JP7337180B2 - 圧電ポンプおよびポンプユニット - Google Patents
圧電ポンプおよびポンプユニット Download PDFInfo
- Publication number
- JP7337180B2 JP7337180B2 JP2021545525A JP2021545525A JP7337180B2 JP 7337180 B2 JP7337180 B2 JP 7337180B2 JP 2021545525 A JP2021545525 A JP 2021545525A JP 2021545525 A JP2021545525 A JP 2021545525A JP 7337180 B2 JP7337180 B2 JP 7337180B2
- Authority
- JP
- Japan
- Prior art keywords
- elastic plate
- piezoelectric
- pump
- hole
- piezoelectric pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004891 communication Methods 0.000 claims description 17
- 239000012530 fluid Substances 0.000 description 27
- 239000000463 material Substances 0.000 description 13
- 238000003672 processing method Methods 0.000 description 11
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 239000007769 metal material Substances 0.000 description 8
- 238000000465 moulding Methods 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 5
- 229920001707 polybutylene terephthalate Polymers 0.000 description 4
- 239000002994 raw material Substances 0.000 description 3
- 229910001369 Brass Inorganic materials 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- -1 polybutylene terephthalate Polymers 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003242 anti bacterial agent Substances 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000003205 fragrance Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- UYLYBEXRJGPQSH-UHFFFAOYSA-N sodium;oxido(dioxo)niobium Chemical compound [Na+].[O-][Nb](=O)=O UYLYBEXRJGPQSH-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
- F04B39/121—Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/09—Flow through the pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019165693 | 2019-09-11 | ||
| JP2019165693 | 2019-09-11 | ||
| PCT/JP2020/033802 WO2021049460A1 (ja) | 2019-09-11 | 2020-09-07 | 圧電ポンプおよびポンプユニット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021049460A1 JPWO2021049460A1 (enrdf_load_stackoverflow) | 2021-03-18 |
| JP7337180B2 true JP7337180B2 (ja) | 2023-09-01 |
Family
ID=74865677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021545525A Active JP7337180B2 (ja) | 2019-09-11 | 2020-09-07 | 圧電ポンプおよびポンプユニット |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20220316467A1 (enrdf_load_stackoverflow) |
| EP (1) | EP4030055B1 (enrdf_load_stackoverflow) |
| JP (1) | JP7337180B2 (enrdf_load_stackoverflow) |
| CN (1) | CN114222859A (enrdf_load_stackoverflow) |
| WO (1) | WO2021049460A1 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024015457A (ja) * | 2020-12-08 | 2024-02-02 | ソニーグループ株式会社 | 流体制御装置、及び電子機器 |
| JP2024015459A (ja) * | 2020-12-09 | 2024-02-02 | ソニーグループ株式会社 | ダイヤフラムポンプ、電子機器、製造装置及び製造方法 |
| USD991984S1 (en) * | 2021-11-30 | 2023-07-11 | Murata Manufacturing Co., Ltd. | Piezoelectric pump |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009148005A1 (ja) | 2008-06-05 | 2009-12-10 | 株式会社村田製作所 | 圧電マイクロブロア |
| CN108344198A (zh) | 2018-02-01 | 2018-07-31 | 浙江师范大学 | 一种基于新型气体压缩装置的微型节流制冷系统 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58140491A (ja) * | 1982-02-16 | 1983-08-20 | Matsushita Electric Ind Co Ltd | 流れ発生装置 |
| AU681470B2 (en) * | 1993-12-28 | 1997-08-28 | Westonbridge International Limited | Micropump |
| JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電／電歪膜型素子及びその製造方法 |
| GB9808182D0 (en) * | 1998-04-17 | 1998-06-17 | The Technology Partnership Plc | Liquid projection apparatus |
| US6869275B2 (en) * | 2002-02-14 | 2005-03-22 | Philip Morris Usa Inc. | Piezoelectrically driven fluids pump and piezoelectric fluid valve |
| DE20313727U1 (de) * | 2003-09-04 | 2005-01-13 | Thinxxs Gmbh | Piezoaktor |
| GB0508194D0 (en) * | 2005-04-22 | 2005-06-01 | The Technology Partnership Plc | Pump |
| KR101088943B1 (ko) * | 2006-12-09 | 2011-12-01 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 마이크로 블로어 |
| CN103527452A (zh) * | 2008-06-03 | 2014-01-22 | 株式会社村田制作所 | 压电微型鼓风机 |
| JP5316644B2 (ja) * | 2009-10-01 | 2013-10-16 | 株式会社村田製作所 | 圧電マイクロブロア |
| JP4934750B1 (ja) * | 2011-05-31 | 2012-05-16 | 株式会社メトラン | ポンプユニット、呼吸補助装置 |
| JP5928160B2 (ja) * | 2012-05-29 | 2016-06-01 | オムロンヘルスケア株式会社 | 圧電ポンプおよびこれを備えた血圧情報測定装置 |
| WO2013187271A1 (ja) * | 2012-06-11 | 2013-12-19 | 株式会社村田製作所 | ブロア |
| JP5692468B2 (ja) * | 2012-08-10 | 2015-04-01 | 株式会社村田製作所 | ブロア |
| WO2014148103A1 (ja) * | 2013-03-22 | 2014-09-25 | 株式会社村田製作所 | 圧電ブロア |
| DE112015000889B4 (de) * | 2014-02-21 | 2023-04-20 | Murata Manufacturing Co., Ltd. | Gebläse |
| CN103925199B (zh) * | 2014-05-06 | 2016-06-15 | 吉林大学 | 一种新型叠层式压电隔膜泵 |
| WO2015178104A1 (ja) * | 2014-05-20 | 2015-11-26 | 株式会社村田製作所 | ブロア |
| CN103994059B (zh) * | 2014-06-05 | 2015-04-08 | 吉林大学 | 一种铙钹形腔体的共振式压电风机 |
| GB2557088B (en) * | 2015-08-31 | 2021-05-19 | Murata Manufacturing Co | Blower |
| CN105508207B (zh) * | 2016-01-20 | 2019-01-22 | 吉林大学 | 一种钹型泵体压电泵 |
| TWI602995B (zh) * | 2016-09-05 | 2017-10-21 | 研能科技股份有限公司 | 流體控制裝置 |
| TWI625468B (zh) * | 2016-09-05 | 2018-06-01 | 研能科技股份有限公司 | 流體控制裝置 |
| TWI613367B (zh) * | 2016-09-05 | 2018-02-01 | 研能科技股份有限公司 | 流體控制裝置 |
| US10622543B2 (en) * | 2017-01-11 | 2020-04-14 | The Boeing Company | Piezoelectric bimorph disk outer boundary design and method for performance optimization |
| CN110621418B (zh) * | 2017-05-12 | 2020-12-15 | 株式会社村田制作所 | 振动装置、雨滴或污垢去除装置、超声波换能装置和泵装置 |
| JP6973615B2 (ja) * | 2018-02-13 | 2021-12-01 | 株式会社村田製作所 | 流体制御装置 |
| GB2595078B (en) * | 2019-03-27 | 2022-10-12 | Murata Manufacturing Co | Piezoelectric pump |
| WO2020195075A1 (ja) * | 2019-03-27 | 2020-10-01 | 株式会社村田製作所 | 圧電ポンプ |
| EP4191062A4 (en) * | 2020-09-30 | 2024-08-14 | Murata Manufacturing Co., Ltd. | FLUID CONTROL DEVICE |
| JP2024015457A (ja) * | 2020-12-08 | 2024-02-02 | ソニーグループ株式会社 | 流体制御装置、及び電子機器 |
-
2020
- 2020-09-07 JP JP2021545525A patent/JP7337180B2/ja active Active
- 2020-09-07 WO PCT/JP2020/033802 patent/WO2021049460A1/ja unknown
- 2020-09-07 CN CN202080056754.2A patent/CN114222859A/zh active Pending
- 2020-09-07 EP EP20863625.8A patent/EP4030055B1/en active Active
- 2020-09-07 US US17/641,564 patent/US20220316467A1/en not_active Abandoned
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009148005A1 (ja) | 2008-06-05 | 2009-12-10 | 株式会社村田製作所 | 圧電マイクロブロア |
| CN108344198A (zh) | 2018-02-01 | 2018-07-31 | 浙江师范大学 | 一种基于新型气体压缩装置的微型节流制冷系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4030055A1 (en) | 2022-07-20 |
| WO2021049460A1 (ja) | 2021-03-18 |
| JPWO2021049460A1 (enrdf_load_stackoverflow) | 2021-03-18 |
| EP4030055A4 (en) | 2023-10-04 |
| US20220316467A1 (en) | 2022-10-06 |
| EP4030055B1 (en) | 2025-03-12 |
| CN114222859A (zh) | 2022-03-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7337180B2 (ja) | 圧電ポンプおよびポンプユニット | |
| US11661935B2 (en) | Blower | |
| EP2568174B1 (en) | Fluid control device | |
| US9028226B2 (en) | Fluid control device | |
| US10626861B2 (en) | Blower | |
| EP3346131B1 (en) | Fluid control apparatus and method for adjusting fluid control apparatus | |
| EP2568175B1 (en) | Fluid control device | |
| EP2568177B1 (en) | Fluid control device | |
| JP6269907B1 (ja) | バルブ、気体制御装置 | |
| US20180066650A1 (en) | Pump | |
| KR101320136B1 (ko) | 진동 액추에이터 | |
| JP6028779B2 (ja) | 流体制御装置 | |
| WO2019221121A1 (ja) | 圧電ガスポンプ | |
| US20210017976A1 (en) | Micro pump | |
| WO2003078166A1 (fr) | Actionneur piezo-electrique et tete d'injection de fluide equipee de celui-ci | |
| WO2013187270A1 (ja) | ブロア | |
| US9826315B2 (en) | Acoustic generator, acoustic generation device, and electronic apparatus | |
| EP3689613A1 (en) | Liquid agent application device | |
| US20150145380A1 (en) | Piezoelectric actuator | |
| JP6595248B2 (ja) | 音響発生器 | |
| JP2006014534A (ja) | 超音波振動子及びそれを用いた超音波モータ | |
| JP2006021115A (ja) | 超音波振動子及びそれを用いた超音波モータ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220302 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230228 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230428 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230801 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230822 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 7337180 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |