EP3172406B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP3172406B1
EP3172406B1 EP15741278.4A EP15741278A EP3172406B1 EP 3172406 B1 EP3172406 B1 EP 3172406B1 EP 15741278 A EP15741278 A EP 15741278A EP 3172406 B1 EP3172406 B1 EP 3172406B1
Authority
EP
European Patent Office
Prior art keywords
longitudinal
annular
components
sealing members
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP15741278.4A
Other languages
German (de)
English (en)
Other versions
EP3172406A1 (fr
Inventor
Alan Ernest Kinnaird Holbrook
Nomikos TRIKOILIS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of EP3172406A1 publication Critical patent/EP3172406A1/fr
Application granted granted Critical
Publication of EP3172406B1 publication Critical patent/EP3172406B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001—Radial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators

Definitions

  • the present invention provides a multi-stage vacuum pump comprising a stator comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers; the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces; a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components; an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members, supports for supporting the annular sealing members at the recesses when the annular sealing members are received in the annular channels to resist protrusion of the annular sealing members into the recesses when compressed between mutually
  • sealant 152 did not penetrate sufficiently into the channel 142 to provide an adequate seal between the longitudinal sealing member 140 and the half shell components.
  • Spaces 154 in channel 142 are formed and as shown in the plan view in Figure 2 a leakage path 156 allows the flow of gas from atmosphere along one side of the sealing member around its tip and along the other side of the sealing member into the pump.
  • Figure 3 shows a half shell stator component 10 similar in general structure to component 102 in Figure 1 having two longitudinal faces 12 located on either side of a series of pumping chambers shown generally at 14.
  • Figure 4 is an enlarged view of an end portion of one of the longitudinal faces.
  • one or both of the half shell stator components may be structured as shown.
  • Figures 3 and 4 show one half shell component and the other half shell component may correspond generally in structure or alternatively the other half shell component may comprise a planar longitudinal face for cooperating with the half shell component shown for sealing the pump.
  • Stator component 10 comprises a deep longitudinal channel 16 extending along a length of each of the longitudinal faces 12 for receiving a longitudinal sealing member (not shown in these Figures but see Figure 2 ).
  • the ends of the deep channel are separated from the end face 18 of the half shell component by a deep recess 20.
  • the half shell components When the half shell components are assembled together they form an annular channel 22 which extends around the circumference of the pumping chambers 14 for sealing the end faces.
  • the principal difference between the second embodiment and the first embodiment is that a shallow recess, rather than a deep recess, connects the deep channels of the longitudinal sealing members with the annular channels of the annular sealing members.
  • the reduced depth of the shallow recess reduces kinking of the annular sealing members since there is less space between the half shell stator components into which the annular sealing members can protrude when compressed.
  • a shallow recess around the deep channel of the longitudinal sealing members prevents or reduces penetration of the sealant around the longitudinal sealing members. Therefore, the second embodiment comprises a deep pocket in the shallow recess to permit adequate penetration of sealant.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (10)

  1. Pompe à vide à étages multiples comprenant un stator comprenant :
    des premier et second composants de stator en demi-coque et des premier et second composants de stator d'extrémité qui lorsqu'ils sont assemblés définissent une pluralité de chambres de pompage ;
    les composants en demi-coque étant assemblés l'un à l'autre le long de paires respectives de faces longitudinales s'engageant mutuellement et les composants de stator d'extrémité étant assemblés aux extrémités des composants en demi-coque au niveau de paires respectives de faces d'extrémité s'engageant mutuellement ;
    un canal longitudinal fraisé dans au moins une face longitudinale de chaque paire de faces longitudinales s'engageant mutuellement destiné à recevoir des organes d'étanchéité longitudinaux respectifs pour assurer l'étanchéité entre les composants en demi-coque ;
    un canal annulaire fraisé dans au moins une face d'extrémité de chaque paire de faces d'extrémité s'engageant mutuellement destiné à recevoir des organes d'étanchéité respectifs pour assurer l'étanchéité entre les composants en demi-coque et les composants de stator d'extrémité ;
    des évidements fraisés au niveau des portions d'extrémité des faces longitudinales destinés à recevoir un produit étanchéifiant pour assurer l'étanchéité entre les organes d'étanchéité longitudinaux et les organes d'étanchéité annulaires,
    caractérisée par
    des supports destinés à supporter les organes d'étanchéité annulaires au niveau des évidements lorsque les organes d'étanchéité annulaires sont reçus dans les canaux annulaires afin de s'opposer à la protrusion des organes d'étanchéité annulaires dans les évidements lorsqu'ils sont comprimés entre des faces d'extrémité s'engageant mutuellement.
  2. Pompe à vide à étages multiples selon la revendication 1, dans laquelle les supports s'étendent à travers des évidements respectifs transversalement à un plan des faces longitudinales.
  3. Pompe à vide à étages multiples selon la revendication 1 ou 2, dans laquelle les supports sont formés par des parois s'étendant depuis les surfaces fraisées d'évidements respectifs en alignement avec les canaux annulaires.
  4. Pompe à vide à étages multiples selon l'une quelconque des revendications précédentes, dans laquelle les canaux annulaires présentent une largeur de canal destinée à recevoir les organes d'étanchéité annulaires et les supports présentent une largeur de support qui est inférieure à la largeur de canal pour permettre au produit étanchéifiant dans les évidements de rentrer en contact avec les organes d'étanchéité annulaires.
  5. Pompe à vide à étages multiples selon la revendication 4, dans laquelle des deux côtés de chaque support un espace 26 est prévu entre le support et la face d'extrémité afin de permettre à un produit étanchéifiant de circuler et d'entrer directement en contact avec et d'assurer l'étanchéité contre un organe d'étanchéité annulaire dans le canal annulaire des deux côtés du support.
  6. Pompe à vide à étages multiples selon l'une quelconque des revendications précédentes, dans laquelle la profondeur des évidements est approximativement égale à la profondeur des canaux longitudinaux pour permettre au produit étanchéifiant de circuler autour des organes d'étanchéité longitudinaux afin d'empêcher la formation d'un chemin de fuite.
  7. Pompe à vide à étages multiples comprenant un stator comprenant :
    des premier et second composants de stator en demi-coque et des premier et second composants de stator d'extrémité qui lorsqu'ils sont assemblés définissent une pluralité de chambres de pompage ;
    les composants en demi-coque étant assemblés l'un à l'autre le long de paires respectives de faces longitudinales s'engageant mutuellement et les composants de stator d'extrémité étant assemblés aux extrémités des composants en demi-coque au niveau de paires respectives de faces d'extrémité s'engageant mutuellement ;
    un canal longitudinal fraisé dans au moins une face longitudinale de chaque paire de faces longitudinales s'engageant mutuellement destiné à recevoir des organes d'étanchéité longitudinaux respectifs pour assurer l'étanchéité entre les composants en demi-coque ;
    un canal annulaire fraisé dans au moins une face d'extrémité de chaque paire de faces d'extrémité s'engageant mutuellement destiné à recevoir des organes d'étanchéité respectifs pour assurer l'étanchéité entre les composants en demi-coque et les composants de stator d'extrémité ;
    des évidements de faible profondeur fraisés au niveau des portions d'extrémité des faces longitudinales destinés à recevoir un produit étanchéifiant pour assurer l'étanchéité entre les organes d'étanchéité longitudinaux et les organes d'étanchéité annulaires,
    caractérisée en ce que
    la profondeur des évidements de faible profondeur est inférieure à la profondeur des canaux longitudinaux et fraisée dans chaque évidement est au moins une poche profonde s'étendant depuis le canal longitudinal pour permettre au produit étanchéifiant de circuler autour d'un organe d'étanchéité longitudinal reçu dans le canal longitudinal pour empêcher la formation d'un chemin de fuite.
  8. Pompe à vide à étages multiples selon la revendication 7, dans laquelle les poches profondes ont une profondeur approximativement égale à la profondeur des canaux longitudinaux.
  9. Pompe à vide à étages multiples selon la revendication 7 ou 8, dans laquelle les poches profondes sont espacées des canaux annulaires de telle manière que l'espacement entre les composants de stator en demi-coque au niveau des canaux annulaires est défini par la profondeur des évidements de faible profondeur afin de s'opposer à la protrusion d'organes d'étanchéité annulaires reçus dans les canaux annulaires faisant saillie entre les composants de stator en demi-coque.
  10. Pompe à vide à étages multiples selon l'une quelconque des revendications 7 à 9, dans laquelle des poches profondes s'étendent latéralement depuis les deux côtés des canaux longitudinaux respectifs.
EP15741278.4A 2014-07-21 2015-07-17 Pompe à vide Not-in-force EP3172406B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1412924.1A GB2528450A (en) 2014-07-21 2014-07-21 Vacuum pump
PCT/GB2015/052068 WO2016012758A1 (fr) 2014-07-21 2015-07-17 Pompe à vide

Publications (2)

Publication Number Publication Date
EP3172406A1 EP3172406A1 (fr) 2017-05-31
EP3172406B1 true EP3172406B1 (fr) 2018-09-12

Family

ID=51494905

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15741278.4A Not-in-force EP3172406B1 (fr) 2014-07-21 2015-07-17 Pompe à vide

Country Status (4)

Country Link
US (1) US20170204858A1 (fr)
EP (1) EP3172406B1 (fr)
GB (1) GB2528450A (fr)
WO (1) WO2016012758A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3107933A1 (fr) * 2020-03-04 2021-09-10 Pfeiffer Vacuum Technology AG Pompe à vide sèche et procédé de fabrication

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201621618D0 (en) * 2016-12-19 2017-02-01 Edwards Ltd Pump sealing
GB2559136B (en) * 2017-01-25 2020-04-15 Edwards Ltd Vacuum pump with biased stator seals and method of manufacture thereof
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
GB2588424B (en) * 2019-10-23 2022-01-26 Edwards Ltd Pump apparatus
FR3112174B1 (fr) * 2021-02-24 2022-07-22 Pfeiffer Vacuum Pompe à vide sèche
GB2622602B (en) * 2022-09-22 2024-10-16 Edwards Ltd Sealing gasket

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005214A (en) * 1996-06-26 1999-12-21 Cramer; Margaret D. Method of making wear resistant material lined housings
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
US8182252B2 (en) * 2007-10-30 2012-05-22 Moyno, Inc. Progressing cavity pump with split stator
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
GB2508405B (en) * 2012-11-30 2015-09-02 Edwards Ltd Vacuum pump
GB2512095B (en) * 2013-03-20 2015-07-08 Edwards Ltd Pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3107933A1 (fr) * 2020-03-04 2021-09-10 Pfeiffer Vacuum Technology AG Pompe à vide sèche et procédé de fabrication
WO2021175680A1 (fr) * 2020-03-04 2021-09-10 Pfeiffer Vacuum Pompe à vide sèche et son procédé de fabrication

Also Published As

Publication number Publication date
GB2528450A (en) 2016-01-27
WO2016012758A1 (fr) 2016-01-28
US20170204858A1 (en) 2017-07-20
EP3172406A1 (fr) 2017-05-31
GB201412924D0 (en) 2014-09-03

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