WO2021054059A1 - 撮像装置 - Google Patents

撮像装置 Download PDF

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Publication number
WO2021054059A1
WO2021054059A1 PCT/JP2020/031916 JP2020031916W WO2021054059A1 WO 2021054059 A1 WO2021054059 A1 WO 2021054059A1 JP 2020031916 W JP2020031916 W JP 2020031916W WO 2021054059 A1 WO2021054059 A1 WO 2021054059A1
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WO
WIPO (PCT)
Prior art keywords
unit
imaging
illumination
work
image pickup
Prior art date
Application number
PCT/JP2020/031916
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
真稔 島田
慎也 谷口
佐藤　祐介
泰弘 小池
佐伯　和人
Original Assignee
株式会社Ｓｃｒｅｅｎホールディングス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019172255A external-priority patent/JP2021052247A/ja
Priority claimed from JP2019172271A external-priority patent/JP7278186B2/ja
Application filed by 株式会社Ｓｃｒｅｅｎホールディングス filed Critical 株式会社Ｓｃｒｅｅｎホールディングス
Publication of WO2021054059A1 publication Critical patent/WO2021054059A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90—Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums

Definitions

  • the present invention relates to an imaging device.
  • forged parts having a three-dimensional shape used in the driving part of an automobile or the like and its surroundings are visually inspected to find defects by a person looking at the forged parts from various angles.
  • This visual inspection can be replaced, for example, with an inspection using an optical instrument including a camera and lighting.
  • a defect inspection device capable of freely imaging a desired part of an inspection object (also referred to as a work) can be provided. It is considered (for example, Patent Document 1 etc.). According to such a defect inspection device, for example, even a large workpiece that is difficult to handle by visual inspection by a human can be inspected.
  • the work is illuminated from one direction for imaging. Therefore, for example, if the work has various irregular outer shapes such as uneven portions and holes, the light emitted from the illumination to the work is not reflected toward the camera for a part of the work. , It may not be possible to obtain an image that sufficiently captures the work.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of easily capturing an image that sufficiently captures an object having various shapes.
  • the imaging device includes a mounting unit, a first imaging unit, a first moving mechanism, a second imaging unit, and a second moving mechanism.
  • the above-mentioned placing portion is for placing an image-imaging object.
  • the first imaging unit includes one or more first imaging units and one or more first illumination units.
  • the first moving mechanism moves the first imaging unit relative to the above-mentioned mounting portion.
  • the second imaging unit includes one or more second imaging units and one or more second illumination units.
  • the second moving mechanism moves the second imaging unit relative to the above-mentioned mounting portion.
  • the imaging device according to the second aspect is the imaging device according to the first aspect, and the first moving mechanism and the second moving mechanism are located so as to sandwich the above-mentioned mounting portion.
  • the imaging device according to the third aspect is the imaging device according to the first or second aspect, and at least one of the first moving mechanism and the second moving mechanism is a multi-axis robot arm. including.
  • the image pickup apparatus is the image pickup apparatus according to any one of the first to third aspects, wherein the first image pickup unit is moved by the first movement mechanism and the second movement mechanism is used. By moving the second image pickup unit, the first image pickup unit and the second image pickup unit can take an image of the image pickup object placed on the above-described placement portion over the entire circumference.
  • the image pickup device is the image pickup device according to any one of the first to fourth aspects, and the first image pickup unit and the second image pickup unit are moved alternately. It includes a first moving mechanism and a control unit that controls the operation of the second moving mechanism.
  • the image pickup apparatus is the image pickup apparatus according to any one of the first to fifth aspects, and the one or more first illumination units are the first A illumination unit and the first B illumination unit. And, including.
  • the 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
  • the 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
  • the imaging device is the imaging device according to the sixth aspect, and the first imaging unit includes an optical system.
  • the imaging direction along the optical axis of the optical system from the first imaging unit toward the imaging object mounted on the above-mentioned stationary unit is closer to the first A illumination direction than to the first B illumination direction.
  • the image pickup apparatus is the image pickup apparatus according to the sixth or seventh aspect, and the one or more first image pickup units are the first A image pickup unit, the first B image pickup unit, and the first C.
  • the image pickup unit is included, and the one or more first illumination units include the first A illumination unit, the first B illumination unit, and the first C illumination unit.
  • the first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image.
  • the first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above.
  • the image pickup device is the image pickup device according to the eighth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
  • the image pickup apparatus is the image pickup apparatus according to the eighth or ninth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
  • the imaging device includes a mounting unit, an imaging unit, and a moving mechanism.
  • the above-mentioned placing portion is for placing an image-imaging object.
  • the image pickup unit has one or more image pickup units and two or more illumination units including a first A illumination unit and a first B illumination unit.
  • the moving mechanism moves the imaging unit relative to the above-mentioned mounting portion.
  • the 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
  • the 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
  • the imaging device is the imaging device according to the eleventh aspect, and the first A imaging unit among the one or more imaging units includes an optical system.
  • the imaging direction along the optical axis of the optical system from the first A imaging unit toward the imaging object mounted on the above-described stationary unit is closer to the first A illumination direction than the first B illumination direction.
  • the imaging apparatus is the imaging apparatus according to the twelfth aspect, and the one or more imaging units include the first A imaging unit, the first B imaging unit, and the first C imaging unit.
  • the two or more lighting units include the first A lighting unit, the first B lighting unit, and the first C lighting unit.
  • the first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image.
  • the first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above.
  • the image pickup device is the image pickup device according to the thirteenth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
  • the imaging device is the imaging device according to the thirteenth or fourteenth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
  • the first illumination unit and the second imaging unit are separately moved with respect to the object to be imaged, and are illuminated by the first illumination unit and the second illumination unit, respectively.
  • the imaged object can be imaged by the first imaging unit and the second imaging unit.
  • each part of the object to be imaged can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, it is possible to easily image each part of the image pickup object under a plurality of illumination conditions in a wider area on the surface of the image pickup object.
  • each part of the image pickup object can be imaged from an arbitrary angle under a plurality of lighting conditions.
  • the image pickup apparatus for example, it is possible to easily image each part of the image pickup object under a plurality of lighting conditions in a wider area of the surface of the image pickup object.
  • the imaging device for example, it is possible to shorten the time required for imaging at a plurality of locations of an imaging object under a plurality of lighting conditions. Therefore, for example, it is possible to increase the number of imaging objects that can complete imaging per unit time.
  • imaging under a plurality of lighting conditions can be performed with a small number of operations.
  • the imaging apparatus for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction.
  • the conditions under which the positively reflected light from the imaged object can be captured can be changed.
  • imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
  • the imaging device for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
  • imaging under a plurality of lighting conditions can be performed with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
  • the imaging device for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction.
  • imaging the conditions under which the positively reflected light from the imaged object can be captured can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness in the object to be imaged.
  • imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
  • the imaging device for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection system according to the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of an inspection system according to the first embodiment.
  • FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the first embodiment.
  • FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit according to the first embodiment.
  • FIG. 3 is a block diagram showing an example of the functional configuration of the inspection system.
  • FIG. 4 is a block diagram showing an example of the functional configuration of the loading device.
  • FIG. 5A is a block diagram showing an example of the functional configuration of the image pickup apparatus.
  • FIG. 5B is a block diagram showing an example of the functional configuration of the first imaging unit.
  • FIG. 5C is a block diagram showing an example of the functional configuration of the second imaging unit.
  • FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device.
  • FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device.
  • FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus.
  • FIG. 9 is a diagram schematically showing the physical configuration of the first imaging unit according to the second embodiment.
  • FIG. 10A is a diagram schematically showing an example of the first A lighting unit.
  • FIG. 10B is a diagram schematically showing an example of the first B lighting unit.
  • FIG. 10C is a diagram schematically showing an example of the first C lighting unit.
  • FIG. 11 is a side view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 12 is a plan view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 13 is a front view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit according to the second embodiment.
  • FIG. 15 is a diagram showing an example of the appearance of the work.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1A imaging unit.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1B imaging unit.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1A imaging unit.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated
  • FIG. 16C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first C illumination unit with the first C imaging unit.
  • FIG. 17A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first A imaging unit.
  • FIG. 17B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first B imaging unit.
  • FIG. 17C is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1B illumination unit with the 1C imaging unit.
  • FIG. 17A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first A imaging unit.
  • FIG. 17B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first B imaging unit.
  • FIG. 18A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first A imaging unit.
  • FIG. 18B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first B imaging unit.
  • FIG. 18C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first C imaging unit.
  • FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the third embodiment.
  • FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus according to the third embodiment.
  • FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region in the first A lighting unit.
  • FIG. 20B is a diagram showing an example of the shape and dimensions of the first work.
  • FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work.
  • the direction in which the work W0 is conveyed along the horizontal plane by the conveying unit Cv1 of the loading device 11 is the + X direction
  • the direction perpendicular to the direction in which the work W0 is conveyed along the horizontal plane is the + Y direction.
  • the direction of gravity that is orthogonal to both the + X direction and the + Y direction is the ⁇ Z direction.
  • the expression indicating the shape not only expresses the shape strictly geometrically, but also, for example, unevenness or unevenness or within a range in which the same effect can be obtained.
  • a shape having a chamfer or the like shall also be represented.
  • the expressions “equipped”, “equipped”, “equipped”, “included”, or “have” one component are not exclusive expressions that exclude the existence of other components.
  • the expression “concatenation” includes a state in which two elements are in contact with each other and a state in which the two elements are separated from each other with another element in between.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection system 1 according to the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of the inspection system 1 according to the first embodiment.
  • the inspection system 1 includes, for example, a loading device 11, four imaging devices 12, a reversing device 13, and a discharging device 14. .
  • the input device 11 the first image pickup device (also referred to as the first image pickup device) 121
  • the second image pickup device also referred to as the second image pickup device
  • the reversing device 13, the third imaging device (also referred to as the third imaging device) 123, the fourth imaging device (also referred to as the fourth imaging device) 124, and the discharging device 14 are in the + X direction. It is located in a state of being connected in the order described in this description.
  • the loading device 11, the imaging device 12, the reversing device 13, and the discharging device 14 are appropriately abbreviated as "devices".
  • the inspection system 1 can be manufactured by connecting a plurality of separately manufactured devices 11, 12, 13, and 14 to each other in the + X direction.
  • the inspection system can be manufactured, for example, by appropriately combining two or more devices including one or two or more image pickup devices 12.
  • the devices 11, 12, 13, and 14 can be connected to each other by using, for example, a connecting member and a fastening member such as a screw.
  • Each device 11, 12, 13, 14 has, for example, a tubular portion (also referred to as a tubular portion) having an internal space on which an object to be inspected (also referred to as a work) W0 is placed and conveyed.
  • This tubular portion is positioned so as to penetrate in the + X direction, for example.
  • the loading device 11 has a tubular portion 11tb
  • the imaging device 12 has a tubular portion 12tb
  • the reversing device 13 has a tubular portion 13tb
  • the discharging device 14 has a tubular portion 13tb.
  • one tubular portion (cylindrical portion) 1tb forming a path (also referred to as a transport path) Rt1 capable of transporting the work W0 between the plurality of devices 11, 12, 13, and 14 is formed.
  • a plurality of devices 11, 12, 13, and 14 are connected to each other.
  • a two-dot chain line arrow is drawn along the transport path Rt1 along the + X direction.
  • the tubular portion 1tb includes the tubular portion 11tb of the loading device 11, the tubular portion 12tb of the first imaging device 121, the tubular portion 12tb of the second imaging device 122, and the cylinder of the reversing device 13.
  • the inspection system 1 conveys the work W0 from the input device 11, for example, in the order of the first image pickup device 121, the second image pickup device 122, the inversion device 13, the third image pickup device 123, the fourth image pickup device 124, and the discharge device 14. Then, the work W0 can be inspected.
  • the upper surface portion located in the + Z direction and the side surface portion located in the ⁇ Y direction in each of the tubular portions 11tb, 12tb, 13tb, and 14tb may or may not be transparent, for example.
  • the loading device 11 is a device in which the work W0 is loaded from the outside of the inspection system 1.
  • the loading device 11 is located first in the transport path Rt1 of the work W0 among the plurality of devices included in the inspection system 1, for example.
  • the loading device 11 has a belt conveyor which is a transport unit Cv1 capable of transporting the work W0, and each imaging device 12 transports the work W0.
  • the reversing device 13 has a belt conveyor which is a transport unit Cv3 capable of transporting the work W0, and the discharge device 14 has a belt conveyor which is a transport unit Cv4 capable of transporting the work W0.
  • the transport unit Cv1 of the loading device 11 can transport the work W0 between the loading device 11 and the outside of the loading device 11, for example.
  • the transport unit Cv2 of the image pickup device 12 can transport the work W0 between the image pickup device 12 and the outside of the image pickup device 12, for example.
  • the transport unit Cv3 of the reversing device 13 can transport the work W0 between the reversing device 13 and the outside of the reversing device 13, for example.
  • the transport unit Cv4 of the discharge device 14 may be able to transport the work W0 between the discharge device 14 and the outside of the discharge device 14, or may transfer the work W0 to a predetermined position in the discharge device 14. It may be able to be transported.
  • the loading device 11 has a portion (also referred to as an opening / closing portion) 11oc that can be opened / closed at the end portion of the tubular portion 11tb opposite to the imaging device 12 in the ⁇ X direction.
  • the opening / closing unit 11oc has, for example, a door or a shutter that can be opened / closed.
  • the work W0 can be loaded into the loading device 11 via the opening / closing unit 11oc.
  • the worker Op0 throws the work W0 into the throwing device 11.
  • the operator Op0 places the work W0 on the belt of the belt conveyor according to the mark drawn or projected on the belt of the belt conveyor as the transport unit Cv1.
  • the transport unit Cv1 is a transport unit of the first imaging device 121 in which the work W0 mounted on the belt of the belt conveyor as the transport unit Cv1 is located outside the + X direction of the loading device 11. It can be delivered to Cv2 (also referred to as transport unit Cv21).
  • the imaging device 12 can perform imaging as, for example, an inspection process in which the work W0 is an imaging object (also referred to as an imaging object).
  • the first imaging device 121 performs imaging as a processing for inspection, for example, targeting the work W0 delivered from the transport unit Cv1 of the input device 11 to the transport unit Cv21 of the first imaging device 121. Can be done.
  • the work W0 imaged by the first imaging device 121 is, for example, the transport unit Cv2 of the second imaging device 122 located outside the first imaging device 121 in the + X direction from the first imaging device 121 by the transport unit Cv21. It is delivered to (also referred to as a transport unit Cv22).
  • the second imaging device 122 may perform imaging as a processing for inspection on the work W0 delivered from the transport unit Cv21 of the first image pickup device 121 to the transport unit Cv22 of the second image pickup device 122.
  • the work W0 imaged by the second imaging device 122 is received, for example, from the second imaging device 122 by the transport unit Cv22 to the transport unit Cv3 of the reversing device 13 located outside the second imaging device 122 in the + X direction. Passed.
  • the third imaging device 123 targets the work W0 delivered from the transport unit Cv3 of the reversing device 13 to the transport unit Cv2 (also referred to as the transport unit Cv23) of the third image pickup device 123, as a process for inspection. Imaging can be performed.
  • the work W0 imaged by the third imaging device 123 is, for example, the transport unit Cv2 of the fourth imaging device 124 located outside the third imaging device 123 in the + X direction from the third imaging device 123 by the transport unit Cv23. It is delivered to (also referred to as a transport unit Cv24).
  • the fourth imaging device 124 may perform imaging as an inspection process for the work W0 delivered from the transport unit Cv23 of the third image pickup device 123 to the transport unit Cv24 of the fourth image pickup device 124. it can.
  • the work W0 imaged by the fourth imaging device 124 is received, for example, by the transport unit Cv24 from the fourth image pickup device 124 to the transport unit Cv4 of the discharge device 14 located outside the fourth image pickup device 124 in the + X direction. Passed.
  • FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the first embodiment.
  • FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit 12s according to the first embodiment.
  • the first imaging device 121, the second imaging device 122, the third imaging device 123, and the fourth imaging device 124 each have the same configuration.
  • the image pickup apparatus 12 includes, for example, a transport unit Cv2, an image pickup unit 12s, and a moving mechanism 12t.
  • the transport unit Cv2 has a function as, for example, a portion (also referred to as a mounting unit) Sg2 for mounting the work W0 as an imaging object.
  • the imaging unit 12s can perform imaging on the work W0 as an imaging object, for example.
  • the image pickup apparatus 12 has two image pickup units 12s. Specifically, as shown in FIG. 2A, the image pickup apparatus 12 includes a first image pickup unit 12s1 and a second image pickup unit 12s2 as two image pickup units 12s. As shown in FIG. 2B, the image pickup unit 12s has, for example, an image pickup unit I1 and an illumination unit F1. More specifically, the first imaging unit 12s1 includes a first imaging unit I11 and a first illumination unit F11. The second imaging unit 12s2 includes a second imaging unit I12 and a second illumination unit F12.
  • Each of the first image pickup unit I11 and the second image pickup unit I12 has, for example, an image pickup element such as a charge-coupled device (CCD) and an optical system for forming an optical image of the work W0 on the image pickup device.
  • planar illumination in which a plurality of light emitting diodes (Light Emitting Diodes: LEDs) are two-dimensionally arranged is applied.
  • the work W0 can be illuminated over a wide range by each of the first illumination unit F11 and the second illumination unit F12.
  • the lens portion Lz1 is positioned so as to be inserted into the hole portion H1 of the illumination portion F1.
  • the optical axis Pi1 of the lens Lz1 is set to pass through the hole H1.
  • the first lens portion Lz11 of the first imaging unit I11 is positioned so as to be inserted into the first hole portion H11 of the first illumination unit F11.
  • the optical axis (also referred to as the first optical axis) Pi11 of the first lens Lz11 is set to pass through the first hole portion H11.
  • the second lens portion Lz12 of the second imaging unit I12 is located in a state of being inserted into the second hole portion H12 of the second illumination unit F12.
  • the optical axis (also referred to as the second optical axis) Pi12 of the second lens Lz12 is set to pass through the second hole portion H12.
  • the first imaging unit I11 can perform imaging with at least a part of the work W0 illuminated by the first illumination unit F11 as a subject.
  • the second imaging unit I12 can perform imaging with at least a part of the work W0 illuminated by the second illumination unit F12 as a subject.
  • the moving mechanism 12t can move the imaging unit 12s relative to the work W0 mounted on the mounting portion Sg2, for example. From another point of view, the moving mechanism 12t can move the imaging unit 12s relative to, for example, the mounting portion Sg2 for mounting the work W0.
  • the image pickup apparatus 12 has two moving mechanisms 12t. Specifically, as shown in FIG. 2A, the imaging device 12 has a first moving mechanism 12t1 and a second moving mechanism 12t2 as two moving mechanisms 12t.
  • the first moving mechanism 12t1 can move the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, for example.
  • the first moving mechanism 12t1 can move the first imaging unit 12s1 relative to, for example, the mounting portion Sg2 for mounting the work W0.
  • the second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, for example.
  • the second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the mounting portion Sg2 for mounting the work W0, for example.
  • the first illumination unit 12s1 and the second imaging unit 12s2 are moved separately with respect to the work W0, and the first illumination unit F11 and the second illumination unit F12, respectively.
  • the work W0 illuminated by the above can be imaged by the first imaging unit I11 and the second imaging unit I12.
  • the first imaging unit I11 is illuminated by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and both the first illumination unit F11 and the second illumination unit F12. Imaging can be performed for each of the work W0.
  • the second imaging unit I12 is also formed by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and the first illumination unit F11 and the second illumination unit F12.
  • An image can be taken for each of the illuminated work W0.
  • each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • a robot arm or the like is applied to the moving mechanism 12t.
  • a robot arm also referred to as a multi-axis robot arm
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 may be a multi-axis robot arm. In this way, for example, if the multi-axis robot arm is applied to the moving mechanism 12t, each part of the work W0 can be imaged from an arbitrary angle under a plurality of lighting conditions.
  • the multi-axis robot arm includes, for example, a reference portion Pt0, a first movable portion Pt1, a second movable portion Pt2, a third movable portion Pt3, a fourth movable portion Pt4, a fifth movable portion Pt5, and a third.
  • a robot arm (also referred to as a 6-axis robot arm) that has 6 movable portions Pt6 and is rotatable on 6 axes is applied.
  • the reference portion Pt0 is fixed to, for example, the base portion Bs12 of the image pickup apparatus 12.
  • the belt conveyor of the transport unit Cv2 may be fixed to the base portion Bs12.
  • the reference portion Pt0 has, for example, a rotating portion Pr1 that rotatably holds the first movable portion Pt1 about the first axis Pl1 along the + Z direction.
  • the first movable portion Pt1 has, for example, a second rotating portion Pr2 that rotatably holds the second movable portion Pt2 about the second axis Pl2 along the horizontal direction.
  • the second movable portion Pt2 has, for example, a third rotating portion Pr3 that holds the third movable portion Pt3 rotatably around the third axis Pl3 along the horizontal direction.
  • the third movable portion Pt3 has, for example, a fourth rotating portion Pr4 that rotatably holds the fourth movable portion Pt4 around the fourth axis Pl4 that is perpendicular to the third axis Pl3.
  • the fourth movable portion Pt4 has, for example, a fifth rotating portion Pr5 that holds the fifth movable portion Pt5 rotatably around the fifth axis Pl5 that is perpendicular to the fourth axis Pl4.
  • the fifth movable portion Pt5 has, for example, a sixth rotating portion Pr6 that holds the sixth movable portion Pt6 rotatably around the sixth axis Pl6 that is perpendicular to the fifth axis Pl5.
  • the image pickup unit 12s is fixed to the sixth movable portion Pt6.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2. This makes it possible to easily image each portion of the work W0 under a plurality of illumination conditions, for example, for a wider area on the surface of the work W0.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 are located so as to face each other with the mounting portion Sg2 interposed therebetween. If such an aspect is adopted, for example, the work of the light emitted from the second illumination unit F12 located on the opposite side of the first imaging unit I11 with the work W0 in between when viewed in a plan view. Illumination conditions in which the light reflected on W0 is incident on the first imaging unit I11 can be easily realized.
  • the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 cause the first imaging unit 12s1 and the second imaging unit 12s2 to move.
  • the work W0 mounted on the mounting portion Sg2 may be able to be imaged over the entire circumference. In this case, for example, for a wider area on the surface of the work W0, each part of the work W0 can be easily imaged under a plurality of lighting conditions.
  • the work W0 mounted on the mounting portion Sg2 is provided with a virtual axis along the vertical direction (Z direction) passing through the work W0.
  • the reversing device 13 can reverse the work W0, for example.
  • the inversion of the work W0 includes, for example, an upside-down inversion of the work W0.
  • the reversing device 13 can reverse the work W0 delivered from the transporting unit Cv22 of the second imaging device 122 to the transporting unit Cv3, for example.
  • the reversing device 13 moves, for example, a holding portion 13h (see FIG. 6) capable of holding the work W0 in order to reverse the work W0, and a holding portion 13h in a state where the holding portion 13h holds the work W0. It has a moving mechanism 13t (see FIG.
  • the reversing device 13 may have, for example, one moving mechanism 13t for one holding portion 13h. More specifically, for example, when one holding portion 13h is present, the reversing module 13 may have one moving mechanism 13t, and when two or more holding portions 13h are present. May have two or more moving mechanisms 13t.
  • the discharge device 14 is, for example, a device for discharging the work W0 from the inside of the inspection system 1 to the outside of the inspection system 1.
  • the discharge device 14 is located, for example, at the last portion of the work W0 in the transport path Rt1 of two or more modules including one or more image pickup devices 12 included in the inspection system 1.
  • the discharge device 14 has, for example, a portion (opening / closing portion) 14oc of the tubular portion 14tb that can be opened / closed at an end portion in the + X direction opposite to the imaging device 12.
  • the opening / closing unit 14oc has, for example, a door or a shutter that can be opened / closed.
  • the work W0 is discharged to the outside of the discharge device 14 via, for example, the opening / closing portion 14oc.
  • the worker Op0 discharges the work W0 to the outside of the discharge device 14.
  • a robot or the like provided outside the inspection system 1 may discharge the work W0 from the inside of the discharge device 14 to the outside.
  • FIG. 3 to 7 are block diagrams showing an example of the functional configuration of the inspection system 1 according to the first embodiment.
  • FIG. 3 is a block diagram schematically showing an example of the overall functional configuration of the inspection system 1.
  • FIG. 4 is a block diagram showing an example of the functional configuration of the input device 11 in the overall functional configuration of the inspection system 1.
  • FIG. 5 is a block diagram showing an example of the functional configuration of the imaging device 12 in the overall functional configuration of the inspection system 1.
  • FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device 13 in the overall functional configuration of the inspection system 1.
  • FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device 14 in the overall functional configuration of the inspection system 1.
  • the closing device 11 connects, for example, the integrated control unit C0, the input unit 11i, the transport control unit Cc1, and the connection unit 11h, which are electrically connected via the wiring Wr1.
  • the input device 11 has, for example, an output unit 11d connected to the integrated control unit C0 and a transport unit Cv1 connected to the transport control unit Cc1.
  • the integrated control unit C0 can control the operation of the inspection system 1 in an integrated manner, for example.
  • the integrated control unit C0 has, for example, a calculation unit, a memory, a storage unit, and the like.
  • the arithmetic unit is composed of, for example, one or more central processing units (CPU) and the like.
  • the memory is composed of, for example, a volatile storage medium such as RAM (Random Access Memory).
  • the storage unit is composed of a non-volatile storage medium such as a hard disk drive (HDD) or a solid state drive (SSD), for example.
  • the storage unit can store, for example, a program, various types of information, and the like.
  • the arithmetic unit can realize various functions by reading and executing a program stored in the storage unit, for example.
  • the RAM is used as a workspace, for example, and stores information that is temporarily generated or acquired.
  • At least a part of the functional configuration realized by the integrated control unit C0 may be realized by hardware such as a dedicated electronic circuit.
  • the input unit 11i can input various information in response to the operation of the worker Op0, for example.
  • an operation unit such as a button or a touch panel, a microphone unit capable of voice input, or the like is applied to the input unit 11i.
  • the operation of the worker Op0 includes, for example, operations such as operation and vocalization.
  • the output unit 11d can output information in a manner recognizable by the operator Op0, for example, based on the information from the integrated control unit C0.
  • a display unit or a lamp that visually outputs information, a speaker that outputs information audibly, and the like are applied to the output unit 11d.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1, for example.
  • the transport control unit Cc1 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc1 can realize the function of the transfer control unit Cc1 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc1 may be realized by hardware such as a dedicated electronic circuit.
  • connection portion 11h is, for example, a portion that electrically connects to a device other than the input device 11 among a plurality of devices constituting the inspection system 1.
  • the connection portion 11h is, for example, a hub type in which the wirings Wr2 of a plurality of devices are electrically connected separately, but a method in which the wirings Wr2 of the plurality of devices are electrically connected in series. There may be.
  • the first image pickup device 121, the second image pickup device 122, the third image pickup device 123, and the fourth image pickup device 124 each have the same functional configuration.
  • the image pickup apparatus 12 includes, for example, a transport control unit Cc2, an image pickup control unit Cs2, and a movement control unit Ct2, which are electrically connected to each other via wiring Wr2.
  • the image pickup apparatus 12 includes, for example, a transfer unit Cv2 connected to the transfer control unit Cc2, an image pickup unit 12s connected to the image pickup control unit Cs2, and a movement mechanism 12t connected to the movement control unit Ct2. ..
  • the image pickup apparatus 12 has two image pickup control units Cs2 and two movement control units Ct2.
  • the two imaging control units Cs2 include, for example, a first imaging control unit Cs2 (also referred to as a first imaging control unit Cs21) and a second imaging control unit Cs2 (also referred to as a second imaging control unit Cs22).
  • the two movement control units Ct2 include, for example, a first movement control unit Ct2 (also referred to as a first movement control unit Ct21) and a second movement control unit Ct2 (also referred to as a second movement control unit Ct22).
  • the image pickup apparatus 12 has two image pickup units 12s including a first image pickup unit 12s1 and a second image pickup unit 12s2, and has two movement mechanisms 12t including a first movement mechanism 12t1 and a second movement mechanism 12t2.
  • the first imaging unit 12s1 is connected to the first imaging control unit Cs21
  • the second imaging unit 12s2 is connected to the second imaging control unit Cs22.
  • the first movement mechanism 12t1 is connected to the first movement control unit Ct21
  • the second movement mechanism 12t2 is connected to the second movement control unit Ct22.
  • the first image pickup unit 12s1 includes the first image pickup unit I11 and the first illumination unit F11 as shown in FIG. 5 (b), and the second image pickup unit 12s2 is shown in FIG. 5 (c).
  • the second imaging unit I12 and the second illumination unit F12 are included.
  • Each of the transport control unit Cc2, the image pickup control unit Cs2, and the movement control unit Ct2 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc2 can realize the function of the transfer control unit Cc2 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc2 can control the operation of the transport unit Cv2 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the image pickup control unit Cs2 can realize the function of the image pickup control unit Cs2 by, for example, executing a program in the storage unit in the calculation unit.
  • the image pickup control unit Cs2 can, for example, control the operation of the image pickup unit 12s and acquire information (also referred to as image pickup information) obtained by imaging the work W0 by the image pickup unit 12s.
  • the first image pickup control unit Cs21 can control the operation of the first image pickup unit 12s1 and acquire the image pickup information obtained by the image pickup of the work W0 by the first image pickup unit 12s1.
  • the first imaging control unit Cs21 can control, for example, the timing of light emission of the first lighting unit F11 and the timing of imaging of the first imaging unit I11.
  • the second image pickup control unit Cs22 can control the operation of the second image pickup unit 12s2 and acquire the image pickup information obtained by the image pickup of the work W0 by the second image pickup unit 12s2.
  • the second imaging control unit Cs22 can control the timing of each of the light emission of the second illumination unit F12 and the imaging of the second imaging unit I12.
  • the first imaging unit 12s1 and the second imaging unit 12s2 can operate in synchronization with the control signals from the integrated control unit C0 to the first imaging control unit Cs21 and the second imaging control unit Cs22.
  • the first imaging unit 12s1 and the second imaging unit 12s2 may operate in synchronization with each other by transmitting and receiving signals between the first imaging control unit Cs21 and the second imaging control unit Cs22.
  • the image pickup control unit Cs2 can output, for example, the image pickup information related to the work W0 to the integrated control unit C0 via the wiring Wr2 and the wiring Wr1 after performing various information processing as it is.
  • the imaging information as a result of imaging the work W0 can be acquired.
  • the integrated control unit C0 may display an image based on the imaging information on the output unit 11d, and the operator Op0 may visually inspect the image to inspect the appearance of the work W0, or the integrated control unit C0. May perform an operation to inspect the appearance of the work W0 by comparing the image related to the imaging information with the standard image related to at least a part of the work W0.
  • the imaging control unit Cs2 may perform an operation for inspecting the appearance of the work W0, and may send information indicating the result of the operation to the integrated control unit C0.
  • At least a part of the functional configuration realized by the image pickup control unit Cs2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the movement control unit Ct2 can realize the function of the movement control unit Ct2 by, for example, executing the program in the storage unit in the calculation unit.
  • the movement control unit Ct2 can control the operation of the movement mechanism 12t, for example.
  • the first movement control unit Ct21 can control the operation of the first movement mechanism 12t1.
  • the second movement control unit Ct22 can control the operation of the second movement mechanism 12t2.
  • the first movement control unit Ct21 moves the position of the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, so that the work W0 is moved by the first imaging unit 12s1. It is possible to control the imaging of a plurality of locations.
  • the second movement control unit Ct22 moves the position of the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, so that the second imaging unit 12s2 moves the work W0. It is possible to control so as to perform imaging at a plurality of locations. At least a part of the functional configuration realized by the movement control unit Ct2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the reversing device 13 includes, for example, a transfer control unit Cc3 and a reversing control unit Cr3 that are electrically connected to each other via the wiring Wr2. Further, the reversing device 13 includes, for example, a transport unit Cv3 connected to the transport control unit Cc3, a holding unit 13h connected to the reversing control unit Cr3, and a moving mechanism 13t. In the example of FIG. 6, the reversing device 13 has one reversing control unit Cr3. Here, for example, the reversing device 13 may have two holding units 13h, two moving mechanisms 13t, and two reversing control units Cr3.
  • Each of the transport control unit Cc3 and the inversion control unit Cr3 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc3 can realize the function of the transfer control unit Cc3 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc3 can control the operation of the transport unit Cv3 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc3 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the inversion control unit Cr3 can realize the function of the inversion control unit Cr3 by, for example, executing the program in the storage unit in the calculation unit.
  • the inversion control unit Cr3 can control the operation of the holding unit 13h and the moving mechanism 13t, for example.
  • the reversing control unit Cr3 holds the work W0 by holding the work W0 by the holding unit 13h, and moves the holding unit 13h in the state of holding the work W0 by the moving mechanism 13t, thereby moving the work W0.
  • the first imaging device 121 and the second imaging device 122 perform imaging on the front surface of the work W0
  • the third imaging device 123 and the fourth imaging device 124 perform imaging of the work W0. Imaging can be performed on the back surface.
  • the discharge device 14 has, for example, a transfer control unit Cc4 electrically connected to the wiring Wr2 and a transfer unit Cv4 connected to the transfer control unit Cc4.
  • the transport control unit Cc4 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc4 can realize the function of the transfer control unit Cc4 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc4 can control the operation of the transport unit Cv4 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc4 may be configured by hardware such as a dedicated electronic circuit, for example.
  • FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus 12.
  • the horizontal axis indicates the time, and the timing of each operation of the first imaging unit 12s1 and the second imaging unit 12s2 is indicated.
  • the first moving mechanism is such that the portion of the work W0 whose coordinate values indicating the position in the X direction are X1, X2, X3, ... Is captured in the substantially center of the captured image in the order of this description.
  • An example will be described in which the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are changed in the order of X1, X2, X3, ...
  • the 12t1 and the second moving mechanism 12t2 To do.
  • the period in which the time elapses in the order of time t0 to time t9 will be described.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X1.
  • the first imaging unit I11 captures the work W0 (also referred to as imaging 1a).
  • the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1.
  • the first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 1b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 1c).
  • the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 1d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 1e) while the work W0 is illuminated by the first lighting unit F11. Do.
  • the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the first moving mechanism 12t1. ..
  • the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X1. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 1f).
  • the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the second moving mechanism 12t2.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X2. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 2a).
  • the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2.
  • the first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 2b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 2c).
  • the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 2d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 2e) while the work W0 is illuminated by the first lighting unit F11. Do.
  • the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the first moving mechanism 12t1. ..
  • the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X2. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 2f).
  • the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the second moving mechanism 12t2.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X3. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 3a).
  • the overall control unit C0 controls the operations of the first moving mechanism 12t1 and the second moving mechanism 12t2 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately.
  • the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed.
  • the second imaging unit 12s2 is controlled to be moved.
  • both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time.
  • the first illumination unit F11 while moving the first imaging unit 12s1 and the second imaging unit 12s2 separately with respect to the work W0.
  • the work W0 illuminated by each of the second illumination unit F12 and the second illumination unit F12 can be imaged by the first imaging unit I11 and the second imaging unit I12.
  • each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the first imaging unit 12s1 may include two or more first imaging units I11 or may include two or more first lighting units F11.
  • the second imaging unit 12s2 may include two or more second imaging units I12, or may include two or more second illumination units F12. That is, for example, the first imaging unit 12s1 may include one or more first imaging units I11 and one or more first illumination units F11, and the second imaging unit 12s2 may include one or more first imaging units 12s2. 2
  • the imaging unit I12 and one or more second illumination units F12 may be included.
  • FIG. 9 is a diagram schematically showing an example of the physical configuration of the first imaging unit 12s1 according to the second embodiment.
  • the first imaging unit 12s1 includes one or more first imaging units I11 including a first A imaging unit I11a, a first B imaging unit I11b, and a first C imaging unit I11c. It may have one or more first illumination units F11 including the 1A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c.
  • first imaging units I11 including a first A imaging unit I11a, a first B imaging unit I11b, and a first C imaging unit I11c.
  • the work W0 on which the first A imaging unit I11a is mounted on the mounting portion Sg2 while the first A lighting unit F11a is illuminating the work W0 mounted on the mounting portion Sg2 from above. Can be imaged from above.
  • the work W0 on which the first B imaging unit I11b is placed on the mounting portion Sg2 while the first B lighting unit F11b is illuminating the work W0 mounted on the mounting portion Sg2 from diagonally above. Can be imaged from diagonally above.
  • the first C imaging unit I11c is placed on the mounting portion Sg2 while the first C lighting unit F11c is illuminating the work W0 placed on the mounting portion Sg2 in the horizontal direction. It is possible to image the work W0 in the horizontal direction.
  • the work W0 can be imaged under a plurality of lighting conditions with less operation without moving the first imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
  • the angle formed by the optical axis (also referred to as the first A optical axis) Pi11a of the first A lens unit Lz11a as the optical system in the first A imaging unit I11a and the virtual horizontal plane Pn0 passing through the work W0 ( The first A depression angle) ⁇ 1a is 90 degrees. Therefore, the first A imaging unit I11a functions as a camera (also referred to as an upper camera) capable of imaging the work W0 from above.
  • the angle (also referred to as the first B depression angle) formed by the optical axis (also referred to as the first B optical axis) Pi11b of the first B lens unit Lz11b as the optical system in the first B imaging unit I11b and the virtual horizontal plane Pn0 passing through the work W0. It is said that ⁇ 1b is 45 degrees. Therefore, the first B imaging unit I11b functions as a camera (also referred to as an oblique camera) capable of imaging the work W0 from diagonally above.
  • a form in which the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c intersect at substantially the center of the work W0 can be considered.
  • the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c are located along a virtual plane along the YZ plane. Then, the first A lens portion Lz11a of the first A imaging unit I11a is located in a state of being inserted into the first A hole portion H11a as the first hole portion H11 in the first A illumination unit F11a. From another point of view, the first A optical axis Pi11a of the first A lens Lz11a is set to pass through the first A hole portion H11a.
  • the first B lens portion Lz11b of the first B imaging unit I11b is located in a state of being inserted into the first B hole portion H11b as the first hole portion H11 in the first B illumination unit F11b. From another point of view, the first B optical axis Pi11b of the first B lens Lz11b is set to pass through the first B hole H11b.
  • the first C lens portion Lz11c of the first C imaging unit I11c is located in a state of being inserted into the first C hole portion H11c as the first hole portion H11 in the first C illumination unit F11c. From another point of view, the first C optical axis Pi11c of the first C lens Lz11c is set to pass through the first C hole H11c.
  • the direction in which the first A imaging unit I11a faces is a two-dot chain line along the first A optical axis Pi11a. It is drawn by the arrow Dc1a.
  • the direction in which the first B imaging unit I11b faces is drawn by the arrow Dc1b of the two-dot chain line along the first B optical axis Pi11b.
  • the direction in which the first C imaging unit I11c is facing (also referred to as the first C imaging direction) is drawn by the arrow Dc1c of the two-dot chain line along the first C optical axis Pi11c.
  • the direction in which the first A illumination unit F11a can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first A illumination direction) is an arrow chain line. It is drawn with Df1a.
  • the direction in which the first B illumination unit F11b can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first B illumination direction) is drawn by the arrow Df1b of the alternate long and short dash line. ..
  • the direction in which the first C illumination unit F11c can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first C illumination direction) is drawn by the arrow Df1c of the one-point chain line. ..
  • the first A illumination unit F11a functions as an illumination unit (also referred to as an upper illumination unit) that irradiates the work W0 with light from above.
  • the first B illumination unit F11b functions as an illumination unit (also referred to as an oblique illumination unit) that irradiates the work W0 with light from diagonally above.
  • the first C illumination unit F11c functions as an illumination unit (also referred to as a horizontal illumination unit) that irradiates the work W0 with light along the horizontal direction.
  • FIG. 10A is a diagram schematically showing an example of the first A lighting unit F11a.
  • FIG. 10B is a diagram schematically showing an example of the first B lighting unit F11b.
  • FIG. 10C is a diagram schematically showing an example of the first C illumination unit F11c.
  • FIG. 11 is a side view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 12 is a plan view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 13 is a front view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit 12s1 according to the second embodiment.
  • the first A illumination unit F11a includes the upper light emitting region F11a1 as one region capable of irradiating light toward the work W0. obtain.
  • the first oblique light emitting region F11b1 and the second oblique light emitting region F11b1 and the second oblique light emitting region are five regions in which the first B illumination unit F11b can irradiate light toward the work W0.
  • a configuration including F11b2, a third oblique light emitting region F11b3, a fourth oblique light emitting region F11b4, and a fifth oblique light emitting region F11b5 can be adopted.
  • the first horizontal light emitting region F11c1 and the second horizontal light emitting region F11c1 and the second horizontal light emitting region are three regions in which the first C illumination unit F11c can irradiate light toward the work W0.
  • a configuration including F11c2 and a third horizontal light emitting region F11c3 can be adopted.
  • the upper light emitting region F11a1 has the first A hole portion H11a
  • the third oblique light emitting region F11b3 has the first B hole portion H11b
  • the second horizontal light emitting region F11c2 has a first C hole H11c.
  • the first B illumination unit F11b is viewed in a plane from directly above in the ⁇ Z direction
  • the region F11b4 and the fifth oblique light emitting region F11b5 have a positional relationship rotated by 45 degrees about the first A optical axis Pi11a of the first A imaging unit I11a in the order described above.
  • the second diagonal light emitting region F11b2 is rotated 45 degrees clockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a.
  • the first oblique light emitting region F11b1 is located in a state of being rotated 90 degrees clockwise from the third oblique light emitting region F11b3 about the first A optical axis Pi11a, and the fourth oblique light emitting region F11b4 is located on the first A optical axis. It is located in a state of being rotated 45 degrees counterclockwise from the third diagonal light emitting region F11b3 about Pi11a, and the fifth diagonal light emitting region F11b5 is counterclockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a. It is located in a state of being rotated 90 degrees.
  • the first horizontal light emitting region F11c1, the second horizontal light emitting region F11c2, and the third horizontal light emitting region F11c3 are in the order of this description.
  • the first A imaging unit I11a has a positional relationship rotated by 45 degrees about the first A optical axis Pi11a.
  • the first horizontal light emitting region F11c1 is rotated 45 degrees clockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a.
  • the third horizontal light emitting region F11c3 is located in a state of being rotated 45 degrees counterclockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a.
  • the first A imaging unit I11a, the first B imaging unit I11b, the first C imaging unit I11c, the first A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c having the above configuration are shown in FIGS. 11 to 13, for example. As such, they are connected to each other by the connecting member Cn1 and have an integral structure. In this case, for example, the first imaging unit 12s1 can be moved by moving the connecting member Cn1 by the first moving mechanism 12t1.
  • the first A lighting unit F11a includes the upper light emitting region F11a1 as one light emitting region
  • the first B lighting unit F11b includes the first to fifth oblique light emitting regions F11b1 to F11b5 as five light emitting regions.
  • the first C illumination unit F11c has the first to third horizontal light emitting regions F11c1 to F11c3 as three light emitting regions, the work W0 can be switched between the presence and absence of light irradiation for each light emitting region. It is possible to perform imaging under a plurality of lighting conditions with a smaller number of operations without moving the imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
  • each horizontal light emitting region F11c1 to F11c3 of the first C illumination unit F11c is along the XY plane rather than the height in the vertical direction along the Z direction.
  • the first C illumination unit F11c can be easily moved in order to adjust the distance of the first image pickup unit 12s1 and the focus of the first C image pickup unit I11c with respect to the work W0 according to the size of the work W0.
  • the first C illumination unit F11c does not have the first horizontal light emitting region F11c1 and the third horizontal light emitting region F11c3 as two light emitting regions, but has the second horizontal light emitting region F11c2 as one light emitting region. You may be doing it. In other words, for example, the first C illumination unit F11c may have one or more light emitting regions.
  • each oblique light emitting region F11b1 to F11b5 of the first B illumination unit F11b has a length in the diagonally upward direction with respect to the width in the horizontal direction. If the area is large, even the work W0 having a long depth direction when viewed from diagonally above can be widely illuminated. Further, for example, a plurality of light emitting regions (for example, the first to the first) capable of illuminating the work W0 from diagonally above at different angles around the first A optical axis Pi11a as a virtual axis along the vertical direction (Z direction). 5 Diagonal light emitting regions F11b1 to F11b5) can be easily arranged.
  • the first B illumination unit F11b does not have the first oblique light emitting region F11b1 and the fifth oblique light emitting region F11b5 as the two light emitting regions, but the second oblique light emitting region F11b2 and the second oblique light emitting region F11b2 as the three light emitting regions. It may have 3 diagonal light emitting regions F11b3 and 4th diagonal light emitting regions F11b4. Further, for example, a configuration may be adopted in which the first B illumination unit F11b has one or more light emitting regions including the third oblique light emitting region F11b3.
  • FIG. 15 is a diagram showing an example of the appearance of the work W0.
  • the work W0 has a regular hexahedral shape having first to sixth surfaces Sf1 to Sf6.
  • the first surface Sf1 as the upper surface facing the + Z direction has the first recess Dp1
  • the second surface Sf2 as the side surface facing the + Y direction has the second recess Dp2.
  • a captured image relating to the work W0 obtained by illuminating and imaging the work W0 having the shape shown in FIG. 15 by the first imaging unit 12s1 arranged as shown in FIG.
  • An example of is as shown in FIGS. 16 (a) to 18 (c).
  • FIGS. 16A to 18C diagonal hatching is provided on the surface of the work W0 that was not brightly captured by the illumination, and the portion brightly captured by the illumination was provided. Is not hatched.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first A imaging unit I11a.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first B imaging unit I11b.
  • FIG. 16C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first C imaging unit I11c. Is.
  • the first surface Sf1 as the upper surface facing the + Z direction.
  • An image of the work W0 captured in a dark state including the first recess Dp1 can be obtained.
  • the first surface Sf1 is dark including the first recess Dp1 as shown in FIG. 16B.
  • An image of the work W0 is obtained, which is captured in a dark state on substantially the entire surface except for a part of the second concave portion Dp2 of the second surface Sf2 as the side surface facing the + Y direction.
  • the work W0 illuminated in the second horizontal light emitting region F11c2 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 16C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered.
  • An captured image relating to the work W0 captured in a bright state can be obtained.
  • FIG. 17A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first A imaging unit I11a.
  • FIG. 17B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first B imaging unit I11b.
  • FIG. 17A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first B imaging unit I11b.
  • 17C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first C imaging unit I11c. Is.
  • An image of the work W0 is obtained in which substantially the entire surface is captured in a dark state and substantially the entire surface is captured in a dark state except for a part of the second recess Dp2 of the second surface Sf2.
  • the work W0 illuminated in the third oblique light emitting region F11b3 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 17C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered.
  • An captured image relating to the work W0 captured in a dark state can be obtained.
  • FIG. 18A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first A imaging unit I11a. ..
  • FIG. 18B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first B imaging unit I11b. ..
  • FIG. 18C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first C imaging unit I11c. ..
  • the integrated control unit C0 has the first moving mechanism 12t1 and the first moving mechanism 12t1 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately.
  • the operation of the second moving mechanism 12t2 may be controlled. Specifically, for example, the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed. At the time point, the second imaging unit 12s2 may be controlled to be moved.
  • both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time.
  • the second imaging unit 12s2 may also have the same configuration as the first imaging unit 12s1.
  • the configuration of the first imaging unit 12s1 and the configuration of the second imaging unit 12s2 have a plane-symmetrical relationship with respect to the XZ plane.
  • FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment.
  • FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment.
  • the first moving mechanism 12t1 is formed along the ⁇ X direction by the first reference portion Sl1 located on the base portion Bs12 and the first reference portion Sl1. It has a first arm portion Am1 which is held so as to be movable. Then, the first imaging unit 12s1 is attached to the first arm portion Am1. Further, in the examples of FIGS.
  • the second moving mechanism 12t2 is in the ⁇ X direction by the second reference portion Sl2 located on the base portion Bs12 and the second reference portion Sl1. It has a second arm portion Am2, which is movably held along the line. Then, the second imaging unit 12s2 is attached to the second arm portion Am2.
  • the movement of the first arm portion Am1 with respect to the first reference portion Sl1 and the movement of the second arm portion Am2 with respect to the second reference portion Sl2 are, for example, a linear guide and a rotational driving force of an air cylinder or a motor that produces a linear driving force.
  • the movement of at least one of the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 is defined as movement in at least two directions.
  • each part of the work W0 can be imaged under more lighting conditions. Thereby, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 may not be positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2.
  • at least one of the first moving mechanism 12t1 and the second moving mechanism 12t2 may be located above the transporting portion Cv2 as the mounting portion Sg2, or the first moving mechanism 12t1 and the second moving mechanism Both 12t2 may be located on one side of the transport portion Cv2 as the mounting portion Sg2.
  • first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2, for example, if the work is located in a wider area on the surface of the work W0.
  • Each part of W0 can be easily imaged under a plurality of lighting conditions.
  • first configuration in which the first moving mechanism 12t1 and the first imaging unit 12s1 are combined, or a second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined.
  • second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined.
  • third or subsequent configuration having a similar configuration.
  • the first imaging unit 12s1 may have two or more illumination units and one or more imaging units
  • the second imaging unit 12s2 may have two or more illumination units. It may have a unit and one or more imaging units. Even if such a configuration is adopted, for example, by combining the presence or absence of lighting of two or more lighting units, imaging under a plurality of lighting conditions can be performed without moving the first imaging unit 12s1 and the second imaging unit 12s2. It can be carried out. That is, for example, it is possible to perform imaging under a plurality of lighting conditions with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the one or more lighting units may be two or more lighting units including the first A lighting unit F11a and the first B lighting unit F11b, or the first A lighting unit F11a and the first C lighting unit. It may be two or more lighting units including F11c.
  • one or more imaging units may include one or more imaging units of the first A imaging unit I11a, the first B imaging unit I11b, and the first C imaging unit I11c.
  • one of the first B lighting unit F11b and the first C lighting unit F11c does not exist, and the first A imaging unit I11a and the first B imaging unit I11b do not exist.
  • the first A illumination unit F11a is placed with a virtual line along the first A irradiation direction as a direction for irradiating light toward the work W0 mounted on the mounting unit Sg2.
  • the angle formed by the virtual horizontal plane Pn0 passing through the work W0 placed on the portion Sg2 may be appropriately set between 0 degrees and 90 degrees.
  • a virtual line along the first B irradiation direction as a direction in which the first B illumination unit F11b irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2.
  • the angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees. Further, for example, a virtual line along the first C irradiation direction as a direction in which the first C illumination unit F11c irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2. The angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees.
  • the imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit from one imaging unit toward the work W0 mounted on the mounting unit Sg2 is determined.
  • a configuration may be adopted in which the first A lighting unit F11a is closer to the first A lighting direction than the first B lighting direction of the first B lighting unit F11b.
  • the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first B.
  • a configuration may be adopted in which the illumination unit F11b is closer to the first A illumination direction of the first A illumination unit F11a than the first B illumination direction.
  • an imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit, from one imaging unit toward the work W0 mounted on the mounting unit Sg2. May adopt a configuration closer to the first A illumination direction of the first A illumination unit F11a than to the first C illumination direction of the first C illumination unit F11c.
  • the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first C.
  • a configuration may be adopted in which the illumination unit F11c is closer to the first A illumination direction of the first A illumination unit F11a than the first C illumination direction.
  • the image of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction and the illumination condition in which the illumination is performed in the illumination direction at an angle away from the imaging direction By imaging the work W0, the conditions under which the positively reflected light from the work W0 is captured by the imaging unit can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness on the work W0. More specifically, for example, in the imaging of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction, the scratches that could not be captured because the positively reflected light is too strong are far from the imaging direction. It is assumed that the work W0 can be captured by imaging under the illumination condition in which the illumination is performed in the illumination direction of the angle.
  • the first A optical axis Pi11a of the first A imaging unit I11a may be slightly deviated from the center of the work W0. Also in this case, for example, if the luminous flux of the light emitted from the upper light emitting region F11a1 of the first A lighting unit F11a toward the work W0 has a certain spread, the upper light emitting region F11a1 of the first A lighting unit F11a The work W0 can be sufficiently illuminated.
  • the imaging unit I1 imaged the work W0 mounted on the mounting unit Sg2 via the hole H1 of the lighting unit F1, but the present invention is not limited to this.
  • an imaging direction in which the imaging unit I1 images the work W0 mounted on the mounting unit Sg2 and an illumination direction in which the lighting unit F1 irradiates the work W0 mounted on the mounting unit Sg2 with light.
  • the angle formed by may deviate within the permissible range (also referred to as the permissible angle range).
  • the first imaging unit I11 irradiates the imaging direction in which the work W0 mounted on the mounting portion Sg2 is imaged
  • the first illumination unit F11 irradiates the work W0 mounted on the mounting portion Sg2 with light.
  • the angle formed by the illumination direction may deviate within the permissible range (permissible angle range)
  • the angle formed by the illumination direction in which the second illumination unit F12 irradiates the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first A imaging direction in which the first A imaging unit I11a images the work W0 mounted on the mounting portion Sg2 and the first A lighting unit F11a (specifically, the upper light emitting region F11a1) are mounted.
  • the angle formed by the first A illumination direction for irradiating the work W0 placed on the portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first B imaging direction in which the first B imaging unit I11b images the work W0 mounted on the mounting unit Sg2 and the first B illumination unit F11b are
  • the angle formed by the first B illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first C imaging direction in which the first C imaging unit I11c images the work W0 mounted on the mounting unit Sg2 and the first C illumination unit F11c (specifically, the second horizontal light emitting region F11c2)
  • the angle formed by the first C illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • each permissible angle range depends on, for example, the shape and size of the light emitting region of each illumination unit, the shape and size of the work W0, and the like.
  • FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region F11a1 in the first A lighting unit F11a.
  • FIG. 20B is a diagram showing an example of the shape and dimensions of the first work W0.
  • FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work W0.
  • the upper light emitting region F11a1 has a pair of opposite sides having a width W1 along the X direction and a pair of opposite sides having a length L1 along the Y direction. It is a rectangular area having.
  • the first work W0 has a pair of sides having a width W2 along the X direction facing each other and a pair of sides having a length L2 along the Y direction corresponding to each other. It is a rectangular parallelepiped having a rectangular bottom surface and a height H2.
  • the second work W0 is a columnar column having a pair of perfectly opposed surfaces having a diameter of ⁇ 3 along the YZ plane and a width W3 along the X direction. belongs to.
  • the distance between the image sensor and the work W0 of the first A image pickup unit I11a and the distance between the upper light emitting region F11a1 and the work W0 are both 260 mm (mm).
  • the width W1 is 180 mm and the length L1 is 120 mm. Further, it is assumed that the first A optical axis Pi11a of the first A imaging unit I11a is set to pass through the center of the work W0.
  • the width W2 is 50 mm
  • the length L2 is 30 mm
  • the height H2 is 50 mm for the first work W0.
  • the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 30 degrees or less
  • the first A imaging unit I11a starts from the upper light emitting region F11a1.
  • the specularly reflected light can be received from the entire upper surface Su2 of the first work W0 facing the + Z direction in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 30 degrees.
  • the diameter ⁇ 3 is 50 mm and the width W3 is 40 mm for the second work W0.
  • the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 12 degrees or less, the first A imaging unit I11a starts from the upper light emitting region F11a1.
  • the specularly reflected light can be received from the entire region of the side surface Ss3 of the second work W0 that can be seen in the ⁇ Z direction in a plan view in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 12 degrees.
  • the imaging device 12 adopts a configuration having a stage or the like as a mounting portion for mounting the work W0 in addition to the robot capable of transporting the work W0.
  • the operation of the inspection system 1 may be controlled by one or more control units such as the integrated control unit C0.
  • the inspection system 1 may be regarded as one imaging device that images the work W0.
  • One of the configurations may not exist.

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