WO2021175680A1 - Pompe à vide sèche et son procédé de fabrication - Google Patents

Pompe à vide sèche et son procédé de fabrication Download PDF

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Publication number
WO2021175680A1
WO2021175680A1 PCT/EP2021/054585 EP2021054585W WO2021175680A1 WO 2021175680 A1 WO2021175680 A1 WO 2021175680A1 EP 2021054585 W EP2021054585 W EP 2021054585W WO 2021175680 A1 WO2021175680 A1 WO 2021175680A1
Authority
WO
WIPO (PCT)
Prior art keywords
partition
shell
vacuum pump
removable
cradle
Prior art date
Application number
PCT/EP2021/054585
Other languages
English (en)
Inventor
Eric MANDALLAZ
Patrick Philippe
Thierry Neel
Lucas REY
Laurent BIZET
François HOUZE
Original Assignee
Pfeiffer Vacuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum filed Critical Pfeiffer Vacuum
Priority to KR1020227024750A priority Critical patent/KR20220147070A/ko
Priority to CN202180015509.1A priority patent/CN115176069A/zh
Publication of WO2021175680A1 publication Critical patent/WO2021175680A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/85—Methods for improvement by repair or exchange of parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/04—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0466—Nickel

Definitions

  • the present invention relates to a dry vacuum pump, in particular a multistage dry vacuum pump, such as of Roots type or of Claw type.
  • the invention relates also to a method for manufacturing such a vacuum pump.
  • the multistage vacuum pumps of dry type comprise several pumping stages in series in which a gas to be pumped circulates between a suction and a discharge.
  • the known vacuum pumps that can be distinguished include those with rotary lobes, also known as “Roots” vacuum pumps, or those with beaks, also known as “Claw” vacuum pumps. These vacuum pumps are said to be “dry” because, in operation, the rotors rotate inside a stator with no mechanical contact between them or with the stator, which allows oil not to be used in the pumping stages.
  • the gases used can be corrosive and the residues from the processes can include abrasive powders that can damage all or some of the static parts, notably of the higher pressure pumping stages which are also those where the axial operational clearances are the smallest.
  • the multistage vacuum pumps that have a sliced architecture, that is to say of which the stator is formed by the axial assembly of stator elements, can address this issue relatively well. Indeed, the disassembly thereof on the one hand allows them to be cleaned easily and on the other hand their discretisation makes it possible to be able to replace the damaged components without replacing all of the stator.
  • the counterpart is rather complex assembly of the vacuum pump, requiring many more positioning and securing members, as well as sealing members between each of the interfaces. That results in an increase in the cost of production of the parts and in the attendant labour cost.
  • the multistage vacuum pumps that have a half-shell architecture as described for example in the document US 6,572,351 B2 make it possible to reduce these costs. For their part, these pumps can be disadvantaged during maintenance because it becomes necessary to change a half-shell or all of the half-shells even though potentially only a part of the half-shells may be damaged. Furthermore, the cost of obtaining a half-shell is relatively high because of the machining accuracy required for the production of the pumping chambers and their separating partitions.
  • the machining in fact requires the use of special milling cutters requiring relatively lengthy machining times because of the significant quantity of material to be milled.
  • the diameter of the shaft passage conditions that of the shank of the milling-cutter gang and the ratio between the diameters of the shaft passages and of the pumping chambers allows or prevents the use of a combined tool.
  • the flexural rigidity of the milling-cutter gang related to these constraints conditions the geometric quality of the chambers and of the partitions, the width of the thinnest pumping chamber conditioning that of the milling cutter cutting it. In fact, a compromise is sought between these technical production constraints and those of design and the result thereof is that thin pumping chambers are sometimes impossible to produce.
  • One aim of the present invention is to at least partially resolve at least one of the abovementioned drawbacks.
  • the subject of the invention is a dry vacuum pump comprising:
  • stator comprising at least one first and at least one second complementary half-shells, each half-shell comprising at least one half-partition joined together with a half-partition of the other half-shell to form a separating partition between two successive pumping chambers of pumping stages mounted in series between a suction and a discharge of the vacuum pump,
  • the half-shell is thus easier to manufacture, notably with respect to the cradle which can be machined from the front without contour-milling, which reduces the production costs. Moreover, with this architecture, it becomes possible to manufacture pumping chambers with narrow axial dimensions, without being limited by the dimensions of the production tools.
  • the vacuum pump can also comprise one or more of the features which are described below.
  • the at least one half-partition can be fitted by removable assembly in the cradle. It is thus possible to easily remove a part of the half-shells to clean it or replace it in case of clogging or damage. The maintenance costs can therefore be reduced.
  • the at least one half-partition can be secured to a half-chamber bottom removably fitted in the cradle of the half-shell, the half-chamber bottom and the at least one half-partition being produced in a removable insert of the half-shell. Since the insert is removable, it is thus possible to separate it from the cradle to clean the half-chamber bottom.
  • At least one half-shell can comprise:
  • At least one removable securing member such as a screw, for fixing the removable half-partition to the cradle, and/or
  • At least one positioning member such as a pin or key, for positioning the removable half-partition in the cradle.
  • the half-shell can comprise at least one insert bearing the at least one half partition having a securing half-flange, the at least one securing member and/or the at least one positioning member being inserted for example axially into the securing half-flange and into the cradle and/or into another securing flange.
  • the at least one securing member and/or the at least one positioning member can be inserted radially into the cradle, through the removable half partition.
  • the vacuum pump can comprise at least one inter-stage channel configured to connect an outlet of a preceding pumping stage to an inlet of a following pumping stage, at least a part of an inter-stage half-channel being produced in an insert of the half-shell, and open on a lateral face of the insert, the insert bearing the half partition and being assembled by removable fitting in the cradle. Access to the interior of the inter-stage channels is then facilitated, which simplifies the cleaning and production thereof. Another advantage in producing inter-stage channels in the removable inserts is that allows very thin channels to be produced.
  • the at least one inter-stage half-channel can be formed on the side of the half-partition, in a securing half-flange that also allows the insert to be fixed to the cradle.
  • the vacuum pump can comprise two inter-stage half-channels partially formed in the lateral face of at least one insert, the inter-stage half-channels being situated on either side of the half-partition.
  • At least one half-partition can be assembled by force-fitting in the cradle.
  • the vacuum pump can comprise at least one inter-stage channel configured to connect an outlet of a preceding pumping stage to an inlet of a following pumping stage, at least a part of an inter-stage half-channel being produced in an insert of the half-shell, and open on a lateral face of the insert, the insert bearing the half partition and being assembled by force-fitting in the cradle.
  • the at least one half-partition or one insert bearing the at least one half partition fitted by assembly can be produced in a material, or has a coating, such as one comprising nickel, that is more resistant to corrosion and/or to abrasion than the material or the coating of the body of the half-shell, such as cast iron.
  • a coating such as one comprising nickel
  • the more resistant materials or coatings are generally also the most costly, so confining them to the parts fitted by assembly makes it possible to limit their use to the parts of the half-shells that are most exposed to external attacks.
  • the at least one half-partition joined together with the at least one half partition fitted by assembly can also be fitted by assembly.
  • At least one half-shell can comprise at least two half-partitions fitted by assembly joined together with two half-partitions fitted by assembly of the other half shell to separate three successive pumping chambers.
  • the half-partitions of the half-shells separating the pumping chambers of the last pumping stage and of the penultimate pumping stage can be fitted by assembly.
  • the half-partitions of the half-shells separating the pumping chambers of the penultimate pumping stage and of the antepenultimate pumping stage can be fitted by assembly.
  • the pumping stages situated on the discharge side of the vacuum pump that is to say those situated on the side of the highest pressures where the risks of corrosive and abrasive attacks are the greatest and which are the narrowest, which are fitted in the cradle by assembly.
  • At least one half-shell can comprise at least one half-partition fitted by removable assembly and at least one non-removable half-partition.
  • the at least one non-removable half-partition is for example produced in the mass of the half-shell or is assembled by force-fitting in the cradle.
  • the non-removable half-partitions are, for example, those interposed between the first pumping stages where the pressures are the lowest and the risks of corrosion or of abrasion are the least high.
  • the non-removable half-partitions make it possible to retain the advantage of a time saving during assembly and a saving in terms of the securing and positioning members of a half-shell architecture.
  • the half-partition joined together with the non-removable half-partition can also be non-removable.
  • Another subject of the invention is a method for manufacturing a dry vacuum pump in which at least one half-partition of a half-shell is fitted by removable assembly or force-fitted in a cradle of the half-shell.
  • Figure 1 is a view in the assembled state of a stator of a dry vacuum pump according to a first exemplary embodiment.
  • Figure 2 is a perspective view of an example of a rotor shaft of the vacuum pump of Figure 1.
  • FIG. 3 is a view of the stator of Figure 1 with the half-shells in the disassembled state.
  • FIG. 4 is an exploded view of the stator of Figure 3.
  • Figure 5 is a perspective view of a half-shell of the stator of Figure 1.
  • Figure 6 is a perspective view of the other half-shell of the stator of Figure 1.
  • Figure 7 is a perspective view of two assembled removable half-partitions.
  • Figure 8 is a view of the assembled half-partitions of Figure 7 turned around by 180°.
  • Figure 9A shows a first variant of a second embodiment of the removable half-shells, seen in cross section.
  • Figure 9B shows a view similar to Figure 9A for a second variant.
  • Figure 10A shows a view similar to Figure 9A for a third variant embodiment.
  • Figure 10B shows the elements of the half-shell of Figure 10A in the disassembled state.
  • Figure 11 is a top view of a half-shell body of a dry vacuum pump according to a third exemplary embodiment.
  • Figure 12 is a view in cross section A-A of the half-shell of Figure 11.
  • Figure 13 is a front view of a half-partition of the half-shell of Figure 11.
  • a rough-vacuum pump is defined as a volumetric vacuum pump, which is configured to, using two rotor shafts, suck, transfer, then discharge the gas to be pumped at atmospheric pressure.
  • the rotor shafts are driven in rotation by a motor of the rough-vacuum pump.
  • Upstream is understood to mean an element which is placed before another with respect to the direction of circulation of the gas to be pumped.
  • downstream is understood to mean an element placed after another with respect to the direction of circulation of the gas to be pumped.
  • the axial direction is defined as the longitudinal direction of the pump in which the axes of the rotor shafts extend.
  • the dry vacuum pump 1 of Figure 1 comprises a stator 2 forming at least two pumping chambers of pumping stages 3a-3f mounted in series between a suction 4 and a discharge 5, such as between two and ten pumping stages (six in the illustrative example).
  • This vacuum pump 1 is, for example, a rough-vacuum pump.
  • the vacuum pump 1 further comprises two rotor shafts 6 (Figure 2) configured to turn synchronously in reverse directions in the pumping chambers of the pumping stages 3a-3f such that the rotors drive a gas to be pumped between the suction 4 and the discharge 5.
  • the rotor shafts 6 can be in one piece or produced by the assembly of various added elements.
  • the rotors have, for example, lobes of identical profiles, for example of “Roots” type with two lobes ( Figure 2) or more, or of “Claw” type or of another similar volumetric vacuum pump principle.
  • the shafts bearing the rotors are driven by a motor (not represented) situated, for example, at an end of the vacuum pump 1 , for example on the discharge 5 side.
  • Each pumping stage 3a-3f of the stator 2 is formed by a pumping chamber receiving two conjugate rotors, the pumping chambers comprising a respective inlet and outlet.
  • the gas sucked from the inlet is held captive in the volume generated by the rotors and the stator 2, then is driven by the rotors to the next stage.
  • the successive pumping stages 3a-3f are connected in series one after the other by respective inter-stage channels 9a-9e, 10a-10e connecting the outlet of the preceding pumping stage 3a-3e to the inlet of the next pumping stage 3b-3f.
  • the vacuum pump 1 comprises, for example, two transfer channels 9a-9e, 10a-10e configured to connect in parallel, on either side of a pumping chamber, an outlet of the pumping chamber of a preceding pumping stage to an inlet of a following pumping stage ( Figure 3).
  • the inlet of the first pumping stage 3a connects with the suction 4 of the vacuum pump 1.
  • the outlet 20 of the last pumping stage 3f connects with the discharge 5.
  • the axial dimensions of the rotors and of the pumping chambers are, for example, equal or they decrease with the pumping stages, the pumping stage 3a situated on the side of the suction 4 receiving the rotors 6 of greatest axial dimension.
  • the stator 2 comprises at least one first and at least one second complementary half-shells 7, 8.
  • the half-shells are, for example, closed at their axial ends by a first end piece and a second end piece (not represented).
  • the half-shells are, for example, closed at their axial ends by a first end piece and a second end piece (not represented).
  • the joining surface 11 is, for example, a flat joining surface, passing, for example, through a median plane of the dry vacuum pump 1.
  • This flat joining surface 11 contains, for example, the axes of the rotor shafts 6.
  • This flat joining surface 11 can be strictly flat or can, for example, have complementary relief forms or grooves
  • the pumping chambers, the separating partitions 13a-13e, 14a-14e and the inter-stage channels 9a-9e, 10a-10e are formed partly in the first half-shell 7 and partly in the second half-shell 8.
  • Each half-shell 7 therefore comprises at least one half-partition 13a-13e joined together with a half-partition 14a-14e of the other half shell 8 to form a separating partition between two successive pumping chambers.
  • each half-shell 7 can comprise at least one half-channel 9a-9e, 10a-10e joined together with a half-channel of the other half-shell 8 to form an inter-stage channel 9a-9e, 10a-10e.
  • At least one half-partition 13d, 13e, 14d, 14e of a half-shell 8 joined together with a half-partition 13d, 13e, 14d, 14e of the other half-shell 7 to separate two successive pumping chambers is fitted by assembly in a cradle 15 of said half-shell
  • At least one half-partition 13d, 13e, 14d, 14e is fitted by removable assembly in the cradle 15 or is force-fitted in the cradle 15 as will be seen later with reference to Figures 11 to 13.
  • a “removable” element is understood to be an added element which can be removed or replaced and fixed without particular difficulties, as opposed to a “non removable” element, which refers to an added element which cannot be removed simply without damage.
  • An assembly by force-fitting is considered as a non removable assembly.
  • the half-shell 7, 8 is easy to manufacture, notably with respect to the cradle 15 which can be machined from the front without contour-milling, which reduces the production costs. Moreover, with this architecture, it becomes possible to manufacture pumping chambers with narrow axial dimensions, without limitation by the dimensions of the production tools.
  • the at least one half-partition 13d, 13e, 14d, 14e can be secured to a half-chamber bottom removably fitted in the cradle 15 of the half-shell 7, 8.
  • the half-chamber bottom is a hollow volume delimited by the at least one removable half-partition 13d, 13e, 14d, 14e and by a lateral half-wall 22.
  • This hollow volume is axially closed by another removable half-partition or by an end piece or by a non-removable half-partition.
  • This half-chamber bottom is joined together with the half-chamber bottom of the other half-shell 7, 8, at the joining surface 11, to form a pumping chamber.
  • the half-chamber bottom that is to say, the lateral half-wall 22 and the at least one half-partition 13d, 13e, 14d, 14e are produced in an insert 23 assembled by removable fitting in the cradle 15 of the half-shell ( Figure 4). Since the insert 23 is removable, it is thus possible to separate it from the cradle 15 to clean the half chamber bottom.
  • inter stage half-channel 9e, 10e is produced in an insert 23 of the half-shell 7, 8. This part of inter-stage half-channel is open on a lateral face of the insert 23 ( Figure 7).
  • inter-stage half-channel 9e, 10e The part of inter-stage half-channel 9e, 10e is then an open groove which is closed axially by a removable half-partition or by an end piece or by a non removable half-partition to form an inter-stage half-channel.
  • This inter-stage half channel is joined together with the inter-stage half-channel 9e, 10e, 9d, 10d of the other half-shell 7, 8, on the joining surface 11, to form an inter-stage channel 9e, 10e, 9d, 10d.
  • the part of the inter-stage half-channel 9e, 10e, 9d, 10d can be formed alongside the half-partition 13d, 13e, 14d, 14e, for example in a half- securing flange 16 also allowing the insert 23 to be fixed to the cradle 15.
  • the inter stage half-channel 9e, 10e, 9d, 10d is, for example, closed by the half-securing flange 16 of the preceding pumping chamber, in the direction of pumping of the gases.
  • Two inter-stage half-channels 9e, 10e, 9d, 10d are, for example, partially formed in the lateral face of at least one insert 23, the inter-stage half-channels 9e, 10e, 9d, 10d being situated on either side of the half-partition 13d, 13e, 14d, 14e.
  • the four inter-stage half-channels form, for example, a ring surrounding a pumping chamber.
  • Another advantage of producing inter-stage channels in the removable inserts 23 is that makes it possible to produce very thin channels.
  • the removable inserts 23, comprising the half-partitions 13d, 13e, 14d, 14e and, if appropriate, the half-chamber bottoms and/or the inter-stage half-channels, can be produced in a material, or have a coating, such as one comprising nickel, such as nickel or NiP (nickel-phosphorous), more resistant to corrosion and/or to abrasion and/or to high temperatures than the material or the coating of the body of the half-shell 7, 8, such as cast iron. Since the more resistant materials or coatings are generally also the most costly, their confinement to the inserts 23 makes it possible to limit their use to the parts of the half-shells that are most exposed to external attacks.
  • At least one half-shell 7, 8 comprises at least one removable securing member 24, such as a screw, or a series of screws, here eight of them, for fixing the removable half-partition 13d, 13e, 14d, 14e to the cradle 15 and/or at least one positioning member 25, such as a pin, for positioning the removable half-partition in the cradle 15.
  • removable securing member 24 such as a screw, or a series of screws, here eight of them
  • At least one insert 23 can have a half-securing flange 16, notably inside which a part of an inter-stage half-channel can be formed.
  • the at least one securing member 24 and/or the at least one positioning member 25 are inserted, for example, axially into the half-securing flange 16 and into the cradle 15 and/or into another securing flange 16.
  • the removable insert 23 and the cradle 15 can have a respective half-securing flange 16.
  • the half-securing flanges 16 have flat and complementary forms in which holes 17 can be formed for the securing members 24 and/or positioning members 25.
  • Through-holes 17 are, for example, formed in the half-securing flanges 16 of the removable half-partitions 13d, 13e, 14d, 14e.
  • the at least one securing member 24 is inserted into at least two successive half-securing flanges 16, that of the removable half-partition 13e, 14e and that of another removable half-partition 13d, 14d or that of the cradle 15, to fix the removable half partition 13d, 13e, 14d, 14e to the cradle 15.
  • the half-securing flange 16 of the removable half-partition 13d, 13e, 14d, 14e can thus be sandwiched between an end piece and another removable half-partition 13d, 14d or between a removable half-partition 13e, 14e and the half-securing flange 16 of the cradle 15.
  • the at least one removable securing member 24 is a half-elastic washer or metal clip, interposed axially between an end piece and another removable half-partition 13d, 14d, 13e, 14e or between a removable half-partition 13d, 14d, 13e, 14e and the cradle 15, to clip the at least one removable half-partition 13d, 14d, 13e, 14e to the cradle 15.
  • the half-partition 13d, 13e, 14d, 14e of the other half-shell 7, 8 joined together with the at least one removable half-partition 13d, 13e, 14d, 14e can also be removably fitted.
  • half-partitions 13e, 14e of the half-shells 7, 8 separating the pumping chambers of the last pumping stage 3f and of the penultimate pumping stage 3e which are removable ( Figure 4).
  • the removable inserts 23, comprising the facing half-partitions 13e, 14e and, if appropriate, the half-chamber bottoms and/or inter-stage half-channels, possibly having a more resistant material or coating, to be those of the last pumping stage, and possibly of the penultimate pumping stage.
  • the pumping stages 3f, 3e situated on the discharge 5 side of the vacuum pump 1 which are at least partly removable, that is to say those situated on the side of the highest pressures, where the risks of corrosive and abrasive attacks are the greatest.
  • the half-partitions or the inserts 23 can thus easily be replaced or cleaned. Furthermore, it is these last pumping stages which are the narrowest and therefore the most difficult to machine in the half-shells of the prior art.
  • the other half-partitions 13a-13c, 14a-14c can be non-removable ( Figures 5 and 6).
  • the half-partition 13a-13c, 14a-14c joined together with the half-partition 13a-13c, 14a-14c fitted by non-removable assembly can also be fitted by non removable assembly.
  • the at least one non-removable half-partition 13a-13c, 14a-14c is, for example, produced in the mass of the half-shell 7, 8 or is assembled by force-fitting in the cradle 15 of the half-shell 7, 8.
  • the non-removable half-partitions 13a-13c, 14a-14c are, for example, those interposed between the first pumping stages 3a-3c where the pressures are the lowest and the risks of corrosion or abrasion are the least high.
  • the non-removable half-partitions 13a-13c, 14a-14c make it possible to retain the advantage of a time saving in fitting and a saving in terms of the securing and positioning members of a half-shell architecture.
  • the vacuum pump 1 can also comprise at least one elastic seal interposed between two half-shells 7, 8.
  • the half-shells comprise a hardenable seal between the two half-shells 7, 8.
  • the vacuum pump 1 can also comprise at least one single-piece pumping stage, mounted in series, upstream or downstream, of the at least one pumping stage 3a-3f formed in the at least first and second half-shells 7, 8.
  • stator 2 can comprise at least two pairs of complementary half shells.
  • two half-shells 7, 8 form two pumping stages 3a, 3b
  • two other half-shells 7, 8 form two other pumping stages 3c, 3d
  • two other half-shells 7, 8 form two other pumping stages 3e, 3f
  • the pumping stages 3a-3f being mounted in series between the suction 4 and the discharge 5 of the vacuum pump 1.
  • Figures 9A, 9B, 10A and 10B show another exemplary embodiment for which only the half-partitions 13d, 13e of the half-shells 7, 8 are removably fitted in a cradle 15 of the half-shell 7, 8.
  • the half-chamber bottoms and the inter-stage half-channels are not removable.
  • the at least one securing member 24 and/or the at least one positioning member 25 is inserted radially into the cradle 15, through the removable half-partition 13d, 13e.
  • positioning members 25 per removable half-partition 13d, 13e such as two pins, implemented radially and not parallel ( Figure 9A).
  • a securing member 24, for example implanted also radially may or may not be provided.
  • Figure 9B shows another exemplary embodiment for which there are at least two positioning members 25 per removable half-partition 13d, 13e, such as a key and a pin, implemented radially and not parallel.
  • a securing member 24 for example implanted also radially, parallel to the pin.
  • the pin and the securing member 24 are inserted, for example, into the bottom of the chamber.
  • the key is arranged on the edge of a half-chamber.
  • Figures 10A and 10B show another example for which there are at least two positioning members 25, such as two pins, and at least two securing members 24, such as three screws, implemented axially.
  • the pins and the screws of the securing members 24 are inserted in parallel directions.
  • the multitude of implementation choices makes it possible to adapt the manufacturing to the production tools for the manufacturing of the half-partitions and of the half-shells.
  • Figures 11, 12 and 13 show a third exemplary embodiment.
  • At least one half-partition 14 of a half-shell 7, 8 joined together with a half-partition of the other half-shell 7, 8 to separate two successive pumping chambers, is force-fitted in the cradle 15.
  • transverse positioning grooves 26 are formed in the cradle 15.
  • the thickness of the at least one half-partition 14 is slightly greater than the width of the transverse positioning grooves 26 of the half-shell 8 accommodating it.
  • the force-fitting can be done under a press or be performed by heating the half-shell 7, 8 and/or by cooling the at least one half-partition 14 for it to be received in the transverse positioning groove 26.
  • the force-fitting makes it possible to fix the at least one half-partition 14 to the cradle 15 effectively, that is to say notably by preventing the vibration of the at least one half-partition 14 when the vacuum pump 1 is operating.
  • a reworking of the joining surface 11 , on each half-shell 7, 8, at the top of the body of the half-shells 7, 8 and at the top of the at least one half-partition 14, can be performed notably by grinding, to guarantee the complementarity of the joining of the half-shells 7, 8.
  • the half-shell 7, 8 is thus easier to manufacture, which reduces the production costs. Moreover, with this architecture, it becomes possible to manufacture pumping chambers with narrow axial dimensions, without limitation by the dimensions of the production tools.
  • the half-partition of the other half-shell 7, 8 joined with the at least one force-fitted half-partition 14, can also be force-fitted.
  • the body of the half-shell 7, 8 can be obtained by extrusion then by machining of the transverse positioning grooves 26.
  • the body of the half-shell 7, 8 can be obtained, for example, by casting then machining of the transverse positioning grooves 26 and of the joining surfaces 11.
  • inter-stage channels can be difficult to produce, so provision can be made for all or part thereof to be produced in the force-fitted half-partitions, notably the thinnest ones, situated on the discharge 5 side.
  • At least a part of an inter-stage half-channel is produced in an insert 23 of the half-shell 7, 8, and open on a lateral face of the insert 23, the insert 23 bearing the half-partition 14 and being assembled by force-fitting in the cradle 15.
  • the at least one force-fitted half-partition 14 can also be produced in a material, or have a coating, such as one comprising nickel, such as nickel or NiP (nickel-phosphorous), that is more resistant to corrosion and/or to abrasion and/or to high temperatures than the material or the coating of the body of the half-shell 7, 8, such as cast iron.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Pompe à vide sèche (1) qui comprend : un stator (2) comportant au moins une première et au moins une seconde demi-coques complémentaires (7, 8), chaque demi-coque (7, 8) comprenant au moins une demi-cloison (13e) reliée l'une à l'autre par une demi-cloison (14a-14e) de l'autre demi-coque (8) pour former une cloison de séparation entre deux chambres de pompage successives d'étages de pompage (3a-3f) montés en série entre une aspiration (4) et une décharge (5) de la pompe à vide (1) ; deux arbres de rotor configurés pour tourner de manière synchrone dans des directions inverses dans les chambres de pompage. Ladite pompe à vide sèche est caractérisée en ce qu'au moins une demi-séparation (13e, 14d, 14e) d'une demi-coque (7, 8) soit ajustée par assemblage dans un berceau (15) de la demi-coque (7, 8).
PCT/EP2021/054585 2020-03-04 2021-02-24 Pompe à vide sèche et son procédé de fabrication WO2021175680A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020227024750A KR20220147070A (ko) 2020-03-04 2021-02-24 건식 진공 펌프 및 이를 제조하는 방법
CN202180015509.1A CN115176069A (zh) 2020-03-04 2021-02-24 干式真空泵及其制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2002196A FR3107933B1 (fr) 2020-03-04 2020-03-04 Pompe à vide sèche et procédé de fabrication
FRFR2002196 2020-03-04

Publications (1)

Publication Number Publication Date
WO2021175680A1 true WO2021175680A1 (fr) 2021-09-10

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Country Status (5)

Country Link
KR (1) KR20220147070A (fr)
CN (1) CN115176069A (fr)
FR (1) FR3107933B1 (fr)
TW (1) TW202202724A (fr)
WO (1) WO2021175680A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
CN116447139A (zh) * 2023-04-24 2023-07-18 北京通嘉宏瑞科技有限公司 定子及真空泵

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116428185A (zh) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 真空泵以及气体供给系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0480629A1 (fr) * 1990-10-06 1992-04-15 The BOC Group plc Perfectionnements aux pompes mécaniques
US6572351B2 (en) 2000-08-21 2003-06-03 Alcatel Pressure seal for a vacuum pump
US20150037187A1 (en) * 2012-01-30 2015-02-05 Edwards Limited Pump
FR3051852A1 (fr) * 2016-05-24 2017-12-01 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes
EP3172406B1 (fr) * 2014-07-21 2018-09-12 Edwards Limited Pompe à vide

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0480629A1 (fr) * 1990-10-06 1992-04-15 The BOC Group plc Perfectionnements aux pompes mécaniques
US6572351B2 (en) 2000-08-21 2003-06-03 Alcatel Pressure seal for a vacuum pump
US20150037187A1 (en) * 2012-01-30 2015-02-05 Edwards Limited Pump
EP3172406B1 (fr) * 2014-07-21 2018-09-12 Edwards Limited Pompe à vide
FR3051852A1 (fr) * 2016-05-24 2017-12-01 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2608381A (en) * 2021-06-29 2023-01-04 Edwards Korea Ltd Stator assembly for a roots vacuum pump
CN116447139A (zh) * 2023-04-24 2023-07-18 北京通嘉宏瑞科技有限公司 定子及真空泵
CN116447139B (zh) * 2023-04-24 2024-05-17 北京通嘉宏瑞科技有限公司 定子及真空泵

Also Published As

Publication number Publication date
CN115176069A (zh) 2022-10-11
TW202202724A (zh) 2022-01-16
FR3107933B1 (fr) 2022-03-04
FR3107933A1 (fr) 2021-09-10
KR20220147070A (ko) 2022-11-02

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