WO2021212862A1 - 用于真空反应炉的减震装置及晶体生长炉 - Google Patents

用于真空反应炉的减震装置及晶体生长炉 Download PDF

Info

Publication number
WO2021212862A1
WO2021212862A1 PCT/CN2020/134378 CN2020134378W WO2021212862A1 WO 2021212862 A1 WO2021212862 A1 WO 2021212862A1 CN 2020134378 W CN2020134378 W CN 2020134378W WO 2021212862 A1 WO2021212862 A1 WO 2021212862A1
Authority
WO
WIPO (PCT)
Prior art keywords
air
shock
air cushion
damping
vacuum
Prior art date
Application number
PCT/CN2020/134378
Other languages
English (en)
French (fr)
Inventor
李帅
李宏刚
赵建国
李函朔
Original Assignee
山东天岳先进科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山东天岳先进科技股份有限公司 filed Critical 山东天岳先进科技股份有限公司
Publication of WO2021212862A1 publication Critical patent/WO2021212862A1/zh

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L9/00—Rigid pipes
    • F16L9/14—Compound tubes, i.e. made of materials not wholly covered by any one of the preceding groups
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/0418—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall having a particular shape, e.g. annular, spherical, tube-like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/0454—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall characterised by the assembling method or by the mounting arrangement, e.g. mounting of the membrane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/0472—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall characterised by comprising a damping device
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/04—Devices damping pulsations or vibrations in fluids
    • F16L55/041—Devices damping pulsations or vibrations in fluids specially adapted for preventing vibrations

Definitions

  • the invention relates to a shock absorption device and a crystal growth furnace for a vacuum reaction furnace, and belongs to the technical field of mechanical shock absorption.
  • the existing crystal growth furnace is connected with a vacuum pump, and the vacuum pump is used to vacuum the inside of the furnace body of the crystal growth furnace.
  • the vacuum pump will produce a lot of vibration during the working process, and even cause the ground vibration.
  • the connecting pipe will also cause a large vibration, which is very strong, which causes the crystal growth furnace to not be in the normal operation process. It is in a stable state, which causes the fluctuation of the temperature gradient inside the furnace body and the instability of the gas phase. The most serious is the continuous shedding of stagnant crystals generated in the furnace body, which causes an instantaneous drop in temperature, which seriously affects the stability of the furnace body.
  • the vibration device of the vacuum pump is designed with an air shock absorber, and the vibration of the machine still uses a rubber cushion to absorb the shock.
  • the effect of the air shock absorber is more obvious for the shock absorption of large machines, but the existing design has not It is applied to the entire machine but only for the vacuum pump alone, so the scope of application is narrow.
  • Others use bellows for shock absorption and rubber shock absorption. The bellows is used to connect the vacuum pump pipeline. From the current application of bellows, although the shock absorption effect is played to a certain extent, the touch is still strong. In contrast, the design is more It is simple and effective for large-area applications, but for the shock absorption of precision equipment, it is far from enough to use only bellows.
  • the prior art still uses rubber damping to reduce ground vibration. Although all improvements have been made, the effect is not particularly good.
  • the present invention provides a shock absorption device and a crystal growth furnace for a vacuum reaction furnace.
  • the road achieves a good shock absorption effect;
  • the crystal growth furnace is equipped with the shock absorption device, which can maintain the stability of the furnace body, so that the crystal inside the furnace body is in a relatively stable growth state.
  • a shock absorbing device for a vacuum reaction furnace comprising:
  • a connecting pipeline the connecting pipeline includes a vacuum pipeline, and a damping shock-absorbing layer and an air shock-absorbing layer are arranged on the outside of the vacuum pipeline in sequence; the connecting pipeline is used to connect the vacuuming device of the vacuum reactor and the furnace body;
  • a first air cushion the first air cushion is used to contain a gas with a constant pressure, and the first air cushion is connected to the bottom of the vacuuming device of the vacuum reactor;
  • a second air cushion is used for accommodating a gas with a constant pressure, and the second air cushion is connected to the bottom of the vacuum reaction furnace body.
  • the material of the damping and damping layer is selected from viscoelastic materials; preferably, the material of the damping and damping layer is selected from at least one of polyurethane elastomer and polyvinyl butyral; preferably, the The density of the damping and shock absorption layer material is 0.9-0.95 g/cm 3 .
  • the material of the outer layer of the air shock absorption layer is the same as the material of the radial tire; and/or the material of the first air cushion and the second air cushion is the same as the material of the radial tire.
  • the ratio of the thickness of the damping damping layer to the air damping layer is 1 to 3:1 to 5; preferably, the ratio of the thickness of the damping damping layer to the air damping layer is 1 to 2: 1 ⁇ 2.
  • the thickness of the damping layer is 0.5 to 3 cm, and the thickness of the air damping layer is 0.5 to 3 cm; preferably, the thickness of the damping layer is 1 to 1.5 cm, and the air damping layer has a thickness of 1 to 1.5 cm.
  • the thickness of the seismic layer is 1 to 1.5 cm.
  • the shock absorption device further includes a pressure control device connected to the air shock absorption layer, the first air cushion and the second air cushion respectively.
  • the pressure control device includes an inflator and a pressure control valve, the inflator is connected to the air damping layer, the first air cushion, and the second air cushion through a pipeline, and the inflator is connected to the air damping layer.
  • the pipeline connecting the first air cushion and the second air cushion is equipped with a pressure control valve.
  • connection port is provided on the outer side of the air damping layer, and the connection port is connected to the pressure control device through a pipeline.
  • the two ends of the damping damping layer and the air damping layer are closed with a hard material; preferably, the hard material is selected from at least one of copper alloy and stainless steel.
  • a crystal growth furnace on which the shock absorption device is installed.
  • the crystal growth furnace includes a furnace body, a column, and a vacuum device; the column is arranged at the bottom of the furnace body and is used to support the furnace body; the vacuum device is used to vacuum the furnace body; the connection Both ends of the pipeline are respectively connected with the furnace body and the vacuum device; the first air cushion is installed at the bottom of the vacuum device; the second air cushion is installed at the bottom of the column.
  • the furnace body and the vacuum device are provided with a connection port communicating with the connection pipeline, and the connection port is provided with an inwardly recessed groove, and an O-ring seal is provided in the groove, so The outer edge of the connecting pipeline is in sealing contact with the O-shaped sealing ring, and the connecting pipeline is fixed at the connecting port by a buckle.
  • the cross-sectional shape of the first air cushion is a square
  • the cross-sectional shape of the second air cushion is a circle; preferably, the number of the second air cushion is four.
  • the damping device of the present invention is provided with a damping damping layer and an air damping layer on the outer layer of the vacuum pipeline, and through the double shock absorption of the vacuum pipeline, the vibration of the vacuum pipeline is significantly reduced, and the shock absorption effect is significantly improved.
  • the shock absorption device of the present invention connects the pressure control device with the first air cushion, the second air cushion and the air shock absorption layer, so that the first air cushion, the second air cushion and the air shock absorption layer are in a constant pressure state ,
  • the damping effect has been greatly improved.
  • the crystal growth furnace of the present invention is equipped with the damping device, double damping pipelines of the damping damping layer and the air damping layer, and the air damping is applied to the furnace body, vacuuming and piping.
  • the use of damping shock absorption and air shock absorption makes the furnace body basically in a static state, and the crystal growth in the furnace body is in a relatively stable growth state.
  • Figure 1 is a schematic diagram of the structure of the shock absorption device of the present invention.
  • FIG. 2 is a schematic cross-sectional view of the connecting pipeline in the shock absorption device of the present invention.
  • Vacuum pipeline 2. Damping shock absorption layer; 3. Air shock absorption layer; 4. First air cushion; 5. Second air cushion; 6. Inflatable device.
  • first and second are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined with “first” and “second” may explicitly or implicitly include one or more of these features. In the description of the present invention, “plurality” means two or more than two, unless otherwise specifically defined.
  • connection In the present invention, unless otherwise clearly specified and limited, the terms “installation”, “connection”, “connection”, and other terms should be understood in a broad sense. For example, they can be fixed connection, detachable connection, or Integral; it can be a mechanical connection, it can be a connection, it can also be a communication; it can be a direct connection, it can also be indirectly connected through an intermediate medium, it can be the internal communication of two components or the interaction relationship between two components.
  • connection can be fixed connection, detachable connection, or Integral
  • it can be a mechanical connection, it can be a connection, it can also be a communication; it can be a direct connection, it can also be indirectly connected through an intermediate medium, it can be the internal communication of two components or the interaction relationship between two components.
  • the “on” or “under” of the first feature on the second feature may be in direct contact with the first and second features, or the first and second features may be indirectly through an intermediary. touch.
  • descriptions with reference to the terms “one embodiment”, “some embodiments”, “examples”, “specific examples”, or “some examples” etc. mean specific features described in conjunction with the embodiment or example , Structures, materials or features are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.
  • an embodiment of the present invention discloses a shock-absorbing device for a vacuum reaction furnace.
  • the shock-absorbing device includes a connecting pipe, a first air cushion, and a second air cushion.
  • the connecting pipe It includes a vacuum pipe 1 for connecting the vacuuming device of the vacuum reaction furnace and the furnace body.
  • the outer side of the vacuum pipe 1 is provided with a damping shock-absorbing layer 2 and an air shock-absorbing layer 3 in sequence; the first air cushion 4 is used to maintain Constant pressure gas, the first air cushion 4 is used to connect the bottom of the vacuum device; the second air cushion 5 is used to maintain a constant pressure gas, the second air cushion 5 is used to connect to the bottom of the furnace body .
  • the damping damping layer 2 and the air damping layer 3 are arranged on the outside of the vacuum pipeline, and the dual damping arrangement of damping damping and air damping significantly reduces the vibration of the vacuum pipeline, so that the vacuum pipeline is in a stable state; and
  • the first air cushion 4 that can be connected to the vacuum device and the second air cushion 5 that can be connected to the crystal growth furnace air shock absorption is applied to the vacuum device, crystal growth furnace and pipeline, effectively reducing the impact of ground vibration.
  • the material of the damping and damping layer 2 is a thermoplastic elastomer material; preferably, the material of the damping and damping layer 2 is selected from polystyrene-butadiene block copolymers (SBS), (Here, our SBS does not do asphalt modification treatment, but only requires rubber characteristics.
  • SBS polystyrene-butadiene block copolymers
  • the filling method is heated and melted and then poured into the pipe interlayer for cooling After solidification, or using polystyrene-polyisoprene-polystyrene block copolymer (SIS), etc.
  • the density of the material of the damping layer 2 is 0.9 ⁇ 0.95g/cm 3 .
  • SIS polystyrene-polyisoprene-polystyrene block copolymer
  • the outer layer material of the air damping layer 3 is the same as the material of the radial tire; and/or the material of the first air cushion 4 and the second air cushion 5 is the same as the material of the radial tire .
  • the raw materials of radial tires mainly include the following percentages: carbon black 20-25%, natural rubber 40-45%, other chemical materials 10-15%, steel cord 8-12%, bead steel wire 2 ⁇ 4%, synthetic rubber 5-10%.
  • the outer layer material of the air damping layer 3 is set to be the same as the material of the radial tire, so that the outer layer of the air damping layer 3 has large radial elasticity, good cushioning performance, and large load capacity, especially the inner filling of the air damping layer 3 Into a certain pressure of gas, the air damping layer 3 can not be damaged and deformed easily under long-term high-pressure working conditions.
  • the materials of the first air cushion 4 and the second air cushion 5 are set to be the same as the material of the radial tire, the adhesion performance of the first air cushion 4 and the second air cushion 5 to the ground is good, and the unit pressure on the ground is also small.
  • the cushion slip is small.
  • the first air cushion 4 and the second air cushion 5 not only ensure the shock absorption effect on the bottom of the vacuum device under high pressure for a long time, but also do not deform under high pressure for a long time and have a long service life.
  • the material of the vacuum pipeline 1 is mild steel
  • the material of the intermediate layer of the damping damping layer 2 and the air damping layer 3 is mild steel
  • the outermost layer of the air damping layer 3 The material of is the material of radial tire.
  • the outermost material of the connecting pipeline is a radial tire material, and the uppermost and the lowermost part of the connecting pipeline can be directly fused with mild steel materials when the pipeline is processed.
  • the ratio of the thickness of the damping damping layer to the air damping layer is 1 to 3:1 to 5; preferably, the thickness of the damping damping layer and the air damping layer are The ratio is 1 ⁇ 2:1 ⁇ 2.
  • the thickness of the damping layer 2 is 0.5 to 3 cm
  • the thickness of the air damping layer 3 is 0.5 to 3 cm
  • the inner diameter of the vacuum line is 5 to 6 cm; preferably, the damping layer
  • the thickness of the shock absorption layer 2 is 1 to 1.5 cm
  • the thickness of the air shock absorption layer 3 is 1 to 1.5 cm.
  • the pressure control device includes an inflator and a pressure control valve, and the inflator is connected to the air damping layer 3, the first air cushion 4, and the second air cushion 5 through pipelines.
  • the pipeline connecting the inflator and the air damping layer 3, the first air cushion 4 and the second air cushion 5 are all provided with a pressure control valve.
  • the inflator is used to inject air into the air shock absorption layer 3, the first air cushion 4, and the second air cushion 5. And through the setting of the pressure control valve on the pipeline, it is used to ensure that the air pressure in the air damping layer 3, the first air cushion 4 and the second air cushion 5 is maintained in a constant state. During the working process of machinery and equipment, large ground vibrations will be generated.
  • the pressure of the air damping layer 3, the first air cushion 4 and the second air cushion 5 will fluctuate. In order to ensure that the air damping layer 3 and the first air The cushion 4 and the second air cushion 5 have better air damping effects, and it is necessary to pass air into the air damping layer 3, the first air cushion 4 and the second air cushion 5.
  • connection port is provided on the air damping layer 3, the connection port is connected to the pressure control device through a pipeline, and the connection port is located close to the connection pipeline and the vacuum device. Connect the end. Since the connection port is more prone to air leakage, the connection port is located close to the connection end of the connection pipe and the vacuum device, which can reduce the influence of the vibration of the connection pipe on the temperature and pressure in the furnace to a certain extent.
  • the two ends of the damping damping layer 2 and the air damping layer 3 are closed by a hard material; preferably, the hard material is selected from at least one of copper alloy and stainless steel. kind. Since the crystal growth furnace is at a high temperature during the crystal growth process, the pipe part of the connection port must be able to withstand a certain high temperature, and the air damping layer 3 is filled with gas at a certain pressure, so the closed damping damping layer is optimized.
  • the materials at both ends of 2 and the air damping layer 3 make the connecting pipelines resistant to certain high temperature and high pressure, not easy to deform after long-term use, and extend the service life.
  • the inflator 6 includes an air compressor and an engine, the engine is connected to the air compressor, and the air compressor is connected to the air damping layer 3 and the first air cushion 4, The first air cushion 4 is connected to the second air cushion 5 through a pipeline.
  • the engine provides power for an air compressor, and the air compressor is used to inject gas into the air damping layer 3, the first air cushion 4, and the second air cushion 5.
  • the inflator 6 includes an inflator, the inflator is connected to the first air cushion 4, and the first air cushion 4 is connected to the second air cushion 5 through a pipeline.
  • the air pump is used to inject air into the first air cushion 4 and the second air cushion 5.
  • the inflator 6 is provided with a bidirectional connector, and the bidirectional connector is connected to the first air cushion 4 and the air damping layer 3 through pipelines, and the first air cushion 4 It is connected to the second air cushion 5 through a pipeline.
  • the inflator 6 also needs to pass air into the air damping layer 3.
  • This embodiment provides a crystal growth furnace on which the shock absorption device is installed.
  • the crystal growth furnace includes a furnace body, a column, and a vacuum device; the column is arranged at the bottom of the furnace body and is used to support the furnace body; the vacuum device is used to vacuum the furnace body; The two ends are respectively connected with the furnace body and the vacuum device; the first air cushion is installed at the bottom of the vacuum device; the second air cushion is installed at the bottom of the column.
  • the furnace body and the vacuum device are provided with a connection port communicating with the connecting pipeline, and the connection port is provided with an inwardly recessed groove, and the groove is provided with There is an O-shaped sealing ring, the outer edge of the connecting pipeline is in sealing contact with the O-shaped sealing ring, and the connecting pipeline is fixed at the connection port by a buckle.
  • the main material of O-rings is fluororubber, which has high temperature resistance, oil resistance, chemical resistance, good physical and mechanical properties, weather resistance, electrical insulation and radiation resistance, etc.
  • the air pressure of the air damping layer 3 is 0.1 to 1 bar, preferably, the air pressure of the air damping layer 3 is 0.2 to 0.5 bar.
  • the air pressure of the first air cushion 4 is 0.1 to 1 bar
  • the air pressure of the second air cushion 5 is 0.1 to 1 bar.
  • the air pressure of the first air cushion 4 is 0.2 to 0.5 bar
  • the air pressure of the second air cushion 5 is 0.2 to 0.5 bar. Under the air pressure, the air damping layer 3, the first air cushion 4 and the second air cushion 5 can achieve a good air damping effect.
  • the cross-sectional shape of the first air cushion 4 is square, and the cross-sectional shape of the second air cushion 5 is circular; the first air cushion 4 and the bottom of the vacuum pump Matching, the second air cushion 5 matches the bottom of the column.
  • the vacuum device will generate a great mechanical vibration during the process of vacuuming the furnace body.
  • a matching air cushion is connected to the bottom of the vacuum device, which can greatly relieve Vibration of the vacuum device.
  • the number of the second air cushions 5 matches the number of columns of the crystal growth furnace.
  • the number of the second air cushion 5 is four.
  • the second air cushion 5 is placed on the bottom of the column, which can be used to reduce the influence of ground vibration on the furnace body.
  • This application applies air damping to the furnace body, vacuum device and pipeline, and by arranging a damping damping layer and an air damping layer on the outer layer of the vacuum pipeline, the damping damping and air damping are comprehensively utilized, making the furnace interior Basically in a static state, the shock absorption effect has been significantly improved.
  • the axial measurement method is used to measure (1) the uppermost part of the vacuum pump; (2) the axial center of the vacuum pump; (3) the lowermost part of the vacuum pump; 4) The ground directly in contact with the vacuum pump.
  • the pipeline connecting the vacuum pump we still use the axial three-point measurement method, respectively (1) the pipeline is connected to the furnace body end; (2) the axial center of the pipeline; (3) the pipeline is connected to the vacuum pump end.
  • Operation situation 1 Vacuum pump and pipeline without any shock absorption device
  • Operation situation 2 Add the vacuum pump and pipeline of the shock absorption device of the application, the thickness of the damping shock absorption layer and the air shock absorption layer at the connecting pipeline are both 1.4cm, the first air cushion, the second air cushion and the air shock absorption layer The air pressure is 0.5mbar;
  • Operation situation 3 Increase the vacuum pump and pipeline of the shock absorption device.
  • the thickness of the damping shock absorbing layer is 2.4cm.
  • the first air cushion, The air pressure of the second air cushion and the air shock absorption layer are both 0.5 mbar, and the rest is the same as the shock absorption device of the present application.
  • Operation situation 4 Increase the vacuum pump and pipeline of the shock absorber. There is only the air shock absorber in the connecting pipeline. The thickness of the air shock absorber is 2.4cm. The first air cushion, the second air cushion and the air shock absorber The air pressure is 0.5mbar, and the rest is the same as the shock absorption device of this application.
  • Operation status five increase the vacuum pump and pipeline of the shock absorption device, the thickness ratio of the damping shock absorbing layer and the air shock absorbing layer in the connecting pipeline is 1:6, the thickness of the damping shock absorbing layer is 0.4cm, and the thickness of the air shock absorbing layer is 0.4cm.
  • the thickness is 2.4 cm, the air pressure of the first air cushion, the second air cushion and the air shock absorption layer are all 0.5 mbar, and the rest is the same as the shock absorption device of this application;
  • Operation 6 Increase the vacuum pump and pipeline of the shock absorption device, and the thickness ratio of the damping shock absorbing layer and the air shock absorbing layer in the connecting pipeline is 4:1, the thickness of the damping shock absorbing layer is 2.24 cm, and the thickness of the air shock absorbing layer is 2.24 cm.
  • the thickness is 0.56 cm, the air pressure of the first air cushion, the second air cushion and the air shock absorption layer are all 0.5 mbar, and the rest is the same as the shock absorption device of the present application.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

一种用于真空反应炉的减震装置及晶体生长炉，所述减震装置包括：连接管路、第一空气垫（4）、第二空气垫（5）和压力控制装置，连接管路包括真空管路（1），真空管路（1）外侧依次设置有阻尼减震层（2）和空气减震层（3）；连接管路用于连接真空反应炉的抽真空装置和炉体；第一空气垫（4）用于容纳恒定气压的气体，第一空气垫（4）连接真空反应炉抽真空装置的底部；第二空气垫（5）用于容纳恒定气压的气体，第二空气垫（5）连接真空反应炉炉体的底部。通过在真空管路（1）外设置阻尼减震层（2）和空气减震层（3），通过真空管路（1）的双重减震，显著降低了真空管路（1）的震动，且将空气减震应用到晶体生长炉、真空泵和管路，使炉体内基本上处于一个静止的状态，减震效果得到大幅度地提高。

Description

用于真空反应炉的减震装置及晶体生长炉 技术领域
本发明涉及一种用于真空反应炉的减震装置及晶体生长炉，属于机械减震的技术领域。
背景技术
现有的晶体生长炉与真空泵连接，所述真空泵用于对晶体生长炉的炉体内部抽真空。真空泵在工作运转过程中会产生很大的震动，甚至会导致地面的震动，同时连接管道也会波及产生较大的震动，触感非常强烈，这也就导致了晶体生长炉在正常运作过程中不是处于一个稳定的状态，从而引起炉体内部温度梯度的波动以及气相的不稳定性，最严重的为炉体内产生的滞晶持续性脱落，导致的温度瞬间下降，严重影响炉体的稳定性。
目前针对真空泵的震动装置设计有采用空气减震器，以及机器震动依旧采用橡胶垫层减震，对于大型机器的减震相比之下还是空气减震器效果较为明显，但是已有设计并未将其应用至整套机器而是单独只针对真空泵，应用范围狭小。还有的采用波纹管减震以及橡胶减震，波纹管为连接真空泵管路，就目前波纹管应用来看，虽然一定程度上起到了减震效果，但是触感依旧强烈，相比之下设计较为简单，效果较好被大面积应用实施，但是对于精密设备的减震，只用波纹管是远远不够的。同时现有技术依旧采用橡胶减震的方式来减少地面震动，虽然都有所改善，但是效果并不特别好。
发明内容
为了解决上述问题，本发明提供了一种用于真空反应炉的减震装置及晶体生长炉，该减震装置综合利用空气减震和阻尼减震的方式，使得抽真空装置、炉体和管路达到了很好的减震效果；该晶体生长炉上安装有所述减震装置，能够保持该炉体内部的稳定性，使得炉体内部晶体处于一个相对稳定的生长状态。
本发明采用的技术方案如下：
根据本申请的一个方面，提供了一种用于真空反应炉的减震装置，所述减震装置包括：
连接管路，所述连接管路包括真空管路，所述真空管路外侧依次设置有阻尼减震层和空气减震层；所述连接管路用于连接真空反应炉的抽真空装置和炉体；
第一空气垫，所述第一空气垫用于容纳恒定气压的气体，所述第一空气垫连接真空反应炉抽真空装置的底部；
第二空气垫，所述第二空气垫用于容纳恒定气压的气体，所述第二空气垫连接真空反应炉炉体的底部。
进一步的，所述阻尼减震层的材料选自粘弹性材料；优选的，所述阻尼减震层的材料选自聚氨酯弹性体和聚乙烯醇缩丁醛中的至少一种；优选的，所述阻尼减震层材料的密度为0.9～0.95g/cm 3。
进一步的，所述空气减震层的外层材料与子午线胎的材料相同；和/或第一空气垫和第二空气垫的材料与子午线胎的材料相同。
进一步的，所述阻尼减震层与空气减震层的厚度的比例为1～3:1～5；优选的，所述阻尼减震层与空气减震层的厚度的比例为1～2:1～2。优选的，所述阻尼减震层的厚度为0.5～3cm，所述空气减震层的厚度为0.5～3cm；优选的，所述阻尼减震层的厚度为1～1.5cm，所述空气减震层的厚度为1～1.5cm。
进一步的，所述减震装置还包括压力控制装置，所述压力控制装置分别与空气减震层、第一空气垫和第二空气垫连接。优选的，所述压力控制装置包括充气装置和压力控制阀，所述充气装置分别通过管路与空气减震层、第一空气垫和第二空气垫连接，所述充气装置与空气减震层、第一空气垫和第二空气垫连接的管路上均设置有压力控制阀。
进一步的，所述空气减震层外侧设有连接口，所述连接口通过管路与压力控制装置连接。
进一步的，所述阻尼减震层和空气减震层的两端采用硬质材料封闭；优选 的，所述硬质材料选自铜合金和不锈钢中的至少一种。
根据本申请的另一个方面，提供了一种晶体生长炉，所述晶体生长炉上安装有所述的减震装置。
进一步的，所述晶体生长炉包括炉体、立柱和抽真空装置；所述立柱设置于炉体的底部，用于支撑炉体；所述抽真空装置用于对炉体内抽真空；所述连接管路的两端分别与所述炉体和抽真空装置连通；所述第一空气垫安装于所述抽真空装置的底部；所述第二空气垫安装于所述立柱的底部。
进一步的，所述炉体和抽真空装置上设置有与连接管路连通的连接口，所述连接口处设置有向内凹陷的凹槽，所述凹槽内设置有O型密封圈，所述连接管路的外侧边缘与O型密封圈密封接触，所述连接管路通过卡扣固定在连接口处。
进一步的，所述第一空气垫的横截面形状为方形，所述第二空气垫的横截面形状为圆形；优选的，所述第二空气垫的数量为四个。
本发明的有益效果为：
(1)本发明减震装置通过在真空管路外层设置阻尼减震层和空气减震层，通过真空管路的双重减震，显著降低了真空管路的震动，减震效果有了明显的改善。
(2)本发明减震装置通过将压力控制装置与第一空气垫、第二空气垫和空气减震层连接，使得第一空气垫、第二空气垫和空气减震层处于一个恒压状态，减震效果得到大幅度地提高。
(3)本发明晶体生长炉通过安装所述减震装置，设置阻尼减震层和空气减震层的双减震管路，且将空气减震应用到炉体、抽真空和管路，综合利用了阻尼减震和空气减震，使得炉体内基本上处于一个静止的状态，炉体内的晶体生长处于一个相对稳定的生长状态。
附图说明
此处所说明的附图用来提供对本发明的进一步理解，构成本发明的一部分，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不 当限定。
在附图中：
图1为本发明的减震装置的结构示意图；
图2为本发明减震装置中连接管路的剖面示意图；
其中，1、真空管路；2、阻尼减震层；3、空气减震层；4、第一空气垫；5、第二空气垫；6、充气装置。
具体实施方式
下面结合实施例详述本发明，但本发明并不局限于这些实施例。
在下面的描述中阐述了很多具体细节以便于充分理解本发明，但是，本发明还可以采用其他不同于在此描述的其他方式来实施，因此，本发明的保护范围并不受下面公开的具体实施例的限制。
另外，在本发明的描述中，需要理解的是，术语“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
本说明书中的各个实施例均采用递进的方式描述，各个实施例之间相同相似的部分互相参见即可，每个实施例重点说明的都是与其他实施例的不同之处。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是连接，还可以是通信；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互 作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。
实施例1
参考图1和图2，本发明实施例公开了一种用于真空反应炉的减震装置，所述减震装置包括连接管路、第一空气垫、第二空气垫，所述连接管路包括用于连接真空反应炉的抽真空装置和炉体的真空管路1，所述真空管路1外侧依次设置有阻尼减震层2和空气减震层3；所述第一空气垫4用于保持恒定气压的气体，所述第一空气垫4用于连接抽真空装置的底部；所述第二空气垫5用于保持恒定气压的气体，所述第二空气垫5用于连接炉体的底部。
本申请通过在真空管路外侧设置阻尼减震层2和空气减震层3，利用阻尼减震和空气减震双减震设置明显降低了真空管路的震动，使真空管路处于一个稳定的状态；且通过设置可连接抽真空装置的第一空气垫4，和可连接晶体生长炉的第二空气垫5，将空气减震应用到了抽真空装置、晶体生长炉和管路，有效地降低地面震动对晶体生长炉炉体的影响，以及抽真空装置震动带动的地面震动对炉体的影响。
在本申请的一个具体实施例中，所述阻尼减震层2的材料为热塑性弹性体材料；优选的，所述阻尼减震层2的材料选自聚苯乙烯-丁二烯嵌段共聚物(SBS),(此处我们的SBS不做沥青改性处理，只要求具有橡胶特性即可，若为了反水等性能可进行沥青改性处理)，填充方式为加热熔融之后浇筑到管道夹层 冷却后凝固的方式，或者采用聚苯乙烯-聚异戊二烯-聚苯乙烯嵌段共聚物(SIS)，等等，所述阻尼减震层2的材料的密度为0.9～0.95g/cm 3，选择密度不是很大的阻尼减震层的材料可以保证夹层的轻弹性)。所述阻尼材料具有粘弹性，在受到外力作用时，应变落后于应力，存在滞后现象。在每一循环过程中，发生力学耗散而消耗能量即产生内耗，从而起到很到的阻尼减震作用。
在本申请的一个优选实施例中，所述空气减震层3的外层材料与子午线胎的材料相同；和/或第一空气垫4和第二空气垫5的材料与子午线胎的材料相同。其中，子午线胎的原料主要包括以下百分比含量的组分：炭黑20～25％、天然橡胶40～45％、其他化工材料10～15％、钢丝帘线8～12％、胎圈钢丝2～4％、合成橡胶5～10％。将空气减震层3的外层材料设置为子午线胎的材料相同，使得空气减震层3的外层的径向弹性大，缓冲性能好，负荷能力大，尤其是空气减震层3内充入一定压力的气体，所述空气减震层3能在长时间高压工作条件下，不易发生损坏和形变。当将第一空气垫4和第二空气垫5的材料设置为与子午线胎的材料相同，第一空气垫4和第二空气垫5与地面的附着性能好，对地面单位压力也小，空气垫滑移小，第一空气垫4和第二空气垫5在长时间高压下，不仅保证了对抽真空装置底部的减震效果，且在长时间高压下不变形，使用寿命长。
在本申请的一个优选实施例中，所述真空管路1的材质为软钢，所述阻尼减震层2和空气减震层3中间层的材质为软钢，空气减震层3最外层的材质为子午线胎的材料。连接管路最外侧的材料为子午线胎材料，连接管路最上部和最下部在加工管道时可直接融合软钢材料。
在本申请的一个优选实施例中，所述阻尼减震层与空气减震层的厚度的比例为1～3:1～5；优选的，所述阻尼减震层与空气减震层的厚度的比例为1～2:1～2。具体的，所述所述阻尼减震层2的厚度为0.5～3cm，所述空气减震层3的厚度为0.5～3cm，所述真空管路的内径为5～6cm；优选的，所述阻尼减震层2的厚度为1～1.5cm，所述空气减震层3的厚度为1～1.5cm。当将阻尼减震层2和空 气减震层3的厚度比例设置的过小或过大时，均起不到很好的减震效果。设置阻尼减震层2和空气减震3层合适的厚度大小，充分发挥阻尼减震和空气减震，管路侧面稳定性变差，减震效果达到最好。
在本申请的一个优选实施例中，所述压力控制装置包括充气装置和压力控制阀，所述充气装置分别通过管路与空气减震层3、第一空气垫4和第二空气垫5连接，所述充气装置与空气减震层3、第一空气垫4和第二空气垫5连接的管路上均设置有压力控制阀。所述充气装置用于向空气减震层3、第一空气垫4和第二空气垫5内通入气体。且通过管路上压力控制阀的设置，用于保证空气减震层3、第一空气垫4和第二空气垫5内的气压维持在一个恒定状态。机器设备在工作过程中，会产生较大的地面震动，空气减震层3、第一空气垫4和第二空气垫5的压力会有所波动，为了保证空气减震层3、第一空气垫4和第二空气垫5较好的空气减震效果，需要向空气减震层3、第一空气垫4和第二空气垫5内通入气体。
在本申请的一个优选实施例中，所述空气减震层3上设置有连接口，所述连接口通过管路与压力控制装置连接，所述连接口位于靠近连接管路与抽真空装置的连接端。由于连接口更容易漏气，将连接口位于靠近连接管路与抽真空装置的连接端，可以在一定上降低连接管路的震动对炉体内温度压力等条件的影响。
在本申请的一个优选实施例中，所述阻尼减震层2和空气减震层3的两端采用硬质材料封闭；优选的，所述硬质材料选自铜合金和不锈钢中的至少一种。由于晶体生长炉在长晶过程中，炉体内处于高温状态，连接口的管路部分要能承受一定的高温，且空气减震层3充入一定气压的气体，因此，优化封闭阻尼减震层2和空气减震层3两端的材料，使得连接管路能耐一定的高温高压，长时间使用不易变形，使用寿命延长。
在本申请的一个优选实施例中，所述充气装置6包括空气压缩机和发动机，所述发动机与空气压缩机连接，所述空气压缩机与空气减震层3和第一空气垫 4连接，所述第一空气垫4通过管路与第二空气垫5连接。所述发动机为空气压缩机提供动力，所述空气压缩机用于向空气减震层3、第一空气垫4和第二空气垫5内通入气体。
在本申请的一个优选实施例中，所述充气装置6包括充气泵，所述充气泵与第一空气垫4连接，所述第一空气垫4通过管路与第二空气垫5连接。所述充气泵用于向第一空气垫4和第二空气垫5内通入气体。
在本申请的一个优选实施例中，所述充气装置6上设置有双向连接头，所述双向连接头分别通过管路与第一空气垫4和空气减震层3连接，第一空气垫4通过管路与第二空气垫5连接。所述充气装置6还要向空气减震层3通入气体，通过在充气装置6上设置有双向连接头用于分别连接第一空气垫4和空气减震层3，可实现装置的综合利用。
实施例2
本实施例提供了一种晶体生长炉，所述晶体生长炉上安装有所述的减震装置。所述晶体生长炉包括炉体、立柱和抽真空装置；所述立柱设置于炉体的底部，用于支撑炉体；所述抽真空装置用于对炉体内抽真空；所述连接管路的两端分别与所述炉体和抽真空装置连通；所述第一空气垫安装于所述抽真空装置的底部；所述第二空气垫安装于所述立柱的底部。
在本申请的一个优选实施例中，所述炉体和抽真空装置上设置有与连接管路连通的连接口，所述连接口处设置有向内凹陷的凹槽，所述凹槽内设置有O型密封圈，所述连接管路的外侧边缘与O型密封圈密封接触，所述连接管路通过卡扣固定在连接口处。O型密封圈的主要材质为氟橡胶，氟橡胶具有耐高温、耐油、耐化学药品性能，良好的物理机械性能和耐候性、电绝缘性和抗辐射性等
在本申请的一个优选实施例中，所述空气减震层3的气压为0.1～1bar，优选的，所述空气减震层3的气压为0.2～0.5bar。所述第一空气垫4的气压为0.1～1bar，所述第二空气垫5的气压为0.1～1bar。优选的，所述第一空气垫4的气压为0.2～0.5bar，所述第二空气垫5的气压为0.2～0.5bar。在所述气压下， 空气减震层3、第一空气垫4和第二空气垫5能起到很好的空气减震效果。
在本申请的一个优选实施例中，所述第一空气垫4的横截面形状为方形，所述第二空气垫5的横截面形状为圆形；所述第一空气垫4与真空泵的底部匹配，所述第二空气垫5与立柱的底部匹配。所述抽真空装置在向炉体内抽真空的过程中，会产生很大的机械震动，为了减少抽真空装置的晃动，在抽真空装置的底部连接匹配的空气垫，可在很大程度上缓解抽真空装置的震动。
在本申请的一个优选实施例中，述第二空气垫5的数量与晶体生长炉的立柱数量相匹配。所述第二空气垫5的数量为四个。通过立柱的底部垫上第二空气垫5，可用于降低地面震动对炉体的影响。
本申请将空气减震应用到炉体、抽真空装置和管路，且通过在真空管路外层设置阻尼减震层和空气减震层，将阻尼减震和空气减震综合利用，使得炉内基本上处于一个静止的状态，减震效果有了明显的改善。
检测本申请晶体生长炉的减震效果：
晶体生长炉中真空泵的振动频率f＝10～1000Hz,即转速n＝600～60000r/min，具体在36000r/min，以速度mm/s作为振动标准。
具体使用AS63D笔式测振仪进行详细数据的测量，对于真空泵采用轴向测量方法，分别测量(1)真空泵的最上部；(2)真空泵的轴向中心；(3)真空泵的最下部；(4)真空泵直接接触的地面。对于连接真空泵的管路我们依旧采用轴向三点测量法，分别为(1)管路连接炉体端；(2)管路的轴向中心；(3)管路连接真空泵端。
分别检测：
运行情况一：不加任何减震装置的真空泵和管路；
运行情况二：增加本申请减震装置的真空泵和管路，连接管路处阻尼减震层和空气减震层的厚度均为1.4cm，第一空气垫、第二空气垫和空气减震层的气压均为0.5mbar；
运行情况三：增加减震装置的真空泵和管路，连接管路中处只有阻尼减震层，即不增加空气减震层，所述阻尼减震层的厚度为2.4cm，第一空气垫、第 二空气垫和空气减震层的气压均为0.5mbar，其余与本申请减震装置相同。
运行情况四：增加减震装置的真空泵和管路，连接管路中只有空气减震层，所述空气减震层的厚度为2.4cm，第一空气垫、第二空气垫和空气减震层的气压均为0.5mbar，其余与本申请减震装置相同。
运行情况五：增加减震装置的真空泵和管路，连接管路中阻尼减震层与空气减震层的厚度比例为1:6，阻尼减震层的厚度为0.4cm，空气减震层的厚度为2.4cm，第一空气垫、第二空气垫和空气减震层的气压均为0.5mbar，其余与本申请减震装置相同；
运行情况六：增加减震装置的真空泵和管路，连接管路中阻尼减震层与空气减震层的厚度比例为4:1，阻尼减震层的厚度为2.24cm，空气减震层的厚度为0.56cm，第一空气垫、第二空气垫和空气减震层的气压均为0.5mbar，其余与本申请减震装置相同。
表1
Figure PCTCN2020134378-appb-000001
由表1的结果可知，相较于不添加任何减震装置的晶体生长炉，及在真空管路外侧只有阻尼减震层和空气减震层的减震装置的晶体生长炉，本申请的减 震装置虽然有震动位移但是震动位移明显减小，并且通过优化阻尼减震层和空气减震层的厚度比例，使得晶体生长炉近乎处于一种静止状态。
以上所述，仅为本发明的实施例而已，本发明的保护范围并不受这些具体实施例的限制，而是由本发明的权利要求书来确定。对于本领域技术人员来说，本发明可以有各种更改和变化。凡在本发明的技术思想和原理之内所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (16)

  1. 一种用于真空反应炉的减震装置，其特征在于，所述减震装置包括：
    连接管路，所述连接管路包括真空管路，所述真空管路外侧依次设置有阻尼减震层和空气减震层；所述连接管路用于连接真空反应炉的抽真空装置和炉体；
    第一空气垫，所述第一空气垫用于容纳恒定气压的气体，所述第一空气垫连接真空反应炉抽真空装置的底部；
    第二空气垫，所述第二空气垫用于容纳恒定气压的气体，所述第二空气垫连接真空反应炉炉体的底部。
  2. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层的材料选自粘弹性材料。
  3. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层的材料选自聚氨酯弹性体和聚乙烯醇缩丁醛中的至少一种。
  4. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层材料的密度为0.9～0.95g/cm 3。
  5. 根据权利要求1所述的减震装置，其特征在于，所述空气减震层的外层材料与子午线胎的材料相同；
    和/或第一空气垫和第二空气垫的材料与子午线胎的材料相同。
  6. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层与空气减震层的厚度的比例为1～3:1～5。
  7. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层与空气减震层的厚度的比例为1～2:1～2。
  8. 根据权利要求1所述的减震装置，其特征在于，所述减震装置还包括压力控制装置，所述压力控制装置分别与空气减震层、第一空气垫和第二空气垫连接；
    所述压力控制装置包括充气装置和压力控制阀，所述充气装置分别通过管 路与空气减震层、第一空气垫和第二空气垫连接，所述充气装置与空气减震层、第一空气垫和第二空气垫连接的管路上均设置有压力控制阀。
  9. 根据权利要求1所述的减震装置，其特征在于，所述空气减震层的外侧设有连接口，所述连接口通过管路与压力控制装置连接。
  10. 根据权利要求1所述的减震装置，其特征在于，所述阻尼减震层和空气减震层的两端采用硬质材料封闭。
  11. 根据权利要求10所述的减震装置，其特征在于，所述硬质材料选自铜合金和不锈钢中的至少一种。
  12. 一种晶体生长炉，其特征在于，所述晶体生长炉上安装有权利要求1～11任一项所述的减震装置。
  13. 根据权利要求12所述的晶体生长炉，其特征在于，所述晶体生长炉包括炉体、立柱和抽真空装置；所述立柱设置于炉体的底部，用于支撑炉体；所述抽真空装置用于对炉体内抽真空；
    所述连接管路的两端分别与所述炉体和抽真空装置连通；
    所述第一空气垫安装于所述抽真空装置的底部；
    所述第二空气垫安装于所述立柱的底部。
  14. 根据权利要求13所述的晶体生长炉，其特征在于，所述炉体和抽真空装置上设置有与连接管路连通的连接口，所述连接口处设置有向内凹陷的凹槽，所述凹槽内设置有O型密封圈，所述连接管路的外侧边缘与O型密封圈密封接触，所述连接管路通过卡扣固定在连接口处。
  15. 根据权利要求13所述的晶体生长炉，其特征在于，所述第一空气垫的横截面形状为方形，所述第二空气垫的横截面形状为圆形。
  16. 根据权利要求13所述的晶体生长炉，其特征在于，所述第二空气垫的数量为四个。
PCT/CN2020/134378 2020-04-23 2020-12-08 用于真空反应炉的减震装置及晶体生长炉 WO2021212862A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010328829.X 2020-04-23
CN202010328829.XA CN111623067B (zh) 2020-04-23 2020-04-23 用于真空反应炉的减震装置及晶体生长炉

Publications (1)

Publication Number Publication Date
WO2021212862A1 true WO2021212862A1 (zh) 2021-10-28

Family

ID=72257920

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/134378 WO2021212862A1 (zh) 2020-04-23 2020-12-08 用于真空反应炉的减震装置及晶体生长炉

Country Status (2)

Country Link
CN (1) CN111623067B (zh)
WO (1) WO2021212862A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111623067B (zh) * 2020-04-23 2021-05-11 山东天岳先进科技股份有限公司 用于真空反应炉的减震装置及晶体生长炉

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09291969A (ja) * 1996-04-25 1997-11-11 Toyo Tire & Rubber Co Ltd 能動型除振装置の支持装置
CN105156540A (zh) * 2015-08-19 2015-12-16 重庆朗福环保科技有限公司 气垫减震器
CN205079615U (zh) * 2015-10-29 2016-03-09 大连华升精密铸件制造有限公司 真空反应炉和真空泵之间的过滤缓冲装置
CN205654987U (zh) * 2016-03-01 2016-10-19 安徽三联学院 一种管件用管材
CN205715433U (zh) * 2016-04-26 2016-11-23 湖南生物机电职业技术学院 一种机电设备减震装置
CN208023104U (zh) * 2018-03-29 2018-10-30 福州克雷斯试验设备有限公司 一种双控温晶体生长炉
CN111623067A (zh) * 2020-04-23 2020-09-04 山东天岳先进材料科技有限公司 用于真空反应炉的减震装置及晶体生长炉
CN212338011U (zh) * 2020-04-23 2021-01-12 山东天岳先进科技股份有限公司 一种用于晶体生长炉的减震装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1804143A1 (de) * 1968-10-19 1970-04-30 Arnold Hellmut Rohr
FR2600137B1 (fr) * 1986-06-16 1990-06-22 Pechiney Aluminium Suspension pneumatique des vibrotasseuses utilisees en particulier pour la production de blocs carbones
JPH03253571A (ja) * 1990-03-02 1991-11-12 Hitachi Ltd 排気装置および化学気相成長装置
FR2690973B1 (fr) * 1992-05-07 1995-10-20 Promotion Distribution Sarl Dispositif d'amortissement entre deux systemes concentriques.
US20020175454A1 (en) * 2001-01-02 2002-11-28 Daniel Huang Shock absorbing device having air envelopes
KR20050057129A (ko) * 2002-09-03 2005-06-16 가부시끼가이샤니찌린 진동흡수관
CN201321509Y (zh) * 2008-12-03 2009-10-07 河北晶龙阳光设备有限公司 一种带定值气压释放安全阀的晶体生长炉
DE102009034177A1 (de) * 2009-07-22 2011-02-03 Robert Bosch Gmbh Pulsationsdämpfer für Axialkolbeneinheit und Verfahren zur Schalldämpfung einer Axialkolbeneinheit
CN202072806U (zh) * 2011-04-11 2011-12-14 江苏宝佳太阳能发展有限公司 一种单晶炉的真空系统
CN202220820U (zh) * 2011-08-29 2012-05-16 泰兴市昊星汽车电子科技有限公司 可变刚度空气弹簧装置
CN104081098B (zh) * 2011-10-31 2016-11-09 长管有限公司 管子的构造
CN103374753A (zh) * 2012-04-19 2013-10-30 吴江亿泰光伏设备有限公司 一种大尺寸蓝宝石晶体生长炉
CN202769165U (zh) * 2012-09-13 2013-03-06 烟台蓝海机械制造有限公司 直通式平波器
CN204921816U (zh) * 2015-09-10 2015-12-30 诸暨市康宇弹簧有限公司 一种空气弹簧系统
CN206369017U (zh) * 2016-12-30 2017-08-01 温犇 一种热力保温防震管道
CN207609726U (zh) * 2017-12-18 2018-07-13 杭州奕涵电气有限公司 一种机电设备安装装置
KR102077745B1 (ko) * 2018-08-16 2020-02-14 주식회사 이엔테크 폐열 회수를 위한 열교환기가 마련된 발전기의 면진장치
CN110671298A (zh) * 2019-10-30 2020-01-10 中山荣拓智能装备有限公司 一种单晶炉的两级抽真空系统

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09291969A (ja) * 1996-04-25 1997-11-11 Toyo Tire & Rubber Co Ltd 能動型除振装置の支持装置
CN105156540A (zh) * 2015-08-19 2015-12-16 重庆朗福环保科技有限公司 气垫减震器
CN205079615U (zh) * 2015-10-29 2016-03-09 大连华升精密铸件制造有限公司 真空反应炉和真空泵之间的过滤缓冲装置
CN205654987U (zh) * 2016-03-01 2016-10-19 安徽三联学院 一种管件用管材
CN205715433U (zh) * 2016-04-26 2016-11-23 湖南生物机电职业技术学院 一种机电设备减震装置
CN208023104U (zh) * 2018-03-29 2018-10-30 福州克雷斯试验设备有限公司 一种双控温晶体生长炉
CN111623067A (zh) * 2020-04-23 2020-09-04 山东天岳先进材料科技有限公司 用于真空反应炉的减震装置及晶体生长炉
CN212338011U (zh) * 2020-04-23 2021-01-12 山东天岳先进科技股份有限公司 一种用于晶体生长炉的减震装置

Also Published As

Publication number Publication date
CN111623067B (zh) 2021-05-11
CN111623067A (zh) 2020-09-04

Similar Documents

Publication Publication Date Title
WO2021212862A1 (zh) 用于真空反应炉的减震装置及晶体生长炉
CN109763581A (zh) 具有三维隔震减振的建筑结构基础模块
CN101643641B (zh) 可循环使用的低固相微泡沫钻井液或完井液
CN207777799U (zh) 一种具有减震功能石油天然气安全防护装置
CN106567901A (zh) 一种枕形低频气囊隔振器及其安装方法
CN203926550U (zh) 一种绝缘减震装置
CN101706031A (zh) 粉体绝热材料预制保温管
CN101490313A (zh) 坩埚用保护垫片及使用该坩埚用保护垫片的坩埚装置
WO2017137013A1 (zh) 对压气能贮存装置及检测方法、贮存系统、平衡侦测机构
CN201661289U (zh) 一种用于测斜仪的气囊减震器
KR20180033269A (ko) 초고압 프레스용 캡슐 조립체 및 그 이용 방법
CN202992171U (zh) 液/气压控制的机械密封装置
CN202597971U (zh) 一种橡胶软接头
CN213541393U (zh) 一种具有平衡孔的球阀球体
CN212928848U (zh) 一种密封阀
CN211548177U (zh) 一种建筑工程用屈曲约束支撑
CN110951173A (zh) 一种用于制备阻尼芯柱的组合物及阻尼芯柱、阻尼隔震支座
CN210618403U (zh) 一种安全性能高的太阳能水面电站用浮体
CN101362588A (zh) 管式结构臭氧发生器
CN110762002A (zh) 一种具有控量效果的电动汽车空调压缩机
CN207034387U (zh) 一种管道支吊架
CN201588596U (zh) 一种结构改进的油气田用压缩式封隔器胶筒
CN216555916U (zh) 一种注填式管道补偿器
CN206246927U (zh) 一种保温套
CN207148194U (zh) 一种农网用互感器

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20932780

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20932780

Country of ref document: EP

Kind code of ref document: A1