WO2022102096A1 - ワーク粘着チャック装置及びワーク貼り合わせ機 - Google Patents

ワーク粘着チャック装置及びワーク貼り合わせ機 Download PDF

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Publication number
WO2022102096A1
WO2022102096A1 PCT/JP2020/042490 JP2020042490W WO2022102096A1 WO 2022102096 A1 WO2022102096 A1 WO 2022102096A1 JP 2020042490 W JP2020042490 W JP 2020042490W WO 2022102096 A1 WO2022102096 A1 WO 2022102096A1
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WO
WIPO (PCT)
Prior art keywords
adhesive
peeling
work
workpiece
portions
Prior art date
Application number
PCT/JP2020/042490
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
謙司 佐藤
義和 大谷
Original Assignee
信越エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越エンジニアリング株式会社 filed Critical 信越エンジニアリング株式会社
Priority to CN202080100757.1A priority Critical patent/CN115552322B/zh
Priority to PCT/JP2020/042490 priority patent/WO2022102096A1/ja
Priority to JP2021544638A priority patent/JP6942908B1/ja
Priority to KR1020227033801A priority patent/KR102592800B1/ko
Priority to TW110136750A priority patent/TWI766810B/zh
Publication of WO2022102096A1 publication Critical patent/WO2022102096A1/ja

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78—Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Definitions

  • the present invention is, for example, a flat panel display (FPD) such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), a flexible display, or a sensor device, or, for example, a touch panel type FPD or 3D (three-dimensional).
  • FPD flat panel display
  • LCD liquid crystal display
  • OLED organic EL display
  • PDP plasma display
  • flexible display or a sensor device
  • a substrate is attached to attach another workpiece such as a touch panel, cover glass, cover film, or FPD to a workpiece such as a liquid crystal module (LCM) or flexible printed wiring board (FPC) such as a display or electronic book.
  • LCD liquid crystal display
  • OLED organic EL display
  • PDP plasma display
  • a flexible display or a sensor device
  • a substrate is attached to attach another workpiece such as a touch panel, cover glass, cover film, or FPD to a workpiece such as a liquid crystal module (LCM) or flexible printed wiring board (F
  • the present invention relates to a work adhesive chuck device used for a substrate assembly device such as a matching machine, a substrate transfer device for transporting a thin plate-shaped work (processed object), and a work bonding machine equipped with this work adhesive chuck device.
  • a first surface plate on which the first substrate is attached, a second surface plate on which the second substrate to be bonded to the first substrate is attached, and a first plate are used.
  • a substrate chuck having an adhesive rubber that fixes the first substrate that rests on the surface plate using adhesive force, and a force in a direction opposite to the adhesive force so that the first substrate is separated from the adhesive rubber.
  • There is a substrate bonding device including an adhesive release device for inducing a rubber see, for example, Patent Document 1).
  • the adhesive release device is provided on the first surface plate, and is composed of a heat-expanding portion that heats and expands in the direction of the adhesion surface of the first substrate to detach the first substrate.
  • the thermal expansion portion includes an expansion member made of a ductile material that expands toward the adhesion surface side of the first substrate adhered to the adhesive rubber.
  • a plurality of adhesive rubbers are provided on the outside of the heat-expanded portion in the form of a rectangle long in the radial direction or in the form of an arc long in the circumferential direction.
  • an adhesive rubber may be formed in a central portion, and a heat-expanding portion may be provided in a form in which a heat-expanding portion is arranged in an annular shape around the adhesive rubber.
  • the first substrate is separated from the adhesive rubber and bonded to the second substrate located below.
  • the first chamber and the second chamber are separated from each other and opened to the atmosphere, and the coalesced first substrate and the second substrate are carried out.
  • the first substrate is a thin plate-shaped work that is easily deformed
  • the heat-expanded portion protrudes and deforms from the adhered portion that is adhesively held on the adhesive surface in the work.
  • the non-adhesive part pressed by is tilted as a whole and becomes a partial deflection.
  • the deflection of the work becomes relatively large.
  • the liquid crystal display flows to a place where the distance from the second substrate is narrow, and there is a high possibility that vacuum bubbles and unevenness are generated. As a result, there is a problem that the yield of products is lowered and high-performance products cannot be produced.
  • the work adhesive chuck device has a facing surface provided so as to be relatively movable in a direction of approaching or separating from the thin plate-shaped work W, and the facing surface.
  • An adhesive portion provided so as to face the surface of the work, a plurality of peeling portions provided so as to be elastically deformable inside and outside the adhesive portion on the facing surface, and the plurality of peeling portions are directed toward the work, respectively.
  • the peeling drive unit is provided with a peeling drive unit that is projected and deformed, and a control unit that controls the operation of the peeling drive unit.
  • the control unit has an adhesive surface that detachably holds the surface adhesively, and the plurality of peeling portions are directed toward a plurality of non-adhesive portions adjacent to each other with the adhered portion that is adhesively held by the adhesive surface on the surface of the work.
  • the control unit has a plurality of pressing surfaces that are projected and deformed to press the plurality of non-adhesive portions, and the control unit presses the plurality of non-adhesive portions by the plurality of pressing surfaces to press the adhesive surface and the adherent surface. It is characterized in that a space portion S1 that expands from both ends of the adhered portion continuous with the plurality of non-adhesive portions is formed between the portions.
  • the work adhesive chuck device A has a thin plate-shaped work W made of, for example, a liquid crystal display (LCD) substrate, and a facing surface 11a of the holding plate 1.
  • the work W is firmly and detachably held and received by contact with the provided adhesive portion 2, and the work W is peeled off from the adhesive portion 2 and received by the protruding deformation of the peeling portion 3 toward the work W. It is a work holding device to be handed over.
  • a work adhesive chuck device A is used in a work bonding machine B for bonding substrates and the like, a work transfer device for transporting substrates and the like, and the like.
  • the work adhesive chuck device A is provided on the facing surface 11a and the facing surface 11a of the holding plate 1 provided so as to be relatively movable in the direction of approaching or separating from the work W.
  • the adhesive portion 2 provided so as to face the surface W1 of the work W and a plurality of peeling portions 3 provided on the facing surface 11a so as to be elastically deformable are provided as main components.
  • the contact / detachment drive unit 4 for relatively approaching or separating the facing surface 11a of the holding plate 1 or one or both of the work W, and the plurality of peeling portions 3 are respectively projected and deformed toward the work W.
  • the facing surface 11a of the holding plate 1 and the work W are usually arranged so as to face each other in the vertical direction, and the facing direction of the facing surface 11a and the work W is hereinafter referred to as "Z direction”.
  • the direction along the facing surface 11a intersecting the Z direction and the work W is hereinafter referred to as "XY direction”.
  • the holding plate 1 is made of a surface plate or the like formed of a hard material such as metal, ceramic, or hard synthetic resin.
  • a chuck body 11 is provided on the smooth surface 1a side of either the front or the back of the holding plate 1.
  • the chuck body 11 is made of a hard material such as metal, ceramic, or hard synthetic resin, and is formed in a circular or rectangular plate shape (a quadrilateral having a right angle including a rectangle and a square), and the facing surface 11a is formed on either the front or the back. Has. Further, as shown in FIGS.
  • the chuck main body 11 is composed of a plurality of support plates 11b that are detachably connected to each other, and a plurality of support plates 11b described later are provided between the plurality of support plates 11b. It is preferable that the peeling portion 3 of the above is detachably attached.
  • the chuck body 11 is assembled to the holding plate 1 and the plurality of support plates 11b are connected to each other by attaching and fixing them with fasteners 1c such as screws and bolts.
  • the adhesive portion 2 is an adhesive sheet in which all or part of the adhesive portion 2 is made of a rubber such as fluororubber or butyl rubber, an elastomer, a photosensitive resin, and an adhesive material such as acrylic or silicon.
  • the adhesive portion 2 is formed along the facing surface 11a of the chuck main body 11 in an annular shape such as a circle or an ellipse, or in a frame shape such as a square or a polygon. Further, the adhesive portion 2 has an adhesive surface 2a formed on the front side facing the surface W1 of the work W in the Z direction, and a mounting surface 2b formed on the back side thereof.
  • the mounting surface 2b is immovably fixed in the Z direction and the XY directions with respect to the facing surface 11a of the chuck body 11.
  • the adhesive surface 2a of the adhesive portion 2 is configured to be in contact with a part of the surface W1 of the work W so as to adhere to the contacted portion and hold the adhered portion W2 detachably.
  • the adhesive surface 2a is shown as a specific example in FIGS. 1 (a) to 1 (c)
  • the adhesive surface 2a is formed into an uneven shape by surface treatment at the time of molding the rubber.
  • the contact area of the adhesive surface 2a with respect to the surface W1 of the work W is reduced, and the adhesive force is controlled so that the adhesive force can be easily peeled off by the plurality of peeling portions 3 described later.
  • the adhesive surface 2a may be formed into an uneven shape by post-processing such as blasting (sandblasting), laser processing, or etching instead of the surface processing at the time of molding, or the adhesive surface 2a. Can be changed to a concave-convex shape or structure other than the illustrated example.
  • the plurality of peeled portions 3 are elastic materials that can be elastically deformed in whole or in part, such as rubbers such as fluororubber and ethylene propylene diene (EPDM) rubber, elastomers, and soft synthetic resins, and are thin plates such as circular or rectangular. It consists of a diaphragm and an elastic plate formed in a shape.
  • the plurality of peeling portions 3 are arranged on the inside and outside of the adhesive portion 2 on the facing surface 11a of the chuck main body 11 so as to sandwich the adhesive portion 2 in the XY direction, respectively, on the front side facing the surface W1 of the work W in the Z direction. It has a plurality of pressing surfaces 3a to be formed.
  • all the pressing surfaces 3a are directed toward the plurality of non-adhesive portions W3, W4 and the like adjacent to each other in the XY direction with the adhered portion W2 adhesively held by the adhesive surface 2a on the surface W1 of the work W. It is configured to elastically project and deform in the Z direction. Further, it is preferable that the inner first peeling portion 31 of the plurality of peeling portions 3 is provided substantially in the center of the facing surface 11a.
  • the shape of the inner first peeling portion 31 is preferably formed in a circular shape when the chuck main body 11 is in the shape of a circular plate, and is preferably formed in a rectangular shape when the chuck main body 11 is in the shape of a rectangular plate.
  • the outer second peeling portion 32 and the like are preferably provided along the outer edge of the adhesive portion 2 in an annular shape such as a circle or an ellipse, or in a frame shape such as a square or a polygon.
  • the pressing surface 32a of the outer second peeling portion 32 arranged on the outside excluding the inner first peeling portion 31 has the adhesive portion 2 inside the outer second peeling portion 32 and the like. It is preferable to form a pressing passage 3p for vacuum breaking so that the space portion S1 in which the space is arranged and the outer space S 1958 outside the outer second peeling portion 32 and the like communicate with each other.
  • the space portion S1 in which the adhesive portion 2 is arranged and the inner space Si in which the first peeling portion 31 is arranged inside the adhesive portion 2 are provided. It is preferable to form the adhesive passage 2p for vacuum breaking so as to communicate with each other.
  • a plurality of pressing surfaces 3a are formed on the inside and outside of the diaphragm and the elastic plate so as to be elastically deformable.
  • the plurality of pressing surfaces 3a are formed in an uneven shape by surface treatment during molding of rubbers. As a result, the contact area of the pressing surface 3a with respect to the surface W1 of the work W is reduced to control the work W so that it does not come into close contact with the surface W1.
  • a mounting portion 3b is formed on the outer periphery of the diaphragm or the elastic plate. It is preferable that the mounting portion 3b is sandwiched between a plurality of support plates 11b constituting the chuck main body 11 so as to be immovable in the Z direction and the XY direction and detachably mounted and fixed. As a result, the plurality of pressing surfaces 3a are elastically deformably supported in the Z direction along the facing surface 11a of the chuck body 11, and a part of the flow path 5b of the driving fluid 5F described later is opened. A plurality of places of the support plate 11b of the main body 11 are arranged so as to be hermetically sealed.
  • the diaphragm and the elastic film are divided into an inner first peeling portion 31 and an outer second peeling portion 32, and are attached separately.
  • a plurality of pressing surfaces 3a may be formed in an uneven shape by post-processing such as blasting (sandblasting), laser processing, or etching instead of surface processing at the time of molding. It is also possible to change the pressing surface 3a of the above to an uneven shape or structure other than the illustrated example, or to integrally attach the inner first peeling portion 31 and the outer second peeling portion 32 without dividing them. be.
  • the contact / detachment drive unit 4 is composed of an actuator or the like that moves one or both of the facing surfaces 11a of the holding plate 1 or the work W relatively close to each other or apart from each other, and is operated and controlled by a control unit 6 described later. There is. In the control unit 6 to be described later, the contact / detachment drive unit 4 moves one or both of the facing surface 11a of the holding plate 1 or the work W relatively close to each other, so that the adhesive surface 2a of the adhesive unit 2 becomes a work. The operation is controlled so as to be in contact with a part of the surface W1 of W (adhesive portion W2) and to detachably hold the adhered portion W2.
  • the peeling drive unit 5 is composed of an actuator or the like that projects and deforms the pressing surfaces 3a of the plurality of peeling parts 3 toward the work W, and the operation is controlled by the control unit 6 described later.
  • the drive of a compressor or the like that supplies a drive fluid 5F composed of a gas such as compressed air or gas or a liquid such as water from a supply source (not shown). It has a source 5a and a flow path 5b that leads from the supply source to the primary side of the plurality of peeling portions 3 via the drive source 5a.
  • a part of the flow path 5b is bored so as to penetrate a plurality of places of the holding plate 1 and the support plate 11b of the chuck main body 11 in the Z direction.
  • the drive fluid 5F is supplied from the drive source 5a to the facing surface 11a of the chuck main body 11 through the flow path 5b.
  • a flow rate adjusting valve (not shown) or the like may be provided in the middle of the flow path 5b.
  • the drive source 5a, the flow rate adjusting valve, and the like supply a predetermined amount of the driving fluid 5F toward the primary side of the plurality of peeling portions 3, so that the primary side and the second of the plurality of peeling portions 3 are supplied.
  • a pressure difference is generated between the pressing surface and the next side, and the operation is controlled so that the plurality of pressing surfaces 3a are elastically expanded and deformed in the Z direction.
  • a plurality of pressings may be performed by another driving source such as pressing by a cylinder or the like instead of the driving source 5a for supplying the driving fluid 5F. It is also possible to elastically project and deform the surface 3a in the Z direction.
  • the control unit 6 is not only a contact / detachment drive unit 4 and a peeling drive unit 5, but also a controller that is electrically connected.
  • the controller serving as the control unit 6 sequentially controls the operation at preset timings according to a program preset in the control circuit (not shown). Then, the program set in the control circuit of the control unit 6 will be described as a method of peeling the work W adhesively held by the adhesive surface 2a of the adhesive unit 2.
  • the pressing surfaces 3a of the plurality of peeling portions 3 are contracted and deformed in a concave shape from the facing surface 11a of the holding plate 1, and the adhesive holding is held by the adhesive surface 2a of the adhesive portion 2.
  • the work W is on standby without applying a peeling force.
  • all the pressing surfaces 3a in the plurality of peeling portions 3 are deformed to protrude from the facing surface 11a of the holding plate 1 due to the operation of the peeling drive unit 5, and the surface of the work W is deformed.
  • the work W is forcibly peeled off (pushed off) from the adhesive surface 2a of the adhesive portion 2 by pressing against W1 (a plurality of non-adhesive portions W3, W4, etc.) and further pushing in the same direction.
  • W1 a plurality of non-adhesive portions W3, W4, etc.
  • the surface W1 of the work W comes into contact with the adhesive surface 2a of the adhesive portion 2 due to the relative proximity between the thin plate-shaped work W and the facing surface 11a.
  • the adhered portion W2 of the surface W1 with respect to the adhesive surface 2a is adhesively held.
  • the plurality of pressing surfaces 3a in the plurality of peeling portions 3 are elastic toward the non-adhesive portions W3 and W4 on both sides adjacent to each other with the adhered portion W2 in between. It is projected and deformed.
  • the plurality of pressing surfaces 3a are pressed against the non-adhesive portions W3 and W4 to press the non-adhesive portions W3 and W4 in the peeling direction (Z direction), respectively.
  • the adhered portion W2 with respect to the adhesive surface 2a is substantially simultaneously pushed off from both ends of the adhered portion W2 continuous with the plurality of non-adhesive portions W3 and W4 toward the intermediate position and expanded. Therefore, a space portion S1 is generated between the adhesive surface 2a and the adhered portion W2. Therefore, even if the work W is a thin plate that is easily deformed, the surface W1 can be smoothly pushed off from the adhesive surface 2a of the adhesive portion 2 with a relatively small deflection deformation.
  • the adhesive portion W2 with respect to the adhesive surface 2a is compared with the conventional one in which the adhesive rubber and the heat-expanded portion adjacent to the adhesive rubber are pushed and peeled off from one end side of the adhered portion continuous with the heat-expanded portion in only one direction.
  • the push-off is substantially simultaneous push-off from both directions in succession with the non-adhesive portions W3 and W4 adjacent to each other with the adhered portion W2 in between. Therefore, the adhered portion W2 is not inclined as a whole with respect to the adhesive surface 2a and is pushed off substantially in parallel.
  • the work adhesive chuck device A2 of the second embodiment is shown in FIGS. 2 (a) to 2 (c).
  • the work adhesive chuck device A3 of the third embodiment is shown in FIGS. 3A to 3C.
  • An example of a work bonding machine B using the work adhesive chuck device A according to the embodiment of the present invention is shown in FIG.
  • the adhesive portion 2 is provided in an annular shape or a frame shape so as to surround the inner first peeling portion 31 among the plurality of peeling portions 3, and the outer second peeling portion 32 is provided. It is provided in an annular shape or a frame shape along the outer edge of the adhesive portion 2, and the first pressing surface 31a of the first peeling portion 31 and the second pressing surface 32a of the second peeling portion 32 are adjacent to each other with the adhesive surface 2a of the adhesive portion 2 interposed therebetween. Arranged to fit. In the cases shown in FIGS.
  • two peeling portions 3 are doubly arranged inside and outside with one adhesive portion 2 interposed therebetween.
  • All the pressing surfaces 3a are projected and deformed.
  • the inner first peeling portion 31 is arranged substantially in the center of the facing surface 11a.
  • the entire shape of the chuck body 11 is a circular plate shape, and the adhesive portion 2 and the outer second peeling portion 32 are each formed in an annular shape.
  • the first pressing surface 31a of the inner first peeling portion 31 is in the Z direction toward the first non-adhesive portion W3 inside the adhered portion W2 which is adhesively held by the adhesive surface 2a on the surface W1 of the work W. Protruding and pressing.
  • the second pressing surface 32a of the outer second peeling portion 32 projects in the Z direction toward the non-adhesive portion W4 on the outer side of the central adhered portion W2 and press-contacts.
  • the flow path 5b from the drive source 5a of the peeling drive unit 5 to the primary side of all the peeling parts 3 is one system, and as the driving fluid 5F is supplied to the flow path 5b, the inner first flow path 5b is provided.
  • the first pressing surface 31a of the peeling portion 31 and the second pressing surface 32a of the outer second peeling portion 32 are simultaneously projected.
  • the pressing surface 31a of the central first peeling portion 31 and the pressing surface 32a of the outer second peeling portion 32 are formed by the operation of the peeling drive unit 5.
  • the non-adhesive portion W3 in the center adjacent to each other across the adhered portion W2 and the non-adhesive portion W4 on the outside are projected and deformed and pressed in the peeling direction (Z direction).
  • the adhesive surface 2a is pushed off from both ends of the adhesive portion W2 continuous to the central non-adhesive portion W3 and the outer non-adhesive portion W4 toward the inner and outer intermediate positions and expanded.
  • the surface W1 of the thin plate-shaped work W can be reliably pushed off from the adhesive surface 2a of the adhesive portion 2 with a slight deformation of the work W.
  • the structure is simple, the peeling force of the work W by the central first pressing surface 31a and the outer second pressing surface 32a is improved, and the chuck performance is excellent.
  • the work adhesive chuck device A2 of the second embodiment has a configuration in which the flow paths 5b from the drive source 5a of the peeling drive unit 5 to the primary side of all the peeling portions 3 are a plurality of systems, as in the first embodiment described above. Is different, and the other configurations are the same as those of the first embodiment.
  • the second peeling portion 32 outside the drive source 5a is separated from the first flow path 5b extending from the drive source 5a to the primary side of the inner first peeling portion 31. It forms a second flow path 5c leading to the primary side.
  • the drive fluid 5F is supplied from the drive source 5a to the primary side of the inner first peeling portion 31 through the first flow path 5b, and at the same time, the outer second peeling through the second flow path 5c. It is also supplied to the primary side of the unit 32. Therefore, by controlling the supply timing and supply amount of the driving fluid 5F for the first flow path 5b and the second flow path 5c, the first pressing surface 31a of the inner first peeling portion 31 and the outer second peeling are performed. It is possible to simultaneously project the second pressing surface 32a of the portion 32 or to shift the timing to project the second pressing surface 32a. As a result, delicate peeling control suitable for the thickness of the work W can be achieved.
  • the inner first adhesive portion 21 is provided as the adhesive portion 2 in an annular shape or a frame shape so as to surround the innermost first peeling portion 31 among the plurality of peeling portions 3.
  • the second peeling portion 32 outside the first peeling portion 31 is provided in an annular shape or a frame shape along the outer edge of the first adhesive portion 21, and is outside as the adhesive portion 2 so as to surround the second peeling portion 32.
  • the second adhesive portion 22 is provided in an annular shape or a frame shape
  • the third peeling portion 33 outside the second peeling portion 32 is provided on the outside of the second adhesive portion 22 in an annular shape or along the outer edge of the second adhesive portion 22.
  • first pressing surface 31a of the first peeling portion 31 and the second pressing surface 32a of the second peeling portion 32 are arranged so as to be adjacent to each other with the first adhesive surface 21a of the first adhesive portion 21 interposed therebetween.
  • the configuration in which the second pressing surface 32a and the third pressing surface 33a of the third peeling portion 33 are arranged adjacent to each other with the second adhesive surface 22a of the second adhesive portion 22 interposed therebetween is different from the above-described first embodiment. Other than that, the configuration is the same as that of the first embodiment.
  • three peeling portions 3 are sandwiched between the two adhesive portions 2 (first adhesive portion 21 and second adhesive portion 22) inside and outside.
  • the second peeling portion 32 and the third peeling portion 33 are arranged in triplicate, and all the pressing surfaces 3a (the first pressing surface 31a, the second pressing surface 32a, and the third pressing surface 33a) are projected and deformed.
  • the innermost first peeling portion 31 is arranged substantially in the center of the facing surface 11a.
  • the overall shape of the chuck body 11 is a circular plate shape, and the first adhesive portion 21 and the second adhesive portion 22 are formed in an annular shape with the intermediate second peeling portion 32 and the outer third peeling portion 33, respectively. There is. Further, the overall size of the chuck body 11 is set to the same size as that of the first embodiment.
  • the third pressing surface 33a of the third peeling portion 33 arranged outside the second peeling portion 32 is adhesively held by the second adhesive surface 22a of the outer second adhesive portion 22 on the surface W1 of the work W. It projects in the Z direction toward the non-adhesive portion W6 outside the adhered portion W5 in the middle and is pressed against it.
  • the pressing surface 31a of the central first peeling portion 31 and the pressing surface 32a of the outer second peeling portion 32 are operated by the operation of the peeling drive unit 5.
  • the third pressing surface 33a of the third peeling portion 33 protrudes and deforms toward the central non-adhesive portion W3 adjacent to each other across the inner adherent portion W2, the intermediate non-adhesive portion W4, and the outer non-adhesive portion W6. And press in the peeling direction (Z direction) respectively.
  • the inner first adhesive surface 21a is substantially simultaneously pushed off from both ends of the inner adherent portion W2 continuous with the central non-adhesive portion W3 and the intermediate non-adhesive portion W4 toward the inner and outer intermediate positions. And expand each.
  • the outer non-adhesive portion W4 and the outer non-adhesive portion W6 are continuously pressed and peeled off from both ends of the outer adherent portion W5 toward the inner and outer intermediate positions. And each is expanded.
  • the surface W1 of the thin plate-shaped work W can be reliably pushed off from the first adhesive surface 21a of the first adhesive portion 21 and the second adhesive surface 22a of the second adhesive portion 22 with a slight deformation of the work W.
  • the adhesive portion 2 and the peeling portion 3 are not aggregated and are dispersedly arranged as compared with the first embodiment of the whole size in which the two peeling portions 3 are doubly arranged inside and outside with the one adhesive portion 2 interposed therebetween. Will be done. Therefore, the adhesive force of the work W by the inner first adhesive surface 21a and the outer second adhesive surface 22a, the central first pressing surface 31a, the intermediate second pressing surface 32a, and the outer third pressing surface 33a.
  • the peeling force of the work W is improved, and the chuck performance is excellent.
  • Example of work bonding machine In the work bonding machine B, a plurality of work adhesive chuck devices A are dispersed and attached to either one or both of the pair of holding plates 1 and 1'opposed to each other at predetermined intervals, and the adhesive is held by the adhesive portion 2.
  • the work (first work) W that has been made is peeled off from the adhesive portion 2 by the plurality of peeling portions 3, and is attached to another work (second work) W'.
  • the work adhesive chuck device A1 of the first embodiment is dispersedly assembled only on one (upper) holding plate 1, and the work (first work) W can be detachably attached and detached by the adhesive portion 2.
  • Another work (second work) W' is held on the other (lower) holding plate 1'so as to face the first work W in parallel with the sealing material C.
  • the sealing material C is sandwiched between the work (first work) W and the other work (second work) W'is laminated and bonded.
  • one or both of the pair of holding plates 1, 1' are provided with suction suction portions 12 facing the first work W and the second work W'in the Z direction. It is also possible to detachably suck and suck either one or both of the first work W and the second work W'by the suction suction unit 12.
  • a plurality of suction suction portions 12 are arranged so as to surround the plurality of work adhesive chuck devices A only on the smooth surface 1a of the holding plate 1 on one side (upper side). Further, although not shown as another example, it is also possible to provide the work adhesive chuck device A and the suction suction portion on the other (lower) holding plate 1'.
  • the first work W is adhesively held by the adhesive portion 2 in an atmospheric atmosphere, a vacuum atmosphere, or an atmosphere that has reached a predetermined degree of vacuum, and a plurality of the first work Ws that are adhesively retained are held. It is preferable that the periphery of the first work W is opened to the atmosphere (returns to the atmospheric atmosphere) after being forcibly peeled by the peeling portion 3 of the above. In this case, the first pressing surface 31a of the inner first peeling portion 31 and the second pressing surface 32a of the outer second peeling portion 32 are combined with the surface W1 of the first work W (inner first non-adhesive portion W3).
  • W is pushed and peeled off by a plurality of peeling portions 3 (inner first peeling portion 31 and outer second peeling portion 32) toward another work W'held by the other holding plate 1'.
  • the work W pushed off from the adhesive portion 2 is attached to another work W'. Therefore, even a thin plate-shaped work (first work) W that is easily deformed can be smoothly peeled off from the adhesive surface 2a of the adhesive portion 2 with a relatively small deflection deformation, and another work (second work) W. Can be pasted to ′.
  • the LCD is peeled off from one end side of the adhered portion continuous with the heat-expanded portion in only one direction and bonded to the second substrate located below. Since the deflection of the work W is relatively small compared to the conventional one that creates .. As a result, the possibility of generating vacuum bubbles and unevenness is reduced, the yield of the product is improved, and high-performance products can be produced.
  • the present invention is not limited to this, and the entire chuck body 11 is not limited to this.
  • the shape may be changed to a rectangular plate shape.
  • the three peeling portions 3 are arranged in triplicate inside and outside so that the two adhesive portions 2 are sandwiched, but the present invention is not limited to this, and the three or more adhesive portions 2 are sandwiched.
  • peeling portions 3 are arranged in four or more layers inside and outside, the adhesive portion 2 and the peeling portion 3 are provided in a frame shape such as a square or a polygon, and the adhesive portion is substantially in the center of the facing surface 11a. 2 may be arranged.
  • the overall size of the chuck body 11 can be changed so that the arrangement of the peeling portions 3 is larger than the double arrangement of the peeling portions 3 or the arrangement of the peeling portions 3 is larger than the double arrangement. In these cases as well, the same operations and advantages as those of the above-mentioned first to third embodiments can be obtained.
  • the work adhesive chuck device A according to the embodiment of the present invention is used for the work bonding machine B
  • the present invention is not limited to this, and the work adhesive chuck device A may be used for a work transfer device or the like instead of the work bonding machine B. Is also possible. Also in this case, the same operations and advantages as those of the work bonding machine B described above can be obtained.
  • a Work adhesive chuck device B Work bonding machine 1 One holding plate 1'The other holding plate 2 Adhesive part 21 First adhesive part 22 Second adhesive part 2a Adhesive surface 21a First adhesive surface 22a Second adhesive surface 3 Peeling part 31 1st peeling part 32 2nd peeling part 33 3rd peeling part 3a Pressing surface 31a 1st pressing surface 32a 2nd pressing surface 33a 3rd pressing surface 5 Peeling drive part 6 Control part 11a Opposing surface S1 Space part W work ( 1st work) W1 Surface W2 Adhesive part W3 Non-adhesive part W4 Non-adhesive part W'Another work (second plate-shaped work)

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2020/042490 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機 WO2022102096A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN202080100757.1A CN115552322B (zh) 2020-11-13 工件粘附保持盘装置及工件贴合机
PCT/JP2020/042490 WO2022102096A1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機
JP2021544638A JP6942908B1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機
KR1020227033801A KR102592800B1 (ko) 2020-11-13 2020-11-13 워크 점착 척 장치 및 워크 첩합기
TW110136750A TWI766810B (zh) 2020-11-13 2021-10-01 工件黏著卡盤裝置及工件貼合機

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JP2006276669A (ja) * 2005-03-30 2006-10-12 Shin-Etsu Engineering Co Ltd 粘着チャック装置及びそれを備えた基板貼り合わせ機
KR20100085366A (ko) * 2009-01-20 2010-07-29 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 접합 장치
WO2014102913A1 (ja) * 2012-12-25 2014-07-03 信越エンジニアリング株式会社 アクチュエータ及び粘着チャック装置
WO2014109018A1 (ja) * 2013-01-09 2014-07-17 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機

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US20090273796A1 (en) * 2008-04-30 2009-11-05 Kodak Graphic Communications Canada Company Peeling imaged media from a substrate
JP2010126342A (ja) 2008-12-01 2010-06-10 Advanced Display Process Engineering Co Ltd 基板チャック及びこれを有する基板合着装置
JP6080647B2 (ja) * 2013-03-28 2017-02-15 株式会社Ｓｃｒｅｅｎホールディングス 剥離装置
JP6268483B2 (ja) * 2014-06-03 2018-01-31 旭硝子株式会社 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP7320932B2 (ja) * 2017-11-10 2023-08-04 芝浦メカトロニクス株式会社 成膜装置及び部品剥離装置
JP7146457B2 (ja) * 2018-05-31 2022-10-04 日東電工株式会社 粘着テープ剥離方法および粘着テープ剥離装置

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Publication number Priority date Publication date Assignee Title
JP2006276669A (ja) * 2005-03-30 2006-10-12 Shin-Etsu Engineering Co Ltd 粘着チャック装置及びそれを備えた基板貼り合わせ機
KR20100085366A (ko) * 2009-01-20 2010-07-29 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 접합 장치
WO2014102913A1 (ja) * 2012-12-25 2014-07-03 信越エンジニアリング株式会社 アクチュエータ及び粘着チャック装置
WO2014109018A1 (ja) * 2013-01-09 2014-07-17 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機

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KR102592800B1 (ko) 2023-10-20
KR20220139412A (ko) 2022-10-14
JPWO2022102096A1 (ko) 2022-05-19
TW202218965A (zh) 2022-05-16
JP6942908B1 (ja) 2021-09-29
CN115552322A (zh) 2022-12-30
TWI766810B (zh) 2022-06-01

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