WO2021161569A1 - Dispositif de production d'eau ultra-pure et procédé de production d'eau ultra-pure - Google Patents

Dispositif de production d'eau ultra-pure et procédé de production d'eau ultra-pure Download PDF

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Publication number
WO2021161569A1
WO2021161569A1 PCT/JP2020/034827 JP2020034827W WO2021161569A1 WO 2021161569 A1 WO2021161569 A1 WO 2021161569A1 JP 2020034827 W JP2020034827 W JP 2020034827W WO 2021161569 A1 WO2021161569 A1 WO 2021161569A1
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water
ion exchange
ultrapure water
pure water
primary pure
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PCT/JP2020/034827
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English (en)
Japanese (ja)
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純一 井田
康晴 港
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栗田工業株式会社
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Publication of WO2021161569A1 publication Critical patent/WO2021161569A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/04—Feed pretreatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/02—Reverse osmosis; Hyperfiltration ; Nanofiltration
    • B01D61/08—Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/58—Multistep processes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/469—Treatment of water, waste water, or sewage by electrochemical methods by electrochemical separation, e.g. by electro-osmosis, electrodialysis, electrophoresis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00—Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124—Water desalination
    • Y02A20/131—Reverse-osmosis

Definitions

  • the present invention relates to an ultrapure water production apparatus and an ultrapure water production method.
  • Ultrapure water which is used in large quantities as cleaning water in the manufacturing process of electronic devices, especially semiconductors, is an ultrapure water production system consisting of a pretreatment system, a primary pure water system, and a subsystem, and is raw water (industrial water). , Tap water, well water, used ultrapure water discharged from the electronic device manufacturing process, etc.).
  • Patent Document 1 includes a primary pure water system and a subsystem for treating treated water of the primary pure water system, and at least the primary pure water system is provided with a reverse osmosis membrane separation device for producing ultrapure water.
  • a reverse osmosis membrane separation device for producing ultrapure water.
  • an ultrapure water production apparatus characterized in that the reverse osmosis membrane separator installed in the primary pure water system is a high-pressure reverse osmosis membrane separator and is installed in a single stage has been proposed. ing.
  • Patent Document 2 includes an ultrapure water system having a pretreatment system, a primary pure water system for treating pretreated water treated by the pretreatment system to obtain primary pure water, and a subsystem for treating primary pure water.
  • the primary pure water system is configured to be connected in the order of a reverse osmosis membrane separation device, a degassing device, an electrodeionization device, an ultraviolet oxidation device, and a non-regenerative ion exchange device.
  • An ultrapure water production apparatus characterized by the above has been proposed.
  • the primary pure water system includes a two-bed, three-tower type ion exchange apparatus, a back-penetration membrane apparatus, and a 180 to 190 nm diameter.
  • a combination of an ultraviolet irradiation device equipped with a low-pressure ultraviolet lamp that irradiates ultraviolet rays including a wavelength and a mixed-bed ion exchange device is provided along the flow path, and the secondary pure water system includes a wavelength of 180 to 190 nm.
  • An ultrapure water production device has been proposed, characterized in that at least one pair of an ultraviolet irradiation device equipped with a low-pressure ultraviolet lamp that irradiates ultraviolet rays and a mixed-bed ion exchange device is provided along the flow path. There is.
  • Patent Document 4 in an ultrapure water production apparatus including a pretreatment system, a primary pure water system and a secondary pure water system, the primary pure water system and the secondary pure water system are each provided with a wavelength of 180 to 190 nm.
  • An ultrapure water production device has been proposed, characterized in that at least one combination of an ultraviolet irradiation device equipped with a low-pressure ultraviolet lamp that irradiates containing ultraviolet rays and a mixed-bed ion exchange device is provided along the flow path. There is.
  • Japanese Unexamined Patent Publication No. 2012-245439 Japanese Unexamined Patent Publication No. 2003-266097 Japanese Unexamined Patent Publication No. 2004-25184 Japanese Unexamined Patent Publication No. 7-75780
  • the current situation is that the demand for improving the water quality of ultrapure water used as cleaning water is further increasing.
  • the ultrapure water production equipment or the ultrapure water production system it is the primary pure water system that determines the reached water quality and water quality stability at the point of use.
  • a reverse osmosis membrane separator, a deaerator, and an ion exchange device are generally installed in a single stage, but in response to the recent improvement in water quality requirements, There is a problem that cannot be dealt with by the device configuration of such a general primary pure water system.
  • the primary pure water system includes a reverse osmosis membrane separator and / or an ion exchange device (hereinafter, "ion exchange tower") as shown in (A) and (B) below.
  • ion exchange tower an ion exchange device
  • A Multi-stage RO system incorporating a plurality of reverse osmosis membrane (RO membrane) separation devices Specifically, the following device configuration with 7 constituent units can be mentioned.
  • Reverse osmosis membrane (RO membrane) separator ⁇ Mixed bed ion exchanger (MB) ⁇ UV sterilizer (UVst) ⁇ Reverse osmosis membrane (RO membrane) separator ⁇ UV oxidizer (UVox) ⁇ Non-regenerative ion exchanger ⁇ Deaerator (MDG)
  • Multi-stage electroregenerative ion exchange pure water apparatus (B) Multi-stage electroregenerative ion exchange pure water apparatus (CDI) system incorporating a plurality of electroregenerative deionizers Specifically, the following apparatus configuration with 6 constituent units can be mentioned.
  • Reverse osmosis membrane (RO membrane) separator ⁇ Reverse osmosis membrane (RO membrane) separator ⁇ Degassing device (MDG) ⁇ Ultraviolet oxidizing device (UVox) ⁇ Multi-stage electroregenerative ion exchange pure water device (CDI) ⁇ Multi-stage electroregeneration Type ion exchange pure water device (CDI)
  • the “unit” in the present specification means an apparatus capable of one or more of “desalination”, “deaeration”, “organic matter removal”, which is the main purpose of the treatment in the primary pure water system.
  • the number of constituent units means the number of units provided in a system, for example, a primary pure water system.
  • the pretreated water obtained by treating raw water (industrial water, tap water, well water, used ultrapure water discharged from the electronic device manufacturing process, etc.) with a pretreatment system is the above (A), (B).
  • a primary pure water system such as, the specific resistance is 18 M ⁇ cm or more, the TOC (Total Organic Carbon) concentration is 2 ⁇ g / L or less, the boron (B) concentration is 1 ng / L or less, and the silica (SiO 2 ) concentration is 0.1 ⁇ g / It is possible to obtain primary pure water having a high purity of L or less (treated water of the primary pure water system, that is, outlet water of the primary pure water system).
  • the required level of ultrapure water quality is expected to increase in the future.
  • the number of units of the primary pure water system will be further increased, and in order to maintain the water quality above a certain level and supply it, the operation will be performed under excessive operating conditions so that the stable water quality can be maintained even under the most severe conditions assumed. ..
  • pure water will continue to be supplied without changing the amount of water supplied. Therefore, even if the production volume of semiconductor factories decreases and the required amount of ultrapure water decreases, excess ultrapure water is drained in order to continue to supply a certain amount of pure water, or it is collected and reused again. The processing will be performed, and the cost will be higher than necessary.
  • the present invention is an ultrapure water capable of producing high-purity ultrapure water sufficiently satisfying the required water quality, inexpensively, stably and surely, regardless of fluctuations in water quantity and water quality, while suppressing the installation area of the device. It is an object of the present invention to provide a water production apparatus and an ultrapure water production method.
  • the present inventor installs appropriate devices in the primary pure water system provided in the ultrapure water production device in an appropriate order, and then controls the operating conditions of these devices according to fluctuations in water quality and / or water volume. As a result, it has been found that it is possible to inexpensively, stably and reliably produce high-purity ultrapure water that sufficiently satisfies the required water quality while reducing the number of constituent units.
  • the primary pure water system is a 4-unit primary pure water system including a reverse osmosis membrane separator, a degassing device, an ultraviolet oxidizing device, and an electroregenerative ion exchange device in this order, and the amount of water is increased. And / or provide a monitor to monitor water quality. For example, in order to suppress fluctuations in water quality caused by changing the amount of water supplied according to the required production amount, control that automatically changes the operating conditions of each unit based on the signal from the monitor to keep the water quality stable. Provide means.
  • the gist of the present invention is as follows.
  • the primary pure water system is provided with a pretreatment system for treating raw water, a primary pure water system for treating the treated water of the pretreatment system, and a subsystem for treating the treated water of the primary pure water system.
  • a pretreatment system for treating raw water a primary pure water system for treating the treated water of the pretreatment system
  • a subsystem for treating the treated water of the primary pure water system is an ultrapure water production device equipped with at least a reverse osmosis membrane separator, a degassing device, an ultraviolet oxidizing device, and an ion exchange device as constituent devices in this order, and the amount and / or water quality of water in the primary pure water system is determined.
  • An ultrapure water production apparatus having a monitor to be monitored and a control means for controlling one or more operating conditions of the constituent devices according to a value detected by the monitor.
  • the ion exchange device is an electroregenerative ion exchange device in which an electroregenerative deionizer is connected in series in one or a plurality of stages.
  • each unit is operated in an optimum state according to the amount of water even if the required amount of water is changed by a low-cost ultrapure water production device having a small number of constituent units and therefore a small device installation area.
  • a low-cost ultrapure water production device having a small number of constituent units and therefore a small device installation area.
  • FIG. 1 is a configuration diagram showing an example of an embodiment of a primary pure water system of the ultrapure water production apparatus of the present invention.
  • the ultrapure water production apparatus of the present invention includes a pretreatment system, a primary pure water system, and a subsystem.
  • the primary pure water system in the present invention includes a reverse osmosis membrane separating device, a degassing device, an ultraviolet oxidizing device, and an ion exchange device in this order.
  • high-purity ultrapure water that sufficiently satisfies the required water quality can be obtained in the device installation area and further. It can be manufactured inexpensively, stably and reliably while suppressing equipment cost (initial cost) and operating cost (running cost).
  • the configuration of the pretreatment system and the subsystem in the ultrapure water production apparatus of the present invention is not particularly limited.
  • raw water industrial water, tap water, well water, used ultrapure water discharged from the electronic device manufacturing process, etc.
  • agglomeration pressure flotation (precipitation), filtration (membrane filtration) equipment, etc.
  • pressure flotation precipitation
  • filtration membrane filtration equipment, etc.
  • Subsystems include a low-pressure ultraviolet oxidizing device, an ion-exchanged pure water device, and an ultrafiltration membrane separation device, and further increase the purity of the pure water obtained by the primary pure water system to obtain ultrapure water. Be done.
  • the low-pressure ultraviolet oxidizing device in the subsystem TOC is decomposed into organic acids and even CO 2 by ultraviolet rays having a wavelength of 185 nm emitted from a low-pressure ultraviolet lamp.
  • the organic matter and CO 2 produced by the decomposition are removed by the ion exchange pure water device in the subsequent stage.
  • the ultrafiltration membrane separation device fine particles are removed, and outflow particles of the ion exchange pure water device are also removed.
  • the primary pure water system of the ultrapure water production apparatus of the present invention is a system having only 4 units, which includes a reverse osmosis membrane separating apparatus, a degassing apparatus, an ultraviolet oxidizing apparatus, and an ion exchange apparatus in this order. ..
  • the primary pure water system is an ion in treated water (pretreated water) obtained by treating raw water (industrial water, tap water, well water, used ultrapure water discharged from the electronic device manufacturing process, etc.) by the pretreatment system. And remove organic components.
  • the water quality of the ultrapure water produced by the ultrapure water production apparatus of the present invention is, for example, the primary of (A) and (B) described above, even though the primary pure water system has only 4 units.
  • the ultrapure water produced by the ultrapure water production apparatus of the present invention is a high-purity ultrapure water that sufficiently satisfies the required water quality.
  • the reverse osmosis membrane separation device removes salts as well as organic substances.
  • a reverse osmosis membrane separation device conventionally used for seawater desalination for example, a high-pressure reverse osmosis membrane separation device having an operating pressure of about 0.2 to 7.0 MPa can be used.
  • the shape of the reverse osmosis membrane may be any shape as long as it achieves the object of the present invention and exerts the effect thereof. For example, a spiral shape, a hollow fiber shape, a flat membrane shape and the like can be mentioned.
  • the degassing device removes IC (inorganic carbon) and dissolved oxygen.
  • the reason why the degassing device (degassing device) is provided after the reverse osmosis membrane separation device is as follows.
  • the degassing membrane or filler vacuum degassing device, etc.
  • the filler may be contaminated and the degassing efficiency may decrease. Since these turbid substances or Al, SiO 2, etc.
  • the permeated water is passed through the degassing device after being treated by the high-pressure reverse osmosis membrane separation device. , It is possible to prevent a decrease in degassing efficiency.
  • the reason for installing the degassing device in front of the ion exchange device and the ultraviolet oxidizing device is as follows.
  • the IC (inorganic carbon) component that can be removed by the degassing device becomes a radical scavenger for the ultraviolet oxidizing device and an anion load for the ion exchange device.
  • the dissolved oxygen becomes a radical scavenger for the UV oxidizing device, similar to the IC (inorganic carbon) component described above.
  • dissolved oxygen is a factor that causes resin oxidative deterioration for ion exchange devices. Therefore, the degassing device needs to be installed in front of the ultraviolet oxidizing device and the ion exchange device.
  • the degassing device may be any degassing device as long as it achieves the object of the present invention and exhibits the effects of the present invention.
  • a decarboxylation tower a membrane degassing device, a vacuum degassing device, a nitrogen degassing device, a catalytic resin deoxidizing device, and the like can be used.
  • the reason for installing the ultraviolet oxidizing device in the rear stage of the deaerator and in the front stage of the ion exchange device is as follows.
  • organic substances in water water to be treated
  • the CO 2 or organic acid generated by the ultraviolet oxidizing device can be removed by the ion exchange device in the subsequent stage.
  • the ultraviolet oxidizing apparatus emits light having a wavelength of 185 nm, and is not particularly limited as long as it achieves the object of the present invention and exerts the effect of the present invention.
  • the ultraviolet oxidizing device it is preferable to use an ultraviolet oxidizing device in which both the lamp and the outer tube are made of synthetic quartz having extremely few impurities from the viewpoint of organic matter decomposition efficiency.
  • the ion exchange device removes salts in water and removes charged organic substances.
  • the ion exchange device is not particularly limited as long as it achieves the object of the present invention and exhibits the effect of the present invention.
  • a regenerative ion exchange device is preferable.
  • the regenerative ion exchange device examples include a two-bed, two-tower regenerative ion exchange device, a two-bed, one-tower regenerative ion exchange device, a mixed-bed regenerative ion exchange device, and an electroregenerative ion exchange device.
  • an electroregenerative ion exchange device or the like connected in series in a plurality of stages can be mentioned.
  • an electroregenerative ion exchange device that continuously regenerates without using regenerated chemicals is preferable.
  • a regenerative ion exchange device in which an electroregenerative deionizer is connected in series in one or a plurality of stages is preferable.
  • the primary pure water system according to the ultrapure water production apparatus of the present invention includes a monitor for monitoring the amount and / or water quality of water, and one or more constituent devices according to the value detected by the monitor, that is, a reverse osmosis membrane separation device. It has a control means for controlling any one or more of a degassing device, an ultraviolet oxidizing device, and an ion exchange device.
  • the monitor for monitoring the amount of water is not particularly limited, and may be a flow meter for the amount of treated water provided at the outlet of each component device or a flowmeter for the amount of water supplied at the inlet.
  • Examples of the monitor for monitoring the water quality include a pH meter and a resistivity meter for monitoring the water quality of the inlet water and the outlet water of each component device.
  • the control means has a calculation unit that performs calculations to obtain the optimum operation state according to the measurement signal from the monitor, and automatically adjusts the operation conditions of each component device based on the calculation results.
  • the configuration of the monitor and the control means according to the present invention is not particularly limited, and examples thereof include the following.
  • the reverse osmosis membrane separation device is provided with a flow meter, a flow rate control valve for adjusting the flow rate, and a pump for injecting the chemical solution to be injected into the water supply of the reverse osmosis membrane separation device. Configure so that the amount can be controlled.
  • a degassing device for example, a membrane degassing device, is provided with a vacuum pressure gauge, a pressure control valve capable of controlling the degree of vacuum, a flow meter for sweep gas such as nitrogen gas, and a control device such as a valve capable of controlling the gas flow rate. It is configured so that each can be controlled by a signal.
  • the ultraviolet oxidizing device is provided with an output control device that can control the output of ultraviolet rays, and is configured so that the output can be controlled by a signal from the calculation unit.
  • an ion exchange device for example, an electroregenerative ion exchange device, a flow meter, a flow control valve for adjusting the flow rate, and a current control device capable of controlling the current are provided so that the flow rate and the electric output can be controlled by a signal from the calculation unit. Configure to.
  • the required number of the above-mentioned monitor, calculation unit, and control device such as flow meter, flow rate control valve, pressure control valve, chemical injection pump, current control device, etc. is provided. There is no particular limit to the number of monitors. Water quality and flow rate monitors, calculation units that process signals from the monitors, and flow control valves and pumps that control the flow rate and the amount of chemicals injected by receiving signals from the calculation units may be generally used, and are particularly limited. do not.
  • reference numeral 1 denotes a storage tank, and pretreated water from the pretreatment system is introduced from the pipe 11.
  • Slime control agent from the pipe 12 to the pipe 11 a scale inhibitor from the pipe 13 is injected by the respective chemical feed pump P 1, P 2.
  • Pretreated water in the storage tank 1 is introduced into the reverse osmosis membrane separation device 2 by a high-pressure pump P 3 via a pipe 14, are membrane separation to permeate and retentate are extracted from each pipe 15, 16.
  • a water supply pipe 14 of the reverse osmosis membrane separation apparatus 2 the injection pipe 17 of the pH adjusting agent is provided, pH adjusting agent is injected by the chemical feed pump P 4.
  • the water supply pipe 14 is provided with a pH meter M 1 as a water quality monitor, a water supply flow meter FI 1 , and a water supply pressure meter PI 1.
  • the permeated water pipe 15 is provided with a treated water flow meter FI 2 , a treated water flow rate control valve V 1, and a treated water pressure gauge PI 2 .
  • the concentrated water pipe 16 is provided with a flow meter FI 3 and a concentrated water flow rate control valve V 2.
  • the concentrated water of the reverse osmosis membrane separator 2 is discharged from the pipe 16 to the outside of the system, and the permeated water is degassed from the pipe 15 (in this embodiment, the membrane degassing in which the liquid chamber and the gas chamber are separated by the degassing membrane). It is sent to the air device) 3 and degassed.
  • the degassed treated water is supplied from the pipe 17 to the ultraviolet oxidizing device 4.
  • the pipe 18 is provided with a nitrogen gas flow rate control valve V 3 and a nitrogen gas flow meter FI 4 .
  • the vacuum drawing pipe 19 is provided with a pressure control valve V 4 and a vacuum pressure gauge PI 3.
  • Reference numeral 6 denotes a current control device that controls the amount of supply current of the ultraviolet oxidizing device 4.
  • the treated water of the ultraviolet oxidizing device 4 is sent to the desalting chamber of the electroregenerative ion exchange device 5 via the pipe 20 for processing.
  • the pipe 20 is provided with a desalination chamber inlet flow meter FI 5 of the electroregenerative ion exchange device 5.
  • Reference numeral 7 denotes a current control device that controls the amount of supply current of the electroregenerative ion exchange device 5.
  • the inlet pipe 21 into the concentrating compartment of the electrodeionization ion exchange apparatus 5, respectively concentrating chamber inlet water flow control valve V 5 and the outlet water flow control valve V 6 is provided in the outlet pipe 22.
  • the outflow pipe 22 is provided with a concentration chamber outlet flow meter FI 6.
  • the desalted water (primary pure water) taken out from the desalting chamber of the electroregenerative ion exchange device 5 is sent to the subsystem via the pipe 23, and further processed to produce ultrapure water.
  • the primary pure water pipe 23 is provided with a desalination chamber outlet flow meter FI 7 and a pressure gauge PI 4 .
  • the primary pure water pipe 23 is provided with a resistivity meter M 2 , a TOC meter M 3 , a silica concentration meter M 4, and a boron concentration meter M 5 as water quality monitors.
  • the measured values of FI 7 , pressure gauge PI 1 , PI 2 , PI 3 , and PI 4 are input to the calculation unit of the control means (not shown).
  • This calculation unit calculates operating conditions suitable for the optimum operating state of each device. Based on this calculation result, control signals of the drug injection pump, the flow rate control valve, and the current control device are output.
  • the control method for controlling the operating conditions of each constituent device in response to fluctuations in the amount of water and water quality by the ultrapure water production device incorporating the primary pure water system shown in FIG. 1 will be specifically described below.
  • Control Example I If using water in sub-system increases to increase the output of the high-pressure pump P 3, increasing the inlet water of the reverse osmosis membrane separation apparatus 2 (water supply).
  • the inlet side reverse osmosis membrane separation apparatus 2 in accordance with the reverse osmosis membrane separation apparatus flowmeter FI 1 with dosing control of chemical feed pump P 1, P 2 is performed, the value of the pH meter M 1 is constant chemical feeding, chemical dosing pump P 3 is controlled so that.
  • the concentrated water flow rate control valve V 2 opens according to the water supply flow meter FI 1, and the amount of treated water of the reverse osmosis membrane separation device 2 is maintained while maintaining the balance of the water volume of the reverse osmosis membrane separation device 2. Increase (permeated water volume).
  • deaerator 3 in response to an increase of the reverse osmosis membrane separation device 2 of the measurement values of the treated water flow meter FI 2, opens the nitrogen gas flow rate control valve V 3, increasing the amount of injected nitrogen gas. Further, the pressure control valve V 4 is opened so that the vacuum pressure gauge PI 3 has a predetermined vacuum degree, the output of the vacuum pump P 4 is increased, and the vacuum degree of the degassing device 3 is increased.
  • the supply current value is increased by the current control device 6 of the ultraviolet oxidizing device 4 to promote the decomposition of organic matter.
  • the electroregenerative ion exchange device 5 monitors the concentrating chamber outlet flow meter FI 6 in response to an increase in the measured value of the desalination chamber inlet flow meter FI 5, while monitoring the concentrating chamber inlet water of the electroregenerating chamber inlet flow meter FI 5.
  • the flow rate control valve V 5 is opened to increase the flow rate of concentrated water and adjust the water volume balance in the electroregenerative ion exchange device 5.
  • the amount of water used in the subsystem increases by the above operation, the amount of primary pure water produced as treated water in the primary pure water system can be increased while maintaining the water quality according to the increased amount.
  • Control Example II If water consumption in the subsystem is reduced to lower the output of the high-pressure pump P 3, reducing the inlet water of the reverse osmosis membrane separation apparatus 2 (water supply).
  • the reverse osmosis membrane separation apparatus 2 in the inlet side in accordance with the reverse osmosis membrane separation apparatus flowmeter FI 1, together with the control of the chemical feed pump P 1, P 2 of the dosing is performed, the value of the pH meter M 1 is constant chemical feeding, chemical dosing pump P 3 is controlled to be.
  • the concentrated water flow rate control valve V 2 is closed in accordance with the water supply flow meter FI 1, and the amount of treated water in the reverse osmosis membrane separation device 2 is maintained while maintaining the balance of the water volume in the reverse osmosis membrane separation device 2. Reduce (permeated water volume).
  • the nitrogen gas flow rate control valve V 3 is closed in accordance with the decrease in the measured value of the treated water flow meter FI 2 of the reverse osmosis membrane separation device 2, and the injection amount of nitrogen gas is reduced.
  • the pressure control valve V 4 is closed so that the vacuum pressure gauge PI 3 has a predetermined vacuum degree, the output of the vacuum pump P 4 is lowered, and the vacuum degree of the degassing device 3 is lowered.
  • the current control device 6 of the ultraviolet oxidizing device reduces the supply current value to reduce excess electrical energy.
  • the electroregenerative ion exchange device 5 monitors the concentration chamber outlet flow meter FI 6 in response to a decrease in the measured value of the desalination chamber inlet flow meter FI 5 , and is used for the concentration chamber inlet water of the electroregenerative ion exchange device.
  • the flow rate control valve V 5 is closed to reduce the flow rate of concentrated water and adjust the water volume balance in the electroregenerative ion exchange device 5.
  • the treated water of the primary pure water system is treated with the minimum required chemical injection and electrical energy to maintain the quality of the treated water.
  • the amount of primary pure water produced can be reduced.
  • Control example III When the amount of water used in the subsystem is constant and the quality of the primary pure water deteriorates, in control examples I and II, a control example is shown when the amount of water used in the subsystem fluctuates, but the amount of water used in the subsystem is constant and does not fluctuate (the desalination chamber outlet flowmeter of the electroregenerative ion exchange device 5). FI 7 is constant), but when the water quality of the produced primary pure water fluctuates, for example, when the measured value of the water quality monitor deteriorates and the water quality deteriorates (for example, when the measured value of the resistivity ohmmeter M 2 decreases) ) Can perform the following controls.
  • the output of the high-pressure pump P 3 is increased to increase the amount of water supplied by the reverse osmosis membrane separation device 2 in order to increase the resistivity.
  • P 2 is performed, so that the value of pH meter M 1 is constant drug Note pump P 3 is controlled.
  • the flow rate control valve V 2 is opened according to the value of the water supply flow meter FI 1 increased here, the balance of the amount of water in the reverse osmosis membrane separation device 2 is changed, and the recovery rate of the treated water is changed. Increase the amount of treated water (permeated water amount) after lowering. By lowering the recovery rate of the treated water, the quality of the treated water of the reverse osmosis membrane separation device 2 can be improved.
  • deaerator 3 in response to an increase of the reverse osmosis membrane separation device 2 of the measurement values of the treated water flow meter FI 2, opens the nitrogen gas flow rate control valve V 3, increasing the amount of injected nitrogen gas.
  • the pressure control valve V 4 opens so that the vacuum pressure gauge PI 3 has a predetermined degree of vacuum, the output of the vacuum pump P 4 is increased, and the degree of vacuum of the deaerator 3 is increased.
  • the supply current value is increased by the current control device 6 of the ultraviolet oxidizing device 4 to promote the decomposition of organic matter.
  • the electroregenerative ion exchange device 5 monitors the concentration chamber outlet flow meter FI 6 in response to an increase in the measured value of the desalination chamber inlet flow meter FI 5 , and is used for the concentration chamber inlet water of the electroregenerative ion exchange device.
  • the flow rate control valve V 5 opens to increase the flow rate of concentrated water and change the balance of the amount of water in the electroregenerative ion exchange device 5 to improve the ion exchange efficiency. Since the amount of ions is increasing due to the deterioration of the water quality of the water to be treated of the electroregenerative ion exchange device 5, the current value supplied to the electroregenerative ion exchange device 5 is determined by the current control device 7 of the electroregenerative ion exchange device 5. Raise it to increase desalting efficiency.
  • the data is analyzed from the signals of the flow meter and the water quality monitor so that the water quality becomes constant in the calculation unit according to the fluctuation of the water amount and the water quality, and the opening degree of the flow control valve and the chemical injection pump are analyzed.
  • the primary pure water that is the treated water in the primary pure water system has a specific resistance value of 18 M ⁇ cm or more and a TOC concentration of 2 ⁇ g / L.
  • treated water having a boron concentration of 1 ng / L or less and a silica concentration of 0.1 ⁇ g / L or less is obtained, and primary pure water of such water quality is further treated by a subsystem to have a specific resistance value of 18.2 M ⁇ cm or more and TOC. It is preferable to produce ultrapure water having a concentration of 0.1 ⁇ g / L or less, a boron concentration of 1 ng / L or less, and a silica concentration of 0.1 ⁇ g / L or less.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Environmental & Geological Engineering (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Urology & Nephrology (AREA)
  • Physical Water Treatments (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Treatment Of Water By Ion Exchange (AREA)

Abstract

La présente invention est peu coûteuse, de manière stable, et produit de manière fiable de l'eau ultra pure de haute pureté qui répond suffisamment aux exigences de qualité de l'eau, indépendamment de la variation de la quantité et de la qualité de l'eau, tout en obtenant également une zone d'installation de dispositif réduite. Un dispositif de production d'eau ultra pure comprend : un système de prétraitement qui traite l'eau brute ; un système de purification d'eau primaire qui traite l'eau traitée par le système de prétraitement ; et un sous-système qui traite l'eau traitée par le système de purification d'eau primaire. Le système de purification d'eau primaire comprend, en tant que dispositifs constitutifs, au moins un dispositif de séparation à membrane d'osmose inverse, un dispositif de dégazage, un dispositif d'oxydation par ultraviolets et un dispositif d'échange d'ions dans cet ordre. Le dispositif de production d'eau ultrapure comprend un dispositif de surveillance qui surveille la quantité et/ou la qualité de l'eau dans le système de purification d'eau primaire et un moyen de commande qui commande les conditions de fonctionnement d'un ou plusieurs des dispositifs constitutifs en fonction d'une valeur détectée par le dispositif de surveillance.
PCT/JP2020/034827 2020-02-14 2020-09-15 Dispositif de production d'eau ultra-pure et procédé de production d'eau ultra-pure WO2021161569A1 (fr)

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