WO2022015075A1

WO2022015075A1 - Connecting device for testing

Info

Publication number: WO2022015075A1
Application number: PCT/KR2021/009107
Authority: WO
Inventors: 정영배
Original assignee: 주식회사 아이에스시
Priority date: 2020-07-16
Filing date: 2021-07-15
Publication date: 2022-01-20
Also published as: KR102319388B1; TW202223400A; TWI794892B

Abstract

The present invention relates to a connecting device for testing, comprising: a housing having an air circulation hole; and a conductive rubber connector including a first conductive rubber sheet having a first through hole, a second conductive rubber sheet having a second through hole, and an intermediate substrate having an air passage therein, wherein the air circulation hole, the first through hole, the air passage and the second through hole form an air movement path for air flow so that, when a vacuum means is connected to the upper part of the air circulation hole, a device to be tested, disposed below the second conductive rubber sheet, is adsorbed.

Description

connecting device for inspection

The present invention relates to a connecting device for inspection, and more particularly, an object of the present invention is to provide a connecting device for inspection that can respond quickly because a signal transmission path is shortened.

For electrical inspection of a device to be inspected, a connecting device for inspection that comes into contact with the device to be inspected and the inspection apparatus and electrically connects the device to be inspected and the inspection apparatus to each other is used in the art. In this case, the connecting apparatus for inspection transmits an electrical signal of the inspection apparatus to the device to be inspected, and transmits the electrical signal of the device to be inspected to the inspection apparatus.

Pogo pins are known in the art as such connectors.

The pogo pin consists of a pair of upper and lower metal pins, a spring disposed between the metal pins, and a cylindrical barrel including the metal pin and the spring therein.

In the conventional connecting device for inspection, in a state in which the memory device is installed in the housing, a plurality of pogo pins are installed under it, and after forming a space through which air can flow through the space between the memory device and the pogo pin, the pogo pin After the device to be inspected was adsorbed on the lower side of the pin, a predetermined electrical inspection was performed.

Recently, as a high-performance chip such as LPDDR5 has been developed, the processing speed has increased, and accordingly, a high-speed test is required.

However, due to a structural problem in which the pogo pin has a plurality of pins and a spring disposed therebetween, the vertical length is inevitably long, and thus the signal transmission path is long, resulting in increased resistance and low test reliability. have.

The present invention has been created to solve the above-described problems, and it is a technical object of the present invention to provide a connecting device for inspection that can increase the reliability of the inspection by shortening the signal transmission path.

The connecting apparatus for inspection of the present invention for achieving the above-described technical object is a connecting apparatus for inspection for performing an electrical inspection on the device to be inspected by being connected to an electrode of a device to be inspected,

a housing through which an air flow hole extending in the vertical direction passes through; and

It consists of a plurality of first conductive parts in which a plurality of conductive particles are distributed in the thickness direction in the elastic insulating material, and a first insulating part supporting the first conductive part, and is penetrated in the thickness direction at a position corresponding to the air flow hole. A first conductive rubber sheet having a first through hole formed therein;

A plurality of conductive particles are distributed in the thickness direction in the elastic insulating material, and a plurality of second conductive parts whose lower ends are in contact with the electrodes of the device under test, and a second insulating part supporting the second conductive parts, the second insulating part a second conductive rubber sheet having a second through-hole penetrating in the thickness direction therein;

It is disposed between the first conductive rubber sheet and the second conductive rubber sheet, an upper surface is electrically connected to the first conductive part and a lower surface is electrically connected to the second conductive part, and a first through hole and a second through hole a conductive rubber connector composed of an intermediate substrate having an air passage for communicating with each other; and

The air circulation hole, the first through hole, the air passage and the second through hole form an air movement path for air flow, and when the vacuum means is connected to the upper part of the air circulation hole, the second conductive rubber sheet is disposed on the lower surface The device to be inspected is adsorbed.

In the connecting device for inspection, a first device disposed inside the housing and provided with a plurality of terminals on a lower surface thereof may be further provided.

In the connecting device for inspection, the air passage of the intermediate substrate includes a first hole that is opened upward at a position corresponding to the first through hole and is closed at the bottom;

A second hole that is opened downward at a position corresponding to the second through hole and has an upper part blocked;

It may include a connection passage connecting the first hole and the second hole and extending horizontally therein.

In the connecting device for inspection, the first hole may be disposed on an edge portion of the intermediate substrate, and the second hole may be disposed on a central portion of the intermediate substrate.

In the connecting device for inspection, a reinforcing member capable of maintaining the height of the passage from the first hole to the second hole may be installed inside the connecting passage.

In the connecting device for inspection, the reinforcing member may be a pipe extending horizontally from the first hole to the second hole and having both ends open.

In the connecting device for inspection, a plurality of the pipes may be stacked inside the connecting passage.

In the connecting device for inspection, the reinforcing member may be a vertical support that has one end in contact with the upper surface of the connection passage, extends vertically to one end and the other end is in contact with the lower surface of the connection passage, respectively.

In the connecting device for inspection, the upper portion is inserted into the air passage of the intermediate substrate through the second through hole, the lower portion is in contact with the upper surface of the device to be inspected, a vacuum pad having a central hole formed in the center may be further provided .

In the connecting device for inspection, the vacuum pad may have a cylindrical shape having a central hole therein, and an upper portion of the cylindrical shape may be provided with a cut-out portion that is cut in a radial direction and communicates with the central hole.

In the connecting device for inspection, a lower portion of the vacuum pad may have a truncated cone shape whose outer diameter increases toward the lower side.

In the connecting device for inspection, a silicon pad may be formed on a lower surface of the second conductive rubber sheet in a ring shape protruding from the periphery of the second through hole and contacting the upper surface of the device to be inspected.

In the connecting device for inspection, a pusher device that moves in the vertical direction and presses the first device downward may be provided inside the housing.

In the connecting device for inspection, the first conductive part may protrude from the surface of the first insulating part, and a ring-shaped silicon pad protruding by the same height as the first conductive part may be provided on the periphery of the first through hole.

The connecting apparatus for inspection of the present invention for achieving the above object is a connecting apparatus for inspection for performing an electrical inspection on a device to be inspected by being connected to an electrode of a device to be inspected,

The third through hole penetrated in the thickness direction at the position corresponding to the air circulation hole

The provided first sheet,

A fourth through-hole penetrating in the thickness direction is provided at a different location from the third through-hole.

a second sheet;

It is disposed between the first sheet and the second sheet and the third through hole and the fourth through hole

A third sheet having a fifth through-hole in the form of a long hole connecting the balls,

A plurality of conductive particles are distributed in the thickness direction in the elastic insulating material and consist of a plurality of third conductive parts penetrating the first sheet, the second sheet, and the third sheet, and a third insulating part supporting the third conductive part, , A conductive rubber connector composed of a conductive frame in which a sixth through hole is formed in a position corresponding to the third through hole;

The third through hole, fourth through hole, fifth through hole, and sixth through hole constitute an air passage for air flow, and when a vacuum means is connected to the upper portion of the air distribution hole, it is disposed on the lower surface of the second conductive rubber sheet The inspected device is adsorbed.

In the connecting device for inspection, the first sheet, the second sheet, and the third sheet may be pressed together to be integrally attached.

The 7th through hole penetrated in the thickness direction at the position corresponding to the air circulation hole

the provided fourth sheet;

It is attached to the lower surface of the fourth sheet, and at a position corresponding to the seventh through hole

a fifth sheet provided with an eighth through hole penetrating in the thickness direction;

A number of conductive particles are distributed in the thickness direction in the elastic insulating material,

A conductive rubber connector having an upper end formed of a conductive frame including a plurality of fourth conductive parts penetrating the fourth and fifth sheets, and a fourth insulating part supporting the fourth conductive part; and

A connection groove for connecting the seventh through-hole and the eighth through-hole is formed on a lower surface of the fourth sheet or an upper surface of the fifth sheet, and the seventh through-hole, the connecting groove, and the eighth through-hole are connected to each other to form an air passage, and when the vacuum means is connected to the upper portion of the air passage hole, the device to be inspected disposed on the lower surface of the second conductive rubber sheet is adsorbed.

In the connecting device for inspection, the fourth sheet and the fifth sheet may be pressed together to be integrally attached.

a housing in which an air flow hole extending in the vertical direction is formed; and

A conductive sheet module disposed under the housing and comprising a plurality of fifth conductive parts in which a plurality of conductive particles are distributed in a thickness direction in an elastic insulating material, and a fifth insulating part supporting the fifth conductive part,

In the conductive sheet module,

a ninth through hole disposed at a position corresponding to the air circulation hole of the housing and opened upward and closed at the bottom;

A tenth through hole that is opened downward from the central part and the upper part is blocked;

and an air passage consisting of a connection passage provided therein to connect the ninth through hole and the tenth through hole,

When the vacuum means is connected to the upper part of the air circulation hole, the device to be inspected disposed under the conductive sheet module is adsorbed.

The connecting apparatus for inspection according to an embodiment of the present invention has an advantage in that quick and rapid inspection is possible because an air passage for adsorbing a device to be inspected is provided while applying a conductive rubber sheet.

The connecting device for inspection according to an embodiment of the present invention has an advantage in that the reinforcing member is provided in the air passage, so that the air passage can be prevented from being blocked even when a load is applied.

1 is a perspective view of a connecting device for inspection according to a first embodiment of the present invention.

Figure 2 is a perspective view of the connecting device for inspection of Figure 1 viewed from below.

Figure 3 is a side view of the connecting device for inspection of Figure 1;

Figure 4 is an exploded perspective view of the connecting device for inspection of Figure 1;

5 is a V-V cross-sectional view of FIG.

6 is a cross-sectional view VI-VI of FIG.

FIG. 7 is a view showing a cross-section of an intermediate substrate that is a configuration of the connecting device for inspection of FIG. 1;

Fig. 8 is a view showing a first conductive rubber sheet as one configuration of the connecting device for inspection of Fig. 1;

9 is a view showing a cross-section of an intermediate substrate of a connecting device for inspection according to a second embodiment of the present invention.

10 and 11 are views illustrating a state in which a vacuum pad is inserted into the conductive cover connector including the intermediate substrate of FIG. 9;

Fig. 12 is a cross-sectional view taken along line XII-XII of Fig. 11;

13 is a view showing a cross-section of an intermediate substrate of a connecting device for inspection according to a third embodiment of the present invention.

14 is an exploded perspective view of the conductive rubber connector of the connecting device for inspection according to the fourth embodiment of the present invention;

Figure 15 is a perspective view of the combination of Figure 14.

16 is an exploded perspective view of a conductive rubber connector of a connecting device for inspection according to a fifth embodiment of the present invention;

17 is a cross-sectional perspective view of a conductive rubber connector of a connecting device for inspection according to a sixth embodiment of the present invention;

18 is a perspective view showing the lower surface of the conductive rubber connector of the connecting device for inspection according to the seventh embodiment of the present invention.

Embodiments of the present disclosure are exemplified for the purpose of explaining the technical spirit of the present disclosure. The scope of rights according to the present disclosure is not limited to the embodiments presented below or specific descriptions of these embodiments.

All technical and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by one of ordinary skill in the art to which this disclosure belongs. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure and not to limit the scope of the present disclosure.

As used in this disclosure, expressions such as 'comprising', 'including', 'having', etc. are open-ended terms connoting the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the expression is included. (open-ended terms).

Expressions in the singular in this disclosure may include the meaning of the plural unless otherwise stated, and the same applies to expressions in the singular in the claims.

Expressions such as 'first' and 'second' used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of the corresponding components.

In the present disclosure, when a component is referred to as being 'connected' or 'connected' to another component, the component can be directly connected or connectable to the other component, or a new component It should be understood that they may or may be connected via other components.

The direction indicator of “thickness direction” used in the present disclosure means a direction perpendicular to the surface direction of the sheet. As used in the present disclosure, “upper side” refers to an upward direction in a direction perpendicular to the surface direction of the substrate, and “lower side” refers to a direction opposite to the upper side.

As used in the present disclosure, the "edge" portion means a portion adjacent to the edge of the substrate, and the "center portion" means an intermediate position of the substrate and does not mean exactly the center, but also means the center and its periphery. do.

Embodiments are described with reference to examples shown in the accompanying drawings. In the accompanying drawings, identical or corresponding components are assigned the same reference numerals. In addition, in the description of the embodiments below, overlapping description of the same or corresponding components may be omitted. However, even if descriptions regarding components are omitted, it is not intended that such components are not included in any embodiment.

The embodiments described below and the examples shown in the accompanying drawings are for performing an electrical test on a device to be tested, such as a system semiconductor, wherein the first device means a memory device required for testing the system semiconductor. do.

However, the type of the device to be inspected or the first device is not limited, and may be variously applied if an electrical inspection is required.

In addition, the connecting apparatus for inspection of the present invention performs a necessary electrical inspection after the device to be inspected is adsorbed by a vacuum means and then moved to a location where the inspection apparatus is located. is omitted. However, in this case, the inspection apparatus can check whether the device under test is defective by recognizing the feedback signal after applying the electrical signal to the device under test.

First, the connecting device 100 for inspection according to a first embodiment of the present invention is shown in FIGS. 1 to 8 , and the connecting device 100 for inspection includes a housing 110 , a pusher device 120 , It is configured to include a first device 130 , a conductive rubber connector 140 , and a vacuum pad 180 .

The housing 110, as constituting the main body of the connecting device 100 for inspection, is disposed below the first body 111 in the form of a square frame and the first body 111 in the form of a square frame, and the It is composed of a second body 112 having a predetermined accommodation space therein.

The first body 111 is formed in the form of a square plate, and on both sides of the edge, insertion holes 1111 into which the vacuum means 195 are fitted are provided. A rubber ring is provided inside the insertion hole 1111 to connect the vacuum means 195 airtightly.

A plurality of bolt holes 1112 are provided in the central portion of the first body 111 , and a step protruding inwardly is formed on an inner circumferential surface of the bolt hole 1112 .

A pair of air circulation holes 1121 are disposed below the first body 111 and penetrate in the vertical direction at positions corresponding to the insertion holes 1111 are formed.

A vacuum means 195 is connected to the upper end of the air flow hole 1121 to suck air.

A plurality of support parts 1122 extending downward in four directions protrude from the bottom surface of the second body 112 to surround the central receiving space, and the conductive rubber connector 140 is disposed at the end of the support part 1122. edges are joined together. The pusher device 120 and the first device 130 are inserted in the receiving space.

At this time, the air circulation hole 1121 is formed only in a pair of support parts 1122 facing each other in the fourth support part 1122 .

The pusher device 120 is inserted into the housing 110 , and serves to press the first device 130 to the conductive rubber connector 140 .

As shown in FIG. 6 , the pusher device 120 includes a pusher body 121 that rises or descends within the receiving space of the second body 112, and the lower part is screwed to the pusher body 121 and The upper end thereof is inserted into the bolt insertion hole 1111 of the first body 111 and a pusher bolt 122 caught on the step is provided.

In addition, a spring member 123 is installed between the pusher body 121 and the step, and the spring member 123 is configured to elastically press the pusher body 121 away from the first body 111 . do. In a state where the pusher bolt 122 is caught on the step of the first body 111 so that the pusher body 121 does not fall out of the receiving space, the pusher body 121 is moved by the elastic pressure of the spring member 123 to the first The device 130 is pressed downward.

The first device 130 is disposed inside the housing 110 and has a plurality of terminals provided on its lower surface. Specifically, the first device 130 is a memory device for the electrical test of the device under test 196 and is always mounted inside the housing 110 . The first device 130 may be a high-performance memory device such as LPDDR5, but is not limited thereto, and various devices may be used.

At this time, the first device 130 is pressed by the pusher device 120 to be in close contact with the conductive rubber connector 140 .

The conductive rubber connector 140 electrically connects the first device 130 and the device under test 196 to each other while having an air passage for adsorbing the device under test 196 therein. Specifically, an air passage communicating with the air distribution hole 1121 of the housing 110 is provided therein, and the device under test 196 on the lower side can be sucked by the air passage.

The conductive rubber connector 140 includes a first conductive rubber sheet 150 , a second conductive rubber sheet 160 , and an intermediate substrate 170 .

The first conductive rubber sheet 150 is located on the upper side of the conductive rubber connector 140 , and is configured to contact the lower surface of the first device 130 .

The first conductive rubber sheet 150 is generally made in the form of a sheet, and includes a first conductive part 151 , a first insulating part 152 and a frame plate 153 .

Each of the first conductive parts 151 functions as a conductive part between the first device 130 and the intermediate substrate 170 and performs signal transmission in the thickness direction. The first conductive part 151 may have a cylindrical shape extending in the thickness direction. In this cylindrical shape, the diameter at the middle may be smaller than the diameter at the top and bottom. The upper end of the first conductive part 151 is configured to protrude from the first insulating part 152 to contact the terminal of the first device 130 .

Each of the first conductive parts 151 includes a plurality of conductive particles that are conductively contacted in the thickness direction. Conductive particles that are conductively contacted in the thickness direction form a conductive path through which a signal is transmitted in the thickness direction in the first conductive part 151 . A space between the conductive particles may be filled with an elastic insulating material forming an insulating part.

When the first conductive part 151 is pressed downward in the thickness direction by the terminal of the first device 130, the first conductive part 151 may slightly expand in the face direction, and the first insulating part 152 may Such expansion of the first conductive part 151 may be allowed.

The conductive particles may be formed by coating the surface of the core particles with a highly conductive metal. The core particle may be made of a metal material such as iron, nickel, cobalt, or a resin material having elasticity. As the highly conductive metal coated on the surface of the core particle, gold, silver, rhodium, platinum, chromium, or the like may be used.

The first insulating portion 152 may have a rectangular sheet shape, and may form an elastic region. The plurality of first conductive parts 151 are spaced apart and insulated from each other at equal or unequal intervals in the plane direction by the first insulating part 152 . The first insulating part 152 is formed as a single elastic body, and the plurality of first conductive parts 151 are embedded in the first insulating part 152 in the thickness direction of the first insulating part 152 . The first insulating part 152 is made of an elastic insulating material, and has elasticity in the thickness direction and the plane direction. The first insulating portion 152 not only maintains the first conductive portion 151 in its shape, but also maintains the conductive portion in the vertical direction.

The first insulating part 152 may be made of a cured silicone rubber material. For example, the first insulating portion 152 may be formed by injecting and curing liquid silicone rubber into a molding die for molding the first conductive rubber sheet 150 . As a liquid silicone rubber material for forming the first insulating part 152 , an addition-type liquid silicone rubber, a condensation-type liquid silicone rubber, a liquid silicone rubber containing a vinyl group or a hydroxyl group, etc. may be used. As a specific example, the liquid silicone rubber material may include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methylphenyl vinyl silicone raw rubber, and the like.

The frame plate 153 is configured such that an opening is formed in the center and the edge of the first insulating part 152 is connected to the opening, and the frame plate 153 is formed to protrude from the edge of a rectangle. do. A first through hole 1531 is formed in each frame plate 153 at a position corresponding to the air distribution hole 1121 . Meanwhile, a plurality of holes are additionally formed in the frame plate 153 , and these holes perform a function through which the bolt 191 passes to fix the first conductive rubber sheet 150 to the housing 110 .

The second conductive rubber sheet 160 is located on the lower side of the conductive rubber connector 140, the lower end is connected to the terminal of the device under test 196, and a plurality of conductive particles are distributed in the elastic insulating material in the thickness direction. a plurality of second conductive parts 161 , a second insulating part 162 supporting the second conductive part 161 , and a frame plate 163 .

In the second conductive rubber sheet 160 , the second conductive part 161 and the second insulating part 162 have the same shape as the first conductive part 151 and the first insulating part 152 , so detailed description will be given. is omitted.

In the second conductive rubber sheet 160 , a second through hole 1621 penetrating in the thickness direction is formed in the second insulating portion 162 . Specifically, the second through-hole 1621 is configured to penetrate in the thickness direction in the central portion of the sheet-shaped second insulating portion 162 . In this case, the number or position of the second through-holes 1621 is not limited thereto, and may be arranged in an appropriate number and position in the second insulating part 162 .

The intermediate substrate 170 is located in the middle of the conductive rubber connector 140 , and is specifically disposed between the first conductive rubber sheet 150 and the second conductive rubber sheet 160 . The upper surface of the intermediate substrate 170 is electrically connected to the first conductive part 151, and the lower surface of the intermediate substrate 170 is electrically connected to the second conductive part 161, and the first through hole 1531 and the second Air passages (1711, 1721, 173) for connecting the two through-holes (1621) to each other are provided therein.

Specifically, the intermediate substrate 170 has an upper surface and a lower surface formed with electrode pads, respectively, and the electrode pad on the upper surface is connected to the lower end of the first conductive part 151 of the first conductive rubber sheet 150, and the lower surface The electrode pad is configured to be connected to the upper end of the second conductive part 161 of the second conductive rubber sheet 160 . The intermediate substrate 170 performs a function of electrically connecting the first device 130 and the device under test 196 to each other.

The intermediate substrate 170 includes a substrate body 171 in the form of a square plate, and a wing portion 172 protruding from each edge of the body, and the overall shape of the first conductive rubber sheet 150 and the second It is the same as that of the conductive rubber sheet 160 .

In the intermediate substrate 170 , a first hole 1721 is provided at a position corresponding to the first through hole 1531 in the pair of wing portions 172 . Specifically, a first hole 1721 that is opened upward and closed at the bottom is formed at the edge of the intermediate substrate 170 .

At a position corresponding to the second through hole 1621 in the substrate body 171 of the intermediate substrate 170 , a second hole 1711 which is opened downward and whose upper part is blocked is formed. The second hole 1711 is disposed in the central portion of the intermediate substrate 170 .

In addition, a connection passage 173 that communicates with the first hole 1721 and the second hole 1711 and horizontally extends inside the intermediate substrate 170 is formed.

At this time, the first hole 1721, the connection passage 173, and the second hole 1711 cooperate to form an air passage through which air moves, and the air sucked by the vacuum means 195 moves along the air passage. will do

The vacuum pad 180 performs a function of connecting the air passage to the upper surface of the device under test 196 . Specifically, the vacuum pad 180, the upper part of which passes through the second through hole 1621 and is inserted into the air passage of the intermediate substrate 170, and the lower part is in contact with the upper surface of the device under test 196, and is centrally located in the center. hole is formed.

The vacuum pad 180 has a cylindrical shape with a central hole formed therein, and a radially cut cutout 181 is provided on the upper portion of the cylindrical shape, and the cutout 181 communicates with the central hole. do. After the upper portion of the vacuum pad 180 is inserted through the second hole 1711 of the intermediate substrate 170 , the cutout 181 is configured to communicate with the connection passage 173 .

The lower portion of the vacuum pad 180 has the shape of a truncated cone whose outer diameter increases toward the lower side, thereby increasing the area in contact with the upper surface of the device under test 196 .

Meanwhile, in FIG. 4 , reference numeral 190 denotes a guide block 190 . The guide block 190 serves as a guide for the device under test 196 and performs a function of enabling the stable coupling of the conductive rubber connector 140 . The guide block 190 is fixedly coupled to the lower surface of the second support part 1122 of the housing 110 together with the conductive rubber connector 140 by bolts.

The connecting device 100 for inspection according to an embodiment of the present invention has the following operational effects.

First, after the vacuum means 195 is coupled to the upper end of the air distribution hole 1121 in the housing 110 , when the vacuum means 195 operates, the device under test disposed under the conductive rubber connector 140 ( 196 is adsorbed to the lower portion of the conductive rubber connector 140 .

Specifically, when the vacuum means 195 operates, as shown in FIG. 5 , the air movement path connected to the air distribution hole 1121 , the first through hole 1531 , the air passage, and the second through hole 1621 . The device to be inspected 196 disposed on the lower surface of the second conductive rubber sheet 160 is adsorbed while the air moves along the .

Thereafter, after the connecting apparatus 100 for inspection moves to an inspection apparatus (not shown) in a state in which the device to be inspected 196 is adsorbed, a predetermined electrical inspection is performed.

After the electrical inspection is finished, the connecting device for inspection is moved to the original standby position, and then, when the operation of the vacuum means 195 is stopped, the adsorbed device 196 for inspection is connected to the connecting device 100 for inspection. can be separated from

The connecting device 100 for inspection according to the present invention can use a conductive rubber sheet compared to a conventional connecting device using a pogo pin, so that the overall signal transmission path can be shortened, thereby improving the reliability of the inspection.

In particular, when the signal transmission path is shortened, the resistance is reduced accordingly, and there is an advantage that the overall signal transmission can be facilitated.

On the other hand, in the prior art, the protrusion height of the pogo pin is high, so that air can flow through the gap between the pogo pin and the terminal of the first device. Since it is smaller than the pogo pin, it is difficult for air to flow between the first conductive part of the conductive rubber sheet and the terminal of the first device 130, so a separate path through which air can flow inside is formed.

Accordingly, according to an embodiment of the present invention, there is an advantage of maintaining the adsorption force to the device under test 196 while improving the signal transmission characteristics.

The connecting device for inspection according to the present invention may be variously modified as follows.

A connecting device for inspection according to a second embodiment of the present invention is shown in FIGS. 9 to 12 .

In the connecting device for inspection according to the second embodiment, the intermediate substrate is different from the first embodiment.

Specifically, in the connecting device for inspection according to the second embodiment, when pressure is generated inside the connection passage 273 of the intermediate substrate 270 by the pusher device, the connection passage sags so that the air flow does not become poor A reinforcing member 2731 for the is additionally disposed.

Specifically, the reinforcing member 2731 is disposed inside the connection passage 273 and can maintain the passage height from the first hole 2711 to the second hole 2721, and in the second embodiment, such reinforcement A pipe extending in the horizontal direction is used as the member.

At this time, both ends of the pipe are opened, and a plurality of pipes are stacked and disposed inside the connection passage. At this time, each pipe is fixed in the connecting passage with an epoxy or other adhesive. As a material of the pipe, a metal barrel typically used for a pogo pin may be used, but the present invention is not limited thereto, and any metal or non-metal may be used as long as it has a tubular shape. Since both ends of this pipe are open, the pipe can also perform a function of preventing sagging while performing a function as an air flow pipe.

At this time, one end of the pipe is opened around the second through hole. Since the vacuum pad 180 is disposed in the second through hole, the opening of the pipe communicates with the cutout 181 of the vacuum pad 180 . It is configured so that the air flow can be made smoothly

A connecting device for inspection of the present invention according to a third embodiment is shown in FIG. 13 . Specifically, in the connecting device for inspection of the present invention according to the third embodiment, a plurality of vertical supports 3731 erected vertically as reinforcing members are arranged in a plurality in the connection passage, unlike the second embodiment.

Such a vertical support 3731, the upper end is in contact with the upper surface of the connection passage, the lower end is in contact with the lower surface of the connection passage to maintain a gap between the upper surface and the lower surface of the connection passage. The vertical support 3731 may be a vertically erected pipe, but is not limited thereto and may be a vertically erected thin rod. It is preferable that the material of the vertical support is also a metal, but it is possible that it is a plastic or other non-metal material.

The vertical support 3731 is preferably a thin column or pipe so as not to block the connection passage, and a plurality of vertical supports 3731 may be disposed to be spaced apart from each other along the longitudinal direction of the connection passage.

When the vertical support 3731 is disposed inside the connection passage, even when pressure is applied, the connection passage is not blocked and a constant space can be maintained.

The connecting device for inspection of the present invention according to the fourth embodiment is shown in FIGS. 14 and 15 .

The connecting device for inspection according to the fourth embodiment is different from the first embodiment in the conductive rubber sheet. Specifically, in the connecting device for inspection according to the fourth embodiment, the conductive rubber connector 400 includes a first sheet 441 , a second sheet 442 , a third sheet 443 , and a conductive frame 444 . .

The first sheet 441 is made in the form of a thin sheet, and a third through hole 4411 is formed at a position corresponding to the air circulation hole. In addition, a plurality of electrode holes 4412 are formed at positions corresponding to the third conductive parts 4441 .

The second sheet 442 is made in the form of a thin sheet, and a fourth through hole 4421 penetrated in the thickness direction is formed at a position different from the third through hole 4411 . At this time, the fourth through hole 4421 is formed in the central portion of the second sheet 442 . Also, in the second sheet 442 , an electrode hole 4422 is formed at a position corresponding to the third conductive part 4441 .

The third sheet 443 is a sheet positioned between the first sheet 441 and the second sheet 442 . The third sheet 443 has a fifth through-hole 4431 in the shape of a long hole extending in one direction to connect the third through-hole 4411 and the fourth through-hole. An electrode hole 4432 is formed in the third sheet 443 at a position corresponding to the third conductive part 4441 .

At this time, the first sheet 441 , the third sheet 443 , and the second sheet 442 are stacked on each other and compressed to form a single sheet.

The conductive frame 444 includes a plurality of third conductive parts 4441 in which a plurality of conductive particles are distributed in the thickness direction in an elastic insulating material, and supports the third conductive parts 4441 and has a sixth penetration in the center. It consists of a third insulating portion 4442 in which the ball 4442a is provided. In addition, a frame plate 4443 is provided around the third insulating portion 4442 .

The third conductive part 4441 is configured to pass through the electrode holes of the first sheet 441 , the second sheet 442 , and the third sheet 443 so that the upper end thereof is in contact with the terminal of the first device 130 . do.

A lower end of the third conductive part 4441 is connected to an electrode of the device under test. Since the material constituting the third conductive part 4441 and the third insulating part 4442 is the same as the first conductive part and the first insulating part, a detailed description thereof will be omitted. The conductive frame 444 is configured to be attached to the lower surface of the second sheet 442 .

At this time, the third through-hole 4411 , the fourth through-hole 4421 , the fifth through-hole 4431 , and the sixth through-hole 4442a constitute an air passage for air flow, and the vacuum means is the air When connected to the upper part of the distribution hole, the device to be inspected disposed on the lower surface of the second conductive rubber sheet can be adsorbed.

The connecting device for inspection of the present invention according to a fifth embodiment is shown in FIG. 16 .

The connecting device for inspection according to the fifth embodiment has a shape similar to that of the fourth embodiment, but is different in that a sheet having a long hole is not separately provided.

Specifically, in the connecting device for inspection, the conductive rubber connector 540 includes a fourth sheet 5411 provided with a seventh through hole 5411 penetrating in the thickness direction at a position corresponding to the air flow hole, and the fourth sheet A fifth sheet 542 attached to the lower surface of the 541 and provided with an eighth through hole 5421 penetrated in the thickness direction at a position corresponding to the seventh through hole 5411, and a plurality of conductive materials in an elastic insulating material a plurality of fourth conductive parts 5431 in which particles are distributed in the thickness direction and the upper ends penetrate the fourth sheet 541 and the fifth sheet 542 and are in contact with a plurality of terminals, respectively, and the fourth conductive part ( It supports 5431 and consists of a conductive frame 543 including a fourth insulating portion 5432 having a central hole 5432a formed in the center.

At this time, on the upper surface of the fifth sheet 542 , a connection groove 5422 long cut in one direction to connect the seventh through-hole 5411 and the eighth through-hole 5421 is formed. Specifically, in the fourth embodiment, the air passage is formed using three sheets, but in the fifth embodiment, the air passage can be formed using only two sheets.

At this time, the connection groove 5422 is formed by etching the connection groove 5422 on the fifth sheet 542 having a thickness of overlapping two sheets, and after processing the eighth through hole 5421 , the seventh After compression with the fourth sheet 541 in which the through-hole 5411 is formed, it is manufactured by combining with the conductive frame 543 in which the fourth conductive part 5431 is formed.

Meanwhile, the connection groove 5422 has been exemplified to be formed on the fifth sheet 542 , but is not limited thereto, and may be formed on the lower surface side of the fourth sheet 541 .

The connecting device for inspection of the present invention according to a sixth embodiment is shown in FIG. 17 .

In the connecting device according to the sixth embodiment, the conductive rubber connector 640 includes a ninth through hole 641 disposed at a position corresponding to the air flow hole of the housing and opened upward and closed at the bottom, and from the center to the bottom. It includes an air passage consisting of a tenth through hole 642 that is opened and closed at the top, and a connecting passage 643 provided therein to connect the ninth through hole 641 and the tenth through hole 642 . This conductive rubber connector is composed of a single conductive sheet and integrally includes a ninth through hole 641 , a tenth through hole 642 , and a connection passage 643 therein.

Accordingly, when the vacuum means is connected to the upper portion of the air distribution hole, the device to be inspected disposed under the conductive sheet module may be adsorbed.

That is, without forming a plurality of films, the rubber connector is manufactured as a single body, but it is possible to form an air passage therein.

The connecting device for inspection of the present invention according to a seventh embodiment is shown in FIG. 18 . In this connecting device according to the seventh embodiment, without separately disposing the vacuum pad of the first embodiment, the second conductive rubber sheet protrudes in a ring shape from the periphery of the second through hole on the lower surface of the second conductive rubber sheet and comes into contact with the upper surface of the device under test An example of forming a silicon pad 180' to be used is illustrated. Although the technical idea of the present disclosure has been described by examples shown in some embodiments and the accompanying drawings, it does not depart from the technical spirit and scope of the present disclosure that can be understood by those of ordinary skill in the art to which the present disclosure belongs It should be understood that various substitutions, modifications, and alterations within the scope may be made. Further, such substitutions, modifications, and alterations are intended to fall within the scope of the appended claims.

Claims

In the connecting device for inspection for being connected to the electrode of the device to be inspected to perform an electrical inspection of the device to be inspected,

a housing through which an air flow hole extending in the vertical direction passes through; and

It consists of a plurality of first conductive parts in which a plurality of conductive particles are distributed in the thickness direction in the elastic insulating material, and a first insulating part supporting the first conductive part, and is penetrated in the thickness direction at a position corresponding to the air flow hole. A first conductive rubber sheet having a first through hole formed therein;

A plurality of conductive particles are distributed in the thickness direction in the elastic insulating material, and a plurality of second conductive parts whose lower ends are in contact with the electrodes of the device under test, and a second insulating part supporting the second conductive parts, the second insulating part a second conductive rubber sheet having a second through-hole penetrating in the thickness direction therein;

It is disposed between the first conductive rubber sheet and the second conductive rubber sheet, an upper surface is electrically connected to the first conductive part and a lower surface is electrically connected to the second conductive part, and a first through hole and a second through hole a conductive rubber connector composed of an intermediate substrate having an air passage for communicating with each other; and

The air circulation hole, the first through hole, the air passage and the second through hole form an air movement path for air flow, and when the vacuum means is connected to the upper part of the air circulation hole, the second conductive rubber sheet is disposed on the lower surface A connecting device for inspection, characterized in that the device to be inspected is adsorbed.
According to claim 1,

A connecting device for inspection, characterized in that the housing is provided with a first device provided with a plurality of terminals on a lower surface of the housing.
According to claim 1,

The air passage of the intermediate substrate,

A first hole that is opened upward at a position corresponding to the first through hole and is closed at the bottom;

A second hole that is opened downward at a position corresponding to the second through hole and has an upper part blocked;

Connecting device for inspection, characterized in that it comprises a connecting passage for communicating the first hole and the second hole and extending horizontally inside.
4. The method of claim 3,

The first hole is disposed on the edge portion of the intermediate substrate,

The second hole is a connecting device for inspection, characterized in that disposed in the center portion of the intermediate substrate.
4. The method of claim 3,

A connecting device for inspection, characterized in that a reinforcing member is installed inside the connecting passage to maintain the passage height from the first hole to the second hole.
6. The method of claim 5,

The reinforcing member is a connecting device for inspection, characterized in that the pipe extends horizontally from the first hole to the second hole and has both ends open.
7. The method of claim 6,

A connecting device for inspection, characterized in that a plurality of the pipes are stacked inside the connecting passage.
6. The method of claim 5,

The reinforcing member is a connecting device for inspection, characterized in that one end is in contact with the upper surface of the connection passage, and extends vertically to one end, and the other end is a vertical support body in contact with the lower surface of the connection passage, respectively.
According to claim 1,

A connecting device for inspection, characterized in that the upper part passes through the second through hole and is inserted into the air passage of the intermediate substrate, the lower part is in contact with the upper surface of the device under test, and a vacuum pad having a central hole formed in the center is further provided.
10. The method of claim 9,

The vacuum pad is made of a cylindrical shape with a central hole provided therein, and an upper portion of the cylindrical shape is cut in a radial direction and a cutout communicating with the central hole is provided.
11. The method of claim 10,

The lower portion of the vacuum pad, the connecting device for inspection, characterized in that it has a truncated cone shape with an outer diameter increasing toward the lower side.
According to claim 1,

On the lower surface of the second conductive rubber sheet,

A connecting device for inspection, characterized in that the silicon pad protrudes in a ring shape from the periphery of the second through hole and is in contact with the upper surface of the device under test.
According to claim 1,

A connecting device for inspection, characterized in that a pusher device is provided inside the housing, which moves in the vertical direction and presses the first device downward.
According to claim 1,

The first conductive part protrudes from the surface of the first insulating part,

A connecting device for inspection, characterized in that a ring-shaped silicon pad protruding by the same height as that of the first conductive part is provided on the periphery of the first through hole.
In the connecting device for inspection for being connected to the electrode of the device to be inspected to perform an electrical inspection of the device to be inspected,

a housing through which an air flow hole extending in the vertical direction passes through; and

a first sheet provided with a third through hole penetrating in the thickness direction at a position corresponding to the air distribution hole;

A second sheet provided with a fourth through-hole penetrating in the thickness direction at a position different from the third through-hole;

a third sheet disposed between the first sheet and the second sheet and having a fifth through hole in the form of a long hole connecting the third through hole and the fourth through hole;

A plurality of conductive particles are distributed in the thickness direction in the elastic insulating material and consist of a plurality of third conductive parts penetrating the first sheet, the second sheet, and the third sheet, and a third insulating part supporting the third conductive part, , A conductive rubber connector composed of a conductive frame in which a sixth through hole is formed in a position corresponding to the third through hole;

The third through hole, fourth through hole, fifth through hole, and sixth through hole constitute an air passage for air flow, and when a vacuum means is connected to the upper portion of the air distribution hole, it is disposed on the lower surface of the second conductive rubber sheet A connecting device for inspection, characterized in that the device to be inspected is adsorbed.
16. The method of claim 15,

The connecting device for inspection, characterized in that the first sheet, the second sheet and the third sheet are pressed together and attached integrally.
In the connecting device for inspection for being connected to the electrode of the device to be inspected to perform an electrical inspection of the device to be inspected,

a housing having an air circulation hole extending in the vertical direction through the inside; and

A fourth sheet provided with a seventh through hole penetrating in the thickness direction at a position corresponding to the air distribution hole,

a fifth sheet attached to the lower surface of the fourth sheet and provided with an eighth through-hole penetrating in the thickness direction at a position corresponding to the seventh through-hole;

A conductive frame comprising a plurality of fourth conductive parts having a plurality of conductive particles distributed in the thickness direction in an elastic insulating material and having an upper end penetrating the fourth and fifth sheets, and a fourth insulating part supporting the fourth conductive part. A conductive rubber connector configured to include;

A connection groove for connecting the seventh through-hole and the eighth through-hole is formed on a lower surface of the fourth sheet or an upper surface of the fifth sheet, and the seventh through-hole, the connecting groove, and the eighth through-hole are connected to each other to form an air passage, and when the vacuum means is connected to the upper portion of the air passage hole, the device to be tested disposed on the lower surface of the second conductive rubber sheet is adsorbed.
18. The method of claim 17,

The connecting device for inspection, characterized in that the fourth sheet and the fifth sheet are pressed to each other and are integrally attached.
In the connecting device for inspection for being connected to the electrode of the device to be inspected to perform an electrical inspection of the device to be inspected,

a housing in which an air flow hole extending in the vertical direction is formed; and

A conductive sheet module disposed under the housing and comprising a plurality of fifth conductive parts in which a plurality of conductive particles are distributed in a thickness direction in an elastic insulating material, and a fifth insulating part supporting the fifth conductive part,

In the conductive sheet module,

a ninth through hole disposed at a position corresponding to the air circulation hole of the housing and opened upward and closed at the bottom;

A tenth through hole that is opened downward from the central part and the upper part is blocked;

and an air passage consisting of a connection passage provided therein to connect the ninth through hole and the tenth through hole,

Connecting apparatus for inspection, characterized in that when the vacuum means is connected to the upper portion of the air flow hole, the device to be inspected disposed under the conductive sheet module is adsorbed.