WO2022044574A1 - タッチパネル用導電部材およびタッチパネル - Google Patents

タッチパネル用導電部材およびタッチパネル Download PDF

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Publication number
WO2022044574A1
WO2022044574A1 PCT/JP2021/026055 JP2021026055W WO2022044574A1 WO 2022044574 A1 WO2022044574 A1 WO 2022044574A1 JP 2021026055 W JP2021026055 W JP 2021026055W WO 2022044574 A1 WO2022044574 A1 WO 2022044574A1
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WO
WIPO (PCT)
Prior art keywords
metal
touch panel
conductive layer
wire
conductive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/026055
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English (en)
French (fr)
Japanese (ja)
Inventor
和弘 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to CN202180048319.XA priority Critical patent/CN115777093A/zh
Priority to JP2022545514A priority patent/JP7469485B2/ja
Publication of WO2022044574A1 publication Critical patent/WO2022044574A1/ja
Priority to US18/069,032 priority patent/US12169617B2/en
Anticipated expiration legal-status Critical
Priority to JP2024060520A priority patent/JP2024094338A/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412—Digitisers structurally integrated in a display
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Definitions

  • the present invention relates to a conductive member for a touch panel used as an electrode of a touch sensor or a touch panel.
  • the present invention also relates to a touch panel including a conductive member for a touch panel.
  • the touch panel uses a conductive member in which a detection unit for detecting a touch operation due to contact or proximity of a finger, a stylus pen, or the like is formed on a transparent insulating substrate.
  • the detection unit is formed of a transparent conductive oxide such as ITO (Indium Tin Oxide), but is also formed of an opaque conductive material such as metal in addition to the transparent conductive oxide.
  • a transparent conductive oxide such as ITO (Indium Tin Oxide)
  • an opaque conductive material such as metal
  • a conductive material such as copper or silver is used as an opaque conductive material such as metal because it is easier to pattern, has excellent flexibility, and has lower resistance than the above-mentioned transparent conductive oxide. It is used.
  • Patent Document 1 discloses a touch panel using an opaque conductive material.
  • the touch panel of Patent Document 1 has a mesh-like conductor having a plurality of irregular quadrangular openings.
  • a touch panel is arranged on a liquid crystal display or the like for displaying an image to obtain an image.
  • a touch panel is arranged on a liquid crystal display or the like for displaying an image to obtain an image.
  • it is expected to have the effect of making moire inconspicuous due to interference between a plurality of openings and a pixel pattern of a liquid crystal display or the like.
  • a plurality of openings have sharp corners, and the sharp corners are conspicuously visually recognized. Therefore, an observer who sees the touch panel of Patent Document 1 is rough. I sometimes felt that there was.
  • the present invention has been made to solve such a conventional problem, and to provide a conductive member for a touch panel capable of reducing the feeling of roughness while suppressing the occurrence of moire when used in an image display device. With the goal. It is also an object of the present invention to provide a touch panel including such a conductive member for a touch panel.
  • the conductive member for a touch panel is a conductive member for a touch panel including a transparent insulating substrate and a conductive layer arranged on at least one surface of the transparent insulating substrate, and the conductive layer is deformed in a plan view. It contains a plurality of irregular mesh cells consisting of a diamond shape and has a mesh pattern formed by a plurality of metal wire wires, in which the metal wire wires extend at least one pair so as to sandwich the sharp angle of the deformed diamond shape. At least one of the pair of metal wires, including the metal wire, is characterized by having a bend that bends inward at a sharp angle toward the intersection where the pair of metal wires intersect each other.
  • the deformed rhombus is a shape in which at least one vertex of the regular rhombus reference mesh cell is randomly rearranged, or at least one pair of sides of the regular rhombus reference mesh cell that are parallel to each other. It is preferable to have a randomly changed shape and an irregularity of 2% or more and 10% or less with respect to a regular rhombus.
  • the crossing angle of the pair of thin metal wires at the crossing is a right angle.
  • the starting point of bending at the bending portion is preferably located within 1/10 of the length of the side of the corresponding deformed rhombus from the intersection.
  • the bend can have a linear or curved shape.
  • a pair of thin metal wires are placed on the same plane and can be electrically connected to each other at the intersection.
  • a pair of thin metal wires can be placed on different surfaces and electrically isolated from each other at the intersection.
  • the conductive layer has a first conductive layer arranged on one surface of the transparent insulating substrate and a second conductive layer arranged on the first conductive layer with the insulating layer interposed therebetween.
  • the pair of thin metal wires one of the thin metal wires can be arranged in the first conductive layer, and the other thin metal wire can be arranged in the second conductive layer.
  • the conductive layer has a first conductive layer arranged on one surface of the transparent insulating substrate and a second conductive layer arranged on the other surface of the transparent insulating substrate, and is composed of a pair of thin metal wires.
  • One of the thin metal wires may be arranged in the first conductive layer, and the other thin metal wire may be arranged in the second conductive layer.
  • the line width of the thin metal wire is preferably 1 ⁇ m or more and 3 ⁇ m or less.
  • the touch panel of the present invention is characterized by including the above-mentioned conductive member for a touch panel.
  • the conductive layer contains a plurality of irregular mesh cells consisting of deformed rhombuses and has a mesh pattern formed by a plurality of metal wires, wherein the metal wires are composed of a plurality of metal wires. It contains at least a pair of metal wires extending across the sharp angle of the deformed rhombus, and at least one of the pair of metal wires is sharp toward the intersection where the pair of metal wires intersect each other. Since it has a bent portion that bends inward, it is possible to reduce the feeling of roughness while suppressing the occurrence of moire when used in an image display device.
  • FIG. 1 It is a partial cross-sectional view of the touch panel in Embodiment 1 of this invention. It is a top view of the conductive member for a touch panel which concerns on Embodiment 1.
  • FIG. It is a partially enlarged plan view of the 1st electrode in Embodiment 1.
  • FIG. It is a partially enlarged plan view of the intersection of the 1st electrode in Embodiment 1.
  • FIG. 3 is a partial cross-sectional view of an image display device including a touch panel according to the first embodiment. It is a partially enlarged plan view of the intersection of the 1st electrode in the modification of Embodiment 1.
  • FIG. It is a partially enlarged plan view of the intersection of the 1st electrode in Embodiment 2.
  • FIG. 3 is a partially enlarged plan view of a portion where the first metal wire of the first electrode and the second metal wire of the second electrode overlap each other in the third embodiment.
  • FIG. 5 is a partially enlarged plan view of a portion where the first metal wire of the first electrode and the second metal wire of the second electrode overlap each other in the modified example of the third embodiment.
  • FIG. 4 is a partially enlarged plan view of a portion where the first metal wire of the first electrode and the second metal wire of the second electrode overlap each other in the fourth embodiment.
  • FIG. 5 is a partially enlarged plan view of a portion where the first metal wire of the first electrode and the second metal wire of the second electrode overlap each other in the modified example of the fourth embodiment. It is a partially enlarged plan view of the 1st electrode part in Embodiment 5. FIG. It is a partial sectional view of the touch panel in Embodiment 6. FIG.
  • the conductive member for a touch panel and the touch panel according to the present invention will be described in detail based on the preferred embodiments shown in the accompanying drawings.
  • the notation "-" indicating the numerical range shall include the numerical values described on both sides.
  • “s is a numerical value t1 to a numerical value t2” means that the range of s is a range including the numerical values t1 and the numerical value t2, and is t1 ⁇ s ⁇ t2 in mathematical symbols.
  • Angles, including “orthogonal” and “parallel”, shall include error ranges generally acceptable in the art, unless otherwise stated.
  • Transparent means that the light transmittance is at least 40% or more, preferably 75% or more, more preferably 80% or more, still more preferably more preferably in the visible light wavelength range of a wavelength of 400 nm to 800 nm. It is more than 90%.
  • the light transmittance is measured by using "Plastic--How to determine the total light transmittance and the total light reflectance" specified in JIS K 7375: 2008.
  • FIG. 1 shows the configuration of the touch panel 1 according to the first embodiment of the present invention.
  • the touch panel 1 has a front surface 1A and a back surface 1B, and is used in a state where a display module (not shown) having a liquid crystal display or the like is arranged on the back surface 1B side.
  • the surface 1A of the touch panel 1 is a touch detection surface, and is a visual side for an operator of the touch panel 1 to observe an image displayed on the display module through the touch panel 1.
  • the touch panel 1 has a transparent insulating cover panel 2 arranged on the surface 1A side, and the conductive member 3 for the touch panel is bonded to the surface of the cover panel 2 on the opposite side of the surface 1A by a transparent adhesive 4. Has been done.
  • the conductive member 3 for the touch panel is formed on the transparent insulating substrate 5, the first conductive layer 6A formed and patterned on one surface 5A of the transparent insulating substrate 5, and the other surface 5B of the transparent insulating substrate 5. It also has a patterned second conductive layer 6B. Further, as shown in FIG. 1, the transparent insulating member 7A may be arranged so as to cover the first conductive layer 6A for the purpose of protecting the patterned first conductive layer 6A or for the purpose of flattening. Further, the transparent insulating member 7B may be arranged so as to cover the second conductive layer 6B for the purpose of protecting the patterned second conductive layer 6B or for the purpose of flattening.
  • FIG. 2 shows a plan view of the conductive member 3 for a touch panel.
  • a transmission region S1 for detecting a touch operation with a finger, a stylus pen, or the like, and peripheral wiring or the like for connecting the touch panel conductive member 3 to a display module (not shown) are arranged.
  • the peripheral region S2, which is a region outside the transmission region S1, is partitioned.
  • the first conductive layer 6A and the second conductive layer 6B are patterned with electrodes for detecting a touch operation and peripheral wiring connected to the electrodes.
  • the first conductive layer 6A located on the cover panel 2 side that is, on the visual recognition side, each extends in a certain direction and is orthogonal to the first conductive layer 6A. It has a plurality of first electrodes 11 arranged at intervals. Each of these plurality of first electrodes 11 has a first pad 12 at the end.
  • first conductive layer 6A is connected to each of the plurality of first peripheral wirings 13 drawn from the plurality of first pads 12 of the plurality of first electrodes 11 and the plurality of first peripheral wirings 13. It has a first external connection terminal 14.
  • the second conductive layer 6B located on the back surface 1B side of the touch panel 1 extends along a direction orthogonal to the direction in which the plurality of first electrodes 11 extend, and extends in a direction orthogonal to the direction, that is, a direction in which the plurality of first electrodes 11 extend. It has a plurality of second electrodes 21 arranged at intervals. Each of these plurality of second electrodes 21 has a second pad 22 at the end.
  • the second conductive layer 6B is connected to each of the plurality of second peripheral wirings 23 drawn from the plurality of second pads 22 of the plurality of second electrodes 21 and the plurality of second peripheral wirings 23. It has a second external connection terminal 24.
  • the plurality of first electrodes 11 of the first conductive layer 6A and the plurality of second electrodes 21 of the second conductive layer 6B are arranged in the transmission region S1 partitioned by the conductive member 3 for the touch panel. Further, a plurality of first pads 12 of the first conductive layer 6A, a plurality of first peripheral wirings 13, a plurality of first external connection terminals 14, a plurality of second pads 22 of the second conductive layer 6B, and a plurality of second peripherals. The wiring 23 and the plurality of second external connection terminals 24 are arranged in the peripheral region S2 partitioned by the touch panel conductive member 3.
  • FIG. 3 shows a partially enlarged plan view of the first electrode 11.
  • the first electrode 11 has a plurality of thin metal wires MW1 extending while bending substantially along the first direction D1 and a plurality of thin metal wires MW2 extending while bending substantially along the second direction D2 in a plan view. There is.
  • the first direction D1 and the second direction D2 intersect each other. Further, by intersecting the plurality of thin metal wires MW1 and the plurality of thin metal wires MW2 so as to be electrically connected to each other on the same surface, a plurality of intersections CP1 where the thin metal wires MW1 and the thin metal wires MW2 intersect are formed. ing.
  • a plurality of irregular mesh cells MC1 of a quadrangle are formed, and a mesh pattern is formed by the plurality of irregular mesh cells MC1.
  • MP1 is formed.
  • This mesh pattern MP1 is formed by a plurality of thin metal lines MW3 extending linearly along the first direction D1 and a plurality of thin metal lines MW4 extending linearly along the second direction D2, as drawn by a dotted line in FIG.
  • the positions of the intersections of the plurality of metal thin lines MW3 and the plurality of metal thin lines MW4 are randomly rearranged within a certain range with respect to the regular reference mesh pattern MP2 having a plurality of diamond-shaped reference mesh cells MC2 formed. It was done.
  • a method of randomly arranging new vertices inside a circle centered on each vertex can be used.
  • the radius of this circle is 1/50 or more of the length of one side of the reference mesh cell MC2 in order to suppress moire that is visually recognized when the touch panel 1 is placed on a display module (not shown) for displaying an image. It is preferable to have a length of.
  • the radius is preferably 1/10 or less of the length of one side of the diamond-shaped reference mesh cell MC2, and more preferably 1/20 or less.
  • the positions of the intersections of the plurality of metal thin lines MW3 and the plurality of metal thin lines MW4 are randomly rearranged by a method of randomly arranging new vertices inside a circle centered on the vertices of the diamond-shaped reference mesh cell MC2.
  • the irregularity [%] of the irregular mesh cell MC1 with respect to the diamond-shaped reference mesh cell MC2 can be expressed by the following equation (1).
  • (Irregularity) (radius of circle used for rearrangement of intersection) / (length of one side of diamond-shaped reference mesh cell MC2) ⁇ 100 ... (1) Therefore, the irregularity is preferably 2% or more and 10% or less, and preferably 2% or more and 5% or less.
  • the irregular mesh cell MC1 has a shape in which the rhombus is deformed.
  • all the irregular mesh cells MC1 connecting a plurality of intersections CP1 with a straight line have a deformed rhombus if the length of each side is within ⁇ 20% of the average value of the lengths of the four sides.
  • the regular reference mesh cell MC2 has the average value of the lengths of each side of 100 irregular mesh cells MC1 adjacent to each other about the arbitrary intersection CP1 and the angle of the internal angle facing the same direction. It can be restored by finding the average value of.
  • the acute angle of the diamond-shaped reference mesh cell MC2 constituting the regular reference mesh pattern MP2 is preferably 55 degrees to 85 degrees, more preferably 60 degrees to 80 degrees, and 65 degrees from the viewpoint of suppressing moire. ⁇ 75 degrees is the most preferable.
  • FIG. 4 shows a partially enlarged plan view of the intersection CP1 between the thin metal wire MW1 and the thin metal wire MW2.
  • Four metal thin wires a first metal thin wire E1, a second metal thin wire E2, a third metal thin wire E3, and a fourth metal thin wire E4, extend around the intersection CP1.
  • the first metal wire E1 and the third metal wire E3 are a part of the metal wire MW1
  • the second metal wire E2 and the fourth metal wire E4 are a part of the metal wire MW2.
  • the first metal wire E1 and the second metal wire E2 each have a linear shape extending substantially along the side of the mesh cell MC1, and extend so as to sandwich the acute angle A1.
  • the second thin metal wire E2 has a bent portion B1 that bends inward at an acute angle A1 from the bending starting point SP1 toward the intersection CP1.
  • the bent portion B1 has a linear shape and intersects the first metal thin wire E1 at an intersection angle T1 larger than the acute angle A1.
  • the bending starting point SP1 in the bending portion B1 is the length of the side of the corresponding deformed rhombus, that is, the second metal thin wire E2 from the intersection CP1 from the viewpoint of preventing the bending portion B1 from being conspicuously visually recognized. It is preferable that the position is within 1/10 of the length of the rhombus.
  • the third metal thin wire E3 and the fourth metal thin wire E4 each have a linear shape extending substantially along the side of the mesh cell MC1, and extend so as to sandwich the acute angle A2.
  • the fourth metal thin wire E4 has a bent portion B2 that bends inward at an acute angle A2 from the bending starting point SP2 toward the intersection CP1.
  • the bent portion B2 has a linear shape and intersects with the third metal thin wire E3 at an intersection angle T2 larger than the acute angle A2.
  • the bending starting point SP2 in the bending portion B2 is the length of the side of the corresponding rhombus, that is, the length of the fourth metal wire E4 from the intersection CP1 from the viewpoint of preventing the bending portion B2 from being conspicuously visually recognized. It is preferable that the position is within 1/10 of the above.
  • the first metal thin wire E1 and the second metal thin wire E2 have an acute angle. They intersect each other at an angle of A1, and the third metal wire E3 and the fourth metal wire E4 intersect each other at an acute angle A2. Further, the second metal wire E2 and the third metal wire E3 intersect each other at an obtuse angle, and the first metal wire E1 and the fourth metal wire E4 intersect each other at an obtuse angle.
  • the acute-angled corner portion sandwiched between the first metal thin wire E1 and the second metal thin wire E2 and the acute-angled corner portion sandwiched between the third metal thin wire E3 and the fourth metal thin wire E4 are the second. It is more conspicuous than the obtuse-angled corners sandwiched between the thin metal wire E2 and the third metal thin wire E3 and the obtuse-angled corners sandwiched between the first metal thin wire E1 and the fourth metal thin wire E4.
  • the second metal thin wire E2 does not have the bent portion B1 and the fourth metal thin wire E4 does not have the bent portion B2
  • there are scattered spots that are conspicuously visible so that the first electrode An observer looking at 11 may feel grainy.
  • the second metal wire E2 has a bent portion B1 that intersects with the first metal wire E1 at an intersection angle T1 larger than the acute angle A1, and the fourth metal wire E4.
  • metal thin wires MW1 and MW2 by photolithography and etching to pattern the mesh pattern MP1.
  • the first metal thin wire E1 and the second metal are in the vicinity of the intersection CP1.
  • the thin wire E2 and between the third metal thin wire E3 and the fourth metal thin wire E4 between the second metal thin wire E2 and the third metal thin wire E3, and between the first metal thin wire E1 and the fourth metal thin wire E4. It becomes narrower than the interval.
  • the sharp corners sandwiched between the first metal wire E1 and the second metal wire E2 are not sufficiently etched, so that the first metal wire is not sufficiently etched.
  • the conductive material constituting E1 and the second thin metal wire E2 may remain.
  • the conductive material constituting the third metal thin wire E3 and the fourth metal thin wire E4 may remain in the same manner.
  • the intersection CP1 may become thicker than the intersection in the originally designed pattern.
  • the second metal wire E2 has a bent portion B1 that intersects with the first metal wire E1 at an intersection angle T1 larger than the acute angle A1, and the fourth metal wire E4.
  • the intersecting portion CP1 is designed even when the mesh pattern MP1 is patterned using the photolithography method. It is possible to prevent the pattern from being thicker than that.
  • the intersection angle T1 between the bending portion B1 and the first metal thin wire E1 and the bending portion B2 is a right angle, respectively.
  • the right angle means an angle within a certain angle range including 90 degrees.
  • a right angle means an angle within an angle range of 85 degrees or more and 90 degrees or less.
  • the ratio of the number of the intersecting portions CP1 in which the bent portions B1 and B2 are formed is preferably 80% or more, more preferably 90% or more, and more preferably 100, to the number of all the intersecting portions CP1 in the conductive member 3 for the touch panel. % Is particularly preferable. When this ratio is less than 80%, a feeling of roughness is likely to be observed.
  • the second electrode 21 has a mesh pattern MP1 formed by the metal thin wires MW1 and MW2, and formed by an irregular mesh cell MC1 having a deformed rhombus shown in FIG. There is. Further, also in the second electrode 21, as in the case of the first electrode 11, as shown in FIG. 4, the first metal thin wires E1 to 4 are centered on the intersection CP1 of the metal thin wires MW1 and MW2 in the second electrode 21. The thin metal wire E4 extends.
  • the second thin metal wire E2 has a bent portion B1 that bends inside the acute angle A1, and the fourth metal thin wire E4 has a bent portion B2 that bends inside the acute angle A2.
  • the graininess felt when the observer looks at the second electrode 21 is reduced, and the intersection CP1 is thicker than the design in photolithography. It is possible to suppress patterning.
  • the touch panel 1 provided with the conductive member 3 for the touch panel of the first embodiment is arranged on the display module 8 for displaying an image, for example, as shown in FIG. 5, so that the image display device 9 is arranged. Is configured.
  • the display module 8 is adhered to the back surface 1B of the touch panel 1 with a transparent adhesive 4A.
  • the display module 8 includes a display screen such as a liquid crystal display, a controller for controlling the display of an image on the display screen, and the like. The operator of the image display device 9 visually recognizes the image displayed on the display module 8 through the touch panel 1, and performs a touch operation via the touch panel 1 based on the visually recognized image.
  • moire may occur due to interference between the pixel pattern of the display module and the mesh pattern formed by the fine metal wires constituting the sensor of the touch panel.
  • the mesh pattern and the pixel pattern of the display module are likely to interfere with each other, and moire is likely to occur.
  • the intersections of the thin metal lines in the mesh pattern may be patterned thicker than designed, but in this case, the light transmittance in the mesh pattern is local. Unevenness occurs. Therefore, density unevenness may occur in the image on the display module visually recognized through the touch panel.
  • the pixel pattern of the display module 8 is provided. Interference with and is less likely to occur, and the occurrence of moire is suppressed.
  • the mesh pattern MP1 in the first electrode 11 and the second electrode 21 is patterned by photolithography, it is possible to prevent the plurality of intersections CP1 in the mesh pattern MP1 from being patterned thicker than designed, so that the touch panel can be used. Density unevenness in the image on the display module 8 visually recognized through 1 is also suppressed.
  • the first electrode 11 and the second electrode 21 are formed by the metal thin wires MW1 and MW2, and are formed by a plurality of irregular mesh cells MC1 having a deformed diamond shape. It has the mesh pattern MP1 to be formed, and further, the second metal thin wire E2 extending from the intersection CP1 of the metal thin wires MW1 and MW2 has a bent portion B1, and the fourth metal thin wire E4 has a bent portion B2. Therefore, when it is used in the image display device 9, it is possible to reduce the feeling of roughness while suppressing the occurrence of moire.
  • the mesh pattern MP1 in the first electrode 11 and the second electrode 21 is patterned by photolithography, it is suppressed that the intersection CP1 in the mesh pattern MP1 is patterned thicker than designed, and the conductive member for the touch panel is prevented from being patterned.
  • the touch panel 1 including 3 is used in the image display device 9, density unevenness in the image on the display module 8 visually recognized through the touch panel 1 is also suppressed.
  • a dummy electrode (not shown) that is not electrically connected to the plurality of first electrodes 11 and is insulated from the surrounding circuit is provided between the plurality of first electrodes 11 in the transmission region S1 shown in FIG. May be done. Further, a dummy electrode (not shown) that is not electrically connected to the plurality of second electrodes 21 and is insulated from the surrounding circuit may be provided between the plurality of second electrodes 21 in the transmission region S1. ..
  • These dummy electrodes are composed of the thin metal wires MW1 and MW2 constituting the first electrode 11 and the second electrode 21, and may have the same pattern as the mesh pattern MP1.
  • a fractured portion is formed between the first electrode 11 and the dummy electrode and between the second electrode 21 and the dummy electrode, and the width of the fractured portion is preferably in the range of 5 ⁇ m to 50 ⁇ m.
  • the first electrode 11 and the dummy electrode are electrically insulated from each other, and the second electrode 21 and the dummy electrode are electrically insulated from each other.
  • an additional break portion may be further formed inside the dummy electrode.
  • the thin metal wires MW1 and MW2 constituting the first electrode 11 and the second electrode 21 prevent the thin metal wires MW1 and MW2 from being conspicuously visually recognized, and the electricity of the first electrode 11 and the second electrode 21 is increased. From the viewpoint of keeping the resistance at a low value and improving the detection sensitivity to the touch operation, it is preferable to have a line width of 1 ⁇ m or more and 3 ⁇ m or less.
  • the touch panel 1 has a certain level or more so that the image displayed on the display module 8 can be clearly seen when the touch panel 1 is used as the image display device 9. It is preferable to have a light transmittance.
  • the aperture ratio of the mesh pattern MP1 in the first electrode 11 and the second electrode 21 is preferably 95% to 99%.
  • the aperture ratio of the mesh pattern MP1 is defined by the ratio of the area of the region where the thin metal wires MW1 and MW2 do not exist per unit area in the mesh pattern MP1.
  • first metal thin wire E1 and the third metal thin wire E3 each have a bent portion instead of the second metal thin wire E2 having a bent portion B1 and the fourth metal thin wire E4 having a bent portion B2. good.
  • the first metal thin wire E1 has a bent portion B3
  • the second metal thin wire E2 has a bent portion B1
  • the third metal thin wire E3 has a bent portion B4
  • the fourth The thin metal wire E4 may also have a bent portion B2.
  • the plurality of thin metal wires MW1 and MW2 of the first electrode 11 and the second electrode 21 extend at least so as to sandwich the sharp angle of the deformed rhombus like the first metal thin wire E1 to the fourth metal thin wire E4.
  • a pair of metal thin wires and at least one of the pair of metal thin wires having a bent portion that is, all or a part of the first metal thin wire E1 to the fourth metal thin wire E4 has a bent portion B1.
  • B4 By having B4, the occurrence of moire when the touch panel 1 including the conductive member 3 for the touch panel is used for the image display device 9 is suppressed, and the feeling of roughness is also reduced.
  • the bent portions B1 and B2 have a linear shape, but may have a curved shape.
  • FIG. 7 shows the intersection CP2 of the thin metal wires MW1 and MW2 in the second embodiment.
  • a first metal wire E5, a second metal wire E6, a third metal wire E7, and a fourth metal wire E8 extend from the intersection CP2.
  • the second metal wire E6 has a curved bending portion B5 that bends inward at an acute angle A3 from the bending starting point SP3 toward the intersection CP2. Have.
  • the bent portion B5 intersects the first metal thin wire E5 at an intersection angle T3 larger than the angle of the acute angle A3 sandwiched between the first metal thin wire E5 and the second metal thin wire E6.
  • the fourth metal thin wire E8 has a curved bending portion B6 that bends inward of the acute angle A4 from the bending starting point SP4 toward the intersection CP2.
  • the bent portion B6 intersects the third metal thin wire E7 at an intersection angle T4 larger than the angle of the acute angle A4 sandwiched by the third metal thin wire E7 and the fourth metal thin wire E8.
  • the touch panel of the second embodiment is used as in the case where the bent portions B1 and B2 have a linear shape in the first embodiment.
  • a touch panel including a conductive member is used in an image display device, it is possible to reduce the feeling of roughness while suppressing the occurrence of moire.
  • the second metal thin wire E6 is not limited to having a bent portion B5 and the fourth metal thin wire E8 has a bent portion B6, and as shown in FIG. 8, the first metal thin wire E5 has a curved bent portion.
  • the second metal thin wire E6 has a curved bent portion B5, the third metal thin wire E7 has a curved bent portion B8, and the fourth metal thin wire E8 has a curved bent portion B6.
  • the curved bent portions B5 to B8 may have any curved shape as long as the thin metal wires E5 to E8 are continuously connected to each other at the intersection CP2, but the curved portion is designed by calculation. It is preferable to have a shape of a possible multi-order curve, and in particular, it is preferable to have a shape of a quadratic curve that is easy to calculate.
  • the first electrode 11 and the second electrode 21 each have the mesh pattern MP1, but the first electrode 11 and the second electrode 21 overlap each other, so that the first electrode 11 and the second electrode 21 overlap each other in the plan view.
  • the mesh pattern MP1 can also be formed.
  • the thin metal wire MW1 of the first electrode 11 and the thin metal wire MW2 of the second electrode 21 overlap each other, or the thin metal wire MW2 of the first electrode 11 and the thin metal wire MW1 of the second electrode 21 overlap each other. The part is formed.
  • FIG. 9 shows the intersection CP3 of the thin metal wire MW1 of the first electrode 11 and the thin metal wire MW2 of the second electrode 21 in the third embodiment.
  • a first metal wire E9, a second metal wire E10, a third metal wire E11, and a fourth metal wire E12 extend from the intersection CP3.
  • the first metal wire E9 and the third metal wire E11 are a part of the metal wire MW1 of the first electrode 11.
  • the second thin metal wire E10 and the fourth thin metal wire E12 are a part of the second electrode 21. Therefore, the first metal wire E9 and the third metal wire E11 and the second metal wire E10 and the fourth metal wire E12 are arranged on different surfaces and are electrically insulated from each other at the intersection CP3.
  • the second metal thin wire E10 has a bent portion B9 bent inward of an acute angle A5 sandwiched between the first metal thin wire E9 and the second metal thin wire E10 from the bending starting point SP5 toward the first metal thin wire E9.
  • the bent portion B9 has a linear shape and intersects the first metal thin wire E9 at an intersection angle T5 larger than the acute angle A5.
  • the fourth metal thin wire E12 has a bent portion B10 bent inward of an acute angle A6 sandwiched between the third metal thin wire E11 and the fourth metal thin wire E12 from the bending starting point SP6 toward the third metal thin wire E11.
  • the bent portion B10 has a linear shape and intersects the third metal thin wire E11 at an intersection angle T6 larger than the acute angle A6.
  • the operation is performed. Similar to the case where the first metal wire E1 to the fourth metal wire E4 are arranged on the same plane as in the first embodiment, the touch panel including the conductive member for the touch panel according to the third embodiment is used in the image display device. The occurrence of moire when used is suppressed, and the feeling of roughness is also reduced.
  • the second metal thin wire E10 is not limited to having a bent portion B9 and the fourth metal thin wire E12 has a bent portion B10.
  • the first metal thin wire E9 has a bent portion B11.
  • the second metal thin wire E10 may have a bent portion B9
  • the third metal thin wire E11 may have a bent portion B12
  • the fourth metal thin wire E12 may have a bent portion B10.
  • the bent portions B9 and B10 have a linear shape, but the bent portions B5 and B6 of the second embodiment may have a curved shape.
  • FIG. 11 shows the intersection CP4 of the thin metal wire MW1 of the first electrode 11 and the thin metal wire MW2 of the second electrode 21 in the fourth embodiment.
  • a first metal wire E13, a second metal wire E14, a third metal wire E15, and a fourth metal wire E16 extend from the intersection CP4.
  • the first metal wire E13 and the third metal wire E15 are a part of the metal wire MW1 of the first electrode 11, and the second metal wire E14 and the fourth metal wire E16 are one of the metal wire MW2 of the second electrode 21. It is a department.
  • the second metal thin wire E14 has a bent portion B13 bent inward of an acute angle A7 sandwiched between the first metal thin wire E13 and the second metal thin wire E14 from the bending starting point SP7 toward the first metal thin wire E13.
  • the bent portion B13 has a curved shape and intersects the first metal thin wire E13 at an intersection angle T7 larger than the acute angle A7.
  • the fourth metal thin wire E16 has a bent portion B14 bent inward of an acute angle A8 sandwiched between the third metal thin wire E15 and the fourth metal thin wire E16 from the bending starting point SP8 toward the third metal thin wire E15.
  • the bent portion B14 has a curved shape and intersects the third metal thin wire E15 at an intersection angle T8 larger than the acute angle A8.
  • the second metal thin wire E14 is not limited to having a bent portion B13 and the fourth metal thin wire E16 has a bent portion B14.
  • the first metal thin wire E13 has a curved shape.
  • the second metal thin wire E14 has a curved bent portion B13
  • the third metal thin wire E15 has a curved bent portion B16
  • the fourth metal thin wire E16 has a curved bent portion B15. It can also have a B14.
  • the mesh pattern MP1 in the first electrode 11 and the second electrode 21 has a plurality of thin metal wires MW3 and a plurality of metal wires MW3 with respect to a regular reference mesh pattern MP2 having a plurality of diamond-shaped reference mesh cells MC2.
  • the positions of the intersections of the thin metal wires MW4 are randomly arranged within a certain range, but the shape of the mesh pattern MP1 in the present invention is not limited to this.
  • FIG. 13 shows a partially enlarged plan view of the first electrode 31 according to the fifth embodiment.
  • the first electrode 31 has a plurality of thin metal wires MW5 extending along the first direction D1 and a plurality of thin metal wires MW6 extending along the second direction D2 in a plan view. Further, the plurality of thin metal wires MW5 and the plurality of thin metal wires MW6 intersect each other so as to be electrically connected to each other on the same surface, and a plurality of intersections CP5 where the thin metal wires MW5 and the thin metal wires MW6 intersect are formed. ing.
  • a plurality of irregular mesh cells MC3 having a parallelogram are formed, and the plurality of irregular mesh cells MC3 are used.
  • a mesh pattern MP3 is formed. This mesh pattern MP3 is formed by a plurality of thin metal wires MW3 extending linearly along the first direction D1 and a plurality of thin metal wires MW4 extending linearly along the second direction D2 as drawn by dotted lines in FIG.
  • the distances of each are randomly changed within a certain range.
  • a method can be used in which the distance between at least one pair of sides parallel to each other of the reference mesh cell MC2 having a diamond shape is randomly changed within a certain range.
  • the range that changes the spacing of at least one pair of sides parallel to each other in the cell MC2 is a diamond-shaped reference mesh in the first direction D1 and the second direction D2, respectively, from the viewpoint of suppressing moire.
  • the length range is preferably 1/50 or more of the distance between two adjacent parallel sides of the cell MC2.
  • the range that changes the spacing of at least one pair of sides parallel to each other in the regular diamond-shaped reference mesh cell MC2 is adjacent parallel to each other in the first direction D1 and the second direction D2, respectively.
  • the length range is preferably 1/10 or less of the distance between the two sides, and more preferably 1/20 or less.
  • the irregularity [%] of the mesh cell MC3 can be expressed by the following equation (2).
  • (Irregularity) (distance for translating one side of the diamond-shaped reference mesh cell MC2) / (distance between two parallel sides of the diamond-shaped reference mesh cell MC2) ⁇ 100 ... (2) Therefore, the irregularity is preferably 2% or more and 10% or less, and more preferably 2% or more and 5% or less.
  • the irregular mesh cell MC3 has a shape in which the rhombus is deformed.
  • all the irregular mesh cells MC3 connecting the plurality of intersections CP5 with a straight line have a deformed rhombus if the length of each side is within ⁇ 20% of the average value of the lengths of the four sides. I can say.
  • the regular reference mesh cell MC2 can be restored by finding the average value of the lengths of each side of 100 irregular mesh cells MC3 adjacent to each other with the arbitrary intersection CP5 as the center.
  • the acute angle of the diamond-shaped mesh cell MC3 of the regular reference mesh pattern MP3 is more preferably 55 degrees to 80 degrees and most preferably 65 degrees to 75 degrees from the viewpoint of suppressing moire.
  • the second electrode in the fifth embodiment has a mesh pattern MP3 composed of a plurality of irregular mesh cells MC3 as shown in FIG. 13, similarly to the first electrode 31.
  • the mesh pattern MP3 has a shape as shown in FIG. 13, the same as in the case where the mesh pattern MP3 has a shape as shown in FIG. 3 as in the mesh pattern MP1 in the first embodiment.
  • the touch panel including the conductive member for the touch panel of the fifth aspect is used in the image display device, the generation of moire is suppressed and the feeling of roughness is also reduced.
  • the first conductive layer 6A is arranged on one surface 5A side of the transparent insulating substrate 5, and the second conductive layer 6B is arranged on the other surface 5B side of the transparent insulating substrate 5.
  • the arrangement of the 1 conductive layer 6A and the 2nd conductive layer 6B is not limited to this.
  • FIG. 14 shows the configuration of the touch panel 41 according to the sixth embodiment.
  • the touch panel 41 has a front surface 41A and a back surface 41B, and is used in a state where the display module 8 is arranged on the back surface 41B side.
  • the surface 41A of the touch panel 41 is a touch detection surface, and is a visual side for the operator of the touch panel 41 to observe the image displayed on the display module 8 through the touch panel 41.
  • the touch panel 41 has a cover panel 2 arranged on the surface 41A, and a touch panel conductive member 43 is bonded to the surface of the cover panel 2 on the opposite side of the surface 41A with a transparent adhesive 4.
  • the conductive member 43 for the touch panel includes a transparent insulating substrate 5, a second conductive layer 6B formed on one surface 5A of the transparent insulating substrate 5, a transparent insulating member 7B formed on the second conductive layer 6B, and the like. It has a first conductive layer 6A formed on the transparent insulating member 7B. Further, as shown in FIG. 14, the transparent insulating member 7A may be arranged so as to cover the first conductive layer 6A for the purpose of protecting the first conductive layer 6A or for the purpose of flattening. The first conductive layer 6A, the second conductive layer 6B, and the transparent insulating members 7A and 7B may be formed on the surface 5B of the transparent insulating substrate 5.
  • the embodiment 6 When the touch panel 41 including the conductive member 43 for the touch panel is used in the image display device, the occurrence of moire is suppressed, and the feeling of roughness is also reduced.
  • each member constituting the touch panel conductive member 3 of the first embodiment will be described.
  • the members constituting the touch panel conductive member of the second to fifth embodiments and the touch panel conductive member 43 of the sixth embodiment also constitute the touch panel conductive member 3 of the first embodiment. It shall be in accordance with.
  • the transparent insulating substrate 5 is not particularly limited as long as it is transparent and has electrical insulating properties and can support the first conductive layer 6A and the second conductive layer 6B, but is not particularly limited, but for example, a resin substrate or a glass substrate or the like. Is used. More specifically, examples of the material constituting the transparent insulating substrate 5 include glass, tempered glass, non-alkali glass, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and cycloolefin polymer (COP).
  • PET polyethylene terephthalate
  • PEN polyethylene naphthalate
  • COP cycloolefin polymer
  • the thickness of the transparent insulating substrate 5 is preferably, for example, 20 ⁇ m to 1100 ⁇ m, more preferably 20 ⁇ m to 500 ⁇ m. In particular, in the case of an organic resin substrate such as PET, the thickness is preferably 20 ⁇ m to 200 ⁇ m, more preferably 30 ⁇ m to 100 ⁇ m.
  • the total light transmittance of the transparent insulating substrate 5 is preferably 40% to 100%.
  • the total light transmittance is measured by using, for example, "Plastic--How to determine the total light transmittance and the total light reflectance" specified in JIS K 7375: 2008.
  • One of the preferred embodiments of the transparent insulating substrate 5 is a treated substrate that has been subjected to at least one treatment selected from the group consisting of atmospheric pressure plasma treatment, corona discharge treatment, and ultraviolet irradiation treatment.
  • a hydrophilic group such as an OH group is introduced on the surface of the treated transparent insulating substrate 5, and the adhesiveness between the transparent insulating substrate 5 and the first conductive layer 6A and the transparent insulating substrate 5 are obtained. And the adhesion between the second conductive layer 6B and the second conductive layer 6B are improved.
  • the atmospheric pressure plasma treatment is preferable in that the adhesion between the transparent insulating substrate 5 and the first conductive layer 6A and the adhesion between the transparent insulating substrate 5 and the second conductive layer 6B are further improved. ..
  • ⁇ Undercoat layer> In order to improve the adhesion between the transparent insulating substrate 5 and the first conductive layer 6A and the second conductive layer 6B, between the transparent insulating substrate 5 and the first conductive layer 6A and between the transparent insulating substrate 5 and the second conductive layer 6B.
  • An undercoat layer can also be placed between and.
  • the undercoat layer can contain a polymer, and can further improve the adhesion between the transparent insulating substrate 5 and the first conductive layer 6A and the adhesion between the transparent insulating substrate 5 and the second conductive layer 6B.
  • the method for forming the undercoat layer is not particularly limited, and examples thereof include a method in which a composition for forming an undercoat layer containing a polymer is applied onto a substrate and heat-treated as necessary. Further, as the composition for forming the undercoat layer containing a polymer, gelatin, acrylic resin, urethane resin, acrylic / styrene-based latex containing inorganic or polymer fine particles, or the like may be used.
  • the conductive member 3 for the touch panel is described above as another layer between the transparent insulating substrate 5 and the first conductive layer 6A and between the transparent insulating substrate 5 and the second conductive layer 6B.
  • a refractive index adjusting layer may be provided.
  • the refractive index adjusting layer for example, an organic layer to which particles of a metal oxide such as zirconium oxide for adjusting the refractive index are added can be used.
  • the thickness of the above is not particularly limited, but is preferably 0.01 ⁇ m to 10.00 ⁇ m, more preferably 2.00 ⁇ m or less, and particularly preferably 0.02 ⁇ m to 1.00 ⁇ m. Most preferably, it is 02 ⁇ m to 0.60 ⁇ m. Thereby, the durability of the first electrodes 11, 31 and the second electrode 21 can be easily improved.
  • the fine metal wires MW1, MW2, MW5, and MW6 are made of a metal or alloy as a forming material, and can be formed of, for example, copper, aluminum, or silver.
  • the fine metal wires MW1, MW2, MW5, and MW6 preferably contain copper, but may contain metals other than copper, such as gold and silver.
  • the fine metal wires MW1, MW2, MW5, and MW6 may contain metallic silver and a polymer binder such as gelatin or acrylic / styrene latex, which is suitable for forming a mesh pattern.
  • Other preferred ones are aluminum, silver, molybdenum, titanium metals and alloys thereof.
  • these laminated structures may be used, and for example, fine metal wires having a laminated structure such as molybdenum / copper / molybdenum and molybdenum / aluminum / molybdenum can be used.
  • the fine metal wires MW1, MW2, MW5, and MW6 may include, for example, metal oxide particles, a metal paste such as silver paste and copper paste, and metal nanowire particles such as silver nanowires and copper nanowires. ..
  • a blackening layer may be formed at least on the visible side of the thin metal wires MW1, MW2, MW5, and MW6.
  • a metal oxide, a metal nitride, a metal oxynitride, a metal sulfide and the like are used, and typically, copper oxynitride, copper nitride, copper oxide, molybdenum oxide and the like can be used.
  • a method for forming the thin metal wires MW1, MW2, MW5, and MW6 will be described.
  • a method for forming these fine metal wires for example, a sputtering method, a plating method, a silver salt method, a printing method and the like can be appropriately used.
  • a method for forming the fine metal wires MW1, MW2, MW5, and MW6 by a sputtering method will be described.
  • a copper foil layer is formed by sputtering, and copper wiring is formed from the copper foil layer by a photolithography method, whereby thin metal wires MW1, MW2, MW5, and MW6 can be formed.
  • a copper foil layer can also be formed by so-called vapor deposition.
  • electrolytic copper foil can be used in addition to the sputtered copper foil or the vapor-deposited copper foil. More specifically, the step of forming the copper wiring described in JP-A-2014-29614 can be used.
  • the method of forming the fine metal wires MW1, MW2, MW5, and MW6 by the plating method will be described.
  • the thin metal wires MW1, MW2, MW5, and MW6 can be configured by using a metal plating film formed on the base layer by applying electroless plating to the electroless plating base layer.
  • the fine metal wires MW1, MW2, MW5, and MW6 form a metal plating film by immersing the base material in an electroless plating bath after forming a pattern of catalyst ink containing at least metal fine particles on the base material. It is formed by doing.
  • the method for producing a metal-coated substrate described in JP-A-2014-159620 can be used.
  • the thin metal wires MW1, MW2, MW5, and MW6 are provided with a catalyst or a catalyst precursor after forming a resin composition having a functional group capable of interacting with at least a metal catalyst precursor in a pattern on a substrate.
  • the base material is immersed in an electroless plating bath to form a metal plating film. More specifically, the method for producing a metal-coated substrate described in Japanese Patent Application Laid-Open No. 2012-144761 can be applied.
  • the method of forming the thin metal wires MW1, MW2, MW5, and MW6 by the silver salt method will be described.
  • the silver salt emulsion layer containing silver halide is exposed to an exposure pattern of fine metal wires MW1, MW2, MW5, and MW6, and then developed, so that the fine metal wires MW1, MW2, and MW5 are exposed.
  • MW6 can be formed. More specifically, JP-A-2012-6377, JP-A-2014-121512, JP-A-2014-209332, JP-A-2015-22397, JP-A-2016-192200 and International Publication No. 2016. The method for manufacturing a thin metal wire described in 20157585 can be used.
  • a method for forming the thin metal wires MW1, MW2, MW5, and MW6 by a printing method will be described.
  • a conductive paste containing a conductive powder is applied to a substrate so as to have the same pattern as the metal thin wires MW1, MW2, MW5, and MW6, and then heat treatment is applied to the metal fine wires MW1, MW2, MW5, and MW6.
  • the pattern formation using the conductive paste is performed by, for example, an inkjet method or a screen printing method. More specifically, as the conductive paste, the conductive paste described in JP-A-2011-28885 can be used.
  • ⁇ Cover panel> As the material of the cover panel 2, tempered glass, polycarbonate, polyethylene terephthalate, polymethylacrylic resin (PMMA) or the like can be used, and the thickness of the cover panel 2 is preferably 0.1 mm to 1.5 mm. .. ⁇ Adhesive>
  • an optical transparent adhesive sheet OCA: Optical Clear Adhesive
  • an optical transparent adhesive resin OCR: Optical Clear Resin
  • the preferred film thickness is 10 ⁇ m or more and 200 ⁇ m or less.
  • the optical transparent adhesive sheet for example, the 8146 series manufactured by 3M can be used.
  • a PET film (Cosmo Shine A4300 manufactured by Toyobo Co., Ltd.) having a thickness of 50 ⁇ m in which easy-adhesive layers were formed on both sides was prepared.
  • a copper oxide film was formed as an adhesion layer on both sides of the PET film.
  • the film forming chamber pressure 0.4 Pa
  • power density 1.
  • Sputtering film formation was performed under the conditions of 7. W / cm2 and roll temperature during film formation: 90 ° C.
  • the film thickness of the obtained copper oxide film was 20 nm.
  • a copper film was formed on the copper oxide film on one side of the copper oxide films formed on both sides of the PET film.
  • argon gas flow rate: 270 sccm
  • the film forming chamber pressure 0.4 Pa
  • the power density 4.2 W / cm 2
  • the roll temperature during film forming 90 ° C.
  • Sputtering film formation was performed under the conditions.
  • the film thickness of the copper film was 300 nm.
  • a rust preventive treatment was performed on the copper film, and the copper film was patterned by a photolithography method. At this time, a positive resist was applied and formed on the copper film so as to have a film thickness of 2 ⁇ m. Next, a glass photomask having a mesh pattern with a line width of 5 ⁇ m corresponding to the mesh pattern MP1 in FIG. 1 was prepared, and the metal halide lamp was applied to the copper film with the glass photomask placed on the resist film.
  • the laminate on which the resist film was placed was immersed in an aqueous solution of sodium hydroxide having a concentration of 3% to develop the resist film, and a resist film having a pattern corresponding to the mesh pattern MP1 in FIG. 1 was obtained.
  • the copper oxide film and the copper film were simultaneously etched with a ferric chloride aqueous solution having a concentration of 5% to pattern the metal wiring.
  • the remaining resist film was peeled off to obtain a conductive member for a touch panel provided with the first conductive layer 6A having the mesh pattern MP1 of FIG.
  • the mesh pattern MP1 in the first embodiment is a modification of the reference mesh pattern MP2 in which the diamond-shaped reference mesh cell MC2 having a side of 300 ⁇ m and an acute angle of 65 degrees is regularly arranged as shown by the dotted line in FIG. It was done.
  • the mesh pattern MP1 is a mesh pattern MP1 in which the positions of the intersections of the thin metal lines MW3 and MW4 in the reference mesh pattern MP2 are randomly rearranged within a circular range having a radius of 10 ⁇ m around the intersections. Is.
  • the irregularity of this mesh pattern MP1 was 3.3%.
  • the first metal thin wire E1 to the fourth metal thin wire E4 extend around the intersection CP1 in the mesh pattern MP1, and the first metal thin wire E1 has a bent portion B3 and is a second.
  • the thin metal wire E2 has a bent portion B1
  • the third thin metal wire E3 has a bent portion B4
  • the fourth thin metal wire E4 has a bent portion B2.
  • the bent portions B1 to B4 have a linear shape.
  • the bending starting point of the bending portions B1 to B4 intersects on two pairs of metal thin wires MW3 and MW4 sandwiching an acute angle after the positions of the intersections of the metal thin wires MW3 and MW4 in the reference mesh pattern MP2 are randomly rearranged.
  • a point located at a distance of 15 ⁇ m from the portion CP1 is designed as a point translated 2.5 ⁇ m toward the outside of an acute angle along a direction orthogonal to the corresponding thin metal wires MW3 and MW4.
  • the starting point of bending of the bending portions B1 to B4 designed in this way is arranged at a position of 15.2 ⁇ m from the intersection CP1.
  • the bending starting point of the bent portions B1 to B4 is located at a position approximately 1/20 of one side of the mesh cell MC1 from the intersecting portion CP1. Have been placed. As a result, all of the intersecting portions CP1 in the mesh pattern MP1 have bending portions B1 to B4.
  • Example 1 the line widths of the thin metal wires MW1 and MW2 forming the mesh pattern MP1 were 4.7 ⁇ m on average.
  • the average crossing angle between the first metal thin wire E1 and the second metal thin wire E2 was about 85 degrees, which was larger than the acute angle between the first metal thin wire E1 and the second metal thin wire E2.
  • the average crossing angle between the third metal thin wire E3 and the fourth metal thin wire E4 was also about 85 degrees, which was larger than the acute angle between the third metal thin wire E3 and the fourth metal thin wire E4.
  • the line width of the mesh pattern MP1 was measured using an optical microscope based on the optical microscope images taken at 1000 times and 100 times magnification. Further, the average intersection angle between the first metal thin wire E1 and the second metal thin wire E2 and the average intersection angle between the third metal thin wire E3 and the fourth metal thin wire E4 are set at arbitrary 20 intersections CP1 in the mesh pattern MP1. On the other hand, by photographing at 1000 times and 100 times magnifications using an optical microscope, and based on the obtained optical microscope images, the intersection angles at each intersection CP1 are photographed and the intersection angles are averaged. Calculated.
  • the bent portions B5 to B8 have a curved shape consisting of a quadratic curve, and the mesh pattern MP1 has an acute angle of 60 degrees instead of the diamond-shaped reference mesh pattern MP2 having an acute angle of 65 degrees.
  • the conductive member for the touch panel of Example 2 was produced in the same manner as in Example 1 except that the rhombic reference mesh pattern MP2 having the above was modified.
  • the conductive member for the touch panel of Example 3 was produced in the same manner as in Example 2 except that the line width of the mesh pattern of the glass photomask was set to 2.5 ⁇ m. In Example 3, the line widths of the thin metal wires MW1 and MW2 forming the mesh pattern MP1 were 2.4 ⁇ m.
  • Example 4 The conductive member for the touch panel of Example 4 was produced in the same manner as in Example 2 except that the line width of the mesh pattern of the glass photomask was 1.5 ⁇ m. In Example 4, the line widths of the thin metal wires MW1 and MW2 forming the mesh pattern MP1 were 1.4 ⁇ m.
  • Example 5 After randomly rearranging the positions of the intersections of the metal thin wires MW3 and MW4 in the reference mesh pattern MP2, points located at a distance of 50 ⁇ m from the intersection CP2 on two pairs of metal thin wires MW3 and MW4 sandwiching an acute angle.
  • Example 5 in the same manner as in Example 2 except that the points translated by 9 ⁇ m toward the outside of the acute angle along the direction orthogonal to the corresponding thin metal wires MW3 and MW4 are designed as the bent portions B5 to B8.
  • the conductive member for the touch panel was manufactured.
  • the starting point of bending of the bending portions B5 to B8 in Example 5 was arranged at a position at a distance of 50.8 ⁇ m from the intersection CP2. Assuming that the average value of the side lengths of the mesh cell MC1 in the mesh pattern MP1 is 300 ⁇ m, the starting point of the bending of the bending portions B5 to B8 is at a position approximately 1/6 of one side of the mesh cell MC1 from the intersection CP2. Have been placed.
  • Example 6 After randomly rearranging the positions of the intersections of the metal thin wires MW3 and MW4 in the reference mesh pattern MP2, points located at a distance of 25 ⁇ m from the intersection CP2 on the two pairs of metal thin wires MW3 and MW4 sandwiching an acute angle.
  • Example 6 in the same manner as in Example 2 except that the points translated by 4 ⁇ m toward the outside of the acute angle along the direction orthogonal to the corresponding thin metal wires MW3 and MW4 are designed as the bent portions B5 to B8.
  • the conductive member for the touch panel was manufactured.
  • the starting point of bending of the bending portions B5 to B8 in Example 6 was arranged at a position at a distance of 25.3 ⁇ m from the intersection CP2. Assuming that the average value of the side lengths of the mesh cell MC1 in the mesh pattern MP1 is 300 ⁇ m, the starting point of bending of the bent portions B5 to B8 is at a position approximately 1/12 of one side of the mesh cell MC1 from the intersecting portion CP2. Have been placed.
  • Example 7 The same procedure as in Example 3 is carried out except that the mesh pattern MP1 is a modified pattern of the diamond-shaped reference mesh pattern MP2 having an acute angle of 55 degrees instead of the diamond-shaped reference mesh pattern MP2 having an acute angle of 60 degrees.
  • the conductive member for the touch panel of Example 7 was produced.
  • the average crossing angle between the first metal thin wire E5 and the second metal thin wire E6 and the average crossing angle between the third metal thin wire E7 and the fourth metal thin wire E8 are both about 80. It was a degree, which was larger than the angle of the sharp angle between the first metal wire E5 and the second metal wire E6 and the angle of the sharp angle between the third metal wire E7 and the fourth metal wire E8.
  • Example 8> The same procedure as in Example 3 is carried out except that the mesh pattern MP1 is a modified pattern of the diamond-shaped reference mesh pattern MP2 having an acute angle of 75 degrees instead of the diamond-shaped reference mesh pattern MP2 having an acute angle of 60 degrees.
  • the conductive member for the touch panel of Example 8 was produced.
  • the average crossing angle between the first metal thin wire E5 and the second metal thin wire E6 and the average crossing angle between the third metal thin wire E7 and the fourth metal thin wire E8 are both about 100. It was a degree, which was larger than the sharp angle between the first metal thin wire E5 and the second metal thin wire E6 and the sharp angle between the third metal thin wire E7 and the fourth metal thin wire E8. Therefore, the angle between the first metal thin wire E5 and the fourth metal thin wire E8 and the angle between the second metal thin wire E6 and the third metal thin wire E7 became sharp angles.
  • Example 9 As shown in FIG. 6, the first metal thin wire E1 has a bent portion B3, the second metal thin wire E2 has a bent portion B1, the third metal thin wire E3 has a bent portion B4, and the fourth metal thin wire has a bent portion B4.
  • E4 having a bent portion B2
  • the second metal thin wire E2 has a bent portion B1
  • the fourth metal thin wire E4 has a bent portion B2
  • the conductive member for the touch panel of Example 9 was produced in the same manner as in Example 1 except that the mesh pattern MP1 was patterned so that the thin metal wire E3 did not have a bent portion.
  • the average crossing angle between the first metal thin wire E1 and the second metal thin wire E2 and the average crossing angle between the third metal thin wire E3 and the fourth metal thin wire E4 are both about 75. It was a degree, which was larger than the angle of the sharp angle sandwiched between the first metal wire E1 and the second metal wire E2 and the angle of the sharp angle sandwiched between the third metal wire E3 and the fourth metal wire E4.
  • Example 10 A copper film having a diameter of 300 nm was formed on the copper oxide film on one side of the copper oxide films formed on both sides of the PET film by the same method as the method for forming the copper film in Example 1. Next, a glass photomask having a mesh pattern in which the mesh cell MC1 in which the length of one side of the mesh cell MC1 in Example 1 was doubled was continuously prepared was prepared. Using this glass photomask, the formed copper film was patterned by the same method as the patterning of the metal wiring in Example 1.
  • a copper film having a diameter of 300 nm was formed on the copper oxide film on the other surface side of the PET film by the same method as the method for forming the copper film in Example 1.
  • the mesh cell MC1 in which the length of one side of the mesh cell MC1 in Example 1 is doubled is continuous and overlaps with the mesh pattern of the glass photomask used on one side of the PET film. Therefore, a glass photomask having a mesh pattern forming the mesh pattern MP1 of Example 1 in a plan view was prepared. Using this glass photomask, the formed copper film was patterned by the same method as the patterning of the metal wiring in Example 1.
  • the conductive member for the touch panel of Example 10 provided with the first conductive layer 6A and the second conductive layer 6B was obtained.
  • the first conductive layer 6A and the second conductive layer 6B overlap each other to form the mesh pattern MP1 of FIG. 1 in a plan view.
  • the crossing portion CP3 is formed by the metal wire MW1 in the first conductive layer 6A and the metal wire MW2 in the second conductive layer 6B intersecting with each other while being electrically insulated from each other.
  • a first metal thin wire E9, a second metal thin wire E10, a third metal thin wire E11, and a fourth metal thin wire E12 extend around the intersection CP3.
  • the first metal thin wire E9 has a bent portion B11
  • the second metal thin wire E10 has a bent portion B9
  • the third metal thin wire E11 has a bent portion B12
  • the fourth metal thin wire E12 has a bent portion B10. have.
  • the conductive member for a touch panel according to the tenth embodiment has a first conductive layer 6A on one surface side of the PET film, a second conductive layer 6B on the other surface side of the PET film, and the first conductive layer 6A. It is the same as the conductive member for a touch panel of the first embodiment except that the second conductive layer 6B overlaps with each other to form the mesh pattern MP1 in a plan view.
  • Example 11 The mesh pattern of the glass photomask was used as a mesh pattern corresponding to the mesh pattern MP3 shown in FIG. 13, and the line width thereof was set to 4 ⁇ m to prepare a conductive member for a touch panel.
  • the mesh pattern MP3 in Example 11 is a reference mesh pattern MP2 in which rhombic reference mesh cells MC2 having a side of 300 ⁇ m and an acute angle of 65 degrees are regularly arranged as shown by a dotted line in FIG.
  • the mesh pattern MP3 is such that the distance between the adjacent metal thin wires MW4 in the first direction D1 and the distance between the adjacent metal thin wires MW3 in the second direction D2 are randomly changed within a range of ⁇ 10 ⁇ m, respectively.
  • this sh pattern MP3 was 3.3%. Further, in the same manner as in Example 1, the bent portions B1 to B4 were formed at the randomly rearranged intersecting portions CP5. Further, the average line width of the thin metal wires MW5 and ME6 forming the mesh pattern MP3 in Example 11 was 3.8 ⁇ m. As a result, all of the intersecting portions CP5 in the mesh pattern MP3 have bending portions B1 to B4.
  • Example 12 Of the four metal thin wires extending at a length of 15 ⁇ m around the intersection CP5 in the mesh pattern MP3, the intersection angle between the pair of metal fine wires sandwiching an acute angle is set to 90 degrees, and the metal fine wires MW5 and MW6 of the mesh pattern MP3 are set to 90 degrees.
  • the conductive member for the touch panel of Example 12 was produced in the same manner as in Example 11 except that the members were displaced by 12.5 degrees to the outside of the acute angle.
  • ⁇ Comparative Example 1> The conductive member for the touch panel of Comparative Example 1 was produced in the same manner as in Example 1 except that the mesh pattern of the glass photomask was a regular mesh pattern in which rhombuses having a sharp angle of 65 degrees on a side of 300 ⁇ m were continuous. did.
  • the mesh pattern of the glass photomask is a mesh pattern shown in FIG. 6, except that the first metal wire E1 to the fourth metal wire E4 extending around the intersection CP1 do not have the bent portions B1 to B4.
  • the conductive member for the touch panel of Comparative Example 2 was produced in the same manner as in Example 1.
  • ⁇ Comparative Example 3> The mesh patterns of the two glass photomasks used on both sides of the PET film are shown in FIG. 10, and the first metal wire E9 to the fourth metal wire E12 extending around the intersection CP3 are both bent portions B9.
  • a conductive member for a touch panel of Comparative Example 3 was produced in the same manner as in Example 10 except that the mesh pattern did not have B12.
  • the conductive members for touch panels of Examples 1 to 12 and Comparative Examples 1 to 3 thus produced were evaluated for the feeling of roughness and moire described below.
  • ⁇ Evaluation of roughness> The conductive members for the touch panel of Examples 1 to 12 and Comparative Examples 1 to 3 were arranged on the shakasten of the white fluorescent lamp, and were visually observed by five evaluators from a place 30 cm away from the conductive members for the touch panel. The conductive member for the touch panel was observed in a plan view.
  • the feeling of roughness felt by the evaluator was evaluated according to the following evaluation criteria, and the most frequent evaluation result was taken as the final evaluation result.
  • B There is a slight graininess.
  • C It has a strong feeling of roughness.
  • D The feeling of roughness is strong.
  • the evaluation "D” is a level where there is a practical problem
  • the evaluation "C” or higher is a level where there is no practical problem
  • the evaluation "B” is an excellent level
  • the evaluation "A” is a very excellent level. ..
  • the conductive members for touch panels of Examples 1 to 12 and Comparative Examples 1 to 3 are arranged on a high-definition liquid crystal panel of a 7.9-inch QXGA (Quad Extended Graphics Array), and are separated from the conductive members for touch panels by 30 cm.
  • the conductive member for the touch panel was visually observed by five evaluators from the same place.
  • moire generated by the interference between the mesh patterns MP1 and MP3 of the conductive member for the touch panel and the pixel pattern of the high-definition liquid crystal panel was evaluated according to the following evaluation criteria, and the most evaluation result was taken as the final evaluation result. .. A: No moire is observed. B: Moire is observed.
  • Table 1 shows the evaluation results of the graininess of Examples 1 to 12 and Comparative Examples 1 to 3 and the evaluation results of moire.
  • the line widths of the metal thin wires MW1 and MW2 forming the mesh pattern MP1 are 2.4 ⁇ m, and in Example 4, the line width is 1.4 ⁇ m, so that the metal thin wires MW1 and MW2 are inconspicuous and the evaluator is rough. It is thought that it is difficult to feel the feeling. Further, in the twelfth embodiment, since the crossing angle of the pair of thin metal wires MW1 and MW2 sandwiching the acute angle is 90 degrees, the sharp angle sandwiched between the pair of thin metal wires MW1 and MW2 is not conspicuous, and the evaluator feels rough. It is thought to be difficult to feel.
  • Comparative Example 1 the evaluation result of the feeling of roughness was "C”, but the evaluation result of moire was "B". Since the conductive member for the touch panel of Comparative Example 1 has a regular mesh pattern, it is considered that the mesh pattern and the pixel pattern of the high-definition liquid crystal panel are likely to interfere with each other, and moire is likely to be observed.
  • the conductive member for a touch panel of the present invention can reduce the feeling of roughness while suppressing the occurrence of moire when used in an image display device.

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  • Engineering & Computer Science (AREA)
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  • Theoretical Computer Science (AREA)
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PCT/JP2021/026055 2020-08-27 2021-07-12 タッチパネル用導電部材およびタッチパネル Ceased WO2022044574A1 (ja)

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CN202180048319.XA CN115777093A (zh) 2020-08-27 2021-07-12 触摸面板用导电部件及触摸面板
JP2022545514A JP7469485B2 (ja) 2020-08-27 2021-07-12 タッチパネル用導電部材およびタッチパネル
US18/069,032 US12169617B2 (en) 2020-08-27 2022-12-20 Conductive member with mesh pattern for touch panel and touch panel
JP2024060520A JP2024094338A (ja) 2020-08-27 2024-04-04 タッチパネル用導電部材およびタッチパネル

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