US20170204858A1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
US20170204858A1
US20170204858A1 US15/326,658 US201515326658A US2017204858A1 US 20170204858 A1 US20170204858 A1 US 20170204858A1 US 201515326658 A US201515326658 A US 201515326658A US 2017204858 A1 US2017204858 A1 US 2017204858A1
Authority
US
United States
Prior art keywords
longitudinal
annular
components
sealing members
shell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/326,658
Inventor
Alan Ernest Kinnaird Holbrook
Nomikos TRIKOILIS
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of US20170204858A1 publication Critical patent/US20170204858A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • F01C21/104Stators; Members defining the outer boundaries of the working chamber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02Liquid sealing for high-vacuum pumps or for compressors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10Outer members for co-operation with rotary pistons; Casings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/086Carter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/001Radial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005Axial sealings for working fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00Application
    • F04C2220/10Vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/10Stators

Definitions

  • the present invention relates to a vacuum pump, in particular a multi-stage vacuum pump and a stator of such a pump.
  • a vacuum pump may be formed by positive displacement pumps such as roots or claw pumps, having one or more pumping stages connected in series. Multi-stage pumps are desirable because they involve less manufacturing cost and assembly time compared to multiple single stage pumps in series.
  • Multi-stage roots or claw pumps may be manufactured and assembled in the form of a clamshell.
  • the stator 100 of such a pump comprises first and second half-shell stator components 102 , 104 which together define a plurality of pumping chambers 106 , 108 , 110 , 112 , 114 , 116 .
  • Each of the half-shells has first and second longitudinally extending faces which mutually engage with the respective longitudinally extending faces of the other half-shell when the half-shells are fitted together. Only the two longitudinally extending faces 118 , 120 of half-shell 102 are visible in the Figure.
  • the two half shells are brought together in a generally radial direction shown by the arrows R.
  • the stator 100 further comprises first and second end stator components 122 , 124 , also known as head plates.
  • first and second end stator components 122 , 124 also known as head plates.
  • the first and second end components are fitted to respective end faces 126 , 128 of the joined half-shells in a generally axial, or longitudinal, direction shown by arrows L.
  • the inner faces 130 , 132 of the end components mutually engage with respective end faces 126 , 128 of the half-shells.
  • Each of the pumping chambers 106 - 116 is formed between transverse walls 134 of the half-shells. Only the transverse walls of half-shell 102 can be seen in FIG. 1 .
  • the transverse walls provide axial separation between one pumping chamber and an adjacent pumping chamber, or between the end pumping chambers 106 , 116 and the end stator components.
  • the present example shows a typical stator arrangement for a roots or claw pump having two longitudinally extending shafts (not shown) which are located in the apertures 136 formed in the transverse walls 134 when the half-shells are fitted together.
  • rotors Prior to assembly, rotors (not shown) are fitted to the shafts so that two rotors are located in each pumping chamber.
  • the end components each have two apertures through which the shafts extend. The shafts are supported by bearings in the end components and driven by a motor and gear mechanism.
  • the multi-stage vacuum pump operates at pressures within the pumping chamber less than atmosphere and potentially as low as 10 ⁇ 3 mbar. Accordingly, there will be a pressure differential between atmosphere and the inside of the pump. Leakage of surrounding gas into the pump must therefore be prevented at the joints between the stator components, which are formed between the longitudinally extending surfaces 118 , 120 of the half-shells and between the end faces 126 , 128 of the half-shells and the inner faces 130 , 132 of the end components.
  • a known alternative sealing arrangement is disclosed in US2002155014 providing a one piece sealing member comprising two longitudinal portions and two annular portions.
  • the sealing member is however generally quite intricate to fit in place and expensive to manufacture.
  • the present invention provides in the embodiments an improved seal arrangement for sealing a clam shell pump.
  • the present invention provides a multi-stage vacuum pump comprising a stator comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers; the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces; a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components; an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members, supports for supporting the annular sealing members at the recesses when the annular sealing members are received in the annular channels to resist protrusion of the annular sealing members into the recesses when compressed between mutually
  • the present invention also provides multi-stage vacuum pump comprising a stator comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers; the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces; a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components; an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; shallow recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members, wherein the depth of the shallow recesses is less than the depth of the longitudinal channels and counter-sunk into each recess is at least one deep pocket extending from the longitudinal channel for allowing sealant to
  • FIG. 1 shows generally the components of a clam shell stator
  • FIG. 2 shows a plan view and section of part of a half shell stator component without adequate sealing and the formation of a leakage path
  • FIG. 3 shows one example of a half shell stator component with adequate sealing
  • FIG. 4 is an enlarged view of an end portion of the half shell stator component shown in FIG. 3 ;
  • FIG. 5 is a section taken through a recess at the end portion shown in FIG. 4 ;
  • FIG. 6 is a plan view of a longitudinal face of another example of a half shell stator component with adequate sealing
  • FIG. 7 is an enlarged view of an end portion of the half shell stator component shown in FIG. 6 ;
  • FIG. 8 is a section taken through a recess and deep pockets at the end portion shown in FIG. 7 .
  • US2002155014 discusses the problem of sealing a clam shell stator.
  • it indicates that leakage lines exist between a longitudinal gasket providing peripheral radial sealing and O-rings providing axial sealing at the ends, which results in unsatisfactory sealing.
  • the patent proposes a one-piece three-dimensional sealing member as discussed above. This three-dimensional sealing member is expensive to manufacture and intricate to fit in place.
  • FIG. 2 shows an end portion of longitudinal face 120 of a half shell component 102 and a portion of the end face 128 .
  • a longitudinal sealing member 140 is received in a counter sunk deep channel 142 which extends over the length of the longitudinal face leaving a space between the end of the longitudinal member, or channel, and an annular sealing member 146 .
  • the annular sealing member 146 is received in an annular channel 150 counter sunk in the end face 128 .
  • a shallow recess 144 is counter sunk in the longitudinal face surrounding the end of the deep channel 142 and in the space between this channel and annular channel 150 .
  • Sealant 152 is applied in the shallow recess for sealing between the longitudinal member 140 and the annular member 146 . In this way, there is no direct interface between the longitudinal sealing member and the annular sealing member.
  • sealant 152 did not penetrate sufficiently into the channel 142 to provide an adequate seal between the longitudinal sealing member 140 and the half shell components.
  • Spaces 154 in channel 142 are formed and as shown in the plan view in FIG. 2 a leakage path 156 allows the flow of gas from atmosphere along one side of the sealing member around its tip and along the other side of the sealing member into the pump.
  • the depth of the recess 144 was increased so that it was approximately equal to the depth of the longitudinal channel 142 .
  • This arrangement provided adequate sealing about the longitudinal sealing member 140 but resulted in less than adequate sealing at the annular sealing member 146 .
  • the sealant is fluid when applied until allowed to cure, and when the annular sealing member is compressed between the end faces of the half shell components and the internal face of the end components a kink is formed in the annular sealing member where it protrudes into the deep recess between the half shell components and displaces sealant which in its fluid state cannot provide sufficient resistance to kinking.
  • the shallow recess shown in FIG. 2 provided sufficient support for the annular sealing member to avoid significant kinking, by deepening the recess and solving the sealing problem around the longitudinal sealing member it created a different problem around the annular sealing member.
  • Embodiments of the invention provide a solution having adequate sealing at both the longitudinal sealing member and the annular sealing member.
  • FIG. 3 shows a half shell stator component 10 similar in general structure to component 102 in FIG. 1 having two longitudinal faces 12 located on either side of a series of pumping chambers shown generally at 14 .
  • FIG. 4 is an enlarged view of an end portion of one of the longitudinal faces.
  • one or both of the half shell stator components may be structured as shown.
  • FIGS. 3 and 4 show one half shell component and the other half shell component may correspond generally in structure or alternatively the other half shell component may comprise a planar longitudinal face for cooperating with the half shell component shown for sealing the pump.
  • Stator component 10 comprises a deep longitudinal channel 16 extending along a length of each of the longitudinal faces 12 for receiving a longitudinal sealing member (not shown in these Figures but see FIG. 2 ).
  • the ends of the deep channel are separated from the end face 18 of the half shell component by a deep recess 20 .
  • foil 1 an annular channel 22 which extends around the circumference of the pumping chambers 14 for sealing the end faces.
  • a problem with such a deep recess as shown in FIG. 3 is that it results in kinking of the annular sealing member received in channel 22 .
  • the annular sealing member is supported across the deep recess. In this way, sealant applied in the recess sufficiently seals around the longitudinal sealing member and also can seal adequately against the annular sealing member without kinking.
  • a support 24 upstands from the counter sunk surface of recess 20 at the end face 18 for supporting the annular sealing member.
  • the support is formed by a wall which is generally in line with the counter sunk surface of the annular channel 22 .
  • the annular channel has a width for receiving and locating the annular sealing member and the wall extends only partially over the width of the annular channel.
  • On at least one side, and preferably on both sides as shown in FIG. 4 is a space 26 between the wall and the end face so that sealant can flow and directly contact and seal against the annular sealing member in the annular channel. In this way, the arrangement supports the annular sealing member whilst also permitting adequate sealing between the sealant and the annular sealing member.
  • the support 24 may extend from the opposing half-shell stator component with its end abutting or closely adjacent the counter-sunk surface of recess 20 .
  • a longitudinal sealing member is inserted in each of the longitudinal channels 16 shown in FIG. 3 .
  • the longitudinal channel has two pinch points 28 referenced in FIG. 4 for applying pressure at respective end portions of the sealing member.
  • sealant is applied to the channels and recesses 20 prior to assembling the half shell components together or injected after the components are assembled together.
  • At least one overflow path, or channel, 30 is provided at each end portion to allow sealant to escape either under compression of the half shell components together or following pressure from sealant injection.
  • the deep recess 20 is of comparable depth to that of the deep channel 16 . Therefore, the sealant when applied can penetrate around the longitudinal sealing member when it is positioned in the longitudinal channel.
  • FIG. 5 shows a section through one of the deep recesses 20 counter sunk from longitudinal face 12 .
  • the sealant 32 is shown penetrating and surrounding the end portion of one longitudinal member 34 thereby providing an effective seal.
  • the depth of the recess allows the sealant to prevent the formation of a leakage path around the longitudinal sealing member. As shown in
  • FIG. 4 the supporting wall 24 supports the annular sealing member to resist kinking whilst allowing sealant to flow on either side of the wall to contact and seal against the annular sealing member. Therefore, the arrangement shown in FIGS. 3 to 5 provides adequate sealing between the sealant and the longitudinal sealing members and between the sealant and the annular sealing members to provide effective sealing of the pump.
  • FIGS. 6 to 8 A second embodiment of the invention is described with reference to FIGS. 6 to 8 , in which like reference numerals are used to refer to like components of the first embodiment.
  • the principal difference between the second embodiment and the first embodiment is that a shallow recess, rather than a deep recess, connects the deep channels of the longitudinal sealing members with the annular channels of the annular sealing members.
  • the reduced depth of the shallow recess reduces kinking of the annular sealing members since there is less space between the half shell stator components into which the annular sealing members can protrude when compressed.
  • a shallow recess around the deep channel of the longitudinal sealing members prevents or reduces penetration of the sealant around the longitudinal sealing members. Therefore, the second embodiment comprises a deep pocket in the shallow recess to permit adequate penetration of sealant.
  • a shallow recess 36 is positioned between the deep channels 40 of the mutually engaging longitudinal faces 12 of the half shell stator components 102 , 104 and the annular channels 22 in the end face of the half shell components.
  • the shallow recess has insufficient depth in itself to allow penetration of the sealant 32 into the deep channel and around the end portions of the longitudinal sealing members for effective sealing.
  • deep pockets 38 extend outwardly from the deep channels for receiving a sealant so that it can penetrate more deeply into channels.
  • the deep pockets are located at each of the longitudinal ends of the deep channels and extend transversely on both sides of the channels and generally perpendicularly to the deep channel into the shallow recess 36 .
  • the shallowness of the recess 36 means that the annular sealing member 42 may not require support across the gap between the half shell stator components 102 , 104 to prevent significant kinking of the annular sealing member. Nevertheless, a support such as a wall 25 shown schematically may be provided upstanding from the counter sunk surface of the shallow recess to give additional support to the annular sealing members across the space between the half-shell components, similarly to wall 24 of the first embodiment.
  • the longitudinal sealing members 34 are positioned in the deep channels 40 and secured in tension between the pinch points 28 .
  • the two half shell stator components 182 , 104 are brought together along their respective mutually engaging longitudinal faces 12 compressing the longitudinal sealing member and providing sealing along the length of the stator.
  • Sealant 32 may be applied prior to assembling the half shell stator components or injected following assembly. If applied prior to assembly the overflow channels 30 allow excess sealant to escape or in the alternative the side channels 26 can be used to inject sealant under pressure into the assembled components.
  • the deep pockets 38 allow sealant to flow from the shallow recesses 36 around the cross-section of the end portions of the longitudinal sealing members to provide adequate sealing as shown in FIG. 8 .
  • bores 44 are provided in the half shell stator components for receiving fastening members such as bolts for fastening the components together.
  • ‘deep’ refers to the depth substantially equal to that of the longitudinal channels counter sunk into the end faces 12 for the longitudinal sealing members. The depth is required for receiving the longitudinal sealing members and to allow sealant to seal around the end portions of the longitudinal sealing members to prevent leakage.
  • ‘Shallow’ refers to a depth counter sunk into the end faces 12 which is less than ‘deep’, preferably less than half of the depth and more preferably less than a quarter of the depth, and which in insufficient to allow sealant to penetrate around the longitudinal sealing members.
  • the exact measurements of deep and shallow depend on the overall measurements of the stator and pump, however typically ‘deep’ may be 2 mm or more, and ‘shallow’ may be 1 mm or less or preferably 0.5 mm or less.

Abstract

The present invention relates to a multi-stage vacuum pump comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers. The half-shell components are assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components are assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces. An annular channel is counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components. Recesses are counter-sunk at the end portions of the longitudinal faces for receiving a sealant and supports provide support for the annular sealing members at the recesses when the annular sealing members are received in the annular channels to resist protrusion of the annular sealing members into the recesses when compressed between mutually engaging end faces.

Description

  • This application is a national stage entry under 35 U.S.C. §371 of International Application No. PCT/GB2015/052068, filed Jul. 17, 2015, the entire content of which is incorporated herein by reference.
  • TECHNICAL FIELD OF THE INVENTION
  • The present invention relates to a vacuum pump, in particular a multi-stage vacuum pump and a stator of such a pump.
  • BACKGROUND TO THE INVENTION
  • A vacuum pump may be formed by positive displacement pumps such as roots or claw pumps, having one or more pumping stages connected in series. Multi-stage pumps are desirable because they involve less manufacturing cost and assembly time compared to multiple single stage pumps in series.
  • Multi-stage roots or claw pumps may be manufactured and assembled in the form of a clamshell. As shown in FIG. 1, the stator 100 of such a pump comprises first and second half- shell stator components 102, 104 which together define a plurality of pumping chambers 106, 108, 110, 112, 114, 116. Each of the half-shells has first and second longitudinally extending faces which mutually engage with the respective longitudinally extending faces of the other half-shell when the half-shells are fitted together. Only the two longitudinally extending faces 118, 120 of half-shell 102 are visible in the Figure. During assembly the two half shells are brought together in a generally radial direction shown by the arrows R.
  • The stator 100 further comprises first and second end stator components 122, 124, also known as head plates. When the half-shells have been fitted together, the first and second end components are fitted to respective end faces 126, 128 of the joined half-shells in a generally axial, or longitudinal, direction shown by arrows L. The inner faces 130, 132 of the end components mutually engage with respective end faces 126, 128 of the half-shells.
  • Each of the pumping chambers 106-116 is formed between transverse walls 134 of the half-shells. Only the transverse walls of half-shell 102 can be seen in FIG. 1.
  • When the half-shells are assembled the transverse walls provide axial separation between one pumping chamber and an adjacent pumping chamber, or between the end pumping chambers 106, 116 and the end stator components. The present example shows a typical stator arrangement for a roots or claw pump having two longitudinally extending shafts (not shown) which are located in the apertures 136 formed in the transverse walls 134 when the half-shells are fitted together. Prior to assembly, rotors (not shown) are fitted to the shafts so that two rotors are located in each pumping chamber. Although not shown in this simplified drawing, the end components each have two apertures through which the shafts extend. The shafts are supported by bearings in the end components and driven by a motor and gear mechanism.
  • The multi-stage vacuum pump operates at pressures within the pumping chamber less than atmosphere and potentially as low as 10−3 mbar. Accordingly, there will be a pressure differential between atmosphere and the inside of the pump. Leakage of surrounding gas into the pump must therefore be prevented at the joints between the stator components, which are formed between the longitudinally extending surfaces 118, 120 of the half-shells and between the end faces 126, 128 of the half-shells and the inner faces 130, 132 of the end components.
  • A known alternative sealing arrangement is disclosed in US2002155014 providing a one piece sealing member comprising two longitudinal portions and two annular portions. The sealing member is however generally quite intricate to fit in place and expensive to manufacture.
  • SUMMARY OF THE INVENTION
  • The present invention provides in the embodiments an improved seal arrangement for sealing a clam shell pump.
  • The present invention provides a multi-stage vacuum pump comprising a stator comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers; the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces; a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components; an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members, supports for supporting the annular sealing members at the recesses when the annular sealing members are received in the annular channels to resist protrusion of the annular sealing members into the recesses when compressed between mutually engaging end faces.
  • The present invention also provides multi-stage vacuum pump comprising a stator comprising: first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers; the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces; a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components; an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; shallow recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members, wherein the depth of the shallow recesses is less than the depth of the longitudinal channels and counter-sunk into each recess is at least one deep pocket extending from the longitudinal channel for allowing sealant to flow around a longitudinal sealing member received in the longitudinal channel for preventing the formation of a leakage path. Other preferred and/or optional features of the invention are defined in the accompanying claims.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • In order that the present invention may be well understood, an embodiment thereof, which is given by way of example only, will now be described in more detail, with reference to the accompanying drawings, in which:
  • FIG. 1 shows generally the components of a clam shell stator;
  • FIG. 2 shows a plan view and section of part of a half shell stator component without adequate sealing and the formation of a leakage path;
  • FIG. 3 shows one example of a half shell stator component with adequate sealing;
  • FIG. 4 is an enlarged view of an end portion of the half shell stator component shown in FIG. 3;
  • FIG. 5 is a section taken through a recess at the end portion shown in FIG. 4;
  • FIG. 6 is a plan view of a longitudinal face of another example of a half shell stator component with adequate sealing;
  • FIG. 7 is an enlarged view of an end portion of the half shell stator component shown in FIG. 6; and
  • FIG. 8 is a section taken through a recess and deep pockets at the end portion shown in FIG. 7.
  • DETAILED DESCRIPTION OF THE INVENTION
  • By way of background to the invention, US2002155014 discusses the problem of sealing a clam shell stator. In particular, it indicates that leakage lines exist between a longitudinal gasket providing peripheral radial sealing and O-rings providing axial sealing at the ends, which results in unsatisfactory sealing. As a consequence the patent proposes a one-piece three-dimensional sealing member as discussed above. This three-dimensional sealing member is expensive to manufacture and intricate to fit in place.
  • Previous patent applications of the present applicant have proposed the use of four separate sealing components, namely two longitudinal sealing members, or gaskets, for sealing between the half- shell components 102, 104 in FIG. 1 and two annular sealing members, or O-rings, for sealing between the end faces of the half-shell components and the end stator components 122, 124. Considerable difficulty was encountered when sealing at the interfaces between the longitudinal sealing members and the annular sealing members and the applicant's previous applications address a number of solutions to the difficulties. The present application differs from the previous applications in that rather than sealing the interfaces between the sealing members the present embodiments apply a sealant (which may be liquid or gel prior to curing to solid) to seal between the longitudinal sealing members and the half-shell components and between the annular sealing members and both the half-shell and end stator components. Therefore, the present embodiments do not have direct interfaces between sealing members. However, even without these interfaces, sealing is problematic particularly given that the differential pressure across the seal can be both positive and negative and vary by several bar. Early experiments conducted by the applicant and the attendant problems which arose are now described with reference to FIG. 2. FIG. 2 shows an end portion of longitudinal face 120 of a half shell component 102 and a portion of the end face 128. In this early arrangement, a longitudinal sealing member 140 is received in a counter sunk deep channel 142 which extends over the length of the longitudinal face leaving a space between the end of the longitudinal member, or channel, and an annular sealing member 146. The annular sealing member 146 is received in an annular channel 150 counter sunk in the end face 128. A shallow recess 144 is counter sunk in the longitudinal face surrounding the end of the deep channel 142 and in the space between this channel and annular channel 150. Sealant 152 is applied in the shallow recess for sealing between the longitudinal member 140 and the annular member 146. In this way, there is no direct interface between the longitudinal sealing member and the annular sealing member.
  • It was found however as shown in section A-A that the sealant 152 did not penetrate sufficiently into the channel 142 to provide an adequate seal between the longitudinal sealing member 140 and the half shell components. Spaces 154 in channel 142 are formed and as shown in the plan view in FIG. 2 a leakage path 156 allows the flow of gas from atmosphere along one side of the sealing member around its tip and along the other side of the sealing member into the pump.
  • In order to increase penetration of the sealant around the longitudinal sealing member the depth of the recess 144 was increased so that it was approximately equal to the depth of the longitudinal channel 142. This arrangement provided adequate sealing about the longitudinal sealing member 140 but resulted in less than adequate sealing at the annular sealing member 146. In this regard, the sealant is fluid when applied until allowed to cure, and when the annular sealing member is compressed between the end faces of the half shell components and the internal face of the end components a kink is formed in the annular sealing member where it protrudes into the deep recess between the half shell components and displaces sealant which in its fluid state cannot provide sufficient resistance to kinking. Whereas the shallow recess shown in FIG. 2 provided sufficient support for the annular sealing member to avoid significant kinking, by deepening the recess and solving the sealing problem around the longitudinal sealing member it created a different problem around the annular sealing member.
  • Embodiments of the invention provide a solution having adequate sealing at both the longitudinal sealing member and the annular sealing member.
  • A first embodiment of the invention is described with reference to FIGS. 3 and 4. FIG. 3 shows a half shell stator component 10 similar in general structure to component 102 in FIG. 1 having two longitudinal faces 12 located on either side of a series of pumping chambers shown generally at 14. FIG. 4 is an enlarged view of an end portion of one of the longitudinal faces. In this first embodiment, one or both of the half shell stator components may be structured as shown. In this regard, FIGS. 3 and 4 show one half shell component and the other half shell component may correspond generally in structure or alternatively the other half shell component may comprise a planar longitudinal face for cooperating with the half shell component shown for sealing the pump.
  • Stator component 10 comprises a deep longitudinal channel 16 extending along a length of each of the longitudinal faces 12 for receiving a longitudinal sealing member (not shown in these Figures but see FIG. 2). The ends of the deep channel are separated from the end face 18 of the half shell component by a deep recess 20. When the half shell components are assembled together they foil 1 an annular channel 22 which extends around the circumference of the pumping chambers 14 for sealing the end faces.
  • As previously discussed, a problem with such a deep recess as shown in FIG. 3 is that it results in kinking of the annular sealing member received in channel 22. In the present arrangement, the annular sealing member is supported across the deep recess. In this way, sealant applied in the recess sufficiently seals around the longitudinal sealing member and also can seal adequately against the annular sealing member without kinking.
  • In more detail, a support 24 upstands from the counter sunk surface of recess 20 at the end face 18 for supporting the annular sealing member. As shown, the support is formed by a wall which is generally in line with the counter sunk surface of the annular channel 22. The annular channel has a width for receiving and locating the annular sealing member and the wall extends only partially over the width of the annular channel. On at least one side, and preferably on both sides as shown in FIG. 4, is a space 26 between the wall and the end face so that sealant can flow and directly contact and seal against the annular sealing member in the annular channel. In this way, the arrangement supports the annular sealing member whilst also permitting adequate sealing between the sealant and the annular sealing member. In another example, the support 24 may extend from the opposing half-shell stator component with its end abutting or closely adjacent the counter-sunk surface of recess 20.
  • During assembly, a longitudinal sealing member is inserted in each of the longitudinal channels 16 shown in FIG. 3. In order to locate the sealing member and provide a small tensile force the longitudinal channel has two pinch points 28 referenced in FIG. 4 for applying pressure at respective end portions of the sealing member. Following location of the longitudinal sealing members in both channels 16, sealant is applied to the channels and recesses 20 prior to assembling the half shell components together or injected after the components are assembled together. At least one overflow path, or channel, 30 is provided at each end portion to allow sealant to escape either under compression of the half shell components together or following pressure from sealant injection.
  • The deep recess 20 is of comparable depth to that of the deep channel 16. Therefore, the sealant when applied can penetrate around the longitudinal sealing member when it is positioned in the longitudinal channel. FIG. 5 shows a section through one of the deep recesses 20 counter sunk from longitudinal face 12. In FIG. 5, the sealant 32 is shown penetrating and surrounding the end portion of one longitudinal member 34 thereby providing an effective seal. The depth of the recess allows the sealant to prevent the formation of a leakage path around the longitudinal sealing member. As shown in
  • FIG. 4, the supporting wall 24 supports the annular sealing member to resist kinking whilst allowing sealant to flow on either side of the wall to contact and seal against the annular sealing member. Therefore, the arrangement shown in FIGS. 3 to 5 provides adequate sealing between the sealant and the longitudinal sealing members and between the sealant and the annular sealing members to provide effective sealing of the pump.
  • A second embodiment of the invention is described with reference to FIGS. 6 to 8, in which like reference numerals are used to refer to like components of the first embodiment.
  • The principal difference between the second embodiment and the first embodiment is that a shallow recess, rather than a deep recess, connects the deep channels of the longitudinal sealing members with the annular channels of the annular sealing members. The reduced depth of the shallow recess reduces kinking of the annular sealing members since there is less space between the half shell stator components into which the annular sealing members can protrude when compressed. However, as previously indicated, a shallow recess around the deep channel of the longitudinal sealing members prevents or reduces penetration of the sealant around the longitudinal sealing members. Therefore, the second embodiment comprises a deep pocket in the shallow recess to permit adequate penetration of sealant.
  • In more detail, and referring to FIGS. 6 to 8, a shallow recess 36 is positioned between the deep channels 40 of the mutually engaging longitudinal faces 12 of the half shell stator components 102, 104 and the annular channels 22 in the end face of the half shell components. The shallow recess has insufficient depth in itself to allow penetration of the sealant 32 into the deep channel and around the end portions of the longitudinal sealing members for effective sealing. However, in this embodiment, deep pockets 38 extend outwardly from the deep channels for receiving a sealant so that it can penetrate more deeply into channels. In the Figures, the deep pockets are located at each of the longitudinal ends of the deep channels and extend transversely on both sides of the channels and generally perpendicularly to the deep channel into the shallow recess 36. Alternatively, there may be a single deep pocket.
  • The shallowness of the recess 36 means that the annular sealing member 42 may not require support across the gap between the half shell stator components 102, 104 to prevent significant kinking of the annular sealing member. Nevertheless, a support such as a wall 25 shown schematically may be provided upstanding from the counter sunk surface of the shallow recess to give additional support to the annular sealing members across the space between the half-shell components, similarly to wall 24 of the first embodiment.
  • In assembly, the longitudinal sealing members 34 are positioned in the deep channels 40 and secured in tension between the pinch points 28. The two half shell stator components 182, 104 are brought together along their respective mutually engaging longitudinal faces 12 compressing the longitudinal sealing member and providing sealing along the length of the stator. Sealant 32 may be applied prior to assembling the half shell stator components or injected following assembly. If applied prior to assembly the overflow channels 30 allow excess sealant to escape or in the alternative the side channels 26 can be used to inject sealant under pressure into the assembled components. The deep pockets 38 allow sealant to flow from the shallow recesses 36 around the cross-section of the end portions of the longitudinal sealing members to provide adequate sealing as shown in FIG. 8.
  • In both embodiments, bores 44 are provided in the half shell stator components for receiving fastening members such as bolts for fastening the components together.
  • When the half shell stator components are assembled together they define the annular channels 22 at each end of the assembly and following assembly the annular sealing members 42 are positioned in the annular channels. Assembly of the end stator components 122, 124 at the end faces of the assembled half shell components compresses the annular sealing members. This compression applies an axial force to the annular sealing members but as the gap between the half shell stator components is reduced by the shallow recess 36 the annular sealing members do not protrude into the recesses to affect adequate sealing, particularly if a supporting wall is provided.
  • The present description uses the terms ‘deep’ and ‘shallow’. In the context of this description, ‘deep’ refers to the depth substantially equal to that of the longitudinal channels counter sunk into the end faces 12 for the longitudinal sealing members. The depth is required for receiving the longitudinal sealing members and to allow sealant to seal around the end portions of the longitudinal sealing members to prevent leakage. ‘Shallow’ refers to a depth counter sunk into the end faces 12 which is less than ‘deep’, preferably less than half of the depth and more preferably less than a quarter of the depth, and which in insufficient to allow sealant to penetrate around the longitudinal sealing members. The exact measurements of deep and shallow depend on the overall measurements of the stator and pump, however typically ‘deep’ may be 2 mm or more, and ‘shallow’ may be 1 mm or less or preferably 0.5 mm or less.

Claims (10)

1. A multi-stage vacuum pump having a stator comprising:
(a) first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers;
wherein the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces;
(b) a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components;
(c) an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components;
(d) recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members; and
(e) supports for supporting the annular sealing members at the recesses when the annular sealing members are received in the annular channels to resist protrusion of the annular sealing members into the recesses when compressed between mutually engaging end faces.
2. The multistage vacuum pump of claim 1, wherein the supports extend across respective recesses transverse to a plane of the longitudinal faces.
3. The multistage vacuum pump of claim 1, wherein the supports are formed by walls extending from the counter sunk surfaces of respective recesses in alignment with the annular channels.
4. The multistage vacuum pump of claim 1, wherein the annular channels have a channel width for receiving the annular sealing members and the supports have a support width which is less than the channel width to allow sealant in the recesses to contact the annular sealing members.
5. The multistage vacuum pump of claim 4, wherein on both sides of each support a space is provided between the support and the end face so that sealant can flow and directly contact and seal against an annular sealing member in the annular channel on both sides of the support.
6. The multistage vacuum pump of claim 1, wherein the depth of the recesses is approximately equal to the depth of the longitudinal channels to allow sealant to flow around the longitudinal sealing members to prevent the formation of a leakage path.
7. A multi-stage vacuum pump having a stator comprising:
(a) first and second half-shell stator components and first and second end stator components which when assembled define a plurality of pumping chambers;
wherein the half-shell components being assembled together along respective pairs of mutual engaging longitudinal faces and the end stator components being assembled at the ends of the half-shell components at respective pairs of mutual engaging end faces;
(b) a longitudinal channel counter-sunk in at least one longitudinal face of each pair of mutual engaging longitudinal faces for receiving respective longitudinal sealing members for sealing between the half-shell components;
(c) an annular channel counter-sunk in at least one end face of each pair of mutual engaging end faces for receiving respective sealing members for sealing between the half-shell components and the end stator components; and (d) shallow recesses counter-sunk at the end portions of the longitudinal faces for receiving a sealant for sealing between the longitudinal sealing members and the annular sealing members;
wherein the depth of the shallow recesses is less than the depth of the longitudinal channels and counter-sunk into each recess is at least one deep pocket extending from the longitudinal channel for allowing sealant to flow around a longitudinal sealing member received in the longitudinal channel for preventing the formation of a leakage path.
8. The multistage vacuum pump of claim 7, wherein the deep pockets have a depth approximately equal to the depth of the longitudinal channels.
9. The multistage vacuum pump of claim 7, wherein the deep pockets are spaced from the annular channels so that the spacing between the half shell stator components at the annular channels is defined by the depth of the shallow recesses for resisting protrusion of annular sealing members received in the annular channels protruding between the half shell stator components.
10. The multistage vacuum pump of claim 7, wherein deep pockets extend laterally from both sides of respective longitudinal channels.
US15/326,658 2014-07-21 2015-07-17 Vacuum pump Abandoned US20170204858A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1412924.1A GB2528450A (en) 2014-07-21 2014-07-21 Vacuum pump
GB1412924.1 2014-07-21
PCT/GB2015/052068 WO2016012758A1 (en) 2014-07-21 2015-07-17 Vacuum pump

Publications (1)

Publication Number Publication Date
US20170204858A1 true US20170204858A1 (en) 2017-07-20

Family

ID=51494905

Family Applications (1)

Application Number Title Priority Date Filing Date
US15/326,658 Abandoned US20170204858A1 (en) 2014-07-21 2015-07-17 Vacuum pump

Country Status (4)

Country Link
US (1) US20170204858A1 (en)
EP (1) EP3172406B1 (en)
GB (1) GB2528450A (en)
WO (1) WO2016012758A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220299030A1 (en) * 2019-07-17 2022-09-22 Pfeiffer Vacuum Pump unit

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201621618D0 (en) * 2016-12-19 2017-02-01 Edwards Ltd Pump sealing
GB2559136B (en) * 2017-01-25 2020-04-15 Edwards Ltd Vacuum pump with biased stator seals and method of manufacture thereof
GB2588424B (en) * 2019-10-23 2022-01-26 Edwards Ltd Pump apparatus
FR3107933B1 (en) * 2020-03-04 2022-03-04 Pfeiffer Vacuum Tech Ag Dry vacuum pump and method of manufacture
FR3112174B1 (en) * 2021-02-24 2022-07-22 Pfeiffer Vacuum Dry vacuum pump
GB2622602A (en) * 2022-09-22 2024-03-27 Edwards Ltd Sealing gasket

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020155014A1 (en) * 2000-08-21 2002-10-24 Pascal Durand Pressure seal for a vacuum pump
US8182252B2 (en) * 2007-10-30 2012-05-22 Moyno, Inc. Progressing cavity pump with split stator
US20150308430A1 (en) * 2012-11-30 2015-10-29 Edwards Limited Vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6005214A (en) * 1996-06-26 1999-12-21 Cramer; Margaret D. Method of making wear resistant material lined housings
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
GB2512095B (en) * 2013-03-20 2015-07-08 Edwards Ltd Pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020155014A1 (en) * 2000-08-21 2002-10-24 Pascal Durand Pressure seal for a vacuum pump
US8182252B2 (en) * 2007-10-30 2012-05-22 Moyno, Inc. Progressing cavity pump with split stator
US20150308430A1 (en) * 2012-11-30 2015-10-29 Edwards Limited Vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220299030A1 (en) * 2019-07-17 2022-09-22 Pfeiffer Vacuum Pump unit
US11815096B2 (en) * 2019-07-17 2023-11-14 Pfeiffer Vacuum Pump unit

Also Published As

Publication number Publication date
WO2016012758A1 (en) 2016-01-28
GB2528450A (en) 2016-01-27
EP3172406B1 (en) 2018-09-12
GB201412924D0 (en) 2014-09-03
EP3172406A1 (en) 2017-05-31

Similar Documents

Publication Publication Date Title
EP3172406B1 (en) Vacuum pump
US9551333B2 (en) Vacuum pump with longitudinal and annular seals
EP1600636A3 (en) Progressing cavity pump or motor
US9879677B2 (en) Vacuum pump
US7938617B2 (en) Pressure test method of double suction volute pump
US20140286806A1 (en) Multi-stage vacuum pump
US20170204859A1 (en) Vacuum pump
KR20140033307A (en) Dual outlet pump
US20180231001A1 (en) Vacuum pump
JP5385826B2 (en) Airtight container, vacuum pump
JP5979935B2 (en) pump
CN107850079B (en) Pump and method of operating the same
JP2023514693A (en) dry vacuum pump
US20210324843A1 (en) Pump device and method for at least locally sealing the pump device
JP2008008317A (en) Split type fluid equipment member and split type inside mechanical seal
JPH01147178A (en) Internal gear pump or motor
WO2022229652A3 (en) Stator for a vacuum pump
US20170058894A1 (en) Pump with shaped face seal
JP2005344538A (en) Gear pump
JP2010121691A (en) Seal structure of three-plane mating part

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION