WO2020202897A1 - Dispositif d'exposition de lumière, procédé de fonctionnement de dispositif d'exposition de lumière, et programme - Google Patents

Dispositif d'exposition de lumière, procédé de fonctionnement de dispositif d'exposition de lumière, et programme Download PDF

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Publication number
WO2020202897A1
WO2020202897A1 PCT/JP2020/007292 JP2020007292W WO2020202897A1 WO 2020202897 A1 WO2020202897 A1 WO 2020202897A1 JP 2020007292 W JP2020007292 W JP 2020007292W WO 2020202897 A1 WO2020202897 A1 WO 2020202897A1
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WIPO (PCT)
Prior art keywords
light
irradiation
photocurable resin
irradiation device
curable resin
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PCT/JP2020/007292
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English (en)
Japanese (ja)
Inventor
中林　耕基
Original Assignee
富士フイルム株式会社
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Publication date
Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Priority to JP2021511217A priority Critical patent/JP7203958B2/ja
Priority to CN202080017191.6A priority patent/CN113490584B/zh
Publication of WO2020202897A1 publication Critical patent/WO2020202897A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms

Definitions

  • the technology of the present disclosure relates to a light irradiation device, a light irradiation method, an operation method of the light irradiation device, and a program.
  • Patent Document 1 discloses a resin curing method for exposing and curing a applied photocurable resin.
  • the irradiation light for exposure is limited by a mask so that the area to be exposed to the photocurable resin is smaller than the planned curing area of the photocurable resin, and the exposure is performed.
  • the region is moved relative to the photocurable resin, and the planned curing area of the photocurable resin is scanned once.
  • Patent Document 2 a filter having different transmittances between the central portion and the peripheral portion is inserted between the ultraviolet light source and the optical element to generate an intensity distribution of the irradiation light, whereby the central portion and the peripheral portion in the resin layer are generated.
  • a method for making the illuminance distribution uniform is disclosed.
  • the liquid crystal panel is arranged between the ultraviolet light source and the optical element, and the in-plane distribution of the irradiation time is generated by controlling the transmission time and the shading time of the liquid crystal panel, and the central portion in the resin layer.
  • a method for making the final curing time between the and the peripheral portion uniform is disclosed.
  • One embodiment according to the technique of the present disclosure is a photocurable resin due to the curing rate of the photocurable resin as compared with the case where the photocurable resin is irradiated with light without considering the curing characteristics of the photocurable resin.
  • a light irradiation device a light irradiation method, and a program capable of reducing the distortion that occurs.
  • the first aspect according to the technique of the present disclosure is a light irradiation device including an irradiation unit that irradiates a photocurable resin with light and a change unit that changes the intensity of light, and the irradiation unit is light.
  • the irradiation unit is light.
  • radicals are generated from the photocurable resin, and before the polymerization reaction of the radicals is stopped, the photocurable resin is irradiated with light in an overlapping manner.
  • This is a light irradiation device that changes the intensity of light irradiated by the irradiation unit for each of the plurality of divided regions obtained by dividing the light for each divided region.
  • a second aspect according to the technique of the present disclosure is a light irradiation device including an irradiation unit that irradiates a photocurable resin with light and a change unit that changes the intensity of light, and the irradiation unit is light.
  • the irradiation unit is light.
  • radicals are generated from the photocurable resin, and during the growth of the radicals, the photocurable resin is irradiated with light in an overlapping manner, and the photocurable resin is classified in the changed portion.
  • This is a light irradiation device that changes the intensity of light irradiated by the irradiation unit for each of the plurality of divided regions obtained by the above.
  • the third aspect according to the technique of the present disclosure is that the irradiation unit is a light irradiation device according to the first aspect or the second aspect of scanning light with respect to the photocurable resin.
  • the photocurable resin can be cured along the scanning line of light.
  • a fourth aspect according to the technique of the present disclosure is any one of the first to third aspects in which the irradiation unit irradiates the photocurable resin with light before reaching the life of the radical. It is a light irradiation device according to. As a result, the radicals generated by irradiating the photocurable resin with light are superimposed on the photocurable resin, as compared with the case where the photocurable resin is irradiated with light after reaching the life of the radicals. It is possible to reduce the influence of the emitted light.
  • a fifth aspect according to the technique of the present disclosure is a light irradiation device in which the irradiation unit irradiates the entire region of the photocurable resin with light.
  • a sixth aspect according to the technique of the present disclosure further includes a reception unit that receives distribution information indicating the distribution of the intensity of light applied to the photocurable resin, and the modification unit is the distribution information received by the reception unit.
  • the light irradiation device according to any one of the first to fifth aspects, in which the intensity of light is changed according to the above.
  • the photocurable resin can be irradiated with light at a changed intensity according to the distributed distribution information whose contents have been updated.
  • the seventh aspect according to the technique of the present disclosure is given to the optical element, and the distribution is the light irradiation device according to the sixth aspect determined according to the optical characteristics of the optical element.
  • the strain generated in the photocurable resin due to the curing rate of the photocurable resin can be reduced with high accuracy as compared with the case where the distribution is determined regardless of the optical characteristics of the optical element.
  • the photocurable resin is interposed between the support member on which the optical element is supported and the optical element, and the distribution is the optical characteristics of the optical element and the support member. It is a light irradiation device according to a seventh aspect defined according to optical characteristics. As a result, the strain generated in the photocurable resin due to the curing rate of the photocurable resin is more accurately determined than in the case where the distribution is determined regardless of the optical characteristics of the optical element and the optical characteristics of the support member. It can be reduced.
  • a ninth aspect according to the technique of the present disclosure is a light irradiation device according to a seventh aspect or an eighth aspect in which the optical element is a lens.
  • a tenth aspect according to the technique of the present disclosure is a light irradiation device according to any one of the first to ninth aspects in which the photocurable resin is an ultraviolet curable resin.
  • the photocurable resin is an ultraviolet curable resin.
  • An eleventh aspect according to the technique of the present disclosure is a light irradiation method including an irradiation step of irradiating a photocurable resin with light and a change step of changing the intensity of light, wherein the irradiation step is light.
  • the irradiation step is light.
  • radicals are generated from the photocurable resin, and before the polymerization reaction of the radicals is stopped, the photocurable resin is irradiated with light in an overlapping manner.
  • This is a light irradiation method in which the intensity of light irradiated by the irradiation step is changed for each of the divided regions for each of the plurality of divided regions obtained by the division.
  • a twelfth aspect according to the technique of the present disclosure is a light irradiation method including an irradiation step of irradiating a photocurable resin with light and a change step of changing the intensity of light, wherein the irradiation step is light.
  • the irradiation step is light.
  • radicals are generated from the photocurable resin, and during the growth of the radicals, the photocurable resin is irradiated with light in an overlapping manner, and the change step is to classify the photocurable resin.
  • This is a light irradiation method in which the intensity of light irradiated by the irradiation step on each of the plurality of divided regions obtained is changed for each divided region.
  • the thirteenth aspect according to the technique of the present disclosure is a program for causing the computer to function as a modification part included in the light irradiation device according to any one of the first to tenth aspects.
  • a fourteenth aspect according to the technique of the present disclosure includes an irradiation unit comprising a photomodulator for modulating light emitted from a light source and irradiating the photocurable resin with light emitted from the light source via the photomodulator. It is a light irradiation device including a control unit that distributes the irradiation energy of light directed to the photocurable resin in multiple stages of three or more stages by controlling the photomodulator.
  • the light modulation element is a reflection direction changing element having a plurality of reflecting members capable of changing the direction of reflection of light emitted from the light source, or light emitted from the light source. It is a transmittance changing element having a plurality of light transmittance changing regions capable of changing the transmittance, and the irradiation unit photocures the light emitted from the light source through a plurality of reflecting members or a plurality of light transmittance changing regions.
  • the light irradiation device which irradiates the resin and controls the direction of light reflection by the reflecting member or the control of changing the transmittance of the light transmittance changing region.
  • the sixteenth aspect according to the technique of the present disclosure is the light irradiation apparatus according to the fourteenth aspect or the fifteenth aspect, which is the control in which the distribution of the irradiation energy is set according to the characteristics of the photocurable resin.
  • the irradiation unit has a projection optical system that projects modulated light onto a photocurable resin, and the control is a distribution of irradiation energy according to the characteristics of the projection optical system.
  • the light irradiation device according to any one of the fourteenth to sixteenth aspects of the control.
  • the eighteenth aspect according to the technique of the present disclosure is the fourteenth aspect in which the photocurable resin is applied to the optical element, and the control is a control in which the irradiation energy is distributed according to the optical characteristics of the optical element. It is a light irradiation apparatus which concerns on any one aspect of 17th aspect.
  • the strain generated in the entire region of the photocurable resin due to the curing rate of the photocurable resin can be reduced as compared with the case where the photocurable resin is irradiated with light without considering the curing characteristics of the photocurable resin. Can be done.
  • the photocurable resin is interposed between the support member supporting the optical element and the optical element, and the control is performed on the optical characteristics of the optical element and the support member. It is a light irradiation apparatus according to an eighteenth aspect which is a control which makes a distribution according to an optical characteristic.
  • a twentieth aspect according to the technique of the present disclosure is that the optical element is a light irradiation device according to the eighteenth aspect or the nineteenth aspect of being a lens.
  • a twenty-first aspect according to the technique of the present disclosure is a fourteenth aspect in which when the photocurable resin has a uniform thickness, the control is a control for making the distribution of the irradiation energy of the light irradiated to the photocurable resin uniform. It is a light irradiation apparatus which concerns on any one aspect of 20th aspect.
  • the 22nd aspect according to the technique of the present disclosure is from the 15th aspect in which the plurality of reflective members or the plurality of light transmittance changing regions are arranged in a plane, and the 16th aspect quoting the 15th aspect.
  • the light irradiation device according to any one of the 21st aspects.
  • control unit performs correction control for changing the irradiation energy according to a change with time of at least one of the light source and the light modulation element, from the 14th aspect to the 22nd aspect.
  • the light irradiation device according to any one aspect.
  • a twenty-fourth aspect according to the technique of the present disclosure includes a light detection unit that detects the amount of light reflected by a reflecting member or light transmitted through a light transmittance changing region, and the control unit is a detection result of the light detection unit.
  • the light irradiation device according to the 23rd aspect which cites the 15th aspect of performing correction control according to the above.
  • the light detection unit is arranged in a direction different from that of the photocurable resin when viewed from the reflective member, and the control unit is when the light detection unit detects the amount of light.
  • the light irradiation device which controls the light emitted from the light source to be reflected by the reflecting member toward the light detection unit.
  • the reflection direction changing element is a MEMS, a 15th aspect, a 16th aspect to a 21st aspect quoting the 15th aspect, and a 22nd aspect to the 25th aspect. It is a light irradiation apparatus which concerns on any one aspect.
  • the MEMS is a light irradiation device according to the 26th aspect of the DMD.
  • the 28th aspect according to the technique of the present disclosure is any one of the 14th to 27th aspects in which the irradiation time per irradiation is set to a time shorter than the radical life of the photocurable resin. It is a light irradiation device according to an aspect.
  • the control unit generates radicals from the photocurable resin by irradiating the photocurable resin with light from the irradiation unit via the photomodulator, and the radical polymerization reaction occurs.
  • the light irradiation device according to any one of the 14th to 27th aspects, which controls the photocurable resin to be irradiated with light in an overlapping manner before stopping.
  • the control unit generates a radical from the photocurable resin by irradiating the photocurable resin with light from the irradiation unit via the photomodulator, and during the growth of the radical.
  • the light irradiation device according to any one of the 14th to 27th aspects, which controls the photocurable resin to be irradiated with light in an overlapping manner.
  • control unit generates radicals from the photocurable resin by irradiating the photocurable resin with light from the irradiation unit via the photomodulator, and reaches the life of the radicals.
  • the light irradiation apparatus according to any one of the fourteenth to thirty aspects, which controls the photocurable resin to be irradiated with light in an overlapping manner.
  • the irradiation unit irradiates the entire region of the photocurable resin with light in a planar manner, according to any one of the 14th to 31st aspects. It is an irradiation device.
  • the 33rd aspect according to the technique of the present disclosure further includes a reception unit that receives distribution information indicating the distribution of irradiation energy with respect to the photocurable resin, and the control unit changes the irradiation energy according to the distribution information received by the reception unit.
  • the light irradiation device according to any one of the 14th to 32nd aspects.
  • a thirty-fourth aspect according to the technique of the present disclosure is a light irradiation device according to any one of the fourteenth to thirty-third aspects, wherein the light is UV light and the photocurable resin is an ultraviolet curable resin. Is.
  • a thirty-fifth aspect according to the technique of the present disclosure is an operation method of a light irradiation device including a light modulation element that modulates the light emitted from the light source, and the light emitted from the light source is transmitted through the light modulation element.
  • An operation method of the light irradiation device including an irradiation step of irradiating the photocurable resin and a control step of distributing the irradiation energy of light directed to the photocurable resin in three or more stages by controlling the photomodulator. Is.
  • the 36th aspect according to the technique of the present disclosure is a program for causing the computer to function as a control unit included in the light irradiation device according to any one of the 14th to 34th aspects.
  • a 37th aspect according to the technique of the present disclosure is a light irradiation device including an irradiation unit that irradiates a photocurable resin with light and a processor that changes the intensity of light, and the irradiation unit is photocured.
  • the resin with light radicals are generated from the photo-curing resin, and before the polymerization reaction of the radicals is stopped, the photo-curing resin is irradiated with light in an overlapping manner.
  • This is a light irradiation device that changes the intensity of light irradiated by the irradiation unit for each of the plurality of divided regions obtained by the above.
  • a 38th aspect according to the technique of the present disclosure includes an irradiation unit including a photomodulator for modulating the light emitted from the light source and irradiating the photocurable resin with the light emitted from the light source via the photomodulator. It is a light irradiation device including a processor that distributes the irradiation energy of light toward the photocurable resin in multiple stages of three or more stages by controlling the photomodulator.
  • FIG. 6 is a conceptual diagram showing an example of a mode in which the mirror surface of the micromirror shown in FIG. 14 is selectively displaced into a first tilted state and a second tilted state.
  • FIG. 5 is a conceptual diagram showing an example of the relationship between a pulse signal having a wider pulse width than the example shown in FIG. 19B and a radical concentration. It is a schematic block diagram which shows an example of the structure of the irradiation energy change table used in the light irradiation apparatus which concerns on 2nd Embodiment. It is a conceptual diagram which shows an example of the illuminance distribution of each part. It is a flowchart which shows an example of the flow of the UV light irradiation processing which concerns on 2nd Embodiment. There is a flowchart showing an example of the flow of correction control according to the second embodiment.
  • CPU refers to the abbreviation of "Central Processing Unit”.
  • RAM is an abbreviation for "Random Access Memory”.
  • ROM is an abbreviation for "Read Only Memory”.
  • ASIC refers to the abbreviation of "Application Special Integrated Circuit”.
  • PLD refers to the abbreviation of "Programmable Logical Device”.
  • FPGA refers to the abbreviation of "Field-Programmable Gate Array”.
  • AFE refers to the abbreviation of "Analog Front End”.
  • DSP refers to the abbreviation of "Digital Signal Processor”.
  • SoC refers to the abbreviation of "System-on-a-chip”.
  • SSD refers to the abbreviation of "Solid State Drive”.
  • DVD-ROM is an abbreviation for "Digital York Disc Read Only Memory”.
  • USB refers to the abbreviation of "Universal Serial Bus”.
  • HDD refers to the abbreviation of "Hard Disk Drive”.
  • EEPROM refers to the abbreviation of "Electrically Erasable and Programmable Read Only Memory”.
  • EL refers to the abbreviation for "Electro-Luminescence”.
  • I / F refers to the abbreviation of "Interface”.
  • UI refers to the abbreviation of "User Interface”.
  • I / O refers to the abbreviation of "Input Output Interface”.
  • UV refers to the abbreviation for “Ultra Violet”.
  • 3D refers to the abbreviation of "3 Dimensions”.
  • MEMS refers to the abbreviation for “Micro Electro Mechanical Systems”.
  • LED refers to the abbreviation of “Light Emitting Diode”.
  • PWM refers to the abbreviation of "Pulse Width Modulation”.
  • parallel means parallelism in the sense of including an error generally allowed in the technical field to which the technique of the present disclosure belongs, in addition to perfect parallelism.
  • vertical refers to vertical in the sense of including an error generally allowed in the technical field to which the technology of the present disclosure belongs, in addition to the complete vertical.
  • horizontal refers to horizontal in the sense of including an error generally allowed in the technical field to which the technology of the present disclosure belongs, in addition to perfect horizontal.
  • orthogonality refers to orthogonality in the sense of including an error generally allowed in the technical field to which the technology of the present disclosure belongs, in addition to perfect orthogonality.
  • constant refers to constant in the sense of including an error generally allowed in the technical field to which the technology of the present disclosure belongs, in addition to complete constant.
  • equivalent refers to equivalent in a sense including an error generally allowed in the technical field to which the technology of the present disclosure belongs, in addition to perfect equivalent.
  • uniformity refers to an error generally allowed in the technical field to which the technology of the present disclosure belongs, for example, an error of ⁇ number (single digit)%, for example, an error of less than ⁇ 5%. ..
  • the light irradiation device 10 is a device that irradiates an ultraviolet curable resin 12 with an ultraviolet laser (hereinafter, simply referred to as “laser”).
  • the ultraviolet curable resin 12 is a photocurable resin having a curing agent that generates radicals in response to ultraviolet rays.
  • the laser is an example of "light" according to the technique of the present disclosure.
  • the ultraviolet curable resin 12 is an example of a photocurable resin according to the technique of the present disclosure, and is attached to the lens 16. In the example shown in FIG. 1, the ultraviolet curable resin 12 is applied to one side 16A of the lens 16.
  • the lens 16 is an example of an "optical element" according to the technique of the present disclosure, and is housed in a support member 14.
  • An example of the support member 14 is a mold.
  • the support member 14 is a lower die, and in the example shown in FIG. 1, the support member 14 of the upper body from which the upper die has been removed is shown.
  • a housing surface 14A is formed in the support member 14, and one side 16A side of the lens 16 is housed.
  • the accommodating surface 14A is formed in a shape corresponding to the shape of one side 16A of the lens 16. That is, in the example shown in FIG. 1, since the lens 16 is a positive lens (convex lens), the accommodating surface 14A is formed in a concave shape corresponding to the convex shape of one side 16A.
  • the ultraviolet curable resin 12 is interposed between the support member 14 and the lens 16. Specifically, the ultraviolet curable resin 12 is interposed between one side 16A and the accommodating surface 14A.
  • the ultraviolet curable resin 12 Since the ultraviolet curable resin 12 is interposed between the one side 16A and the accommodating surface 14A, the shape of the accommodating surface 14A is copied to the ultraviolet curable resin 12, and the ultraviolet curable resin 12 is cured, for example, one side 16A.
  • an aspherical light transmitting layer is formed by the ultraviolet curable resin 12.
  • the "light transmitting layer” refers to a layer that transmits visible light.
  • a layer that transmits visible light is exemplified as an example of a light transmitting layer, but the technique of the present disclosure is not limited to this, and a layer that transmits light in another wavelength range such as UV light may be used. ..
  • the light irradiation device 10 includes an irradiation unit 18.
  • the irradiation unit 18 irradiates the ultraviolet curable resin 12 with a laser.
  • the irradiation unit 18 includes a light source 20, an optical system 22, and a scanner mirror 24.
  • the light source 20 is a laser device and emits a laser to the optical system 22.
  • An example of the light source 20 is a semiconductor laser device.
  • the optical system 22 is, for example, an optical system having a plurality of lenses, and guides a laser incident from a light source 20 to a scanner mirror 24.
  • a galvano mirror is adopted as an example of the scanner mirror 24.
  • the scanner mirror 24 includes a first galvano mirror 24A and a second galvano mirror 24B.
  • the first galvano mirror 24A reflects the laser guided from the optical system 22 toward the second galvano mirror 24B and turns in the X direction to mainly scan the laser. Further, the second galvanometer mirror 24B reflects the laser reflected by the second galvanometer mirror 24B toward the lens 16 and changes the direction in the Y direction to subscan the laser.
  • the X and Y directions intersect each other. In the embodiment of the present disclosure, the X direction refers to, for example, the direction corresponding to the row direction (see FIG. 4) described later, and the Y direction refers to, for example, the direction corresponding to the column direction (see FIG. 4) described later. Point to.
  • the scanner mirror 24 irradiates the ultraviolet curable resin 12 through the lens 16 by reflecting the laser guided from the optical system 22 toward the lens 16.
  • the laser scans in the direction of the dashed arrow shown in FIG. 1 as an example.
  • “scanning” refers to laser irradiation performed linearly.
  • the "scanning” may be a curved laser irradiation.
  • the concentric pattern may be scanned while moving in the radial direction by changing the phase difference between the X direction and the Y direction.
  • this scan is generally called a vector scan as opposed to a raster scan which is a linear scan.
  • a galvano mirror is described as an example of the scanner mirror 24, but a MEMS mirror may be used as the scanner mirror 24.
  • a single device can scan in two axes (X and Y directions).
  • a resonant mirror may be used as the scanner mirror 24. Similar to the galvano mirror, the resonant mirror performs a single-axis scan with a single device, so a pair of devices (for example, an X-direction scan device and a Y-direction scan device) can scan two axes. By doing so, surface scanning is realized.
  • the DMD which is an example of the MEMS mirror, will be described in the second embodiment.
  • the light source 20, the optical system 22, and the scanner mirror 24 are arranged so that the laser reflected by the scanner mirror 24 collects light on the contact surface between the one side 16A and the ultraviolet curable resin 12. ing.
  • the light irradiation device 10 includes a computer 30, a storage device 32, a UI device 34, a scanner driver 36, a light source driver 38, an external I / F40, and an I / O 42.
  • the computer 30 includes a CPU 30A, a ROM 30B, and a RAM 30C.
  • the CPU 30A, ROM 30B, and RAM 30C are connected to each other via a bus line 48.
  • the CPU 30A reads various programs from the ROM 30B, and develops the read various programs in the RAM 30C.
  • the CPU 30A controls the entire light irradiation device 10 according to various programs developed in the RAM 30C.
  • the I / O 42 includes an input / output port (not shown), and the storage device 32, the UI device 34, the scanner driver 36, the light source driver 38, and the external I / F 40 are connected to the I / O 42 via the input / output port. It is connected.
  • the I / O 42 is connected to the bus line 48, and the CPU 30A exchanges various information with the storage device 32, the UI device 34, the scanner driver 36, the light source driver 38, and the external I / F 40 via the I / O 42. I do.
  • the storage device 32 is a non-volatile storage device such as an SSD, HDD, or EEPROM.
  • the CPU 30A reads and writes various information to and from the storage device 32.
  • the UI device 34 includes a display 34A and a reception device 34B.
  • the display 34A displays an image or the like under the control of the CPU 30A.
  • An example of the display 34A is a liquid crystal display.
  • the display 34A may be another display such as an organic EL display instead of the liquid crystal display.
  • the reception device 34B includes a touch panel, hard keys, and the like, and receives various instructions from the user, and the CPU 30A operates according to various instructions received by the reception device 34B.
  • a touch panel, a hard key, and the like are illustrated as an example of the reception device 34B, but the technology of the present disclosure is not limited to this, and at least one of the touch panel, the hard key, the keyboard, and the mouse. It may be any device that accepts user's instructions.
  • the scanner driver 36 is a device having an ASIC and is connected to the scanner mirror 24.
  • the scanner driver 36 drives the scanner mirror 24 according to the instruction from the CPU 30A.
  • the light source driver 38 is a device having an ASIC and is connected to the light source 20.
  • the light source driver 38 drives the light source 20 to emit a laser from the light source 20, stops the emission of the laser, or changes the intensity of the laser according to an instruction from the CPU 30A.
  • the light source driver 38 controls the timing of emitting the laser to the light source 20, the timing of stopping the emission of the laser, the change of the intensity of the laser, and the like according to the instruction from the CPU 30A.
  • Scanning of the laser with respect to the ultraviolet curable resin 12 is realized by controlling the light source 20 by the light source driver 38 according to the instruction from the CPU 30A and changing the orientation of the scanner mirror 24 by the scanner driver 36 according to the instruction from the CPU 30A. ..
  • the external I / F40 is a communication device having an FPGA.
  • An external device such as a personal computer, a USB memory, an external SSD, an external HDD, an EEPROM, and a memory card is connected to the external I / F40.
  • the external I / F40 controls the exchange of various information between the CPU 30A and the external device.
  • the laser intensity table 32A is stored in the storage device 32.
  • the laser intensity table 32A is received by the external I / F40, and the laser intensity table 32A received by the external I / F40 is stored in the storage device 32 by the CPU 30A.
  • the laser intensity table 32A is an example of "distribution information" according to the technique of the present disclosure.
  • the external I / F40 is an example of a "reception unit" according to the technology of the present disclosure.
  • the laser irradiation program 30B1 is stored in the ROM 30B.
  • the CPU 30A reads the laser irradiation program 30B1 from the ROM 30B, and deploys the read laser irradiation program 30B1 in the RAM 30C.
  • the CPU 30A operates as the control unit 30A1 and the synchronization signal supply unit 30A2 by executing the laser irradiation program 30B1 developed in the RAM 30C.
  • the control unit 30A1 is an example of the "change unit” according to the technique of the present disclosure, and changes the intensity of the laser. Specifically, the control unit 30A1 changes the laser intensity according to the laser intensity table 32A.
  • the synchronization signal supply unit 30A2 generates a synchronization signal based on a reference clock (not shown), and supplies the generated synchronization signal to the control unit 30A1.
  • the control unit 30A1 synchronizes the operation of the scanner driver 36 with the operation of the light source driver 38 according to the supplied synchronization signal by supplying the synchronization signal from the synchronization signal supply unit 30A2.
  • the control unit 30A1 controls the scanner driver 36 by supplying a scanner control signal to the scanner driver 36, and controls the light source driver 38 by supplying a pulse signal to the light source driver 38.
  • the supply of the scanner control signal to the scanner driver 36 and the supply of the pulse signal to the light source driver 38 are synchronized.
  • the synchronization of the supply of the scanner control signal to the scanner driver 36 and the supply of the pulse signal to the light source driver 38 is realized by supplying the synchronization signal to the control unit 30A1.
  • the light source driver 38 controls the light source 20 according to the pulse signal supplied from the control unit 30A1 to turn on / off the laser output.
  • the pulse width is equal to or less than the laser irradiation time for each of the division regions described later.
  • the light source 20 repeatedly irradiates the entire region (see FIG. 4) of the ultraviolet curable resin 12, which will be described later, with the laser.
  • the change in the intensity of the laser is realized by changing the pulse width of the pulse signal by the control unit 30A1 for each division region described later. Specifically, as shown in FIG. 14, as an example, the duty ratio of the pulse signal is changed by the control unit 30A1 for each division region described later, so that the intensity of the laser for each division region is changed.
  • the irradiation of the laser that is turned on and off according to the pulse signal is also referred to as "pulse irradiation".
  • the scanner control signal is a signal indicating the direction of the scanner mirror 24, and the scanner driver 36 changes the direction of the scanner mirror 24 according to the scanner control signal supplied from the control unit 30A1.
  • the laser emitted from the light source 20 is guided to the scanner mirror 24 by the optical system 22, it is reflected by the scanner mirror 24, and the direction of the scanner mirror 24 is changed so that the laser is scanned against the ultraviolet curable resin 12. ..
  • a rectangular flat surface 50 is set by the control unit 30A1 with respect to the entire region of the ultraviolet curable resin 12 in a plan view with respect to one side 16A.
  • the rectangular flat surface 50 refers to a rectangular flat surface that surrounds the entire region of the ultraviolet curable resin 12 in a plan view with respect to one side 16A.
  • the entire region of the ultraviolet curable resin 12 is an example of the "specific region” and the "total region of the photocurable resin" according to the technique of the present disclosure.
  • the entire region of the ultraviolet curable resin 12 refers to the entire region of the outer surface of the ultraviolet curable resin 12 in a plan view. That is, in the example shown in FIG.
  • the entire region of the UV curable resin 12 is a region of the UV curable resin 12 facing the one side 16A side in a plan view with respect to the one side 16A, in other words, with respect to the one side 16A.
  • the surface region of the ultraviolet curable resin 12 imparted In other words, the entire region of the ultraviolet curable resin 12 can be said to be a surface (exposed surface) exposed to the second galvano mirror 24B side via the lens 16.
  • the scanner mirror 24 scans the laser with respect to the rectangular plane 50.
  • the rectangular plane 50 is divided by the Nth row and the Nth column according to the beam diameter of the laser, and the position of each division region obtained by the division is specified by the row number and the column number. That is, when the position in the rectangular plane 50 can be specified by the two-dimensional coordinates, the row number corresponds to the X coordinate of the two-dimensional coordinates, and the column number corresponds to the Y coordinate of the two-dimensional coordinates.
  • One division region is, for example, a region surrounded by a rectangular frame circumscribing the beam diameter of the laser.
  • the ultraviolet curable resin 12 is divided by each division region of the rectangular plane 50 in a plan view, and each position of the plurality of division regions obtained by being divided by each division region of the rectangular plane 50 is Similar to each compartment area of the rectangular plane 50, it is specified by a row number and a column number.
  • the "plurality of compartments” is an example of the “plurality of compartments” according to the technique of the present disclosure.
  • each of the plurality of division regions obtained by dividing the ultraviolet curable resin 12 by each division region of the rectangular plane 50 is simply referred to as a "division region" or a "classification of the ultraviolet curable resin 12". Also called "area”.
  • the laser is scanned row by row and column by column from the start point to the end point of the rectangular plane 50 by changing the orientation of the scanner mirror 24.
  • the laser is primarily scanned in the row direction and subscanned in the column direction.
  • the scanning path in the main scanning direction is on a straight line along the row direction from the first column to the Nth column, and the laser is scanned for each row from the first row to the Nth row.
  • the light source 20 irradiates a laser corresponding to the pulse signal to the light source driver 38 each time a pulse signal is supplied to one division region in the rectangular plane 50. That is, by supplying a plurality of pulse signals to the light source driver 38, the laser is superimposed and irradiated on one division region in the rectangular plane 50.
  • the pulse signal whose supply order is earlier is the starting pulse. It is called a signal, and a pulse signal whose supply order is later is called a late pulse signal.
  • the "pair of pulse signals” is a pulse signal supplied to the light source driver 38 as a pulse signal for irradiating a laser on one divided region in the rectangular plane 50, and is supplied to the light source driver 38. Refers to two pulse signals whose order is adjacent in time. Further, in the following, for convenience of explanation, the laser irradiation realized by the light source driver 38 operating the light source 20 according to the supplied pulse signal is also referred to as "laser irradiation based on the pulse signal".
  • the irradiation unit 18 irradiates the divided region with the laser according to the pulse signal from the start point to the end point of the rectangular plane 50 row by row and column by column, thereby causing the entire ultraviolet curable resin 12 to be irradiated.
  • the laser is scanned over the area. That is, the entire region of the UV curable resin 12 is obtained by scanning the laser on the rectangular plane 50 defined as a region wider than the UV curable resin 12 from the start point to the end point existing outside the UV curable resin 12. The laser is also scanned against.
  • the laser is scanned from the row to which the start point existing outside the UV curable resin 12 belongs to the row to which the end point existing outside the UV curable resin 12 belongs, so that the entire region of the UV curable resin 12 is covered.
  • the laser is also scanned.
  • the rectangular flat surface 50 is illustrated here, the region is not limited to this, and any shape can be used as long as it is wider than the ultraviolet curable resin 12 in a plan view and surrounds the ultraviolet curable resin 12. There may be.
  • the laser intensity table 32A is distribution information showing the distribution of the intensity of the laser irradiated to the entire region of the ultraviolet curable resin 12.
  • the row number, the column number, and the laser intensity are associated with each other.
  • the row number and the column number are position identification information for specifying the position of all the division regions of the rectangular plane 50. That is, the position identification information also includes information for specifying the position of each of the plurality of divided regions of the ultraviolet curable resin 12. Intensity information indicating the intensity of the laser is associated with each of the position identification information.
  • the intensity of the laser irradiated to each of the entire division regions of the rectangular plane 50 is defined for each division region.
  • the intensity of the laser irradiated to each of the plurality of division regions of the ultraviolet curable resin 12 is defined for each division region. This is because the entire division region of the rectangular plane 50 also includes a plurality of division regions of the ultraviolet curable resin 12.
  • the distribution of the laser intensity indicated by the intensity information on the laser intensity table 32A is such that when the laser is applied to the entire region of the ultraviolet curable resin 12, the entire region of the ultraviolet curable resin 12 is uniformly cured. , And / or computer simulation, it is derived in advance according to the optical characteristics of the support member 14 and the optical characteristics of the lens 16.
  • the optical characteristics of the support member 14 diffuse reflection (diffuse reflection) that occurs when the laser is scanned with respect to the accommodating surface 14A and the periphery of the accommodating surface 14A can be mentioned.
  • the accommodating surface 14A and the periphery of the accommodating surface 14A refer to, for example, the inside of the region of the support member 14 surrounded by the rectangular plane 50.
  • examples of the optical characteristics of the lens 16 include refraction, reflection, absorption, scattering, and the like.
  • the laser is pulse-irradiated to each position indicated by each position identification information. That is, when the time interval of irradiation of the laser irradiated to the position indicated by the position identification information is set to one cycle, the entire region of the ultraviolet curable resin 12 is targeted for each position indicated by each position identification information. Therefore, laser irradiation for a plurality of cycles is performed. In other words, the laser irradiation is repeatedly performed at each position indicated by each position identification information for the entire region of the ultraviolet curable resin 12. As a result, the laser is superimposed on each of the plurality of divided regions of the ultraviolet curable resin 12 on the entire region of the ultraviolet curable resin 12.
  • the radicals generated by irradiating the ultraviolet curable resin 12 with the laser repeat the polymerization reaction, and the radicals bind to each other with a probability depending on the radical concentration to cause a stop reaction and eventually disappear.
  • the radical concentration is in a steady state having a constant average value and a constant distribution depending on the radical generation rate, the polymerization rate, and the stop reaction rate.
  • the radical concentration between the divided regions by irradiating the laser to the entire region of the ultraviolet curable resin 12 is the period in which the laser is irradiated to one divided region according to the pulse signal (hereinafter, also simply referred to as "period").
  • the concentration of the radical generated by the irradiation of the laser based on the starting pulse signal is the concentration of the laser based on the starting pulse signal, as shown in FIG. It gradually decreases before irradiation is performed.
  • the newly generated radical refers to a radical generated when the ultraviolet curable resin 12 is irradiated with a laser based on a second pulse signal.
  • the unsteady state is repeated in each division region of the ultraviolet curable resin 12.
  • the unsteady state refers to a state in which the concentration of radicals generated by laser irradiation based on a pulse signal changes significantly as compared with the steady state.
  • radical lifetime refers to the average lifetime of radicals.
  • the average life of radicals refers to, for example, several tens of ms.
  • radicals generated by irradiating the ultraviolet curable resin 12 with a laser by a starting pulse signal will be referred to as “starting radicals”.
  • radicals generated by irradiating the ultraviolet curable resin 12 with a laser by a late pulse signal will be referred to as “late radicals”.
  • the division region where the laser based on the late pulse signal is irradiated and the division region where the laser based on the early pulse signal is irradiated.
  • the polymerization reaction becomes discontinuous, and a uniform curing rate cannot be obtained between the divided regions.
  • the time interval between the early pulse signal and the late pulse signal for one division region is shorter than that in the example shown in FIG. Specifically, the irradiation unit 18 (see FIG. 1) generates radicals from the ultraviolet curable resin 12 by irradiating the entire region of the ultraviolet curable resin 12 with a laser, and before the radical polymerization reaction is stopped. , The laser is superimposed on the entire region of the ultraviolet curable resin 12. In other words, the irradiation unit 18 irradiates the entire region of the UV curable resin 12 with a laser to generate radicals from the UV curable resin 12, and during the growth of the radicals, the entire region of the UV curable resin 12 is exposed.
  • the degree of continuity of the degree of curing between the compartmentalized regions of the ultraviolet curable resin 12 is increased as compared with the case where the radical radical is generated after the radical radical reaches the radical life.
  • FIG. 8 shows an example of the flow of the laser irradiation process executed by the CPU 30A according to the laser irradiation program 30B1 when the instruction to start the execution of the laser irradiation process is received by the reception device 34B.
  • the irradiation unit 18 is positioned so that the scanning of the laser is started from the start point of the rectangular plane 50.
  • the position of the scanner mirror in a state of being positioned so that the scanning of the laser is started from the start point (see FIG. 4) of the rectangular plane 50 is referred to as an “initial position”.
  • the start point of the rectangular plane 50 is also simply referred to as a “start point”
  • the end point of the rectangular plane 50 is also simply referred to as a “end point”.
  • step ST00 the control unit 30A1 acquires the intensity information corresponding to the initial position from the laser intensity table 32A. Then, the control unit 30A1 irradiates the light source 20 with a laser having an intensity indicated by the acquired intensity information at the initial position, and then the laser irradiation process shifts to step ST10.
  • the control unit 30A1 acquires the intensity information corresponding to the initial position from the laser intensity table 32A, and the pulse width of the pulse signal is changed according to the acquired intensity information. Then, the pulse signal whose pulse width is changed is supplied from the control unit 30A1 to the light source driver 38. Then, the light source 20 irradiates the start point with a laser corresponding to the pulse signal supplied from the control unit 30A1 to the light source driver 38 under the control of the light source driver 38.
  • step ST10 the control unit 30A1 starts driving the scanner mirror 24 at a predetermined speed, and then the laser irradiation process shifts to step ST12.
  • the predetermined speed is a predetermined period as a time interval between the early pulse signal for irradiating the laser and the late pulse signal for one division region when the laser scanning from the start point to the end point is repeatedly performed. Is the speed at which
  • the "predetermined period” is a period corresponding to the time from the irradiation of the ultraviolet curable resin 12 with the laser to the time before the radical polymerization reaction is stopped, in other words, with respect to the ultraviolet curable resin 12. It refers to the time between the irradiation of the laser and the growth of radicals.
  • the time between the irradiation of the ultraviolet curable resin 12 with the laser and the growth of radicals means the time from the irradiation of the ultraviolet curable resin 12 with the laser to the time before the radical life is reached. ..
  • a predetermined cycle for example, the laser is scanned within the time from the irradiation of the ultraviolet curable resin 12 with the laser to the time before the radical life is reached, so that the entire ultraviolet curable resin 12 is used.
  • a cycle is adopted in which the region is uniformly cured.
  • the predetermined period is derived in advance by a test using an actual machine and / or a computer simulation or the like.
  • step ST12 the control unit 30A1 has the laser irradiation position (hereinafter, also simply referred to as “irradiation position”) in the rectangular plane 50 as the orientation of the scanner mirror 24 is changed to the next division region. It is determined whether or not the irradiation position has been changed to correspond to. If the irradiation position has not been changed to the irradiation position corresponding to the next division region in step ST12, the determination is denied and the determination in step ST12 is performed again. When the irradiation position is changed to the irradiation position corresponding to the next division region in step ST12, the determination is affirmed and the laser irradiation process shifts to step ST14.
  • irradiation position hereinafter, also simply referred to as “irradiation position”
  • step ST14 the control unit 30A1 acquires the intensity information corresponding to the updated irradiation position from the laser intensity table 32A. Then, the control unit 30A1 irradiates the light source 20 with a laser having the intensity indicated by the acquired intensity information at the updated irradiation position, and then the laser irradiation process shifts to step ST16.
  • the control unit 30A1 acquires the intensity information corresponding to the updated irradiation position from the laser intensity table 32A, and the pulse width of the pulse signal is changed according to the acquired intensity information. Then, the pulse signal whose pulse width is changed is supplied from the control unit 30A1 to the light source driver 38. Then, under the control of the light source driver 38, the light source 20 irradiates the updated irradiation position with a laser corresponding to the pulse signal supplied from the control unit 30A1 to the light source driver 38. By executing the process of this step ST14, the intensity of the laser irradiated by the irradiation unit 18 is changed for each division region of the ultraviolet curable resin 12.
  • step ST16 the control unit 30A1 determines whether or not the laser irradiation position has reached the end point. If the laser irradiation position has not reached the end point in step ST16, the determination is denied and the laser irradiation process shifts to step ST12. When the laser irradiation position reaches the end point in step ST16, the determination is affirmed, and the laser irradiation process shifts to step ST18.
  • step ST18 the control unit 30A1 stops the laser irradiation on the light source 20 via the light source driver 38, and then the laser irradiation process shifts to step ST20.
  • step ST20 the control unit 30A1 returns the scanner mirror 24 to the initial position by controlling the scanner driver 36, and then the laser irradiation process shifts to step ST22.
  • the control unit 30A1 determines whether or not the number of scans when the number of scans of the laser from the start point to the end point is one scan has reached the predetermined number of scans.
  • the predetermined number of times refers to a number of times selected in advance from the range of, for example, several hundred times to several thousand times as the number of scans for uniformly curing the entire region of the ultraviolet curable resin 12.
  • a value derived in advance as the number of scans for uniformly curing the entire region of the ultraviolet curable resin 12 by a test using an actual machine and / or a computer simulation is adopted.
  • step ST22 If the number of scans has not reached the predetermined number in step ST22, the determination is denied and the laser irradiation process proceeds to step ST00. When the number of scans reaches the predetermined number in step ST22, the determination is affirmed and the laser irradiation process shifts to step ST24.
  • the irradiation unit 18 causes radicals in each of the plurality of compartments included in the entire region of the ultraviolet curable resin 12 with respect to each of the plurality of compartments.
  • the lasers are repeatedly irradiated before the polymerization reaction of the above is stopped.
  • step ST24 the control unit 30A1 stops driving the scanner mirror by controlling the scanner driver 36, and then the laser irradiation process ends.
  • the irradiation unit 18 irradiates the entire region of the ultraviolet curable resin 12 with a laser to generate radicals from the ultraviolet curable resin 12. Further, the irradiation unit 18 repeatedly irradiates the entire region of the ultraviolet curable resin 12 with the laser before the radical polymerization reaction is stopped, in other words, during the growth of the radical. Then, the intensity of the laser irradiated by the irradiation unit 18 to each of the division regions of the ultraviolet curable resin 12 is changed for each division region by the control unit 30A1.
  • the laser is irradiated to the ultraviolet curable resin 12 by the late pulse signal before the polymerization bond of the radicals generated by the irradiation of the laser based on the early pulse signal is completed. Radicals are generated.
  • the concentration of the starting radical is a concentration corresponding to the average value in the steady state
  • the laser based on the starting pulse signal is irradiated after the irradiation of the laser based on the starting pulse signal is performed, and then the polymerization bond of the starting radical is completed.
  • the starting radical is less susceptible to the irradiation of the laser based on the late pulse signal than when the irradiation is performed.
  • the degree of continuity of the degree of curing between the compartmentalized regions of the ultraviolet curable resin 12 is increased as compared with the case where the radical radical is generated after the radical radical reaches the radical life. Therefore, in manufacturing the lens 16 in which the ultraviolet curable resin 12 is applied to one side 16A, that is, the optical element (for example, an aspherical lens) including the ultraviolet curable resin 12 and the lens 16, the polymerization bond of the starting radical is completed. It is possible to reduce the distortion caused by the ultraviolet curable resin 12 due to the curing speed of the ultraviolet curable resin 12, as compared with the case where the laser irradiation based on the subsequent pulse signal is performed later.
  • the optical element for example, an aspherical lens
  • the irradiation unit 18 scans the laser with respect to the ultraviolet curable resin 12. Therefore, the ultraviolet curable resin 12 can be cured along the scanning line of the laser.
  • the leading radical can be less affected by the irradiation of the laser based on the trailing pulse signal than in the case where the time interval between the starting pulse signal and the trailing pulse signal is equal to or longer than the radical lifetime.
  • the irradiation unit 18 irradiates the entire region of the ultraviolet curable resin 12 with the laser. Therefore, in manufacturing a lens 16 in which the ultraviolet curable resin 12 is applied to one side 16A, that is, an optical element including the ultraviolet curable resin 12 and the lens 16, a laser based on a late pulse signal is used after the polymerization bond of the original radical is completed. Compared with the case where irradiation is performed, the distortion caused by the curing rate of the entire region of the ultraviolet curable resin 12 can be reduced.
  • the laser intensity table 32A is received by the external I / F 40, and the received laser intensity table 32A is stored in the storage device 32. As a result, the contents of the laser intensity table 32A stored in the storage device 32 are updated. Then, the laser intensity is changed by the control unit 30A1 according to the laser intensity table 32A stored in the storage device 32. Therefore, the ultraviolet curable resin 12 can be irradiated with the laser at the intensity derived from the laser intensity table 32A whose contents have been updated.
  • the laser intensity table 32A is determined according to the optical characteristics of the lens 16. Therefore, as compared with the case where the laser intensity table 32A is determined regardless of the optical characteristics of the lens 16, the distortion generated in the ultraviolet curable resin 12 due to the curing speed of the ultraviolet curable resin 12 applied to the lens 16 is generated. It can be reduced with high accuracy.
  • the laser intensity table 32A is determined according to the optical characteristics of the lens 16 and the optical characteristics of the support member 14. Therefore, as compared with the case where the laser intensity table 32A is defined independently of the optical characteristics of the lens 16 and the optical characteristics of the support member 14, it occurs in the ultraviolet curable resin 12 due to the curing speed of the ultraviolet curable resin 12. Distortion can be reduced with high accuracy.
  • the technique of the present disclosure is not limited to this.
  • the laser is applied to an ultraviolet curable resin applied to another optical element such as a prism, a galvano mirror, a MEMS mirror, a polygon mirror, a resonant mirror, a dichroic mirror, or a total reflection mirror. You may do so.
  • the technique of the present disclosure is limited to this. Not done.
  • the technique of the present disclosure is also applicable to a 3D printer or the like that works using a photocurable resin such as an ultraviolet curable resin.
  • a galvano mirror is mentioned as an example of the scanner mirror 24, but the technique of the present disclosure is not limited to this.
  • a movable mirror such as a resonant mirror or a MEMS mirror may be used.
  • control unit 30A1 has described with reference to a mode example in which the intensity of the laser is changed by changing the pulse width of the pulse signal, but the control unit 30A1 determines the voltage value or the current value.
  • the intensity of the laser may be changed by controlling the laser intensity.
  • the laser device is illustrated as the light source 20, but the technique of the present disclosure is not limited to this.
  • another light source such as an LED, a mercury lamp, or a metal halide lamp may be used.
  • the laser is irradiated to the entire region of the ultraviolet curable resin 12
  • the technique of the present disclosure is not limited to this.
  • the laser may be applied to a part of the ultraviolet curable resin 12 (see FIG. 4) such as the central portion or the outer edge portion in a plan view.
  • the laser intensity table 32A has been illustrated, but the technique of the present disclosure is not limited to this.
  • the laser intensity may be calculated using an arithmetic expression in which the position identification information is used as an independent variable and the intensity information is used as a dependent variable.
  • the light irradiation device 10 in which the light source 20, the optical system 22, and the scanner mirror 24 are arranged so that the laser concentrates on the contact surface between the single surface 16A and the ultraviolet curable resin 12 is provided.
  • the techniques of the present disclosure are not limited thereto.
  • the light irradiation device 100 may be used.
  • the light irradiation device 100 includes the light source 20, the optical system 22, and the scanner so that the laser is irradiated in a state of being diffused (a state of being blurred from the imaging point) on the contact surface between the one side 16A and the ultraviolet curable resin 12.
  • the mirror 24 is arranged. By changing the configuration of the optical system 22 or changing the distance from the scanner mirror 24 to the ultraviolet curable resin 12, the laser is diffused on the contact surface between the one side 16A and the ultraviolet curable resin 12. Can be made to.
  • the ultraviolet curable resin 12 may be irradiated with the laser through the liquid crystal panel 70.
  • the liquid crystal panel 70 includes a plurality of pixels arranged in a matrix, and each pixel is switched between a transmission state and a light-shielding state according to an instruction from the control unit 30A1.
  • the control unit 30A1 switches the transmission state and the light-shielding state of each pixel of the liquid crystal panel 70 according to the laser intensity table 32A, thereby changing the intensity of the laser irradiated to each of the divided regions as described above. ..
  • the liquid crystal panel 70 is an example of a "changed portion" according to the technique of the present disclosure.
  • the pixels of the liquid crystal panel 70 are an example of the "light transmittance changing region" according to the technique of the present disclosure.
  • transmissive sheet instead of the liquid crystal panel 70.
  • the translucent sheet is formed in a band shape, and a transmissive region and a light-shielding region are formed in advance on the surface of the translucent sheet by using an ink jet printer or the like. Then, the intensity of the laser is changed by moving the translucent sheet in a state where the laser is irradiated to the ultraviolet curable resin 12 via the translucent sheet.
  • the UV light may be surface-irradiated to the ultraviolet curable resin 12 by using the light irradiation device 200.
  • the light irradiation device 200 includes a light source 20A and a collimating lens 22B.
  • the light source 20A emits UV light to the collimating lens 22B.
  • the UV light from the light source 20A is regarded as a parallel light flux, and the UV light converted into a parallel light beam is applied to the ultraviolet curable resin 12 in a planar manner.
  • the liquid crystal panel 70 shown in FIG. 11 is an example of the “transmittance changing element” according to the technique of the present disclosure. Further, the pixel 70A of the liquid crystal panel 70 is an example of the "light transmission changing region" according to the technique of the present disclosure.
  • the liquid crystal panel 70 is arranged between the collimating lens 22B and the lens 16, but the liquid crystal panel 70 may be arranged between the light source 20A and the collimating lens 22B. .. Further, in the present embodiment, the irradiation energy of UV light directed to the ultraviolet curable resin 12 is distributed in multiple stages of three or more stages. The photodetector 128 and the actuator 316 shown in FIG. 11 will be described later.
  • the positive lens is illustrated as the lens 16, but the type of lens is not limited to the positive lens (convex lens), but may be a negative lens (concave lens) or a meniscus lens. It may be a (concave-convex lens) or an aspherical lens.
  • the junction lens 160 may be used.
  • the bonded lens 160 is a bonded lens in which the lens 16 and the negative lens (concave lens) 162 are bonded, the negative lens 162 is held by the jig 163, and the lens is mounted on the negative lens 162. 16 are arranged.
  • the type of lens is not limited to the positive lens (convex lens), but may be a negative lens (concave lens) or a meniscus lens. It may be a (concave-convex lens) or an aspherical lens.
  • the junction lens 160 may be used.
  • the bonded lens 160 is a bonded lens in which the lens 16 and the negative lens (concave lens) 162 are bonded, the negative lens
  • an ultraviolet curable resin 162A is interposed between the lens 16 and the negative lens 162, and the lens 16 and the negative lens 162 are brought into contact with each other by irradiating the ultraviolet curable resin 162A with a laser. Be joined.
  • the laser intensity table is according to at least one of the optical characteristics of the lens 16 constituting the bonded lens 160, the optical characteristics of the negative lens 162 constituting the bonded lens 160, and the optical characteristics of the jig 163.
  • the strength information of 32A may be determined.
  • the bonded lens 160 is formed of two lenses, a lens 16 and a negative lens 162, it may be a bonded lens formed of three or more lenses.
  • the ultraviolet curable resin is applied to one side of at least one lens of the plurality of lenses included in the bonded lens formed by stacking a plurality of lenses, the ultraviolet curable resin contained in the bonded lens is irradiated with light.
  • the ultraviolet curable resin can be cured by irradiating the laser from the device 10.
  • the laser may be scanned from the start point to the end point of the rectangular plane 50 as in the example shown in FIG.
  • the laser is incident on the negative lens 162 from the gap 165 between the ultraviolet curable resin 162A and the negative lens 162, and the optical characteristics of the negative lens 162.
  • the optical characteristics of the inner peripheral surface and bottom surface 163A of the jig 163 are affected.
  • the laser incident on the negative lens 162 from the gap 165 is irradiated to the ultraviolet curable resin 162A from the negative lens 162 side.
  • the laser may be applied to the entire region of the ultraviolet curable resin 162A or a designated partial region from both sides of the lens 16 side and the negative lens 162 side.
  • the laser may be positively incident on the negative lens 162 from the gap 165.
  • the ultraviolet curable resin has been exemplified, but the technique of the present disclosure is not limited to this, and the photocurable resin that cures in response to light in a wavelength range other than the wavelength range of ultraviolet rays. Therefore, light in the corresponding wavelength range may be irradiated.
  • pulse irradiation is illustrated, but the technique of the present disclosure is not limited to this, and the laser may be irradiated by a continuous wave oscillation method.
  • the intensity of the laser may be continuously changed so that the laser having a different intensity is irradiated for each division region.
  • the laser is scanned with respect to the accommodating surface 14A and the periphery of the accommodating surface 14A.
  • the technique of the present disclosure is not limited to this.
  • the optical properties of the support member 14 considered when defining the laser intensity table 32A are the diffusion that occurs when the laser is scanned against the accommodation surface 14A and the accommodation surface 14A around the accommodation surface 14A. It may be a reflection.
  • the laser irradiation program 30B1 may be stored in the storage medium 600.
  • the laser irradiation program 30B1 stored in the storage medium 600 is installed in the computer 30, and the CPU 30A executes the above-mentioned laser irradiation process according to the laser irradiation program 30B1.
  • An example of the storage medium 600 is an arbitrary portable storage medium such as a CD-ROM, a DVD-ROM, an SSD, or a USB memory.
  • the laser irradiation program 30B1 is stored in a storage unit of another computer or server device connected to the computer 30 via a communication network (not shown), and the laser is stored in response to the above-mentioned request of the light irradiation device 10.
  • the irradiation program 30B1 may be downloaded to the computer 30.
  • the downloaded laser irradiation program 30B1 is installed in the computer 30 and executed by the CPU 30A of the computer 30.
  • the CPU 30A is a single CPU, but the technique of the present disclosure is not limited to this, and a plurality of CPUs may be adopted.
  • each unit described in the above embodiment an example of a form realized by a software configuration by a computer 30 is given.
  • the techniques of the present disclosure are not limited to this.
  • each part described in the above embodiment may be realized by a device including, for example, at least one of ASIC, FPGA, and PLD.
  • each part described in the above embodiment may be realized by a combination of a hardware configuration and a software configuration.
  • the hardware resource for executing the above laser irradiation process the following various processors can be used.
  • the processor include, as described above, software, that is, a CPU, which is a general-purpose processor that functions as a hardware resource for executing laser irradiation processing by executing a program.
  • examples of the processor include a dedicated electric circuit which is a processor having a circuit configuration specially designed for executing a specific process such as FPGA, PLD, or ASIC.
  • a memory is built in or connected to each processor, and each processor executes a laser irradiation process by using the memory.
  • the hardware resource that performs the laser irradiation process may consist of one of these various processors, or a combination of two or more processors of the same type or dissimilarity (eg, a combination of multiple FPGAs, or a combination of multiple FPGAs). It may be composed of a combination of a CPU and an FPGA). Further, the hardware resource for executing the laser irradiation process may be one processor.
  • one processor is configured by a combination of one or more CPUs and software, and this processor performs the above-described implementation.
  • SoC there is a mode in which a processor that realizes the functions of the entire system including a plurality of hardware resources for executing laser irradiation processing with one IC chip is used.
  • the processing of each part described in the above embodiment is realized by using one or more of the above-mentioned various processors as hardware resources.
  • MEMS is an abbreviation for “Micro Electro Mechanical Systems (micro electromechanical system)”.
  • DMD is an abbreviation for “Digital Micromirror Device (MEMS device developed by Texas Instruments, USA)”. LED refers to the abbreviation of "Light Emitting Diode”.
  • the light irradiation device 110 does not scan UV light (here, UV light that is not laser light as an example) emitted from a light source 120 described later. It is a device that irradiates the ultraviolet curable resin 162A.
  • the ultraviolet curable resin 162A is layered with a constant thickness between the lens 16 and the negative lens (concave lens) 162 in order to bond the lens 16 and the negative lens (concave lens) 162. It is intervening.
  • the light irradiation device 110 includes an irradiation unit 118.
  • the irradiation unit 118 includes a light source 120, an illumination optical system 122, a DMD 124, and a projection optical system 126. Further, the light irradiation device 110 includes a light detection device 128.
  • the DMD 124 is an example of the "reflection direction changing element" and the "MEMS" according to the technique of the present disclosure.
  • the irradiation unit 118 irradiates the ultraviolet curable resin 162A with UV light. Specifically, first, the UV light emitted from the light source 120 is guided to the DMD 124 by the illumination optical system 122, and the UV light is modulated by the DMD 124. Then, the UV light emitted from the light source 120 is irradiated to the ultraviolet curable resin 162A via the DMD 124. The UV light modulated by the DMD 124 is projected onto the ultraviolet curable resin 162A by the projection optical system 126.
  • the illumination optical system 122 includes a collimating lens 122A.
  • the light source 120 emits UV light to the collimated lens 122A, and the collimated lens 122A uses the UV light from the light source 120 as a parallel luminous flux, and the UV light as a parallel luminous flux is radiated to the DMD 124 in a planar manner. ..
  • the light source 120 of the present embodiment uses an ultraviolet LED that emits UV light. It should be noted that other types of light sources that emit UV light such as a mercury lamp can also be used as the light source 120.
  • the DMD 124 includes a plurality of micromirrors 124A capable of changing the direction of reflection of UV light emitted from the light source 120.
  • the UV light emitted from the light source 120 irradiates the ultraviolet curable resin 162A through the plurality of micromirrors 124A.
  • the plurality of micromirrors 124A are arranged in a plane on the integrated circuit. Further, the plurality of micromirrors 124A are movable, and each micromirror 124A is formed in a rectangular shape in a plan view. Examples of the number of the plurality of micromirrors 124A include hundreds of thousands to millions.
  • Each micromirror 124A is provided with a mirror surface 124A1, which is a surface that reflects UV light, so as to be tiltable in the first direction and the second direction around the twist axis.
  • An electrode is provided below the mirror surface 124A1, and the tilted state of the mirror surface 124A1 of each micromirror 124A changes as the electrode is driven.
  • the mirror surface 124A1 is tilted in the first direction (hereinafter, also referred to as "first tilted state”) and in a second direction (hereinafter, also referred to as "second tilted state"). ) To selectively displace.
  • setting the mirror surface 124A1 of the micromirror 124A in the first tilted state is also referred to as “on”, and setting the mirror surface 124A1 of the micromirror 124A in the second tilted state is also referred to as “off”. ..
  • the time during which the mirror surface 124A1 is maintained in the first inclined state is also referred to as “on time”
  • the time during which the mirror surface 124A1 is maintained in the second inclined state is also referred to as “off time”.
  • the projection optical system 126 and the photodetector 128 are arranged in different directions when viewed from the micromirror 124A.
  • the photodetector 128 is arranged in a direction different from that of the ultraviolet curable resin 162A when viewed from the micromirror 124A.
  • the mirror surface 124A1 When the mirror surface 124A1 is in the first inclined state, the mirror surface 124A1 reflects the UV light from the light source 120 toward the projection optical system 126, and when the mirror surface 124A1 is in the second inclined state, the mirror surface 124A1 is the UV light from the light source 120. Is reflected on the light detection device 128 side.
  • each micromirror 124A is turned on and off. Specifically, as shown in FIG. 15B as an example, the ratio of the on-time to the off-time is obtained by performing PWM method control (hereinafter, also referred to as “pulse width modulation”) for each micromirror 124A. Is changed. As a result, the irradiation energy of UV light per unit time is gradation-controlled by each of the micromirrors 124A.
  • An example of irradiation energy is the amount of light (for example, the product of the illuminance per unit time of UV light and the irradiation time).
  • the projection optical system 126 irradiates the entire region of the ultraviolet curable resin 162A in a planar manner by enlarging the light diameter of the UV light reflected by the DMD 124 at a preset magnification.
  • the photodetector 128 detects the amount of UV light reflected by the DMD 124.
  • the photodetector 128 includes a detection optical system 140 having a lens and a photodetector 142 that detects the amount of received UV light.
  • the UV light emitted from the light source 120 is reflected by the mirror surface 124A1 toward the photodetector 128 and is incident on the photodetector 142 via the detection optical system 140.
  • the photodetector 142 detects the amount of incident UV light.
  • the photodetector 142 is an example of a "photodetector" according to the technique of the present disclosure.
  • the light irradiation device 110 includes a computer 30, a storage device 32, a UI device 34, a DMD driver 136, a light source driver 138, an external I / F40, an external I / F144, and an I / O 42. I have.
  • the I / O 42 includes an input / output port (not shown), and the storage device 32, the UI device 34, the DMD driver 136, the light source driver 138, the external I / F40, and the external I / F144 are provided via the input / output ports. Is connected to the I / O 42.
  • the I / O 42 is connected to the bus line 48, and the CPU 30A uses the storage device 32, the UI device 34, the DMD driver 136, the light source driver 138, the external I / F40, and the external I / F144 via the I / O 42. And exchange various information.
  • the DMD driver 136 is a device having an ASIC and is connected to the DMD 124.
  • the DMD driver 136 drives each of the micromirrors 124A (details will be described later) of the DMD 124 according to the instruction from the CPU 30A.
  • the light source driver 138 drives the light source 120 to emit UV light from the light source 120, stops the emission of UV light, and changes the intensity of UV light according to the instruction from the CPU 30A. Specifically, the light source driver 138 controls the timing of emitting UV light to the light source 120, the timing of stopping the emission of UV light, the change of the intensity of UV light, and the like according to the instruction from the CPU 30A.
  • Irradiation of UV light to the ultraviolet curable resin 162A is realized by controlling the light source 120 by the light source driver 138 according to the instruction from the CPU 30A and changing the direction of each micromirror 124A of the DMD 124 according to the instruction from the CPU 30A. ..
  • the external I / F 144 is a communication device having an FPGA.
  • a photodetector 128 is connected to the external I / F 144.
  • the external I / F 144 controls the exchange of various information between the CPU 30A and the photodetector 128.
  • the storage device 32 stores the irradiation energy change table 132A.
  • the irradiation energy change table 132A is received by the external I / F40, and the irradiation energy change table 132A received by the external I / F40 is stored in the storage device 32 by the CPU 30A.
  • the UV light irradiation program 130B1 is stored in the ROM 30B.
  • the CPU 30A reads the UV light irradiation program 130B1 from the ROM 30B, and deploys the read UV light irradiation program 130B1 in the RAM 30C.
  • the CPU 30A operates as the control unit 30A1 and the synchronization signal supply unit 30A2 by executing the UV light irradiation program 130B1 developed in the RAM 30C.
  • the correction control program 130B2 is stored in the ROM 30B.
  • the CPU 30A reads the correction control program 130B2 from the ROM 30B, and deploys the read correction control program 130B2 in the RAM 30C.
  • the CPU 30A operates as the control unit 30A1 by executing the correction control program 130B2 developed in the RAM 30C.
  • the correction control program 130B2 developed in the RAM 30C.
  • the synchronization signal supply unit 130A2 generates a synchronization signal based on a reference clock (not shown), and supplies the generated synchronization signal to the control unit 30A1.
  • the control unit 30A1 synchronizes the operation of the DMD driver 136 with the operation of the light source driver 138 according to the supplied synchronization signal by supplying the synchronization signal from the synchronization signal supply unit 130A2.
  • the control unit 30A1 controls the DMD driver 136 by supplying the DMD control signal to the DMD driver 136, and controls the light source driver 138 by supplying a pulse signal to the light source driver 138.
  • the supply of the DMD control signal to the DMD driver 136 and the supply of the pulse signal to the light source driver 138 are synchronized.
  • the synchronization of the supply of the DMD control signal to the DMD driver 136 and the supply of the pulse signal to the light source driver 138 is realized by supplying the synchronization signal to the control unit 30A1.
  • the light source driver 138 controls the light source 120 according to the signal supplied from the control unit 30A1 to turn on / off the output of UV light to the light source 120.
  • the DMD control signal is a pulse signal that changes the direction of the micromirror 124A of the DMD 124, and the DMD driver 136 changes the direction of the micromirror 124A of the DMD 124 according to the DMD control signal supplied from the control unit 30A1.
  • the UV light emitted from the light source 20 is guided to the DMD 124 by the illumination optical system 122, it is reflected by the micromirror 124A, and the direction of the micromirror 124A is changed according to the DMD control signal to obtain the ultraviolet curable resin 162A and the light detection device. UV light is selectively irradiated to 128.
  • the micromirror 124A reflects UV light toward the ultraviolet curable resin 162A when the ultraviolet curable resin 162A is cured, and the light detection device 128 reflects the UV light with respect to the light detection device 128 when the light amount of the UV light is detected. Reflects UV light.
  • the photodetector 128 sets the amount of UV light reflected by the micromirror 124A for each micromirror 124A by setting the plurality of micromirrors 124A in the second tilted state one by one in a preset order according to the DMD control signal. To detect.
  • detection data Data indicating the light detected by the photodetector 128 for each micromirror 124A (hereinafter, also referred to as “detection data”) is stored in the storage device 32 in association with the division area.
  • the detection data is output to the control unit 30A1 via the external I / F 144 shown in FIG. 16 as an example.
  • the control unit 30A1 changes the irradiation energy according to the change with time of the light source 120 and / or DMD124 (hereinafter, also simply referred to as “change with time”).
  • the change in irradiation energy is realized, for example, by changing the output level of UV light from the light source 120.
  • the change in the output level of UV light is realized, for example, by changing the bias voltage when a bias voltage is applied to the light source 120.
  • the technique of the present disclosure is not limited to this, and the change of the irradiation energy can also be realized by changing the time for reflecting the UV light toward the ultraviolet curable resin 162A by the DMD 124, that is, changing the on time.
  • the change with time can be identified from the detection data output from the photodetector 128. Therefore, the control unit 30A1 performs correction control according to the detection result of the photodetector 128, that is, the detection data. In this way, in the light irradiation device 110, the operation of the DMD 124 is calibrated according to the change with time.
  • the period of the DMD control signal that is, the length of each pulse of the DMD control signal is less than the lifetime of radicals generated from the ultraviolet curable resin 162A for each of the division regions described later, as in the first embodiment.
  • the irradiation of UV light is repeated a plurality of times over the entire region of the ultraviolet curable resin 162A shown in FIG. 18 as an example.
  • the change of the irradiation energy of the UV light is realized by the pulse width modulation of the DMD control signal by the control unit 30A1 for each division region described later.
  • the duty ratio of the DMD control signal is changed by the control unit 30A1 for each division region described later, so that the irradiation energy of UV light for each division region is increased. It is changed in multiple stages of 3 or more stages, whereby the irradiation energy of UV light directed to the ultraviolet curable resin 162A is distributed in multiple stages of 3 or more stages.
  • the length of each pulse of the DMD control signal that is, the period of the DMD control signal is fixed.
  • the period of the DMD control signal is fixed, but the technique of the present disclosure is not limited to this.
  • the period of the DMD control signal may be variable for all the micromirrors 124A included in the DMD 124.
  • the period of the DMD control signal may be variable for some of the micromirrors 124A among all the micromirrors 124A included in the DMD 124.
  • the period of the DMD control signal may be variable for at least one selected micromirror 124A.
  • the shape plane 50 is set by the control unit 30A1.
  • the UV light reflected by each of the micromirrors 124A of the DMD 124 is radiated on the rectangular plane 50 in a planar manner via the projection optical system 126.
  • One division area is a rectangular area irradiated with UV light reflected by the rectangular micromirror 124A.
  • the ultraviolet curable resin 162A according to the second embodiment is also divided by each division region of the rectangular plane 50 in a plan view, and is also divided by each division region of the rectangular plane 50.
  • Each position of the plurality of division areas obtained by the division is specified by a row number and a column number, similarly to each division area of the rectangular plane 50.
  • the light irradiation device 110 includes an irradiation energy change table 132A as shown in FIG.
  • the irradiation energy change table 132A is a table in which the position identification information and the duty ratio used in the above-mentioned pulse width modulation are associated with each micromirror 124A.
  • the distribution of the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A by the DMD 124 is such that when the UV light is applied to the entire region of the ultraviolet curable resin 162A, the entire region of the ultraviolet curable resin 162A is cured at a uniform rate. As described above, it is derived in advance by testing with an actual machine and / or computer simulation in consideration of the influence described below.
  • the illuminance distribution in the ultraviolet curable resin 162A is determined by superimposing the distributions shown in (1) to (4).
  • the superposition of the distributions shown in (1) to (4) refers to, for example, the multiplication of the distributions shown in (1) to (4).
  • the distribution shown in (1) refers to the illuminance distribution in the DMD 124 irradiated with the UV light of the illumination optical system 122.
  • the distribution shown in (2) refers to the gradation distribution of DMD124 (hereinafter, also referred to as “DMD gradation distribution”).
  • DMD gradation distribution refers to, for example, the reflectance distribution of DMD124.
  • the distribution shown in (3) refers to the illuminance distribution of UV light irradiated to the lens 16 by the projection optical system 126.
  • the distribution shown in (4) refers to the illuminance distribution due to the influence of refraction, reflection, scattering, and / or absorption of UV light in the lens 16 and the negative lens 162 included in the junction lens 160.
  • the graph shown in (1) at the upper part of FIG. 21 (hereinafter, also referred to as “upper (1) graph”) and the glag shown at (1) at the lower part of FIG. 21 (hereinafter, also referred to as “lower (1) graph”).
  • the horizontal axis represents the distance from the center of the DMD 124
  • the vertical axis represents the illuminance (mW / cm 2 ) of the DMD 124.
  • the graph shown in the upper part (2) of FIG. 21 hereinafter, also referred to as “upper part (2) graph” and the graph shown in the lower part (2) of FIG. 21 (hereinafter, also referred to as “lower part (2) graph”).
  • the horizontal axis represents the distance from the center of the DMD124, and the vertical axis represents the reflectance (%) of the DMD124.
  • the graph shown in the upper part (3) of FIG. 21 hereinafter, also referred to as “upper part (3) graph” and the graph shown in the lower part (3) of FIG. 21 (hereinafter, also referred to as “lower part (3) graph”).
  • the horizontal axis represents the distance from the center of the projection optical system 126
  • the vertical axis represents the transfer function (%) of the projection optical system 126.
  • the "transfer function” here indicates the degree of the light component (for example, intensity (power) and / or brightness, etc.) that acts on the UV light that has passed through the projection optical system 126. ..
  • the horizontal axis represents the distance from the center of the lens 16
  • the vertical axis represents the transfer function (%) of the lens 16 and the negative lens 162.
  • the graph shown in the upper part (5) of FIG. 21 hereinafter, also referred to as “upper part (5) graph”
  • the graph shown in the lower part (5) of FIG. 21 hereinafter, also referred to as “lower part (5) graph”.
  • the horizontal axis represents the distance from the center of the UV curable resin 162A, and the vertical axis represents the illuminance (mW / cm 2 ) with respect to the UV curable resin 162A.
  • the illuminance distribution shown by the upper (5) graph and the lower (5) graph corresponds to the distribution of the irradiation energy of UV light with respect to the ultraviolet curable resin 162A.
  • the illuminance distribution shown by the lower graph (5) is an example of "distribution of irradiation energy according to the characteristics of the photocurable resin" according to the technique of the present disclosure.
  • the transfer function shown by the upper (3) graph and the lower (3) graph is an example of "distribution of irradiation energy according to the characteristics of the projection optical system” according to the technique of the present disclosure.
  • the transfer function shown by the upper (4) graph and the lower (4) graph is an example of "the distribution of the irradiation energy according to the optical characteristics of the optical element".
  • the illuminance distribution of the UV light emitted from the light source 120 and applied to the DMD 124 has uneven illuminance in the DMD 124.
  • This unevenness is caused, for example, by the beam profile of UV light emitted from the light source 120 and / or the characteristics of the projection optical system 126.
  • the illuminance distribution of the UV light incident on the DMD 124 can be detected by a photodetector (not shown in FIG. 21).
  • the unevenness of the illuminance in the DMD124 is the unevenness in which the illuminance of the UV light decreases from the center of the DMD124 toward the periphery of the DMD124.
  • each micromirror 124A when the mirror surface 124A1 of each micromirror 124A is not deteriorated, for example, the reflectance of each micromirror 124A (for example, the reflectance of the mirror surface 124A1) is the same, and as an example, the upper row (2) In the example shown in the graph, there is no unevenness in the reflectance distribution.
  • the transfer optical system 126 has uneven transfer functions.
  • the transmission function of the projection optical system 126 measures the illuminance distribution at the projection point of the UV light emitted from the projection optical system 126 when the reflectance distribution of the DMD 124 is set uniformly, and the measured illuminance distribution is the illumination optical system. It is obtained by dividing by the illuminance distribution of 122.
  • the upper graph (4) shows the influence of the lens 16 and the negative lens 162 (for example, refraction, reflection, scattering, and / or absorption), and the transfer function (%) is uneven.
  • the influence of the lens 16 and the negative lens 162 can be determined by a test using an actual machine and / or a ray tracing simulation by a computer.
  • the UV light applied to the ultraviolet curable resin 162A is the upper (1) graph to the upper (4).
  • the UV curable resin 162A is affected by the superposition of the characteristics shown in the graph, and the illuminance distribution becomes uneven. Therefore, the UV curable resin has a constant thickness.
  • the entire 162A cannot be cured at a uniform rate. In other words, the region with a large amount of light has a higher curing rate than the region with a small amount of light.
  • the control unit 30A1 performs pulse width modulation of each micromirror 124A of the DMD 124 so as to make the distribution of the irradiation energy of UV light uniform with respect to the ultraviolet curable resin 162A having a uniform thickness.
  • the duty ratio used is set for each division area.
  • the duty ratio set for each division region is determined by the control unit 30A1 according to the gradation distribution of DMD124 shown in the lower graph (2) as an example.
  • the gradation distribution of DMD124 shown in the lower graph (2) is set by the control unit 30A1.
  • the gradation distribution of DMD124 shown in the lower (2) graph is a gradation distribution having the same distribution tendency as the distribution tendency indicated by the reciprocal of the illuminance distribution shown in the upper (5) graph.
  • the illuminance distribution shown by the lower (1) graph, the DMD gradation distribution shown by the lower (2) graph, and the illuminance distribution shown by the lower (3) graph By superimposing the illuminance distributions shown in the lower graph (4), the illuminance distribution in the ultraviolet curable resin 162A can be made uniform as shown in the lower graph (5). Therefore, the ultraviolet curable resin 162A can be cured at a uniform rate, and the strain generated by the ultraviolet curable resin 162A due to the curing rate of the ultraviolet curable resin 162A can be reduced.
  • the light irradiation device 110 generates radicals from the ultraviolet curable resin 162A by superimposing UV light on the ultraviolet curable resin 162A for each division region under the control of the control unit 30A1. Then, the ultraviolet curable resin 162A is cured by the polymerization reaction of the generated radicals.
  • the illuminance distribution can be made uniform as the gradation is finer, but as the number of gradations increases, the period of the DMD control signal is changed.
  • the specified frame rate becomes lower. The lower the frame rate, the longer the period of the DMD control signal. If the period of the DMD control signal, that is, the irradiation time of UV light is longer than the radical life of the ultraviolet curable resin 162A, the curing rate of the ultraviolet curable resin 162A becomes non-uniform. If the curing rate becomes non-uniform, the hardness of the UV curable resin 162A becomes uneven before the entire UV curable resin 162A is completely cured, and as a result, the UV curable resin 162A is distorted.
  • the control unit 30A1 sets the radical life of the ultraviolet curable resin 162A to one frame length of the DMD control signal (for example, one frame length A shown in FIGS. 19A to 19C). Less than that, that is, the irradiation time per irradiation of UV light to the ultraviolet curable resin 162A is set to be less than the radical life.
  • the term "less than the radical lifetime" means before the radical lifetime is reached, before the radical polymerization reaction is stopped, or during the growth of the radical.
  • FIG. 22 shows an example of the flow of the UV light irradiation process executed by the CPU 30A according to the UV light irradiation program 130B1 when the instruction to start the execution of the UV light irradiation process is received by the reception device 34B.
  • step ST100 the control unit 30A1 reads out the irradiation energy change table 132A from the storage device 32, and then the UV light irradiation process shifts to step ST101.
  • the control unit 30A1 starts irradiating each micromirror 124A with UV light accompanied by pulse width modulation.
  • the control unit 30A1 emits UV light from the light source 120, and drives each micromirror 124A of the DMD 124 so as to reflect the UV light emitted from the light source 120 toward the projection optical system 126.
  • the control unit 30A1 performs pulse width modulation for each micromirror 124A according to the irradiation energy change table 132A acquired in step ST100.
  • control unit 30A1 supplies the DMD control signal of the duty ratio specified for each division region from the irradiation energy change table 132A to the DMD driver 136, so that the ratio of the on time to the off time for each micromirror 124A To change.
  • the ultraviolet curable resin 162A is irradiated with UV light having three or more gradations via the projection optical system 126.
  • the control unit 30A1 determines whether or not the number of times of irradiation of UV light to the ultraviolet curable resin 162A has reached the predetermined number of times. If the number of UV light irradiations has not reached the predetermined number in step ST102, the determination is denied and the UV light irradiation process proceeds to step ST101. When the number of UV light irradiations reaches a predetermined number in step ST102, the determination is affirmed and the UV light irradiation process proceeds to step ST103.
  • step ST103 the control unit 30A1 stops the irradiation of UV light by the light irradiation device 110, and then the UV light irradiation process ends.
  • a change with time may occur.
  • the time-dependent deterioration of the light source 120 and the time-dependent deterioration of the DMD 124 can be mentioned.
  • the deterioration of the light source 120 with time causes a decrease in the amount of UV light emitted from the light source 120
  • the deterioration of the DMD 124 with time causes a decrease in the reflectance of the micromirror 124A.
  • the amount of decrease in reflectance of the micromirror 124A may differ for each micromirror 124A.
  • the amount of UV light received by the ultraviolet curable resin 162A decreases, so that the ultraviolet curable resin 162A Affects the hardening of.
  • the light source 120 deteriorates over time depending on the cumulative irradiation time, which is the cumulative irradiation time since the start of use of the light source 120, and / or the usage time of the light irradiation device 110.
  • correction control is performed so as to compensate for the amount of light that has deteriorated over time due to the deterioration over time of the DMD 124.
  • the correction control is performed so that the amount of UV light incident on the projection optical system 126 is the same as that before the light source 120 and the DMD 124 deteriorate with time.
  • the correction control in the technique of the present disclosure is not limited to this, and may be a control that sets the amount of light within a predetermined range that can be regarded as the same amount of light.
  • the default range refers to a range derived in advance as a range of the amount of light that supplements the amount of light that has deteriorated over time by, for example, a test using an actual machine and / or a computer simulation.
  • correction control is performed by the CPU 30A.
  • FIG. 23 shows an example of the flow of correction control.
  • the correction control is performed by the CPU 30A according to the correction control program 130B2.
  • step ST200 shown in FIG. 23 the control unit 30A1 determines whether or not the cumulative irradiation time of UV light has reached a predetermined time (for example, several tens of hours). If the cumulative irradiation time has not reached the predetermined time, the determination is denied and the determination in step ST200 is performed again. When the cumulative irradiation time reaches the predetermined time in step ST200, the determination is affirmed, and the correction control shifts to step ST201.
  • a predetermined time for example, several tens of hours
  • step ST200 the "cumulative irradiation time" is mentioned in this step ST200, this is only an example, and the processing after step ST201 may be performed at a timing desired by the user.
  • step ST201 the control unit 30A1 emits UV light from the light source 120, turns off the plurality of micromirrors 124A one by one in a preset order, and reduces the amount of UV light reflected by the micromirrors 124A to the micromirrors 124A.
  • the light detection device 128 is made to detect each time, and the detection data for each micromirror 124A is stored in the storage device 32.
  • step ST202 the control unit 30A1 determines whether or not the amount of light indicated by the detection data and the reference amount of light stored in advance in the storage device 32 are different. In step ST202, if the amount of light indicated by the detection data and the amount of reference light stored in advance in the storage device 32 are different, the determination is affirmed and the correction control shifts to step ST204. In step ST202, if the amount of light indicated by the detection data and the amount of reference light stored in advance in the storage device 32 match, the determination is denied and the correction control shifts to step ST203.
  • step ST203 the control unit 30A1 calculates and obtains the degree of difference (for example, difference and / or ratio, etc.) between the reference light amount stored in advance in the storage device 32 and the light amount indicated by the detection data.
  • the degree of difference is stored in the storage device 32.
  • the control unit 30A1 changes the ratio of the on-time and the off-time of the micromirror 124A so that the amount of UV light becomes the reference amount of light according to the degree of difference stored in the storage device 32, and then corrects it.
  • Control proceeds to step ST204. If the reflectance of all the micromirrors 124A is lowered, correction control may be performed to increase the amount of light of the light source 120.
  • correction control is performed to increase the light intensity of the light source 120.
  • a plurality of pixels such as 10 pixels (10 micromirrors 124A) may be grouped together to perform the same detection to correction control. As a result, the correction control can be performed faster than in the case where the correction control is performed one by one.
  • step ST204 the control unit 30A1 determines whether or not the condition for terminating the correction control (hereinafter, referred to as "correction control end condition") is satisfied.
  • the correction control end condition there is a condition that the UV light irradiation process is completed.
  • the reception device 34B has received an instruction to end the UV light irradiation process or the correction control.
  • step ST204 If the correction control end condition is not satisfied in step ST204, the determination is denied and the correction control shifts to step ST200. If the correction control end condition is satisfied in step ST204, the determination is affirmed and the correction control ends.
  • the UV light emitted from the light source 120 is irradiated to the ultraviolet curable resin 162A by the irradiation unit 118 via the DMD 124. Then, by controlling the DMD 124 by the control unit 30A1, the irradiation energy of the UV light directed to the ultraviolet curable resin 162A is distributed in multiple stages of three or more stages. Therefore, according to this configuration, the UV curable resin 162A is caused by the curing rate of the UV curable resin 162A as compared with the case where the UV curable resin 162A is irradiated with UV light without considering the curing characteristics of the UV curable resin 162A. It is possible to reduce the distortion caused by.
  • DMD124 is mentioned here as an example of MEMS, the method is not limited to this, and a device having a function corresponding to DMD124 may be used as MEMS, and the same effect can be obtained in this case as well.
  • the control unit 30A1 so that the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A is the distribution of the irradiation energy according to the illuminance distribution shown in the upper graph (5).
  • the irradiation energy of the above is controlled to be distributed in multiple stages of three or more stages. Therefore, according to this configuration, the irradiation energy of the UV light applied to the ultraviolet curable resin 162A corresponds only to the upper (1) graph, the upper (2) graph, the upper (3) graph, or the upper (4) graph. Compared with the case of the distribution of irradiation energy, it is possible to reduce the distortion caused by the ultraviolet curable resin 162A due to the curing rate of the ultraviolet curable resin 162A.
  • the control unit 30A1 so that the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A has a distribution of the irradiation energy according to the transfer function shown in the upper graph (3).
  • the irradiation energy is controlled to be distributed in multiple stages of 3 or more stages. Therefore, according to this configuration, the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A is due to the curing rate of the ultraviolet curable resin 162A as compared with the case where the transfer function of the projection optical system 126 is not considered. Therefore, the distortion generated by the ultraviolet curable resin 162A can be reduced.
  • the control unit 30A1 so that the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A has a distribution of the irradiation energy according to the transfer function shown in the upper graph (4).
  • the irradiation energy is controlled to be distributed in multiple stages of 3 or more stages. Therefore, according to this configuration, the curing speed of the ultraviolet curable resin 162A is higher than that in the case where the irradiation energy of the UV light applied to the ultraviolet curable resin 162A is the irradiation energy in which the transfer functions of the lens 16 and the negative lens 162 are not considered. It is possible to reduce the distortion caused by the ultraviolet curable resin 162A.
  • the ultraviolet curable resin 162A has a uniform thickness
  • the control unit 30A1 modulates the pulse width so as to make the distribution of the irradiation energy of the UV light applied to the ultraviolet curable resin 162A uniform. Is done. Therefore, according to this configuration, the ultraviolet curable resin 162A having a uniform thickness has a uniform thickness as compared with the case where the irradiation energy distribution of the UV light irradiated to the ultraviolet curable resin 162A has a non-uniform thickness. Can be cured at a uniform rate.
  • a plurality of micromirrors 124A are arranged in a plane. Therefore, according to this configuration, it is possible to reduce the distortion caused by the ultraviolet curable resin 162A due to the curing speed of the ultraviolet curable resin 162A as compared with the case where the micromirror 124A is not arranged in a plane.
  • the correction control is performed by the control unit 30A1, so that the ratio of the on time and the off time of the micromirror 124A is changed according to the change with time, and the irradiation energy is changed according to the change with time. Will be done. Therefore, according to this configuration, it is possible to suppress the occurrence of a situation in which the ultraviolet curable resin 162A is not cured with the change with time, as compared with the case where the irradiation energy is not changed with the change with time.
  • the amount of UV light reflected by the DMD 124 is detected by the photodetector 128, and the control unit 30A1 performs correction control according to the detection result of the photodetector 128. Therefore, according to this configuration, as compared with the case where the irradiation energy of UV light is changed regardless of the detection result of the photodetector 128, the amount of UV light irradiated to the ultraviolet curable resin 162A changes with time. It is possible to make up for the lack of light with high accuracy.
  • the change with time in the amount of UV light irradiated to the ultraviolet curable resin 162A without removing the light source 120 and DMD 124 from the light irradiation device 110 and inspecting the change with time of the light source 120 and DMD 124. It is possible to identify the amount of light that is insufficient due to the above.
  • the amount of UV light is detected by the photodetector 142. Therefore, according to this configuration, according to the amount of light detected by the photodetector 142, it is possible to specify the amount of light that is insufficient with time in the amount of UV light irradiated to the ultraviolet curable resin 162A.
  • the irradiation time per UV light for the ultraviolet curable resin 162A is set to be less than the radical life. Therefore, according to this configuration, the radicals generated from the ultraviolet curable resin 162A by the previous irradiation of UV light are the radicals of this UV, as compared with the case where the irradiation time of UV light to the ultraviolet curable resin 162A is longer than the radical life. It is possible to make it less susceptible to the influence of radicals generated from the ultraviolet curable resin 162A by irradiation with light.
  • the degree of continuity of the degree of curing between the compartmentalized regions of the ultraviolet curable resin 162A is improved as compared with the case where the irradiation time of UV light for the ultraviolet curable resin 162A is longer than the radical life. That is, the strain generated in the ultraviolet curable resin 12 due to the effective speed of the ultraviolet curable resin 12 can be reduced as compared with the case where the irradiation time of UV light for the ultraviolet curable resin 162A is longer than the radical life.
  • UV light from the light source 120 is irradiated to the ultraviolet curable resin 162A via the DMD 124 for each division region, so that radicals are generated from the ultraviolet curable resin 162A and the radical polymerization reaction is stopped.
  • UV light is superimposed on the ultraviolet curable resin 162A.
  • the term "before the radical polymerization reaction is stopped” means, in other words, during the growth of the radical or before reaching the lifetime of the radical. Therefore, according to this configuration, the degree of continuity of the degree of curing between the divided regions of the ultraviolet curable resin 162A is increased as compared with the case where the ultraviolet curable resin 162A is irradiated with UV light after the radical polymerization reaction is stopped.
  • the strain generated in the ultraviolet curable resin 162A due to the curing rate of the ultraviolet curable resin 162A is reduced as compared with the case where the ultraviolet curable resin 162A is irradiated with UV light after the radical polymerization reaction is stopped. Can be done.
  • the irradiation unit 118 irradiates the entire region of the ultraviolet curable resin 162A in a planar manner. Therefore, according to this configuration, the time required for irradiating the entire region of the ultraviolet curable resin 162A with UV light is shortened as compared with the case where the entire region of the ultraviolet curable resin 162A is irradiated with UV light by the line scanning method. be able to.
  • the irradiation energy change table 132A is stored in the storage device 32 as an example of the distribution information showing the distribution of the irradiation energy of the UV light irradiated to the ultraviolet curable resin 162A.
  • the technique of the present disclosure is not limited to this.
  • the irradiation energy change table 132A may be accepted by the external I / F40. That is, the irradiation energy change table 132A may be provided to the light irradiation device 110 from an external device such as a USB memory, a personal computer, and / or a server via an external I / F40.
  • the external I / F40 is an example of a "reception unit" related to the technology of the present disclosure.
  • the irradiation energy change table 132A received by the external I / F 40 is overwritten and stored in the storage device 32. Then, as described in the second embodiment, the control unit 30A1 changes the irradiation energy of UV light for each division region according to the irradiation energy change table 132A stored in the storage device 32. Therefore, according to this configuration, UV light can be applied to the ultraviolet curable resin 162A with an irradiation energy distribution suitable for each ultraviolet curable resin 162A, as compared with the case where the irradiation energy change table 132A is unchanged.
  • the control unit controls to distribute the irradiation energy of UV light in multiple stages of three or more stages so that the irradiation energy is distributed according to the optical characteristics of the lens 16 and the negative lens 162 and the optical characteristics of the jig 163. It may be done by 30A1.
  • the curing speed of the ultraviolet curable resin 162A is different from the case where the irradiation energy in which the optical characteristics of the lens 16 and the negative lens 162 and the optical characteristics of the jig 163 are not taken into consideration is applied.
  • the distortion generated by the ultraviolet curable resin 162A can be reduced.
  • the distribution of the irradiation energy according to the optical characteristics of the lens 16 and the negative lens 162 included in the bonded lens 160 is adopted.
  • the distribution of irradiation energy according to the optical characteristics of the single lens may be adopted.
  • the program may be stored in the storage medium 600.
  • the program stored in the storage medium 600 is installed in the computer 30, and the CPU 30A executes the above-mentioned UV light irradiation processing and correction control according to the program.
  • An example of the storage medium 600 is an arbitrary portable storage medium such as a CD-ROM, a DVD-ROM, an SSD, or a USB memory.
  • the program is stored in a storage unit of another computer or server device connected to the computer 30 via a communication network (not shown), and the program is stored in the storage unit of the computer 30 in response to the above-mentioned request of the light irradiation device 110. It may be downloaded to. In this case, the downloaded program is installed in the computer 30 and executed by the CPU 30A of the computer 30.
  • the CPU 30A is a single CPU, but the technique of the present disclosure is not limited to this, and a plurality of CPUs may be adopted.
  • the hardware resource for executing the above UV light irradiation processing and / or correction control the following various processors can be used.
  • the processor include, as described above, software, that is, a CPU, which is a general-purpose processor that functions as a hardware resource for executing UV light irradiation processing and / or correction control by executing a program. ..
  • examples of the processor include a dedicated electric circuit which is a processor having a circuit configuration specially designed for executing a specific process such as FPGA, PLD, or ASIC.
  • a memory is built in or connected to each processor, and each processor executes a laser irradiation process by using the memory.
  • the hardware resource that performs the UV light irradiation process and / or the correction control may be composed of one of these various processors, or a combination of two or more processors of the same type or different types (for example, a plurality of processors). It may be composed of a combination of FPGAs or a combination of CPU and FPGA). Further, the hardware resource for executing the UV light irradiation process and / or the correction control may be one processor.
  • one processor is configured by a combination of one or more CPUs and software, and this processor is the above-mentioned first.
  • this processor is the above-mentioned first.
  • SoC there is a form in which a processor that realizes the functions of the entire system including a plurality of hardware resources that execute UV light irradiation processing and / or correction control with one IC chip is used. is there.
  • the processing of each part described in the second embodiment is realized by using one or more of the above-mentioned various processors as hardware resources.
  • UV light irradiation processing and / or correction control is just an example. Therefore, it goes without saying that unnecessary steps may be deleted, new steps may be added, or the processing order may be changed within a range that does not deviate from the purpose.
  • the light irradiation device 110 includes the light detection device 128, but the light detection device 128 may be provided as needed, and the light irradiation device 110 may be provided with the light detection device 128. 128 may not be provided. Further, a first housing containing the irradiation unit 118 and a second housing containing the photodetector 128 may be provided, and the photodetector 128 may be separated from the irradiation unit 118.
  • the correction control program itself may not be provided. For example, if the deteriorated light source 120 and / or DMD124 is replaced with a new one, it is not necessary to perform correction control.
  • the light irradiation device 300 includes a reflection mirror 302 and an eccentricity measuring device 304.
  • the UV light emitted from the projection optical system 126 is reflected by the reflection mirror 302 and incident on the eccentricity measuring device 304.
  • the eccentricity measuring device 304 has an optical axis in a direction intersecting (for example, orthogonal to) the optical axis of the projection optical system 126.
  • the UV light emitted from the projection optical system 126 is reflected obliquely downward by the reflection mirror 302.
  • the UV light reflected by the reflection mirror 302 is applied to the ultraviolet curable resin 162A from an oblique direction with respect to the optical axis of the bonding lens 160.
  • a lens 306 and a light source 308 are arranged coaxially with the bonding lens 160 below the bonding lens 160 supported by the jig 163.
  • an objective lens 310 and an image sensor 312 such as a CCD are arranged coaxially with the junction lens 160 above the junction lens 160.
  • the jig 163 is formed with an opening 163B through which the light emitted from the light source 308 passes.
  • the eccentricity measuring device 304 includes a light source 308, a lens 306, an objective lens 310, an image sensor 312, a display device 314, and the like.
  • Light emitted from the light source 308 passes through the junction lens 160 through the lens 306 and is imaged on the image pickup device 312 via the objective lens 310, and a point image is imaged by the image pickup element 312. .
  • the light emitted from the light source 308 is light having a wavelength that is not sensitive to the photocurable resin.
  • An image showing a point image obtained by being imaged by the image sensor 312 is displayed on the display device 314.
  • the optical axis of the lens 16 and the optical axis of the negative lens 162 are previously set to include an error in allowable optical characteristics. It is necessary to adjust within the set range.
  • the worker or the like moves one of the lens 16 and the negative lens 162 relative to the direction intersecting the optical axis before the curing of the ultraviolet curable resin 162A is completed.
  • the work of aligning the optical axis of the lens 16 and the optical axis of the negative lens 162 within a preset range is performed.
  • the worker or the like looks at the position of the image displayed on the display device 314 so that the image displayed on the display device 314 fits within the predetermined range of the screen, and the lens 16 and / or The negative lens 162 and the like are moved.
  • the default range of the screen refers to a part of the entire range of the screen corresponding to the above-mentioned "preset range".
  • Before curing is a period during which the lens 16 and the negative lens 162 can be relatively moved in the direction intersecting the optical axis.
  • "before the completion of curing” means before the ultraviolet curable resin 162A is completely cured.
  • "before the completion of curing” refers to the process of curing the ultraviolet curable resin 162A.
  • "before the completion of curing” means before the completion of adhesion between the lens 16 and the negative lens 162.
  • the optical axis of the lens 16 and the optical axis of the negative lens 162 are aligned within a preset range, and a junction lens 160 in which the point image is within the preset range can be obtained.
  • the lens 16 and / or the negative lens 162 or the like may be moved manually by an operator or the like, or may be performed by using an actuator or the like.
  • the ultraviolet curable resin 162A having a uniform thickness at a uniform speed has been described, but as shown in FIG. 26 as an example.
  • the ultraviolet curable resin 162A having a non-constant thickness that is, the ultraviolet curable resin 162A having a non-uniform thickness, that is, the ultraviolet curable resin 162A having a partially different thickness
  • an aspherical lens can be manufactured by curing and integrating an ultraviolet curable resin 12 having a non-constant thickness with a lens 16 which is a spherical lens.
  • the thickness of the ultraviolet curable resin 12 is an example of "characteristics of the photocurable resin” according to the technique of the present disclosure. Further, the illuminance distribution of UV light according to the thickness of the ultraviolet curable resin 12 is an example of "distribution of irradiation energy according to the characteristics of the photocurable resin" according to the technique of the present disclosure.
  • the influence of the characteristics of the light source 20, the influence of the characteristics of the optical system 22, and the refraction, reflection, scattering, and / or absorption of UV light in the lens 16 and the like is directed to the ultraviolet curable resin 12 as in the second embodiment.
  • the irradiation energy of the UV light to be irradiated may be changed by the control unit 30A1 in multiple stages of three or more stages.
  • a photodetector 128 that detects UV light emitted from the light irradiation device 200 may be provided.
  • the photodetector 128 is installed on the side of the support member 14, and the actuator 316 that moves the light irradiation device 200 in the horizontal direction is installed.
  • the light irradiating device 200 When irradiating the ultraviolet curable resin 12 with UV light, the light irradiating device 200 is moved above the support member 14, and when the UV light transmitted through the pixel 70A of the liquid crystal panel 70 is detected by the photodetector 128. , The light irradiation device 200 is moved above the light detection device 128.
  • the plurality of pixels 70A are set to be transmitted one by one in a preset order according to the liquid crystal panel control signal, in other words, the pixel 70A is set to the open state by the liquid crystal shutter of the pixel 70A.
  • the amount of transmitted UV light is detected for each pixel 70A.
  • the detection data obtained by the photodetector 128 for each pixel 70A is stored in the storage device 32 in association with the division area.
  • the detection data is output to the control unit 30A1 by the photodetector 128 via the external I / F 144 (see FIG. 16).
  • the control unit 30A1 changes the irradiation energy according to the change with time of the light source 120 and / or the liquid crystal panel 70 (hereinafter, also simply referred to as “change with time”).
  • the change in irradiation energy is realized, for example, by changing the output level of UV light from the light source 120, and the time for transmitting UV light through the pixel 70A toward the ultraviolet curable resin 162A, that is, the pixel. It can also be realized by changing the opening time of the 70A liquid crystal shutter.
  • the change with time can be identified from the detection data output from the photodetector 128. Therefore, the control unit 30A1 performs correction control according to the detection result of the photodetector 128, that is, the detection data. As described above, in the light irradiation device 200, the operation of the liquid crystal panel 70 is calibrated according to the change with time of the liquid crystal panel 70.
  • a MEMS such as a DMD is used as a light modulation element for modulating UV light, but instead of the DMD, a reflective liquid crystal having a plurality of light transmittance changing regions is used.
  • Other types of light modulation elements such as panels may be used.
  • the liquid crystal panel is an example of the "transmittance changing element" according to the technique of the present disclosure.
  • the ultraviolet curable resin applied to the lens 16 is cured by irradiation with UV light, but the ultraviolet curable resin is applied to an object other than the optical element such as the lens 16. It may be a single substance.
  • the light irradiation device of the present disclosure may be a 3D printer using a stereolithography method for producing a three-dimensional object by irradiating a photocurable resin with light. As a result, it is possible to manufacture a highly accurate object in which distortion is suppressed when the photocurable resin is cured.
  • a and / or B is synonymous with "at least one of A and B". That is, “A and / or B” means that it may be only A, only B, or a combination of A and B. Further, in the present specification, when three or more matters are connected and expressed by "and / or", the same concept as “A and / or B" is applied.
  • An irradiation part that irradiates the photocurable resin with light A light irradiation device that includes a changing part that changes the light intensity.
  • the irradiation unit generates radicals from the photocurable resin by irradiating the entire region of the photocurable resin with light, and emits light from the outside of the entire region to the entire region before the radical polymerization reaction is stopped. Irradiate repeatedly,
  • the changing unit is a light irradiation device that changes the intensity of light irradiated by the irradiation unit for each of the plurality of divided regions obtained by dividing the photocurable resin for each divided region.
  • a light irradiation device that includes a changing part that changes the light intensity.
  • the irradiation unit generates radicals from the photocurable resin by irradiating the entire region of the photocurable resin with light, and while the radicals are growing, the irradiation portion irradiates the entire region with light from the outside of the entire region.
  • the changing unit is a light irradiation device that changes the intensity of light irradiated by the irradiation unit for each of the plurality of divided regions obtained by dividing the photocurable resin for each divided region.
  • Appendix 3 The light irradiation device according to Appendix 1 or Appendix 2, wherein the laser is scanned over the entire region by scanning the light over the region surrounding the entire region.
  • Appendix 4 The light irradiation device according to Appendix 3, wherein the region surrounding the entire region is a rectangular plane, and the laser is scanned over the entire region by scanning the light from the start point to the end point of the rectangular plane.

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)

Abstract

La technologie de la présente invention concerne un dispositif d'exposition de lumière, un procédé d'exposition de lumière et un programme qui sont aptes à réduire la distorsion provoquée par une vitesse de durcissement d'une résine photodurcissable lorsqu'un élément optique est fabriqué à l'aide de la résine photodurcissable. L'invention concerne un dispositif d'exposition de lumière comprenant : une unité de balayage qui balaie une résine photodurcissable grâce à une lumière ; et une unité de changement destinée à changer l'intensité de la lumière, l'unité de balayage générant des radicaux à partir de la résine photodurcissable par balayage de la résine photodurcissable grâce à la lumière, et balayant la résine photodurcissable par superposition de la lumière, avant que la polymérisation radicalaire ne soit achevée, et l'unité de changement change l'intensité de la lumière balayée par l'unité de balayage à chaque zone divisée de la pluralité de zones divisées obtenues par division de la résine photodurcissable, pour chaque zone divisée.
PCT/JP2020/007292 2019-03-29 2020-02-25 Dispositif d'exposition de lumière, procédé de fonctionnement de dispositif d'exposition de lumière, et programme WO2020202897A1 (fr)

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JP2021511217A JP7203958B2 (ja) 2019-03-29 2020-02-25 光照射装置、光照射方法、光照射装置の動作方法、及びプログラム
CN202080017191.6A CN113490584B (zh) 2019-03-29 2020-02-25 光照射装置、光照射方法、光照射装置的动作方法及存储介质

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