at 1600-2000°C, and a C thermocouple is used for temperature measurement at 1600-2000°C.
- a pressurized sintering (HP) furnace and a hot isostatic pressing (HIP) apparatus the temperature in the pressure vessel reaches a high temperature of about 2000° C. in a pressurized gas atmosphere.
- Optical temperature measurement such as a radiation thermometer requires an opening for direct observation of synchrotron radiation in the furnace chamber, which reduces the strength of the pressure vessel. It also causes heat loss due to holes in the container. Therefore, the application is very difficult and the equipment is expensive. Therefore, C thermocouples are used for temperature measurement in HP furnaces and HIP equipment to which the High Pressure Gas Safety Law applies.
- thermocouples When using a thermocouple, calibration work is required to determine the relationship between the value indicated by the thermocouple and the actual temperature.
- the calibration methods are roughly divided into the fixed point method and the comparison method.
- the fixed-point method is a method of calibrating by giving an accurate temperature value at a fixed temperature point. This is a method of performing calibration by obtaining the error with the pair.
- the comparative method is generally used to measure temperatures above 1500°C.
- thermocouples used at high temperatures do not change the relationship between temperature and thermoelectromotive force as long as there is no heterogeneity in any part of the wires that make up them.
- the degree of heterogeneity means "a change in thermoelectromotive force per 1° C. of temperature difference" (see Non-Patent Document 1). That is, when a portion having this degree of inhomogeneity (inhomogeneous portion) exists in the wire and a temperature gradient is generated in that portion, the detected thermoelectromotive force is applied to the thermocouple of the wire without the inhomogeneous portion On the other hand, it shows different values.
- medical needles are shaped by cutting a wire to a desired length and performing press working or bending. Since stress is applied to the cut strands during press working or bending, it is required that cracks are less likely to occur and that cracks do not occur at the bent portions. Medical needles are also used for suturing during surgery. It is preferable that the tensile strength is high and that the variation is small in order to suppress needle behavior fluctuations such as deflection of the needle caused by the force applied during suturing. In order to prevent a decrease in yield due to cracks and splits during needle processing and to obtain needles of stable quality, it is necessary that the plurality of cut strands are homogeneous. should be homogeneous.
- Re-W is generally produced by powder metallurgy, in which W powder and Re powder are mixed, molded, and sintered. Since Re-W sintering proceeds by solid-phase diffusion, Re diffuses and homogenizes (dissolves) in the W matrix depending on the particle size distribution of each powder, the mixed state of the powder, and the molding/sintering conditions. becomes impossible. As a result, a phase region (sigma phase segregation phase) having a locally high Re composition ratio may be generated.
- the formation of the segregation phase of the ⁇ phase means that the Re composition ratio is also lower than the average, and the sintered body with such fluctuations in the Re composition is used as a bar or wire (wire rod).
- inhomogeneity occurs due to variations (fluctuations) in the amount of Re in the cross section in the machining direction (axial direction) and in the cross section perpendicular to the axial direction (radial direction).
- the segregation phase of the ⁇ phase for example, if the segregation phase of the ⁇ phase is unevenly distributed in a part, disconnection is likely to occur during wire drawing. , and widely dispersed Re-W rays (see Patent Document 1).
- Patent Document 1 The method described in Patent Document 1 is not a state in which the segregation phase of the ⁇ phase is partially unevenly distributed in a specific region, but by refining the existing region to a predetermined size or less and dispersing it over a wide range, so that wire breaking occurs during wire drawing.
- the purpose is to suppress it to a level that does not exist, and the existence of fine segregation phases of the ⁇ phase is allowed.
- the segregation phase of the ⁇ phase exists homogeneously, if the existence ratio in a certain volume changes, fluctuations in the amount of Re (changes in material properties) occur in the axial and radial cross sections. , there is a possibility that an inhomogeneous part has occurred.
- FIG. 3 shows, as an example, the amount of Re in the W matrix when a segregation phase of the ⁇ phase exists in the 26% Re-W line.
- EPMA acceleration voltage 15.0 kV, irradiation current 5.0 ⁇ E -8 A, beam diameter 1 ⁇ m or less
- the inclusions are ⁇ phases. Since the ⁇ phase is harder than the matrix, it exists in the form of such inclusions. In the vicinity of this ⁇ phase, the amount of Re in the matrix varies. In this way, the presence of the ⁇ phase causes variation (heterogeneity) in the amount of Re in the surrounding area.
- the rhenium tungsten wire rod according to the embodiment is a wire rod made of a tungsten alloy containing rhenium, and the unit area of the wire rod body is an arbitrary measurement area having a diameter of 1 ⁇ m. The amount is less than 30 wt%.
- thermocouple A schematic diagram of a temperature measurement system using a thermocouple.
- table showing the types of thermocouples.
- Schematic diagram of sample radial cross section and surface layer Schematic diagram of Re content measurement points. Particle size distribution schematic explanatory drawing.
- the rhenium-tungsten wire rod of the embodiment will be described below with reference to the drawings.
- the rhenium-tungsten wire rod may be referred to as a ReW wire rod.
- the drawings are schematic and, for example, the dimensional ratios of the respective parts are not limited to the drawings.
- FIG. 4 shows an example of a radial cross section of a sample taken from a ReW wire rod.
- the rhenium tungsten rod body is indicated by C.
- FIG. 4 shows an enlarged view of the portion indicated by A in the outer peripheral portion of the rhenium-tungsten rod in the radial cross section.
- a surface mixture layer B is formed on the outer peripheral portion of the rhenium tungsten rod body C.
- the surface mixture layer B contains W, O and C as constituent elements.
- the diameter of the wire rod is preferably 0.1 mm or more and 5.0 mm or less so that it can be used as various thermocouples or wires for wire drawing.
- the wire diameter is less than 0.1 mm, disconnection is likely to occur due to evaporation consumption during use at high temperatures, resulting in a short life. If the wire diameter exceeds 5.0 mm, the temperature of the object cannot be accurately measured due to the heat capacity of the thermocouple itself.
- a more preferable range is 0.2 mm or more and 3.5 mm or less.
- the ReW wire rod is processed to 0.1 mm or more and 5.0 mm or less through a forging (swaging: SW) process and a subsequent wire drawing (drawing: DW) process. Wire rods with SW or DW rise have a mixture layer on the surface.
- the mixture contains W, O, and C as constituent elements, and is removed through, for example, an electrolysis process during commercialization.
- the body portion excluding this mixture is used as a sample.
- the sampling position is arbitrary, but in order to consider the yield of the product and to evaluate the variation, it is desirable to sample at two or more distant positions in one wire rod. .
- the front and rear terminals of one ReW wire have unstable conditions, for example, due to the start and stop of the DW equipment. That part is not included in the sampling.
- the length of the unstable portion varies depending on the layout and size of the device.
- any cross-section of the collected sample may be used for measurement, but a radial cross-section as shown in Fig. 4 is preferable due to ease of sample processing. Observation is facilitated by embedding the sample in resin and polishing/etching it if necessary.
- the obtained measurement surface for example, as shown in FIG. 5, in the radial cross section of the rhenium tungsten rod body C, four equally spaced concentric circles 2 to 5 and the intersection points (16 points) with the X axis and the Y axis and center point 1, EPMA (electron probe microanalyzer) is used to quantify the amount of Re in an area of 1 ⁇ m in diameter.
- EPMA electron probe microanalyzer
- the measurement points are examples, and the measurement can be made anywhere, but this point is good for measuring the entire cross section without bias.
- the radial cross-sections to be measured are not at one arbitrary position on the wire rod, but at two or more arbitrary positions apart from each other.
- the rhenium content is less than 30 wt% in an arbitrary measurement area with a unit area of 1 ⁇ m in diameter.
- the Re content of 30 wt% or more exceeds the average addition amount.
- sufficient diffusion of Re or W is not performed, indicating that the Re content varies in the axial cross-sectional direction and the radial cross-sectional direction.
- Variation in Re content is a cause of inhomogeneity, and in ReW rods, there is a possibility of causing positional variation in thermoelectromotive force.
- the average value (Ave), the standard deviation (Sd), and the coefficient of variation (CV) calculated by Sd/Ave are obtained for the obtained Re amount data.
- CV indicates the ratio of the magnitude of data variability to the average, and the variability can be compared regardless of whether the Re ratio of the ReW rod is large or small.
- the CV of the rhenium content of the ReW wire rod of the embodiment is preferably 0.10 or less. Furthermore, it is preferably 0.05 or less. If the CV is greater than 0.10, it indicates that the Re content varies in the axial cross-sectional direction and the radial cross-sectional direction, even if there is no segregation phase of the ⁇ phase. Variation in Re content is a cause of inhomogeneity, and in ReW rods, there is a possibility of causing positional variation in thermoelectromotive force.
- the amount of Re contained in the ReW wire rod of the embodiment is preferably 1 wt% or more and less than 30 wt%, more preferably 2 wt% or more and 28 wt% or less.
- the amount of Re is not determined by Inductively Coupled Plasma-Mass Spectrometry (ICP-MS), which is suitable for evaluating trace impurities, but by Inductively Coupled Plasma-Mass Spectrometry (ICP-MS), which is suitable for evaluating constituent elements. Values analyzed by Coupled Plasma-Optical Emission Spectrometry (ICP-OES). Re improves the elongation of W at high temperature and enhances workability. Also, strength is increased by solid-solution strengthening.
- the content when used as a material for probe pins, the amount of deformation of a completed probe pin increases with frequency of use, resulting in poor contact and a drop in semiconductor inspection accuracy.
- the Re content exceeds about 28 wt%, the solid solubility limit with W is exceeded, so a segregation phase of the ⁇ phase is generated, and the wire tends to have a nonuniform portion. The occurrence of non-homogeneous portions causes variations in thermoelectromotive force and strength.
- the ReW wire rod of the embodiment may contain 30 wtppm or more and 90 wtppm or less of K as a dopant.
- K By containing K, the doping effect improves the tensile strength and creep strength at high temperatures. If the K content is less than 30wtppm, the doping effect will be insufficient. If it exceeds 90wtppm, workability may deteriorate and the yield may greatly decrease.
- thermocouple using this embodiment as a constituent material for a + side conductor and a - side conductor, or an electron tube heater using this embodiment as a material It is possible to manufacture ReW wire for use with high yield while ensuring high-temperature characteristics (prevention of wire breakage and deformation during high-temperature use).
- the ReW wire rod of the embodiment can have a standard deviation of tensile strength of 35 N/mm 2 or less. By suppressing the variation in tensile strength, it is possible to improve the processing stability of ReW wire rods, so it is possible to improve the yield of products using ReW wire rods (e.g. thermocouples, probe pins, medical needles). I can expect it. In addition, the stable tensile strength improves the quality of medical needles when used as a material for medical needles. In the ReW wire rod of the embodiment, when the standard deviation of the tensile strength is 35 N/mm 2 or less and the diameter of the wire rod is 0.1 mm or more and 5.0 mm or less, better processing stability can be obtained.
- ReW wire rod of the embodiment when the standard deviation of the tensile strength is 35 N/mm 2 or less and the diameter of the wire rod is 0.1 mm or more and 5.0 mm or less, better processing stability can be obtained.
- Tensile strength is measured using a universal tensile compression tester. Since the load varies depending on the wire diameter, the universal tension/compression tester may have different load cells or different devices depending on the wire diameter. For example, AG-I 5kN manufactured by Shimadzu Corporation or LTS 500N manufactured by Minebea may be used. The test piece is chucked with a flat plate through non-slip sandpaper and both ends are fixed to the apparatus. The gauge length is 50 mm, and the tensile test is performed at a speed of 10 mm/min. If the broken part is not between the gauges, measure again.
- ReW wire rod that has no material variation (inhomogeneous parts) and greatly contributes to improving the stability of the thermoelectromotive force, and can be applied to high-temperature thermocouple applications. It can also be applied to ReW wires for probe pins.
- the ReW wire rod is not limited to having a circular cross section, and may have a cross section of a shape other than a circular shape, such as an ellipse or a polygon.
- W powder and Re powder are mixed so that the Re content is 1 wt% or more and less than 30 wt%.
- the mixing method is not particularly limited, but a method of mixing the powder in a slurry state using water or an alcoholic solution is particularly preferable because a powder with good dispersibility can be obtained. Further, in order to ensure the homogeneity of the powder lot, it is more preferable to dry the slurry and then combine the same powder lot and perform dry stirring.
- the Re powder to be mixed preferably has an average particle size of less than 8 ⁇ m.
- the particle size distribution preferably has an SD value of less than 11 ⁇ m.
- FIG. 6 shows an explanatory diagram of the particle size distribution.
- the horizontal axis is grain size ( ⁇ m), the left vertical axis is frequency (%), and the right vertical axis is cumulative (%).
- the particle size distribution shall be measured by a laser diffraction method.
- the amount of powder used for each measurement shall be the amount recommended for the measuring device. Generally, 0.02g is recommended. In addition, the measurement sample shall be thoroughly stirred before weighing.
- the W powder is pure W powder excluding inevitable impurities, or doped W powder containing K amount considering the yield up to the wire rod.
- the W powder preferably has an average particle size of less than 16 ⁇ m.
- the particle size distribution preferably has an SD value of less than 13 ⁇ m. If the average particle size and particle size distribution of each of the Re powder and W powder are above the above ranges, the diffusion distance of Re atoms or W atoms increases for homogeneity, making it easier to generate the ⁇ phase.
- the ratio of Re average particle size/W average particle size is preferably 0.4 or more and 2.0 or less.
- the Re average grain size/W average grain size ratio is less than 0.4 or greater than 2.0, the diffusion distance of Re atoms to the center of W grains or the diffusion distance of W atoms to the center of Re grains is large. , and there is a possibility that the ⁇ phase is likely to occur.
- the mixed powder is put into a predetermined mold and press-molded.
- the press pressure at this time is preferably 150 MPa or higher.
- the compact may be pre-sintered at 1200-1400° C. in a hydrogen furnace for easy handling.
- the molded body obtained is sintered under a hydrogen atmosphere, under an inert gas atmosphere such as argon, or under vacuum.
- the sintering temperature is preferably 2500°C or higher. If the temperature is less than 2500°C, diffusion of Re atoms and W atoms will not proceed sufficiently during sintering.
- the upper limit of the sintering temperature is 3400°C (the melting point of W is 3422°C or less).
- the relative density of the sintered body is preferably 90% or more.
- the relative density after sintering is the relative density (%) to the true density, and the relative density (%) to the true density is expressed by [sintered body density/true density] ⁇ 100%.
- the ratio of the density of the lowest part such as the lower end of the sintered body to the average density of the same sintered body as a whole is preferably 0.98 or more.
- the first SW processing is performed on the sintered body obtained in this sintering process.
- the first SW processing is preferably performed at a heating temperature of 1300-1600°C.
- the cross-sectional area reduction rate (area reduction rate) in one heat treatment (one heat) is preferably 5 to 15%.
- rolling processing may be performed. Rolling is preferably carried out at a heating temperature of 1200-1600°C.
- the area reduction rate in one heat is preferably 40 to 75%.
- a 2-way roller rolling mill, a 4-way roller rolling mill, a die roll rolling mill, or the like can be used. Rolling can significantly improve manufacturing efficiency.
- the first SW processing and rolling processing may be combined.
- the second SW processing is performed on the sintered body (ReW bar) that has completed the first SW processing, rolling processing, or combination processing.
- the second SW processing is preferably performed at a heating temperature of 1200-1500°C.
- the reduction in area per heating (one heat) is preferably about 5 to 20%.
- the ReW bar material that has completed the second SW process is then subjected to recrystallization treatment.
- the recrystallization treatment can be carried out, for example, using a high-frequency heating device under a hydrogen atmosphere, under an inert gas atmosphere such as argon, or under vacuum at a treatment temperature of 1800 to 2600°C.
- the ReW bar that has completed the recrystallization process undergoes the third SW processing.
- the third SW processing is preferably performed at a heating temperature of 1200-1500°C.
- the area reduction rate in one heat is preferably about 10 to 30%.
- the third SW processing is performed until the ReW bar has a drawable diameter (preferably 2 to 4 mm in diameter).
- the ReW bar material that has completed the third SW processing is treated by applying a lubricant to the surface, drying the lubricant, and heating it to a workable temperature.
- DW processing is performed by repeating the processing and the drawing processing using a drawing die.
- the lubricant it is desirable to use a C-based lubricant that has excellent heat resistance.
- the processing temperature is preferably 1100°C or less.
- the processing temperature is set according to the wire diameter to be DW.
- the area reduction rate for each die is preferably 10 to 35%.
- an annealing process or a surface polishing process for example, an electrolysis process
- thermocouples are manufactured in a predetermined combination.
- sintered bodies were produced under the processing conditions described above.
- sintered bodies were produced under conventional conditions for Re powder and W powder sizes.
- sintered bodies were produced under the conventional condition of W powder size.
- Table 1 shows the analysis results for each example. Analysis of Re, K was performed by inductively coupled plasma-optical emission spectrometry (ICP-OES) rather than inductively coupled plasma-mass spectrometry (ICP-MS). The lower detection limit for K is 5 wtppm, and the case where the analytical value is below 5 wtppm without adding K is indicated by "-".
- Each sintered body was processed to a diameter of 0.5 mm in the above-described processing steps.
- Examples 2 and 4 and Comparative Example 2 were processed separately up to a diameter of 5.0 mm and up to a diameter of 0.1 mm.
- 17 points x 2 samples per size 34 points in total
- EPMA JXA-8100 manufactured by JEOL Ltd., magnification 1000 times, accelerated A voltage of 15.0 kV and an irradiation current of 5.0 ⁇ E ⁇ 8 A
- CV was calculated from the analytical value. Table 2 shows the evaluation results.
- thermocouples were made as prototypes through the prescribed steps in combinations of prototypes 1 to 8 shown in Table 3.
- Prototype 2 has a diameter of 0.1 mm (prototype 2-2) and a diameter of 5 mm (prototype 2-3).
- Two materials were sampled from each terminal.
- Four thermocouples were manufactured for each combination by making sure that the position combinations did not overlap (front-front, front-back, back-front, back-back).
- one end of a wire rod is the front and the other end of the same wire rod is the rear.
- front-front indicates a combination of front of one bar and front of the other bar.
- thermocouple Each prototype is put into an electric furnace together with a calibrated platinum-rhodium thermocouple, and the temperature is calculated by measuring the thermoelectromotive force with the system shown in Fig. 1 at the temperature indicated by the platinum-rhodium thermocouple at 1600°C. (JISC1602).
- the temperature measurement system shown in FIG. 1 includes a positive “+” side conductor and a negative “ ⁇ ” side conductor of a thermocouple, a temperature measuring junction, a reference junction, a measuring instrument, and compensating leads.
- the temperature measuring junction is formed by welding the tip of the plus side conductor of the thermocouple and the tip of the minus side conductor of the thermocouple.
- the thermocouple positive conductor and the thermocouple negative conductor are each connected to a reference junction.
- Table 3 shows the maximum and minimum difference (Max-Min) of the temperature obtained using each prototype.
- Max-Min the maximum and minimum difference
- the ReW wire rod according to the embodiment the variation in Re of the main body was suppressed, and the temperature variation in the thermocouple using the same wire rod was suppressed.
- the comparative example the Re variation was not suppressed, and the temperature variation of the thermocouple using the same wire rod was large. Therefore, the yield when the embodiment is a thermocouple is greatly improved.
- Example 4 tensile strength was compared between Example 4 with a diameter of 0.5 mm and Comparative Example 2 with a diameter of 0.5 mm.
- Twenty samples were evenly taken from the entire length of the tensile piece.
- a universal tension/compression tester AG-I 5kN manufactured by Shimadzu Corporation
- the test piece was chucked with a flat plate through non-slip sandpaper, and both ends were fixed to the apparatus.
- the gauge length was set to 50 mm, and the tensile test was performed at a speed of 10 mm/min. Table 4 shows the results. Although there is no difference in the average values of tensile strength, the standard deviation indicating variation is very small in Example 4 compared to Comparative Example 2.
- the stability of the conditions when processing the example as a raw material is greatly improved, contributing to the yield improvement.
- the standard deviation of the tensile strength was 35 N/mm 2 or less in other examples.
- the stability of the conditions when processing the example as a material is greatly improved, contributing to the yield improvement.
Abstract
Description
図1に、熱電対による温度計測の例を、略図で示す。熱電対は,2つの異種金属を組み合わせて、その熱起電力を利用する温度センサであり、構造が簡単なこと、素材の選択で低温度域から高温度域まで広い温度範囲で使用できる、などの特徴から、産業界では永年にわたり最も多く使用されている。図2にJIS規格(JIS C1602参照)による熱電対の種類の一部を、例として示す。高温用として使用されるものには、白金・ロジウム合金系のB,S,R熱電対や、Re-W系のC熱電対がある。特に約1500℃ 以上の非酸化性雰囲気では,C熱電対が多く用いられている。
引張強さは、万能引張圧縮試験機を使用し、測定される。線径により負荷が変わるため、万能引張圧縮試験機は、線径に合わせてロードセルを交換したり、装置を使い分けてもよい。例えば、島津製作所製AG-I 5kNや、ミネベア製LTS 500Nを使用してもよい。試験片は、滑り止め防止の紙やすりを介して、平板でチャックし、これらの両端末を装置に固定する。標点間距離は50mmとし、10mm/minの速度で、引張試験を行う。破断部分が標点間に無い場合は、再測定する。
(実施例)
実施例1~4は、前記加工条件により、焼結体を製造した。実施例5,比較例1は、Re粉末とW粉末サイズを従来条件とし、焼結体を製造した。実施例6と比較例2は、W粉末サイズを従来条件とし、焼結体を製造した。表1に、各例の分析結果を示す。Re,Kの分析は、誘導結合プラズマ‐質量分析法(Inductively Coupled Plasma‐Mass Spectrometry:ICP-MS)ではなく、誘導結合プラズマ‐発光分光分析法(ICP-OES)にて実施した。なお、Kの下限検出限界は5wtppmであり、添加せずに分析値が5wtppmを下廻った場合を「-」で記す。
実施例を素材として加工する際の条件安定性が、大きく改善され、歩留改善に寄与する。この線棒を複数切断して医療用針を製造した場合、引張強さの安定した針を得ることができる。
B…表面混合物層
C…レニウムタングステン棒線本体
1…径方向断面中心点
2,3,4,5…径方向断面同心円
X,Y…径方向断面のX軸,Y軸
Claims (8)
- レニウムを含有するタングステン合金からなる線棒であって、棒線本体における単位面積が直径1μmの任意の測定エリアにおいて、レニウム含有量が、30wt%未満である、レニウムタングステン線棒。
- 前記レニウム含有量は、EPMAを用いた半定量分析において、変動係数が0.10以下である、請求項1に記載のレニウムタングステン線棒。
- 前記レニウムの含有量が1wt%以上30wt%未満である、請求項1ないし2いずれか1項に記載のレニウムタングステン線棒。
- 前記レニウムの含有量が2wt%以上28wt%以下である、請求項1ないし2いずれか1項に記載のレニウムタングステン線棒。
- 前記タングステン合金はカリウム(K)含有量が30wtppm以上90wtppm以下である、請求項1ないし4いずれか1項に記載のレニウムタングステン線棒。
- 前記線棒の直径が0.1mm以上5.0mm以下である、請求項1ないし5いずれか1項に記載のレニウムタングステン線棒。
- 前記線棒の引張強さの標準偏差が35N/mm2以下である、請求項6に記載のレニウムタングステン線棒。
- 請求項1ないし7いずれか1項に記載のレニウムタングステン線棒を用いる、熱電対。
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WO2023238699A1 (ja) * | 2022-06-06 | 2023-12-14 | パナソニックIpマネジメント株式会社 | タングステン合金線及び金属製品 |
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WO2023238699A1 (ja) * | 2022-06-06 | 2023-12-14 | パナソニックIpマネジメント株式会社 | タングステン合金線及び金属製品 |
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