WO2022004141A1 - 固定構造、光デバイス、及びレーザ装置 - Google Patents

固定構造、光デバイス、及びレーザ装置 Download PDF

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Publication number
WO2022004141A1
WO2022004141A1 PCT/JP2021/018038 JP2021018038W WO2022004141A1 WO 2022004141 A1 WO2022004141 A1 WO 2022004141A1 JP 2021018038 W JP2021018038 W JP 2021018038W WO 2022004141 A1 WO2022004141 A1 WO 2022004141A1
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WO
WIPO (PCT)
Prior art keywords
groove
optical fiber
resin body
fixed structure
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/018038
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English (en)
French (fr)
Japanese (ja)
Inventor
智久 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to CN202180037392.7A priority Critical patent/CN115668024A/zh
Priority to EP21832252.7A priority patent/EP4177648A4/en
Priority to US18/008,242 priority patent/US20230204864A1/en
Priority to JP2022533711A priority patent/JP7489464B2/ja
Publication of WO2022004141A1 publication Critical patent/WO2022004141A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources

Definitions

  • the present invention relates to a fixed structure in which an optical fiber is fixed to a support using a resin body.
  • the present invention also relates to an optical device having such a fixed structure and a laser device including such an optical device.
  • a fixed structure in which the optical fiber is fixed to the support by a resin body covering the boundary between the coating removal section and the coating section of the optical fiber is widely used.
  • the optical fiber is fixed to the terminal portion (corresponding to the above-mentioned support) by a guide adhesive (corresponding to the above-mentioned resin body) covering the boundary between the coating removal section and the covering section of the optical fiber.
  • the fixed structure is disclosed.
  • the covering section refers to a section in which the clad of the optical fiber is covered with a coating
  • the coating removal section refers to a section in which the coating is removed and the clad is exposed.
  • the light leaked from the clad of the optical fiber to the resin body in the covering section may enter the coating in the covering section to generate heat, which is the reliability of the fixed structure. It was a factor that reduced the number of people.
  • One aspect of the present invention has been made in view of the above problems, and heat generation of the coating that may occur when the light leaked from the clad of the optical fiber to the resin body in the coating removal section is incident on the coating in the coating section.
  • the purpose is to realize a highly reliable fixed structure.
  • Another aspect of the present invention is to realize a highly reliable optical device by using such a fixed structure.
  • Another aspect of the present invention is to realize a highly reliable laser apparatus by using such an optical device.
  • the fixed structure according to one aspect of the present invention is a boundary between an optical fiber, a support having a groove for accommodating the optical fiber, and a covering section and a covering removing section of the optical fiber inside the groove.
  • a resin body for fixing the optical fiber to the support is provided, and the resin body extends to the outside of the groove in the middle of the groove.
  • the optical device according to one aspect of the present invention has a fixed structure according to one aspect of the present invention.
  • the laser device according to one aspect of the present invention includes an optical device according to one aspect of the present invention.
  • the heat generation of the coating that may occur when the light leaked from the clad of the optical fiber to the resin body in the coating section is incident on the coating in the coating section is suppressed, and a highly reliable fixed structure can be obtained. It can be realized. Moreover, one aspect of the present invention can realize a highly reliable optical device by using such a fixed structure. Moreover, one aspect of the present invention can realize a highly reliable laser apparatus by using such an optical device.
  • FIG. 1 is a side view showing the configuration of the optical device 1.
  • FIG. 2 is a cross-sectional view showing an AA'cross section (see FIG. 1) of the fixed structure 10.
  • FIG. 3 is a cross-sectional view showing a BB'cross section (see FIG. 1) of the fixed structure 10.
  • the optical device 1 is a device for irradiating a machined object with a laser beam.
  • the optical device 1 includes an optical fiber 11, a support 12, a resin body 13, a large-diameter fiber 14, and a glass block 15.
  • the optical fiber 11, the support 12, and the resin body 13 form a fixed structure 10.
  • the optical device 1 may include a housing (not shown). In this case, the support 12, the resin body 13, the large-diameter fiber 14, and the glass block 15 are housed in the housing, and the optical fiber 11 is drawn into the housing.
  • the optical fiber 11 is configured to guide the laser beam.
  • an optical fiber including a cylindrical core 11a, a cylindrical clad 11b surrounding the core 11a, and a cylindrical coating 11c surrounding the clad 11b is used as the optical fiber 11.
  • the core 11a and the clad 11b are mainly made of quartz, and the coating 11c is mainly made of resin.
  • the coating 11c is removed in the section including one end of the optical fiber 11.
  • the section in which the clad 11b is covered with the coating 11c is referred to as a “covering section”
  • the section in which the coating 11c is removed and the clad 11b is exposed is referred to as a “cover removal section”.
  • the support 12 has a configuration for linearly supporting the optical fiber 11.
  • the support 12 includes a flange portion 12b, a substrate portion 12a provided on one side of the flange portion 12b, and a ferrule portion 12c provided on the other side of the flange portion 12b. Support is used.
  • the support 12 is integrally molded of copper and has a gold-plated surface.
  • the substrate portion 12a is a plate-shaped portion having a rectangular main surface. A groove 12a1 that crosses this surface in the longitudinal direction and ribs 12a2 that are arranged on both sides of the groove 12a1 and cross the surface in the longitudinal direction are formed on one surface of the substrate portion 12a.
  • the optical fiber 11 is housed inside the groove 12a1 and is inserted into the ferrule portion 12c through a through hole provided in the center of the flange portion 12b. At this time, the optical fiber 11 is arranged so that the boundary between the covering section and the covering removing section is located inside the groove 12a1.
  • the resin body 13 is configured to fix the optical fiber 11 housed in the groove 12a1 to the support body 12.
  • a resin body obtained by curing the liquid resin injected into the groove 12a1 is used as the resin body 13.
  • This liquid resin may be a photocurable resin or a thermosetting resin.
  • the curing of the liquid resin is realized by irradiating the liquid resin with light belonging to a specific wavelength band (for example, ultraviolet rays).
  • a specific wavelength band for example, ultraviolet rays
  • the curing of the liquid resin is realized by heating the liquid resin.
  • the laser beam emitted from the optical fiber 11 irradiates the object to be processed via the large diameter fiber 14 and the glass block 15.
  • a cylindrical optical fiber having a tapered diameter at one end is used as the large-diameter fiber 14, and a cylindrical glass block having a tapered diameter at one end is used as the glass block 15. I am using it.
  • the emission end face of the optical fiber 11 is fused and connected to the small diameter side end face of the large diameter fiber 14, and the large diameter side end face of the large diameter fiber 14 is fused to the small diameter side end face of the glass block 15.
  • the fixed structure 10 includes an optical fiber 11, a support 12, and a resin body 13.
  • the support 12 is formed with a groove 12a1 for accommodating the optical fiber 11.
  • the resin body 13 covers the boundary between the covering section and the coating removing section of the optical fiber 11 inside the groove 12a1 and fixes the optical fiber 11 to the support 12.
  • the feature of the fixed structure 10 is that the resin body 13 extends to the outside of the groove 12a1 in the middle of the groove 12a1.
  • another groove (orthogonal in the present embodiment) that intersects the groove 12a1 in the middle of the groove 12a1. 12a3 is formed on the support 12.
  • the ribs 12a2 provided on both sides of the groove 12a1 are interrupted in the middle of the groove 12a1.
  • the resin body 13 formed by curing this liquid resin takes a shape that extends to the outside of the groove 12a1 in the middle of the groove 12a1.
  • the laser beam applied to the object to be processed propagates forward from the optical fiber 11 side to the glass block 15 side, and the light reflected by the object to be processed is emitted. It may propagate in the opposite direction from the glass block 15 side to the optical fiber 11 side. At this time, a part of the light propagating in the opposite direction leaks from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section. Then, the light leaked from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section propagates through the resin body 13 formed inside the groove 12a1 and is incident on the coating 11c of the optical fiber 11 to enter the optical fiber. The coating 11c of 11 may generate heat.
  • the resin body 13 extends to the outside of the groove 12a1 in the middle of the groove 12a1. Therefore, a part of the light leaked from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section is outside the groove 12a1 (specifically, the groove 12a3) before being incident on the coating 11c of the optical fiber 11. It is guided to the resin body 13 that has spread to. Therefore, in the light leaked from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section, the ratio of the light incident on the coating 11c of the optical fiber 11 can be suppressed to a small value.
  • the refractive index of the resin body 13 is preferably lower than that of the clad 11b of the optical fiber 11. This makes it possible to reduce the amount of light leaking from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section. Therefore, the intensity of the light incident on the coating 11c of the optical fiber 11 can be further reduced. As a result, the heat generated by the coating 11c of the optical fiber 11 that may occur when the light leaked from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section is incident on the coating 11c of the optical fiber 11 can be further suppressed. can.
  • the groove 12a1 is preferably a U-shaped groove as shown in FIG.
  • the stress received by the optical fiber 11 from the resin body 13 formed inside the groove 12a1 approaches uniform (axisymmetric).
  • the groove 12a3 is formed line-symmetrically with respect to the groove 12a1 in the plan view of the support 12.
  • the stress received by the optical fiber 11 from the resin body 13 formed inside the grooves 12a1 and the grooves 12a3 approaches uniform (line symmetry).
  • the bottom portion of the groove 12a1 is formed with a recess 12a4 for restricting the expanding range of the resin body 13.
  • the liquid resin injected into the groove 12a1 when forming the resin body 13 penetrates beyond the recess 12a4 to the vicinity of the flange portion 12b, and the resin body 13 obtained by curing the recess 12a4 is unintended. It is possible to prevent the optical fiber 11 from being formed into a shape (as a result, an unintended stress is applied to the optical fiber 11).
  • how the resin body 13 spreads is defined by the groove 12a1. Therefore, the resin body 13 is expanded to the outside of the groove 12a1 by forming another groove 12a3 that intersects with the groove 12a1.
  • the present invention is not limited to this.
  • how the resin body 13 spreads may be defined by the ribs 12a2. In this case, the resin body 13 can be expanded to the outside of the groove 12a1 simply by interrupting the rib 12a2 in the middle of the groove 12a1 without forming another groove 12a3 that intersects with the groove 12a1.
  • FIG. 4 shows the results obtained by numerical experiments on the power of light propagating in the reverse direction of the resin body 13 formed inside the groove 12a1 in the fixed structure 10.
  • FIG. 4 is a graph in which the power of light propagating in the reverse direction of the resin body 13 formed inside the groove 12a1 is plotted along the z-axis shown in FIG.
  • the z-axis is an axis parallel to the optical axis of the optical fiber 11, and its origin is set at the start point of the groove 12a3.
  • the width of the groove 12a3 in the z-axis direction was set to 2 mm.
  • the power of the light propagating in the reverse direction through the resin body 13 formed inside the groove 12a1 in the third section is the light propagating in the reverse direction through the resin body 13 formed inside the groove 12a1 in the first section. It is about 1/8 of the power of. This means that the power of light reaching the coating 11c of the optical fiber 11 is sufficiently small.
  • FIG. 5A is a perspective view of the fixed structure 10 (Example) and a temperature distribution map thereof.
  • FIG. 5B is a perspective view of the fixed structure 10 (comparative example) in which the groove 12a3 is omitted so that the resin body 13 does not spread to the outside of the groove 12a1 and the temperature distribution thereof. Both temperature distribution maps are for light propagating in the opposite direction through the clad 11b of the optical fiber 11. According to the temperature distribution map shown in FIG. 5, in the above comparative example in which the resin body 13 does not spread to the outside of the groove 12a1, the temperature of the coating 11c of the optical fiber 11 reaches about 100 ° C., whereas the temperature of the resin body 13 reaches about 100 ° C.
  • the temperature of the coating 11c of the optical fiber 11 is suppressed to about 40 ° C. in the above embodiment in which the light spreads to the outside of the groove 12a1. That is, by providing the groove 12a3 and expanding the resin body 13 to the outside of the groove 12a1, the heat generated by the coating 11c of the optical fiber 11 caused by the light leaked from the clad 11b of the optical fiber 11 to the resin body 13 in the coating removal section. It was confirmed that the amount of light could be kept small.
  • FIG. 6 is a graph showing the correlation between the temperature rise of the coating 11c of the optical fiber 11 and the deviation thereof for the above-mentioned example of 5 samples and the above-mentioned comparative example of 7 samples.
  • the difference between the temperature rise of the coating 11c of the optical fiber 11 and the temperature rise of the support 12 is taken on the horizontal axis, and the multiple of the standard deviation is taken on the vertical axis. According to the graph shown in FIG.
  • the average value of the temperature rise of the coating 11c is higher than the temperature rise of the support 12 by about 30 ° C., whereas in the above embodiment, the coating 11c It can be seen that the average value of the temperature rise is about the same as the temperature rise of the support 12. Further, according to the graph shown in FIG. 6, in the above comparative example, the temperature rise of the coating 11c has a large variation, and there is a high probability that an extreme temperature rise causing a serious problem in the coating 11c will occur. In the examples, it can be seen that the variation in the temperature rise of the coating 11c is small, and the probability that the above occurs is low. That is, it can be seen that the reliability of the above-mentioned embodiment is higher than the reliability of the above-mentioned comparative example.
  • the above-mentioned optical device 1 can be used as a laser device for processing.
  • FIG. 7 is a block diagram showing the configuration of such a laser device 20.
  • the laser device 20 includes a laser light source 21, a delivery fiber 22, and an optical device 23.
  • the laser light source 21 is configured to generate a laser beam.
  • the laser light source 21 may be a solid-state laser, a liquid laser, a gas laser, or a fiber laser.
  • the delivery fiber 22 is configured to guide the laser beam generated by the laser light source 21.
  • the delivery fiber 22 may be a single mode fiber or a multimode fiber.
  • the optical device 23 is configured to irradiate the processing object W with the light guided through the delivery fiber 22.
  • the fixed structure according to the first aspect of the present invention includes an optical fiber, a support having a groove for accommodating the optical fiber, and a covering section and coating of the optical fiber inside the groove.
  • a resin body that covers the boundary with the removal section and fixes the optical fiber to the support is provided, and the resin body extends to the outside of the groove in the middle of the groove.
  • the light leaked from the clad of the optical fiber to the resin body in the covering section is less likely to enter the coating of the optical fiber in the covering section. Therefore, the heat generation of the optical fiber coating can be suppressed to be smaller than that in the case where the resin body is formed only inside the groove. As a result, the reliability of the fixed structure can be improved as compared with the case where the resin body is formed only inside the groove.
  • the other grooves are formed line-symmetrically with respect to the grooves in the plan view of the support. It has been adopted.
  • the heat generation of the optical fiber coating can be further suppressed.
  • the groove is a U-shaped groove.
  • a recess for restricting the spreading range of the resin body is formed at the bottom of the groove. The configuration is adopted.
  • the resin body has an unintended shape, and as a result, it is less likely that an unintended stress is applied to the optical fiber.
  • the optical device according to the seventh aspect of the present invention has the fixed structure according to any one of the first to sixth aspects.
  • the laser apparatus according to the eighth aspect of the present invention includes the optical device according to the seventh aspect.
  • Optical device 10 Fixed structure 11 Optical fiber 11a Core 11b Clad 11c Coating 12 Support 12a Substrate 12a1 Groove 12a2 Rib 12a3 Groove 12a4 Recess 13 Resin body 14 Large diameter fiber 15 Glass block 20 Laser device 21 Laser light source 22 Delivari device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Lasers (AREA)
PCT/JP2021/018038 2020-07-01 2021-05-12 固定構造、光デバイス、及びレーザ装置 Ceased WO2022004141A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202180037392.7A CN115668024A (zh) 2020-07-01 2021-05-12 固定结构、光器件、以及激光装置
EP21832252.7A EP4177648A4 (en) 2020-07-01 2021-05-12 FIXING STRUCTURE, OPTICAL DEVICE AND LASER APPARATUS
US18/008,242 US20230204864A1 (en) 2020-07-01 2021-05-12 Securing structure, optical device, and laser apparatus
JP2022533711A JP7489464B2 (ja) 2020-07-01 2021-05-12 固定構造、光デバイス、及びレーザ装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020114282 2020-07-01
JP2020-114282 2020-07-01

Publications (1)

Publication Number Publication Date
WO2022004141A1 true WO2022004141A1 (ja) 2022-01-06

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PCT/JP2021/018038 Ceased WO2022004141A1 (ja) 2020-07-01 2021-05-12 固定構造、光デバイス、及びレーザ装置

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Country Link
US (1) US20230204864A1 (https=)
EP (1) EP4177648A4 (https=)
JP (1) JP7489464B2 (https=)
CN (1) CN115668024A (https=)
WO (1) WO2022004141A1 (https=)

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JPH1020146A (ja) * 1996-07-03 1998-01-23 Takaoka Electric Mfg Co Ltd 光導波路と光ファイバの結合構造および結合方法
JPH11109188A (ja) * 1997-10-03 1999-04-23 Hitachi Ltd 半導体素子と光ファイバの搭載基板
US20070217738A1 (en) * 2006-03-16 2007-09-20 Northrop Grumman Corporation System and method to remove light from cladding
JP2011513774A (ja) * 2008-02-27 2011-04-28 イェノプティック レーザー ゲーエムベーハー 光伝送装置の製造方法及び光伝送装置
JP2011525706A (ja) * 2008-06-25 2011-09-22 コラクティヴ ハイ−テック インコーポレイティド 高出力光ファイバ部材用エネルギ放散パッケージ
JP2019144385A (ja) * 2018-02-20 2019-08-29 株式会社フジクラ クラッドモードストリッパ及びレーザ装置

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US5151964A (en) * 1991-09-06 1992-09-29 Minnesota Mining And Manufacturing Company Wedge-actuated multiple optical fiber splice
JP3136741B2 (ja) * 1992-02-07 2001-02-19 住友電気工業株式会社 光ファイバ補強方法
JPH08286073A (ja) * 1995-04-18 1996-11-01 Sumitomo Electric Ind Ltd 光導波路の実装用パッケージ構造
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JPH0511122A (ja) * 1991-07-05 1993-01-19 Japan Aviation Electron Ind Ltd 光フアイバ用キヤリア
JPH1020146A (ja) * 1996-07-03 1998-01-23 Takaoka Electric Mfg Co Ltd 光導波路と光ファイバの結合構造および結合方法
JPH11109188A (ja) * 1997-10-03 1999-04-23 Hitachi Ltd 半導体素子と光ファイバの搭載基板
US20070217738A1 (en) * 2006-03-16 2007-09-20 Northrop Grumman Corporation System and method to remove light from cladding
JP2011513774A (ja) * 2008-02-27 2011-04-28 イェノプティック レーザー ゲーエムベーハー 光伝送装置の製造方法及び光伝送装置
JP2011525706A (ja) * 2008-06-25 2011-09-22 コラクティヴ ハイ−テック インコーポレイティド 高出力光ファイバ部材用エネルギ放散パッケージ
JP2019144385A (ja) * 2018-02-20 2019-08-29 株式会社フジクラ クラッドモードストリッパ及びレーザ装置

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Title
See also references of EP4177648A4

Also Published As

Publication number Publication date
CN115668024A (zh) 2023-01-31
EP4177648A4 (en) 2024-08-14
JPWO2022004141A1 (https=) 2022-01-06
JP7489464B2 (ja) 2024-05-23
US20230204864A1 (en) 2023-06-29
EP4177648A1 (en) 2023-05-10

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