WO2022091449A1 - Metal mask for printing - Google Patents

Metal mask for printing Download PDF

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Publication number
WO2022091449A1
WO2022091449A1 PCT/JP2021/012052 JP2021012052W WO2022091449A1 WO 2022091449 A1 WO2022091449 A1 WO 2022091449A1 JP 2021012052 W JP2021012052 W JP 2021012052W WO 2022091449 A1 WO2022091449 A1 WO 2022091449A1
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Prior art keywords
mesh
mesh hole
area
hole
rhombic
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PCT/JP2021/012052
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French (fr)
Japanese (ja)
Inventor
忍 油井
隆二 市川
Original Assignee
株式会社ボンマーク
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Priority to KR1020237002705A priority Critical patent/KR20230025908A/en
Priority to JP2022558837A priority patent/JPWO2022091449A1/ja
Priority to CN202180058448.7A priority patent/CN116171224A/en
Publication of WO2022091449A1 publication Critical patent/WO2022091449A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/24—Stencils; Stencil materials; Carriers therefor
    • B41N1/247—Meshes, gauzes, woven or similar screen materials; Preparation thereof, e.g. by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/04—Printing plates or foils; Materials therefor metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41N—PRINTING PLATES OR FOILS; MATERIALS FOR SURFACES USED IN PRINTING MACHINES FOR PRINTING, INKING, DAMPING, OR THE LIKE; PREPARING SUCH SURFACES FOR USE AND CONSERVING THEM
    • B41N1/00—Printing plates or foils; Materials therefor
    • B41N1/24—Stencils; Stencil materials; Carriers therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns

Definitions

  • mesh holes 5 having a rhombus as a basic shape formed in the horizontally long rectangular print pattern area 4 they are arranged in a vertical row adjacent to the left and right side ends of the large rhombus mesh holes 5a.
  • four rhombus mesh holes 5b which are smaller and smaller than the large rhombus mesh holes 5a based on the rhombus, are arranged in the vertical direction, for a total of eight mesh holes, for example, about 18 mesh hole openings.
  • the mesh wire diameter D2 is about 17 to 12 ⁇ m and the mesh hole area is S2
  • the correlation between the mesh areas is S1> S2.
  • the correlation of the mesh wire diameter is D1 ⁇ D.
  • the mesh hole opening having the same size as the pentagonal mesh hole 5c may be about 18 to 23 ⁇ m, and the mesh wire diameter D4 may be about 17 to 12 ⁇ m.
  • the correlation of the mesh area is S1>S2 ⁇ S3> S4 or S1> D2 ⁇ S3 ⁇ S4, and the home-based pentagonal mesh hole 5c. Is also a small and small mesh hole, or a mesh hole having the same size as the home-based pentagonal mesh hole 5c.
  • the correlation of the mesh wire diameter is D1 ⁇ D2 ⁇ D3 ⁇ D4, or D1 ⁇ D2 ⁇ D3 ⁇ D4.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Textile Engineering (AREA)
  • Printing Plates And Materials Therefor (AREA)

Abstract

The purpose of the invention is to obtain a metal mask for printing in which the area of mesh holes in rows 1 to 3 arranged on the outer periphery of a print pattern is made smaller than the area of mesh holes in the center, and saddle is reduced.　The metal mask for printing includes a mask body, a recess that is formed in the lower surface of the mask body and recessed to the upper surface of the mask body, and numerous rhombic mesh holes formed in a print pattern region of the mask body, the numerous mesh holes comprising large rhombic mesh holes located in the center of the print pattern region, small outer-peripheral rhombic mesh holes that are smaller in area than the large rhombic mesh holes, pentagonal mesh holes in the form of home bases that have the same area as the small rhombic mesh holes and that are disposed in the outermost periphery of the print pattern region excluding the corners, and pentagonal mesh holes in the form of diamonds that have the same area as the small rhombic mesh holes and that are disposed in the corners of the print pattern region.

Description

印刷用メタルマスクMetal mask for printing
　この発明は、コンデンサー内部電極を印刷するための印刷用メタルマスクに関するものである。 The present invention relates to a metal mask for printing for printing an internal electrode of a capacitor.
　従来、積層セラミックコンデンサーは、スクリーン印刷版を用いてセラミックグリーンシート上に内部電極となる導電性ペーストを印刷し、このセラミックグリーンシートを複数枚積層して焼成した後に、この積層体を個々に切断することによって製造される。セラッミクグリーンシート上には複数個分の内部電極が一度に印刷され、スクリーン印刷版には同一形状の印刷孔が多数形成されている（例えば、特許文献１参照）。また、スクリーン印刷を行った場合、印刷パターンの両端部が盛り上がってサドル状になる現象が発生するため、印刷パターンが形成されたセラミックグリーンシートを積層、圧着した場合、耐圧不良率が高くなるので、これを改善するために、印刷パターンの両端部に大きな盛り上がりは形成されず、ほぼ平坦な印刷パターンを形成する印刷パターン形成材が知られている（特許文献２参照）。また、所定の矩形領域の中央部には菱形の孔が規則的に形成され、矩形領域の端部（周辺部）には菱形の一部の辺と矩形領域を成す辺の一部とを含む五角形の孔が規則的に形成された印刷パターン開口用のメッシュを有するマスクであって、矩形領域の角（四隅）を除く端部には、ホームベース状の五角形の孔が形成されており、矩形領域の角には、ダイヤモンド状の五角形の孔が形成されているマスクが知られている（特許文献３参照）。 Conventionally, in a laminated ceramic capacitor, a conductive paste as an internal electrode is printed on a ceramic green sheet using a screen printing plate, a plurality of the ceramic green sheets are laminated and fired, and then the laminated body is individually cut. Manufactured by A plurality of internal electrodes are printed on the serum green sheet at one time, and a large number of printing holes having the same shape are formed on the screen printing plate (see, for example, Patent Document 1). In addition, when screen printing is performed, a phenomenon occurs in which both ends of the print pattern are raised and become saddle-shaped. Therefore, when the ceramic green sheets on which the print pattern is formed are laminated and crimped, the withstand voltage defect rate becomes high. In order to improve this, there is known a print pattern forming material that does not form a large bulge at both ends of a print pattern and forms a substantially flat print pattern (see Patent Document 2). Further, rhombic holes are regularly formed in the central portion of a predetermined rectangular region, and the end portion (peripheral portion) of the rectangular region includes a part of the rhombic side and a part of the side forming the rectangular region. A mask having a mesh for printing pattern openings in which pentagonal holes are regularly formed, and home-based pentagonal holes are formed at the ends excluding the corners (four corners) of the rectangular area. A mask in which diamond-shaped pentagonal holes are formed at the corners of a rectangular region is known (see Patent Document 3).
特開２００１－３９０４８号公報Japanese Unexamined Patent Publication No. 2001-39048 特開２００５－２１２２８５号公報Japanese Unexamined Patent Publication No. 2005-21285 特許第５３９５８５０号公報Japanese Patent No. 5395850
　従来の特許文献２又は特許文献３に記載の印刷パターン形成材又はマスクでは、昨今より薄く印刷することを目的にマスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴い、印刷パターンの両端部が盛り上がってサドル状になる現象（外周部が内部と比べて導電性ペーストの厚みが厚くなる現象）が目立つようになっており、それが顕著になってきているので、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象の更なる低減化を図ることが必須となっている。 In the conventional print pattern forming material or mask described in Patent Document 2 or Patent Document 3, both ends of the print pattern are made thinner and the mesh holes of the print pattern are made finer for the purpose of printing thinner than these days. The phenomenon that the mask rises and becomes saddle-shaped (the phenomenon that the outer periphery becomes thicker than the inside) is becoming conspicuous, and it is becoming more prominent, so the mask is made thinner and printed. It is essential to further reduce the saddle phenomenon of the print pattern due to the miniaturization of the mesh holes of the pattern.
　この発明は、上述のような課題を解決するためになされたもので、印刷パターンの外周部に配列される１～３列のメッシュ孔の面積を中央部に配列されるメッシュ孔の面積に比べて約５～３０％程度小さくして、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象を低減することが可能な印刷用メタルマスクを提供するものである。 The present invention has been made to solve the above-mentioned problems, and the area of the mesh holes of 1 to 3 rows arranged in the outer peripheral portion of the print pattern is compared with the area of the mesh holes arranged in the central portion. The present invention provides a metal mask for printing, which can be reduced by about 5 to 30% to reduce the saddle phenomenon of the print pattern due to the thinning of the mask and the miniaturization of the mesh holes of the print pattern.
　この発明に係る印刷用メタルマスクにおいては、ペーストを印刷するためのものであって、互いに平行な上下二面を有する平板状のマスク本体部と、マスク本体部の下面側の被印刷物と対向する面に形成され、マスク本体部の上面側に向かって凹んでいる凹部と、マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、多数のメッシュ孔は、印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、大型の菱形メッシュ孔の外周部に配置され、中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有する外周部の小型の菱形メッシュ孔と、印刷パターン領域の隅角部を除く最外周部に配置され、外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、印刷パターン領域の隅角部に配置され、外周部の小型の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔と同じ面積を有するか、外周部の小型の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなるものである。 The printing metal mask according to the present invention is for printing a paste, and faces a flat plate-shaped mask main body having two parallel upper and lower surfaces and an object to be printed on the lower surface side of the mask main body. A recess formed on the surface and recessed toward the upper surface side of the mask body portion, and a large number of rhombus-based mesh holes formed in the print pattern area formed on the upper surface side of the mask body portion. The large number of mesh holes are arranged in the outer periphery of the large diamond-shaped mesh hole and the large diamond-shaped mesh hole arranged in the central part of the print pattern area, and are larger than the area of the large diamond-shaped mesh hole in the central part. A small rhombic mesh hole on the outer periphery having a small mesh hole area, and a home-based pentagon arranged on the outermost periphery excluding the corners of the print pattern area and having the same area as the small rhombic mesh hole on the outer periphery. And a small diamond-shaped mesh hole on the outer periphery or a small diamond-shaped mesh hole on the outer periphery that has the same area as a small diamond-shaped mesh hole on the outer periphery or a pentagonal mesh hole on the outer periphery. It consists of diamond-shaped pentagonal mesh holes having a mesh hole area smaller than the area of the base-shaped pentagonal mesh hole.
　また、多数のメッシュ孔は、印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、大型の菱形メッシュ孔の外周部の１列目～３列目に配置され、大型の菱形メッシュ孔のメッシュ孔面積よりも小さいメッシュ孔面積を有する小型の菱形メッシュ孔と、印刷パターン領域の隅角部を除く最外周部に配置され、外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、印刷パターン領域の隅角部に配置され、外周部の小型の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔と同じ面積を有するか、外周部の小型の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなるものである。 In addition, a large number of mesh holes are arranged in a large number of diamond-shaped mesh holes arranged in the central portion of the print pattern area and in the first to third rows of the outer peripheral portion of the large diamond-shaped mesh holes, and the large diamond-shaped meshes are arranged. A small diamond-shaped mesh hole having a mesh hole area smaller than the mesh hole area of the hole, and a home arranged on the outermost periphery excluding the corners of the print pattern area and having the same area as the small diamond-shaped mesh hole on the outer periphery. Base-shaped pentagonal mesh holes and small rhombic mesh holes on the outer periphery that are located in the corners of the print pattern area and have the same area as the small rhombic mesh holes on the outer periphery or the pentagonal mesh holes on the outer periphery. It consists of a diamond-shaped pentagonal mesh hole having a mesh hole area smaller than the area of the mesh hole or the home-based pentagonal mesh hole.
　また、大型の菱形メッシュ孔のメッシュ孔面積よりも小さいメッシュ孔面積を有する小型の菱形メッシュ孔は、大型の菱形メッシュ孔の少なくとも左右両側端部のいずれか一方又は少なくとも上下両側端部のいずれか一方に隣接して縦１列目又は横１列目～縦３列目又は横３列目に配置されているものである。 Further, the small rhombic mesh hole having a mesh hole area smaller than the mesh hole area of the large rhombic mesh hole is either at least one of the left and right side ends of the large rhombus mesh hole or at least one of the upper and lower side ends. It is arranged adjacent to one of them in the first vertical row or the first horizontal row to the third vertical row or the third horizontal row.
　また、多数のメッシュ孔は、印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、大型の菱形メッシュ孔の少なくとも左右両端部のいずれか一方又は少なくとも上下両端部のいずれか一方に隣接して縦１～３列又は横１～３列に複数配置される大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔と、印刷パターン領域の隅角部を除く少なくとも左右両側端部のいずれか一方及び／又は少なくとも上下両側端部のいずれか一方に配置されるホームベース状の五角形のメッシュ孔と、印刷パターン領域の隅角部に配置される小型で小さ目の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔の面積よりも小さ目のメッシュ孔面積を有するか、小型で小さ目の菱形メッシュ孔又はホームベース状の五角形のメッシュ孔の面積と同じメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔と、を備え、大型の菱形メッシュ孔のメッシュ孔面積をＳ１、大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔のメッシュ孔面積をＳ２、ホームベース状の五角形のメッシュ孔のメッシュ孔面積をＳ３、ダイヤモンド状の五角形のメッシュ孔のメッシュ孔面積をＳ４としたとき、Ｓ１＞Ｓ２≒Ｓ３＞Ｓ４又はＳ１＞Ｓ２≒Ｓ３≒Ｓ４の相関関係にあるものである。 Further, a large number of mesh holes are formed in at least one of the large rhombic mesh holes arranged in the center of the print pattern area and at least one of the left and right ends of the large rhombic mesh hole, or at least one of the upper and lower ends. Rhombus mesh holes that are smaller and smaller than the large rhombus mesh holes that are arranged adjacently in 1 to 3 rows vertically or 1 to 3 rows horizontally, and at least the left and right edges excluding the corners of the print pattern area. A home base-shaped pentagonal mesh hole located at either one and / or at least one of the upper and lower ends, and a small and smaller rhombic mesh hole or home base placed at the corner of the print pattern area. Diamond-shaped pentagonal mesh with a smaller mesh hole area than the area of the shaped pentagonal mesh hole, or with the same mesh hole area as the area of the smaller and smaller rhombic mesh hole or home-based pentagonal mesh hole. With holes, the mesh hole area of a large rhombic mesh hole is S1, the mesh hole area of a rhombic mesh hole smaller and smaller than the large rhombus mesh hole is S2, and the mesh hole of a home-based pentagonal mesh hole. When the area is S3 and the mesh hole area of the diamond-shaped pentagonal mesh hole is S4, there is a correlation of S1> S2≈S3> S4 or S1> S2≈S3≈S4.
　また、大型の菱形メッシュ孔のメッシュ線径をＤ１、大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔のメッシュ線径をＤ２、ホームベース状の五角形のメッシュ孔のメッシュ線径のＤ３、ダイヤモンド状の五角形のメッシュ孔のメッシュ線径をＤ４としたとき、Ｄ１＜Ｄ２≒Ｄ３＜Ｄ４又はＤ１＜Ｄ２≒Ｄ３≒Ｄ４の相関関係にあるものである。 The mesh wire diameter of the large rhombic mesh hole is D1, the mesh wire diameter of the rhombic mesh hole smaller and smaller than the large rhombic mesh hole is D2, and the mesh wire diameter of the home-based pentagonal mesh hole is D3. When the mesh wire diameter of the diamond-shaped pentagonal mesh hole is D4, there is a correlation of D1 <D2≈D3 <D4 or D1 <D2≈D3≈D4.
　この発明によれば、印刷パターンの外周部に配列される１～３列のメッシュ孔の面積を印刷パターンの内部に配列されるメッシュ孔の面積に比べて約５～３０％程度小さくしたので、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターンのサドル現象を著しく低減することができる。 According to the present invention, the area of the mesh holes of 1 to 3 rows arranged on the outer peripheral portion of the print pattern is reduced by about 5 to 30% as compared with the area of the mesh holes arranged inside the print pattern. It is possible to significantly reduce the saddle phenomenon of the print pattern due to the thinning of the mask and the miniaturization of the mesh holes of the print pattern.
この発明の実施例１における印刷用メタルマスクの一部を下方から見た底面図である。It is a bottom view which looked at a part of the metal mask for printing in Example 1 of this invention from the bottom. 図１に示す印刷用メタルマスクのＡ－Ａ線に沿った中央部を一部省略した断面図である。It is sectional drawing which partially omitted the central part along the line AA of the metal mask for printing shown in FIG. 図１に示す印刷用メタルマスクのＢ－Ｂ線に沿った中央部を一部省略した断面図である。It is sectional drawing which partially omitted the central part along the line BB of the metal mask for printing shown in FIG. この発明の実施例１における印刷用メタルマスクの一部を上方から見た平面図である。It is a top view of a part of the metal mask for printing in Example 1 of this invention. この発明の実施例１における印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。It is sectional drawing which shows the printing pattern when printing is performed using the metal mask for printing in Example 1 of this invention. 比較例として従来の印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。As a comparative example, it is sectional drawing which shows the printing pattern when printing is performed using the conventional metal mask for printing. この発明の実施例２における印刷用メタルマスクの一部を下方から見た底面図である。It is a bottom view which looked at a part of the metal mask for printing in Example 2 of this invention from the bottom.
実施例１．
　図１はこの発明の実施例１における印刷用メタルマスクの一部を下方から見た底面図、図２は図１のＡ－Ａ線に沿った断面図、図３は図１のＢ－Ｂ線に沿った断面図、図４は同じく印刷用メタルマスクの一部を上方から見た平面図、図５は印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図、図６は比較例として従来の印刷用メタルマスクを用いて印刷を行った場合の印刷パターンを示す断面図である。
　印刷用メタルマスク１は、互いに平行な上下二面を有する平板状のマスク本体部２と、このマスク本体部２の下面側の被印刷物と対向する面に形成された横長矩形状の凹部３と、マスク本体部２の上面側の横長矩形状の印刷パターン領域４内に形成された菱形を基本形とする多数のメッシュ孔５とを備えている。マスク本体部２は薄型化が図られており、全体の厚さは約１０～２５μｍ程度であり、横長矩形状の凹部３は深さ約１～５μｍの範囲で上面側に向かって凹んで形成されている。この横長矩形状の凹部３の外周側壁は、横長矩形状の印刷パターン領域４の周囲を取り囲むように形成されており、横長矩形状の印刷パターン領域４の形成領域は、横長矩形状の凹部３の外周側壁の内側に形成されている。なお、印刷用メタルマスク１は、図示ではマスク本体部２、横長矩形状の凹部３及び横長矩形状の印刷パターン領域４の一部のみを示しているが、実際には、マスク本体部２、横長矩形状の凹部３及び横長矩形状の印刷パターン領域４は上下、左右に連続して配置される。横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５のうち、大部分が印刷パターン領域４内の中央部に配置される大型の菱形メッシュ孔５ａは、この実施例では縦方向に３～４個、横方向に２０～２１個、計１４３個が配列されており、例えばメッシュ孔開口が約１９～２５μｍ、メッシュ線径Ｄ１が約１６～１０μｍであり、そのメッシュ孔面積をＳ１とする。また、横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５のうち、大型の菱形メッシュ孔５ａの左右両側端部に隣接して縦１列に配置される菱形を基本形とする大型の菱形メッシュ孔５ａよりも小型で小さ目の菱形メッシュ孔５ｂは、この実施例では縦方向に各４個、計８個が配列されており、例えばメッシュ孔開口が約１８～２３μｍ、メッシュ線径Ｄ２が約１７～１２μｍであり、そのメッシュ孔面積をＳ２とすると、メッシュ面積の相関関係はＳ１＞Ｓ２の関係にある。また、メッシュ線径の相関関係はＤ１＜Ｄの関係にある。なお、この小型で小さ目の菱形メッシュ孔５ｂは、少なくとも左右両側端部のいずれか一方に隣接して縦２列又は縦３列に配置しても良い。横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５のうち、横長矩形状の印刷パターン領域４の各隅角部を除く左右両側端部及び上下両側端部に配置されるホームベース状の五角形のメッシュ孔５ｃは、この実施例では縦方向に６個、横方向に４２個、計４８個が配列されており、例えばメッシュ孔開口が約１８～２３μｍ、メッシュ線径Ｄ３が約１７～１２μｍであり、そのメッシュ孔面積をＳ３とすると、メッシュ面積の相関関係はＳ１＞Ｓ２≒Ｓ３の関係にあり、小さ目のメッシュ孔である。また、メッシュ線径の相関関係はＤ１＜Ｄ２≒Ｄ３の関係である。また、横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５のうち、横長矩形状の印刷パターン領域４の各隅角部に配置されるダイヤモンド状の五角形のメッシュ孔５ｄは、この実施例では四隅に各１個、計４個が配列されており、例えばメッシュ孔開口が約１７～２１μｍ、メッシュ線径Ｄ４が約１８～１４μｍとしているが、例えばホームベース状の五角形のメッシュ孔５ｃと同等の大きさであるメッシュ孔開口が約１８～２３μｍ、メッシュ線径Ｄ４が約１７～１２μｍとしても良い。そして、そのメッシュ孔面積をＳ４とすると、メッシュ面積の相関関係はＳ１＞Ｓ２≒Ｓ３＞Ｓ４の関係、又はＳ１＞Ｄ２≒Ｓ３≒Ｓ４の関係にあり、ホームベース状の五角形のメッシュ孔５ｃよりも小型で小さ目のメッシュ孔、又はホームベース状の五角形のメッシュ孔５ｃと同等の大きさのメッシュ孔である。また、メッシュ線径の相関関係はＤ１＜Ｄ２≒Ｄ３＜Ｄ４、又はＤ１＜Ｄ２≒Ｄ３≒Ｄ４の関係にある。なお、ダイヤモンド状の五角形のメッシュ孔５ｄは、横長矩形状の印刷パターン領域４の全ての隅角部（４隅）に配置されなくても良く、例えば、対角線上に対向する２箇所（２隅）であっても良い。
　横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５のうち、横長矩形状の印刷パターン領域４の外周部の１～４列目に配置される小型で小さ目の菱形メッシュ孔５ｂの面積Ｓ２と、ホームベース状の五角形のメッシュ孔５ｃの面積Ｓ３と、ダイヤモンド状の五角形のメッシュ孔５ｄの面積Ｓ４を、中央に配置される大型のメッシュ孔５ａの面積Ｓ１に比べて約５～３０％程度小さくすることにより、図５に示すように、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターン（導電性ペースト等）の両端部が盛り上がってサドル状になる現象を避けることができ、サドル現象を著しく低減することが可能となり、マスク本体の板厚が約１０～２５μｍ程度のマスクでは顕著な効果を期待できる。なお、比較例として従来の印刷用メタルマスクを用いて印刷を行った場合は、図６に示すように、印刷パターンの両端部が盛り上がってサドル状になる現象が発生することは避けられないものであった。 Example 1.
1 is a bottom view of a part of the printing metal mask according to the first embodiment of the present invention as viewed from below, FIG. 2 is a cross-sectional view taken along the line AA of FIG. 1, and FIG. A cross-sectional view along the line, FIG. 4 is a plan view of a part of the printing metal mask seen from above, and FIG. 5 is a cross-sectional view showing a printing pattern when printing is performed using the printing metal mask. 6 is a cross-sectional view showing a printing pattern when printing is performed using a conventional metal mask for printing as a comparative example.
The printing metal mask 1 includes a flat plate-shaped mask main body 2 having two upper and lower surfaces parallel to each other, and a horizontally long rectangular concave portion 3 formed on a surface facing the printed matter on the lower surface side of the mask main body 2. It is provided with a large number of mesh holes 5 having a rhombus as a basic shape formed in a horizontally long rectangular print pattern area 4 on the upper surface side of the mask main body 2. The mask main body 2 has been made thinner, and the overall thickness is about 10 to 25 μm, and the horizontally long rectangular concave portion 3 is formed by being recessed toward the upper surface side in a depth range of about 1 to 5 μm. Has been done. The outer peripheral side wall of the horizontally long rectangular recess 3 is formed so as to surround the periphery of the horizontally long rectangular print pattern area 4, and the formed area of the horizontally long rectangular print pattern area 4 is the horizontally long rectangular concave portion 3. It is formed inside the outer peripheral side wall of the. In the figure, the printing metal mask 1 shows only a part of the mask main body 2, the horizontally long rectangular recess 3, and the horizontally long rectangular printing pattern area 4, but in reality, the mask main body 2, The horizontally long rectangular recess 3 and the horizontally long rectangular print pattern area 4 are continuously arranged vertically and horizontally. Of the large number of rhombic-based mesh holes 5 formed in the horizontally long rectangular print pattern area 4, the large rhombus mesh holes 5a, most of which are arranged in the central portion of the print pattern area 4, are the rhombus mesh holes 5a. In the embodiment, 3 to 4 pieces are arranged in the vertical direction and 20 to 21 pieces in the horizontal direction, for a total of 143 pieces, for example, the mesh hole opening is about 19 to 25 μm, and the mesh wire diameter D1 is about 16 to 10 μm. Let the mesh hole area be S1. Further, among a large number of mesh holes 5 having a rhombus as a basic shape formed in the horizontally long rectangular print pattern area 4, they are arranged in a vertical row adjacent to the left and right side ends of the large rhombus mesh holes 5a. In this embodiment, four rhombus mesh holes 5b, which are smaller and smaller than the large rhombus mesh holes 5a based on the rhombus, are arranged in the vertical direction, for a total of eight mesh holes, for example, about 18 mesh hole openings. Assuming that the mesh wire diameter D2 is about 17 to 12 μm and the mesh hole area is S2, the correlation between the mesh areas is S1> S2. Further, the correlation of the mesh wire diameter is D1 <D. The small and small rhombic mesh holes 5b may be arranged in two vertical rows or three vertical rows adjacent to at least one of the left and right side ends. Of the large number of mesh holes 5 having a rhombus as a basic shape formed in the horizontally long rectangular print pattern area 4, the left and right side ends and the upper and lower side end portions excluding the corners of the horizontally long rectangular print pattern area 4. In this embodiment, the home-based pentagonal mesh holes 5c arranged in the above are arranged in a total of 48 holes, 6 in the vertical direction and 42 in the horizontal direction. For example, the mesh hole opening is about 18 to 23 μm. Assuming that the mesh wire diameter D3 is about 17 to 12 μm and the mesh hole area is S3, the correlation between the mesh areas is S1> S2≈S3, which is a small mesh hole. Further, the correlation of the mesh wire diameter is the relationship of D1 <D2≈D3. Further, among a large number of mesh holes 5 having a rhombus as a basic shape formed in the horizontally long rectangular print pattern area 4, a diamond-shaped pentagon arranged at each corner of the horizontally long rectangular print pattern area 4 In this embodiment, four mesh holes 5d are arranged at each of the four corners, for example, the mesh hole opening is about 17 to 21 μm and the mesh wire diameter D4 is about 18 to 14 μm. For example, a home base. The mesh hole opening having the same size as the pentagonal mesh hole 5c may be about 18 to 23 μm, and the mesh wire diameter D4 may be about 17 to 12 μm. Then, assuming that the mesh hole area is S4, the correlation of the mesh area is S1>S2≈S3> S4 or S1> D2≈S3≈S4, and the home-based pentagonal mesh hole 5c. Is also a small and small mesh hole, or a mesh hole having the same size as the home-based pentagonal mesh hole 5c. Further, the correlation of the mesh wire diameter is D1 <D2≈D3 <D4, or D1 <D2≈D3≈D4. The diamond-shaped pentagonal mesh holes 5d do not have to be arranged at all the corners (four corners) of the horizontally long rectangular print pattern area 4, and for example, the diamond-shaped pentagonal mesh holes 5d do not have to be arranged at all the corners (four corners). ) May be.
Of the many mesh holes 5 based on the rhombus formed in the horizontally long rectangular print pattern area 4, the small and small ones arranged in the 1st to 4th rows of the outer peripheral portion of the horizontally long rectangular print pattern area 4. Area S2 of the diamond-shaped mesh hole 5b, area S3 of the home-based pentagonal mesh hole 5c, and area S4 of the diamond-shaped pentagonal mesh hole 5d, and the area S1 of the large mesh hole 5a arranged in the center. By making the size about 5 to 30% smaller than that of the above, as shown in FIG. 5, both ends of the printing pattern (conductive paste, etc.) are raised due to the thinning of the mask and the miniaturization of the mesh holes of the printing pattern. The phenomenon of forming a rhombus can be avoided, the saddle phenomenon can be remarkably reduced, and a remarkable effect can be expected with a mask having a plate thickness of about 10 to 25 μm. As a comparative example, when printing is performed using a conventional metal mask for printing, it is inevitable that both ends of the printing pattern are raised and become saddle-shaped, as shown in FIG. Met.
実施例２．
　図７はこの発明の実施例２における印刷用メタルマスクの一部を下方から見た底面図である。
　上記実施例１では、中央部に配置される大型の菱形メッシュ孔５ａの左右両側端部に隣接して縦１列に配置される菱形を基本形とする大型の菱形メッシュ孔５ａよりも小型で小さ目の菱形メッシュ孔５ｂを配列した例を示したが、この実施例２においては、中央部に配置される大型のメッシュ孔５ａの左右両側端部だけでなく、上下両側端部に隣接して横１列に配置される菱形を基本形とする大型の菱形メッシュ孔５ａよりも小型で小さ目の菱形メッシュ孔５ｂを追加したものである。なお、この小型で小さ目の菱形メッシュ孔５ｂは、少なくとも左右両側端部のいずれか一方及び少なくとも上下両側端部のいずれか一方に隣接して縦２列又は縦３列に配置しても良い。なお、メッシュ面積の相関関係は、実施例１と同様に、Ｓ１＞Ｓ２≒Ｓ３＞Ｓ４の関係、又はＳ１＞Ｄ２≒Ｓ３≒Ｓ４の関係にあり、メッシュ線径の相関関係は、実施例１と同様に、Ｄ１＜Ｄ２≒Ｄ３＜Ｄ４、又はＤ１＜Ｄ２≒Ｄ３≒Ｄ４の関係にある。 Example 2.
FIG. 7 is a bottom view of a part of the metal mask for printing according to the second embodiment of the present invention as viewed from below.
In the first embodiment, the size is smaller and smaller than the large rhombus mesh hole 5a having a rhombus as a basic shape, which is arranged in a vertical row adjacent to the left and right side ends of the large rhombus mesh hole 5a arranged in the central portion. An example in which the diamond-shaped mesh holes 5b are arranged is shown, but in the second embodiment, not only the left and right side ends of the large mesh hole 5a arranged in the central portion but also the horizontal sides adjacent to the upper and lower side ends. A rhombus mesh hole 5b, which is smaller and smaller than the large rhombus mesh hole 5a based on the rhombus arranged in one row, is added. The small and small rhombic mesh holes 5b may be arranged in two vertical rows or three vertical rows adjacent to at least one of the left and right side ends and at least one of the upper and lower side ends. The correlation of the mesh area is the relationship of S1>S2≈S3> S4 or the relationship of S1> D2≈S3≈S4 as in the first embodiment, and the correlation of the mesh wire diameter is the relationship of the first embodiment. Similarly, there is a relationship of D1 <D2≈D3 <D4 or D1 <D2≈D3≈D4.
実施例３．
　上記実施例１、２では、マスク本体部２の上面側の横長矩形状の印刷パターン領域４内に形成される菱形を基本形とする多数のメッシュ孔５を備えた印刷用メタルマスクについて説明したが、多数のメッシュ孔５の形状は、菱形、ホームベース状、ダイヤモンド状に限らず、例えば、三角形、四角形、その他の多角形や丸形等であっても良い。要は、横長矩形状の印刷パターン領域４の外周部の１～４列目に配置される小型又は小さ目のメッシュ孔５ｂ～５ｄの面積Ｓ２～Ｓ４を、中央部に配置される大型のメッシュ孔５ａの面積Ｓ１に比べて約５～３０％程度小さくすることにより、マスクの薄膜化と印刷パターンのメッシュ孔の微細化に伴う印刷パターン（導電性ペースト等）の両端部が盛り上がってサドル状になる現象を避けることができ、サドル現象を著しく低減することが可能となるものであれば多少の変更は構わない。 Example 3.
In Examples 1 and 2, a metal mask for printing having a large number of mesh holes 5 having a rhombus as a basic shape formed in a horizontally long rectangular print pattern area 4 on the upper surface side of the mask main body 2 has been described. The shape of the large number of mesh holes 5 is not limited to a rhombus, a home base, and a diamond, and may be, for example, a triangle, a quadrangle, or any other polygon or circle. In short, the areas S2 to S4 of the small or small mesh holes 5b to 5d arranged in the 1st to 4th rows of the outer peripheral portion of the horizontally long rectangular print pattern area 4 are arranged in the central portion of the large mesh holes. By making the area S1 of 5a about 5 to 30% smaller, both ends of the print pattern (conductive paste, etc.) due to the thinning of the mask and the miniaturization of the mesh holes of the print pattern are raised to form a saddle shape. If it is possible to avoid the phenomenon and significantly reduce the saddle phenomenon, some changes may be made.
１　印刷用メタルマスク
２　マスク本体部
３　横長矩形状の凹部
４　横長矩形状の印刷パターン領域
５　多数のメッシュ孔
５ａ　中央部に配置される大型の菱形メッシュ孔
５ｂ　左右両側端部又は上下両側端部に配置される小型で小さ目の菱形メッシュ孔
５ｃ　ホームベース状の五角形のメッシュ孔
５ｄ　ダイヤモンド状の五角形のメッシュ孔 1 Metal mask for printing 2 Mask body 3 Horizontal rectangular recess 4 Horizontal rectangular printing pattern area 5 Many mesh holes 5a Large diamond-shaped mesh holes arranged in the center 5b Left and right sides ends or upper and lower sides ends Small and small diamond-shaped mesh hole 5c Home-based pentagonal mesh hole 5d Diamond-shaped pentagonal mesh hole

Claims (5)

  1. 　ペーストを印刷するための印刷用メタルマスクであって、
    　互いに平行な上下二面を有する平板状のマスク本体部と、
    　前記マスク本体部の下面側の被印刷物と対向する面に形成され、前記マスク本体部の上面側に向かって凹んでいる凹部と、
    　前記マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、
    　前記多数のメッシュ孔は、前記印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、前記大型の菱形メッシュ孔の外周部に配置され、前記中央部の大型の菱形メッシュ孔の面積よりも小さいメッシュ孔面積を有する外周部の小型の菱形メッシュ孔と、前記印刷パターン領域の隅角部を除く最外周部に配置され、前記外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、前記印刷パターン領域の隅角部に配置され、前記外周部の小型の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔と同じ面積を有するか、前記外周部の小型の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなることを特徴とする印刷用メタルマスク。     A printing metal mask for printing paste,
    A flat plate-shaped mask body having two upper and lower surfaces parallel to each other,
    A concave portion formed on the lower surface side of the mask main body portion facing the printed matter and recessed toward the upper surface side of the mask main body portion, and a concave portion.
    A large number of mesh holes based on rhombuses formed in the print pattern area formed on the upper surface side of the mask main body portion are provided.
    The large number of mesh holes are arranged in a large number of large rhombic mesh holes arranged in the central portion of the print pattern area and in the outer peripheral portion of the large rhombic mesh holes, and are the areas of the large rhombic mesh holes in the central portion. A small rhombic mesh hole on the outer periphery having a smaller mesh hole area and a home arranged on the outermost periphery excluding the corner portion of the print pattern area and having the same area as the small rhombic mesh hole on the outer periphery. The base-shaped pentagonal mesh hole and the small rhombic mesh hole on the outer periphery, which is arranged at the corner of the print pattern area, or has the same area as the home-based pentagonal mesh hole, or the outer peripheral portion. A metal mask for printing, comprising a small diamond-shaped mesh hole or a diamond-shaped pentagonal mesh hole having a mesh hole area smaller than the area of the home-based pentagonal mesh hole.
  2. 　ペーストを印刷するための印刷用メタルマスクであって、
    　互いに平行な上下二面を有する平板状のマスク本体部と、
    　前記マスク本体部の下面側の被印刷物と対向する面に形成され、前記マスク本体部の上面側に向かって凹んでいる凹部と、
    　前記マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、
    　前記多数のメッシュ孔は、前記印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、前記大型の菱形メッシュ孔の外周部の１列目～３列目に配置され、前記大型の菱形メッシュ孔のメッシュ孔面積よりも小さいメッシュ孔面積を有する小型の菱形メッシュ孔と、前記印刷パターン領域の隅角部を除く最外周部に配置され、前記外周部の小型の菱形メッシュ孔と同じ面積を有するホームベース状の五角形のメッシュ孔と、前記印刷パターン領域の隅角部に配置され、前記外周部の小型の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔と同じ面積を有するか、前記外周部の小型の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積よりも小さいメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔とからなることを特徴とする印刷用メタルマスク。     A printing metal mask for printing paste,
    A flat plate-shaped mask body having two upper and lower surfaces parallel to each other,
    A concave portion formed on the lower surface side of the mask main body portion facing the printed matter and recessed toward the upper surface side of the mask main body portion, and a concave portion.
    A large number of mesh holes based on rhombuses formed in the print pattern area formed on the upper surface side of the mask main body portion are provided.
    The large number of mesh holes are arranged in a large number of large rhombic mesh holes arranged in the central portion of the print pattern area and in the first to third rows of the outer peripheral portion of the large rhombic mesh holes, and the large number of mesh holes are arranged. A small rhombus mesh hole having a mesh hole area smaller than the mesh hole area of the rhombus mesh hole, and a small rhombus mesh hole arranged on the outermost periphery excluding the corner portion of the print pattern area, which is the same as the small rhombus mesh hole on the outer peripheral portion. Does it have the same area as the home-based pentagonal mesh hole having an area and the small rhombic mesh hole on the outer periphery or the home-based pentagonal mesh hole arranged at the corner of the print pattern area? A metal mask for printing, comprising a small rhombic mesh hole on the outer peripheral portion or a diamond-shaped pentagonal mesh hole having a mesh hole area smaller than the area of the home-based pentagonal mesh hole.
  3. 　大型の菱形メッシュ孔のメッシュ孔面積よりも小さいメッシュ孔面積を有する小型の菱形メッシュ孔は、前記大型の菱形メッシュ孔の少なくとも左右両側端部のいずれか一方又は少なくとも上下両側端部のいずれか一方に隣接して縦１列目又は横１列目～縦３列目又は横３列目に配置されていることを特徴とする請求項２記載の印刷用メタルマスク。 A small rhombic mesh hole having a mesh hole area smaller than the mesh hole area of the large rhombic mesh hole is one of at least one of the left and right side ends of the large rhombus mesh hole or at least one of the upper and lower side ends. The printing metal mask according to claim 2, wherein the mask is arranged adjacent to the first vertical row or the first horizontal row to the third vertical row or the third horizontal row.
  4. 　ペーストを印刷するための印刷用メタルマスクであって、
    　互いに平行な上下二面を有する平板状のマスク本体部と、
    　前記マスク本体部の下面側の被印刷物と対向する面に形成され、前記マスク本体部の上面側に向かって凹んでいる凹部と、
    　前記マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、
    　前記多数のメッシュ孔は、前記印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、前記大型の菱形メッシュ孔の少なくとも左右両端部のいずれか一方又は少なくとも上下両端部のいずれか一方に隣接して縦１～３列又は横１～３列に複数配置される前記大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔と、前記印刷パターン領域の隅角部を除く少なくとも左右両側端部のいずれか一方及び／又は少なくとも上下両側端部のいずれか一方に配置されるホームベース状の五角形のメッシュ孔と、前記印刷パターン領域の隅角部に配置される前記小型で小さ目の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積よりも小さ目のメッシュ孔面積を有するか、前記小型で小さ目の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積と同じメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔と、を備え、
    　前記大型の菱形メッシュ孔のメッシュ孔面積をＳ１、前記大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔のメッシュ孔面積をＳ２、前記ホームベース状の五角形のメッシュ孔のメッシュ孔面積をＳ３、前記ダイヤモンド状の五角形のメッシュ孔のメッシュ孔面積をＳ４としたとき、Ｓ１＞Ｓ２≒Ｓ３＞Ｓ４又はＳ１＞Ｓ２≒Ｓ３≒Ｓ４の相関関係にあることを特徴とする印刷用メタルマスク。     A printing metal mask for printing paste,
    A flat plate-shaped mask body having two upper and lower surfaces parallel to each other,
    A concave portion formed on the lower surface side of the mask main body portion facing the printed matter and recessed toward the upper surface side of the mask main body portion, and a concave portion.
    A large number of mesh holes based on rhombuses formed in the print pattern area formed on the upper surface side of the mask main body portion are provided.
    The large number of mesh holes are a large number of diamond-shaped mesh holes arranged in the central portion of the print pattern area, and at least one of at least left and right ends or at least one of the upper and lower ends of the large diamond-shaped mesh hole. A plurality of rhombic mesh holes smaller and smaller than the large rhombic mesh holes arranged in 1 to 3 rows vertically or 1 to 3 rows horizontally adjacent to the rhombus mesh holes, and at least both left and right sides excluding the corners of the print pattern area. A home-based pentagonal mesh hole located at one of the ends and / or at least one of the upper and lower sides, and the small, smaller rhombus located at the corner of the print pattern area. Has a mesh hole area smaller than the area of the mesh hole or the home base-shaped pentagonal mesh hole, or has the same mesh hole area as the area of the small and smaller rhombic mesh hole or the home base-shaped pentagonal mesh hole. With diamond-shaped pentagonal mesh holes,
    The mesh hole area of the large rhombic mesh hole is S1, the mesh hole area of the rhombic mesh hole smaller and smaller than the large rhombus mesh hole is S2, and the mesh hole area of the home-based pentagonal mesh hole is S3. A printing metal mask characterized in that, when the mesh hole area of the diamond-shaped pentagonal mesh hole is S4, there is a correlation of S1>S2≈S3> S4 or S1> S2≈S3≈S4.
  5. 　ペーストを印刷するための印刷用メタルマスクであって、
    　互いに平行な上下二面を有する平板状のマスク本体部と、
    　前記マスク本体部の下面側の被印刷物と対向する面に形成され、前記マスク本体部の上面側に向かって凹んでいる凹部と、
    　前記マスク本体部の上面側に形成される印刷パターン領域内に形成された菱形を基本とする多数のメッシュ孔と、を備え、
    　前記多数のメッシュ孔は、前記印刷パターン領域の中央部に多数配置される大型の菱形メッシュ孔と、前記大型の菱形メッシュ孔の少なくとも左右両端部のいずれか一方又は少なくとも上下両端部のいずれか一方に隣接して縦１～３列又は横１～３列に複数配置される前記大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔と、前記印刷パターン領域の隅角部を除く少なくとも左右両側端部のいずれか一方及び／又は少なくとも上下両側端部のいずれか一方に配置されるホームベース状の五角形のメッシュ孔と、前記印刷パターン領域の隅角部に配置される前記小型で小さ目の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積よりも小さ目のメッシュ孔面積を有するか、前記小型で小さ目の菱形メッシュ孔又は前記ホームベース状の五角形のメッシュ孔の面積と同じメッシュ孔面積を有するダイヤモンド状の五角形のメッシュ孔と、を備え、
    　前記大型の菱形メッシュ孔のメッシュ線径をＤ１、前記大型の菱形メッシュ孔よりも小型で小さ目の菱形メッシュ孔のメッシュ線径をＤ２、前記ホームベース状の五角形のメッシュ孔のメッシュ線径のＤ３、前記ダイヤモンド状の五角形のメッシュ孔のメッシュ線径をＤ４としたとき、Ｄ１＜Ｄ２≒Ｄ３＜Ｄ４又はＤ１＜Ｄ２≒Ｄ３≒Ｄ４の相関関係にあることを特徴とする印刷用メタルマスク。     A printing metal mask for printing paste,
    A flat plate-shaped mask body having two upper and lower surfaces parallel to each other,
    A concave portion formed on the lower surface side of the mask main body portion facing the printed matter and recessed toward the upper surface side of the mask main body portion, and a concave portion.
    A large number of mesh holes based on rhombuses formed in the print pattern area formed on the upper surface side of the mask main body portion are provided.
    The large number of mesh holes are a large number of diamond-shaped mesh holes arranged in the central portion of the print pattern area, and at least one of at least left and right ends or at least one of the upper and lower ends of the large diamond-shaped mesh hole. A plurality of rhombic mesh holes smaller and smaller than the large rhombic mesh holes arranged in 1 to 3 rows vertically or 1 to 3 rows horizontally adjacent to the rhombus mesh holes, and at least both left and right sides excluding the corners of the print pattern area. A home-based pentagonal mesh hole located at one of the ends and / or at least one of the upper and lower sides, and the small, smaller rhombus located at the corner of the print pattern area. Has a mesh hole area smaller than the area of the mesh hole or the home base-shaped pentagonal mesh hole, or has the same mesh hole area as the area of the small and smaller rhombic mesh hole or the home base-shaped pentagonal mesh hole. With diamond-shaped pentagonal mesh holes,
    The mesh wire diameter of the large rhombic mesh hole is D1, the mesh wire diameter of the rhombic mesh hole smaller and smaller than the large rhombic mesh hole is D2, and the mesh wire diameter of the pentagonal mesh hole of the home base is D3. A printing metal mask characterized in that, when the mesh wire diameter of the diamond-shaped pentagonal mesh hole is D4, there is a correlation of D1 <D2≈D3 <D4 or D1 <D2≈D3≈D4.
PCT/JP2021/012052 2020-10-30 2021-03-23 Metal mask for printing WO2022091449A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004017461A (en) * 2002-06-14 2004-01-22 Murata Mfg Co Ltd Screen printing plate
JP2006334957A (en) * 2005-06-02 2006-12-14 Murata Mfg Co Ltd Screen printing plate
JP2006347099A (en) * 2005-06-20 2006-12-28 Kenseidou Kagaku Kogyo Kk Metal mask with mesh layer
JP2010023254A (en) * 2008-07-16 2010-02-04 Bonmaaku:Kk Mesh for printing pattern aperture of mask, method of creating mesh pattern data, mask, two-layer structured mask, method of manufacturing mask and method of manufacturing two-layer structured mask
JP2011201321A (en) * 2011-07-12 2011-10-13 Bonmaaku:Kk Mask

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001039048A (en) 1999-07-30 2001-02-13 Murata Mfg Co Ltd Production of printing pattern forming material and laminated ceramic electronic part
JP4400231B2 (en) 2004-01-29 2010-01-20 株式会社村田製作所 Print pattern forming material and method of manufacturing electronic component using the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004017461A (en) * 2002-06-14 2004-01-22 Murata Mfg Co Ltd Screen printing plate
JP2006334957A (en) * 2005-06-02 2006-12-14 Murata Mfg Co Ltd Screen printing plate
JP2006347099A (en) * 2005-06-20 2006-12-28 Kenseidou Kagaku Kogyo Kk Metal mask with mesh layer
JP2010023254A (en) * 2008-07-16 2010-02-04 Bonmaaku:Kk Mesh for printing pattern aperture of mask, method of creating mesh pattern data, mask, two-layer structured mask, method of manufacturing mask and method of manufacturing two-layer structured mask
JP2011201321A (en) * 2011-07-12 2011-10-13 Bonmaaku:Kk Mask

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