US20100178187A1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- US20100178187A1 US20100178187A1 US12/530,601 US53060108A US2010178187A1 US 20100178187 A1 US20100178187 A1 US 20100178187A1 US 53060108 A US53060108 A US 53060108A US 2010178187 A1 US2010178187 A1 US 2010178187A1
- Authority
- US
- United States
- Prior art keywords
- component
- pump
- rotor
- simo
- ductile iron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/04—Heavy metals
- F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
- F05C2201/0436—Iron
- F05C2201/0439—Cast iron
- F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2201/00—Metals
- F05C2201/90—Alloys not otherwise provided for
Definitions
- Dry vacuum pumps are widely used in industrial processes to provide a clean and/or low -pressure environment for the manufacture of products. Applications include the pharmaceutical, semiconductor and flat panel manufacturing industries. Such pumps include an essentially dry (or oil free) pumping mechanism, but generally also include some components, such as bearings and transmission gears, for driving the pumping mechanism that require lubrication in order to be effective. Examples of dry pumps include Roots, Northey (or “claw”), screw and scroll pumps. Dry pumps incorporating Roots and/or Northey rotor components are commonly multi-stage positive displacement pumps comprising a stator component defining a plurality of pumping chambers each housing a respective pair of intermeshing rotor components. The rotor components are located on contra-rotating shafts, and may have the same type of profile in each chamber or the profile may change from chamber to chamber.
- Iron castings have for a long time been used in the manufacture of stator and rotor components for dry vacuum pumps.
- relatively corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride
- Such corrosion can lead to equipment failure, leakage of process gases and possible process contamination, in addition to the costs associated with the replacement of the pump or the corroded parts and consequential process downtime.
- the present invention provides at least one dry vacuum pump stator component, wherein the stator component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
- the present invention also provides at least one dry vacuum pump rotor component, wherein the rotor component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
- the present invention also provides a dry vacuum pump comprising a stator component and at least one rotor component, wherein the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron alloy.
- SiMo silicon-molybdenum
- the alloy may contain silicon in an amount from about 3.5 to about 5 wt %.
- the alloy may contain molybdenum in an amount from about 0.4 to about 1 wt %.
- the stator component may house first and second intermeshing rotor components adapted for counter-rotation within the stator component.
- the rotor components have a Roots profile, although they could have a Northey or screw profile as required.
- the pump may be in the form of a multi-stage pump in which the stator component defines a plurality of interconnected pumping chambers arranged in series and each housing respective rotor components formed from SiMo ductile iron alloy.
- the intermeshing rotor components may be located on respective shafts, with the pump comprising a gear assembly for transmitting torque from one shaft to another, with at least one gear of the gear assembly preferably being formed from SiMo ductile iron alloy.
- the pump may be in the form of a scroll pump in which the stator component comprises a fixed scroll member having an end plate with a first spiral wrap extending therefrom, and said at least one rotor component comprises an orbital scroll member having an end plate with a second spiral wrap extending therefrom to intermesh with the first spiral wrap.
- the scroll members is preferably formed from SiMo iron alloy.
- FIG. 1 is a cross-section through a multi-stage dry vacuum pump
- FIG. 2 is a view along line A-A in FIG. 1 .
- a multi-stage dry vacuum pump 10 comprises a stator component 12 , preferably formed from silicon-molybdenum (SiMo) ductile iron alloy, having a series of walls that define a plurality of pumping chambers 14 , 16 , 18 , 20 , 22 .
- An inlet conduit 24 for conveying gas to be pumped to the inlet pumping chamber 14 , and an exhaust conduit 26 for exhausting pumped gas from the exhaust pumping chamber 22 are also formed in the stator 12 .
- Passages 28 , 30 , 32 and 34 formed in the stator 12 connect the pumping chambers 14 , 16 , 18 , 20 , 22 in series.
- the stator 12 houses a first shaft 36 and, spaced therefrom and parallel thereto, a second shaft 38 .
- Bearings 40 for supporting the shafts 36 , 38 are provided in the end plates 42 , 44 of the stator 12 .
- One of the shafts 36 is connected to a drive motor 46 , the shafts being coupled together by means of timing gears 47 so that in use the shafts 36 , 38 rotate at the same speed but in opposite directions, as indicated by arrows 48 and 50 in FIG. 2 .
- a gear box 52 attached to the side of the pump 10 contains oil 54 for lubricating the timing gears 47 .
- the timing gears 47 may be formed from SiMo ductile iron alloy.
- the shafts 36 , 38 support respective rotor components 56 , 58 , which may also be formed from SiMo ductile iron alloy.
- the rotors 56 , 58 have a Roots-type profile within each pumping chamber, although a mixture of Roots and Northey-type profiles may be provided within the pump 10 .
- the rotors 56 , 58 are located in each pumping chamber relative to an internal surface of the stator 12 such that the rotors 56 , 58 can act in an intermeshing manner known per se.
- gas is urged into the pump 10 through the inlet conduit 24 and passes into the inlet pumping chamber 14 .
- the gas is compressed by the rotors 56 , 58 located within the inlet pumping chamber 14 , and is fed by passage 28 into the next pumping chamber 16 .
- the gas fed in the pumping chamber 16 is similarly compressed by the rotors 56 , 58 therein, and fed by the passage 30 to the next pumping chamber 18 .
- Similar gas compressions take place in the pumping chambers 18 , 20 and 22 , with the pumped gas finally being exhaust from the pump 10 through exhaust conduit 26 .
- the SiMo ductile iron alloy preferably contains silicon from about 3.5 to about 5 wt %, and/or molybdenum in an amount from about 0.4 to about 1 wt %.
- SiMo ductile iron alloy to manufacture the stator component 12 and/or the rotor components 56 , 58 of the pump 10 makes the pump 10 particularly suitable for pumping corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride.
- SiMo ductile iron alloy has superior hardness, specific strength ratio and F 2 corrosion susceptibility. This can enable the stator and rotor components, and the timing gears, to have relatively high wear and corrosion resistance with reduced component weight and costs for equivalent or improved performances.
Abstract
A dry vacuum pump comprises a stator component and at least one rotor component. To improve the tolerance of the pump to corrosive gases passing through the pump, the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron.
Description
- Dry vacuum pumps are widely used in industrial processes to provide a clean and/or low -pressure environment for the manufacture of products. Applications include the pharmaceutical, semiconductor and flat panel manufacturing industries. Such pumps include an essentially dry (or oil free) pumping mechanism, but generally also include some components, such as bearings and transmission gears, for driving the pumping mechanism that require lubrication in order to be effective. Examples of dry pumps include Roots, Northey (or “claw”), screw and scroll pumps. Dry pumps incorporating Roots and/or Northey rotor components are commonly multi-stage positive displacement pumps comprising a stator component defining a plurality of pumping chambers each housing a respective pair of intermeshing rotor components. The rotor components are located on contra-rotating shafts, and may have the same type of profile in each chamber or the profile may change from chamber to chamber.
- Iron castings have for a long time been used in the manufacture of stator and rotor components for dry vacuum pumps. However, in the semiconductor industries the increasing use of high flow rates of relatively corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride has lead to severe corrosion, and therefore relatively short lifetime, of, cast iron stator and rotor components. Such corrosion can lead to equipment failure, leakage of process gases and possible process contamination, in addition to the costs associated with the replacement of the pump or the corroded parts and consequential process downtime.
- In view of this, it is known to passively protect these components by the formation of a resin or polymeric coating of a fluoropolymer or polyimide material on the component surfaces which are exposed to the corrosive gases. Such coatings have a tendency to degrade with time, with the resultant peeling or flaking of the coating exposing the underlying cast iron to the corrosive gases. Another alternative is to form these components from a nickel-rich cast iron, for example ductile Ni-resist, or a stainless steel having superior corrosion resistance. However, Ni-resist cast iron and stainless steel are relatively expensive and s difficult to machine, and so do not provide cost-effective options for use in the manufacture of the rotor and stator components.
- The present invention provides at least one dry vacuum pump stator component, wherein the stator component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
- The present invention also provides at least one dry vacuum pump rotor component, wherein the rotor component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
- The present invention also provides a dry vacuum pump comprising a stator component and at least one rotor component, wherein the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron alloy.
- The alloy may contain silicon in an amount from about 3.5 to about 5 wt %. The alloy may contain molybdenum in an amount from about 0.4 to about 1 wt %.
- The stator component may house first and second intermeshing rotor components adapted for counter-rotation within the stator component. In the preferred embodiment, the rotor components have a Roots profile, although they could have a Northey or screw profile as required.
- The pump may be in the form of a multi-stage pump in which the stator component defines a plurality of interconnected pumping chambers arranged in series and each housing respective rotor components formed from SiMo ductile iron alloy. The intermeshing rotor components may be located on respective shafts, with the pump comprising a gear assembly for transmitting torque from one shaft to another, with at least one gear of the gear assembly preferably being formed from SiMo ductile iron alloy.
- Alternatively, the pump may be in the form of a scroll pump in which the stator component comprises a fixed scroll member having an end plate with a first spiral wrap extending therefrom, and said at least one rotor component comprises an orbital scroll member having an end plate with a second spiral wrap extending therefrom to intermesh with the first spiral wrap. Each of the scroll members is preferably formed from SiMo iron alloy.
- Preferred features of the present invention will now be described, by way of example only, with reference to the following drawings, in which:
-
FIG. 1 is a cross-section through a multi-stage dry vacuum pump; and -
FIG. 2 is a view along line A-A inFIG. 1 . - With reference to
FIGS. 1 and 2 , a multi-stagedry vacuum pump 10 comprises astator component 12, preferably formed from silicon-molybdenum (SiMo) ductile iron alloy, having a series of walls that define a plurality ofpumping chambers inlet conduit 24 for conveying gas to be pumped to the inlet pumping chamber 14, and anexhaust conduit 26 for exhausting pumped gas from theexhaust pumping chamber 22, are also formed in thestator 12.Passages stator 12 connect thepumping chambers - The
stator 12 houses afirst shaft 36 and, spaced therefrom and parallel thereto, asecond shaft 38.Bearings 40 for supporting theshafts end plates stator 12. One of theshafts 36 is connected to adrive motor 46, the shafts being coupled together by means oftiming gears 47 so that in use theshafts arrows FIG. 2 . Agear box 52 attached to the side of thepump 10 containsoil 54 for lubricating thetiming gears 47. Thetiming gears 47 may be formed from SiMo ductile iron alloy. - Within each pumping chamber, the
shafts respective rotor components rotors pump 10. Therotors stator 12 such that therotors - In use, gas is urged into the
pump 10 through theinlet conduit 24 and passes into the inlet pumping chamber 14. The gas is compressed by therotors passage 28 into thenext pumping chamber 16. The gas fed in thepumping chamber 16 is similarly compressed by therotors passage 30 to thenext pumping chamber 18. Similar gas compressions take place in thepumping chambers pump 10 throughexhaust conduit 26. - The SiMo ductile iron alloy preferably contains silicon from about 3.5 to about 5 wt %, and/or molybdenum in an amount from about 0.4 to about 1 wt %.
- The use of SiMo ductile iron alloy to manufacture the
stator component 12 and/or therotor components pump 10 makes thepump 10 particularly suitable for pumping corrosive gases such as chlorine, boron trichloride, hydrogen bromide, fluorine and chlorine trifluoride. In comparison to the more expensive Ni-resist material, which are currently around four to five times more expensive than SiMo ductile iron alloy, SiMo ductile iron alloy has superior hardness, specific strength ratio and F2 corrosion susceptibility. This can enable the stator and rotor components, and the timing gears, to have relatively high wear and corrosion resistance with reduced component weight and costs for equivalent or improved performances.
Claims (10)
1. A dry vacuum pump stator component, wherein the stator component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
2. A dry vacuum pump rotor component, wherein the rotor component is formed from silicon-molybdenum (SiMo) ductile iron alloy.
3. A dry vacuum pump comprising a stator component and at least one rotor component, wherein the stator component and/or said at least one rotor component are formed from silicon-molybdenum (SiMo) ductile iron alloy.
4. The pump according to claim 3 , wherein the alloy contains silicon in an amount from about 3.5 to about 5 wt %.
5. The pump according to claim 3 , wherein the alloy contains molybdenum in an amount from about 0.4 to about 1 wt %.
6. The pump according to claim 3 , wherein said at least one rotor component has one of a screw, Roots or Northey profile.
7. The pump according to claim 6 , comprising first and second intermeshing rotor components adapted for counter-rotation within the stator component.
8. The pump according to claim 7 , wherein intermeshing rotor components are located on respective shafts, the pump comprising a gear assembly for transmitting torque from one shaft to another, at least one gear of the gear assembly being formed from SiMo ductile iron alloy.
9. The pump according to claim 3 , in the form of a multi-stage dry vacuum pump in which the stator component defines a plurality of interconnected pumping chambers each housing a respective pair of rotor components each formed from SiMo ductile iron alloy.
10. The pump according to claim 3 , in the form of a scroll pump in which the stator component comprises a fixed scroll member having an end plate with a first spiral wrap extending therefrom, and said at least one rotor component comprises an orbital scroll member having an end plate with a second spiral wrap extending therefrom to intermesh with the first spiral wrap.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0705971.0 | 2007-03-28 | ||
GBGB0705971.0A GB0705971D0 (en) | 2007-03-28 | 2007-03-28 | Vacuum pump |
PCT/GB2008/050128 WO2008117082A1 (en) | 2007-03-28 | 2008-02-26 | Vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
US20100178187A1 true US20100178187A1 (en) | 2010-07-15 |
Family
ID=38050354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/530,601 Abandoned US20100178187A1 (en) | 2007-03-28 | 2008-02-26 | Vacuum pump |
Country Status (6)
Country | Link |
---|---|
US (1) | US20100178187A1 (en) |
EP (1) | EP2126361A1 (en) |
JP (1) | JP2010522843A (en) |
KR (1) | KR20100014610A (en) |
GB (1) | GB0705971D0 (en) |
WO (1) | WO2008117082A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10641272B2 (en) * | 2014-03-17 | 2020-05-05 | Ebara Corporation | Vacuum pump with abatement function |
US20210140430A1 (en) * | 2017-06-17 | 2021-05-13 | Leybold Gmbh | Multi-stage rotary piston pump |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0907298D0 (en) * | 2009-04-29 | 2009-06-10 | Edwards Ltd | Vacuum pump |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4432812A (en) * | 1980-04-21 | 1984-02-21 | Caterpillar Tractor Co. | Drive train gear of lower bainite alloy steel |
US5277562A (en) * | 1991-09-17 | 1994-01-11 | Matsushita Electric Industrial Co., Ltd. | Scroll fluid machine and producing method for the same |
US20020150481A1 (en) * | 1996-11-01 | 2002-10-17 | Medis El Ltd. | Toroidal compressor |
US6485274B2 (en) * | 1999-05-18 | 2002-11-26 | Sterling Fluid Systems (Germany) Gmbh | Displacement machine for compressible media |
US6508639B2 (en) * | 2000-05-26 | 2003-01-21 | Industrial Technology Research Institute | Combination double screw rotor assembly |
US20030124011A1 (en) * | 2001-12-31 | 2003-07-03 | Industrial Technology Research Institute | Dry vacuum pump |
US20040022646A1 (en) * | 2000-08-02 | 2004-02-05 | Reinhard Garczorz | Compressor |
US20060083651A1 (en) * | 2004-10-01 | 2006-04-20 | Lim Moon G | Composite dry vacuum pump having roots rotor and screw rotor |
US20060150406A1 (en) * | 2002-01-24 | 2006-07-13 | Scancarello Marc J | Powder metal scrolls |
US7140846B2 (en) * | 2002-03-20 | 2006-11-28 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump having main and sub pumps |
US20090214368A1 (en) * | 2005-09-16 | 2009-08-27 | Nigel Paul Schofield | Vacuum Pump |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3831115B2 (en) * | 1998-04-06 | 2006-10-11 | 大晃機械工業株式会社 | Dry vacuum pump |
JP3936849B2 (en) * | 2001-05-16 | 2007-06-27 | スズキ株式会社 | Ferrite-based spheroidal graphite cast iron and exhaust system parts using the same |
JP2004293377A (en) * | 2003-03-26 | 2004-10-21 | Aisin Seiki Co Ltd | Multi-stage dry pump |
JP2005098210A (en) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | Multistage dry pump |
-
2007
- 2007-03-28 GB GBGB0705971.0A patent/GB0705971D0/en not_active Ceased
-
2008
- 2008-02-26 KR KR1020097020136A patent/KR20100014610A/en not_active Application Discontinuation
- 2008-02-26 JP JP2010500363A patent/JP2010522843A/en active Pending
- 2008-02-26 EP EP08709648A patent/EP2126361A1/en not_active Withdrawn
- 2008-02-26 WO PCT/GB2008/050128 patent/WO2008117082A1/en active Application Filing
- 2008-02-26 US US12/530,601 patent/US20100178187A1/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4432812A (en) * | 1980-04-21 | 1984-02-21 | Caterpillar Tractor Co. | Drive train gear of lower bainite alloy steel |
US5277562A (en) * | 1991-09-17 | 1994-01-11 | Matsushita Electric Industrial Co., Ltd. | Scroll fluid machine and producing method for the same |
US20020150481A1 (en) * | 1996-11-01 | 2002-10-17 | Medis El Ltd. | Toroidal compressor |
US6485274B2 (en) * | 1999-05-18 | 2002-11-26 | Sterling Fluid Systems (Germany) Gmbh | Displacement machine for compressible media |
US6508639B2 (en) * | 2000-05-26 | 2003-01-21 | Industrial Technology Research Institute | Combination double screw rotor assembly |
US20040022646A1 (en) * | 2000-08-02 | 2004-02-05 | Reinhard Garczorz | Compressor |
US20030124011A1 (en) * | 2001-12-31 | 2003-07-03 | Industrial Technology Research Institute | Dry vacuum pump |
US20060150406A1 (en) * | 2002-01-24 | 2006-07-13 | Scancarello Marc J | Powder metal scrolls |
US7140846B2 (en) * | 2002-03-20 | 2006-11-28 | Kabushiki Kaisha Toyota Jidoshokki | Vacuum pump having main and sub pumps |
US20060083651A1 (en) * | 2004-10-01 | 2006-04-20 | Lim Moon G | Composite dry vacuum pump having roots rotor and screw rotor |
US20090214368A1 (en) * | 2005-09-16 | 2009-08-27 | Nigel Paul Schofield | Vacuum Pump |
Non-Patent Citations (1)
Title |
---|
Ductil Iron Data for Design Enginner, http://web.archive.org/web/20051230043723/http://www.ductile.org/didata/Section5/5intro.htm Date: 12/30/2005 using weyback machine * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10641272B2 (en) * | 2014-03-17 | 2020-05-05 | Ebara Corporation | Vacuum pump with abatement function |
US20210140430A1 (en) * | 2017-06-17 | 2021-05-13 | Leybold Gmbh | Multi-stage rotary piston pump |
Also Published As
Publication number | Publication date |
---|---|
WO2008117082A1 (en) | 2008-10-02 |
EP2126361A1 (en) | 2009-12-02 |
JP2010522843A (en) | 2010-07-08 |
KR20100014610A (en) | 2010-02-10 |
GB0705971D0 (en) | 2007-05-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG174048A1 (en) | Vacuum pump | |
JP5073754B2 (en) | Multistage dry pump | |
US20100158728A1 (en) | Vacuum pump | |
GB2499217A (en) | Vacuum pump with recirculation valve | |
US20100178187A1 (en) | Vacuum pump | |
GB2438034A (en) | Screw Compressors with rotor spacer for high input power | |
US20210088044A1 (en) | Driving Structure of Three-Axis Multi-Stage Roots Pump | |
WO2006061558A1 (en) | Vacuum pump with heat sink on rotor shaft | |
WO2017187137A1 (en) | Vacuum pump component | |
KR20140049555A (en) | Roots pump | |
WO2021175680A1 (en) | Dry vacuum pump and method for manufacturing same | |
US20080193315A1 (en) | Roots-type fluid machine | |
KR20150094772A (en) | Multiple pump arrangement | |
US8215936B2 (en) | Screw compressor | |
EP1503034A1 (en) | Gerotor type machine | |
WO2011062063A1 (en) | Helical gear pump | |
GB2418958A (en) | Vacuum pump with enhanced exhaust heat transfer to stator | |
JP2007263122A (en) | Evacuating apparatus | |
US20230114095A1 (en) | Screw compressor | |
KR102553043B1 (en) | A gear pump capable of dispensing a fine flow | |
US20040166010A1 (en) | Offset bearing for extended fuel pump life | |
JP2005256845A5 (en) | ||
Dreifert et al. | Screw vacuum pumps | |
KR20160002685U (en) | Gear pump | |
KR20220107205A (en) | Rotor and multi-stage dry vacuum pumps |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: EDWARDS LIMITED, UNITED KINGDOM Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:OKOROAFOR, EMMANUEL UZOMA;REEL/FRAME:023911/0535 Effective date: 20100201 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |