WO2021135113A1 - Dustproof structure, microphone packaging structure, and electronic device - Google Patents

Dustproof structure, microphone packaging structure, and electronic device Download PDF

Info

Publication number
WO2021135113A1
WO2021135113A1 PCT/CN2020/099179 CN2020099179W WO2021135113A1 WO 2021135113 A1 WO2021135113 A1 WO 2021135113A1 CN 2020099179 W CN2020099179 W CN 2020099179W WO 2021135113 A1 WO2021135113 A1 WO 2021135113A1
Authority
WO
WIPO (PCT)
Prior art keywords
dust
carrier
microphone
proof structure
filter screen
Prior art date
Application number
PCT/CN2020/099179
Other languages
French (fr)
Chinese (zh)
Inventor
林育菁
池上尚克
畠山庸平
Original Assignee
潍坊歌尔微电子有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 潍坊歌尔微电子有限公司 filed Critical 潍坊歌尔微电子有限公司
Publication of WO2021135113A1 publication Critical patent/WO2021135113A1/en

Links

Images

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/005Electrostatic transducers using semiconductor materials
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/04Microphones
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/003Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor for diaphragms or their outer suspension
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003Mems transducers or their use
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2231/00Details of apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor covered by H04R31/00, not provided for in its subgroups
    • H04R2231/001Moulding aspects of diaphragm or surround

Definitions

  • the present invention relates to the technical field of electro-acoustic conversion, and more specifically, the present invention relates to a dustproof structure, a microphone packaging structure, and an electronic device.
  • the microphone as a transducer that converts sound into electrical signals, is one of the most important devices in electroacoustic products.
  • microphones have been widely used in many different types of electronic products such as mobile phones, tablet computers, notebook computers, VR devices, AR devices, smart watches and smart wearables.
  • the design of the structure has become the focus and focus of research by those skilled in the art.
  • the existing microphone packaging structure usually includes a housing with a accommodating cavity in which components such as chip components (for example, MEMS chips and ASIC chips) are housed and fixed; and a sound pickup hole is also provided on the housing.
  • chip components for example, MEMS chips and ASIC chips
  • a sound pickup hole is also provided on the housing.
  • the currently adopted solution is usually to provide a corresponding isolation component on the pickup hole of the microphone packaging structure to block the entry of foreign particles, foreign objects, etc.
  • the existing isolation assembly as shown in FIG. 1 and FIG. 2, includes a support portion and an isolation mesh. When using the isolation component, install the isolation component on the pickup hole.
  • the existing isolation components due to the difference in size, material, structure, etc. between the support portion 101 and the isolation mesh 102, a certain internal stress difference is likely to occur at the position where the two are connected, which will lead to isolation.
  • the omentum 103 on the mesh cloth 102 produces wrinkles or wrinkles, which cannot guarantee that the omentum 103 is in a flat state, which will cause the quality of the product to decrease, and even affect the air flow at the omentum 103.
  • An object of the present invention is to provide a new technical solution for a dust-proof structure, a microphone packaging structure, and an electronic device.
  • a dust-proof structure including a carrier and a grid part
  • the carrier is a hollow structure; the grid part is arranged at one end of the carrier and covers the hollow structure;
  • the grid portion includes a filter screen, a stress buffer area provided around the filter screen, and a fixed portion provided around the stress buffer area.
  • the filter screen is opposite to the hollow structure, and the fixed portion is opposite to the carrier. Connected, the filter screen and the stress buffer area are suspended.
  • the stress buffer area is a ring structure with a predetermined width ⁇ , and the predetermined width ⁇ >0.
  • the ratio ⁇ of the width ⁇ of the filter screen to the predetermined width ⁇ of the stress buffer area is: 0% ⁇ 27%.
  • the width of the hollow structure of the carrier is greater than the maximum width of the filter screen.
  • the inner wall surface of the carrier is an inclined surface.
  • the inner wall surface of the carrier is formed with at least two inclination angles.
  • the inner wall surface of the carrier is a curved surface.
  • the fixing portion is fixedly connected to the carrier, the filter screen and the stress buffer area are suspended, and the cross section of the stress buffer area is L-shaped.
  • a microphone packaging structure includes a housing with an accommodating cavity, and a sound pickup hole is provided on the housing, and the sound pickup hole is used to communicate the inside and the outside of the housing;
  • the dust-proof structure is arranged on the sound pickup hole.
  • the dust-proof structure is located outside the housing.
  • the housing includes a substrate and a packaging cover, and the substrate and the packaging cover surround the containing cavity;
  • the dust-proof structure is contained in the containing cavity
  • the microphone device includes a MEMS chip and a signal amplifier.
  • the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the packaging cover.
  • the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the substrate to cover the MEMS chip.
  • the sound pickup hole is located on the substrate, and the dust-proof structure is fixedly provided on the substrate at a position corresponding to the sound pickup hole.
  • the sound pickup hole is located on the substrate
  • the dustproof structure is fixedly arranged on the substrate at a position corresponding to the sound pickup hole
  • the MEMS chip is arranged on the dustproof structure.
  • an electronic device includes the microphone packaging structure as described in any one of the above.
  • a stress buffer area is specially designed in it, which can keep the filter net on the grid part in a flat state and avoid the phenomenon of wrinkles or wrinkles on the filter net.
  • the dust-proof structure provided by the embodiment of the present invention can effectively protect the sound pickup hole of the microphone packaging structure, and the mesh part can block external particles and foreign objects from entering the inside of the microphone packaging structure, thereby effectively protecting the inside of the microphone.
  • the components in order to avoid affecting the acoustic performance and service life of the microphone.
  • Figure 1 is a side view of a conventional isolation assembly.
  • FIG. 2 is a schematic diagram of the structure of the isolation part in the existing isolation assembly.
  • Fig. 3 is a schematic structural diagram of a dust-proof structure according to an embodiment of the present invention.
  • Fig. 4 is a schematic structural diagram of a dust-proof structure according to another embodiment of the present invention.
  • Fig. 5 is a schematic structural diagram of a dust-proof structure according to another embodiment of the present invention.
  • Fig. 6 is a schematic structural diagram of a microphone packaging structure according to a first embodiment of the present invention.
  • Fig. 7 is a schematic structural diagram of a microphone packaging structure according to a second embodiment of the present invention.
  • FIG. 8 is a schematic structural diagram of a microphone packaging structure according to a third embodiment of the present invention.
  • Fig. 9 is a schematic structural diagram of a microphone packaging structure according to a fourth embodiment of the present invention.
  • Fig. 10 is a schematic structural diagram of a microphone packaging structure according to a fifth embodiment of the present invention.
  • 1-carrier 11-inner wall surface, 12-air flow channel, 2-mesh part, 21-filter, 22-fixed part, 23-stress buffer area, 3-shell, 31-package cover, 32-substrate, 4 -Pickup hole, 5-MEMS chip, 6-signal amplifier.
  • a dust-proof structure is provided.
  • the dust-proof structure can be applied to, for example, a microphone packaging structure.
  • the dust-proof structure can effectively block external particles and foreign objects from entering the microphone packaging structure through the pickup hole on the microphone packaging structure, thereby effectively protecting the internal components of the microphone to avoid affecting the microphone's acoustic performance and Service life.
  • the dust-proof structure provided by the embodiment of the present invention includes a carrier 1 and a grid portion 2.
  • the carrier 1 has a hollow structure, and an air flow channel 12 is formed inside the hollow structure for air flow.
  • the grid portion 2 is arranged at one end of the carrier 1 and covers the hollow structure.
  • the mesh portion 2 includes a filter screen 21, a stress buffer area 23 provided around the filter screen 21, and a fixing portion 22 provided around the stress buffer area 23, and the filter screen 21 is opposite to the hollow structure
  • the fixing portion 22 is connected to the carrier 1, and the filter mesh 21 and the stress buffer area 23 are suspended.
  • the stress buffer area 23 is specially designed to keep the filter mesh 21 on the mesh portion 2 in a flat state and avoid the occurrence of wrinkles or wrinkles on the filter mesh 21.
  • the dust-proof structure provided by the embodiment of the present invention can effectively protect the microphone packaging structure, and the mesh portion 2 can effectively block external particles and foreign objects from entering the microphone packaging structure, thereby effectively protecting the microphone packaging structure.
  • the various components of the microphone to avoid affecting the acoustic performance and service life of the microphone.
  • the filter mesh 21 on the mesh portion 2 is in a flat state, this also facilitates the smooth flow of air here, and will not adversely affect the movement of the airflow.
  • the stress buffer area 23 is a ring structure with a predetermined width ⁇ .
  • the predetermined width ⁇ should be greater than zero.
  • the stress buffer region 23 may be, for example, a circular ring structure with a predetermined width ⁇ , a square ring structure with a predetermined width ⁇ , or other ring structures with a predetermined width ⁇ . The technical personnel can flexibly adjust according to the specific situation, which is not limited in the present invention.
  • the grid portion 2 includes a filter mesh 21, a stress buffer area 23 provided around the filter mesh 21, and a fixing portion 22 provided around the stress buffer area 23.
  • the fixing portion 22 can be used to connect the grid portion 2 and the carrier 1 so that the grid portion 2 can be stably covered on the carrier 1.
  • the fixing portion 22 of the grid portion 2 and the edge portion of the carrier 1 can be connected together, for example, by means of adhesive bonding.
  • the two can also be connected by fasteners or welding.
  • the filter mesh 21 can be, for example, a metal mesh cloth with a mesh diameter of less than about 10 ⁇ m, so that the air flow can pass smoothly, and at the same time, it can effectively block the ingress of external dust, impurities and other particles.
  • the metal mesh cloth has the characteristics of good durability, does not need to be replaced frequently, and has a long service life.
  • the filter mesh 21 can also be made of meshes with other pore sizes and other materials.
  • the shape of the mesh opening of the filter mesh 21 may be, for example, a circle, a square, a triangle, or the like. Those skilled in the art can make adjustments flexibly according to specific needs, and there is no restriction on this.
  • the shape of the filter 21 itself can be, for example, a circle, a square, an oval, etc.
  • the filter 21 can also have other irregular shapes. Those skilled in the art can make adjustments flexibly according to actual needs, and the present invention does not limit this.
  • the size of the stress buffer area 23 should be reasonably adjusted and set according to the size of the filter mesh 21 on the grid portion 2.
  • the width dimension of the filter screen 21 is defined as ⁇
  • the ratio ⁇ between the width ⁇ of the filter screen 21 and the predetermined width ⁇ of the stress buffer area 23 should satisfy the relationship: 0% ⁇ 27%.
  • the inventors of the present invention found that within this range, ⁇ helps to keep the filter mesh 21 in a flat state without causing wrinkles thereon.
  • the filter mesh 21 on the grid portion 2 has a circular structure.
  • the ratio ⁇ of the diameter aa' of the filter screen 21 to the predetermined width ⁇ of the stress buffer region 23 should satisfy: 0% ⁇ 27%.
  • the width dimension of the hollow structure of the carrier 1 is larger than the width (or width) of the filter mesh 21.
  • the width dimension of the hollow structure of the carrier 1 should be greater than the maximum width of the filter screen 21. That is, what is designed in the present invention is that the filter mesh 21 itself cannot completely cover the hollow structure of the carrier 1.
  • the carrier 1 is improved, and the wall thickness of the carrier 1 is reduced, so that the width dimension of the hollow structure becomes larger. In this way, when the grid portion 2 is fixed on the carrier 1, a stress buffer area 23 with a certain space can be formed at the edge of the connecting position of the two. The stress buffering area 23 can well improve the defect that the filter mesh 21 is prone to wrinkles in the prior art.
  • the inner wall surface 11 of the carrier 1 is an inclined surface. That is, the wall surface of the hollow structure of the carrier 1 has a slope structure. Wherein, the inner wall surface of the carrier 1 may be inclined at a predetermined angle, and the inner wall surface forms a conical surface structure. Those skilled in the art can appropriately adjust the inclination angle according to specific needs, and there is no limitation on this.
  • the width of the carrier 1 is relatively large; the carrier 1 is far from the grid portion 2 At one end, the width of the carrier 1 is relatively small. This design makes the hollow structure of the carrier 1 form a tapered air flow channel 12.
  • the width of the carrier 1 is larger, which helps the two to be firmly and stably combined, and the tapered structure
  • the air flow channel 12 is conducive to air flow.
  • the inner wall surface 11 of the carrier 1 is formed with at least two inclination angles. It should be noted that when the inner wall surface of the carrier 1 forms two or more inclination angles, the slopes of the different inclination angles can be the same, of course, can also be different, and those skilled in the art can flexibly adjust according to the specific situation. , There is no restriction on this.
  • the width of the carrier 1 is relatively large; the carrier 1 is far from the grid portion 2 At one end, the width of the carrier 1 is relatively small.
  • the width of the carrier 1 is also relatively large due to the connection between the grid portion 2 and the carrier 1, which also contributes to the firm and stable combination of the two.
  • the inner wall surface 11 of the carrier 1 is not limited to the above two structures.
  • the inner wall surface 11 of the carrier 1 may also have an arc-shaped structure, that is, an arc-shaped surface, for example. This structure is relatively simple to implement.
  • the fixing portion 22 of the grid portion 2 is fixedly connected to the edge portion of the carrier 1, wherein the filter mesh 21 and the stress buffer area 23 is suspended, and the cross section of the stress buffer area 23 is L-shaped.
  • the thickness of the mesh portion 2 may be 0.5 ⁇ m, for example.
  • the height of the carrier 1 may be 40 ⁇ m, for example. This size is suitable for most microphone packaging structures. Of course, those skilled in the art can also make appropriate adjustments to the size according to specific assembly requirements, and there is no limitation on this.
  • a microphone packaging structure is also provided.
  • the microphone packaging structure can be applied to various types of electronic products such as mobile phones, notebook computers, Ipads, VR devices, and smart wearable devices, and its applications are relatively wide.
  • the microphone packaging structure provided by the embodiments of the present invention can effectively prevent internal chip components and other components from being damaged due to external dust, impurities and other particles and foreign objects, and can prolong the service life of the microphone and also make the microphone Maintain excellent acoustic performance.
  • the microphone packaging structure provided by the embodiment of the present invention includes a housing 3 with a receiving cavity, and a sound pickup hole 4 is provided on the housing 3.
  • the sound pickup hole 4 is used to communicate the inside and outside of the housing 3.
  • a microphone device is accommodated and fixed in the accommodating cavity of the housing 3.
  • the microphone packaging structure provided by the present invention further includes the dust-proof structure as described above, and the dust-proof structure is fixedly installed on the sound pickup hole 4.
  • the dustproof structure can effectively protect the components inside the microphone packaging structure.
  • the shape of the sound pickup hole 4 may be, for example, a circle, a square, a triangle, an ellipse, or the like.
  • the sound pickup hole 4 can be set to one or more according to needs.
  • the specific location of the sound pickup hole 4 can also be flexibly adjusted according to the specific situation of the microphone packaging structure, which is not limited in the present invention.
  • the dust-proof structure may be located outside the housing 3. That is, the sound pickup hole 4 is protected from the outside.
  • the dust-proof structure is installed on the outside of the microphone packaging structure to cover the pickup hole 4, and does not occupy the space inside the microphone packaging structure.
  • the position of the dustproof structure can be reasonably installed according to the position of the pickup hole 4, so that the dustproof structure can be aligned with the pickup hole 4, so as to prevent external particles and foreign objects from passing through the pickup hole 4. It is introduced into the microphone packaging structure.
  • the present invention is not limited to disposing the dust-proof structure outside the housing 3, and the dust-proof structure may also be disposed in the containing cavity of the housing 3.
  • the present invention can flexibly adjust the location of the dust-proof structure according to specific needs.
  • the housing 3 has a structure including a substrate 32 and a packaging cover 31, and the substrate 32 and the packaging cover 31 are combined to form the containing cavity.
  • the dust-proof structure is contained in the containing cavity of the housing 3.
  • the microphone device includes a MEMS chip 5 and a signal amplifier 6.
  • the sound pickup hole 4 is located on the packaging cover 31, and the dust-proof structure is fixedly connected to the packaging cover 32.
  • the position of the dust-proof structure corresponds to the sound pickup hole 4, which can prevent external particles and foreign objects from being introduced into the microphone packaging structure through the sound pickup hole 4.
  • the sound pickup hole 4 is located on the packaging cover 31, and the dust-proof structure is fixedly connected to the substrate 32 corresponding to the sound pickup hole 4 At the same time, the dust-proof structure also covers the MEMS chip 5, which can effectively protect the chip in the microphone packaging structure.
  • the sound pickup hole 4 is not limited to being opened on the packaging cover 31 of the housing 3, and may also be opened on the substrate 32.
  • the sound pickup hole 4 is located on the substrate 32, and the dust-proof structure is fixedly provided on the substrate 32 at a position corresponding to the sound pickup hole 4.
  • the sound pickup hole 4 is located on the substrate 32, the dustproof structure is fixedly provided on the substrate 32 at a position corresponding to the sound pickup hole 4, and the MEMS chip 5 is provided On the dust-proof structure.
  • the packaging cover 31 has a dish-like structure as a whole, which has an open end.
  • the material of the packaging cover 31 can be, for example, a metal material, a plastic material, or a PCB board.
  • the shape of the packaging cover 31 may be, for example, a cylindrical shape, a rectangular parallelepiped shape, or the like. Those skilled in the art can flexibly adjust according to actual needs, and there is no restriction on this.
  • the substrate 32 may be a circuit board well-known in the art, for example, a PCB board, etc., which is not limited.
  • the packaging cover 31 and the substrate 32 can be fixed together by, for example, adhesive bonding or solder paste welding. Those skilled in the art can flexibly choose according to their needs, and there is no limitation on this.
  • a microphone device is fixedly accommodated in the accommodating cavity of the housing 3.
  • the microphone device may include, for example, a MEMS chip 5 and a signal amplifier 6.
  • the MEMS chip 5 includes a substrate and a sensing film.
  • the substrate is also a hollow structure.
  • the sensing film is, for example, a piezoelectric element, a capacitive element, a piezoresistive element, and the like.
  • the sensing film is arranged at one end of the substrate and covers the hollow structure of the substrate.
  • the hollow structure forms a back cavity.
  • the MEMS chip 5 can be mounted on the substrate 32.
  • the MEMS chip 5 can also be mounted on the package cover 31, for example, a special adhesive can be used to bond the MEMS chip 5 on the package cover 31.
  • the MEMS chip 5 can also be turned on through the circuit layout in the substrate 32 in a flip-chip manner, which belongs to the common knowledge of those skilled in the art, and the present invention will not be described in detail here.
  • the signal amplifier 6 can be mounted on the package cover 31, of course, can also be mounted on the substrate 32.
  • the signal amplifier 6 can be, for example, an ASIC chip.
  • the ASIC chip is connected to the MEMS chip 5.
  • the electrical signal output by the MEMS chip 5 can be transmitted to the ASIC chip, processed and output by the ASIC chip.
  • the MEMS chip 5 and the ASIC chip 6 can be electrically connected through metal wires (bonding wires) to achieve mutual conduction between the two.
  • the MEMS chip 5 and/or the signal amplifier 6 may also be embedded in the substrate 32 or half embedded in the substrate 32.
  • a conductor is provided in the substrate 32, and a pad is provided on the substrate 32.
  • the conductor is, for example, a metalized through hole provided in the substrate 32.
  • the pad is electrically connected to the MEMS chip 5 and the signal amplifier 6 through a conductor.
  • the MEMS chip 5 and the signal amplifier 6 are buried in the substrate 32, at least one metal layer needs to be provided above and below the MEMS chip 5 and the signal amplifier 6 directly opposite. Ground the metal layer as a shield. A plurality of metal conductors are arranged around the MEMS chip 5 and the signal amplifier 6 to form a shielding structure together with the above-mentioned metal layer.
  • the design of embedding the MEMS chip 5 and the signal amplifier 6 in the substrate 32 eliminates the need to cover the surface of the signal amplifier 6 with protective glue, which can simplify the process and improve the product's resistance to light noise.
  • the present invention also provides an electronic device.
  • the electronic device includes the microphone packaging structure as described above.
  • the electronic device may be a mobile phone, a notebook computer, a tablet computer, a VR device, a smart wearable device, etc., which is not limited in the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Details Of Audible-Bandwidth Transducers (AREA)

Abstract

Disclosed are a dustproof structure, a microphone packaging structure, and an electronic device. The dustproof structure comprises a carrier and a grid part; the carrier is of a hollow structure; the grid part is arranged at one end of the carrier and covers the hollow structure; the grid part comprises a filter screen, a stress buffer area arranged around the filter screen, and a fixing part arranged around the stress buffer area, the filter screen is opposite to the hollow structure, the fixing part is connected to the carrier, and the filter screen and the stress buffer area are arranged in a suspended manner. One technical effect of the present invention is that the filter screen on the grid part can be kept in a flat state, so that the grid part can effectively block external particles and foreign matters from entering the microphone packaging structure.

Description

防尘结构、麦克风封装结构以及电子设备Dustproof structure, microphone packaging structure and electronic equipment 技术领域Technical field
本发明涉及电声转换技术领域,更具体地,本发明涉及一种防尘结构、麦克风封装结构以及电子设备。The present invention relates to the technical field of electro-acoustic conversion, and more specifically, the present invention relates to a dustproof structure, a microphone packaging structure, and an electronic device.
背景技术Background technique
随着电声技术的快速发展,各种电声产品层出不穷。麦克风作为一种将声音转换为电信号的换能器,是电声产品中非常重要的器件之一。如今,麦克风已经被广泛的应用于手机、平板电脑、笔记本电脑、VR设备、AR设备、智能手表以及智能穿戴等多种不同类型的电子产品中。近年来,对于麦克风封装结构而言,对其结构的设计成为了本领域技术人员研究的重点和热点。With the rapid development of electroacoustic technology, various electroacoustic products emerge in endlessly. The microphone, as a transducer that converts sound into electrical signals, is one of the most important devices in electroacoustic products. Today, microphones have been widely used in many different types of electronic products such as mobile phones, tablet computers, notebook computers, VR devices, AR devices, smart watches and smart wearables. In recent years, for the microphone packaging structure, the design of the structure has become the focus and focus of research by those skilled in the art.
现有的麦克风封装结构通常为:包括具有容纳腔的外壳,在容纳腔内收容固定有芯片组件(例如,MEMS芯片和ASIC芯片)等元器件;并且,在外壳上还设置有拾音孔。然而,在长期的应用中发现,外界的灰尘、杂质等颗粒物和异物很容易经拾音孔而被引入到麦克风的容纳腔中,而这些外界的颗粒物、异物会对容纳腔中的芯片组件等元器件造成一定的损伤,最终会影响到麦克风的声学性能以及使用寿命。The existing microphone packaging structure usually includes a housing with a accommodating cavity in which components such as chip components (for example, MEMS chips and ASIC chips) are housed and fixed; and a sound pickup hole is also provided on the housing. However, in long-term applications, it has been found that external dust, impurities and other particles and foreign objects are easily introduced into the microphone cavity through the pickup hole, and these external particles and foreign objects can affect the chip components in the cavity, etc. The components cause certain damage, which will eventually affect the acoustic performance and service life of the microphone.
针对上述的问题,目前所采用的解决方案通常是,在麦克风封装结构的拾音孔上设置相应的隔离组件,用以阻挡外界颗粒物、异物等的进入。现有的隔离组件,如图1和图2所示,包括有支撑部和隔离网布。在使用该隔离组件时,将隔离组件安装在拾音孔上。但现有的隔离组件,由于支撑部101与隔离网布102在尺寸、材料、结构等方面存在着差异,在二者连接的位置很可能会产生一定的内部应力差,而这将会导致隔离网布102上的网膜103产生褶皱或者皱纹,不能保证网膜103处于平整状态,而这将会造成产品的品质下降,甚至还会影响到网膜103处的气流流动。In view of the above-mentioned problems, the currently adopted solution is usually to provide a corresponding isolation component on the pickup hole of the microphone packaging structure to block the entry of foreign particles, foreign objects, etc. The existing isolation assembly, as shown in FIG. 1 and FIG. 2, includes a support portion and an isolation mesh. When using the isolation component, install the isolation component on the pickup hole. However, in the existing isolation components, due to the difference in size, material, structure, etc. between the support portion 101 and the isolation mesh 102, a certain internal stress difference is likely to occur at the position where the two are connected, which will lead to isolation. The omentum 103 on the mesh cloth 102 produces wrinkles or wrinkles, which cannot guarantee that the omentum 103 is in a flat state, which will cause the quality of the product to decrease, and even affect the air flow at the omentum 103.
发明内容Summary of the invention
本发明的一个目的是提供一种防尘结构、麦克风封装结构以及电子设备的新技术方案。An object of the present invention is to provide a new technical solution for a dust-proof structure, a microphone packaging structure, and an electronic device.
根据本发明的第一方面,提供了一种防尘结构,包括载体和网格部;According to the first aspect of the present invention, there is provided a dust-proof structure, including a carrier and a grid part;
所述载体为中空结构;所述网格部设置在所述载体的一端并覆盖所述中空结构;The carrier is a hollow structure; the grid part is arranged at one end of the carrier and covers the hollow structure;
所述网格部包括过滤网、围绕所述过滤网设置的应力缓冲区域以及围绕所述应力缓冲区域设置的固定部,所述过滤网与所述中空结构相对,所述固定部与所述载体连接,所述过滤网和所述应力缓冲区域悬空设置。The grid portion includes a filter screen, a stress buffer area provided around the filter screen, and a fixed portion provided around the stress buffer area. The filter screen is opposite to the hollow structure, and the fixed portion is opposite to the carrier. Connected, the filter screen and the stress buffer area are suspended.
可选地,所述应力缓冲区域为具有预定宽度α的环状结构,所述预定宽度α>0。Optionally, the stress buffer area is a ring structure with a predetermined width α, and the predetermined width α>0.
可选地,过滤网的宽度φ与所述应力缓冲区域的预定宽度α之比η为:0%<η<27%。Optionally, the ratio η of the width φ of the filter screen to the predetermined width α of the stress buffer area is: 0%<η<27%.
可选地,所述载体的中空结构的宽度大于所述过滤网的最大幅宽。Optionally, the width of the hollow structure of the carrier is greater than the maximum width of the filter screen.
可选地,所述载体的内壁面为斜面。Optionally, the inner wall surface of the carrier is an inclined surface.
可选地,所述载体的内壁面形成有至少两个倾斜角。Optionally, the inner wall surface of the carrier is formed with at least two inclination angles.
可选地,所述载体的内壁面为弧面。Optionally, the inner wall surface of the carrier is a curved surface.
可选地,所述固定部与所述载体固定连接,所述过滤网和所述应力缓冲区域悬空设置,所述应力缓冲区域的截面呈L型。Optionally, the fixing portion is fixedly connected to the carrier, the filter screen and the stress buffer area are suspended, and the cross section of the stress buffer area is L-shaped.
根据本发明的第二方面,提供了一种麦克风封装结构。所述麦克风封装结构包括具有容纳腔的外壳,在所述外壳上设置有拾音孔,所述拾音孔用于将所述外壳的内部和外部连通;According to a second aspect of the present invention, a microphone packaging structure is provided. The microphone packaging structure includes a housing with an accommodating cavity, and a sound pickup hole is provided on the housing, and the sound pickup hole is used to communicate the inside and the outside of the housing;
还包括麦克风器件,所述麦克风器件固定设置在所述容纳腔内;It also includes a microphone device, the microphone device is fixedly arranged in the accommodating cavity;
还包括如上任意一项所述的防尘结构,所述防尘结构设置在所述拾音孔上。It also includes the dust-proof structure as described in any one of the above, the dust-proof structure is arranged on the sound pickup hole.
可选地,所述防尘结构位于所述外壳的外部。Optionally, the dust-proof structure is located outside the housing.
可选地,所述外壳包括基板和封装盖,所述基板和所述封装盖围合成所述容纳腔;Optionally, the housing includes a substrate and a packaging cover, and the substrate and the packaging cover surround the containing cavity;
所述防尘结构收容在所述容纳腔内;The dust-proof structure is contained in the containing cavity;
所述麦克风器件包括MEMS芯片和信号放大器。The microphone device includes a MEMS chip and a signal amplifier.
可选地,拾音孔位于所述封装盖上,所述防尘结构与所述封装盖固定连接。Optionally, the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the packaging cover.
可选地,拾音孔位于所述封装盖上,所述防尘结构固定连接在所述基板上以覆盖住所述MEMS芯片。Optionally, the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the substrate to cover the MEMS chip.
可选地,拾音孔位于所述基板上,在所述基板上对应于拾音孔的位置固定设置有所述防尘结构。Optionally, the sound pickup hole is located on the substrate, and the dust-proof structure is fixedly provided on the substrate at a position corresponding to the sound pickup hole.
可选地,拾音孔位于所述基板上,在所述基板上对应于拾音孔的位置固定设置有所述防尘结构,所述MEMS芯片设置在所述防尘结构上。Optionally, the sound pickup hole is located on the substrate, the dustproof structure is fixedly arranged on the substrate at a position corresponding to the sound pickup hole, and the MEMS chip is arranged on the dustproof structure.
根据本发明的第三方面,提供了一种电子设备。所述电子设备包括如上任意一项所述的麦克风封装结构。According to a third aspect of the present invention, an electronic device is provided. The electronic device includes the microphone packaging structure as described in any one of the above.
本发明实施例提供的防尘结构,在其中特别设计了应力缓冲区域,能使网格部上的过滤网保持平整状态,避免出现过滤网上产生褶皱或者皱纹的现象。本发明实施例提供的防尘结构能对麦克风封装结构的拾音孔进行有效地保护,其中的网格部能阻隔外界的颗粒物、异物进入到麦克风封装结构的内部,从而能有效地保护麦克风内部的各元器件,以避免影响到麦克风的声学性能和使用寿命。本发明所要实现的技术任务或者所要解决的技术问题是本领域技术人员从未想到的或者没有预期到的,故本发明是一种新的技术方案。In the dust-proof structure provided by the embodiment of the present invention, a stress buffer area is specially designed in it, which can keep the filter net on the grid part in a flat state and avoid the phenomenon of wrinkles or wrinkles on the filter net. The dust-proof structure provided by the embodiment of the present invention can effectively protect the sound pickup hole of the microphone packaging structure, and the mesh part can block external particles and foreign objects from entering the inside of the microphone packaging structure, thereby effectively protecting the inside of the microphone The components in order to avoid affecting the acoustic performance and service life of the microphone. The technical task to be achieved or the technical problem to be solved by the present invention is never thought of or unexpected by those skilled in the art, so the present invention is a new technical solution.
通过以下参照附图对本发明的示例性实施例的详细描述,本发明的其它特征及其优点将会变得清楚。Through the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings, other features and advantages of the present invention will become clear.
附图说明Description of the drawings
被结合在说明书中并构成说明书的一部分的附图示出了本发明的实施例,并且连同其说明一起用于解释本发明的原理。The drawings incorporated in the specification and constituting a part of the specification illustrate the embodiments of the present invention, and together with the description are used to explain the principle of the present invention.
图1是现有的隔离组件的侧视图。Figure 1 is a side view of a conventional isolation assembly.
图2是现有的隔离组件内隔离部的结构示意图。FIG. 2 is a schematic diagram of the structure of the isolation part in the existing isolation assembly.
图3是根据本发明一个实施例提供的防尘结构的结构示意图。Fig. 3 is a schematic structural diagram of a dust-proof structure according to an embodiment of the present invention.
图4是根据本发明另一个实施例提供的防尘结构的结构示意图。Fig. 4 is a schematic structural diagram of a dust-proof structure according to another embodiment of the present invention.
图5是根据本发明又一个实施例提供的防尘结构的结构示意图。Fig. 5 is a schematic structural diagram of a dust-proof structure according to another embodiment of the present invention.
图6是根据本发明第一个实施例提供的麦克风封装结构的结构示意图。Fig. 6 is a schematic structural diagram of a microphone packaging structure according to a first embodiment of the present invention.
图7是根据本发明第二个实施例提供的麦克风封装结构的结构示意图。Fig. 7 is a schematic structural diagram of a microphone packaging structure according to a second embodiment of the present invention.
图8是根据本发明第三个实施例提供的麦克风封装结构的结构示意图。FIG. 8 is a schematic structural diagram of a microphone packaging structure according to a third embodiment of the present invention.
图9是根据本发明第四个实施例提供的麦克风封装结构的结构示意图。Fig. 9 is a schematic structural diagram of a microphone packaging structure according to a fourth embodiment of the present invention.
图10是根据本发明第五个实施例提供的麦克风封装结构的结构示意图。Fig. 10 is a schematic structural diagram of a microphone packaging structure according to a fifth embodiment of the present invention.
附图标记说明:Description of reference signs:
101-支撑部,102-隔离网布,103-网膜;101-support, 102-isolation mesh, 103-membrane;
1-载体,11-内壁面,12-气流通道,2-网格部,21-过滤网,22-固定部,23-应力缓冲区域,3-外壳,31-封装盖,32-基板,4-拾音孔,5-MEMS芯片,6-信号放大器。1-carrier, 11-inner wall surface, 12-air flow channel, 2-mesh part, 21-filter, 22-fixed part, 23-stress buffer area, 3-shell, 31-package cover, 32-substrate, 4 -Pickup hole, 5-MEMS chip, 6-signal amplifier.
具体实施方式Detailed ways
现在将参照附图来详细描述本发明的各种示例性实施例。应注意到:除非另外具体说明,否则在这些实施例中阐述的部件和步骤的相对布置、数字表达式和数值不限制本发明的范围。Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless specifically stated otherwise, the relative arrangement of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention.
以下对至少一个示例性实施例的描述实际上仅仅是说明性的,决不作为对本发明及其应用或使用的任何限制。The following description of at least one exemplary embodiment is actually only illustrative, and in no way serves as any limitation to the present invention and its application or use.
对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论,但在适当情况下,所述技术、方法和设备应当被视为说明书的一部分。The technologies, methods, and equipment known to those of ordinary skill in the relevant fields may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be regarded as part of the specification.
在这里示出和讨论的所有例子中,任何具体值应被解释为仅仅是示例性的,而不是作为限制。因此,示例性实施例的其它例子可以具有不同的值。In all examples shown and discussed herein, any specific value should be interpreted as merely exemplary, rather than as a limitation. Therefore, other examples of the exemplary embodiment may have different values.
应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步讨论。It should be noted that similar reference numerals and letters indicate similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further discussed in the subsequent drawings.
根据本发明的一个实施例,提供了一种防尘结构。该防尘结构可应用在例如麦克风封装结构上。该防尘结构能有效阻隔外界的颗粒物、异物经 麦克风封装结构上的拾音孔进入到麦克风封装结构的内部,从而能有效地保护麦克风内部的各元器件,以避免影响到麦克风的声学性能和使用寿命。According to an embodiment of the present invention, a dust-proof structure is provided. The dust-proof structure can be applied to, for example, a microphone packaging structure. The dust-proof structure can effectively block external particles and foreign objects from entering the microphone packaging structure through the pickup hole on the microphone packaging structure, thereby effectively protecting the internal components of the microphone to avoid affecting the microphone's acoustic performance and Service life.
以下就本发明实施例提供的防尘结构的具体结构进行进一步地说明。本发明实施例提供的防尘结构,如图3-图5所示,其包括有载体1以及网格部2。其中,所述载体1为中空结构,并在所述中空结构内部形成气流通道12,用以供气流通过。所述网格部2设置在所述载体1的一端并覆盖所述中空结构。所述网格部2包括有过滤网21、围绕所述过滤网21设置的应力缓冲区域23以及围绕所述应力缓冲区域23设置的固定部22,并且所述过滤网21与所述中空结构相对,所述固定部22与所述载体1连接,所述过滤网21和所述应力缓冲区域23悬空设置。The specific structure of the dustproof structure provided by the embodiment of the present invention will be further described below. The dust-proof structure provided by the embodiment of the present invention, as shown in FIGS. 3 to 5, includes a carrier 1 and a grid portion 2. Wherein, the carrier 1 has a hollow structure, and an air flow channel 12 is formed inside the hollow structure for air flow. The grid portion 2 is arranged at one end of the carrier 1 and covers the hollow structure. The mesh portion 2 includes a filter screen 21, a stress buffer area 23 provided around the filter screen 21, and a fixing portion 22 provided around the stress buffer area 23, and the filter screen 21 is opposite to the hollow structure The fixing portion 22 is connected to the carrier 1, and the filter mesh 21 and the stress buffer area 23 are suspended.
本发明实施例提供的防尘结构,在其中特别设计了应力缓冲区域23,能使网格部2上的过滤网21保持平整状态,避免出现过滤网21上产生褶皱或者皱纹的现象。本发明实施例提供的防尘结构能够对麦克风封装结构进行有效地保护,其中的网格部2能有效阻隔外界的颗粒物、异物进入到麦克风封装结构的内部,从而能有效地保护麦克风封装结构内部的各个元器件,以避免影响到麦克风的声学性能以及使用寿命。此外,由于网格部2上的过滤网21处于平整的状态,这样也有利于空气在此处的顺利流动,不会对气流的运动产生不良影响。In the dust-proof structure provided by the embodiment of the present invention, the stress buffer area 23 is specially designed to keep the filter mesh 21 on the mesh portion 2 in a flat state and avoid the occurrence of wrinkles or wrinkles on the filter mesh 21. The dust-proof structure provided by the embodiment of the present invention can effectively protect the microphone packaging structure, and the mesh portion 2 can effectively block external particles and foreign objects from entering the microphone packaging structure, thereby effectively protecting the microphone packaging structure. The various components of the microphone to avoid affecting the acoustic performance and service life of the microphone. In addition, since the filter mesh 21 on the mesh portion 2 is in a flat state, this also facilitates the smooth flow of air here, and will not adversely affect the movement of the airflow.
在本发明中,如图3所示,所述应力缓冲区域23为具有预定宽度α的环状结构。并且,所述预定宽度α应当大于0。需要说明的是,所述应力缓冲区域23例如可以为具有预定宽度α的圆环状结构,也可以为具有预定宽度α的方环结构,或者是具有预定宽度α的其它环状结构,本领域技术人员可以根据具体情况灵活的进行调整,本发明对此不作限制。In the present invention, as shown in FIG. 3, the stress buffer area 23 is a ring structure with a predetermined width α. And, the predetermined width α should be greater than zero. It should be noted that the stress buffer region 23 may be, for example, a circular ring structure with a predetermined width α, a square ring structure with a predetermined width α, or other ring structures with a predetermined width α. The technical personnel can flexibly adjust according to the specific situation, which is not limited in the present invention.
在本发明中,如图3所示,所述网格部2包括有过滤网21、围绕所述过滤网21设置的应力缓冲区域23以及围绕所述应力缓冲区域23设置的固定部22。其中,所述过滤网21与所述应力缓冲区域23为悬空设置。其中,所述固定部22可用于将所述网格部2与所述载体1连接起来,以使所述网格部2能够稳定的覆盖在所述载体1上。需要说明的是,当所述网格部2的固定部22与所述载体1连接时,其实是固定部22与载体1的边缘部分相 连。具体地,所述网格部2的固定部22与所述载体1的边缘部分之间例如可以通过粘合剂粘接的方式连接在一起,当然二者之间也可以通过紧固件或者焊接等方式连接在一起,本领域技术人员可以根据具体需要灵活选择,本发明对此不作限制。In the present invention, as shown in FIG. 3, the grid portion 2 includes a filter mesh 21, a stress buffer area 23 provided around the filter mesh 21, and a fixing portion 22 provided around the stress buffer area 23. Wherein, the filter mesh 21 and the stress buffer area 23 are suspended. Wherein, the fixing portion 22 can be used to connect the grid portion 2 and the carrier 1 so that the grid portion 2 can be stably covered on the carrier 1. It should be noted that when the fixed portion 22 of the grid portion 2 is connected to the carrier 1, the fixed portion 22 is actually connected to the edge portion of the carrier 1. Specifically, the fixing portion 22 of the grid portion 2 and the edge portion of the carrier 1 can be connected together, for example, by means of adhesive bonding. Of course, the two can also be connected by fasteners or welding. Those skilled in the art can flexibly choose according to specific needs, which is not limited by the present invention.
其中,所述过滤网21例如可以采用网孔孔径小于10μm左右的金属网布,以使气流能顺利的通过,同时还可以有效阻挡住外界的灰尘、杂质等颗粒物进入。而且,金属材质的网布具有耐用性好的特点,无需频繁更换,具有较长的使用寿命。当然,所述过滤网21也可以采用其它孔径尺寸和其它材质的网布。并且,所述过滤网21上网孔的形状例如可以为圆形、方形、三角形等形状。本领域技术人员可以根据具体需要灵活进行调整,对此不作限制。Wherein, the filter mesh 21 can be, for example, a metal mesh cloth with a mesh diameter of less than about 10 μm, so that the air flow can pass smoothly, and at the same time, it can effectively block the ingress of external dust, impurities and other particles. Moreover, the metal mesh cloth has the characteristics of good durability, does not need to be replaced frequently, and has a long service life. Of course, the filter mesh 21 can also be made of meshes with other pore sizes and other materials. In addition, the shape of the mesh opening of the filter mesh 21 may be, for example, a circle, a square, a triangle, or the like. Those skilled in the art can make adjustments flexibly according to specific needs, and there is no restriction on this.
此外,需要说明的是,在网格部2上,过滤网21本身的形状例如可以为圆形、方形、椭圆形等,当然过滤网21也可以为其它不规则的形状。本领域技术人员可以根据实际需要灵活进行调整,本发明对此也不作限制。In addition, it should be noted that on the mesh portion 2, the shape of the filter 21 itself can be, for example, a circle, a square, an oval, etc. Of course, the filter 21 can also have other irregular shapes. Those skilled in the art can make adjustments flexibly according to actual needs, and the present invention does not limit this.
在本发明中,所述应力缓冲区域23的尺寸应根据网格部2上过滤网21的尺寸合理调整、设置。例如,将过滤网21的宽度尺寸定义为φ,则过滤网21的宽度φ与应力缓冲区域23的预定宽度α之比η应当满足的关系为:0%<η<27%。本发明的发明人发现,η在该范围内,有助于使过滤网21保持平整的状态,且不会在其上产生皱纹。In the present invention, the size of the stress buffer area 23 should be reasonably adjusted and set according to the size of the filter mesh 21 on the grid portion 2. For example, if the width dimension of the filter screen 21 is defined as φ, the ratio η between the width φ of the filter screen 21 and the predetermined width α of the stress buffer area 23 should satisfy the relationship: 0%<η<27%. The inventors of the present invention found that within this range, η helps to keep the filter mesh 21 in a flat state without causing wrinkles thereon.
在本发明一个可选的例子中,如图3所示,所述网格部2上的过滤网21为圆形结构。在本例子中,过滤网21的直径aa′与应力缓冲区域23的预定宽度α之比η应当满足:0%<η<27%。此时,当将网格部2与载体1连接在一起后,网格部2上的过滤网21能保持平整,不会产生皱纹或者褶皱。In an optional example of the present invention, as shown in FIG. 3, the filter mesh 21 on the grid portion 2 has a circular structure. In this example, the ratio η of the diameter aa' of the filter screen 21 to the predetermined width α of the stress buffer region 23 should satisfy: 0%<η<27%. At this time, when the mesh portion 2 and the carrier 1 are connected together, the filter mesh 21 on the mesh portion 2 can be kept flat without wrinkles or wrinkles.
在本发明中,如图3-图5所示,所述载体1的中空结构的宽度尺寸大于所述过滤网21的幅宽(或者宽度)。当所述过滤网21本身为不规则的形状时,所述述载体1的中空结构的宽度尺寸应大于所述过滤网21的最大幅宽。即本发明中设计的是,过滤网21本身不能完全覆盖住所述载体1的中空结构。本发明中对于载体1进行了改良,减薄了载体1的壁厚,以使其中空结构的宽度尺寸变大。这样当将网格部2固定在载体1上时,能在 二者的连接位置边缘处形成一定空间的应力缓冲区域23。通过应力缓冲区域23良好的改善了现有技术中过滤网21易产生皱纹的缺陷。In the present invention, as shown in FIGS. 3 to 5, the width dimension of the hollow structure of the carrier 1 is larger than the width (or width) of the filter mesh 21. When the filter screen 21 itself has an irregular shape, the width dimension of the hollow structure of the carrier 1 should be greater than the maximum width of the filter screen 21. That is, what is designed in the present invention is that the filter mesh 21 itself cannot completely cover the hollow structure of the carrier 1. In the present invention, the carrier 1 is improved, and the wall thickness of the carrier 1 is reduced, so that the width dimension of the hollow structure becomes larger. In this way, when the grid portion 2 is fixed on the carrier 1, a stress buffer area 23 with a certain space can be formed at the edge of the connecting position of the two. The stress buffering area 23 can well improve the defect that the filter mesh 21 is prone to wrinkles in the prior art.
在本发明一个可选的例子中,如图3所示,所述载体1的内壁面11为斜面。即,载体1的中空结构的壁面呈斜面结构。其中,所述载体1的内壁面可以呈预定角度的倾斜,以其内壁面形成一种锥面结构,本领域技术人员可以根据具体需要对倾斜的角度进行适当的调整,对此不作限制。在本例子中,如图3所示,所述载体1与所述网格部2的固定部22连接的一端,载体1的宽度尺寸比较大;所述载体1远离所述网格部2的一端,载体1的宽度尺寸比较小。这一设计使得载体1的中空结构形成锥形的气流通道12。当将网格部2固定设置在载体1上时,由于网格部2与载体1连接处,载体1的宽度尺寸较大,从而有助于二者的牢固、稳定的结合,且锥形结构的气流通道12有利于气流流动。In an optional example of the present invention, as shown in FIG. 3, the inner wall surface 11 of the carrier 1 is an inclined surface. That is, the wall surface of the hollow structure of the carrier 1 has a slope structure. Wherein, the inner wall surface of the carrier 1 may be inclined at a predetermined angle, and the inner wall surface forms a conical surface structure. Those skilled in the art can appropriately adjust the inclination angle according to specific needs, and there is no limitation on this. In this example, as shown in FIG. 3, at the end where the carrier 1 is connected to the fixed portion 22 of the grid portion 2, the width of the carrier 1 is relatively large; the carrier 1 is far from the grid portion 2 At one end, the width of the carrier 1 is relatively small. This design makes the hollow structure of the carrier 1 form a tapered air flow channel 12. When the grid part 2 is fixedly arranged on the carrier 1, because the grid part 2 and the carrier 1 are connected, the width of the carrier 1 is larger, which helps the two to be firmly and stably combined, and the tapered structure The air flow channel 12 is conducive to air flow.
在本发明一个可选的例子中,如图4所示,所述载体1的内壁面11形成有至少两个倾斜角。需要说明的是,当载体1的内壁面形成两个倾斜角或者更多个倾斜角时,不同倾斜角的斜率可以相同,当然也可以不同,本领域技术人员可以根据具体的情况灵活的进行调整,对此不作限制。在本例子中,如图4所示,所述载体1与所述网格部2的固定部22连接的一端,载体1的宽度尺寸比较大;所述载体1远离所述网格部2的一端,载体1的宽度尺寸比较小。当将网格部2固定在载体1上时,由于网格部2与载体1连接处,载体1的宽度尺寸也比较大,这样也有助于二者的牢固、稳定的结合。In an optional example of the present invention, as shown in FIG. 4, the inner wall surface 11 of the carrier 1 is formed with at least two inclination angles. It should be noted that when the inner wall surface of the carrier 1 forms two or more inclination angles, the slopes of the different inclination angles can be the same, of course, can also be different, and those skilled in the art can flexibly adjust according to the specific situation. , There is no restriction on this. In this example, as shown in FIG. 4, at the end where the carrier 1 is connected to the fixed portion 22 of the grid portion 2, the width of the carrier 1 is relatively large; the carrier 1 is far from the grid portion 2 At one end, the width of the carrier 1 is relatively small. When the grid portion 2 is fixed on the carrier 1, the width of the carrier 1 is also relatively large due to the connection between the grid portion 2 and the carrier 1, which also contributes to the firm and stable combination of the two.
当然,在本发明中,所述载体1的内壁面11并不限于上述的两种结构。所述载体1的内壁面11例如还可以为弧形结构,即形成弧形面。该结构实现起来比较简单。Of course, in the present invention, the inner wall surface 11 of the carrier 1 is not limited to the above two structures. The inner wall surface 11 of the carrier 1 may also have an arc-shaped structure, that is, an arc-shaped surface, for example. This structure is relatively simple to implement.
在本发明一个可选的例子中,如图5所示,所述网格部2的固定部22与所述载体1的边缘部分固定连接,其中,所述过滤网21和所述应力缓冲区域23悬空设置,且所述应力缓冲区域23的截面呈L型。In an optional example of the present invention, as shown in FIG. 5, the fixing portion 22 of the grid portion 2 is fixedly connected to the edge portion of the carrier 1, wherein the filter mesh 21 and the stress buffer area 23 is suspended, and the cross section of the stress buffer area 23 is L-shaped.
需要说明的是,所述网格部2的固定部22与所述载体1连接时,例如可以采用粘接、焊接或者紧固件连接等方式,本领域技术人员可以根据 具体需要灵活调整,对此不作限制。It should be noted that when the fixing portion 22 of the grid portion 2 is connected to the carrier 1, for example, bonding, welding, or fastener connection can be used. Those skilled in the art can flexibly adjust according to specific needs. This is not limited.
此外,在本发明中,所述网格部2的厚度例如可以为0.5μm。所述载体1的高度例如可以为40μm。该尺寸适用于大多数的麦克风封装结构。当然,本领域技术人员也可以根据具体的装配需要对其尺寸进行适当的调整,对此不作限制。In addition, in the present invention, the thickness of the mesh portion 2 may be 0.5 μm, for example. The height of the carrier 1 may be 40 μm, for example. This size is suitable for most microphone packaging structures. Of course, those skilled in the art can also make appropriate adjustments to the size according to specific assembly requirements, and there is no limitation on this.
根据本发明的另一个实施例,还提供了一种麦克风封装结构。所述麦克风封装结构可应用于例如手机、笔记本电脑、Ipad、VR设备以及智能穿戴设备等多种类型的电子产品中,其应用较为广泛。本发明实施例提供的麦克风封装结构,能够有效避免内部的芯片组件等元器件受到外部灰尘、杂质等颗粒物、异物的影响而遭到破坏的现象,可以延长麦克风的使用寿命,而且还能使麦克风保持优良的声学性能。According to another embodiment of the present invention, a microphone packaging structure is also provided. The microphone packaging structure can be applied to various types of electronic products such as mobile phones, notebook computers, Ipads, VR devices, and smart wearable devices, and its applications are relatively wide. The microphone packaging structure provided by the embodiments of the present invention can effectively prevent internal chip components and other components from being damaged due to external dust, impurities and other particles and foreign objects, and can prolong the service life of the microphone and also make the microphone Maintain excellent acoustic performance.
以下就本发明实施例提供的麦克风封装结构的具体结构进行进一步地说明。The specific structure of the microphone packaging structure provided by the embodiment of the present invention will be further described below.
如图6-图10所示,本发明实施例提供的麦克风封装结构,其包括具有容纳腔的外壳3,在所述外壳3上设置有拾音孔4。所述拾音孔4用于将所述外壳3的内部和外部连通。在所述外壳3的容纳腔内收容固定有麦克风器件。本发明提供的麦克风封装结构,还包括如上所述的防尘结构,所述防尘结构被固定安装在所述拾音孔4上。所述防尘结构能有效保护麦克风封装结构内部的元器件。As shown in FIGS. 6-10, the microphone packaging structure provided by the embodiment of the present invention includes a housing 3 with a receiving cavity, and a sound pickup hole 4 is provided on the housing 3. The sound pickup hole 4 is used to communicate the inside and outside of the housing 3. A microphone device is accommodated and fixed in the accommodating cavity of the housing 3. The microphone packaging structure provided by the present invention further includes the dust-proof structure as described above, and the dust-proof structure is fixedly installed on the sound pickup hole 4. The dustproof structure can effectively protect the components inside the microphone packaging structure.
本发明中,所述拾音孔4的形状例如可以为圆形、方形、三角形、椭圆形等。所述拾音孔4可以根据需要设置为一个或者多个。所述拾音孔4的具体设置位置也可以根据麦克风封装结构的具体情况灵活进行调整,本发明对此不作限制。In the present invention, the shape of the sound pickup hole 4 may be, for example, a circle, a square, a triangle, an ellipse, or the like. The sound pickup hole 4 can be set to one or more according to needs. The specific location of the sound pickup hole 4 can also be flexibly adjusted according to the specific situation of the microphone packaging structure, which is not limited in the present invention.
在本发明一个可选的例子中,如图6所示,所述防尘结构可以位于所述外壳3的外部。即,从外部对拾音孔4进行防护。在本例子中,将防尘结构安装在麦克风封装结构的外部覆盖住拾音孔4,不占用麦克风封装结构内部的空间。在安装防尘结构时,可以根据拾音孔4的位置,合理安装防尘结构的位置,以使防尘结构能对准拾音孔4,从而能避免外界的颗粒物、异物经拾音孔4而引入到麦克风封装结构内部。In an optional example of the present invention, as shown in FIG. 6, the dust-proof structure may be located outside the housing 3. That is, the sound pickup hole 4 is protected from the outside. In this example, the dust-proof structure is installed on the outside of the microphone packaging structure to cover the pickup hole 4, and does not occupy the space inside the microphone packaging structure. When installing the dustproof structure, the position of the dustproof structure can be reasonably installed according to the position of the pickup hole 4, so that the dustproof structure can be aligned with the pickup hole 4, so as to prevent external particles and foreign objects from passing through the pickup hole 4. It is introduced into the microphone packaging structure.
当然,本发明中并不限于将防尘结构设置在外壳3的外部,也可以将防尘结构设置在外壳3的容纳腔中。本领域技术人员可以根据具体需要灵活调整防尘结构的设置位置。Of course, the present invention is not limited to disposing the dust-proof structure outside the housing 3, and the dust-proof structure may also be disposed in the containing cavity of the housing 3. Those skilled in the art can flexibly adjust the location of the dust-proof structure according to specific needs.
本发明的麦克风封装结构,其外壳3的结构为:包括基板32和封装盖31,并由所述基板32和所述封装盖31一起围合成所述容纳腔。所述防尘结构收容在外壳3的容纳腔内。所述麦克风器件包括MEMS芯片5和信号放大器6。In the microphone packaging structure of the present invention, the housing 3 has a structure including a substrate 32 and a packaging cover 31, and the substrate 32 and the packaging cover 31 are combined to form the containing cavity. The dust-proof structure is contained in the containing cavity of the housing 3. The microphone device includes a MEMS chip 5 and a signal amplifier 6.
在本发明一个可选的例子中,如图7所示,拾音孔4位于所述封装盖31上,所述防尘结构与所述封装盖32固定连接。防尘结构的位置对应于拾音孔4,能避免外界的颗粒物、异物经拾音孔4而引入到麦克风封装结构内部。In an optional example of the present invention, as shown in FIG. 7, the sound pickup hole 4 is located on the packaging cover 31, and the dust-proof structure is fixedly connected to the packaging cover 32. The position of the dust-proof structure corresponds to the sound pickup hole 4, which can prevent external particles and foreign objects from being introduced into the microphone packaging structure through the sound pickup hole 4.
在本发明一个可选的例子中,如图8所示,拾音孔4位于所述封装盖31上,所述防尘结构固定连接在所述基板32上对应于所述拾音孔4的位置,与此同时,所述防尘结构还覆盖住MEMS芯片5上,能对麦克风封装结构内的芯片进行有效的保护。In an optional example of the present invention, as shown in FIG. 8, the sound pickup hole 4 is located on the packaging cover 31, and the dust-proof structure is fixedly connected to the substrate 32 corresponding to the sound pickup hole 4 At the same time, the dust-proof structure also covers the MEMS chip 5, which can effectively protect the chip in the microphone packaging structure.
在本发明中,拾音孔4并不限于开设在外壳3的封装盖31上,也可以开设在基板32上。例如,如图9所示,拾音孔4位于所述基板32上,在所述基板32上对应于拾音孔4的位置固定设置有所述防尘结构。又例如,如图10所示,拾音孔4位于所述基板32上,在所述基板32上对应于拾音孔4的位置固定设置有所述防尘结构,且所述MEMS芯片5设置在所述防尘结构上。需要说明的是,当将拾音孔4开设在基板32上时,本领域技术人员可以根据具体情况调整防尘结构的安装位置,只要能阻止外界的颗粒物、异物进入或者能对内部芯片进行保护即可,对此不作限制。In the present invention, the sound pickup hole 4 is not limited to being opened on the packaging cover 31 of the housing 3, and may also be opened on the substrate 32. For example, as shown in FIG. 9, the sound pickup hole 4 is located on the substrate 32, and the dust-proof structure is fixedly provided on the substrate 32 at a position corresponding to the sound pickup hole 4. For another example, as shown in FIG. 10, the sound pickup hole 4 is located on the substrate 32, the dustproof structure is fixedly provided on the substrate 32 at a position corresponding to the sound pickup hole 4, and the MEMS chip 5 is provided On the dust-proof structure. It should be noted that when the sound pickup hole 4 is opened on the substrate 32, those skilled in the art can adjust the installation position of the dust-proof structure according to the specific situation, as long as it can prevent external particles and foreign objects from entering or can protect the internal chip Yes, there is no restriction on this.
其中,所述封装盖31整体呈皿状结构,其具有敞开端。所述封装盖31的材质例如可以为金属材料、塑料材料或者PCB板等。所述封装盖31的形状例如可以为圆柱状、长方体状等。本领域技术人员可以根据实际需要灵活调整,对此不作限制。Wherein, the packaging cover 31 has a dish-like structure as a whole, which has an open end. The material of the packaging cover 31 can be, for example, a metal material, a plastic material, or a PCB board. The shape of the packaging cover 31 may be, for example, a cylindrical shape, a rectangular parallelepiped shape, or the like. Those skilled in the art can flexibly adjust according to actual needs, and there is no restriction on this.
其中,所述基板32可以采用本领域熟知的电路板,例如可以采用PCB板等,对此不作限制。所述封装盖31与所述基板32之间例如可以通过粘 结剂粘接或者锡膏焊接结合固定在一起,本领域技术人员可以根据需要灵活选择,对此不作限制。Wherein, the substrate 32 may be a circuit board well-known in the art, for example, a PCB board, etc., which is not limited. The packaging cover 31 and the substrate 32 can be fixed together by, for example, adhesive bonding or solder paste welding. Those skilled in the art can flexibly choose according to their needs, and there is no limitation on this.
本发明提供的麦克风封装结构,在外壳3的容纳腔中固定收容有麦克风器件。具体地,如图6-图10所示,所述麦克风器件例如可以包括有MEMS芯片5和信号放大器6。In the microphone packaging structure provided by the present invention, a microphone device is fixedly accommodated in the accommodating cavity of the housing 3. Specifically, as shown in FIGS. 6-10, the microphone device may include, for example, a MEMS chip 5 and a signal amplifier 6.
其中,所述MEMS芯片5包括有衬底和感应膜。衬底也为中空结构。感应膜例如为压电元件、电容元件、压阻元件等。感应膜设置在衬底的一端,并覆盖衬底的中空结构。该中空结构形成背腔。在收容腔内固定MEMS芯片5时,MEMS芯片5可以贴装在基板32上。当然,MEMS芯片5也可以贴装在封装盖31上,例如可以采用专门的胶黏剂将MEMS芯片5粘接在封装盖31上。MEMS芯片5也可以采用倒装的方式通过基板32中的电路布图导通,这属于本领域技术人员的公知常识,本发明在此不再具体说明。Wherein, the MEMS chip 5 includes a substrate and a sensing film. The substrate is also a hollow structure. The sensing film is, for example, a piezoelectric element, a capacitive element, a piezoresistive element, and the like. The sensing film is arranged at one end of the substrate and covers the hollow structure of the substrate. The hollow structure forms a back cavity. When the MEMS chip 5 is fixed in the accommodating cavity, the MEMS chip 5 can be mounted on the substrate 32. Of course, the MEMS chip 5 can also be mounted on the package cover 31, for example, a special adhesive can be used to bond the MEMS chip 5 on the package cover 31. The MEMS chip 5 can also be turned on through the circuit layout in the substrate 32 in a flip-chip manner, which belongs to the common knowledge of those skilled in the art, and the present invention will not be described in detail here.
其中,所述信号放大器6可以贴装在封装盖31,当然也可以贴装在基板32上。信号放大器6例如可以采用ASIC芯片。ASIC芯片与MEMS芯片5连接。MEMS芯片5输出的电信号可以传输到ASIC芯片中,并被ASIC芯片处理、输出。MEMS芯片5与ASIC芯片6之间可以通过金属导线(焊线)进行电性连接,以实现二者之间的相互导通。Wherein, the signal amplifier 6 can be mounted on the package cover 31, of course, can also be mounted on the substrate 32. The signal amplifier 6 can be, for example, an ASIC chip. The ASIC chip is connected to the MEMS chip 5. The electrical signal output by the MEMS chip 5 can be transmitted to the ASIC chip, processed and output by the ASIC chip. The MEMS chip 5 and the ASIC chip 6 can be electrically connected through metal wires (bonding wires) to achieve mutual conduction between the two.
此外,MEMS芯片5和/或信号放大器6也可以埋入到基板32内,或者半埋入基板32内。例如,在基板32内设置导体,并在基板32上设置焊盘。导体例如为设置在基板32内的金属化通孔。焊盘与MEMS芯片5、信号放大器6通过导体电连接。将MEMS芯片5和信号放大器6埋设到基板32内的设计,有助于实现麦克风的小型化。In addition, the MEMS chip 5 and/or the signal amplifier 6 may also be embedded in the substrate 32 or half embedded in the substrate 32. For example, a conductor is provided in the substrate 32, and a pad is provided on the substrate 32. The conductor is, for example, a metalized through hole provided in the substrate 32. The pad is electrically connected to the MEMS chip 5 and the signal amplifier 6 through a conductor. The design of embedding the MEMS chip 5 and the signal amplifier 6 in the substrate 32 contributes to miniaturization of the microphone.
需要说明的是,当将MEMS芯片5和信号放大器6埋入基板32内时,需要在MEMS芯片5和信号放大器6正对的上方和下方至少各设置一层金属层。将金属层接地作为屏蔽。MEMS芯片5和信号放大器6周围区域布置有多个金属导体,用于与上述金属层一起构成屏蔽结构。将MEMS芯片5和信号放大器6埋入基板32内的设计,使得不必在信号放大器6表面包覆保护胶,这样可以简化工艺,同时提升了产品的光噪声抵抗能力。It should be noted that when the MEMS chip 5 and the signal amplifier 6 are buried in the substrate 32, at least one metal layer needs to be provided above and below the MEMS chip 5 and the signal amplifier 6 directly opposite. Ground the metal layer as a shield. A plurality of metal conductors are arranged around the MEMS chip 5 and the signal amplifier 6 to form a shielding structure together with the above-mentioned metal layer. The design of embedding the MEMS chip 5 and the signal amplifier 6 in the substrate 32 eliminates the need to cover the surface of the signal amplifier 6 with protective glue, which can simplify the process and improve the product's resistance to light noise.
另一方面,本发明还提供了一种电子设备。所述电子设备包括如前所 述的麦克风封装结构。On the other hand, the present invention also provides an electronic device. The electronic device includes the microphone packaging structure as described above.
其中,所述电子设备可以是手机、笔记本电脑、平板电脑、VR设备、智能穿戴设备等,本发明对此不作限制。Wherein, the electronic device may be a mobile phone, a notebook computer, a tablet computer, a VR device, a smart wearable device, etc., which is not limited in the present invention.
虽然已经通过例子对本发明的一些特定实施例进行了详细说明,但是本领域的技术人员应该理解,以上例子仅是为了进行说明,而不是为了限制本发明的范围。本领域的技术人员应该理解,可在不脱离本发明的范围和精神的情况下,对以上实施例进行修改。本发明的范围由所附权利要求来限定。Although some specific embodiments of the present invention have been described in detail through examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present invention. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present invention. The scope of the invention is defined by the appended claims.

Claims (16)

  1. 一种防尘结构,其特征在于:包括载体和网格部;A dust-proof structure, characterized in that it comprises a carrier and a grid part;
    所述载体为中空结构;所述网格部设置在所述载体的一端并覆盖所述中空结构;The carrier is a hollow structure; the grid part is arranged at one end of the carrier and covers the hollow structure;
    所述网格部包括过滤网、围绕所述过滤网设置的应力缓冲区域以及围绕所述应力缓冲区域设置的固定部,所述过滤网与所述中空结构相对,所述固定部与所述载体连接,所述过滤网和所述应力缓冲区域悬空设置。The grid portion includes a filter screen, a stress buffer area provided around the filter screen, and a fixing portion provided around the stress buffer area. The filter screen is opposite to the hollow structure, and the fixed portion is opposite to the carrier. Connected, the filter screen and the stress buffer area are suspended.
  2. 根据权利要求1所述的防尘结构,其特征在于:所述应力缓冲区域为具有预定宽度α的环状结构,所述预定宽度α>0。The dust-proof structure according to claim 1, wherein the stress buffer area is a ring structure with a predetermined width α, and the predetermined width α>0.
  3. 根据权利要求2所述的防尘结构,其特征在于:过滤网的宽度φ与所述应力缓冲区域的预定宽度α之比η为:0%<η<27%。The dust-proof structure according to claim 2, wherein the ratio η of the width φ of the filter screen to the predetermined width α of the stress buffer area is: 0%<η<27%.
  4. 根据权利要求1所述的防尘结构,其特征在于:所述载体的中空结构的宽度大于所述过滤网的最大幅宽。The dust-proof structure according to claim 1, wherein the width of the hollow structure of the carrier is greater than the maximum width of the filter screen.
  5. 根据权利要求1所述的防尘结构,其特征在于:所述载体的内壁面为斜面。The dust-proof structure according to claim 1, wherein the inner wall surface of the carrier is an inclined surface.
  6. 根据权利要求1所述的防尘结构,其特征在于:所述载体的内壁面形成有至少两个倾斜角。The dust-proof structure according to claim 1, wherein the inner wall surface of the carrier is formed with at least two inclination angles.
  7. 根据权利要求1所述的防尘结构,其特征在于:所述载体的内壁面为弧面。The dust-proof structure according to claim 1, wherein the inner wall surface of the carrier is a curved surface.
  8. 根据权利要求1所述的防尘结构,其特征在于:所述固定部与所述载体固定连接,所述过滤网和所述应力缓冲区域悬空设置,所述应力缓冲 区域的截面呈L型。The dust-proof structure according to claim 1, wherein the fixing part is fixedly connected to the carrier, the filter screen and the stress buffer area are suspended, and the cross section of the stress buffer area is L-shaped.
  9. 一种麦克风封装结构,其特征在于:包括具有容纳腔的外壳,在所述外壳上设置有拾音孔,所述拾音孔用于将所述外壳的内部和外部连通;A microphone packaging structure, characterized in that it comprises a housing with a containing cavity, and a sound pickup hole is provided on the housing, and the sound pickup hole is used to communicate the inside and the outside of the housing;
    还包括麦克风器件,所述麦克风器件固定设置在所述容纳腔内;It also includes a microphone device, the microphone device being fixedly arranged in the containing cavity;
    还包括如权利要求1-8中任意一项所述的防尘结构,所述防尘结构设置在所述拾音孔上。It also includes the dust-proof structure according to any one of claims 1-8, which is arranged on the sound pickup hole.
  10. 根据权利要求9所述的麦克风封装结构,其特征在于:所述防尘结构位于所述外壳的外部。9. The microphone packaging structure according to claim 9, wherein the dust-proof structure is located outside the housing.
  11. 根据权利要求9所述的麦克风封装结构,其特征在于:所述外壳包括基板和封装盖,所述基板和所述封装盖围合成所述容纳腔;The microphone packaging structure according to claim 9, wherein the housing includes a substrate and a packaging cover, and the substrate and the packaging cover surround the containing cavity;
    所述防尘结构收容在所述容纳腔内;The dust-proof structure is contained in the containing cavity;
    所述麦克风器件包括MEMS芯片和信号放大器。The microphone device includes a MEMS chip and a signal amplifier.
  12. 根据权利要求11所述的麦克风封装结构,其特征在于:拾音孔位于所述封装盖上,所述防尘结构与所述封装盖固定连接。11. The microphone packaging structure of claim 11, wherein the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the packaging cover.
  13. 根据权利要求11所述的麦克风封装结构,其特征在于:拾音孔位于所述封装盖上,所述防尘结构固定连接在所述基板上以覆盖住所述MEMS芯片。11. The microphone packaging structure of claim 11, wherein the sound pickup hole is located on the packaging cover, and the dust-proof structure is fixedly connected to the substrate to cover the MEMS chip.
  14. 根据权利要求11所述的麦克风封装结构,其特征在于:拾音孔位于所述基板上,在所述基板上对应于拾音孔的位置固定设置有所述防尘结构。The microphone packaging structure according to claim 11, wherein the sound pickup hole is located on the substrate, and the dustproof structure is fixedly provided on the substrate at a position corresponding to the sound pickup hole.
  15. 根据权利要求11所述的麦克风封装结构,其特征在于:拾音孔位于所述基板上,在所述基板上对应于拾音孔的位置固定设置有所述防尘 结构,所述MEMS芯片设置在所述防尘结构上。The microphone package structure according to claim 11, wherein the sound pickup hole is located on the substrate, the dustproof structure is fixedly provided on the substrate at a position corresponding to the sound pickup hole, and the MEMS chip is provided On the dust-proof structure.
  16. 一种电子设备,其特征在于:包括如权利要求9-15中任意一项所述的麦克风封装结构。An electronic device, characterized by comprising the microphone packaging structure according to any one of claims 9-15.
PCT/CN2020/099179 2019-12-31 2020-06-30 Dustproof structure, microphone packaging structure, and electronic device WO2021135113A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201911421956.8A CN111147995A (en) 2019-12-31 2019-12-31 Dustproof structure, microphone packaging structure and electronic equipment
CN201911421956.8 2019-12-31

Publications (1)

Publication Number Publication Date
WO2021135113A1 true WO2021135113A1 (en) 2021-07-08

Family

ID=70522917

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/099179 WO2021135113A1 (en) 2019-12-31 2020-06-30 Dustproof structure, microphone packaging structure, and electronic device

Country Status (2)

Country Link
CN (1) CN111147995A (en)
WO (1) WO2021135113A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111147992A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device
CN110958549A (en) * 2019-12-31 2020-04-03 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device
CN110933579A (en) * 2019-12-31 2020-03-27 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147995A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111711903B (en) * 2020-06-24 2021-10-01 歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone
CN111711905B (en) * 2020-06-24 2021-08-17 歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone
CN112087696B (en) * 2020-06-30 2022-01-07 歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone
CN111711907B (en) * 2020-06-30 2021-08-06 歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone
CN112492481A (en) * 2020-12-02 2021-03-12 潍坊歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone
CN112492476B (en) * 2020-12-02 2022-08-09 潍坊歌尔微电子有限公司 Miniature microphone dust keeper and MEMS microphone

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104760924A (en) * 2015-04-20 2015-07-08 歌尔声学股份有限公司 MEMS microphone chip and package structure and manufacture method thereof
CN206878932U (en) * 2017-05-22 2018-01-12 维沃移动通信有限公司 A kind of microphone and mobile terminal
US9992563B2 (en) * 2016-10-25 2018-06-05 AAC Technologies Pte. Ltd. MEMS microphone
CN108796435A (en) * 2018-05-28 2018-11-13 昆山国显光电有限公司 Mask and preparation method thereof
CN110602602A (en) * 2019-09-18 2019-12-20 歌尔股份有限公司 Electronic equipment and audio module thereof
CN111050257A (en) * 2019-12-31 2020-04-21 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111131986A (en) * 2019-12-31 2020-05-08 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147994A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147995A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147993A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147992A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device
CN111163410A (en) * 2019-12-31 2020-05-15 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202460244U (en) * 2012-03-09 2012-10-03 Gkd(北京)工业技术有限公司 Sewage filter plate
CN204442602U (en) * 2015-02-15 2015-07-01 歌尔声学股份有限公司 A kind of MEMS sensor
CN206674179U (en) * 2017-04-19 2017-11-24 惠州市中星汽车电子有限公司 A kind of vehicle-mounted voice processing unit based on 3G communications
CN206955792U (en) * 2017-06-16 2018-02-02 郝建文 A kind of buffering filter based on membrane for water treatment component
CN209105452U (en) * 2019-01-15 2019-07-12 歌尔科技有限公司 MEMS microphone and electronic equipment
CN209692220U (en) * 2019-05-23 2019-11-26 郑州华能电控设备有限公司 Novel AC metal enclosed ring network switch cabinet device
CN211557476U (en) * 2019-12-31 2020-09-22 潍坊歌尔微电子有限公司 Dustproof structure, microphone packaging structure and electronic equipment

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104760924A (en) * 2015-04-20 2015-07-08 歌尔声学股份有限公司 MEMS microphone chip and package structure and manufacture method thereof
US9992563B2 (en) * 2016-10-25 2018-06-05 AAC Technologies Pte. Ltd. MEMS microphone
CN206878932U (en) * 2017-05-22 2018-01-12 维沃移动通信有限公司 A kind of microphone and mobile terminal
CN108796435A (en) * 2018-05-28 2018-11-13 昆山国显光电有限公司 Mask and preparation method thereof
CN110602602A (en) * 2019-09-18 2019-12-20 歌尔股份有限公司 Electronic equipment and audio module thereof
CN111050257A (en) * 2019-12-31 2020-04-21 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111131986A (en) * 2019-12-31 2020-05-08 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147994A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147995A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147993A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 Dustproof structure, microphone packaging structure and electronic equipment
CN111147992A (en) * 2019-12-31 2020-05-12 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device
CN111163410A (en) * 2019-12-31 2020-05-15 歌尔股份有限公司 A dustproof construction and MEMS microphone packaging structure for MEMS device

Also Published As

Publication number Publication date
CN111147995A (en) 2020-05-12

Similar Documents

Publication Publication Date Title
WO2021135113A1 (en) Dustproof structure, microphone packaging structure, and electronic device
WO2021135116A1 (en) Dustproof structure, microphone packaging structure and electronic device
WO2021135107A1 (en) Dustproof structure, microphone encapsulation structure, and electronic device
WO2021135108A1 (en) Dustproof structure, microphone packaging structure and electronic device
WO2021135111A1 (en) Dustproof structure for mems device and mems microphone packaging structure
WO2021135125A1 (en) Dustproof structure for mems device and mems microphone packaging structure
WO2021135115A1 (en) Dustproof structure, microphone packaging structure and electronic device
WO2021135109A1 (en) Dustproof structure, microphone packaging structure and electronic device
US9992563B2 (en) MEMS microphone
WO2021135118A1 (en) Dustproof structure, microphone packaging structure and electronic device
US8553911B2 (en) Diaphragm of MEMS electroacoustic transducer
US20100166215A1 (en) Wind noise rejection apparatus
WO2021135110A1 (en) Dustproof structure and mems microphone packaging structure used for mems device
WO2021135120A1 (en) Dustproof structure, microphone packaging structure and electronic device
CN107211224A (en) Silicon microphone device and use its electronic equipment
CN211557476U (en) Dustproof structure, microphone packaging structure and electronic equipment
CN211047215U (en) A dustproof construction and MEMS microphone packaging structure for MEMS device
WO2021135119A1 (en) Dustproof structure for mems device and mems microphone packaging structure
CN211557479U (en) Dustproof structure, microphone packaging structure and electronic equipment
CN211047214U (en) A dustproof construction and MEMS microphone packaging structure for MEMS device
CN211557480U (en) Dustproof structure, microphone packaging structure and electronic equipment
CN211557481U (en) Dustproof structure, microphone packaging structure and electronic equipment
CN205946167U (en) Two directional pickup silicon microphone
CN211557482U (en) Dustproof structure, microphone packaging structure and electronic equipment
CN211531329U (en) Dustproof structure, microphone packaging structure and electronic equipment

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20910385

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20910385

Country of ref document: EP

Kind code of ref document: A1