JP5385826B2 - Airtight container, vacuum pump - Google Patents

Description

  The present invention relates to a pump case sealing method.

As disclosed in Patent Document 1, a vacuum pump such as a dry pump generally has an exhaust space and an airtight container that is a pump case, and the exhaust space is disposed inside the airtight container. The code | symbol 102 of FIG. 14 has shown schematic structure of the airtight container.
Usually, the airtight container 102 includes a cylindrical case 130 and side covers 141 and 142, and the cylindrical case 130 includes a semi-cylindrical upper case 131 and a lower case 132.
Conventionally, when assembling an airtight container, a special-shaped special packing 110 shown in FIGS. 12, 13, and 14 (b) is used.
This special-shaped packing 110 has two circular packing portions 110a and 110b and two string-like packing portions 110c, and the two circular packing portions 110a and 110b are arranged in parallel, One end of the string-like packing portion 110c is fixed to one circular packing portion 110a, and the other end is fixed to the other circular packing portion 110b.

The upper case 131 and the lower case 132 are provided with a string-like packing portion 110c of the special-shaped packing 110 between them to form a cylindrical case 130. A circular packing portion is provided between the cylindrical case 130 and the side covers 141, 142. 110a and 110b are respectively arranged and assembled to constitute an airtight container 102, and the special case packing 110 is used to seal the space between the upper case 131 and the lower case 132 and between the cylindrical case 130 and the side covers 141 and 142. It is supposed to be.
However, when the upper case 131 and the lower case 132 are combined and tightened and fixed with screws, the string-like packing portion 110c is pressed in the width direction and compressed to increase the length. Therefore, the portion where the string-like packing portion 110c and the circular packing portions 110a and 110b are connected does not fit in the ring-shaped groove in which the circular packing portions 110a and 110b are arranged, and when the side covers 141 and 142 are attached to the cylindrical case 130 There is a problem that the connecting portion of the string packing portion 110c and the circular packing portions 110a and 110b is sandwiched between the cylindrical case 130 and the side covers 141 and 142.

JP 2005-171766 A

  The present invention was created to solve the above-described disadvantages of the prior art, and an object of the present invention is to provide a technology capable of manufacturing an airtight container at low cost by assembling parts at low cost.

In order to solve the above-mentioned problems, the present invention has a cylindrical casing body, and has first and second bottom plates, and the casing body is positioned at a first opening located at one end and at the other end. The first and second annular joint surfaces respectively surrounding the second opening, and the housing body includes a plurality of housing parts into which the first and second annular joint surfaces are divided when separated. The casing main body is configured such that a string-like elastic member is disposed between the band-shaped joint surfaces of the adjacent casing sections and the casing sections are pressed against each other, and the first and second bottom plates and the first An airtight container in which an annular elastic member is disposed between the first and second annular joint surfaces and the first and second bottom plates and the casing body are pressed, and the annular elastic member Has an accommodation hole, and the string-like elastic member is an airtight container having both ends inserted into the accommodation hole.
In the present invention, at least one of the annular elastic members includes an annular elastic member main body and a connection elastic member in which the accommodation hole is formed, and the elastic member main body and the connection elastic member are separable. The elastic member main body and the connection elastic member are pressed in close contact with each other, and between the first annular joint surface and the first bottom plate, or the second annular joint surface and the It is an airtight container pressed tightly between the second bottom plates.
In addition, the present invention includes any one of the above airtight containers and an exhaust space that is disposed in the airtight container and evacuates gas molecules that have entered the airtight container from an air inlet formed in the airtight container. It is a vacuum pump.

Even if the string-like elastic member is pressed by the housing portion to extend its length, the position of the tip only moves within the accommodation hole of the annular elastic member, and it is possible to prevent the packing from being caught during assembly of the hermetic container.
Costs can be reduced because string-type packing and circular packing that are easily available can be used instead of molded special-shaped packing.
In general, it can be applied to a container or piping composed of three or more parts and has a structure in which the surfaces to be sealed intersect, so that it can be used in many industrial fields such as pressurization and vacuum.

(a): Internal front view of the vacuum pump of the present invention (b) Internal side view (a)-(c): Typical perspective view for demonstrating the airtight container of this invention (a), (b): Schematic exploded view for explaining an airtight container of the present invention (a), (b): Plan view and bottom view of an example of the main body (c), (d): Front view of the first and second housing parts of the housing body (a), (b): string-like elastic member (c), (d): annular elastic member (a)-(c): The figure for demonstrating the positional relationship of a string-like elastic member and an annular elastic member (a), (b): Plan view and bottom view of another example of the main body (c), (d): Front view of the first and second housing parts of the housing body (a)-(e): The figure for demonstrating the positional relationship between a connection elastic member and a cyclic | annular elastic member. (a), (b): The figure for demonstrating the positional relationship between a string-like elastic member, a connection elastic member, and an annular elastic member Plan view of a conventional elastic member Side view of a conventional elastic member (a): Conventional airtight container (b): Conventional elastic member (c): Exploded view of conventional airtight container

1 (a) and 1 (b), reference numeral 1 denotes a vacuum pump according to the present invention, FIG. 1 (a) is a front view showing the inside thereof, and FIG. It is the side view shown.
The vacuum pump 1 has an airtight container 2 and an exhaust space 3.
The vacuum pump 1 is a Roots-type vacuum pump, and the exhaust space 3 has two rotary shafts 13a and 13b that are spaced apart from each other.
The hermetic container 2 has a bottomed cylindrical shape, and is disposed so that two bottom surfaces of the bottomed cylindrical shape are erected vertically.
Exhaust space 3 has a plurality of exhaust chambers 91 _to 93 ₆ arranged in a row in the lateral direction. Rotary shaft 13a, 13b are arranged horizontally, each exhaust chamber 91 _to 93 ₆ penetrates hermetically, attached to a motor 5 whose one end is disposed in the atmosphere.
Each rotary shaft 13a, the 13b, trilobal rotor 4a having convex portions and between the recess by three _{1 ~4a 6,} 4b _{1 ~4b 6} are respectively attached. Each of the three-lobe rotors 4a _{1 to} 4a ₆ , 4b _{1 to} 4b ₆ is set as a pair and is disposed in the exhaust chambers 9 _{1 to} 9 ₆ one by one. In FIG. 1 (b), the three-leaf rotors 4a _{1 to} 4a ₆ and 4b _{1 to} 4b ₆ are omitted.

The motor 5 is configured to rotate the rotating shafts 13a and 13b in the reverse direction, and the pair of three-leaf rotors 4a _{1 to} 4a ₆ and 4b _{1 to} 4b ₆ are rotated by the rotation of the rotating shafts 13a and 13b. The projection and the recess are engaged with each other and can be rotated in opposite directions.
The inner wall surface of the airtight container 2, a pair of trilobal rotor 4a ₁ to 4A ₆ to rotate, 4b ₁ ~4b ₆ is formed so as to close a small gap, the exhaust chamber 9 ₁ 9 when the trilobal set in the ₆ rotor _{4a 1 ~4a 6, 4b 1 ~4b} 6 are rotated in the opposite directions, the portion trilobal rotor _{4a 1 ~4a 6, 4b 1 ~4b} 6 starts to engage outlet 7 _{1-7 6} is provided, meshing inlet ₆₁ through ₆ are provided in a portion which is released, gas molecules entering the exhaust chamber 9 _to 93 ₆ from the inlet port ₆₁ through ₆ It is compressed by the rotation of the trilobal rotor _{4a 1 ~4a 6, 4b 1 ~4b} 6, trilobal rotor _{4a 1 ~4a 6, 4b 1 ~4b} 6 and outlet 7 ₁ through the space between the airtight container 2 ~ 7 is configured to be moved to ₆ .

In the exhaust chamber 91 _to 93 ₆ in a row, the inlet port 6 ₁ of the exhaust chamber 9 ₁ of the first stage is connected to an exhaust port of the high vacuum pump such as a vacuum chamber and the turbomolecular pump exhaust target, other inlet 6 _{2-6 6} of the exhaust chamber 9 _{2-9 6} is connected to the exhaust port 7 _{1-7 5} of the preceding exhaust chamber 91 _to 93 _5, and an exhaust port of the exhaust chamber 9 ₆ the final stage 7 ₆ is open to the atmosphere.
Therefore, when the pair of three-leaf rotors 4a _{1 to} 4a ₆ , 4b _{1 to} 4b ₆ rotate in the reverse directions in the exhaust chambers 9 _{1 to} 9 ₆ , the first exhaust port 9 ₁ to the first exhaust chamber 9 ₁ It enters the gas within moves while compressing the respective exhaust chamber 9 _to 93 _6, are released to the atmosphere from the exhaust port 7 ₆ of the exhaust chamber 9 ₆ the final stage.

Next, the structure of the airtight container 2 will be described.
2A is a perspective view schematically showing the hermetic container 2, and FIGS. 2B, 2C, 3A, and 3B are diagrams for explaining the structure of the hermetic container 2. FIG. FIG. 2 (a) to 2 (c), FIGS. 3 (a) and 3 (b), the inlet port 6 ₁ , the exhaust port 7 ₆ , the through-hole through which the rotary shafts 13a and 13b pass are omitted, and the outer shape is also shown. It is simplified and represented by a bottomed cylinder.
As shown in FIGS. 2A to 2C, the airtight container 2 includes a bottomless cylindrical housing body 30 and a first bottom plate for covering the first opening 8 a that is one end of the housing body 30. 41 and a second bottom plate 42 for covering the second opening 8b which is the other end.

When the one end and the other end of the housing body 30 are referred to as the first and second annular joint surfaces 3a and 3b, the first and second annular joint surfaces 3a and 3b correspond to the first and second bottom plates 41 and 42, respectively. The first and second connection planes 41a and 42b are in close contact with each other.
The housing body 30 can be disassembled, and a plurality of housing portions whose both end portions are a part of the first and second annular joint surfaces 3a and 3b have the thickness of the housing portion as a width, and the first and second The belt-shaped joining surfaces having the length of the distance between the annular joining surfaces 3a and 3b are in contact with each other.
Here, as shown in FIGS. 3 (a) and 3 (b), the horizontally disposed housing body 30 is composed of first and second housing portions 31 and 32 that are divided into two parts.
When the band-shaped joint surfaces of the first housing part 31 are referred to as first band-shaped joint surfaces 31c and 31c, and the band-shaped joint surfaces of the second housing part 32 are referred to as second band-shaped joint surfaces 32c and 32c, In the belt-like joining surfaces 32c and 32c, the first and second linear grooves 32f and 32f are exposed so that the inside of the groove is exposed to the first and second annular joining surfaces 3a and 3b partially at both ends. Are formed one by one along the direction in which the belt-like bonding surfaces 31c, 31c, 32c, 32c extend.
The linear grooves 32f and 32f are arranged between the longitudinal edges of the second strip-shaped joint surfaces 32c and 32c, and the longitudinal edges of the second strip-shaped joint surfaces 32c and 32c are not chipped. .

In addition, the first and second annular joint surfaces 3a and 3b of the casing body 30 are provided with annular grooves 3d and 3e surrounding the first and second openings 8a and 8b between the inner periphery and the outer periphery of the casing body 30. When the first and second housing parts 31 and 32 are disassembled from the state constituting the housing body 30, the first and second annular joint surfaces 3a and 3b are divided into half-annular joints. Surfaces 31a, 32a, 31b, and 32b are formed, and the annular grooves 3d and 3e are divided into half-annular grooves 31d, 32d, 31e, and 32e. FIGS. 5C and 5D show semi-annular grooves 31d, 32d, 31e, and 32e.
The end portions of the linear grooves 32f and 32f are connected to the end portions of the semi-annular grooves 32d and 32e. When the housing body 30 is constituted by the first and second housing portions 31 and 32, the first and second The strip-shaped joint surfaces 31c and 31c of the second housing portions 31 and 32 and the linear grooves 32f and 32f face each other to form a straight tube. Reference numeral 16 in FIGS. 4A and 4B denotes the tube.
A string-like elastic member 21 as shown in FIG. 6 (a) is arranged one by one between the band-shaped joining surfaces 31c, 31c facing each other and the linear grooves 32f, 32f, and the exhaust space 3 is located inside the housing body 30. When the first and second belt-like joining surfaces 31c, 31c, 32c and 32c of the first and second housing parts 31 and 32 are brought into close contact with each other to form the housing body 30, A string-like elastic member 21 is arranged one by one in the pipes 16 and 16 to form a housing body 30 in a state where the exhaust space 3 is arranged.

A cross-sectional view taken along line AA of the string-like elastic member 21 in FIG. 6A is shown in FIG. The cross-sectional shape of the string-like elastic member 21 is circular, and the diameter thereof is larger than the depth of the linear grooves 32f and 32f.
Therefore, when the first and second strip-shaped joining surfaces 31c, 31c, 32c, and 32c of the first and second housing portions 31 and 32 are brought into contact with each other, the string-like elastic member 21 is It is pressed and deformed by the housing parts 31 and 32. Since the string-like elastic member 21 is in close contact with the first and second casing portions 31 and 32 when screwed so that the state is maintained, the first and second casing portions 31 and 32 are hermetically sealed. Fixed to each other.
When the string-like elastic member 21 is deformed by pressing from the first and second housing portions 31 and 32, the string-like elastic member 21 becomes longer than when not pressed.
The length of the string-like elastic member 21 when pressed at least is longer than the length of the straight pipes 16, 16, and when the housing body 30 is assembled, both ends of the string-like elastic member 21 are It protrudes from the ends of the straight tubular tubes 16 and 16.
Here, the size of the straight tubular tubes 16 and 16 and the diameter of the string-like elastic member 21 are made smaller than the width of the annular grooves 3d and 3e, and the ends of the straight tubular tubes 16 and 16 are The inner and outer peripheries of the annular grooves 3d and 3e located on the bottom surfaces of the annular grooves 3d and 3e and located on the first and second annular joint surfaces 3a and 3b are not chipped and are continuously annular. . Therefore, the end of the string-like elastic member 21 protrudes from the bottom surface of the annular grooves 3 d and 3 e of the housing body 30.

FIG. 6C shows the annular elastic member 22 disposed in the annular grooves 3d and 3e.
The annular elastic member 22 has a circular cross-sectional shape as shown in FIG. 4D, which is a sectional view taken along the line BB, and the diameter thereof is larger than the diameter of the string-like elastic member 21. The member 22 is formed with a receiving hole 12 having a size that allows the end of the string-like elastic member 21 to enter the surface that contacts the housing body 30 when the member 22 is disposed in the annular grooves 3d and 3e.
Each annular elastic member 22 is formed with the same number of accommodation holes 12 as the number of string-like elastic members 21, and each accommodation hole 12 is arranged when the annular elastic member 22 is disposed in the annular grooves 3d and 3e. The end portions of the string-like elastic member 21 protruding from the bottom surfaces of the annular grooves 3d and 3e are arranged at positions where they are inserted into the receiving holes 12, respectively.
The length of the end of the string-like elastic member 21 protruding from the housing body 30 (here, from the bottom surface of the annular grooves 3d and 3e) is set to be approximately the same as the depth of the receiving hole 12, A portion of the elastic member 21 protruding from the housing body 30 is positioned in the accommodation hole 12.

FIG. 7A shows the positional relationship between the string-like elastic member 21 and the annular elastic member 22 before the end of the string-like elastic member 21 is disposed in the accommodation hole 12, and FIG. Indicates the positional relationship after the placement. FIG. 3C shows the position of the end of the string-like elastic member 21 inside the accommodation hole 12.
Here, the accommodation hole 12 is a through-hole penetrating the annular elastic member 22 in the thickness direction. However, the accommodation hole 12 may be a bottomed hole, and the depth of the accommodation hole 12 is airtight regardless of whether it is a through-hole or a bottomed hole. The depth of the string-like elastic member 21 protruding from the case body 30 when the case body 30 is configured may be deep enough to be accommodated in the accommodation hole 12.
Thus, the diameter of the annular elastic member 22 arranged in the annular grooves 3d and 3e is larger than the depth of the annular grooves 3d and 3e, and the upper part of the annular elastic member 22 is the first and second annular joints. It protrudes above the surfaces 3a and 3b.
In this state, when the first and second bottom plates 41 and 42 are put on and contacted with the annular elastic member 22 and pressed, the joining surfaces 41a and 42b of the first and second bottom plates 41 and 42 are annular elastic member 22. To touch.
Here, the string-like elastic member 21 is merely inserted into the accommodation hole 12, but a curing agent having the same component as the elastic member may be applied to the accommodation hole 12 and cured and bonded.

Here, the joining surfaces 41 a and 42 b of the first and second bottom plates 41 and 42 are flat surfaces, and the flat surface on the bottom plate side contacts the annular elastic member 22.
When the first and second bottom plates 41 and 42 are pressed against the housing body 30, the annular elastic member 22 is deformed, and the housing body 30 and the first and second bottom plates 41 and 42 are connected to the annular elastic member 22. And the annular elastic member 22 is pressed.
A portion where the housing body 30 and the annular elastic member 22 are in close contact with each other, and a portion where the first and second bottom plates 41 and 42 and the annular elastic member 22 are in close contact each have an annular shape. The first and second openings 8a and 8b are surrounded, and the space between the first and second bottom plates 41 and 42 and the housing body 30 is hermetically sealed via the annular elastic member 22, and the external atmosphere and the internal atmosphere are separated. The sealed airtight container 2 is formed. In this state, evacuation is enabled by the operation of the exhaust space 3.
As described above, the accommodation hole 12 is formed in the annular portion of the annular elastic member 22, but the annular portion and the portion in which the accommodation hole is formed may be separated from each other. For example, the same reference numerals are given to the same members as those of the above-described casing main body 30. In the casing main body 50 shown in FIGS. 8 (a), 8 (b), 9 (c) and 9 (d), a straight line is used. End portions of the tubular tubes 16 and 16 are located outside the annular grooves 3d and 3e on the first and second annular joint surfaces 3a and 3b.

Reference numeral 20 in FIGS. 10A to 10D denotes an annular elastic body, which has an annular elastic member main body 23 and a plate-like connecting elastic member 24. The connecting elastic member 24 is provided with a receiving hole 13.
The elastic member main body 23 and the connection elastic member 24 may be configured so as to be integrally formed and cannot be separated, or may be configured to be separated and separated. Here, as shown in FIGS. 10A and 10B, they are configured to be separable.
An auxiliary groove 19 in which the connection elastic member 24 is disposed is provided in the first and second annular joint surfaces 3a and 3b.
The ends of the straight pipes 16 and 16 are located at the bottom of the auxiliary groove 19 and the inside thereof is exposed. The ends of the auxiliary grooves 19 on the annular grooves 3d and 3e side are connected to the annular grooves 3d and 3e. The insides of the straight tubular tubes 16 and 16 are connected to the annular grooves 3d and 3e via the auxiliary grooves 19.

One auxiliary groove 19 is formed across two adjacent semi-annular joint surfaces 31a and 32a (31b and 32b). When the first and second housing parts 31 and 32 are separated, one auxiliary groove 19 is formed. The groove 19 becomes two half auxiliary grooves 18.
On the side surface of the connecting elastic member 24, a concave portion 28 having a semicircular and partial ring shape into which the elastic member main body 23 is fitted is provided.
The end of the string-like elastic member 21 protruding from the straight pipes 16 and 16 of the casing body 50 is inserted into the accommodation hole 13, and the concave portion 28 is directed toward the annular grooves 3d and 3e to assist the connection elastic member 24. Arranged in the groove 19.
In this state, the portion where the recess 28 is formed protrudes into the annular groove 3d or 3e, and as shown in FIGS. 10C and 10D, the annular elastic member body 23 is partially recessed. It is arranged in the annular grooves 3d and 3e in a state where it is fitted in 28.
FIG. 11A shows the positional relationship between the elastic members 21, 23, and 24 in this state.

At both ends in the thickness direction of the concave portion 28, a portion thinner than the portion where the accommodation hole 13 of the connection elastic member 24 is formed is located, and in the portion where the elastic member main body 23 is fitted into the concave portion 28, its connection elasticity The thin portion of the member 24, the portion near the outer periphery of the elastic member main body 23, and the thin portion of the connecting elastic member 24 are laminated in a three-layer structure in the thickness direction. Therefore, when a pressing force is applied to the annular elastic member 20 from the first and second bottom plates 41 and 42 and the casing body 50 in the thickness direction, the three layers are pressed and adhered in the three-layer structure portion. The elastic member body 23 and the connection elastic member 24 are airtight.
The thickness of the portion of the connecting elastic member 24 in which the accommodation hole 13 is formed, the thickness of the three-layer structure, and the thickness of the elastic member main body 23 are made equal to each other. Is constant. The depths of the annular grooves 3d and 3e and the auxiliary groove 19 are the same. Therefore, the height of the annular elastic member 20 above the first and second annular joint surfaces 3a and 3b is constant. .
Of the first and second annular joint surfaces 3a and 3b, the portion where the first and second housing portions 31 and 32 are in contact with each other and the portion where the string-like elastic member 21 is in close contact with the annular elastic member main body 23 The connecting elastic member 24 is in close contact with the portion between the first and second housing portions 31 and 32, and the portion between the first and second housing portions 31 and 32 is hermetically sealed.

As shown in FIG. 10 (e), a cutout 27 is provided in the annular elastic member body 26, and the connecting elastic member 24 having the accommodation hole 13 has a protrusion that is thinner than the thickness of the portion where the accommodation hole 13 is formed. The annular elastic member 20 ′ may be configured by providing the portion 25 and inserting the protruding portion 25 into the notch 27.
In that case, after the housing body 50 is formed, the end portion of the string-like elastic member 21 protruding from the pipes 16 and 16 is accommodated in the accommodation hole 13, and the protruding portion 25 is the bottom surface of the auxiliary groove 19 for connecting parts. The connecting elastic member 24 is disposed in the auxiliary groove 19 so as to be in contact with the bottom surface of the annular groove 3d or 3e, and the protruding portion 25 is partially protruded into the annular groove 3d or 3e. The elastic member main body 24 is arranged in the annular grooves 3d and 3e so as to enter, and an annular elastic member 20 ′ in which a part of the elastic member main body 24 and the protruding portion 25 are stacked is configured.
Also in the case of this annular elastic member 20 ′, the connecting elastic member 24 portion of the annular elastic member 20 ′ is in close contact with the surface of the housing body 50 where the first and second housing parts 31 and 32 are joined, and is airtight. ing. The positional relationship between the elastic members 21, 24, and 26 is shown in FIG.

Although the housing main bodies 30 and 50 are configured with two housing parts (first and second housing parts 31 and 32) as described above, they may be configured with three or more housing parts. In that case, the same number of housing holes as the housing portions are formed in each of the annular elastic members 20, 20 ′, or 22, or the same number of connecting elastic members having one housing hole as the number of housings is used for one annular elastic member. For example, the end of the string-like elastic member disposed between the housing portions may be disposed in the accommodation hole to be airtight.
In addition, although the above demonstrated the case where the inside of the airtight container 2 became a pressure lower than atmospheric pressure, the pressurization space may be arrange | positioned in the airtight container 2 and the inside of the airtight container 2 may become a pressure higher than atmospheric pressure.

In short, the present invention broadly includes the case where the inside of the airtight container 2 is separated from the atmosphere.
In addition, the material which comprises the said string-like elastic member 21, the cyclic | annular elastic members 22,23,26, and the connection elastic member 24 is a rubber-like substance with a deformability and restoring property, such as an elastomer.

DESCRIPTION OF SYMBOLS 1 ... Vacuum pump 2 ... Airtight container 3a ... 1st cyclic | annular joining surface 3b ... 2nd cyclic | annular joining surface 8a ... 1st opening 8b ... 2nd opening 20, 20 ', 22 ... Annular elastic member 21 ... string-like elastic members 23, 26 ... elastic member body 24 ... connecting elastic members 30, 50 ... housing body 31, 32 ... housing part 41 ... first bottom plate 42 ... second Bottom plate

Claims (3)

It has a cylindrical housing body, has first and second bottom plates,
The housing body has first and second annular joint surfaces that respectively surround a first opening located at one end and a second opening located at the other end,
The housing main body has a plurality of housing portions into which the first and second annular joint surfaces are divided when separated, and the housing main body is a string between the belt-like joining surfaces of the adjacent housing portions. A cylindrical elastic member is disposed and the housing parts are pressed against each other;
An annular elastic member is disposed between the first and second bottom plates and the first and second annular joint surfaces, and the first and second bottom plates and the casing body are pressed. An airtight container,
The annular elastic member has a receiving hole,
The string-like elastic member is an airtight container having both ends inserted into the accommodation hole. At least one of the annular elastic members has an annular elastic member main body and a connection elastic member in which the accommodation hole is formed, and the elastic member main body and the connection elastic member are configured to be separable,
The elastic member body and the connecting elastic member are pressed in close contact with each other, and between the first annular joint surface and the first bottom plate, or between the second annular joint surface and the second bottom plate. The airtight container according to claim 1, which is pressed in close contact with each other. An airtight container according to any one of claims 1 and 2, and
A vacuum pump disposed in the hermetic container and having an exhaust space for evacuating gas molecules that have entered the hermetic container from an air inlet formed in the hermetic container.

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