JP2003048303A - Screen printing method and method for manufacturing laminated ceramic electronic part - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a screen printing method forming a printing pattern free from blurr by one printing process and capable of certainly filling a through-hole with printing paste, a laminated ceramic electronic part manufactured through a process laminating a ceramic green sheet having the printing pattern formed thereto by the screen printing method and a method for manufacturing the same. SOLUTION: Two squeegees 5a and 5b are arranged at a predetermined interval in a moving direction and the attack angle θa of the front squeegee 5a in a case looking with respect to the moving direction is made larger than the attack angle θb of the rear squeegee 5b and, in such a state that the printing paste 6 is allowed to be present at least in front of the front squeegee 5a, both squeegees 5a and 5b are moved in an almost same direction almost in parallel to matter to be printed (ceramic green sheet) 2. By this constitution, a printing pattern 6a having a predetermined shape is mainly formed by the front squeegee 5a, and the filling of the through-hole 11 with the printing paste 6 and the control of the coating thickness of the printing paste 6 are performed mainly by the rear squeegee 5b.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing method, a laminated ceramic electronic component manufactured through a process of laminating ceramic green sheets having a print pattern formed by the screen printing method, and a method for manufacturing the same.

[0002]

2. Description of the Related Art A laminated ceramic electronic component is usually formed by laminating and pressing a predetermined number of ceramic green sheets on which internal electrode patterns and via holes are printed and formed to form a laminated body. It is manufactured through a step of firing after cutting and cutting out individual elements.

With respect to such a monolithic ceramic electronic component as well, there is a strong demand for miniaturization and high performance with the recent miniaturization of electronic equipment, and the precision of internal electrode patterns and via holes is improved. , High density is being promoted.

By the way, a printing paste (electrode paste) is printed on the ceramic green sheet to form an internal electrode pattern, or a printing paste (electrode paste) is applied to a through hole for a via hole formed in the ceramic green sheet. A screen printing method is generally used as a filling method.

FIG. 6 shows an example of the screen printing method. In this example, the screen printing plate 51 is used.
Is placed on the ceramic green sheet 52 which is the printing object, and the printing paste (electrode paste) 53 is supplied onto the screen printing plate 51, and the squeegee 54 is pressed onto the screen printing plate 51 in a predetermined direction. By moving in the direction (arrow Y in this example), the printing paste 53 is passed through the mesh holes (not shown) forming the printing pattern of the screen printing plate 51, and the printing paste is placed on the ceramic green sheet 52. 53 is printed to form a predetermined internal electrode pattern 55, and
The through holes 57 are configured to be filled with the printing paste 53.

However, in the screen printing method,
When the printing pattern or through holes become fine, the printing paste is excessively supplied from the screen printing plate onto the printing material such as the ceramic green sheet, causing bleeding in the printing pattern, or the printing paste having fine through holes. However, there is a problem in that it may not be possible to sufficiently fill.

On the other hand, in the conventional screen printing method, in order to suppress the occurrence of the bleeding of the printing pattern due to the excessive supply of the printing paste, (1) the tension of the screen printing plate is increased. By improving the plate separation at the time of printing, a method of reducing the bleeding of the print pattern at the plate separation, (2) a method of increasing the viscosity of the printing paste, etc. are proposed, but the pattern of (1) above In the case of the method of increasing the tension, the practically sufficient bleeding prevention effect cannot be obtained, and in the case of the method of increasing the viscosity of the electrode paste in (2) above, the target printing paste coating thickness In addition, the viscosity range of the printing paste is limited due to the problem of the line width, and it cannot be a fundamental solution. Also, a method based on equipment conditions has been proposed, but this has not yet been a practical solution.

Further, as a method for improving the filling rate of the printing paste (electrode paste) into the through holes, Japanese Patent Laid-Open No.
No. 0-59010 discloses a method of improving the filling property of a printing paste into a through hole by squeezing with two squeegees, as shown in FIG. Of the two squeegees, the front squeegee's attack angle (squeegee tip angle) when viewed in the moving direction is smaller than the rear squeegee's attack angle (squeegee angle). It is considered that the filling efficiency of the printing paste into the ink is high, but there is a problem in that the printing pattern is likely to bleed due to excessive supply of the printing paste.

Further, in manufacturing the monolithic ceramic electronic component, a process for forming a print pattern,
A method of improving the filling rate of the printing paste into the through holes by performing screen printing in two steps by using the step of filling the through holes with the printing paste as a separate step is also considered. Since only two steps are required for printing, there is a problem that the production efficiency is low.

The present invention solves the above problems, and is not affected by the printing pattern or the type of printing paste, which is constantly changed depending on the conditions of the substrate to be printed.
With simple equipment, and in one printing step, it is possible to reliably form a print pattern without bleeding, and a screen printing method capable of reliably filling the through holes with a printing paste, An object of the present invention is to provide a laminated ceramic electronic component manufactured through a process of laminating ceramic green sheets having a printed pattern formed by using a screen printing method, and a method for manufacturing the same.

[0011]

In order to solve the above problems, the screen printing method of the present invention (Claim 1) uses a screen printing method to print a printing paste on an object to be printed having through holes. A method of forming a printing pattern on the surface of a material to be printed and filling the through holes with a printing paste, wherein (a) a predetermined interval is provided in the moving direction.
While arranging two squeegees, so that the screen printing plate is in close contact with the printing object between the two squeegees,
The angle formed by the front squeegee and the printed material (attack angle) when the two squeegees are pressed against the printed material via the screen printing plate and viewed in the direction of movement (b) is the angle formed by the rear squeegee and the printed material. (Attack angle)
And (c) move both squeegees in substantially the same direction substantially parallel to the surface of the printing object in a state where the printing paste is present at least in front of the squeegee on the front side, and the squeegee on the front side mainly provides a predetermined shape. The printing pattern is formed, and the squeegee on the back side mainly fills the through-holes of the printing object with the printing paste and controls the coating thickness of the printing paste.

In the screen printing method of the present invention (claim 1), of the two squeegees, the attack angle of the front squeegee is made larger than the attack angle of the rear squeegee so that at least the front of the front squeegee is printed. With the paste present, both squeegees are moved substantially parallel to the surface of the material to be printed, in the substantially same direction.
The squeegee on the front side with a large attack angle makes it possible to supply an appropriate amount of printing paste so as not to oversupply and form a desired print pattern with high dimensional accuracy without bleeding, and with a small attack angle. By performing printing with the squeegee on the rear side, it becomes possible to reliably fill the through holes with the printing paste.

The screen printing method according to claim 2 is
It is characterized in that the attack angle of the front squeegee is 45 degrees or more and less than 90 degrees and is larger than the attack angle of the rear squeegee.

By making the attack angle of the front side squeegee 45 degrees or more and less than 90 degrees and making it larger than the attack angle of the rear side squeegee, the front side squeegee supplies an appropriate amount of printing paste to prevent bleeding. It is possible to reliably form a desired printing pattern with high shape accuracy, and it is possible to reliably fill the through-hole with the printing paste by the rear squeegee with a small attack angle. The attack angle θ of the front squeegee
a is 70 to 85 degrees, and the difference (θa-θb) with the attack angle θb of the squeegee on the rear side is set to 5 to 60 degrees to improve the paste filling property into the through holes and the bleeding of the print pattern. Is preferable from the viewpoint of reducing

Further, the screen printing method of the present invention (claim 3) uses the screen printing method to print the printing paste on the printing object having the through holes to form a printing pattern on the surface of the printing object. A method for filling a printing paste into a through hole, comprising: (a) disposing two squeegees formed of elastic materials having different hardnesses at a predetermined interval in the moving direction, and between the two squeegees. In the step (b), the hardness of the front squeegee when viewed in the moving direction is determined by pressing two squeegees against the printing object through the screen printing plate so that the screen printing plate comes into close contact with the printing object. The hardness of the squeegee is set to be substantially parallel to the surface of the print target, with the printing paste being present in front of at least the front squeegee. Move in one direction, the front side squeegee mainly forms a print pattern of a predetermined shape, and the rear side squeegee mainly fills the through holes of the printing object with the printing paste and controls the coating thickness of the printing paste. It is characterized by doing so.

The two squeegees are pressed against the object to be printed through the screen printing plate, the hardness of the front squeegee is made larger than the hardness of the rear squeegee, and the printing paste is applied at least in front of the front squeegee. In this state, both squeegees are moved substantially parallel to the surface of the material to be printed in substantially the same direction.Therefore, the squeegee on the front side, which has a high hardness, supplies the printing paste to prevent excessive supply. As a result, it is possible to form a desired print pattern with high dimensional accuracy without bleeding, and the hardness is lower than the front squeegee, and the soft back squeegee causes bleeding of the print pattern due to deterioration of plate separation. Prevents bleeding by scraping off the excess printing paste that remains in (the openings of) the mesh portion of the screen printing plate. , It is possible to form a sharp printing pattern, and it is possible to reliably fill the printing paste in the through-hole.

The screen printing method according to claim 4 is
The front squeegee is a rubber squeegee having a rubber hardness of 90 to 60 degrees, and the rear squeegee is a rubber squeegee having a rubber hardness lower by 30 to 20 degrees than the front squeegee.

The front side squeegee has a rubber hardness of 90 to 6
By using a 0 degree rubber squeegee and using a rubber squeegee with a rubber hardness 30 to 20 degrees lower than the front side squeegee as the rear side squeegee, it is possible to form a print pattern without blurring. In addition, the efficiency of filling the through holes with the printing paste can be reliably improved, and the present invention can be more effectively realized.

The method for manufacturing a laminated ceramic electronic component according to the present invention (Claim 5) is the screen printing method according to any one of Claims 1 to 4, in which the surface of a ceramic green sheet having through holes is printed. Forming a pattern and filling the through holes with a printing paste,
A step of stacking a plurality of ceramic green sheets provided with a print pattern and press-bonding to form a stacked body.

The method for producing a laminated ceramic electronic component according to the present invention (Claim 5) is a ceramic green sheet (that is, a print pattern without bleeding) formed by the screen printing method according to any one of Claims 1 to 4. A ceramic green sheet which is formed and whose through holes are reliably filled with a printing paste is used, and a laminated body is formed by laminating the ceramic green sheet, so that a desired pattern with high shape accuracy can be obtained. It becomes possible to efficiently manufacture a highly reliable multilayer ceramic electronic component that includes internal electrodes and has internal electrodes reliably connected by via holes.

The laminated ceramic electronic component according to the present invention (Claim 6) is the laminated ceramic electronic component manufactured by the method according to Claim 5, wherein the internal electrode layers are laminated through the ceramic layers, and The predetermined internal electrode layers have a structure in which they are connected to each other through via holes.

The monolithic ceramic electronic component of the present invention (Claim 6) is manufactured by the method for producing a monolithic ceramic electronic component of the above-mentioned claim 5, and includes an internal electrode having a desired pattern with high shape accuracy, and Since the internal electrodes are surely connected by the via holes, it is possible to provide a multilayer ceramic electronic component having few internal structural defects and high reliability.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION The features of the present invention will be described in more detail below. [Embodiment 1] In Embodiment 1, in the manufacturing process of a chip-type laminated electronic component (chip coil), a printing paste is formed on the surface of a ceramic green sheet (object to be printed) having through holes for via holes. While printing (electrode paste) to form a coil pattern,
An example will be described in which a through hole for a via hole is filled with a printing paste (electrode paste).

(1) As shown in FIG. 1, a through hole 1 for a via hole is formed on a printing table 1 by a method such as suction.
The ceramic green sheet 2 provided with 1 is fixed, and the screen printing plate 4 on which the printing paste 6 is placed is set. At this time, the space between the ceramic green sheet 2 and the screen printing plate 4 is 0.1 to 0.15 mm.
So that the gap is formed.

(2) Then, two squeegees 5a and 5b are arranged on the screen printing plate 4 at a predetermined interval in the moving direction thereof (direction of arrow X in FIG. 1).
In the first embodiment, as the squeegees 5a and 5b, squeegees made of the same rubber having a rubber hardness of about 70 degrees are used. The above two squeegees 5a and 5b
It is preferable that the interval of is as narrow as possible. This is because when the distance between the two squeegees 5a and 5b becomes too wide, the angle θ formed by the screen printing plate 4 and the screen support frame 4a is increased.
This is because x (FIG. 1) becomes large and the screen printing plate 4 expands, causing a problem such as a decrease in printing accuracy. The distance between the two squeegees 5a and 5b is usually 5
It is preferable that the thickness is in the range of 15 mm.
Then, the distance between the two squeegees 5a and 5b is about 10 mm. Further, the two squeegees 5a and 5b are set such that the screen printing plate 4 is pressed against the ceramic green sheet 2 so that the screen printing plate 4 is in close contact with the ceramic green sheet 2. Further, the angle formed by the front squeegee 5a and the upper surface of the ceramic green sheet 2 when viewed in the moving direction (that is, the attack angle of the front squeegee 5a) θa is 45 degrees or more and less than 90 degrees (θa in the first embodiment). The angle formed by the rear squeegee 5b and the upper surface of the ceramic green sheet 2 when viewed in the moving direction (that is, the attack angle of the rear squeegee 5b) θb is the attack angle of the front squeegee 5a. 70-2 to be smaller
It is set to 0 degree (θb: 60 degrees in the first embodiment).

(3) Then, before printing, a printing paste 6 is supplied to a region of the screen printing plate 4 corresponding to the ceramic green sheet 2 by a scraper. As a result, the printing paste 6 is supplied in front of the front squeegee 5a and between the front squeegee 5a and the rear squeegee 5b. A separate supply means may be provided to adjust the supply of the printing paste 6 onto the screen printing plate 4 between the front squeegee 5a and the rear squeegee 5b.

(4) Then, the pressure (squeegee pressure) applied to the screen printing plate 4 of the squeegees 5a and 5b is 0.5.
Squeegees 5a, 5b so that the pressure becomes about 2.5 MPa.
Is pressed against the screen printing plate 4, and the squeegees 5a and 5b are moved substantially parallel to the surface of the ceramic green sheet 2 in substantially the same direction (direction of arrow X), so that the squeegee 5a on the front side mainly prints a predetermined shape. Pattern 6
After forming a, the squeegee 5b on the rear side mainly fills the through holes 11 of the ceramic green sheet with the printing paste 6 and controls the coating thickness of the printing paste 6. When the squeegees 5a and 5b made of rubber having the same rubber hardness (about 70 degrees) are used as in the first embodiment, the pressing force of the rear squeegee 5b is set to the pressing force of the front squeegee. Than 0.1-2.0M
It is desirable to increase Pa. This is because by satisfying the above conditions, it becomes easier to fill the through holes with the printing paste. In the first embodiment, the attack angle θa of the front squeegee 5a is set to about 70 degrees, so that the direction of the force F applied from the squeegee 5a to the printing paste 6 is the screen squeegee 5a as shown in FIG. From the relationship between the force (squeegee pressure) Fp that presses the printing plate 4 against the ceramic green sheet 2 and the force (squeezing force) Fs that moves the squeegee 5a forward (composition of forces), a forward direction (movement of the squeegee) Direction), it is possible to form a sharp print pattern 6a (FIG. 1) on the surface of the ceramic green sheet, but the direction in which the force F is applied is close to the forward direction. The filling of the printing paste 6 (FIG. 1) into the through holes 11 (FIG. 1) is not always sufficiently performed.
On the other hand, since the attack angle θb of the rear side squeegee 5b is about 60 degrees, the direction in which the pressure F of the squeegee 5b is applied to the printing paste 6 is, as shown in FIG. The direction is downward as compared with the case of the squeegee 5a on the front side, and it becomes possible to efficiently fill the through holes 11 of the ceramic green sheet with the printing paste 6.

(5) When the squeegees 5a, 5b reach the position beyond the printing area, the squeegees 5a, 5b
b is raised and the squeegees 5a and 5b are moved,
By repeating the steps (1) to (4), the printing paste is printed on another area of the ceramic green sheet or on another ceramic green sheet.

(6) Then, for example, as shown in FIG. 3, a printing pattern (electrode pattern) 6a is provided on the upper surface side, and the via holes 12 are formed by filling the through holes 11 with the printing paste 6. After stacking the ceramic green sheets 2 and the ceramic green sheets 2a for outer layers on which electrode patterns are not formed on both upper and lower sides, after pressure bonding and firing, as shown in FIG.
By forming the external electrodes 7a and 7b, it is possible to efficiently manufacture a chip-type multilayer electronic component (chip coil) having a structure in which the multilayer coil 9 is disposed in the ceramic element 8. In the normal manufacturing process,
In order to improve production efficiency, a mother laminated body is formed, and after firing, it is divided into individual elements, and then external electrodes are formed.

[Second Embodiment] In the second embodiment, a squeegee having a rubber hardness of 90 to 60 degrees (80 degrees in the second embodiment) is used as the front side squeegee 15a, and a front side squeegee 15b is used. A squeegee softer than the squeegee 15a and having a rubber hardness of 60 to 40 degrees (55 degrees in the second embodiment) was used.

The front and rear squeegees 15
The attack angles of a and 15b were the same at about 70 degrees. In addition, the printing paste 6 is used for the squeegee 15 on the front side.
It was supplied only on the screen printing plate 4 in front of a and not on the screen printing plate 4 between the front squeegee 15a and the rear squeegee 15b. The other configurations are similar to those of the first embodiment, and thus the description thereof is omitted here to avoid duplication. Note that FIG.
In FIG. 1, the parts denoted by the same reference numerals as in FIG. 1 indicate the same or corresponding parts.

In screen printing, if the amount of printing paste discharged from the mesh portion of the screen printing plate becomes excessive, the mesh portion of the screen printing plate ( The printing paste remains in the opening) and the separation of the printing plate deteriorates, and the printing pattern 6a easily bleeds. However, as in the second embodiment, the front squeegee 15a
As the squeegee having a rubber hardness of 80 degrees, the squeegee 15b on the rear side is softer than the squeegee 15a on the front side, and the squeegee having a rubber hardness of 55 degrees is used to perform screen printing, so that the rubber hardness is low and soft. By the squeegee 15b on the rear side, an excessive printing paste (not shown) that remains in the mesh portion (opening portion) of the screen printing plate 4 and causes bleeding of the printing pattern 6a due to deterioration of plate separation is printed on the back side. The squeegee 15b on the side prevents scraping by creating a sharp print pattern 6
It becomes possible to form a.

The rear squeegee 15b has a low rubber hardness (60 degrees or less) and is soft, so that the squeegee 15b is
The direction of the force F applied from the printing paste to the printing paste is a downward direction as compared with the case of the squeegee 15a on the front side.
It is possible to efficiently fill the through holes 11 of the ceramic green sheet 2 with the printing paste 6.

In the first and second embodiments, in the manufacturing process of the chip coil, a printing paste (electrode paste) is printed on the surface of the ceramic green sheet (printing object) having through holes for via holes to form a coil. While forming the pattern, the case where the through holes for via holes are filled with the printing paste has been described as an example, but the present invention is not limited to the case of manufacturing the chip coil, and the paste is printed on the surface of the substrate to be printed. It can be widely applied when forming a printing pattern and filling the paste into the through holes formed in the printing object. Further, in the present invention, there is no particular restriction on the mode of filling the through-hole with the printing paste, and as in the case of a normal via hole (the above-described first and second embodiments), the entire through-hole is filled with the printing paste. Alternatively, the printing paste may be applied only to the inner peripheral surface of the through hole, as in the case of a normal through hole.

Further, in the above-described first and second embodiments, the case where the printing paste is the electrode paste (conductive paste) has been described. However, in the present invention, various pastes (for example, dielectric paste) used as the printing paste are used. , Magnetic paste, adhesive, solder paste, flux,
It can be widely applied when using a photosensitive paste).

The present invention is not limited to the above embodiment in other respects, and the shapes of the two squeegees, the constituent materials, the configuration of the screen printing plate, the specific shape of the printing pattern, and the through holes. Regarding the shape and structure, the type of the material to be printed (shape and constituent materials, etc.), the hardness and attack angle of the two squeegees, various applications and modifications can be made within the scope of the invention.

[0037]

As described above, according to the screen printing method of the present invention (Claim 1), of the two squeegees, the attack angle of the front squeegee is made larger than the attack angle of the rear squeegee, and at least the front side. With the printing paste in front of the squeegee, both squeegees are moved substantially parallel to the surface of the material to be printed in the substantially same direction. It is possible to form a desired printing pattern with high shape accuracy without bleeding by supplying an appropriate amount of printing paste so that it does not become a problem, and by printing with a squeegee on the rear side with a small attack angle, the through hole The printing paste can be reliably filled in.

Further, as in the screen printing method of claim 2, the attack angle of the front squeegee is 45 degrees or more and 90 degrees or more.
Less than 10 degrees and larger than the attack angle of the squeegee on the back side, the squeegee on the front side supplies an appropriate amount of printing paste to reliably form the desired print pattern without bleeding and with high shape accuracy. In addition, it is possible to reliably fill the through-hole with the printing paste by the rear side squeegee having a small attack angle, and the present invention can be more effectively realized.

Further, in the screen printing method of the present invention (claim 3), the two squeegees are pressed against the object to be printed through the screen printing plate, and the hardness of the front squeegee is higher than that of the rear squeegee. Also, the squeegee is moved in substantially the same direction substantially parallel to the surface of the material to be printed in the state where the printing paste is present at least in front of the squeegee on the front side. With the squeegee, it is possible to supply the printing paste so as not to oversupply, and to form the desired printing pattern with high dimensional accuracy without bleeding. The squeegee causes the printing pattern to bleed due to the deterioration of the plate separation, and it remains in the mesh part (opening part) of the screen printing plate. Were scraped printing paste flax, to prevent the occurrence of bleeding, it is possible to form a sharp printing pattern, and it is possible to reliably fill the printing paste in the through-hole.

Further, as in the screen printing method of claim 4, a rubber squeegee having a rubber hardness of 90 to 60 degrees is used as the front squeegee, and the rear squeegee has a rubber hardness of 30 as compared with the front squeegee. When using a rubber squeegee that is lower by ~ 20 degrees, it is possible to more reliably form a print pattern with no bleeding and high shape accuracy, and ensure the filling efficiency of the printing paste into the through holes. Therefore, the present invention can be made more effective.

The method for producing a laminated ceramic electronic component according to the present invention (Claim 5) is a ceramic green sheet (that is, printing without blurring) formed by the screen printing method according to any one of Claims 1 to 4. Since a ceramic green sheet in which a pattern is formed and the through holes are reliably filled with the printing paste) is used, and a laminated body is formed by laminating this,
It becomes possible to efficiently manufacture a highly reliable multilayer ceramic electronic component that includes internal electrodes having a desired pattern with high shape accuracy and that is reliably connected by via holes.

The laminated ceramic electronic component of the present invention (claim 6) is manufactured by the method for manufacturing a laminated ceramic electronic component of claim 5, and comprises an internal electrode having a desired pattern with high shape accuracy. Moreover, since the internal electrodes are surely connected by the via holes, it is possible to provide a multilayer ceramic electronic component having few internal structural defects and high reliability.

[Brief description of drawings]

FIG. 1 is a diagram showing a state in which a screen printing method according to an embodiment (first embodiment) of the present invention is being performed.

FIG. 2 is a diagram illustrating directions of forces applied from front and rear squeegees when the screen printing method according to the first embodiment of the present invention is performed.

FIG. 3 is an exploded perspective view showing the configuration of a laminated ceramic electronic component manufactured using the ceramic green sheet formed by the screen printing method according to the first embodiment of the present invention.

FIG. 4 is a perspective view showing a laminated ceramic electronic component manufactured using a ceramic green sheet formed by the screen printing method according to the first embodiment of the present invention.

FIG. 5 is a diagram showing a state in which a screen printing method according to another embodiment (second embodiment) of the present invention is being performed.

FIG. 6 is a diagram illustrating a conventional screen printing method.

[Explanation of symbols]

1 Printing Table 2 Ceramic Green Sheet 2a Ceramic Green Sheet for Outer Layer 4 Screen Printing Plate 4a Screen Support Frame 5a Front Squeegee 5b Rear Squeegee 6 Printing Paste (Electrode Paste) 6a Printing Patterns 7a, 7b External Electrodes 8 Ceramic Element 9 Laminated coil 11 Through hole 12 for via hole Via hole 15a Front squeegee 15b Rear squeegee θa Attack angle θb of front squeegee Attack angle θb of rear squeegee Angle between screen printing plate and screen support frame

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Claims (6)

[Claims] 1. A method of printing a printing paste on a printing object having a through hole by a screen printing method to form a printing pattern on the surface of the printing object and filling the through hole with the printing paste. (A) Two squeegees are arranged at a predetermined interval in the moving direction, and the two squeegees are covered via the screen printing plate so that the screen printing plate is in close contact with the printing object between the two squeegees. When pressing the printed material, (b) making the angle (attack angle) between the front squeegee and the material to be printed when viewed in the moving direction larger than the angle (attack angle) formed between the rear squeegee and the material to be printed, (c) With the printing paste at least in front of the front squeegee, move both squeegees in substantially the same direction, substantially parallel to the surface of the printing target, and move the front squeegee. A printing pattern having a predetermined shape is formed mainly by a squeegee, and the squeegee on the back side mainly fills the through-holes of the printing material with the printing paste and controls the coating thickness of the printing paste. Screen printing method. 2. The screen printing method according to claim 1, wherein the attack angle of the front squeegee is 45 degrees or more and less than 90 degrees and is larger than the attack angle of the rear squeegee. 3. A screen-printing method is used to form a printing pattern on the surface of an object to be printed having through-holes,
A method of filling a printing paste into a through hole, comprising: (a) disposing two squeegees formed of elastic materials having different hardnesses at predetermined intervals in the moving direction, and between the two squeegees. In the step (b), the two squeegees are pressed against the print object through the screen print plate so that the screen print plate comes into close contact with the print object, and (b) the hardness of the front squeegee when viewed in the moving direction is the same as that of the rear squeegee. (C) Move both squeegees substantially parallel to the surface of the material to be printed in substantially the same direction with the printing paste being present at least in front of the front squeegee so that the front squeegee mainly A printing pattern with a predetermined shape is formed, and the squeegee on the back side mainly fills the through-holes of the printing material with the printing paste and controls the coating thickness of the printing paste. Screen printing method being characterized in that to perform the. 4. The front squeegee is a rubber squeegee having a rubber hardness of 90 to 60 degrees, and the rear squeegee is a rubber squeegee having a rubber hardness of 30 to 20 degrees lower than that of the front squeegee. The screen printing method according to claim 3. 5. A step of forming a print pattern on the surface of a ceramic green sheet having through holes and filling the through holes with a printing paste by the screen printing method according to claim 1. And a step of laminating a plurality of ceramic green sheets provided with a printing pattern and press-bonding to form a laminated body, the method for producing a laminated ceramic electronic component. 6. A multilayer ceramic electronic component manufactured by the method according to claim 5, wherein the internal electrode layers are stacked via a ceramic layer, and predetermined internal electrode layers are connected to each other via a via hole. A multilayer ceramic electronic component characterized by having a different structure.