JP6942908B1 - ワーク粘着チャック装置及びワーク貼り合わせ機 - Google Patents

ワーク粘着チャック装置及びワーク貼り合わせ機 Download PDF

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Publication number
JP6942908B1
JP6942908B1 JP2021544638A JP2021544638A JP6942908B1 JP 6942908 B1 JP6942908 B1 JP 6942908B1 JP 2021544638 A JP2021544638 A JP 2021544638A JP 2021544638 A JP2021544638 A JP 2021544638A JP 6942908 B1 JP6942908 B1 JP 6942908B1
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Japan
Prior art keywords
adhesive
work
peeling
portions
pressing
Prior art date
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JP2021544638A
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English (en)
Japanese (ja)
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JPWO2022102096A1 (ko
Inventor
謙司 佐藤
謙司 佐藤
義和 大谷
義和 大谷
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Shin Etsu Engineering Co Ltd
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Shin Etsu Engineering Co Ltd
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Publication date
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Publication of JPWO2022102096A1 publication Critical patent/JPWO2022102096A1/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78—Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2021544638A 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機 Active JP6942908B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/042490 WO2022102096A1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機

Publications (2)

Publication Number Publication Date
JP6942908B1 true JP6942908B1 (ja) 2021-09-29
JPWO2022102096A1 JPWO2022102096A1 (ko) 2022-05-19

Family

ID=77847088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021544638A Active JP6942908B1 (ja) 2020-11-13 2020-11-13 ワーク粘着チャック装置及びワーク貼り合わせ機

Country Status (5)

Country Link
JP (1) JP6942908B1 (ko)
KR (1) KR102592800B1 (ko)
CN (1) CN115552322B (ko)
TW (1) TWI766810B (ko)
WO (1) WO2022102096A1 (ko)

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW558743B (en) * 2001-08-22 2003-10-21 Semiconductor Energy Lab Peeling method and method of manufacturing semiconductor device
JP2006276669A (ja) * 2005-03-30 2006-10-12 Shin-Etsu Engineering Co Ltd 粘着チャック装置及びそれを備えた基板貼り合わせ機
CN101379606B (zh) * 2007-01-31 2012-04-18 信越工程株式会社 粘接卡盘装置
US20090273796A1 (en) * 2008-04-30 2009-11-05 Kodak Graphic Communications Canada Company Peeling imaged media from a substrate
JP2010126342A (ja) 2008-12-01 2010-06-10 Advanced Display Process Engineering Co Ltd 基板チャック及びこれを有する基板合着装置
KR101066603B1 (ko) * 2009-01-20 2011-09-22 에이피시스템 주식회사 기판 지지 유닛 및 이를 구비하는 기판 접합 장치
JP4785995B1 (ja) * 2011-02-28 2011-10-05 信越エンジニアリング株式会社 ワーク粘着チャック装置及びワーク貼り合わせ機
KR101991990B1 (ko) * 2012-12-25 2019-06-21 신에츠 엔지니어링 가부시키가이샤 액추에이터 및 점착 척 장치
CN104904004B (zh) * 2013-01-09 2017-05-31 信越工程株式会社 工件粘附卡盘装置及工件贴合机
JP6080647B2 (ja) * 2013-03-28 2017-02-15 株式会社Ｓｃｒｅｅｎホールディングス 剥離装置
JP5422767B1 (ja) * 2013-05-09 2014-02-19 信越エンジニアリング株式会社 貼り合わせ分離方法及び分離装置
JP6268483B2 (ja) * 2014-06-03 2018-01-31 旭硝子株式会社 積層体の剥離装置及び剥離方法並びに電子デバイスの製造方法
JP5837247B1 (ja) * 2015-03-31 2015-12-24 株式会社日立製作所 基板組立装置とそれを用いた基板組立方法
JP7320932B2 (ja) * 2017-11-10 2023-08-04 芝浦メカトロニクス株式会社 成膜装置及び部品剥離装置
JP7146457B2 (ja) * 2018-05-31 2022-10-04 日東電工株式会社 粘着テープ剥離方法および粘着テープ剥離装置

Also Published As

Publication number Publication date
CN115552322A (zh) 2022-12-30
TWI766810B (zh) 2022-06-01
KR20220139412A (ko) 2022-10-14
WO2022102096A1 (ja) 2022-05-19
CN115552322B (zh) 2024-05-31
KR102592800B1 (ko) 2023-10-20
TW202218965A (zh) 2022-05-16
JPWO2022102096A1 (ko) 2022-05-19

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