JP2010023254A - Mesh for printing pattern aperture of mask, method of creating mesh pattern data, mask, two-layer structured mask, method of manufacturing mask and method of manufacturing two-layer structured mask - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mesh which has a high strength and enables uniform applying of an ink paste to a part where the mesh is formed. <P>SOLUTION: A plurality of holes of an identical shape are regularly formed in the center of a predetermined rectangular region where the mesh is formed. Especially, the hole is formed by an outer shape line defining the hole shape and the side defining the predetermined rectangular region at the end of the predetermined rectangular region. In addition, the shape of the hole formed at the end of the predetermined rectangular region is symmetrical to the shape of the hole formed at the opposite end. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a mesh (mesh plate) for opening a print pattern of a mask, for example, and relates to a mesh having a predetermined opening pattern. The present invention also relates to, for example, a mask manufactured using the mesh, a method for manufacturing the mesh, a method for creating mesh pattern data used for manufacturing the mesh, and a method for manufacturing a mask using the mesh. .

There is a two-layered mask in which a layer formed by plating and having a printed pattern opening and a layer formed by plating and having a mesh pattern opening are stacked. In particular, in a two-layered mask, there is a mask in which a mesh that forms a mesh pattern opening is not connected at an acute angle at a portion that overlaps an edge of a printed pattern opening (see Patent Document 1). Thereby, at the time of printing, the ink paste is prevented from being clogged and solidified in the mesh pattern opening formed in the portion overlapping the edge of the printing pattern opening.
Further, there is a mesh in which a plurality of holes are formed in a honeycomb structure (see Patent Document 2).
JP 2006-347099 A JP-A-8-52951

The conventional mesh was manufactured by controlling the shape and size of the holes formed at the end of the mesh formation region from the relationship between the shape and size of the holes formed at other parts (other ends). There is nothing. For this reason, in the conventional mesh, the amount of ink paste transmitted at the end is different from the amount of ink paste transmitted at other portions. Therefore, for example, when printing is performed with a mask using a conventional mesh, the ink paste cannot be uniformly applied to the end portion of the portion where the mesh is formed with other portions.
In addition, in order to control the amount of ink paste permeated at the end of the mesh formation region, the shape of the hole formed at the end may be deformed while ignoring the regularity with the holes formed at other portions. There is a risk that the strength of the steel will decrease.
SUMMARY OF THE INVENTION An object of the present invention is to provide a mesh having a high strength and capable of uniformly applying an ink paste to a portion where the mesh is formed. Moreover, it aims at providing the mask manufactured using the said mesh.

The mesh for printing pattern opening of the mask according to the present invention is a mesh for printing pattern opening of the mask, and is a mesh in which a plurality of circular holes having the same opening area are formed in a predetermined substantially rectangular region,
A tongue-shaped hole is formed at the end of the predetermined substantially rectangular area excluding the corners by a part of the circumference of the circle and a rectangle having one side of the side forming the predetermined approximately rectangular area. The tongue-shaped hole formed at the end excluding the corner of the predetermined substantially rectangular region has the same opening area as that of the circular hole.

The mesh for printing pattern opening of the mask is further characterized in that auxiliary holes of a predetermined size are formed between the plurality of circular holes.

The auxiliary hole is provided so that the width of the rib between the other hole is a predetermined width or more.

The method of creating mesh pattern data according to the present invention is a method of creating mesh pattern data of a mesh pattern in which a plurality of circular holes having the same opening area are arranged in a predetermined substantially rectangular region,
The diameter of a circle that fits exactly when placed in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the diameter of the circle being equal to or greater than a predetermined length and the predetermined length A calculation step to calculate the diameter of a near circle;
A laying step of regularly arranging the circles of the diameter calculated in the calculation step while sandwiching the ribs so as to cover the predetermined substantially rectangular region;
Deformation step of deforming the circles arranged at the end excluding the corner of the predetermined substantially rectangular region in the laying step to generate a tongue-like body that is in line with the end;
An adjustment step for adjusting the area of the circle calculated in the calculation step and the area of the tongue generated by deformation in the deformation step to be the same area;
And a data generation step of generating mesh pattern data having a hole formed in the circle and tongue adjusted in the adjustment step.

In the deforming step, a tongue having one side connected to a part of a circumference of the circle arranged at the end of the predetermined substantially rectangular area and having a side as a part of the predetermined rectangular area is connected to a tongue shape. It is characterized by being transformed into a body.

In the adjusting step, the area of the circle is increased and adjusted by increasing the diameter of the circle.

The method of creating the mesh pattern data is further
An auxiliary hole forming step for forming an auxiliary hole of a predetermined size in the rib is provided.

The mesh for printing pattern opening of the mask according to the present invention is a mesh for printing pattern opening of the mask, and a plurality of rhombic holes having the same side length in a predetermined substantially rectangular region have a predetermined width. It is a mesh formed with ribs in between,
A polygonal hole is formed at an end of the predetermined substantially rectangular area by a part of the rhombus and an edge forming the predetermined approximately rectangular area. Among the polygonal holes, the predetermined hole A polygonal hole formed at the end of the substantially rectangular region in the vertical direction or the horizontal direction, and the polygonal hole formed at the end excluding the corners has the same opening area as the diamond-shaped hole. It is characterized by.

The method of creating mesh pattern data according to the present invention is a method of creating mesh pattern data of a mesh pattern in which a plurality of rhombus holes having the same side length are arranged in a predetermined substantially rectangular region,
A predetermined rhombus width that fits in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the vertical or horizontal width being equal to or greater than the predetermined width A calculation step for calculating the width of the rhombus close to a predetermined width;
The step of arranging the rhombus having the width calculated in the calculating step regularly with the rib interposed therebetween so as to cover the predetermined substantially rectangular region, the rhombus being aligned with the end of the predetermined approximately rectangular region A laying step of arranging the rhombuses so that a polygon constituted by a part of the sides is symmetrical to a polygon of an opposing end;
A data generation step of generating mesh pattern data having the rhombus arranged in the laying step and the polygon as a hole is provided.

The method of creating the mesh pattern data is further
The polygon formed at the left and right ends or the top and bottom ends among the ends of the predetermined substantially rectangular area, and the area of the polygon formed at the ends excluding the corners is the area of the rhombus And an adjustment step for adjusting to have the same area.

In the adjusting step, the width of the rhombus is adjusted by expanding or contracting in the vertical direction or the horizontal direction.

The method of creating the mesh pattern data is further
When a predetermined inscribed circle cannot be drawn on the polygon, the method includes a merging step of merging the polygon with the rhombus adjacent to the polygon.

The method of creating mesh pattern data according to the present invention is a method of creating mesh pattern data of a mesh pattern in which a plurality of rhombus holes having the same side length are arranged in a predetermined substantially rectangular region,
A predetermined rhombus width that fits in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the vertical or horizontal width being equal to or greater than the predetermined width A calculation step for calculating the width of the rhombus close to a predetermined width;
A laying step of regularly arranging rhombuses having a width calculated in the calculation step with the ribs sandwiched therebetween so as to cover the predetermined substantially rectangular region;
Adjustment that adjusts the polygon composed of the end of the predetermined substantially rectangular area and the side of the rhombus arranged in the laying step to be symmetrical to the polygon of the opposite end Steps,
And a data generation step of generating mesh pattern data having a rhombus and a polygon adjusted in the adjustment step as holes.

  The mask according to the present invention is characterized in that a large number of print patterns having substantially rectangular regions of different sizes or directions are provided with the mask print pattern mesh described above.

  The two-layer structure mask according to the present invention has a layer having a mesh for printing pattern opening of the mask described above in a large number of printing patterns having different sizes or directions of substantially rectangular regions, and is superimposed on one surface of the layer having the mesh. And a layer having a printing opening without a mesh in a portion overlapping the printing pattern opening on which the mesh is formed.

A data input step for inputting mesh pattern data generated by the mesh pattern data creation method described above;
Based on the mesh pattern data input in the data input step, the resist applied to the substrate is exposed and developed to form a resist pattern corresponding to the opening portion of the mesh pattern;
Except for the portion where the resist pattern is formed in the exposure and development step, a metal layer generation step for forming a metal layer on the base material by plating; and
A removal peeling step of removing the resist pattern and peeling the substrate from the metal layer is provided, thereby forming a mesh based on the mesh pattern data in a portion to be a printing pattern opening.

The two-layer structure mask manufacturing method according to the present invention is a two-layer structure mask manufacturing method for manufacturing a layer having a mesh-free printing opening on a layer having a mesh manufactured by the mask manufacturing method described above,
It is characterized in that a layer having a mesh-free printing opening is formed on one surface of the layer having the mesh so that a printing opening without a mesh overlaps with a printing pattern opening in which a mesh is formed.

  In the mesh according to the present invention, holes having the same shape are regularly formed in the central portion, and the ink paste can be uniformly applied to the central portion. In addition, the mesh according to the present invention is formed with symmetrically formed holes at the opposite end portions, and the ink paste can be uniformly applied between the opposite end portions. Furthermore, since the mesh according to the present invention has holes regularly formed up to the end, there is no portion with low strength.

Embodiment 1 FIG.
In this embodiment, a mesh 1 in which a plurality of hexagonal holes (an example of a regular figure) 11 are formed in a predetermined rectangular region 10 in a honeycomb structure will be described.

FIG. 1 is a diagram showing an opening shape of a mesh 1 according to this embodiment.
As shown in FIG. 1, a mesh 1 according to this embodiment has a plurality of identical hexagonal holes 11 formed in a honeycomb structure in a designated X × Y rectangular region 10. A hexagonal hole 11 is formed in the central portion of the rectangular region 10, and a rectangular region 10 is formed at one end of the rectangular region 10 (peripheral portion) and a side of the hexagon that forms the hexagonal hole 11. Polygon (an example of a deformed figure) holes 12 and 13 are formed by the sides. In particular, in addition to the hexagonal hole 11, a trapezoidal hole 12 is formed at the end in the vertical direction (Y direction) excluding the end in the horizontal direction (X direction). Further, a pentagonal hole 13 is formed at the end in the horizontal direction. A rib 14 having a predetermined width is formed between the holes 11, 12, and 13.
Polygonal holes 12 and 13 formed at the ends of the rectangular region 10 are symmetrical with the polygonal holes 12 and 13 formed at the opposite ends. The opening area of the pentagonal hole 13 formed at the lateral end of the rectangular region 10 is the same as the opening area of the hexagonal hole 11. Further, the trapezoidal hole 12 formed at the vertical end of the rectangular region 10 has a size that is equal to or larger than the machining limit value (an inscribed circle indicating the machining limit value can be drawn).
As described above, since the mesh 1 according to this embodiment has a plurality of identical hexagonal holes 11 formed in a honeycomb structure in the central portion of the rectangular region 10, the entire central portion of the rectangular region 10 is formed. Ink paste can be applied uniformly. Further, since the pentagonal hole 13 having the same opening area as the hexagonal hole 11 is formed at the lateral end of the rectangular area 10, the ink paste is uniformly applied together with the central part of the rectangular area 10. Can do.
Furthermore, the mesh 1 according to this embodiment has high strength because the pores are formed in a honeycomb structure.
It should be noted that the same opening area is sufficient as long as the above effects are obtained.

Further, the hexagonal hole 11 is formed in a regular hexagon in which a side forming a longitudinal end of the rectangular region 10 and a part of the side are parallel, or a hexagon in which the regular hexagon is expanded and contracted in the horizontal direction. Yes. Therefore, the hexagonal hole 11 does not have a side parallel to the side forming the lateral end of the rectangular region 10. Since some of the sides of the hexagonal hole 11 are parallel to the side forming the vertical end of the rectangular region 10, some of the sides of the trapezoidal hole 12 and the pentagonal hole 13 also have vertical ends. It is parallel to the formed side. Therefore, except for the sides formed by the sides forming the lateral ends of the rectangular region 10 among the sides of the pentagonal holes 13, the trapezoidal holes 12 and the pentagonal holes 13 are the sides forming the lateral ends. Does not have parallel sides.
Printing is performed by sliding a squeegee using a screen printing mask manufactured using the mesh 1. In this case, if a hole having a side perpendicular to the moving direction of the squeegee exists in the mesh 1, there is a possibility that the ink paste is not sufficiently filled into the hole. However, the mesh 1 does not have a hole having a side parallel to the vertical direction of the rectangular region 10 except for the side formed by the side forming the lateral end of the rectangular region 10. Therefore, if the squeegee is moved in the lateral direction of the rectangular area 10, the ink can be sufficiently filled in each hole.

  In addition, the rectangular area | region 10 should just be a substantially rectangular shape, and does not need to be a perfect rectangle. For example, the rectangular region 10 may be rounded at the corners of the rectangle.

Next, a method for creating mesh pattern data of the mesh 1 according to this embodiment will be described.
FIG. 2 is a functional block diagram illustrating functions of the mesh pattern creation device 100 that creates mesh pattern data of the mesh 1. FIG. 3 is a flowchart showing a flow of mesh pattern data creation processing.
The mesh pattern creation device 100 includes a data input unit 101, a calculation unit 102, a laying unit 103, a merging unit 104, an adjustment unit 105, and a data generation unit 106. The mesh pattern creation device 100 creates mesh pattern data by operating as follows.
<S11: Data Input Step>
The data input unit 101 inputs the vertical and horizontal widths (X and Y lengths) of the rectangular area 10, the minimum size of the hexagonal hole 11, the width of the rib 14, and the processing limit value. Is stored in the storage device.
In the following description, the size of the hexagonal hole 11 is represented by a hexagonal width. The hexagonal width is the distance between two opposing sides of the hexagon (S1 in FIG. 1). If the hexagon is not a regular hexagon, the width of the hexagon is the distance between two sides facing each other in the vertical direction of the rectangular region 10.
Also, the maximum number of holes (number of meshes) to be formed per unit area (for example, 1 inch) may be input without inputting the minimum size of the hexagonal holes 11. In this case, the minimum size of the hexagonal hole 11 can be calculated from the inputted number of meshes and the width of the rib 14.
<S12: Calculation step>
The calculation unit 102 is a regular hexagonal width that fits exactly (just) when arranged in the vertical direction of the rectangular area 10 with the rib 14 having a specified width interposed therebetween, and the vertical width is equal to or greater than the specified width. The processing device calculates a regular hexagonal width S1 that is closest to the width specified in.
That is, as illustrated in FIG. 4, the calculation unit 102 starts from a regular hexagon having a part of the side forming the upper end of the rectangular region 10 as one side, and sandwiches the rib 14 having a specified width therebetween. A regular hexagon having the same width is arranged, and a width S1 of a regular hexagon ending with a regular hexagon having a part of the side forming the lower end of the rectangular region 10 as one side is calculated. In particular, the calculation unit 102 calculates the width S1 closest to the input width that is greater than or equal to the hexagonal width input in the data input step.
<S13: laying step>
The laying part 103 arranges the regular hexagons having the widths calculated in the calculation step in a honeycomb structure so as to cover the rectangular region 10 with a processing device while sandwiching the ribs 14 therebetween.
For example, as shown in FIG. 5, regular hexagons are arranged in order from the lateral center of the rectangular region 10. That is, first, as shown in FIG. 5A, the first columns 15 are arranged so that the horizontal center of the rectangular region 10 and the horizontal center of the regular hexagon coincide. The first row 15 starts from a regular hexagon having a width S1 with a part of the side forming the upper end of the rectangular region 10 as one side, and a rib S14 having a specified width is sandwiched therebetween. This is a line ending with a regular hexagon having a width S1 in which regular hexagons are arranged and a part of the side forming the lower end of the rectangular region 10 is one side. Next, as shown in FIG. 5B, the second row 16 is arranged on both the left and right sides of the first row 15 arranged in advance with the ribs 14 therebetween. The second row 16 starts from a trapezoid having a width S2 with a part of the side forming the upper end of the rectangular region 10 as one side, and is a regular six of the width S1 with a rib 14 having a specified width interposed therebetween. This is a row ending with a trapezoid with a width S2 in which squares are arranged and a part of the side forming the lower end of the rectangular region 10 is one side. Here, the trapezoid is a trapezoid formed from a part of a regular hexagon having a width S 1 and a side forming an end of the rectangular region 10. The width S2 is a width obtained by subtracting 1/2 of the width L of the rib 14 from 1/2 of the width S1 (S2 = (S1-L) / 2). Then, as shown in FIG. 5C, the first row 15 and the second row 16 are alternately arranged with the ribs 14 therebetween until the entire rectangular region 10 is covered.
<S14: Merge step>
When the polygon formed at the lateral end of the rectangular region 10 is less than the processing limit value, the merging unit 104 merges the regular hexagon and the polygon adjacent to the polygon.
For example, as shown in FIG. 6, the polygon formed at the end in the horizontal direction is merged with the adjacent regular hexagon. That is, as shown in FIG. 6A, when the polygon formed at the end portion in the horizontal direction is small and less than the processing limit value, first, the polygon formed at the end portion in the horizontal direction is deleted. Next, a side parallel to the longitudinal end of the adjacent regular hexagon or trapezoid is extended to the lateral end of the rectangular region 10. Then, as shown in FIG. 6B, a large polygon is formed from the adjacent regular hexagonal side and the side forming the lateral end of the rectangular region 10.
<S15: Shape area adjustment step>
The adjustment unit 105 adjusts the polygonal area formed at the end in the horizontal direction with the processing device so that the polygonal area is the same as the hexagonal area.
The adjustment unit 105 expands and contracts the polygon formed at the end in the horizontal direction in the horizontal direction, and converts the regular hexagon into the horizontal direction as the polygon formed at the end in the horizontal direction expands and contracts in the horizontal direction. The area is adjusted by expanding and contracting (shape adjustment step).
For example, as shown in FIG. 7, when the area of the polygon formed at the lateral end is larger than the area of the regular hexagon, the polygon formed at the lateral end is contracted in the lateral direction. . Further, the regular hexagon is extended in the horizontal direction by the amount of contraction of the polygon formed at the end in the horizontal direction. And as shown in FIG.7 (b), the area of the polygon of the edge part of the horizontal direction shrunk in the horizontal direction and the area of the hexagon extended in the horizontal direction are made the same area (area adjustment step). .
<S16: Data generation step>
The data generation unit 106 generates mesh pattern data having hexagons and polygons adjusted in the shape adjustment step and the area adjustment step as holes, and stores them in the storage device.
By producing the mesh 1 based on the mesh pattern data, the mesh 1 as shown in FIG. 1 can be produced. A method for manufacturing the mesh 1 will be described in a later embodiment.

In the above description, regular hexagons are arranged in order from the center in the horizontal direction in the laying step (S13). However, as shown in FIG. 8, regular hexagons may be arranged in order from the end of the rectangular area 10 (left end in FIG. 8). First, as shown in FIG. 8A, a pentagonal row having a width S <b> 1 arranged so as to just fit in the vertical direction of the rectangular region 10 is arranged at the left end of the rectangular region 10. Here, the pentagon is a pentagon formed by a part of a regular hexagon having a width S1 and a side forming an end of the rectangular region 10. That is, as shown in FIG. 8 (a), the rib 14 having a specified width is sandwiched between the pentagon having the width S1 with a part of the side forming the upper end of the rectangular region 10 as one side. However, the pentagons having the width S1 are arranged, and the pentagons are arranged so as to end with the pentagon having the width S1 with a part of the side forming the lower end of the rectangular region 10 as one side. Next, as shown in FIG. 8B, the ribs 14 are arranged between the second row 16 and the pentagonal row arranged first. Next, as shown in FIG. 8C, the ribs 14 are arranged between the first row 15 and the second row 16 arranged in advance. Then, as shown in FIG. 8D, the process of arranging the first row 15 and the second row 16 alternately with the ribs 14 therebetween is continued until the entire rectangular region 10 is covered.
Thus, when regular hexagons are arranged in order from the left side, the polygons formed at the end portions in the horizontal direction may not be line-symmetric. In this case, the adjusting unit 105 has a shape in which a polygon formed by the sides forming the rectangular region 10 and a part of a regular hexagon arranged in the laying step is symmetrical with the polygons at the opposite ends. The shape adjustment step for adjusting the hexagons arranged in the laying step by the processing device is executed after the laying step (S13) or the merging step (S14).
For example, as illustrated in FIG. 9, the adjustment unit 105 adjusts the polygon formed in the horizontal direction to be line symmetric by shifting the regular hexagon and the polygon in the horizontal direction. That is, as shown in FIG. 9A, it is assumed that the polygons at the lateral ends arranged in the laying step are asymmetric. That is, in FIG. 9A, the polygon at the left end is larger than the polygon at the right end. Therefore, the regular hexagon and the polygon are shifted to the left. And as shown in FIG.9 (b), the polygon of the edge part of a horizontal direction is made into line symmetry.
Moreover, as shown in FIG. 10, the adjustment part 105 may adjust the polygon formed in the horizontal direction so that it may become line symmetrical by expanding / contracting the hexagonal width in the horizontal direction. That is, as shown in FIG. 10A, it is assumed that the polygons at the lateral ends arranged in the laying step are asymmetric as in FIG. 9A. That is, in FIG. 10A, the polygon at the left end is larger than the polygon at the right end. Therefore, as shown in FIG. 10 (b), the regular hexagon is extended to the left, and the polygon at the end in the horizontal direction is line-symmetric.

  In addition, the regular hexagonal spread method in the spread step (S13) is not limited to the method described above, and any method may be used. However, if it is not the method described above, there is a possibility that the polygon formed at the end in the vertical direction is less than the processing limit value. In this case, in the merging step (S14), it is sometimes necessary to perform merging not only on the horizontal ends but also on the vertical ends. In addition, there is a possibility that the polygon formed not only at the horizontal end but also at the vertical end is not line symmetric with the polygon formed at the opposite end. If the polygon formed at the end in the vertical direction is not line symmetric with the polygon formed at the opposite end, it becomes line symmetric after the laying step (S13) or the merging step (S14). Need to be adjusted.

In addition, the width S2 of the trapezoidal hole 12 formed at the longitudinal end of the second row 16 is determined by using the hexagonal width S1 and the width L of the rib 14 as "S2 = (S1-L)". / 2 ".
That is, the vertical width Y of the second column 16 is “Y = 2S1 + 2S2 + 3L”, and the vertical width Y of the first column 15 is “Y = 3S1 + 2L”. Therefore, when “2S1 + 2S2 + 3L = 3S1 + 2L” is solved for “S2”, the above “S2 = (S1−L) / 2” is obtained.
Therefore, when specifying the minimum value S of the hexagonal width in the data input step (S11), it is necessary to specify a value that satisfies (S−L) / 2 ≧ K (K is a machining limit value). If the minimum value S of the hexagonal width that does not satisfy the above formula is specified, the merge step (S14) must be merged not only in the horizontal direction but also in the vertical direction. There is.

  Further, according to the method described above, as shown in FIG. 11A, not only when three or more hexagons are inserted in the vertical direction of the rectangular region 10, but also shown in FIGS. 11B and 11C. As described above, even when only one or two pieces are included, mesh pattern data can be created.

Embodiment 2. FIG.
In this embodiment, a mesh 2 in which a plurality of circular holes (an example of a regular figure) having the same opening area is formed in a predetermined rectangular region 10 will be described.

FIG. 12 is a diagram showing the opening shape of the mesh 2 according to this embodiment.
As shown in FIG. 12, in the mesh 2 according to this embodiment, a plurality of circular holes 21 having the same opening area are regularly arranged at the center of a designated X × Y rectangular region 10. . At the end of the rectangular area 10 excluding the corners (four corners), a part of the circumference forming the circular hole 21 and a rectangle having a part of the side forming the rectangular area 10 as one side (deformed shape). A hole 22 of an example of a figure) is formed. The corner of the rectangular area 10 is substantially fan-shaped (a deformed figure) by an L-shaped figure having a part of the circumference forming the circular hole 21 and part of two sides forming the rectangular area 10 as sides. In one example) is formed. A circular auxiliary hole 24 is formed between the holes 21, 22, and 23. Further, ribs having a predetermined width or more are formed between the holes 21, 22, 23, 24.
Further, the tongue-shaped hole 22 and the substantially fan-shaped hole 23 formed at the end of the rectangular region 10 are respectively symmetrical with the tongue-shaped hole 22 and the substantially fan-shaped hole 23 formed at the opposite end. It is. In particular, the tongue-shaped hole 22 formed at the end excluding the corner of the rectangular region 10 has the same opening area as that of the circular hole 21. Moreover, each hole 21, 22, 23, 24 is a magnitude | size beyond a process limit value.

As described above, in the mesh 2 according to this embodiment, since the plurality of circular holes 21 having the same opening area are regularly arranged in the central portion of the rectangular region 10, the entire central portion of the rectangular region 10 is arranged. Ink paste can be applied uniformly. In addition, since a tongue-like hole 22 having the same opening area as the circular hole 21 is formed at the end of the rectangular area 10 except for the corners, the ink paste can be uniformly applied together with the central part of the rectangular area 10. Can do.
Further, the mesh 2 according to this embodiment has high strength because holes are regularly formed.

Next, a method for creating mesh pattern data of the mesh 2 according to this embodiment will be described.
FIG. 13 is a functional block diagram illustrating functions of the mesh pattern creation device 100 that creates mesh pattern data of the mesh 2. FIG. 14 is a flowchart showing a flow of mesh pattern data creation processing.
The configuration of the mesh pattern creation device 100 that creates the mesh pattern data of the mesh 2 includes a deformation unit 107 and an auxiliary hole formation unit 108 in addition to the function of the mesh pattern creation device 100 according to the first embodiment. The mesh pattern creation device 100 creates mesh pattern data by operating as follows.
<S21: Data Input Step>
The data input unit 101 uses, as input data, the vertical and horizontal widths (X and Y lengths) of the rectangular region 10, the minimum size of the circular hole 21, the width of the rib 14, and the processing limit value. Input and store in storage.
In the following description, the size of the circular hole 21 is represented by the diameter of the circle.
Further, the maximum number (mesh number) of holes to be formed per unit area (for example, 1 inch) may be input without inputting the minimum size of the circular holes 21. In this case, the minimum size of the circular hole 21 can be calculated from the inputted number of meshes and the width of the rib 14.
<S22: Calculation step>
The calculation unit 102 has a diameter S3 of a circle that fits in the vertical direction and the horizontal direction of the rectangular area 10 with the rib 14 having the specified width interposed therebetween, and the diameter of the circle is equal to or greater than the specified length. The diameter S3 of the circle closest to the specified length is calculated by the processing device.
That is, as shown in FIG. 15, the calculation unit 102 starts from a circle that is in contact with the side that forms the upper end of the rectangular region 10, arranges the same circles with a rib 14 having a specified width interposed therebetween, Diameter S3 of a circle ending with a circle in contact with the side forming the lower end of the region 10, starting from a circle in contact with the side forming the left end of the rectangular region 10, and sandwiching the rib 14 having a width therebetween The same circle is arranged, and the diameter S3 of a circle ending with a circle in contact with the side forming the right end of the rectangular region 10 is calculated. In particular, the calculation unit 102 calculates the diameter S3 of the circle closest to the input diameter that is greater than or equal to the diameter input in the data input step.
<S23: laying step>
The laying portion 103 regularly arranges the circles having the diameter S3 calculated in the calculation step by the processing device with the ribs 14 interposed therebetween so as to cover the rectangular region 10.
For example, as shown in FIG. 16, the spreader 103 arranges the circles so as to be exactly within the rectangular region 10. That is, starting from a circle that touches the edge that forms the upper end of the rectangular area 10, the same circle is arranged with the rib 14 having the specified width in between, and contacts the edge that forms the lower end of the rectangular area 10. Arrange the columns that fit in the vertical direction that end in a circle so that they just fit in the horizontal direction. That is, the column that fits in the vertical direction starts from the column that touches the edge that forms the left end of the rectangular region 10, and the same column is arranged with the rib 14 having the specified width in between, to the right of the rectangular region 10. Arrange them so that they end in a row that touches the edge that forms the end of.
<S24: Deformation step>
The deformation | transformation part 107 deform | transforms the circle | line | column arranged in the edge part except the corner | angular of the rectangular area | region 10 at a padding step, and produces | generates the tongue-like figure which touches an edge part with a line. Further, the deforming unit 107 deforms the circles arranged at the corners of the rectangular region 10 in the laying step, and generates a figure that touches the two end portions with a line by the processing device.
For example, as illustrated in FIG. 17, the deforming unit 107 deforms the circles arranged at the end of the rectangular region 10. First, as shown in FIG. 17A, a line (parallel line) that is a line that divides the circle arranged at the end of the rectangular region 10 in half and is parallel to the side that forms the end is drawn. Next, as shown in FIG. 17B, a perpendicular is drawn from the end of the parallel line to the side forming the end of the rectangular region 10. Then, as shown in FIGS. 17 (c) and 17 (d), the figure is composed of a part of the side forming the end of the rectangular area 10, a parallel line and a perpendicular, and a part of the circumference. Form a figure. That is, the rectangle 25 having one side as a part of the side forming the predetermined rectangular area is connected to a part of the circle arranged at the end of the rectangular area 10. As a result, the circles arranged at the ends other than the corners of the rectangular region 10 become tongue-like figures that touch the ends with lines, and the circles arranged at the corners are substantially fan-shaped that touch the two ends with lines. It becomes a figure.
<S25: Area adjustment step>
The adjustment unit 105 is adjusted by the processing device so that the area of the circle arranged in the central part (other than the end part) of the rectangular region 10 and the area of the tongue-like body generated by the deformation step are the same area. To do.
For example, the adjustment unit 105 is formed at the end portion in accordance with the enlargement of the circle arranged in the central portion while the diameter of the circle arranged in the central portion of the rectangular region 10 is increased to enlarge the circle. By reducing the tongue, the area of the circle and the tongue is adjusted to be the same.
<S26: Auxiliary hole forming step>
The auxiliary hole forming unit 108 forms a figure to be the auxiliary hole 24 in the rib 14 between the figures formed in the rectangular region 10.
That is, as shown in FIG. 18A, the rib 14 having the specified width L1 is formed between the adjacent graphic in the horizontal direction and the adjacent graphic in the vertical direction. A rib 14 having a width L2 wider than the width L1 is formed between the diagonally adjacent figures. On the rib 14 having the width L2, there may be a case where a figure having a size larger than the processing limit value can be formed. In other words, even when a figure having a size larger than the processing limit value is formed, a rib having a width greater than or equal to the width L1 may be left between the figures. Therefore, when a figure having a size larger than the machining limit value can be formed on the rib 14 having the width L2, a figure having a size larger than the machining limit value is formed. In FIG. 18B, a circle having a size equal to or larger than the machining limit value is formed as an example.
<S27: Data generation step>
The data generation unit 106 generates mesh pattern data in which the figure formed in the circle, tongue, and corner adjusted in the adjustment step is used as a hole, and the figure formed in the auxiliary hole formation step is used as the auxiliary hole 24 to generate a storage device. To remember.
By producing the mesh 2 based on the mesh pattern data, the mesh 2 as shown in FIG. 12 can be produced. A method for manufacturing the mesh 2 will be described in a later embodiment.

In the above description, in the calculation step (S22), the calculation unit 102 has a diameter of a circle that fits in both the vertical direction and the horizontal direction, and is input at a diameter greater than or equal to the diameter input in the data input step. The diameter S3 of the circle closest to is calculated. However, the calculation unit 102 may obtain a diameter of a circle that does not fit in the horizontal direction but just fits in the vertical direction.
In this case, as shown in FIG. 19 (a), in the laying step (S23), the laying portion 103 is just fit in the horizontal direction by widening the width of the rib 14 between the horizontal circle. Arrange the circles with the calculated diameter S3. That is, the width L4 of the rib 14 in the horizontal direction is made wider than the width L3 of the rib 14 in the vertical direction (specified width of the rib 14) shown in FIG.
Alternatively, as shown in FIG. 19B, the spreader 103 extends a circle having a diameter S3 in the lateral direction to form an ellipse without increasing the width of the rib 14 between the lateral circles. The ellipses may be arranged so that they just fit in the horizontal direction.

  Further, in the area adjustment step (S25), the adjusting unit 105 does not enlarge the circle arranged in the central part of the rectangular region 10, but widens the rib 14 and widens the rib 14. Accordingly, the area of the circle and the tongue may be adjusted to be the same by reducing the tongue formed at the end.

Further, as shown in FIG. 12, the auxiliary hole 24 is formed in a circular shape between the holes 21, 22 and 23. However, the auxiliary hole 24 is not limited to a circular shape, and may be a diamond shape as shown in FIG. 20A or a substantially cross shape as shown in FIG. However, the width of the rib 14 should not be less than the width specified in the data input step.
By forming the auxiliary hole 24 in such a shape, the width of the rib 14 can be reduced to a specified width as a whole.

Further, in the above description, in the laying step (S23), it is assumed that the rows that just fit in the vertical direction are arranged so that they just fit in the horizontal direction. However, as shown in FIG. 21, the rows that just fit in the vertical direction and the rows in which the circles are shifted by about a half circle in the vertical direction may be alternately arranged in a staggered manner.
In the case of alternately arranging a row that fits in the vertical direction and a row in which a circle is shifted by a semicircle in the vertical direction, the width of the ribs 14 formed between the circles is narrowed as shown in FIG. You can also.

In addition, as shown in FIG. 23 (a), when a row that just fits in the vertical direction and a row in which a circle is shifted by a semicircle in the vertical direction are alternately arranged, a semicircle ( A crescent-shaped figure may be formed. And as shown in FIG.23 (b), you may perform a deformation | transformation step (S24) and an area adjustment step (S25), leaving a semicircle.
When only a semicircular figure less than the processing limit value can be formed, the semicircular figure may be merged with a circle adjacent to the semicircular figure in the vertical direction, as shown in FIG. And as shown in FIG.24 (b), you may perform a deformation | transformation step (S24) and an area adjustment step (S25).

  In addition, as shown in FIG. 22, when the width of the ribs 14 formed between the respective circles is narrowed and the circles are arranged in a staggered shape, when deformed into a tongue-like figure in the deformation step (S24), In some cases, the rib 14 having a specified width cannot be formed between the adjacent circles in the horizontal direction. Therefore, as shown in FIG. 25, the end portion of the row in which the circles are shifted by a semicircle in the vertical direction has a rib 14 having a specified width between a part of the circle and the adjacent circle. A narrow rectangle 26 that can be formed may be connected to form a tongue-like body. That is, as shown in FIG. 25B, the width L5 of the rib 14 between the circles is equal to the width L6 of the rib 14 between the rectangles (L5 = L6), or the circle The end of the row in which the circles are arranged shifted by a semicircle in the vertical direction so that the width L6 of the rib 14 between the rectangle and the rectangle is larger than the width L5 of the rib 14 between the circle and the circle (L5 <L6) A narrow rectangle 26 is connected to the circle of the part.

Embodiment 3 FIG.
In this embodiment, a mesh 3 in which a plurality of rhombus (an example of a regular figure) -shaped hole 31 having the same side length (width) S5 is formed in a predetermined rectangular region 10 will be described.

FIG. 26 is a diagram showing an opening shape of the mesh 3 according to this embodiment.
As shown in FIG. 26, in the mesh 3 according to this embodiment, a diamond-shaped hole 31 having a plurality of sides having the same length (width) S5 is regularly formed in a designated X × Y rectangular region 10. Is formed. A rhombus hole 31 is formed at the center of the rectangular area 10, and one end of the rhombus forming the rhomboid hole 31 and one side forming the rectangular area 10 are formed at the end (peripheral part) of the rectangular area 10. Polygonal holes (an example of a deformed figure) 32 and 33 are formed by the portion. A pentagonal hole 32 having a part of the side forming the rectangular region 10 as one side is formed at the end of the rectangular region 10 excluding the corners (four corners). At the corner of the rectangular region 10, a pentagonal hole 33 is formed with a part of two sides forming the rectangular region 10 as one side. A rib 14 having a predetermined width is formed between the holes 31, 32 and 33.
The polygonal holes 32 and 33 formed at the end portions of the rectangular region 10 are symmetrical with the polygonal holes 32 and 33 formed at the opposite end portions. In particular, the opening area of the pentagonal hole 32 formed at the end in the vertical direction excluding the corners of the rectangular region 10 is the same as the opening area of the rhombic hole 31.
As described above, since the mesh 3 according to this embodiment has a plurality of identical rhombic holes 31 formed in the central portion of the rectangular region 10, the ink paste is uniformly applied to the entire central portion of the rectangular region 10. Can be applied. In addition, since the pentagonal hole 32 having the same opening area as the rhomboid hole 31 is formed at the end in the vertical direction excluding the corners of the rectangular region 10, the ink paste is uniformly applied together with the central portion of the rectangular region 10. can do.
In addition, the mesh 3 according to this embodiment has high strength because holes are regularly formed.

Next, a method for creating mesh pattern data of the mesh 3 according to this embodiment will be described.
FIG. 27 is a flowchart showing a flow of mesh pattern data creation processing.
The functional configuration of the mesh pattern creation device 100 that creates mesh pattern data of the mesh 3 is the same as that of the mesh pattern creation device 100 according to the first embodiment. The mesh pattern creation device 100 creates mesh pattern data by operating as follows.
<S31: Data Input Step>
The data input unit 101 uses, as input data, the vertical and horizontal widths (X and Y lengths) of the rectangular region 10, the minimum size of the diamond-shaped holes 31, the width of the ribs 14, and the processing limit value. Input and store in storage.
In the following description, the rhombus is a figure obtained by inclining a square by 45 degrees. The size of the rhomboid hole 31 is represented by the length of one side of the rhombus (S4 in FIG. 26). Here, since the rhombus is a figure in which the square is inclined by 45 degrees, the width of the rhombus (the length of the diagonal line, S5 in FIG. 26) can be calculated from the length S4 of one side of the input rhombus. That is, approximately 1.41 times the input length S4 of the side is the rhombus width S5.
Further, the maximum number (number of meshes) of holes to be formed per unit area (for example, 1 inch) may be input without inputting the minimum size of the diamond-shaped holes 31. In this case, the minimum size (length S4 of one side) of the diamond-shaped hole 31 can be calculated from the input number of meshes and the width of the rib 14.
<S32: Calculation step>
The calculation unit 102 has a predetermined rhombus width S5 that fits in the vertical direction of the rectangular area 10 with the ribs 14 having the specified width interposed therebetween, and is the largest in the specified width at or above the specified width. The close diamond width S5 is calculated by the processor.
That is, as shown in FIG. 28, the calculation unit 102 starts with a rhombus that is in contact with the side that forms the upper end of the rectangular region 10, and arranges rhombuses with the same width while sandwiching the ribs 14 with a specified width therebetween. Then, the width S5 of the rhombus ending with the rhombus in contact with the side forming the lower end of the rectangular area 10 is calculated. In particular, the calculation unit 102 calculates the width S5 closest to the input width that is equal to or larger than the rhombus width input in the data input step.
<S33: laying step>
The laying portion 103 regularly arranges the diamonds having the widths calculated in the calculation step by the processing device with the ribs 14 interposed therebetween so as to cover the rectangular region 10.
For example, as shown in FIG. 29, polygons and rhombuses are arranged in order from the left and right center of the rectangular area 10. That is, first, as shown in FIG. 29 (a), a rhombus row having a width S5 calculated in the calculation step so that the left and right centers of the rectangular region 10 and the left and right centers of the rhombus coincide with each other, Line up diamonds that fit exactly in the vertical direction. The rhombus rows that just fit in the vertical direction start from a rhombus of width S5 that touches the edge forming the upper end of the rectangular area 10, and the rhombuses of width S5 are arranged with the ribs 14 of the specified width in between. This is a row ending with a diamond having a width S5 in contact with the side forming the lower end of the rectangular region 10. Next, as shown in FIG. 29 (b), rows having triangles at both ends are arranged with ribs 14 having widths designated on both the left and right sides of the previously arranged rhombus rows. A row having triangles at both ends means that the vertical width of one side of the upper edge of the rectangular region 10 is one half of the width S5 minus one half of the width L of the rib 14. Starting from a triangle having a width, a rhombus having a width S5 is arranged while sandwiching a rib 14 having a specified width therebetween, and a vertical width having a side that forms the lower end of the rectangular region 10 is a width S5. This is a row ending with a triangle having a width obtained by subtracting ½ of the width L of the rib 14 from ½ of. And as shown in FIG.29 (c), the rhombus row | line | column and the row | line | column which has a triangle at both ends are arranged alternately until the whole rectangular area | region 10 is covered.
<S34: Merge step>
When the polygon formed at the end in the horizontal direction of the rectangular area 10 is less than the processing limit value, the merging unit 104 merges the polygon and the adjacent rhombus or trapezoid with the polygon by the processing device.
For example, as shown in FIG. 30, the polygon formed at the end in the horizontal direction is merged with the adjacent rhombus and polygon (triangle). That is, as shown in FIG. 30A, when the polygon formed at the end portion in the horizontal direction is small and less than the processing limit value, the polygon formed at the end portion in the horizontal direction is first deleted. Next, the side parallel to the side forming the vertical end of the rectangular region 10 is extended from the vertical vertex of the adjacent rhombus and polygon (triangle) to the horizontal end of the rectangular region 10. Then, as shown in FIG. 30 (b), a large polygon (pentagon and trapezoid) is formed from the sides of the adjacent rhombus and polygon (triangle) and the side forming the lateral end of the rectangular region 10. .
In FIG. 30, the column adjacent to the polygon formed at the end portion in the horizontal direction is a column made of a rhombus and a polygon (triangle). However, the adjacent column may be a column in which only rhombuses are formed. In this case as well, the polygon formed at the end in the horizontal direction is first deleted. Next, the side parallel to the side forming the vertical end of the rectangular region 10 is extended from the vertical apex of the adjacent rhombus to the horizontal end of the rectangular region 10. Then, a large polygon (pentagon) may be formed from the side of the adjacent rhombus and the side forming the lateral end of the rectangular region 10.
<S35: Area adjustment step>
The adjustment unit 105 adjusts the area of the polygon (triangle) formed at the end in the vertical direction excluding the end in the horizontal direction by the processing device so that the area is the same as the area of the rhombus.
For example, in the state shown in FIG. 31 (a), as shown in FIG. 31 (b), the vertical end of the rectangular region 10 from the lateral end point of the rhombus formed at the vertical end. A perpendicular is drawn to the part to form a pentagon. Next, as shown in FIG. 31 (c), each rhombus and the pentagon at the end in the horizontal direction are elongated in the vertical direction. Further, the pentagon formed at the end portion in the vertical direction is reduced by the amount of expansion of the rhombus and the pentagon. Then, the area of the reduced pentagon is made the same as the area of the enlarged rhombus.
<S36: Rib adjustment step>
The adjusting unit 105 further adjusts the wide rib 14 formed between the pentagon and the pentagon to the rib 14 having the width specified in the data input step by the processing device.
As shown in FIG. 32 (a), the width L8 of the rib 14 formed between the pentagon and the pentagon is the width L7 of the rib 14 formed between the rhombus and the rhombus, or between the rhombus and the pentagon (specified). The width of the rib 14 is wider. Therefore, as shown in FIG. 32B, the adjusting unit 105 increases the area of the pentagon so that the width L7 of the rib 14 formed between the pentagon and the pentagon is changed to the specified width L7 of the rib 14. . In addition, since the area of the pentagon formed at the end is expanded, the pentagon formed at the end does not have the same area as the rhombus. Therefore, the rhombus is enlarged and the pentagon formed at the end is reduced so that the area of the pentagon formed at the end excluding the corner is the same as that of the rhombus.
<S37: Data generation step>
The data generation unit 106 generates mesh pattern data having the rhombus and the pentagon adjusted in the merging step (S34) and the rib adjustment step (S36) as holes, and stores them in the storage device.
By manufacturing the mesh 3 based on the mesh pattern data, the mesh 3 as shown in FIG. 26 can be manufactured. A method for manufacturing the mesh 3 will be described in a later embodiment.

In the above description, in the laying step (S33), polygons and rhombuses are arranged in order from the center in the horizontal direction. However, as in the first embodiment, as shown in FIG. 33, rhombuses may be arranged in order from the end of the rectangular area 10 (left end in FIG. 33). First, as shown in FIG. 33A, the left end of the rectangular area 10 is a pentagon having the same area as the rhombus calculated in the calculation step (S32), and the vertical width is calculated in the calculation step. A row having a pentagon having a width S5 at the center and a trapezoid having a width in the longitudinal direction obtained by subtracting 1/2 of the width L of the rib 14 from 1/2 of the width S5 is arranged. Next, as shown in FIG. 33 (b), a diamond-shaped row is arranged next to the previously arranged row with the ribs 14 therebetween. Next, as shown in FIG. 33 (c), a row having triangles at both ends is arranged next to the rhombus row with the ribs 14 therebetween. Then, as shown in FIG. 33 (d), the process of arranging the rows having triangles at both ends and the rhombus rows alternately with the ribs 14 therebetween is continued until the entire rectangular area 10 is covered.
As described above, when the rhombuses are arranged in order from the left side, the polygon formed at the end in the horizontal direction may not have a line-symmetric shape. In this case, the adjustment unit 105 is configured such that the polygon formed by the sides forming the rectangular region 10 and the sides of the rhombus arranged in the laying step is symmetrical with the polygons at the opposite ends. The shape adjustment step to be adjusted by the processing device is executed after the laying step (S33) or the merging step (S34).
For example, as illustrated in FIG. 34, the adjustment unit 105 adjusts the polygon formed in the horizontal direction to be line symmetric by shifting the rhombus and the polygon in the horizontal direction. That is, as shown in FIG. 34A, it is assumed that the polygons at the end portions in the horizontal direction arranged in the laying step are asymmetric. That is, in FIG. 34A, the polygon at the left end is smaller than the polygon at the right end. Therefore, the rhombus and the polygon are shifted to the right. And as shown in FIG.34 (b), the polygon of the edge part of a horizontal direction is made into line symmetry.

  Note that the rhombus spread method in the spread step (S33) is not limited to the method described above, and any method may be used. However, in the case of not using the above-described method, there is a possibility that the polygon formed not only at the horizontal end but also at the vertical end is not line symmetric with the polygon formed at the opposite end. . If the polygon formed at the end in the vertical direction is not line symmetric with the polygon formed at the opposite end, the line is symmetric after the laying step (S33) or the merging step (S34). Need to be adjusted.

Further, in the above description, it has been described that a mesh pattern matching a rectangular area is generated in one rectangular area. However, in the data input step (S11, S21, S31), region data having a plurality of rectangular regions (for example, Gerber data) is input, and the processing (mesh pattern generation step) after the calculation step (S12, S22, S32) is performed. For each rectangular area of the plurality of rectangular areas included in the area data, mesh pattern data matching (suitable) the rectangular area may be generated. Here, the vertical and horizontal widths (X and Y lengths) of the rectangular area may be different for each rectangular area.
The area data includes information on the vertical and horizontal widths (X and Y lengths) of each rectangular area and the position (for example, the coordinates of the center) of each rectangular area. That is, in the data input step (S11, S21, S31), when the area data is input, the data input unit 101 determines the vertical and horizontal widths (X and Y lengths) of each rectangular area from the area data. Can be acquired. Further, in the data generation step (S16, S27, S37), the data generation unit 106 can arrange each rectangular area based on the position information of each rectangular area. That is, the data generation unit 106 can generate mesh pattern data suitable for each rectangular area of a plurality of rectangular areas arranged at a predetermined position. For example, when each rectangular area indicates a print pattern, the data generation unit 106 can generate mesh pattern data suitable for the print pattern opening portion for each print pattern opening portion of the plurality of print pattern openings. .

Embodiment 4 FIG.
In this embodiment, a method for manufacturing the mask 50 having the mesh pattern indicated by the mesh pattern data created in the above embodiment in the print pattern opening 51 portion will be described. In addition, a method of manufacturing a two-layer mask having a manufactured mesh layer and a layer having a printed pattern opening will be described.

First, based on FIG. 35, a method for manufacturing a mask 50 having a mesh pattern such as a honeycomb structure indicated by the mesh pattern data created in the above-described embodiment in the printed pattern opening 51 portion will be described.
First, as shown in FIG. 35A, a base material 41 is prepared. As the material of the base material 41, for example, a conductive base material such as SUS (stainless steel, stainless steel, steel plate, aluminum) can be used. Alternatively, a non-conductive base material on which a conductive film is formed may be used. For example, a base material obtained by vapor-depositing a conductive material such as Ni, Cr, or ITO (Indium Tin Oxide) film on glass may be used. Then, a resist 42 is laminated on the base material 41 as shown in FIG.
Next, the mesh pattern data created in the above embodiment is input to the direct drawing machine that irradiates the ultraviolet laser into the print pattern opening 51 portion. Then, the mesh pattern indicated by the mesh pattern data is directly drawn on the resist 42 using a direct drawing machine. That is, the mesh pattern portion indicated by the mesh pattern data is exposed. Then, develop. As a result, as shown in FIG. 35C, the resist 42 remains only at the position corresponding to the opening corresponding to the mesh pattern.
Next, as shown in FIG. 35 (d), a metal layer 43 having a mesh pattern shape is formed on the base material 41 by plating such as nickel, except for the region where the resist 42 is formed. That is, since the metal layer 43 is formed in a portion other than the resist 42 left at the position corresponding to the mesh pattern, the metal layer 43 has an opening corresponding to the mesh pattern.
Then, as shown in FIG. 35 (e), the resist 42 is peeled off, and the metal layer 43 is peeled off from the base material 41. As a result, the mask 50 having openings corresponding to a plurality of mesh patterns is formed by the metal layer 43 with the ribs 14 being sandwiched between the print pattern openings 51. That is, the mask 50 having an opening corresponding to the mesh pattern as shown in FIGS. 1, 12, and 26 in the printed pattern opening 51 is manufactured.
In the above description, the resist 42 is exposed using a direct drawing machine. However, a pattern film having a mesh pattern indicated by the mesh pattern data created in the above embodiment may be created, and the resist 42 may be exposed using the created pattern film, glass letterpress or the like.
In addition, when mesh pattern data is generated by inputting area data having a plurality of rectangular areas, each rectangular area of the plurality of rectangular areas is set as a printing pattern opening 51, and the printing pattern opening 51 is formed as shown in FIGS. A mask 50 having openings corresponding to the mesh pattern as shown in FIG. 26 can be manufactured. That is, when manufacturing the mask 50 having a plurality of print pattern openings 51 and having a mesh 50 in each print pattern opening 51 portion, area data in which each print pattern opening 51 is a rectangular area is input in advance. If the mesh pattern data is generated, a mask 50 having a mesh pattern that matches the print pattern opening 51 can be manufactured at each print pattern opening 51 portion.

FIG. 36 is a diagram showing a mask 50 provided with a mesh manufactured by the manufacturing method described with reference to FIG. FIG. 36A is a cross-sectional view of the mask 50 (AA ′ cross-sectional view of FIG. 36B), and the mesh pattern is originally formed in the print pattern opening 51 portion, but the shape is shown. Is not shown in the figure because it becomes complicated. FIG. 36B is a diagram viewed from the D direction of FIG. FIG. 36C is a diagram illustrating an example of a mesh formed in one print pattern opening 51 portion among the plurality of print pattern openings 51 in FIG.
A plurality of printed pattern openings 51 are formed in the mask 50. As shown in FIG. 36C, each printed pattern opening 51 is formed with a mesh manufactured by the manufacturing method described with reference to FIG. That is, a mesh having openings corresponding to mesh patterns as shown in FIGS. 1, 12, and 26 is formed in each print pattern opening 51.
When the thickness (plate thickness) of the mask 50 is thin, the printed pattern opening 51 is not strong and may be damaged from the printed pattern opening 51 portion. Therefore, as described above, the print pattern portion is given a mesh to increase the strength of the print pattern portion. In particular, the mesh pattern described in the above embodiment has high mesh strength because pores are regularly formed in the honeycomb structure or the like. Therefore, the strength of the print pattern portion of the mask 50 is particularly increased by forming the mesh of the mesh pattern described in the above embodiment in the print pattern portion. In FIG. 36, the print pattern is indicated by a rectangle, but the print pattern may not be a complete rectangle. That is, it may be a substantially rectangular shape with rounded corners. By giving roundness to the corner portion, it is possible to prevent the load from being concentrated on the corner portion of the print pattern and damage from the corner portion.

Next, based on FIG. 37, a layer (mask 50) in which a plurality of print pattern openings 51 having a mesh are formed, and a print opening 49 without a mesh formed so as to overlap the print pattern openings 51 in which the mesh is formed. A method for manufacturing a two-layered mask having a resin layer having the following will be described. FIG. 37 (a) is a cross-sectional view of the mask 50. Although the mesh pattern is originally formed in the print pattern opening 51, the shape is complicated, so that the illustration is omitted.
As shown in FIGS. 37A and 37B, the layer (mask 50) having the manufactured mesh (metal layer 43) is stretched. FIG. 37 (b) is a view as seen from the E direction in FIG. 37 (a). The outer periphery of the mask 50 is attached to the work side (printing surface side) with an adhesive or the like around the inside of the opening of the ridge 46 having an opening attached to the screen frame 45, and the mask 50 is directed outward (screen) by the tension of the ridge 46. It is assumed that it is stretched in the direction of the frame 45). In FIG. 37 (b), the flange 46 and the mask 50 are bonded together at a margin 47. That is, the mask 50 is bonded to the combination 44 (a framed frame).
Next, as shown in FIG. 37C, a photosensitive resin 48 is applied to the mask 50 bonded to the combination 44 and dried or cured. Next, the printed pattern is drawn on the dried or cured photosensitive resin 48 using a direct drawing machine. In this case, exposure may be performed using a pattern film. Then, when developed, as shown in FIG. 37 (d), a mesh-less printing opening 49 is formed in the dried or cured photosensitive resin 48. The print openings 49 are formed so as to overlap the print pattern openings 51 where the mesh of the mask 50 is formed.
As a result, a layer (mask 50) having openings corresponding to a plurality of mesh patterns with the ribs 14 sandwiched between the print pattern openings 51 and a resin layer 48 having mesh-free print openings 49 on the upper surface of the mask 50 are provided. A two-layer mask is manufactured. That is, a two-layer structure having a layer (mask 50) having a printing pattern opening 51 having an opening corresponding to a mesh pattern as shown in FIGS. 1, 12, and 26 and a resin layer 48 having a printing opening 49. A mask is manufactured.
When the mask 50 is stretched, the mask 50 is bonded not to the work side of the ridge 46 but to the ink side (squeegee side) as shown in FIG. 50 and the photosensitive resin 48 may be sandwiched.

  In the mask manufacturing process, the mesh is stretched. When stretched, the mesh is pulled outward. Here, the mesh produced from the mesh pattern data created in the above embodiment has a high strength against pulling force because the mesh pattern is regularly formed in a honeycomb structure or the like. Therefore, the mesh is not torn even when it is stretched.

Next, based on FIG. 38, a metal mask having a two-layer structure including a layer (mask 50) in which a plurality of printed pattern openings 51 having a mesh are formed and a metal layer having printed openings 49 having no mesh is manufactured. A method will be described.
First, as shown in FIGS. 35A to 35D, a metal layer 43 having a mesh pattern shape is formed on the base material 41 by plating with nickel or the like except for the region where the resist 42 is formed. Subsequently, as shown in FIG. 38A, the resist 42 is peeled off. Next, as shown in FIG. 38B, a resist 52 is formed on the layer (mask 50) having the manufactured mesh (metal layer 43). Next, a printing pattern is drawn on the resist 52 using a direct drawing machine. In this case, exposure may be performed using a pattern film. Then, when developed, a resist 52 is formed in a portion that becomes the printing opening 49 as shown in FIG. Next, as shown in FIG. 38D, a metal layer 53 is formed on the mask 50 except for the portion where the resist 52 is formed. And as shown in FIG.38 (e), the resist 52 is peeled and it peels from a base material.
As a result, a layer having a plurality of print pattern openings 51 having openings corresponding to a plurality of mesh patterns with a rib 14 interposed between the print pattern openings 51 and a metal layer 53 having a print opening 49 without meshes 2. A layered metal mask is manufactured. That is, 2 having a layer (mask 50) having a printing pattern opening 51 having openings corresponding to the mesh pattern as shown in FIGS. 1, 12, and 26 and a metal layer 53 having a printing opening 49 without mesh. A layered metal mask is manufactured.
The print openings 49 are formed so as to overlap the print pattern openings 51 where the mesh of the mask 50 is formed.
The mask manufacturing method is merely an example, and the mask may be manufactured by other methods.

  The mesh and mask described above can be used not only for screen printing meshes and masks but also for ball mounting masks, bump forming masks, sieves, and the like.

That is, the mesh according to the above embodiment is
Regular holes of regular shape (hexagonal, circular, diamond-shaped holes) regularly arranged in the center of the predetermined region,
The peripheral portion in the predetermined region is provided with deformation holes (polygonal, tongue-like holes formed at the end portions) having the same area as the normal holes but having the same shape.
In other words, the mesh according to the above embodiment is
A regular hole forming part (ribs 14 for forming regular holes) in which regular holes of the same shape (hexagonal, circular, diamond-shaped holes) are regularly arranged in the center of the predetermined region;
The peripheral portion in the predetermined region includes a deformed hole forming portion (rib 14 for forming a deformed hole) that forms a deformed hole having the same area but different shape from the regular hole.

The mesh according to the above embodiment is
In a mesh formed with a mesh having a plurality of holes in a predetermined region,
A hole having a side of the predetermined region as a part of the side;
The area of the hole that does not make the side of the predetermined region a part of the side is the same.

Next, a hardware configuration of mesh pattern creation apparatus 100 in the above embodiment will be described.
FIG. 39 is a diagram illustrating an example of a hardware configuration of the mesh pattern creation device 100.
As shown in FIG. 39, the mesh pattern creating apparatus 100 includes a CPU 911 (also referred to as a central processing unit, a central processing unit, a processing unit, an arithmetic unit, a microprocessor, a microcomputer, and a processor) that executes a program. . The CPU 911 is connected to the ROM 913, the RAM 914, the LCD 901 (Liquid Crystal Display), the keyboard 902 (K / B), the communication board 915, and the magnetic disk device 920 via the bus 912, and controls these hardware devices. Instead of the magnetic disk device 920, a storage device such as an optical disk device or a memory card read / write device may be used.

  The ROM 913 and the magnetic disk device 920 are examples of a nonvolatile memory. The RAM 914 is an example of a volatile memory. The ROM 913, the RAM 914, and the magnetic disk device 920 are examples of a storage device (memory). The keyboard 902 and the communication board 915 are examples of input devices. The communication board 915 is an example of a communication device. Furthermore, the LCD 901 is an example of a display device.

  An operating system 921 (OS), a window system 922, a program group 923, and a file group 924 are stored in the magnetic disk device 920 or the ROM 913. The programs in the program group 923 are executed by the CPU 911, the operating system 921, and the window system 922.

The program group 923 includes “data input unit 101”, “calculation unit 102”, “laying unit 103”, “merging unit 104”, “adjustment unit 105”, “data generation unit 106”, “ Software, programs, and other programs that execute the functions described as the “deformation unit 107”, the “auxiliary hole forming unit 108”, and the like are stored. The program is read and executed by the CPU 911.
In the file group 924, the “longitudinal and lateral widths of the rectangular region 10”, “minimum size of the hexagonal hole 11”, “minimum size of the circular hole 21”, and “diamond-shaped hole 31” are described. Information, data, signal values, variable values, and parameters such as “minimum size”, “rib 14 width”, and “machining limit value” are stored as items of “file” and “database”. The “file” and “database” are stored in a recording medium such as a disk or a memory. Information, data, signal values, variable values, and parameters stored in a storage medium such as a disk or memory are read out to the main memory or cache memory by the CPU 911 via a read / write circuit, and extracted, searched, referenced, compared, and calculated. Used for the operation of the CPU 911 such as calculation / processing / output / printing / display. Information, data, signal values, variable values, and parameters are temporarily stored in the main memory, cache memory, and buffer memory during the operation of the CPU 911 for extraction, search, reference, comparison, calculation, calculation, processing, output, printing, and display. Is remembered.
In addition, the arrows in the flowcharts in the above description mainly indicate input / output of data and signals, and the data and signal values are recorded in a memory of the RAM 914 and other recording media such as an optical disk. Data and signals are transmitted online via a bus 912, signal lines, cables, or other transmission media.

  In addition, what is described as “to part” in the above description may be “to circuit”, “to device”, “to device”, “to means”, and “to function”. It may be “step”, “˜procedure”, “˜processing”. In addition, what is described as “˜device” may be “˜circuit”, “˜device”, “˜equipment”, “˜means”, “˜function”, and “˜step”, “ ~ Procedure "," ~ process ". Furthermore, what is described as “to process” may be “to step”. That is, what is described as “˜unit” may be realized by firmware stored in the ROM 913. Alternatively, it may be implemented only by software, or only by hardware such as elements, devices, substrates, and wirings, by a combination of software and hardware, or by a combination of firmware. Firmware and software are stored in a recording medium such as ROM 913 as a program. The program is read by the CPU 911 and executed by the CPU 911. That is, the program causes a computer or the like to function as the “˜unit” described above. Alternatively, the computer or the like is caused to execute the procedures and methods of “to part” described above.

FIG. 3 is a diagram showing an opening shape of the mesh 1 according to the first embodiment. FIG. 3 is a functional block diagram illustrating functions of the mesh pattern creation device 100 according to the first embodiment. 5 is a flowchart showing a flow of mesh pattern data creation processing according to the first embodiment. Explanatory drawing of the calculation of the width of a hexagon. Explanatory drawing of the process which arranges a hexagon. Explanatory drawing of the process which merges the polygon formed in the edge part and the adjacent hexagon. Explanatory drawing of the process which expands / contracts a hexagon. Explanatory drawing of the other example of the process which arranges a hexagon. Explanatory drawing of the process which moves a hexagon. Explanatory drawing of the process which expands / contracts a hexagon. The figure which shows the example which produced the mesh pattern to the rectangular area | region 10 with a narrow width | variety. The figure which shows the opening shape of the mesh 2 which concerns on Embodiment 2. FIG. FIG. 4 is a functional block diagram showing functions of a mesh pattern creation device 100 according to Embodiment 2. 9 is a flowchart showing a flow of mesh pattern data creation processing according to the second embodiment. Explanatory drawing of calculation of a circular diameter. Explanatory drawing of the process which arranges a circle. Explanatory drawing of the process which deform | transforms the circular shape of an edge part. Explanatory drawing of the process which forms the auxiliary hole 24. FIG. Explanatory drawing of the other example of the calculation of a circular diameter, and the process which arranges a circular shape. The figure which shows the auxiliary hole 24 of another shape. Explanatory drawing of the other example of the process which arranges a circle. The figure which shows the example which narrowed the width | variety of the rib 14 formed between circles. The figure which shows the example which arranged the semicircle-shaped figure in the edge part. Explanatory drawing of the process which merges the semicircle-shaped figure and the adjacent circle which were arranged in the edge part. Explanatory drawing of the process which deform | transforms circular when the width | variety of the rib 14 formed between circles is narrow. FIG. 6 is a diagram showing an opening shape of a mesh 3 according to Embodiment 3. 10 is a flowchart showing a flow of mesh pattern data creation processing according to the third embodiment. Explanatory drawing of calculation of the width of a rhombus. Explanatory drawing of the process which arranges a rhombus. Explanatory drawing of the process which merges the polygon formed in the edge part and the adjacent rhombus. Explanatory drawing of the process which adjusts the area of a figure. Explanatory drawing of the process which adjusts the width | variety of the rib. Explanatory drawing of the other example of the process which arranges a rhombus. Explanatory drawing of the process which moves a rhombus. Explanatory drawing of the process which manufactures the mask of the 1 layer structure which has a mesh in the printing pattern opening 51 part. The figure which shows the mask of 1 layer structure which has a mesh in the printing pattern opening 51 part. Explanatory drawing of the process which manufactures the mask of the 2 layer structure which has a layer which has a mesh, and the resin layer which has the printing pattern opening 51. FIG. Explanatory drawing of the process which manufactures the metal mask of the 2 layer structure which has the layer which has a mesh, and the metal layer which has the printing pattern opening 51. FIG. The figure which shows an example of the hardware constitutions of the mesh pattern production apparatus 100.

Explanation of symbols

  1, 2, 3 mesh, 10 rectangular area, 11 hexagonal hole, 12 trapezoidal hole, 13 pentagonal hole, 14 rib, 15 1st row, 16 2nd row, 21 circular hole, 22 tongue Holes, 23 substantially fan-shaped holes, 24 auxiliary holes, 25 rectangles, 26 narrow rectangles, 31 diamond-shaped holes, 32, 33 pentagonal holes, 41 base materials, 42, 52 resists, 43, 53 metal layers, 44 Combination, 45 screen frame, 46 mm, 47 margin, 48 photosensitive resin, 50 mask, 51 printing pattern opening, 100 mesh pattern creation device, 101 data input unit, 102 calculation unit, 103 padding unit, 104 merging unit, 105 Adjustment unit, 106 data generation unit, 107 deformation unit, 108 auxiliary hole formation unit.

Claims (17)

It is a mesh for printing pattern opening of a mask, and is a mesh in which a plurality of circular holes having the same opening area are formed in a predetermined substantially rectangular region,
A tongue-shaped hole is formed at the end of the predetermined substantially rectangular area excluding the corners, with a part of the circumference of the circle and a rectangle having a part of the side forming the predetermined approximately rectangular area as one side. A mesh for opening a printed pattern of a mask, wherein the tongue-shaped hole formed at an end portion excluding the corner of the predetermined substantially rectangular region has the same opening area as the opening area of the circular hole. . The mask for printing pattern opening of the mask according to claim 1, wherein the mesh for printing pattern opening of the mask further has auxiliary holes of a predetermined size formed between the plurality of circular holes. Mesh. The mesh for printing pattern opening of a mask according to claim 2, wherein the auxiliary hole is provided so that a width of a rib between the auxiliary hole is not less than a predetermined width. A method of creating mesh pattern data of a mesh pattern in which a plurality of circular holes having the same opening area are arranged in a predetermined substantially rectangular area,
The diameter of a circle that fits exactly when placed in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the diameter of the circle being equal to or greater than a predetermined length and the predetermined length A calculation step to calculate the diameter of a near circle;
A laying step of regularly arranging the circles of the diameter calculated in the calculation step while sandwiching the ribs so as to cover the predetermined substantially rectangular region;
Deformation step of deforming the circles arranged at the end excluding the corner of the predetermined substantially rectangular region in the laying step to generate a tongue-like body that is in line with the end;
An adjustment step for adjusting the area of the circle calculated in the calculation step and the area of the tongue generated by deformation in the deformation step to be the same area;
A method for generating mesh pattern data, comprising: a data generation step for generating mesh pattern data in which the circle and the tongue adjusted in the adjustment step are holes. In the deforming step, a tongue having one side connected to a part of a circumference of the circle arranged at the end of the predetermined substantially rectangular area and having a side as a part of the predetermined rectangular area is connected to a tongue shape. 5. The method of creating mesh pattern data according to claim 4, wherein the mesh pattern data is transformed into a body. 6. The method of creating mesh pattern data according to claim 4, wherein, in the adjustment step, adjustment is performed by increasing the area of the circle by increasing the diameter of the circle. The method of creating the mesh pattern data is further
The mesh pattern data creation method according to any one of claims 4 to 6, further comprising an auxiliary hole forming step of forming an auxiliary hole of a predetermined size in the rib. A mesh for printing pattern opening of a mask, wherein a plurality of rhombic holes having the same side length are formed in a predetermined substantially rectangular region with a rib having a predetermined width interposed therebetween,
A polygonal hole is formed at an end of the predetermined substantially rectangular area by a part of the rhombus and an edge forming the predetermined approximately rectangular area. Among the polygonal holes, the predetermined hole A polygonal hole formed at the end of the substantially rectangular region in the vertical direction or the horizontal direction, and the polygonal hole formed at the end excluding the corners has the same opening area as the diamond-shaped hole. A mesh for printing pattern opening of a mask characterized by. A method of creating mesh pattern data of a mesh pattern in which a plurality of rhombus holes having the same side length are arranged in a predetermined substantially rectangular region,
A predetermined rhombus width that fits in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the vertical or horizontal width being equal to or greater than the predetermined width A calculation step for calculating the width of the rhombus close to a predetermined width;
The step of arranging the rhombus having the width calculated in the calculating step regularly with the rib interposed therebetween so as to cover the predetermined substantially rectangular region, the rhombus being aligned with the end of the predetermined approximately rectangular region A laying step of arranging the rhombuses so that a polygon constituted by a part of the sides is symmetrical to a polygon of an opposing end;
A method for generating mesh pattern data, comprising: a data generation step for generating mesh pattern data having rhombuses arranged in the laying step and the polygons as holes. The method of creating the mesh pattern data is further
The polygon formed at the left and right ends or the top and bottom ends among the ends of the predetermined substantially rectangular area, and the area of the polygon formed at the ends excluding the corners is the area of the rhombus The method of creating mesh pattern data according to claim 9, further comprising an adjustment step of adjusting so as to have the same area. The method of creating mesh pattern data according to claim 10, wherein in the adjustment step, the width of the rhombus is adjusted by expanding or contracting in the vertical direction or the horizontal direction. The method of creating the mesh pattern data is further
12. The method according to claim 9, further comprising a merging step of merging the polygon and the rhombus adjacent to the polygon when a predetermined inscribed circle cannot be drawn on the polygon. A method of creating the described mesh pattern data. A method of creating mesh pattern data of a mesh pattern in which a plurality of rhombus holes having the same side length are arranged in a predetermined substantially rectangular region,
A predetermined rhombus width that fits in the vertical or horizontal direction of the predetermined substantially rectangular region with a rib having a predetermined width in between, the vertical or horizontal width being equal to or greater than the predetermined width A calculation step for calculating the width of the rhombus close to a predetermined width;
A laying step of regularly arranging rhombuses having a width calculated in the calculation step with the ribs sandwiched therebetween so as to cover the predetermined substantially rectangular region;
Adjustment that adjusts the polygon composed of the end of the predetermined substantially rectangular area and the side of the rhombus arranged in the laying step to be symmetrical to the polygon of the opposite end Steps,
A method for generating mesh pattern data, comprising: a data generation step for generating mesh pattern data having a rhombus and a polygon adjusted in the adjustment step as holes.   A mask comprising the mesh for a print pattern of the mask according to any one of claims 1 to 3 or a plurality of print patterns having different sizes or directions of substantially rectangular regions.   A layer having a mesh for opening a print pattern of a mask according to any one of claims 1 to 3 or a plurality of print patterns having different sizes or directions of substantially rectangular regions, and a layer having the mesh. A two-layer structure mask comprising: a layer having a print opening without mesh in a portion overlapping with the print pattern opening provided on one side and formed with a mesh. A data input step of inputting mesh pattern data generated by the mesh pattern data creation method according to any one of claims 4 to 7 or claims 9 to 13,
Based on the mesh pattern data input in the data input step, the resist applied to the substrate is exposed and developed to form a resist pattern corresponding to the opening portion of the mesh pattern;
Except for the portion where the resist pattern is formed in the exposure and development step, a metal layer generation step for forming a metal layer on the base material by plating; and
A mask manufacturing method comprising: forming a mesh based on the mesh pattern data in a portion to be a printed pattern opening by removing the resist pattern and providing a removal peeling step of peeling the substrate from the metal layer . It is a two-layer structure mask manufacturing method for manufacturing a layer having a printing opening without a mesh on a layer having a mesh manufactured by the mask manufacturing method according to claim 16,
A two-layer structure mask manufacturing method characterized in that a layer having a mesh-free print opening is formed on one side of the layer having a mesh so that the mesh-less print opening overlaps with a mesh-formed print pattern opening. Method.

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