WO2021059963A1 - バルブ - Google Patents
バルブ Download PDFInfo
- Publication number
- WO2021059963A1 WO2021059963A1 PCT/JP2020/033936 JP2020033936W WO2021059963A1 WO 2021059963 A1 WO2021059963 A1 WO 2021059963A1 JP 2020033936 W JP2020033936 W JP 2020033936W WO 2021059963 A1 WO2021059963 A1 WO 2021059963A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- inflow
- valve
- path
- annular groove
- inflow path
- Prior art date
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
Definitions
- This disclosure relates to valves used in semiconductor manufacturing equipment and the like.
- a valve having a valve box in which a first gutter serving as a gas inflow passage and a second gutter serving as a gas outflow passage are formed has been proposed.
- the first gutter is configured to increase in diameter near the valve chamber.
- the diameter of the first side groove may be increased near the valve chamber as in the valve of Patent Document 1, but this alone cannot sufficiently increase the flow rate.
- one of the purposes of this disclosure is to provide a valve having a body capable of realizing a large flow rate.
- the valve according to one aspect of the present disclosure includes a body in which a valve chamber, a first inflow path, a second inflow path, an outflow path, and an annular groove are formed and a valve seat is provided.
- a diaphragm that communicates with and shuts off the second inflow path and the outflow path by contacting and separating from the valve seat is provided, and the end of the second inflow path is the valve chamber.
- the valve seat is provided on the peripheral edge of a portion where the valve chamber and the second inflow passage communicate with each other, and the annular groove is opened in the valve chamber and formed around the second inflow passage.
- the end of the outflow passage is opened in the annular groove
- the first inflow passage has a plurality of flow paths including one inlet and a plurality of outlets, and each outlet has the annular shape. It is open in the groove.
- the body may have a branch portion located between the inflow port and the central axis of the annular groove and branching the first inflow path into a plurality of flow paths.
- the inflow port of the first inflow path and the inflow port of the second inflow path may be opened on the same surface of the body, and the diameters of the inflow ports may be different from each other.
- the cross-sectional area of the first inflow path may increase from the inflow port toward the annular groove.
- valve 1 according to the embodiment of the present disclosure will be described with reference to the drawings.
- FIG. 1 is a cross-sectional view of the valve 1 in the open state according to the present embodiment.
- FIG. 2 is a cross-sectional view of the body 11 along the line II-II of FIG.
- the valve 1 includes a body portion 10 and an actuator 20.
- the valve 1 according to this embodiment is a so-called three-way valve.
- the actuator 20 side of the valve 1 will be referred to as the upper side
- the body portion 10 side will be referred to as the lower side.
- the body portion 10 includes a body 11, a seat 12 which is a valve seat, a bonnet 13, a diaphragm 14, a pressing adapter 15, a diaphragm pressing 16, a holder 17, and a compression coil spring 18.
- the body 11 is substantially cubic and has a first surface 11A which is an upper surface, a second surface 11B which is a lower surface, and a third surface 11C and a fourth surface 11D which are side surfaces and face each other.
- the body 11 is formed with a valve chamber 11e, a first inflow passage 11f, a second inflow passage 11g, an outflow passage 11h, and an annular groove 11i.
- the valve chamber 11e is formed so as to open toward the first surface 11A.
- the second inflow passage 11g has a substantially inverted L shape in FIG. 1, one end of which is open to the third surface 11C and the other end of which is open to the valve chamber 11e.
- the resin sheet 12 has an annular shape and is provided on the peripheral edge of the body where the valve chamber 11e and the second inflow passage 11g communicate with each other.
- the annular groove 11i has an upper end that opens into the valve chamber 11e and is formed around a portion of the second inflow path 11g that extends in the vertical direction.
- the outflow path 11h has one end opened in the annular groove 11i and the other end opened in the fourth surface 11D.
- the outflow passage 11h is located on the opposite side of the first inflow passage 11f so as to sandwich a portion of the second inflow passage 11g extending in the vertical direction.
- a pipe 2 is connected to a portion of the fourth surface 11D of the body 11 corresponding to the other end of the outflow path 11h.
- the first inflow path 11f is located above the portion extending in the horizontal direction (left-right direction in FIG. 1) of the second inflow path 11g. As shown in FIG. 2, the first inflow passage 11f has a plurality of flow paths including one inlet 11j and a plurality of outlets 11k, and each outlet 11k opens into the annular groove 11i.
- the first inflow path 11f is composed of one inflow port 11j and two outflow ports 11k. That is, the first inflow path 11f branches into two flow paths.
- the body 11 has a branch portion 11L located between the inflow port 11j of the first inflow path 11f and the center C of the annular groove 11i.
- the first inflow path 11f is branched into two flow paths by the branch portion 11L.
- the branch portion 11L has a substantially triangular prism shape having a substantially isosceles triangle shape in a plan view (cross section).
- the inflow port 11j of the first inflow path 11f is open to the third surface 11C. Therefore, one end of the second inflow path 11g and the inflow port 11j of the first inflow path 11f are open on the same surface.
- the diameter (opening area) of the inflow port 11j of the first inflow path 11f is smaller than the diameter (opening area) of one end (inflow port) of the second inflow path 11g. That is, the diameter of the inflow port 11j of the first inflow path 11f and the diameter of one end (inflow port) of the second inflow path 11g are different from each other.
- the cross-sectional area of the first inflow path 11f increases from the inflow port 11j toward the annular groove 11i.
- the bonnet 13 has a substantially cylindrical shape with a lid, and is fixed to the body 11 so as to cover the valve chamber 11e by screwing the lower end portion thereof into the body 11.
- the outer peripheral edge of the diaphragm 14 which is a valve body is sandwiched and held by the pressing adapter 15 arranged at the lower end of the bonnet 13 and the bottom surface forming the valve chamber 11e of the body 11.
- the fluid passage is opened and closed by separating and abutting (pressing) the diaphragm 14 with respect to the sheet 12.
- the diaphragm retainer 16 is provided on the upper side of the diaphragm 14, and is configured to be able to press the central portion of the diaphragm 14.
- the diaphragm retainer 16 is fitted to the holder 17.
- the holder 17 has a substantially columnar shape and is arranged so as to be vertically movable in the bonnet 13.
- the stem 25, which will be described later, is screwed to the upper part of the holder 17.
- the compression coil spring 18 is provided in the bonnet 13 and always urges the holder 17 downward.
- the valve 1 is kept in a closed state by the compression coil spring 18 in a normal state (when the actuator 20 is not operating).
- the actuator 20 is an air-driven type and has a substantially cylindrical shape as a whole, and includes a casing 21, a partition disk 22, a first piston 23, a second piston 24, and a stem 25.
- the casing 21 has a lower casing 21A and an upper casing 21B whose lower end is screwed to the upper end of the lower casing 21A.
- the lower casing 21A has a substantially stepped cylindrical shape.
- the outer circumference of the lower end of the lower casing 21A is screwed into the inner circumference of the through hole of the bonnet 13.
- the upper casing 21B has a substantially cylindrical shape with a lid.
- a fluid introduction path 21c is formed at the upper end of the upper casing 21B.
- a nut 26 is screwed onto the outer circumference of the lower end of the lower casing 21A.
- the nut 26 comes into contact with the bonnet 13 and suppresses the rotation of the lower casing 21A with respect to the bonnet 13.
- the partition disk 22 has a substantially disk shape, is provided immovably in the casing 21, and the stem 25 penetrates the central portion.
- the first piston 23 has a substantially disk shape, and the stem 25 penetrates the central portion.
- the first pressure chamber P1 is formed by the first piston 23 and the lower casing 21A.
- the second piston 24 has a substantially disk shape, and the stem 25 penetrates the central portion.
- the second pressure chamber P2 is formed by the second piston 24, the partition disk 22, and the upper casing 21B.
- the stem 25 has a substantially columnar shape and is provided so as to be movable in the vertical direction, and extends from the bonnet 13 through the lower casing 21A to the upper casing 21B. The lower end of the stem 25 is screwed into the holder 17.
- the stem 25 is formed with a fluid flow path 25a extending in the vertical direction in the upper half portion thereof, and first and second fluid outflow holes 25b and 25c crossing the fluid flow path 25a.
- the upper end of the fluid flow path 25a is open at the upper surface of the stem 25.
- the first fluid outflow hole 25b communicates with the first pressure chamber P1.
- the second fluid outflow hole 25c is located above the first fluid outflow hole 25b and communicates with the second pressure chamber P2.
- the stem 25 has a plurality of stepped portions, and the stepped portions are in contact with the upper surface of the first piston 23 and the upper surface of the second piston 24. As a result, when the first piston 23 and the second piston 24 move upward, the stem 25 and the holder 17 move upward.
- valve 1 of the present embodiment when the driving fluid does not flow into the first and second pressure chambers P1 and P2, the holder 17 and the stem 25 are at the bottom dead point due to the urging force of the compression coil spring 18 (body 11).
- the diaphragm 14 is pushed by the diaphragm retainer 16 and the lower surface of the diaphragm 14 is pressed against the seat 12 to close the valve 1. That is, the valve 1 is in a closed state in a normal state (a state in which the driving fluid is not supplied).
- the drive fluid is made to flow from the drive fluid supply source (not shown) to the valve 1.
- the driving fluid is supplied to the valve 1.
- the drive fluid passes through the fluid introduction path 21c, the fluid flow path 25a, and the first and second fluid outflow holes 25b and 25c via an air tube and a pipe joint (not shown), and the first and second pressure chambers P1 and It flows into P2.
- the first and second pistons 23 and 24 rise against the urging force of the compression coil spring 18.
- the holder 17 and the stem 25 move to the top dead center and separate from the body 11, and the diaphragm retainer 16 moves upward due to the elastic force of the diaphragm 14 and the pressure of the fluid (gas), and becomes the second inflow passage 11g.
- the outflow path 11h communicates with the annular groove 11i, and the valve 1 is opened.
- the three-way valve (not shown) is switched to a flow in which the driving fluid is discharged from the actuator 20 (first and second pressure chambers P1 and P2) of the valve 1 to the outside.
- the driving fluid in the first and second pressure chambers P1 and P2 is discharged to the outside through the first and second fluid inflow holes 25b and 25c, the fluid flow path 25a, and the fluid introduction path 21c.
- the holder 17 and the stem 25 are moved to the bottom dead center by the urging force of the compression coil spring 18, and the valve 1 is closed.
- the first inflow path 11f is always connected to the outflow path 11h via the annular groove 11i.
- the valve 1 is closed so that a fluid (gas) flows from a fluid supply source (not shown) to the first inflow path 11f.
- the fluid (gas) is supplied to the valve 1, and the fluid (gas) that has flowed into the inflow port 11j of the first inflow path 11f branches at the branch portion 11L and is an annular groove via the two outflow ports 11k. It flows to 11i and flows out from the outflow path 11h.
- the fluid (gas) supplied to the first inflow passage 11f may be different from or the same as the fluid (gas) supplied to the second inflow passage 11g.
- the first inflow passage 11f has a plurality of flow paths including one inlet 11j and a plurality of outlets 11k, and each outlet 11k has an annular groove 11i. It is open to.
- the cross-sectional area of the flow path on the primary side of the valve 1 can be increased, so that the flow rate of the fluid (gas) flowing through the valve 1 can be increased. Therefore, it is possible to provide the valve 1 having the body 11 capable of realizing a large flow rate.
- the body 11 is located between the inflow port 11j and the central axis C of the annular groove 11i, and has a branch portion 11L that branches the first inflow path 11f into a plurality of flow paths. Therefore, the fluid that has flowed into the first inflow path 11f flows into the annular groove 11i without being disturbed. Therefore, the flow rate of the fluid (gas) flowing through the valve 1 can be increased.
- the inflow port 11j of the first inflow path 11f and the inflow port of the second inflow path 11g are opened on the same surface (third surface 11C) of the body 11, and the diameters of the inflow ports are different from each other.
- the first inflow path 11f is configured as described above.
- the cross-sectional area of the flow path on the primary side of the valve 1 can be increased, and the flow rate of the fluid (gas) flowing through the valve 1 can be increased.
- the flow path cross-sectional area on the primary side of the valve 1 can be increased, and the fluid (gas) flowing through the valve 1 can be increased.
- Flow rate can be increased.
- the inflow port 11j of the first inflow path 11f, one end of the second inflow path 11g, and the other end of the outflow path 11h may be configured to open to the second surface 11B.
- the first inflow path 11f may be configured to be inclined with respect to the central axis of the annular groove 11i.
- the first inflow path 11f of the above embodiment is branched into two flow paths in a plan view, but may be branched into two flow paths in a side view.
- the first inflow path 11f is not limited to the plan view and the side view, and may be branched into a plurality of flow paths.
- the shape of the branch portion 11L is not limited to the shape of the above-described embodiment, and may be any shape as long as the flow of the fluid is not disturbed.
- Valve 11 Body 11B: Second surface 11C: Third surface 11e: Valve chamber 11f: First inflow path 11g: Second inflow path 11h: Outflow path 11i: Circular groove 11j: Inflow port 11k: Outlet 11L: Branch 12: Sheet 14: Diaphragm
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
Abstract
Description
図2は、図1のII-II線に沿ったボディ11の断面図である。
ボディ部10は、ボディ11と、弁座であるシート12と、ボンネット13と、ダイヤフラム14と、押えアダプタ15と、ダイヤフラム押え16と、ホルダ17と、圧縮コイルスプリング18と、を備える。
アクチュエータ20は、エア駆動式であり、全体で略円柱形状をなし、ケーシング21と、仕切ディスク22と、第1ピストン23と、第2ピストン24と、ステム25を備える。
次に、本実施形態に係るバルブ1の開閉動作について説明する。
11:ボディ
11B:第2面
11C:第3面
11e:弁室
11f:第1流入路
11g:第2流入路
11h:流出路
11i:環状溝
11j:流入口
11k:流出口
11L:分岐部
12:シート
14:ダイヤフラム
Claims (4)
- 弁室、第1流入路、第2流入路、流出路、および環状溝が形成され、弁座が設けられたボディと、
前記弁座に当接および前記弁座から離間することにより、前記第2流入路と前記流出路とを連通および遮断するダイヤフラムと、を備え、
前記第2流入路の端部は、前記弁室に開口し、
前記弁座は、前記弁室と前記第2流入路とが連通する箇所の周縁に設けられ、
前記環状溝は、前記弁室に開口し、前記第2流入路の周囲に形成され、
前記流出路の端部は、前記環状溝に開口し、
前記第1流入路は、一つの流入口と複数の流出口とからなる複数の流路を有し、各流出口は前記環状溝に開口している、バルブ。 - 前記ボディは、前記流入口と前記環状溝の中心軸との間に位置し、前記第1流入路を複数の流路に分岐する分岐部を有する、請求項1に記載のバルブ。
- 前記第1流入路の流入口および前記第2流入路の流入口は、前記ボディの同一面に開口し、各流入口の径が互いに異なる、請求項1または請求項2に記載のバルブ。
- 前記第1流入路は、その断面積が前記流入口から前記環状溝に向かって増加する、請求項1から請求項3のいずれか一項に記載のバルブ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021548765A JP7450278B2 (ja) | 2019-09-27 | 2020-09-08 | バルブ |
KR1020227013567A KR102643448B1 (ko) | 2019-09-27 | 2020-09-08 | 밸브 |
US17/704,564 US11713819B2 (en) | 2019-09-27 | 2022-03-25 | Valve device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2019177873 | 2019-09-27 | ||
JP2019-177873 | 2019-09-27 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US17/704,564 Continuation US11713819B2 (en) | 2019-09-27 | 2022-03-25 | Valve device |
Publications (1)
Publication Number | Publication Date |
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WO2021059963A1 true WO2021059963A1 (ja) | 2021-04-01 |
Family
ID=75166109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2020/033936 WO2021059963A1 (ja) | 2019-09-27 | 2020-09-08 | バルブ |
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US (1) | US11713819B2 (ja) |
JP (1) | JP7450278B2 (ja) |
KR (1) | KR102643448B1 (ja) |
TW (1) | TWI752634B (ja) |
WO (1) | WO2021059963A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10148272A (ja) * | 1996-11-20 | 1998-06-02 | Tadahiro Omi | 遮断開放器 |
JP2005291481A (ja) * | 2004-04-06 | 2005-10-20 | Ckd Corp | 集積弁 |
JP2007024384A (ja) * | 2005-07-15 | 2007-02-01 | Fuji Koki Corp | 電動弁 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05106749A (ja) * | 1991-10-18 | 1993-04-27 | Texas Instr Japan Ltd | 弁装置 |
SE501377C2 (sv) | 1993-06-17 | 1995-01-30 | Ingvar Baecklund | Trevägs membranventilanordning |
JP3326683B2 (ja) * | 1997-09-24 | 2002-09-24 | 株式会社フジキン | ボルト抜止め装置 |
JP4721560B2 (ja) | 2001-05-31 | 2011-07-13 | 旭有機材工業株式会社 | 四方弁 |
JP3553526B2 (ja) | 2001-06-27 | 2004-08-11 | 株式会社キッツエスシーティー | 可変流量バルブ |
JP6588237B2 (ja) * | 2015-05-29 | 2019-10-09 | 株式会社フジキン | バルブおよび流体制御装置 |
WO2017150125A1 (ja) | 2016-03-02 | 2017-09-08 | ニプロ株式会社 | 医療用活栓 |
JP6893362B2 (ja) * | 2016-07-29 | 2021-06-23 | 株式会社フジキン | オリフィス内蔵弁および圧力式流量制御装置 |
JP7237370B2 (ja) * | 2018-07-31 | 2023-03-13 | 株式会社フジキン | バルブ装置 |
JP2021008829A (ja) * | 2019-06-28 | 2021-01-28 | 株式会社フジキン | バキュームジェネレータ |
JP7389461B2 (ja) * | 2019-10-31 | 2023-11-30 | 株式会社フジキン | バルブ装置および流体制御装置 |
-
2020
- 2020-09-08 WO PCT/JP2020/033936 patent/WO2021059963A1/ja active Application Filing
- 2020-09-08 JP JP2021548765A patent/JP7450278B2/ja active Active
- 2020-09-08 KR KR1020227013567A patent/KR102643448B1/ko active IP Right Grant
- 2020-09-17 TW TW109132015A patent/TWI752634B/zh active
-
2022
- 2022-03-25 US US17/704,564 patent/US11713819B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10148272A (ja) * | 1996-11-20 | 1998-06-02 | Tadahiro Omi | 遮断開放器 |
JP2005291481A (ja) * | 2004-04-06 | 2005-10-20 | Ckd Corp | 集積弁 |
JP2007024384A (ja) * | 2005-07-15 | 2007-02-01 | Fuji Koki Corp | 電動弁 |
Also Published As
Publication number | Publication date |
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JPWO2021059963A1 (ja) | 2021-04-01 |
US20220213965A1 (en) | 2022-07-07 |
KR20220063270A (ko) | 2022-05-17 |
US11713819B2 (en) | 2023-08-01 |
KR102643448B1 (ko) | 2024-03-06 |
TW202126939A (zh) | 2021-07-16 |
JP7450278B2 (ja) | 2024-03-15 |
TWI752634B (zh) | 2022-01-11 |
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