JPWO2021049460A1 - - Google Patents

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Publication number
JPWO2021049460A1
JPWO2021049460A1 JP2021545525A JP2021545525A JPWO2021049460A1 JP WO2021049460 A1 JPWO2021049460 A1 JP WO2021049460A1 JP 2021545525 A JP2021545525 A JP 2021545525A JP 2021545525 A JP2021545525 A JP 2021545525A JP WO2021049460 A1 JPWO2021049460 A1 JP WO2021049460A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021545525A
Other languages
Japanese (ja)
Other versions
JP7337180B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021049460A1 publication Critical patent/JPWO2021049460A1/ja
Application granted granted Critical
Publication of JP7337180B2 publication Critical patent/JP7337180B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/121—Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/09—Flow through the pump

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021545525A 2019-09-11 2020-09-07 圧電ポンプおよびポンプユニット Active JP7337180B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019165693 2019-09-11
JP2019165693 2019-09-11
PCT/JP2020/033802 WO2021049460A1 (ja) 2019-09-11 2020-09-07 圧電ポンプおよびポンプユニット

Publications (2)

Publication Number Publication Date
JPWO2021049460A1 true JPWO2021049460A1 (enrdf_load_stackoverflow) 2021-03-18
JP7337180B2 JP7337180B2 (ja) 2023-09-01

Family

ID=74865677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021545525A Active JP7337180B2 (ja) 2019-09-11 2020-09-07 圧電ポンプおよびポンプユニット

Country Status (5)

Country Link
US (1) US20220316467A1 (enrdf_load_stackoverflow)
EP (1) EP4030055B1 (enrdf_load_stackoverflow)
JP (1) JP7337180B2 (enrdf_load_stackoverflow)
CN (1) CN114222859A (enrdf_load_stackoverflow)
WO (1) WO2021049460A1 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024015457A (ja) * 2020-12-08 2024-02-02 ソニーグループ株式会社 流体制御装置、及び電子機器
JP2024015459A (ja) * 2020-12-09 2024-02-02 ソニーグループ株式会社 ダイヤフラムポンプ、電子機器、製造装置及び製造方法
USD991984S1 (en) * 2021-11-30 2023-07-11 Murata Manufacturing Co., Ltd. Piezoelectric pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
WO2009148005A1 (ja) * 2008-06-05 2009-12-10 株式会社村田製作所 圧電マイクロブロア
CN108344198A (zh) * 2018-02-01 2018-07-31 浙江师范大学 一种基于新型气体压缩装置的微型节流制冷系统

Family Cites Families (30)

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AU681470B2 (en) * 1993-12-28 1997-08-28 Westonbridge International Limited Micropump
JP3501860B2 (ja) * 1994-12-21 2004-03-02 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
GB9808182D0 (en) * 1998-04-17 1998-06-17 The Technology Partnership Plc Liquid projection apparatus
US6869275B2 (en) * 2002-02-14 2005-03-22 Philip Morris Usa Inc. Piezoelectrically driven fluids pump and piezoelectric fluid valve
DE20313727U1 (de) * 2003-09-04 2005-01-13 Thinxxs Gmbh Piezoaktor
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
KR101088943B1 (ko) * 2006-12-09 2011-12-01 가부시키가이샤 무라타 세이사쿠쇼 압전 마이크로 블로어
CN103527452A (zh) * 2008-06-03 2014-01-22 株式会社村田制作所 压电微型鼓风机
JP5316644B2 (ja) * 2009-10-01 2013-10-16 株式会社村田製作所 圧電マイクロブロア
JP4934750B1 (ja) * 2011-05-31 2012-05-16 株式会社メトラン ポンプユニット、呼吸補助装置
JP5928160B2 (ja) * 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
WO2013187271A1 (ja) * 2012-06-11 2013-12-19 株式会社村田製作所 ブロア
JP5692468B2 (ja) * 2012-08-10 2015-04-01 株式会社村田製作所 ブロア
WO2014148103A1 (ja) * 2013-03-22 2014-09-25 株式会社村田製作所 圧電ブロア
DE112015000889B4 (de) * 2014-02-21 2023-04-20 Murata Manufacturing Co., Ltd. Gebläse
CN103925199B (zh) * 2014-05-06 2016-06-15 吉林大学 一种新型叠层式压电隔膜泵
WO2015178104A1 (ja) * 2014-05-20 2015-11-26 株式会社村田製作所 ブロア
CN103994059B (zh) * 2014-06-05 2015-04-08 吉林大学 一种铙钹形腔体的共振式压电风机
GB2557088B (en) * 2015-08-31 2021-05-19 Murata Manufacturing Co Blower
CN105508207B (zh) * 2016-01-20 2019-01-22 吉林大学 一种钹型泵体压电泵
TWI602995B (zh) * 2016-09-05 2017-10-21 研能科技股份有限公司 流體控制裝置
TWI625468B (zh) * 2016-09-05 2018-06-01 研能科技股份有限公司 流體控制裝置
TWI613367B (zh) * 2016-09-05 2018-02-01 研能科技股份有限公司 流體控制裝置
US10622543B2 (en) * 2017-01-11 2020-04-14 The Boeing Company Piezoelectric bimorph disk outer boundary design and method for performance optimization
CN110621418B (zh) * 2017-05-12 2020-12-15 株式会社村田制作所 振动装置、雨滴或污垢去除装置、超声波换能装置和泵装置
JP6973615B2 (ja) * 2018-02-13 2021-12-01 株式会社村田製作所 流体制御装置
GB2595078B (en) * 2019-03-27 2022-10-12 Murata Manufacturing Co Piezoelectric pump
WO2020195075A1 (ja) * 2019-03-27 2020-10-01 株式会社村田製作所 圧電ポンプ
EP4191062A4 (en) * 2020-09-30 2024-08-14 Murata Manufacturing Co., Ltd. FLUID CONTROL DEVICE
JP2024015457A (ja) * 2020-12-08 2024-02-02 ソニーグループ株式会社 流体制御装置、及び電子機器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140491A (ja) * 1982-02-16 1983-08-20 Matsushita Electric Ind Co Ltd 流れ発生装置
WO2009148005A1 (ja) * 2008-06-05 2009-12-10 株式会社村田製作所 圧電マイクロブロア
CN108344198A (zh) * 2018-02-01 2018-07-31 浙江师范大学 一种基于新型气体压缩装置的微型节流制冷系统

Also Published As

Publication number Publication date
EP4030055A1 (en) 2022-07-20
WO2021049460A1 (ja) 2021-03-18
EP4030055A4 (en) 2023-10-04
US20220316467A1 (en) 2022-10-06
EP4030055B1 (en) 2025-03-12
JP7337180B2 (ja) 2023-09-01
CN114222859A (zh) 2022-03-22

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