WO2021054059A1 - Imaging device - Google Patents

Imaging device Download PDF

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Publication number
WO2021054059A1
WO2021054059A1 PCT/JP2020/031916 JP2020031916W WO2021054059A1 WO 2021054059 A1 WO2021054059 A1 WO 2021054059A1 JP 2020031916 W JP2020031916 W JP 2020031916W WO 2021054059 A1 WO2021054059 A1 WO 2021054059A1
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WO
WIPO (PCT)
Prior art keywords
unit
imaging
illumination
work
image pickup
Prior art date
Application number
PCT/JP2020/031916
Other languages
French (fr)
Japanese (ja)
Inventor
真稔 島田
慎也 谷口
佐藤 祐介
泰弘 小池
佐伯 和人
Original Assignee
株式会社Screenホールディングス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019172255A external-priority patent/JP2021052247A/en
Priority claimed from JP2019172271A external-priority patent/JP7278186B2/en
Application filed by 株式会社Screenホールディングス filed Critical 株式会社Screenホールディングス
Publication of WO2021054059A1 publication Critical patent/WO2021054059A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70Circuitry for compensating brightness variation in the scene
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/90Arrangement of cameras or camera modules, e.g. multiple cameras in TV studios or sports stadiums

Definitions

  • the present invention relates to an imaging device.
  • forged parts having a three-dimensional shape used in the driving part of an automobile or the like and its surroundings are visually inspected to find defects by a person looking at the forged parts from various angles.
  • This visual inspection can be replaced, for example, with an inspection using an optical instrument including a camera and lighting.
  • a defect inspection device capable of freely imaging a desired part of an inspection object (also referred to as a work) can be provided. It is considered (for example, Patent Document 1 etc.). According to such a defect inspection device, for example, even a large workpiece that is difficult to handle by visual inspection by a human can be inspected.
  • the work is illuminated from one direction for imaging. Therefore, for example, if the work has various irregular outer shapes such as uneven portions and holes, the light emitted from the illumination to the work is not reflected toward the camera for a part of the work. , It may not be possible to obtain an image that sufficiently captures the work.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of easily capturing an image that sufficiently captures an object having various shapes.
  • the imaging device includes a mounting unit, a first imaging unit, a first moving mechanism, a second imaging unit, and a second moving mechanism.
  • the above-mentioned placing portion is for placing an image-imaging object.
  • the first imaging unit includes one or more first imaging units and one or more first illumination units.
  • the first moving mechanism moves the first imaging unit relative to the above-mentioned mounting portion.
  • the second imaging unit includes one or more second imaging units and one or more second illumination units.
  • the second moving mechanism moves the second imaging unit relative to the above-mentioned mounting portion.
  • the imaging device according to the second aspect is the imaging device according to the first aspect, and the first moving mechanism and the second moving mechanism are located so as to sandwich the above-mentioned mounting portion.
  • the imaging device according to the third aspect is the imaging device according to the first or second aspect, and at least one of the first moving mechanism and the second moving mechanism is a multi-axis robot arm. including.
  • the image pickup apparatus is the image pickup apparatus according to any one of the first to third aspects, wherein the first image pickup unit is moved by the first movement mechanism and the second movement mechanism is used. By moving the second image pickup unit, the first image pickup unit and the second image pickup unit can take an image of the image pickup object placed on the above-described placement portion over the entire circumference.
  • the image pickup device is the image pickup device according to any one of the first to fourth aspects, and the first image pickup unit and the second image pickup unit are moved alternately. It includes a first moving mechanism and a control unit that controls the operation of the second moving mechanism.
  • the image pickup apparatus is the image pickup apparatus according to any one of the first to fifth aspects, and the one or more first illumination units are the first A illumination unit and the first B illumination unit. And, including.
  • the 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
  • the 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
  • the imaging device is the imaging device according to the sixth aspect, and the first imaging unit includes an optical system.
  • the imaging direction along the optical axis of the optical system from the first imaging unit toward the imaging object mounted on the above-mentioned stationary unit is closer to the first A illumination direction than to the first B illumination direction.
  • the image pickup apparatus is the image pickup apparatus according to the sixth or seventh aspect, and the one or more first image pickup units are the first A image pickup unit, the first B image pickup unit, and the first C.
  • the image pickup unit is included, and the one or more first illumination units include the first A illumination unit, the first B illumination unit, and the first C illumination unit.
  • the first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image.
  • the first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above.
  • the image pickup device is the image pickup device according to the eighth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
  • the image pickup apparatus is the image pickup apparatus according to the eighth or ninth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
  • the imaging device includes a mounting unit, an imaging unit, and a moving mechanism.
  • the above-mentioned placing portion is for placing an image-imaging object.
  • the image pickup unit has one or more image pickup units and two or more illumination units including a first A illumination unit and a first B illumination unit.
  • the moving mechanism moves the imaging unit relative to the above-mentioned mounting portion.
  • the 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
  • the 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
  • the imaging device is the imaging device according to the eleventh aspect, and the first A imaging unit among the one or more imaging units includes an optical system.
  • the imaging direction along the optical axis of the optical system from the first A imaging unit toward the imaging object mounted on the above-described stationary unit is closer to the first A illumination direction than the first B illumination direction.
  • the imaging apparatus is the imaging apparatus according to the twelfth aspect, and the one or more imaging units include the first A imaging unit, the first B imaging unit, and the first C imaging unit.
  • the two or more lighting units include the first A lighting unit, the first B lighting unit, and the first C lighting unit.
  • the first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image.
  • the first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above.
  • the image pickup device is the image pickup device according to the thirteenth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
  • the imaging device is the imaging device according to the thirteenth or fourteenth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
  • the first illumination unit and the second imaging unit are separately moved with respect to the object to be imaged, and are illuminated by the first illumination unit and the second illumination unit, respectively.
  • the imaged object can be imaged by the first imaging unit and the second imaging unit.
  • each part of the object to be imaged can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, it is possible to easily image each part of the image pickup object under a plurality of illumination conditions in a wider area on the surface of the image pickup object.
  • each part of the image pickup object can be imaged from an arbitrary angle under a plurality of lighting conditions.
  • the image pickup apparatus for example, it is possible to easily image each part of the image pickup object under a plurality of lighting conditions in a wider area of the surface of the image pickup object.
  • the imaging device for example, it is possible to shorten the time required for imaging at a plurality of locations of an imaging object under a plurality of lighting conditions. Therefore, for example, it is possible to increase the number of imaging objects that can complete imaging per unit time.
  • imaging under a plurality of lighting conditions can be performed with a small number of operations.
  • the imaging apparatus for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction.
  • the conditions under which the positively reflected light from the imaged object can be captured can be changed.
  • imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
  • the imaging device for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
  • imaging under a plurality of lighting conditions can be performed with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
  • the imaging device for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction.
  • imaging the conditions under which the positively reflected light from the imaged object can be captured can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness in the object to be imaged.
  • imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
  • the image pickup apparatus for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
  • the imaging device for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection system according to the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of an inspection system according to the first embodiment.
  • FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the first embodiment.
  • FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit according to the first embodiment.
  • FIG. 3 is a block diagram showing an example of the functional configuration of the inspection system.
  • FIG. 4 is a block diagram showing an example of the functional configuration of the loading device.
  • FIG. 5A is a block diagram showing an example of the functional configuration of the image pickup apparatus.
  • FIG. 5B is a block diagram showing an example of the functional configuration of the first imaging unit.
  • FIG. 5C is a block diagram showing an example of the functional configuration of the second imaging unit.
  • FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device.
  • FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device.
  • FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus.
  • FIG. 9 is a diagram schematically showing the physical configuration of the first imaging unit according to the second embodiment.
  • FIG. 10A is a diagram schematically showing an example of the first A lighting unit.
  • FIG. 10B is a diagram schematically showing an example of the first B lighting unit.
  • FIG. 10C is a diagram schematically showing an example of the first C lighting unit.
  • FIG. 11 is a side view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 12 is a plan view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 13 is a front view showing an example of the appearance of the first imaging unit according to the second embodiment.
  • FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit according to the second embodiment.
  • FIG. 15 is a diagram showing an example of the appearance of the work.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1A imaging unit.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1B imaging unit.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1A imaging unit.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated
  • FIG. 16C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first C illumination unit with the first C imaging unit.
  • FIG. 17A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first A imaging unit.
  • FIG. 17B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first B imaging unit.
  • FIG. 17C is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1B illumination unit with the 1C imaging unit.
  • FIG. 17A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first A imaging unit.
  • FIG. 17B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first B imaging unit.
  • FIG. 18A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first A imaging unit.
  • FIG. 18B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first B imaging unit.
  • FIG. 18C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first C imaging unit.
  • FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the third embodiment.
  • FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus according to the third embodiment.
  • FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region in the first A lighting unit.
  • FIG. 20B is a diagram showing an example of the shape and dimensions of the first work.
  • FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work.
  • the direction in which the work W0 is conveyed along the horizontal plane by the conveying unit Cv1 of the loading device 11 is the + X direction
  • the direction perpendicular to the direction in which the work W0 is conveyed along the horizontal plane is the + Y direction.
  • the direction of gravity that is orthogonal to both the + X direction and the + Y direction is the ⁇ Z direction.
  • the expression indicating the shape not only expresses the shape strictly geometrically, but also, for example, unevenness or unevenness or within a range in which the same effect can be obtained.
  • a shape having a chamfer or the like shall also be represented.
  • the expressions “equipped”, “equipped”, “equipped”, “included”, or “have” one component are not exclusive expressions that exclude the existence of other components.
  • the expression “concatenation” includes a state in which two elements are in contact with each other and a state in which the two elements are separated from each other with another element in between.
  • FIG. 1A is a perspective view schematically showing the appearance of the inspection system 1 according to the first embodiment.
  • FIG. 1B is a diagram showing a schematic configuration of the inspection system 1 according to the first embodiment.
  • the inspection system 1 includes, for example, a loading device 11, four imaging devices 12, a reversing device 13, and a discharging device 14. .
  • the input device 11 the first image pickup device (also referred to as the first image pickup device) 121
  • the second image pickup device also referred to as the second image pickup device
  • the reversing device 13, the third imaging device (also referred to as the third imaging device) 123, the fourth imaging device (also referred to as the fourth imaging device) 124, and the discharging device 14 are in the + X direction. It is located in a state of being connected in the order described in this description.
  • the loading device 11, the imaging device 12, the reversing device 13, and the discharging device 14 are appropriately abbreviated as "devices".
  • the inspection system 1 can be manufactured by connecting a plurality of separately manufactured devices 11, 12, 13, and 14 to each other in the + X direction.
  • the inspection system can be manufactured, for example, by appropriately combining two or more devices including one or two or more image pickup devices 12.
  • the devices 11, 12, 13, and 14 can be connected to each other by using, for example, a connecting member and a fastening member such as a screw.
  • Each device 11, 12, 13, 14 has, for example, a tubular portion (also referred to as a tubular portion) having an internal space on which an object to be inspected (also referred to as a work) W0 is placed and conveyed.
  • This tubular portion is positioned so as to penetrate in the + X direction, for example.
  • the loading device 11 has a tubular portion 11tb
  • the imaging device 12 has a tubular portion 12tb
  • the reversing device 13 has a tubular portion 13tb
  • the discharging device 14 has a tubular portion 13tb.
  • one tubular portion (cylindrical portion) 1tb forming a path (also referred to as a transport path) Rt1 capable of transporting the work W0 between the plurality of devices 11, 12, 13, and 14 is formed.
  • a plurality of devices 11, 12, 13, and 14 are connected to each other.
  • a two-dot chain line arrow is drawn along the transport path Rt1 along the + X direction.
  • the tubular portion 1tb includes the tubular portion 11tb of the loading device 11, the tubular portion 12tb of the first imaging device 121, the tubular portion 12tb of the second imaging device 122, and the cylinder of the reversing device 13.
  • the inspection system 1 conveys the work W0 from the input device 11, for example, in the order of the first image pickup device 121, the second image pickup device 122, the inversion device 13, the third image pickup device 123, the fourth image pickup device 124, and the discharge device 14. Then, the work W0 can be inspected.
  • the upper surface portion located in the + Z direction and the side surface portion located in the ⁇ Y direction in each of the tubular portions 11tb, 12tb, 13tb, and 14tb may or may not be transparent, for example.
  • the loading device 11 is a device in which the work W0 is loaded from the outside of the inspection system 1.
  • the loading device 11 is located first in the transport path Rt1 of the work W0 among the plurality of devices included in the inspection system 1, for example.
  • the loading device 11 has a belt conveyor which is a transport unit Cv1 capable of transporting the work W0, and each imaging device 12 transports the work W0.
  • the reversing device 13 has a belt conveyor which is a transport unit Cv3 capable of transporting the work W0, and the discharge device 14 has a belt conveyor which is a transport unit Cv4 capable of transporting the work W0.
  • the transport unit Cv1 of the loading device 11 can transport the work W0 between the loading device 11 and the outside of the loading device 11, for example.
  • the transport unit Cv2 of the image pickup device 12 can transport the work W0 between the image pickup device 12 and the outside of the image pickup device 12, for example.
  • the transport unit Cv3 of the reversing device 13 can transport the work W0 between the reversing device 13 and the outside of the reversing device 13, for example.
  • the transport unit Cv4 of the discharge device 14 may be able to transport the work W0 between the discharge device 14 and the outside of the discharge device 14, or may transfer the work W0 to a predetermined position in the discharge device 14. It may be able to be transported.
  • the loading device 11 has a portion (also referred to as an opening / closing portion) 11oc that can be opened / closed at the end portion of the tubular portion 11tb opposite to the imaging device 12 in the ⁇ X direction.
  • the opening / closing unit 11oc has, for example, a door or a shutter that can be opened / closed.
  • the work W0 can be loaded into the loading device 11 via the opening / closing unit 11oc.
  • the worker Op0 throws the work W0 into the throwing device 11.
  • the operator Op0 places the work W0 on the belt of the belt conveyor according to the mark drawn or projected on the belt of the belt conveyor as the transport unit Cv1.
  • the transport unit Cv1 is a transport unit of the first imaging device 121 in which the work W0 mounted on the belt of the belt conveyor as the transport unit Cv1 is located outside the + X direction of the loading device 11. It can be delivered to Cv2 (also referred to as transport unit Cv21).
  • the imaging device 12 can perform imaging as, for example, an inspection process in which the work W0 is an imaging object (also referred to as an imaging object).
  • the first imaging device 121 performs imaging as a processing for inspection, for example, targeting the work W0 delivered from the transport unit Cv1 of the input device 11 to the transport unit Cv21 of the first imaging device 121. Can be done.
  • the work W0 imaged by the first imaging device 121 is, for example, the transport unit Cv2 of the second imaging device 122 located outside the first imaging device 121 in the + X direction from the first imaging device 121 by the transport unit Cv21. It is delivered to (also referred to as a transport unit Cv22).
  • the second imaging device 122 may perform imaging as a processing for inspection on the work W0 delivered from the transport unit Cv21 of the first image pickup device 121 to the transport unit Cv22 of the second image pickup device 122.
  • the work W0 imaged by the second imaging device 122 is received, for example, from the second imaging device 122 by the transport unit Cv22 to the transport unit Cv3 of the reversing device 13 located outside the second imaging device 122 in the + X direction. Passed.
  • the third imaging device 123 targets the work W0 delivered from the transport unit Cv3 of the reversing device 13 to the transport unit Cv2 (also referred to as the transport unit Cv23) of the third image pickup device 123, as a process for inspection. Imaging can be performed.
  • the work W0 imaged by the third imaging device 123 is, for example, the transport unit Cv2 of the fourth imaging device 124 located outside the third imaging device 123 in the + X direction from the third imaging device 123 by the transport unit Cv23. It is delivered to (also referred to as a transport unit Cv24).
  • the fourth imaging device 124 may perform imaging as an inspection process for the work W0 delivered from the transport unit Cv23 of the third image pickup device 123 to the transport unit Cv24 of the fourth image pickup device 124. it can.
  • the work W0 imaged by the fourth imaging device 124 is received, for example, by the transport unit Cv24 from the fourth image pickup device 124 to the transport unit Cv4 of the discharge device 14 located outside the fourth image pickup device 124 in the + X direction. Passed.
  • FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the first embodiment.
  • FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit 12s according to the first embodiment.
  • the first imaging device 121, the second imaging device 122, the third imaging device 123, and the fourth imaging device 124 each have the same configuration.
  • the image pickup apparatus 12 includes, for example, a transport unit Cv2, an image pickup unit 12s, and a moving mechanism 12t.
  • the transport unit Cv2 has a function as, for example, a portion (also referred to as a mounting unit) Sg2 for mounting the work W0 as an imaging object.
  • the imaging unit 12s can perform imaging on the work W0 as an imaging object, for example.
  • the image pickup apparatus 12 has two image pickup units 12s. Specifically, as shown in FIG. 2A, the image pickup apparatus 12 includes a first image pickup unit 12s1 and a second image pickup unit 12s2 as two image pickup units 12s. As shown in FIG. 2B, the image pickup unit 12s has, for example, an image pickup unit I1 and an illumination unit F1. More specifically, the first imaging unit 12s1 includes a first imaging unit I11 and a first illumination unit F11. The second imaging unit 12s2 includes a second imaging unit I12 and a second illumination unit F12.
  • Each of the first image pickup unit I11 and the second image pickup unit I12 has, for example, an image pickup element such as a charge-coupled device (CCD) and an optical system for forming an optical image of the work W0 on the image pickup device.
  • planar illumination in which a plurality of light emitting diodes (Light Emitting Diodes: LEDs) are two-dimensionally arranged is applied.
  • the work W0 can be illuminated over a wide range by each of the first illumination unit F11 and the second illumination unit F12.
  • the lens portion Lz1 is positioned so as to be inserted into the hole portion H1 of the illumination portion F1.
  • the optical axis Pi1 of the lens Lz1 is set to pass through the hole H1.
  • the first lens portion Lz11 of the first imaging unit I11 is positioned so as to be inserted into the first hole portion H11 of the first illumination unit F11.
  • the optical axis (also referred to as the first optical axis) Pi11 of the first lens Lz11 is set to pass through the first hole portion H11.
  • the second lens portion Lz12 of the second imaging unit I12 is located in a state of being inserted into the second hole portion H12 of the second illumination unit F12.
  • the optical axis (also referred to as the second optical axis) Pi12 of the second lens Lz12 is set to pass through the second hole portion H12.
  • the first imaging unit I11 can perform imaging with at least a part of the work W0 illuminated by the first illumination unit F11 as a subject.
  • the second imaging unit I12 can perform imaging with at least a part of the work W0 illuminated by the second illumination unit F12 as a subject.
  • the moving mechanism 12t can move the imaging unit 12s relative to the work W0 mounted on the mounting portion Sg2, for example. From another point of view, the moving mechanism 12t can move the imaging unit 12s relative to, for example, the mounting portion Sg2 for mounting the work W0.
  • the image pickup apparatus 12 has two moving mechanisms 12t. Specifically, as shown in FIG. 2A, the imaging device 12 has a first moving mechanism 12t1 and a second moving mechanism 12t2 as two moving mechanisms 12t.
  • the first moving mechanism 12t1 can move the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, for example.
  • the first moving mechanism 12t1 can move the first imaging unit 12s1 relative to, for example, the mounting portion Sg2 for mounting the work W0.
  • the second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, for example.
  • the second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the mounting portion Sg2 for mounting the work W0, for example.
  • the first illumination unit 12s1 and the second imaging unit 12s2 are moved separately with respect to the work W0, and the first illumination unit F11 and the second illumination unit F12, respectively.
  • the work W0 illuminated by the above can be imaged by the first imaging unit I11 and the second imaging unit I12.
  • the first imaging unit I11 is illuminated by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and both the first illumination unit F11 and the second illumination unit F12. Imaging can be performed for each of the work W0.
  • the second imaging unit I12 is also formed by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and the first illumination unit F11 and the second illumination unit F12.
  • An image can be taken for each of the illuminated work W0.
  • each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • a robot arm or the like is applied to the moving mechanism 12t.
  • a robot arm also referred to as a multi-axis robot arm
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 may be a multi-axis robot arm. In this way, for example, if the multi-axis robot arm is applied to the moving mechanism 12t, each part of the work W0 can be imaged from an arbitrary angle under a plurality of lighting conditions.
  • the multi-axis robot arm includes, for example, a reference portion Pt0, a first movable portion Pt1, a second movable portion Pt2, a third movable portion Pt3, a fourth movable portion Pt4, a fifth movable portion Pt5, and a third.
  • a robot arm (also referred to as a 6-axis robot arm) that has 6 movable portions Pt6 and is rotatable on 6 axes is applied.
  • the reference portion Pt0 is fixed to, for example, the base portion Bs12 of the image pickup apparatus 12.
  • the belt conveyor of the transport unit Cv2 may be fixed to the base portion Bs12.
  • the reference portion Pt0 has, for example, a rotating portion Pr1 that rotatably holds the first movable portion Pt1 about the first axis Pl1 along the + Z direction.
  • the first movable portion Pt1 has, for example, a second rotating portion Pr2 that rotatably holds the second movable portion Pt2 about the second axis Pl2 along the horizontal direction.
  • the second movable portion Pt2 has, for example, a third rotating portion Pr3 that holds the third movable portion Pt3 rotatably around the third axis Pl3 along the horizontal direction.
  • the third movable portion Pt3 has, for example, a fourth rotating portion Pr4 that rotatably holds the fourth movable portion Pt4 around the fourth axis Pl4 that is perpendicular to the third axis Pl3.
  • the fourth movable portion Pt4 has, for example, a fifth rotating portion Pr5 that holds the fifth movable portion Pt5 rotatably around the fifth axis Pl5 that is perpendicular to the fourth axis Pl4.
  • the fifth movable portion Pt5 has, for example, a sixth rotating portion Pr6 that holds the sixth movable portion Pt6 rotatably around the sixth axis Pl6 that is perpendicular to the fifth axis Pl5.
  • the image pickup unit 12s is fixed to the sixth movable portion Pt6.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2. This makes it possible to easily image each portion of the work W0 under a plurality of illumination conditions, for example, for a wider area on the surface of the work W0.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 are located so as to face each other with the mounting portion Sg2 interposed therebetween. If such an aspect is adopted, for example, the work of the light emitted from the second illumination unit F12 located on the opposite side of the first imaging unit I11 with the work W0 in between when viewed in a plan view. Illumination conditions in which the light reflected on W0 is incident on the first imaging unit I11 can be easily realized.
  • the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 cause the first imaging unit 12s1 and the second imaging unit 12s2 to move.
  • the work W0 mounted on the mounting portion Sg2 may be able to be imaged over the entire circumference. In this case, for example, for a wider area on the surface of the work W0, each part of the work W0 can be easily imaged under a plurality of lighting conditions.
  • the work W0 mounted on the mounting portion Sg2 is provided with a virtual axis along the vertical direction (Z direction) passing through the work W0.
  • the reversing device 13 can reverse the work W0, for example.
  • the inversion of the work W0 includes, for example, an upside-down inversion of the work W0.
  • the reversing device 13 can reverse the work W0 delivered from the transporting unit Cv22 of the second imaging device 122 to the transporting unit Cv3, for example.
  • the reversing device 13 moves, for example, a holding portion 13h (see FIG. 6) capable of holding the work W0 in order to reverse the work W0, and a holding portion 13h in a state where the holding portion 13h holds the work W0. It has a moving mechanism 13t (see FIG.
  • the reversing device 13 may have, for example, one moving mechanism 13t for one holding portion 13h. More specifically, for example, when one holding portion 13h is present, the reversing module 13 may have one moving mechanism 13t, and when two or more holding portions 13h are present. May have two or more moving mechanisms 13t.
  • the discharge device 14 is, for example, a device for discharging the work W0 from the inside of the inspection system 1 to the outside of the inspection system 1.
  • the discharge device 14 is located, for example, at the last portion of the work W0 in the transport path Rt1 of two or more modules including one or more image pickup devices 12 included in the inspection system 1.
  • the discharge device 14 has, for example, a portion (opening / closing portion) 14oc of the tubular portion 14tb that can be opened / closed at an end portion in the + X direction opposite to the imaging device 12.
  • the opening / closing unit 14oc has, for example, a door or a shutter that can be opened / closed.
  • the work W0 is discharged to the outside of the discharge device 14 via, for example, the opening / closing portion 14oc.
  • the worker Op0 discharges the work W0 to the outside of the discharge device 14.
  • a robot or the like provided outside the inspection system 1 may discharge the work W0 from the inside of the discharge device 14 to the outside.
  • FIG. 3 to 7 are block diagrams showing an example of the functional configuration of the inspection system 1 according to the first embodiment.
  • FIG. 3 is a block diagram schematically showing an example of the overall functional configuration of the inspection system 1.
  • FIG. 4 is a block diagram showing an example of the functional configuration of the input device 11 in the overall functional configuration of the inspection system 1.
  • FIG. 5 is a block diagram showing an example of the functional configuration of the imaging device 12 in the overall functional configuration of the inspection system 1.
  • FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device 13 in the overall functional configuration of the inspection system 1.
  • FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device 14 in the overall functional configuration of the inspection system 1.
  • the closing device 11 connects, for example, the integrated control unit C0, the input unit 11i, the transport control unit Cc1, and the connection unit 11h, which are electrically connected via the wiring Wr1.
  • the input device 11 has, for example, an output unit 11d connected to the integrated control unit C0 and a transport unit Cv1 connected to the transport control unit Cc1.
  • the integrated control unit C0 can control the operation of the inspection system 1 in an integrated manner, for example.
  • the integrated control unit C0 has, for example, a calculation unit, a memory, a storage unit, and the like.
  • the arithmetic unit is composed of, for example, one or more central processing units (CPU) and the like.
  • the memory is composed of, for example, a volatile storage medium such as RAM (Random Access Memory).
  • the storage unit is composed of a non-volatile storage medium such as a hard disk drive (HDD) or a solid state drive (SSD), for example.
  • the storage unit can store, for example, a program, various types of information, and the like.
  • the arithmetic unit can realize various functions by reading and executing a program stored in the storage unit, for example.
  • the RAM is used as a workspace, for example, and stores information that is temporarily generated or acquired.
  • At least a part of the functional configuration realized by the integrated control unit C0 may be realized by hardware such as a dedicated electronic circuit.
  • the input unit 11i can input various information in response to the operation of the worker Op0, for example.
  • an operation unit such as a button or a touch panel, a microphone unit capable of voice input, or the like is applied to the input unit 11i.
  • the operation of the worker Op0 includes, for example, operations such as operation and vocalization.
  • the output unit 11d can output information in a manner recognizable by the operator Op0, for example, based on the information from the integrated control unit C0.
  • a display unit or a lamp that visually outputs information, a speaker that outputs information audibly, and the like are applied to the output unit 11d.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1, for example.
  • the transport control unit Cc1 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc1 can realize the function of the transfer control unit Cc1 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc1 can control the operation of the transport unit Cv1 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc1 may be realized by hardware such as a dedicated electronic circuit.
  • connection portion 11h is, for example, a portion that electrically connects to a device other than the input device 11 among a plurality of devices constituting the inspection system 1.
  • the connection portion 11h is, for example, a hub type in which the wirings Wr2 of a plurality of devices are electrically connected separately, but a method in which the wirings Wr2 of the plurality of devices are electrically connected in series. There may be.
  • the first image pickup device 121, the second image pickup device 122, the third image pickup device 123, and the fourth image pickup device 124 each have the same functional configuration.
  • the image pickup apparatus 12 includes, for example, a transport control unit Cc2, an image pickup control unit Cs2, and a movement control unit Ct2, which are electrically connected to each other via wiring Wr2.
  • the image pickup apparatus 12 includes, for example, a transfer unit Cv2 connected to the transfer control unit Cc2, an image pickup unit 12s connected to the image pickup control unit Cs2, and a movement mechanism 12t connected to the movement control unit Ct2. ..
  • the image pickup apparatus 12 has two image pickup control units Cs2 and two movement control units Ct2.
  • the two imaging control units Cs2 include, for example, a first imaging control unit Cs2 (also referred to as a first imaging control unit Cs21) and a second imaging control unit Cs2 (also referred to as a second imaging control unit Cs22).
  • the two movement control units Ct2 include, for example, a first movement control unit Ct2 (also referred to as a first movement control unit Ct21) and a second movement control unit Ct2 (also referred to as a second movement control unit Ct22).
  • the image pickup apparatus 12 has two image pickup units 12s including a first image pickup unit 12s1 and a second image pickup unit 12s2, and has two movement mechanisms 12t including a first movement mechanism 12t1 and a second movement mechanism 12t2.
  • the first imaging unit 12s1 is connected to the first imaging control unit Cs21
  • the second imaging unit 12s2 is connected to the second imaging control unit Cs22.
  • the first movement mechanism 12t1 is connected to the first movement control unit Ct21
  • the second movement mechanism 12t2 is connected to the second movement control unit Ct22.
  • the first image pickup unit 12s1 includes the first image pickup unit I11 and the first illumination unit F11 as shown in FIG. 5 (b), and the second image pickup unit 12s2 is shown in FIG. 5 (c).
  • the second imaging unit I12 and the second illumination unit F12 are included.
  • Each of the transport control unit Cc2, the image pickup control unit Cs2, and the movement control unit Ct2 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc2 can realize the function of the transfer control unit Cc2 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc2 can control the operation of the transport unit Cv2 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the image pickup control unit Cs2 can realize the function of the image pickup control unit Cs2 by, for example, executing a program in the storage unit in the calculation unit.
  • the image pickup control unit Cs2 can, for example, control the operation of the image pickup unit 12s and acquire information (also referred to as image pickup information) obtained by imaging the work W0 by the image pickup unit 12s.
  • the first image pickup control unit Cs21 can control the operation of the first image pickup unit 12s1 and acquire the image pickup information obtained by the image pickup of the work W0 by the first image pickup unit 12s1.
  • the first imaging control unit Cs21 can control, for example, the timing of light emission of the first lighting unit F11 and the timing of imaging of the first imaging unit I11.
  • the second image pickup control unit Cs22 can control the operation of the second image pickup unit 12s2 and acquire the image pickup information obtained by the image pickup of the work W0 by the second image pickup unit 12s2.
  • the second imaging control unit Cs22 can control the timing of each of the light emission of the second illumination unit F12 and the imaging of the second imaging unit I12.
  • the first imaging unit 12s1 and the second imaging unit 12s2 can operate in synchronization with the control signals from the integrated control unit C0 to the first imaging control unit Cs21 and the second imaging control unit Cs22.
  • the first imaging unit 12s1 and the second imaging unit 12s2 may operate in synchronization with each other by transmitting and receiving signals between the first imaging control unit Cs21 and the second imaging control unit Cs22.
  • the image pickup control unit Cs2 can output, for example, the image pickup information related to the work W0 to the integrated control unit C0 via the wiring Wr2 and the wiring Wr1 after performing various information processing as it is.
  • the imaging information as a result of imaging the work W0 can be acquired.
  • the integrated control unit C0 may display an image based on the imaging information on the output unit 11d, and the operator Op0 may visually inspect the image to inspect the appearance of the work W0, or the integrated control unit C0. May perform an operation to inspect the appearance of the work W0 by comparing the image related to the imaging information with the standard image related to at least a part of the work W0.
  • the imaging control unit Cs2 may perform an operation for inspecting the appearance of the work W0, and may send information indicating the result of the operation to the integrated control unit C0.
  • At least a part of the functional configuration realized by the image pickup control unit Cs2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the movement control unit Ct2 can realize the function of the movement control unit Ct2 by, for example, executing the program in the storage unit in the calculation unit.
  • the movement control unit Ct2 can control the operation of the movement mechanism 12t, for example.
  • the first movement control unit Ct21 can control the operation of the first movement mechanism 12t1.
  • the second movement control unit Ct22 can control the operation of the second movement mechanism 12t2.
  • the first movement control unit Ct21 moves the position of the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, so that the work W0 is moved by the first imaging unit 12s1. It is possible to control the imaging of a plurality of locations.
  • the second movement control unit Ct22 moves the position of the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, so that the second imaging unit 12s2 moves the work W0. It is possible to control so as to perform imaging at a plurality of locations. At least a part of the functional configuration realized by the movement control unit Ct2 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the reversing device 13 includes, for example, a transfer control unit Cc3 and a reversing control unit Cr3 that are electrically connected to each other via the wiring Wr2. Further, the reversing device 13 includes, for example, a transport unit Cv3 connected to the transport control unit Cc3, a holding unit 13h connected to the reversing control unit Cr3, and a moving mechanism 13t. In the example of FIG. 6, the reversing device 13 has one reversing control unit Cr3. Here, for example, the reversing device 13 may have two holding units 13h, two moving mechanisms 13t, and two reversing control units Cr3.
  • Each of the transport control unit Cc3 and the inversion control unit Cr3 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc3 can realize the function of the transfer control unit Cc3 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc3 can control the operation of the transport unit Cv3 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc3 may be configured by hardware such as a dedicated electronic circuit, for example.
  • the inversion control unit Cr3 can realize the function of the inversion control unit Cr3 by, for example, executing the program in the storage unit in the calculation unit.
  • the inversion control unit Cr3 can control the operation of the holding unit 13h and the moving mechanism 13t, for example.
  • the reversing control unit Cr3 holds the work W0 by holding the work W0 by the holding unit 13h, and moves the holding unit 13h in the state of holding the work W0 by the moving mechanism 13t, thereby moving the work W0.
  • the first imaging device 121 and the second imaging device 122 perform imaging on the front surface of the work W0
  • the third imaging device 123 and the fourth imaging device 124 perform imaging of the work W0. Imaging can be performed on the back surface.
  • the discharge device 14 has, for example, a transfer control unit Cc4 electrically connected to the wiring Wr2 and a transfer unit Cv4 connected to the transfer control unit Cc4.
  • the transport control unit Cc4 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit.
  • the transfer control unit Cc4 can realize the function of the transfer control unit Cc4 by, for example, executing the program in the storage unit in the calculation unit.
  • the transport control unit Cc4 can control the operation of the transport unit Cv4 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example.
  • At least a part of the functional configuration realized by the transport control unit Cc4 may be configured by hardware such as a dedicated electronic circuit, for example.
  • FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus 12.
  • the horizontal axis indicates the time, and the timing of each operation of the first imaging unit 12s1 and the second imaging unit 12s2 is indicated.
  • the first moving mechanism is such that the portion of the work W0 whose coordinate values indicating the position in the X direction are X1, X2, X3, ... Is captured in the substantially center of the captured image in the order of this description.
  • An example will be described in which the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are changed in the order of X1, X2, X3, ...
  • the 12t1 and the second moving mechanism 12t2 To do.
  • the period in which the time elapses in the order of time t0 to time t9 will be described.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X1.
  • the first imaging unit I11 captures the work W0 (also referred to as imaging 1a).
  • the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1.
  • the first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 1b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 1c).
  • the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 1d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 1e) while the work W0 is illuminated by the first lighting unit F11. Do.
  • the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the first moving mechanism 12t1. ..
  • the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X1. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 1f).
  • the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the second moving mechanism 12t2.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X2. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 2a).
  • the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2.
  • the first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 2b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 2c).
  • the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 2d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 2e) while the work W0 is illuminated by the first lighting unit F11. Do.
  • the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the first moving mechanism 12t1. ..
  • the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X2. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 2f).
  • the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the second moving mechanism 12t2.
  • the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X3. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 3a).
  • the overall control unit C0 controls the operations of the first moving mechanism 12t1 and the second moving mechanism 12t2 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately.
  • the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed.
  • the second imaging unit 12s2 is controlled to be moved.
  • both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time.
  • the first illumination unit F11 while moving the first imaging unit 12s1 and the second imaging unit 12s2 separately with respect to the work W0.
  • the work W0 illuminated by each of the second illumination unit F12 and the second illumination unit F12 can be imaged by the first imaging unit I11 and the second imaging unit I12.
  • each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the first imaging unit 12s1 may include two or more first imaging units I11 or may include two or more first lighting units F11.
  • the second imaging unit 12s2 may include two or more second imaging units I12, or may include two or more second illumination units F12. That is, for example, the first imaging unit 12s1 may include one or more first imaging units I11 and one or more first illumination units F11, and the second imaging unit 12s2 may include one or more first imaging units 12s2. 2
  • the imaging unit I12 and one or more second illumination units F12 may be included.
  • FIG. 9 is a diagram schematically showing an example of the physical configuration of the first imaging unit 12s1 according to the second embodiment.
  • the first imaging unit 12s1 includes one or more first imaging units I11 including a first A imaging unit I11a, a first B imaging unit I11b, and a first C imaging unit I11c. It may have one or more first illumination units F11 including the 1A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c.
  • first imaging units I11 including a first A imaging unit I11a, a first B imaging unit I11b, and a first C imaging unit I11c.
  • the work W0 on which the first A imaging unit I11a is mounted on the mounting portion Sg2 while the first A lighting unit F11a is illuminating the work W0 mounted on the mounting portion Sg2 from above. Can be imaged from above.
  • the work W0 on which the first B imaging unit I11b is placed on the mounting portion Sg2 while the first B lighting unit F11b is illuminating the work W0 mounted on the mounting portion Sg2 from diagonally above. Can be imaged from diagonally above.
  • the first C imaging unit I11c is placed on the mounting portion Sg2 while the first C lighting unit F11c is illuminating the work W0 placed on the mounting portion Sg2 in the horizontal direction. It is possible to image the work W0 in the horizontal direction.
  • the work W0 can be imaged under a plurality of lighting conditions with less operation without moving the first imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
  • the angle formed by the optical axis (also referred to as the first A optical axis) Pi11a of the first A lens unit Lz11a as the optical system in the first A imaging unit I11a and the virtual horizontal plane Pn0 passing through the work W0 ( The first A depression angle) ⁇ 1a is 90 degrees. Therefore, the first A imaging unit I11a functions as a camera (also referred to as an upper camera) capable of imaging the work W0 from above.
  • the angle (also referred to as the first B depression angle) formed by the optical axis (also referred to as the first B optical axis) Pi11b of the first B lens unit Lz11b as the optical system in the first B imaging unit I11b and the virtual horizontal plane Pn0 passing through the work W0. It is said that ⁇ 1b is 45 degrees. Therefore, the first B imaging unit I11b functions as a camera (also referred to as an oblique camera) capable of imaging the work W0 from diagonally above.
  • a form in which the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c intersect at substantially the center of the work W0 can be considered.
  • the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c are located along a virtual plane along the YZ plane. Then, the first A lens portion Lz11a of the first A imaging unit I11a is located in a state of being inserted into the first A hole portion H11a as the first hole portion H11 in the first A illumination unit F11a. From another point of view, the first A optical axis Pi11a of the first A lens Lz11a is set to pass through the first A hole portion H11a.
  • the first B lens portion Lz11b of the first B imaging unit I11b is located in a state of being inserted into the first B hole portion H11b as the first hole portion H11 in the first B illumination unit F11b. From another point of view, the first B optical axis Pi11b of the first B lens Lz11b is set to pass through the first B hole H11b.
  • the first C lens portion Lz11c of the first C imaging unit I11c is located in a state of being inserted into the first C hole portion H11c as the first hole portion H11 in the first C illumination unit F11c. From another point of view, the first C optical axis Pi11c of the first C lens Lz11c is set to pass through the first C hole H11c.
  • the direction in which the first A imaging unit I11a faces is a two-dot chain line along the first A optical axis Pi11a. It is drawn by the arrow Dc1a.
  • the direction in which the first B imaging unit I11b faces is drawn by the arrow Dc1b of the two-dot chain line along the first B optical axis Pi11b.
  • the direction in which the first C imaging unit I11c is facing (also referred to as the first C imaging direction) is drawn by the arrow Dc1c of the two-dot chain line along the first C optical axis Pi11c.
  • the direction in which the first A illumination unit F11a can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first A illumination direction) is an arrow chain line. It is drawn with Df1a.
  • the direction in which the first B illumination unit F11b can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first B illumination direction) is drawn by the arrow Df1b of the alternate long and short dash line. ..
  • the direction in which the first C illumination unit F11c can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first C illumination direction) is drawn by the arrow Df1c of the one-point chain line. ..
  • the first A illumination unit F11a functions as an illumination unit (also referred to as an upper illumination unit) that irradiates the work W0 with light from above.
  • the first B illumination unit F11b functions as an illumination unit (also referred to as an oblique illumination unit) that irradiates the work W0 with light from diagonally above.
  • the first C illumination unit F11c functions as an illumination unit (also referred to as a horizontal illumination unit) that irradiates the work W0 with light along the horizontal direction.
  • FIG. 10A is a diagram schematically showing an example of the first A lighting unit F11a.
  • FIG. 10B is a diagram schematically showing an example of the first B lighting unit F11b.
  • FIG. 10C is a diagram schematically showing an example of the first C illumination unit F11c.
  • FIG. 11 is a side view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 12 is a plan view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 13 is a front view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment.
  • FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit 12s1 according to the second embodiment.
  • the first A illumination unit F11a includes the upper light emitting region F11a1 as one region capable of irradiating light toward the work W0. obtain.
  • the first oblique light emitting region F11b1 and the second oblique light emitting region F11b1 and the second oblique light emitting region are five regions in which the first B illumination unit F11b can irradiate light toward the work W0.
  • a configuration including F11b2, a third oblique light emitting region F11b3, a fourth oblique light emitting region F11b4, and a fifth oblique light emitting region F11b5 can be adopted.
  • the first horizontal light emitting region F11c1 and the second horizontal light emitting region F11c1 and the second horizontal light emitting region are three regions in which the first C illumination unit F11c can irradiate light toward the work W0.
  • a configuration including F11c2 and a third horizontal light emitting region F11c3 can be adopted.
  • the upper light emitting region F11a1 has the first A hole portion H11a
  • the third oblique light emitting region F11b3 has the first B hole portion H11b
  • the second horizontal light emitting region F11c2 has a first C hole H11c.
  • the first B illumination unit F11b is viewed in a plane from directly above in the ⁇ Z direction
  • the region F11b4 and the fifth oblique light emitting region F11b5 have a positional relationship rotated by 45 degrees about the first A optical axis Pi11a of the first A imaging unit I11a in the order described above.
  • the second diagonal light emitting region F11b2 is rotated 45 degrees clockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a.
  • the first oblique light emitting region F11b1 is located in a state of being rotated 90 degrees clockwise from the third oblique light emitting region F11b3 about the first A optical axis Pi11a, and the fourth oblique light emitting region F11b4 is located on the first A optical axis. It is located in a state of being rotated 45 degrees counterclockwise from the third diagonal light emitting region F11b3 about Pi11a, and the fifth diagonal light emitting region F11b5 is counterclockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a. It is located in a state of being rotated 90 degrees.
  • the first horizontal light emitting region F11c1, the second horizontal light emitting region F11c2, and the third horizontal light emitting region F11c3 are in the order of this description.
  • the first A imaging unit I11a has a positional relationship rotated by 45 degrees about the first A optical axis Pi11a.
  • the first horizontal light emitting region F11c1 is rotated 45 degrees clockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a.
  • the third horizontal light emitting region F11c3 is located in a state of being rotated 45 degrees counterclockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a.
  • the first A imaging unit I11a, the first B imaging unit I11b, the first C imaging unit I11c, the first A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c having the above configuration are shown in FIGS. 11 to 13, for example. As such, they are connected to each other by the connecting member Cn1 and have an integral structure. In this case, for example, the first imaging unit 12s1 can be moved by moving the connecting member Cn1 by the first moving mechanism 12t1.
  • the first A lighting unit F11a includes the upper light emitting region F11a1 as one light emitting region
  • the first B lighting unit F11b includes the first to fifth oblique light emitting regions F11b1 to F11b5 as five light emitting regions.
  • the first C illumination unit F11c has the first to third horizontal light emitting regions F11c1 to F11c3 as three light emitting regions, the work W0 can be switched between the presence and absence of light irradiation for each light emitting region. It is possible to perform imaging under a plurality of lighting conditions with a smaller number of operations without moving the imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
  • each horizontal light emitting region F11c1 to F11c3 of the first C illumination unit F11c is along the XY plane rather than the height in the vertical direction along the Z direction.
  • the first C illumination unit F11c can be easily moved in order to adjust the distance of the first image pickup unit 12s1 and the focus of the first C image pickup unit I11c with respect to the work W0 according to the size of the work W0.
  • the first C illumination unit F11c does not have the first horizontal light emitting region F11c1 and the third horizontal light emitting region F11c3 as two light emitting regions, but has the second horizontal light emitting region F11c2 as one light emitting region. You may be doing it. In other words, for example, the first C illumination unit F11c may have one or more light emitting regions.
  • each oblique light emitting region F11b1 to F11b5 of the first B illumination unit F11b has a length in the diagonally upward direction with respect to the width in the horizontal direction. If the area is large, even the work W0 having a long depth direction when viewed from diagonally above can be widely illuminated. Further, for example, a plurality of light emitting regions (for example, the first to the first) capable of illuminating the work W0 from diagonally above at different angles around the first A optical axis Pi11a as a virtual axis along the vertical direction (Z direction). 5 Diagonal light emitting regions F11b1 to F11b5) can be easily arranged.
  • the first B illumination unit F11b does not have the first oblique light emitting region F11b1 and the fifth oblique light emitting region F11b5 as the two light emitting regions, but the second oblique light emitting region F11b2 and the second oblique light emitting region F11b2 as the three light emitting regions. It may have 3 diagonal light emitting regions F11b3 and 4th diagonal light emitting regions F11b4. Further, for example, a configuration may be adopted in which the first B illumination unit F11b has one or more light emitting regions including the third oblique light emitting region F11b3.
  • FIG. 15 is a diagram showing an example of the appearance of the work W0.
  • the work W0 has a regular hexahedral shape having first to sixth surfaces Sf1 to Sf6.
  • the first surface Sf1 as the upper surface facing the + Z direction has the first recess Dp1
  • the second surface Sf2 as the side surface facing the + Y direction has the second recess Dp2.
  • a captured image relating to the work W0 obtained by illuminating and imaging the work W0 having the shape shown in FIG. 15 by the first imaging unit 12s1 arranged as shown in FIG.
  • An example of is as shown in FIGS. 16 (a) to 18 (c).
  • FIGS. 16A to 18C diagonal hatching is provided on the surface of the work W0 that was not brightly captured by the illumination, and the portion brightly captured by the illumination was provided. Is not hatched.
  • FIG. 16A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first A imaging unit I11a.
  • FIG. 16B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first B imaging unit I11b.
  • FIG. 16C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first C imaging unit I11c. Is.
  • the first surface Sf1 as the upper surface facing the + Z direction.
  • An image of the work W0 captured in a dark state including the first recess Dp1 can be obtained.
  • the first surface Sf1 is dark including the first recess Dp1 as shown in FIG. 16B.
  • An image of the work W0 is obtained, which is captured in a dark state on substantially the entire surface except for a part of the second concave portion Dp2 of the second surface Sf2 as the side surface facing the + Y direction.
  • the work W0 illuminated in the second horizontal light emitting region F11c2 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 16C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered.
  • An captured image relating to the work W0 captured in a bright state can be obtained.
  • FIG. 17A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first A imaging unit I11a.
  • FIG. 17B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first B imaging unit I11b.
  • FIG. 17A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first B imaging unit I11b.
  • 17C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first C imaging unit I11c. Is.
  • An image of the work W0 is obtained in which substantially the entire surface is captured in a dark state and substantially the entire surface is captured in a dark state except for a part of the second recess Dp2 of the second surface Sf2.
  • the work W0 illuminated in the third oblique light emitting region F11b3 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 17C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered.
  • An captured image relating to the work W0 captured in a dark state can be obtained.
  • FIG. 18A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first A imaging unit I11a. ..
  • FIG. 18B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first B imaging unit I11b. ..
  • FIG. 18C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first C imaging unit I11c. ..
  • the integrated control unit C0 has the first moving mechanism 12t1 and the first moving mechanism 12t1 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately.
  • the operation of the second moving mechanism 12t2 may be controlled. Specifically, for example, the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed. At the time point, the second imaging unit 12s2 may be controlled to be moved.
  • both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time.
  • the second imaging unit 12s2 may also have the same configuration as the first imaging unit 12s1.
  • the configuration of the first imaging unit 12s1 and the configuration of the second imaging unit 12s2 have a plane-symmetrical relationship with respect to the XZ plane.
  • FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment.
  • FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment.
  • the first moving mechanism 12t1 is formed along the ⁇ X direction by the first reference portion Sl1 located on the base portion Bs12 and the first reference portion Sl1. It has a first arm portion Am1 which is held so as to be movable. Then, the first imaging unit 12s1 is attached to the first arm portion Am1. Further, in the examples of FIGS.
  • the second moving mechanism 12t2 is in the ⁇ X direction by the second reference portion Sl2 located on the base portion Bs12 and the second reference portion Sl1. It has a second arm portion Am2, which is movably held along the line. Then, the second imaging unit 12s2 is attached to the second arm portion Am2.
  • the movement of the first arm portion Am1 with respect to the first reference portion Sl1 and the movement of the second arm portion Am2 with respect to the second reference portion Sl2 are, for example, a linear guide and a rotational driving force of an air cylinder or a motor that produces a linear driving force.
  • the movement of at least one of the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 is defined as movement in at least two directions.
  • each part of the work W0 can be imaged under more lighting conditions. Thereby, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the first moving mechanism 12t1 and the second moving mechanism 12t2 may not be positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2.
  • at least one of the first moving mechanism 12t1 and the second moving mechanism 12t2 may be located above the transporting portion Cv2 as the mounting portion Sg2, or the first moving mechanism 12t1 and the second moving mechanism Both 12t2 may be located on one side of the transport portion Cv2 as the mounting portion Sg2.
  • first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2, for example, if the work is located in a wider area on the surface of the work W0.
  • Each part of W0 can be easily imaged under a plurality of lighting conditions.
  • first configuration in which the first moving mechanism 12t1 and the first imaging unit 12s1 are combined, or a second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined.
  • second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined.
  • third or subsequent configuration having a similar configuration.
  • the first imaging unit 12s1 may have two or more illumination units and one or more imaging units
  • the second imaging unit 12s2 may have two or more illumination units. It may have a unit and one or more imaging units. Even if such a configuration is adopted, for example, by combining the presence or absence of lighting of two or more lighting units, imaging under a plurality of lighting conditions can be performed without moving the first imaging unit 12s1 and the second imaging unit 12s2. It can be carried out. That is, for example, it is possible to perform imaging under a plurality of lighting conditions with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
  • the one or more lighting units may be two or more lighting units including the first A lighting unit F11a and the first B lighting unit F11b, or the first A lighting unit F11a and the first C lighting unit. It may be two or more lighting units including F11c.
  • one or more imaging units may include one or more imaging units of the first A imaging unit I11a, the first B imaging unit I11b, and the first C imaging unit I11c.
  • one of the first B lighting unit F11b and the first C lighting unit F11c does not exist, and the first A imaging unit I11a and the first B imaging unit I11b do not exist.
  • the first A illumination unit F11a is placed with a virtual line along the first A irradiation direction as a direction for irradiating light toward the work W0 mounted on the mounting unit Sg2.
  • the angle formed by the virtual horizontal plane Pn0 passing through the work W0 placed on the portion Sg2 may be appropriately set between 0 degrees and 90 degrees.
  • a virtual line along the first B irradiation direction as a direction in which the first B illumination unit F11b irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2.
  • the angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees. Further, for example, a virtual line along the first C irradiation direction as a direction in which the first C illumination unit F11c irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2. The angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees.
  • the imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit from one imaging unit toward the work W0 mounted on the mounting unit Sg2 is determined.
  • a configuration may be adopted in which the first A lighting unit F11a is closer to the first A lighting direction than the first B lighting direction of the first B lighting unit F11b.
  • the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first B.
  • a configuration may be adopted in which the illumination unit F11b is closer to the first A illumination direction of the first A illumination unit F11a than the first B illumination direction.
  • an imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit, from one imaging unit toward the work W0 mounted on the mounting unit Sg2. May adopt a configuration closer to the first A illumination direction of the first A illumination unit F11a than to the first C illumination direction of the first C illumination unit F11c.
  • the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first C.
  • a configuration may be adopted in which the illumination unit F11c is closer to the first A illumination direction of the first A illumination unit F11a than the first C illumination direction.
  • the image of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction and the illumination condition in which the illumination is performed in the illumination direction at an angle away from the imaging direction By imaging the work W0, the conditions under which the positively reflected light from the work W0 is captured by the imaging unit can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness on the work W0. More specifically, for example, in the imaging of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction, the scratches that could not be captured because the positively reflected light is too strong are far from the imaging direction. It is assumed that the work W0 can be captured by imaging under the illumination condition in which the illumination is performed in the illumination direction of the angle.
  • the first A optical axis Pi11a of the first A imaging unit I11a may be slightly deviated from the center of the work W0. Also in this case, for example, if the luminous flux of the light emitted from the upper light emitting region F11a1 of the first A lighting unit F11a toward the work W0 has a certain spread, the upper light emitting region F11a1 of the first A lighting unit F11a The work W0 can be sufficiently illuminated.
  • the imaging unit I1 imaged the work W0 mounted on the mounting unit Sg2 via the hole H1 of the lighting unit F1, but the present invention is not limited to this.
  • an imaging direction in which the imaging unit I1 images the work W0 mounted on the mounting unit Sg2 and an illumination direction in which the lighting unit F1 irradiates the work W0 mounted on the mounting unit Sg2 with light.
  • the angle formed by may deviate within the permissible range (also referred to as the permissible angle range).
  • the first imaging unit I11 irradiates the imaging direction in which the work W0 mounted on the mounting portion Sg2 is imaged
  • the first illumination unit F11 irradiates the work W0 mounted on the mounting portion Sg2 with light.
  • the angle formed by the illumination direction may deviate within the permissible range (permissible angle range)
  • the angle formed by the illumination direction in which the second illumination unit F12 irradiates the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first A imaging direction in which the first A imaging unit I11a images the work W0 mounted on the mounting portion Sg2 and the first A lighting unit F11a (specifically, the upper light emitting region F11a1) are mounted.
  • the angle formed by the first A illumination direction for irradiating the work W0 placed on the portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first B imaging direction in which the first B imaging unit I11b images the work W0 mounted on the mounting unit Sg2 and the first B illumination unit F11b are
  • the angle formed by the first B illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • the first C imaging direction in which the first C imaging unit I11c images the work W0 mounted on the mounting unit Sg2 and the first C illumination unit F11c (specifically, the second horizontal light emitting region F11c2)
  • the angle formed by the first C illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range).
  • each permissible angle range depends on, for example, the shape and size of the light emitting region of each illumination unit, the shape and size of the work W0, and the like.
  • FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region F11a1 in the first A lighting unit F11a.
  • FIG. 20B is a diagram showing an example of the shape and dimensions of the first work W0.
  • FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work W0.
  • the upper light emitting region F11a1 has a pair of opposite sides having a width W1 along the X direction and a pair of opposite sides having a length L1 along the Y direction. It is a rectangular area having.
  • the first work W0 has a pair of sides having a width W2 along the X direction facing each other and a pair of sides having a length L2 along the Y direction corresponding to each other. It is a rectangular parallelepiped having a rectangular bottom surface and a height H2.
  • the second work W0 is a columnar column having a pair of perfectly opposed surfaces having a diameter of ⁇ 3 along the YZ plane and a width W3 along the X direction. belongs to.
  • the distance between the image sensor and the work W0 of the first A image pickup unit I11a and the distance between the upper light emitting region F11a1 and the work W0 are both 260 mm (mm).
  • the width W1 is 180 mm and the length L1 is 120 mm. Further, it is assumed that the first A optical axis Pi11a of the first A imaging unit I11a is set to pass through the center of the work W0.
  • the width W2 is 50 mm
  • the length L2 is 30 mm
  • the height H2 is 50 mm for the first work W0.
  • the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 30 degrees or less
  • the first A imaging unit I11a starts from the upper light emitting region F11a1.
  • the specularly reflected light can be received from the entire upper surface Su2 of the first work W0 facing the + Z direction in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 30 degrees.
  • the diameter ⁇ 3 is 50 mm and the width W3 is 40 mm for the second work W0.
  • the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 12 degrees or less, the first A imaging unit I11a starts from the upper light emitting region F11a1.
  • the specularly reflected light can be received from the entire region of the side surface Ss3 of the second work W0 that can be seen in the ⁇ Z direction in a plan view in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 12 degrees.
  • the imaging device 12 adopts a configuration having a stage or the like as a mounting portion for mounting the work W0 in addition to the robot capable of transporting the work W0.
  • the operation of the inspection system 1 may be controlled by one or more control units such as the integrated control unit C0.
  • the inspection system 1 may be regarded as one imaging device that images the work W0.
  • One of the configurations may not exist.

Abstract

In order to provide a feature with which it is possible to easily capture an image in which objects having a variety of shapes are sufficiently captured, this imaging device comprises a mounting part, a first imaging unit, a first movement mechanism, a second imaging unit, and a second movement mechanism. The mounting part is for mounting an imaging object. The first imaging unit includes one or more first imaging parts and one or more first illumination parts. The first movement mechanism causes the first imaging unit to move relative to the mounting part. The second imaging unit includes one or more second imaging parts and one or more second illumination parts. The second movement mechanism causes the second imaging unit to move relative to the mounting part.

Description

撮像装置Imaging device
 本発明は、撮像装置に関する。 The present invention relates to an imaging device.
 従来、自動車等の駆動部およびその周辺に用いられている立体形状を有する鍛造部品については、人が様々な角度から鍛造部品を見ることで欠陥を発見する目視検査が行われている。この目視検査は、例えば、カメラと照明とを含む光学機器を用いた検査に置き換えることが可能である。 Conventionally, forged parts having a three-dimensional shape used in the driving part of an automobile or the like and its surroundings are visually inspected to find defects by a person looking at the forged parts from various angles. This visual inspection can be replaced, for example, with an inspection using an optical instrument including a camera and lighting.
 そして、例えば、人間の腕に似た構造を有する産業用のロボットアームの先端に光学機器を取り付けることで、検査対象物(ワークともいう)の所望の部分を自在に撮像可能な欠陥検査装置が考えられている(例えば、特許文献1等)。このような欠陥検査装置によれば、例えば、人による目視検査では対応しにくい大型のワークであっても、検査を行うことが可能となる。 Then, for example, by attaching an optical device to the tip of an industrial robot arm having a structure similar to a human arm, a defect inspection device capable of freely imaging a desired part of an inspection object (also referred to as a work) can be provided. It is considered (for example, Patent Document 1 etc.). According to such a defect inspection device, for example, even a large workpiece that is difficult to handle by visual inspection by a human can be inspected.
特開2006-208259号公報Japanese Unexamined Patent Publication No. 2006-208259
 しかしながら、上記特許文献1の技術では、ワークを一方向から照明して撮像を行う。このため、例えば、ワークが凹凸部および孔部等の平坦ではない種々の外形を有していれば、ワークの一部については、照明からワークに照射される光がカメラに向かって反射せず、ワークを十分に捉えた画像を得ることができない場合がある。 However, in the technique of Patent Document 1 above, the work is illuminated from one direction for imaging. Therefore, for example, if the work has various irregular outer shapes such as uneven portions and holes, the light emitted from the illumination to the work is not reflected toward the camera for a part of the work. , It may not be possible to obtain an image that sufficiently captures the work.
 本発明は、上記課題に鑑みてなされたものであり、種々の形状を有する対象物を十分に捉えた画像を容易に撮像可能な技術を提供することを目的とする。 The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of easily capturing an image that sufficiently captures an object having various shapes.
 上記課題を解決するために、第1の態様に係る撮像装置は、載置部と、第1撮像ユニットと、第1移動機構と、第2撮像ユニットと、第2移動機構と、を備える。前記載置部は、撮像対象物を載置するためのものである。前記第1撮像ユニットは、1つ以上の第1撮像部および1つ以上の第1照明部を含む。前記第1移動機構は、前記第1撮像ユニットを前記載置部に対して相対的に移動させる。前記第2撮像ユニットは、1つ以上の第2撮像部および1つ以上の第2照明部を含む。前記第2移動機構は、前記第2撮像ユニットを前記載置部に対して相対的に移動させる。 In order to solve the above problems, the imaging device according to the first aspect includes a mounting unit, a first imaging unit, a first moving mechanism, a second imaging unit, and a second moving mechanism. The above-mentioned placing portion is for placing an image-imaging object. The first imaging unit includes one or more first imaging units and one or more first illumination units. The first moving mechanism moves the first imaging unit relative to the above-mentioned mounting portion. The second imaging unit includes one or more second imaging units and one or more second illumination units. The second moving mechanism moves the second imaging unit relative to the above-mentioned mounting portion.
 第2の態様に係る撮像装置は、第1の態様に係る撮像装置であって、前記第1移動機構と前記第2移動機構とが前記載置部を挟むように位置している。 The imaging device according to the second aspect is the imaging device according to the first aspect, and the first moving mechanism and the second moving mechanism are located so as to sandwich the above-mentioned mounting portion.
 第3の態様に係る撮像装置は、第1または第2の態様に係る撮像装置であって、前記第1移動機構および前記第2移動機構のうちの少なくとも一方の移動機構は、多軸ロボットアームを含む。 The imaging device according to the third aspect is the imaging device according to the first or second aspect, and at least one of the first moving mechanism and the second moving mechanism is a multi-axis robot arm. including.
 第4の態様に係る撮像装置は、第1から第3の何れか1つの態様に係る撮像装置であって、前記第1移動機構による前記第1撮像ユニットの移動と前記第2移動機構による前記第2撮像ユニットの移動とによって、前記第1撮像ユニットおよび前記第2撮像ユニットが、前記載置部に載置された前記撮像対象物を全周にわたって撮像可能である。 The image pickup apparatus according to the fourth aspect is the image pickup apparatus according to any one of the first to third aspects, wherein the first image pickup unit is moved by the first movement mechanism and the second movement mechanism is used. By moving the second image pickup unit, the first image pickup unit and the second image pickup unit can take an image of the image pickup object placed on the above-described placement portion over the entire circumference.
 第5の態様に係る撮像装置は、第1から第4の何れか1つの態様に係る撮像装置であって、前記第1撮像ユニットと前記第2撮像ユニットとが交互に移動するように、前記第1移動機構および前記第2移動機構の動作を制御する制御部、を備える。 The image pickup device according to the fifth aspect is the image pickup device according to any one of the first to fourth aspects, and the first image pickup unit and the second image pickup unit are moved alternately. It includes a first moving mechanism and a control unit that controls the operation of the second moving mechanism.
 第6の態様に係る撮像装置は、第1から第5の何れか1つの態様に係る撮像装置であって、前記1つ以上の第1照明部は、第1A照明部と、第1B照明部と、を含む。前記第1A照明部は、第1A照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する。前記第1B照明部は、第1B照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する。 The image pickup apparatus according to the sixth aspect is the image pickup apparatus according to any one of the first to fifth aspects, and the one or more first illumination units are the first A illumination unit and the first B illumination unit. And, including. The 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination. The 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
 第7の態様に係る撮像装置は、第6の態様に係る撮像装置であって、前記第1撮像部は、光学系を含む。前記第1撮像部から前記載置部に載置された前記撮像対象物に向かう前記光学系の光軸に沿った撮像方向は、前記第1B照明方向よりも前記第1A照明方向に近い。 The imaging device according to the seventh aspect is the imaging device according to the sixth aspect, and the first imaging unit includes an optical system. The imaging direction along the optical axis of the optical system from the first imaging unit toward the imaging object mounted on the above-mentioned stationary unit is closer to the first A illumination direction than to the first B illumination direction.
 第8の態様に係る撮像装置は、第6または第7の態様に係る撮像装置であって、前記1つ以上の第1撮像部は、第1A撮像部と、第1B撮像部と、第1C撮像部と、を含み、前記1つ以上の第1照明部は、前記第1A照明部と、前記第1B照明部と、第1C照明部と、を含む。前記第1A照明部が前記載置部に載置された前記撮像対象物を上方から照明している状態で前記第1A撮像部が前記載置部に載置された前記撮像対象物を上方から撮像する。前記第1B照明部が前記載置部に載置された前記撮像対象物を斜め上方から照明している状態で前記第1B撮像部が前記載置部に載置された前記撮像対象物を斜め上方から撮像する。前記第1C照明部が前記載置部に載置された前記撮像対象物を水平方向に向かって照明している状態で前記第1C撮像部が前記載置部に載置された前記撮像対象物を水平方向に向かって撮像する。 The image pickup apparatus according to the eighth aspect is the image pickup apparatus according to the sixth or seventh aspect, and the one or more first image pickup units are the first A image pickup unit, the first B image pickup unit, and the first C. The image pickup unit is included, and the one or more first illumination units include the first A illumination unit, the first B illumination unit, and the first C illumination unit. The first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image. The first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above. The image pickup object in which the first C imaging unit is placed on the prescriptive placement unit while the first C illumination unit is illuminating the image pickup object placed on the front description placement unit in the horizontal direction. Is imaged horizontally.
 第9の態様に係る撮像装置は、第8の態様に係る撮像装置であって、前記第1C照明部は、鉛直方向における高さよりも水平方向における幅が大きい発光領域を有する。 The image pickup device according to the ninth aspect is the image pickup device according to the eighth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
 第10の態様に係る撮像装置は、第8または第9の態様に係る撮像装置であって、前記第1B照明部は、水平方向における幅よりも斜め上方向における長さが大きい発光領域を有する。 The image pickup apparatus according to the tenth aspect is the image pickup apparatus according to the eighth or ninth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
 上記課題を解決するために、第11の態様に係る撮像装置は、載置部と、撮像ユニットと、移動機構と、を備える。前記載置部は、撮像対象物を載置するためのものである。前記撮像ユニットは、1つ以上の撮像部ならびに第1A照明部および第1B照明部を含む2つ以上の照明部を有する。前記移動機構は、前記撮像ユニットを前記載置部に対して相対的に移動させる。前記第1A照明部は、第1A照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する。前記第1B照明部は、第1B照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する。 In order to solve the above problems, the imaging device according to the eleventh aspect includes a mounting unit, an imaging unit, and a moving mechanism. The above-mentioned placing portion is for placing an image-imaging object. The image pickup unit has one or more image pickup units and two or more illumination units including a first A illumination unit and a first B illumination unit. The moving mechanism moves the imaging unit relative to the above-mentioned mounting portion. The 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination. The 1B illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1B illumination.
 第12の態様に係る撮像装置は、第11の態様に係る撮像装置であって、前記1つ以上の撮像部のうちの第1A撮像部は、光学系を含む。前記第1A撮像部から前記載置部に載置された前記撮像対象物に向かう前記光学系の光軸に沿った撮像方向は、前記第1B照明方向よりも前記第1A照明方向に近い。 The imaging device according to the twelfth aspect is the imaging device according to the eleventh aspect, and the first A imaging unit among the one or more imaging units includes an optical system. The imaging direction along the optical axis of the optical system from the first A imaging unit toward the imaging object mounted on the above-described stationary unit is closer to the first A illumination direction than the first B illumination direction.
 第13の態様に係る撮像装置は、第12の態様に係る撮像装置であって、前記1つ以上の撮像部は、前記第1A撮像部と、第1B撮像部と、第1C撮像部と、を含み、前記2つ以上の照明部は、前記第1A照明部と、前記第1B照明部と、第1C照明部と、を含む。前記第1A照明部が前記載置部に載置された前記撮像対象物を上方から照明している状態で前記第1A撮像部が前記載置部に載置された前記撮像対象物を上方から撮像する。前記第1B照明部が前記載置部に載置された前記撮像対象物を斜め上方から照明している状態で前記第1B撮像部が前記載置部に載置された前記撮像対象物を斜め上方から撮像する。前記第1C照明部が前記載置部に載置された前記撮像対象物を水平方向に向かって照明している状態で前記第1C撮像部が前記載置部に載置された前記撮像対象物を水平方向に向かって撮像する。 The imaging apparatus according to the thirteenth aspect is the imaging apparatus according to the twelfth aspect, and the one or more imaging units include the first A imaging unit, the first B imaging unit, and the first C imaging unit. The two or more lighting units include the first A lighting unit, the first B lighting unit, and the first C lighting unit. The first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take an image. The first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Take an image from above. The image pickup object in which the first C imaging unit is placed on the prescriptive placement unit while the first C illumination unit is illuminating the image pickup object placed on the front description placement unit in the horizontal direction. Is imaged horizontally.
 第14の態様に係る撮像装置は、第13の態様に係る撮像装置であって、前記第1C照明部は、鉛直方向における高さよりも水平方向における幅が大きい発光領域を有する。 The image pickup device according to the fourteenth aspect is the image pickup device according to the thirteenth aspect, and the first C illumination unit has a light emitting region having a width larger in the horizontal direction than the height in the vertical direction.
 第15の態様に係る撮像装置は、第13または第14の態様に係る撮像装置であって、前記第1B照明部は、水平方向における幅よりも斜め上方向における長さが大きい発光領域を有する。 The imaging device according to the fifteenth aspect is the imaging device according to the thirteenth or fourteenth aspect, and the first B illumination unit has a light emitting region having a length in an obliquely upward direction larger than a width in a horizontal direction. ..
 第1の態様に係る撮像装置によれば、撮像対象物に対して、第1撮像ユニットと第2撮像ユニットとを別々に移動させつつ、第1照明部および第2照明部のそれぞれで照明された撮像対象物を第1撮像部および第2撮像部で撮像することができる。これにより、例えば、撮像対象物の各部分を複数の照明条件で撮像することができる。したがって、例えば、種々の形状を有する撮像対象物を十分に捉えた画像を容易に撮像することができる。 According to the image pickup apparatus according to the first aspect, the first illumination unit and the second imaging unit are separately moved with respect to the object to be imaged, and are illuminated by the first illumination unit and the second illumination unit, respectively. The imaged object can be imaged by the first imaging unit and the second imaging unit. Thereby, for example, each part of the object to be imaged can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
 第2の態様に係る撮像装置によれば、例えば、撮像対象物の表面のより広いエリアについて、撮像対象物の各部分を複数の照明条件で容易に撮像することができる。 According to the image pickup apparatus according to the second aspect, for example, it is possible to easily image each part of the image pickup object under a plurality of illumination conditions in a wider area on the surface of the image pickup object.
 第3の態様に係る撮像装置によれば、例えば、撮像対象物の各部分を複数の照明条件で任意の角度から撮像することができる。 According to the image pickup apparatus according to the third aspect, for example, each part of the image pickup object can be imaged from an arbitrary angle under a plurality of lighting conditions.
 第4の態様に係る撮像装置によれば、例えば、撮像対象物の表面のさらに広いエリアについて、撮像対象物の各部分を複数の照明条件で容易に撮像することができる。 According to the image pickup apparatus according to the fourth aspect, for example, it is possible to easily image each part of the image pickup object under a plurality of lighting conditions in a wider area of the surface of the image pickup object.
 第5の態様に係る撮像装置によれば、例えば、撮像対象物の複数箇所について、複数の照明条件における撮像に要する時間を短縮することができる。したがって、例えば、単位時間あたりに撮像を完了させることができる撮像対象物の数を増加させることができる。 According to the imaging device according to the fifth aspect, for example, it is possible to shorten the time required for imaging at a plurality of locations of an imaging object under a plurality of lighting conditions. Therefore, for example, it is possible to increase the number of imaging objects that can complete imaging per unit time.
 第6の態様に係る撮像装置によれば、例えば、少ない動作で複数の照明条件における撮像を行うことができる。 According to the imaging device according to the sixth aspect, for example, imaging under a plurality of lighting conditions can be performed with a small number of operations.
 第7の態様に係る撮像装置によれば、例えば、撮像方向に近い角度の照明方向で照明を行う照明条件での撮像と、撮像方向から離れた角度の照明方向で照明を行う照明条件での撮像と、を行うことで、撮像対象物からの正反射光が捉えられる条件が変わり得る。これにより、撮像対象物における凹凸等の種々の形状を十分に捉えた画像を容易に撮像することができる。 According to the imaging apparatus according to the seventh aspect, for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction. By performing imaging, the conditions under which the positively reflected light from the imaged object can be captured can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness in the object to be imaged.
 第8の態様に係る撮像装置によれば、例えば、より少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有する撮像対象物を十分に捉えた画像をさらに容易に撮像することができる。 According to the imaging device according to the eighth aspect, for example, imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
 第9の態様に係る撮像装置によれば、例えば、載置部上に第1C照明部を移動させても、第1C照明部が載置部に接触しにくいため、撮像対象物のサイズに合わせた距離および焦点の調整等を行うために第1C照明部を移動させやすくなる。 According to the image pickup apparatus according to the ninth aspect, for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
 第10の態様に係る撮像装置によれば、例えば、斜め上方から見て奥行き方向が長い撮像対象物を広く照明することができる。また、例えば、鉛直方向に沿った仮想軸の周囲の異なる角度において斜め上方から撮像対象物を照明することが可能な複数の発光領域を容易に配置することができる。 According to the imaging device according to the tenth aspect, for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
 第11の態様に係る撮像装置によれば、例えば、少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有する撮像対象物を十分に捉えた画像を容易に撮像することができる。 According to the imaging device according to the eleventh aspect, for example, imaging under a plurality of lighting conditions can be performed with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures an imaging object having various shapes.
 第12の態様に係る撮像装置によれば、例えば、撮像方向に近い角度の照明方向で照明を行う照明条件での撮像と、撮像方向から離れた角度の照明方向で照明を行う照明条件での撮像と、を行うことで、撮像対象物からの正反射光が捉えられる条件が変わり得る。これにより、撮像対象物における凹凸等の種々の形状を十分に捉えた画像を容易に撮像することができる。 According to the imaging device according to the twelfth aspect, for example, imaging under an illumination condition in which illumination is performed in an illumination direction at an angle close to the imaging direction and illumination under an illumination condition in which illumination is performed in an illumination direction at an angle away from the imaging direction. By performing imaging, the conditions under which the positively reflected light from the imaged object can be captured can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness in the object to be imaged.
 第13の態様に係る撮像装置によれば、例えば、より少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有する撮像対象物を十分に捉えた画像をさらに容易に撮像することができる。 According to the imaging device according to the thirteenth aspect, for example, imaging under a plurality of lighting conditions can be performed with fewer operations. Therefore, for example, it is possible to more easily capture an image that sufficiently captures an imaging object having various shapes.
 第14の態様に係る撮像装置によれば、例えば、載置部上に第1C照明部を移動させても、第1C照明部が載置部に接触しにくいため、撮像対象物のサイズに合わせた距離および焦点の調整等を行うために第1C照明部を移動させやすくなる。 According to the image pickup apparatus according to the fourteenth aspect, for example, even if the first C illumination unit is moved onto the mounting portion, the first C illumination unit does not easily come into contact with the mounting portion. It becomes easy to move the 1st C illumination unit in order to adjust the distance and the focus.
 第15の態様に係る撮像装置によれば、例えば、斜め上方から見て奥行き方向が長い撮像対象物を広く照明することができる。また、例えば、鉛直方向に沿った仮想軸の周囲の異なる角度において斜め上方から撮像対象物を照明することが可能な複数の発光領域を容易に配置することができる。 According to the imaging device according to the fifteenth aspect, for example, it is possible to widely illuminate an imaging object having a long depth direction when viewed from diagonally above. Further, for example, it is possible to easily arrange a plurality of light emitting regions capable of illuminating the imaged object from diagonally above at different angles around the virtual axis along the vertical direction.
図1(a)は、第1実施形態に係る検査システムの外観を模式的に示す斜視図である。図1(b)は、第1実施形態に係る検査システムの概略的な構成を示す図である。FIG. 1A is a perspective view schematically showing the appearance of the inspection system according to the first embodiment. FIG. 1B is a diagram showing a schematic configuration of an inspection system according to the first embodiment. 図2(a)は、第1実施形態に係る撮像装置の主要な物理的構成の一例を示す図である。図2(b)は、第1実施形態に係る撮像ユニットの物理的構成の一例を示す図である。FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the first embodiment. FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit according to the first embodiment. 図3は、検査システムの機能的構成の一例を示すブロック図である。FIG. 3 is a block diagram showing an example of the functional configuration of the inspection system. 図4は、投入装置の機能的構成の一例を示すブロック図である。FIG. 4 is a block diagram showing an example of the functional configuration of the loading device. 図5(a)は、撮像装置の機能的構成の一例を示すブロック図である。図5(b)は、第1撮像ユニットの機能的構成の一例を示すブロック図である。図5(c)は、第2撮像ユニットの機能的構成の一例を示すブロック図である。FIG. 5A is a block diagram showing an example of the functional configuration of the image pickup apparatus. FIG. 5B is a block diagram showing an example of the functional configuration of the first imaging unit. FIG. 5C is a block diagram showing an example of the functional configuration of the second imaging unit. 図6は、反転装置の機能的構成の一例を示すブロック図である。FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device. 図7は、排出装置の機能的構成の一例を示すブロック図である。FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device. 図8は、撮像装置の動作の一例を示すタイミングチャートである。FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus. 図9は、第2実施形態に係る第1撮像ユニットの物理的構成を模式的に示す図である。FIG. 9 is a diagram schematically showing the physical configuration of the first imaging unit according to the second embodiment. 図10(a)は、第1A照明部の一例を模式的に示す図である。図10(b)は、第1B照明部の一例を模式的に示す図である。図10(c)は、第1C照明部の一例を模式的に示す図である。FIG. 10A is a diagram schematically showing an example of the first A lighting unit. FIG. 10B is a diagram schematically showing an example of the first B lighting unit. FIG. 10C is a diagram schematically showing an example of the first C lighting unit. 図11は、第2実施形態に係る第1撮像ユニットの外観の一例を示す側面図である。FIG. 11 is a side view showing an example of the appearance of the first imaging unit according to the second embodiment. 図12は、第2実施形態に係る第1撮像ユニットの外観の一例を示す平面図である。FIG. 12 is a plan view showing an example of the appearance of the first imaging unit according to the second embodiment. 図13は、第2実施形態に係る第1撮像ユニットの外観の一例を示す正面図である。FIG. 13 is a front view showing an example of the appearance of the first imaging unit according to the second embodiment. 図14は、第2実施形態に係る第1撮像ユニットの機能的構成の一例を示すブロック図である。FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit according to the second embodiment. 図15は、ワークの外観の一例を示す図である。FIG. 15 is a diagram showing an example of the appearance of the work. 図16(a)は、第1C照明部で照明されたワークを第1A撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図16(b)は、第1C照明部で照明されたワークを第1B撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図16(c)は、第1C照明部で照明されたワークを第1C撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。FIG. 16A is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1A imaging unit. FIG. 16B is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1C illumination unit with the 1B imaging unit. FIG. 16C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first C illumination unit with the first C imaging unit. 図17(a)は、第1B照明部で照明されたワークを第1A撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図17(b)は、第1B照明部で照明されたワークを第1B撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図17(c)は、第1B照明部で照明されたワークを第1C撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。FIG. 17A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first A imaging unit. FIG. 17B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first B illumination unit with the first B imaging unit. FIG. 17C is a diagram showing an example of an image captured by capturing the work obtained by imaging the work illuminated by the 1B illumination unit with the 1C imaging unit. 図18(a)は、第1A照明部で照明されたワークを第1A撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図18(b)は、第1A照明部で照明されたワークを第1B撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。図18(c)は、第1A照明部で照明されたワークを第1C撮像部で撮像することで得られるワークを捉えた撮像画像の一例を示す図である。FIG. 18A is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first A imaging unit. FIG. 18B is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first B imaging unit. FIG. 18C is a diagram showing an example of an captured image that captures the work obtained by imaging the work illuminated by the first A illumination unit with the first C imaging unit. 図19(a)は、第3実施形態に係る撮像装置の主要な物理的構成の一例を示す図である。図19(b)は、第3実施形態に係る撮像装置の主要な物理的構成の一例の一部を示す平面図である。FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus according to the third embodiment. FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus according to the third embodiment. 図20(a)は、第1A照明部における上部発光領域の形状および寸法の一例を示す図である。図20(b)は、第1のワークの形状および寸法の一例を示す図である。図20(c)は、第2のワークの形状および寸法の一例を示す図である。FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region in the first A lighting unit. FIG. 20B is a diagram showing an example of the shape and dimensions of the first work. FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work.
 以下、添付の図面を参照しながら、本発明の各実施形態について説明する。各実施形態に記載されている構成要素はあくまでも例示であり、本発明の範囲をそれらのみに限定する趣旨のものではない。図面は、あくまでも模式的に示したものである。図面においては、容易に理解が可能となるように、必要に応じて各部の寸法および数が誇張または簡略化されて図示されている場合がある。また、図面においては、同様な構成および機能を有する部分に対して同じ符号が付されており、重複した説明が適宜省略されている。図1(a)から図2(a)、図9から図13、図15および図19(a)から図20(c)には、右手系のXYZ座標系が付されている。このXYZ座標系では、投入装置11の搬送部Cv1によって水平面に沿ってワークW0が搬送される方向が+X方向とされ、水平面に沿ってワークW0が搬送される方向に垂直な方向が+Y方向とされ、+X方向と+Y方向との両方に直交している重力方向が-Z方向とされている。 Hereinafter, each embodiment of the present invention will be described with reference to the accompanying drawings. The components described in each embodiment are merely examples, and the scope of the present invention is not limited to them. The drawings are only schematically shown. In the drawings, the dimensions and number of parts may be exaggerated or simplified as necessary for easy understanding. Further, in the drawings, the same reference numerals are given to parts having the same configuration and function, and duplicate explanations are appropriately omitted. A right-handed XYZ coordinate system is attached to FIGS. 1 (a) to 2 (a), FIGS. 9 to 13, 15 and 19 (a) to 20 (c). In this XYZ coordinate system, the direction in which the work W0 is conveyed along the horizontal plane by the conveying unit Cv1 of the loading device 11 is the + X direction, and the direction perpendicular to the direction in which the work W0 is conveyed along the horizontal plane is the + Y direction. The direction of gravity that is orthogonal to both the + X direction and the + Y direction is the −Z direction.
 また、本明細書では、相対的または絶対的な位置関係を示す表現(例えば「平行」「直交」「中心」等)は、特に断らない限り、その位置関係を厳密に表すのみならず、公差も含む状態を表すとともに、同程度の機能が得られる範囲で相対的に角度または距離に関して変位された状態も表すものとする。2つ以上のものが等しい状態であることを示す表現(例えば「同一」「等しい」「均質」等)は、特に断らない限り、定量的に厳密に等しい状態を表すのみならず、公差もしくは同程度の機能が得られる差が存在する状態も表すものとする。形状を示す表現(例えば「四角形状」または「円筒形状」等)は、特に断らない限り、幾何学的に厳密に形状を表すのみならず、同程度の効果が得られる範囲で、例えば凹凸または面取り等を有する形状も表すものとする。1つの構成要素を「備える」「具える」「具備する」「含む」または「有する」という表現は、他の構成要素の存在を除外する排他的表現ではない。「連結」という表現は、特に断らない限り、2つの要素が接している状態のほか、2つの要素が他の要素を挟んで離れている状態も含む表現である。 Further, in the present specification, expressions indicating relative or absolute positional relationships (for example, "parallel", "orthogonal", "center", etc.) not only strictly represent the positional relationship but also tolerances, unless otherwise specified. In addition to representing the state including, the state of being displaced relative to the angle or distance within the range in which the same function can be obtained is also represented. Expressions indicating that two or more things are equal (for example, "same", "equal", "homogeneous", etc.) not only represent quantitatively exactly equal states, but also tolerances or the same. It shall also represent a state in which there is a difference in obtaining a degree of function. Unless otherwise specified, the expression indicating the shape (for example, "square shape" or "cylindrical shape") not only expresses the shape strictly geometrically, but also, for example, unevenness or unevenness or within a range in which the same effect can be obtained. A shape having a chamfer or the like shall also be represented. The expressions "equipped", "equipped", "equipped", "included", or "have" one component are not exclusive expressions that exclude the existence of other components. Unless otherwise specified, the expression "concatenation" includes a state in which two elements are in contact with each other and a state in which the two elements are separated from each other with another element in between.
 <1.第1実施形態>
 <1-1.検査システムの構成>
 第1実施形態に係る検査システム1について、図1(a)から図8を参照しながら、説明する。図1(a)は、第1実施形態に係る検査システム1の外観を模式的に示す斜視図である。図1(b)は、第1実施形態に係る検査システム1の概略的な構成を示す図である。
<1. First Embodiment>
<1-1. Inspection system configuration>
The inspection system 1 according to the first embodiment will be described with reference to FIGS. 1A to 8A. FIG. 1A is a perspective view schematically showing the appearance of the inspection system 1 according to the first embodiment. FIG. 1B is a diagram showing a schematic configuration of the inspection system 1 according to the first embodiment.
 図1(a)および図1(b)で示されるように、検査システム1は、例えば、投入装置11と、4つの撮像装置12と、反転装置13と、排出装置14と、を備えている。より具体的には、検査システム1では、例えば、投入装置11と、1つ目の撮像装置(第1撮像装置ともいう)121と、2つ目の撮像装置(第2撮像装置ともいう)122と、反転装置13と、3つ目の撮像装置(第3撮像装置ともいう)123と、4つ目の撮像装置(第4撮像装置ともいう)124と、排出装置14と、が+X方向においてこの記載の順に連結されている状態で位置している。投入装置11、撮像装置12、反転装置13および排出装置14は、適宜「装置」と略称される。ここでは、例えば、別々に作製された複数の装置11,12,13,14を+X方向において相互に連結することで、検査システム1を製造することができる。換言すれば、例えば、1つまたは2つ以上の撮像装置12を含む2つ以上の装置を適宜組み合わせることで検査システムを製造することができる。装置11,12,13,14は、例えば、連結用の部材およびネジ等の締結部材等を用いて相互に連結することができる。 As shown in FIGS. 1A and 1B, the inspection system 1 includes, for example, a loading device 11, four imaging devices 12, a reversing device 13, and a discharging device 14. .. More specifically, in the inspection system 1, for example, the input device 11, the first image pickup device (also referred to as the first image pickup device) 121, and the second image pickup device (also referred to as the second image pickup device) 122. The reversing device 13, the third imaging device (also referred to as the third imaging device) 123, the fourth imaging device (also referred to as the fourth imaging device) 124, and the discharging device 14 are in the + X direction. It is located in a state of being connected in the order described in this description. The loading device 11, the imaging device 12, the reversing device 13, and the discharging device 14 are appropriately abbreviated as "devices". Here, for example, the inspection system 1 can be manufactured by connecting a plurality of separately manufactured devices 11, 12, 13, and 14 to each other in the + X direction. In other words, the inspection system can be manufactured, for example, by appropriately combining two or more devices including one or two or more image pickup devices 12. The devices 11, 12, 13, and 14 can be connected to each other by using, for example, a connecting member and a fastening member such as a screw.
 各装置11,12,13,14は、例えば、上部に検査の対象物(ワークともいう)W0が載置および搬送される内部空間を有する筒状の部分(筒状部ともいう)を有する。この筒状部は、例えば、+X方向に貫通するように位置している。具体的には、例えば、投入装置11は、筒状部11tbを有し、撮像装置12は、筒状部12tbを有し、反転装置13は、筒状部13tbを有し、排出装置14は、筒状部14tbを有する。そして、例えば、複数の装置11,12,13,14の間でワークW0の搬送が可能な経路(搬送経路ともいう)Rt1を成す1つの筒状の部分(筒状部)1tbを形成するように、複数の装置11,12,13,14が相互に連結されている。図1(b)では、+X方向に沿った搬送経路Rt1に沿って2点鎖線の矢印が描かれている。 Each device 11, 12, 13, 14 has, for example, a tubular portion (also referred to as a tubular portion) having an internal space on which an object to be inspected (also referred to as a work) W0 is placed and conveyed. This tubular portion is positioned so as to penetrate in the + X direction, for example. Specifically, for example, the loading device 11 has a tubular portion 11tb, the imaging device 12 has a tubular portion 12tb, the reversing device 13 has a tubular portion 13tb, and the discharging device 14 has a tubular portion 13tb. , Has a tubular portion 14 tb. Then, for example, one tubular portion (cylindrical portion) 1tb forming a path (also referred to as a transport path) Rt1 capable of transporting the work W0 between the plurality of devices 11, 12, 13, and 14 is formed. In addition, a plurality of devices 11, 12, 13, and 14 are connected to each other. In FIG. 1B, a two-dot chain line arrow is drawn along the transport path Rt1 along the + X direction.
 ここでは、例えば、筒状部1tbは、投入装置11の筒状部11tbと、第1撮像装置121の筒状部12tbと、第2撮像装置122の筒状部12tbと、反転装置13の筒状部13tbと、第3撮像装置123の筒状部12tbと、第4撮像装置124の筒状部12tbと、排出装置14の筒状部14tbと、が+X方向においてこの順に連結されている状態で構成されている。検査システム1は、例えば、投入装置11から、第1撮像装置121、第2撮像装置122、反転装置13、第3撮像装置123、第4撮像装置124および排出装置14の順に、ワークW0を搬送して、ワークW0を検査することができる。ここで、各筒状部11tb,12tb,13tb,14tbにおける+Z方向に位置する上面部および±Y方向に位置する側面部は、例えば、透明であっても透明でなくてもよい。 Here, for example, the tubular portion 1tb includes the tubular portion 11tb of the loading device 11, the tubular portion 12tb of the first imaging device 121, the tubular portion 12tb of the second imaging device 122, and the cylinder of the reversing device 13. A state in which the shape portion 13tb, the tubular portion 12tb of the third imaging device 123, the tubular portion 12tb of the fourth imaging device 124, and the tubular portion 14tb of the discharging device 14 are connected in this order in the + X direction. It is composed of. The inspection system 1 conveys the work W0 from the input device 11, for example, in the order of the first image pickup device 121, the second image pickup device 122, the inversion device 13, the third image pickup device 123, the fourth image pickup device 124, and the discharge device 14. Then, the work W0 can be inspected. Here, the upper surface portion located in the + Z direction and the side surface portion located in the ± Y direction in each of the tubular portions 11tb, 12tb, 13tb, and 14tb may or may not be transparent, for example.
 <1-1-1.投入装置の構成>
 投入装置11は、検査システム1の外部からワークW0が投入される装置である。この投入装置11は、例えば、検査システム1に含まれる複数の装置のうちのワークW0の搬送経路Rt1における最初に位置している。
<1-1-1. Input device configuration>
The loading device 11 is a device in which the work W0 is loaded from the outside of the inspection system 1. The loading device 11 is located first in the transport path Rt1 of the work W0 among the plurality of devices included in the inspection system 1, for example.
 図1(a)および図1(b)の例では、投入装置11は、ワークW0を搬送可能な搬送部Cv1であるベルトコンベアを有し、各撮像装置12は、ワークW0を搬送可能な搬送部Cv2であるベルトコンベアを有し、反転装置13は、ワークW0を搬送可能な搬送部Cv3であるベルトコンベアを有し、排出装置14は、ワークW0を搬送可能な搬送部Cv4であるベルトコンベアを有する。投入装置11の搬送部Cv1は、例えば、投入装置11と該投入装置11の外部との間でワークW0を搬送することができる。撮像装置12の搬送部Cv2は、例えば、撮像装置12と該撮像装置12の外部との間でワークW0を搬送することができる。反転装置13の搬送部Cv3は、例えば、反転装置13と該反転装置13の外部との間でワークW0を搬送することができる。排出装置14の搬送部Cv4は、例えば、排出装置14と該排出装置14の外部との間でワークW0を搬送することができてもよいし、排出装置14内における所定の位置までワークW0を搬送することができてもよい。 In the examples of FIGS. 1A and 1B, the loading device 11 has a belt conveyor which is a transport unit Cv1 capable of transporting the work W0, and each imaging device 12 transports the work W0. The reversing device 13 has a belt conveyor which is a transport unit Cv3 capable of transporting the work W0, and the discharge device 14 has a belt conveyor which is a transport unit Cv4 capable of transporting the work W0. Has. The transport unit Cv1 of the loading device 11 can transport the work W0 between the loading device 11 and the outside of the loading device 11, for example. The transport unit Cv2 of the image pickup device 12 can transport the work W0 between the image pickup device 12 and the outside of the image pickup device 12, for example. The transport unit Cv3 of the reversing device 13 can transport the work W0 between the reversing device 13 and the outside of the reversing device 13, for example. The transport unit Cv4 of the discharge device 14 may be able to transport the work W0 between the discharge device 14 and the outside of the discharge device 14, or may transfer the work W0 to a predetermined position in the discharge device 14. It may be able to be transported.
 例えば、投入装置11は、筒状部11tbのうちの撮像装置12とは逆側の-X方向の端部に開閉可能な部分(開閉部ともいう)11ocを有する。開閉部11ocは、例えば、開閉可能な扉またはシャッター等を有する。例えば、開閉部11ocを介して投入装置11にワークW0を投入することができる。例えば、作業者Op0が、投入装置11にワークW0を投入する態様が考えられる。この場合には、例えば、搬送部Cv1としてのベルトコンベアのベルト上に描画もしくは投影された目印に合わせて作業者Op0がベルトコンベアのベルト上にワークW0を載置する態様が考えられる。投入装置11では、例えば、ベルト上に載置されるワークW0を検知するセンサによって、投入装置11にワークW0が投入されたことが検知されてもよい。また、例えば、検査システム1の外部に設けられたロボット等が、ベルトコンベアのベルト上にワークW0を載置することで、投入装置11にワークW0を投入してもよい。ここで、例えば、搬送部Cv1は、搬送部Cv1としてのベルトコンベアのベルト上に載置されたワークW0を、投入装置11の+X方向の外部に位置している第1撮像装置121の搬送部Cv2(搬送部Cv21ともいう)に受け渡すことができる。 For example, the loading device 11 has a portion (also referred to as an opening / closing portion) 11oc that can be opened / closed at the end portion of the tubular portion 11tb opposite to the imaging device 12 in the −X direction. The opening / closing unit 11oc has, for example, a door or a shutter that can be opened / closed. For example, the work W0 can be loaded into the loading device 11 via the opening / closing unit 11oc. For example, it is conceivable that the worker Op0 throws the work W0 into the throwing device 11. In this case, for example, it is conceivable that the operator Op0 places the work W0 on the belt of the belt conveyor according to the mark drawn or projected on the belt of the belt conveyor as the transport unit Cv1. In the loading device 11, for example, a sensor that detects the work W0 mounted on the belt may detect that the work W0 has been loaded into the loading device 11. Further, for example, a robot or the like provided outside the inspection system 1 may load the work W0 into the loading device 11 by placing the work W0 on the belt of the belt conveyor. Here, for example, the transport unit Cv1 is a transport unit of the first imaging device 121 in which the work W0 mounted on the belt of the belt conveyor as the transport unit Cv1 is located outside the + X direction of the loading device 11. It can be delivered to Cv2 (also referred to as transport unit Cv21).
 <1-1-2.撮像装置の構成>
 撮像装置12は、例えば、ワークW0を撮像の対象物(撮像対象物ともいう)とした検査用の処理としての撮像を行うことができる。
<1-1-2. Imaging device configuration>
The imaging device 12 can perform imaging as, for example, an inspection process in which the work W0 is an imaging object (also referred to as an imaging object).
 ここで、第1撮像装置121は、例えば、投入装置11の搬送部Cv1から第1撮像装置121の搬送部Cv21に受け渡されたワークW0を対象として、検査用の処理としての撮像を行うことができる。第1撮像装置121で撮像されたワークW0は、例えば、搬送部Cv21によって第1撮像装置121から該第1撮像装置121の+X方向の外部に位置している第2撮像装置122の搬送部Cv2(搬送部Cv22ともいう)に受け渡される。第2撮像装置122は、例えば、第1撮像装置121の搬送部Cv21から第2撮像装置122の搬送部Cv22に受け渡されたワークW0を対象として、検査用の処理としての撮像を行うことができる。第2撮像装置122で撮像されたワークW0は、例えば、搬送部Cv22によって第2撮像装置122から該第2撮像装置122の+X方向の外部に位置している反転装置13の搬送部Cv3に受け渡される。第3撮像装置123は、例えば、反転装置13の搬送部Cv3から第3撮像装置123の搬送部Cv2(搬送部Cv23ともいう)に受け渡されたワークW0を対象として、検査用の処理としての撮像を行うことができる。第3撮像装置123で撮像されたワークW0は、例えば、搬送部Cv23によって第3撮像装置123から該第3撮像装置123の+X方向の外部に位置している第4撮像装置124の搬送部Cv2(搬送部Cv24ともいう)に受け渡される。第4撮像装置124は、例えば、第3撮像装置123の搬送部Cv23から第4撮像装置124の搬送部Cv24に受け渡されたワークW0を対象として、検査用の処理としての撮像を行うことができる。第4撮像装置124で撮像されたワークW0は、例えば、搬送部Cv24によって第4撮像装置124から該第4撮像装置124の+X方向の外部に位置している排出装置14の搬送部Cv4に受け渡される。 Here, the first imaging device 121 performs imaging as a processing for inspection, for example, targeting the work W0 delivered from the transport unit Cv1 of the input device 11 to the transport unit Cv21 of the first imaging device 121. Can be done. The work W0 imaged by the first imaging device 121 is, for example, the transport unit Cv2 of the second imaging device 122 located outside the first imaging device 121 in the + X direction from the first imaging device 121 by the transport unit Cv21. It is delivered to (also referred to as a transport unit Cv22). For example, the second imaging device 122 may perform imaging as a processing for inspection on the work W0 delivered from the transport unit Cv21 of the first image pickup device 121 to the transport unit Cv22 of the second image pickup device 122. it can. The work W0 imaged by the second imaging device 122 is received, for example, from the second imaging device 122 by the transport unit Cv22 to the transport unit Cv3 of the reversing device 13 located outside the second imaging device 122 in the + X direction. Passed. The third imaging device 123, for example, targets the work W0 delivered from the transport unit Cv3 of the reversing device 13 to the transport unit Cv2 (also referred to as the transport unit Cv23) of the third image pickup device 123, as a process for inspection. Imaging can be performed. The work W0 imaged by the third imaging device 123 is, for example, the transport unit Cv2 of the fourth imaging device 124 located outside the third imaging device 123 in the + X direction from the third imaging device 123 by the transport unit Cv23. It is delivered to (also referred to as a transport unit Cv24). For example, the fourth imaging device 124 may perform imaging as an inspection process for the work W0 delivered from the transport unit Cv23 of the third image pickup device 123 to the transport unit Cv24 of the fourth image pickup device 124. it can. The work W0 imaged by the fourth imaging device 124 is received, for example, by the transport unit Cv24 from the fourth image pickup device 124 to the transport unit Cv4 of the discharge device 14 located outside the fourth image pickup device 124 in the + X direction. Passed.
 図2(a)は、第1実施形態に係る撮像装置12の主要な物理的構成の一例を示す図である。図2(b)は、第1実施形態に係る撮像ユニット12sの物理的構成の一例を示す図である。ここでは、第1撮像装置121、第2撮像装置122、第3撮像装置123および第4撮像装置124は、それぞれ同様な構成を有する。 FIG. 2A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the first embodiment. FIG. 2B is a diagram showing an example of the physical configuration of the imaging unit 12s according to the first embodiment. Here, the first imaging device 121, the second imaging device 122, the third imaging device 123, and the fourth imaging device 124 each have the same configuration.
 図2(a)で示されるように、撮像装置12は、例えば、搬送部Cv2と、撮像ユニット12sと、移動機構12tと、を有する。 As shown in FIG. 2A, the image pickup apparatus 12 includes, for example, a transport unit Cv2, an image pickup unit 12s, and a moving mechanism 12t.
 搬送部Cv2は、例えば、撮像対象物としてのワークW0を載置するための部分(載置部ともいう)Sg2としての機能を有する。 The transport unit Cv2 has a function as, for example, a portion (also referred to as a mounting unit) Sg2 for mounting the work W0 as an imaging object.
 撮像ユニット12sは、例えば、撮像対象物としてのワークW0を対象とした撮像を行うことができる。第1実施形態では、撮像装置12は、2つの撮像ユニット12sを有する。具体的には、図2(a)で示されるように、撮像装置12は、2つの撮像ユニット12sとして、第1撮像ユニット12s1と、第2撮像ユニット12s2と、を有する。図2(b)で示されるように、撮像ユニット12sは、例えば、撮像部I1および照明部F1を有する。より具体的には、第1撮像ユニット12s1は、第1撮像部I11および第1照明部F11を含む。第2撮像ユニット12s2は、第2撮像部I12および第2照明部F12を含む。 The imaging unit 12s can perform imaging on the work W0 as an imaging object, for example. In the first embodiment, the image pickup apparatus 12 has two image pickup units 12s. Specifically, as shown in FIG. 2A, the image pickup apparatus 12 includes a first image pickup unit 12s1 and a second image pickup unit 12s2 as two image pickup units 12s. As shown in FIG. 2B, the image pickup unit 12s has, for example, an image pickup unit I1 and an illumination unit F1. More specifically, the first imaging unit 12s1 includes a first imaging unit I11 and a first illumination unit F11. The second imaging unit 12s2 includes a second imaging unit I12 and a second illumination unit F12.
 第1撮像部I11および第2撮像部I12のそれぞれは、例えば、電荷結合素子(Charge Coupled Device:CCD)等の撮像素子と、この撮像素子にワークW0の光像を結像させるための光学系としてのレンズ部Lz1と、を有する。第1照明部F11および第2照明部F12のそれぞれには、例えば、複数の発光ダイオード(Light Emitting Diode:LED)が2次元的に配列された面状の照明等が適用される。この場合には、例えば、第1照明部F11および第2照明部F12のそれぞれによって、ワークW0を広範囲にわたって照明することができる。図2(b)の例では、レンズ部Lz1は、照明部F1の孔部H1に挿通された状態で位置している。別の観点から言えば、レンズLz1の光軸Pi1が、孔部H1を通るように設定されている。具体的には、第1撮像部I11の第1レンズ部Lz11が、第1照明部F11の第1孔部H11に挿通された状態で位置している。別の観点から言えば、第1レンズLz11の光軸(第1光軸ともいう)Pi11が、第1孔部H11を通るように設定されている。また、第2撮像部I12の第2レンズ部Lz12が、第2照明部F12の第2孔部H12に挿通された状態で位置している。別の観点から言えば、第2レンズLz12の光軸(第2光軸ともいう)Pi12が、第2孔部H12を通るように設定されている。これにより、例えば、第1撮像部I11は、第1照明部F11によって照明されたワークW0の少なくとも一部を被写体として撮像を行うことができる。また、例えば、第2撮像部I12は、第2照明部F12によって照明されたワークW0の少なくとも一部を被写体として撮像を行うことができる。 Each of the first image pickup unit I11 and the second image pickup unit I12 has, for example, an image pickup element such as a charge-coupled device (CCD) and an optical system for forming an optical image of the work W0 on the image pickup device. The lens unit Lz1 and the like. For each of the first lighting unit F11 and the second lighting unit F12, for example, planar illumination in which a plurality of light emitting diodes (Light Emitting Diodes: LEDs) are two-dimensionally arranged is applied. In this case, for example, the work W0 can be illuminated over a wide range by each of the first illumination unit F11 and the second illumination unit F12. In the example of FIG. 2B, the lens portion Lz1 is positioned so as to be inserted into the hole portion H1 of the illumination portion F1. From another point of view, the optical axis Pi1 of the lens Lz1 is set to pass through the hole H1. Specifically, the first lens portion Lz11 of the first imaging unit I11 is positioned so as to be inserted into the first hole portion H11 of the first illumination unit F11. From another point of view, the optical axis (also referred to as the first optical axis) Pi11 of the first lens Lz11 is set to pass through the first hole portion H11. Further, the second lens portion Lz12 of the second imaging unit I12 is located in a state of being inserted into the second hole portion H12 of the second illumination unit F12. From another point of view, the optical axis (also referred to as the second optical axis) Pi12 of the second lens Lz12 is set to pass through the second hole portion H12. Thereby, for example, the first imaging unit I11 can perform imaging with at least a part of the work W0 illuminated by the first illumination unit F11 as a subject. Further, for example, the second imaging unit I12 can perform imaging with at least a part of the work W0 illuminated by the second illumination unit F12 as a subject.
 移動機構12tは、例えば、載置部Sg2に載置されたワークW0に対して撮像ユニット12sを相対的に移動させることができる。別の観点から言えば、移動機構12tは、例えば、ワークW0を載置するための載置部Sg2に対して撮像ユニット12sを相対的に移動させることができる。第1実施形態では、撮像装置12は、2つの移動機構12tを有する。具体的には、図2(a)で示されるように、撮像装置12は、2つの移動機構12tとして、第1移動機構12t1と、第2移動機構12t2と、を有する。第1移動機構12t1は、例えば、載置部Sg2に載置されたワークW0に対して第1撮像ユニット12s1を相対的に移動させることができる。別の観点から言えば、第1移動機構12t1は、例えば、ワークW0を載置するための載置部Sg2に対して第1撮像ユニット12s1を相対的に移動させることができる。第2移動機構12t2は、例えば、載置部Sg2に載置されたワークW0に対して第2撮像ユニット12s2を相対的に移動させることができる。別の観点から言えば、第2移動機構12t2は、例えば、ワークW0を載置するための載置部Sg2に対して第2撮像ユニット12s2を相対的に移動させることができる。 The moving mechanism 12t can move the imaging unit 12s relative to the work W0 mounted on the mounting portion Sg2, for example. From another point of view, the moving mechanism 12t can move the imaging unit 12s relative to, for example, the mounting portion Sg2 for mounting the work W0. In the first embodiment, the image pickup apparatus 12 has two moving mechanisms 12t. Specifically, as shown in FIG. 2A, the imaging device 12 has a first moving mechanism 12t1 and a second moving mechanism 12t2 as two moving mechanisms 12t. The first moving mechanism 12t1 can move the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, for example. From another point of view, the first moving mechanism 12t1 can move the first imaging unit 12s1 relative to, for example, the mounting portion Sg2 for mounting the work W0. The second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, for example. From another point of view, the second moving mechanism 12t2 can move the second imaging unit 12s2 relative to the mounting portion Sg2 for mounting the work W0, for example.
 このような構成が採用されれば、例えば、ワークW0に対して、第1撮像ユニット12s1と第2撮像ユニット12s2とを別々に移動させつつ、第1照明部F11および第2照明部F12のそれぞれで照明されたワークW0を第1撮像部I11および第2撮像部I12で撮像することができる。例えば、第1撮像部I11は、第1照明部F11によって照明されたワークW0、第2照明部F12によって照明されたワークW0、および第1照明部F11および第2照明部F12の双方で照明されたワークW0のそれぞれについて、撮像を行うことができる。また、例えば、第2撮像部I12も、第1照明部F11によって照明されたワークW0、第2照明部F12によって照明されたワークW0、および第1照明部F11および第2照明部F12の双方で照明されたワークW0のそれぞれについて、撮像を行うことができる。これにより、例えば、ワークW0の各部分を複数の照明条件で撮像することができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像を容易に撮像することができる。 If such a configuration is adopted, for example, the first illumination unit 12s1 and the second imaging unit 12s2 are moved separately with respect to the work W0, and the first illumination unit F11 and the second illumination unit F12, respectively. The work W0 illuminated by the above can be imaged by the first imaging unit I11 and the second imaging unit I12. For example, the first imaging unit I11 is illuminated by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and both the first illumination unit F11 and the second illumination unit F12. Imaging can be performed for each of the work W0. Further, for example, the second imaging unit I12 is also formed by both the work W0 illuminated by the first illumination unit F11, the work W0 illuminated by the second illumination unit F12, and the first illumination unit F11 and the second illumination unit F12. An image can be taken for each of the illuminated work W0. Thereby, for example, each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
 移動機構12tには、例えば、ロボットアーム等が適用される。ロボットアームには、例えば、多くの軸を基準として駆動可能なロボットアーム(多軸ロボットアームともいう)が適用される。ここで、例えば、第1移動機構12t1および第2移動機構12t2のうちの少なくとも一方の移動機構が、多軸ロボットアームであってもよい。このように、例えば、移動機構12tに多軸ロボットアームが適用されれば、ワークW0の各部分を複数の照明条件で任意の角度から撮像することができる。 For example, a robot arm or the like is applied to the moving mechanism 12t. For example, a robot arm (also referred to as a multi-axis robot arm) that can be driven with reference to many axes is applied to the robot arm. Here, for example, at least one of the first moving mechanism 12t1 and the second moving mechanism 12t2 may be a multi-axis robot arm. In this way, for example, if the multi-axis robot arm is applied to the moving mechanism 12t, each part of the work W0 can be imaged from an arbitrary angle under a plurality of lighting conditions.
 多軸ロボットアームには、例えば、基準部Pt0と、第1可動部Pt1と、第2可動部Pt2と、第3可動部Pt3と、第4可動部Pt4と、第5可動部Pt5と、第6可動部Pt6と、を有する6軸で回動可能なロボットアーム(6軸ロボットアームともいう)が適用される。この場合には、基準部Pt0は、例えば、撮像装置12のベース部Bs12等に固定されている。このベース部Bs12には、例えば、搬送部Cv2のベルトコンベアが固定されていてもよい。基準部Pt0は、例えば、+Z方向に沿った第1軸Pl1を中心として第1可動部Pt1を回動可動に保持する回動部Pr1を有する。第1可動部Pt1は、例えば、水平方向に沿った第2軸Pl2を中心として第2可動部Pt2を回動可動に保持する第2回動部Pr2を有する。第2可動部Pt2は、例えば、水平方向に沿った第3軸Pl3を中心として第3可動部Pt3を回動可動に保持する第3回動部Pr3を有する。第3可動部Pt3は、例えば、第3軸Pl3に垂直である第4軸Pl4を中心として第4可動部Pt4を回動可動に保持する第4回動部Pr4を有する。第4可動部Pt4は、例えば、第4軸Pl4に垂直である第5軸Pl5を中心として第5可動部Pt5を回動可動に保持する第5回動部Pr5を有する。第5可動部Pt5は、例えば、第5軸Pl5に垂直である第6軸Pl6を中心として第6可動部Pt6を回動可動に保持する第6回動部Pr6を有する。そして、第6可動部Pt6に撮像ユニット12sが固定された状態で位置している。 The multi-axis robot arm includes, for example, a reference portion Pt0, a first movable portion Pt1, a second movable portion Pt2, a third movable portion Pt3, a fourth movable portion Pt4, a fifth movable portion Pt5, and a third. A robot arm (also referred to as a 6-axis robot arm) that has 6 movable portions Pt6 and is rotatable on 6 axes is applied. In this case, the reference portion Pt0 is fixed to, for example, the base portion Bs12 of the image pickup apparatus 12. For example, the belt conveyor of the transport unit Cv2 may be fixed to the base portion Bs12. The reference portion Pt0 has, for example, a rotating portion Pr1 that rotatably holds the first movable portion Pt1 about the first axis Pl1 along the + Z direction. The first movable portion Pt1 has, for example, a second rotating portion Pr2 that rotatably holds the second movable portion Pt2 about the second axis Pl2 along the horizontal direction. The second movable portion Pt2 has, for example, a third rotating portion Pr3 that holds the third movable portion Pt3 rotatably around the third axis Pl3 along the horizontal direction. The third movable portion Pt3 has, for example, a fourth rotating portion Pr4 that rotatably holds the fourth movable portion Pt4 around the fourth axis Pl4 that is perpendicular to the third axis Pl3. The fourth movable portion Pt4 has, for example, a fifth rotating portion Pr5 that holds the fifth movable portion Pt5 rotatably around the fifth axis Pl5 that is perpendicular to the fourth axis Pl4. The fifth movable portion Pt5 has, for example, a sixth rotating portion Pr6 that holds the sixth movable portion Pt6 rotatably around the sixth axis Pl6 that is perpendicular to the fifth axis Pl5. The image pickup unit 12s is fixed to the sixth movable portion Pt6.
 また、第1実施形態では、第1移動機構12t1と第2移動機構12t2とが、載置部Sg2としての搬送部Cv2を挟むように位置している。これにより、例えば、ワークW0の表面のより広いエリアについて、ワークW0の各部分を複数の照明条件で容易に撮像することが可能となる。ここでは、例えば、第1移動機構12t1と第2移動機構12t2とが、載置部Sg2を挟んで対向するように位置している態様が考えられる。このような態様が採用されれば、例えば、平面視した場合にワークW0を挟んで第1撮像部I11とは逆側に位置している第2照明部F12から発せられた光のうちのワークW0上で反射された光が第1撮像部I11に入射される照明条件を、容易に実現することができる。 Further, in the first embodiment, the first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2. This makes it possible to easily image each portion of the work W0 under a plurality of illumination conditions, for example, for a wider area on the surface of the work W0. Here, for example, it is conceivable that the first moving mechanism 12t1 and the second moving mechanism 12t2 are located so as to face each other with the mounting portion Sg2 interposed therebetween. If such an aspect is adopted, for example, the work of the light emitted from the second illumination unit F12 located on the opposite side of the first imaging unit I11 with the work W0 in between when viewed in a plan view. Illumination conditions in which the light reflected on W0 is incident on the first imaging unit I11 can be easily realized.
 ここで、例えば、第1移動機構12t1による第1撮像ユニット12s1の移動と、第2移動機構12t2による第2撮像ユニット12s2の移動と、によって、第1撮像ユニット12s1および第2撮像ユニット12s2が、載置部Sg2上に載置されたワークW0を全周にわたって撮像可能であってもよい。この場合には、例えば、ワークW0の表面のさらに広いエリアについて、ワークW0の各部分を複数の照明条件で容易に撮像することができる。ここでは、ワークW0を全周にわたって撮像可能である態様には、例えば、載置部Sg2上に載置されたワークW0を、該ワークW0を通る鉛直方向(Z方向)に沿った仮想軸を中心とした周方向における360度の何れの角度からも撮像が可能である態様が含まれる。また、ワークW0を全周にわたって撮像可能な態様には、例えば、載置部Sg2上に載置されたワークW0を、載置部Sg2側を除く周囲における何れの角度からも撮像が可能であってもよい。 Here, for example, the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 cause the first imaging unit 12s1 and the second imaging unit 12s2 to move. The work W0 mounted on the mounting portion Sg2 may be able to be imaged over the entire circumference. In this case, for example, for a wider area on the surface of the work W0, each part of the work W0 can be easily imaged under a plurality of lighting conditions. Here, in an embodiment in which the work W0 can be imaged over the entire circumference, for example, the work W0 mounted on the mounting portion Sg2 is provided with a virtual axis along the vertical direction (Z direction) passing through the work W0. An aspect in which imaging is possible from any angle of 360 degrees in the circumferential direction around the center is included. Further, in a mode in which the work W0 can be imaged over the entire circumference, for example, the work W0 mounted on the mounting portion Sg2 can be imaged from any angle in the surroundings except the mounting portion Sg2 side. You may.
 <1-1-3.反転装置の構成>
 反転装置13は、例えば、ワークW0を反転させることができる。ワークW0の反転は、例えば、ワークW0の上下の反転を含む。ここで、反転装置13は、例えば、第2撮像装置122の搬送部Cv22から搬送部Cv3に受け渡されたワークW0を反転させることができる。反転装置13は、例えば、ワークW0を反転させるためにワークW0を保持することが可能な保持部13h(図6参照)と、保持部13hによってワークW0を保持させた状態で保持部13hを移動させることでワークW0を反転させることが可能な移動機構13t(図6参照)と、を有する。保持部13hには、例えば、ワークW0を挟持することが可能な2本以上の指部を有するハンド等が適用される。反転装置13の移動機構13tには、例えば、撮像装置12の移動機構12tと同様にロボットアーム等が適用される。ここで、反転装置13は、例えば、1つの保持部13hに対して1つの移動機構13tを有していればよい。より具体的には、反転モジュール13は、例えば、1つの保持部13hが存在する場合には、1つの移動機構13tを有していればよいし、2つ以上の保持部13hが存在する場合には、2つ以上の移動機構13tを有していればよい。
<1-1-3. Inversion device configuration>
The reversing device 13 can reverse the work W0, for example. The inversion of the work W0 includes, for example, an upside-down inversion of the work W0. Here, the reversing device 13 can reverse the work W0 delivered from the transporting unit Cv22 of the second imaging device 122 to the transporting unit Cv3, for example. The reversing device 13 moves, for example, a holding portion 13h (see FIG. 6) capable of holding the work W0 in order to reverse the work W0, and a holding portion 13h in a state where the holding portion 13h holds the work W0. It has a moving mechanism 13t (see FIG. 6) capable of reversing the work W0 by causing the work W0 to be inverted. For example, a hand having two or more fingers capable of sandwiching the work W0 or the like is applied to the holding portion 13h. For example, a robot arm or the like is applied to the moving mechanism 13t of the reversing device 13 in the same manner as the moving mechanism 12t of the imaging device 12. Here, the reversing device 13 may have, for example, one moving mechanism 13t for one holding portion 13h. More specifically, for example, when one holding portion 13h is present, the reversing module 13 may have one moving mechanism 13t, and when two or more holding portions 13h are present. May have two or more moving mechanisms 13t.
 <1-1-4.排出装置の構成>
 排出装置14は、例えば、検査システム1の内部から検査システム1の外部にワークW0を排出するための装置である。この排出装置14は、例えば、検査システム1に含まれる1つまたは2つ以上の撮像装置12を含む2つ以上のモジュールのうちのワークW0の搬送経路Rt1における最後の部分に位置している。排出装置14は、例えば、筒状部14tbのうちの撮像装置12とは逆側の+X方向の端部に開閉可能な部分(開閉部)14ocを有する。開閉部14ocは、例えば、開閉可能な扉またはシャッター等を有する。ワークW0は、例えば、開閉部14ocを介して排出装置14の外部に排出される。例えば、作業者Op0が、排出装置14の外部にワークW0を排出する態様が考えられる。また、例えば、検査システム1の外部に設けられたロボット等が、排出装置14の内部から外部にワークW0を排出してもよい。
<1-1-4. Discharge device configuration>
The discharge device 14 is, for example, a device for discharging the work W0 from the inside of the inspection system 1 to the outside of the inspection system 1. The discharge device 14 is located, for example, at the last portion of the work W0 in the transport path Rt1 of two or more modules including one or more image pickup devices 12 included in the inspection system 1. The discharge device 14 has, for example, a portion (opening / closing portion) 14oc of the tubular portion 14tb that can be opened / closed at an end portion in the + X direction opposite to the imaging device 12. The opening / closing unit 14oc has, for example, a door or a shutter that can be opened / closed. The work W0 is discharged to the outside of the discharge device 14 via, for example, the opening / closing portion 14oc. For example, it is conceivable that the worker Op0 discharges the work W0 to the outside of the discharge device 14. Further, for example, a robot or the like provided outside the inspection system 1 may discharge the work W0 from the inside of the discharge device 14 to the outside.
 <1-2.検査システムの機能的構成>
 図3から図7は、第1実施形態に係る検査システム1の機能的構成の一例を示すブロック図である。図3は、検査システム1の全体の機能的構成の一例を模式的に示すブロック図である。図4は、検査システム1の全体の機能的構成のうちの投入装置11の機能的構成の一例を示すブロック図である。図5は、検査システム1の全体の機能的構成のうちの撮像装置12の機能的構成の一例を示すブロック図である。図6は、検査システム1の全体の機能的構成のうちの反転装置13の機能的構成の一例を示すブロック図である。図7は、検査システム1の全体の機能的構成のうちの排出装置14の機能的構成の一例を示すブロック図である。
<1-2. Functional configuration of inspection system>
3 to 7 are block diagrams showing an example of the functional configuration of the inspection system 1 according to the first embodiment. FIG. 3 is a block diagram schematically showing an example of the overall functional configuration of the inspection system 1. FIG. 4 is a block diagram showing an example of the functional configuration of the input device 11 in the overall functional configuration of the inspection system 1. FIG. 5 is a block diagram showing an example of the functional configuration of the imaging device 12 in the overall functional configuration of the inspection system 1. FIG. 6 is a block diagram showing an example of the functional configuration of the reversing device 13 in the overall functional configuration of the inspection system 1. FIG. 7 is a block diagram showing an example of the functional configuration of the discharge device 14 in the overall functional configuration of the inspection system 1.
 <1-2-1.投入装置の機能的構成>
 図4で示されるように、投入装置11は、例えば、配線Wr1を介して電気的に接続された、統括制御部C0と、入力部11iと、搬送制御部Cc1と、接続部11hと、を有する。また、投入装置11は、例えば、統括制御部C0に接続された出力部11dと、搬送制御部Cc1に接続された搬送部Cv1と、を有する。
<1-2-1. Functional configuration of input device>
As shown in FIG. 4, the closing device 11 connects, for example, the integrated control unit C0, the input unit 11i, the transport control unit Cc1, and the connection unit 11h, which are electrically connected via the wiring Wr1. Have. Further, the input device 11 has, for example, an output unit 11d connected to the integrated control unit C0 and a transport unit Cv1 connected to the transport control unit Cc1.
 統括制御部C0は、例えば、検査システム1の動作を統括して制御することができる。統括制御部C0は、例えば、演算部、メモリおよび記憶部等を有する。演算部は、例えば、1つ以上の中央演算ユニット(Central Processing Unit:CPU)等で構成される。メモリは、例えば、RAM(Random Access Memory)等の揮発性の記憶媒体で構成される。記憶部は、例えば、ハードディスクドライブ(Hard Disk Drive:HDD)またはソリッドステートドライブ(Solid State Drive:SSD)等の不揮発性の記憶媒体で構成される。記憶部は、例えば、プログラムおよび各種情報等を記憶することができる。演算部は、例えば、記憶部に記憶されたプログラムを読み込んで実行することで、各種の機能を実現することができる。このとき、RAMは、例えば、ワークスペースとして使用され、一時的に生成もしくは取得される情報等を記憶する。統括制御部C0で実現される機能的構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで実現されてもよい。 The integrated control unit C0 can control the operation of the inspection system 1 in an integrated manner, for example. The integrated control unit C0 has, for example, a calculation unit, a memory, a storage unit, and the like. The arithmetic unit is composed of, for example, one or more central processing units (CPU) and the like. The memory is composed of, for example, a volatile storage medium such as RAM (Random Access Memory). The storage unit is composed of a non-volatile storage medium such as a hard disk drive (HDD) or a solid state drive (SSD), for example. The storage unit can store, for example, a program, various types of information, and the like. The arithmetic unit can realize various functions by reading and executing a program stored in the storage unit, for example. At this time, the RAM is used as a workspace, for example, and stores information that is temporarily generated or acquired. At least a part of the functional configuration realized by the integrated control unit C0 may be realized by hardware such as a dedicated electronic circuit.
 入力部11iは、例えば、作業者Op0の動作に応答して、各種の情報を入力することができる。入力部11iには、例えば、ボタンもしくはタッチパネル等の操作部または音声入力が可能なマイク部等が適用される。作業者Op0の動作は、例えば、操作および発声等の動作を含む。 The input unit 11i can input various information in response to the operation of the worker Op0, for example. For example, an operation unit such as a button or a touch panel, a microphone unit capable of voice input, or the like is applied to the input unit 11i. The operation of the worker Op0 includes, for example, operations such as operation and vocalization.
 出力部11dは、例えば、統括制御部C0からの情報に基づき、作業者Op0が認識可能な態様で情報を出力することができる。出力部11dには、例えば、情報を可視的に出力する表示部もしくはランプおよび情報を可聴的に出力するスピーカー等が適用される。 The output unit 11d can output information in a manner recognizable by the operator Op0, for example, based on the information from the integrated control unit C0. For example, a display unit or a lamp that visually outputs information, a speaker that outputs information audibly, and the like are applied to the output unit 11d.
 搬送制御部Cc1は、例えば、搬送部Cv1の動作を制御することができる。搬送制御部Cc1は、例えば、演算部、メモリおよび記憶部を含むコンピュータと同様な構成を有する。搬送制御部Cc1は、例えば、記憶部内のプログラムを演算部で実行することで、搬送制御部Cc1の機能を実現することができる。搬送制御部Cc1は、例えば、ベルトコンベアにおける少なくとも1つのプーリーを回転させるモータ等の駆動部の動作を制御することで、搬送部Cv1の動作を制御することができる。搬送制御部Cc1で実現される機能的構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで実現されてもよい。 The transport control unit Cc1 can control the operation of the transport unit Cv1, for example. The transport control unit Cc1 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit. The transfer control unit Cc1 can realize the function of the transfer control unit Cc1 by, for example, executing the program in the storage unit in the calculation unit. The transport control unit Cc1 can control the operation of the transport unit Cv1 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example. At least a part of the functional configuration realized by the transport control unit Cc1 may be realized by hardware such as a dedicated electronic circuit.
 接続部11hは、例えば、検査システム1を構成する複数の装置のうちの投入装置11以外の装置と電気的に接続する部分である。接続部11hは、例えば、複数の装置の配線Wr2が別々に電気的に接続されるハブ方式のものであっても、複数の装置の配線Wr2が電気的に直列に接続される方式のものであってもよい。 The connection portion 11h is, for example, a portion that electrically connects to a device other than the input device 11 among a plurality of devices constituting the inspection system 1. The connection portion 11h is, for example, a hub type in which the wirings Wr2 of a plurality of devices are electrically connected separately, but a method in which the wirings Wr2 of the plurality of devices are electrically connected in series. There may be.
 <1-2-2.撮像装置の機能的構成>
 第1撮像装置121、第2撮像装置122、第3撮像装置123および第4撮像装置124は、それぞれ同一の機能的構成を有する。
<1-2-2. Functional configuration of image pickup device>
The first image pickup device 121, the second image pickup device 122, the third image pickup device 123, and the fourth image pickup device 124 each have the same functional configuration.
 図5(a)で示されるように、撮像装置12は、例えば、配線Wr2を介して相互に電気的に接続された、搬送制御部Cc2と、撮像制御部Cs2と、移動制御部Ct2と、を有する。また、撮像装置12は、例えば、搬送制御部Cc2に接続された搬送部Cv2と、撮像制御部Cs2に接続された撮像ユニット12sと、移動制御部Ct2に接続された移動機構12tと、を有する。 As shown in FIG. 5A, the image pickup apparatus 12 includes, for example, a transport control unit Cc2, an image pickup control unit Cs2, and a movement control unit Ct2, which are electrically connected to each other via wiring Wr2. Has. Further, the image pickup apparatus 12 includes, for example, a transfer unit Cv2 connected to the transfer control unit Cc2, an image pickup unit 12s connected to the image pickup control unit Cs2, and a movement mechanism 12t connected to the movement control unit Ct2. ..
 図5(a)の例では、撮像装置12は、2つの撮像制御部Cs2と、2つの移動制御部Ct2と、を有する。2つの撮像制御部Cs2は、例えば、1つ目の撮像制御部Cs2(第1撮像制御部Cs21ともいう)と、2つ目の撮像制御部Cs2(第2撮像制御部Cs22ともいう)と、を含む。2つの移動制御部Ct2は、例えば、1つ目の移動制御部Ct2(第1移動制御部Ct21ともいう)および2つ目の移動制御部Ct2(第2移動制御部Ct22ともいう)を含む。そして、撮像装置12は、第1撮像ユニット12s1と第2撮像ユニット12s2とを含む2つの撮像ユニット12sを有し、第1移動機構12t1と第2移動機構12t2とを含む2つの移動機構12tを有する。ここでは、例えば、第1撮像制御部Cs21に第1撮像ユニット12s1が接続され、第2撮像制御部Cs22に第2撮像ユニット12s2が接続されている。また、例えば、第1移動制御部Ct21に第1移動機構12t1が接続され、第2移動制御部Ct22に第2移動機構12t2が接続されている。ここで、第1撮像ユニット12s1は、図5(b)で示されるように、第1撮像部I11と第1照明部F11とを含み、第2撮像ユニット12s2は、図5(c)で示されるように、第2撮像部I12と第2照明部F12とを含む。 In the example of FIG. 5A, the image pickup apparatus 12 has two image pickup control units Cs2 and two movement control units Ct2. The two imaging control units Cs2 include, for example, a first imaging control unit Cs2 (also referred to as a first imaging control unit Cs21) and a second imaging control unit Cs2 (also referred to as a second imaging control unit Cs22). including. The two movement control units Ct2 include, for example, a first movement control unit Ct2 (also referred to as a first movement control unit Ct21) and a second movement control unit Ct2 (also referred to as a second movement control unit Ct22). The image pickup apparatus 12 has two image pickup units 12s including a first image pickup unit 12s1 and a second image pickup unit 12s2, and has two movement mechanisms 12t including a first movement mechanism 12t1 and a second movement mechanism 12t2. Have. Here, for example, the first imaging unit 12s1 is connected to the first imaging control unit Cs21, and the second imaging unit 12s2 is connected to the second imaging control unit Cs22. Further, for example, the first movement mechanism 12t1 is connected to the first movement control unit Ct21, and the second movement mechanism 12t2 is connected to the second movement control unit Ct22. Here, the first image pickup unit 12s1 includes the first image pickup unit I11 and the first illumination unit F11 as shown in FIG. 5 (b), and the second image pickup unit 12s2 is shown in FIG. 5 (c). The second imaging unit I12 and the second illumination unit F12 are included.
 搬送制御部Cc2、撮像制御部Cs2および移動制御部Ct2のそれぞれは、例えば、演算部とメモリと記憶部とを含むコンピュータと同様な構成を有する。 Each of the transport control unit Cc2, the image pickup control unit Cs2, and the movement control unit Ct2 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
 搬送制御部Cc2は、例えば、記憶部内のプログラムを演算部で実行することで、搬送制御部Cc2の機能を実現することができる。搬送制御部Cc2は、例えば、ベルトコンベアにおける少なくとも1つのプーリーを回転させるモータ等の駆動部の動作を制御することで、搬送部Cv2の動作を制御することができる。搬送制御部Cc2で実現される機能的構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで構成されてもよい。 The transfer control unit Cc2 can realize the function of the transfer control unit Cc2 by, for example, executing the program in the storage unit in the calculation unit. The transport control unit Cc2 can control the operation of the transport unit Cv2 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example. At least a part of the functional configuration realized by the transport control unit Cc2 may be configured by hardware such as a dedicated electronic circuit, for example.
 撮像制御部Cs2は、例えば、記憶部内のプログラムを演算部で実行することで、撮像制御部Cs2の機能を実現することができる。撮像制御部Cs2は、例えば、撮像ユニット12sの動作を制御するとともに、撮像ユニット12sによるワークW0の撮像によって得られる情報(撮像情報ともいう)を取得することができる。例えば、第1撮像制御部Cs21は、第1撮像ユニット12s1の動作を制御するとともに、第1撮像ユニット12s1によるワークW0の撮像によって得られる撮像情報を取得することができる。具体的には、第1撮像制御部Cs21は、例えば、第1照明部F11の発光および第1撮像部I11の撮像の各タイミングを制御することができる。また、例えば、第2撮像制御部Cs22は、第2撮像ユニット12s2の動作を制御するとともに、第2撮像ユニット12s2によるワークW0の撮像によって得られる撮像情報を取得することができる。具体的には、例えば、第2撮像制御部Cs22は、第2照明部F12の発光および第2撮像部I12の撮像の各タイミングを制御することができる。ここで、例えば、統括制御部C0から第1撮像制御部Cs21および第2撮像制御部Cs22に対する制御信号によって、第1撮像ユニット12s1と第2撮像ユニット12s2とが同期して動作し得る。例えば、第1撮像制御部Cs21と第2撮像制御部Cs22との間における信号の送受信によって、第1撮像ユニット12s1と第2撮像ユニット12s2とが同期して動作してもよい。 The image pickup control unit Cs2 can realize the function of the image pickup control unit Cs2 by, for example, executing a program in the storage unit in the calculation unit. The image pickup control unit Cs2 can, for example, control the operation of the image pickup unit 12s and acquire information (also referred to as image pickup information) obtained by imaging the work W0 by the image pickup unit 12s. For example, the first image pickup control unit Cs21 can control the operation of the first image pickup unit 12s1 and acquire the image pickup information obtained by the image pickup of the work W0 by the first image pickup unit 12s1. Specifically, the first imaging control unit Cs21 can control, for example, the timing of light emission of the first lighting unit F11 and the timing of imaging of the first imaging unit I11. Further, for example, the second image pickup control unit Cs22 can control the operation of the second image pickup unit 12s2 and acquire the image pickup information obtained by the image pickup of the work W0 by the second image pickup unit 12s2. Specifically, for example, the second imaging control unit Cs22 can control the timing of each of the light emission of the second illumination unit F12 and the imaging of the second imaging unit I12. Here, for example, the first imaging unit 12s1 and the second imaging unit 12s2 can operate in synchronization with the control signals from the integrated control unit C0 to the first imaging control unit Cs21 and the second imaging control unit Cs22. For example, the first imaging unit 12s1 and the second imaging unit 12s2 may operate in synchronization with each other by transmitting and receiving signals between the first imaging control unit Cs21 and the second imaging control unit Cs22.
 撮像制御部Cs2は、例えば、ワークW0に係る撮像情報をそのままあるいは各種の情報処理を施した上で配線Wr2および配線Wr1等を介して統括制御部C0に出力することができる。これにより、ワークW0を対象とした撮像の結果としての撮像情報が取得され得る。ここで、例えば、統括制御部C0が出力部11dに撮像情報に基づく画像を表示させ、その画像を作業者Op0が目視することでワークW0の外観を検査してもよいし、統括制御部C0が撮像情報に係る画像とワークW0の少なくとも一部に係る標準的な画像とを比較することでワークW0の外観を検査する演算を行ってもよい。ここで、例えば、撮像制御部Cs2が、ワークW0の外観を検査する演算を行い、その演算の結果を示す情報を統括制御部C0に送ってもよい。撮像制御部Cs2で実現される機能的構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで構成されてもよい。 The image pickup control unit Cs2 can output, for example, the image pickup information related to the work W0 to the integrated control unit C0 via the wiring Wr2 and the wiring Wr1 after performing various information processing as it is. As a result, the imaging information as a result of imaging the work W0 can be acquired. Here, for example, the integrated control unit C0 may display an image based on the imaging information on the output unit 11d, and the operator Op0 may visually inspect the image to inspect the appearance of the work W0, or the integrated control unit C0. May perform an operation to inspect the appearance of the work W0 by comparing the image related to the imaging information with the standard image related to at least a part of the work W0. Here, for example, the imaging control unit Cs2 may perform an operation for inspecting the appearance of the work W0, and may send information indicating the result of the operation to the integrated control unit C0. At least a part of the functional configuration realized by the image pickup control unit Cs2 may be configured by hardware such as a dedicated electronic circuit, for example.
 移動制御部Ct2は、例えば、記憶部内のプログラムを演算部で実行することで、移動制御部Ct2の機能を実現することができる。移動制御部Ct2は、例えば、移動機構12tの動作を制御することができる。例えば、第1移動制御部Ct21は、第1移動機構12t1の動作を制御することができる。また、例えば、第2移動制御部Ct22は、第2移動機構12t2の動作を制御することができる。ここでは、例えば、第1移動制御部Ct21は、載置部Sg2上に載置されたワークW0に対する第1撮像ユニット12s1の相対的な位置を移動させることで、第1撮像ユニット12s1によってワークW0の複数箇所について撮像を行うように制御することができる。また、例えば、第2移動制御部Ct22は、載置部Sg2上に載置されたワークW0に対する第2撮像ユニット12s2の相対的な位置を移動させることで、第2撮像ユニット12s2によってワークW0の複数箇所について撮像を行うように制御することができる。移動制御部Ct2で実現される機能的な構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで構成されてもよい。 The movement control unit Ct2 can realize the function of the movement control unit Ct2 by, for example, executing the program in the storage unit in the calculation unit. The movement control unit Ct2 can control the operation of the movement mechanism 12t, for example. For example, the first movement control unit Ct21 can control the operation of the first movement mechanism 12t1. Further, for example, the second movement control unit Ct22 can control the operation of the second movement mechanism 12t2. Here, for example, the first movement control unit Ct21 moves the position of the first imaging unit 12s1 relative to the work W0 mounted on the mounting portion Sg2, so that the work W0 is moved by the first imaging unit 12s1. It is possible to control the imaging of a plurality of locations. Further, for example, the second movement control unit Ct22 moves the position of the second imaging unit 12s2 relative to the work W0 mounted on the mounting portion Sg2, so that the second imaging unit 12s2 moves the work W0. It is possible to control so as to perform imaging at a plurality of locations. At least a part of the functional configuration realized by the movement control unit Ct2 may be configured by hardware such as a dedicated electronic circuit, for example.
 <1-2-3.反転装置の機能的構成>
 図6で示されるように、反転装置13は、例えば、配線Wr2を介して相互に電気的に接続された、搬送制御部Cc3と、反転制御部Cr3と、を有する。また、反転装置13は、例えば、搬送制御部Cc3に接続された搬送部Cv3と、反転制御部Cr3に接続された保持部13hおよび移動機構13tと、を有する。図6の例では、反転装置13は、1つの反転制御部Cr3を有する。ここで、例えば、反転装置13が、2つの保持部13hおよび2つの移動機構13tと、2つの反転制御部Cr3と、を有していてもよい。
<1-2-3. Functional configuration of reversing device>
As shown in FIG. 6, the reversing device 13 includes, for example, a transfer control unit Cc3 and a reversing control unit Cr3 that are electrically connected to each other via the wiring Wr2. Further, the reversing device 13 includes, for example, a transport unit Cv3 connected to the transport control unit Cc3, a holding unit 13h connected to the reversing control unit Cr3, and a moving mechanism 13t. In the example of FIG. 6, the reversing device 13 has one reversing control unit Cr3. Here, for example, the reversing device 13 may have two holding units 13h, two moving mechanisms 13t, and two reversing control units Cr3.
 搬送制御部Cc3および反転制御部Cr3のそれぞれは、例えば、演算部とメモリと記憶部とを含むコンピュータと同様な構成を有する。 Each of the transport control unit Cc3 and the inversion control unit Cr3 has a configuration similar to that of a computer including, for example, a calculation unit, a memory, and a storage unit.
 搬送制御部Cc3は、例えば、記憶部内のプログラムを演算部で実行することで、搬送制御部Cc3の機能を実現することができる。搬送制御部Cc3は、例えば、ベルトコンベアにおける少なくとも1つのプーリーを回転させるモータ等の駆動部の動作を制御することで、搬送部Cv3の動作を制御することができる。搬送制御部Cc3で実現される機能的構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで構成されてもよい。 The transfer control unit Cc3 can realize the function of the transfer control unit Cc3 by, for example, executing the program in the storage unit in the calculation unit. The transport control unit Cc3 can control the operation of the transport unit Cv3 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example. At least a part of the functional configuration realized by the transport control unit Cc3 may be configured by hardware such as a dedicated electronic circuit, for example.
 反転制御部Cr3は、例えば、記憶部内のプログラムを演算部で実行することで、反転制御部Cr3の機能を実現することができる。反転制御部Cr3は、例えば、保持部13hおよび移動機構13tの動作を制御することができる。具体的には、例えば、反転制御部Cr3は、保持部13hによってワークW0を挟持等によって保持させ、ワークW0を保持している状態の保持部13hを移動機構13tによって移動させることで、ワークW0を上下反転させることができる。これにより、例えば、第1撮像装置121および第2撮像装置122においてワークW0の表(おもて)面を対象とした撮像を行い、第3撮像装置123および第4撮像装置124においてワークW0の裏面を対象とした撮像を行うことができる。 The inversion control unit Cr3 can realize the function of the inversion control unit Cr3 by, for example, executing the program in the storage unit in the calculation unit. The inversion control unit Cr3 can control the operation of the holding unit 13h and the moving mechanism 13t, for example. Specifically, for example, the reversing control unit Cr3 holds the work W0 by holding the work W0 by the holding unit 13h, and moves the holding unit 13h in the state of holding the work W0 by the moving mechanism 13t, thereby moving the work W0. Can be turned upside down. As a result, for example, the first imaging device 121 and the second imaging device 122 perform imaging on the front surface of the work W0, and the third imaging device 123 and the fourth imaging device 124 perform imaging of the work W0. Imaging can be performed on the back surface.
 <1-2-4.排出装置の機能的構成>
 図7で示されるように、排出装置14は、例えば、配線Wr2に電気的に接続された搬送制御部Cc4と、この搬送制御部Cc4に接続された搬送部Cv4と、を有する。搬送制御部Cc4は、例えば、演算部とメモリと記憶部とを含むコンピュータと同様な構成を有する。搬送制御部Cc4は、例えば、記憶部内のプログラムを演算部で実行することで、搬送制御部Cc4の機能を実現することができる。搬送制御部Cc4は、例えば、ベルトコンベアにおける少なくとも1つのプーリーを回転させるモータ等の駆動部の動作を制御することで、搬送部Cv4の動作を制御することができる。搬送制御部Cc4で実現される機能的な構成の少なくとも一部は、例えば、専用の電子回路等のハードウェアで構成されてもよい。
<1-2-4. Functional configuration of discharge device>
As shown in FIG. 7, the discharge device 14 has, for example, a transfer control unit Cc4 electrically connected to the wiring Wr2 and a transfer unit Cv4 connected to the transfer control unit Cc4. The transport control unit Cc4 has, for example, a configuration similar to that of a computer including a calculation unit, a memory, and a storage unit. The transfer control unit Cc4 can realize the function of the transfer control unit Cc4 by, for example, executing the program in the storage unit in the calculation unit. The transport control unit Cc4 can control the operation of the transport unit Cv4 by controlling the operation of a drive unit such as a motor that rotates at least one pulley on the belt conveyor, for example. At least a part of the functional configuration realized by the transport control unit Cc4 may be configured by hardware such as a dedicated electronic circuit, for example.
 <1-3.撮像装置の動作>
 図8は、撮像装置12の動作の一例を示すタイミングチャートである。図8では、横軸が時刻を示し、第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれの動作のタイミングが示されている。ここでは、ワークW0のうちのX方向における位置を示す座標値がX1,X2,X3,・・・である部分が、この記載の順に撮像画像の略中央で捉えられるように、第1移動機構12t1および第2移動機構12t2によって第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれのX方向における位置を示す座標値がX1,X2,X3,・・・の順に変更される例を挙げて説明する。ここでは、時刻が時刻t0から時刻t9の順に経過している期間について説明する。
<1-3. Operation of the image pickup device>
FIG. 8 is a timing chart showing an example of the operation of the image pickup apparatus 12. In FIG. 8, the horizontal axis indicates the time, and the timing of each operation of the first imaging unit 12s1 and the second imaging unit 12s2 is indicated. Here, the first moving mechanism is such that the portion of the work W0 whose coordinate values indicating the position in the X direction are X1, X2, X3, ... Is captured in the substantially center of the captured image in the order of this description. An example will be described in which the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are changed in the order of X1, X2, X3, ... By the 12t1 and the second moving mechanism 12t2. To do. Here, the period in which the time elapses in the order of time t0 to time t9 will be described.
 まず、時刻t0から時刻t1の期間において、第1撮像ユニット12s1のX方向における位置を示す座標値がX1である状態で、第1撮像ユニット12s1が、第1照明部F11によってワークW0を照明しながら第1撮像部I11によるワークW0の撮像(撮像1aともいう)を行う。 First, in the period from time t0 to time t1, the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X1. At the same time, the first imaging unit I11 captures the work W0 (also referred to as imaging 1a).
 次に、時刻t1から時刻t2の期間において、第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれのX方向における位置を示す座標値がX1である状態で、第1照明部F11および第2照明部F12の双方によってワークW0を照明しながら第1撮像ユニット12s1が第1撮像部I11によるワークW0の撮像(撮像1bともいう)を行うとともに第2撮像ユニット12s2が第2撮像部I12によるワークW0の撮像(撮像1cともいう)を行う。また、時刻t1から時刻t2の期間において、第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれのX方向における位置を示す座標値がX1である状態で、第2照明部F12によってワークW0を照明しながら第1撮像部I11によるワークW0の撮像(撮像1dともいう)を行うとともに第1照明部F11によってワークW0を照明しながら第2撮像部I12によるワークW0の撮像(撮像1eともいう)を行う。 Next, in the period from time t1 to time t2, the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1. The first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 1b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 1c). Further, in the period from time t1 to time t2, the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X1. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 1d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 1e) while the work W0 is illuminated by the first lighting unit F11. Do.
 次に、時刻t2から時刻t4の期間において、第1撮像ユニット12s1が、第1移動機構12t1によって、X方向における位置を示す座標値がX1からX2に変更されるように、X方向に移動する。 Next, in the period from time t2 to time t4, the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the first moving mechanism 12t1. ..
 このとき、時刻t2から時刻t3の期間において、第2撮像ユニット12s2のX方向における位置を示す座標値がX1である状態で、第2撮像ユニット12s2が、第2照明部F12によってワークW0を照明しながら第2撮像部I12によるワークW0の撮像(撮像1fともいう)を行う。 At this time, in the period from time t2 to time t3, the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X1. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 1f).
 そして、時刻t3から時刻t5の期間において、第2撮像ユニット12s2が、第2移動機構12t2によって、X方向における位置を示す座標値がX1からX2に変更されるように、X方向に移動する。 Then, in the period from time t3 to time t5, the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X1 to X2 by the second moving mechanism 12t2.
 このとき、時刻t4から時刻t5の期間において、第1撮像ユニット12s1のX方向における位置を示す座標値がX2である状態で、第1撮像ユニット12s1が、第1照明部F11によってワークW0を照明しながら第1撮像部I11によるワークW0の撮像(撮像2aともいう)を行う。 At this time, in the period from time t4 to time t5, the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X2. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 2a).
 次に、時刻t5から時刻t6の期間において、第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれのX方向における位置を示す座標値がX2である状態で、第1照明部F11および第2照明部F12の双方によってワークW0を照明しながら第1撮像ユニット12s1が第1撮像部I11によるワークW0の撮像(撮像2bともいう)を行うとともに第2撮像ユニット12s2が第2撮像部I12によるワークW0の撮像(撮像2cともいう)を行う。また、時刻t5から時刻t6の期間において、第1撮像ユニット12s1および第2撮像ユニット12s2のそれぞれのX方向における位置を示す座標値がX2である状態で、第2照明部F12によってワークW0を照明しながら第1撮像部I11によるワークW0の撮像(撮像2dともいう)を行うとともに第1照明部F11によってワークW0を照明しながら第2撮像部I12によるワークW0の撮像(撮像2eともいう)を行う。 Next, in the period from time t5 to time t6, the first illumination unit F11 and the second illumination unit F11 and the second illumination are in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2. The first imaging unit 12s1 images the work W0 by the first imaging unit I11 (also referred to as imaging 2b) while illuminating the work W0 by both units F12, and the second imaging unit 12s2 performs the work W0 by the second imaging unit I12. (Also referred to as imaging 2c). Further, in the period from time t5 to time t6, the work W0 is illuminated by the second illumination unit F12 in a state where the coordinate values indicating the positions of the first imaging unit 12s1 and the second imaging unit 12s2 in the X direction are X2. While the work W0 is imaged by the first imaging unit I11 (also referred to as imaging 2d), the work W0 is imaged by the second imaging unit I12 (also referred to as imaging 2e) while the work W0 is illuminated by the first lighting unit F11. Do.
 次に、時刻t6から時刻t8の期間において、第1撮像ユニット12s1が、第1移動機構12t1によって、X方向における位置を示す座標値がX2からX3に変更されるように、X方向に移動する。 Next, in the period from time t6 to time t8, the first imaging unit 12s1 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the first moving mechanism 12t1. ..
 このとき、時刻t6から時刻t7の期間において、第2撮像ユニット12s2のX方向における位置を示す座標値がX2である状態で、第2撮像ユニット12s2が、第2照明部F12によってワークW0を照明しながら第2撮像部I12によるワークW0の撮像(撮像2fともいう)を行う。 At this time, in the period from time t6 to time t7, the second imaging unit 12s2 illuminates the work W0 by the second illumination unit F12 in a state where the coordinate value indicating the position of the second imaging unit 12s2 in the X direction is X2. While doing so, the second imaging unit I12 captures the work W0 (also referred to as imaging 2f).
 そして、時刻t7から時刻t9の期間において、第2撮像ユニット12s2が、第2移動機構12t2によって、X方向における位置を示す座標値がX2からX3に変更されるように、X方向に移動する。 Then, in the period from time t7 to time t9, the second imaging unit 12s2 moves in the X direction so that the coordinate value indicating the position in the X direction is changed from X2 to X3 by the second moving mechanism 12t2.
 このとき、時刻t8から時刻t9の期間において、第1撮像ユニット12s1のX方向における位置を示す座標値がX3である状態で、第1撮像ユニット12s1が、第1照明部F11によってワークW0を照明しながら第1撮像部I11によるワークW0の撮像(撮像3aともいう)を行う。 At this time, in the period from time t8 to time t9, the first imaging unit 12s1 illuminates the work W0 by the first illumination unit F11 in a state where the coordinate value indicating the position of the first imaging unit 12s1 in the X direction is X3. While doing so, the first imaging unit I11 captures the work W0 (also referred to as imaging 3a).
 ここでは、例えば、統括制御部C0が、第1撮像ユニット12s1と第2撮像ユニット12s2とが交互に移動するように、第1移動機構12t1および第2移動機構12t2の動作を制御する。具体的には、例えば、第1撮像ユニット12s1および第2撮像ユニット12s2のうちの撮像および照明が完了した第1撮像ユニット12s1を先に移動させ、第2撮像ユニット12s2の撮像および照明が完了した時点で第2撮像ユニット12s2を移動させるように制御する。このような制御によれば、例えば、第1撮像ユニット12s1および第2撮像ユニット12s2を用いた撮像および照明が全て完了した後に、第1撮像ユニット12s1および第2撮像ユニット12s2の双方を同時に移動させる制御と比較して、ワークW0の複数箇所について、複数の照明条件における撮像に要する時間を短縮することができる。したがって、例えば、単位時間あたりに撮像を完了させることができるワークW0の数を増加させることができる。 Here, for example, the overall control unit C0 controls the operations of the first moving mechanism 12t1 and the second moving mechanism 12t2 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately. Specifically, for example, the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed. At this point in time, the second imaging unit 12s2 is controlled to be moved. According to such control, for example, after all the imaging and illumination using the first imaging unit 12s1 and the second imaging unit 12s2 are completed, both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time. Compared with the control, it is possible to shorten the time required for imaging under a plurality of lighting conditions for a plurality of locations of the work W0. Therefore, for example, the number of work W0 that can complete imaging per unit time can be increased.
 <1-4.第1実施形態のまとめ>
 以上のように、第1実施形態に係る撮像装置12によれば、例えば、ワークW0に対して、第1撮像ユニット12s1と第2撮像ユニット12s2とを別々に移動させつつ、第1照明部F11および第2照明部F12のそれぞれで照明されたワークW0を第1撮像部I11および第2撮像部I12で撮像することができる。これにより、例えば、ワークW0の各部分を複数の照明条件で撮像することができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像を容易に撮像することができる。
<1-4. Summary of the first embodiment>
As described above, according to the image pickup apparatus 12 according to the first embodiment, for example, the first illumination unit F11 while moving the first imaging unit 12s1 and the second imaging unit 12s2 separately with respect to the work W0. The work W0 illuminated by each of the second illumination unit F12 and the second illumination unit F12 can be imaged by the first imaging unit I11 and the second imaging unit I12. Thereby, for example, each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
 <2.他の実施形態>
 本発明は上述の第1実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。
<2. Other embodiments>
The present invention is not limited to the above-mentioned first embodiment, and various modifications, improvements, and the like can be made without departing from the gist of the present invention.
 <2-1.第2実施形態>
 上記第1実施形態において、例えば、第1撮像ユニット12s1は、2つ以上の第1撮像部I11を含んでいてもよいし、2つ以上の第1照明部F11を含んでいてもよい。また、例えば、第2撮像ユニット12s2は、2つ以上の第2撮像部I12を含んでいてもよいし、2つ以上の第2照明部F12を含んでいてもよい。すなわち、例えば、第1撮像ユニット12s1は、1つ以上の第1撮像部I11および1つ以上の第1照明部F11を含んでいてもよいし、第2撮像ユニット12s2は、1つ以上の第2撮像部I12および1つ以上の第2照明部F12を含んでいてもよい。
<2-1. Second Embodiment>
In the first embodiment, for example, the first imaging unit 12s1 may include two or more first imaging units I11 or may include two or more first lighting units F11. Further, for example, the second imaging unit 12s2 may include two or more second imaging units I12, or may include two or more second illumination units F12. That is, for example, the first imaging unit 12s1 may include one or more first imaging units I11 and one or more first illumination units F11, and the second imaging unit 12s2 may include one or more first imaging units 12s2. 2 The imaging unit I12 and one or more second illumination units F12 may be included.
 <2-1-1.撮像ユニットの構成>
 図9は、第2実施形態に係る第1撮像ユニット12s1の物理的構成の一例を模式的に示す図である。
<2-1-1. Imaging unit configuration>
FIG. 9 is a diagram schematically showing an example of the physical configuration of the first imaging unit 12s1 according to the second embodiment.
 例えば、図9で示されるように、第1撮像ユニット12s1が、第1A撮像部I11aと第1B撮像部I11bと第1C撮像部I11cとを含む1つ以上の第1撮像部I11、およびを第1A照明部F11aと第1B照明部F11bと第1C照明部F11cとを含む1つ以上の第1照明部F11を有していてもよい。ここでは、例えば、第1A照明部F11aが載置部Sg2上に載置されたワークW0を上方から照明している状態で第1A撮像部I11aが載置部Sg2上に載置されたワークW0を上方から撮像することが可能である。また、例えば、第1B照明部F11bが載置部Sg2上に載置されたワークW0を斜め上方から照明している状態で第1B撮像部I11bが載置部Sg2上に載置されたワークW0を斜め上方から撮像することが可能である。また、例えば、第1C照明部F11cが載置部Sg2上に載置されたワークW0を水平方向に向かって照明している状態で第1C撮像部I11cが載置部Sg2上に載置されたワークW0を水平方向に向かって撮像することが可能である。この場合には、例えば、第1撮像ユニット12s1を移動させることなく、より少ない動作で複数の照明条件においてワークW0の撮像を行うことができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像をさらに容易に撮像することができる。 For example, as shown in FIG. 9, the first imaging unit 12s1 includes one or more first imaging units I11 including a first A imaging unit I11a, a first B imaging unit I11b, and a first C imaging unit I11c. It may have one or more first illumination units F11 including the 1A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c. Here, for example, the work W0 on which the first A imaging unit I11a is mounted on the mounting portion Sg2 while the first A lighting unit F11a is illuminating the work W0 mounted on the mounting portion Sg2 from above. Can be imaged from above. Further, for example, the work W0 on which the first B imaging unit I11b is placed on the mounting portion Sg2 while the first B lighting unit F11b is illuminating the work W0 mounted on the mounting portion Sg2 from diagonally above. Can be imaged from diagonally above. Further, for example, the first C imaging unit I11c is placed on the mounting portion Sg2 while the first C lighting unit F11c is illuminating the work W0 placed on the mounting portion Sg2 in the horizontal direction. It is possible to image the work W0 in the horizontal direction. In this case, for example, the work W0 can be imaged under a plurality of lighting conditions with less operation without moving the first imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
 図9の例では、第1A撮像部I11aにおける光学系としての第1Aレンズ部Lz11aの光軸(第1A光軸ともいう)Pi11aと、ワークW0を通る仮想的な水平面Pn0と、が成す角度(第1A俯角ともいう)θ1aが、90度とされている。このため、第1A撮像部I11aは、上方からワークW0を撮像可能であるカメラ(上カメラともいう)として機能する。また、第1B撮像部I11bにおける光学系としての第1Bレンズ部Lz11bの光軸(第1B光軸ともいう)Pi11bと、ワークW0を通る仮想的な水平面Pn0と、が成す角度(第1B俯角ともいう)θ1bが、45度とされている。このため、第1B撮像部I11bは、斜め上方からワークW0を撮像可能であるカメラ(斜めカメラともいう)として機能する。また、第1C撮像部I11cにおける光学系としての第1Cレンズ部Lz11cの光軸(第1C光軸ともいう)Pi11cと、ワークW0を通る仮想的な水平面Pn0と、が成す角度(第1C俯角ともいう)θ1cが、5度とされている。このため、第1C撮像部I11cは、水平方向に沿ってワークW0を撮像可能であるカメラ(水平カメラともいう)として機能する。ここでは、例えば、ワークW0の略中央において、第1A光軸Pi11aと、第1B光軸Pi11bと、第1C光軸Pi11cと、が交差するような形態が考えられる。 In the example of FIG. 9, the angle formed by the optical axis (also referred to as the first A optical axis) Pi11a of the first A lens unit Lz11a as the optical system in the first A imaging unit I11a and the virtual horizontal plane Pn0 passing through the work W0 ( The first A depression angle) θ1a is 90 degrees. Therefore, the first A imaging unit I11a functions as a camera (also referred to as an upper camera) capable of imaging the work W0 from above. Further, the angle (also referred to as the first B depression angle) formed by the optical axis (also referred to as the first B optical axis) Pi11b of the first B lens unit Lz11b as the optical system in the first B imaging unit I11b and the virtual horizontal plane Pn0 passing through the work W0. It is said that θ1b is 45 degrees. Therefore, the first B imaging unit I11b functions as a camera (also referred to as an oblique camera) capable of imaging the work W0 from diagonally above. Further, the angle (also referred to as the first C depression angle) formed by the optical axis (also referred to as the first C optical axis) Pi11c of the first C lens unit Lz11c as the optical system in the first C imaging unit I11c and the virtual horizontal plane Pn0 passing through the work W0. It is said that θ1c is 5 degrees. Therefore, the first C imaging unit I11c functions as a camera (also referred to as a horizontal camera) capable of imaging the work W0 along the horizontal direction. Here, for example, a form in which the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c intersect at substantially the center of the work W0 can be considered.
 また、図9の例では、第1A光軸Pi11aと、第1B光軸Pi11bと、第1C光軸Pi11cと、がYZ平面に沿った仮想平面に沿って位置している。そして、第1A撮像部I11aの第1Aレンズ部Lz11aが、第1A照明部F11aにおける第1孔部H11としての第1A孔部H11aに挿通された状態で位置している。別の観点から言えば、第1AレンズLz11aの第1A光軸Pi11aが、第1A孔部H11aを通るように設定されている。第1B撮像部I11bの第1Bレンズ部Lz11bが、第1B照明部F11bにおける第1孔部H11としての第1B孔部H11bに挿通された状態で位置している。別の観点から言えば、第1BレンズLz11bの第1B光軸Pi11bが、第1B孔部H11bを通るように設定されている。第1C撮像部I11cの第1Cレンズ部Lz11cが、第1C照明部F11cにおける第1孔部H11としての第1C孔部H11cに挿通された状態で位置している。別の観点から言えば、第1CレンズLz11cの第1C光軸Pi11cが、第1C孔部H11cを通るように設定されている。 Further, in the example of FIG. 9, the first A optical axis Pi11a, the first B optical axis Pi11b, and the first C optical axis Pi11c are located along a virtual plane along the YZ plane. Then, the first A lens portion Lz11a of the first A imaging unit I11a is located in a state of being inserted into the first A hole portion H11a as the first hole portion H11 in the first A illumination unit F11a. From another point of view, the first A optical axis Pi11a of the first A lens Lz11a is set to pass through the first A hole portion H11a. The first B lens portion Lz11b of the first B imaging unit I11b is located in a state of being inserted into the first B hole portion H11b as the first hole portion H11 in the first B illumination unit F11b. From another point of view, the first B optical axis Pi11b of the first B lens Lz11b is set to pass through the first B hole H11b. The first C lens portion Lz11c of the first C imaging unit I11c is located in a state of being inserted into the first C hole portion H11c as the first hole portion H11 in the first C illumination unit F11c. From another point of view, the first C optical axis Pi11c of the first C lens Lz11c is set to pass through the first C hole H11c.
 また、図9では、第1A撮像部I11aによってワークW0を撮像する際に第1A撮像部I11aが向いている方向(第1A撮像方向ともいう)が第1A光軸Pi11aに沿った2点鎖線の矢印Dc1aで描かれている。第1B撮像部I11bによってワークW0を撮像する際に第1B撮像部I11bが向いている方向(第1B撮像方向ともいう)が第1B光軸Pi11bに沿った2点鎖線の矢印Dc1bで描かれている。第1C撮像部I11cによってワークW0を撮像する際に第1C撮像部I11cが向いている方向(第1C撮像方向ともいう)が第1C光軸Pi11cに沿った2点鎖線の矢印Dc1cで描かれている。さらに、図9では、第1A照明部F11aが載置部Sg2上に載置されたワークW0に向けて光を照射することが可能な方向(第1A照明方向ともいう)が1点鎖線の矢印Df1aで描かれている。第1B照明部F11bが載置部Sg2上に載置されたワークW0に向けて光を照射することが可能な方向(第1B照明方向ともいう)が1点鎖線の矢印Df1bで描かれている。第1C照明部F11cが載置部Sg2上に載置されたワークW0に向けて光を照射することが可能な方向(第1C照明方向ともいう)が1点鎖線の矢印Df1cで描かれている。ここでは、第1A照明部F11aは、上方からワークW0に光を照射する照明部(上部照明部ともいう)として機能する。第1B照明部F11bは、斜め上方からワークW0に光を照射する照明部(斜め照明部ともいう)として機能する。第1C照明部F11cは、水平方向に沿ってワークW0に光を照射する照明部(水平照明部ともいう)として機能する。 Further, in FIG. 9, when the work W0 is imaged by the first A imaging unit I11a, the direction in which the first A imaging unit I11a faces (also referred to as the first A imaging direction) is a two-dot chain line along the first A optical axis Pi11a. It is drawn by the arrow Dc1a. The direction in which the first B imaging unit I11b faces (also referred to as the first B imaging direction) when the work W0 is imaged by the first B imaging unit I11b is drawn by the arrow Dc1b of the two-dot chain line along the first B optical axis Pi11b. There is. When the work W0 is imaged by the first C imaging unit I11c, the direction in which the first C imaging unit I11c is facing (also referred to as the first C imaging direction) is drawn by the arrow Dc1c of the two-dot chain line along the first C optical axis Pi11c. There is. Further, in FIG. 9, the direction in which the first A illumination unit F11a can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first A illumination direction) is an arrow chain line. It is drawn with Df1a. The direction in which the first B illumination unit F11b can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first B illumination direction) is drawn by the arrow Df1b of the alternate long and short dash line. .. The direction in which the first C illumination unit F11c can irradiate the work W0 mounted on the mounting portion Sg2 (also referred to as the first C illumination direction) is drawn by the arrow Df1c of the one-point chain line. .. Here, the first A illumination unit F11a functions as an illumination unit (also referred to as an upper illumination unit) that irradiates the work W0 with light from above. The first B illumination unit F11b functions as an illumination unit (also referred to as an oblique illumination unit) that irradiates the work W0 with light from diagonally above. The first C illumination unit F11c functions as an illumination unit (also referred to as a horizontal illumination unit) that irradiates the work W0 with light along the horizontal direction.
 図10(a)は、第1A照明部F11aの一例を模式的に示す図である。図10(b)は、第1B照明部F11bの一例を模式的に示す図である。図10(c)は、第1C照明部F11cの一例を模式的に示す図である。図11は、第2実施形態に係る第1撮像ユニット12s1の外観の一例を示す側面図である。図12は、第2実施形態に係る第1撮像ユニット12s1の外観の一例を示す平面図である。図13は、第2実施形態に係る第1撮像ユニット12s1の外観の一例を示す正面図である。図14は、第2実施形態に係る第1撮像ユニット12s1の機能的構成の一例を示すブロック図である。 FIG. 10A is a diagram schematically showing an example of the first A lighting unit F11a. FIG. 10B is a diagram schematically showing an example of the first B lighting unit F11b. FIG. 10C is a diagram schematically showing an example of the first C illumination unit F11c. FIG. 11 is a side view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment. FIG. 12 is a plan view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment. FIG. 13 is a front view showing an example of the appearance of the first imaging unit 12s1 according to the second embodiment. FIG. 14 is a block diagram showing an example of the functional configuration of the first imaging unit 12s1 according to the second embodiment.
 ここで、例えば、図10(a)および図14で示されるように、第1A照明部F11aが、ワークW0に向かって光を照射可能な1つの領域として上部発光領域F11a1を含む構成が採用され得る。例えば、図10(b)および図14で示されるように、第1B照明部F11bが、ワークW0に向かって光を照射可能な5つの領域として、第1斜め発光領域F11b1、第2斜め発光領域F11b2、第3斜め発光領域F11b3、第4斜め発光領域F11b4および第5斜め発光領域F11b5を含む構成が採用され得る。例えば、図10(c)および図14で示されるように、第1C照明部F11cが、ワークW0に向かって光を照射可能な3つの領域として、第1水平発光領域F11c1、第2水平発光領域F11c2および第3水平発光領域F11c3を含む構成が採用され得る。 Here, for example, as shown in FIGS. 10A and 14, a configuration is adopted in which the first A illumination unit F11a includes the upper light emitting region F11a1 as one region capable of irradiating light toward the work W0. obtain. For example, as shown in FIGS. 10B and 14, the first oblique light emitting region F11b1 and the second oblique light emitting region F11b1 and the second oblique light emitting region are five regions in which the first B illumination unit F11b can irradiate light toward the work W0. A configuration including F11b2, a third oblique light emitting region F11b3, a fourth oblique light emitting region F11b4, and a fifth oblique light emitting region F11b5 can be adopted. For example, as shown in FIGS. 10C and 14, the first horizontal light emitting region F11c1 and the second horizontal light emitting region F11c1 and the second horizontal light emitting region are three regions in which the first C illumination unit F11c can irradiate light toward the work W0. A configuration including F11c2 and a third horizontal light emitting region F11c3 can be adopted.
 図10(a)から図13の例では、例えば、上部発光領域F11a1が第1A孔部H11aを有し、第3斜め発光領域F11b3が第1B孔部H11bを有し、第2水平発光領域F11c2が第1C孔部H11cを有する。ここで、例えば、第1B照明部F11bを真上から-Z方向に平面透視した場合には、第1斜め発光領域F11b1、第2斜め発光領域F11b2、第3斜め発光領域F11b3、第4斜め発光領域F11b4および第5斜め発光領域F11b5が、この記載の順に第1A撮像部I11aの第1A光軸Pi11aを中心として45度ずつ回転した位置関係を有する。換言すれば、例えば、第3斜め発光領域F11b3を基準とすれば、第2斜め発光領域F11b2は、第1A光軸Pi11aを中心として第3斜め発光領域F11b3から時計回りに45度回転した状態で位置し、第1斜め発光領域F11b1は、第1A光軸Pi11aを中心として第3斜め発光領域F11b3から時計回りに90度回転した状態で位置し、第4斜め発光領域F11b4は、第1A光軸Pi11aを中心として第3斜め発光領域F11b3から反時計回りに45度回転した状態で位置し、第5斜め発光領域F11b5は、第1A光軸Pi11aを中心として第3斜め発光領域F11b3から反時計回りに90度回転した状態で位置している。また、例えば、第1C照明部F11cを真上から-Z方向に平面透視した場合には、第1水平発光領域F11c1、第2水平発光領域F11c2および第3水平発光領域F11c3が、この記載の順に第1A撮像部I11aの第1A光軸Pi11aを中心として45度ずつ回転した位置関係を有する。換言すれば、例えば、第2水平発光領域F11c2を基準とすれば、第1水平発光領域F11c1は、第1A光軸Pi11aを中心として第2水平発光領域F11c2から時計回りに45度回転した状態で位置し、第3水平発光領域F11c3は、第1A光軸Pi11aを中心として第2水平発光領域F11c2から反時計回りに45度回転した状態で位置している。 In the example of FIGS. 10A to 13, for example, the upper light emitting region F11a1 has the first A hole portion H11a, the third oblique light emitting region F11b3 has the first B hole portion H11b, and the second horizontal light emitting region F11c2. Has a first C hole H11c. Here, for example, when the first B illumination unit F11b is viewed in a plane from directly above in the −Z direction, the first oblique light emitting region F11b1, the second oblique light emitting region F11b2, the third oblique light emitting region F11b3, and the fourth oblique light emitting region F11b3. The region F11b4 and the fifth oblique light emitting region F11b5 have a positional relationship rotated by 45 degrees about the first A optical axis Pi11a of the first A imaging unit I11a in the order described above. In other words, for example, based on the third diagonal light emitting region F11b3, the second diagonal light emitting region F11b2 is rotated 45 degrees clockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a. The first oblique light emitting region F11b1 is located in a state of being rotated 90 degrees clockwise from the third oblique light emitting region F11b3 about the first A optical axis Pi11a, and the fourth oblique light emitting region F11b4 is located on the first A optical axis. It is located in a state of being rotated 45 degrees counterclockwise from the third diagonal light emitting region F11b3 about Pi11a, and the fifth diagonal light emitting region F11b5 is counterclockwise from the third diagonal light emitting region F11b3 about the first A optical axis Pi11a. It is located in a state of being rotated 90 degrees. Further, for example, when the first C illumination unit F11c is viewed in a plane from directly above in the −Z direction, the first horizontal light emitting region F11c1, the second horizontal light emitting region F11c2, and the third horizontal light emitting region F11c3 are in the order of this description. The first A imaging unit I11a has a positional relationship rotated by 45 degrees about the first A optical axis Pi11a. In other words, for example, based on the second horizontal light emitting region F11c2, the first horizontal light emitting region F11c1 is rotated 45 degrees clockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a. The third horizontal light emitting region F11c3 is located in a state of being rotated 45 degrees counterclockwise from the second horizontal light emitting region F11c2 about the first A optical axis Pi11a.
 上記構成を有する第1A撮像部I11a、第1B撮像部I11b、第1C撮像部I11c、第1A照明部F11a、第1B照明部F11bおよび第1C照明部F11cは、例えば、図11から図13で示されるように、連結部材Cn1によって相互に連結されて一体的な構成を有する。この場合には、例えば、第1移動機構12t1によって連結部材Cn1を移動させることで、第1撮像ユニット12s1を移動させることができる。 The first A imaging unit I11a, the first B imaging unit I11b, the first C imaging unit I11c, the first A illumination unit F11a, the first B illumination unit F11b, and the first C illumination unit F11c having the above configuration are shown in FIGS. 11 to 13, for example. As such, they are connected to each other by the connecting member Cn1 and have an integral structure. In this case, for example, the first imaging unit 12s1 can be moved by moving the connecting member Cn1 by the first moving mechanism 12t1.
 このように、例えば、第1A照明部F11aが、1つの発光領域としての上部発光領域F11a1を含み、第1B照明部F11bが、5つの発光領域としての第1~5斜め発光領域F11b1~F11b5を含み、第1C照明部F11cが、3つの発光領域としての第1~3水平発光領域F11c1~F11c3を有していれば、発光領域ごとにワークW0に対する光の照射の有無を切り替えることで、第1撮像ユニット12s1を移動させることなく、さらに少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像をさらに容易に撮像することができる。 As described above, for example, the first A lighting unit F11a includes the upper light emitting region F11a1 as one light emitting region, and the first B lighting unit F11b includes the first to fifth oblique light emitting regions F11b1 to F11b5 as five light emitting regions. If the first C illumination unit F11c has the first to third horizontal light emitting regions F11c1 to F11c3 as three light emitting regions, the work W0 can be switched between the presence and absence of light irradiation for each light emitting region. It is possible to perform imaging under a plurality of lighting conditions with a smaller number of operations without moving the imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
 また、ここで、例えば、図11から図13で示されるように、第1C照明部F11cの各水平発光領域F11c1~F11c3が、Z方向に沿った鉛直方向における高さよりも、XY平面に沿った水平方向における幅が大きい領域であれば、載置部Sg2としての搬送部Cv2上に第1C照明部F11cを移動させても、第1C照明部F11cが載置部Sg2としての搬送部Cv2に接触しにくい。このため、例えば、ワークW0のサイズに合わせたワークW0に対する第1撮像ユニット12s1の距離および第1C撮像部I11cの焦点の調整等を行うために第1C照明部F11cを移動させやすくなる。ここでは、例えば、第1C照明部F11cは、2つの発光領域としての第1水平発光領域F11c1および第3水平発光領域F11c3を有することなく、1つの発光領域としての第2水平発光領域F11c2を有していてもよい。換言すれば、例えば、第1C照明部F11cは、1つ以上の発光領域を有していればよい。 Further, here, for example, as shown in FIGS. 11 to 13, each horizontal light emitting region F11c1 to F11c3 of the first C illumination unit F11c is along the XY plane rather than the height in the vertical direction along the Z direction. In a region having a large width in the horizontal direction, even if the first C illumination unit F11c is moved onto the transport portion Cv2 as the mounting portion Sg2, the first C illumination unit F11c contacts the transport portion Cv2 as the mounting portion Sg2. It's hard to do. Therefore, for example, the first C illumination unit F11c can be easily moved in order to adjust the distance of the first image pickup unit 12s1 and the focus of the first C image pickup unit I11c with respect to the work W0 according to the size of the work W0. Here, for example, the first C illumination unit F11c does not have the first horizontal light emitting region F11c1 and the third horizontal light emitting region F11c3 as two light emitting regions, but has the second horizontal light emitting region F11c2 as one light emitting region. You may be doing it. In other words, for example, the first C illumination unit F11c may have one or more light emitting regions.
 また、ここで、例えば、図10(b)および図11から図13で示されるように、第1B照明部F11bの各斜め発光領域F11b1~F11b5が、水平方向における幅よりも斜め上方向における長さが大きい領域であれば、斜め上方から見て奥行き方向が長いワークW0であっても広く照明することができる。また、例えば、鉛直方向(Z方向)に沿った仮想軸としての第1A光軸Pi11aの周囲の異なる角度において斜め上方からワークW0を照明することが可能な複数の発光領域(例えば、第1~5斜め発光領域F11b1~F11b5)を容易に配置することができる。ここでは、例えば、第1B照明部F11bは、2つの発光領域としての第1斜め発光領域F11b1および第5斜め発光領域F11b5を有することなく、3つの発光領域としての第2斜め発光領域F11b2、第3斜め発光領域F11b3および第4斜め発光領域F11b4を有していてもよい。また、例えば、第1B照明部F11bが、第3斜め発光領域F11b3を含む1つ以上の発光領域を有する構成が採用されてもよい。 Further, here, for example, as shown in FIGS. 10B and 11 to 13, each oblique light emitting region F11b1 to F11b5 of the first B illumination unit F11b has a length in the diagonally upward direction with respect to the width in the horizontal direction. If the area is large, even the work W0 having a long depth direction when viewed from diagonally above can be widely illuminated. Further, for example, a plurality of light emitting regions (for example, the first to the first) capable of illuminating the work W0 from diagonally above at different angles around the first A optical axis Pi11a as a virtual axis along the vertical direction (Z direction). 5 Diagonal light emitting regions F11b1 to F11b5) can be easily arranged. Here, for example, the first B illumination unit F11b does not have the first oblique light emitting region F11b1 and the fifth oblique light emitting region F11b5 as the two light emitting regions, but the second oblique light emitting region F11b2 and the second oblique light emitting region F11b2 as the three light emitting regions. It may have 3 diagonal light emitting regions F11b3 and 4th diagonal light emitting regions F11b4. Further, for example, a configuration may be adopted in which the first B illumination unit F11b has one or more light emitting regions including the third oblique light emitting region F11b3.
 <2-1-2.撮像画像の例>
 図15は、ワークW0の外観の一例を示す図である。図15の例では、ワークW0は、第1~6面Sf1~Sf6を有する正六面体状の形状を有する。ただし、+Z方向を向いた上面としての第1面Sf1は、第1凹部Dp1を有し、+Y方向を向いた側面としての第2面Sf2は、第2凹部Dp2を有する。ここで、図15で示された形状を有するワークW0を対象として、図9で示されたように配置された第1撮像ユニット12s1によって照明および撮像を行うことで得られるワークW0に係る撮像画像の例は、図16(a)から図18(c)で示されるようなものとなる。図16(a)から図18(c)のそれぞれでは、ワークW0の表面のうち、照明によっても明るく捉えられなかった部分には斜線のハッチングが付されており、照明によって明るく捉えられた部分にはハッチングが付されていない。
<2-1-2. Example of captured image>
FIG. 15 is a diagram showing an example of the appearance of the work W0. In the example of FIG. 15, the work W0 has a regular hexahedral shape having first to sixth surfaces Sf1 to Sf6. However, the first surface Sf1 as the upper surface facing the + Z direction has the first recess Dp1, and the second surface Sf2 as the side surface facing the + Y direction has the second recess Dp2. Here, a captured image relating to the work W0 obtained by illuminating and imaging the work W0 having the shape shown in FIG. 15 by the first imaging unit 12s1 arranged as shown in FIG. An example of is as shown in FIGS. 16 (a) to 18 (c). In each of FIGS. 16A to 18C, diagonal hatching is provided on the surface of the work W0 that was not brightly captured by the illumination, and the portion brightly captured by the illumination was provided. Is not hatched.
 図16(a)は、第1C照明部F11cの第2水平発光領域F11c2で照明されたワークW0を第1A撮像部I11aで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図16(b)は、第1C照明部F11cの第2水平発光領域F11c2で照明されたワークW0を第1B撮像部I11bで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図16(c)は、第1C照明部F11cの第2水平発光領域F11c2で照明されたワークW0を第1C撮像部I11cで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。 FIG. 16A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first A imaging unit I11a. Is. FIG. 16B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first B imaging unit I11b. Is. FIG. 16C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the second horizontal light emitting region F11c2 of the first C illumination unit F11c by the first C imaging unit I11c. Is.
 ここでは、第2水平発光領域F11c2で照明されたワークW0を上方から第1A撮像部I11aで撮像すると、図16(a)で示されるように、+Z方向を向いた上面としての第1面Sf1が第1凹部Dp1も含めて暗い状態で捉えられたワークW0に係る撮像画像が得られる。第2水平発光領域F11c2で照明されたワークW0を斜め上方から第1B撮像部I11bで撮像すると、図16(b)で示されるように、第1面Sf1が第1凹部Dp1も含めて暗い状態で捉えられるとともに、+Y方向を向いた側面としての第2面Sf2の第2凹部Dp2の一部を除く略全面が暗い状態で捉えられたワークW0に係る撮像画像が得られる。第2水平発光領域F11c2で照明されたワークW0を側方から第1C撮像部I11cで撮像すると、図16(c)で示されるように、第2面Sf2の第2凹部Dp2を除く略全面が明るい状態で捉えられたワークW0に係る撮像画像が得られる。 Here, when the work W0 illuminated in the second horizontal light emitting region F11c2 is imaged by the first A imaging unit I11a from above, as shown in FIG. 16A, the first surface Sf1 as the upper surface facing the + Z direction. An image of the work W0 captured in a dark state including the first recess Dp1 can be obtained. When the work W0 illuminated in the second horizontal light emitting region F11c2 is imaged by the first B imaging unit I11b from diagonally above, the first surface Sf1 is dark including the first recess Dp1 as shown in FIG. 16B. An image of the work W0 is obtained, which is captured in a dark state on substantially the entire surface except for a part of the second concave portion Dp2 of the second surface Sf2 as the side surface facing the + Y direction. When the work W0 illuminated in the second horizontal light emitting region F11c2 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 16C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered. An captured image relating to the work W0 captured in a bright state can be obtained.
 図17(a)は、第1B照明部F11bの第3斜め発光領域F11b3で照明されたワークW0を第1A撮像部I11aで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図17(b)は、第1B照明部F11bの第3斜め発光領域F11b3で照明されたワークW0を第1B撮像部I11bで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図17(c)は、第1B照明部F11bの第3斜め発光領域F11b3で照明されたワークW0を第1C撮像部I11cで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。 FIG. 17A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first A imaging unit I11a. Is. FIG. 17B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first B imaging unit I11b. Is. FIG. 17C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated by the third oblique light emitting region F11b3 of the first B illumination unit F11b with the first C imaging unit I11c. Is.
 ここでは、第3斜め発光領域F11b3で照明されたワークW0を上方から第1A撮像部I11aで撮像すると、図17(a)で示されるように、第1面Sf1の第1凹部Dp1を除く略全面が暗い状態で捉えられたワークW0に係る撮像画像が得られる。第3斜め発光領域F11b3で照明されたワークW0を斜め上方から第1B撮像部I11bで撮像すると、図17(b)で示されるように、第1面Sf1の第1凹部Dp1の一部を除く略全面が暗い状態で捉えられるとともに、第2面Sf2の第2凹部Dp2の一部を除く略全面が暗い状態で捉えられたワークW0に係る撮像画像が得られる。第3斜め発光領域F11b3で照明されたワークW0を側方から第1C撮像部I11cで撮像すると、図17(c)で示されるように、第2面Sf2の第2凹部Dp2を除く略全面が暗い状態で捉えられたワークW0に係る撮像画像が得られる。 Here, when the work W0 illuminated in the third oblique light emitting region F11b3 is imaged by the first A imaging unit I11a from above, as shown in FIG. 17A, the first concave portion Dp1 of the first surface Sf1 is excluded. An captured image relating to the work W0 captured in a dark state on the entire surface can be obtained. When the work W0 illuminated in the third oblique light emitting region F11b3 is imaged by the first B imaging unit I11b from diagonally above, as shown in FIG. 17B, a part of the first recess Dp1 of the first surface Sf1 is removed. An image of the work W0 is obtained in which substantially the entire surface is captured in a dark state and substantially the entire surface is captured in a dark state except for a part of the second recess Dp2 of the second surface Sf2. When the work W0 illuminated in the third oblique light emitting region F11b3 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 17C, substantially the entire surface of the second surface Sf2 except the second recess Dp2 is covered. An captured image relating to the work W0 captured in a dark state can be obtained.
 図18(a)は、第1A照明部F11aの上部発光領域F11a1で照明されたワークW0を第1A撮像部I11aで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図18(b)は、第1A照明部F11aの上部発光領域F11a1で照明されたワークW0を第1B撮像部I11bで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。図18(c)は、第1A照明部F11aの上部発光領域F11a1で照明されたワークW0を第1C撮像部I11cで撮像することで得られるワークW0を捉えた撮像画像の一例を示す図である。 FIG. 18A is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first A imaging unit I11a. .. FIG. 18B is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first B imaging unit I11b. .. FIG. 18C is a diagram showing an example of an image captured by capturing the work W0 obtained by imaging the work W0 illuminated in the upper light emitting region F11a1 of the first A illumination unit F11a with the first C imaging unit I11c. ..
 ここでは、上部発光領域F11a1で照明されたワークW0を上方から第1A撮像部I11aで撮像すると、図18(a)で示されるように、第1面Sf1の第1凹部Dp1を除く略全面が明るい状態で捉えられたワークW0に係る撮像画像が得られる。上部発光領域F11a1で照明されたワークW0を斜め上方から第1B撮像部I11bで撮像すると、図18(b)で示されるように、第1面Sf1の第1凹部Dp1の一部を除く略全面が暗い状態で捉えられるとともに、第2面Sf2が第2凹部Dp2も含めて暗い状態で捉えられたワークW0に係る撮像画像が得られる。上部発光領域F11a1で照明されたワークW0を側方から第1C撮像部I11cで撮像すると、図18(c)で示されるように、第2面Sf2が第2凹部Dp2も含めて暗い状態で捉えられたワークW0に係る撮像画像が得られる。 Here, when the work W0 illuminated in the upper light emitting region F11a1 is imaged from above by the first A imaging unit I11a, as shown in FIG. 18A, substantially the entire surface of the first surface Sf1 except the first recess Dp1 is covered. An captured image relating to the work W0 captured in a bright state can be obtained. When the work W0 illuminated in the upper light emitting region F11a1 is imaged by the first B imaging unit I11b from diagonally above, as shown in FIG. 18B, substantially the entire surface except for a part of the first recess Dp1 of the first surface Sf1. Is captured in a dark state, and a captured image relating to the work W0 in which the second surface Sf2 is captured in a dark state including the second recess Dp2 is obtained. When the work W0 illuminated in the upper light emitting region F11a1 is imaged from the side by the first C imaging unit I11c, as shown in FIG. 18C, the second surface Sf2 captures the work W0 including the second recess Dp2 in a dark state. An captured image related to the work W0 is obtained.
 このように、例えば、第1撮像ユニット12s1を移動させることなく、より少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像をさらに容易に撮像することができる。 In this way, for example, it is possible to perform imaging under a plurality of lighting conditions with less operation without moving the first imaging unit 12s1. Therefore, for example, it is possible to more easily capture an image in which the work W0 having various shapes is sufficiently captured.
 <2-1-3.撮像装置の動作>
 上記構成を有する第2実施形態に係る撮像装置12においても、例えば、統括制御部C0が、第1撮像ユニット12s1と第2撮像ユニット12s2とが交互に移動するように、第1移動機構12t1および第2移動機構12t2の動作を制御してもよい。具体的には、例えば、第1撮像ユニット12s1および第2撮像ユニット12s2のうちの撮像および照明が完了した第1撮像ユニット12s1を先に移動させ、第2撮像ユニット12s2の撮像および照明が完了した時点で第2撮像ユニット12s2を移動させるように制御してもよい。このような制御によれば、例えば、第1撮像ユニット12s1および第2撮像ユニット12s2を用いた撮像および照明が全て完了した後に、第1撮像ユニット12s1および第2撮像ユニット12s2の双方を同時に移動させる制御と比較して、ワークW0の複数箇所について、複数の照明条件における撮像に要する時間を短縮することができる。したがって、例えば、単位時間あたりに撮像を完了させることができるワークW0の数を増加させることができる。
<2-1-3. Operation of the image pickup device>
In the image pickup apparatus 12 according to the second embodiment having the above configuration, for example, the integrated control unit C0 has the first moving mechanism 12t1 and the first moving mechanism 12t1 so that the first imaging unit 12s1 and the second imaging unit 12s2 move alternately. The operation of the second moving mechanism 12t2 may be controlled. Specifically, for example, the first imaging unit 12s1 of the first imaging unit 12s1 and the second imaging unit 12s2 for which imaging and illumination have been completed is moved first, and the imaging and illumination of the second imaging unit 12s2 are completed. At the time point, the second imaging unit 12s2 may be controlled to be moved. According to such control, for example, after all the imaging and illumination using the first imaging unit 12s1 and the second imaging unit 12s2 are completed, both the first imaging unit 12s1 and the second imaging unit 12s2 are moved at the same time. Compared with the control, it is possible to shorten the time required for imaging under a plurality of lighting conditions for a plurality of locations of the work W0. Therefore, for example, the number of work W0 that can complete imaging per unit time can be increased.
 ここで、例えば、第2撮像ユニット12s2も、第1撮像ユニット12s1と同様な構成を有していてもよい。この場合には、例えば、第1撮像ユニット12s1の構成と第2撮像ユニット12s2の構成とが、XZ平面を基準として面対称の関係を有する態様が考えられる。 Here, for example, the second imaging unit 12s2 may also have the same configuration as the first imaging unit 12s1. In this case, for example, it is conceivable that the configuration of the first imaging unit 12s1 and the configuration of the second imaging unit 12s2 have a plane-symmetrical relationship with respect to the XZ plane.
 <2-2.第3実施形態>
 上記第1実施形態および上記第2実施形態の何れにおいても、例えば、第1移動機構12t1による第1撮像ユニット12s1の移動、および第2移動機構12t2による第2撮像ユニット12s2の移動のうちの少なくとも一方の移動が、少なくとも1方向における移動であってもよい。このような構成が採用されても、例えば、ワークW0に対して、第1撮像ユニット12s1と第2撮像ユニット12s2とを別々に移動させつつ、第1照明部F11および第2照明部F12のそれぞれで照明されたワークW0を第1撮像部I11および第2撮像部I12で撮像することができる。これにより、例えば、ワークW0の各部分を複数の照明条件で撮像することができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像を容易に撮像することができる。
<2-2. Third Embodiment>
In both the first embodiment and the second embodiment, for example, at least one of the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2. One movement may be movement in at least one direction. Even if such a configuration is adopted, for example, while moving the first imaging unit 12s1 and the second imaging unit 12s2 separately with respect to the work W0, the first illumination unit F11 and the second illumination unit F12, respectively. The work W0 illuminated by the above can be imaged by the first imaging unit I11 and the second imaging unit I12. Thereby, for example, each part of the work W0 can be imaged under a plurality of lighting conditions. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
 図19(a)は、第3実施形態に係る撮像装置12の主要な物理的構成の一例を示す図である。図19(b)は、第3実施形態に係る撮像装置12の主要な物理的構成の一例の一部を示す平面図である。図19(a)および図19(b)の例では、第1移動機構12t1は、ベース部Bs12上に位置している第1基準部Sl1と、この第1基準部Sl1によって±X方向に沿って移動可能に保持されている第1アーム部Am1と、を有する。そして、第1アーム部Am1に第1撮像ユニット12s1が取り付けられた状態にある。また、図19(a)および図19(b)の例では、第2移動機構12t2は、ベース部Bs12上に位置している第2基準部Sl2と、この第2基準部Sl1によって±X方向に沿って移動可能に保持されている第2アーム部Am2と、を有する。そして、第2アーム部Am2に第2撮像ユニット12s2が取り付けられた状態にある。第1基準部Sl1に対する第1アーム部Am1の移動および第2基準部Sl2に対する第2アーム部Am2の移動は、例えば、リニアガイドと、直線的な駆動力を生じるエアシリンダーまたはモータの回転駆動力を直線的な駆動力に変換するボールネジと、の組み合わせによって実現され得る。 FIG. 19A is a diagram showing an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment. FIG. 19B is a plan view showing a part of an example of a main physical configuration of the image pickup apparatus 12 according to the third embodiment. In the examples of FIGS. 19 (a) and 19 (b), the first moving mechanism 12t1 is formed along the ± X direction by the first reference portion Sl1 located on the base portion Bs12 and the first reference portion Sl1. It has a first arm portion Am1 which is held so as to be movable. Then, the first imaging unit 12s1 is attached to the first arm portion Am1. Further, in the examples of FIGS. 19 (a) and 19 (b), the second moving mechanism 12t2 is in the ± X direction by the second reference portion Sl2 located on the base portion Bs12 and the second reference portion Sl1. It has a second arm portion Am2, which is movably held along the line. Then, the second imaging unit 12s2 is attached to the second arm portion Am2. The movement of the first arm portion Am1 with respect to the first reference portion Sl1 and the movement of the second arm portion Am2 with respect to the second reference portion Sl2 are, for example, a linear guide and a rotational driving force of an air cylinder or a motor that produces a linear driving force. Can be realized by a combination with a ball screw that converts a linear driving force into a linear driving force.
 ここで、例えば、第1移動機構12t1による第1撮像ユニット12s1の移動、および第2移動機構12t2による第2撮像ユニット12s2の移動のうちの少なくとも一方の移動が、少なくとも2方向における移動とされれば、ワークW0の各部分をより多くの照明条件で撮像することができる。これにより、例えば、種々の形状を有するワークW0を十分に捉えた画像を容易に撮像することができる。 Here, for example, the movement of at least one of the movement of the first imaging unit 12s1 by the first moving mechanism 12t1 and the movement of the second imaging unit 12s2 by the second moving mechanism 12t2 is defined as movement in at least two directions. For example, each part of the work W0 can be imaged under more lighting conditions. Thereby, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
 <2-3.その他の実施形態>
 上記各実施形態において、例えば、第1移動機構12t1と第2移動機構12t2とが、載置部Sg2としての搬送部Cv2を挟むように位置していなくてもよい。例えば、第1移動機構12t1および第2移動機構12t2のうちの少なくとも一方が、載置部Sg2としての搬送部Cv2の上方に位置していてもよいし、第1移動機構12t1および第2移動機構12t2の両方が、載置部Sg2としての搬送部Cv2の一方の側方に位置していてもよい。ただし、例えば、第1移動機構12t1と第2移動機構12t2とが、載置部Sg2としての搬送部Cv2を挟むように位置していれば、例えば、ワークW0の表面のより広いエリアについて、ワークW0の各部分を複数の照明条件で容易に撮像することが可能となる。
<2-3. Other embodiments>
In each of the above embodiments, for example, the first moving mechanism 12t1 and the second moving mechanism 12t2 may not be positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2. For example, at least one of the first moving mechanism 12t1 and the second moving mechanism 12t2 may be located above the transporting portion Cv2 as the mounting portion Sg2, or the first moving mechanism 12t1 and the second moving mechanism Both 12t2 may be located on one side of the transport portion Cv2 as the mounting portion Sg2. However, for example, if the first moving mechanism 12t1 and the second moving mechanism 12t2 are positioned so as to sandwich the transport portion Cv2 as the mounting portion Sg2, for example, if the work is located in a wider area on the surface of the work W0. Each part of W0 can be easily imaged under a plurality of lighting conditions.
 上記各実施形態において、例えば、第1移動機構12t1と第1撮像ユニット12s1とを組み合わせた1つ目の構成あるいは第2移動機構12t2と第2撮像ユニット12s2とを組み合わせた2つ目の構成と同様な構成を有する3つ目以降の構成が存在していてもよい。 In each of the above embodiments, for example, a first configuration in which the first moving mechanism 12t1 and the first imaging unit 12s1 are combined, or a second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined. There may be a third or subsequent configuration having a similar configuration.
 上記各実施形態において、例えば、第1撮像ユニット12s1が、2つ以上の照明部と1つ以上の撮像部とを有していてもよいし、第2撮像ユニット12s2が、2つ以上の照明部と1つ以上の撮像部とを有していてもよい。このような構成が採用されても、例えば、2つ以上の照明部の点灯の有無の組み合わせによって、第1撮像ユニット12s1および第2撮像ユニット12s2を移動させることなく、複数の照明条件における撮像を行うことができる。すなわち、例えば、少ない動作で複数の照明条件における撮像を行うことができる。したがって、例えば、種々の形状を有するワークW0を十分に捉えた画像を容易に撮像することができる。 In each of the above embodiments, for example, the first imaging unit 12s1 may have two or more illumination units and one or more imaging units, and the second imaging unit 12s2 may have two or more illumination units. It may have a unit and one or more imaging units. Even if such a configuration is adopted, for example, by combining the presence or absence of lighting of two or more lighting units, imaging under a plurality of lighting conditions can be performed without moving the first imaging unit 12s1 and the second imaging unit 12s2. It can be carried out. That is, for example, it is possible to perform imaging under a plurality of lighting conditions with a small number of operations. Therefore, for example, it is possible to easily capture an image that sufficiently captures the work W0 having various shapes.
 ここで、例えば、1つ以上の照明部は、第1A照明部F11aと第1B照明部F11bとを含む2つ以上の照明部であってもよいし、第1A照明部F11aと第1C照明部F11cとを含む2つ以上の照明部であってもよい。また、例えば、1つ以上の撮像部は、第1A撮像部I11a、第1B撮像部I11bおよび第1C撮像部I11cのうちの1つ以上の撮像部を含んでいてもよい。具体的には、上記第2実施形態において、例えば、第1B照明部F11bおよび第1C照明部F11cのうちの何れか一方の照明部が存在せず、第1A撮像部I11a、第1B撮像部I11bおよび第1C撮像部I11cのうちの2つの撮像部が存在していない構成、が考えられる。このような構成では、例えば、第1A照明部F11aが、載置部Sg2上に載置されたワークW0に向けて光を照射する方向としての第1A照射方向に沿った仮想線と、載置部Sg2上に載置されたワークW0を通る仮想的な水平面Pn0と、が成す角度は、0度から90度の間で適宜設定されてもよい。また、例えば、第1B照明部F11bが、載置部Sg2上に載置されたワークW0に向けて光を照射する方向としての第1B照射方向に沿った仮想線と、載置部Sg2上に載置されたワークW0を通る仮想的な水平面Pn0と、が成す角度は、0度から90度の間で適宜設定されてもよい。また、例えば、第1C照明部F11cが、載置部Sg2上に載置されたワークW0に向けて光を照射する方向としての第1C照射方向に沿った仮想線と、載置部Sg2上に載置されたワークW0を通る仮想的な水平面Pn0と、が成す角度は、0度から90度の間で適宜設定されてもよい。 Here, for example, the one or more lighting units may be two or more lighting units including the first A lighting unit F11a and the first B lighting unit F11b, or the first A lighting unit F11a and the first C lighting unit. It may be two or more lighting units including F11c. Further, for example, one or more imaging units may include one or more imaging units of the first A imaging unit I11a, the first B imaging unit I11b, and the first C imaging unit I11c. Specifically, in the second embodiment, for example, one of the first B lighting unit F11b and the first C lighting unit F11c does not exist, and the first A imaging unit I11a and the first B imaging unit I11b do not exist. And a configuration in which two imaging units of the first C imaging unit I11c do not exist can be considered. In such a configuration, for example, the first A illumination unit F11a is placed with a virtual line along the first A irradiation direction as a direction for irradiating light toward the work W0 mounted on the mounting unit Sg2. The angle formed by the virtual horizontal plane Pn0 passing through the work W0 placed on the portion Sg2 may be appropriately set between 0 degrees and 90 degrees. Further, for example, a virtual line along the first B irradiation direction as a direction in which the first B illumination unit F11b irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2. The angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees. Further, for example, a virtual line along the first C irradiation direction as a direction in which the first C illumination unit F11c irradiates light toward the work W0 mounted on the mounting portion Sg2 and on the mounting portion Sg2. The angle formed by the virtual horizontal plane Pn0 passing through the mounted work W0 may be appropriately set between 0 degrees and 90 degrees.
 ここで、例えば、1つの撮像部から載置部Sg2上に載置されたワークW0に向かう、該1つの撮像部に含まれた光学系としてのレンズ部の光軸に沿った撮像方向は、第1B照明部F11bの第1B照明方向よりも第1A照明部F11aの第1A照明方向に近い構成が採用されてもよい。より具体的には、例えば、第1A撮像部I11aから載置部Sg2上に載置されたワークW0に向かう第1Aレンズ部Lz11aの第1A光軸Pi11aに沿った第1A撮像方向が、第1B照明部F11bの第1B照明方向よりも第1A照明部F11aの第1A照明方向に近い構成が採用されてもよい。 Here, for example, the imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit from one imaging unit toward the work W0 mounted on the mounting unit Sg2 is determined. A configuration may be adopted in which the first A lighting unit F11a is closer to the first A lighting direction than the first B lighting direction of the first B lighting unit F11b. More specifically, for example, the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first B. A configuration may be adopted in which the illumination unit F11b is closer to the first A illumination direction of the first A illumination unit F11a than the first B illumination direction.
 また、ここで、例えば、1つの撮像部から載置部Sg2上に載置されたワークW0に向かう、該1つの撮像部に含まれた光学系としてのレンズ部の光軸に沿った撮像方向は、第1C照明部F11cの第1C照明方向よりも第1A照明部F11aの第1A照明方向に近い構成が採用されてもよい。より具体的には、例えば、第1A撮像部I11aから載置部Sg2上に載置されたワークW0に向かう第1Aレンズ部Lz11aの第1A光軸Pi11aに沿った第1A撮像方向が、第1C照明部F11cの第1C照明方向よりも第1A照明部F11aの第1A照明方向に近い構成が採用されてもよい。 Further, here, for example, an imaging direction along the optical axis of the lens unit as an optical system included in the one imaging unit, from one imaging unit toward the work W0 mounted on the mounting unit Sg2. May adopt a configuration closer to the first A illumination direction of the first A illumination unit F11a than to the first C illumination direction of the first C illumination unit F11c. More specifically, for example, the first A imaging direction along the first A optical axis Pi11a of the first A lens unit Lz11a from the first A imaging unit I11a toward the work W0 mounted on the mounting unit Sg2 is the first C. A configuration may be adopted in which the illumination unit F11c is closer to the first A illumination direction of the first A illumination unit F11a than the first C illumination direction.
 これらの構成が採用されれば、例えば、撮像方向に近い角度の照明方向で照明を行う照明条件でのワークW0の撮像と、撮像方向から離れた角度の照明方向で照明を行う照明条件でのワークW0の撮像と、を行うことで、撮像部においてワークW0からの正反射光が捉えられる条件が変わり得る。これにより、ワークW0における凹凸等の種々の形状を十分に捉えた画像を容易に撮像することができる。より具体的には、例えば、撮像方向に近い角度の照明方向で照明を行う照明条件でのワークW0の撮像では、正反射光が強すぎて捉えることができなかった傷が、撮像方向から遠い角度の照明方向で照明を行う照明条件でのワークW0の撮像によって捉えることができるようなケースが想定される。 If these configurations are adopted, for example, the image of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction and the illumination condition in which the illumination is performed in the illumination direction at an angle away from the imaging direction. By imaging the work W0, the conditions under which the positively reflected light from the work W0 is captured by the imaging unit can be changed. As a result, it is possible to easily capture an image that sufficiently captures various shapes such as unevenness on the work W0. More specifically, for example, in the imaging of the work W0 under the illumination condition in which the illumination is performed in the illumination direction at an angle close to the imaging direction, the scratches that could not be captured because the positively reflected light is too strong are far from the imaging direction. It is assumed that the work W0 can be captured by imaging under the illumination condition in which the illumination is performed in the illumination direction of the angle.
 上記第2実施形態において、例えば、第1A撮像部I11aの第1A光軸Pi11aは、ワークW0の中心から少しずれていてもよい。この場合にも、例えば、第1A照明部F11aの上部発光領域F11a1からワークW0に向けて照射される光の光束がある程度拡がりを有していれば、第1A照明部F11aの上部発光領域F11a1によってワークW0を十分照明することができる。また、例えば、第1A撮像部I11aの第1A光軸Pi11aをワークW0の中心から適宜ずらすことで、第1撮像ユニット12s1と、第2撮像ユニット12s2と、が接触しにくい構成を実現することができる。 In the second embodiment, for example, the first A optical axis Pi11a of the first A imaging unit I11a may be slightly deviated from the center of the work W0. Also in this case, for example, if the luminous flux of the light emitted from the upper light emitting region F11a1 of the first A lighting unit F11a toward the work W0 has a certain spread, the upper light emitting region F11a1 of the first A lighting unit F11a The work W0 can be sufficiently illuminated. Further, for example, by appropriately shifting the first A optical axis Pi11a of the first A imaging unit I11a from the center of the work W0, it is possible to realize a configuration in which the first imaging unit 12s1 and the second imaging unit 12s2 are unlikely to come into contact with each other. it can.
 上記各実施形態において、撮像部I1は、照明部F1の孔部H1を介して載置部Sg2上に載置されたワークW0を撮像したが、これに限られない。例えば、撮像部I1が載置部Sg2上に載置されたワークW0を撮像する撮像方向と、照明部F1が載置部Sg2上に載置されたワークW0に光を照射する照明方向と、が成す角度は、許容範囲(許容角度範囲ともいう)内でずれていてもよい。例えば、第1撮像部I11が載置部Sg2上に載置されたワークW0を撮像する撮像方向と、第1照明部F11が載置部Sg2上に載置されたワークW0に光を照射する照明方向と、が成す角度は、許容範囲(許容角度範囲)内でずれていてもよいし、第2撮像部I12が載置部Sg2上に載置されたワークW0を撮像する撮像方向と、第2照明部F12が載置部Sg2上に載置されたワークW0に光を照射する照明方向と、が成す角度は、許容範囲(許容角度範囲)内でずれていてもよい。また、例えば、第1A撮像部I11aが載置部Sg2上に載置されたワークW0を撮像する第1A撮像方向と、第1A照明部F11a(具体的には、上部発光領域F11a1)が載置部Sg2上に載置されたワークW0に光を照射する第1A照明方向と、が成す角度は、許容範囲(許容角度範囲)内でずれていてもよい。また、例えば、第1B撮像部I11bが載置部Sg2上に載置されたワークW0を撮像する第1B撮像方向と、第1B照明部F11b(具体的には、第3斜め発光領域F11b3)が載置部Sg2上に載置されたワークW0に光を照射する第1B照明方向と、が成す角度は、許容範囲(許容角度範囲)内でずれていてもよい。また、例えば、第1C撮像部I11cが載置部Sg2上に載置されたワークW0を撮像する第1C撮像方向と、第1C照明部F11c(具体的には、第2水平発光領域F11c2)が載置部Sg2上に載置されたワークW0に光を照射する第1C照明方向と、が成す角度は、許容範囲(許容角度範囲)内でずれていてもよい。ここで、各許容角度範囲は、例えば、各照明部の発光領域の形状および寸法ならびにワークW0の形状および寸法等に依存する。 In each of the above embodiments, the imaging unit I1 imaged the work W0 mounted on the mounting unit Sg2 via the hole H1 of the lighting unit F1, but the present invention is not limited to this. For example, an imaging direction in which the imaging unit I1 images the work W0 mounted on the mounting unit Sg2, and an illumination direction in which the lighting unit F1 irradiates the work W0 mounted on the mounting unit Sg2 with light. The angle formed by may deviate within the permissible range (also referred to as the permissible angle range). For example, the first imaging unit I11 irradiates the imaging direction in which the work W0 mounted on the mounting portion Sg2 is imaged, and the first illumination unit F11 irradiates the work W0 mounted on the mounting portion Sg2 with light. The angle formed by the illumination direction may deviate within the permissible range (permissible angle range), and the image pickup direction in which the second imaging unit I12 images the work W0 mounted on the mounting unit Sg2 and The angle formed by the illumination direction in which the second illumination unit F12 irradiates the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range). Further, for example, the first A imaging direction in which the first A imaging unit I11a images the work W0 mounted on the mounting portion Sg2 and the first A lighting unit F11a (specifically, the upper light emitting region F11a1) are mounted. The angle formed by the first A illumination direction for irradiating the work W0 placed on the portion Sg2 with light may deviate within the permissible range (permissible angle range). Further, for example, the first B imaging direction in which the first B imaging unit I11b images the work W0 mounted on the mounting unit Sg2 and the first B illumination unit F11b (specifically, the third oblique light emitting region F11b3) are The angle formed by the first B illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range). Further, for example, the first C imaging direction in which the first C imaging unit I11c images the work W0 mounted on the mounting unit Sg2 and the first C illumination unit F11c (specifically, the second horizontal light emitting region F11c2) The angle formed by the first C illumination direction for irradiating the work W0 mounted on the mounting portion Sg2 with light may deviate within the permissible range (permissible angle range). Here, each permissible angle range depends on, for example, the shape and size of the light emitting region of each illumination unit, the shape and size of the work W0, and the like.
 ここで、上部発光領域F11a1の形状および寸法ならびにワークW0の形状および寸法と、許容角度範囲と、の関係について、2つの例を挙げて説明する。図20(a)は、第1A照明部F11aにおける上部発光領域F11a1の形状および寸法の一例を示す図である。図20(b)は、第1のワークW0の形状および寸法の一例を示す図である。図20(c)は、第2のワークW0の形状および寸法の一例を示す図である。図20(a)の例では、上部発光領域F11a1が、X方向に沿った幅W1の相互に対向する一対の辺と、Y方向に沿った長さL1の相互に対向する一対の辺と、を有する長方形状の領域である。図20(b)の例では、第1のワークW0が、X方向に沿った幅W2の相互に対向する一対の辺とY方向に沿った長さL2の相互に対応する一対の辺とを有する長方形状の底面と、高さH2と、を有する直方体状のものである。図20(c)の例では、第2のワークW0が、YZ平面に沿った直径φ3の真円状の相互に対向する一対の面と、X方向に沿った幅W3と、を有する円柱状のものである。ここでは、第1A撮像部I11aの撮像素子とワークW0との距離、ならびに上部発光領域F11a1とワークW0との距離、がともに260ミリメートル(mm)であるものとする。上部発光領域F11a1については、幅W1が180mmであり、長さL1が120mmであるものとする。また、第1A撮像部I11aの第1A光軸Pi11aが、ワークW0の中心を通るように設定されているものとする。 Here, the relationship between the shape and dimensions of the upper light emitting region F11a1 and the shape and dimensions of the work W0 and the allowable angle range will be described with two examples. FIG. 20A is a diagram showing an example of the shape and dimensions of the upper light emitting region F11a1 in the first A lighting unit F11a. FIG. 20B is a diagram showing an example of the shape and dimensions of the first work W0. FIG. 20 (c) is a diagram showing an example of the shape and dimensions of the second work W0. In the example of FIG. 20A, the upper light emitting region F11a1 has a pair of opposite sides having a width W1 along the X direction and a pair of opposite sides having a length L1 along the Y direction. It is a rectangular area having. In the example of FIG. 20B, the first work W0 has a pair of sides having a width W2 along the X direction facing each other and a pair of sides having a length L2 along the Y direction corresponding to each other. It is a rectangular parallelepiped having a rectangular bottom surface and a height H2. In the example of FIG. 20 (c), the second work W0 is a columnar column having a pair of perfectly opposed surfaces having a diameter of φ3 along the YZ plane and a width W3 along the X direction. belongs to. Here, it is assumed that the distance between the image sensor and the work W0 of the first A image pickup unit I11a and the distance between the upper light emitting region F11a1 and the work W0 are both 260 mm (mm). Regarding the upper light emitting region F11a1, it is assumed that the width W1 is 180 mm and the length L1 is 120 mm. Further, it is assumed that the first A optical axis Pi11a of the first A imaging unit I11a is set to pass through the center of the work W0.
 ここで、例えば、第1のワークW0について、幅W2が50mmであり、長さL2が30mmであり、高さH2が50mmである場合を想定する。この場合には、第1A撮像部I11aの第1A撮像方向と上部発光領域F11a1の第1A照明方向とが成す角度が約30度以下であれば、第1A撮像部I11aが、上部発光領域F11a1からの光の照射に応じて第1のワークW0の+Z方向を向いた上面Su2の全体から正反射光を受光することができる。このため、このような条件では、許容角度範囲は、約30度となる。 Here, for example, it is assumed that the width W2 is 50 mm, the length L2 is 30 mm, and the height H2 is 50 mm for the first work W0. In this case, if the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 30 degrees or less, the first A imaging unit I11a starts from the upper light emitting region F11a1. The specularly reflected light can be received from the entire upper surface Su2 of the first work W0 facing the + Z direction in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 30 degrees.
 また、ここで、例えば、第2のワークW0について、直径φ3が50mmであり、幅W3が40mmである場合を想定する。この場合には、第1A撮像部I11aの第1A撮像方向と上部発光領域F11a1の第1A照明方向とが成す角度が約12度以下であれば、第1A撮像部I11aが、上部発光領域F11a1からの光の照射に応じて第2のワークW0の側面Ss3のうちの-Z方向に平面視した場合に見える領域の全体から正反射光を受光することができる。このため、このような条件では、許容角度範囲は、約12度となる。 Further, here, for example, it is assumed that the diameter φ3 is 50 mm and the width W3 is 40 mm for the second work W0. In this case, if the angle formed by the first A imaging direction of the first A imaging unit I11a and the first A illumination direction of the upper light emitting region F11a1 is about 12 degrees or less, the first A imaging unit I11a starts from the upper light emitting region F11a1. The specularly reflected light can be received from the entire region of the side surface Ss3 of the second work W0 that can be seen in the −Z direction in a plan view in response to the irradiation of the light. Therefore, under such conditions, the permissible angle range is about 12 degrees.
 上記各実施形態において、搬送部Cv1,Cv2,Cv3,Cv4には、例えば、ベルトコンベアの代わりにワークW0を搬送可能なロボット等の異なる構成が適用されてもよい。この場合には、例えば、撮像装置12は、ワークW0を搬送可能なロボットとは別に、ワークW0を載置するための載置部としてのステージ等を有する構成が採用される。 In each of the above embodiments, different configurations such as a robot capable of transporting the work W0 instead of the belt conveyor may be applied to the transport units Cv1, Cv2, Cv3, and Cv4. In this case, for example, the imaging device 12 adopts a configuration having a stage or the like as a mounting portion for mounting the work W0 in addition to the robot capable of transporting the work W0.
 上記各実施形態において、例えば、検査システム1の動作が、統括制御部C0等の1つ以上の制御部によって制御されてもよい。ここで、例えば、検査システム1は、ワークW0の撮像を行う1つの撮像装置とみなしてもよい。 In each of the above embodiments, for example, the operation of the inspection system 1 may be controlled by one or more control units such as the integrated control unit C0. Here, for example, the inspection system 1 may be regarded as one imaging device that images the work W0.
 上記第2実施形態において、例えば、第1移動機構12t1と第1撮像ユニット12s1とを組み合わせた1つ目の構成、および第2移動機構12t2と第2撮像ユニット12s2とを組み合わせた2つ目の構成、のうちの一方の構成が存在していなくてもよい。 In the second embodiment, for example, the first configuration in which the first moving mechanism 12t1 and the first imaging unit 12s1 are combined, and the second configuration in which the second moving mechanism 12t2 and the second imaging unit 12s2 are combined. One of the configurations may not exist.
 なお、上記各実施形態および各種変形例をそれぞれ構成する全部または一部を、適宜、矛盾しない範囲で組み合わせ可能であることは、言うまでもない。 Needless to say, all or a part of each of the above embodiments and various modifications can be combined as appropriate and within a consistent range.
 1 検査システム
 12 撮像装置
 121~124 第1~4撮像装置
 12s 撮像ユニット
 12s1 第1撮像ユニット
 12s2 第2撮像ユニット
 12t 移動機構
 12t1 第1移動機構
 12t2 第2移動機構
 C0 統括制御部
 Cs2 撮像制御部
 Cs21 第1撮像制御部
 Cs22 第2撮像制御部
 Ct2 移動制御部
 Ct21 第1移動制御部
 Ct22 第2移動制御部
 Cv1,Cv2,Cv3,Cv4,Cv21,Cv22,Cv23,Cv24 搬送部
 F1 照明部
 F11 第1照明部
 F11a 第1A照明部
 F11a1 上部発光領域
 F11b 第1B照明部
 F11b1~F11b5 第1~5斜め発光領域
 F11c 第1C照明部
 F11c1~F11c3 第1~3水平発光領域
 F12 第2照明部
 I1 撮像部
 I11 第1撮像部
 I11a 第1A撮像部
 I11b 第1B撮像部
 I11c 第1C撮像部
 I12 第2撮像部
 Lz1 レンズ部
 Lz11 第1レンズ部
 Lz11a 第1Aレンズ部
 Lz11b 第1Bレンズ部
 Lz11c 第1Cレンズ部
 Lz12 第2レンズ部
 Pi11a 第1A光軸
 Pi11b 第1B光軸
 Pi11c 第1C光軸
1 Inspection system 12 Imaging devices 121 to 124 1st to 4th imaging devices 12s Imaging unit 12s1 1st imaging unit 12s2 2nd imaging unit 12t Mobile mechanism 12t1 1st mobile mechanism 12t2 2nd mobile mechanism C0 General control unit Cs2 Imaging control unit Cs21 1st imaging control unit Cs22 2nd imaging control unit Ct2 movement control unit Ct21 1st movement control unit Ct22 2nd movement control unit Cv1, Cv2, Cv3, Cv4, Cv21, Cv22, Cv23, Cv24 Transport unit F1 Lighting unit F11 1st Lighting unit F11a 1st A lighting unit F11a1 Upper light emitting area F11b 1B lighting unit F11b1 to F11b5 1st to 5th diagonal light emitting area F11c 1C lighting unit F11c1 to F11c3 1st to 3rd horizontal light emitting area F12 2nd lighting unit I1 Imaging unit I11 1st imaging unit I11a 1st A imaging unit I11b 1st B imaging unit I11c 1st C imaging unit I12 2nd imaging unit Lz1 lens unit Lz11 1st lens unit Lz11a 1st A lens unit Lz11b 1st B lens unit Lz11c 1st C lens unit Lz12 2nd Lens part Pi11a 1st A optical axis Pi11b 1B optical axis Pi11c 1C optical axis

Claims (15)

  1.  撮像対象物を載置するための載置部と、
     1つ以上の第1撮像部および1つ以上の第1照明部を含む第1撮像ユニットと、
     前記第1撮像ユニットを前記載置部に対して相対的に移動させる第1移動機構と、
     1つ以上の第2撮像部および1つ以上の第2照明部を含む第2撮像ユニットと、
     前記第2撮像ユニットを前記載置部に対して相対的に移動させる第2移動機構と、を備える、撮像装置。
    A mounting part for mounting the object to be imaged, and
    A first imaging unit including one or more first imaging units and one or more first illumination units,
    A first moving mechanism that moves the first imaging unit relative to the above-mentioned mounting portion, and
    A second imaging unit including one or more second imaging units and one or more second illumination units,
    An imaging device including a second moving mechanism that moves the second imaging unit relative to the above-described mounting portion.
  2.  請求項1に記載の撮像装置であって、
     前記第1移動機構と前記第2移動機構とが前記載置部を挟むように位置している、撮像装置。
    The imaging device according to claim 1.
    An imaging device in which the first moving mechanism and the second moving mechanism are located so as to sandwich the above-mentioned mounting portion.
  3.  請求項1または請求項2に記載の撮像装置であって、
     前記第1移動機構および前記第2移動機構のうちの少なくとも一方の移動機構は、多軸ロボットアームを含む、撮像装置。
    The imaging device according to claim 1 or 2.
    The moving mechanism of at least one of the first moving mechanism and the second moving mechanism is an imaging device including a multi-axis robot arm.
  4.  請求項1から請求項3の何れか1つの請求項に記載の撮像装置であって、
     前記第1移動機構による前記第1撮像ユニットの移動と前記第2移動機構による前記第2撮像ユニットの移動とによって、前記第1撮像ユニットおよび前記第2撮像ユニットが、前記載置部に載置された前記撮像対象物を全周にわたって撮像可能である、撮像装置。
    The imaging device according to any one of claims 1 to 3.
    By moving the first imaging unit by the first moving mechanism and moving the second imaging unit by the second moving mechanism, the first imaging unit and the second imaging unit are placed on the above-described mounting portion. An imaging device capable of imaging the image-imaging object over the entire circumference.
  5.  請求項1から請求項4の何れか1つの請求項に記載の撮像装置であって、
     前記第1撮像ユニットと前記第2撮像ユニットとが交互に移動するように、前記第1移動機構および前記第2移動機構の動作を制御する制御部、を備える、撮像装置。
    The imaging device according to any one of claims 1 to 4.
    An imaging device including a control unit that controls the operation of the first moving mechanism and the second moving mechanism so that the first imaging unit and the second imaging unit move alternately.
  6.  請求項1から請求項5の何れか1つの請求項に記載の撮像装置であって、
     前記1つ以上の第1照明部は、第1A照明部と、第1B照明部と、を含み、
     前記第1A照明部は、第1A照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射し、
     前記第1B照明部は、第1B照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する、撮像装置。
    The imaging device according to any one of claims 1 to 5.
    The one or more first lighting units include a first A lighting unit and a first B lighting unit.
    The 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
    The 1st B illumination unit is an image pickup apparatus that irradiates the image pickup object placed on the above-described placement unit with light in the direction of the 1st B illumination.
  7.  請求項6に記載の撮像装置であって、
     前記第1撮像部は、光学系を含み、
     前記第1撮像部から前記載置部に載置された前記撮像対象物に向かう前記光学系の光軸に沿った撮像方向は、前記第1B照明方向よりも前記第1A照明方向に近い、撮像装置。
    The imaging device according to claim 6.
    The first imaging unit includes an optical system and includes an optical system.
    The imaging direction along the optical axis of the optical system from the first imaging unit toward the imaging object mounted on the above-described stationary unit is closer to the first A illumination direction than the first B illumination direction. apparatus.
  8.  請求項6または請求項7に記載の撮像装置であって、
     前記1つ以上の第1撮像部は、第1A撮像部と、第1B撮像部と、第1C撮像部と、を含み、
     前記1つ以上の第1照明部は、前記第1A照明部と、前記第1B照明部と、第1C照明部と、を含み、
     前記第1A照明部が前記載置部に載置された前記撮像対象物を上方から照明している状態で前記第1A撮像部が前記載置部に載置された前記撮像対象物を上方から撮像し、
     前記第1B照明部が前記載置部に載置された前記撮像対象物を斜め上方から照明している状態で前記第1B撮像部が前記載置部に載置された前記撮像対象物を斜め上方から撮像し、
     前記第1C照明部が前記載置部に載置された前記撮像対象物を水平方向に向かって照明している状態で前記第1C撮像部が前記載置部に載置された前記撮像対象物を水平方向に向かって撮像する、撮像装置。
    The imaging device according to claim 6 or 7.
    The one or more first imaging units include a first A imaging unit, a first B imaging unit, and a first C imaging unit.
    The one or more first lighting units include the first A lighting unit, the first B lighting unit, and the first C lighting unit.
    The first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take a picture and
    The first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Imaged from above
    The image pickup object in which the first C imaging unit is placed on the prescriptive placement unit while the first C illumination unit is illuminating the image pickup target mounted on the front description placement unit in the horizontal direction. An image pickup device that captures images in the horizontal direction.
  9.  請求項8に記載の撮像装置であって、
     前記第1C照明部は、鉛直方向における高さよりも水平方向における幅が大きい発光領域を有する、撮像装置。
    The imaging device according to claim 8.
    The first C illumination unit is an imaging device having a light emitting region having a width larger in the horizontal direction than a height in the vertical direction.
  10.  請求項8または請求項9に記載の撮像装置であって、
     前記第1B照明部は、水平方向における幅よりも斜め上方向における長さが大きい発光領域を有する、撮像装置。
    The imaging device according to claim 8 or 9.
    The first B illumination unit is an imaging device having a light emitting region having a length larger in an obliquely upward direction than a width in a horizontal direction.
  11.  撮像対象物を載置するための載置部と、
     1つ以上の撮像部ならびに第1A照明部および第1B照明部を含む2つ以上の照明部を有する撮像ユニットと、
     前記撮像ユニットを前記載置部に対して相対的に移動させる移動機構と、を備え、
     前記第1A照明部は、第1A照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射し、
     前記第1B照明部は、第1B照明方向に向けて前記載置部に載置された前記撮像対象物に光を照射する、撮像装置。
    A mounting part for mounting the object to be imaged, and
    An imaging unit having one or more imaging units and two or more illumination units including a first A illumination unit and a first B illumination unit.
    A moving mechanism for moving the imaging unit relative to the above-described mounting portion is provided.
    The 1A illumination unit irradiates the image pickup object placed on the above-described installation unit with light in the direction of the 1A illumination.
    The 1st B illumination unit is an image pickup apparatus that irradiates the image pickup object placed on the above-described placement unit with light in the direction of the 1st B illumination.
  12.  請求項11に記載の撮像装置であって、
     前記1つ以上の撮像部のうちの第1A撮像部は、光学系を含み、
     前記第1A撮像部から前記載置部に載置された前記撮像対象物に向かう前記光学系の光軸に沿った撮像方向は、前記第1B照明方向よりも前記第1A照明方向に近い、撮像装置。
    The imaging device according to claim 11.
    The first A imaging unit of the one or more imaging units includes an optical system and includes an optical system.
    The image pickup direction along the optical axis of the optical system from the first A image pickup unit toward the image pickup target mounted on the above-mentioned mounting section is closer to the first A illumination direction than the first B illumination direction. apparatus.
  13.  請求項12に記載の撮像装置であって、
     前記1つ以上の撮像部は、前記第1A撮像部と、第1B撮像部と、第1C撮像部と、を含み、
     前記2つ以上の照明部は、前記第1A照明部と、前記第1B照明部と、第1C照明部と、を含み、
     前記第1A照明部が前記載置部に載置された前記撮像対象物を上方から照明している状態で前記第1A撮像部が前記載置部に載置された前記撮像対象物を上方から撮像し、
     前記第1B照明部が前記載置部に載置された前記撮像対象物を斜め上方から照明している状態で前記第1B撮像部が前記載置部に載置された前記撮像対象物を斜め上方から撮像し、
     前記第1C照明部が前記載置部に載置された前記撮像対象物を水平方向に向かって照明している状態で前記第1C撮像部が前記載置部に載置された前記撮像対象物を水平方向に向かって撮像する、撮像装置。
    The imaging device according to claim 12.
    The one or more imaging units include the first A imaging unit, the first B imaging unit, and the first C imaging unit.
    The two or more lighting units include the first A lighting unit, the first B lighting unit, and the first C lighting unit.
    The first A imaging unit illuminates the image pickup object placed on the previously described mounting portion from above, and the first A imaging unit mounts the imaging target on the previously described mounting portion from above. Take a picture and
    The first B imaging unit obliquely tilts the image pickup object mounted on the preambled place while the first B illumination unit illuminates the image pickup object placed on the previously described place from diagonally above. Imaged from above
    The image pickup object in which the first C imaging unit is placed on the prescriptive placement unit while the first C illumination unit is illuminating the image pickup target mounted on the front description placement unit in the horizontal direction. An image pickup device that captures images in the horizontal direction.
  14.  請求項13に記載の撮像装置であって、
     前記第1C照明部は、鉛直方向における高さよりも水平方向における幅が大きい発光領域を有する、撮像装置。
    The imaging device according to claim 13.
    The first C illumination unit is an imaging device having a light emitting region having a width larger in the horizontal direction than a height in the vertical direction.
  15.  請求項13または請求項14に記載の撮像装置であって、
     前記第1B照明部は、水平方向における幅よりも斜め上方向における長さが大きい発光領域を有する、撮像装置。
    The imaging device according to claim 13 or 14.
    The first B illumination unit is an imaging device having a light emitting region having a length larger in an obliquely upward direction than a width in a horizontal direction.
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