JP2006334957A - Screen printing plate - Google Patents

Screen printing plate Download PDF

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JP2006334957A
JP2006334957A JP2005163353A JP2005163353A JP2006334957A JP 2006334957 A JP2006334957 A JP 2006334957A JP 2005163353 A JP2005163353 A JP 2005163353A JP 2005163353 A JP2005163353 A JP 2005163353A JP 2006334957 A JP2006334957 A JP 2006334957A
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hole
forming region
mesh
screen printing
area
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JP4670487B2 (en
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Masaru Manjiyu
優 万寿
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a screen printing plate with such advantages that a master can be easily manufactured and a successful printing can be ensured. <P>SOLUTION: Through holes 14, 15 and 16 are formed in a figure forming region of an almost rectangular shape, are formed. The first through hole 14 is almost rhombic in cross-section with all the sides extending obliquely to each side of the figure forming region and a direction connecting the mutually opposite apices being almost in parallel with or almost at right angles to the sides of the figure forming region. In addition, the entirety of the first through hole 14 is arranged inside the figure forming region. The second through holes 15 and 16 represent two division parts by one side or two sides of the figure forming region of the likewise of an almost rhombic shape, with a cross-section shaped like the part of the figure forming region, and are arranged near each side of the figure forming region. Each through hole 14, 15 and 16 are arranged at an equal interval so that their sides are roughly aligned in a straight line, and thus, mesh line parts 17 and 18 of almost a specified width which extend obliquely at an approximately equal interval to the side of the figure forming region and intersecting each other, are formed between the through holes 14, 15 and 16. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明はスクリーン印刷版に関し、詳しくは、電子部品の製造において基板に所定の図形の印刷物を形成するために用いるスクリーン印刷版に関する。   The present invention relates to a screen printing plate, and more particularly to a screen printing plate used for forming a printed matter of a predetermined figure on a substrate in the manufacture of an electronic component.

電子部品の分野において、例えばチップ部品の内部電極として所定形状の微細で薄膜な電極図形を得るために、スクリーン印刷が用いられる。スクリーン印刷で用いられるスクリーン印刷版には、所定形状の図形パターンに対応する図形形成領域に、ペーストが透過する微細な貫通孔が形成されている。スクリーン印刷版は、印刷面積制御のため高い寸法精度が要求され、印刷塗布厚制御のため高い厚み精度が要求されている。   In the field of electronic components, for example, screen printing is used to obtain a fine and thin electrode figure having a predetermined shape as an internal electrode of a chip component. In a screen printing plate used in screen printing, fine through-holes through which paste passes are formed in a graphic forming area corresponding to a graphic pattern of a predetermined shape. Screen printing plates require high dimensional accuracy for printing area control and high thickness accuracy for printing coating thickness control.

電子部品の分野において、例えば図1に示したスクリーン印刷版1が使用される。このスクリーン印刷版1は、一方の主面1a側に平面形状が円形の開口部2を有する微細な貫通孔が形成された第1のメッシュ状の金属膜と、印刷パターン図形より若干大きい形状の印刷孔3が形成された第2の金属膜とが、金属メッキで一体に形成されている。例えば積層セラミック部品の内部積層部分は、スクリーン印刷版1を用いてセラミックグリーンシート上に内部電極となる導電性ペーストを印刷し、このセラミックグリーンシートを複数枚積層して焼成した後に、この積層体を個々に切断することによって製造される。このとき、セラミックグリーンシート上には複数個分の内部電極が一度に印刷され、スクリーン印刷版1には同一形状の印刷孔3が多数形成されている(例えば、特許文献1参照)。   In the field of electronic components, for example, the screen printing plate 1 shown in FIG. 1 is used. This screen printing plate 1 has a first mesh-like metal film in which fine through holes having a circular opening 2 having a circular planar shape are formed on one main surface 1a side, and a shape slightly larger than a printed pattern figure. The second metal film in which the printing holes 3 are formed is integrally formed by metal plating. For example, the inner laminated portion of the multilayer ceramic component is obtained by printing a conductive paste serving as an internal electrode on the ceramic green sheet using the screen printing plate 1, laminating a plurality of the ceramic green sheets, and firing them. Are manufactured by cutting them individually. At this time, a plurality of internal electrodes are printed at once on the ceramic green sheet, and a large number of printing holes 3 having the same shape are formed in the screen printing plate 1 (see, for example, Patent Document 1).

このように金属メッキで一体に形成されたスクリーン印刷版は、エレクトロフォーミング(電鋳)技法を用いて作製することができ、耐刷性に優れ、また、メッキ量制御により版厚みを自由に設定することができる。
特開2001−39048号公報
The screen printing plate integrally formed with metal plating in this way can be manufactured using electroforming (electroforming) technique, has excellent printing durability, and the plate thickness can be freely set by controlling the amount of plating. can do.
JP 2001-39048 A

従来のスクリーン印刷版は、印刷する図形形状に合わせた図形形成領域に、同一形状、または同一面積の貫通孔が配置されている。そのため、従来のスクリーン印刷版では、近年の小型化が進展している積層セラミック部品の内部電極の薄い膜を印刷する場合、図形形成領域の辺に沿って配置されている貫通孔からのペースト吐出量が多くなり、印刷ニジミや印刷図形の直線性の悪化等を招く。これを改善するため、貫通孔をより小さくすると、貫通孔が微細になり、かつ個数が増えるので、スクリーン印刷版は、貫通孔形成時の歩留まりが悪化したり、印刷時のペースト目詰まりが起こりやすくなる。つまり、印刷図形の直線性の向上と、目詰まり、印刷カスレの防止とは両立しない。   In the conventional screen printing plate, through-holes having the same shape or the same area are arranged in a figure forming region that matches the figure to be printed. Therefore, in conventional screen printing plates, when printing a thin film of internal electrodes of multilayer ceramic parts that have recently been miniaturized, paste is ejected from through holes arranged along the sides of the figure forming area. The amount increases, resulting in printing blurring and deterioration of printed linearity. In order to improve this, if the through-holes are made smaller, the through-holes become finer and the number increases, so the yield of the screen printing plate deteriorates and paste paste clogging occurs during printing. It becomes easy. That is, the improvement of the linearity of the printed figure is not compatible with the prevention of clogging and printing blurring.

そこで、スクリーン印刷版の図形形成領域の中央には、相対的に大きな面積の貫通孔を配置して、貫通孔の目詰まり、印刷カスレを抑制する一方、図形部の周辺には、相対的に小さな面積の貫通孔を配置して、ペースト吐出量を抑制し、印刷ニジミを防ぎ、印刷の直線性を確保することが考えられる。   Therefore, a relatively large area of the through hole is arranged in the center of the graphic forming area of the screen printing plate to suppress clogging of the through hole and print blurring, while the periphery of the graphic portion is relatively It is conceivable to arrange a through-hole having a small area to suppress the paste discharge amount, prevent printing blurring, and ensure printing linearity.

しかし、このように複雑な貫通孔の配置方法では、スクリーン印刷版を形成するために必要となる原版を作製する際に、データ処理や原版描画の負担が大きく、生産性がよくないため、現実的ではない。   However, with such a complicated method for arranging the through holes, the burden of data processing and original drawing is large and the productivity is not good when producing the original necessary for forming the screen printing plate. Not right.

本発明は、かかる実情に鑑み、原版の作製が容易で、良好な印刷を行うことができる、スクリーン印刷版を提供しようとするものである。   In view of such circumstances, the present invention is intended to provide a screen printing plate that is easy to produce an original plate and can perform good printing.

本発明は、上記課題を解決するために、以下のように構成したスクリーン印刷版を提供する。   In order to solve the above problems, the present invention provides a screen printing plate configured as follows.

スクリーン印刷版は、互いに平行な主面を有する平板状の本体部を含み、前記主面の垂直方向から透視したとき、略矩形の図形形成領域内に前記主面間を貫通する複数の貫通孔が形成され、被印刷物に対向する一方の前記主面には、前記図形形成領域及びその周囲に凹部が形成されたタイプのものである。前記貫通孔は、第1の貫通孔と第2の貫通孔とを含む。前記第1の貫通孔は、前記主面の垂直方向から透視したとき、全ての辺が前記図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が前記図形形成領域の前記辺と略平行又は略直角である略菱形の断面形状を有し、その全体が前記図形形成領域内に配置される。前記第2の貫通孔は、前記主面に垂直方向から透視したとき、全ての辺が前記図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が前記図形形成領域の前記辺と略平行又は略直角である略菱形が前記図形形成領域の1又は2の前記辺で分割された2つの部分のうち、前記図形形成領域内の前記部分の断面形状を有し、前記図形形成領域の前記各辺近傍に配置される。前記第1の貫通孔及び前記第2の貫通孔は、大略、それぞれの辺が一直線上に揃うように等間隔に配置される。前記主面の垂直方向から透視したとき、前記図形形成領域内には、前記貫通孔の間に、前記図形形成領域の辺に対して斜めに略等間隔で延在しかつ交差する略一定幅のメッシュ線部が形成される。   The screen printing plate includes a plate-like main body portion having main surfaces parallel to each other, and a plurality of through holes penetrating between the main surfaces in a substantially rectangular figure forming region when seen through from the vertical direction of the main surfaces. Is formed, and one of the main surfaces facing the printing material is of a type in which a concave portion is formed in the figure forming region and its periphery. The through hole includes a first through hole and a second through hole. When the first through hole is seen through from the vertical direction of the main surface, all the sides extend obliquely with respect to each side of the figure forming area, and the direction connecting the opposing vertices is the figure forming The region has a substantially rhombic cross-sectional shape that is substantially parallel to or substantially perpendicular to the side of the region, and is entirely disposed within the figure forming region. When the second through-hole is seen through from the direction perpendicular to the main surface, all the sides extend obliquely with respect to each side of the figure forming area, and the direction connecting the opposing vertices forms the figure. Of the two parts divided by the one or two sides of the graphic forming region, the substantially rhombus that is substantially parallel to or substantially perpendicular to the side of the region has the cross-sectional shape of the part in the graphic forming region , Arranged in the vicinity of each side of the figure forming area. The first through hole and the second through hole are generally arranged at equal intervals so that the respective sides are aligned on a straight line. When seen through from the vertical direction of the main surface, the figure forming area has a substantially constant width that extends obliquely at substantially equal intervals and intersects the sides of the figure forming area between the through holes. The mesh line portion is formed.

上記構成において、略矩形の図形形成領域の中央には、斜交したメッシュ線部で囲まれる略菱形の相対的に大きい第1の貫通孔が形成され、略矩形の図形形成領域の周囲には、略菱形が図形形成領域の辺で分割された相対的に小さい第2の貫通孔が形成されている。   In the above configuration, a relatively large first through-hole of a substantially rhombus surrounded by an oblique mesh line portion is formed at the center of the substantially rectangular figure forming area, and around the substantially rectangular figure forming area. A relatively small second through-hole is formed in which the approximately rhombus is divided by the sides of the figure forming region.

上記構成によれば、図形領域の中央に配置される第1の貫通孔を略菱形にすることより、目詰まり、印刷かすれを低減することができる。図形領域の周囲に配置され、略菱形が分割された断面形状を有する第2の貫通孔によって、図形形成領域の辺に沿って、印刷エッジを鮮明にすることができる。   According to the said structure, clogging and printing blur can be reduced by making the 1st through-hole arrange | positioned in the center of a figure area | region into a substantially rhombus. A printing edge can be sharpened along the side of the figure forming area by the second through-holes that are arranged around the figure area and have a cross-sectional shape into which a substantially rhombus is divided.

上記構成によれば、スクリーン印刷版の貫通孔を形成するために用いる原版を作成するとき、スクリーン印刷版の貫通孔の形状や配置は直線で定義されるので、データ処理が簡単になり、データ処理量を低減し、描画時間を短縮することができる。また、図形形成領域の辺に斜交するメッシュ線部によって貫通孔を定義することにより、スクリーン印刷版の設計を簡略化することができる。   According to the above configuration, when the original plate used to form the through holes of the screen printing plate is created, the shape and arrangement of the through holes of the screen printing plate are defined by straight lines, so that data processing becomes simple and data The processing amount can be reduced and the drawing time can be shortened. Moreover, the design of the screen printing plate can be simplified by defining the through-holes with mesh line portions obliquely intersecting the sides of the figure forming area.

好ましくは、前記主面に垂直方向から透視したとき、スキージ方向の直角方向と前記メッシュ線部とがなす角度が30度以上かつ55度以下である。前記主面に垂直方向から透視したとき、前記第2の貫通孔の面積が前記第1の貫通孔の面積の30%以上かつ60%以下である。   Preferably, an angle formed between a direction perpendicular to the squeegee direction and the mesh line portion is 30 degrees or more and 55 degrees or less when seen through the main surface from a perpendicular direction. When viewed through the main surface from a vertical direction, the area of the second through hole is 30% or more and 60% or less of the area of the first through hole.

上記構成において、スキージ方向の直角方向とメッシュ線部とがなす角度を30度以上かつ55度以下とすることにより、貫通孔での目詰まりや印刷かすれをなくすることができ、第2の貫通孔の断面積を第1の貫通孔の断面積の30%以上かつ60%以下とすることにより、印刷パターンの直線性を確保することができる。上記構成は、全ての印刷図形サイズに、また粘度の異なる各ペースト種に、好適に適用可能である。   In the above configuration, when the angle formed between the direction perpendicular to the squeegee direction and the mesh line portion is 30 degrees or more and 55 degrees or less, clogging or printing fading in the through hole can be eliminated, and the second penetration By setting the cross-sectional area of the hole to 30% or more and 60% or less of the cross-sectional area of the first through hole, the linearity of the print pattern can be ensured. The above configuration can be suitably applied to all printed figure sizes and to paste types having different viscosities.

本発明のスクリーン印刷版によれば、原版の作製が容易で、良好な印刷を行うことができる。   According to the screen printing plate of the present invention, it is easy to produce an original plate and good printing can be performed.

以下、本発明の実施の形態として実施例について、図2〜図6を参照しながら説明する。   Hereinafter, examples of the present invention will be described with reference to FIGS.

図2(a)は、スクリーン印刷版10の一部を示す要部平面図である。図2(b)は、図2(a)の線B−Bに沿って切断した要部断面図である。   FIG. 2A is a main part plan view showing a part of the screen printing plate 10. FIG. 2B is a cross-sectional view of the main part taken along the line BB in FIG.

図2に示すように、スクリーン印刷版10は、互いに平行な主面11a,11bを有する平板状の本体部11に、凹部12と、メッシュ孔14,15,16が形成されている。スクリーン印刷版10の本体部11は、不図示の枠に保持され、例えば積層チップコンデンサ等のセラミックグリーンシートに内部電極を印刷するために用いられる。   As shown in FIG. 2, the screen printing plate 10 has a recess 12 and mesh holes 14, 15, 16 formed in a flat plate-like main body 11 having main surfaces 11 a, 11 b parallel to each other. The main body 11 of the screen printing plate 10 is held by a frame (not shown), and is used for printing internal electrodes on a ceramic green sheet such as a multilayer chip capacitor.

凹部12は、スクリーン印刷版10の本体部11の一方の主面11aに形成され、主面11a,11bに垂直な方向(法線方向)から見たとき、寸法X,Yの略矩形の図形形成領域及びその周囲に形成されている。すなわち、凹部12の側壁12x,12yが、図形形成領域の周囲を取り囲むように形成されている。   The concave portion 12 is formed on one main surface 11a of the main body 11 of the screen printing plate 10, and is a substantially rectangular figure having dimensions X and Y when viewed from a direction (normal direction) perpendicular to the main surfaces 11a and 11b. Formed in and around the formation region. That is, the side walls 12x and 12y of the recess 12 are formed so as to surround the figure forming region.

メッシュ孔14,15,16は、凹部12の底面12sと本体部11の他方の主面11bとの間を貫通する。図2(a)に示すように、主面11a,11bに垂直な方向から見たとき、寸法がX,Yである略矩形の図形形成領域の中央に同一形状の複数のメッシュ孔14が配置されて、略矩形の図形形成領域の角にはメッシュ孔15が配置され、略矩形の図形形成領域の辺に沿って、角を除く部分にメッシュ孔16が配置されている。   The mesh holes 14, 15, 16 penetrate between the bottom surface 12 s of the recess 12 and the other main surface 11 b of the main body 11. As shown in FIG. 2A, a plurality of mesh holes 14 having the same shape are arranged in the center of a substantially rectangular figure forming region having dimensions X and Y when viewed from the direction perpendicular to the main surfaces 11a and 11b. Then, mesh holes 15 are arranged at the corners of the substantially rectangular figure forming area, and mesh holes 16 are arranged at the portions other than the corners along the sides of the substantially rectangular figure forming area.

略矩形の図形形成領域の中央に配置されるメッシュ孔14は、主面11a,11bに垂直な方向から見たとき、略菱形の断面形状を有し、全ての辺が図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が図形形成領域の辺と略平行又は略直角である。   The mesh hole 14 disposed in the center of the substantially rectangular figure forming region has a substantially rhombic cross-sectional shape when viewed from a direction perpendicular to the main surfaces 11a and 11b, and all sides are each side of the figure forming region. The direction connecting the vertices extending obliquely with respect to each other is substantially parallel or substantially perpendicular to the side of the figure forming region.

略矩形の図形形成領域の周囲に配置されるメッシュ孔15,16は、主面11a,11bに垂直な方向から見たとき、メッシュ孔14に略一致する略菱形(すなわち、全ての辺が図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が図形形成領域の辺と略平行又は略直角である略菱形)が、図形形成領域の1又は2の辺で分割された2つの部分のうち、図形形成領域に含まる部分であり、略三角形又は略五角形の断面形状を有する。すなわち、主面11a,11bに垂直な方向から見たとき、メッシュ孔15,16は、略菱形の分割線が図形形成領域の辺と重なるように配置されている。   The mesh holes 15 and 16 arranged around the substantially rectangular figure forming region are substantially diamond-shaped (that is, all sides are figures) substantially matching the mesh hole 14 when viewed from the direction perpendicular to the main surfaces 11a and 11b. 1 or 2 sides of the figure forming area are the rhombuses extending obliquely with respect to each side of the forming area and the direction connecting the opposing vertices being substantially parallel or substantially perpendicular to the side of the figure forming area) Of the two divided parts, it is a part included in the figure forming region and has a substantially triangular or substantially pentagonal cross-sectional shape. That is, when viewed from the direction perpendicular to the main surfaces 11a and 11b, the mesh holes 15 and 16 are arranged so that the substantially rhombic dividing lines overlap the sides of the figure forming region.

各メッシュ孔14,15,16は、大略、それぞれの略菱形の辺が一直線上に揃うように等間隔に配置されている。これによって、主面11a,11bに垂直な方向から見たとき、図形形成領域内には、メッシュ孔14,15,16の間に、図形形成領域の辺に対して斜めに略等間隔で延在しかつ交差する略一定幅の帯状のメッシュ線部17,18が形成される。   The mesh holes 14, 15, and 16 are generally arranged at equal intervals so that the sides of the approximately rhombus are aligned on a straight line. As a result, when viewed from the direction perpendicular to the main surfaces 11a and 11b, the figure forming region extends between the mesh holes 14, 15, and 16 at an approximately equal interval obliquely with respect to the sides of the figure forming region. Existing and intersecting belt-shaped mesh line portions 17 and 18 having a substantially constant width are formed.

図3は、スクリーン印刷版10を使用し、スキージ40によって印刷を行っているときの状態を説明するための要部拡大斜視図である。   FIG. 3 is an enlarged perspective view of a main part for explaining a state when the screen printing plate 10 is used and printing is performed by the squeegee 40.

スクリーン印刷版10は、本体部11の凹部12が形成された一方の主面11aが被印刷物46の表面46a上に載置される。この状態で、スキージ40は、スクリーン印刷版10の本体部11の他方の主面11bに接しながら、矢印42の方向に移動する。このとき、スキージ40は、スクリーン印刷版10の本体部11の他方の主面11b上に配置された不図示のペーストを押しながら移動させる。スキージ40で押されたペーストは、矢印43で示すように、メッシュ孔14,16から被印刷物46の表面46a上に押し出され、被印刷物46の表面46a上には、メッシュ孔14,16が形成された図形形成領域に対応する印刷パターン図形44が形成される。印刷パターン図形44は、ペーストの広がりにより、図形形成領域よりもわずかに大きくなる。   In the screen printing plate 10, one main surface 11 a on which the concave portion 12 of the main body 11 is formed is placed on the surface 46 a of the substrate 46. In this state, the squeegee 40 moves in the direction of the arrow 42 while being in contact with the other main surface 11 b of the main body 11 of the screen printing plate 10. At this time, the squeegee 40 moves while pressing a paste (not shown) disposed on the other main surface 11b of the main body 11 of the screen printing plate 10. The paste pushed by the squeegee 40 is pushed out from the mesh holes 14 and 16 onto the surface 46 a of the substrate 46 as indicated by the arrow 43, and the mesh holes 14 and 16 are formed on the surface 46 a of the substrate 46. A printed pattern figure 44 corresponding to the figure-forming area thus formed is formed. The printed pattern figure 44 is slightly larger than the figure forming area due to the spread of the paste.

このとき、スクリーン印刷版10の本体部11の一方の主面11aに形成された凹部12は、印刷パターン図形44よりも大きく、印刷パターン図形44と凹部12の側壁12x(図3では図示せず),12yとの間には、間隔が設けられるようになっている。   At this time, the recess 12 formed on one main surface 11a of the main body 11 of the screen printing plate 10 is larger than the print pattern graphic 44, and the print pattern graphic 44 and the side wall 12x of the recess 12 (not shown in FIG. 3). ), 12y, an interval is provided.

図形形成領域の中央に配置された略菱形のメッシュ孔14は、印刷パターン図形44の内側部分を形成するペーストを供給する。メッシュ孔14は、ペースト吐出に充分な開口面積が確保されていることから、印刷パターン図形44の内側部分へのペースト充填に必要な適正量のペーストの供給が可能な状態となっている。そのため、印刷ニジミ、カスレのない所定の印刷パターン形状44を得ることができる。   The substantially rhombic mesh hole 14 disposed in the center of the figure forming area supplies a paste that forms the inner part of the printed pattern figure 44. Since the mesh hole 14 has a sufficient opening area for discharging the paste, an appropriate amount of paste necessary for filling the paste into the inner portion of the printed pattern figure 44 can be supplied. Therefore, it is possible to obtain a predetermined print pattern shape 44 that is free from printing blemishes and blurring.

一方、図形形成領域の周囲に配置された略菱形を分割した断面形状のメッシュ孔16は、印刷パターン図形44の縁近傍部分を形成するためのペーストを供給する。メッシュ孔16は、中央のメッシュ孔14に比べて小さく、印刷パターン図形44の縁近傍部分を形成するペーストの吐出量が制限された状態となる。そのため、印刷ニジミになるような必要以上のペーストが吐出しないことから、印刷パターン図形44は、極めて直線性に優れた印刷形状にすることができる。   On the other hand, the mesh holes 16 having a cross-sectional shape obtained by dividing a substantially rhombus arranged around the figure forming region supply paste for forming a portion near the edge of the printed pattern figure 44. The mesh hole 16 is smaller than the center mesh hole 14 and the discharge amount of the paste that forms the vicinity of the edge of the printed pattern figure 44 is limited. Therefore, since the paste more than necessary that causes printing blur is not ejected, the printed pattern figure 44 can be formed into a printed shape with extremely excellent linearity.

次に、スクリーン印刷版10の本体部11の製造方法の一例について、図4を参照しながら説明する。   Next, an example of a method for manufacturing the main body 11 of the screen printing plate 10 will be described with reference to FIG.

図4(A)に示すように、基板20上にフォトレジストを塗布し、スクリーン印刷版作製用の原版を用いて露光し、フォトレジストの現像を行い、メッシュ孔14,15,16(図2及び図3参照)の内部に相当するパターンのレジスト像22を形成する。   As shown in FIG. 4 (A), a photoresist is applied on the substrate 20, exposed using an original plate for producing a screen printing plate, developed with photoresist, and mesh holes 14, 15, 16 (FIG. 2). And a resist image 22 having a pattern corresponding to the inside of the inside (see FIG. 3).

次いで、図4(B)に示すように、基板20上に、レジスト像22を介して、エレクトロフォーミング(電鋳法)により、金属膜30をメッキ形成する。メッキ材料には、例えばニッケルを用いる。金属膜30の膜厚は、例えば10〜100μmである。このときのメッキ浴は、例えば、メッキ膜寸法に影響を及ぼすメッキ膜内部応力制御が容易なスルファミン酸ニッケル浴を用いる。   Next, as shown in FIG. 4B, a metal film 30 is formed on the substrate 20 by electroforming (electroforming) via the resist image 22. For example, nickel is used as the plating material. The film thickness of the metal film 30 is, for example, 10 to 100 μm. As the plating bath at this time, for example, a nickel sulfamate bath that can easily control the internal stress of the plating film that affects the dimensions of the plating film is used.

次いで、図4(C)に示すように、レジスト像22及び金属膜30の上に、フォトレジストを塗布し、露光、現像を行い、印刷パターン図形44(図3参照)よりやや大きい凹部12(図2及び図3参照)の内部に相当するレジスト像24を形成する。   Next, as shown in FIG. 4C, a photoresist is applied on the resist image 22 and the metal film 30, exposed and developed, and the recesses 12 slightly larger than the printed pattern figure 44 (see FIG. 3) ( A resist image 24 corresponding to the inside of FIG. 2 and FIG. 3 is formed.

次いで、図4(D)に示すように、レジスト像24を介して、エレクトロフォーミング(電鋳法)により、金属膜30の上に金属膜32をメッキ形成する。メッキ材料には、例えばニッケルを用いる。金属膜32の膜厚は、例えば1〜100μmである。このときのメッキ浴には、例えば、スルファミン酸ニッケル浴を用いる。   Next, as shown in FIG. 4D, a metal film 32 is formed on the metal film 30 by electroforming (electroforming) through the resist image 24. For example, nickel is used as the plating material. The film thickness of the metal film 32 is, for example, 1 to 100 μm. As the plating bath at this time, for example, a nickel sulfamate bath is used.

次いで、図4(D)に示すように、レジスト像22,24を、例えば溶媒を用いて除去して凹部12及びメッシュ孔14,15(図3では図示せず),16を形成し、一体となって残った金属膜30,32を基板から取り外し、本体部11が完成する。   Next, as shown in FIG. 4 (D), the resist images 22 and 24 are removed using, for example, a solvent to form concave portions 12 and mesh holes 14 and 15 (not shown in FIG. 3) and 16, which are integrated. The remaining metal films 30 and 32 are removed from the substrate, and the main body 11 is completed.

ところで、図2に示すように、図形形成領域の中央に配置される略菱形のメッシュ孔14のスキージ方向のピッチPY及びスキージ方向と直角方向のピッチPXは、図形形成領域のスキージ方向の寸法Y及びスキージ方向と直角方向の寸法Xと、図形形成領域の中央に配置される略菱形のメッシュ孔14のスキージ方向の寸法Y及びスキージ方向と直角方向の寸法Xと、メッシュ線部17,18の配置角度α及び幅Wとを用いて、次の式(1)、(2)で表すことができる。
PX=AX+W/cosα (1)
PY=AY+W/sinα (2)
By the way, as shown in FIG. 2, the pitch PY in the squeegee direction and the pitch PX in the direction perpendicular to the squeegee direction of the substantially rhombic mesh hole 14 arranged at the center of the figure formation area are the dimension Y in the squeegee direction of the figure formation area. And a dimension X perpendicular to the squeegee direction, a dimension Y in the squeegee direction of the substantially rhombic mesh hole 14 arranged in the center of the figure forming area, a dimension X perpendicular to the squeegee direction, and the mesh line portions 17 and 18 Using the arrangement angle α and the width W, the following expressions (1) and (2) can be used.
PX = AX + W / cos α (1)
PY = AY + W / sin α (2)

また、図形形成領域の中央に配置される略菱形のメッシュ孔14のスキージ方向の寸法AY、スキージ方向と直角方向の寸法AXと角度αとの間には、次の式(3)の関係がある。
AY=AXtanα (3)
In addition, the relationship of the following equation (3) exists between the dimension AY in the squeegee direction of the substantially rhombic mesh hole 14 arranged at the center of the figure forming region, the dimension AX in the direction perpendicular to the squeegee direction, and the angle α. is there.
AY = AXtanα (3)

スクリーン印刷版10は、上記(1)〜(3)式を用いて設計することができる。次に、設計手順の一例を説明する。   The screen printing plate 10 can be designed using the above formulas (1) to (3). Next, an example of the design procedure will be described.

まず、寸法X,Yの略矩形の図形形成領域の中心から略菱形のメッシュ孔14を配置する。このとき、図形形成領域の中央に配置される略菱形のメッシュ孔14の寸法AY,AY、ピッチPX,PY、メッシュ線部17,18の配置角度α及び幅Wは、予め定めた初期値とする。   First, a substantially rhombic mesh hole 14 is arranged from the center of a substantially rectangular figure forming region with dimensions X and Y. At this time, the dimensions AY, AY, pitches PX, PY of the substantially rhombic mesh holes 14 arranged at the center of the figure forming region, the arrangement angle α and the width W of the mesh line portions 17, 18 are set to predetermined initial values. To do.

X/PXおよびY/PYがいずれも奇数のとき、またはX/PXおよびY/PYがいずれも偶数のとき、例えば図5に示すように、略矩形の図形形成領域の中心には、略菱形のメッシュ孔14が配置し、略矩形の図形形成領域の中心とメッシュ孔14の中心とが一致するように配置する。   When X / PX and Y / PY are both odd numbers, or when X / PX and Y / PY are both even numbers, for example, as shown in FIG. The mesh holes 14 are arranged so that the center of the substantially rectangular figure forming region coincides with the center of the mesh hole 14.

X/PXが奇数かつY/PYが偶数のとき、またはX/PXが偶数かつY/PYが奇数のとき、略矩形の図形形成領域の中心には、例えば図2に示すように、メッシュ線部17,18の交点を配置する。   When X / PX is an odd number and Y / PY is an even number, or when X / PX is an even number and Y / PY is an odd number, a mesh line as shown in FIG. The intersection of the parts 17 and 18 is arranged.

次に、略矩形の図形形成領域の中心から、図形形成領域の辺と平行に、略菱形のメッシュ孔14を、メッシュピッチPXおよびPYで配置する。X/PXおよびY/PYが整数の場合、図形形成領域の角を除き、図形形成領域の辺に沿って配置される略菱形が分割されたメッシュ孔16の面積は、中央に配置される菱形のメッシュ孔14の面積の半分(50%)になる。   Next, approximately rhombic mesh holes 14 are arranged at mesh pitches PX and PY in parallel with the sides of the figure forming area from the center of the substantially rectangular figure forming area. When X / PX and Y / PY are integers, the area of the mesh hole 16 obtained by dividing the substantially rhombus arranged along the side of the graphic forming area except the corner of the graphic forming area is the rhombus arranged in the center. It becomes half (50%) of the area of the mesh hole 14.

X/PXおよびY/PYが整数で割り切れない場合、角度αを30〜55度の範囲内で適宜に設定することにより、図形形成領域の角を除き、図形形成領域の辺に沿って配置される菱形が分割されたメッシュ孔16の面積が、中央に配置される菱形のメッシュ孔14の面積の半分(50%)になるようにする。すなわち、角度αをパラメータとして変更すると、式(1)〜(3)からPX,PYを変更することができるので、X/PXおよびY/PYが整数で割り切れるようにすることができる。   When X / PX and Y / PY are not divisible by an integer, the angle α is appropriately set within a range of 30 to 55 degrees, and is arranged along the side of the figure forming area except for the corner of the figure forming area. The area of the mesh hole 16 into which the rhombus is divided is set to be half (50%) of the area of the rhombus mesh hole 14 disposed in the center. That is, if the angle α is changed as a parameter, PX and PY can be changed from the equations (1) to (3), so that X / PX and Y / PY can be divided by integers.

次に、必要に応じて、メッシュピッチPYおよびPXを変えることにより、X/PXおよびY/PYを整数で割り切れなくして、図形形成領域の角を除き、図形形成領域の辺に沿って配置される略菱形が分割されたメッシュ孔16の面積が、中央に配置される菱形のメッシュ孔14の面積の30〜60%の範囲となるように調整する。たとえば、ペースト粘度が低い場合には、印刷がにじまないように、面積比が30%程度の小さめのメッシュ孔16を、図形形成領域の角を除き、図形形成領域の辺に沿って配置する。一方、ペースト粘度が高い場合、かすれや目詰まりを生じないように、例えば図6に示すように、面積比が60%程度の大きめのメッシュ孔16、図形形成領域の角を除き、図形形成領域の辺に沿って配置する。   Next, if necessary, the mesh pitches PY and PX are changed so that X / PX and Y / PY are not divisible by integers, except for the corners of the graphic forming area, and arranged along the sides of the graphic forming area. The area of the mesh hole 16 into which the approximately rhombus is divided is adjusted to be in the range of 30 to 60% of the area of the rhombus mesh hole 14 disposed in the center. For example, when the paste viscosity is low, small mesh holes 16 having an area ratio of about 30% are arranged along the sides of the graphic forming area so as not to cause printing. On the other hand, when the paste viscosity is high, the figure forming area is excluded except for the mesh holes 16 having a large area ratio of about 60% and the corners of the figure forming area as shown in FIG. Place along the sides of

このとき、例えば、メッシュ線部17,18の幅Wはそのままで、メッシュ線部17,18の配置角度αを変えることによって、式(1)〜(3)を用いて、メッシュピッチPYおよびPXを変える。   At this time, for example, by changing the arrangement angle α of the mesh line portions 17 and 18 while maintaining the width W of the mesh line portions 17 and 18, the mesh pitches PY and PX are calculated using the equations (1) to (3). change.

以上のように、スクリーン印刷版10は、バイアスの網目状のメッシュ配置を基本とし、図形形成領域のエッジ周辺に面積が制御されたメッシュ孔16が配置されるように、バイアス状のメッシュ配置角度αを35〜55度の範囲で任意に設定する。印刷図形寸法に対するメッシュ配置角度αを選定することで、中央部のメッシュ孔14に対して約30〜60%のある一定面積となるようなメッシュ孔16を、エッジ周辺部に配置することが可能となる。このメッシュ配置角度αの選定によるメッシュ配置方法では、各印刷図形サイズに適応できるような汎用性も兼ね備えており、全ての図形寸法にまた各ペースト種に適用可能である。   As described above, the screen printing plate 10 is based on a biased mesh-like mesh arrangement, and the bias-like mesh arrangement angle is arranged so that the mesh holes 16 having a controlled area are arranged around the edges of the figure forming region. α is arbitrarily set within a range of 35 to 55 degrees. By selecting the mesh arrangement angle α with respect to the printed figure size, it is possible to arrange the mesh hole 16 having a certain area of about 30 to 60% with respect to the mesh hole 14 in the center part at the edge peripheral part. It becomes. The mesh arrangement method by selecting the mesh arrangement angle α also has versatility that can be adapted to each printed figure size, and can be applied to all figure dimensions and to each paste type.

この方法に従えば、スクリーン印刷版10のメッシュ孔14,15,16を形成するために不可欠であるスクリーン印刷版作製用の原版の作製において、原版作製用のデータ作成がシンプルであり、複雑なプログラムも必要とせず、原版作製におけるソフト、ハード面での生産性の負担もほとんどない。   According to this method, in the production of an original for producing a screen printing plate, which is indispensable for forming the mesh holes 14, 15, 16 of the screen printing plate 10, the data production for producing the original plate is simple and complicated. There is no need for a program and there is almost no burden of productivity in terms of software and hardware in the production of the original plate.

なお、上記のように菱形を基本とするメッシュ孔の代わりに、図形形成領域の中央に円形のメッシュ孔を配置し、図形形成領域の角を除く辺近傍に円弧と弦とで形成される小面積のメッシュ孔を配置することも可能であるが、この場合には、図形領域の角を除く各辺の近傍に配置されるメッシュ孔の面積について、中央の円形のメッシュ孔の面積との比を30〜60%の範囲で調整することは、菱形を基本とするメッシュ孔の場合のようには容易でない。   Instead of the rhomboid-based mesh hole as described above, a circular mesh hole is arranged at the center of the figure forming area, and a small circle formed by an arc and a string near the side excluding the corner of the figure forming area. It is also possible to place a mesh hole of area, but in this case, the ratio of the mesh hole area arranged near each side excluding the corner of the graphic area to the area of the central circular mesh hole It is not easy to adjust the range of 30 to 60% as in the case of mesh holes based on rhombuses.

従来のスクリーン印刷版では、印刷パターン形状に合わせて、メッシュ部分のメッシュ孔形状が選ばれており、形状に合わせた同一面積のメッシュ孔が配置されている。これに対し、本発明のスクリーン印刷版では、1個の印刷図形に対してエッジ周辺部と図形中央部で面積の異なるメッシュ孔を設計配置している。メッシュ孔面積の大きさ、比率は、メッシュの配置角度αによって変えることができる。これにより、スクリーン印刷版10の原版作製の際に不可欠なデータ作成も容易化され、各図形寸法への対応も可能であるなど汎用性の点でも優れている。   In the conventional screen printing plate, the mesh hole shape of the mesh portion is selected according to the print pattern shape, and mesh holes of the same area corresponding to the shape are arranged. On the other hand, in the screen printing plate of the present invention, mesh holes having different areas are designed and arranged at the edge peripheral part and the graphic central part for one printed graphic. The size and ratio of the mesh hole area can be changed by the arrangement angle α of the mesh. As a result, it is easy to create data that is indispensable when the original of the screen printing plate 10 is produced, and it is excellent in versatility, such as being able to cope with each figure size.

従来のスクリーン印刷版では、30度、45度等の一定のメッシュ角度を配置したスクリーン紗による印刷版は製造されているが、印刷する図形の配置位置によって印刷する図形のエッジ周辺部に対して配置されるメッシュ孔の面積は様々である。これに対し、本発明のスクリーン印刷版では、全ての印刷図形の周辺部に対するメッシュ孔の面積が、一定の面積比率となるように制御、配置されている。   In the conventional screen printing plate, a printing plate with a screen ridge having a fixed mesh angle of 30 degrees, 45 degrees, etc. is manufactured, but with respect to the edge peripheral portion of the graphic to be printed depending on the arrangement position of the graphic to be printed. The area of the mesh hole to be arranged varies. On the other hand, in the screen printing plate of the present invention, the mesh holes are controlled and arranged so that the area of the mesh holes with respect to the peripheral portions of all printed figures is a constant area ratio.

以上に説明したように、スクリーン印刷版10は、略矩形の印刷図形の寸法に応じて例えばメッシュ孔の配置角度α等を適宜に選定することにより、(1)印刷ニジミ量の制御、(2)印刷塗布膜の直線性改善、(3)目詰まり防止、(4)原版作製に必要なデータ処理量の簡略化、(4)メッシュ設計の簡略化など、諸問題の解決が可能となった。   As described above, the screen printing plate 10 can select (1) control of the printing blur amount by appropriately selecting, for example, the mesh hole arrangement angle α according to the size of the substantially rectangular printed figure. It has become possible to solve various problems such as improved linearity of print coating film, (3) prevention of clogging, (4) simplification of data processing amount required for original plate preparation, and (4) simplification of mesh design. .

すなわち、印刷図形のエッジ周辺部には、通過するペースト量の抑制が可能な孔面積のメッシュ孔を配置しており、また、中央にはペースト供給が十分可能となるような異なる孔面積のメッシュ孔を配置していることから、1個の印刷図形を対象として、印刷エリア毎に適切なペースト抑制とペースト供給制御が可能となる。その結果、印刷ニジミの少ない直線性に優れた印刷図形を得るとともに、ペースト目詰まりや印刷カスレなどを生じない、従来は両立し得なかった2つの印刷特性を兼ね備えたスクリーン印刷版の作製供給が可能となる。また、メッシュ配置は、配置角度を選択するバイアス網状配置であることから、メッシュ設計、原版データ作製は簡易的であり、原版の生産性に優れ、また、どのペースト種、図形サイズにも適用可能であり、汎用性の点でも優れている。   In other words, a mesh hole with a hole area capable of suppressing the amount of paste that passes through is arranged around the edge of the printed figure, and a mesh with a different hole area that allows sufficient paste supply at the center. Since the holes are arranged, appropriate paste suppression and paste supply control can be performed for each print area for one printed figure. As a result, it is possible to obtain printed graphics with excellent linearity with little printing blurring, and to produce and supply screen printing plates that do not cause paste clogging and printing blurring and have two printing characteristics that have not been compatible with each other in the past. It becomes possible. In addition, since the mesh arrangement is a bias network arrangement that selects the arrangement angle, mesh design and original data preparation are simple, excellent original plate productivity, and applicable to any paste type and figure size. It is also excellent in versatility.

更に、ペーストの印刷特性にあわせて、メッシュ配置角度αを適正化することで、エッジ部に配置されるメッシュ孔の面積を、図形形成領域の中央に配置される菱形のメッシュ孔に対する任意の面積比で約30〜60%に設定することが可能となり、あらゆるペーストに対して印刷ニジミ制御が可能となるスクリーン印刷版を提供できる。   Furthermore, by optimizing the mesh arrangement angle α in accordance with the printing characteristics of the paste, the area of the mesh hole arranged at the edge portion can be set to an arbitrary area with respect to the diamond mesh hole arranged at the center of the figure forming area. The ratio can be set to about 30 to 60%, and a screen printing plate can be provided which can control printing blur on any paste.

なお、本発明は上記した実施の形態に限定されるものではなく、種々変更を加えて実施することが可能である。例えば、スクリーン印刷版10の設計において、メッシュの配置角度αに加え、略菱形のメッシュ孔14の寸法AX又はAYや、メッシュ線部17,18の幅Wを変更してもよい。   The present invention is not limited to the above-described embodiment, and can be implemented with various modifications. For example, in the design of the screen printing plate 10, the dimension AX or AY of the substantially rhombic mesh hole 14 and the width W of the mesh line portions 17 and 18 may be changed in addition to the mesh arrangement angle α.

スクリーン印刷版の(a)要部斜視図、(b)要部平面図である。(従来例)It is the (a) principal part perspective view of a screen printing plate, (b) The principal part top view. (Conventional example) スクリーン印刷版の(a)要部平面図、(b)要部断面図である。(実施例)It is (a) principal part top view of a screen printing plate, (b) principal part sectional drawing. (Example) スクリーン印刷版の製造工程の説明図である。(実施例)It is explanatory drawing of the manufacturing process of a screen printing plate. (Example) スクリーン印刷版の使用状態を示す要部斜視図である。(実施例)It is a principal part perspective view which shows the use condition of a screen printing plate. (Example) スクリーン印刷版の要部平面図である。(変形例1)It is a principal part top view of a screen printing plate. (Modification 1) スクリーン印刷版の要部平面図である。(変形例2)It is a principal part top view of a screen printing plate. (Modification 2)

符号の説明Explanation of symbols

10,10a,10b スクリーン印刷版
11 本体部
11a,11b 主面
12 凹部
14 メッシュ孔(第1の貫通孔)
15,16 メッシュ孔(第2の貫通孔)
17,18 メッシュ線部
10, 10a, 10b Screen printing plate 11 Main body 11a, 11b Main surface 12 Recess 14 Mesh hole (first through hole)
15,16 mesh hole (second through hole)
17, 18 Mesh line part

Claims (2)

互いに平行な主面を有する平板状の本体部を含み、前記主面の垂直方向から透視したとき、略矩形の図形形成領域内に前記主面間を貫通する複数の貫通孔が形成され、被印刷物に対向する一方の前記主面には、前記図形形成領域及びその周囲に凹部が形成されたスクリーン印刷版において、
前記貫通孔は、
前記主面の垂直方向から透視したとき、全ての辺が前記図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が前記図形形成領域の前記辺と略平行又は略直角である略菱形の断面形状を有し、その全体が前記図形形成領域内に配置された第1の貫通孔と、
前記主面に垂直方向から透視したとき、全ての辺が前記図形形成領域の各辺に対して斜めに延在しかつ対向する頂点間を結ぶ方向が前記図形形成領域の前記辺と略平行又は略直角である略菱形が前記図形形成領域の1又は2の前記辺で分割された2つの部分のうち、前記図形形成領域内の前記部分の断面形状を有し、前記図形形成領域の前記各辺近傍に配置された第2の貫通孔と、を含み、
前記第1の貫通孔及び前記第2の貫通孔は、大略、それぞれの辺が一直線上に揃うように等間隔に配置され、
前記主面の垂直方向から透視したとき、前記図形形成領域内には、前記貫通孔の間に、前記図形形成領域の辺に対して斜めに略等間隔で延在しかつ交差する略一定幅のメッシュ線部が形成されることを特徴とする、スクリーン印刷版。
A plurality of through-holes penetrating between the principal surfaces are formed in a substantially rectangular figure forming region when viewed from a direction perpendicular to the principal surface. On the one main surface facing the printed material, in the screen printing plate in which the graphic forming region and the recesses are formed in the periphery thereof,
The through hole is
When seen through from the vertical direction of the main surface, the direction in which all sides extend obliquely with respect to each side of the figure forming region and the opposite vertices are substantially parallel to the side of the figure forming region or A first through-hole having a substantially rhombic cross-sectional shape that is substantially perpendicular, the entirety of which is disposed in the figure forming region;
When viewed through the main surface from a vertical direction, all sides extend obliquely with respect to each side of the graphic forming region and a direction connecting the opposing vertices is substantially parallel to the side of the graphic forming region or Of the two parts divided by the one or two sides of the graphic forming area, the substantially rhombus that is substantially perpendicular has the cross-sectional shape of the part in the graphic forming area, and each of the graphic forming areas A second through hole disposed in the vicinity of the side,
The first through hole and the second through hole are generally arranged at equal intervals so that the respective sides are aligned on a straight line,
When seen through from the vertical direction of the main surface, the figure forming area has a substantially constant width that extends obliquely at substantially equal intervals and intersects the sides of the figure forming area between the through holes. A screen printing plate, wherein a mesh line portion is formed.
前記主面に垂直方向から透視したとき、スキージ方向の直角方向と前記メッシュ線部とがなす角度が30度以上かつ55度以下であり、
前記主面に垂直方向から透視したとき、前記第2の貫通孔の面積が前記第1の貫通孔の面積の30%以上かつ60%以下であることを特徴とする、請求項1に記載のスクリーン印刷版。
When viewed through the main surface from a vertical direction, an angle formed by a right angle direction of the squeegee direction and the mesh line portion is not less than 30 degrees and not more than 55 degrees,
The area of the second through hole is 30% or more and 60% or less of the area of the first through hole when viewed through the main surface from a vertical direction. Screen printing version.
JP2005163353A 2005-06-02 2005-06-02 Screen printing version Active JP4670487B2 (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007059794A1 (en) * 2007-12-11 2009-06-25 Nb Technologies Gmbh Stencil for screen printing method, has plane stencil body with stencil thickness, where individual carrier net is provided at scraper side and at opposite substrate side through layout recesses till specified depth
JP2010023253A (en) * 2008-07-16 2010-02-04 Bonmaaku:Kk Mesh for printing pattern aperture of mask, mask, two-layer structured mask, method of creating mesh pattern data, method of manufacturing mask and method of manufacturing two-layer structured mask
JP2011201321A (en) * 2011-07-12 2011-10-13 Bonmaaku:Kk Mask
JP2015066818A (en) * 2013-09-30 2015-04-13 日立マクセル株式会社 Metal mask manufacturing method
WO2022091449A1 (en) * 2020-10-30 2022-05-05 株式会社ボンマーク Metal mask for printing
JP2022121537A (en) * 2020-01-22 2022-08-19 マクセル株式会社 Metal mask

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Publication number Priority date Publication date Assignee Title
JPH05124370A (en) * 1991-11-06 1993-05-21 Tokyo Cosmos Electric Co Ltd Mask for screen printing
JPH1142867A (en) * 1997-07-28 1999-02-16 Process Lab Micron:Kk Mask for screen printing, its manufacture, and method for using it
JP2005212285A (en) * 2004-01-29 2005-08-11 Murata Mfg Co Ltd Printing pattern forming material, and manufacturing method for electronic part using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05124370A (en) * 1991-11-06 1993-05-21 Tokyo Cosmos Electric Co Ltd Mask for screen printing
JPH1142867A (en) * 1997-07-28 1999-02-16 Process Lab Micron:Kk Mask for screen printing, its manufacture, and method for using it
JP2005212285A (en) * 2004-01-29 2005-08-11 Murata Mfg Co Ltd Printing pattern forming material, and manufacturing method for electronic part using the same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007059794A1 (en) * 2007-12-11 2009-06-25 Nb Technologies Gmbh Stencil for screen printing method, has plane stencil body with stencil thickness, where individual carrier net is provided at scraper side and at opposite substrate side through layout recesses till specified depth
JP2010023253A (en) * 2008-07-16 2010-02-04 Bonmaaku:Kk Mesh for printing pattern aperture of mask, mask, two-layer structured mask, method of creating mesh pattern data, method of manufacturing mask and method of manufacturing two-layer structured mask
JP2011201321A (en) * 2011-07-12 2011-10-13 Bonmaaku:Kk Mask
JP2015066818A (en) * 2013-09-30 2015-04-13 日立マクセル株式会社 Metal mask manufacturing method
JP2022121537A (en) * 2020-01-22 2022-08-19 マクセル株式会社 Metal mask
WO2022091449A1 (en) * 2020-10-30 2022-05-05 株式会社ボンマーク Metal mask for printing

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