WO2021171600A1 - 小型超音波リニアモータ - Google Patents

小型超音波リニアモータ Download PDF

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Publication number
WO2021171600A1
WO2021171600A1 PCT/JP2020/008470 JP2020008470W WO2021171600A1 WO 2021171600 A1 WO2021171600 A1 WO 2021171600A1 JP 2020008470 W JP2020008470 W JP 2020008470W WO 2021171600 A1 WO2021171600 A1 WO 2021171600A1
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WO
WIPO (PCT)
Prior art keywords
linear motor
ultrasonic linear
moving member
vibrator
expansion
Prior art date
Application number
PCT/JP2020/008470
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English (en)
French (fr)
Japanese (ja)
Inventor
森田　剛
裕太郎 田上
Original Assignee
国立大学法人東京大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 国立大学法人東京大学 filed Critical 国立大学法人東京大学
Priority to PCT/JP2020/008470 priority Critical patent/WO2021171600A1/ja
Priority to JP2022503039A priority patent/JP7450977B2/ja
Publication of WO2021171600A1 publication Critical patent/WO2021171600A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction

Definitions

  • the present invention relates to a small ultrasonic linear motor.
  • the main purpose of the compact ultrasonic linear motor of the present invention is to reduce the size, weight, and power of the ultrasonic linear motor.
  • the compact ultrasonic linear motor of the present invention has adopted the following means in order to achieve the above-mentioned main object.
  • the compact ultrasonic linear motor of the present invention has a vibrator in which a metal action part formed of a metal material is bonded to a piezoelectric drive part formed in a plate shape having symmetry with respect to a drive direction by the piezoelectric material, and a moving member pressed by the vibrator.
  • the first expansion and contraction vibration that causes the piezoelectric vibration unit to expand and contract in one of the two directions parallel to the four sides of the piezoelectric drive unit and both ends of the piezoelectric vibration unit in the one direction are of the two directions.
  • a small ultrasonic linear motor that moves the moving member in one direction by using a second expansion / contraction vibration that expands / contracts and vibrates in the opposite phase in the other direction.
  • the metal working portion is formed in the shape of a quadruped table having a top plate having substantially the same shape as the piezoelectric driving portion, and the top plate is adhered to the piezoelectric vibrating portion. It is characterized by that.
  • the metal working portion is formed of a metal material in the shape of a quadruped table having a top plate having substantially the same shape as the piezoelectric driving portion, and the top plate is adhered to the piezoelectric vibrating portion.
  • the metal Since the quadrupeds are not connected, the degree of freedom of each leg is increased, and the metal has a shape in which two of the quadrupeds are connected (a U-shaped cross section with a linear groove in the center of the lower part).
  • the first expansion / contraction vibration and the second expansion / contraction vibration of the vibrator can be easily excited.
  • symmetry with respect to the driving direction means that the piezoelectric driving unit is formed line-symmetrically with respect to the central axis of the moving member in the moving direction.
  • the moving member is configured as a pair of sliders, and is arranged so as to sandwich at least the ends of the four legs of the metal working portion by the pair of sliders. It can also be. In this way, the pair of sliders can be moved in one direction.
  • the metal action portion is located on the pair of slider sides at a portion of the end of the quadruped that comes into contact with the pair of sliders. It is also possible to have four protruding friction portions protruding from the surface. In this way, the friction during the movement of the moving member due to the first expansion / contraction vibration and the second expansion / contraction vibration can be reduced, and the moving member can be moved more efficiently.
  • the metal action portion has a fixing portion for fixing the vibrator to the outside at the center of the back surface of the top plate. It can also be. Since the center of the back surface of the top plate serves as a node point for the first expansion and contraction vibration and a node point for the second expansion and contraction vibration, even if the vibrator is fixed to the outside by the fixing portion, the first expansion and contraction vibration of the vibrator and the first expansion and contraction vibration 2 Stretch vibration is not hindered.
  • the moving member may be formed in a rod shape and may be arranged so as to press the inside of the end portion of the quadruped of the metal working portion. .. In this way, the rod-shaped moving member can be moved in one direction.
  • the moving member in which the moving member is formed in a rod shape, the moving member is substantially in direct contact with the moving member at the end of the quadruped of the metal working portion. It can also be formed as an inclined portion. In this way, the pressing force acting on the moving member from the quadruped of the metal working portion due to the first stretching vibration and the second stretching vibration can be set in a direction close to the axial center of the moving member. As a result, high thrust can be obtained.
  • the moving member is formed in a rod shape in a circular cross section, and the length of the piezoelectric drive unit in a direction orthogonal to the moving direction of the moving member is M, and the moving member of the four legs has a length of M.
  • the inclination angle ⁇ is smaller than the median value of the range that can be taken if the radius r of the moving member and the height l of the inclined portion are determined.
  • the metal action portion is formed so as to project in the other direction at the center of both side surfaces along the one direction, and the vibration. It may also have two flanges to secure the child to the outside. Since the center of both side surfaces along one direction of the metal action portion serves as a node point for the first expansion and contraction vibration and a node point for the second expansion and contraction vibration, even if the vibrator is fixed to the outside by the flange, the vibrator is used. The first expansion and contraction vibration and the second expansion and contraction vibration of the above are not hindered.
  • the driving member may be configured so that the resonance frequency of the first expansion / contraction vibration and the resonance frequency of the second expansion / contraction vibration substantially match. Further, the driving member may be configured so that the resonance frequency of the first expansion / contraction vibration and the resonance frequency of the second expansion / contraction vibration substantially match when the moving member is pressed. .. By doing so, when the first expansion / contraction vibration and the second expansion / contraction vibration are excited at the same frequency with a phase difference, the excitation can be facilitated.
  • the vibrator may be configured such that the adhesive surface between the piezoelectric drive portion and the metal action portion is a neutral surface. In this way, it is possible to suppress the action of unnecessary force on the adhesive surface.
  • FIG. 1 It is a perspective view which shows the outline of the structure of the compact ultrasonic linear motor 20 of 1st Embodiment. It is explanatory drawing which looked at the compact ultrasonic linear motor 20 of 1st Embodiment from the lower part of FIG. It is a perspective view which shows the outline of the structure of the vibrator 22 included in the small ultrasonic linear motor 20 of 1st Embodiment. Schematic representation of the displacement of the transducer 22 when the phase difference ⁇ is 90 degrees and the phase is 0 degrees (0 deg), 90 degrees (90 deg), 180 degrees (180 deg), and 270 degrees (270 deg). It is explanatory drawing which shows. FIG.
  • FIG. 1 is a perspective view showing an outline of the configuration of the compact ultrasonic linear motor 20 of the first embodiment.
  • FIG. 2 is an explanatory view of the small ultrasonic linear motor 20 of the first embodiment as viewed from below of FIG.
  • FIG. 3 is a perspective view showing an outline of the configuration of the vibrator 22 included in the small ultrasonic linear motor 20 of the first embodiment.
  • the small ultrasonic linear motor 20 of the first embodiment is composed of a vibrator 22 and a pair of sliders 60 that sandwich the vibrator 22.
  • the vibrator 22 includes a piezoelectric drive unit 30, a metal action unit 40 adhered to the lower surface of the piezoelectric drive unit 30, and an electrode 32 attached to the upper surface of the piezoelectric drive unit 30. It includes 34 and 36.
  • the piezoelectric drive unit 30 is formed in a rectangular (length L, width M, thickness tp) plate shape by a piezoelectric material (for example, lead zirconate titanate (Pb (Zr, Ti) O 3: PZT)). There is. Three electrodes 32, 34, and 36 having substantially the same width in the length direction are formed on the upper surface of the piezoelectric drive unit 30. Since a small ultrasonic linear motor is assumed in the embodiment, it is desirable that the length L is 50 mm or less and the width M is 40 mm or less, preferably the length L is 20 mm or less and the width M is 10 mm or less.
  • the thickness tp is preferably 3 mm or less.
  • the metal working portion 40 is made of a metal material (for example, duralumin or titanium alloy) and has a top plate having substantially the same shape as the piezoelectric driving portion 30 (length L, width M, thickness tm), and legs 42a to 42d having rectangular cross sections at its four corners. It is formed in the shape of a four-legged table to which is attached.
  • the four legs 42a to 42d have a rectangular cross section having a height h, a width w, and a depth d. Box-shaped protruding friction portions 44a to 44d that project to the surface are attached.
  • the protruding friction portions 44a to 44d can be formed of, for example, the same material as the metal working portion 40, aluminum, resin, or the like.
  • the protruding friction portions 44a to 44d come into contact with the pair of sliders 60.
  • the upper surface of the top plate is conductively adhered to the lower surface of the piezoelectric driving portion 30. Therefore, it is possible to set four electrical boundary conditions of the electrodes 32, 34, 36 and the metal action unit 40 with respect to the piezoelectric drive unit 30.
  • a cylindrical fixing portion 50 having a cylindrical hole 52 formed in the center is formed at the center of the back surface of the metal working portion 40 (the center between the four legs 42a to 42d). There is. The vibrator 22 is fixed to the outside by using the fixing portion 50.
  • the pair of sliders 60 are formed in a plate shape from a metal material, resin, wood, or the like, and as shown in FIG. 2, a preload as a pressing force is applied to the vibrator 22 at a portion sandwiching the vibrator 22. The force to make it is applied from the outside. As shown in FIGS. 1 and 2, the pair of sliders 60 are formed in a linear plate shape, but since it is sufficient that the pair of sliders 60 can be regarded as partially linear at the portion sandwiching the vibrator 22, it is curved. It may be a rod shape or an annular shape.
  • the first expansion / contraction vibration that expands and contracts in the length L direction of the piezoelectric drive unit 30 and the end portion of the piezoelectric drive unit 30 in the length L direction have opposite phases in the width M direction.
  • the pair of sliders 60 are moved in the length L direction by the second expansion and contraction vibration that expands and contracts with, and the inch worm operation by.
  • the vertical primary vibration mode (L1 mode) can be used for the first expansion / contraction vibration, and can be realized by applying the drive voltage represented by the following equation (2) to the electrode 32.
  • the metal working portion 40 has a quadruped structure having a top plate and four legs 42a to 42d, the legs 42a and the legs 42b are connected to form ribs, and the legs 42c and 42d are connected to form ribs.
  • the degree of freedom of each leg 42a to 42d is larger than that of the structure (a structure in which a groove along the length L direction is formed in the center of the metal action portion, hereinafter referred to as “comparative example”). Since the second expansion / contraction vibration of the vibrator 22 does not have a rib structure, a shearing force that suppresses the vibration acting on the rib of the comparative example does not act.
  • the excitation of the second expansion / contraction vibration of the vibrator 22 becomes easier as compared with the comparative example.
  • the force acting in the vibration direction acts only on the top plate, and the stress corresponds to the cross-sectional area of the two ribs in the comparative example. It will be larger than that.
  • the strain (expansion and contraction) of the metal material is proportional to the stress applied, the first expansion and contraction vibration of the vibrator 22 becomes larger than that in the comparative example. As a result, the excitation of the first expansion / contraction vibration of the vibrator 22 becomes easier as compared with the comparative example.
  • the metal working portion 40 has a quadruped structure having a top plate and quadrupeds 42a to 42d, so that the first expansion / contraction vibration of the vibrator 22 and the vibrator 22 The excitation of the second expansion / contraction vibration can be facilitated.
  • the bonding surface between the piezoelectric drive unit 30 and the metal action unit 40 is designed to be a neutral surface. As a result, it is possible to suppress an unnecessary force from acting on the adhesive surface between the piezoelectric drive unit 30 and the metal action unit 40.
  • FIG. 4 shows the displacement of the vibrator 22 when the phase difference ⁇ is 90 degrees and the phases are 0 degrees (0 deg), 90 degrees (90 deg), 180 degrees (180 deg), and 270 degrees (270 deg). It is explanatory drawing which shows the state of.
  • the vibrator 22 extends in the length L direction.
  • the vibrator 22 contracts in the width M direction at one end in the length L direction (right end in the figure) and at the other end on the opposite side (left end in the figure). It extends in the width M direction.
  • the vibrator 22 contracts in the length L direction.
  • the vibrator 22 contracts in the width M direction at the other end (left end in the figure) in the length L direction, and contracts in the width M direction at the opposite end (right end in the figure). It extends in the width M direction. Therefore, from the phase of 180 degrees (180 deg) to the phase of 0 degrees (0 deg) via the phase of 270 degrees (270 deg), a pair of protruding friction portions 44b and 44c at the right end of the vibrator 22 in the figure. While holding the slider 60, it extends in the length L direction.
  • a pair of sliders are provided by the protruding friction portions 44a and 44d at the left end of the vibrator 22 in the figure. While holding 60, it contracts in the length L direction. Since the vibrator 22 is fixed to the outside by the fixing portion 50, the pair of sliders 60 slide in the right direction in the drawing according to the expansion and contraction in the length L direction. By repeating this, the pair of sliders 60 can be slid to the right in the figure. Further, if the phase difference ⁇ is 270 degrees ( ⁇ 90 degrees), the operation in FIG.
  • the vibration of the vibrator 22 is an elliptical vibration because the first expansion / contraction vibration in the L1 mode and the second expansion / contraction vibration in the B1-2 mode are superimposed. Further, since the vibrator 22 is fixed to the outside by the fixing portion 50 formed at the position which becomes the node point of the L1 mode and the node point of the B1-2 mode, the first expansion / contraction vibration of the vibrator 22 and the vibration of the vibrator 22 The second expansion and contraction vibration (superposed elliptical vibration) is not hindered.
  • the resonance frequency of the L1 mode of the vibrator 22 and the resonance frequency of the B1-2 mode are substantially the same.
  • the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode of the vibrator 22 depend on the material and shape of the vibrator 22. Therefore, when the materials of the piezoelectric drive unit 30 and the metal action unit 40 of the vibrator 22 are set, the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode can be substantially set by adjusting the shape of the vibrator 22. It is preferable to match with.
  • the piezoelectric drive unit 30 is formed of lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT) with a length L of 20 mm, a width M of 10 mm, and a thickness tp of 2 mm, and is made of metal.
  • the length L of the top plate is 20 mm
  • the width M is 10 mm
  • the thickness tm is 2 mm
  • the height h of the four legs 42a to 42d is 2.5 mm to 3.0 mm
  • the width w is 2.7 mm.
  • FIG. 5 shows changes in the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode when the height h and the width w of the four legs 42a to 42d are changed.
  • the resonance frequencies of the L1 mode and the B1-2 mode change.
  • the change in the resonance frequency of the B1-2 mode with respect to the change in the height h of the legs 42a to 42d is remarkable. From this, it can be seen that it is easy to adjust the height h of the legs 42a to 42d in order to position the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode.
  • FIG. 6 is an explanatory diagram showing an example of the relationship between the preload acting on the vibrator 22 and the admittance and the frequency. As shown in FIG. 6, it can be seen that the resonance frequency shifts to the higher side by applying the preload. From this, when a preload is applied to the vibrator 22 via the pair of sliders 60, the vibrator 22 vibrates so that the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode substantially match. It can be seen that it is preferable to set the shape of the child 22.
  • the height h of the legs 42a to 42d is 2.7 mm
  • the width w is 3.0 mm
  • the depth d is 7 mm.
  • the lengths of the electrodes 32, 34, and 36 in the length L direction were set to 6 mm.
  • the resonance frequency of the L1 mode and the resonance frequency of the B1-2 mode are in the vicinity of 85 kHz.
  • FIG. 7 shows the relationship between the phase difference ⁇ in the L1 mode of this embodiment and the moving speed of the pair of sliders 60. As shown in the figure, it can be seen that the moving direction in which the phase difference is 0 to 180 degrees and the moving direction in which the phase difference is 180 degrees to 360 degrees are opposite to each other. Further, it can be seen that the moving speed is close to the maximum speed when the phase difference is 90 degrees and 270 degrees.
  • the metal working portion 40 has a quadruped structure having a top plate and quadrupeds 42a to 42d, so that the degree of freedom of the quadrupeds 42a to 42d is increased.
  • the leg 42a and the leg 42b are connected to form a rib
  • the leg 42c and the leg 42d are connected to form a rib (a structure in which a groove along the length L direction is formed in the center of the metal working portion).
  • the first expansion / contraction vibration in the L1 mode and the second expansion / contraction vibration in the B1-2 mode can be easily excited. As a result, it is possible to reduce the size, weight, and power of the motor as compared with the conventional ultrasonic linear motor having a vibrator.
  • the protruding friction portions 44a to 44d are provided in the metal working portion 40, but the protruding friction portions 44a to 44d may not be provided.
  • FIG. 8 is a perspective view showing an outline of the configuration of the compact ultrasonic linear motor 120 of the second embodiment.
  • FIG. 9 is an explanatory view of the small ultrasonic linear motor 120 of the second embodiment as viewed from below of FIG.
  • FIG. 10 is an explanatory view of the small ultrasonic linear motor 120 of the second embodiment as viewed from the left side of FIG.
  • the small ultrasonic linear motor 120 of the second embodiment is composed of a vibrator 122 and a rod-shaped slider 160 pressed by the vibrator 122.
  • the vibrator 122 includes a piezoelectric drive unit 130, a metal action unit 140 adhered to the lower surface of the piezoelectric drive unit 130, and an electrode 132 attached to the upper surface of the piezoelectric drive unit 130. It includes 134 and 136.
  • the piezoelectric drive unit 130 is made of a piezoelectric material (for example, lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT)) and has a rectangular shape (length L, It is formed in a plate shape having a width M and a thickness tp).
  • a piezoelectric material for example, lead zirconate titanate (Pb (Zr, Ti) O 3 : PZT)
  • a rectangular shape length L, It is formed in a plate shape having a width M and a thickness tp.
  • three electrodes 132, 134, and 136 having substantially the same width in the length direction are formed on the upper surface of the piezoelectric drive unit 130.
  • the metal working part 140 has substantially the same shape as the piezoelectric driving part 130 (length L, width M, thickness tm) due to a metal material (for example, duralumin or titanium alloy).
  • the plate is formed in the shape of a quadruped table in which legs 142a to 142d having a rectangular cross section are attached to the four corners thereof. Similar to the legs 42a to 42d of the first embodiment, the four legs 142a to 142d have a rectangular cross section having a height h, a width w, and a depth d, and a slider is formed inside the tip portion thereof.
  • the inclined portions 144a to 144d are formed so that the 60s are in direct contact with each other.
  • the inclined portions 144a to 144d come into contact with the slider 160. Further, at the center of the side surface of the side along the length L direction of the metal working portion 40, flanges 150a and 150b having a rectangular top plate thickness and through holes 152a and 152b formed in the center are formed. The vibrator 22 is fixed to the outside by the flanges 152a and 152b.
  • the slider 160 is formed in a rod shape by using a metal material, resin, wood, or the like, and the inclined portions of the four legs 142a to 142d are formed between the legs 142a and 142d of the vibrator 122 and between the legs 142b and 142c. It is arranged so as to act a pressing force on 144a to 144d.
  • the slider 60 is formed in the shape of a linear rod, it may be formed in a curved rod shape or an annular shape as long as it can be regarded as a partial linear shape at a portion abutting on the vibrator 122.
  • the small ultrasonic linear motor 120 of the second embodiment has the first expansion and contraction vibration that expands and contracts in the length L direction of the piezoelectric drive unit 130 and the piezoelectric drive unit 130.
  • the slider 160 is moved in the length L direction by the second expansion and contraction vibration in which the end portion in the length L direction expands and contracts in the width M direction in the opposite phase, and the inch worm operation by the inch worm operation.
  • the first expansion / contraction vibration can use the L1 mode, and can be realized by applying the drive voltage represented by the above equation (2) to the electrode 132.
  • the B1-2 mode can be used for the second expansion / contraction vibration, and can be realized by applying the drive voltage represented by the equations (3) and (4) to the electrodes 134 and 136.
  • the small ultrasonic linear motor 120 of the second embodiment also operates as shown in FIG. From the phase of 180 degrees (180 deg) to the phase of 0 degrees (0 deg) via the phase of 270 degrees (270 deg), the slider 160 is held by the inclined portions 144a and 144b of the legs 142a and 142d on the left side of the figure of the vibrator 122. While extending in the length L direction.
  • a pair of inclined portions 144b, 144c of the legs 142b, 142c on the right side of the figure of the vibrator 122 While holding the slider 60, it contracts in the length L direction. Since the vibrator 122 is fixed to the outside by the flange 150, the slider 160 slides to the left in the drawing according to the expansion and contraction in the length L direction. By repeating this, the slider 160 can be slid to the left in the figure. Further, if the phase difference ⁇ is 270 degrees ( ⁇ 90 degrees), the operation in FIG.
  • the vibration of the vibrator 122 is an elliptical vibration because the first expansion / contraction vibration in the L1 mode and the second expansion / contraction vibration in the B1-2 mode are superimposed. Further, since the vibrator 122 is fixed to the outside by the flanges 150a and 150b formed at the positions that serve as the node points of the L1 mode and the node points of the B1-2 mode, the first expansion and contraction vibration of the vibrator 122 And the second expansion and contraction vibration (overlapping elliptical vibration) are not hindered. Further, in the second embodiment, the bonding surface between the piezoelectric drive unit 130 and the metal action unit 140 is designed to be a neutral surface.
  • the flange 150 is arranged near the neutral surface, and even if the vibrator 122 is fixed to the outside by the flange 150, the first expansion / contraction vibration and the second expansion / contraction vibration of the vibrator 122 (overlapping elliptical vibrations) ) Is not hindered. Of course, it is possible to suppress an unnecessary force from acting on the adhesive surface between the piezoelectric driving unit 130 and the metal working unit 140.
  • FIG. 11 is an explanatory view showing a slider 160 having a maximum radius r max and a minimum radius r min that are in direct contact with each other at an inclination angle ⁇ of the inclined portions 144a to 144d at a height l.
  • the maximum radius r max and the minimum radius r min of the slider 160 tangent to the inclined portions 144a to 144d of the vibrator 122 can be expressed by the following equations (5) and (6).
  • the direction of the vibration locus at the drive point of the vibration mode for preload control is an inclined surface in order to avoid unnecessary friction loss. It is desirable to match the normal direction as much as possible. Therefore, the inclination angle ⁇ of the inclined portions 144a to 144d is important.
  • FIG. 12 is an explanatory diagram showing the relationship between the angle ⁇ formed by the vibration locus in the horizontal direction, the inclination angle ⁇ , and the normal line thereof. The closer the angle difference ( ⁇ - ⁇ ) between the angle ⁇ formed by the vibration locus in the horizontal direction and the inclination angle ⁇ is to the value 0, the more appropriate the design of the inclination angle.
  • FIG. 12 is an explanatory diagram showing the relationship between the angle ⁇ formed by the vibration locus in the horizontal direction, the inclination angle ⁇ , and the normal line thereof. The closer the angle difference ( ⁇ - ⁇ ) between the angle ⁇ formed by the vibration locus in the horizontal direction and the inclination angle ⁇ is to the value 0, the more appropriate the design of the inclination angle
  • FIG. 13 is an explanatory diagram showing an example in which the change in the angle difference ( ⁇ ) with respect to the inclination angle ⁇ is obtained from FEM (finite element method) simulation and calculation.
  • FEM finite element method
  • the inclination angle ⁇ is smaller than the median value of the range that can be taken if the radius r of the slider 160 and the height l of the inclined portions 144a to 144d are determined.
  • the inclination angle ⁇ is preferably 20.33 degrees to 28.60 degrees.
  • the metal working portion 140 has a quadruped structure having a top plate and quadrupeds 142a to 142d.
  • the degree of freedom of the four legs 142a to 142d is increased, and the leg 142a and the leg 142b are connected to form a rib, and the leg 142c and the leg 142d are connected to form a rib (center of the metal working portion).
  • Structure in which a groove is formed along the length L direction) the first expansion / contraction vibration in the L1 mode and the second expansion / contraction vibration in the B1-2 mode can be easily excited.
  • the piezoelectric drive units 30 and 130 are formed in a rectangular plate shape.
  • the piezoelectric drive unit need only be formed so as to be line-symmetrical with respect to the central axis in the drive direction of the slider. Therefore, the piezoelectric drive unit has an "H" -shaped plate shape. It may be formed into a plate shape in which the center of the rectangle is constricted (a shape in which two trapezoids having the same shape are connected at the upper bottom). In this case, the top plate of the metal working portion may be formed in the same shape as the piezoelectric driving portion.
  • the metal action unit 140 is made of a metal material (for example, duralumin, titanium alloy, etc.) and has substantially the same shape as the piezoelectric drive unit 130 (length L, width M, thickness tm).
  • the plate is formed in the shape of a quadruped table in which legs 142a to 142d having a rectangular cross section are attached to the four corners thereof.
  • the present invention can be used in the manufacturing industry of small ultrasonic linear motors and the like.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
PCT/JP2020/008470 2020-02-28 2020-02-28 小型超音波リニアモータ WO2021171600A1 (ja)

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PCT/JP2020/008470 WO2021171600A1 (ja) 2020-02-28 2020-02-28 小型超音波リニアモータ
JP2022503039A JP7450977B2 (ja) 2020-02-28 2020-02-28 小型超音波リニアモータ

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62104593U (enrdf_load_stackoverflow) * 1985-11-28 1987-07-03
JP2009148086A (ja) * 2007-12-14 2009-07-02 Nidec Copal Corp ステップ動作型の駆動装置
JP2010246277A (ja) * 2009-04-07 2010-10-28 Shicoh Engineering Co Ltd リニア駆動装置
JP2016032351A (ja) * 2014-07-29 2016-03-07 キヤノン株式会社 振動型アクチュエータ、光学機器、及び撮像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62104593U (enrdf_load_stackoverflow) * 1985-11-28 1987-07-03
JP2009148086A (ja) * 2007-12-14 2009-07-02 Nidec Copal Corp ステップ動作型の駆動装置
JP2010246277A (ja) * 2009-04-07 2010-10-28 Shicoh Engineering Co Ltd リニア駆動装置
JP2016032351A (ja) * 2014-07-29 2016-03-07 キヤノン株式会社 振動型アクチュエータ、光学機器、及び撮像装置

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