WO2021005922A1 - Dispositif vibrant - Google Patents

Dispositif vibrant Download PDF

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Publication number
WO2021005922A1
WO2021005922A1 PCT/JP2020/021772 JP2020021772W WO2021005922A1 WO 2021005922 A1 WO2021005922 A1 WO 2021005922A1 JP 2020021772 W JP2020021772 W JP 2020021772W WO 2021005922 A1 WO2021005922 A1 WO 2021005922A1
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WO
WIPO (PCT)
Prior art keywords
vibrating
diaphragm
vibrator
view
vibrating device
Prior art date
Application number
PCT/JP2020/021772
Other languages
English (en)
Japanese (ja)
Inventor
橋本　順一
遠藤　潤
大寺　昭三
豊 石浦
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2021530527A priority Critical patent/JPWO2021005922A1/ja
Priority to CN202090000643.5U priority patent/CN217615844U/zh
Publication of WO2021005922A1 publication Critical patent/WO2021005922A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Definitions

  • the present invention relates to a vibration device that generates vibration.
  • a tactile presentation device has been proposed for a touch pad or the like, which transmits vibration when the user touches it so that the user can feel that he / she is operating through the touch pad or the like.
  • Patent Document 1 proposes a tactile presentation device that gives tactile feedback to a user by using a piezoelectric film.
  • the tactile presentation device described in Patent Document 1 includes a vibrating portion and a second vibrating portion that vibrates together with the vibrating portion.
  • an object of the present invention is to provide a vibration device that improves the amplitude.
  • the vibrating device is connected to a flat plate-shaped vibrating plate, a vibrator connected to the main surface of the vibrating plate, and vibrates in the surface direction of the vibrating plate, and is arranged at least a part around the vibrating plate.
  • the vibrator is provided with a cushioning material connected to and connected to a housing for fixing the vibration plate, and when the vibrator vibrates, the vibrator moves in the opposite phase to the vibration plate. And.
  • the oscillator moves in the opposite phase to the diaphragm.
  • the diaphragm moves to the right.
  • the center of gravity of the vibrator moves to the left, and the center of gravity of the diaphragm moves to the right.
  • the center of gravity of the oscillator and the diaphragm as a whole does not move significantly. If the center of gravity of the vibrator and the diaphragm as a whole moves significantly, an elastic force is generated in the cushioning material, and the amplitude of the diaphragm decreases.
  • the vibrating device since the movement of the center of gravity is suppressed, the elastic force generated in the cushioning material is also suppressed. Therefore, the vibrating device can increase the amplitude.
  • the amplitude can be improved.
  • FIG. 1A is a perspective view of the vibrating device 100 according to the first embodiment as viewed from the back side
  • FIG. 1B is an exploded perspective view of the vibrating device 100.
  • FIG. 2A is a perspective view in which the diaphragm 3 is connected to the vibrator 1
  • FIG. 2B is an exploded perspective view in which the diaphragm 3 is connected to the vibrator 1.
  • FIG. 3 is a schematic cross-sectional view taken along the line II shown in FIG. 1 (A).
  • FIG. 4A is a perspective view of the oscillator 1
  • FIG. 4B is an exploded perspective view of the oscillator 1.
  • 5 (A) is a plan view of the oscillator 1, and FIG.
  • FIG. 5 (B) is a sectional view of the oscillator 1 II-II.
  • FIG. 6A is a schematic view showing the configuration of the vibration unit 106 including the drive circuit 170 of the piezoelectric film 12, and
  • FIG. 6B is a plan view of the oscillator 1.
  • FIG. 7 is a graph showing the displacement of the diaphragm 3 with respect to the Young's modulus of the cushion material 4 in the vibration device 100.
  • FIG. 8A is a schematic cross-sectional view of the vibrating device 100 showing a case where the vibrator 1 and the vibrating plate 3 vibrate in the same phase, and FIG. 8B shows the vibrator 1 and the vibrating plate 3 being reversed.
  • FIG. 9 (A) is an exploded perspective view of the vibrating device 111 according to the modified example 1 of the vibrating device 100
  • FIG. 9 (B) is an exploded perspective view of the vibrating device 112 according to the modified example 2 of the vibrating device 100.
  • FIG. 10 is a graph showing the displacement of the diaphragm 3 with respect to the Young's modulus of each cushion material in the vibrating device 100, the vibrating device 111, and the vibrating device 112.
  • FIG. 11A is a perspective view of the vibrating device 200 according to the second embodiment as viewed from the back side
  • FIG. 11B is an exploded perspective view of the vibrating device 200.
  • FIG. 12 (A) is a perspective view of the vibrator 21 of the vibrating device 200
  • FIG. 12 (B) is an exploded perspective view of the vibrator 21
  • 13 (A) is an enlarged side view of a part of FIG. 12 (A)
  • FIG. 13 (B) is a perspective view of the electromagnet 22.
  • 14 (A) is a schematic cross-sectional view cut along the line III-III shown in FIG. 11 (A), and FIG. 14 (B) shows a case where the vibrator 21 and the diaphragm 3 vibrate in the same phase.
  • FIG. 14 (C) is a schematic cross-sectional view of the vibrating device 200, showing a case where the vibrator 21 and the diaphragm 3 vibrate in opposite phases.
  • FIG. 15 is a schematic cross-sectional view of the vibrator 211 according to the first modification of the vibration device 200.
  • FIG. 16A is a perspective view of the vibrating device 300 according to the third embodiment as viewed from the back side, and FIG. 16B is an exploded perspective view of the vibrating device 300.
  • FIG. 17A is a perspective view of the vibrator 71 of the vibrating device 300, and FIG. 17B is an exploded perspective view of the vibrator 71.
  • FIG. 1A is a perspective view of the vibrating device 100 according to the first embodiment as viewed from the back side
  • FIG. 1B is an exploded perspective view of the vibrating device 100
  • FIG. 2A is a perspective view in which the diaphragm 3 is connected to the vibrator 1
  • FIG. 2B is an exploded perspective view in which the diaphragm 3 is connected to the vibrator 1.
  • FIG. 3 is a cross-sectional view taken along the line II shown in FIG. 1 (A). 1 (A), 1 (B), and 3 show a state of being arranged in a holder 5 which is a housing of an electronic device.
  • FIGS. 1A is a perspective view of the vibrating device 100 according to the first embodiment as viewed from the back side
  • FIG. 1B is an exploded perspective view of the vibrating device 100.
  • FIG. 2A is a perspective view in which the diaphragm 3 is connected to the vibrator 1
  • FIG. 2B is an exploded perspective view in which the diaphra
  • the width direction (horizontal direction) of the vibrating device 100 is defined as the X-axis direction
  • the length direction (vertical direction) is defined as the Y-axis direction
  • the thickness direction will be described as the Z-axis direction. In each figure, wiring is omitted for convenience of explanation except for a part.
  • FIG. 3 shows the support portion 13 as a spring.
  • the vibrating device 100 of the present embodiment includes a diaphragm 3, an oscillator 1, a holder 5, and a cushioning material 4.
  • the diaphragm 3 is a flat plate having a first main surface 18 and a second main surface 19.
  • the first main surface 18 and the second main surface 19 have a rectangular shape in a plan view.
  • the second main surface 19 receives a user's touch operation, for example, when the vibrating device 100 is arranged in the housing of the electronic device.
  • the cushion material 4 has a rectangular shape in a plan view.
  • the cushion material 4 includes an opening 16.
  • the opening 16 has a rectangular shape in a plan view.
  • the opening 16 is formed in an area larger than that of the vibrator 1 in a plan view.
  • the oscillator 1 is located inside the opening 16 in a plan view.
  • the cushion material 4 is arranged so as to surround the vibrator 1.
  • the cushion material 4 may not be arranged so as to surround the vibrator 1.
  • the cushion material 4 may be arranged at least in a part around the vibrator 1.
  • the diaphragm 3 is connected to the holder 5 via the cushion material 4.
  • the cushion material 4 is made of a material that is soft to some extent so as not to hinder the movement of the diaphragm 3. The hardness of the cushion material will be described in detail later.
  • the cushioning material 4 is an example of the "cushioning material” in the present invention.
  • the holder 5 is an example of the “housing” in the present invention.
  • the oscillator 1 is connected to the first main surface 18 of the diaphragm 3.
  • the oscillator 1 is connected to the diaphragm 3 via a spacer 17.
  • the vibrator 1 is connected by the spacer 17 so as to be separated from the diaphragm 3 by the thickness of the spacer 17 in the Z-axis direction.
  • the oscillator 1 is unlikely to come into contact with the diaphragm 3 even if it vibrates in the Y-axis direction.
  • the vibrator 1 is connected to a drive circuit (not shown) and constitutes a vibration unit described later together with the diaphragm 3 and the vibration plate 3.
  • FIG. 4 (A) is a perspective view of the oscillator 1
  • FIG. 4 (B) is an exploded perspective view of the oscillator 1.
  • 5 (A) is a plan view of the oscillator 1
  • FIG. 5 (B) is a sectional view of the oscillator 1 II-II.
  • the oscillator 1 includes a frame-shaped member 10, a piezoelectric film 12, a support portion 13, a vibrating portion 14, and a connecting member 15.
  • the frame-shaped member 10 has a rectangular shape in a plan view.
  • the frame-shaped member 10 has a rectangular opening 11.
  • the openings 11 consist of two first openings 11A arranged at both ends of the frame-shaped member 10 in the Y-axis direction and two second openings 11B arranged at both ends in the X-axis direction.
  • the first opening 11A has a rectangular shape and has a long shape along the X-axis direction of the frame-shaped member 10.
  • the second opening 11B is a rectangular opening that is long along the Y-axis direction of the frame-shaped member 10. Further, both ends of the second opening 11B in the Y-axis direction are further extended in a rectangular shape toward the central axis of the frame-shaped member 10 (line II-II in FIG. 5A).
  • the vibrating portion 14 has a rectangular shape in a plan view and is arranged inside the opening 11.
  • the area of the vibrating portion 14 is smaller than the area of the opening 11.
  • the support portion 13 connects the vibrating portion 14 and the frame-shaped member 10, and supports the vibrating portion 14 on the frame-shaped member 10.
  • the support portion 13 has a long rectangular shape along the X-axis direction of the frame-shaped member 10, and holds the vibrating portion 14 at both ends of the vibrating portion 14 in the Y-axis direction. That is, the length of the support portion 13 in the direction orthogonal to the direction in which the piezoelectric film 12 expands and contracts is longer than the length in the direction in which the piezoelectric film 12 expands and contracts.
  • the frame-shaped member 10, the vibrating portion 14, and the supporting portion 13 are made of the same member (for example, acrylic resin, PET, polycarbonate, glass epoxy, FRP, metal, glass, etc.). That is, the frame-shaped member 10, the vibrating portion 14, and the supporting portion 13 are formed by punching one rectangular plate member along the shapes of the first opening 11A and the second opening 11B.
  • the frame-shaped member 10, the vibrating portion 14, and the supporting portion 13 may be separate members, but can be easily manufactured by being formed of the same member. Alternatively, by being formed of the same member, it is not necessary to use another member such as rubber (a member having creep deterioration) to support the vibrating portion 14, and the vibrating portion 14 can be stably held for a long period of time. ..
  • the piezoelectric film 12 is connected to the frame-shaped member 10 and the vibrating portion 14.
  • the piezoelectric film 12 is an example of a film that deforms in the plane direction when a voltage is applied.
  • the piezoelectric film 12 has a long rectangular shape along the Y-axis direction of the frame-shaped member 10 in a plan view.
  • the piezoelectric film 12 is made of, for example, polyvinylidene fluoride (PVDF).
  • the piezoelectric film 12 may be made of a chiral polymer.
  • the chiral polymer for example, L-type polylactic acid (PLLA) or D-type polylactic acid (PDLA) is used.
  • the electronic device provided with the vibrating member in this example can be vibrated in the same manner under any humidity environment.
  • PLLA is used for the piezoelectric film 12
  • PLLA is a highly permeable material
  • the electrode and the vibrating part added to the PLLA are transparent materials, the internal state of the device can be visually recognized. It will be easier.
  • PLLA is not pyroelectric, it can vibrate in the same manner under any temperature environment.
  • the piezoelectric film 12 is made of PLLA, the piezoelectric film 12 is cut so that each outer periphery is approximately 45 ° with respect to the stretching direction to have piezoelectricity.
  • the first end 121 of the piezoelectric film 12 in the Y-axis direction is connected to the first end 101 of the frame-shaped member 10 in the Y-axis direction.
  • the second end 122 of the piezoelectric film 12 is connected to the vibrating portion 14 closer to the second end 142 than the first end 141 in the Y-axis direction.
  • the second end 122 of the piezoelectric film 12 may be connected to the vibrating portion 14 closer to the first end 141 than the second end 142 in the Y-axis direction. In this case, since the piezoelectric film 12 can secure the length in the Y-axis direction, the output can be increased.
  • the piezoelectric film 12 is connected to the frame-shaped member 10 and the vibrating portion 14 via the connecting member 15.
  • the frame-shaped member 10 has a long rectangular shape along the X-axis direction of the frame-shaped member 10 in a plan view.
  • the connecting member 15 has a certain thickness, and connects the piezoelectric film 12 and the vibrating portion 14 at a position separated to some extent so that the piezoelectric film 12 does not come into contact with the vibrating portion 14.
  • the electrodes (not shown) provided on both main surfaces of the piezoelectric film 12 do not come into contact with the vibrating portion 14, so that even if the piezoelectric film 12 expands and contracts and the vibrating portion 14 vibrates, the electrodes are not scraped. ..
  • the connecting member 15 is made of, for example, metal, PET, polycarbonate (PC), polyimide, ABS resin, or the like.
  • the connecting member 15 connects the piezoelectric film 12 and the vibrating portion 14 (and the piezoelectric film 12 and the frame-shaped member 10) with an adhesive or the like.
  • the piezoelectric film 12 is connected to the frame-shaped member 10 and the vibrating portion 14 via the connecting member 15 in a state where a certain amount of tension is applied.
  • the piezoelectric film 12 is deformed in the plane direction when a voltage is applied. Specifically, the piezoelectric film 12 expands and contracts in the Y-axis direction when a voltage is applied. As the piezoelectric film 12 expands and contracts in the Y-axis direction, the vibrating portion 14 vibrates in the Y-axis direction.
  • FIG. 6A is a schematic view showing the configuration of the vibration unit 106 including the drive circuit 170 of the piezoelectric film 12.
  • FIG. 6B is a plan view of the oscillator 1.
  • the vibration unit 106 includes a piezoelectric film 12, a vibration unit 14, and a drive circuit 170.
  • the drive circuit 170 expands and contracts the piezoelectric film 12 when a user applies a voltage to the piezoelectric film 12 via an operator such as a switch.
  • the piezoelectric film 12 has flat electrodes formed on both main surfaces.
  • the drive circuit 170 expands and contracts the piezoelectric film 12 by applying a voltage to the planar electrodes. For example, when the drive circuit 170 applies a negative voltage to the piezoelectric film 12 and the piezoelectric film 12 contracts, the vibrating portion 14 moves in the Y-axis direction (FIG. 6 (B)) as shown in FIG. 6 (B). Displace to the right inside).
  • the plane electrode may be made of any material, but for example, aluminum or copper nickel is used. Copper nickel is resistant to corrosion, is soft (low elastic modulus), and has a small change in elastic modulus due to temperature changes. Therefore, copper nickel does not hinder the expansion and contraction of the piezoelectric film 12, and is suitable as a highly durable electrode.
  • the drive circuit 170 applies a positive voltage to the piezoelectric film 12, the piezoelectric film 12 stretches.
  • the piezoelectric film 12 is fixed in a tensioned state. Therefore, when the piezoelectric film 12 is stretched, the vibrating portion 14 is displaced in the direction opposite to that when the piezoelectric film 12 is contracted due to the applied tension.
  • the vibrator 1 vibrates means “the vibrating part 14 vibrates”
  • the direction in which the vibrator 1 vibrates means “the direction in which the vibrating part 14 moves”. is there.
  • the oscillator 1 is connected to the diaphragm 3 via a spacer 17. Therefore, the vibration of the vibrator 1 is transmitted to the diaphragm 3 via the spacer 17.
  • the diaphragm 3 also vibrates in conjunction with each other along the Y-axis direction. Therefore, the vibrator 1 vibrates when the vibrating portion 14 vibrates in the opening 11 of the frame-shaped member 10 in the plane direction, that is, along the Y-axis direction.
  • FIG. 7 is a graph showing the displacement of the diaphragm 3 with respect to the Young's modulus of the cushion material 4.
  • FIG. 7 is a simulation of the displacement amplitude of the diaphragm 3 by changing the Young's modulus of the cushion material 4 when a constant voltage is applied to the piezoelectric film 12.
  • the diaphragm 3 vibrates with a relatively large amplitude.
  • the vibrator 1 vibrates in the opposite phase to the diaphragm 3.
  • the Young's modulus of the cushion material 4 is greater than approximately 1.0 ⁇ 10 6 Pa, the amplitude of the vibration plate 3 is suddenly reduced.
  • the vibrator 1 vibrates in the same phase with respect to the diaphragm 3.
  • the cushion material 4 becomes harder as the Young's modulus increases, and is therefore less likely to be deformed.
  • the cushion material 4 becomes softer as the Young's modulus decreases, so that it becomes more easily deformed. That is, when the cushion material 4 is soft, the amplitude of the diaphragm 3 becomes large.
  • FIG. 8A is a schematic cross-sectional view of the vibrating device 100 showing a case where the vibrator 1 and the vibrating plate 3 vibrate in the same phase, and FIG. 8B shows the vibrator 1 and the vibrating plate 3 being reversed. It is a schematic cross-sectional view of the vibrating apparatus 100 which showed the case of vibrating in a phase.
  • both the oscillator 1 and the diaphragm 3 move to the left.
  • the center of gravity of the vibrator 1 and the diaphragm 3 as a whole moves largely to the left.
  • the movement of the center of gravity of the vibrator 1 and the entire diaphragm 3 is transmitted to the cushion material 4 connected to the diaphragm 3.
  • an elastic force is generated in the cushion material 4, and a force for returning the diaphragm 3 to its original state acts. Therefore, the amplitude of the diaphragm 3 becomes small.
  • the oscillator 1 and the diaphragm 3 vibrate in a vibration form having opposite phases.
  • the vibrator 1 and the diaphragm 3 vibrate in a vibration form having opposite phases, for example, as shown in FIG. 8 (B)
  • the vibrator 1 moves to the left
  • the diaphragm 3 moves to the right.
  • the center of gravity of the vibrator 1 moves to the left
  • the center of gravity of the diaphragm 3 moves to the right. Since the center of gravity of the vibrator 1 and the diaphragm 3 as a whole is balanced on the left and right, they do not move significantly from the position before the vibration.
  • the movement of the center of gravity of the vibrator 1 and the entire diaphragm 3 is transmitted to the cushion material 4 connected to the diaphragm 3.
  • an elastic force is generated in the cushion material 4, and a force for returning the diaphragm 3 to its original state acts.
  • the vibrating device 100 can keep the amplitude large.
  • the vibration device 100 can increase the amplitude when the cushion material 4 has a predetermined rigidity and the vibrations of the vibrator 1 and the diaphragm 3 are out of phase.
  • the piezoelectric film is shown as an example of the "film that deforms in the plane direction by applying a voltage", but the "film that deforms in the plane direction by applying a voltage” is limited to the piezoelectric film. is not.
  • Other examples of the "film that deforms in the plane direction when a voltage is applied” include an electrostrictive film, an electret film, a composite film, and an electroactive polymer film.
  • the electroactive film is a film that generates stress by being electrically driven or a film that is deformed to generate displacement.
  • the frame-shaped member 10 and the vibrating portion 14 do not have to be rectangular in a plan view.
  • the frame-shaped member 10 and the vibrating portion 14 may have a polygonal shape, a circular shape, an elliptical shape, or the like.
  • FIG. 9 (A) is an exploded perspective view of the vibrating device 111 according to the modified example 1 of the vibrating device 100
  • FIG. 9 (B) is an exploded perspective view of the vibrating device 112 according to the modified example 2 of the vibrating device 100. is there.
  • Regarding the description of the vibrating device 111 and the vibrating device 112 only the configuration different from the vibrating device 100 according to the first embodiment will be described, and the rest will be omitted.
  • the vibrating device 111 has a cushion material 41 and a cushion material 42.
  • the cushion material 41 and the cushion material 42 have a rectangular shape having a long plan view in the X-axis direction, and are arranged along both ends of the diaphragm 3 in the Y-axis direction.
  • the vibrating device 111 shortens the length of the cushion material in the Y-axis direction, and is arranged only at both ends of the diaphragm 3 in the Y-axis direction. Therefore, the cushioning materials 41 and 42 of the vibrating device 111 can hold the diaphragm 3 while increasing the amplitude of the diaphragm 3.
  • the vibrating device 112 has four cushion materials 43, a cushion material 44, a cushion material 45, and a cushion material 46.
  • the four cushion materials 43, the cushion material 44, the cushion material 45, and the cushion material 46 have a rectangular shape in a plan view, and are arranged at the four corners of the diaphragm 3, respectively.
  • the ratio of the area of the cushion material to the vibrating device 111 when viewed in a plan view is smaller than that of the cushion material 4 of the vibrating device 100. Further, the ratio of the area of the cushion material to the vibrating device 112 when viewed in a plan view is smaller than that of the cushion material 41 and the cushion material 42 of the vibrating device 111.
  • the cushion material used in each vibrating device had the same thickness and material.
  • FIG. 10 is a graph showing the displacement of the diaphragm 3 with respect to the Young's modulus of each cushion material in the vibrating device 100, the vibrating device 111, and the vibrating device 112.
  • FIG. 10 shows the simulation results of the vibrating device 111 and the vibrating device 112 added to FIG. 7.
  • the vibrating device 111 can obtain a large amplitude of the diaphragm 3 up to a range in which the Young's modulus of the cushion material (cushion materials 41, 42) is higher than that of the vibrating device 100.
  • the vibrating device 112 can obtain a large amplitude of the diaphragm 3 up to a range in which the Young's modulus of the cushion material (cushion material 43 to 46) is higher than that of the vibrating device 111.
  • the vibrating device can output a large amplitude of the diaphragm 3 up to a range in which the Young's modulus of the cushion material is higher.
  • changing the area of the cushion material with respect to the vibrating device when viewed in a plan view affects the amplitude of the diaphragm 3 in the same manner as changing the rigidity of the cushion material. Therefore, the amplitude of the vibrating device can be adjusted by the ratio of the area of the cushion material to the vibrating device when viewed in a plan view.
  • FIG. 11A is a perspective view of the vibrating device 200 according to the second embodiment as viewed from the back side
  • FIG. 11B is an exploded perspective view of the vibrating device 200
  • 12 (A) is a perspective view of the vibrator 21 of the vibrating device 200
  • FIG. 12 (B) is an exploded perspective view of the vibrator 21.
  • Regarding the description of the vibrating device 200 only the configuration different from that of the vibrating device 100 according to the first embodiment will be described, and the rest will be omitted.
  • the vibrating device 200 includes a diaphragm 3, an oscillator 21, a cushioning material 4, and a holder 5.
  • the vibrating device 200 is different from the vibrating device 100 in that the vibrator 21 is provided instead of the vibrator 1.
  • the vibrator 21 includes an electromagnet 22, a frame-shaped member 20, a support portion 23, a vibrating portion 24, and a fixing portion 26.
  • the fixing portion 26 includes an electromagnet fixing member 25 and a diaphragm fixing member 27. The fixing portion 26 fixes the electromagnet 22 and the frame-shaped member 20, respectively.
  • the diaphragm fixing member 27 has a rectangular shape when viewed.
  • the diaphragm fixing member 27 has a rectangular opening 47.
  • the diaphragm fixing member 27 includes an electromagnet fixing member 25 at one end in the Y-axis direction.
  • the electromagnet 22 is fixed to the fixing portion 26 by the electromagnet fixing member 25.
  • the frame-shaped member 20 is fixed to the fixing portion 26 by the diaphragm fixing member 27.
  • the diaphragm fixing member 27 and the electromagnet fixing member 25 are made of the same member (for example, acrylic resin, PET, polycarbonate, glass epoxy, FRP, metal, glass, etc.).
  • the frame-shaped member 20 has a rectangular shape in a plan view.
  • the frame-shaped member 20 has a rectangular opening 31.
  • the openings 31 include a first opening 31A arranged at one end of the frame-shaped member 20 in the Y-axis direction, two second openings 31B arranged at both ends in the X-axis direction, and a frame-shaped member. It is composed of a third opening 31C arranged at the other end of 20 in the Y-axis direction.
  • the first opening 31A and the third opening 31C are rectangular and have a long shape along the X-axis direction of the frame-shaped member 10.
  • both ends of the third opening 31C in the X-axis direction are further extended in a rectangular shape toward the central axis of the frame-shaped member 20 (line BB in FIG. 11B).
  • the second opening 31B is a rectangular opening that is long along the Y-axis direction of the frame-shaped member 10.
  • the vibrating portion 24 has a rectangular shape in a plan view and is arranged inside the opening 31.
  • the area of the vibrating portion 24 is smaller than the area of the opening 31.
  • the vibrating portion 24 is partially bent in the Z-axis direction on the side where the electromagnet 22 is arranged. That is, a part of the vibrating portion 24 is orthogonal to the vibrating direction (Y-axis direction) of the vibrating portion 24.
  • the facing portion 28 is a plane of the vibrating portion 24 that is orthogonal to the Y-axis direction.
  • the facing portion 28 is located at a position facing the end surface 53 of the electromagnet 22.
  • the electromagnet 22 is arranged at a position overlapping the third opening 31C in a plan view.
  • Three electromagnets 22 are arranged.
  • the electromagnets 22 are arranged side by side along the X-axis direction so that the end surface 53 of the electromagnet 22 and the facing portion 28 are parallel to each other.
  • the number of electromagnets 22 is not limited to three.
  • the oscillator 21 may include one, two, or four or more electromagnets 22.
  • the support portion 23 connects the vibrating portion 24 and the frame-shaped member 20, and supports the vibrating portion 24 to the frame-shaped member 20.
  • the support portion 23 has a long rectangular shape along the X-axis direction of the frame-shaped member 20, and holds the vibrating portion 24 at both ends of the vibrating portion 24 in the Y-axis direction. That is, the length of the support portion 23 in the direction orthogonal to the direction in which the vibrating portion 24 vibrates (X-axis direction) is longer than the length in the direction in which the vibrating portion 24 vibrates (Y-axis direction).
  • four support portions 23 are provided near the four corners of the vibrating portion 24, but the number of the supporting portions 23 is one to three or five or more, and any of the surroundings of the vibrating portion 24. It may be provided in the crab.
  • the frame-shaped member 20, the vibrating portion 24, and the supporting portion 23 are formed of the same member (for example, metal). That is, the frame-shaped member 20, the vibrating portion 24, and the supporting portion 23 are formed from one rectangular plate member.
  • the frame-shaped member 20, the vibrating portion 24, and the supporting portion 23 may be separate members.
  • the facing portion 28 may be formed by connecting another member to the vibrating portion 24. The facing portion 28 may not be formed. In this case, the vibrating portion 24 is made of metal, and one end of the vibrating portion 24 becomes the facing portion 28.
  • FIG. 13 (A) is an enlarged side view of a part of FIG. 12 (A), and FIG. 13 (B) is a perspective view of the electromagnet 22.
  • FIG. 13A omits the fixing portion 26.
  • FIG. 14 (A) is a schematic cross-sectional view taken along the line III-III shown in FIG. 11 (A).
  • FIG. 14B is a schematic cross-sectional view of the vibrating device 200 showing a case where the vibrator 21 and the diaphragm 3 vibrate in the same phase.
  • FIG. 14C is a schematic cross-sectional view of the vibrating device 200 showing a case where the vibrator 21 and the diaphragm 3 vibrate in opposite phases.
  • 14 (A) to 14 (C) show the support portion 23 as a spring.
  • the facing portion 28 includes a magnet 29.
  • the magnet 29 is arranged so as to cover the facing portion 28 on the side facing the end surface 53 of the electromagnet 22 in the facing portion 28.
  • the magnet 29 is arranged so that the north pole and the south pole are arranged along the Y-axis direction.
  • the surface of the magnet 29 facing the electromagnet 22 is the north pole
  • the surface of the magnet 29 in contact with the facing portion 28 is the south pole.
  • the surface of the magnet 29 facing the electromagnet 22 may be the south pole
  • the surface of the magnet 29 facing the electromagnet 22 may be the north pole.
  • the electromagnet 22 is arranged so as to maintain a slight gap 54 between the magnet 29 and the end surface 53 of the electromagnet 22.
  • the electromagnet 22 is non-contact with the magnet 29.
  • the surface of the magnet 29 facing the electromagnet 22 is formed in the same area as the facing portion 28. That is, the magnet 29 is arranged on the entire surface of the facing portion 28. As a result, the magnetic force generated by the electromagnet 22 is transmitted to the plane of the facing portion 28 facing the electromagnet 22. Therefore, the magnetic force generated by the electromagnet 22 is efficiently transmitted to the vibrating unit 24.
  • the magnet 29 does not have to cover the entire surface of the facing portion 28, and may be arranged in a part of the facing portion 28. Further, when the facing portion 28 is made of a magnetic material, the magnet 29 may not be provided.
  • the electromagnet 22 includes a core member 51 and a conductor portion 52.
  • the core member 51 has a columnar shape.
  • the cross section of the core member 51 is circular, but the cross section of the core member 51 may be an ellipse, or a rectangle or polygon with rounded corners.
  • the material of the core member 51 is preferably a metal such as iron or a material having a high magnetic permeability such as ferrite.
  • the conductor portion 52 is a linear conductor whose outer circumference is insulatingly coated.
  • the center of the conductor portion 52 is wound around the core member 51.
  • the conductor portion 52 forms a coil. Both ends of the conductor portion 52 are drawn out from the core member 51 and connected to a drive circuit (not shown).
  • the vibrator 21 is connected to the diaphragm 3. Further, the oscillator 21 is connected to a drive circuit (not shown) and constitutes a vibration unit together with the diaphragm 3.
  • the electromagnet 22 When an alternating current is applied to the core member 51 by a drive circuit (not shown), the electromagnet 22 generates a magnetic field. The north and south poles generated at both ends of the electromagnet 22 are periodically switched according to the frequency of alternating current.
  • the end face 53 of the magnet 29 facing the electromagnet 22 is the north pole. Therefore, when an N pole is generated on the end surface 53 of the electromagnet 22 facing the magnet 29, the electromagnet 22 and the magnet 29 repel each other. Therefore, the vibrating unit 24 moves in the direction away from the electromagnet 22 (to the left in FIG. 14A) along the Y-axis direction.
  • the S pole is generated on the end face 53, the electromagnet 22 and the magnet 29 come close to each other. Therefore, the vibrating unit 24 moves in the direction approaching the electromagnet 22 (to the right in FIG. 14A) along the Y-axis direction. Therefore, the vibrating unit 24 vibrates along the Y-axis direction according to the frequency of the alternating current.
  • the vibrator 21 vibrates along the Y-axis direction.
  • the oscillator 21 is connected to the diaphragm 3. Therefore, the vibration of the vibrator 21 is transmitted to the diaphragm 3. Therefore, when the vibrator 21 vibrates, the diaphragm 3 also vibrates in conjunction with each other along the Y-axis direction.
  • the oscillator 21 and the diaphragm 3 vibrate in a vibration form having opposite phases.
  • the vibrator 21 and the diaphragm 3 vibrate in a vibration form having opposite phases, for example, as shown in FIG. 14C
  • the vibrator 21 moves to the right
  • the diaphragm 3 moves to the left.
  • the center of gravity of the vibrator 21 moves to the right
  • the center of gravity of the diaphragm 3 moves to the left.
  • the center of gravity of the vibrator 21 and the diaphragm as a whole does not move significantly from the position before the vibration.
  • the vibrating device 200 can increase the amplitude.
  • the electromagnet 22 vibrates the vibrating portion 24 in a non-contact state with the magnet 29. Therefore, the electromagnet 22 is not expanded or contracted by vibration. Therefore, the electromagnet 22 is not plastically deformed, and the vibrating device 200 is strong against impact.
  • FIG. 15 is a schematic cross-sectional view of the vibrator 211 according to the first modification of the vibrating device 200. Regarding the description of the modification 1 of the vibrating device 200, only the configuration different from that of the vibrating device 200 according to the second embodiment will be described, and the rest will be omitted. Further, FIG. 15 shows a state in which the vibrator 211 is connected to the diaphragm 3.
  • the oscillator 211 is connected to the first main surface 18 of the diaphragm 3.
  • the vibrator 211 includes an electromagnet 62, a frame-shaped member 60, a support portion 63, a vibrating portion 64, a magnet 65, and a fixing portion 66.
  • the frame-shaped member 60 includes a flat plate portion 91 and a protruding portion 92.
  • the flat plate portion 91 is connected to the first main surface 18 of the diaphragm 3.
  • the projecting portion 92 projects from the flat plate portion 91 into the vibrator 211 along the Z-axis direction.
  • the protrusions 92 are formed at two positions at intervals along the Y-axis direction.
  • the fixed portion 66 has a rectangular parallelepiped box shape with one side open. The open side of the fixed portion 66 is connected to the flat plate portion 91 so as to cover the edge portion of the flat plate portion 91.
  • the vibrating portion 64 is arranged between the two protruding portions 92.
  • Each of the support portions 63 is bridged between the end portion of the vibrating portion 64 and the protruding portion 92. That is, the support portion 63 connects the vibrating portion 64 and the protruding portion 92, and supports the vibrating portion 64 on the protruding portion 92.
  • the support portion 63 is a coil-shaped tension spring. Therefore, the support portion 63 supports the vibrating portion 64 between the projecting portions 92 while maintaining the tension.
  • the support portion 63 may be a spring other than the coiled tension spring.
  • the support portion 63 may be, for example, a linear spring or a compression spring.
  • the support portion 63 may be any as long as it supports the vibrating portion 64 between the protruding portions 92 while maintaining tension, and the arrangement and number of the vibrating portions 64 can be appropriately changed. As a result, the vibrating unit 64 can vibrate along the Y-axis direction.
  • the magnet 65 is connected to the vicinity of the center of the vibrating portion 64 in a plan view.
  • the magnet 65 is arranged so that the S pole and the N pole are aligned along the Y-axis direction.
  • the south pole of the magnet 65 is on the left side of the paper in FIG. 15, and the north pole of the magnet 65 is on the right side of the paper in FIG.
  • the electromagnet 62 is arranged at a position facing the magnet 65 of the fixing portion 66.
  • the axial direction of the electromagnet 62 is the Z-axis direction.
  • the electromagnet 62 is connected to a drive circuit (not shown).
  • the electromagnet 62 When an alternating current is applied to the electromagnet 62 by a drive circuit (not shown), the electromagnet 62 generates a magnetic field. The north and south poles generated at both ends of the electromagnet 62 are periodically switched according to the frequency of alternating current. When an north pole is generated on the surface of the electromagnet 62 facing the magnet 65, the north pole of the magnet 65 moves away from the electromagnet 62, and the south pole of the magnet 65 approaches the electromagnet 62. Therefore, the magnet 65 moves to the left of the paper surface in FIG. 15 along the Y-axis direction.
  • FIG. 16A is a perspective view of the vibrating device 300 according to the third embodiment as viewed from the back side
  • FIG. 16B is an exploded perspective view of the vibrating device 300
  • FIG. 17A is a perspective view of the vibrator 71 of the vibrating device 300
  • FIG. 17B is an exploded perspective view of the vibrator 71.
  • Regarding the description of the vibrating device 300 only the configuration different from that of the vibrating device 100 according to the first embodiment will be described, and the rest will be omitted.
  • the vibrating device 300 includes a diaphragm 3, an oscillator 71, a cushioning material 4, and a holder 5.
  • the vibrating device 200 differs from the vibrating device 100 in that the vibrator 71 is provided instead of the vibrator 1.
  • the oscillator 71 includes a wire rod 72, a frame-shaped member 70, a support portion 73, a vibrating portion 74, a first fixing member 76, and a second fixing member 77. Be prepared.
  • the frame-shaped member 70 has a rectangular shape in a plan view.
  • the frame-shaped member 70 has a rectangular opening 75.
  • the opening 75 is formed substantially in the center of the frame-shaped member 70 in a plan view.
  • the opening 75 has a long shape along the Y-axis direction of the frame-shaped member 70.
  • the frame-shaped member 70 includes a first fixing member 76 near the center of one end surface in the Y-axis direction of the opening 75 in the X-axis direction.
  • the first fixing member 76 has a tubular shape.
  • the vibrating portion 74 has a rectangular shape in a plan view and is arranged inside the opening 75.
  • the area of the vibrating portion 74 is smaller than the area of the opening 75.
  • the vibrating portion 74 includes a second fixing member 77 at one end in the Y-axis direction.
  • the second fixing member 77 has a tubular shape.
  • the second fixing member 77 is provided on the side of the end of the vibrating portion 74 that is far from the side where the first fixing member 76 is provided, but the first fixing member of the ends of the vibrating portion 74 is provided. It may be provided on the side closer to the side where 76 is provided.
  • the frame-shaped member 70 and the vibrating portion 74 are made of the same member (for example, acrylic resin, PET, polycarbonate, glass epoxy, FRP, metal, glass, etc.). That is, the frame-shaped member 70 and the vibrating portion 74 are formed by punching one rectangular plate member along the shapes of the opening 75 and the vibrating portion 74.
  • the frame-shaped member 70 and the vibrating portion 74 may be separate members, but can be easily manufactured by being formed of the same member.
  • the support portion 73 connects the vibrating portion 74 and the frame-shaped member 70, and supports the vibrating portion 74 to the frame-shaped member 70.
  • Each of the support portions 73 is bridged at one end near the four corners of the vibrating portion 74 and at the other end facing the four corners of the vibrating portion 74 of the frame-shaped member 70.
  • the support portion 73 is a coil-shaped tension spring. Therefore, the support portion 73 supports the vibrating portion 74 on the frame-shaped member 70 in a state where the tension is maintained.
  • the support portion 73 may be a spring other than the coiled tension spring.
  • the support portion 73 may be, for example, a linear spring or a compression spring. Further, the support portion 73 may be any as long as it supports the vibrating portion 74 to the frame-shaped member 70 in a state where the tension is maintained, and the arrangement location and number can be appropriately changed.
  • the wire rod 72 has a linear shape and has a first end 81 and a second end 82.
  • the first end 81 is fixed by the first fixing member 76.
  • the second end 82 is fixed by the second fixing member 77.
  • the first end 81 is fixed to the frame-shaped member 70, and the second end 82 is fixed to the vibrating portion 74.
  • the wire rod 72 is fixed in a tensioned state. Therefore, the wire rod 72 is arranged along the Y-axis direction.
  • the first end 81 is fixed by the first fixing member 76 by applying pressure from the outside together with the first fixing member 76 while being passed through the internal space of the tubular first fixing member 76.
  • the second end 82 is also fixed by the second fixing member 77 by the same method as the first end 81.
  • the first fixing member 76 and the second fixing member 77 may be any as long as they fix the first end 81 and the second end 82, and are not limited to the tubular shape.
  • the wire rod 72 includes a shape memory material 78 and a lead wire 79.
  • the shape memory material 78 has a linear shape. Since the wire rod 72 is fixed by the first fixing member 76 and the second fixing member 77 in a tensioned state, the shape memory material 78 is also in a tensioned state. As a result, the shape memory material 78 is arranged along the Y-axis direction.
  • the shape memory material 78 is made of a shape memory alloy that deforms in the length direction when a voltage is applied.
  • the shape memory material 78 is deformed in the Y-axis direction by applying a voltage.
  • the shape memory material 78 is not limited to a linear shape as long as it deforms in the Y-axis direction.
  • the shape memory material 78 may have a coiled shape, for example. Further, since the shape memory material 78 is a shape memory alloy and has high strength, it has strong impact resistance.
  • the lead wire 79 is a linear member drawn from both ends of the shape memory material 78.
  • the lead wire 79 is insulatingly coated on the outer peripheral surface other than the portion connected to the shape memory material 78 or the like.
  • the frame-shaped member 70 and the vibrating portion 74 are made of metal, the frame-shaped member 70 and the vibrating portion 74 are coated with an insulating material. As a result, a short circuit due to contact with both ends of the shape memory material 78 can be prevented.
  • the frame-shaped member 70 may be a conductor if a short circuit does not occur due to contact between both ends of the shape memory material 78.
  • the lead wire 79 drawn out from the second fixing member 77 side is arranged along the shape memory material 78, and is pulled out together with the lead wire 79 drawn out from the first fixing member 76 side.
  • the lead wire 79 drawn out to the outside is connected to a drive circuit (not shown).
  • the drive circuit applies a voltage to the shape memory material 78 via the lead wire 79.
  • a voltage is applied to the shape memory material 78, a current flows and heat is generated.
  • the shape memory material 78 loosens the linear shape stored by heat. As a result, the shape memory material 78 extends in the Y-axis direction.
  • the shape memory material 78 stops generating heat.
  • the shape memory material 78 is cooled by stopping heat generation, it returns to its original straight shape. As a result, the shape memory material 78 returns to its original length in the Y-axis direction.
  • the shape memory material 78 repeatedly generates heat and cools by applying an AC voltage, and expands and contracts along the Y-axis direction.
  • the wire rod 72 including the shape memory material 78 is connected to the vibrating portion 74. Therefore, the vibrating portion 74 vibrates along the Y-axis direction due to the expansion and contraction of the shape memory material 78.
  • the vibrator 71 vibrates when the vibrating portion 74 vibrates in the opening 75 of the frame-shaped member 70 in the plane direction, that is, along the Y-axis direction.
  • the diaphragm 3 also vibrates in conjunction with each other along the Y-axis direction.
  • the vibrator 71 moves in a phase opposite to that of the diaphragm 3.
  • the description that the vibrator 71 and the diaphragm 3 vibrate in a vibration form having opposite phases will be omitted because they are the same as those of the vibrating device 100.
  • the vibrating device 300 can maintain a large amplitude like the vibrating device 100.
  • Electromagnet 3 ... Diaphragm 4,41,42,43,44,45,46 ... Cushion material 5 ... Holder 10,20,60,70, ... Frame-shaped member 11,31,75 ... opening 11A ... first opening 11B ... second opening 12 ... piezoelectric film 13, 23, 63, 73 ... supporting portion 14, 24, 64, 74 ... vibrating portion 15 ... connecting member 16 ... opening 17 ... spacer 18 ... first 1 Main surface 19 ... Second main surface 22 ... Electromagnet 25 ... Electromagnet fixing members 26, 66 ... Fixing part 27 ... Diaphragm fixing member 28 ... Opposing part 29 ... Magnet 31A ... First opening 31B ... Second opening 31C ... Third Opening 51 ...
  • Core member 52 ... Conductor portion 62 ... Electromagnet 65 ... Magnet 72 ... Wire material 76 ... First fixing member 77 ... Second fixing member 78 ... Shape storage material 79 ... Conducting wire 81 ... First end 82 ... Second end 91 ... Flat plate portion 92 ... Protruding portion 100, 111, 112, 200, 300 ... Vibration device

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

La présente invention comprend : une plaque vibrante tabulaire (3) ; un vibreur (1) qui est relié à une surface principale de la plaque vibrante (3) et qui vibre dans une direction de plan de la plaque vibrante (3) ; et un matériau tampon (4) qui est disposé dans au moins une partie de la zone entourant le vibreur (1) de manière à être relié à la plaque vibrante (3) et relié simultanément à un boîtier auquel est fixée la plaque vibrante (3) lorsque le vibreur (1) vibre, le vibreur (1) se déplace dans une phase opposée à celle de la plaque vibrante (3).
PCT/JP2020/021772 2019-07-08 2020-06-02 Dispositif vibrant WO2021005922A1 (fr)

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CN202090000643.5U CN217615844U (zh) 2019-07-08 2020-06-02 振动装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023149041A1 (fr) * 2022-02-03 2023-08-10 株式会社村田製作所 Structure vibrante, dispositif de transport et dispositif de présentation tactile
WO2023238682A1 (fr) * 2022-06-10 2023-12-14 株式会社村田製作所 Capteur de détection de déformation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011078218A1 (fr) * 2009-12-25 2011-06-30 株式会社村田製作所 Dispositif de vibration par ultrasons
JP2015037335A (ja) * 2013-08-12 2015-02-23 株式会社村田製作所 アクチュエータ装置
JP2018510052A (ja) * 2015-01-30 2018-04-12 イマージョン コーポレーションＩｍｍｅｒｓｉｏｎ Ｃｏｒｐｏｒａｔｉｏｎ 静電触覚アクチュエータ及び静電触覚アクチュエータを有するユーザインターフェース
WO2019013164A1 (fr) * 2017-07-14 2019-01-17 株式会社村田製作所 Structure de vibration, dispositif de vibration et dispositif de présentation à sensibilité tactile

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000084486A (ja) * 1998-09-09 2000-03-28 Servo Technos:Kk 起振装置
CN201348878Y (zh) * 2009-01-21 2009-11-18 深圳市同洲电子股份有限公司 一种硬盘减震装置
CN104343885B (zh) * 2013-08-09 2016-08-24 上海微电子装备有限公司 高精密磁悬浮主动减震设备
CN205217291U (zh) * 2015-12-29 2016-05-11 方富友 一种振动装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011078218A1 (fr) * 2009-12-25 2011-06-30 株式会社村田製作所 Dispositif de vibration par ultrasons
JP2015037335A (ja) * 2013-08-12 2015-02-23 株式会社村田製作所 アクチュエータ装置
JP2018510052A (ja) * 2015-01-30 2018-04-12 イマージョン コーポレーションＩｍｍｅｒｓｉｏｎ Ｃｏｒｐｏｒａｔｉｏｎ 静電触覚アクチュエータ及び静電触覚アクチュエータを有するユーザインターフェース
WO2019013164A1 (fr) * 2017-07-14 2019-01-17 株式会社村田製作所 Structure de vibration, dispositif de vibration et dispositif de présentation à sensibilité tactile

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023149041A1 (fr) * 2022-02-03 2023-08-10 株式会社村田製作所 Structure vibrante, dispositif de transport et dispositif de présentation tactile
WO2023238682A1 (fr) * 2022-06-10 2023-12-14 株式会社村田製作所 Capteur de détection de déformation

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