WO2021111614A1 - Appareil de commutation d'impact laser, dispositif d'émission laser et appareil d'usinage laser - Google Patents

Appareil de commutation d'impact laser, dispositif d'émission laser et appareil d'usinage laser Download PDF

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Publication number
WO2021111614A1
WO2021111614A1 PCT/JP2019/047796 JP2019047796W WO2021111614A1 WO 2021111614 A1 WO2021111614 A1 WO 2021111614A1 JP 2019047796 W JP2019047796 W JP 2019047796W WO 2021111614 A1 WO2021111614 A1 WO 2021111614A1
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Prior art keywords
laser
optical element
optical
incident
unit
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PCT/JP2019/047796
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English (en)
Japanese (ja)
Inventor
京藤　友博
古田　啓介
智毅 桂
瀬口　正記
恭平 石川
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三菱電機株式会社
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Priority to JP2020518102A priority Critical patent/JPWO2021111614A1/ja
Priority to PCT/JP2019/047796 priority patent/WO2021111614A1/fr
Publication of WO2021111614A1 publication Critical patent/WO2021111614A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range

Definitions

  • the present invention relates to a laser incident switching device used in, for example, a laser processing device.
  • a method of irradiating an object to be processed with a laser beam to cut it is widely used.
  • processing is performed so as to maintain the shape of the laser beam, the laser output representing the power, and the beam mode representing the intensity distribution of the laser beam.
  • a fiber laser or a direct diode is used.
  • a method of changing to a beam mode suitable for processing and performing processing has been proposed.
  • Patent Document 1 as a method of changing the beam mode, an optical substrate is arranged in the middle of the optical transmission unit, and the incident condition of the laser beam incident on the fiber core of the transmission unit is switched by the rotation of the optical substrate to switch the beam mode. How to change is disclosed. Further, a laser processing apparatus to which such a method of switching the beam mode of laser light is applied is disclosed.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a laser incident switching device capable of controlling a beam mode switching command in response to a high-speed response.
  • the laser incident switching device has a rotation axis of optical characteristics corresponding to a plurality of incident conditions of laser light output from a laser light source and incident on an optical transmission unit.
  • An optical element unit that is held in the circumferential direction of the optical element unit, a drive device that rotates the rotation axis of the optical element unit, and an optical element control unit that controls the drive device and switches optical characteristics according to the incident conditions of laser light by rotating the rotation axis. It is equipped with.
  • the laser incident switching device can be controlled in response to a beam mode switching command at high speed.
  • Configuration diagram of the laser processing apparatus according to the first embodiment Schematic diagram showing laser incident switching by the laser incident switching device according to the first embodiment.
  • Schematic diagram showing a modified example of laser incident switching in FIG. Schematic diagram of laser incident switching by the laser incident switching device according to the second embodiment
  • Schematic diagram of laser incident switching by the laser incident switching device according to the fourth embodiment Schematic diagram of laser incident switching by the laser incident switching device according to the fifth embodiment.
  • a block diagram showing a modified example of the laser processing apparatus according to the first embodiment A block diagram showing a modified example of the laser processing apparatus according to the first embodiment.
  • FIG. 1 is a configuration diagram of a laser processing apparatus 100 according to a first embodiment of the present invention.
  • FIG. 2 is a schematic view showing laser incident switching by the laser incident switching device 20 according to the first embodiment of the present invention. In FIG. 2, only the optical element unit 6 and the rotating shaft 71 are shown for the laser incident switching device 20.
  • FIG. 3 is a schematic view showing a modified example of laser incident switching by the laser incident switching device according to the first embodiment of the present invention.
  • the laser processing device 100 of the present invention emits from a laser emitting device 30, an optical transmission unit 9 having a fiber core for transmitting laser light emitted from the laser emitting device 30, and an optical transmission unit 9.
  • the optical transmission unit 9 is composed of a transmission fiber having one fiber core.
  • the transmission fiber may be a transmission fiber having a multi-layer fiber core or a transmission fiber having a plurality of fiber cores. Good.
  • the laser machining apparatus control unit 13 has an internal laser machining apparatus storage unit 14 that stores registered contents such as setting information and machining data in the laser machining apparatus.
  • the laser machining apparatus control unit 13 receives the laser machining execution instruction, the laser machining apparatus control unit 13 reads out the registered contents matching the laser machining to be performed from the laser machining apparatus storage unit 14, and synchronizes with the processing table 16 to describe the laser apparatus described below.
  • the control unit 3 and the optical element control unit 8 are controlled.
  • the laser emitting device 30 is composed of a laser device 10 and a laser incident switching device 20.
  • the laser device 10 includes a laser oscillator 1 that outputs a laser beam, a drive power supply unit 2 that drives the laser oscillator 1, and a laser device control unit 3 that controls the laser oscillator 1 and the drive power supply unit 2.
  • the laser device control unit 3 has a drive power supply control unit 4 that controls the drive power supply unit 2 inside.
  • the laser light source is composed of various laser oscillators composed of a laser medium, an optical resonator, an excitation source, and the like.
  • the laser incident switching device 20 includes an optical element unit 6, a driving device 7, and an optical element control unit 8.
  • the optical element unit 6 has an optical characteristic of transmitting or reflecting the laser light output from the laser device 10. More specifically, the optical element unit 6 is connected to the rotating shaft and is composed of optical components having a plurality of optical characteristics in the circumferential direction of the rotating shaft.
  • the optical element unit 6 is an optical component that can be changed from, for example, an optical characteristic that transmits a laser beam to an optical characteristic that reflects a laser beam by rotating the rotation axis.
  • the rotating shaft is connected to a motor which is a driving device 7 for rotating the rotating shaft.
  • the optical element control unit 8 can control the rotation of the rotating shaft by controlling the drive of the motor connected to the rotating shaft of the optical element unit 6, and can change the optical characteristics of the optical element unit 6.
  • the laser incident switching device 20 sets the optical characteristics of the optical element unit 6 by the optical element control unit 8 and transmits or reflects the laser light output from the laser device 10 to obtain a laser. Light is emitted to the optical transmission unit 9. Specifically, the laser incident switching device 20 can change the incident position and the incident angle when the laser beam is incident on the optical transmission unit 9 by switching the optical characteristics of the optical element unit 6. As a result, the laser incident switching device 20 can switch the beam mode of the laser light emitted from the laser emitting device 10.
  • the optical element unit 6 having a plurality of optical characteristics in the circumferential direction of the rotation axis can be rotationally controlled by the rotation axis 71, and thus the beam mode. It is possible to control by responding to the switching command of. Further, since the optical element unit 6 having a plurality of optical characteristics is used, the optical characteristics can be controlled with high accuracy.
  • the rotation control of the optical element unit 6 by the rotation axis 71 is compared with the rotation control of the optical element unit 6 with the direction orthogonal to the rotation axis 71 as the rotation axis. The moment required for rotation can be reduced. Therefore, the beam mode can be switched without increasing the output of the motor. Further, by controlling the switching of the beam mode, it is possible to easily change the machining conditions at the time of laser machining.
  • FIG. 2 shows the beam mode shape of the laser light output when the laser light output from the laser oscillator 1 passes through the optical element unit 6 and is incident on the optical transmission unit 9.
  • the optical element control unit 8 controls the rotation axis 7 of the optical element unit 6 to switch the optical characteristics to the optical characteristic unit 6a (total transmission).
  • the laser beam is output from the laser oscillator 1 and the laser beam is irradiated to the optical characteristic section 6a of the optical element section 6.
  • the laser beam passes through the optical characteristic unit 6a and is incident on the optical transmission unit 9.
  • the laser beam is emitted from the optical transmission unit 9.
  • the laser beam emitted from the optical transmission unit 9 is a laser beam having a spot-shaped beam mode.
  • the optical element unit 6 has four optical characteristic units 6a to 6d in the circumferential direction of the rotating shaft 71.
  • the optical characteristic units 6a to 6d may have different optical characteristics, or may include some common optical characteristics.
  • the laser incident switching device 20 transmits the laser light output from the laser oscillator 1 through the optical characteristic unit by selecting and switching the optical characteristic unit of the optical element unit 6 from 6a to 6d by the optical element control unit 8. It is possible to switch the beam mode by changing the angle at which the laser beam is incident on the optical transmission unit 9 and the incident position.
  • FIG. 3 shows a modified example of the laser incident switching of the laser incident switching device 20 shown in FIG. 2, except that the optical transmission unit 9 is composed of a multi-layer fiber core.
  • the transmission fiber of the optical transmission unit 9 is a transmission fiber composed of a three-layer fiber core.
  • the optical element unit 6 is set in the optical characteristic unit 6a.
  • the laser light output from the laser device 10 passes through the optical characteristic unit 6a and is incident on the fiber core of the outermost layer of the optical transmission unit 9. After that, the laser beam emits the optical transmission unit 9.
  • the emitted laser light is a laser light having a ring-shaped beam mode.
  • the laser incident switching device of the first embodiment switches the optical characteristics of the optical element unit 6 and changes the incident position of the laser light on the fiber core to change the beam mode of the laser light. It is possible to switch.
  • the optical transmission unit 9 into which the laser light emitted from the laser incident switching device 20 is incident is not limited to a transmission fiber having one fiber core, and a transmission having a plurality of fiber cores or a transmission having a multi-layer fiber core. Various transmission fibers such as fibers can be used.
  • the optical element unit 6 having the four optical characteristics of the optical characteristic units 6a to 6d is used, but the present invention is not limited to this, and the optical element is not limited to this.
  • the unit 6 may include a plurality of optical characteristic units and can switch the optical characteristic unit in the rotation direction of the rotation axis.
  • the number of optical characteristic parts is composed of four, but it may be two or more, and the rotation angle is further reduced from four to increase the speed of switching the optical characteristics.
  • the types of optical characteristics may be increased to cope with various incident conditions of the laser beam on the fiber core. Such changes are also possible in the following embodiments.
  • FIG. 4 is a schematic view showing laser incident switching in the laser incident switching device 20 according to the second embodiment of the present invention. Similar to FIG. 2, regarding the laser incident switching device 20, only the optical element unit 6 and the rotating shaft 71 are shown, and the same applies to other embodiments described below. Further, in the following embodiments, the same components as those of the other embodiments are designated by the same reference numerals, and the configurations different from those of the other embodiments will be mainly described.
  • the laser incident switching device 20 of the second embodiment has the same optical element unit 6 and optical transmission unit 9 as those of the first embodiment, and the description thereof will be omitted.
  • the positional relationship between the laser oscillator 1, the optical element unit 6, and the optical transmission unit 9 is different from that of the first embodiment. That is, in the second embodiment, the laser light output from the laser oscillator 1 is reflected by the optical element unit 6, and the reflected laser light is incident on the optical transmission unit 9.
  • the optical element control unit 8 controls the drive device 7 (not shown) to rotate the rotating shaft 71, thereby rotating the optical element unit 6 with optical characteristics. Is switched to the optical characteristic unit 6a (total reflection).
  • the laser oscillator 1 outputs a laser beam, and the laser beam irradiates the optical characteristic unit 6a.
  • the laser light irradiated to the optical characteristic unit 6a is totally reflected by the optical characteristic unit 6a, and the reflected laser light is incident on the fiber core at the center of the optical transmission unit 9. As a result, the laser beam is emitted from the optical transmission unit 9.
  • the emitted laser light is a laser light having a spot-shaped beam mode.
  • the laser incident switching device 20 of the second embodiment can control the rotation of the optical element unit 6 having a plurality of optical characteristics in the rotation direction of the rotation axis by the rotation shaft 71 via the drive device 7. , It is possible to control by responding to the beam mode switching command at high speed. Further, since the optical element unit 6 having a plurality of optical characteristics is used, the optical characteristics can be controlled with high accuracy. Further, since the laser incident switching device 20 of the second embodiment transmits the laser light by reflection, when the laser light passes through the optical element portion, the thermal energy of the laser light causes a temperature distribution in the optical element portion. It is possible to reduce the influence of the thermal lens phenomenon and output a laser beam in a stable beam mode.
  • the laser incident switching device 20 of the second embodiment changes the reflection angle of the laser light output from the laser oscillator 1 by switching the optical element unit 6 to various optical characteristic units as in the first embodiment. Is possible. By doing so, it is possible to change the position and angle at which the laser beam is incident on the optical transmission unit 9.
  • the optical transmission unit 9 having a multi-layer fiber core is used, but various transmission fibers may be used as described in the first embodiment.
  • FIG. 5 is a schematic view showing laser incident switching in the laser incident switching device 20 according to the third embodiment of the present invention.
  • the laser incident switching device 20 of the third embodiment has the same optical transmission unit 9 as that of the first embodiment, the description thereof will be omitted.
  • the laser incident switching device 20 of the third embodiment has a configuration in which a plurality of optical element units are arranged on a straight line in a direction in which the laser beam travels straight, and as an example, the three optical element units A to The configuration having C will be described.
  • the optical element unit of the laser incident switching device 20 of the third embodiment has two types of optical characteristic units 6e and 6f in the rotation direction of the rotation axis. There is.
  • the optical characteristic unit 6e is an optical characteristic that totally transmits the laser light
  • the optical characteristic unit 6f is an optical characteristic that totally reflects the laser light. That is, the laser incident switching device 20 of the third embodiment causes the laser light output from the laser oscillator 1 by the plurality of optical element units 6A to 6C to enter the optical transmission unit 9, and emits the laser light from the optical transmission unit 9. To do. As described above, the laser incident switching device 20 of the third embodiment can switch the optical characteristics of the plurality of optical element units by rotating and controlling them by the rotation axes 71a to 71c, so that the speed is high with respect to the beam mode switching command. It is possible to control in response to.
  • the laser incident switching device 20 of the third embodiment can switch the beam mode of the laser light by changing the incident position and angle of the laser light on the optical transmission unit 9.
  • the optical element control unit 8 controls the drive device 7 (not shown) to rotate the rotating shaft 71a, thereby rotating the optical element unit 6A. Is switched to the optical characteristic unit 6e (total transmission). Subsequently, the drive device 7 is controlled by the optical element control unit 8 to rotate the rotating shaft 71b, whereby the optical characteristics of the optical element unit 6B are switched to the optical characteristic unit 6f (total reflection).
  • the optical element control unit 8 controls the drive device 7 to rotate the rotating shaft 71c, thereby switching the optical characteristics of the optical element unit 6C to the optical characteristic unit 6f (total reflection).
  • the laser incident switching device 20 of the third embodiment completes the switching of the optical element units 6A to 6C.
  • the drive device 7 sequentially controls the rotation of the rotation shafts 71a to 71c to switch the optical characteristic units 6e and 6f, but controls the drive device 7 by giving an instruction to switch the optical element units at the same time.
  • a plurality of drive devices may be prepared corresponding to the respective rotation shafts 71a to 71c, and the optical characteristic unit corresponding to each drive device may be switched.
  • the laser oscillator 1 outputs the laser beam toward the optical element unit 6A.
  • the output laser beam irradiates the optical characteristic unit 6e and completely transmits the optical characteristic unit 6e.
  • the laser beam travels toward the optical element unit 6B arranged on the extension line transmitted through the optical characteristic unit 6e, irradiates the optical characteristic unit 6f, and is totally reflected.
  • the reflected laser light is incident on the fiber core outside the fiber core at the center of the optical transmission unit 9.
  • the emitted laser light is a laser light having a ring-shaped beam mode.
  • the laser incident switching device 20 of the third embodiment controls the rotation of the optical element portions 6A to 6C having a plurality of optical characteristics in the rotation direction of the rotation axis by the rotation shafts 71a to 71c via the drive device 7. Therefore, it is possible to control by responding to the beam mode switching command at high speed. Further, since the optical element units 6A to 6C having a plurality of optical characteristics are used, the optical characteristics can be controlled with high accuracy. Further, when a plurality of optical element units are used, it is possible to respond to a beam mode switching command at a higher speed than when a single optical element unit is used.
  • the laser incident switching device 20 of the third embodiment changes the reflection angle of the laser light output from the laser oscillator 1 by switching the optical element unit to various optical characteristic units as in the first and second embodiments. It is possible. By doing so, it is possible to change the position and angle at which the laser beam is incident on the optical transmission unit 9. As a result, the laser incident switching device 20 of the third embodiment can switch the beam mode.
  • the optical transmission unit 9 having a multi-layer fiber core is used, but various transmission fibers may be used as described in the first or second embodiment.
  • FIG. 6 is a schematic view showing laser incident switching in the laser incident switching device 20 according to the fourth embodiment of the present invention.
  • a plurality of optical element units are provided, and the optical element unit selected from the optical element units reflects the laser light to switch the incident conditions of the laser light incident on the fiber core.
  • the laser incident switching device according to the present embodiment includes a plurality of optical element units, and by transmitting or reflecting the laser light, the plurality of laser light is incident on the fiber core via the optical element unit. , The incident condition of the laser beam incident on the fiber core is switched.
  • the laser incident switching device 20 of the fourth embodiment has the same optical transmission unit 9 as that of the first embodiment. As shown in FIG. 6, the laser incident switching device 20 of the fourth embodiment has three optical element units 6D to 6F.
  • the optical element units 6D to 6F are the same as the optical element units 6 of the first embodiment, and the optical element units 6D to 6F each have optical characteristic units 6a to 6d.
  • the optical element units 6D to 6F are arranged side by side on a straight line on which the laser light output from the laser oscillator 1 travels.
  • the optical element unit 6D is the optical characteristic unit 6b
  • the optical element unit 6E is the optical characteristic unit 6c
  • the optical element unit 6F is the optical characteristic unit 6a.
  • the reflectances of the optical characteristic portions 6b, 6c, and 6a are 50%, 30%, and 100%, respectively. That is, the laser incident switching device 20 of the fourth embodiment reflects the laser light output from the laser oscillator 1 on the plurality of optical element units 6D to 6F, and causes the reflected laser light to enter the optical transmission unit 9. After that, the laser beam is emitted from the optical transmission unit 9.
  • the laser incident switching device 20 of the fourth embodiment can switch the optical characteristics of the plurality of optical element units by rotating the rotation axes 71d to 71f, so that the speed is high with respect to the beam mode switching command. It is possible to control in response to. Further, since the optical element units 6D to 6F having a plurality of optical characteristics are used, the optical characteristics can be controlled with high accuracy. By doing so, the laser incident switching device 20 of the fourth embodiment can switch the beam mode of the laser beam.
  • the laser incident switching device 20 of the fourth embodiment first controls the drive device 7 (not shown) by the optical element control unit 8 (not shown) to rotate the rotating shaft 71d to rotate the optical element unit 6D. Is switched to the optical characteristic unit 6b (reflectance 50%). Subsequently, the drive device 7 is controlled by the optical element control unit 8 to rotate the rotation shaft 71e, whereby the optical characteristics of the optical element unit 6E are switched to the optical characteristic unit 6c (reflectance 30%).
  • the optical element control unit 8 controls the drive device 7 to rotate the rotating shaft 71f, thereby switching the optical characteristics of the optical element unit 6F to the optical characteristic unit 6a (reflectance 100%).
  • the laser incident switching device 20 of the fourth embodiment completes the switching of the optical element units 6D to 6F.
  • the laser oscillator 1 irradiates the optical element unit 6D with the laser beam.
  • the optical element unit 6D reflects 50% of the laser light by the optical characteristic unit 6b, and causes the reflected laser light to enter the fiber core of the outermost layer of the optical transmission unit 9.
  • the laser beam transmitted through the optical characteristic unit 6b is incident on the optical element unit 6E.
  • the optical element unit 6E reflects 30% of the laser light by the optical characteristic unit 6c, and the reflected laser light is incident on the fiber core of the layer one layer outside the center of the optical transmission unit 9.
  • the laser beam transmitted through the optical characteristic unit 6c is incident on the optical element unit 6F.
  • the optical element unit 6F totally reflects the laser light by the optical characteristic unit 6a, and causes the reflected laser light to enter the fiber core at the center of the optical transmission unit 9. In this way, the laser light is reflected by each of the optical element units 6D to 6F, and the reflected laser light is incident on the fiber core of the optical transmission unit 9. After that, a laser beam having a beam mode having a shape corresponding to the three-layer fiber core is emitted.
  • the laser incident switching device 20 of the fourth embodiment controls the rotation of the optical element units 6D to 6F having a plurality of optical characteristics in the rotation direction of the rotation axis by the rotation shafts 71d to 71f via the drive device 7.
  • the optical element units 6D to 6F having a plurality of optical characteristics are used, the optical characteristics can be controlled with high accuracy. Further, when a plurality of optical element units are used, it is possible to respond to a beam mode switching command at a higher speed than when a single optical element unit is used.
  • the drive device 7 sequentially controls the rotation of the rotation shafts 71d to 71f to switch the optical characteristic units 6a to 6d, but a plurality of drive devices corresponding to the respective rotation shafts 71d to 71f are prepared.
  • Each optical characteristic unit may be switched, or the optical characteristic units may be switched by simultaneously controlling the rotation of the rotating shafts 71a to 71c by one driving device.
  • the optical transmission unit 9 having a multi-layer fiber core is used, but various transmission fibers can be used as in the first to third embodiments.
  • the optical element units 6D to 6F have an optical characteristic unit having a common reflectance, but may have an optical characteristic unit having a different reflectance.
  • FIG. 7 is a schematic view showing laser incident switching in the laser incident switching device 20 according to the fifth embodiment of the present invention.
  • FIG. 8 shows the optical characteristics of each optical element unit switched with the passage of time by the laser incident switching device 20 according to the fifth embodiment, and the laser light emitted from the laser incident switching device 20 when the optical characteristics are switched. Indicates the beam mode of.
  • the laser incident switching device 20 of the fifth embodiment has the same optical transmission unit 9 as that of the first embodiment. As shown in FIG. 7, the laser incident switching device 20 of the fifth embodiment has optical element units 6A to 6C. Since the optical element units 6A to 6C are the same as the optical element units of the third embodiment, the description thereof will be omitted.
  • the laser incident switching device 20 of the fifth embodiment includes optical element units 6A to 6C arranged in order on a straight line in a direction in which the laser beam output from the laser oscillator 1 travels straight.
  • the optical element units 6A to 6C transmit or reflect the laser light by the switched optical characteristic units 6e or 6f, respectively, and cause the laser light to enter the optical transmission unit 9. After that, the laser beam is emitted from the optical transmission unit 9.
  • the optical element units 6A to 6C are first set in the optical characteristic units 6e, 6e, and 6f, respectively.
  • the setting for switching the optical element units 6A to 6C to the optical characteristic units 6e, 6e, and 6f, respectively, is stored in the laser processing apparatus storage unit 14 as the setting (1).
  • the laser machining device control unit 13 reads the setting information from the laser machining device storage unit 14 in response to the operation of the operator, and issues a command to the optical element control unit 8 to control the laser incident switching device 20 based on the setting information.
  • the optical element control unit 8 controls the drive device 7 in response to a command from the laser processing device control unit 13, and switches the optical characteristics by rotating the rotation axis of the optical element unit 6.
  • a plurality of setting information of optical characteristics of each optical element unit is stored in the laser processing device storage unit 14.
  • the optical element units 6A to 6C are switched to the optical characteristic units 6e, 6f, and 6e, respectively (2), and the optical element units 6A to 6C are switched to the optical characteristic units 6f, respectively.
  • Information about the setting (3) for switching between 6e and 6e is stored.
  • the laser machining apparatus storage unit 14 stores information regarding the setting (4) for sequentially switching the above settings (1) to (3) as the predetermined time elapses when the laser machining apparatus 100 performs the machining operation. There is.
  • the laser processing device 100 can switch the optical characteristics of the optical element unit over time based on the settings (1) to (4) stored in the laser processing device storage unit 14.
  • the laser incident switching device 20 of the fifth embodiment can switch the beam modes BM1 to BM3 of the laser beam at predetermined time intervals.
  • the laser incident switching device 20 of the fifth embodiment can repeat a plurality of settings for switching the beam mode every predetermined time elapses. Depending on the cycle of switching the beam mode every predetermined time, the laser incident switching device 20 of the fifth embodiment emits a laser beam having a beam mode corresponding to the beam mode in which the beam modes BM1 to BM3 are added in a pseudo manner. It is possible to make it.
  • the laser processing device 100 reads out the setting information from the laser processing device storage unit 14 based on the information input by the operator using an input device (not shown), and issues a command to the laser incident switching device from the laser processing device control unit 13.
  • the drive device 7 is controlled by the optical element control unit 8.
  • the control procedure for controlling the laser incident switching device 20 is stored in advance in the laser processing device storage unit 14 in the following flow.
  • the optical characteristics of the optical element unit 6A are switched to 6e, the optical characteristics of the optical element unit 6B are switched to 6e, and the optical characteristics of the optical element unit 6C are switched to 6f (1).
  • the optical characteristics of the optical element unit 6A are switched to 6e, the optical characteristics of the optical element unit 6B are switched to 6f, and the optical characteristics of the optical element unit 6C are switched to 6e (2).
  • the optical characteristics of the optical element unit 6A are switched to 6f, the optical characteristics of the optical element unit 6B are switched to 6e, and the optical characteristics of the optical element unit 6C are switched to 6e (3).
  • the setting (4) is a repetitive setting in which the settings (1) to (3) are changed in order at regular time intervals.
  • the interval of each time from t1 to t5 is set to a fixed time interval.
  • the processing time in BM1 is set longer than the processing time in BM3, or BM1
  • the time interval for switching each setting and the beam mode can be appropriately changed according to the setting, such as skipping the BM2 and performing the processing with the BM3.
  • the laser incident switching device 20 receives a command from the laser processing device control unit 13 based on the setting information according to the information input by the operator, and the optical element control unit 8 controls the drive device 7 to control the optical element units 6A to 6A.
  • the optical characteristic part of 6C is switched to the setting (1).
  • the laser oscillator 1 irradiates the optical element units 6A to 6C with laser light.
  • the laser light is transmitted or reflected by the optical element unit, and then the laser light is incident on the optical transmission unit 9.
  • the laser beam is emitted from the optical transmission unit 9 and emitted as a laser beam having a beam mode BM1.
  • the laser incident switching device 20 controls the drive device 7 by the optical element control unit 8 to set the optical characteristic units of the optical element units 6A to 6C (2). Switch to. Based on the optical characteristics switched in the setting (2), the laser light is emitted as the laser light having the beam mode BM2 via the optical transmission unit 9.
  • the laser incident switching device 20 controls the drive device 7 by the optical element control unit 8 to set the optical characteristic units of the optical element units 6A to 6C (3). Switch. Based on the optical characteristics switched in the setting (3), the laser light is emitted as the laser light having the beam mode BM3 via the optical transmission unit 9.
  • the laser incident switching device 20 repeats switching the optical characteristic units of the optical element units 6A to 6C at regular time intervals according to the settings (1) to (3) based on the setting (4).
  • the laser incident switching device 20 of the fifth embodiment can switch the beam modes BM1 to BM3 of the laser beam over time.
  • FIG. 9 shows a modification 1 of the laser machining apparatus 100 according to the first embodiment
  • FIG. 10 shows a modification 2 of the laser machining apparatus 100 according to the first embodiment.
  • the laser processing apparatus 100 has a laser apparatus control unit 3 having a laser apparatus storage unit 5 and an optical element control unit 8 having an optical element control storage unit 11. Is different.
  • the laser processing device control unit 13 When the laser processing device control unit 13 receives the laser processing execution instruction based on the operation by the operator, the laser processing device control unit 13 reads out the setting contents matching the laser processing to be performed from the laser processing device storage unit 14, and the optical element control unit 8 The same setting contents are instructed and controlled from the optical element control storage unit 11 inside and the laser device storage unit 5 inside the laser device control unit 3. Further, the laser machining apparatus control unit 13 instructs and controls the laser machining apparatus control unit 3 and the optical element control unit 8 according to the read setting contents while synchronizing with the machining table 16. Then, based on the instruction of the laser processing device control unit 13, the laser device control unit 3 reads the setting contents from the laser device storage unit 5 and controls the drive power supply control unit 4 according to the read setting contents. Further, based on the instruction of the laser processing device control unit 13, the optical element control unit 8 reads out the setting contents from the optical element control storage unit 11, controls the drive device 7 according to the read setting contents, and has optical characteristics of the optical element unit 6. To switch.
  • the setting contents are distributed and stored in three places of the laser processing device storage unit 14, the optical element control storage unit 11, and the laser device storage unit 5, thereby controlling the laser device.
  • the unit 3 controls the drive power supply control unit 4 with the setting contents stored in the laser device storage unit 5, and the optical element control unit 8 controls the optical element unit 6 with the setting contents stored in the optical element control storage unit 11. ..
  • the response speed to the laser device control unit 3, the optical element control unit 8 and the processing table 16 is limited by the control cycle caused by the performance limitation of the laser processing device control unit 13, depending on the setting contents.
  • the high-speed response of the laser processing apparatus 200 becomes possible.
  • the modified example 2 will be described with reference to FIG.
  • the laser oscillator 1 has an optical element unit 6 and a driving device 7, and the laser device control unit 3 has a laser device storage unit 5 and an optical element control unit 8. This is different from the laser processing apparatus 100.
  • the laser machining apparatus control unit 13 When the laser machining apparatus control unit 13 receives the laser machining execution instruction based on the operation by the operator, the laser machining apparatus control unit 13 reads out the setting contents matching the laser machining to be performed from the laser machining apparatus storage unit 14, and the laser machining apparatus control unit 3 It is instructed and controlled to read the same setting contents from the laser device storage unit 5 inside. Further, the laser machining apparatus control unit 13 instructs and controls the laser machining apparatus control unit 3 and the optical element control unit 8 according to the read setting contents while synchronizing with the machining table 16. Then, based on the instruction of the laser processing device control unit 13, the laser device control unit 3 reads out the setting contents from the laser device storage unit 5, and controls the drive power supply control unit 4 and the optical element control unit 8 according to the read setting contents. The optical element control unit 8 controls the drive device 7 inside the laser oscillator 1 according to the set contents, and switches the optical characteristics of the optical element unit 6.
  • the laser apparatus control unit 3 can be stored in the laser apparatus storage unit 5 by distributing and storing the setting contents in two places, the laser processing apparatus storage unit 14 and the laser apparatus storage unit 5.
  • the drive power supply control unit 4 and the optical element control unit 8 are controlled by the setting contents stored in.
  • the laser device control unit 3 collectively controls the drive power supply control unit 4 and the optical element control unit 8
  • the synchronization deviation between the drive power supply control unit 4 and the optical element control unit 8 becomes small, and the laser processing device It is possible to respond to the instruction from the control unit 13 at a higher speed. Further, it is possible to reduce the limitation of the response speed to the laser device control unit 3 and the processing table 16 due to the control cycle caused by the performance limitation of the laser processing device control unit 13, and the high speed of the laser processing device 300 according to the set contents. Response is possible.
  • machining parameters such as optical characteristics, beam mode, material of the object to be machined during laser machining, machining speed, machining time, and machining accuracy are stored in the laser machining device storage unit, and the machining parameters are stored.
  • the machine learning model generated by using the machine learning means as an input may be stored in advance.
  • the laser processing apparatus may automatically select and set the optical characteristics that output an appropriate beam mode derived from the machine learning model when the operator sets the processing parameters. Such selection and setting of an appropriate beam mode may be performed before the start of processing, or sequential optimization is performed based on a machine learning model by inputting processing parameters acquired during processing, and an appropriate beam is selected.
  • the optical characteristics to which the mode is output may be automatically selected and set.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Un dispositif de commutation d'impact laser selon la présente invention a trait à un dispositif de commutation d'impact laser utilisé dans, par exemple, un appareil d'usinage laser, le dispositif de commutation d'impact laser étant caractérisé en ce qu'il comprend : une partie d'élément optique qui présente des caractéristiques optiques dans la direction circonférentielle d'un arbre rotatif, les caractéristiques optiques correspondant à une pluralité de conditions d'impact pour une lumière laser qui a été émise à partir d'une source de lumière laser et affecte une partie de transmission de lumière ; un dispositif d'entraînement qui entraîne l'arbre rotatif de la partie d'élément optique en rotation ; et une unité de commande d'élément optique qui commande le dispositif d'entraînement et commute les caractéristiques optiques, en fonction de la condition d'impact de la lumière laser, par la rotation de l'arbre rotatif.
PCT/JP2019/047796 2019-12-06 2019-12-06 Appareil de commutation d'impact laser, dispositif d'émission laser et appareil d'usinage laser WO2021111614A1 (fr)

Priority Applications (2)

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JP2020518102A JPWO2021111614A1 (fr) 2019-12-06 2019-12-06
PCT/JP2019/047796 WO2021111614A1 (fr) 2019-12-06 2019-12-06 Appareil de commutation d'impact laser, dispositif d'émission laser et appareil d'usinage laser

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PCT/JP2019/047796 WO2021111614A1 (fr) 2019-12-06 2019-12-06 Appareil de commutation d'impact laser, dispositif d'émission laser et appareil d'usinage laser

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151607A (ja) * 1984-12-26 1986-07-10 Mitsubishi Electric Corp 光ビ−ム切換装置
JPS6484679A (en) * 1987-09-28 1989-03-29 Toshiba Corp Laser processing apparatus
JP2013132651A (ja) * 2011-12-26 2013-07-08 Hamamatsu Photonics Kk レーザ加工装置及びレーザ加工方法
US20150293306A1 (en) * 2010-04-08 2015-10-15 Trumpf Laser- Und Systemtechnik Gmbh Method and Arrangement for the Generation of a Laser Beam With Different Beam Profile Characteristics by Means of a Multi-Clad Fibre
JP2016043405A (ja) * 2014-08-26 2016-04-04 ファナック株式会社 ファイバコアを切り替え可能なレーザ加工装置
WO2018097018A1 (fr) * 2016-11-22 2018-05-31 パナソニックＩｐマネジメント株式会社 Dispositif de traitement laser et procédé de traitement laser

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151607A (ja) * 1984-12-26 1986-07-10 Mitsubishi Electric Corp 光ビ−ム切換装置
JPS6484679A (en) * 1987-09-28 1989-03-29 Toshiba Corp Laser processing apparatus
US20150293306A1 (en) * 2010-04-08 2015-10-15 Trumpf Laser- Und Systemtechnik Gmbh Method and Arrangement for the Generation of a Laser Beam With Different Beam Profile Characteristics by Means of a Multi-Clad Fibre
JP2013132651A (ja) * 2011-12-26 2013-07-08 Hamamatsu Photonics Kk レーザ加工装置及びレーザ加工方法
JP2016043405A (ja) * 2014-08-26 2016-04-04 ファナック株式会社 ファイバコアを切り替え可能なレーザ加工装置
WO2018097018A1 (fr) * 2016-11-22 2018-05-31 パナソニックＩｐマネジメント株式会社 Dispositif de traitement laser et procédé de traitement laser

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