WO2020181557A1 - 一种液晶移相器及其制作方法 - Google Patents

一种液晶移相器及其制作方法 Download PDF

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Publication number
WO2020181557A1
WO2020181557A1 PCT/CN2019/078173 CN2019078173W WO2020181557A1 WO 2020181557 A1 WO2020181557 A1 WO 2020181557A1 CN 2019078173 W CN2019078173 W CN 2019078173W WO 2020181557 A1 WO2020181557 A1 WO 2020181557A1
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WIPO (PCT)
Prior art keywords
substrate
liquid crystal
spacer
phase shifter
crystal phase
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PCT/CN2019/078173
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English (en)
French (fr)
Inventor
刘智生
徐响战
王志灵
吕泰添
王立雄
卢卓前
何基强
Original Assignee
信利半导体有限公司
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Publication date
Application filed by 信利半导体有限公司 filed Critical 信利半导体有限公司
Priority to JP2020531648A priority Critical patent/JP7197585B2/ja
Priority to US16/770,620 priority patent/US11454860B2/en
Priority to EP19863989.0A priority patent/EP3736625A4/en
Priority to KR1020207016581A priority patent/KR102472079B1/ko
Publication of WO2020181557A1 publication Critical patent/WO2020181557A1/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3544—Particular phase matching techniques
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/18—Phase-shifters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00—Details of, or arrangements associated with, antennas
    • H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support

Definitions

  • the invention relates to the technical field of phase shifting, in particular to a liquid crystal phase shifter and a manufacturing method thereof.
  • a phase shifter is a device that can adjust the phase of electromagnetic waves, and has a wide range of applications in radar, communications, and meters.
  • Liquid crystal phase shifters have advantages in continuous phase modulation.
  • the relationship between the liquid crystal medium loss of the liquid crystal phase shifter and the thickness of the liquid crystal cell is known: the larger the cell thickness, the smaller the effective dielectric constant and the smaller the dielectric loss.
  • the thickness of the liquid crystal layer of the current liquid crystal phase shifter is 100-250 ⁇ m, which is tens to hundreds of times thicker than the traditional liquid crystal display panel.
  • a thicker support generally Refers to the spacer).
  • spacers using plastic balls (spacers) or photospacers (photospacers) can be used on one of the substrates, and the rubber frame can be made by silk printing on the other substrate.
  • the plastic ball (spacer) is sprayed when the powder is sprayed from the nozzle of the nozzle, the compressed gas on both sides makes the powder and the liquid spread out in the machine cavity, and the plastic ball falls on the substrate through settlement.
  • the density is adjusted by the residence time of the substrate in the machine cavity.
  • the liquid crystal panel process can achieve uniform spraying of 12 ⁇ m plastic balls, but the spraying of 30 ⁇ m plastic balls is very uneven, and the plastic density is very low, and uniform cell thickness cannot be obtained. Plastic balls with a thickness of 100 ⁇ m and above are more difficult to spray.
  • Photoresist is the use of spin coating process to coat photoresist on the substrate, UV light is irradiated by a specially designed mask plate, and the photoresist in the unnecessary area is removed by development to obtain the designated position and Support for pre-designed graphics. Since the spin coating process can only use low-viscosity photoresist for coating, it can only be made into a thin film to obtain a support with a small thickness. The liquid crystal panel process can barely make a photospacer with a thickness of 6 ⁇ m to 15 ⁇ m, but it is still far from reaching the requirement of 100 ⁇ m or more.
  • the plastic frame has a larger supporting area and the screen printing process can use higher viscosity glue, it can make a plastic frame with a thickness of more than 100um, and the cell thickness of the liquid crystal phase shifter is barely 100-250 ⁇ m, but The following results are still unavoidable: the traditional manufacturing method of spacers and photospacers in the middle of the box is far from reaching a thickness close to 100um. Therefore, when the liquid crystal layer is far away from the plastic frame, the area deforms. The thickness of the liquid crystal phase shifter also changes, and the thickness of the liquid crystal phase shifter changes, resulting in the problem of poor performance of the liquid crystal phase shifter.
  • liquid crystal phase shifter with a thick cell and a manufacturing method thereof are provided.
  • the liquid crystal phase shifter provided by the present invention includes: a first substrate and a second substrate arranged oppositely, and a liquid crystal layer located between the first substrate and the second substrate; a plurality of spacers are distributed in the liquid crystal layer The spacer is in contact with both the first substrate and the second substrate; the spacer includes a first spacer disposed on the first substrate and a second spacer disposed on the second substrate, and the first The spacer and the second spacer abut against each other.
  • the positions of the first spacer and the second spacer correspond.
  • first substrate there is a plastic frame between the first substrate and the second substrate, and the first substrate, the second substrate and the plastic frame form a housing.
  • the plastic frame includes a first plastic frame provided on the first substrate and a second plastic frame provided on the second substrate; the first plastic frame and the second plastic frame abut, and the first plastic frame and The position of the second plastic frame corresponds.
  • the spacer is epoxy glue or UV glue.
  • the plastic frame is epoxy glue or UV glue.
  • the thickness of the liquid crystal layer is not less than 100 ⁇ m.
  • the thickness of the liquid crystal layer is 100-250 ⁇ m.
  • a first electrode is provided on the inner side of the first substrate, and a second electrode is provided on the inner side of the second substrate.
  • the liquid crystal phase shifter further includes a first alignment layer and a second alignment layer respectively arranged on both sides of the liquid crystal layer.
  • the present invention also provides a manufacturing method of a liquid crystal phase shifter for manufacturing the liquid crystal phase shifter as described above, and the manufacturing method includes:
  • the first substrate and the second substrate are aligned to form a casing, and a liquid crystal layer is filled in the casing.
  • the first spacer and the first spacer are formed on the substrate by silk printing.
  • the manufacturing method further includes: manufacturing a plastic frame on the first substrate and/or the second substrate before aligning the box.
  • the first plastic frame is made on the first substrate; the second plastic frame is made on the second substrate;
  • the first spacer is also made at the same time, and the glue is transferred to the first substrate by using a pre-made screen tool with the first plastic frame and the first spacer pattern;
  • the second spacer is also made at the same time, and the glue is transferred to the second substrate by using a pre-made screen tool with the second plastic frame and the second spacer pattern.
  • the method of aligning the boxes to form the shell is as follows:
  • Alignment bonding aligning the first substrate and the second substrate, and bonding after alignment;
  • Hot-pressing curing using a hot-pressing device to heat-press and cure the two substrates that have been aligned and bonded to form a shell with a predetermined thickness.
  • the relative positions of the first substrate and the second substrate are fixed, and then thermocompression curing is performed.
  • pre-curing is performed before the alignment and bonding, so that the glue is initially cured.
  • the present invention has the following beneficial effects:
  • the first spacer and the second spacer are respectively arranged on the first substrate and the second substrate, so that the liquid crystal phase shifter can achieve a support thickness of more than 100 um, which ensures the performance of the liquid crystal phase shifter.
  • it is easy to manufacture in process, and can produce thick cell liquid crystal phase shifters in large quantities.
  • FIG. 1 is a schematic structural diagram of a liquid crystal phase shifter provided by an embodiment of the present invention
  • FIG. 2 is a flowchart of a manufacturing method of a liquid crystal phase shifter provided by an embodiment of the present invention
  • Fig. 3 is a flow chart of a method for manufacturing a liquid crystal phase shifter to form a housing according to an embodiment of the present invention.
  • liquid crystal phase shifter of the present invention and its manufacturing method will be further described in conjunction with the drawings and embodiments:
  • this embodiment provides a liquid crystal phase shifter.
  • the liquid crystal phase shifter includes a first substrate 11 and a second substrate 12 disposed opposite to each other, and a liquid crystal layer 50 located between the first substrate 11 and the second substrate 12.
  • a plurality of spacers are distributed in the liquid crystal layer 50, the spacers are in contact with both the first substrate 11 and the second substrate 12, and the spacers are used as supports for the first substrate 11 and the second substrate 12.
  • the rigid substrate may be a glass substrate, or a PET substrate, which may be a glass substrate, fused silica, ceramic substrate, or PET. However, it is preferably a glass substrate.
  • the spacers include: a first spacer 41 provided on the first substrate 11 and a second spacer 42 provided on the second substrate 12.
  • the first spacer 41 and the second spacer 42 abut against each other.
  • the thickness of the spacer is equal to the thickness of the first spacer 41 plus the thickness of the second spacer 42.
  • the spacers are sprayed and dispersed on basically independent spacer plastic balls, and the spacers are evenly dispersed on the first substrate 11 or the second substrate 12, or the photoresist Photospaer is made by yellow light to meet specific requirements. Support; and the plastic frame is made by silk printing on another substrate.
  • the thickness of the spacer sprayed by the plastic ball spacer can be up to 30 ⁇ m, and the height of the Photospacer can only be about 15 ⁇ m, so it is impossible to make a spacer support point of sufficient thickness.
  • the thickness of the spacer support point can be made sufficiently thick. This provides a solution for a thick cell liquid crystal phase shifter and guarantees the performance of the liquid crystal phase shifter.
  • the positions of the first spacer 41 and the second spacer 42 correspond.
  • the spacers are formed on the substrate by silk screen printing.
  • the spacer is epoxy glue or UV glue.
  • the spacer is epoxy glue.
  • the plastic frame there is a plastic frame between the first substrate 11 and the second substrate 12.
  • the plastic frame is located at the edge of the first substrate 11 and the second substrate 12.
  • the first substrate 11, the second substrate 12 and the plastic frame form a housing, which is also called a liquid crystal cell.
  • the plastic frame has an opening through which the liquid crystal material enters the housing.
  • the thickness of the spacer is equal to the thickness of the plastic frame.
  • the plastic frame includes a first plastic frame 31 provided on the first substrate 11 and a second plastic frame 32 provided on the second substrate 12.
  • the first plastic frame 31 and the second plastic frame 32 abut against each other.
  • the total thickness of the plastic frame is equal to the thickness of the first plastic frame 31 plus the thickness of the second plastic frame 32.
  • the positions of the first plastic frame 31 and the second plastic frame 32 correspond to each other.
  • the plastic frame can also be formed on the substrate by silk screen printing.
  • the plastic frame can be epoxy glue or UV glue.
  • the plastic frame is epoxy glue.
  • the liquid crystal phase shifter provided in this embodiment is a thick cell phase shifter, and the thickness of the liquid crystal layer 50 is not less than 100 ⁇ m. As a more preferable solution, the thickness of the liquid crystal layer 50 is 100 to 250 ⁇ m.
  • the liquid crystal phase shifter further includes a first electrode 21 formed on the inner side of the first substrate 11 and a second electrode 22 formed on the inner side of the second substrate 12.
  • the first electrode 21 and the second electrode 22 are made of metal materials with high electrical conductivity and magnetic permeability, and metals such as aluminum, copper, silver, gold, cadmium, chromium, molybdenum, niobium, nickel, and iron can be used.
  • the liquid crystal antenna further includes a first alignment layer and a second alignment layer (not shown in the figure) respectively disposed on both sides of the liquid crystal layer 50.
  • a first alignment layer is prepared on the first substrate 11 on which the first conductive layer is formed, and a second alignment layer is prepared on the second substrate 12 on which the second conductive layer is formed.
  • the alignment layer is used to define the initial deflection angle of the crystal molecules of the liquid crystal layer 50.
  • the dielectric constant of the liquid crystal can be changed.
  • the first electrode 21 includes a ground electrode
  • the second electrode 22 includes a planar transmission line, which is used to transmit microwave signals.
  • the planar transmission line is preferably a microstrip line.
  • the shape of the microstrip line may be serpentine or spiral, and the shape of the microstrip line is not limited, as long as it can realize the transmission of microwave signals.
  • the liquid crystal molecules are arranged in a preset direction under the action of the first alignment layer and the second alignment layer.
  • the electric field drives the deflection of the liquid crystal molecules in the liquid crystal layer 50.
  • the deflection angle of the liquid crystal in the liquid crystal layer 50 can be controlled.
  • the phase adjusted during the phase shift can be controlled.
  • This specific embodiment provides a manufacturing method of the liquid crystal phase shifter as in the first embodiment.
  • the manufacturing method of the liquid crystal phase shifter includes the following steps:
  • step S1 and step S2 can be adjusted.
  • the spacers can be formed on the substrate by silk printing.
  • step S3 "matching boxes” can also be called “matching”.
  • a pre-made screen tool with spacer patterns can be used to transfer the glue onto the corresponding substrate.
  • the glue is, for example, epoxy glue or UV glue, preferably epoxy glue.
  • the first spacer 41 and the second spacer 42 are respectively provided on the first substrate 11 and the second substrate 12, so that the liquid crystal phase shifter can achieve a support thickness of 100um or more, and the performance of the liquid crystal phase shifter is guaranteed .
  • it is easy to manufacture in process, and can produce thick cell liquid crystal phase shifters in large quantities.
  • step S3 the method of step S3 to form a case by forming a box is as follows:
  • S31 Aligning and bonding: aligning the first substrate 11 and the second substrate 12, and bonding after alignment;
  • Hot-press curing using a hot-pressing device to heat-press and cure the two aligned substrates to form a shell with a predetermined thickness.
  • the first substrate 11 and the second substrate 12 are provided with corresponding alignment marks.
  • the alignment mark of the first substrate 11 is ⁇
  • the alignment mark of the second substrate 12 is ⁇ .
  • the first substrate 11 and the second substrate 12 can be accurately aligned by CCD alignment and nesting.
  • the mating contact surfaces of the first spacer 41 and the second spacer 42 overlap.
  • the deviation of the alignment will cause the mating surfaces of the first spacer 41 and the second spacer 42 to not completely overlap, and the strength and support performance of the support will be worse.
  • the first substrate 11 and the second substrate 12 are bonded together: the bonding equipment is slowly moved until the glue frame and spacers of the first substrate 11 and the second substrate 12 are connected.
  • pre-curing is also performed to make the glue of the first spacer 41 and the second spacer 42 be preliminarily cured to prevent the glue from flowing during the aligning and laminating, and at the same time Make the subsequent curing of the guarantee glue easy to proceed.
  • a specific method of fixing the relative positions of the first substrate 11 and the second substrate 12 is: applying UV glue around the edges of the substrate, and the UV glue is fixed by UV irradiation, so that the first substrate 11 and the second substrate 11 The substrate 12 does not need to be easily displaced.
  • thermocompression curing is generally performed under high-pressure and high-temperature process conditions. While curing, a certain pressure is also applied to enable the first spacer 41 and the second spacer 42 to be firmly bonded together. After being fully cured, the first spacer 41 and the second spacer 42 are firmly bonded, and finally an empty cell of the liquid crystal housing with high bonding firmness, high mechanical strength, and thicker support is formed.
  • Step S32 is a preferred solution, which can be omitted in the method of aligning the box to form the shell, but the implementation effect is slightly worse.
  • a plastic frame is made on the first substrate 11 and/or the second substrate 12.
  • a plastic frame can be made on one of the substrates, and the plastic frame forms an accommodation space between the first substrate 11 and the second substrate 12 for accommodating liquid crystal.
  • the plastic frame has an opening, and liquid crystal can be filled in the opening.
  • a more preferable solution of the plastic frame is that the first substrate 11 and the second substrate 12 have plastic frames respectively, and the method of manufacturing the plastic frames is:
  • a first plastic frame 31 is made on the first substrate 11; a second plastic frame 32 is made on the second substrate 12.
  • the first plastic frame 31 and the second plastic frame 32 are firmly bonded together when they are cured by heat and pressure.
  • the plastic frame and the spacer can be made separately, but, more preferably, the first spacer 41 is also made when the first plastic frame 31 is made, and the second spacer 42 is also made when the second plastic frame 32 is made;
  • the screen printing method forms spacers and plastic frames on the substrate:
  • the screen tool to transfer the glue onto the second substrate 12.
  • the glue used for silk screen printing is epoxy glue or UV glue, preferably epoxy glue, and large-cell thick liquid crystal phase shifters can be produced in batches through the process method of double-sided silk screen epoxy glue support. Simultaneous production is not only beneficial to improve the efficiency of the process, but also to avoid making different patterns on the same side twice. If the same side of the substrate is screen printed twice, the second screen printing will destroy the first screen printing pattern.
  • the manufacturing method of the liquid crystal phase shifter is shown in FIG. 2.
  • the alignment of the first spacer 41 and the second spacer 42 and the alignment of the first plastic frame 31 and the second plastic frame 32 can be ensured at the same time. It can be understood that during the alignment and bonding, the positions of the first spacer 41 and the second spacer 42 correspond up and down, and after the alignment and bonding, the first spacer 41 and the second spacer 42 can abut against each other. Similarly, during the alignment and bonding, the positions of the first plastic frame 31 and the second plastic frame 32 correspond up and down, and after the alignment and bonding, the first plastic frame 31 and the second plastic frame 32 can abut against each other.
  • step S3 When manufacturing the housing of the liquid crystal phase shifter, a large substrate is generally used for manufacturing. After step S3 is completed, multiple housings are obtained. After that, single-grain cutting is performed to obtain a single-grain liquid crystal phase shifter housing empty cell.
  • the method of filling the liquid crystal may be: at the opening, the required liquid crystal material is sucked into the casing through the vacuum capillary phenomenon.
  • the opening of the liquid crystal cell housing is sealed, and UV glue is applied to the opening of the liquid crystal, and then irradiated by UV light, which can enhance the mechanical strength of the liquid crystal cell and make it have better The tightness.
  • a first electrode 21 is provided on the inner side of the first substrate 11, and a second electrode 22 is provided on the inner side of the second substrate 12.
  • the first electrode 21 and the second electrode 22 can be obtained by forming a conductive layer on a corresponding substrate, and then patterning the conductive layer.
  • the conductive layer can be obtained by existing sputtering or thermal evaporation methods.
  • the conductive layer can be made of metals such as aluminum, copper, silver, gold, cadmium, chromium, molybdenum, niobium, nickel, iron, etc., or ITO, IGZO, AZO, etc. And other transparent conductive oxides.
  • the patterning processing method is known to those skilled in the art, and can be obtained through the processes of glue coating, pre-curing, exposure, development, etching, and film release.
  • a first alignment layer is formed on the first substrate 11 on which the first conductive layer is formed; a second alignment layer is formed on the second substrate 12 on which the second conductive layer is formed.
  • the orientation layer can be made by the PI rubbing process in the prior art to form orientation grooves on the surface.
  • the APR board can be used to transfer the pre-dropped directional liquid to the corresponding substrate with electrode pattern, and the high-temperature baking makes it fully react, while the solvent is volatilized, and finally a solid oriented film layer is formed.
  • the oriented film is polished with flannel or cotton cloth in one direction to form the final arrangement of the liquid crystal molecules in parallel according to the preset rubbing direction. I will not repeat them here.

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  • Chemical & Material Sciences (AREA)
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Abstract

一种液晶移相器，包括：相对设置的第一基板（11）和第二基板（12），以及位于第一基板（11）和第二基板（12）之间的液晶层（50）；液晶层（50）中分布有多个间隔物；其特征在于，间隔物与第一基板（11）和第二基板（12）均接触；间隔物包括设置在第一基板（11）上的第一间隔物（41）和设置在第二基板（12）上的第二间隔物（42），且第一间隔物（41）和第二间隔物（42）相抵接。液晶移相器能够实现100µm以上的支撑物厚度，保证了液晶移相器的性能。还提供了一种液晶移相器的制作方法，在工艺上易于制造，能够大批量制作厚盒的液晶移相器。

Description

一种液晶移相器及其制作方法 技术领域
本发明涉及移相技术领域，具体地，涉及一种液晶移相器及其制作方法。
背景技术
移相器是一种能够对电磁波的相位进行调整的一种装置，在雷达、通信、仪表等有广泛的应用。液晶移相器在连续调相方面具有优势。已知液晶移相器的液晶介质损耗与液晶盒厚的关系：盒厚越大，有效介电常数越小，介质损耗越小。为了降低介质损耗，目前液晶移相器的液晶层厚度为100～250μm，较传统液晶显示面板厚几十倍至上百倍，在制作厚盒的液晶移相器时需要制作更厚的支撑物(一般指间隔物)。
现有技术，使用塑胶球(spacer)或光刻胶(photospacer)的间隔物可以在其中一个基板上，而在另外的一个基板上通过丝印制作胶框。例如，塑胶球(spacer)是通过喷洒的方法在粉液从喷头的喷嘴喷出时，两边的压缩气体使粉液在机腔中散开，通过沉降使塑胶球降落在基板上，塑胶球的密度通过基板在机腔中的停留时间调节。液晶面板工艺可以做到12μm的塑胶球喷洒均匀，但是30μm的塑胶球喷洒就很不均匀，塑胶度密度很低，无法得到均匀的盒厚。而100μm及以上厚度的塑胶球更加难以喷洒出来。
光刻胶(Photospacer)是利用旋涂工艺将光刻胶涂布在基板上，UV光经过特殊设计的掩模板照射反应，经显影去除不需要的区域的光刻胶，即可得到指定位置和预先设计好的图形的支撑物。由于旋涂工艺只能使用低粘度的光刻胶来涂布，最终只能做成薄膜得到厚度小的支撑物。液晶面板工艺可以勉强做出6μm～15μm的photospacer，但仍远远无法达到100μm或以上厚度的要求。
即使胶框由于其具有较大的支撑面积，以及丝印工艺可利用更高粘度的胶水，能够制作做到100um以上厚度的胶框，勉强做到液晶移相器的盒厚为100～250μm，但是以下结果仍无法避免：传统盒中间的间隔物如塑胶球(spacer)和光刻胶(Photospacer)的制作方法远远无法做到接近100um的厚度，因此当液晶层远离胶框的 区域形变时，液晶移相器的厚度也发生改变，而液晶移相器的厚度发生变化，导致液晶移相器性能变差的问题。
发明概述
技术问题
问题的解决方案
技术解决方案
为了解决上述问题，提供一种具有厚盒的液晶移相器及其制作方法。
本发明提供的一种液晶移相器，包括：相对设置的第一基板和第二基板，以及位于第一基板和第二基板之间的液晶层；所述液晶层中分布有多个间隔物；所述间隔物与第一基板和第二基板均接触；所述间隔物包括设置在第一基板上的第一间隔物和设置在第二基板上的第二间隔物，且所述第一间隔物和第二间隔物相抵接。
优选的，所述第一间隔物和第二间隔物位置相对应。
其中，所述第一基板和第二基板之间还具有胶框，所述第一基板、第二基板和胶框组成了壳体。
优选的，所述胶框包括设置在第一基板的第一胶框和设置在第二基板的第二胶框；第一胶框和第二胶框相抵接，且所述第一胶框和第二胶框位置相对应。
优选的，所述间隔物为环氧胶或UV胶。
优选的，所述胶框为环氧胶或UV胶。
优选的，所述液晶层的厚度不小于100μm。
更进一步的，所述液晶层的厚度为100～250μm。
其中，所述第一基板的内侧设置有第一电极，所述第二基板的内侧设置有第二电极。
进一步的，所述液晶移相器还包括分别设置在所述液晶层两侧的第一配向层和第二配向层。
本发明还提供了一种液晶移相器的制作方法，用于制作如上所述的液晶移相器，所述制作方法包括：
在第一基板上制作第一间隔物；
在第二基板上制作第二间隔物；
将所述第一基板和第二基板进行对盒以形成壳体，且在壳体内填充液晶层。
优选的，通过丝印的方式在基板上形成第一间隔物和第一间隔物。
优选的，所述制作方法还包括：在对盒之前，在第一基板和/或第二基板上制作胶框。
优选的，在第一基板上制作第一胶框；在第二基板上制作第二胶框；
在制作第一胶框时还同时制作第一间隔物，利用预先制作的具有第一胶框和第一间隔物图案的丝网工具，将胶水转印在第一基板上；
在制作第二胶框时还同时制作第二间隔物，利用预先制作的具有第二胶框和第二间隔物图案的丝网工具，将胶水转印在第二基板上。
优选的，所述对盒以形成壳体的方法如下：
对位贴合：将所述第一基板和第二基板进行对位，对位后贴合；
热压固化：利用热压装置，将对位贴合好的两个基板进行热压固化以形成具有预定厚度的壳体。
优选的，在第一基板和第二基板进行对位贴合后，对所述第一基板和第二基板的相对位置进行固定，之后再进行热压固化。
优选的，在对位贴合之前，先进行预固化，使胶水进行初步固化。
发明的有益效果
有益效果
与现有技术相比，本发明具有如下有益效果：
本申请通过在第一基板和第二基板上分别设置第一间隔物和第二间隔物，使液晶移相器能够实现100um以上的支撑物厚度，保证了液晶移相器的性能。同时在工艺上易于制造，能够大批量制作厚盒的液晶移相器。
对附图的简要说明
附图说明
图1为本发明实施例所提供的一种液晶移相器的结构示意图；
图2为本发明实施例所提供的一种液晶移相器的制作方法的流程图；
图3为本发明实施例所提供的一种液晶移相器对盒以形成壳体的制作方法流程 图。
附图标记：
11-第一基板、12-第二基板、21-第一电极、22-第二电极、31-第一胶框、32-第二胶框、41-第一间隔物、42-第二间隔物、50-液晶层。
发明实施例
本发明的实施方式
为了使本发明的目的、技术方案和优点更加清楚，下面将结合附图对本发明作进一步地详细描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例，都属于本发明保护的范围。
下面结合附图和实施例，对本发明的一种液晶移相器及其制作方法作进一步说明：
实施例一：
如图1所示，本具体实施例提供了一种液晶移相器。液晶移相器包括相对设置的第一基板11和第二基板12，以及位于第一基板11和第二基板12之间的液晶层50。在液晶层50中分布有多个间隔物，所述间隔物与第一基板11和第二基板12均接触，间隔物用做第一基板11和第二基板12的支撑物。
第一基板11和第二基板12，选用稳定性和绝缘效果较佳同时介电损耗极低的材料，可以选用刚性基板或者柔性基板。例如，刚性基板可以为玻璃基板，也可以采用PET基板、可以是玻璃基材、熔融石英、陶瓷基材或者PET等材料。但优选为玻璃基板。
间隔物包括：设置在第一基板11上的第一间隔物41，和设置在第二基板12上的第二间隔物42。第一间隔物41和第二间隔物42相抵接。间隔物的厚度等于第一间隔物41的厚度加上第二间隔物42的厚度。
现有技术，间隔物是喷洒散布于基本上的独立的spacer塑胶球个体，间隔物均匀的散布在第一基板11或者第二基板12上，或者用光刻胶Photospaer经黄光制作特定要求的支撑物；而在另外的一个基板上通过丝印制作胶框。塑胶球spacer喷洒制作的间隔物厚度最多可以做到30μm，Photospacer高度也只能做到15μm左右 ，因此不能够制作足够厚度的间隔物支撑点。
本申请，通过在第一基板11和第二基板12上分别设置第一间隔物41和第二间隔物42，使间隔物支撑点的厚度可以做到足够厚。这为一种厚盒的液晶移相器提供了解决方案，保证液晶移相器的性能。
作为优选的方案，第一间隔物41和第二间隔物42位置相对应。
间隔物通过丝印的方式在基板上形成。间隔物为环氧胶或UV胶。作为优选的方案，间隔物为环氧胶。
可以理解的，本实施例，在第一基板11和第二基板12之间还具有胶框。胶框位于第一基板11和第二基板12的边缘位置。第一基板11、第二基板12和胶框组成了壳体，该壳体又被称为液晶盒。胶框具有一个开口，液晶材料通过该开口进入壳体。
为了保证液晶移相器盒厚的一致性，间隔物的厚度等于胶框的厚度。
作为优选的方案，胶框包括设置在第一基板11的第一胶框31和设置在第二基板12的第二胶框32。第一胶框31和第二胶框32相抵接。胶框的总厚度等于第一胶框31的厚度加上第二胶框32的厚度。所述第一胶框31和第二胶框32位置相对应。
胶框也可以通过丝印的方式在基板上形成。胶框可以为环氧胶或UV胶，作为优选的方案，胶框为环氧胶。
本实施例提供的液晶移相器，为厚盒的移相器，液晶层50的厚度不小于100μm。作为更加优选的方案，液晶层50的厚度为100～250μm。
液晶移相器还包括第一基板11的内侧形成有第一电极21，第二基板12的内侧形成有第二电极22。第一电极21和第二电极22选用具有高导电性和磁导率的金属材料，可以采用铝、铜、银、金、镉、铬、钼、铌、镍、铁等金属。
液晶天线还包括分别设置在所述液晶层50两侧的第一配向层和第二配向层(图中未示出)。在形成有第一导电层的第一基板11上制备第一配向层，在形成有第二导电层的第二基板12上制备第二配向层。配向层用于对液晶层50的晶分子的初始偏转角度进行限定。
通过在第一电极21和第二电极22之间施加电压，可以改变改变液晶的介电常数 。在一个具体的实施例中，第一电极21包括接地电极，第二电极22包括平面传输线，平面传输线用于传输微波信号。平面传输线优选为微带线。微带线的形状可以为蛇形或者螺旋形，对于微带线的形状不作限定，能够实现微波信号的传输即可。
当微带线和接地电极之间不施加电场时，液晶分子在第一配向层和第二配向层的作用下沿预设方向排布。
当微带线和接地电极之间施加电场时，电场驱动液晶层50中的液晶分子方向的偏转，通过控制微带线和接地电极上的电压，可以控制液晶层50中液晶的偏转角度，进而可以对移相过程中所调整的相位进行控制。
实施例二：
本具体实施例提供了如实施例一中液晶移相器的制作方法。液晶移相器的制作方法包括以下步骤：
S1：在第一基板11上制作第一间隔物41；
S2：在第二基板12上制作第二间隔物42；
S3：将所述第一基板11和第二基板12进行对盒以形成壳体；
S4：在壳体内填充液晶层50。
S5：填充液晶层50后，对壳体的胶框开口进行密封。
需要说明的是，步骤S1和步骤S2的先后顺序可以进行调整。间隔物可以通过丝印的方式在基板上形成。
以上步骤S3中，“对盒”也可以被称为“对合”。
具体的，可以利用预先制作的具有间隔物图案的丝网工具，将胶水转印在相应的基板上。胶水例如为环氧胶或UV胶，优选为环氧胶。通过该方法，使具有100um以上支撑物的厚盒的液晶移相器在工艺上易于制造，能够批量制作厚盒的液晶移相器。
本申请通过在第一基板11和第二基板12上分别设置第一间隔物41和第二间隔物42，使液晶移相器能够实现100um以上的支撑物厚度，保证了液晶移相器的性能。同时在工艺上易于制造，能够大批量制作厚盒的液晶移相器。
如图3所示，步骤S3对盒以形成壳体的方法如下：
S31：对位贴合：将所述第一基板11和第二基板12进行对位，对位后贴合；
S32：对所述第一基板11和第二基板12的相对位置进行固定。
S33：热压固化：利用热压装置，将对位贴合好的两个基板进行热压固化以形成具有预定厚度的壳体。
对位贴合的具体方法说明：在制作第一电极21和第二电极22的图案时，第一基板11和第二基板12上就设置了相互对应的对位标志。例如，第一基板11对位标志为○和第二基板12对位标志为●，在对位时，通过CCD对准套合就可以使第一基板11和第二基板12精确对准。精确对准时，第一间隔物41和第二间隔物42的相配合的接触面重叠。对准的偏差会使第一间隔物41和第二间隔物42的相配合面不完全重叠，支撑物的强度和支撑性能会差一些。在对准后，对第一基板11和第二基板12进行贴合：使贴合设备中慢慢移动，至到第一基板11和第二基板12两层的胶框和间隔物相连接。
在步骤S31对位贴合之前，优选的，还要进行预固化，使第一间隔物41和第二间隔物42的胶水进行初步固化，以防止对位贴合时胶水的较大流动，同时使保证胶水后续的固化容易进行。
对所述第一基板11和第二基板12的相对位置进行固定的具体一个方法是：在基板的边缘四周点上UV胶水，UV胶水经UV照射先固定住，这样第一基板11和第二基板12就不用轻易移位。
热压固化一般在高压高温的工艺条件下进行，在固化的同时，还施加一定的压力，使第一间隔物41和第二间隔物42能够牢固地结合在一起。经充分固化后，第一间隔物41和第二间隔物42之间牢固地结合，最终形成粘接牢固程度高，机械强度高，且具有更厚的支撑物的液晶壳体空盒。
步骤S32是一个优选的方案，在对盒以形成壳体的方法中可以省略，但实施效果略差。
在对盒之前，在第一基板11和/或第二基板12上制作胶框。
可以在其中一个基板上制作胶框，胶框在第一基板11和第二基板12之间形成容纳空间，用于容纳液晶。胶框具有开口，在开口处可以以灌液晶。
胶框更加优选地方案是，第一基板11和第二基板12上分别具有胶框，胶框的制 作方法是：
在第一基板11上制作第一胶框31；在第二基板12上制作第二胶框32。第一胶框31和第二胶框32在热压固化时，牢固地结合在一起。
胶框和间隔物可以分别制作，但是，更加优选的，在制作第一胶框31时还同时制作第一间隔物41，在制作第二胶框32时还同时制作第二间隔物42；通过丝印的方式在基板上形成间隔物和胶框：
利用预先制作的具有第一胶框31和第一间隔物41图案的丝网工具，将胶水转印在第一基板11上；利用预先制作的具有第二胶框32和第二间隔物42图案的丝网工具，将胶水转印在第二基板12上。通过刮刀的挤压，使印刷胶水通过丝网工具的网孔转印在基板上，形成所需要的胶框和间隔物对应的形状及位置。丝印用的胶水为环氧胶或UV胶，优选为环氧胶，通过双面丝印环氧胶支撑物的工艺方法能够批量制作大盒厚的液晶移相器。同时制作不仅有利于提高工艺的效率，而且避免在同一面分两次制作不同的图案，如果分两次在同一面基板丝印，第二次丝印时会破坏在第一次的丝印图形。
在一个具体的实施方案中，液晶移相器的制作方法如图2所示。
通过上述的对位贴合的具体方法，可以同时保证第一间隔物41和第二间隔物42位置的对准，以及第一胶框31和第二胶框32位置的对准。可以理解的，在对位贴合时，第一间隔物41和第二间隔物42的位置上下相对应，对位贴合后，第一间隔物41和第二间隔物42能够相抵接。同样，在对位贴合时，第一胶框31和第二胶框32的位置上下相对应，对位贴合后，第一胶框31和第二胶框32能够相抵接。
在制作液晶移相器壳体时，一般采用的用是大片基板进行制作，在步骤S3完成之后，得到了多个壳体。之后还要进行单粒切割得到单粒的液晶移相器壳体空盒。
灌液晶的方法可以是：在开口处，将需要的液晶材料通过真空毛细现象吸入壳体内。
在所述液晶盒内填充液晶层50后，对液晶盒壳体开口进行密封，在灌液晶的开口处涂上UV胶水，之后经UV光照射，可以增强液晶盒机械强度，使其具有更好 的密封性。
第一基板11的内侧设置有第一电极21，第二基板12的内侧设置有第二电极22。第一电极21和第二电极22，可以通过在相应的基板上形成导电层，再对导电层进行图案化处理后得到。
导电层可以通过现有的溅射或热蒸发的方法得到，导电层可以采用铝、铜、银、金、镉、铬、钼、铌、镍、铁等金属，也可以采用ITO、IGZO、AZO等透明导电氧化物。
图案化处理工艺方法，已为本领域技术人员所已知，可以通过涂胶、预固化、曝光、显影、刻蚀、脱膜的工艺得到。
在基板上制作胶框和间隔物之前，还包括以下步骤：
在形成有第一导电层的第一基板11上形成第一取向层；在形成有第二导电层的第二基板12上形成第二取向层。
取向层可采用现有技术中的PI摩擦工艺制成，以便在表面上形成定向凹槽。可以利用APR板就预设滴入的定向液体转印至对应的具有电极图案的基板上面，通过高温烘烤使得充分反应，同时将溶剂挥发掉，最后形成固态的定向膜层。在定向膜上用绒布或棉布向一个方向打磨，形成最终将液晶分子按照预设定的摩擦方向平行排列。在此不再赘述。
最后需要说明的是，以上实施例仅用以说明本发明实施例的技术方案而非对其进行限制，尽管参照较佳实施例对本发明实施例进行了详细的说明，本领域的普通技术人员应当理解依然可以对本发明实施例的技术方案进行修改或者等同替换，而这些修改或者等同替换亦不能使修改后的技术方案脱离本发明实施例技术方案的范围。

Claims (17)

  1. 一种液晶移相器，包括：相对设置的第一基板和第二基板，以及位于第一基板和第二基板之间的液晶层；所述液晶层中分布有多个间隔物；其特征在于，所述间隔物与第一基板和第二基板均接触；所述间隔物包括设置在第一基板上的第一间隔物和设置在第二基板上的第二间隔物，且所述第一间隔物和第二间隔物相抵接。
  2. 如权利要求1所述的液晶移相器，其特征在于，所述第一间隔物和第二间隔物位置相对应。
  3. 如权利要求1所述的液晶移相器，其特征在于，所述第一基板和第二基板之间还具有胶框，所述第一基板、第二基板和胶框组成了壳体。
  4. 如权利要求3所述的液晶移相器，其特征在于，所述胶框包括设置在第一基板的第一胶框和设置在第二基板的第二胶框；第一胶框和第二胶框相抵接，且所述第一胶框和第二胶框位置相对应。
  5. 如权利要求1所述的液晶移相器，其特征在于，所述间隔物为环氧胶或UV胶。
  6. 如权利要求3所述的液晶移相器，其特征在于，所述胶框为环氧胶或UV胶。
  7. 如权利要求1所述的液晶移相器，其特征在于，所述液晶层的厚度不小于100μm。
  8. 如权利要求7所述的液晶移相器，其特征在于，所述液晶层的厚度为100～250μm。
  9. 如权利要求1所述的液晶移相器，其特征在于，所述第一基板的内侧设置有第一电极，所述第二基板的内侧设置有第二电极。
  10. 如权利要求1所述的液晶移相器，其特征在于，所述液晶移相器还包括分别设置在所述液晶层两侧的第一配向层和第二配向层。
  11. 一种液晶移相器的制作方法，其特征在于，用于制作如权利要求1 -10中任一项所述的液晶移相器，所述制作方法包括：
    在第一基板上制作第一间隔物；
    在第二基板上制作第二间隔物；
    将所述第一基板和第二基板进行对盒以形成壳体，且在壳体内填充液晶层。
  12. 根据权利要求11所述的液晶移相器的制作方法，其特征在于，通过丝印的方式在基板上形成第一间隔物和第一间隔物。
  13. 根据权利要求11所述的液晶移相器的制作方法，其特征在于，所述制作方法还包括：在对盒之前，在第一基板和/或第二基板上制作胶框。
  14. 根据权利要求13所述的液晶移相器的制作方法，其特征在于，在第一基板上制作第一胶框；在第二基板上制作第二胶框；
    在制作第一胶框时还同时制作第一间隔物，利用预先制作的具有第一胶框和第一间隔物图案的丝网工具，将胶水转印在第一基板上；
    在制作第二胶框时还同时制作第二间隔物，利用预先制作的具有第二胶框和第二间隔物图案的丝网工具，将胶水转印在第二基板上。
  15. 根据权利要求14所述的液晶移相器的制作方法，其特征在于，所述对盒以形成壳体的方法如下：
    对位贴合：将所述第一基板和第二基板进行对位，对位后贴合；
    热压固化：利用热压装置，将对位贴合好的两个基板进行热压固化以形成具有预定厚度的壳体。
  16. 根据权利要求15所述的液晶移相器的制作方法，其特征在于，在第一基板和第二基板进行对位贴合后，对所述第一基板和第二基板的相对位置进行固定，之后再进行热压固化。
  17. 根据权利要求15所述的液晶移相器的制作方法，其特征在于，在对位贴合之前，先进行预固化，使胶水进行初步固化。
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