WO2021049460A1 - 圧電ポンプおよびポンプユニット - Google Patents

圧電ポンプおよびポンプユニット Download PDF

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Publication number
WO2021049460A1
WO2021049460A1 PCT/JP2020/033802 JP2020033802W WO2021049460A1 WO 2021049460 A1 WO2021049460 A1 WO 2021049460A1 JP 2020033802 W JP2020033802 W JP 2020033802W WO 2021049460 A1 WO2021049460 A1 WO 2021049460A1
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WIPO (PCT)
Prior art keywords
elastic plate
piezoelectric
pump
piezoelectric pump
state
Prior art date
Application number
PCT/JP2020/033802
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
一広 緒方
Original Assignee
京セラ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to CN202080056754.2A priority Critical patent/CN114222859A/zh
Priority to JP2021545525A priority patent/JP7337180B2/ja
Priority to US17/641,564 priority patent/US20220316467A1/en
Priority to EP20863625.8A priority patent/EP4030055B1/en
Publication of WO2021049460A1 publication Critical patent/WO2021049460A1/ja

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121—Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/09—Flow through the pump

Definitions

  • This disclosure relates to piezoelectric pumps and pump units.
  • the vibration source of the diaphragm is a piezoelectric element, and the characteristics of the pump are the same as those of the diaphragm pump. Further, if the vibration of the piezoelectric diaphragm composed of the piezoelectric element and the diaphragm and the vibration of the entire pump chamber do not match, the operation of the pump becomes unstable. Piezoelectric pumps have been required to improve pump characteristics such as operational stability.
  • the piezoelectric pump of the present disclosure is Piezoelectric elements with through holes and A first elastic plate that covers one opening of the through hole and has a communication hole that communicates with the through hole. A second elastic plate that covers the other opening of the through hole is provided.
  • the pump unit of the present disclosure is with the above piezoelectric pump A housing for accommodating the piezoelectric pump and The housing has a discharge port at a portion of the first elastic plate facing the communication hole.
  • FIG. 1 is a schematic perspective view showing a pump unit
  • FIG. 2 is a cross-sectional view taken along the cutting plane line AA of FIG.
  • FIG. 3 is a schematic perspective view showing a piezoelectric pump.
  • 4A and 4B are schematic cross-sectional views showing an operating state of the piezoelectric pump of the first embodiment.
  • the pump unit 100 includes a piezoelectric pump 1 and a housing 2 for accommodating the piezoelectric pump 1.
  • the piezoelectric pump 1 includes a piezoelectric element 10 having a through hole 10a, a first elastic plate 11 covering one opening of the through hole 10a, and a second elastic plate 12 covering the other opening of the through hole 10a. Be prepared.
  • the first elastic plate 11 has a communication hole 11a that communicates with the through hole 10a of the piezoelectric element 10.
  • the piezoelectric element 10 includes, for example, a piezoelectric body having a through hole 10a and surface electrodes provided on a pair of main surfaces of the piezoelectric body facing each other.
  • a piezoelectric body constituting the piezoelectric element piezoelectric ceramics such as lead zirconate titanate, barium titanate, potassium niobate / sodium niobate, and piezoelectric single crystals such as crystal and lithium tantalate can be used.
  • the surface electrode constituting the piezoelectric element silver, nickel, copper, silver-palladium or the like can be used.
  • the shape of the piezoelectric element 10 is not particularly limited as long as it has a through hole 10a.
  • the piezoelectric element 10 may have a plate shape, a columnar shape, a plate shape, a disc shape, a polygonal plate shape, or the like, and a columnar shape, a columnar shape, a polygonal columnar shape, or the like. And so on.
  • the position of the through hole 10a is not particularly limited, and either a plate shape or a columnar shape is provided at a position coaxial with the central axis of the piezoelectric body, for example.
  • the piezoelectric element 10 has a disk shape, and the through hole 10a is provided coaxially with the central axis of the piezoelectric body.
  • the piezoelectric element 10 is connected to an external circuit via, for example, a wiring member 5, and the piezoelectric pump 1 can be driven by controlling the applied voltage and vibrating the piezoelectric element 10. it can.
  • the piezoelectric element 10 can take the following form as a pattern of surface electrodes provided on a pair of opposing surfaces of the piezoelectric body.
  • the piezoelectric element 10 may be a separately excited type piezoelectric element having one surface electrode (a pair of surface electrodes) in which surface electrodes provided on one surface and the other surface spread in the surface direction on each surface. ..
  • the piezoelectric element 10 may be a so-called self-excited piezoelectric element in which the surface electrode provided on one surface includes a main surface electrode and a sub-surface electrode separated from the main surface electrode.
  • the optimum drive frequency can be adjusted for each piezoelectric pump 1, so that individual differences in the fluid flow rate of the piezoelectric pump 1 can be suppressed.
  • changes in fluid flow rate due to changes in environmental temperature such as ⁇ 20 ° C. to + 80 ° C., can be suppressed.
  • the shape of the first elastic plate 11 is not particularly limited as long as it is made of an elastically deformable material and covers one opening of the through hole 10a.
  • the shape of the second elastic plate 12 is not particularly limited as long as it is made of an elastically deformable material and covers the other opening of the through hole 10a.
  • the first elastic plate 11 is provided with a communication hole 11a that communicates with the through hole 10a of the piezoelectric element 10.
  • the first elastic plate 11 and the second elastic plate 12 can follow the deformation (vibration) of the piezoelectric element 10 by elastically deforming.
  • the first elastic plate 11 and the second elastic plate 12 when the piezoelectric element 10 is deformed to extend in the radial direction, the first elastic plate 11 and the second elastic plate 12 also extend in the radial direction. It may be elastically deformed.
  • the first elastic plate 11 and the second elastic plate 12 when the piezoelectric element 10 is deformed so as to shrink in the radial direction, the first elastic plate 11 and the second elastic plate 12 may be elastically deformed so as to shrink in the radial direction as well.
  • the piezoelectric element 10 when the piezoelectric element 10 is deformed to contract in the radial direction, the piezoelectric element 10 is deformed to extend in the thickness direction, and when the piezoelectric element 10 is deformed to extend in the radial direction, the piezoelectric element 10 is deformed. May be deformed to shrink in the thickness direction.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed, and the change from the state of FIG. 4A to the state of FIG. 4B and the change from the state of FIG. 4B to the state of FIG. 4A are repeated.
  • the volume of the internal space surrounded by the piezoelectric element 10, the first elastic plate 11, and the second elastic plate 12, fluid is repeatedly sucked in and discharged into the internal space through the communication hole 11a. , Acts as a pump.
  • the state of FIG. 4B (second state) is deformed so that the piezoelectric element 10 extends outward in the radial direction as compared with the state of FIG. 4A (first state).
  • the volume of the internal space increases. Due to the deformation from the first state to the second state, the fluid is sucked from the outside. Further, the deformation from the second state to the first state reduces the volume of the internal space and discharges the fluid to the outside.
  • a metal material such as stainless steel (SUS), brass and 42 alloy, and a resin material such as polybutylene terephthalate (PBT) and a liquid crystal polymer can be used. It can.
  • SUS stainless steel
  • PBT polybutylene terephthalate
  • liquid crystal polymer a resin material such as polybutylene terephthalate (PBT) and a liquid crystal polymer.
  • the 42 alloy is used, the difference in thermal expansion from the piezoelectric element 10 can be reduced, which is particularly effective in suppressing the change in the fluid flow rate due to the change in the environmental temperature.
  • the thickness of the first elastic plate 11 and the second elastic plate may be as long as it can follow the deformation of the piezoelectric element 10, and is, for example, 50 to 500 ⁇ m.
  • the communication holes 11a provided in the first elastic plate 11 may be one or a plurality as in the present embodiment.
  • the volume of the through hole 10a changes due to the deformation of the piezoelectric element 10, and the suction and discharge of the fluid are repeated. Since the characteristics of the piezoelectric element 10 directly affect the operation of the piezoelectric pump 1, the operation can be stabilized. It is also possible to control the volume change and control the flow rate with high accuracy. In this way, it is possible to improve the characteristics of the piezoelectric pump 1.
  • the housing 2 accommodates the above-mentioned piezoelectric pump 1, and has a discharge port 2a at a portion of the first elastic plate 11 facing the communication hole 11a.
  • the housing 2 of the present embodiment includes a top plate portion 21 facing the first elastic plate 11 and a cylindrical frame portion 22 that supports the top plate portion 21 and surrounds the piezoelectric pump 1. ..
  • the piezoelectric pump 1 is mounted on a mounting table and is housed so as to cover the piezoelectric pump 1.
  • the housing 2 may further include a bottom plate portion and may accommodate the piezoelectric pump 1 so as to cover the entire body.
  • the gap between the housed piezoelectric pump 1 and the housing serves as a fluid passage 4 for the fluid discharged to the outside of the housing 2 by the piezoelectric pump 1 to flow through.
  • the piezoelectric pump 1 When the piezoelectric pump 1 is operated and the piezoelectric pump 1 is deformed from the first state to the second state as described above, the fluid in the fluid passage 4 is sucked through the communication hole 11a, and the second state is changed to the first state. When deformed to, the sucked fluid is discharged from the communication hole 11a. At this time, the fluid is discharged to the outside of the housing 2 from the discharge port 2a located at the portion facing the communication hole 11a.
  • the fluid discharged by the pump unit 100 is not particularly limited.
  • the discharged fluid may be, for example, air or a functional fluid containing an fragrance, a disinfectant, an antibacterial agent, or the like.
  • the pump unit 100 is, for example, arranged inside an electronic device, used for cooling electronic parts, installed in a vehicle such as an automobile or in a house, or in a living space such as an amusement facility such as a movie theater, and is a functional fluid. Is used to discharge.
  • the material of the housing 2 a metal material such as stainless steel (SUS), brass, 42 alloy, or a resin material such as polybutylene terephthalate (PBT) or a liquid crystal polymer can be used.
  • the frame body portion 22 is joined to the outer peripheral portion of the top plate portion 21 to support the top plate portion 21.
  • the inner surface of the frame body portion 22 has a stepped shape, but the shape is such that the thickness is constant along the axial direction, and even if the top plate portion 21 is supported on the end surface.
  • the inner surface may have a concave groove, and the peripheral edge of the top plate portion 21 may be fitted into the concave groove to be supported.
  • an insertion port through which the wiring member 5 is inserted is provided in a part of the frame body portion 22, and the wiring member 5 is pulled out from the insertion port to the outside. Is not particularly limited.
  • the piezoelectric pump 1A of the present embodiment has the same configuration as that of the piezoelectric pump 1 of the first embodiment, except that the configurations of the first elastic plate 11A and the second elastic plate 12A are different from those of the piezoelectric pump 1 of the first embodiment.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1 of the first embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11A and the second elastic plate 12A have convex portions 13, 14 protruding outward in the axial direction of the through hole 10a of the piezoelectric element 10.
  • the convex portions 13 and 14 of the present embodiment have a shape in which a top portion (mountain) is located at the center of the first elastic plate 11A and the second elastic plate 12A, and for example, a conical shape, a truncated cone shape, a hemispherical shape, or the like. It may be.
  • the piezoelectric pump 1A of the second embodiment also operates in the same manner as the piezoelectric pump 1 of the first embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed to change from the first state of FIG. 5A to the second state of FIG. 5B and from the second state of FIG. 5B to the first state of FIG. 5A. And repeat.
  • the volume of the internal space surrounded by the piezoelectric element 10, the first elastic plate 11A, and the second elastic plate 12A is larger by the amount of the convex portions 13 and 14 as compared with the first embodiment.
  • the flow rate can be controlled with high accuracy while increasing the fluid flow rate. ..
  • the first elastic plate 11A having the convex portion 13 and the second elastic plate 12A having the convex portion 14 having the shape as in the present embodiment are formed by a known processing method such as press working. can do. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • FIGS. 6A to 6C are schematic cross-sectional views showing an operating state of the piezoelectric pump of the third embodiment.
  • the piezoelectric pump 1B of the present embodiment has the same configuration as that of the piezoelectric pump 1A of the second embodiment, except that the configurations of the first elastic plate 11B and the second elastic plate 12B are different from those of the piezoelectric pump 1A of the second embodiment.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1A of the second embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11B and the second elastic plate 12B have convex portions 13A and 14A, and the shape thereof is concentric with the first elastic plate 11B and the second elastic plate 12B. It is a ring of.
  • the piezoelectric pump 1B of the third embodiment also operates in the same manner as the piezoelectric pump 1A of the second embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed into one of the first state of FIG. 6A, the second state of FIG. 6B, and the third state of FIG. 6C.
  • the piezoelectric element 10 In the second state, the piezoelectric element 10 is deformed so as to extend outward in the radial direction as compared with the first state, and in the third state, the piezoelectric element 10 is deformed so as to contract inward in the radial direction as compared with the first state. ..
  • the state changes and the volume of the internal space changes according to the change in the voltage applied to the piezoelectric element 10.
  • the piezoelectric pump 1B repeatedly sucks and discharges fluid into the internal space through the communication hole 11a, and functions as a pump.
  • the present embodiment may take three states, but at the time of operation, the change may be repeated between any two states, or the change may be repeated between the three states. Since the volume of the internal space is different for each state, the fluid flow rate can be controlled by selecting and changing which of the three states.
  • the first elastic plate 11B having the convex portion 13A and the second elastic plate 12B having the convex portion 14A having the shape as in the present embodiment are formed by a known processing method such as press working. can do. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • the piezoelectric pump 1C of the present embodiment has the same configuration as that of the piezoelectric pump 1 of the first embodiment, except that the configurations of the first elastic plate 11C and the second elastic plate 12C are different from those of the piezoelectric pump 1 of the first embodiment.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1 of the first embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11C and the second elastic plate 12C have recesses 15 and 16 that enter inward in the axial direction of the through hole 10a of the piezoelectric element 10.
  • the recesses 15 and 16 of the present embodiment have a shape in which the top (valley) is located at the center of the first elastic plate 11C and the second elastic plate 12C, and are, for example, conical, truncated cone, hemispherical, or the like. There may be.
  • the piezoelectric pump 1C of the fourth embodiment also operates in the same manner as the piezoelectric pump 1 of the first embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed to change from the first state of FIG. 7A to the second state of FIG. 7B and from the second state of FIG. 7B to the first state of FIG. 7A. And repeat.
  • the volume of the internal space surrounded by the piezoelectric element 10, the first elastic plate 11C, and the second elastic plate 12C is such that the recesses 15 and 16 are formed in the through holes 10a as compared with the first embodiment. It gets smaller as it gets in.
  • the flow rate can be controlled with high accuracy while increasing the fluid flow rate. ..
  • the first elastic plate 11C having the recess 15 and the second elastic plate 12C having the recess 16 can be formed by a known processing method such as press working. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • the piezoelectric pump 1D of the present embodiment has the same configuration as that of the piezoelectric pump 1C of the fourth embodiment, except that the configurations of the first elastic plate 11D and the second elastic plate 12D are different from those of the fourth elastic plate 1C.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1C of the fourth embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11D and the second elastic plate 12D have recesses 15A and 16A, and the shape thereof is coaxial with the first elastic plate 11D and the second elastic plate 12D. It is cylindrical.
  • the piezoelectric pump 1D of the fifth embodiment also operates in the same manner as the piezoelectric pump 1C of the fourth embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed into one of the first state of FIG. 8A, the second state of FIG. 8B, and the third state of FIG. 8C.
  • the piezoelectric element 10 In the second state, the piezoelectric element 10 is deformed so as to extend outward in the radial direction as compared with the first state, and in the third state, the piezoelectric element 10 is deformed so as to contract inward in the radial direction as compared with the first state. ..
  • the state changes and the volume of the internal space changes according to the change in the voltage applied to the piezoelectric element 10.
  • the piezoelectric pump 1D functions as a pump by repeatedly sucking and discharging the fluid into the internal space through the communication hole 11a.
  • the present embodiment can take three states as in the piezoelectric pump 1B of the third embodiment, but during operation, the change may be repeated between any two states, and the change is repeated between the three states. You may. Since the volume of the internal space is different for each state, the fluid flow rate can be controlled by selecting and changing which of the three states.
  • the first elastic plate 11D having the recess 15A and the second elastic plate 12D having the recess 16A having the shape as in the present embodiment are formed by a known processing method such as press working. Can be done. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • FIGS. 9A and 9B are schematic cross-sectional views showing an operating state of the piezoelectric pump according to the sixth embodiment.
  • the piezoelectric pump 1E of the present embodiment has the same configuration as that of the piezoelectric pump 1A of the second embodiment, except that the configurations of the first elastic plate 11E and the second elastic plate 12E are different from those of the piezoelectric pump 1A of the second embodiment.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1A of the second embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11E and the second elastic plate 12E have convex portions 13 and 14 protruding outward in the axial direction of the through hole 10a of the piezoelectric element 10, and a flat portion surrounding the convex portion. It has 17 and 18, and further has a groove-shaped portion G between the convex portion 13 and the flat portion 17 and between the convex portion 14 and the flat portion 18, respectively.
  • the piezoelectric pump 1E of the sixth embodiment also operates in the same manner as the piezoelectric pump 1A of the second embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed to change from the first state of FIG. 9A to the second state of FIG. 9B and from the second state of FIG. 9B to the first state of FIG. 9A. And repeat.
  • the volume change of the internal space between the first state and the second state is the same as that in the second embodiment. Since the first elastic plate 11E and the second elastic plate 12E have the groove-shaped portion G, the first elastic plate 11E and the first elastic plate 12E and the second elastic plate 12E have a smaller force than the second embodiment having no groove-shaped portion G.
  • the elastic plate 12E of 2 can be deformed. As a result, even if the voltage applied to the piezoelectric element 10 is lower than that of the second embodiment, the first elastic plate 11E and the second elastic plate 12E are deformed and the same as in the second embodiment. A fluid flow rate can be achieved.
  • the first elastic plate 11E and the second elastic plate 12E having the groove-shaped portion G can be formed by a known processing method such as press working. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • the piezoelectric pump 1F of the present embodiment has the same configuration as that of the piezoelectric pump 1C of the fourth embodiment, except that the configurations of the first elastic plate 11F and the second elastic plate 12F are different from those of the fourth elastic plate 1C.
  • the configuration of the above is designated by the same reference numeral as that of the piezoelectric pump 1C of the fourth embodiment, and detailed description thereof will be omitted.
  • the first elastic plate 11F and the second elastic plate 12F have recesses 15 and 16 that enter inward in the axial direction of the through hole 10a of the piezoelectric element 10, and the flat portion 17 that surrounds the recess. It has 18, and further has a groove-shaped portion G between the recess 15 and the flat portion 17 and between the recess 16 and the flat portion 18, respectively.
  • the piezoelectric pump 1F of the seventh embodiment also operates in the same manner as the piezoelectric pump 1C of the fourth embodiment.
  • the piezoelectric element 10 By applying a voltage to the piezoelectric element 10, the piezoelectric element 10 is deformed to change from the first state of FIG. 10A to the second state of FIG. 10B and from the second state of FIG. 10B to the first state of FIG. 10A. And repeat.
  • the volume change of the internal space between the first state and the second state is the same as that in the fourth embodiment. Since the first elastic plate 11F and the second elastic plate 12F have the groove-shaped portion G, the first elastic plate 11F and the first elastic plate 12F and the second elastic plate 12F have a smaller force than the fourth embodiment having no groove-shaped portion G.
  • the elastic plate 12F of 2 can be deformed. As a result, even if the voltage applied to the piezoelectric element 10 is lower than that of the fourth embodiment, the first elastic plate 11F and the second elastic plate 12F are deformed and the same as in the fourth embodiment. A fluid flow rate can be achieved.
  • the first elastic plate 11F and the second elastic plate 12F having the groove-shaped portion G can be formed by a known processing method such as press working. Further, in the case of a resin material, it can be formed by a known processing method such as molding.
  • a raw material such as lead zirconate titanate for forming the piezoelectric element 10 is prepared by a ball mill or the like, and the obtained mixed raw material is calcined and synthesized at 700 ° C. to 1200 ° C.
  • This calcined synthetic raw material is crushed with a ball mill or the like, a binder for molding is added, and then granules are prepared with a spray dryer.
  • a molded body having through holes is produced by press molding with a molding die having a shaft pin near the center.
  • the piezoelectric body obtained by degreasing and firing this molded product is processed into a desired shape by wrapping or the like, and the surface electrode paste is printed and then baked at 500 ° C. to 800 ° C. to form a surface electrode. Then, a voltage of about 3 kV / mm is applied to obtain a piezoelectric element 10 having a desired piezoelectric characteristic.
  • thermosetting epoxy adhesive is printed on the first elastic plate 11 and the second elastic plate 12 obtained by processing a plate-shaped member made of 42 alloy into a desired shape by press working or the like.
  • the first elastic plate 11 and the second elastic plate 12 are adhered to the piezoelectric element 10 by heating the printed portion of the adhesive at 80 ° C. to 200 ° C. while bringing it into contact with the piezoelectric element 10.
  • a wiring member 5 for example, a lead wire whose side surface is coated with resin is prepared. Then, the wiring member 5 is electrically and mechanically bonded to the surface electrode of the piezoelectric element 10 by using a bonding member such as solder. From the above, the piezoelectric pump 1 is obtained.
  • a 42 alloy housing 2 may be prepared, the piezoelectric pump 1 may be housed in the housing 2, and the piezoelectric pump 1 and the housing 2 may be joined if necessary. From the above, the pump unit 100 is obtained.
  • the volume of the through hole changes due to the deformation of the piezoelectric element, and the fluid is repeatedly sucked in and discharged. Since the characteristics of the piezoelectric element directly affect the operation of the piezoelectric pump, the operation can be stabilized. It is also possible to control the volume change and control the flow rate with high accuracy. In this way, it is possible to improve the characteristics of the piezoelectric pump.
  • the characteristics of the pump unit can be improved by providing the above-mentioned piezoelectric pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
PCT/JP2020/033802 2019-09-11 2020-09-07 圧電ポンプおよびポンプユニット WO2021049460A1 (ja)

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CN202080056754.2A CN114222859A (zh) 2019-09-11 2020-09-07 压电泵以及泵单元
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US17/641,564 US20220316467A1 (en) 2019-09-11 2020-09-07 Piezoelectric pump and pump unit
EP20863625.8A EP4030055B1 (en) 2019-09-11 2020-09-07 Piezoelectric pump and pump unit

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JPWO2021049460A1 (enrdf_load_stackoverflow) 2021-03-18
EP4030055A4 (en) 2023-10-04
US20220316467A1 (en) 2022-10-06
EP4030055B1 (en) 2025-03-12
JP7337180B2 (ja) 2023-09-01
CN114222859A (zh) 2022-03-22

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