WO2022042336A1 - 半导体反应腔室及半导体加工设备 - Google Patents
半导体反应腔室及半导体加工设备 Download PDFInfo
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- WO2022042336A1 WO2022042336A1 PCT/CN2021/112501 CN2021112501W WO2022042336A1 WO 2022042336 A1 WO2022042336 A1 WO 2022042336A1 CN 2021112501 W CN2021112501 W CN 2021112501W WO 2022042336 A1 WO2022042336 A1 WO 2022042336A1
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- reaction chamber
- accommodating cavity
- wiring
- cavity
- base body
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Definitions
- the present invention relates to the technical field of semiconductor processing equipment, in particular to a semiconductor reaction chamber and semiconductor processing equipment.
- Electrostatic chucks are widely used in the fabrication of integrated circuits such as plasma etching, physical vapor deposition, chemical vapor deposition, and the like.
- the electrostatic chuck is arranged in the semiconductor reaction chamber of the semiconductor processing equipment.
- the electrostatic chuck is used to fix and support the wafer.
- the electrostatic chuck can also provide DC bias for the wafer and control the temperature of the wafer.
- the electrostatic chuck includes a base body and a functional layer.
- the functional layer is generally fixed on the base body through an adhesive layer.
- the base body is provided with a plurality of wiring channels for the functional wiring to pass through, so that the functional wiring can be connected with the functional layer.
- the functional wiring includes, for example, detection wiring and control wiring, etc., the temperature detection device can detect the temperature of the wafer carried on the electrostatic chuck through the detection wiring; the controller can control the heater in the functional layer through the control wiring , so as to control the temperature of the wafer on the electrostatic chuck.
- the interior of the semiconductor reaction chamber in the semiconductor processing equipment is usually in a vacuum state, while the above-mentioned wiring channel in the substrate is in an atmospheric pressure state, and the pressure difference between the interior of the chamber and the wiring channel will cause static electricity.
- Multiple components of the chuck generate force, which easily damages the adhesion between the substrate and the functional layer, thereby affecting the overall installation effect of the electrostatic chuck.
- the invention discloses a semiconductor reaction chamber and semiconductor processing equipment to solve the problem of low connection reliability of the components of the electrostatic chuck due to the unbalanced air pressure inside the semiconductor reaction chamber and the accommodating cavity of the electrostatic chuck.
- the present invention adopts the following technical solutions:
- a semiconductor reaction chamber comprising:
- the cavity encloses an inner cavity
- the electrostatic chuck is located in the inner cavity, the electrostatic chuck includes a base body and a functional layer arranged on the base body, and the base body and the functional layer are fixed by bonding, and the A wiring channel is opened in the base body, the functional layer covers the port of the wiring channel, and together with the base body surrounds the wiring channel to form an accommodation cavity;
- An air pressure adjusting device communicates with the accommodating cavity and is used to balance the air pressure in the accommodating cavity and the air pressure in the inner cavity.
- a semiconductor processing equipment includes the above-mentioned semiconductor reaction chamber.
- the air pressure in the accommodating cavity can be adjusted It can be equal to the air pressure in the inner cavity, so as to avoid damage to the adhesion between the matrix and the functional layer due to the pressure difference between the inner cavity and the accommodating cavity, thereby improving the connection stability between the matrix and the functional layer. Improve the life of the electrostatic chuck.
- FIG. 1 is a cross-sectional view of a semiconductor reaction chamber disclosed in an embodiment of the present invention.
- FIG. 2 is a partial cross-sectional view of a semiconductor reaction chamber disclosed in an embodiment of the present invention.
- FIG. 3 is a schematic structural diagram of an electrostatic chuck in a semiconductor reaction chamber disclosed in an embodiment of the present invention
- FIG. 4 is a schematic structural diagram of FIG. 3 under another viewing angle
- FIG. 5 is a cross-sectional view of a connecting flange in a semiconductor reaction chamber disclosed in an embodiment of the present invention.
- 200-electrostatic chuck 210-base body, 211-wiring channel, 220-ceramic layer, 230-heating layer, 231-second through hole;
- 400-extraction device 410-extraction mechanism, 420-first pipeline, 421-first switch valve, 430-pressure detection device, 450-connecting pipeline;
- 500-inflatable device 500-inflatable device, 510-inflatable mechanism, 520-second pipeline, 521-second switch valve;
- an embodiment of the present invention discloses a semiconductor reaction chamber.
- the disclosed semiconductor reaction chamber is applied to semiconductor processing equipment.
- the disclosed semiconductor reaction chamber includes a cavity 100 and an electrostatic chuck. 200, functional wiring 300 and air pressure regulating device.
- the cavity 100 defines an inner cavity 110 in which the wafer is processed.
- the top of the cavity 100 may be provided with a nozzle 120 that communicates with the inner cavity 110 , and the process gas may be introduced into the inner cavity 110 through the nozzle 120 , and the process gas will physically interact with the wafer in the inner cavity 110 . chemical reaction to complete the processing of the wafer.
- the electrostatic chuck 200 is located in the inner cavity 110 and is used to support and fix the wafer. Specifically, the electrostatic chuck 200 uses electrostatic adsorption to realize the fixation of the wafer.
- a lower electrode housing 900 is disposed below the electrostatic chuck 200 , and the lower electrode housing 900 is used to support the electrostatic chuck 200 and provide an installation basis for the functional wiring 300 and other components.
- the electrostatic chuck 200 includes a base body 210 and a functional layer disposed on the base body 210, wherein the base body 210 can provide a mounting position for the functional layer.
- the base body 210 and the functional layer are fixed by bonding, for example,
- the base body 210 and the functional layer may be bonded by adhesives such as super glue or hot melt adhesive.
- a wiring channel 211 is opened in the base body 210 , the functional layer covers the port of the wiring channel 211 , and the base body 210 surrounds the wiring channel 211 to form a receiving cavity.
- the functional wiring 300 passes through the wiring channel 211 and is in contact with the portion of the functional layer exposed at the port of the wiring channel 211 .
- one end of the functional wiring 300 is located outside the cavity 100 and can be connected to external devices such as controllers, temperature detection devices, etc., and the other end of the functional wiring 300 can pass through the wiring
- the channel 211 is in contact with the functional layer, so that the equipment located outside the cavity 100 can perform operations such as heating and temperature detection on the wafer on the surface of the electrostatic chuck 200 through the functional wiring 300 .
- the number of wiring channels 211 may be multiple, so that different functional wirings 300 can pass through different wiring channels 211 , so that the above operations can be performed simultaneously and mutual interference can be avoided.
- the air pressure adjusting device communicates with the above-mentioned accommodating cavity, and is used for balancing the air pressure in the accommodating cavity and the air pressure in the inner cavity.
- the air pressure in the accommodating cavity can be made equal to the air pressure in the inner cavity 110, so that the adhesiveness between the substrate 210 and the functional layer can be prevented from being damaged due to the pressure difference between the inner cavity 110 and the accommodating cavity.
- the connection stability between the base body 210 and the functional layer is improved, and the service life of the electrostatic chuck 200 is improved.
- the above-mentioned air pressure regulating device includes an air suction device 400 and/or an inflation device 500 .
- the air extraction device 400 communicates with the accommodating cavity, and the air extraction device 400 is used to vacuum the accommodating cavity.
- the air extraction device The air extraction port 400 can be sealedly connected to the opening of the accommodating cavity.
- the air extraction device 400 can extract at least part of the gas in the accommodating cavity, so that the air pressure in the accommodating cavity can be equal to the air pressure in the inner cavity 110 .
- the inner cavity 110 is usually in a vacuum state.
- the air extraction device 400 can be controlled to open, so as to extract the air in the accommodating cavity, so that the air pressure in the accommodating cavity is also in a vacuum state.
- the inflating device 500 is in communication with the accommodating cavity, and the inflating device 500 is used to inflate the accommodating cavity.
- the air outlet of the inflating device 500 can be sealedly connected with the opening of the accommodating cavity.
- the inflator 500 can be controlled to open, so as to inflate the accommodating cavity, so that the air pressure in the accommodating cavity is also in the atmospheric pressure state, thereby making the air pressure in the accommodating cavity It can be equal to the air pressure of the inner cavity 110 .
- the semiconductor reaction chamber disclosed in the embodiment of the present invention at least part of the air in the accommodating cavity can be drawn out through the air extraction device 400, or gas can be introduced into the accommodating cavity through the inflating device 500, so that The air pressure in the accommodating cavity can be equal to the air pressure in the inner cavity 110, so that the adhesiveness between the base body 210 and the functional layer can be prevented from being damaged due to the pressure difference between the inner cavity 110 and the accommodating cavity, and the adhesion between the base body 210 and the functional layer can be improved.
- the connection stability between the functional layers increases the service life of the electrostatic chuck.
- the air pressure in the accommodating cavity can be always equal to the air pressure in the inner cavity 110 through the cooperation between the air suction device 400 and the inflating device 500, so as to avoid the interference between the inner cavity 110 and the accommodating cavity 110.
- the air extraction device 400 or the inflation device 500 may also be provided independently according to specific needs.
- one air extraction device 400 can communicate with multiple accommodating cavities, so that the air in the multiple accommodating cavities can be extracted through one air extraction device 400, thereby improving the Utilization rate of the air extraction device 400 ; similarly, one inflatable device 500 may communicate with multiple accommodating cavities, so that one inflatable device 500 can inflate multiple accommodating cavities, thereby improving the utilization rate of the inflatable device 500 .
- the air extraction device 400 may include an air extraction mechanism 410 and a first pipeline 420 , and the air extraction mechanism 410 may be a vacuum pump or a fan.
- the air extraction mechanism 410 may be disposed outside the inner cavity 110 , and the air extraction mechanism 410 may communicate with the accommodating cavity through the first pipe 420 .
- the first pipe 420 is used to communicate the air extraction mechanism 410 with the accommodating cavity.
- the first end of the first pipe 420 may be located outside the inner cavity 110 and connected to the air extraction port of the air extraction mechanism 410
- the second end of the first pipe 420 can extend into the inner cavity 100 and communicate with the opening of the accommodating cavity.
- the first end of the first pipe 420 can be sealedly connected with the suction port of the suction mechanism 410, and the second end of the first pipe 420 can be sealed with the suction port of the suction mechanism 410 to prevent The gas leaks and affects the pumping effect of the pumping mechanism 410 .
- a sealant may be provided between the first end of the first pipe 420 and the suction port of the suction mechanism 410 and between the second end of the first pipe 420 and the opening of the accommodating cavity, so as to achieve better sealing effect, so that the air-pumping mechanism 410 has a better air-pumping effect on the accommodating cavity.
- the first pipe 420 can also make the installation flexibility of the air extraction mechanism 410 better. Specifically, the extension effect of the first pipe 420 enables the air extraction mechanism 410 to be installed in multiple positions outside the cavity 100 .
- the first pipe 420 may be a flexible pipe, so as to better improve the installation flexibility of the air extraction mechanism 410 .
- a first on-off valve 421 may be provided on the first pipeline 420.
- the air extraction mechanism 410 can pass through the first pipeline 420 to remove at least one part in the accommodating cavity. Part of the air is drawn out so that the air pressure in the accommodating cavity is equal to the air pressure in the inner cavity 110 ; when the first switch valve 421 is closed, the air pressure in the accommodating cavity can be maintained in the above state. This way is convenient for operation, so that the air pressure in the accommodating cavity can be easily equal to the air pressure in the inner cavity 110 .
- the first on-off valve 421 is located outside the cavity 100 for easy control.
- the inflation device 500 may include an inflation mechanism 510 and a second pipeline 520 .
- the inflation mechanism 510 is, for example, a nitrogen gas supply mechanism, and the inflation mechanism 510 may be disposed between the inner cavity 110 .
- the inflation mechanism 510 may communicate with the accommodating cavity through the second pipe 520 .
- the second pipe 520 is used to communicate the inflation mechanism 510 with the accommodating cavity.
- the first end of the second pipe 520 may be located outside the inner cavity 110 and communicated with the air outlet of the inflation mechanism 510.
- the second end of the second pipe 520 may extend into the inner cavity 100 and communicate with the opening of the receiving cavity.
- the first end of the second pipe 520 can be sealedly connected with the air outlet of the inflation mechanism 510, and the second end of the second pipe 520 can be sealed with the inflation port of the inflation mechanism 510 to prevent gas leakage This affects the inflation effect of the inflation mechanism 510 .
- a sealant may be provided between the first end of the second pipe 520 and the inflating port of the inflating mechanism 510 and between the second end of the second pipe 520 and the opening of the accommodating cavity, so as to achieve a better sealing effect and The air pumping effect of the inflating mechanism 510 on the accommodating cavity is better.
- the second pipe 520 can also make the installation flexibility of the inflation mechanism 510 better. Specifically, the extension effect of the second pipe 520 enables the inflation mechanism 510 to be installed in multiple positions outside the cavity 100 .
- the second pipe 520 may be a flexible pipe, so as to better improve the installation flexibility of the inflation mechanism 510 .
- a second on-off valve 521 may be provided on the second pipeline 520.
- the inflation mechanism 510 can inflate the accommodating cavity through the second pipeline 520 to
- the air pressure in the accommodating cavity is made equal to the air pressure in the inner cavity 110; when the second switch valve 521 is closed, the air pressure in the accommodating cavity can be maintained in the above state. This way is convenient for operation, so that the air pressure in the accommodating cavity can be easily equal to the air pressure in the inner cavity 110 .
- the second on-off valve 521 is located outside the cavity 100 for easy control.
- the semiconductor reaction chamber disclosed in the embodiment of the present invention may further include a pressure detection device 430, the pressure detection device 430 may communicate with the accommodating cavity, and the pressure detection device 430 is used to detect the air pressure in the accommodating cavity.
- the pressure detection device 430 can display the detected data, so as to facilitate the staff to control the air pumping mechanism 410 and the inflation mechanism 510 to work, so that the air pressure in the accommodating cavity can be equal to the air pressure in the inner cavity 110 .
- This method is convenient for the operator to operate, so that the operator can easily adjust the air pressure in the accommodating cavity, so that the air pressure in the accommodating cavity and the air pressure in the inner cavity 110 can be easily equalized.
- the semiconductor reaction chamber disclosed in the embodiment of the present invention may further include a mounting portion 600 , the mounting portion 600 may be disposed in the lower electrode housing 900 , the base 210 may be disposed on the mounting portion 600 , and the mounting portion 600 can facilitate the electrostatic chuck 200 At the same time, the mounting portion 600 may be provided with a mounting hole 610 communicating with the accommodating cavity.
- the installation hole 610 can be sealedly connected with the opening of the accommodating cavity, the air extraction device 400 can be communicated with the accommodating cavity through the installation hole 610, and the air extraction port of the air extraction device 400 and the installation hole 610 can be sealedly connected to prevent gas leakage from affecting the air extraction device 400 pumping effect.
- the installation portion 600 makes it easier for the air extraction device 400 to communicate with the accommodating cavity, thereby facilitating the installation of the above components.
- the inflatable device 500 can also communicate with the accommodating cavity through the installation hole 610 , and the air suction port of the inflatable device 500 and the installation hole 610 can be sealedly connected to prevent gas leakage from affecting the inflation effect of the inflatable device 500 .
- the installation part 600 makes it easier for the inflator 500 to communicate with the accommodating cavity, thereby facilitating the installation of the above components.
- the air pressure adjusting device includes an air extraction device 400 and an inflatable device 500
- the air extraction device 400 and the inflatable device 500 may communicate with the accommodating cavity through two installation holes 610 respectively.
- the semiconductor reaction chamber disclosed in the embodiment of the present invention may further include a connecting flange 700, and the connecting flange 700 may be disposed on the side of the mounting portion 600 away from the electrostatic chuck 200, and the connecting flange 700 may be connected to
- the flange 700 may be provided with a gas channel 710, the gas channel 710 may be communicated with the mounting hole 610, and the gas channel 710 and the mounting hole 610 may be sealedly connected, and the air extraction device 400 may be communicated with the gas channel 710, and the extraction of the air extraction device 400.
- the gas port and the gas channel 710 can be connected in a sealed manner.
- the air extraction device 400 communicates with the accommodating cavity through the air passage 710 and the installation hole 610 in sequence.
- the connection flange 700 With the connection flange 700, the installation function wiring can be improved, the connection stability between the air extraction device 400 and the accommodating cavity can be improved, and the air pressure adjustment effect in the accommodating cavity can be improved.
- the inflatable device 500 can also be communicated with the gas channel 710 , and the inflation port of the inflatable device 500 and the gas channel 710 can be sealedly connected.
- the inflator 500 communicates with the accommodating cavity through the gas channel 710 and the installation hole 610 in sequence.
- the connection flange 700 With the connection flange 700, the installation function wiring can be improved, the connection stability between the inflator 500 and the accommodating cavity can be improved, and the air pressure adjustment effect in the accommodating cavity can be further improved.
- the air pressure adjusting device includes the air pumping device 400 and the inflating device 500 , there are two installation holes 610 and two air passages 710 respectively, and they are provided correspondingly.
- the side wall of the connecting flange 700 may be provided with a wiring hole 740 communicating with the gas channel 710, and the functional wiring 300 can be passed through the thread hole 740 .
- This way can also prevent the functional wiring 300 from affecting the communication effect between the air extraction device 400 or the inflation device 500 and the connection flange 700 during the threading process.
- the functional wiring 300 and the threading hole 740 can be connected in a sealed manner, so as to prevent gas leakage from affecting the effect of air extraction or inflation.
- the air pressure adjustment device including the air extraction device 400 and the inflation device 500 as an example, and there are two accommodating chambers, as shown in FIG.
- the second pipes 520 in the device 500 are communicated with each other through the connecting pipes 450.
- the air pumping mechanism 410 can communicate with the two gas passages 710 through the first pipes 420 and the connecting pipes 450, respectively, so that the two gas passages 710 can be connected to each other.
- the air in the accommodating cavity can be extracted, thereby improving the utilization rate of the air extraction device 400; similarly, the inflator 500 can be communicated with the two gas passages 710 through the second pipeline 520 and the connecting pipeline 450, respectively, so that the two accommodating The cavity is inflated, so that the utilization rate of the inflator 500 can be improved.
- other pipeline structures may also be used to realize that one air extraction device 400 communicates with multiple accommodating cavities, and one inflator 500 communicates with multiple accommodating cavities.
- the semiconductor reaction chamber disclosed in the embodiment of the present invention may further include a sealing ring (not shown in the figure), the sealing ring may be disposed between the surfaces of the mounting portion 600 and the connecting flange 700 facing each other, and the sealing ring may be
- the mounting hole 610 can be arranged around the gas channel 710 and the mounting hole 610 can be sealedly connected by a sealing ring.
- the sealing ring can make the sealing effect between the gas channel 710 and the installation hole 610 better, so as to prevent the air from overflowing through the gap between the installation part 600 and the connection flange 700 .
- the number of the above-mentioned sealing rings is the same as the respective numbers of the gas passages 710 and the installation holes 610 , and they are provided in a one-to-one correspondence.
- the side of the installation portion 600 facing the connecting flange 700 may be provided with an annular groove 620 , the annular groove 620 may be disposed around the installation hole 610 , and part of the sealing ring may be located in the annular groove 620 .
- the annular groove 620 can limit the position of the sealing ring, thereby preventing the sealing ring from being offset and affecting the sealing effect between the gas passage 710 and the installation hole 610 .
- connection flange 700 may include a connected body portion 720 and a connecting portion 730 .
- the above-mentioned sealing ring may be disposed between the opposite surfaces of the mounting portion 600 and the connecting portion 730 , and disposed around the mounting hole 610 .
- the connecting portion 730 may be provided with a first through hole 731
- the mounting portion 600 may be provided with a threaded hole
- the fastening screw may pass through the first through hole 731 and be connected with the threaded hole.
- this method can not only improve the connection reliability between the connecting flange 700 and the mounting part 600 , but also, when a sealing ring is provided between the connecting flange 700 and the mounting part 600 , By tightening the fastening screws, the sealing ring can be squeezed, so that the sealing effect between the gas channel 710 and the installation hole 610 is better.
- the sealing ring can be a flexible member, so that the sealing effect between the gas channel 710 and the installation hole 610 can be better improved.
- the functional layer includes, for example, a ceramic layer 220 and a heating layer 230 .
- the ceramic layer 220 may be disposed on the heating layer 230
- the heating layer 230 may be disposed on the substrate 210
- the ceramic layer may be disposed on the base 210 . 220.
- the heating layer 230 and the base body 210 can be fixed and connected in turn by means of bonding.
- the functional wiring 300 includes a control wiring. One end of the control wiring can be connected to the first device 810. The other end of the control wiring can pass through the wiring channel 211 and can be electrically connected to the heating layer 230.
- the first device 810 can control the heating layer 230 through the above-mentioned control wiring, so that the heating layer 230 can heat the wafer placed on the surface of the ceramic layer 220 .
- the above-mentioned control wiring realizes electrical conduction between the heating layer 230 and the first device 810 , thereby facilitating the first device 810 to control the heating layer 230 to heat the wafer.
- the above-mentioned first device 810 includes, for example, a heating power adjustment device and a controller.
- the functional wiring 300 includes a detection wiring, and correspondingly, the heating layer 230 can be provided with a second through hole 231 that communicates with the wiring channel 211.
- the second through hole 231 is communicated with the accommodating cavity, and one end of the detection wiring can be connected to The second device 820 is connected, and the other end of the detection wire may pass through the wiring channel 211 and the second through hole 231 in sequence, and may be in contact with the ceramic layer 220 .
- the second device 820 includes, for example, a temperature measurement sensor (or includes a temperature measurement sensor and a controller), and the above-mentioned detection wiring can be the detection connection of the temperature measurement sensor, and the temperature measurement sensor is, for example, a thermocouple or a temperature measurement sensor.
- the optical fiber and the accommodating cavity can pass the detection wiring of the temperature measuring sensor, so that the temperature measurement of the wafer can be realized.
- the first device 810 and the second device 820 are both located outside the cavity 100, one end of the functional wiring 300 is electrically connected to the first device 810 and/or the second device 820, and the other end of the functional wiring 300 extends. into the inner cavity, and penetrate the wiring channel 211 to contact the functional layer.
- the functional wiring 300 includes a detection wiring, such as a detection wiring of a temperature measuring sensor, the contact between the functional layer and the functional wiring 300 specifically means that the detection wiring is in contact with the ceramic layer 220 in the functional layer; if the functional wiring 300 includes Control wiring, the contact between the functional layer and the functional wiring 300 specifically refers to the electrical connection between the control wiring and the heating layer 230 in the functional layer. It can be changed adaptively, and the present invention is not particularly limited thereto.
- an embodiment of the present invention further discloses a semiconductor processing equipment, and the disclosed semiconductor processing equipment has the semiconductor reaction chamber of any of the above-mentioned embodiments.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
Claims (11)
- 一种半导体反应腔室,其特征在于,包括:腔体,所述腔体围成内腔;静电卡盘,所述静电卡盘位于所述内腔中,所述静电卡盘包括基体和设置于所述基体上的功能层,且所述基体与所述功能层通过粘接固定,所述基体中开设有接线通道,所述功能层覆盖所述接线通道的端口,且与所述基体将所述接线通道围成容纳腔;功能接线,所述功能接线穿过所述接线通道,且与所述功能层接触;以及气压调节装置,与所述容纳腔连通,用于平衡所述容纳腔内的气压与所述内腔中的气压。
- 根据权利要求1所述的半导体反应腔室,其特征在于,所述气压调节装置包括:抽气装置,所述抽气装置与所述容纳腔连通且用于对所述容纳腔抽真空;和/或,充气装置,所述充气装置与所述容纳腔连通且用于对所述容纳腔充气。
- 根据权利要求2所述的半导体反应腔室,其特征在于,所述抽气装置包括抽气机构和第一管道,所述抽气机构设置于所述内腔之外,所述抽气机构通过所述第一管道与所述容纳腔连通,且所述第一管道上设置有第一开关阀;和/或,所述充气装置包括充气机构和第二管道,所述充气机构设置于所述内腔之外,所述充气机构通过所述第二管道与所述容纳腔连通,且所述第二管道上设置有第二开关阀。
- 根据权利要求1-3任意一项所述的半导体反应腔室,其特征在于,所述半导体反应腔室还包括压力检测装置,所述压力检测装置用于检测所述容纳腔内的气压大小。
- 根据权利要求1-3任意一项所述的半导体反应腔室,其特征在于,所述半导体反应腔室还包括安装部,所述安装部位于所述内腔中,所述基体设置于所述安装部上,所述安装部中开设有与所述容纳腔连通的安装孔,所述抽气装置和/或所述充气装置通过所述安装孔与所述容纳腔连通。
- 根据权利要求5所述的半导体反应腔室,其特征在于,所述半导体反应腔室还包括连接法兰,所述连接法兰设置于所述安装部背离所述静电卡盘的一侧,所述连接法兰中开设有气体通道,所述气体通道与所述安装孔连通,所述抽气装置和/或所述充气装置与所述气体通道连通。
- 根据权利要求6所述的半导体反应腔室,其特征在于,所述半导体反应腔室还包括密封圈,所述密封圈设置于所述安装部与所述连接法兰彼此相对的表面之间,且围绕所述安装孔设置,用以密封所述气体通道与所述安装孔之间的连接处。
- 根据权利要求7所述的半导体反应腔室,其特征在于,所述半导体反应腔室还包括紧固螺钉,所述连接法兰包括相连的本体部和连接部,所述密封圈设置于所述安装部与所述连接部彼此相对的表面之间,且围绕所述安装孔设置,用以密封所述气体通道与所述安装孔之间的连接处;并且,所述连接部中开设有第一通孔,所述安装部开设有螺纹孔,所述紧固螺钉穿过所述第一通孔,且与所述螺纹孔螺纹配合。
- 根据权利要求6所述的半导体反应腔室,其特征在于,所述连接法兰的侧壁开设有与所述气体通道连通的穿线孔,所述功能接线通过所述穿线孔穿出,且在所述功能接线与所述穿线孔之间设置有密封结构,用以对二者之间的间隙进行密封。
- 根据权利要求1所述的半导体反应腔室,其特征在于,所述功能层包括陶瓷层和加热层,其中,所述陶瓷层设置于所述加热层上,所述加热层设置于所述基体上,所述加热层覆盖所述接线通道的端口,且与所述基体将所述接线通道围成所述容纳腔,并且所述功能接线包括控制接线,且与所述 加热层电连接;和/或,所述功能层包括陶瓷层和加热层,其中,所述陶瓷层设置于所述加热层上,所述加热层设置于所述基体上,所述加热层覆盖所述接线通道的端口,且与所述基体将所述接线通道围成所述容纳腔,所述功能接线包括检测接线,且所述加热层开设有与所述接线通道连通的第二通孔,所述第二通孔与所述容纳腔连通,所述检测接线与所述陶瓷层接触。
- 一种半导体加工设备,其特征在于,包括权利要求1至9中任一项所述的半导体反应腔室。
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JP2023509533A JP2023535642A (ja) | 2020-08-25 | 2021-08-13 | 半導体反応チャンバおよび半導体加工デバイス |
KR1020237003493A KR102582399B1 (ko) | 2020-08-25 | 2021-08-13 | 반도체 반응 챔버 및 반도체 가공 디바이스 |
US18/174,318 US20230223280A1 (en) | 2020-08-25 | 2023-02-24 | Semiconductor reaction chamber and semiconductor processing apparatus |
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CN111968901B (zh) * | 2020-08-25 | 2022-08-16 | 北京北方华创微电子装备有限公司 | 半导体反应腔室及半导体加工设备 |
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US20230223280A1 (en) | 2023-07-13 |
JP2023535642A (ja) | 2023-08-18 |
KR20230024425A (ko) | 2023-02-20 |
TW202209594A (zh) | 2022-03-01 |
CN111968901B (zh) | 2022-08-16 |
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